TW538222B - Humidification method for increasing relative humidity of clean room - Google Patents

Abstract

Disclosed is a humidification method for increasing relative humidity of clean room. The internal air of a clean room is circulated form an air cleaning chamber into the clean room and then through an air return zone to flow into the air cleaning chamber. The external air is sent into the clean room through an external air discharge port of the air cleaning chamber by a make-air unit (MAU). For effectively humidifying and precisely controlling the relative humidity of the clean room, a steaming humidifier is provided and the steaming humidifier is arranged at the external air discharge port of the air cleaning chamber to allow the steaming humidifier directly humidifying the external air.

Description

538222 V. Description of the invention (1) The present invention, which is particularly effective for controlling the environment inside semiconductor production or experimental products or experimental junctions, must be maintained. Please refer to the general clean room 1 〇 (make-air controls the temperature of the air chamber area 20, preparation The clean area of the clean room equipment is 30, and the internal air can be reduced. The external air of the clean room 10 can be sent to the temperature and phase environmental conditions, and the relative humidity of the clean room can be required in the phase of the upper air. The thirst for thirst is about a method of humidification that can improve the humidity of the local air-tight area and increase the humidity to the right of the airtight area: Zhi ,,,,,,, and the law. Ai Youchang, Electronics Factory, etc. J1 Dong Shiren hi, Temple In the cooking or inspection room, the production equipment is generally placed in a clean room (Clean rom), so that the impact of impurities or dust in the air must be avoided. Therefore, strict control is required. Conditions such as temperature and humidity are determined. Figure 1 shows an example of a common industrial clean room. The air source in the first is the air conditioning unit (MAU, not shown) to adjust the air in advance. With humidity $ condition after Give each person the cleanliness of the clean room and filter the air into the placement machine after further filtering. The air in the clean room i 〇 may increase the temperature by absorbing the sensible heat from the machine, so The air is returned to the clean air chamber area 20 through the return air temperature. In this way, the clean room 10 is subjected to the above-mentioned circulation filtering and cooling operations, so that the conditions such as clean room temperature and humidity are maintained. Before the air is sent to the clean room, the air conditioning in the clean room 10 (hereinafter referred to as the outside air) has the same humidity. However, the strokes of semiconductors or electronics are not necessarily exactly the same. For example, Some specific processes can be performed at high relative humidity. At this time, because the external humidity is fixed, in order to avoid affecting other processes, it is not wide

538222

Xi. The air-conditioning box of Bu Bu directly adjusts ‘so you have to separately humidify your clean room where the relative humidity is needed’ to increase the relative humidity. For the relative humidity of the clean room, the humidifier 50 is usually placed in the clean room 10, where the machine 12 and other equipment are placed as shown in Figure 2a. Humidify the interior air to the required relative humidity. However, the relative humidity of the outside air (that is, the air sent into the clean room from the outside air-conditioning box) is lower than the humidified inside air; The internal air sent back from the cooling zone 30 after being cooled by the dry coil 32 is mixed.

The non-uniformity will make the water content inside the clean room 10 uneven, and the humidity cannot be controlled effectively. Another method to increase the relative humidity of the clean room is to place the humidifier 50 in the return air zone 30 as shown in Figure 2b, and humidify the internal air in the return air zone 30 to be slightly higher than the clean room 1 〇 the required relative humidity, and then returned to the clean air chamber area 20 through the dry coil 3 2 2 and mixed with the external air with a lower relative humidity 'so that the mixed air reaches the required relative humidity 丨 〇 , And then into the clean room 10. However, in this way, when the return air zone 30 ^ = air returns to the clean air chamber zone 20, it may be sent to the clean room 1 after being filtered again due to short-cycle phenomenon before being mixed with the outside air ^. 〇 中 'Therefore, the relative humidity of the internal air may also be uneven, and the humidity cannot be effectively controlled. The above two methods, 'When the air convection in the clean room 10 is uniformly mixed,' the phenomenon of uneven relative humidity is not obvious; but if it is in the clean air room area,

