TWM626593U - Water washing and filtering device with temperature controller - Google Patents

Abstract

The present invention provides a water washing filter device with a temperature control device, which includes a first water washing group components, a second washing assembly and a connecting pipeline, a first sprinkler, a first shower assembly and a first circulation assembly are arranged inside a first shell of the first washing assembly, the second A second sprinkler, a second shower assembly and a second circulation assembly are arranged on the inner side of a second shell of a washing assembly, and one end of the connecting pipeline is connected to a first container of the first shell space, the other end of the connecting pipeline is connected to a second accommodating space of the second shell; the first circulation component includes a first temperature control device, and the second circulation component includes a second temperature The control device makes the fluid flowing through have a temperature difference and improves the overall filtration efficiency.

Description

Water washing filter device with temperature control device

This creation is about a water washing filter device with a temperature control device, especially a water washing filter device that uses a heating device to generate a temperature difference in the fluid.

As the size of semiconductor devices shrinks, the control and monitoring methods of gaseous molecular contaminants (AMCs) have also received increasing attention. In order to prevent the electrical properties of electronic products from being affected, the semiconductor and wafer manufacturing processes are placed in a strictly controlled environment, that is, a clean room. Conventional clean room air quality control mainly focuses on particles, airflow and temperature and humidity; however, in recent years, the semiconductor industry has begun to rethink the definition of so-called clean room. As the volume of semiconductors shrinks, the effects of electrostatic damage and gaseous molecular pollutants are becoming more and more obvious, and devices for removing gaseous molecular pollutants are also gradually entering the market.

Among them, the common device for removing gaseous molecular pollutants is a water-spraying (or water-spraying) device and a water-washing filter device for the water-spraying material. After contacting with air, it can remove trace gaseous molecular pollutants in the air, and air pollutants can be roughly divided into two categories: particulate pollutants and gaseous pollutants.

However, although the conventional water washing filter device has good efficiency in removing gaseous pollutants, the removal efficiency of granular pollutants, especially those mainly sub-micron (PM0. Relatively poor, so the industry needs a water washing filter device that can effectively remove particulate pollutants.

In view of the above-mentioned problems of the prior art, the present invention provides a water washing filter device with a temperature control device, wherein the first fluid enters the first water washing component, and the first water washing component heats the first fluid passing through it with the heated second fluid , after the first fluid flows to the second washing component, the second washing component contacts the third fluid with a lower temperature, so that the first fluid and the third fluid passing through have a temperature difference, resulting in thermophoresis phenomenon, which can effectively remove granular pollution The water washing filter device of all things.

One object of the present invention is to provide a water washing filter device with a temperature control device, which utilizes the combination of two water washing components, a first fluid enters the first water washing component, and the temperature control device included in the first water washing component heats the first sprinkler The second fluid in the water device, the second fluid sprays out the first fluid corresponding to the heating passing through, the first fluid flows to the second water washing component, and the temperature control device included in the second water washing component controls the temperature control device in the second sprinkler device. The temperature of the third fluid causes a temperature difference between the first fluid and the third fluid passing through, resulting in thermophoresis and improving the overall filtration efficiency.

In order to achieve the above-mentioned objects and effects, the present invention provides a water washing filter device with a temperature control device, which includes: a first washing component, a second washing component and a connecting pipeline, the first washing component includes: A first casing, an inner side of which is provided with a first accommodating space, and an air inlet is opened at one end of the first casing, and the air inlet is connected to the first accommodating space; a first sprinkler is arranged on the The first accommodating space is arranged below one of the air inlets and has an interval space; a first shower assembly is arranged in the first accommodating space and below one of the first sprinklers and a first circulation component, which includes a first pump and a first temperature control device, one end of the first pump is connected to a lower part of the first accommodating space, and one end of the first temperature control device The other end of the first pump is connected to the other end of the first temperature control device, and the other end of the first temperature control device is connected to the first sprinkler. a second shell, an inner side of which is provided with a second accommodating space, the second shell One end of the body is provided with an air outlet, the air outlet communicates with the second accommodating space; a second sprinkler is arranged in the second accommodating space and below one of the air outlets, and has an interval space ; A second shower assembly, which is arranged in the second accommodating space, and is arranged under one of the second sprinklers; and a second circulation assembly, which includes a second pump and a second warmer A control device, one end of the second pump is connected to the bottom of one of the second accommodating spaces, one end of the second temperature control device is connected to the other end of the second pump, and the other end of the second temperature control device is connected to the The second sprinkler; one end of the connecting pipe is connected to the first accommodating space, and the other end of the connecting pipe is connected to the second accommodating space; this structure is used to heat the fluid passing through the first washing component, and then the second In the second water washing unit, it is mixed with a lower temperature fluid to improve the filtration efficiency of the water washing unit.

