CN215175766U - Air environment control system - Google Patents
Air environment control system Download PDFInfo
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- CN215175766U CN215175766U CN202120689901.1U CN202120689901U CN215175766U CN 215175766 U CN215175766 U CN 215175766U CN 202120689901 U CN202120689901 U CN 202120689901U CN 215175766 U CN215175766 U CN 215175766U
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Abstract
The air environment control system filters the flowing fluid by a first filtering component and a water washing component to reduce the content of particles in the fluid, controls the temperature of the fluid by a first temperature control component, reduces the content of water vapor of the fluid by a dehumidifying component, reduces the particles in the air by the system, controls the temperature and the humidity of the air simultaneously, pumps the fluid by an air supply component to enable the fluid to flow in each channel in the air environment control system, and controls the air change of the environment by the system.
Description
Technical Field
The present application relates to an air environment control system, and more particularly, to a system for controlling an air environment inside a factory.
Background
With the development of the times, most of the scientific and technological devices in daily life are based on semiconductor chips, and various functions are executed through programmable application. The application level of semiconductors is distributed to smart phones, automobiles, networks, cloud data, industrial automation, smart homes and various consumer electronics products, and the demands of the industry end on the development of semiconductor key technologies and the supply of components and parts are increasing day by day, so that the overall potential market is driven to expand stably.
As chips in various fields are developed, the wire diameter of semiconductor wires is gradually reduced, and the influence caused by air particles inside factories is also increased, so that the control and monitoring methods of gaseous molecular pollutants (AMC) are gradually emphasized.
The trace pollutant, which is present in the air in a gaseous form at normal temperature and pressure, is a gaseous molecular pollutant (AMC) which has a content not causing personal injury but enough affecting the product. AMC can be classified into the following categories depending on its properties.
MA, molecular acid (acid): corrosive substances having chemical reaction characteristics of electron acceptors. Such as: HF. H2SO4, HCl, HNO3, H3PO4, HBO 3.
MB, molecular base (base): corrosive substances, having the chemical reaction characteristics of an electron donor. Such as ammonia, tetramethylammonium hydroxide (TMAH), trimethylamine, triethylalamine, trimethylisilazane, Hexamethylenezane (HMDS), 1-methyl-2-pyrrolidone (NMP), cyclohexylamine, diethyleneethanolamine, methyleneamine, dimethylalamine, and ethanolamine.
MC, coagulum (condensable): substances other than water, which have a boiling point at atmospheric pressure greater than room temperature, have the ability to condense on clean surfaces. Such as: silicone (boiling point >150 ℃), hydrocarbon (boiling point >150 ℃).
MD, dope (dope): is a chemical element that can change the electrical property of semiconductor material. Such as: boron, phophorous.
MM, metal contamination (metal): since mass production of copper process and use of organometallic precursor (HEPA) may also become contaminants in a gaseous form or in a metal compound having a particle size smaller than a High Efficiency Particulate Air (HEPA) filter, they are regarded as class 5 AMC and are considered to be important.
In order to avoid the electrical performance of the product from being affected, the semiconductor and wafer manufacturing processes are all placed in a strictly controlled environment, i.e., a clean room; the air quality control of the prior dust-free room mainly focuses on particles, airflow and temperature and humidity; however, in recent years, the semiconductor industry has begun to revive the definition of so-called clean rooms; as the diameter of semiconductor wires is reduced, the influence of electrostatic damage and gaseous molecular pollutants is becoming more and more obvious, and therefore, there is a need in the industry for a system and a device capable of stably controlling the air environment of a factory to further reduce the defective products generated by air particles.
In view of the above problems in the prior art, the present application provides an air environment control system, which utilizes a filter assembly, a temperature control assembly, a washing assembly, a dehumidifying assembly and an air supply assembly to control an air environment, utilizes the filter assembly and the washing assembly to filter particles in air, utilizes the temperature control assembly to control a temperature of air flowing through the system, and utilizes the dehumidifying assembly to control a moisture content in the air, so as to reduce the particles in the air and simultaneously control the temperature and humidity of the air.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved in the present application is to provide an air environment control system, which utilizes a filtering component, a temperature control component, a water washing component, a dehumidifying component and an air supply component to control the particle content, the temperature and the humidity of the air environment, utilizes the filtering component and the water washing component to filter particles in the air, controls the temperature of the air flowing through the system by the temperature control component, controls the moisture content in the air by the dehumidifying component, and controls the air environment through the system.
