TWI773767B - 使用硫基化學品之電漿蝕刻含矽有機膜的方法 - Google Patents
使用硫基化學品之電漿蝕刻含矽有機膜的方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 86
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 239000010703 silicon Substances 0.000 title claims abstract description 36
- 229910052717 sulfur Inorganic materials 0.000 title claims description 8
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 title description 4
- 239000011593 sulfur Substances 0.000 title description 4
- 238000001020 plasma etching Methods 0.000 title description 3
- 239000000463 material Substances 0.000 claims abstract description 107
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000005530 etching Methods 0.000 claims abstract description 44
- 239000007789 gas Substances 0.000 claims abstract description 28
- 239000000126 substance Substances 0.000 claims abstract description 27
- 239000000203 mixture Substances 0.000 claims abstract description 24
- 239000011368 organic material Substances 0.000 claims abstract description 18
- 239000011261 inert gas Substances 0.000 claims abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 230000005284 excitation Effects 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000009616 inductively coupled plasma Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 230000001419 dependent effect Effects 0.000 description 4
- 229910052756 noble gas Inorganic materials 0.000 description 4
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- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 206010001513 AIDS related complex Diseases 0.000 description 1
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- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011066 ex-situ storage Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
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- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
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Abstract
描述一種蝕刻的方法。該方法提供具有由含矽有機材料構成的第一材料及不同於第一材料之第二材料的基板、藉由電漿激發包含SF6
及選用性的惰性氣體之製程氣體而形成化學混合物、將處理壓力控制在100毫托或大於100毫托、及將基板上的第一材料曝露於化學混合物以相對於第二材料選擇性地蝕刻第一材料。
Description
本發明關於一種用於蝕刻的方法,且尤其關於針對電子元件應用而用於蝕刻薄膜的精確蝕刻技術。
此申請案主張下列待審之臨時申請案的優先權:於2017年6月8日申請、題為“METHOD OF PLASMA ETCHING OF SILICON-CONTAINING ORGANIC FILM USING SULFUR-BASED CHEMISTRY”的美國臨時專利申請案序號第62/516,941號,其全部內容於此藉由參照納入本案揭示內容。
本發明關於一種製造諸如積體電路及用於積體電路的電晶體及電晶體元件之半導體元件的方法。在半導體元件的製造中(特別是在微觀尺度上),執行諸多製造製程,諸如成膜沉積、蝕刻遮罩產生、圖案化、材料蝕刻和移除、及摻雜處理係重複地執行以在基板上形成期望的半導體元件。歷史上,使用微製程的情況下,已使電晶體產生在一平面中,而配線/金屬化在上方形成,
且因而以二維(2D)電路或2D製造為特徵。縮放上的努力已大幅增加2D電路中每單位面積之電晶體的數目,然而隨著縮放進入單位數奈米半導體元件製造節點,縮放上的努力遭遇更大的挑戰。半導體元件製造者已表達對於其中電晶體堆疊於彼此的頂部上之三維(3D)半導體元件的期望。
隨著元件結構緻密化及垂直地發展,對於精密材料蝕刻的需求變得更加強烈。在選擇性、輪廓、ARDE(深寬比相依的蝕刻)、及電漿蝕刻製程中的均勻性之間的權衡變得難以管理。目前藉由平衡這些權衡而進行圖案化及圖案轉移的方法係無法長期保持的。這些權衡的根本原因係無法獨立控制離子能量、離子通量、及自由基通量。然而,選擇性電漿蝕刻製程提供一種可行的方法,藉由提供製程窗寬度以實現元件製造商所需的目標蝕刻效能而避開這些權衡。
本文技術關於使用精確蝕刻技術的元件製造。
描述一種蝕刻的方法。該方法包含提供具有由含矽有機材料構成的第一材料及不同於第一材料之第二材料的基板、藉由電漿激發包含SF6及選用性的惰性氣體之製程氣體而形成化學混合物、將處理壓力控制在100毫托或大於100毫托、及將基板上的第一材料曝露於化學混合物以相對於第二材料選擇性地蝕刻第一材料。
當然,如本文描述之不同步驟的討論順序已為了清楚起見而呈現。通常,這些步驟可以任何適當的順序執行。此外,雖然本文各個不同的特
徵、技術、配置等可在本揭示內容的不同地方討論,但吾人欲使各概念可彼此獨立或彼此結合而實行。因此,本發明可以許多不同的方式體現及審視。
注意此發明內容章節未明確指出本揭示內容或所請發明的所有實施例及/或增加的新穎實施態樣。取而代之的是,此發明內容僅提供不同實施例的初步討論、及優於習知技術的新穎性對應點。對於本發明及實施例的額外細節及/或可能的看法,讀者可參照下方進一步討論的實施方式章節及本揭示內容之相對應的圖式。
100:第二材料
102:製程
104:製程
106:製程
110:層
112:圖案
120:層
130:第一材料
132:圖案
140:圖案化遮罩
142:圖案
200:流程圖
210:步驟
220:步驟
230:步驟
240:步驟
在隨附圖式中:圖1描繪根據一實施例之在基板上蝕刻薄膜之方法的示意圖;圖2提供說明根據一實施例之蝕刻基板之方法的流程圖;及圖3A至3D根據諸多實施例提供用於執行蝕刻的方法之電漿處理系統的示意圖。
本文的技術關於使用精確蝕刻技術的元件製造。一些例子顯示在半導體製造中之前段製程(FEOL,例如電晶體製造)直至後段製程(BEOL,例如互連線製造)兩者中,其中遮罩層、氧化物及氮化物膜(通常本質上為含矽的)、矽及金屬層等需要以高精度蝕刻。
半導體製造中的許多製造序列需要用於2D(二維)及3D(三維)元件結構兩者的精確蝕刻技術。儘管如此,三層蝕刻遮罩(例如包含光阻、抗
反射塗層(ARC)、及有機碳膜)仍作為將遮罩圖案化至下方層中的主力。目前的挑戰涉及獲得在沒有加載人造物的情況下之圖案轉移、垂直側壁輪廓、及對ARC層具有極大選擇性的方形底部。連續的電漿蝕刻製程不允許針對如此挑戰的解決方案。
