CN216825437U - Water washing filtering device with temperature control device - Google Patents
Water washing filtering device with temperature control device Download PDFInfo
- Publication number
- CN216825437U CN216825437U CN202220082029.9U CN202220082029U CN216825437U CN 216825437 U CN216825437 U CN 216825437U CN 202220082029 U CN202220082029 U CN 202220082029U CN 216825437 U CN216825437 U CN 216825437U
- Authority
- CN
- China
- Prior art keywords
- fluid
- control device
- water
- temperature control
- accommodating space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Control Of Washing Machine And Dryer (AREA)
Abstract
The application provides a water washing and filtering device with a temperature control device, which comprises a first water washing component, a second water washing component and a connecting pipeline, wherein a first water spraying device, a first water spraying component and a first circulating component are arranged on the inner side of a first shell of the first water washing component; by using a first temperature control device included in the first circulation component and a second temperature control device included in the second circulation component, the temperature difference of the flowing fluid is ensured, and the integral filtering efficiency is improved.
Description
Technical Field
The present application relates to a water washing filter device with a temperature control device, and more particularly, to a water washing filter device using a heating device to generate a temperature difference in a fluid.
Background
As the size of semiconductor devices is reduced, the control and monitoring of gaseous molecular contaminants (AMC) is also becoming increasingly important. In order to avoid the electrical performance of electronic products from being affected, semiconductor and wafer manufacturing processes are placed in a tightly controlled environment, i.e., clean room. The air quality control of the dust-free room in the prior art mainly focuses on particles, airflow and temperature and humidity; in recent years, however, the semiconductor industry has begun to revive the definition of so-called clean rooms. As the size of semiconductors is reduced, electrostatic destruction and the influence of gaseous molecular pollutants are becoming more and more significant, and devices for removing gaseous molecular pollutants are also gradually entering the market.
The common device for removing gaseous molecular pollutants is a water washing and filtering device provided with a water spraying device and a water spraying material, the water washing and filtering device is usually used on a constant temperature and humidity micro-pollution treatment device, and the water mist is contacted with the flowing air to remove trace gaseous molecular pollutants in the air, and the air pollutants can be roughly divided into granular pollutants and gaseous pollutants.
However, although the prior art water washing filter device has good efficiency for removing gas pollutants, the removal efficiency of particulate pollutants, especially particulate pollutants mainly comprising sub-micron (PM 0.01 to PM1) is relatively poor, and thus there is a need in the industry for a water washing filter device capable of effectively removing particulate pollutants.
In view of the above problems of the prior art, the present application provides a water washing filtering device with a temperature control device, in which a first fluid enters a first water washing assembly, the first water washing assembly heats the first fluid passing through with a heated second fluid, and after the first fluid flows to a second water washing assembly, the second water washing assembly contacts with a lower-temperature third fluid, so that the first fluid passing through and the third fluid have a temperature difference, thereby generating a thermophoresis phenomenon, and providing a water washing filtering device capable of effectively removing granular pollutants.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved in the present application is to provide a water washing filtering device with a temperature control device, which utilizes the combination of two water washing components, a first fluid enters into the first water washing component, a second fluid in the first water sprinkling device is heated by the temperature control device contained in the first water washing component, the second fluid is sprayed and correspondingly heated to pass through the first fluid, the first fluid flows to the second water washing component, and the temperature of a third fluid in the second water sprinkling device is controlled by the temperature control device contained in the second water washing component, so that the passing first fluid and the passing third fluid have a temperature difference, thermophoresis phenomenon is generated, and the overall filtering efficiency is improved.
To achieve the above-mentioned objects and advantages, the present application provides a water washing and filtering device with a temperature control device, comprising: a first washing subassembly, a second washing subassembly and a connecting line, this first washing subassembly contains: a first shell, wherein a first accommodating space is arranged at one inner side of the first shell, an air inlet is formed at one end of the first shell, and the air inlet is communicated with the first accommodating space; the first water sprinkling device is arranged in the first accommodating space, arranged below the air inlet and provided with a spacing space; the first water spraying assembly is arranged in the first accommodating space and is arranged below the first water spraying device; the first circulating assembly comprises a first pump and a first temperature control device, one end of the first pump is communicated with the lower part of the first accommodating space, one end of the first temperature control device is communicated with the other end of the first pump, and the other end of the first temperature control device is communicated with the first water spraying device; this second washing subassembly sets up in one side of this first washing subassembly, and this second washing subassembly contains: a second shell, a second containing space is arranged at one inner side of the second shell, an air outlet is arranged at one end of the second shell, and the air outlet is communicated with the second containing space; the second water sprinkling device is arranged in the second accommodating space, arranged below the air outlet and provided with a spacing space; the second water spraying assembly is arranged in the second accommodating space and is arranged below the second water spraying device; the second circulating assembly comprises a second pump and a second temperature control device, one end of the second pump is communicated with the lower part of the second accommodating space, one end of the second temperature control device is communicated with the other end of the second pump, and the other end of the second temperature control device is communicated with the second water spraying device; one end of the connecting pipeline is communicated with the first accommodating space, and the other end of the connecting pipeline is communicated with the second accommodating space; the fluid passing through the first washing component is heated by the structure and then mixed with the fluid with lower temperature in the second washing component, so that the filtering efficiency of the washing component is improved.