To achieve the above-mentioned objectives and advantages, the present application provides an air environment control system disposed at an inner side of a housing, two ends of the housing respectively having an air inlet and an air outlet, the air inlet receiving a fluid, the air environment control system comprising: a first filtering component, a first temperature control component, a water washing component, a dehumidifying component and an air supply component, wherein the first filtering component comprises a first filtering channel and a first filtering piece, one end of the first filtering channel is communicated with the air inlet, the first filtering piece is arranged at one inner side of the first filtering channel, the first filtering piece filters the fluid passing through the first filtering channel, the first temperature control component comprises a first channel, one end of the first channel is communicated with the other end of the first filtering channel, the first temperature control component is used for controlling the temperature of the fluid passing through the first channel, the water washing component comprises a second channel, one end of the second channel is communicated with the other end of the first channel, the water washing component sprays a liquid to the fluid passing through the second channel, the dehumidifying component comprises a third channel, one end of the third channel is communicated with the other end of the second channel, the dehumidifying component is used for dehumidifying the fluid passing through the third channel, the air supply component comprises a fifth channel, one end of the fifth channel is communicated with the other end of the third channel, the other end of the fifth channel is communicated with the air outlet, and the air supply component is used for conveying the fluid passing through the fifth channel.
In an embodiment of the present application, the first temperature control assembly further includes a first heat exchanging device and a first temperature sensing assembly, and the first heat exchanging device and the first temperature sensing assembly are sequentially disposed at an inner side of the first channel.
In an embodiment of the present application, the washing assembly further includes a water spraying device disposed at an inner side of the second channel and spraying the liquid to the second channel, and a water discharging device disposed below the water spraying device and receiving the liquid.
In an embodiment of the present application, the dehumidifying element further includes an evaporator and a humidity sensing element, and the evaporator and the humidity sensing element are sequentially disposed at an inner side of the third channel.
In an embodiment of the present application, a second temperature control assembly is further included between the dehumidifying assembly and the air supply assembly, a fourth channel is disposed on an inner side of the second temperature control assembly, one end of the fourth channel is communicated with the other end of the third channel, the second temperature control assembly is used for controlling the temperature of the fluid passing through the fourth channel, and one end of the fifth channel of the air supply assembly is communicated with the other end of the fourth channel.
In an embodiment of the present application, the second temperature control device further includes a second heat exchanging device and a second temperature sensing device, and the second heat exchanging device and the second temperature sensing device are sequentially disposed at an inner side of the fourth channel.
In an embodiment of the present application, the filter further includes a second filtering component, which includes a second filtering channel and a second filtering component, one end of the second filtering channel is connected to the other end of the fifth channel, the other end of the second filtering channel is connected to the air outlet, the second filtering component is disposed at an inner side of the second filtering channel, and the second filtering component filters the fluid passing through the second filtering channel.
In an embodiment of the present application, the blowing assembly further includes a blower disposed at an inner side of the fifth channel.
To achieve the above-mentioned objectives and advantages, the present application provides an air environment control system disposed at an inner side of a housing, two ends of the housing respectively having an air inlet and an air outlet, the air inlet receiving a fluid, the air environment control system comprising: a first filter assembly, a first temperature control assembly, a water washing assembly, a dehumidifying assembly, a second temperature control assembly, an air supply assembly and a second filter assembly, wherein the first filter assembly is arranged at an inner side of the first chamber, the first filter assembly comprises a first filter passage and a first filter element, one end of the first filter passage is communicated with the air inlet, the first filter element is arranged at an inner side of the first filter passage, the first filter element filters the fluid passing through the first filter passage, the first temperature control assembly is arranged at the inner side of the first chamber, the first temperature control assembly comprises a first passage, one end of the first passage is communicated with the other end of the first filter passage, the first temperature control assembly is used for controlling the temperature of the fluid passing through the first passage, and the water washing assembly is arranged at the inner side of the first chamber, the water washing component comprises a second channel, one end of the second channel is communicated with the other end of the first channel, the water washing component sprays liquid to the fluid passing through the second channel, the dehumidifying component is arranged at the inner side of the second cavity, the dehumidifying component comprises a third channel, one end of the third channel receives the fluid, the dehumidifying component is used for dehumidifying the fluid passing through the third channel, the second temperature control component is arranged at the inner side of the second cavity, a fourth channel is arranged at one inner side of the second temperature control component, one end of the fourth channel is communicated with the other end of the third channel, the second temperature control component is used for controlling the temperature of the fluid passing through the fourth channel, the air supply component is arranged at the inner side of the second cavity, the air supply component comprises a fifth channel, one end of the fifth channel is communicated with the other end of the third channel, the air supply assembly is used for conveying the fluid passing through the fifth channel, the second filtering assembly is arranged on the inner side of the second chamber and comprises a second filtering channel and a second filtering piece, one end of the second filtering channel is communicated with the other end of the fifth channel, the other end of the second filtering channel is communicated with the air outlet, the second filtering piece is arranged on the inner side of the second filtering channel, and the second filtering piece filters the fluid passing through the second filtering channel.
