JP4657530B2 - Air conditioning system for high temperature and high humidity - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air conditioning system for a high-temperature and high-humidity chamber that can be applied to, for example, a room for storing a film substrate and other mushrooms.
[0002]
[Prior art]
For example, in a room for storing a film substrate, a temperature and humidity state in which the temperature is 30 ° C. ± 2 ° C. and the relative humidity is 60% ± 2% is required. This is to suppress the generation of static electricity by setting the humidity conditions appropriately. In addition, the storage of such a substrate requires an environment with a high cleanliness, for example, a cleanliness of about class 100,000. Such film substrate storage rooms are often separately installed in clean rooms.
[0003]
In order to satisfy the above conditions, conventionally, a machine room has been separately installed outside the clean room, and air conditioning equipment dedicated to the high temperature and high humidity room has been installed in this machine room. That is, a cooler that once dehumidifies to a predetermined humidity by cooling the outside air taken from outside the clean room, a heater that heats the outside air after cooling, and humidifies the outside air immediately after heating An air conditioner having a humidifier to be processed was installed in the machine room.
[0004]
[Problems to be solved by the invention]
However, if the outside air thus taken is once cooled and dehumidified and then humidified again, a lot of energy is consumed. Also, the installation space is required to be small, and there are problems such as requiring a dedicated cooler (direct expansion coil) that is difficult to obtain with existing products (because it is necessary to provide a compressor with a small capacity).
[0005]
The present invention has been made in view of the above points, and an object of the present invention is to provide an air conditioning system for a high-temperature and high-humidity chamber that is excellent in energy saving and does not require a dedicated cooler to solve the problem. It is said.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, an air conditioning system for high temperature and high humidity according to the present invention is a system for maintaining a target room at a predetermined high temperature and high humidity, and a return air unit provided below the target room, An air supply unit provided above the target chamber, an exhaust unit provided on a surface different from the air supply unit in the target chamber, and a blower for introducing the air in the target chamber from the return air unit; , A processing chamber having a heating section for heating the introduced air, a humidification section for humidifying the heated air, and conditioned air for introducing the air in the clean room upstream of the heating section in the processing chamber Each of the return air unit and the conditioned air introduction unit is provided with a damper for adjusting the amount of air to be taken in, based on at least the temperature or humidity in the target chamber. Damper controlled And it is configured to be.
In this case, the air supply unit may be provided below the target chamber, and the return air unit may be installed above the target chamber. As a result, so-called replacement return can be performed smoothly.
Further, providing the exhaust unit on a surface different from the air supply unit in the target chamber means that, for example, when the air supply unit is provided on one side wall of the target chamber, the exhaust unit is different from the one side wall. It is to be provided on other side walls or on the ceiling surface. For example, when the air supply unit is set on the floor surface, the exhaust unit is provided on the ceiling surface or the side wall.
[0007]
As described above, the high-temperature and high-humidity chamber targeted by the present invention is a chamber having a temperature of 30 ° C. ± 2 ° C. and a relative humidity of 60% ± 2%, or a chamber having a higher temperature and humidity. On the other hand, in a clean room, both temperature and relative humidity are generally lower than that of a high-temperature and high-humidity chamber and adjusted to a predetermined range. Therefore, if the air in a clean room in such a temperature and humidity state is used as it is, a room having a temperature of 30 ° C. ± 2 ° C. and a relative humidity of 60% ± 2% or higher (for example, shiitake cultivation) In the case of realizing a temperature of 27 ° C. and a relative humidity of 90% or more), no special dehumidification is necessary. Therefore, by introducing the air in the clean room to the upstream side of the heating part of the processing chamber and mixing it with the return air from the target room, a dedicated cooler is not required, and it is simply heated and humidified. It's okay. Along with this, energy saving properties are also improved.
[0008]
In the present invention, the air in the clean room and the return air from the target room are mixed on the upstream side of the heating unit, and then heated to the required temperature in the heating unit, and then humidified to the required humidity by the humidifying unit. After that, the air is supplied from the supply section to the target room. A part of the room air is exhausted from the exhaust part of the target room.
[0009]
When the target chamber is a film substrate storage chamber, since the load is usually constant, the mixing ratio of air and return air introduced from the clean room is constant. For example, it may be used at a constant mixing ratio of 50:50.
[0010]
If the load on the target room fluctuates (mushrooms, fungal growth environment, etc.), increase the ratio of return air or increase the ratio of air introduced from the clean room as necessary. Good. That is, what is necessary is just to change the mixing ratio of both.
[0011]
Further, in the present invention, the return air unit and the conditioned air introduction unit are each provided with a damper for adjusting the amount of air taken in, and each damper is controlled based on at least the temperature or humidity in the target chamber. Therefore, by adjusting the damper according to the load variation, the mixing ratio of the return air and the air from the clean room can be automatically controlled according to the load variation.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an outline of an air conditioning system according to the present embodiment. A clean room 1 has a predetermined temperature, for example, 22 ° C., a predetermined humidity, for example, 55% from an air conditioner 2 installed in a machine room in a building. Clean air having a relative humidity of (for example, class 100,000) is supplied through the air supply port 3. The air conditioner 2 includes a fan, a cooling coil, a heating coil, a humidifier, and a neutral brain filter. The outside air introduced from the outside air intake 4 and a part of the exhaust from the suction port 5 are returned to the outside air. It has a function of mixing and adjusting a predetermined temperature and humidity and supplying the clean room 1 from the air supply port 3 through a high performance filter (not shown). The exhaust is exhausted through the exhaust port 6. The power panel and the like are installed in a first floor machine room 7 provided below the clean room 1.
