TWI763484B - Semiconductor automated storage cabinet - Google Patents

Abstract

The present invention reveals a semiconductor automated storage cabinet, wherein a storage space and an automatic arm which is mounted at the center of the storage space. At least one side of the automatic comprises least one storage device provided in the storage space. The storage device, from top to bottom, contains a plenty of storage columns. Each storage columns, along the upper or lower direction, protrudes toward to the automatic arm compared to the storage row below or above it. Thus, the side face of the storage device presents an inclined curve which toward to the automatic arm.

Description

Semiconductor automated storage cabinet

A storage cabinet, especially a semiconductor automatic storage cabinet.

The invention of semiconductor integrated circuit (IC) has enabled the rapid and advanced development of the technology industry in modern life, enabling people to obtain a richer and more convenient life, and the application level of semiconductors not only covers the intelligent With the development of 5G communication, AI smart technology and IoT Internet of Things, semiconductors have become the key application basis for many technology industries.

In semiconductors, a finished wafer involves the operation of an entire technological device, which makes the quality requirements of the finished wafer extremely important. When the finished wafer needs to be manufactured in large quantities or efficiently, the transfer of the wafer between the various step equipment becomes the key to the quality of the finished wafer. However, when the wafer is in a preparation period between the upper and lower production step equipment, it is mostly stored manually in a temporary storage cabinet for waiting, which often results in personnel and time cost loss and Increase in defective rate due to contact.

In view of this, when the wafers are stored in the temporary storage cabinet, the cost of personnel and time can be reduced, and the generation of defective rates can be reduced, which is the goal that the related manufacturing industry needs to develop.

In order to develop a technology that can reduce personnel and time costs when a wafer is stored in a storage cabinet, the present invention provides a semiconductor automated storage cabinet, which includes a storage space and an automatic arm located in the center of the storage space, wherein the The automatic arm includes a gripping end and a certain point base, the gripping end defines a sphere-like gripping range to the fixed-point base, and the gripping range forms a gripping path on any projection surface; and the The storage space includes more than one continuous surface and a plurality of storage devices arranged on the continuous surface, and the storage devices are correspondingly arranged on the clamping path.

Wherein, at least one side of the automatic arm is provided with a storage device, and the storage device includes a plurality of storage rows from top to bottom, and at least one of the storage rows corresponds to the gripping range compared to the lower one. The storage row is protruded toward the direction of the automatic arm.

Wherein, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the holding range relative to the top of the fixed-point base, and the position above at least one of the storage rows corresponding to the horizontal reference plane Each of the storage rows is sequentially arranged to protrude toward the automatic arm compared to the storage row below it.

Wherein, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the gripping range relative to the bottom of the fixed-point base, and the position below at least one of the storage rows corresponding to the horizontal reference point Each of the storage rows is sequentially arranged to protrude toward the automatic arm compared to the storage row above it.

Wherein, a plurality of storage positions are arranged at intervals on the storage row, and at least part of the storage positions on the outer sides of both ends of the storage row on the storage device are protruded toward the automatic arm direction compared with the storage positions on the inner side thereof.

Wherein, each of the storage rows protrudes from one-fifth to one-half of its overall depth in the direction of the automatic arm compared to the storage row located below or above the storage row.

Wherein, the storage position relatively located on the outer side protrudes from one-fifth to one-half of the overall depth in the direction of the automatic arm compared to the inner side of the storage position

Further, two second storage devices are provided on the left and right sides of one of the side surfaces of the automatic arm, and the other three side surfaces of the automatic arm are respectively provided with one of the storage devices, wherein the middle of the two second storage devices. An interval distance is generated, and the position of the interval distance corresponds to a dead angle of a rotation axis of the automatic arm.

Further, the storage device is correspondingly disposed on the four sides of the automatic arm, and the position of the automatic arm is the same as the vertical distance of each storage device.

Further, five of the storage devices are equidistantly arranged around the automatic arm.

The advantages that the semiconductor automatic storage cabinet provided by the present invention can achieve are: 1. Each of the storage devices is equidistantly arranged around the automatic arm, so that the storage space can achieve the best space utilization and increase the overall storage capacity. 2. At least one of the storage rows conforming to the gripping range is protruded from the storage row below or above the storage row, which can better shorten the travel distance of the automatic arm and improve the operation efficiency of the automatic arm. 3. Compared with the storage position on the outer side of both ends of the storage row, the storage position on the inner side of the storage position conforms to the gripping range and protrudes toward the automatic arm, which can better shorten the travel distance of the automatic arm. Improve the working efficiency of the automatic arm. 4. The storage device can be designed to adapt to various types of the automatic arm, such as the dead angle of the rotating shaft, to maximize the use.

