CN216825437U - Water washing filtering device with temperature control device - Google Patents

Abstract

The application provides a water washing and filtering device with a temperature control device, which comprises a first water washing component, a second water washing component and a connecting pipeline, wherein a first water spraying device, a first water spraying component and a first circulating component are arranged on the inner side of a first shell of the first water washing component; by using a first temperature control device included in the first circulation component and a second temperature control device included in the second circulation component, the temperature difference of the flowing fluid is ensured, and the integral filtering efficiency is improved.

Description

Water washing filter unit with temperature control device

technical field

The present application relates to a water washing filter device with a temperature control device, in particular to a water washing filter device that utilizes a heating device to generate a temperature difference in fluid.

Background technique

As the size of semiconductor components shrinks, the control and monitoring methods of gaseous molecular contaminants (AMCs) have also received increasing attention. In order to prevent the electrical properties of electronic products from being affected, the semiconductor and wafer manufacturing processes are placed in a strictly controlled environment, that is, a clean room. The clean room air quality control in the prior art mainly focuses on particles, airflow and temperature and humidity; however, in recent years, the semiconductor industry has begun to rethink the definition of the so-called clean room. As the volume of semiconductors shrinks, the effects of electrostatic damage and gaseous molecular pollutants are becoming more and more obvious, and devices for removing gaseous molecular pollutants are also gradually entering the market.

Among them, the common device for removing gaseous molecular pollutants is a water-washing filter device equipped with a sprinkler (or water-spray) device and a water-spraying material. Air contact with air to remove trace gaseous molecular pollutants in the air, and air pollutants can be roughly divided into two categories: particulate pollutants and gaseous pollutants.

However, although the prior art water washing filter device has good efficiency in removing gaseous pollutants, the removal efficiency is relatively low in particulate pollutants, especially particulate pollutants dominated by sub-micron (PM0.01-PM1). Therefore, the industry needs a water washing filter device that can effectively remove particulate pollutants.

In view of the above-mentioned problems in the prior art, the present application provides a water washing filter device with a temperature control device, wherein the first fluid enters the first water washing component, and the first water washing component is heated with the heated second fluid. Fluid, after the first fluid flows to the second washing component, the second washing component contacts the third fluid with a lower temperature, so that the passing first fluid and the third fluid have a temperature difference, resulting in thermophoresis phenomenon, which can effectively remove particulate pollution The water washing filter device of the material.

Utility model content

The technical problem to be solved by the present application is to provide a water washing filter device with a temperature control device, which uses the combination of two water washing components, a first fluid enters the first water washing component, and is heated by the temperature control device included in the first water washing component. The second fluid in the first sprinkler, the second fluid sprays out the first fluid corresponding to the heating, the first fluid flows to the second washing assembly, and the temperature control device included in the second washing assembly controls the second sprinkler The temperature of the third fluid inside makes the passing first fluid and the third fluid have a temperature difference, resulting in a thermophoresis phenomenon and improving the overall filtration efficiency.

In order to achieve the above-mentioned objects and effects, the present application provides a water washing filter device with a temperature control device, which comprises: a first washing component, a second washing component and a connecting pipeline, the first washing component It includes: a first casing, an inner side of which is provided with a first accommodating space, one end of the first casing is provided with an air inlet, and the air inlet communicates with the first accommodating space; a first sprinkler device, which is provided with in the first accommodating space and below the air inlet, and has an interval; a first shower assembly, which is arranged in the first accommodating space and below the first sprinkler and a first circulation assembly, which includes a first pump and a first temperature control device, one end of the first pump is connected to the lower side of the first accommodating space, and one end of the first temperature control device The other end of the first pump is connected to the other end of the first temperature control device, and the other end of the first temperature control device is connected to the first sprinkler device; the second washing assembly is arranged on one side of the first washing assembly, and the second washing assembly includes: A second housing has a second accommodating space on an inner side, an air outlet is opened at one end of the second housing, and the air outlet communicates with the second accommodating space; a second sprinkler is arranged on the first accommodating space Two accommodating spaces, which are arranged below the air outlet, and have an interval; a second water shower assembly, which is arranged in the second accommodating space and below the second watering device; and A second circulation component includes a second pump and a second temperature control device, one end of the second pump is connected to the lower side of the second accommodating space, and one end of the second temperature control device is connected to the first The other end of the second pump, the other end of the second temperature control device is connected to the second sprinkler device; one end of the connecting pipeline is connected to the first accommodating space, and the other end of the connecting pipeline is connected to the second accommodating space space; the fluid passing through the first washing component is heated by this structure, and then mixed with the fluid with a lower temperature in the second washing component, so as to improve the filtration efficiency of the washing component.

