TW202242321A - Temperature and humidity control device including a first sensing component, a second sensing component, a third sensing component, a housing, a refrigeration device, a heating device, a humidifier and a control device - Google Patents

Abstract

The present invention provides a temperature and humidity control device, which uses a first sensing component for sensing the temperature and humidity of a fluid outside a housing. The fluid then flows into a channel in the housing. The temperature and humidity control device further uses a refrigeration device for cooling and dehumidifying, a heating device for heating and temperature control, a humidifier for regulating humidity of the passing fluid, and a control device for controlling operation of the refrigeration device, the heating device and the humidifier according to sensing signals of a second sensing component and a third sensing component, so as to achieve the effect of adjusting the temperature and humidity of the environment.

Description

Temperature and humidity control device

The present invention relates to a temperature and humidity control device, in particular to a device that can lower or raise the temperature and humidity of fluid.

With the development of the times, the quality control requirements of industrial production have gradually increased, making the use of dust-free environments more and more popular. The clean rooms often used in the industry are more common in the semiconductor industry.

A clean room, also known as a clean room, a clean room or a clean room, refers to an environment with a low level of pollution. The sources of pollution referred to here include dust, airborne microorganisms, suspended particles, and chemical volatile gases. More precisely, a clean room has a controlled pollution level, which can be determined by the number of particles per cubic meter, or by the maximum particle size; low-level clean rooms are usually not sterilized ( If there are no controlled microorganisms), the dust in the clean room is more concerned.

However, in the use of a clean space, in addition to the pollution filter system required for a clean environment, it is also necessary to be able to control the humidity and temperature of the clean space. The temperature and humidity of the clean space are mainly determined according to the process requirements of the production line. , and under the condition of meeting the process requirements, the comfort of the operators must also be considered.

When the humidity and temperature in the clean space are too high, many problems will occur. Generally, the ideal relative humidity range is between 40% and 60%. If the relative humidity is higher than 60% and the temperature is also high, it means The ambient dew point temperature is too high, which will cause condensation on the cooling water pipe wall. If it occurs in precision equipment or circuits, it will cause various accidents and increase the defective rate of products; in addition, when the humidity is too high, the water molecules in the air will Adhering dust to the surface of the silicon wafer is difficult to remove, and the higher the relative humidity, the more difficult it is to remove the adhered particles, but when the relative humidity is lower than 30%, it is easy to generate static electricity. It is easy to adsorb on the surface of the wafer, and a large number of semiconductor devices are prone to electrical breakdown.

From the above, it can be seen that humidity control is an important condition that must be met for production in a clean environment. Therefore, the industry needs a temperature and humidity control device that can sense the temperature and humidity of the environment to regulate the temperature and humidity of the clean space.

In view of the above-mentioned problems in the prior art, the present invention provides a temperature and humidity control device, which uses a sensing component to sense the temperature and humidity of the fluid in the environment first, and then dehumidifies the fluid sequentially with a refrigeration device and heats it with a heating device Temperature control, use the humidifier to regulate the humidity, and use the control device to control the refrigeration device, heating device and humidifier according to the signals of the second and third sensing components, so as to sense the temperature and humidity of the environment with this structure, and respond to the demand Adjust and control temperature and humidity.

One object of the present invention is to provide a temperature and humidity control device, which uses a sensing component to first sense the temperature and humidity of the fluid in the environment, and then dehumidifies the fluid sequentially with a refrigeration device, and a heating device to heat and control the temperature to increase the temperature. The humidity device regulates the humidity, and the control device controls the operation of the refrigeration device, heating device and humidification device according to the signal of another sensing component, so as to sense the temperature and humidity of the environment with this structure, and adjust the temperature and humidity according to the demand. adjustment and control.