In an embodiment of the present invention, the second washing component further includes a water removing device, and the water removing device is disposed in the second accommodating space and above one of the second sprinkler devices.

In an embodiment of the present invention, a first fluid enters the first accommodating space through the air inlet, and the first fluid passes through the first sprinkler device and the first sprinkler assembly in sequence, and the first fluid passes through the first sprinkler device and the first sprinkler assembly in sequence. After a fluid passes through the first shower assembly, the first fluid enters the connecting pipeline, and after the first fluid passes through the connecting pipeline, the first fluid enters the second accommodating space, and the first fluid follows the The first fluid flows to the second sprinkler device and the second sprinkler assembly in sequence, and after the first fluid passes through the second sprinkler assembly, the first fluid is discharged from the air outlet.

In an embodiment of the present invention, the first sprinkler sprays a second fluid to the first sprinkler assembly, and after the second fluid passes through the first sprinkler assembly, the first pump draws the second fluid Fluid to the first temperature control device, after the second fluid passes through the first temperature control device, the second fluid enters the first sprinkler device; the second sprinkler device sprays a third fluid to the second shower water component, after the third fluid passes through the second water shower component, the second pump pumps the third fluid to the second temperature control device, after the third fluid passes through the second temperature control device, the third fluid Fluid enters the second sprinkler.

In an embodiment of the present invention, the temperature of the first fluid is greater than the temperature of the third fluid.

In an embodiment of the present invention, a first temperature sensor is further included, and the first temperature sensor is disposed inside one of the connecting pipes

In an embodiment of the present invention, it further includes and a second temperature sensor, and the second temperature sensor is disposed on an inner side of the air outlet.

In an embodiment of the present invention, a control device is further included, and the control device is electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device and the second temperature control device.

In an embodiment of the present invention, the first water shower assembly includes a plurality of first water shower layers, and the first water shower layers are stacked on each other.

In an embodiment of the present invention, the second water shower assembly includes a plurality of second water shower layers, and the second water shower layers are stacked on each other.

1: Water washing filter device with temperature control device

10: The first washing component

12: The first shell

121: The first accommodation space

122: air inlet

14: The first sprinkler

16: The first shower assembly

162: The first water layer

18: The first loop component

182: First Pump

184: The first temperature control device

20: The second washing component

22: Second shell

221: Second accommodation space

222: air outlet

24: Second sprinkler

26: The second shower assembly

262: The second water spray layer

28: Second loop component

282: Second pump

284: Second temperature control device

27: Water removal device

29: Second temperature sensor

292: Second temperature signal

30: Connect the pipeline

31: The first temperature sensor

312: The first temperature signal

40: Control device

42: The first control signal

44: The second control signal

A: The first fluid

W1: second fluid

W2: the third fluid

Figure 1: It is a schematic structural diagram of an embodiment of the present invention; Figure 2A to Figure 2B: It is a schematic diagram of fluid flow of an embodiment of the present invention; Figure 3: It is a schematic diagram of an embodiment of the present invention Schematic diagrams of other components; and FIG. 4 : it is a schematic diagram of signal transmission according to an embodiment of the invention.