Other features and embodiments of the present application will be described in detail below with reference to the drawings.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a first embodiment of the present application;
FIG. 2 is a schematic fluid flow diagram of a first embodiment of the present application;
FIG. 3 is a schematic structural diagram of a second embodiment of the present application;
FIG. 4 is a schematic fluid flow diagram of a second embodiment of the present application; and
fig. 5 is a schematic structural diagram of a third embodiment of the present application.
Description of the symbols
1 air environmental control system 2 casing 3 air inlet
4 air outlet 5 first cavity 6 second cavity
10 first filter assembly 12 first filter pass 14 first filter element
20 first temperature control assembly 22 first channel
24 first heat exchange device 26 first temperature sensing assembly 30 water wash assembly
32 second channel 34 sprinkler 36 drain
40 dehumidification assembly 42 third channel 44 evaporator
46 humidity sensing assembly 50 blower assembly 52 fifth channel
54 blower 60 second temperature control assembly 62 fourth channel
64 second heat exchange arrangement 66 second temperature sensing assembly 70 second filter assembly
72 second Filter passage 74 second Filter A fluid
L liquid
Detailed Description
The positional relationship described in the following embodiments includes: the top, bottom, left and right, unless otherwise indicated, are based on the orientation of the elements in the drawings.
The application provides an air environment control system, it utilizes filter assembly, temperature control subassembly, washing subassembly, dehumidification subassembly and air supply subassembly control air environment, utilizes the particle in the filter assembly and the washing subassembly filtration air to with the temperature control subassembly control the temperature of the air of system of flowing through, with the aqueous vapor content in the dehumidification subassembly control air again, reduce the particle in the air with this system, and can control the system of its temperature, humidity simultaneously.
Referring to fig. 1 and 2, fig. 1 is a schematic structural diagram of a first embodiment of the present application, and fig. 2 is a schematic fluid flow diagram of the first embodiment of the present application, as shown in the drawings, the present embodiment is the first embodiment, which is an air environment control system 1, which is disposed on an inner side of a housing 2, two ends of the housing 2 are respectively provided with an air inlet 3 and an air outlet 4, the air inlet 3 receives a fluid a, and the air environment control system includes a first filtering assembly 10, a first temperature control assembly 20, a water washing assembly 30, a dehumidifying assembly 40, and an air blowing assembly 50.
Referring to fig. 1 and 2 again, in the embodiment, as shown in the drawings, the first filter assembly 10 includes a first filter passage 12 and a first filter element 14, one end of the first filter passage 12 is communicated with the air inlet 3, the first filter element 14 is disposed at an inner side of the first filter passage 12, the first filter element 14 filters the fluid a passing through the first filter passage 12, the first temperature control assembly 20 includes a first passage 22, one end of the first passage 22 is communicated with the other end of the first filter passage 12, the first temperature control assembly 20 is used for controlling the temperature of the fluid a passing through the first passage 22, the water washing assembly 30 includes a second passage 32, one end of the second passage 32 is communicated with the other end of the first passage 22, the water washing assembly 30 sprays a liquid L to the fluid a passing through the second passage 32, the dehumidifying assembly 40 includes a third passage 42, one end of the third channel 42 is communicated with the other end of the second channel 32, the dehumidifying component 40 is used for dehumidifying the fluid a passing through the third channel 42, the air supply component 50 includes a fifth channel 52, one end of the fifth channel 52 is communicated with the other end of the third channel 42, the other end of the fifth channel 52 is communicated with the air outlet 4, and the air supply component 50 is used for conveying the fluid a passing through the fifth channel 52 and sending the fluid a out of the air outlet 4.