In order to achieve the above-mentioned purposes and effects, the present invention provides a temperature and humidity control device, which is used to control the temperature and humidity of the fluid when a fluid flows through a first sensing component and then enters the temperature and humidity control device , the first sensing component includes a first temperature sensor and a first humidity sensor, the first temperature sensor is used to sense a first temperature signal of the fluid, the first The humidity sensor is used to sense a first humidity signal of the fluid, and the temperature and humidity control device includes: a housing, a second sensing component, a cooling device, a heating device, and a humidifying device , a third sensing component and a control device, the casing is pierced with a channel, one end of the channel is provided with an air inlet, the other end of the channel is provided with an air outlet, the fluid flows into the air inlet, the The second sensing element is disposed on the passage and adjacent to the air inlet, the fluid flows through the second sensing element, the second sensing element includes a second temperature sensor and a second humidity sensor , the second temperature sensor is used to sense a second temperature signal of the fluid, the second humidity sensor is used to sense a second humidity signal of the fluid, and the refrigeration device is set The second sensing component is interposed between the channel and the air inlet, the fluid flows through the second sensing component and then flows into the refrigeration device, and the heating device is arranged in the channel and connected to the second sensor The component interposes the cooling device, the fluid flows through the cooling device and then flows into the heating device, the humidifying device is arranged on the inner side of the channel, the humidifying device is arranged in the channel and interposed with the cooling device a heating device, the fluid flows through the heating device and then flows into the humidifying device, the third sensing component is arranged on the inner side of the channel, the third sensing component is sandwiched between the air outlet and the humidifying device, The fluid flows through the humidifying device and then flows into the third sensing component. The third sensing component includes a third temperature sensor and a third humidity sensor. The third temperature sensor is used to To sense a third temperature signal of the fluid, the third humidity sensor is used to sense a third humidity signal of the fluid, the fluid flows out of the air outlet after passing through the third sensing component , the control device is electrically connected to the first sensing element, the second sensing element and the third sensing element and receives the first temperature signal, the first humidity signal, the second temperature signal, the second Humidity signal, the third temperature signal and the third humidity signal, the control device is electrically connected and respectively transmits a control signal to the refrigeration device, the heating device and the humidification device; use this device to regulate the temperature and humidity of the environment humidity.

In an embodiment of the present invention, the distance is proportional to the diameter of the air inlet.

In an embodiment of the present invention, the refrigerating device includes a first heat exchanger and a first compressor, and the first compressor is connected to one end of the first heat exchanger.

In an embodiment of the present invention, the first heat exchanger includes a first exchange tube and a plurality of first heat dissipation fins.

In an embodiment of the present invention, the heating device includes a second heat exchanger and a second compressor, and the second compressor is connected to one end of the second heat exchanger.

In an embodiment of the present invention, the second heat exchanger is provided with a second exchange tube and a plurality of second heat dissipation fins.

In one embodiment of the present invention, it further includes an air supply device, which sandwiches the air inlet with the second sensing component, and the air supply device is electrically connected to the control device and receives the control signal.

In order to enable your review committee members to have a further understanding and understanding of the characteristics of the present invention and the achieved effects, the following examples and accompanying descriptions are hereby provided:

The present invention provides a temperature and humidity control device, which is a temperature and humidity control device, which uses a first sensing component to sense the temperature and humidity of a fluid in the environment, and then makes the fluid enter a housing and pass through it in sequence A second sensing component, a cooling device, a heating device, a humidifying device, and a third sensing component, and a control device is used to sense the second sensing component and the third sensing component The signal controls the cooling device, the heating device and the humidifying device, and regulates the temperature and humidity of the environment with the structure.

Please refer to Figure 1, which is a schematic structural diagram of the first embodiment of the present invention. As shown in the figure, this embodiment is a temperature and humidity control device 1, which is used when a fluid A flows through a first sensor The component 10 then enters the temperature and humidity control device 1 to control the temperature and humidity of the fluid A. The temperature and humidity control device 1 uses a first sensing component 10 to sense the temperature and humidity of the fluid A in the environment. The humidity control device 1 includes a housing 20, a second sensing component 30, a cooling device 40, a heating device 50, a humidifying device 60, a third sensing component 70 and a control device 80; In an embodiment, the casing 20 is disposed on one side of the first sensing component 10 at a distance D1 to sense the environment outside the casing 20 .