The purpose of 538222 is the relatively high cleanliness of the outer air and the return air and the clean air humidifier with a straight chamber or a red box. In addition, the low internal / secondary movement forms a laminar flow environment, which will make the relatively humid Affect the performance of process or machine equipment. V. Description of the invention (3) The difference between the air distribution in the clean room 20 and the clean room 10 is greater, and the invention is summarized as follows: There is a clock here, and the method for humidifying the humidity f of the present invention is accurately controlled according to the required humidity. The present invention discloses a clean room. The clean room has a clean air chamber area. The clean air chamber area is circulated through the clean room, and the external air is supplied to a steam humidifier from an external air supply port in the room area. The air is brought to the air outlet, so that the steam can be added to the improved humidifier of the present invention, and the relative humidity can be maintained in an airtight state relative to the environment of the outdoor air-conditioning unit by using electric heating humidification. (dry c〇U), which is used to explain the details of the embodiment: See Figure 3 for details.-Adding the relative humidity of the high-clean room. The present invention discloses an embodiment in which the clean room 10 is a solution for improving the clean room. Humidification is performed in the condition room where the control conditions of the phase modulation box are unchanged, and the humidity can be effective and quasi-humidity. Humidification method of room relative humidity. In the clean air return area, the internal air passes through the clean area and back to the clean air room area. The air conditioning box (MAU) passes through the clean air room area. The method of the present invention is that the humidifier is arranged outside the clean air chamber area to humidify the external air. In the method of humidifying humidity, steam is added to the external humidifier, and because the external air in the clean room is high, it is best to set a dry coil air temperature in the outdoor return air zone. -Conventional examples of clean rooms illustrate the humidifying method of the present invention.方法 Humidification method of relative humidity in clean room. This machine is equipped with equipment such as machine 1 and 2.

〇632-8642TOF (n); AU91092; Calvin.ptd Page 6 538222 V. Description of the invention (4) As shown in the figure, it also has a clean air chamber area 20 and a return air area 30. In this embodiment, it is assumed that the external air is adjusted by an external air conditioner (not shown) to have a moisture content of 0.008 kg of moisture per kg of dry air (that is, 0.008 ^ (vapor ^ / kgUry air)). , And the condition required for the clean room 10 is that the moisture content contains 0.008 kg of water per kilogram of dry air (that is, 0.0012 ^ (vapor) / kg (dry air)). After the outside air is adjusted by the outside air conditioning box, as shown by the arrow in FIG. 3, the outside air is sent into the clean air chamber area through the outside air supply port 22 of the clean air chamber area 20 and the internal air is passed through the clean air room. Zone 20 passes through the clean room 10, and the display of the absorption machine 12 and other equipment passes through the dry coil 32 of the return air zone 3G to reduce the temperature of the internal air, and finally returns to the clean air zone 20 for circulation. = ,, The moisture content in this clean room 10 is higher than that provided by the outdoor air-conditioning box. Therefore, it is better to keep the airtight state with the external environment. The method used in the present invention will be described below.器 5。 5. For example, a common electric humidifier, and m is set outside the clean air chamber area 20 to send households $ mess mouth wet state 50 You 丄 from the corpse ceremony ^ wind mouth ^, so when the outer Qiu place lice from the outside The air supply air outlet 22 is sent into the clean air chamber area. Bu directly humidify the outside air. … The hole humidification is 50, which can improve the clean room phase gas humidifier 50 of the present invention, which can stabilize the moisture in the room 10. A clean environment must be maintained, and the rusted electric heating humidifier is preferably a higher cost steam humidifier. The humidifier 5 〇, the outer 'humidity method due to the water in the clean room 10, the use of humidification to the outside air' 1 because of cleanliness; therefore, the use of steam humidifier 50 is not easy = infrared humidifier can be used, etc.乂 Make sure that the humidification operation is stable. The ratio of external space provided by the outdoor air conditioning box

