TWM619869U - Automated semiconductor storage cabinet - Google Patents

Abstract

The present model provides a semiconductor automated storage cabinet, which includes a storage space and an automatic arm located in the center of the storage space. In the storage space, at least one storage device is arranged on at least one side surface of the automatic arm. The lower part contains a plurality of storage rows, and each storage row is along the upper or lower direction, and is arranged protruding toward the automatic arm compared to the storage row below or above it, so that the side of the storage device faces the automatic arm One side of, presents a curve slanted toward the automatic arm.

Description

Semiconductor automated storage cabinet

A storage cabinet, especially a semiconductor automated storage cabinet.

The new type of semiconductor integrated circuit (Integrated circuit: IC) has enabled the rapid and advanced development of the technology industry in modern life, enabling people to obtain a richer and more convenient life, and the application level of semiconductors not only covers the intelligent type used in people’s livelihoods. With the development of mobile phones, automobiles, and the Internet, with the development of 5G communications, AI smart technology, and the Internet of Things, semiconductors have become the basis for key applications in a number of technology industries.

In semiconductors, a finished wafer involves the operation of a whole technological equipment, making the quality requirements of the finished wafer extremely important. When a large amount or efficient manufacture of the finished wafer is required, the transfer of the wafer between the equipment in each step becomes the key to the quality of the finished wafer. However, when the wafer is in a preparation period between the upper and lower production steps of the equipment, it is mostly manually stored in a temporary storage cabinet for waiting, and this method often results in personnel and time costs and losses. Increase in defective rate due to contact.

In view of this, the development of the wafer storage in the temporary storage cabinet can reduce personnel and time costs, and reduce the generation of defective rates, which is a goal that the related manufacturing industry needs to develop.

In order to develop a technology that can reduce personnel and time costs when a wafer is stored in a storage cabinet, the present invention provides a semiconductor automated storage cabinet that includes a storage space and An automatic arm in the center of the storage space, wherein the automatic arm includes a gripping end and a fixed-point base. The gripping end defines a spherical gripping range for the fixed-point base, and the gripping range is Any projection surface forms a gripping path; and the storage space includes more than one continuous surface and a plurality of storage devices arranged on the continuous surface, and the storage device is correspondingly arranged on the gripping path.

Wherein, at least one side of the automatic arm is provided with a storage device, the storage device includes a plurality of storage rows from top to bottom, and at least one of the storage rows corresponds to the gripping range compared to the storage row below it. The storage row is arranged protrudingly toward the direction of the automatic arm.

Wherein, the position of the fixed-point base is defined as a horizontal reference surface, and the gripping end can form the gripping range relative to the top of the fixed-point base, above at least one of the storage rows corresponding to the horizontal reference surface Each of the storage rows protrudes toward the direction of the automatic arm compared to the storage row below them in sequence.

Wherein, the position of the fixed-point base is defined as a horizontal reference surface, and the gripping end can form the gripping range relative to the bottom of the fixed-point base, at least one of the storage rows corresponding to the horizontal reference point Each of the storage rows protrudes from the storage row above the storage row toward the direction of the automatic arm in sequence.

Wherein, a plurality of storage positions are arranged on the storage row at intervals, and at least part of the storage positions on the outer sides of the two ends of the storage row on the storage device protrudes toward the direction of the automatic arm compared to the storage positions on the inner side.

Wherein, each storage row protrudes between one-fifth to one-half of its overall depth in the direction of the automatic arm compared to the storage row located below or above.

Wherein, the storage position relatively located on the outer side protrudes between one-fifth to one-half of the overall depth compared to the storage position on the inner side toward the automatic arm.

Further, the left and right sides of one side of the automatic arm are provided with two second storage devices, and the other three sides of the automatic arm are each corresponding to one of the storage devices, wherein two A separation distance is generated between the second storage device, and the separation distance position corresponds to a dead angle of the rotating shaft of the automatic arm.

Further, the four sides of the automatic arm are correspondingly provided with the storage device, and the position of the automatic arm is the same as the vertical distance of each storage device.

Further, five storage devices are equidistantly arranged around the center of the automatic arm.

The advantages that the semiconductor automated storage cabinet provided by this model can achieve are:

1. Each storage device is equidistantly arranged around the center of the automatic arm, so that the storage space can achieve the best space utilization and increase the overall storage capacity.

2. The structural characteristics of at least one storage row along the gripping range compared to the storage rows below or above it are protrudingly arranged, which can better shorten the stroke distance of the automatic arm and improve the working efficiency of the automatic arm.

3. The storage positions on the outer sides of the two ends of the storage row are arranged protrudingly toward the automatic arm compared with the storage positions on the inner side of the storage position in accordance with the gripping range, which can better shorten the stroke distance of the automatic arm. Improve the working efficiency of the automatic arm.

4. The storage device can be designed to adapt to various types of automatic arms, such as the dead angle of the rotating shaft, to maximize the use.

