WO2021186927A1 - Humidity adjustment device - Google Patents

Humidity adjustment device Download PDF

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Publication number
WO2021186927A1
WO2021186927A1 PCT/JP2021/003776 JP2021003776W WO2021186927A1 WO 2021186927 A1 WO2021186927 A1 WO 2021186927A1 JP 2021003776 W JP2021003776 W JP 2021003776W WO 2021186927 A1 WO2021186927 A1 WO 2021186927A1
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WIPO (PCT)
Prior art keywords
humidity
steam
control device
unit
detection unit
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PCT/JP2021/003776
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French (fr)
Japanese (ja)
Inventor
上田　晃
雅文 山口
克洋 増田
徹平 谷口
Original Assignee
日本スピンドル製造株式会社
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Priority to JP2022508115A priority Critical patent/JPWO2021186927A1/ja
Publication of WO2021186927A1 publication Critical patent/WO2021186927A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air

Definitions

  • the present invention relates to a humidity control device.
  • an air adjusting device for adjusting the humidity in a clean room is known (see, for example, Patent Document 1).
  • the air conditioner described in Patent Document 1 includes a steam generator that generates steam.
  • the steam generator has an opening / closing door, and the amount of steam supplied into the clean room is adjusted by the combination of opening / closing the opening / closing door and stopping steam generation in the steam generator.
  • An object of the present invention is to provide a humidity control device capable of preventing the electric devices around the humidity control device from getting wet due to water droplets generated due to steam generation.
  • the humidity control device of the present invention is a humidity control device including a refrigerator, a cooling coil connected to the refrigerator, an electric heater, and a humidity control device.
  • the humidity controller includes a steam generator attached to the intake side of the cooling coil and A steam discharge pipe attached to the exhaust side of the cooling coil and It has a connecting pipe that connects the steam generator and the steam discharge pipe.
  • the humidity control device is characterized by including a receiving portion that receives water dripping from the steam discharge pipe.
  • the present invention it is possible to prevent the electric equipment such as the electric heater around the humidity controller from getting wet due to the water dripping from the steam discharge pipe. This makes it possible to prevent electric leakage and damage to electrical equipment due to a short circuit with water.
  • FIG. 1 is a schematic side view showing a first embodiment of the humidity control device of the present invention.
  • FIG. 2 is a block diagram showing a first embodiment of the humidity control device of the present invention.
  • FIG. 3 is a flowchart showing a control program performed by the humidity control device of the present invention.
  • FIG. 4 is a flowchart showing a subroutine included in the flowchart shown in FIG.
  • FIG. 5 is a block diagram showing a second embodiment of the humidity control device of the present invention.
  • FIG. 6 is a flowchart showing a control program performed by the humidity control device shown in FIG.
  • FIG. 7 is a flowchart showing a subroutine included in the flowchart shown in FIG. FIG.
  • FIG. 8 is a schematic side view showing a third embodiment of the humidity control device of the present invention.
  • FIG. 9 is a schematic side view showing a fourth embodiment of the humidity control device of the present invention.
  • FIG. 10 is a diagram (water supply state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG.
  • FIG. 11 is a diagram (water supply stopped state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG.
  • FIG. 12 is a block diagram showing a fourth embodiment of the humidity control device of the present invention.
  • FIG. 13 is a flowchart showing a control program performed by the humidity control device of the present invention.
  • FIG. 14 is a schematic side view showing an arrangement state of the humidity control device (fifth embodiment) of the present invention in a clean room.
  • FIG. 15 is a schematic side view showing a sixth embodiment of the humidity control device of the present invention.
  • the humidity control device of the present invention will be described in detail based on a preferred embodiment shown in the attached drawings.
  • the upper side in FIGS. 1, 8, 9 to 11, 14 and 15 is “upper (or upper)", and the lower side is “lower (or lower)".
  • the right side is sometimes referred to as “front (or front)” and the left side is sometimes referred to as “rear (or back)”.
  • the humidity control device 1 shown in FIG. 1 includes a refrigerator 11, a cooling coil 12, an electric heater 13, an exhaust fan 14, a humidity control device 2, a housing 15, and a humidity detection unit 16, for example. It is used for humidity control in the clean room 30. Further, as shown in FIG. 2, the humidity control device 1 includes a control unit 17 and a power switch 18. Hereinafter, the configuration of each part will be described.
  • the refrigerator 11 has, for example, a built-in compressor and is airtightly connected to the cooling coil 12. As a result, the refrigerant can be supplied to the cooling coil 12.