In order to enable your reviewers to have a further understanding and understanding of the features of this creation and the effects achieved, I would like to provide examples and accompanying descriptions, which are as follows:

In view of the above-mentioned problems of the prior art, the present invention combines a first washing component with a second washing component, and a first sprinkler, a first sprinkler and a first A shower assembly and a first circulation assembly, a second sprinkler, a second shower assembly and a second circulation assembly are arranged inside a second shell of the second washing assembly, and the connecting pipeline One end is connected to a first accommodating space of the first shell, and the other end of the connecting pipeline is communicated to a second accommodating space of the second shell; the first circulation component includes a first temperature control The device and the second circulation component include a second temperature control device, so that the fluid flowing through has a temperature difference, improves the overall filtration efficiency, and solves the problem that the conventional technology is difficult to remove microscopic particulate pollutants.

Please refer to FIG. 1, which is a schematic structural diagram of an embodiment of the invention. As shown in the figure, the embodiment is a water washing and filtering device 1 with a temperature control device, which includes a first washing component 10, a second The washing assembly 20 and a connecting pipeline 30; in this embodiment, the first washing assembly 10 communicates with one end of the connecting pipeline 30, and the second washing assembly 20 communicates with the other end of the connecting pipeline 30, so that the fluid Can flow from the first water wash assembly 10 to the second water wash assembly 20 .

Referring to FIG. 1 again, as shown in the figure, in this embodiment, the first washing assembly 10 includes a first casing 12 , a first sprinkler 14 , a first sprinkler assembly 16 and a first In the circulation assembly 18 , a first accommodating space 121 is set on an inner side of the first casing 12 for accommodating components, and an air inlet 122 is defined at one end of the first casing 12 , and the air inlet 122 communicates with the first casing 12 . The accommodating space 121 allows fluid to enter the first accommodating space 121, and the first sprinkler 14 is disposed in the first accommodating space 121 and below one of the air inlets 122, and has an interval space, The first shower assembly 16 is disposed in the first accommodating space 121 and below one of the first sprinklers 14 , and the first circulation assembly 18 includes a first pump 182 and a first temperature control A device 184, one end of the first pump 182 is connected to one of the first accommodating spaces 121 Below, one end of the first temperature control device 184 is connected to the other end of the first pump 182, and the other end of the first temperature control device 184 is connected to the first sprinkler device 14; in this embodiment, the first The sprinkler 14 sprays a second fluid W1, and the second fluid W1 can be water.

Continuing from the above, in this embodiment, the second washing assembly 20 is disposed on one side of the first washing assembly 10 , and the second washing assembly 20 includes a second casing 22 , a second sprinkler 24 , a The second shower assembly 26 and the second circulation assembly 28, a second accommodating space 221 is provided on the inner side of the second casing 22 for accommodating components, and an air outlet is defined at one end of the second casing 22 222, so that the fluid can be discharged from the second accommodating space 221, the air outlet 222 communicates with the second accommodating space 221, the second sprinkler 24 is arranged in the second accommodating space 221, and is arranged in the air outlet Below one of 222, the second shower assembly 26 is disposed in the second accommodating space 221, and is disposed below one of the second sprinklers 24, the second circulation assembly 28 includes a second pump 282 and A second temperature control device 284, one end of the second pump 282 is connected to the bottom of one of the second accommodating spaces 221, one end of the second temperature control device 284 is connected to the other end of the second pump 282, the first The other end of the two temperature control devices 284 is connected to the second sprinkler device 24 , one end of the connecting pipe 30 is connected to the first accommodating space 121 , and the other end of the connecting pipe 30 is connected to the second accommodating space 221 , The connecting pipe 30 communicates the first housing 12 and the second housing 22 with each other; in this embodiment, the second sprinkler 24 sprays a third fluid W2, and the second fluid W1 can be water .