In an embodiment of the present application, the second water washing assembly further includes a water removal device, and the water removal device is disposed in the second accommodating space and above the second sprinkler device.

In an embodiment of the present application, a first fluid enters the first accommodating space through the air inlet, and the first fluid passes through the first sprinkler and the first sprinkler in sequence, and the first After the fluid passes through the first shower assembly, the first fluid enters the connecting pipeline, and after the first fluid passes through the connecting pipeline, the first fluid enters the second accommodating space, and the first fluid is in sequence The first fluid flows to the second sprinkler device and the second sprinkler assembly. After the first fluid passes through the second sprinkler assembly, the first fluid is discharged from the air outlet.

In an embodiment of the present application, the first sprinkler sprays a second fluid to the first shower assembly, and after the second fluid passes through the first shower assembly, the first pump pumps the second fluid to the first temperature control device, after the second fluid passes through the first temperature control device, the second fluid enters the first sprinkler device; the second sprinkler device sprays a third fluid to the second sprinkler assembly, After the third fluid passes through the second shower assembly, the second pump pumps the third fluid to the second temperature control device, and after the third fluid passes through the second temperature control device, the third fluid enters the second temperature control device Second sprinkler.

In an embodiment of the present application, the temperature of the first fluid is greater than the temperature of the third fluid.

In an embodiment of the present application, a first temperature sensor is further included, and the first temperature sensor is disposed on an inner side of the connecting pipeline

In an embodiment of the present application, it further includes and a second temperature sensor, and the second temperature sensor is disposed on an inner side of the air outlet.

In an embodiment of the present application, a control device is further included, and the control device is electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device and the second temperature control device.

In an embodiment of the present application, the first water shower assembly includes a plurality of first water shower layers, and the first water shower layers are stacked on each other.

In an embodiment of the present application, the second water shower assembly includes a plurality of second water shower layers, and the plurality of second water shower layers are stacked on each other.

The details of other functions and embodiments of the present application are described below in conjunction with the drawings.

Description of drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that are used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in this application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

1 is a schematic structural diagram of an embodiment of the present application;

2A is a schematic diagram of fluid flow according to an embodiment of the present application;

2B is a schematic diagram of fluid flow according to an embodiment of the present application;

FIG. 3 is a schematic diagram of other components of an embodiment of the present application; and

FIG. 4 is a schematic diagram of signal transmission according to an embodiment of the present application.

Symbol Description

1 Water washing filter device with temperature control device

10 The first water washing assembly 12 The first shell

121 The first accommodating space 122 The air inlet

14 The first sprinkler 16 The first sprinkler assembly

162 The first water spray layer 18 The first circulation component

182 The first pump 184 The first temperature control device

20 Second water wash assembly 22 Second shell

221 Second accommodating space 222 Air outlet

24 Second sprinkler 26 Second sprinkler assembly

262 The second water spray layer 28 The second circulation component

282 Second pump 284 Second temperature control device

27 Water removal device 29 Second temperature sensor

292 Second temperature signal 30 Connection pipe

31 The first temperature sensor 312 The first temperature signal

40 control device 42 first control signal

44 Second control signal A First fluid

W1 second fluid W2 third fluid

Detailed ways

The positional relationships described in the following embodiments, including: up, down, left and right, are based on the directions shown by the components in the drawings unless otherwise specified.

Please refer to FIG. 1 , which is a schematic structural diagram of an embodiment of the application. As shown in the figure, this embodiment is a water washing and filtering device 1 with a temperature control device, which includes a first washing component 10 , a second The water washing component 20 and a connecting pipeline 30; in this embodiment, the first water washing component 10 is communicated with one end of the connecting pipeline 30, and the second washing component 20 is communicated with the other end of the connecting pipeline 30, so that the Fluid can flow from the first water wash assembly 10 to the second water wash assembly 20 .