10: Storage space

11: storage device

11A: Second storage device

111: Storage Row

1111: storage location

12: separation distance

20: Automatic arm

21: Clamping device

22: fixed-point base

D: Clamping range

Figure 1 is the first perspective view of the preferred embodiment of the new model

Figure 2 is a second three-dimensional schematic diagram of the preferred embodiment of the new type

3A is a schematic diagram of the first preferred embodiment of the new type

Figure 3B is a schematic diagram of the second preferred embodiment of the new type

Please refer to FIGS. 1 and 2, which are a preferred embodiment of the semiconductor automated storage cabinet provided by the present invention, which includes a storage space 10 and an automatic arm 20 located in the center of the storage space 10. The storage space 10 includes more than one continuous surface, and a plurality of storage devices 11 are provided corresponding to the continuous surface; the automatic arm 20 includes a gripping end 21 and a fixed point base 22, and the gripping end 21 is fixed to the corresponding The base 22 defines a gripping range that is a spherical shape, wherein the gripping range forms a gripping path on any projection surface, and the gripping path is arranged corresponding to the storage device.

In this embodiment, at least one side of the automatic arm 20 contains at least one storage device 11, and the storage device 11 includes a plurality of storage rows 111 corresponding to the gripping path from top to bottom in the form of a shelf. A plurality of storage positions 1111 are arranged at horizontal intervals on each storage row 111, and each storage position 1111 has an open end facing the side of the automatic arm 20, and the open end of each storage row 111 corresponds to the clip By setting the access path, the automatic arm 20 can place a storage box to the open end in one of the storage positions 1111 through the clamping device 21. Further, the automatic arm 20 can be connected to an external device located outside the storage space 10, and the automatic arm 20 can be controlled to move arbitrarily in the storage space 10 through the external device to form the gripping path.

Preferably, the four sides of the automatic arm 20 are provided with a storage device 11, and the position of the automatic arm 20 is the same as the vertical distance of each storage device 11, and the storage device 11 is not limited to only being installed at On the four sides of the automatic arm 20, five storage devices 11 can also be arranged equidistantly around the center of the automatic arm 20, so that the storage space 10 can achieve the best space utilization and increase the overall storage capacity.

Wherein, at least one of the storage rows 111 of each storage device 11 is arranged to protrude toward the automatic arm 20 compared to the storage row 111 below it corresponding to the gripping range, so that when the storage device 11 is viewed from a side angle , The storage device 11 is facing the side of the automatic arm 20 A type of spherical curve extending towards the automatic arm 20 in a square direction. In this embodiment, each storage device 11 includes eight storage rows 111 from top to bottom, and each storage row 111 has the same size. Among them, the three storage rows 111 located at the top protrude from the storage row 111 below them to the direction of the automatic arm 20 by approximately one-third of the entire distance.

In this embodiment, the size of each storage row 111 is not limited to be the same. The open ends of a plurality of storage rows 111 corresponding to the gripping range are arranged in a spherical shape toward the automatic arm 20 and can achieve the characteristics of the present invention. .

Please refer to FIG. 3A, the position of the fixed-point base 22 is newly defined as a horizontal reference plane A, and the gripping end 21 can form the gripping range D relative to the upper side of the fixed-point base 22, on the horizontal reference plane A The corresponding at least one storage row 111 above each storage row 111 is arranged in a protruding arrangement toward the automatic arm 20 compared to the storage row 111 below it, and each storage row located relatively above Compared with the storage row 111 located below, it protrudes between one-fifth to one-half of the overall depth toward the automatic arm 20.

The structural characteristics of each storage row 111 protrudingly arranged in the upper direction compared to the storage row 111 below it, so that when the automatic arm 20 moves to each of the storage positions 1111 above the horizontal reference point, it can be better The stroke distance of the automatic arm 20 is shortened, and the working efficiency of the automatic arm 20 is improved.

Please refer to FIG. 3B, which is the second preferred embodiment of the new type. Each storage row 111 may not be limited to protruding from the upper direction toward the automatic arm 20. In this embodiment, the fixed-point base is defined The position 22 is a horizontal reference surface A, and the gripping end 21 can form the gripping range D relative to the bottom of the fixed-point base 22, and each of at least one of the storage rows 111 corresponding to the horizontal reference surface A can form the gripping range D. The storage row 111 is arranged in a protruding and staggered arrangement relative to the storage row 111 above it in the direction of the automatic arm 20, and each storage row 111 located relatively below is oriented in comparison with the storage row 111 located above it. The direction of the automatic arm 20 protrudes between one-fifth to one-half of the overall depth.

Or, with respect to the portion corresponding to the horizontal reference plane A, each of the storage rows 111 above or below the storage row 111 is along the upper or lower direction, compared to the storage row 111 below or above the storage row 111 facing the Automatic arm 20-direction protruding setting.