In an embodiment of the present application, the second washing assembly further includes a water removal device disposed in the second accommodating space and above the second water spraying device.
In an embodiment of the application, a first fluid enters the first receiving space through the air inlet, the first fluid sequentially passes through the first sprinkling device and the first sprinkling assembly, the first fluid enters the connecting pipeline after passing through the first sprinkling assembly, the first fluid enters the second receiving space after passing through the connecting pipeline, the first fluid sequentially flows to the second sprinkling device and the second sprinkling assembly, and the first fluid is discharged through the air outlet after passing through the second sprinkling assembly.
In an embodiment of the present application, the first sprinkling device sprinkles a second fluid to the first sprinkling assembly, after the second fluid passes through the first sprinkling assembly, the first pump pumps the second fluid to the first temperature control device, after the second fluid passes through the first temperature control device, the second fluid enters the first sprinkling device; the second sprinkling device sprays a third fluid to the second sprinkling assembly, the second pump pumps the third fluid to the second temperature control device after the third fluid passes through the second sprinkling assembly, and the third fluid enters the second sprinkling device after the third fluid passes through the second temperature control device.
In an embodiment of the present application, a temperature of the first fluid is greater than a temperature of the third fluid.
In an embodiment of the present application, the first temperature sensor is disposed inside the connection pipeline
In an embodiment of the present application, the air outlet further includes a second temperature sensor disposed at an inner side of the air outlet.
In an embodiment of the present application, the temperature control device further includes a control device electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device and the second temperature control device.
In an embodiment of the present application, the first water spraying assembly includes a plurality of first water spraying layers, and the first water spraying layers are stacked.
In an embodiment of the present application, the second shower assembly includes a plurality of second shower layers stacked on each other.
Other features and embodiments of the present application will be described in detail below with reference to the drawings.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of the present application;
FIG. 2A is a schematic fluid flow diagram of an embodiment of the present application;
FIG. 2B is a schematic fluid flow diagram of an embodiment of the present application;
FIG. 3 is a schematic diagram of other components of an embodiment of the present application; and
fig. 4 is a signal transmission diagram according to an embodiment of the present application.
Description of the symbols
1 Water washing and filtering device with temperature control device
10 first water washing assembly 12 first housing
121 first receiving space 122 air inlet
14 first sprinkler 16 first water spray assembly
162 first shower layer 18 first circulation assembly
182 first pump 184 first temperature control device
20 second water wash assembly 22 second housing
221 second accommodation space 222 air outlet
24 second sprinkler 26 second water spray assembly
262 second trickle layer 28 second circulation assembly
282 second Pump 284 second temperature control device
27 water removal device 29 second temperature sensor
292 second temperature signal 30 connecting pipe fitting
31 first temperature sensor 312 first temperature signal
40 control means 42 first control signal
44 second control signal A first fluid
W1 second fluid W2 third fluid
Detailed Description
The positional relationship described in the following embodiments includes: the top, bottom, left and right, unless otherwise indicated, are based on the orientation of the elements in the drawings.
Referring to fig. 1, which is a schematic structural diagram of an embodiment of the present application, as shown in the figure, the embodiment is a water washing filtering apparatus 1 with a temperature control device, which includes a first water washing component 10, a second water washing component 20 and a connecting pipeline 30; in this embodiment, the first washing module 10 is connected to one end of the connecting pipe 30, and the second washing module 20 is connected to the other end of the connecting pipe 30, so that fluid can flow from the first washing module 10 to the second washing module 20.