Referring to FIG. 1 again, as shown in the figure, in this embodiment, the first washing assembly 10 includes a first casing 12 , a first sprinkler 14 , a first sprinkler assembly 16 and a first circulation assembly 18. An inner side of the first housing 12 is provided with a first accommodating space 121 for accommodating components, and an air inlet 122 is defined at one end of the first housing 12, and the air inlet 122 communicates with the first accommodating A space 121 allows fluid to enter the first accommodating space 121. The first sprinkler 14 is disposed in the first accommodating space 121 and below the air inlet 122, and has an interval. The shower assembly 16 is disposed in the first accommodating space 121 and below the first sprinkler device 14 , and the first circulation assembly 18 includes a first pump 182 and a first temperature control device 184 . One end of the first pump 182 is connected to the bottom of the first accommodating space 121 , one end of the first temperature control device 184 is connected to the other end of the first pump 182 , and the other end of the first temperature control device 184 is connected to The first sprinkler 14; in this embodiment, the first sprinkler 14 sprays a second fluid W1, and the second fluid W1 can be water.

Continuing from the above, in this embodiment, the second washing assembly 20 is disposed on one side of the first washing assembly 10 , and the second washing assembly 20 includes a second casing 22 , a second sprinkler 24 , a first Two water shower components 26 and a second circulation component 28 , a second accommodating space 221 is provided on an inner side of the second casing 22 for accommodating the components, and an air outlet 222 is defined at one end of the second casing 22 , so that the fluid can be discharged from the second accommodating space 221 , the air outlet 222 is communicated with the second accommodating space 221 , the second sprinkler 24 is arranged in the second accommodating space 221 , and is arranged on the side of the air outlet 222 Below, the second shower assembly 26 is disposed in the second accommodating space 221 and below the second sprinkler 24 , and the second circulation assembly 28 includes a second pump 282 and a second A temperature control device 284, one end of the second pump 282 is connected to the lower side of the second accommodating space 221, one end of the second temperature control device 284 is connected to the other end of the second pump 282, the second temperature control The other end of the device 284 is connected to the second sprinkler device 24, one end of the connecting pipeline 30 is connected to the first accommodating space 121, the other end of the connecting pipeline 30 is connected to the second accommodating space 221, and the connecting pipeline 30 is connected to the second accommodating space 221. 30. The first casing 12 and the second casing 22 are communicated with each other; in this embodiment, the second sprinkler 24 sprays a third fluid W2, and the second fluid W2 can be water.

Continuing from the above, in this embodiment, the first water shower assembly 16 includes a plurality of first water shower layers 16 , the first water shower layers 162 are a water shower filler, and the first water shower layers 162 The first water spray layers 162 are used for receiving and spraying the second fluid W1 sprayed by the first sprinkler 14. The second fluid W1 is sprayed several times into fine particles. Small water droplets or water films increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact the liquid.

Continuing from the above, in this embodiment, the second water shower assembly 26 includes a plurality of second water shower layers 262 , the second water shower layers 262 are a water shower filler, and the second water shower layers 262 Stacked on each other and provided with a plurality of perforations, the second water spray layers 262 are used for receiving and spraying the third fluid W2 from the second sprinkler 24 . Small water droplets or water films increase the contact area, prolong the contact time between the liquid and the gas, and ensure that the passing gas can effectively contact the liquid.

Please refer to FIGS. 2A to 2B , which are schematic diagrams of fluid flow according to an embodiment of the present application. As shown in the figures, in this embodiment, a first fluid A (eg, air) passes through the fluid flow of the first housing 12 . When the air inlet 122 enters, the first fluid A flows into the accommodating space 121 of the first housing 12 and flows to the first sprinkler 14 . After the first fluid A passes through the first sprinkler 14, The first fluid A flows to the first shower assembly 16 , and the first fluid A passes through the first shower layers 162 . After the first fluid A passes through the first shower assembly 16 , the first The fluid A enters the connecting line 30, and after the first fluid A passes through the connecting line 30, the first fluid A enters the second accommodating space 221 and flows to the second sprinkler 24, the first After the fluid A passes through the second sprinkler 24, the first fluid A flows to the second sprinkler assembly 26, and the first fluid A passes through the second sprinkler layers 262, and the first fluid A passes through the second sprinkler layer 262. After the second shower assembly 26, the first fluid A is discharged from the air outlet 222 to complete one cycle.