In the present embodiment, the first temperature control assembly 20 further includes a first heat exchanging device 24 and a first temperature sensing assembly 26, the first heat exchanging device 24 and the first temperature sensing assembly 26 are sequentially disposed at an inner side of the first channel 22, the first temperature sensing assembly 26 senses the fluid a flowing through the first heat exchanging device 24 to adjust the cooling and heating efficiency of the first heat exchanging device 24; in the present embodiment, the first heat exchanging device 24 uses dry coil (dry coil), but the application is not limited thereto.
Continuing above, in this embodiment, the washing assembly 30 further includes a water spraying device 34 and a water draining device 36, the water spraying device 34 is disposed at an inner side of the second channel 32 and sprays the liquid L to the inner side of the second channel 32, the water draining device 36 is disposed below the water spraying device 34 to receive the liquid L for recycling, and the fluid a passes through the water draining device 36 to the water spraying device 34; in the embodiment, the liquid L is water, and the drainage device 36 is a water tray and a drainage hole, but the application is not limited thereto.
In the present embodiment, the dehumidifying element 40 further includes an evaporator 44 and a humidity sensing element 46, the evaporator 44 and the humidity sensing element 46 are sequentially disposed at an inner side of the third channel 42, and the humidity sensing element 46 senses the fluid a flowing through the evaporator 44 to adjust the dehumidifying efficiency of the evaporator 44.
In the present embodiment, the blowing assembly 50 further includes a blower 54, and the blower 54 is disposed inside the fifth channel 52 to pump the fluid a, so that the fluid a can flow through the channels.
Referring again to fig. 1 and 2, as shown, the present embodiment further discloses the flow path of the fluid a, the fluid a is sucked from the air inlet 3 to the first filter passage 12 and is filtered by the first filter member 14, removing the particles of the fluid a, the fluid a is then heated or cooled by the first heat exchange means 24 in the first channel 22, the fluid A enters the second channel 32 from one end of the drainage device 36 and is sprayed by the spraying device 34 to the liquid L, further reducing the particle content of the fluid A with the liquid A, the fluid a then enters the third channel 42 and is dehumidified by the evaporator 44 to reduce the moisture content of the fluid a, and finally the fluid a is drawn by the blower 54 through the fifth channel 52 and is delivered out of the outlet 4, thereby completing the fluid path of the present embodiment.
In the air environment control system 1 of the present embodiment, the first filtering component 10 and the water washing component 30 are utilized to filter the particle content of the fluid a, the first temperature control component 20 is utilized to control the temperature of the fluid a, the dehumidifying component 40 is utilized to control the humidity of the fluid a, and the air supply component 50 delivers the fluid a to improve the air of the external environment.
Referring to fig. 3 and 4, fig. 3 is a schematic structural diagram of a second embodiment of the present application, fig. 4 is a schematic fluid flow diagram of the second embodiment of the present application, and as shown in the drawing, the present embodiment is the second embodiment, which is based on the first embodiment, a second temperature control assembly 60 is further included between the dehumidifying assembly 40 and the air supply assembly 50, and a second filtering assembly 70 is disposed behind the air supply assembly 50.
Referring to fig. 3 and 4 again, in the present embodiment, a fourth channel 62 is disposed on an inner side of the second temperature control element 60, one end of the fourth channel 62 is communicated with the other end of the third channel 42, the second temperature control element 60 is used for controlling the temperature of the fluid a passing through the fourth channel 62, one end of the fifth channel 52 of the air supply element 50 is communicated with the other end of the fourth channel 62, the second filter element 70 includes a second filter channel 72 and a second filter element 74, one end of the second filter channel 72 is communicated with the other end of the fifth channel 52, the other end of the second filter channel 72 is communicated with the air outlet 4, the second filter element 74 is disposed on an inner side of the second filter channel 74, the second filter element 74 filters the fluid a passing through the second filter channel 72 to further reduce the particles of the fluid a, and removing additional contamination generated by the components; other components of this embodiment are the same as those of the first embodiment, and thus are not described again.