Referring to fig. 1 again, in the present embodiment, the first washing assembly 10 includes a first housing 12, a first spraying device 14, a first spraying assembly 16 and a first circulating assembly 18, a first accommodating space 121 is disposed at an inner side of the first housing 12 for accommodating the assemblies, an air inlet 122 is disposed at one end of the first housing 12, the air inlet 122 is communicated with the first accommodating space 121, so that fluid can enter the first accommodating space 121, the first spraying device 14 is disposed in the first accommodating space 121 and disposed below the air inlet 122, and has a space, the first spraying assembly 16 is disposed in the first accommodating space 121 and disposed below the first spraying device 14, the first circulating assembly 18 includes a first pump 182 and a first temperature control device 184, one end of the first pump 182 is communicated with a lower portion of the first accommodating space 121, one end of the first temperature control device 184 is connected to the other end of the first pump 182, and the other end of the first temperature control device 184 is connected to the first sprinkler 14; in the embodiment, the first spraying device 14 sprays a second fluid W1, and the second fluid W1 may be water.
In the present embodiment, the second washing assembly 20 is disposed at one side of the first washing assembly 10, the second washing assembly 20 includes a second housing 22, a second spraying device 24, a second spraying device 26 and a second circulating assembly 28, a second accommodating space 221 is disposed at an inner side of the second housing 22 for accommodating the assemblies, an air outlet 222 is disposed at one end of the second housing 22 for discharging the fluid out of the second accommodating space 221, the air outlet 222 is communicated with the second accommodating space 221, the second spraying device 24 is disposed in the second accommodating space 221 and disposed below the air outlet 222, the second spraying device 26 is disposed in the second accommodating space 221 and disposed below the second spraying device 24, the second circulating assembly 28 includes a second pump 282 and a second temperature control device 284, one end of the second pump 282 is communicated with a lower portion of the second accommodating space 221, one end of the second temperature control device 284 is communicated with the other end of the second pump 282, the other end of the second temperature control device 284 is communicated with the second water spraying device 24, one end of the connecting pipeline 30 is communicated with the first accommodating space 121, the other end of the connecting pipeline 30 is communicated with the second accommodating space 221, and the connecting pipeline 30 is communicated with the first shell 12 and the second shell 22; in the embodiment, the second spraying device 24 sprays a third fluid W2, and the second fluid W2 may be water.
In the present embodiment, the first sprinkling assembly 16 includes a plurality of first sprinkling layers 16, the first sprinkling layers 162 are a sprinkling filler, the first sprinkling layers 162 are stacked and provided with a plurality of through holes, the first sprinkling layers 162 are used for receiving and sprinkling the second fluid W1 by the first sprinkling device 14, the second fluid W1 is splashed into fine water drops or water films for a plurality of times, so as to increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact the liquid.
In the present embodiment, the second water sprinkling assembly 26 includes a plurality of second water sprinkling layers 262, the second water sprinkling layers 262 are water sprinkling fillers, the second water sprinkling layers 262 are overlapped with each other and provided with a plurality of through holes, the second water sprinkling layers 262 are used for receiving and sprinkling the third fluid W2 by the second sprinkling device 24, the third fluid W2 is splashed into fine water drops or water films for a plurality of times, so as to increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact with the liquid.
Referring to fig. 2A to 2B, which are schematic fluid flow diagrams of an embodiment of the present disclosure, as shown in the present embodiment, a first fluid a (e.g., air) enters through the air inlet 122 of the first shell 12, the first fluid a flows into the accommodating space 121 of the first shell 12 and flows to the first sprinkling device 14, after the first fluid a passes through the first sprinkling device 14, the first fluid a flows to the first sprinkling assembly 16, and the first fluid a passes through the first sprinkling layers 162, after the first fluid a passes through the first sprinkling assembly 16, the first fluid a enters the connecting pipeline 30, after the first fluid a passes through the connecting pipeline 30, the first fluid a enters the second accommodating space 221 and flows to the second sprinkling device 24, after the first fluid a passes through the second sprinkling device 24, the first fluid a flows to the second water spraying assembly 26, and the first fluid a passes through the second water spraying layers 262, and after the first fluid a passes through the second water spraying assembly 26, the first fluid a is discharged from the air outlet 222, thereby completing one cycle.
Referring to fig. 2A to 2B again, in the embodiment, as shown in fig. 2A to 2B, the first sprinkling device 14 sprinkles the second fluid W1 to the first sprinkling assembly 16, and the second fluid W1 contacts and mixes with the first fluid a through the first sprinkling layers 162 to remove the gaseous molecular pollutants contained in the first fluid a, after the second fluid W1 passes through the first sprinkling assembly 16, the second fluid W1 flows to the bottom of the first accommodating space 121 to be concentrated, for example, the second fluid W1 flows to the water collecting tank of the first accommodating space 121 to be concentrated, the first pump 182 included in the first circulation assembly 18 pumps the second fluid W1 at the bottom of the first accommodating space 121 and conveys the second fluid W1 to the first temperature control device 184, after the first temperature control device heats the second fluid W1, the second fluid W1 flows to the second temperature control device 184, completing a cycle, wherein the second fluid W1 correspondingly heats the contacted first fluid a, so that the first fluid a correspondingly increases in temperature; in this embodiment, the temperature of the second fluid W1 is greater than the temperature of the first fluid a.