Referring to FIGS. 2A to 2B again, as shown in the figures, in this embodiment, the first sprinkler 14 sprays the second fluid W1 to the first sprinkler component 16 , and the second fluid W1 passes through the The first water spray layer 162 contacts and mixes with the first fluid A to remove the gaseous molecular pollutants contained in the first fluid A. After the second fluid W1 passes through the first water shower assembly 16, the second fluid W1 flows Concentrate to the bottom of the first accommodating space 121, for example, the second fluid W1 flows into the water collecting tank of the first accommodating space 121 to concentrate, and the first pump 182 included in the first circulation component 18 extracts the first fluid. A second fluid W1 at the bottom of the accommodating space 121 is accommodated, and the second fluid W1 is sent to the first temperature control device 184. After the first temperature control device 184 heats the second fluid W1, the second fluid W1 flows to the first sprinkler 14, and a cycle is completed here, wherein the second fluid W1 correspondingly heats the contacted first fluid A, so that the first fluid A is correspondingly heated up; in this embodiment, the first fluid W1 The temperature of the second fluid W1 is greater than the temperature of the first fluid A.

Referring to FIGS. 2A to 2B again, as shown in the figures, in this embodiment, the second sprinkler 24 sprays the third fluid W2 to the second sprinkler component 26 , and the third fluid W2 passes through these The second water spray layer 262 contacts and mixes with the first fluid A to remove gaseous molecular pollutants contained in the first fluid A. After the third fluid W2 passes through the second water shower assembly 26, the third fluid W2 flows Concentrate to the bottom of the second accommodating space 221, for example, the third fluid W2 flows into the sump of the second accommodating space 221 to concentrate, and the second pump 282 included in the second circulation component 28 extracts the first fluid. The third fluid W2 at the bottom of the second accommodating space 221 is transported to the second temperature control device 284. After the second temperature control device 284 heats the third fluid W2, the third fluid W2 flows to the second sprinkler 24 to complete a cycle; in this embodiment, the temperature of the first fluid A is greater than the temperature of the third fluid W2, so that the first fluid A and the third fluid W2 The phenomenon of thermophoresis (or simply thermophoresis) occurs.

Continuing from the above, thermophoresis means that in a gas with a temperature gradient, the gas molecules in the higher temperature part collide with the particles with higher kinetic energy than the gas molecules in the lower temperature part, causing the particles to move from the high temperature part to the low temperature part. The phenomenon of movement, in which the force acting on the particles is called the heat flow force, which causes the first fluid A and the third fluid W2 to generate thermophoresis, which can cause the particulate pollutants to move to the direction of the washing liquid due to the thermophoresis phenomenon, increasing the particulate pollution. Reduce the chance of contact between the material and the washing liquid, and improve the efficiency of removing pollutants.

Please refer to FIG. 3 , which is a schematic diagram of other components according to an embodiment of the present application. As shown in the figure, in this embodiment, a water removing device 27 is further included, and the water removing device 27 is disposed in the second accommodating space 221, and is arranged above the second sprinkler 24, the dehydration device 27 is used to remove the water vapor contained in the first fluid A passing through; in this embodiment, the dehydration device 27 is a dehumidification device .

Please refer to FIG. 3 and FIG. 4 again. FIG. 4 is a schematic diagram of signal transmission according to an embodiment of the present application. As shown in the figure, the embodiment further includes a first temperature sensor 31 , a second temperature sensor 29 and A control device 40, the first temperature sensor 31 is disposed on an inner side of the connecting pipe 30 for sensing the temperature of the first fluid A passing through the connecting pipe 30, and the second temperature sensor 29 is disposed in the connecting pipe 30 An inner side of the air outlet 222 is used to sense the temperature of the first fluid A discharged from the air outlet 222 , and the control device 40 is electrically connected to the first temperature sensor 31 , the second temperature sensor 29 , and the first temperature sensor 31 . The temperature control device 184 and the second temperature control device 284, wherein the first temperature control device 184 and the second temperature control device 284 respectively control the temperature of the second fluid W1 and the third fluid W2.