In the present embodiment, the second temperature control assembly 60 further includes a second heat exchanging device 64 and a second temperature sensing assembly 66, the second heat exchanging device 64 and the second temperature sensing assembly 66 are sequentially disposed at an inner side of the fourth channel 62, the second temperature sensing assembly 66 senses the fluid a flowing through the second heat exchanging device 64 to adjust the cooling and heating efficiency of the second heat exchanging device 64; in the present embodiment, the second heat exchanging device 64 is a condenser (condenser), but the present application is not limited thereto.
Referring again to fig. 3 and 4, as shown in the drawings, the flow path of the fluid a is further disclosed, the fluid a enters the third channel 42 and is dehumidified by the evaporator 44 to reduce the moisture content of the fluid a, the fluid a enters the four channels 62 and passes through the second heat exchanging device 64 to control the temperature of the fluid a, after the fluid a enters the fifth channel 52, the blower 54 delivers the fluid a to the second filtering channel 72, the second filter 74 filters the fluid a passing therethrough, and finally the fluid a is delivered out of the air outlet 4.
An air environment control system 1 of the present embodiment utilizes the first filtering component 10 and the water washing component 30 to filter the particle content of the fluid a, the first temperature control component 20 to control the temperature of the fluid a, the dehumidifying component 40 to control the humidity of the fluid a, the air supply component 50 to deliver the fluid a, the second temperature control component 60 to stabilize the temperature of the fluid a passing through the water washing component 30 and the dehumidifying component 40, and the second filtering component 70 to further remove the additional pollution generated by these components.
Referring to fig. 5, which is a schematic structural diagram of a third embodiment of the present application, as shown in the drawing, the third embodiment is based on the second embodiment, and further includes a first filtering assembly 10, a first temperature control assembly 20, a washing assembly 30, a dehumidifying assembly 40, a second temperature control assembly 60, an air blowing assembly 50, and a second filtering assembly 70 respectively disposed in a first chamber 5 and a second chamber 6 included in the housing 2, wherein one end of the first chamber 5 is disposed with an air inlet 3, the air inlet 3 receives a fluid a, one end of the second chamber 6 is communicated with the other end of the first chamber 5, and the other end of the second chamber 6 is disposed with an air outlet 4.
Referring to fig. 5 again, in the present embodiment, as shown in the figure, the first filtering component 10, the first temperature control component 20, the water washing component 30, the dehumidifying component 40 and the second temperature control component 60 are disposed at an inner side of the first chamber, and the air supply component 50 and the second filtering component 70 are disposed at an inner side of the second chamber, so that the components are disposed in the housing 2.
To sum up, the application provides an air circumstance control system, it utilizes filter assembly, the control by temperature change subassembly, washing subassembly, dehumidification subassembly and air supply subassembly control air circumstance, utilize the particle in filter assembly and the washing subassembly filtered air, and with the temperature of the air of control by temperature change subassembly control flow through the system, the aqueous vapor content in the dehumidification subassembly control air again, reduce the particle in the air with this system, and control its temperature simultaneously, humidity, further solve prior art along with the reduction of semiconductor wire line footpath, gaseous state molecular pollutant makes the defective products's that makes the thing produce problem.
The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.
Claims (9)
1. An air environment control system disposed inside a housing, two ends of the housing each having an air inlet and an air outlet, the air inlets receiving a fluid, the air environment control system comprising:
a first filter assembly, including a first filter channel and a first filter element, one end of the first filter channel is communicated with the air inlet, the first filter element is arranged at an inner side of the first filter channel, and the first filter element filters the fluid passing through the first filter channel;
a first temperature control assembly comprising a first channel, one end of the first channel being in communication with the other end of the first filtration channel, the first temperature control assembly being for controlling the temperature of the fluid passing through the first channel;
a water washing component, which comprises a second channel, wherein one end of the second channel is communicated with the other end of the first channel, and the water washing component sprays a liquid on the fluid passing through the second channel;
the dehumidifying component comprises a third channel, one end of the third channel is communicated with the other end of the second channel, and the dehumidifying component is used for dehumidifying the fluid passing through the third channel; and
and the air supply assembly comprises a fifth channel, one end of the fifth channel is communicated with the other end of the third channel, the other end of the fifth channel is communicated with the air outlet, and the air supply assembly is used for conveying the fluid passing through the fifth channel.