根據諸多實施例,描述使用包含硫基化學品的化學品之精確電漿蝕刻技術以供蝕刻含矽有機材料膜。對於硫基化學品而言,氣態化學品包含硫(S)及鹵素元素(例如:SF6及含SF6的氣體混合物),以供在使用或不使用作為遮罩之諸多層的情況下蝕刻含矽有機膜。尤其,可使用如此化學品以相對於基板上存在及/或曝露的其他材料之選擇性蝕刻含矽有機材料。基板上存在及/或曝露的其他材料可包含矽、碳、金屬、或矽及選自由O、N、C、及Ge所組成之群組的至少一元素。舉例而言,其他材料可包含Si及O。
根據幾個實施例,圖1及2說明蝕刻膜堆疊中之一或更多膜的方法。描繪成流程圖200的方法包含:在步驟210中提供具有由含矽有機材料構成的第一材料130及不同於第一材料130之第二材料100的基板。含矽有機材料可包含具有矽含量重量百分比小於或等於20%的含矽有機材料。或者,含矽有機材料可包含具有矽含量重量百分比大於或等於20%的含矽有機材料。又或者,含矽有機材料可包含具有矽含量重量百分比大於或等於40%的含矽有機材料。含矽有機材料可包括含矽抗反射塗層(ARC)。
如圖1所示,具有穿過其中形成之圖案142的圖案化遮罩140可覆蓋第一材料130。此外,基板可包含位在第一材料130與第二材料100間的一或更多層110、120。舉例而言,圖案化遮罩140可包含光阻。此外,舉例而言,該一
或更多層可包含矽、碳、金屬、或矽、及選自由O、N、C、及Ge所組成之群組的至少一元素。
基板上的第一材料130可經由圖案142曝露於第一化學混合物(選用性地包含電漿),以將圖案132延伸進第一材料130中,其描繪作圖1中的製程102。之後,可將基板經由圖案132曝露於第二化學混合物(選用性地包含電漿),以將圖案112延伸進一或更多層110、120中,其描繪作圖1中的製程104。在圖案轉移期間或在圖案轉移之後,可移除圖案化遮罩140。接著,在圖案化遮罩140的移除之後,移除第一材料130,其描繪作圖1中的製程106。
當移除或蝕刻第一材料130時,在步驟220中藉由電漿激發包含SF6及選用性的惰性氣體之製程氣體而形成化學混合物。在一實施例中,製程氣體包含稀有元素。在另一實施例中,第一製程氣體更包含N2、O2、具有S和O兩者的化合物、或CxHyFz(其中x、y、及z係大於或等於零的整數)、或其組合。在又另一實施例中,製程氣體包含SF6、COS、N2、O2、CH3F、及Ar。可變化各成分的流率。舉例而言,各成分的流率可超過SF6的流率。在另一示例中,SF6之流率的範圍可自1sccm至100sccm、或較佳地自5sccm至30sccm。
在步驟230中,將處理壓力控制為等於或大於100毫托的值。在一實施例中,處理壓力超過150毫托。在另一實施例中,處理壓力超過200毫托。在另一實施例中,處理壓力超過250毫托。在另一實施例中,處理壓力超過300毫托。在又另一實施例中,處理壓力超過500毫托。
在步驟240中,將基板上的第一材料130曝露於化學混合物,以相對於第二材料100選擇性地蝕刻第一材料130。如圖1所示,微影圖案延伸穿過第一材料130,並曝露第二材料100。第二材料100可包含Si及O,且例如可包含
SiO2。在曝光期間,第一材料130實質上被移除,且被移除之第二材料100的量小於或等於5nm,且較佳是小於3nm。
在一些實施例中,在曝露第二材料100之前移除第一材料130。在其他實施例中,在曝露第二材料100之後移除第一材料130。在後者中,當一或更多層110、120存在膜堆疊中時,無氧(例如無O2)的化學品(例如HBr)可用以執行向一或更多層110、120的圖案轉移。
第一製程氣體的電漿激發可原位(即,該第一及/或第二化學混合物在氣相、鄰近接觸基板的真空環境內形成)、或異地(即,該第一及/或第二化學混合物在相對於基板遠程配置之氣相的真空環境內形成)執行。圖3A至3D提供可用以促進電漿激發製程氣體的若干電漿產生系統。圖3A描繪電容耦合電漿(CCP)系統,其中電漿在上板電極(UEL)與下板電極(LEL)之間靠近基板而形成,該下電極亦作為靜電夾頭(ESC)以支撐及固定基板。電漿藉由將射頻(RF)功率耦合至該等電極的其中至少一者而形成。如圖3A所示,RF功率耦合至上及下電極兩者,且功率耦合可包含不同的RF頻率。或者,多個RF功率源可耦合至相同的電極。此外,直流(DC)功率可耦合至上電極。
圖3B描繪感應耦合電漿(ICP)系統,其中電漿在感應元件(例如平面的、或螺線管/螺旋的線圈)與下板電極(LEL)之間靠近基板而形成,該下電極亦作為靜電卡盤(ESC)以支撐及固定基板。電漿藉由將射頻(RF)功率耦合至感應耦合元件而形成。如圖3B所示,RF功率耦合至感應元件及下電極兩者,且功率耦合可包含不同的RF頻率。