Preferably, corresponding to the clamping range, at least a part of the storage positions 1111 outside the two ends of the storage row 111 of the storage device 11 protrude toward the automatic arm 20 compared to the storage positions 1111 inside. Compared with the storage position 1111 located on the outer side, the storage position 1111 protrudes between one-fifth to one-half of the overall depth toward the automatic arm 20, so that the storage device 11 can be more in line with the clip. Taking the spherical shape of the range, the automatic arm 20 can relatively shorten the travel distance of each storage position 1111 on both sides of the storage device 11, thereby improving the working efficiency of the automatic arm 20.

Further, in accordance with the mechanical structure of the automatic arm 20, two second storage devices 11A are provided on one of the side surfaces of the automatic arm 20 corresponding to a dead corner of a rotating shaft, and the other three side surfaces of the automatic arm 20 correspond to each There is one storage device 11, and two second storage devices 11A are spaced apart on the left and right sides of one of the side surfaces, so that there is a separation distance 12 between the two second storage devices 11A, and the separation distance 12 is aligned with each other. There should be a dead angle on the shaft. The setting of the separation distance 12 can prevent the storage space 10 from being ineffectively used, and an opening door that can communicate with the outside of the storage space 10 can be provided at a position corresponding to the separation distance 12, so that a person can enter and exit the storage space 10 through the opening door. In this way, the storage device 11 can be designed to be adapted to various types of the automatic arm 20 to maximize the use.

The advantages that the semiconductor automated storage cabinet provided by this model can achieve are:

1. The storage devices 11 are arranged equidistantly around the automatic arm 20, so that the storage space 10 can achieve the best space utilization and increase the overall storage capacity.

2. At least one of the storage rows 111 conforming to the gripping range is compared with the storage rows 111 below or above the protruding structure, which can better shorten the stroke distance of the automatic arm 20 and raise the automatic arm 20 operating efficiency.

3. The storage positions 1111 on the outer sides of the two ends of the storage row 111 are arranged protruding toward the automatic arm 20 compared with the storage positions 1111 on the inner side of the gripping range, which can shorten the automatic arm better. The stroke distance of 20 improves the working efficiency of the automatic arm 20.

4. The storage device 11 can be designed to adapt to various types of the automatic arm 20, such as the dead angle of the rotating shaft, to maximize the use.

10: Storage space

11: storage device

11A: Second storage device

111: Storage Row

1111: storage location

12: separation distance

Claims (10)

A semiconductor automated storage cabinet includes a storage space and an automatic arm located in the center of the storage space, wherein: The automatic arm includes a gripping end and a fixed-point base, the gripping end defines a spherical gripping range for the fixed-point base, and the gripping range forms a gripping path on any projection surface; and The storage space includes more than one continuous surface and a plurality of storage devices arranged on the continuous surface, and the storage device is correspondingly arranged on the clamping path. According to the semiconductor automated storage cabinet of claim 1, at least one side of the automatic arm is provided with a storage device, and the storage device includes a plurality of storage rows from top to bottom, and at least one of the storage rows corresponds to Compared with the storage row below the clamping range, the storage row protrudes toward the direction of the automatic arm. For the semiconductor automated storage cabinet described in claim 2, the position of the fixed-point base is defined as a horizontal reference surface, and the gripping end can form the gripping range relative to the upper side of the fixed-point base, and is located on the horizontal reference surface. The storage rows above the corresponding at least one storage row are sequentially arranged to protrude toward the automatic arm direction compared with the storage rows below the storage row. For the semiconductor automated storage cabinet described in claim 2 or 3, the position of the fixed-point base is defined as a horizontal reference surface, and the gripping end can form the gripping range relative to the bottom of the fixed-point base, and the horizontal reference The storage rows below the at least one storage row corresponding to the points are sequentially arranged protruding toward the direction of the automatic arm compared to the storage row above the storage row. According to the semiconductor automated storage cabinet according to claim 4, a plurality of storage positions are arranged on the storage row at intervals, and at least part of the storage positions on the outer sides of the two ends of the storage row on the storage device are compared with the storage positions on the inner side of the storage device. The position is set to protrude toward the direction of the automatic arm. In the semiconductor automated storage cabinet according to claim 5, each storage row protrudes between one-fifth to one-half of its overall depth toward the automatic arm compared to the storage row located below or above. In the semiconductor automated storage cabinet according to claim 6, the storage location located on the outer side of the storage location protrudes between one-fifth and one-half of the overall depth toward the automatic arm compared to the storage location on the inner side. For the semiconductor automated storage cabinet described in claim 7, two second storage devices are provided on the left and right sides of one side of the automatic arm, and the other three sides of the automatic arm are each corresponding to one of the storage devices, wherein , A separation distance is generated between the two second storage devices, and the separation distance position corresponds to a dead angle of the rotating shaft of the automatic arm. For the semiconductor automated storage cabinet described in claim 7, the four sides of the automatic arm are correspondingly provided with the storage device, and the position of the automatic arm is the same as the vertical distance of each storage device. For the semiconductor automated storage cabinet described in claim 7, five storage devices are equidistantly arranged around the center of the automated arm.

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