Referring again to Fig. 1 and Fig. 2, Fig. 2 is a schematic diagram of the distance relationship between the sensing elements of the embodiment of the present invention, as shown in the figure, in this embodiment, the first sensing element 10 includes a first The temperature sensor 12 and a first humidity sensor 14, the first temperature sensor 12 is used to sense a first temperature signal 122, the first humidity sensor 14 is used to sense a first humidity signal 142, the casing 20 is set on one side of the first sensing component 10, the casing 20 is pierced with a passage 22, one end of the passage 22 is provided with an air inlet 24, and the other end of the passage is provided with an outlet The air port 26, the second sensing element 30 is disposed on an inner side of the channel 22, and adjacent to the air inlet 24, the first sensing element 30 includes a second temperature sensor 32 and a second humidity sensor detector 34, the second temperature sensor 32 is used to sense a second temperature signal 322, the second humidity sensor 34 is used to sense a second humidity signal 342, and the cooling device 40 is arranged in the channel 22 and the second sensing component 30 is interposed with the air inlet 24 to perform cooling and dehumidification. For heating, the humidifying device 60 is arranged in the channel 22 and interposed with the cooling device 40 with the heating device 50, and for humidifying, for example, humidifying the passing fluid by spraying water mist, the third The sensing component 70 is disposed on the inside of the channel 22, the air outlet 26 and the humidifier 60 interpose the third sensing component 70, the third sensing component 70 includes a third temperature sensor 72 and A third humidity sensor 74, the third temperature sensor 72 is used to sense a third temperature signal 722, the third humidity sensor 74 is used to sense a third humidity signal 742, the control device 80 electrically connects the first sensing component 10, the second sensing component 30 and the third sensing component 70 and receives the first sensing component 10, the second sensing component 30 and the third sensing component The first temperature signal 122, the first humidity signal 142, the second temperature signal 322, the second humidity signal 342, the third temperature signal 722 and the third humidity signal 742 issued by the component 70 are used to obtain The sensing signals of the sensors and the control device 80 are electrically connected and respectively transmit a control signal 802 to the cooling device 40 , the heating device 50 and the humidifying device 60 for controlling these devices.

Continuing the above, in this embodiment, there is a distance D1 between the air inlet 24 of the casing 20 and the first sensing element 10, and the distance D1 is proportional to the diameter D2 of the air inlet 24. Proportional, and the diameter D2 can be the diameter of the air inlet 24, the radius or the length of the rectangular diagonal, for example, when the diameter D2 is 1m, the corresponding distance D1 is 20m, if the diameter D2 is 0.5 m, the corresponding distance D1 needs to be shortened correspondingly, for example shortened to 15m, but the present invention is not limited here.

Please refer to Figure 3 and Figure 4, Figure 3 is a schematic diagram of the electrical connection of the embodiment of the present invention, and Figure 4 is a schematic diagram of the fluid path of the embodiment of the present invention, as shown in the figure, in this embodiment, The first temperature sensor 12 of the first sensing component 10 senses the temperature of the fluid A and sends the first temperature signal 122, and the first humidity sensor 14 senses the humidity of the fluid A and sends the The first humidity signal 142, the control device 80 receives the first temperature signal 122 and the first humidity signal 142, and controls the temperature and humidity control device 1 to inhale the fluid A, and the fluid A enters the channel from the air inlet 24 22. The second temperature sensor 32 of the second sensing component 30 senses the second temperature signal 322 of the fluid A, and the second humidity sensor 34 senses the second humidity of the fluid A signal 342, and transmit the second temperature signal 322 and the second humidity signal 342 to the control device 80, so that the control device 80 can control the operation of the refrigeration device 40 accordingly, and the fluid A passes through the refrigeration device 40 for cooling Dehumidification, such as reducing the humidity of the fluid A by cooling and condensing.

Continuing the above, the fluid A passes through the refrigeration device 40, and then passes through the heating device 50 to heat the fluid A cooled by the refrigeration device 40, so that the temperature of the fluid A rises, and the fluid A passes through the heating device 50 again. The humidifying device 60 is used to humidify the fluid A dehumidified by the cooling device 40, so that the humidity of the fluid A can be recovered. The heating device 50 and the humidifying device 60 are used to regulate the humidity and temperature of the fluid A. The fluid A then passes through the third sensing element 70, the third temperature sensor 72 senses the temperature of the fluid A, and transmits the third temperature signal 722, and the third humidity sensor 74 senses the fluid A Humidity, and transmit the third humidity signal 742, the control device 80 receives the third temperature signal 722, and correspondingly controls the operation of the heating device 50, the control device 80 receives the third humidity signal 742, and correspondingly controls The operation of the humidifying device 60, finally the fluid A is sent out of the air outlet 26 to the subsequent production line; in this embodiment, the control device 80 uses the control signal 802 to control the refrigeration device 40, the heating device 50 and The humidifier 60.