Please refer to FIG. 1 and FIG. 2 , which are preferred embodiments of the semiconductor automated storage cabinet provided by the present invention, including a storage space 10 and an automatic arm 20 located in the center of the storage space 10 . The storage space 10 includes more than one continuous surface, and a plurality of storage devices 11 are arranged corresponding to the continuous surface; the automatic arm 20 includes a gripping end 21 and a certain point base 22, and the gripping end 21 should be fixed to the point The base 22 defines a quasi-spherical gripping area, wherein the gripping area forms a gripping path on any projection plane, and the gripping path is set corresponding to the storage device.

In this embodiment, at least one side surface of the automatic arm 20 includes at least one storage device 11 , and the storage device 11 includes a plurality of storage rows 111 corresponding to the gripping path from top to bottom in the form of a shelf. A plurality of storage positions 1111 are arranged at horizontal intervals on each of the storage rows 111 , and the side of each storage position 1111 facing the robot arm 20 is an open end, and the open end of each storage row 111 corresponds to the clip Taking the path setting, the automatic arm 20 can place a storage box to the open end in one of the storage positions 1111 through the gripping device 21 . Further, the robotic arm 20 can be connected to an external device located outside the storage space 10 , through which the robotic arm 20 can be manipulated to move arbitrarily in the storage space 10 to form the gripping path.

Preferably, the four sides of the automatic arm 20 are provided with a storage device 11, and the position of the automatic arm 20 is the same as the vertical distance of each storage device 11. Four sides of the automatic arm 20 can also be arranged with five storage devices 11 equidistantly surrounding the center of the automatic arm 20 , so that the storage space 10 can achieve optimal space utilization and increase the overall storage capacity.

Wherein, at least one of the storage rows 111 in each of the storage devices 11 is disposed protruding toward the automatic arm 20 compared to the storage row 111 below the storage row 111 corresponding to the gripping range, so that the storage device 11 is viewed from a side angle. , a side surface of the storage device 11 facing the automatic arm 20 presents a spherical curve extending toward the automatic arm 20 along the upper direction. In this embodiment, each storage device 11 from top to bottom includes 8 storage devices. Row 111, and the size of each storage row 111 is the same, wherein the three storage rows 111 located at the top are respectively arranged to protrude toward the automatic arm 20 by about a third of the whole compared to the storage row 111 below the storage row 111 distance of one.

In this embodiment, the size of each of the storage rows 111 is not limited to be the same, and the open ends of the plurality of storage rows 111 are arranged in a spherical direction corresponding to the gripping range toward the automatic arm 20 to achieve the characteristics of the present invention .

Please refer to FIG. 3A , define the position of the positioning base 22 as a horizontal reference plane A, and the clamping end 21 can form the clamping range D relative to the upper part of the positioning base 22 , where the horizontal reference plane A is located. Each of the storage rows 111 above the corresponding at least one storage row 111 is sequentially arranged to protrude toward the automatic arm 20 compared with the storage row 111 below it, and is opposite to each of the storage rows 111 located above. Compared to the lower storage row 111 , the protruding direction toward the automatic arm 20 is between one-fifth and one-half of the overall depth.

The protruding structure of each storage row 111 in the upward direction compared to the storage row 111 below it, so that when the robot arm 20 moves to each storage position 1111 above the horizontal reference point, it can be better The travel distance of the automatic arm 20 is shortened, and the operation efficiency of the automatic arm 20 is improved.

Please refer to FIG. 3B , which is the second preferred embodiment of the present invention. Each storage row 111 may not be limited to protruding in the upward direction toward the automatic arm 20 . In this embodiment, the fixed-point base is defined. The position 22 is a horizontal reference plane A, and the gripping end 21 can form the gripping range D relative to the lower part of the fixed-point base 22 , and each position under the at least one storage row 111 corresponding to the horizontal reference plane A is formed. The storage rows 111 are arranged in a protruding and staggered arrangement in the direction of the robot arm 20 compared to the storage row 111 above it, and each storage row 111 located at the bottom is oriented relative to the storage row 111 located at the top. The automatic arm 20 protrudes in a direction between one-fifth and one-half of the overall depth.

Or, each of the storage rows 111 above or below the storage row 111 with respect to the portion corresponding to the horizontal reference plane A is in the upper or lower direction, and the storage row 111 below or above the storage row 111 faces the Automatic arm 20-direction protruding settings.

Preferably, corresponding to the gripping range, the storage positions 1111 on the outer sides of at least a part of the two ends of the storage row 111 of the storage device 11 are disposed protruding toward the automatic arm 20 compared with the storage positions 1111 on the inner side thereof, And the storage position 1111 located on the outer side protrudes from one-fifth to one-half of the overall depth compared to the inner side of the storage position 1111 toward the automatic arm 20, so that the storage device 11 can be more suitable for the clip. Taking the spherical shape of the range, the automatic arm 20 can relatively shorten the travel distance of each of the storage positions 1111 on both sides of the storage device 11 , thereby improving the operation efficiency of the automatic arm 20 .