  • the cooling coil 12 is composed of a tube through which the refrigerant supplied from the refrigerator 11 passes. This tube is formed in a coil shape (spiral shape), and when the refrigerant passes through it, the air around the cooling coil 12 (air AR1 described later) can be cooled.
  • the electric heater 13 is arranged above the cooling coil 12.
  • the electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. Thereby, the air (air AR1) around the electric heater 13 can be heated.
  • the humidity controller 2 includes a steam generator 21, a steam discharge pipe 22, and a connecting pipe 23.
  • a steam generator 21 is attached (arranged) to the lower side (intake side) of the cooling coil 12.
  • the steam generator 21 includes a humidifier 24 having a removable storage unit 241 for storing water.
  • the humidifier 24 has a heater (heater for steam generation) 242.
  • the electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. As a result, the water in the storage unit 241 can be heated to generate steam ST.
  • the steam discharge pipe 22 is attached to the upper side (exhaust side) of the cooling coil 12, particularly the upper side of the electric heater 13 in the present embodiment. Further, the steam discharge pipe 22 is connected to the steam generator 21 via a connecting pipe 23. The connecting pipe 23 bypasses the cooling coil 12 and the electric heater 13, and can guide the steam ST generated from the steam generator 21 to the steam discharge pipe 22. As a result, the steam ST is discharged through the steam discharge pipe 22.
  • An exhaust fan 14 is arranged above the electric heater 13. The exhaust fan 14 discharges air having a predetermined humidity, that is, air whose humidity has been adjusted by the humidity regulator 2 (air AR2 described later).
  • the refrigerator 11, the cooling coil 12, the electric heater 13, the exhaust fan 14, and the humidity controller 2 are housed in the housing 15.
  • the housing 15 has a suction port 151 for sucking the air AR1 in the clean room 30.
  • the temperature of the air AR1 is adjusted in the housing 15 by the cooling coil 12 and the electric heater 13, and the air AR1 is discharged from the exhaust fan 14 together with the steam ST from the steam discharge pipe 22.
  • the air discharged from the exhaust fan 14 is referred to as "air AR2".
  • the connecting pipe 23 is entirely housed in the housing 15, but the present invention is not limited to this, and for example, a part of the connecting pipe 23 may be exposed to the outside of the housing 15.
  • the humidity detection unit 16 is a sensor that detects the humidity of the environment in which the humidity control device 1 is used, that is, the humidity in the clean room 30.
  • the humidity detection unit 16 is used by arranging it at an arbitrary position in the clean room 30.
  • the humidity detection unit 16 is not particularly limited, and examples thereof include an electric hygrometer having a semiconductor, a bimetal hygrometer in which a humidity sensitive sheet and a metal plate are laminated, and the like.
  • the control unit 17 is electrically connected to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16.
  • a voltage is applied to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16 via the control unit 17, and the operation is controlled by the control unit 17.
  • the configuration of the control unit 17 is not particularly limited, and may be, for example, a configuration including a CPU 171 and a storage unit 172.
  • the CPU 171 can execute, for example, a control program stored in advance in the storage unit 172.
  • the control program includes, for example, a program for adjusting the humidity by controlling the operating conditions (operating timing) of the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16. included.
  • the humidity adjusting device 1 includes a power switch 18 for performing an ON / OFF operation of applying a voltage (power supply) to the control unit 17.
  • the power switch 18 is electrically connected to an external power source 40 such as an outlet.
  • the humidity controller 2 includes a non-contact relay 25.
  • the non-contact relay 25 switches between applying a voltage to the heater 242 and stopping the application of the voltage.
  • the non-contact relay 25 is a solid-state relay (abbreviation: SSR), and is composed of, for example, a photo-coupled SSR, a transformer-coupled SSR, a hybrid SSR, and the like.
  • SSR solid-state relay
  • the responsiveness is superior to that of a contact relay such as a mechanical relay, and the switching operation between voltage application and voltage application stop can be performed with high frequency.
  • the humidity adjusting device 1 the amount of steam ST generated can be accurately adjusted, and thus fine and stable humidity adjustment becomes possible.
  • the non-contact relay 25 is built in the humidity controller 2 in this embodiment, it may be externally attached, for example.
  • Step S101 determines whether or not the power switch 18 has been turned ON (step S101), and if it is determined that the power switch 18 has been turned ON, executes step S200.
  • Step S200 is a subroutine for humidity adjustment control.
  • step S200 the CPU 171 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is stopped.