圖3C描繪表面波電漿(SWP)系統,其中電漿在槽狀平面天線(slotted plane antenna)與下板電極(LEL)之間靠近基板而形成,該下電極亦
作為靜電夾頭(ESC)以支撐及固定基板。電漿藉由將在微波頻率的射頻(RF)功率經由波導及同軸線耦合至槽狀平面天線而形成。如圖3C所示,RF功率耦合至槽狀平面天線及下電極兩者,且功率耦合可包含不同的RF頻率。
圖3D描繪遠程電漿系統,其中電漿在遠離基板且藉由過濾器與基板分隔的區域中形成,該過濾器配置成阻止帶電粒子從遠程電漿源至靠近基板之處理區域的傳送。基板藉由下板電極(LEL)支撐,該下板電極(LEL)亦作為靜電夾頭(ESC)以容納基板。電漿藉由將射頻(RF)功率耦合至毗鄰位於遠處區域的電漿產生裝置而形成。如圖3D所示,RF功率耦合至毗鄰遠程區域的電漿產生裝置及下電極兩者,且功率耦合可包含不同的RF頻率。
圖3A至3D的電漿處理系統意圖描繪用於實施所描述的步驟式離子/自由基製程的諸多技術。其他實施例係設想包含所描述之系統的組合及變化兩者。
當藉由電漿激發包含惰性氣體(諸如稀有氣體)之第一製程氣體而形成第一化學混合物、且將基板上的第一材料曝露於該第一化學混合物時,用於曝露步驟的氣體壓力可小於或等於1000毫托。舉例而言,氣體壓力的範圍可自10毫托至100毫托。此外,可藉由將RF功率耦合至下板電極(LEL)而對基板施以電性偏壓。RF功率亦可能不施加至電漿產生裝置。
當藉由電漿激發包含S和O(諸如COS或SO2)、O2、及選用性的稀有氣體之第二製程氣體而形成第二化學混合物、且將基板上的第二材料曝露於第二化學混合物時,用於曝露步驟的氣體壓力可小於或等於1000毫托。舉例而言,氣體壓力的範圍可自10毫托至100毫托。此外,可藉由將RF功率耦合至下板電極(LEL)而對基板施以電性偏壓。RF功率亦可能不施加至電漿產生裝置。
當藉由電漿激發包含稀有氣體(例如Ar)之第一製程氣體而形成第一化學混合物、且將基板上的第一材料曝露於該第一化學混合物時,及當藉由電漿激發包含S和O(例如COS或SO2)之第二製程氣體而形成第二化學混合物時,發明人已觀察到循環式電漿蝕刻導致(i)幾乎沒有橫向蝕刻、(ii)幾乎沒有遮罩底切、及(iii)幾乎沒有深寬比相依蝕刻(ARDE)。
在以下的申請專利範圍中,任何附屬項的限制可依附於任何獨立請求項。
在先前的描述中已說明具體細節,諸如處理系統的特殊幾何結構及其中使用的諸多元件與製程的描述。然而應理解,本文技術可在背離這些具體細節的其他實施例中實行,且此等細節係以解釋而非限制為目的。本文揭示的實施例已參考隨附圖式描述。同樣地,為了解釋的目的,已說明特定的數字、材料、及配置以提供完整的理解。僅管如此,實施例可在無如此具體細節的情況下實施。具有實質上相同功能性結構的元件以類似的參考符號表示,且因此可省略任何冗餘的描述。
為了有助於理解諸多實施例,將諸多技術以多個分立操作描述。不應將所述之順序理解成暗示該等操作必定為順序相依。尤其,該等操作不需以敘述的順序執行。所述之操作可以不同於所述實施例的順序執行。在額外的實施例中,可執行諸多額外操作及/或可省略所述之操作。
如本文使用的「基板」或「目標基板」泛指根據本發明所處理的物件。基板可包含元件(尤其是半導體或其他電子元件)的任何材料部分或結構,且例如可為基底基板結構,諸如半導體晶圓、倍縮光罩、或基底基板結構之上或覆蓋基底基板結構的一層(諸如薄膜)。因此,基板不限於任何特定的
基底結構、下方層或覆蓋層、圖案化或未圖案化,而是設想為包含任何如此的層或基底結構、及層及/或基底結構的任何組合。此描述可能論及特定類型的基板,但此僅用於說明之目的。
精於本項技術之人士亦將理解對於以上所述技術的操作,可做出許多變化,且仍達到本發明的相同目標。如此變化意圖由本揭示內容的範圍所包含。因此,本發明之實施例的先前描述非意圖為限制性的。更準確地說,本發明之實施例的任何限制係呈現於以下申請專利範圍中。
200‧‧‧流程圖
210‧‧‧步驟
220‧‧‧步驟
230‧‧‧步驟
240‧‧‧步驟
Claims (21)