Continuing from the above, in this embodiment, the first temperature sensor 31 senses the temperature of the first fluid A passing through the connecting pipeline 30, and transmits a first temperature signal 312 to the control device 40, the second temperature The sensor 29 senses the temperature of the first fluid A discharged from the air outlet 222 , and transmits a second temperature signal 292 to the control device 40 , and the control device 40 is based on the first temperature signal 312 and the second temperature signal 292 A first control signal 42 and a second control signal 44 are sent out, the first temperature control device 184 receives the first control signal 42 to control the temperature of the second fluid W1, and the second temperature control device 284 receives the first control signal 42 The second control signal 44 controls the temperature of the third fluid W2, so that the temperature of the first fluid A is always greater than the temperature of the third fluid W2, so as to generate thermophoresis and improve the filtration efficiency.

To sum up, the present application provides a water washing and filtering device with a temperature control device, which utilizes a combination of two water washing components, wherein the first water washing component includes a temperature control device, and the temperature control device heats the second water washing device in the first sprinkler device. The fluid (such as water) is heated by the first sprinkler device correspondingly to the first fluid (such as air) passing through, and the heated first fluid flows to the second washing assembly, and the temperature control device included in the second washing assembly is used to control the first fluid. The temperature of the third fluid (such as water) in the second sprinkler device causes a temperature difference between the passing first fluid and the third fluid, resulting in a thermophoresis phenomenon, improving the efficiency of filtering pollutants, and this device solves the problem of the prior art Washing the filter device with water makes it difficult to remove tiny particulate pollutants.

The above-mentioned embodiments and/or implementations are only used to illustrate the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementation of the technology of the present application in any form. Personnel, without departing from the scope of the technical means disclosed in the content of the application, may make some changes or modifications to other equivalent embodiments, but they should still be regarded as substantially the same technology or embodiment as the application.

Claims (7)

1. A water washing and filtering device with a temperature control device is characterized by comprising:

a first water wash assembly, comprising:

a first shell, wherein a first accommodating space is arranged at one inner side of the first shell, an air inlet is formed at one end of the first shell, and the air inlet is communicated with the first accommodating space;

the first water sprinkling device is arranged in the first accommodating space and is arranged below the air inlet;

the first water spraying assembly is arranged in the first accommodating space and is arranged below the first water spraying device; and

the first circulating assembly comprises a first pump and a first temperature control device, one end of the first pump is communicated with the lower part of the first accommodating space, one end of the first temperature control device is communicated with the other end of the first pump, and the other end of the first temperature control device is communicated with the first water spraying device;

a second water washing component, which is arranged on one side of the first water washing component, the second water washing component comprises: and

a second shell, a second containing space is arranged at one inner side of the second shell, an air outlet is arranged at one end of the second shell, and the air outlet is communicated with the second containing space;

the second water sprinkling device is arranged in the second accommodating space and is arranged below the air outlet;

the second water spraying assembly is arranged in the second accommodating space and is arranged below the second water spraying device; and

the second circulating assembly comprises a second pump and a second temperature control device, one end of the second pump is communicated with the lower part of the second accommodating space, one end of the second temperature control device is communicated with the other end of the second pump, and the other end of the second temperature control device is communicated with the second water spraying device;

one end of the connecting pipeline is communicated with the first accommodating space, and the other end of the connecting pipeline is communicated with the second accommodating space.

2. The washing filter device of claim 1, wherein the second washing assembly further comprises a water removal device disposed in the second receiving space and above the second water spraying device.

3. The apparatus of claim 1, further comprising a first temperature sensor disposed at an inner side of the connection pipeline.

4. The apparatus of claim 3, further comprising a second temperature sensor disposed at an inner side of the air outlet.

5. The apparatus of claim 4, further comprising a control device electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device and the second temperature control device.

6. The apparatus as claimed in claim 1, wherein the first water spraying unit comprises a plurality of first water spraying layers, and the first water spraying layers are stacked on each other.

7. The water washing and filtering device with a temperature control device as claimed in claim 1, wherein the second water spraying assembly comprises a plurality of second water spraying layers, and the second water spraying layers are stacked on each other.

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