  • the CPU 171 first determines whether or not the detection value H detected by the humidity detection unit 16 exceeds the threshold value (threshold humidity) ⁇ (step S201).
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ can be changed within the range of 40% or more and 60% or less, although it depends on the usage conditions of the clean room 30, for example.
  • step S201 As a result of the determination in step S201, when the detected value H exceeds the threshold value ⁇ , the non-contact relay 25 is stopped from applying the voltage. As a result, the generation of steam ST is suppressed. On the other hand, if the detection value H does not exceed the threshold value ⁇ as a result of the determination in step S201, the non-contact relay 25 is made to apply a voltage. This promotes the generation of steam ST.
  • the control unit 17 can control the switching of the non-contact relay 25 based on the detection result of the humidity detecting unit 16.
  • the control unit 17 causes the non-contact relay 25 to stop applying voltage when the detection result of the humidity detection unit 16 exceeds the threshold value ⁇ .
  • the control unit 17 applies a voltage to the non-contact relay 25.
  • the second embodiment of the humidity control device of the present invention will be described with reference to FIGS. 5 to 7, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
  • the present embodiment is the same as the first embodiment except that the humidity adjusting device can execute the operation mode switching control.
  • the control unit 17 has a function as a number detection unit 173.
  • the number-of-times detection unit 173 detects the number of times the non-contact relay 25 is switched per unit time.
  • the humidity regulator 2 includes a voltage regulator 26.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242.
  • the voltage adjusting unit 26 is not particularly limited, and examples thereof include a variable resistor and the like.
  • the humidity control device 1 can switch the operation mode to change the amount of steam generated from the steam generator 21.
  • the operation mode switching control program by the control unit 17 will be described with reference to the flowcharts shown in FIGS. 6 and 7.
  • the operation mode includes a first operation mode in which the amount of steam generated from the steam generator 21 is increased and a second operation mode in which the amount of steam generated from the steam generator 21 is decreased.
  • the operation mode switching control program is stored in advance in the storage unit 172.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 in two stages, for example, large and small.
  • the magnitude of the applied voltage to the heater 242 can be increased and the amount of steam can be easily increased
  • the magnitude of the applied voltage to the heater 242 can be decreased. The amount of steam can be easily reduced.
  • Step S101 determines whether or not the power switch 18 has been turned ON (step S101), and if it determines that the power switch 18 has been turned ON, executes step S200 and step S300 in that order. ..
  • Step S300 is a subroutine for operation mode switching control, and is executed in parallel with S200.
  • step S200 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is executed. Stop.
  • the CPU 171 first determines whether or not the detection value N detected by the number-of-times detection unit 173 exceeds the threshold value (threshold number of times) ⁇ (step S301). ..
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ can be set and changed as appropriate.
  • step S301 when the detected value N exceeds the threshold value ⁇ , the first operation mode is set. As a result, the amount of steam generated from the steam generator 21 increases. On the other hand, if the detection value N does not exceed the threshold value ⁇ as a result of the determination in step S301, the second operation mode is set. As a result, the amount of steam generated from the steam generator 21 is reduced.
  • the non-contact relay 25 is superior to the contact relay in responsiveness, so the number of switchings per unit time tends to be larger than that of the contact relay. Therefore, for example, depending on the degree of steam generation capacity of the steam generator 21, the greater the number of switching times of the non-contact relay 25 per unit time, the insufficient the total amount of steam ST supplied to the clean room 30 per unit time. May be done.
  • the control unit 17 can switch the operation mode based on the detection result of the number of times detection unit 173.
  • the control unit 17 has a first operation mode in which the amount of steam is increased so as to make up for the shortage of the total supply amount of the steam ST. do.
  • the control unit 17 reduces the amount of vapor when the detection result of the number detection unit 173 does not exceed the threshold value ⁇ , that is, when the detection result of the number of times detection unit 173 is less than the threshold value ⁇ .
  • the amount of steam can be adjusted, which contributes to more accurate humidity adjustment.
  • a third embodiment of the humidity control device of the present invention will be described with reference to FIG. 8, but the differences from the above-described embodiment will be mainly described, and the same matters will be omitted.
  • the present embodiment is the same as the first embodiment except that the humidity control device includes a water leakage prevention unit.
  • the humidity control device 1 when steam is discharged from the steam discharge pipe 22, the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13 come into contact with each other, causing dew condensation on the steam discharge pipe 22 and steam. Water Q1 may drip from the discharge pipe 22. That is, if there is a temperature difference between the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13, water droplets may be formed from the steam discharge pipe 22 and dropped. Therefore, as shown in FIG. 8, the humidity control device 1 includes a water leakage prevention unit 3 for preventing the wet spread of water droplets generated due to the generation of steam.