Continuing from the above, in this embodiment, the first water shower assembly 16 includes a plurality of first water shower layers 162 , the first water shower layers 162 are a water shower filler, and the first water shower layers 162 Stacked on each other, and a plurality of perforations are arranged, the first water spray layers 162 are used to receive and spray the second fluid W1 from the first sprinkler 14, and the second fluid W1 is scattered for many times. The tiny water droplets or water film increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact the liquid.

Continuing the above, in this embodiment, the second water shower assembly 26 includes a plurality of second water shower layers 262 , the second water shower layers 262 are a water shower filler, and the second water shower layers 262 Stacked on each other and provided with a plurality of perforations, the second water spray layers 262 are used for receiving and spraying the third fluid W2 from the second water sprinkler 24, and the third fluid W2 is scattered for many times. The tiny water droplets or water film increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact the liquid.

Please refer to FIGS. 2A to 2B , which are schematic diagrams of fluid flow in an embodiment of the invention. As shown in the figures, in this embodiment, a first fluid A (eg, air) passes through the first casing 12 The air inlet 122 enters, the first fluid A flows into the accommodating space 121 of the first housing 12, and flows to the first sprinkler 14, and the first fluid A passes through the first sprinkler After the installation 14 , the first fluid A flows to the first shower assembly 16 , and the first fluid A passes through the first shower layers 162 , and after the first fluid A passes through the first shower assembly 16 , the first fluid A enters the connecting pipeline 30, after the first fluid A passes through the connecting pipeline 30, the first fluid A enters the second accommodating space 221 and flows to the second sprinkler 24. After the first fluid A passes through the second sprinkler 24, the first fluid A flows to the second sprinkler assembly 26, and the first fluid A passes through the second sprinkler layers 262. After the first fluid A passes through the second shower assembly 26 , the first fluid A is discharged from the air outlet 222 to complete one cycle.

Referring to FIGS. 2A to 2B again, as shown in the figures, in this embodiment, the first sprinkler 14 sprays the second fluid W1 to the first sprinkler component 16 , and the second fluid W1 passes through The first water spray layers 162 are contacted and mixed with the first fluid A to remove the gaseous molecular pollutants contained in the first fluid A. After the second fluid W1 passes through the first water spray component 16, the second The fluid W1 flows to the bottom of the first accommodating space 121 to concentrate, for example, the second fluid W1 flows to the water collecting tank of the first accommodating space 121 to concentrate, the first pump 182 included in the first circulation component 18 Extract the second fluid W1 from the bottom of the first accommodating space 121, and The second fluid W1 is sent to the first temperature control device 184. After the first temperature control device 184 heats the second fluid W1, the second fluid W1 flows to the first sprinkler device 14, which is completed once cycle, wherein the second fluid W1 correspondingly heats the contacted first fluid A, so that the first fluid A increases correspondingly; in this embodiment, the temperature of the second fluid W1 is greater than the temperature of the first fluid A.

Referring to FIGS. 2A to 2B again, as shown in the figures, in this embodiment, the second sprinkler 24 sprays the third fluid W2 to the second sprinkler component 26 , and the third fluid W2 passes through The second water spray layers 262 are contacted and mixed with the first fluid A to remove the gaseous molecular pollutants contained in the first fluid A. After the third fluid W2 passes through the second water spray component 26, the third The fluid W2 flows to the bottom of the second accommodating space 221 to concentrate, for example, the third fluid W2 flows to the water collecting tank of the second accommodating space 221 to concentrate, the second pump 282 included in the second circulation component 28 The third fluid W2 at the bottom of the second accommodating space 221 is extracted, and the third fluid W2 is sent to the second temperature control device 284. After the second temperature control device 284 heats the third fluid W2, the The third fluid W2 flows to the second sprinkler 24 to complete a cycle; in this embodiment, the temperature of the first fluid A is greater than the temperature of the third fluid W2, so that the first fluid A and the The third fluid W2 produces a thermophoresis phenomenon (or simply thermophoresis).