Referring to fig. 2A to 2B again, in the embodiment, as shown in fig. 2A to 2B, the second sprinkling device 24 sprinkles the third fluid W2 to the second sprinkling assembly 26, and the third fluid W2 contacts and mixes with the first fluid a through the second sprinkling layers 262 to remove the gaseous molecular pollutants contained in the first fluid a, after the third fluid W2 passes through the second sprinkling assembly 26, the third fluid W2 flows to the bottom of the second accommodating space 221 to be concentrated, for example, the third fluid W2 flows to the water collecting tank of the second accommodating space 221 to be concentrated, the second pump 282 included in the second circulation assembly 28 extracts the third fluid W2 at the bottom of the second accommodating space 221 and conveys the third fluid W2 to the second temperature control device 284, after the second temperature control device 284 heats the third fluid W2, the third fluid W2 flows to the second sprinkling device 24, completing one cycle; in this embodiment, the temperature of the first fluid a is higher than the temperature of the third fluid W2, so that thermophoresis (or simply thermophoresis) occurs between the first fluid a and the third fluid W2.
In the following, Thermophoresis (Thermophoresis) refers to a phenomenon in which, in a gas having a temperature gradient, gas molecules in a higher temperature portion collide with particles with higher kinetic energy than gas molecules in a lower temperature portion, and the particles move from the high temperature portion to the low temperature portion, wherein a force acting on the particles is called a thermophoretic force, and the thermophoretic phenomenon generated by the first fluid a and the third fluid W2 can move granular pollutants toward a cleaning solution due to the thermophoretic phenomenon, thereby increasing the contact chance between the granular pollutants and the cleaning solution and improving the efficiency of removing the pollutants.
Please refer to fig. 3, which is a schematic diagram of other components of an embodiment of the present application, as shown in the figure, in the embodiment, a water removing device 27 is further included, the water removing device 27 is disposed in the second accommodating space 221 and above the second water spraying device 24, and the water removing device 27 is configured to remove water vapor included in the first fluid a passing through; in the present embodiment, the water removal device 27 is a dehumidification device.
Referring to fig. 3 again and fig. 4, fig. 4 is a signal transmission diagram of an embodiment of the present application, as shown in the figure, the present embodiment further includes a first temperature sensor 31, a second temperature sensor 29 and a control device 40, the first temperature sensor 31 is disposed at an inner side of the connecting pipeline 30 for sensing the temperature of the first fluid a passing through the connecting pipeline 30, the second temperature sensor 29 is disposed at an inner side of the air outlet 222 for sensing the temperature of the first fluid a discharged from the air outlet 222, the control device 40 is electrically connected to the first temperature sensor 31, the second temperature sensor 29, the first temperature control device 184 and the second temperature control device 284, wherein the first temperature control device 184 and the second temperature control device 284 control the temperature of the second fluid W1 and the third fluid W2, respectively.
In the embodiment, the first temperature sensor 31 senses the temperature of the first fluid a passing through the connecting pipeline 30, and transmits a first temperature signal 312 to the control device 40, the second temperature sensor 29 senses the temperature of the first fluid a discharged from the air outlet 222, and transmits a second temperature signal 292 to the control device 40, the control device 40 sends a first control signal 42 and a second control signal 44 according to the first temperature signal 312 and the second temperature signal 292, the first temperature control device 184 receives the first control signal 42 to control the temperature of the second fluid W1, the second temperature control device 284 receives the second control signal 44 and correspondingly controls the temperature of the third fluid W2 to make the temperature of the first fluid a constantly higher than the temperature of the third fluid W2, so as to generate a thermophoresis phenomenon and improve the filtering efficiency.
To sum up, the application provides a washing filter equipment with temperature control device, it utilizes the combination of two washing subassemblies, wherein first washing subassembly contains temperature control device, and temperature control device heats the second fluid (like water) in the first watering device, through the first watering device correspondence heating first fluid (like air) that passes through, the first fluid after the heating flows to second washing subassembly again, and with the temperature control device control that second washing subassembly contains the temperature of the third fluid (like water) in the second watering device, has the difference in temperature between the first fluid that passes through and the third fluid, produces thermophoresis phenomenon, promote filtration example device pollutant efficiency, with this device solution prior art washing filter equipment, be difficult to get rid of the problem of small granular pollutant.
The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.