  • the water leakage prevention unit 3 includes a receiving unit 31 that receives the water Q1, a storage unit 32 that temporarily stores the water Q1, a connecting pipe 33 that connects the receiving unit 31 and the storage unit 32, and the water Q1 in the storage unit 32. It has a discharge unit 34 for discharging the water.
  • the receiving portion 31 is a tray-shaped (flat plate-shaped) member that receives the water Q1 dripping from the steam discharge pipe 22.
  • the receiving portion 31 is arranged between the steam discharge pipe 22 and the electric heater 13. As a result, it is possible to prevent the electric device around the humidity controller 2, that is, the electric heater 13, from getting wet by receiving the water Q1 dripping from the steam discharge pipe 22. As a result, it is possible to prevent electric leakage and damage to the electric heater 13 due to a short circuit with water Q1.
  • the receiving portion 31 has a size (area) sufficient to include the steam discharge pipe 22 when viewed from above. As a result, the water Q1 can be received without leakage regardless of the location where the water Q1 is dropped from the steam discharge pipe 22. Further, the receiving portion 31 is arranged so as to be inclined with respect to the horizontal direction. As a result, the water Q1 received by the receiving portion 31 can be quickly directed to the connecting pipe 33.
  • the storage unit 32 is a tray-shaped (flat plate-shaped) member that temporarily stores the water Q1 that has passed through the connecting pipe 33.
  • the storage unit 32 is arranged below the humidity controller 2.
  • a discharge unit 34 is provided below the storage unit 32.
  • the discharge unit 34 is a discharge port for discharging the water Q1 stored in the storage unit 32. Thereby, for example, if the water Q1 is discharged periodically, it is possible to prevent the water Q1 from overflowing from the storage unit 32. Further, the discharge unit 34 faces forward. As a result, the water Q1 discharge operation can be easily performed.
  • a fourth embodiment of the humidity control device of the present invention will be described with reference to FIGS. 9 to 13, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
  • the present embodiment is the same as the first embodiment except that the humidity adjusting device includes a negative pressure state relaxation unit.
  • the humidity control device 1 includes a negative pressure state relaxation unit 4.
  • the inside of the housing 15 may be in a negative pressure state rather than the atmospheric pressure depending on the magnitude of the discharge force of the air AR2 of the fan 14, that is, the rotation speed of the fan.
  • This negative pressure state also extends to the inside of the storage unit 241 of the humidity controller 2.
  • the storage unit 241 of the humidity controller 2 is provided with a supply port 27 for supplying water Q2.
  • water Q2 can be stored in the storage unit 241.
  • steam ST can be generated by heating the water Q2.
  • the storage portion 241 is provided with a float 281, a plug body 282, and a connecting portion 283 for connecting the float 281 and the plug body 282.
  • the position of the float 281 changes in the vertical direction according to the height of the liquid level of the water Q2 in the storage portion 241.
  • the plug body 282 can move closer to or further from the supply port 27 in conjunction with the change in the position of the float 281.
  • FIG. 10 when the plug body 282 is separated from the supply port 27, the supply port 27 is opened and water Q2 can be supplied.
  • FIG. 11 when the plug body 282 is approaching from the supply port 27, the supply port 27 can be closed to stop the supply of water Q2. This makes it possible to prevent an excessive supply of water Q2 to the storage unit 241.
  • the connecting portion 283 is a bent (or curved) rod-shaped member, and the connecting portion 283 is rotatably supported in the middle of the longitudinal direction via the rotating shaft 284.
  • the supply port 27 can be opened and closed by the plug body 282 in conjunction with the change in the position of the float 281.
  • the negative pressure state may extend into the storage portion 241 of the humidity controller 2.
  • the float 281 is forcibly pulled up, which may cause a malfunction in which the supply of water Q2 is stopped even though the supply of water Q2 is insufficient.
  • the humidity control device 1 includes a negative pressure state relaxation unit 4, and the negative pressure state relaxation unit 4 is an internal pressure detection unit that detects pressure in the vicinity of the fan 14 in the housing 15. It has 41 and an external pressure detecting unit 42 that detects pressure on the opposite side to the suction port 151 outside the housing 15. Further, as shown in FIG. 10, the internal pressure detection unit 41 and the external pressure detection unit 42 are electrically connected to the control unit 17.
  • the negative pressure state relaxation unit 4 can perform a negative pressure state relaxation operation for relaxing the negative pressure state in the storage unit 241.
  • the control program that performs this operation will be described with reference to the flowcharts shown in FIGS. 6 and 13. This control program is stored in advance in the storage unit 172.
  • the CPU 171 operates the internal pressure detection unit 41 and the external pressure detection unit 42 to detect the internal pressure P1 by the internal pressure detection unit 41 (step S401), and the external pressure detection unit 41.
  • the external pressure P2 is detected at 42 (step S402).
  • the CPU 171 calculates the pressure difference ⁇ P between the internal pressure P1 and the external pressure P2 (step S403).
  • the CPU 171 determines whether or not the pressure difference ⁇ P is equal to or greater than the threshold value ⁇ (step S404).
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ indicates that the negative pressure state in the storage portion 241 is relatively high, and is a size that can be regarded as forcibly pulling up the float 281.
  • the threshold value ⁇ is obtained, for example, experimentally or by simulation.
  • step S404 if the pressure difference ⁇ P is equal to or greater than the threshold value ⁇ , the negative pressure state relaxation operation is performed (step S405). On the other hand, if the pressure difference ⁇ P is not equal to or greater than the threshold value ⁇ as a result of the determination in step S404, the process returns to step S401 and the subsequent steps are sequentially executed.
  • the steam generator 21 has a lid 211 that can be opened and closed.
  • the lid 211 constitutes a part of the negative pressure state alleviating portion 4.
  • the steam generator 21 has a lid opening / closing drive unit 22.
  • the lid opening / closing drive unit 22 is a mechanism for opening / closing the lid 211, and is composed of, for example, a motor or the like.
  • the lid opening / closing drive unit 22 also constitutes a part of the negative pressure state relaxation unit 4.
  • One of the negative pressure state relaxation operations is to open the lid 211.
  • the negative pressure state in the storage unit 241 of the humidity controller 2 is opened, and the negative pressure state in the storage unit 241 can be alleviated.
  • one of the negative pressure state relaxation operations is to reduce the amount of air AR2 discharged by the fan 14, that is, to reduce the rotation speed of the fan 14, apart from opening the lid 211.
  • the negative pressure state in the storage unit 241 is alleviated. This also prevents the float 281 from being forcibly pulled up, and thus prevents a malfunction of the supply stop. Therefore, it can be said that the fan 14 also constitutes a part of the negative pressure state relaxation unit 4.
  • opening the lid 211 and reducing the rotation speed of the fan 14 may be used in combination. Further, the order of step S401 and step S402 may be reversed. Further, the external pressure detection unit 42 of the internal pressure detection unit 41 and the external pressure detection unit 42 may be omitted.
  • the humidity control device 1 is arranged close to the wall of the clean room 30. This makes it possible to prevent the humidity control device 1 from getting in the way in the clean room 30. Further, in the clean room 30, a duct 50 connected to the humidity control device 1 and a duct 60 connected to the duct 50 are arranged.
  • the duct 50 is connected to the fan 14 and can guide the air AR2 to the duct 60.
  • the duct 60 is arranged along the horizontal direction near the ceiling of the clean room 30.
  • the air AR2 guided to the duct 60 can pass through the duct 60 as it is.
  • the air AR2 is discharged through a plurality of exhaust ports 601 provided by opening in the duct 60. As a result, the air AR2 can be supplied into the clean room 30.
  • the humidity regulator 1 (humidity regulator 2) further includes a condensed water discharge pipe (discharge passage) 29 connected to the steam discharge pipe 22. Condensation occurs due to the temperature difference between the air AR1 passing through the steam discharge pipe 22 and the electric heater 13, and the dew condensation occurs as condensed water (water Q3) inside the steam discharge pipe 22.
  • this water Q3 is discharged from the steam discharge pipe 22 via the condensed water discharge pipe 29.
  • this water Q3 is possible to prevent the water Q3 from overflowing from the inside of the steam discharge pipe 22 and wetting the electric heater 13 or the like around the humidity controller 2. This makes it possible to prevent electric leakage and the like.
  • the condensed water discharge pipe 29 may be connected to the connecting pipe 33 or may extend to the storage unit 32. As a result, the water Q3 that has passed through the condensed water discharge pipe 29 can be stored in the storage unit 32. Further, the steam discharge pipe 22 may be inclined with respect to the horizontal direction. In this case, the condensed water discharge pipe 29 is connected to the lower side of the steam discharge pipe 22 in the inclined direction. As a result, the water Q generated inside the steam discharge pipe 22 can be quickly directed to the condensed water discharge pipe 29.