Continuing from the above, thermophoresis means that in a gas with a temperature gradient, because the gas molecules in the higher temperature part collide with the particles with higher kinetic energy than the gas molecules in the lower temperature part, the particles move from the high temperature part to the low temperature part. The phenomenon of movement, in which the force acting on the particles is called the heat flow force, which causes the first fluid A and the third fluid W2 to produce a thermophoresis phenomenon, so that the particulate pollutants will move to the direction of the washing liquid due to the thermophoresis phenomenon, increasing the number of particles. The chance of contact between the contaminants and the washing liquid can improve the efficiency of removing contaminants.

Please refer to FIG. 3 , which is a schematic diagram of other components of an embodiment of the invention. As shown in the figure, in this embodiment, a water removal device 27 is further included, and the water removal device 27 is disposed in the first embodiment. Two accommodating spaces 221 are disposed above one of the second sprinkler devices 24, and the dewatering device 27 is used to remove the water vapor contained in the passing first fluid A; in this embodiment, the dewatering device 27 Device 27 is a dehumidification device.

Please refer to FIG. 3 again and please refer to FIG. 4. FIG. 4 is a schematic diagram of signal transmission according to an embodiment of the invention. As shown in the figure, this embodiment further includes a first temperature sensor 31, a first temperature sensor 31 and a first temperature sensor 31. Two temperature sensors 29 and a control device 40, the first temperature sensor 31 is disposed on an inner side of the connecting pipe 30 for sensing the temperature of the first fluid A passing through the connecting pipe 30, The second temperature sensor 29 is disposed on an inner side of the air outlet 222 for sensing the temperature of the first fluid A discharged from the air outlet 222 , and the control device 40 is electrically connected to the first temperature sensor 31. The second temperature sensor 29, the first temperature control device 184 and the second temperature control device 284, wherein the first temperature control device 184 and the second temperature control device 284 respectively control the second fluid W1 and the temperature of the third fluid W2.

Continuing from the above, in this embodiment, the first temperature sensor 31 senses the temperature of the first fluid A passing through the connecting pipe 30, and transmits a first temperature signal 312 to the control device 40, the first temperature Two temperature sensors 29 sense the temperature of the first fluid A discharged from the air outlet 222, and transmit a second temperature signal 292 to the control device 40. The control device 40 is based on the first temperature signal 312 and the second temperature signal 312. The two temperature signals 292 send out a first control signal 42 and a second control signal 44. The first temperature control device 184 receives the first control signal 42 to control the temperature of the second fluid W1. The second temperature control device 284 receives the second control signal 44 and correspondingly controls the temperature of the third fluid W2, so that the temperature of the first fluid A is always greater than the temperature of the third fluid W2, so as to generate thermophoresis and improve the efficiency of filtration.

To sum up, the present invention provides a water washing and filtering device with a temperature control device, which utilizes the combination of two water washing components, wherein the first water washing component includes a temperature control device, and the temperature control device heats the second water washing device in the first sprinkler device. The fluid (such as water) is heated by the first sprinkler corresponding to the second A fluid (such as air), after heating, the first fluid flows to the second washing assembly, and the temperature control device included in the second washing assembly controls the temperature of the third fluid (such as water) in the second sprinkler , so that there is a temperature difference between the first fluid and the third fluid passing through, resulting in thermophoresis, and improving the efficiency of filtering pollutants.

Therefore, this creation is indeed novel, progressive and available for industrial use. It should meet the patent application requirements of my country's patent law. It is necessary to file an application for a creation patent in accordance with the law.

However, the above description is only an embodiment of the present creation, and is not intended to limit the scope of implementation of the present creation. Therefore, all equivalent changes and modifications made in accordance with the shape, structure, characteristics and spirit described in the patent scope of the present creation, All should be included in the scope of the patent application for this creation.