[0013]
The high-temperature and high-humidity chamber R serving as the target room is installed in the clean room 1 by being partitioned by a wall such as a panel. A return air section is provided below one side wall of the wall body, and an air supply section is provided above the wall. The walls, ceiling, and floor are airtight. In the clean room 1, a machine room 11 and a front room 12 are installed adjacent to the high-temperature and high-humidity room R, and a processing chamber 21 is installed in the machine room 11. The front chamber 12 functions as a buffer zone between the non-clean and temperature / humidity non-control zone. In this example, the front chamber 12 is maintained at a negative pressure rather than the high temperature / humidity chamber R, and the high temperature / humidity chamber R is adjusted. I try not to disturb the atmosphere. The machine room 11 is partitioned by a panel in the clean room 1. However, the air conditioner 2 may be installed in the clean room 1 as it is without forming the machine room 11 itself depending on the degree of dust generation, sound, vibration, or the indoor use environment.
[0014]
A suction port 13 is provided on the wall surface on the machine room 11 side in the clean room 1, and a duct 14 constituting an conditioned air introduction unit is provided between the suction port 13 and the processing chamber 21. A damper D1 is interposed in the duct 14.
[0015]
In the processing chamber 21, an inverter-controlled fan 22, an electric heater 23, a pan 24 for receiving water droplets, a humidifying portion 25 a of an electric heating steam humidifier 25, a salan filter 26, and a HEPA filter 27 are sequentially arranged from the upstream side. Is provided. The electric heater 23 is controlled by the thyristor 23a based on the detection signal of the temperature sensor 28 installed in the high temperature and high humidity chamber R so that the room has a predetermined temperature, for example, 30 ° C. ± 2 ° C. ing. Further, the electrothermal steam humidifier 25 is controlled so that the room has a predetermined relative humidity, for example, 60% ± 5%, based on the detection signal of the humidity sensor 29 installed in the high temperature and high humidity chamber R. It has become [0016]
Below the processing chamber 21, a return air introduction section 32 that takes in return air from the introduction port 15 that communicates with the duct 14 and a return air port 31 that is set below the high-temperature and high-humidity chamber R, respectively. Is set on the upstream side. A damper D <b> 2 is interposed in the return air introduction part 32.
[0017]
An air supply unit 30 is provided in the upper part (downstream side) of the processing chamber 21, and clean air having a predetermined temperature and humidity after being processed in the processing chamber 21 is heated to a high temperature through the duct 33 and the air supply port 34. The high humidity chamber R is supplied to the upper part.
[0018]
In addition, an exhaust port 36 having a differential pressure damper 35 is provided near the upper portion of the high-temperature and high-humidity chamber R and on the wall surface different from the wall surface on which the air supply port 34 is set. Air in the vicinity of the upper portion of the chamber R is exhausted from the exhaust port 36 to the front chamber 12, and an exhaust port 38 having an exhaust fan 37 is set near the upper portion of the front chamber 12. As a result, the air in the front chamber 12 is exhausted to the outside.
[0019]
The air conditioning system according to the present embodiment is configured as described above, and the high temperature and high humidity chamber R is operated at a predetermined temperature and humidity, for example, a temperature of 30 ° C. ± 2 ° C. and a humidity of 60% ± 5%. In this case, by operating the fan 22 of the processing chamber 21, the air in the clean room 1, for example, air having a temperature of 22 ° C. and a humidity of 55%, is supplied to the processing chamber 21 through the suction port 13, the duct 14, and the introduction port 15. On the other hand, the return air from the high-temperature and high-humidity chamber R is introduced to the upstream side of the fan 22 of the processing chamber 21 through the return air introduction part 32 and mixed, and then the electric heater 23 and the humidification are introduced. After being adjusted to a predetermined temperature and humidity by the unit 25a, the air is supplied from the air supply unit 30, the duct 33, and the air supply port 34 to the upper portion of the high temperature and high humidity chamber R.
[0020]
The change in temperature and humidity when the mixed air of the return air from the high temperature and high humidity chamber R shown in the above example and the air in the clean room 1 is heated and humidified in the processing chamber 21 is shown in the air diagram of FIG. Indicated.
[0021]
Here, the air mixed with the return air is the air in the clean room 1, so the humidity is adjusted to a constant humidity (55%) in advance, and it is necessary to cool and reduce the humidity as before. Instead, it only needs to be humidified by the humidifying unit 25a. Therefore, there is no need for a conventional cooler such as a direct expansion coil, and there is no need to introduce outside air separately. As for the temperature, since the air in the clean room 1 is adjusted to 22 ° C., the heat treatment by the electric heater 23 is sufficient. As for the cleanliness of the air, since the predetermined cleanliness of the air in the clean room 1 is secured in advance, the load on the Saran filter 26 and the HEPA filter 27 is reduced, and the maintenance and maintenance cycle can be extended.