  • the humidity control device of the present invention has been described above with reference to the illustrated embodiment, the present invention is not limited to this, and each part constituting the humidity control device has an arbitrary configuration capable of exhibiting the same function. Can be replaced with one. Further, any component may be added. Further, the humidity control device of the present invention may be a combination of any two or more configurations (features) of the above-described embodiments. For example, the configuration of the third embodiment can be combined with the configurations of the first embodiment, the second embodiment, the fourth embodiment, the fifth embodiment, and the sixth embodiment.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 to switch between the first operation mode and the second rotation mode, but the present invention is not limited to this. ..
  • the present invention is not limited to this. ..
  • the steam generator 21 has a plurality of heaters 242

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  • Combustion & Propulsion (AREA)
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  • General Engineering & Computer Science (AREA)
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Abstract

[Problem] To provide a humidity adjustment device that can prevent an electrical apparatus in the periphery of a humidity adjuster from becoming wet from water droplets which are formed by the generation of vapor. [Solution] A humidity adjustment device 1 comprises: a refrigerator 11; a cooling coil 12 connected to the refrigerator 11; an electric heater 13; and a humidity adjuster 2. The humidity adjuster 2 includes: a vapor generator 21 attached to the intake side of the cooling coil 12; a vapor discharging pipe 22 attached to the discharge side of the cooling coil 12; and a connecting pipe 23 that connects the vapor generator 21 and the vapor discharging pipe 22. In addition, the humidity adjustment device 1 comprises a receiver 31 that receives water Q1 which drips from the vapor discharging pipe 22.

Description

湿度調整装置Humidity control device
　本発明は、湿度調整装置に関する。 The present invention relates to a humidity control device.
　例えばクリーンルーム内の湿度を調整する空気調整装置が知られている（例えば、特許文献１参照）。特許文献１に記載の空気調整装置は、蒸気を発生させる蒸気発生器を備える。蒸気発生器は、開閉扉を有し、この開閉扉の開閉と、蒸気発生器での蒸気発生停止との組み合わせにより、クリーンルーム内への蒸気の供給量が調整される。 For example, an air adjusting device for adjusting the humidity in a clean room is known (see, for example, Patent Document 1). The air conditioner described in Patent Document 1 includes a steam generator that generates steam. The steam generator has an opening / closing door, and the amount of steam supplied into the clean room is adjusted by the combination of opening / closing the opening / closing door and stopping steam generation in the steam generator.
特許第３７２５４４９号公報Japanese Patent No. 3725449
　しかしながら、特許文献１に記載の空気調整装置では、蒸気発生器で水滴が生じて、例えば蒸気発生器の周辺にある電気機器を濡らしてしまうという問題があった。
　本発明の目的は、蒸気発生が原因で生じた水滴で、湿度調整器の周辺にある電気機器が濡れてしまうのを防止することができる湿度調整装置を提供することにある。 However, in the air adjusting device described in Patent Document 1, there is a problem that water droplets are generated in the steam generator and, for example, the electric equipment around the steam generator is wetted.
An object of the present invention is to provide a humidity control device capable of preventing the electric devices around the humidity control device from getting wet due to water droplets generated due to steam generation.
　本発明の湿度調整装置の一つの態様は、冷凍機と、該冷凍機に接続される冷却コイルと、電気ヒータと、湿度調整器とを備える湿度調整装置であって、
　前記湿度調整器は、前記冷却コイルの吸気側に取付けられる蒸気発生器と、
　前記冷却コイルの排気側に取付けられる蒸気排出管と、
　前記蒸気発生器と前記蒸気排出管とを連結する連結管とを有し、
　前記湿度調整装置は、前記蒸気排出管から滴下する水を受ける受け部を備えることを特徴とする。 One aspect of the humidity control device of the present invention is a humidity control device including a refrigerator, a cooling coil connected to the refrigerator, an electric heater, and a humidity control device.
The humidity controller includes a steam generator attached to the intake side of the cooling coil and
A steam discharge pipe attached to the exhaust side of the cooling coil and
It has a connecting pipe that connects the steam generator and the steam discharge pipe.
The humidity control device is characterized by including a receiving portion that receives water dripping from the steam discharge pipe.