Continuing the above, in this embodiment, the refrigeration device 40 includes a first heat exchanger 42 and a first compressor 44, the first compressor is connected 44 to one end of the first heat exchanger 42, the first heat exchanger The exchanger 42 is disposed in the channel 22, the first heat exchanger 42 includes a first exchange pipe 422 and a plurality of first heat dissipation fins 424, and the first exchange pipe 422 passes through the first heat dissipation fins 424 The first cooling fins 424 are spaced apart to allow the fluid A to pass through, and the first compressor 44 delivers the cooled liquid to the first cooling fins 424 in the first exchange tube 422 , To cool down the fluid A and condense the moisture of the fluid A, the first compressor 44 receives the control signal 802 of the control device 80, the heating device 50 includes a second heat exchanger 52 and a second A compressor 54, the second compressor 54 is connected to one end of the second heat exchanger 52, the second heat exchanger 52 is arranged in the channel 22, the second heat exchanger 52 includes a first second exchange tube 522 and A plurality of second cooling fins 524, the second exchange tube 522 passes through the second cooling fins 524, and the second cooling fins 524 are respectively arranged at intervals to allow the fluid A to pass through, and the second compression The compressor 54 sends the heated liquid to the second cooling fins 524 in the second exchange tube 522 to heat the fluid A, and the second compressor 54 receives the control of the control device 80 Signal 802; in this embodiment, one end of the first exchange tube 422 protrudes from the shell 20 for heat dissipation, and one end of the second exchange tube 522 protrudes out of the shell 20 for heat absorption.

Continuing from the above, in this embodiment, the humidifying device 60 humidifies the passing fluid A by spraying water mist, but the present invention is not limited thereto.

Please refer to Figure 5 and Figure 6, Figure 5 is a schematic diagram of the air supply device of the embodiment of the present invention, and Figure 6 is a schematic diagram of the electrical connection of the air supply device of the embodiment of the present invention, as shown in the figure, in this embodiment Among them, the temperature and humidity control device 1 further includes an air supply device 90, the air supply device 90 and the second sensing component 30 sandwich the air inlet 24, the air supply device 90 is electrically connected to the control device 80 and receives the control Signal 802, the control device 80 transmits the control signal 802 according to the first temperature signal 122 and the first humidity signal 142 of the first temperature sensor 12 and the first humidity sensor 14 to control the air supply device 90 fan speed.

In this embodiment, the first sensing element 10 is used to sense the fluid A (such as air) outside the casing 20, and the control device 80 uses the first temperature/humidity signal 122, 142 adjust the intake of the fluid A by the air supply device 90, and adjust the cooling and dehumidification efficiency of the refrigeration device 40 with the second temperature/humidity signal 322, 342 of the second sensing component 30, and then use the third sensor The third temperature/humidity signal 722, 742 of the sensing element 70 adjusts the efficiency of the heating device 50 and the humidifying device 60, and the control device 80 uses the second sensing element 30 and the third sensing element 70 The signal can avoid excessive cooling or dehumidification of the cooling device 40, and also avoid excessive heating and humidification of the heating device 50 and the humidifying device 60, further reducing the energy consumption of the temperature and humidity control device 1.

To sum up, the present invention provides a temperature and humidity control device, which uses the first sensing component to sense the temperature and humidity of the fluid in the environment. If the environment is too humid or dry, the operating performance of the device will be increased immediately, and then The fluid is sequentially dehumidified by the cooling device, heated and controlled by the heating device, and the humidity is regulated by the humidifying device, and the control device is used to control and adjust the cooling device, heating device and humidification according to the signals of the second and third sensing components The temperature and humidity adjustment performance of the device avoids excessive operation, so that the device needs to consume a lot of energy to readjust the fluid. This structure senses the temperature and humidity of the environment, and adjusts and controls the temperature and humidity according to the demand, solving the problem of dust-free space When the humidity and temperature are too high, many problems will arise.

Therefore, the present invention is novel, progressive and can be used in industry. It should meet the patent application requirements of my country's patent law. I file an invention patent application in accordance with the law. I pray that the bureau will grant the patent as soon as possible. I sincerely pray.

However, the above is only an embodiment of the present invention, and is not used to limit the scope of the present invention. Therefore, all equivalent changes and modifications made in accordance with the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention, All should be included in the patent application scope of the present invention.