538222 V. Description of the invention (5) " " " '— ^ __ 气 间' and its relative humidity is different from other clean rooms, so it is airtight, so as not to make its relative humidity affected by external influences. . In addition, a dry coil (dry coil 9) can be provided in the return air area to reduce the temperature of the internal air. Refer to FIG. 4 for ° month and a description of the humidification in the above embodiment. Air line diagram showing the air at atmospheric pressure (101 · 325kpa), where point A shows that outside air enters the outside, and is sent to the temple air after cooling and dehumidification through the ice water coil of the air conditioning box. The second withering rate is 0.008 kg per kilogram of dry air (assuming that the chamber point 'this moisture, but because of the low temperature: two :: heating process, at this time due to the moisture in the external air, bu :: 3 water The rate line moves to the right to reach point B, and the air supply point / σ can be obtained. Next, the 'outside air' at point B is sent into the three-chamber area 20 through the outdoor air supply port 22. As described above, the steam humidification of the present invention Device setting: two air, 22 air outlets' directly humidifies the external air, so "bu" is mixed with the steam provided by the steam humidifier 50, from the point β to the left, the first hundred points. The moisture content becomes the moisture content condition required to move to kg in kg of dry air. ^ Milk is the clean room. In addition, the internal air in the clean room 10, the prepared display #, and may be from point D along the iso-moisture content line to, said, the second stage, the degree rises, so it is entering After returning to the wind zone 30, the temperature of the air inside the pan can be reduced back to 23 ° C, so that the dry coil 32 can return the temperature of 23 ° C and 65% relative humidity to the air Keep it in the cold and clean air chamber area 20.

0632-8642TW (n); AU91092; Calvin.ptd Page 8 538222 Description of the invention (6), this' because of the humidified external air and the dry air through the return air zone 30 Panwan 32 cooled internal air Both are at a temperature of 23 ° C and a relative humidity of 65%, so even if the two are mixed unevenly and evenly in the clean air chamber area 20, it will not make the relative humidity room of the clean room 10 Relative humidity within 10%. x Effective and accurate control of cleanliness Although the present invention has been used to define the present invention in a more specific way, any familiar example is disclosed as i, but within the spirit and scope of the same, it can still be a 4b J, an artist, without departing The protection scope of the present invention shall be subject to the modification and retouching of the attached application No. 2 =, so the definition in the patent scope of τ% shall prevail.

538222 Brief description of the drawings In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a specific preferred embodiment is given below and described in detail with the accompanying drawings. Description of the drawings: Figure 1 is a schematic diagram of a clean room. Fig. 2a shows the intention of placing humidification in a clean room in the conventional clean room humidification method. Fig. 2b is a schematic view of placing a humidifier in the return air zone of a clean room in the conventional clean room humidification method. FIG. 3 is a schematic diagram of a clean room according to an embodiment of the present invention. Fig. 4 is an air line diagram for humidifying outside air in the above embodiment. Explanation of symbols: 10 ~ clean room, 12 ~ machine; 20 ~ clean air zone; 2 ~ external air supply port; 30 ~ return air zone; 32 ~ dry coil; 50 ~ steam humidifier .

0632-8642TWF (n); AU91092; Calvin.ptd Page 10

Claims (1)

538222 VI. Scope of patent application 1. A humidification method for increasing the relative humidity of a clean room, wherein the clean room has a clean air room area and a return air area, so that the internal air passes through the clean air room area through the clean room and The return air area returns to the clean air room area for circulation, and the external air is sent into the clean air room area by an external air conditioning box (MAU) through an external air supply port of the clean air room area; the The method includes the following steps: providing a steam humidifier; and setting the steam humidifier at the outside air supply port in the clean air chamber area, so that the steam humidifier directly humidifies the external air. 2. The humidifying method for increasing the relative humidity of a clean room as described in item 1 of the scope of the patent application, wherein the steam humidifier is an electric heating humidifier. 3. The humidifying method for increasing the relative humidity of a clean room as described in item 1 of the scope of the patent application, wherein the steam humidifier is an infrared humidifier. 4. The humidifying method for increasing the relative humidity of a clean room as described in item 1 of the scope of patent application, wherein the clean room is kept airtight from the external environment. 5. The humidifying method for increasing the relative humidity of the clean room according to item 1 of the scope of the patent application, wherein the return air area is provided with a dry coil (d r y c oi 1) to reduce the temperature of the internal air. 0632-8642TWF (n); AU91092; Calvin.ptd Page 11