　本発明によれば、蒸気排出管から滴下する水を受けて、湿度調整器の周辺にある電気ヒータ等の電気機器が濡れてしまうのを防止することができる。これにより、漏電や、水でショートすることによる電気機器の破損等を防止することができる。 According to the present invention, it is possible to prevent the electric equipment such as the electric heater around the humidity controller from getting wet due to the water dripping from the steam discharge pipe. This makes it possible to prevent electric leakage and damage to electrical equipment due to a short circuit with water.
図１は、本発明の湿度調整装置の第１実施形態を示す概略側面図である。FIG. 1 is a schematic side view showing a first embodiment of the humidity control device of the present invention. 図２は、本発明の湿度調整装置の第１実施形態を示すブロック図である。FIG. 2 is a block diagram showing a first embodiment of the humidity control device of the present invention. 図３は、本発明の湿度調整装置で行われる制御プログラムを示すフローチャートである。FIG. 3 is a flowchart showing a control program performed by the humidity control device of the present invention. 図４は、図３に示すフローチャートに含まれるサブルーチンを示すフローチャートである。FIG. 4 is a flowchart showing a subroutine included in the flowchart shown in FIG. 図５は、本発明の湿度調整装置の第２実施形態を示すブロック図である。FIG. 5 is a block diagram showing a second embodiment of the humidity control device of the present invention. 図６は、図５に示す湿度調整装置で行われる制御プログラムを示すフローチャートである。FIG. 6 is a flowchart showing a control program performed by the humidity control device shown in FIG. 図７は、図６に示すフローチャートに含まれるサブルーチンを示すフローチャートである。FIG. 7 is a flowchart showing a subroutine included in the flowchart shown in FIG. 図８は、本発明の湿度調整装置の第３実施形態を示す概略側面図である。FIG. 8 is a schematic side view showing a third embodiment of the humidity control device of the present invention. 図９は、本発明の湿度調整装置の第４実施形態を示す概略側面図である。FIG. 9 is a schematic side view showing a fourth embodiment of the humidity control device of the present invention. 図１０は、図９に示す湿度調整装置が備える蒸気発生器の内部構成を示す図（水供給状態）である。FIG. 10 is a diagram (water supply state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG. 図１１は、図９に示す湿度調整装置が備える蒸気発生器の内部構成を示す図（水供給停止状態）である。FIG. 11 is a diagram (water supply stopped state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG. 図１２は、本発明の湿度調整装置の第４実施形態を示すブロック図である。FIG. 12 is a block diagram showing a fourth embodiment of the humidity control device of the present invention. 図１３は、本発明の湿度調整装置で行われる制御プログラムを示すフローチャートである。FIG. 13 is a flowchart showing a control program performed by the humidity control device of the present invention. 図１４は、本発明の湿度調整装置（第５実施形態）のクリーンルーム内での配置状態を示す概略側面図である。FIG. 14 is a schematic side view showing an arrangement state of the humidity control device (fifth embodiment) of the present invention in a clean room. 図１５は、本発明の湿度調整装置の第６実施形態を示す概略側面図である。FIG. 15 is a schematic side view showing a sixth embodiment of the humidity control device of the present invention.
　以下、本発明の湿度調整装置を添付図面に示す好適な実施形態に基づいて詳細に説明する。なお、以下では、説明の都合上、図１、図８、図９～図１１、図１４および図１５中の上側を「上（または上方）」、下側を「下（または下方）」、右側を「前（または正面）」、左側を「後（または背面）」と言うことがある。 Hereinafter, the humidity control device of the present invention will be described in detail based on a preferred embodiment shown in the attached drawings. In the following, for convenience of explanation, the upper side in FIGS. 1, 8, 9 to 11, 14 and 15 is "upper (or upper)", and the lower side is "lower (or lower)". The right side is sometimes referred to as "front (or front)" and the left side is sometimes referred to as "rear (or back)".
　＜第１実施形態＞
  図１～図４を参照して、本発明の湿度調整装置の第１実施形態について説明する。
　図１に示す湿度調整装置１は、冷凍機１１と、冷却コイル１２と、電気ヒータ１３と、排気ファン１４と、湿度調整器２と、筐体１５と、湿度検出部１６とを備え、例えばクリーンルーム３０内の湿度調整に用いられる。また、図２に示すように、湿度調整装置１は、制御部１７と、電源スイッチ１８とを備えている。以下、各部の構成について説明する。 <First Embodiment>
A first embodiment of the humidity control device of the present invention will be described with reference to FIGS. 1 to 4.
The humidity control device 1 shown in FIG. 1 includes a refrigerator 11, a cooling coil 12, an electric heater 13, an exhaust fan 14, a humidity control device 2, a housing 15, and a humidity detection unit 16, for example. It is used for humidity control in the clean room 30. Further, as shown in FIG. 2, the humidity control device 1 includes a control unit 17 and a power switch 18. Hereinafter, the configuration of each part will be described.