[0022]
Since the high temperature and high humidity chamber R in the present embodiment is assumed to be, for example, a substrate storage that dislikes static electricity, the temperature and humidity load is substantially constant. Therefore, from the air in the clean room 1 and the high temperature and high humidity chamber R, It is sufficient that the mixing ratio with the return air is constant, for example, 50:50. Therefore, the opening degree of the dampers D1 and D2 may be kept constant. However, for example, cultivation of mushrooms and plants, breeding purpose of bacteria, etc., the load fluctuates and temperature and humidity conditions change as necessary. What is necessary is just to adjust the opening degree of dampers D1 and D2, and to change the mixing ratio of both. In this case, a necessary control of the mixing ratio is automatically performed by separately installing a control device that automatically adjusts the opening degree of the dampers D1 and D2 based on the detection results of the temperature sensor 28 and the humidity sensor 29. Can be done automatically. In order to change the mixing ratio, for example, a motor damper may be used for the dampers D1 and D2, and the relationship between the opening degrees of the dampers D1 and D2 may be controlled in an inversely proportional relationship.
[0023]
In the above-described embodiment, the temperature sensor 28 is installed in the high-temperature and high-humidity chamber R. For example, the temperature sensor 28 is provided in an appropriate position in the processing chamber 21, for example, downstream of the electric heater 23. You may control. In this case, the target temperature may be set and controlled to, for example, about “room temperature−2 ° C.”. That is, in the high-temperature and high-humidity chamber R, lighting fixtures are appropriately provided, and there are workers, and considering the heat load from them, for example, about “room temperature-2 ° C.” (for example, the high-temperature high-humidity chamber R When the temperature is set to 30 ° C., the high-temperature and high-humidity chamber R can be maintained at a predetermined temperature by blowing out the air supply at 28 ° C.).
[0024]
In the embodiment described above, the high-temperature and high-humidity chamber R is installed inside the clean room 1. However, the present invention is not limited to this, and may be provided adjacent to the clean room 1, for example. In that case, the air from the clean room 1 may be introduced through an appropriate duct.
[0025]
In the above embodiment, the air supply port 34 is installed above the high temperature / humidity chamber R and the return air port 31 is installed below the high temperature / humidity chamber R. However, the configuration of the processing chamber 21 is turned upside down. Thus, the air supply unit 30 is set downward, the return air introduction unit 32 is set upward, and accordingly the air supply port 34 is set below the high temperature and high humidity chamber R, and the return air port 31 is set at a high temperature. It may be set above the high humidity chamber R. As a result, the effect of smooth replacement air can be obtained.
[0026]
【The invention's effect】
According to the present invention, a predetermined high-temperature and high-humidity condition can be realized in the target room without requiring a dedicated cooler for dehumidification, and energy saving is superior to the conventional one. Also, less equipment is required. Also, there is no refrigerant pipe connecting the outdoor unit and the cooler, reducing material costs and construction costs.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing an outline of a configuration of an air conditioning system according to an embodiment of the present invention.
FIG. 2 is an air diagram of an operation example of the air conditioning system according to the embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Clean room 2 Air conditioner 11 Machine room 13 Suction port 14 Duct 15 Inlet port 21 Processing chamber 22 Fan 23 Electric heater 25 Electric heat steam humidifier 27 HEPA filter 28 Temperature sensor 29 Humidity sensor 30 Air supply part 31 Return air port 32 Return Air inlet 34 Air supply port R High temperature and humidity room

Claims (2)

A system for maintaining a target room at a predetermined high temperature and high humidity,
A return air portion provided below the target chamber, an air supply portion provided above, and an exhaust portion provided on a different surface from the air supply portion in the target chamber;
A blower for introducing the air of the target chamber from the return air unit, a heating unit that heats the introduced air, and a processing chamber that humidifies the heated air; and
An conditioned air introduction section for introducing air in a clean room upstream of the heating section in the processing chamber,
The return air section and the conditioned air introduction section are each provided with a damper for adjusting the amount of air taken in, and the damper is controlled based on at least temperature or humidity in the target chamber. A high-temperature, high-humidity air-conditioning system that is configured . A system for maintaining a target room at a predetermined high temperature and high humidity,
A return air section provided above the target chamber, a supply section provided below, and an exhaust section provided on a different surface from the supply section in the target chamber;
A blower for introducing the air of the target chamber from the return air unit, a heating unit that heats the introduced air, and a processing chamber that humidifies the heated air; and
An conditioned air introduction section for introducing air in a clean room upstream of the heating section in the processing chamber ,
The return air section and the conditioned air introduction section are each provided with a damper for adjusting the amount of air taken in, and the damper is controlled based on at least temperature or humidity in the target chamber. A high-temperature, high-humidity air-conditioning system that is configured .

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