1: Temperature and humidity control device 10: The first sensing component 12: The first temperature sensor 122: The first temperature signal 14: The first humidity sensor 142: The first humidity signal 20: shell 22: channel 24: air inlet 26: Air outlet 30: Second sensing component 32: Second temperature sensor 322: Second temperature signal 34: Second humidity sensor 342: The second humidity signal 40: Refrigeration device 42: First heat exchanger 422: First Exchange Fittings 424: The first cooling fin 44: First compressor 50: Heating device 52: Second heat exchanger 522: The second exchange pipe 524: Second cooling fin 54: Second compressor 60: Humidification device 70: The third sensing component 72: The third temperature sensor 722: The third temperature signal 74: The third humidity sensor 742: The third humidity signal 80: Control device 802: Control signal 90: Air supply device A: Fluid D1: distance D2: diameter length

Figure 1: It is a structural schematic diagram of an embodiment of the present invention; Figure 2: It is a schematic diagram of the distance relationship between sensing components in an embodiment of the present invention; Figure 3: It is a schematic diagram of the electrical connection of an embodiment of the present invention; Figure 4: It is a schematic diagram of the fluid path of an embodiment of the present invention; Fig. 5: It is a schematic diagram of the air supply device of an embodiment of the present invention; and Figure 6: It is a schematic diagram of the electrical connection of the air supply device according to the embodiment of the present invention.

1: Temperature and humidity control device

10: The first sensing component

12: The first temperature sensor

14: The first humidity sensor

20: Shell

22: channel

24: air inlet

26: Air outlet

30: Second sensing component

32: Second temperature sensor

34: Second humidity sensor

40: Refrigeration device

50: Heating device

60: Humidification device

70: The third sensing component

72: The third temperature sensor

74: The third humidity sensor

80: Control device

A: Fluid

D1: distance

Claims (7)

A temperature and humidity control device, which is used to regulate the temperature and humidity of the environment when a fluid in the environment flows through a first sensing component and then enters the temperature and humidity control device. The first sensing component includes a first A temperature sensor and a first humidity sensor, the first temperature sensor is used to sense a first temperature signal of the fluid, the first humidity sensor is used to sense the fluid A first humidity signal, the temperature and humidity control device includes: A casing, which is pierced with a channel, one end of the channel is provided with an air inlet, and the other end of the channel is provided with an air outlet, and the fluid flows into the air inlet; a second sensing component, which is arranged in the passage and adjacent to the air inlet, the fluid flows through the second sensing component, the second sensing component includes a second temperature sensor and a second humidity a sensor, the second temperature sensor is used to sense a second temperature signal of the fluid, and the second humidity sensor is used to sense a second humidity signal of the fluid; A refrigerating device, which is arranged in the channel and sandwiches the second sensing component with the air inlet, and the fluid flows into the refrigerating device after passing through the second sensing component; A heating device, which is arranged in the channel and sandwiches the cooling device with the second sensing component, and the fluid flows into the heating device after passing through the cooling device; A humidifying device, which is installed in the channel, the heating device is interposed between the humidifying device and the refrigeration device, and the fluid flows into the humidifying device after passing through the heating device; A third sensing component, which is arranged in the channel and interposed with the humidifying device, the fluid flows into the third sensing component after passing through the humidifying device, and the third sensing component Including a third temperature sensor and a third humidity sensor, the third temperature sensor is used to sense a third temperature signal of the fluid, the third humidity sensor is used to sensing a third humidity signal of the fluid, the fluid flows out of the air outlet after passing through the third sensing element; and A control device, which is electrically connected to the first sensing element, the second sensing element and the third sensing element and receives the first temperature signal, the first humidity signal, the second temperature signal, the first The second humidity signal, the third temperature signal, and the third humidity signal are electrically connected to the control device and transmit a control signal to the cooling device, the heating device, and the humidifying device respectively. The temperature and humidity control device as claimed in claim 1, wherein the casing is separated from the first sensing element by a distance, and the distance is proportional to the diameter of the air inlet. The temperature and humidity control device according to claim 1, wherein the refrigeration device includes a first heat exchanger and a first compressor, and the first compressor is connected to one end of the first heat exchanger. The temperature and humidity control device according to claim 3, wherein the first heat exchanger includes a first exchange tube and a plurality of first heat dissipation fins. The temperature and humidity control device according to claim 1, wherein the heating device includes a second heat exchanger and a second compressor, and the second compressor is connected to one end of the second heat exchanger. The temperature and humidity control device according to claim 5, wherein the second heat exchanger is provided with a second exchange tube and a plurality of second heat dissipation fins. The temperature and humidity control device as described in Claim 1 further includes an air supply device, which sandwiches the air inlet with the second sensing element, and the air supply device is electrically connected to the control device and receives the control signal.

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