2. The system of claim 1, wherein the first temperature control assembly further comprises a first heat exchanging device and a first temperature sensing assembly, the first heat exchanging device and the first temperature sensing assembly being sequentially disposed at an inner side of the first channel.
3. The system of claim 1, wherein the washing assembly further comprises a water spray device disposed inside the second channel for spraying the liquid to the second channel, and a water discharge device disposed below the water spray device for receiving the liquid.
4. The system of claim 1, wherein the dehumidifying element further comprises an evaporator and a humidity sensing element, and the evaporator and the humidity sensing element are sequentially disposed at an inner side of the third channel.
5. The system of claim 1, further comprising a second temperature control element disposed between the dehumidifying element and the air blowing element, wherein a fourth channel is disposed inside the second temperature control element, one end of the fourth channel is connected to the other end of the third channel, the second temperature control element is used for controlling the temperature of the fluid passing through the fourth channel, and one end of the fifth channel of the air blowing element is connected to the other end of the fourth channel.
6. The system of claim 5, wherein the second temperature control element further comprises a second heat exchanging device and a second temperature sensing element, the second heat exchanging device and the second temperature sensing element being sequentially disposed at an inner side of the fourth channel.
7. The system according to claim 1, further comprising a second filter assembly including a second filter passage and a second filter element, one end of the second filter passage communicating with the other end of the fifth passage, the other end of the second filter passage communicating with the air outlet, the second filter element being disposed inside the second filter passage, the second filter element filtering the fluid passing through the second filter passage.
8. The system of claim 1, wherein the blower assembly further comprises a blower disposed inside the fifth channel.
9. An air environment control system is arranged on an inner side of a shell, the shell comprises a first chamber and a second chamber, one end of the first chamber is provided with an air inlet, the air inlet receives a fluid, one end of the second chamber is communicated with the first chamber, the other end of the second chamber is provided with an air outlet, and the air environment control system is characterized by comprising:
a first filter assembly disposed inside the first chamber, the first filter assembly including a first filter passage and a first filter element, one end of the first filter passage being communicated with the air inlet, the first filter element being disposed inside the first filter passage, the first filter element filtering the fluid passing through the first filter passage;
a first temperature control assembly disposed inside the first chamber, the first temperature control assembly including a first channel, one end of the first channel being in communication with the other end of the first filtering channel, the first temperature control assembly being for controlling a temperature of the fluid passing through the first channel;
a water washing component arranged at the inner side of the first chamber, wherein the water washing component comprises a second channel, one end of the second channel is communicated with the other end of the first channel, and the water washing component sprays a liquid to the fluid passing through the second channel;
a dehumidifying component disposed inside the first chamber, the dehumidifying component comprising a third channel, one end of the third channel receiving the fluid, the dehumidifying component being for dehumidifying the fluid passing through the third channel;
a second temperature control component, which is arranged at the inner side of the first chamber, wherein a fourth channel is arranged at one inner side of the second temperature control component, one end of the fourth channel is communicated with the other end of the third channel, and the second temperature control component is used for controlling the temperature of the fluid passing through the fourth channel;
the air supply assembly is arranged on the inner side of the second cavity and comprises a fifth channel, one end of the fifth channel is communicated with the other end of the third channel, and the air supply assembly is used for conveying the fluid passing through the fifth channel; and
a second filter assembly, it sets up in this inboard of this second cavity, and this second filter assembly contains a second and filters passageway and a second and filters the piece, and this second filters the other end of passageway this fifth of one end intercommunication, and this second filters the other end of passageway and communicates this gas outlet, and this second filters the piece and sets up in this second filters inboard of passageway, and this second filters the piece and filters this fluid through this second and filters the passageway.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120689901.1U CN215175766U (en) | 2021-04-06 | 2021-04-06 | Air environment control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120689901.1U CN215175766U (en) | 2021-04-06 | 2021-04-06 | Air environment control system |
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| CN215175766U true CN215175766U (en) | 2021-12-14 |
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| CN202120689901.1U Active CN215175766U (en) | 2021-04-06 | 2021-04-06 | Air environment control system |
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