1: Water washing filter device with temperature control device

10: The first washing component

12: The first shell

121: The first accommodation space

122: air inlet

14: The first sprinkler

16: The first shower assembly

162: The first water layer

18: The first loop component

182: First Pump

184: The first temperature control device

20: The second washing component

22: Second shell

221: Second accommodation space

222: air outlet

24: Second sprinkler

26: The second shower assembly

262: The second water spray layer

28: Second loop component

282: Second pump

284: Second temperature control device

30: Connect the pipeline

W1: second fluid

W2: the third fluid

Claims (10)

A water washing filter device with a temperature control device, comprising: A first water washing assembly, which includes: a first casing, an inner side of which is provided with a first accommodating space, an air inlet is defined at one end of the first casing, and the air inlet communicates with the first accommodating space; a first sprinkler, disposed in the first accommodating space and below one of the air inlets; a first shower assembly disposed in the first accommodating space and below one of the first sprinklers; and A first circulation component includes a first pump and a first temperature control device, one end of the first pump is connected to a lower part of the first accommodating space, and one end of the first temperature control device is connected to the first temperature control device The other end of a pump, the other end of the first temperature control device is connected to the first sprinkler device; A second washing assembly, which is disposed on one side of the first washing assembly, the second washing assembly comprising: and a second casing, an inner side of which is provided with a second accommodating space, an air outlet is defined at one end of the second casing, and the air outlet communicates with the second accommodating space; a second sprinkler, disposed in the second accommodating space and below one of the air outlets; a second sprinkler assembly disposed in the second accommodating space and below one of the second sprinkler devices; and A second circulation component includes a second pump and a second temperature control device, one end of the second pump is connected to a lower part of the second accommodating space, and one end of the second temperature control device is connected to the first The other end of the two pumps, the other end of the second temperature control device is connected to the second sprinkler device; One end of a connecting pipeline is connected to the first accommodating space, and the other end of the connecting pipeline is connected to the second accommodating space. The water washing and filtering device with a temperature control device as claimed in claim 1, wherein the second washing component further comprises a water removing device, and the water removing device is disposed in the second accommodating space and in the second water sprinkler above one of the devices. The water washing filter device with temperature control device as claimed in claim 1, wherein a first fluid enters the first accommodating space through the air inlet, and the first fluid then passes through the first sprinkler device and the first water spray device in sequence. The first shower assembly, after the first fluid passes through the first shower assembly, the first fluid enters the connecting pipeline, and after the first fluid passes through the connecting pipeline, the first fluid enters the second container space, the first fluid flows to the second sprinkler device and the second sprinkler assembly in sequence, and after the first fluid passes through the second sprinkler assembly, the first fluid is discharged from the air outlet. The water washing filter device with a temperature control device as claimed in claim 3, wherein the first sprinkler device sprays a second fluid to the first shower component, and after the second fluid passes through the first shower component, the The first pump pumps the second fluid to the first temperature control device. After the second fluid passes through the first temperature control device, the second fluid enters the first sprinkler device; the second sprinkler device sprays a The third fluid is sent to the second shower assembly, after the third fluid passes through the second shower assembly, the second pump pumps the third fluid to the second temperature control device, and the third fluid passes through the second After the temperature control device, the third fluid enters the second sprinkler device. The water washing filter device with a temperature control device as claimed in claim 4, wherein the temperature of the first fluid is greater than the temperature of the third fluid. The water washing filter device with a temperature control device as claimed in claim 1, further comprising a first temperature sensor, and the first temperature sensor is disposed on an inner side of the connecting pipeline. The water washing filter device with a temperature control device as claimed in claim 6, further comprising a second temperature sensor, and the second temperature sensor is disposed on an inner side of the air outlet. The water washing filter device with a temperature control device as claimed in claim 7, further comprising a control device, the control device is electrically connected to the first temperature sensor, the second temperature sensor, and the first temperature control device and the second temperature control device. The water washing filter device with a temperature control device as claimed in claim 1, wherein the first water shower assembly comprises a plurality of first water shower layers, and the first water shower layers are stacked on each other. The water washing filter device with a temperature control device as claimed in claim 1, wherein the second water shower assembly comprises a plurality of second water shower layers, and the second water shower layers are stacked on each other.

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