Claims (7)
1. A water washing and filtering device with a temperature control device is characterized by comprising:
a first water wash assembly, comprising:
a first shell, wherein a first accommodating space is arranged at one inner side of the first shell, an air inlet is formed at one end of the first shell, and the air inlet is communicated with the first accommodating space;
the first water sprinkling device is arranged in the first accommodating space and is arranged below the air inlet;
the first water spraying assembly is arranged in the first accommodating space and is arranged below the first water spraying device; and
the first circulating assembly comprises a first pump and a first temperature control device, one end of the first pump is communicated with the lower part of the first accommodating space, one end of the first temperature control device is communicated with the other end of the first pump, and the other end of the first temperature control device is communicated with the first water spraying device;
a second water washing component, which is arranged on one side of the first water washing component, the second water washing component comprises: and
a second shell, a second containing space is arranged at one inner side of the second shell, an air outlet is arranged at one end of the second shell, and the air outlet is communicated with the second containing space;
the second water sprinkling device is arranged in the second accommodating space and is arranged below the air outlet;
the second water spraying assembly is arranged in the second accommodating space and is arranged below the second water spraying device; and
the second circulating assembly comprises a second pump and a second temperature control device, one end of the second pump is communicated with the lower part of the second accommodating space, one end of the second temperature control device is communicated with the other end of the second pump, and the other end of the second temperature control device is communicated with the second water spraying device;
one end of the connecting pipeline is communicated with the first accommodating space, and the other end of the connecting pipeline is communicated with the second accommodating space.
2. The washing filter device of claim 1, wherein the second washing assembly further comprises a water removal device disposed in the second receiving space and above the second water spraying device.
3. The apparatus of claim 1, further comprising a first temperature sensor disposed at an inner side of the connection pipeline.
4. The apparatus of claim 3, further comprising a second temperature sensor disposed at an inner side of the air outlet.
5. The apparatus of claim 4, further comprising a control device electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device and the second temperature control device.
6. The apparatus as claimed in claim 1, wherein the first water spraying unit comprises a plurality of first water spraying layers, and the first water spraying layers are stacked on each other.
7. The water washing and filtering device with a temperature control device as claimed in claim 1, wherein the second water spraying assembly comprises a plurality of second water spraying layers, and the second water spraying layers are stacked on each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220082029.9U CN216825437U (en) | 2022-01-13 | 2022-01-13 | Water washing filtering device with temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220082029.9U CN216825437U (en) | 2022-01-13 | 2022-01-13 | Water washing filtering device with temperature control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216825437U true CN216825437U (en) | 2022-06-28 |
Family
ID=82084418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220082029.9U Active CN216825437U (en) | 2022-01-13 | 2022-01-13 | Water washing filtering device with temperature control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216825437U (en) |
-
2022
- 2022-01-13 CN CN202220082029.9U patent/CN216825437U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102341425B1 (en) | Cooker fume handling system and cooker | |
| US7025809B2 (en) | Dual-type air purification system | |
| JP6155706B2 (en) | Substrate processing equipment | |
| CN216825437U (en) | Water washing filtering device with temperature control device | |
| CN108253547A (en) | A kind of air cleaning unit and method | |
| CN102641865B (en) | Atomizing jet device for cleaning | |
| CN208680012U (en) | A kind of new type ultrasonic cleaning device | |
| TWM626593U (en) | Water washing and filtering device with temperature controller | |
| US20150251132A1 (en) | Air washer of make-up air unit | |
| CN115463876B (en) | Silicon carbide wafer single-sided cleaning machine and cleaning method for silicon carbide wafer | |
| CN205886469U (en) | Industry flue gas wet process equipment of spraying | |
| TWI814205B (en) | Water washing filter device with temperature control device | |
| CN206660890U (en) | It is a kind of can be according to the scrubbing tower of concentration of lye automatic liquid-feeding | |
| CN217119750U (en) | Water washing device with flow guide structure | |
| CN215175766U (en) | Air environment control system | |
| TWM615515U (en) | Air environment control system | |
| CN219050889U (en) | Washing device for improving pollutant removal efficiency | |
| CN216677651U (en) | Treatment device for acid process waste gas | |
| CN216757409U (en) | Wafer cleaning equipment | |
| TWM615517U (en) | Waste gas treatment equipment capable of improving filtration efficiency | |
| CN202700856U (en) | Cleaning atomization spray device | |
| TWI779737B (en) | Exhaust gas treatment equipment that can improve filtration efficiency | |
| CN215693021U (en) | Water catalyst filtering device | |
| CN218358153U (en) | Processing procedure tail gas treatment system | |
| CN219764931U (en) | Regeneration system for processing tail gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |