TWI763413B - Air Environment Control System - Google Patents

Abstract

The present invention provides an air environment control system, which is arranged on the inner side of a casing, and is connected to To collect a fluid, the air environment control system utilizes a first filter element and a water washing element to filter the fluid flowing through it to reduce the particle content in it, control the temperature of the fluid with a first temperature control element, and dehumidify the fluid with a first temperature control element. The component reduces the moisture content of the fluid, so that the system reduces the particles in the air, and at the same time controls its temperature and humidity, and uses an air supply component to pump the fluid so that it flows in each channel in the air environment control system, using this The system controls air changes in the environment.

Description

Air Environment Control System

The present invention relates to an air environment control system, especially a system for controlling the air environment inside a factory.

With the development of the times, almost all technological devices in today's life are based on semiconductor chips, which are controlled by editable applications to perform various functions. The application level of semiconductors covers smartphones, automobiles, networks, cloud data, industrial automation, smart homes and various consumer electronic products. The industry has an increasing demand for the development of key semiconductor technologies and the supply of components, driving the overall potential market stability. expansion.

With the introduction of new chips in various fields, the wire diameter of semiconductor wires is gradually reduced, and the impact of air particles inside the factory is also increasing. Therefore, the control and monitoring methods of gaseous molecular pollutants (AMC) have gradually received attention.

The trace pollutants that exist in the air in gaseous form at normal temperature and pressure, although the content does not cause personal injury, but are sufficient to affect the product are called gaseous molecular pollutants (AMC). According to their nature, AMC can be divided into the following categories.

1.MA, molecular acid (acid): a corrosive substance with the chemical reaction characteristics of an electron acceptor. Such as: HF, H2SO4, HCl, HNO3, H3PO4, HBO3.

2.MB, molecular base (base): a corrosive substance with the chemical reaction characteristics of an electron donor. Such as ammonia, tetramethylammonium hydroxide(TMAH), trimethylamine, triethylamine, trimethyldisilazane, hexamethyldisilazane (HMDS), 1-methyl-2-pyrrolidone (NMP), cyclohexylamine, diethylaminoethanol, methylamine, dimethylamine, ethanolamine.

3. MC, condensable: Substances other than water, whose boiling point is greater than room temperature under atmospheric pressure, have the ability to condense on clean surfaces. Such as: silicon (boiling point>150℃), hydrocarbon (boiling point>150℃).

4.MD, dopant (dopant): a chemical element that can change the electrical properties of semiconductor substances. Such as: boron, phosphorous.

5.MM, metal pollutants (metal): due to the introduction of copper production process and the use of organic metal precursors (organometallic precursor), exist in gaseous form or have a particle size smaller than high efficiency particulate air (HEPA) ) Metal compounds within the catchable range of the filter may also become contaminants, so they are regarded as Category 5 AMCs and are valued.

In order to prevent the electrical properties of products from being affected, the semiconductor and wafer manufacturing processes are placed in a strictly controlled environment, that is, a clean room or clean room. In the past, the air quality control of clean rooms mainly focused on Particles, airflow and temperature and humidity; however, in recent years, the semiconductor industry has begun to rethink the definition of a so-called clean room. Stable control of the system and equipment of the factory air environment to further reduce defective products caused by air particles.

In view of the above-mentioned conventional problems, the present invention provides an air environment control system, which utilizes a filter assembly, a temperature control assembly, a water washing assembly, a dehumidification assembly and an air supply assembly to control the air environment, and uses the filter assembly and the water washing assembly to filter particles in the air, The temperature control unit is used to control the temperature of the air flowing through the system, and the dehumidifier unit is used to control the moisture content in the air, so that the system reduces the particles in the air and controls its temperature and humidity at the same time.

One object of the present invention is to provide an air environment control system, which utilizes a filter element, a temperature control element, a water washing element, a dehumidification element and an air supply element to control the particle content, temperature and humidity of the air environment, and uses the filter element and the water washing element to filter The particles in the air are controlled by the temperature control unit to control the temperature of the air flowing through the system, and then the moisture content in the air is controlled by the dehumidification unit, and the air environment is controlled by this system.

In order to achieve the above-mentioned objects and effects, the present invention provides an air environment control system, which is arranged on the inner side of a casing, and two ends of the casing are respectively provided with an air inlet and an air outlet. Receiving a fluid, the air environment control system includes: a first filter assembly, a first temperature control assembly, a water washing assembly, a dehumidification assembly and an air supply assembly, the first filter assembly includes a first filter channel and a first a filter element, one end of the first filter channel is connected to the air inlet, the first filter element is disposed inside an inner side of the first filter channel, the first filter element filters the fluid passing through the first filter channel, the first filter element A temperature control component includes a first channel, one end of the first channel is connected to the other end of the first filter channel, the first temperature control component is used for controlling the temperature of the fluid passing through the first channel, the water washing component Including a second channel, one end of the second channel is connected to the other end of the first channel, the washing component sprays a liquid on the fluid passing through the second channel, the dehumidification component includes a third channel, the third channel One end is connected to the other end of the second channel, the dehumidification component is used for dehumidifying the fluid passing through the third channel, the air supply component includes a fifth channel, and one end of the fifth channel is connected to the other end of the third channel. At one end, the other end of the fifth channel communicates with the air outlet, and the air supply component is used for conveying the fluid passing through the fifth channel.

In an embodiment of the present invention, the first temperature control assembly further includes a first heat exchange device and a first temperature sensing element, and the first heat exchange device and the first temperature sensing element are sequentially arranged on Inside one of the first channels.

In an embodiment of the present invention, the washing assembly further includes a sprinkler and a A drainage device, the sprinkler is arranged inside one of the second channels, and sprays the liquid to the second channel, the drainage device is arranged under one of the sprinklers, and receives the liquid.

In one embodiment of the present invention, the dehumidifying component further includes an evaporator and a humidity sensing element, and the evaporator and the humidity sensing element are sequentially disposed inside one of the third channels.

In an embodiment of the present invention, a second temperature control component is further included between the dehumidification component and the air supply component, a fourth channel is disposed inside an inner side of the second temperature control component, and one end of the fourth channel is connected to the At the other end of the third channel, the second temperature control component is used for controlling the temperature of the fluid passing through the fourth channel, and one end of the fifth channel of the air supply component communicates with the other end of the fourth channel.

In one embodiment of the present invention, the second temperature control assembly further includes a second heat exchange device and a second temperature sensing element, and the second heat exchange device and the second temperature sensing element are sequentially arranged on Inside one of the fourth channels.

In one embodiment of the present invention, a second filter element is further included, which includes a second filter channel and a second filter element, one end of the second filter channel is connected to the other end of the fifth channel, and the second filter The other end of the channel communicates with the air outlet, the second filter element is disposed inside one of the second filter channel, and the second filter element filters the fluid passing through the second filter channel.

In an embodiment of the present invention, the air supply assembly further includes a blower, and the blower is disposed inside one of the fifth passages.

In order to achieve the above-mentioned objects and effects, the present invention provides an air environment control system, which is arranged on the inner side of a casing, and two ends of the casing are respectively provided with an air inlet and an air outlet. Receiving a fluid, the air environment control system includes: a first filter assembly, a first temperature control assembly, a water washing assembly, a dehumidification assembly, a second temperature control assembly, an air supply assembly and a second filter assembly, the The first filter element is disposed on an inner side of the first chamber, the first filter element includes a first filter channel and a first filter element, one end of the first filter channel is connected to the air inlet, and the first filter element is arranged on the inner side of one of the first filtering passages, and the first filtering element filters through the The fluid of the first filter channel, the first temperature control component is disposed on the inner side of the first chamber, the first temperature control component includes a first channel, and one end of the first channel is connected to the first filter channel. At the other end, the first temperature control component is used to control the temperature of the fluid passing through the first channel, the water washing component is disposed on the inner side of the first chamber, the water washing component includes a second channel, the second One end of the channel is connected to the other end of the first channel, the water washing component sprays a liquid on the fluid passing through the second channel, the dehumidification component is arranged on the inner side of the second chamber, and the dehumidification component includes a third channel , one end of the third channel receives the fluid, the dehumidification component is used to dehumidify the fluid passing through the third channel, the second temperature control component is arranged on the inner side of the second chamber, the second temperature control component A fourth channel is arranged inside one of the components, and one end of the fourth channel is connected to the other end of the third channel. The second temperature control component is used to control the temperature of the fluid passing through the fourth channel. The air supply component is provided with On the inner side of the second chamber, the air supply component includes a fifth channel, one end of the fifth channel is connected to the other end of the third channel, and the air supply component is used for conveying the fluid passing through the fifth channel, The second filter element is disposed on the inner side of the second chamber, the second filter element includes a second filter channel and a second filter element, one end of the second filter channel is connected to the other end of the fifth channel, The other end of the second filter channel is connected to the air outlet, the second filter element is disposed inside one of the second filter channel, and the second filter element filters the fluid passing through the second filter channel.

1: Air environment control system

2: Shell

3: air inlet

4: Air outlet

5: Second chamber

6: The first chamber

10: The first filter assembly

12: The first filter channel

14: The first filter

20: The first temperature control component

22: first channel

24: The first heat exchange device

26: The first temperature sensing element

30: Wash components

32: Second channel

34: Sprinklers

36: Drainage

40: Dehumidification components

42: Third channel

44: Evaporator

46: Humidity sensing element

50: Air supply components

52: Fifth channel

54: Blower

60: The second temperature control component

62: Fourth channel

64: Second heat exchange device

66: Second temperature sensing element

70: Second filter assembly

72: Second filter channel

74: Second filter element

A: fluid

L: liquid

Figure 1: It is a schematic diagram of the structure of the first embodiment of the present invention; Figure 2: It is a schematic diagram of the fluid flow of the first embodiment of the present invention; Figure 3: It is the structure of the second embodiment of the present invention Schematic diagrams; Figure 4: It is a schematic diagram of the fluid flow of the second embodiment of the present invention; and Figure 5: It is a schematic structural diagram of the third embodiment of the present invention.

In order to enable your examiners to have a further understanding and understanding of the features of the present invention and the effects achieved, the present invention provides an air environment with examples and descriptions. A control system, which uses a filter element, a temperature control element, a water washing element, a dehumidification element and an air supply element to control the air environment, uses the filter element and the water washing element to filter particles in the air, and uses the temperature control element to control the temperature of the air flowing through the system , and then use the dehumidification component to control the moisture content in the air, this system reduces the particles in the air, and can control its temperature and humidity at the same time.

Please refer to Figure 1 and Figure 2. Figure 1 is a schematic diagram of the structure of the first embodiment of the present invention, and Figure 2 is a schematic diagram of the fluid flow of the first embodiment of the present invention. The first embodiment, which is an air environment control system 1, is arranged on an inner side of a casing 2, and two ends of the casing 2 are respectively provided with an air inlet 3 and an air outlet 4. The air inlet 3 Receiving a fluid A, the air environment control system includes a first filter assembly 10 , a first temperature control assembly 20 , a water washing assembly 30 , a dehumidification assembly 40 and an air supply assembly 50 .

Referring to FIG. 1 and FIG. 2 again, as shown in the figures, in this embodiment, the first filter element 10 includes a first filter channel 12 and a first filter element 14 , one end of the first filter channel 12 Connected to the air inlet 3 , the first filter element 14 is disposed inside one of the first filter passages 12 , the first filter element 14 filters the fluid A passing through the first filter passage 12 , the first temperature control element 20 Including a first channel 22, one end of the first channel 22 is connected to the other end of the first filter channel 12, the first temperature control component 20 is used for controlling the temperature of the fluid A passing through the first channel 22, the The washing component 30 includes a second channel 32, one end of the second channel 32 is connected to the other end of the first channel 22, the washing component 30 sprays a liquid L on the fluid A passing through the second channel 32, the dehumidifying component 40 includes a third channel 42, one end of the third channel 42 is connected to the other end of the second channel 32, and the dehumidifying component 40 is used for the The fluid A of the three channels 42 is dehumidified. The air supply assembly 50 includes a fifth channel 52. One end of the fifth channel 52 is connected to the other end of the third channel 42, and the other end of the fifth channel 52 is connected to the air outlet. 4. The air supply assembly 50 is used for conveying the fluid A through the fifth channel 52 and sending the fluid A out of the air outlet 4 .

Continuing from the above, in this embodiment, the first temperature control assembly 20 further includes a first heat exchange device 24 and a first temperature sensing element 26 , the first heat exchange device 24 and the first temperature sensing element 26 are sequentially arranged on the inner side of the first channel 22, the first temperature sensing element 26 senses the fluid A flowing through the first heat exchange device 24, so as to adjust the cooling and heating of the first heat exchange device 24 Efficiency: In this embodiment, the first heat exchange device 24 uses a dry coil, but the present invention is not limited thereto.

Continuing from the above, in this embodiment, the water washing assembly 30 further includes a sprinkler 34 and a drain 36, the sprinkler 34 is disposed inside one of the second passages 32, and sprays the liquid L to the first On the inner side of the two channels 32, the drainage device 36 is disposed under one of the sprinkler devices 34 to receive the liquid L for recovery, and the fluid A passes through the drainage device 36 to the sprinkler device 34; in this embodiment , the liquid L is water, and the drainage device 36 is a water tray and a drainage hole, but the present invention is not limited thereto.

Continuing from the above, in this embodiment, the dehumidifying component 40 further includes an evaporator 44 and a humidity sensing element 46 , and the evaporator 44 and the humidity sensing element 46 are sequentially disposed on an inner side of the third channel 42 , the humidity sensing element 46 senses the fluid A flowing through the evaporator 44 to adjust the dehumidification efficiency of the evaporator 44 .

Continuing from the above, in this embodiment, the air supply assembly 50 further includes a blower 54, which is disposed inside one of the fifth passages 52 to pump the fluid A, so that the fluid A can flow through the passages .

Referring to FIG. 1 and FIG. 2 again, as shown in the figures, the present embodiment further discloses the flow path of the fluid A. The fluid A is sucked from the air inlet 3 into the first filter channel 12 and passes through the first filter channel 12 . The filter element 14 is filtered to remove the particles of the fluid A, the fluid A is then heated or cooled through the first heat exchange device 24 in the first channel 22, and the fluid A enters from one end of the drainage device 36 to the The second channel 32 is sprayed with the liquid L by the sprinkler 34 , and the liquid L is used to further reduce the particle content of the fluid A, and then the fluid A enters the third channel 42 and is processed by the evaporator 44 Dehumidification reduces the water vapor content of the fluid A, and finally the fluid A is extracted by the blower 54 through the fifth channel 52 and transported out of the air outlet 4 to complete the fluid path of this embodiment.

An air environment control system 1 of this embodiment uses the first filter element 10 and the water washing element 30 to filter the particle content of the fluid A, controls the temperature of the fluid A with the first temperature control element 20, and uses the first temperature control element 20 to control the temperature of the fluid A. The dehumidifying element 40 controls the humidity of the fluid A, and delivers the fluid A through the air supply element 50 to improve the air in the external environment with the fluid A.

Please refer to Figures 3 and 4. Figure 3 is a schematic diagram of the structure of the second embodiment of the present invention, and Figure 4 is a schematic diagram of the fluid flow of the second embodiment of the present invention. The second embodiment, which is based on the above-mentioned first embodiment, further includes a second temperature control element 60 between the dehumidification element 40 and the air supply element 50 , and a second filter element 70 after the air supply element 50 .

Referring to FIG. 3 and FIG. 4 again, as shown in the figures, in this embodiment, a fourth channel 62 is disposed inside an inner side of the second temperature control component 60 , and one end of the fourth channel 62 is connected to the third channel At the other end of 42, the second temperature control component 60 is used to control the temperature of the fluid A passing through the fourth channel 62, and one end of the fifth channel 52 of the air supply component 50 is connected to the other end of the fourth channel 62. At one end, the second filter element 70 includes a second filter channel 72 and a second filter element 74 , one end of the second filter channel 72 communicates with the other end of the fifth channel 52 , and the other end of the second filter channel 72 Connecting to the air outlet 4, the second filter element 74 is disposed on the inner side of the second filter channel 72, the second filter element 74 filters the fluid A passing through the second filter channel 72, and further reduces the particles of the fluid A , and remove the additional pollution caused by these components; the other components of this embodiment are the same as those of the above-mentioned first embodiment, so they will not be repeated.

Continuing from the above, in this embodiment, the second temperature control component 60 further includes a second heat exchanger The second heat exchange device 64 and the second temperature sensing element 66 are sequentially disposed on the inner side of the fourth channel 62, and the second temperature sensing element 66 Sensing the fluid A flowing through the second heat exchange device 64 to adjust the cooling and heating efficiency of the second heat exchange device 64; in this embodiment, the second heat exchange device 64 uses a condenser ), but the present invention is not limited thereto.

Referring to FIG. 3 and FIG. 4 again, as shown in the figures, the present embodiment further discloses the flow path of the fluid A. The fluid A enters the third channel 42 and is dehumidified by the evaporator 44 to reduce the fluid A. The fluid A enters the fourth channel 62 and passes through the second heat exchange device 64 to control the temperature of the fluid A. After the fluid A enters the fifth channel 52, the blower 54 removes the fluid A is transported to the second filter channel 72, the second filter element 74 filters the fluid A, and finally the fluid A is transported out of the air outlet 4. The other elements and their fluid paths in this embodiment are the same as the above-mentioned first The embodiments are the same, and thus will not be repeated here.

An air environment control system 1 of this embodiment uses the first filter element 10 and the water washing element 30 to filter the particle content of the fluid A, controls the temperature of the fluid A with the first temperature control element 20, and uses the first temperature control element 20 to control the temperature of the fluid A. The dehumidification element 40 controls the humidity of the fluid A, and the fluid A is delivered by the air supply element 50, and the temperature of the fluid A passing through the water washing element 30 and the dehumidification element 40 is further stabilized by the second temperature control element 60, And the second filter element 70 is used to further remove the additional pollution generated by these elements.

Please refer to FIG. 5 , which is a schematic structural diagram of a third embodiment of the present invention. As shown in the figure, this embodiment is a third embodiment, which is based on the second embodiment described above, and further incorporates a first filter element 10 , a first temperature control component 20, a water washing component 30, a dehumidification component 40, a second temperature control component 60, an air supply component 50 and a second filter component 70 are respectively disposed in the housing 2 including a first A chamber 6 and a second chamber 5 , one end of the first chamber 6 is provided with an air inlet 3 , the air inlet 3 receives a fluid A, and one end of the second chamber 5 communicates with the first chamber 6 the other end of the second chamber 5 is provided An air outlet 4.

Referring to FIG. 5 again, as shown in the figure, in this embodiment, the first filter element 10 , the first temperature control element 20 , the water washing element 30 , the dehumidification element 40 and the second temperature control element 60 are provided Inside an inner side of the first chamber 6 , the air supply element 50 and the second filter element 70 are arranged inside an inner side of the second chamber 5 , so that these elements are arranged in the housing 2 .

To sum up, the present invention provides an air environment control system, which utilizes a filter component, a temperature control component, a water washing component, a dehumidification component and an air supply component to control the air environment, uses the filter component and the water washing component to filter particles in the air, and uses a warm The control component controls the temperature of the air flowing through the system, and then uses the dehumidification component to control the moisture content in the air, so that the system reduces the particles in the air, and controls its temperature and humidity at the same time, further solving the conventional problem of increasing the diameter of the semiconductor wire. The shrinkage of gaseous molecular pollutants causes the problem of defective products in the manufactured products.

Therefore, the present invention is indeed novel, progressive and available for industrial use, and it should meet the requirements for patent application in my country's patent law.

However, the above is only an embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, all the equivalent changes and modifications made in accordance with the shape, structure, feature and spirit described in the scope of the patent application of the present invention, All should be included in the scope of the patent application of the present invention.

1: Air environment control system

2: Shell

3: air inlet

4: Air outlet

10: The first filter assembly

12: The first filter channel

14: The first filter

20: The first temperature control component

22: first channel

30: Wash components

32: Second channel

40: Dehumidification components

42: Third channel

50: Air supply components

52: Fifth channel

Claims (7)