- 一種蝕刻的方法,包含:提供具有一圖案化遮罩、由含矽有機材料構成的經由該圖案化遮罩之圖案而曝露的第一材料、不同於該第一材料之第二材料、以及位於該第一材料與該第二材料之間的複數層的一基板;藉由電漿激發包含SF6及選用性的惰性氣體之製程氣體而形成化學混合物;將處理壓力控制在100毫托或大於100毫托;及將該基板上的該第一材料曝露於該化學混合物,以選擇性地蝕刻該第一材料,並且從而將該圖案化遮罩之該圖案延伸進入該第一材料,以形成一圖案化第一材料並且經由該圖案化第一材料而曝露該複數層之其中一者;經由形成於該圖案化第一材料中之一圖案而蝕刻該複數層,以經由該複數層而曝露該第二材料;在蝕刻該複數層之步驟之後,移除該圖案化第一材料之剩餘部分,其中在移除該圖案化第一材料之該剩餘部分之步驟之至少部分期間,該第二材料係經由該複數層而曝露,並且其中該移除該第一材料之該剩餘部分之步驟包含使用一移除氣體混合物,其包含SF6。
- 如申請專利範圍第1項之蝕刻的方法,其中,該含矽有機材料具有重量百分比小於或等於20%並且大於0%的矽含量。
- 如申請專利範圍第1項之蝕刻的方法,其中,該含矽有機材料具有重量百分比大於或等於40%並且小於100%的矽含量。
- 如申請專利範圍第1項之蝕刻的方法,其中,該含矽有機材料係含矽抗反射塗層(SiARC)。
- 如申請專利範圍第1項之蝕刻的方法,其中,該第二材料包含Si及O。
- 如申請專利範圍第5項之蝕刻的方法,其中,該第二材料包含SiO2。
- 如申請專利範圍第5項之蝕刻的方法,其中在移除該圖案化第一材料之剩餘部分而同時曝露該第二材料期間,被移除之該第二材料的量小於或等於5nm。
- 如申請專利範圍第5項之蝕刻的方法,其中,在移除該圖案化第一材料之剩餘部分而同時曝露該第二材料期間,被移除之該第二材料的量小於或等於3nm。
- 如申請專利範圍第1項之蝕刻的方法,其中,該複數層包含矽、碳、或矽及選自由O、N、C、及Ge所組成之群組的至少一元素。
- 如申請專利範圍第1項之蝕刻的方法,其中,該製程氣體包含一稀有元素。
- 如申請專利範圍第1項之蝕刻的方法,其中,該製程氣體更包含N2、O2、具有S和O兩者的化合物、或CxHyFz、或其組合,其中x、y、及z係大於或等於零的整數。
- 如申請專利範圍第1項之蝕刻的方法,其中,該處理壓力係在200毫托或大於200毫托。
- 如申請專利範圍第1項之蝕刻的方法,其中,該電漿激發該製程氣體的步驟,包括使用包含一上板電極及支撐該基板之一下板電極的一電容耦合電漿源產生電漿。
- 如申請專利範圍第1項之蝕刻的方法,其中,該電漿激發該製程氣體的步驟,包括使用包含一感應元件及支撐該基板之一下板電極的一感應耦合電漿源產生電漿。
- 一種蝕刻的方法,包含:提供具有由含矽有機材料構成的第一材料及不同於該第一材料之第二材料的一基板;藉由電漿激發包含SF6及選用性的惰性氣體之製程氣體而形成化學混合物;控制在處理空間中之處理壓力;及將該基板上的該第一材料曝露於該化學混合物,以相對於該第二材料而選擇性地蝕刻該第一材料;其中,微影圖案延伸穿過該第一材料,並曝露該第二材料;其中,該基板包含在該第一材料與該第二材料之間的一或更多層;以及其中,使用無氧蝕刻製程將該微影圖案延伸穿過在該第一材料與該第二材料之間的該一或更多層。
- 如申請專利範圍第15項之蝕刻的方法,其中,該無氧蝕刻製程包含HBr。
- 如申請專利範圍第15項之蝕刻的方法,其中,在該微影圖案延伸穿過在該第一材料與該第二材料之間的該一或更多層之後,在曝光期間,該第一材料實質上被移除。
- 一種蝕刻的方法,包含:提供具有一圖案化遮罩、經由該圖案化遮罩而曝露的第一材料、位於該第一材料下方的一第二材料、以及位於該第一材料與該第二材料之間的至少一中間層的一基板,其中,該第一材料包含一含矽有機材料,並且該第二材料包含Si及O;經由該圖案化遮罩而蝕刻該第一材料,以形成一圖案化第一材料,該中間層係經由該圖案化第一材料加以曝露;經由該圖案化第一材料而蝕刻該至少一中間層,以經由該至少一中間層而曝露該第二材料;以及在曝露該第二材料之後,使用包含SF6的一移除氣體而移除該圖案化第一材料之剩餘部分,使得該圖案化第一材料係相對於該第二材料而選擇性地移除。
- 如申請專利範圍第18項之蝕刻的方法,其中,在移除該圖案化第一材料之該剩餘部分而同時曝露該第二材料期間,被移除的該第二材料之量係小於或等於5nm。
- 如申請專利範圍第18項之蝕刻的方法,其中,該第一材料係一含矽抗反射塗層,並且該第二材料包含SiO2。
- 如申請專利範圍第18項之蝕刻的方法,其中:該蝕刻該至少一中間層之步驟包含一無氧蝕刻製程;以及在移除該圖案化第一材料之該剩餘部分之步驟期間,將製程壓力控制為100毫托或大於100毫托。
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