Further, in accordance with the mechanical structure of the automatic arm 20, two second storage devices 11A are provided on one side of the automatic arm 20 corresponding to a dead angle of a rotating shaft, and the other three sides of the automatic arm 20 correspond to each other. There is one of the storage devices 11, and two of the second storage devices 11A are arranged at intervals on the left and right sides of one of the side surfaces, so that a distance 12 is formed between the two second storage devices 11A, and the distance 12 is located in the same position. There should be a dead end of the shaft. The setting of the separation distance 12 can prevent the storage space 10 from being ineffectively used, and a door that can communicate with the outside of the storage space 10 can also be set at a position corresponding to the separation distance 12, so that a person can enter and exit the storage space 10 through the door. , so that the storage device 11 can be designed to adapt to various types of the robot arm 20 to maximize the use.

The advantages that the semiconductor automatic storage cabinet provided by the present invention can achieve are: 1. Each of the storage devices 11 is equidistantly arranged around the automatic arm 20, so that the storage space 10 can achieve optimal space utilization and increase the overall storage capacity. 2. At least one of the storage rows 111 conforms to the structural characteristics of the protruding arrangement of the storage row 111 below or above the storage row 111 in the gripping range, so that the travel distance of the automatic arm 20 can be shortened and the automatic arm can be raised. 20 operating efficiency. 3. The storage positions 1111 on the outer sides of the two ends of the storage row 111 are arranged to protrude toward the automatic arm 20 in accordance with the gripping range, and the automatic arm can be shortened. The travel distance of 20 can improve the working efficiency of the automatic arm 20 . 4. The storage device 11 can be designed to adapt to various types of the automatic arm 20, such as the dead angle of the rotating shaft, to maximize the use.

10: Storage space 11: Storage device 11A: Second storage device 111: Storage column 1111: storage bit 12: separation distance 20: Automatic Arm 21: Clamping device 22: Fixed-point base D: gripping range

FIG. 1 is a first three-dimensional schematic diagram of a preferred embodiment of the present invention. FIG. 2 is a second perspective view of the preferred embodiment of the present invention. Figure 3 is a schematic diagram of a preferred embodiment of the present invention

10: Storage space

11: Storage device

11A: Second storage device

111: Storage column

1111: storage bit

12: separation distance

Claims (8)

A semiconductor automatic storage cabinet, which includes a storage space and an automatic arm located in the center of the storage space, wherein: the automatic arm includes a clamping end and a certain point base, and the clamping end defines a A quasi-spherical gripping area, the gripping area forms a gripping path on any projection surface; and the storage space includes more than one continuous surface and a plurality of storage devices disposed on the continuous surface, and the storage devices correspond to set on the gripping path, wherein: the storage device includes a plurality of storage rows from top to bottom, and at least one of the storage rows faces the automatic The arm direction is protruding and forms a kind of spherical curve; and a plurality of storage positions are arranged at intervals on the storage row, and at least part of the storage positions on the outer sides of both ends of the storage row are oriented toward the automatic storage position compared with the storage positions on the inner side. Arm direction protruding settings. According to the semiconductor automated storage cabinet described in claim 3, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the holding range relative to the upper part of the fixed-point base, and the position of the fixed-point base is defined as the horizontal reference plane. Each of the storage rows above the corresponding at least one storage row is sequentially arranged to protrude toward the automatic arm compared to the storage row below the storage row. According to the semiconductor automated storage cabinet described in claim 1 or 2, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the gripping range relative to the lower part of the fixed-point base, at the horizontal reference Each of the storage rows below the at least one storage row corresponding to the point is sequentially arranged to protrude toward the automatic arm compared to the storage row above it. The semiconductor automated storage cabinet according to claim 3, each of the storage rows protrudes from one-fifth to one-half of its entire depth toward the automatic arm compared to the storage row located below or above the storage row. In the semiconductor automated storage cabinet according to claim 4, the storage position located on the outer side protrudes from one-fifth to one-half of the entire depth in the direction of the automatic arm compared to the inner side of the storage position. According to the semiconductor automated storage cabinet described in claim 5, two second storage devices are provided on the left and right sides of one side of the automatic arm, and one of the storage devices is corresponding to the other three sides of the automatic arm, wherein , a distance is generated between the two second storage devices, and the position of the distance corresponds to a dead angle of a rotating shaft of the automatic arm. According to the semiconductor automatic storage cabinet as claimed in claim 5, the storage device is correspondingly disposed on four sides of the automatic arm, and the position of the automatic arm is the same as the vertical distance of each storage device. According to the semiconductor automatic storage cabinet described in claim 5, five of the storage devices are arranged equidistantly around the automatic arm.

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