An air environment control system, which is arranged on the inner side of a casing, an air inlet and an air outlet are respectively set at two ends of the casing, the air inlet receives a fluid, and the air environment control system comprises: a first A filter assembly, which includes a first filter channel and a first filter element, one end of the first filter channel is connected to the air inlet, the first filter element is arranged inside an inner side of the first filter channel, the first filter element filtering the fluid passing through the first filter channel; a first temperature control component including a first channel, one end of the first channel is connected to the other end of the first filter channel, the first temperature control component is used for Controlling the temperature of the fluid passing through the first channel; a washing component including a second channel, one end of the second channel is connected to the other end of the first channel, the washing component is opposite to the fluid passing through the second channel A liquid is sprayed; a dehumidification component includes a third channel, one end of the third channel is connected to the other end of the second channel, the dehumidification component is used for dehumidifying the fluid passing through the third channel; a second The temperature control assembly has a fourth channel, a second heat exchange device and a second temperature sensing element disposed on an inner side thereof, one end of the fourth channel is connected to the other end of the third channel, the second heat exchange device and The second temperature sensing element is sequentially disposed inside one of the fourth channels, the second temperature control component is used for controlling the temperature of the fluid passing through the fourth channel; and an air supply component includes a fifth a channel, one end of the fifth channel is connected to the other end of the third channel, the other end of the fifth channel is connected to the air outlet, one end of the fifth channel of the air supply component is connected to the other end of the fourth channel, the air supply An assembly is used to deliver the fluid through the fifth channel. The air environment control system as claimed in claim 1, wherein the first temperature control component further comprises a A first heat exchange device and a first temperature sensing element are arranged in sequence inside one of the first channels. The air environment control system as claimed in claim 1, wherein the water washing assembly further comprises a sprinkler and a drain, the sprinkler is disposed inside one of the second passages, and sprays the liquid to the second passage , the drainage device is arranged below one of the sprinkler devices and receives the liquid. The air environment control system as claimed in claim 1, wherein the dehumidifying component further comprises an evaporator and a humidity sensing element, and the evaporator and the humidity sensing element are sequentially disposed inside one of the third passages. The air environment control system as claimed in claim 1, further comprising a second filter element comprising a second filter channel and a second filter element, one end of the second filter channel is connected to the other end of the fifth channel, The other end of the second filter channel is connected to the air outlet, the second filter element is disposed inside one of the second filter channel, and the second filter element filters the fluid passing through the second filter channel. The air environment control system according to claim 1, wherein the air supply assembly further comprises a blower, and the blower is disposed inside one of the fifth passages. An air environment control system, which is arranged on the inner side of a casing, the casing includes a first chamber and a second chamber, an air inlet is arranged at one end of the first chamber, and the air inlet receives a fluid , one end of the second chamber is connected to the first chamber, the other end of the second chamber is provided with an air outlet, and the air environment control system includes: a first filter element, which is arranged in the first chamber On an inner side, the first filter assembly includes a first filter channel and a first filter element, one end of the first filter channel is connected to the air inlet, the first filter element is disposed on an inner side of the first filter channel, the The first filter element filters the fluid passing through the first filter channel; a first temperature control component is disposed on the inner side of the first chamber, the first temperature control component includes a first channel, the first channel One end is connected to the other end of the first filter channel, The first temperature control component is used to control the temperature of the fluid passing through the first channel; a water washing component is disposed on the inner side of the first chamber, the water washing component includes a second channel, the second channel One end is connected to the other end of the first channel, and the water washing component sprays a liquid on the fluid passing through the second channel; a dehumidification component is disposed inside an inner side of the first chamber, and the dehumidification component includes a third a channel, one end of the third channel receives the fluid, the dehumidification component is used for dehumidifying the fluid passing through the third channel; a second temperature control component is arranged on the inner side of the first chamber, the first A fourth channel, a second heat exchange device and a second temperature sensing element are disposed inside one of the two temperature control components, one end of the fourth channel is connected to the other end of the third channel, the second heat exchange device and The second temperature sensing element is sequentially arranged inside one of the fourth channels, the second temperature control component is used to control the temperature of the fluid passing through the fourth channel; an air supply component is arranged on the second On the inner side of the chamber, the air supply component includes a fifth channel, one end of the fifth channel is connected to the other end of the third channel, the air supply component is used for conveying the fluid passing through the fifth channel; and a second a filter element, which is arranged on the inner side of the second chamber, the second filter element comprises a second filter channel and a second filter element, one end of the second filter channel is connected to the other end of the fifth channel, the The other end of the second filter channel is connected to the air outlet, the second filter element is disposed inside one of the second filter channel, and the second filter element filters the fluid passing through the second filter channel.

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