　冷凍機１１は、例えばコンプレッサが内蔵されており、冷却コイル１２に気密的に接続されている。これにより、冷媒を冷却コイル１２に供給することができる。
　冷却コイル１２は、冷凍機１１から供給された冷媒が通過するチューブで構成されている。このチューブは、コイル状（螺旋状）に形成されており、冷媒が通過した際、冷却コイル１２周辺の空気（後述する空気ＡＲ１）を冷却することができる。 The refrigerator 11 has, for example, a built-in compressor and is airtightly connected to the cooling coil 12. As a result, the refrigerant can be supplied to the cooling coil 12.
The cooling coil 12 is composed of a tube through which the refrigerant supplied from the refrigerator 11 passes. This tube is formed in a coil shape (spiral shape), and when the refrigerant passes through it, the air around the cooling coil 12 (air AR1 described later) can be cooled.
　冷却コイル１２の上側には、電気ヒータ１３が配置されている。電気ヒータ１３は、例えばニクロム線等で構成され、電圧を印加することにより発熱することができる。これにより、電気ヒータ１３周辺の空気（空気ＡＲ１）を加熱することできる。 An electric heater 13 is arranged above the cooling coil 12. The electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. Thereby, the air (air AR1) around the electric heater 13 can be heated.
　湿度調整器２は、蒸気発生器２１と、蒸気排出管２２と、連結管２３とを備える。
　冷却コイル１２の下側（吸気側）には、蒸気発生器２１が取付けられて（配置されて）いる。蒸気発生器２１は、水を貯留する着脱式の貯留部２４１を有する加湿器２４を備える。 The humidity controller 2 includes a steam generator 21, a steam discharge pipe 22, and a connecting pipe 23.
A steam generator 21 is attached (arranged) to the lower side (intake side) of the cooling coil 12. The steam generator 21 includes a humidifier 24 having a removable storage unit 241 for storing water.
　また、図２に示すように、加湿器２４は、ヒータ（蒸気発生用ヒータ）２４２を有する。電気ヒータ１３は、例えばニクロム線等で構成され、電圧を印加することにより発熱することができる。これにより、貯留部２４１内の水を加熱して、蒸気ＳＴを生じさせることができる。 Further, as shown in FIG. 2, the humidifier 24 has a heater (heater for steam generation) 242. The electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. As a result, the water in the storage unit 241 can be heated to generate steam ST.
　図１に示すように、蒸気排出管２２は、冷却コイル１２の上側（排気側）、特に本実施形態では電気ヒータ１３の上側に取付けられる。
　また、蒸気排出管２２は、連結管２３を介して、蒸気発生器２１と連結されている。連結管２３は、冷却コイル１２および電気ヒータ１３を迂回しており、蒸気発生器２１から発生する蒸気ＳＴを蒸気排出管２２に導くことができる。これにより、蒸気ＳＴは、蒸気排出管２２を介して排出される。
　電気ヒータ１３の上側には、排気ファン１４が配置されている。排気ファン１４は、所定の湿度を有する空気、すなわち、湿度調整器２によって湿度が調整された空気（後述する空気ＡＲ２）を排出する。 As shown in FIG. 1, the steam discharge pipe 22 is attached to the upper side (exhaust side) of the cooling coil 12, particularly the upper side of the electric heater 13 in the present embodiment.
Further, the steam discharge pipe 22 is connected to the steam generator 21 via a connecting pipe 23. The connecting pipe 23 bypasses the cooling coil 12 and the electric heater 13, and can guide the steam ST generated from the steam generator 21 to the steam discharge pipe 22. As a result, the steam ST is discharged through the steam discharge pipe 22.
An exhaust fan 14 is arranged above the electric heater 13. The exhaust fan 14 discharges air having a predetermined humidity, that is, air whose humidity has been adjusted by the humidity regulator 2 (air AR2 described later).
　冷凍機１１、冷却コイル１２、電気ヒータ１３、排気ファン１４、湿度調整器２は、筐体１５内に収納されている。筐体１５は、クリーンルーム３０内の空気ＡＲ１を吸引する吸引口１５１を有する。空気ＡＲ１は、筐体１５内で冷却コイル１２や電気ヒータ１３によって温度が調整されて、蒸気排出管２２からの蒸気ＳＴとともに、排気ファン１４から排出される。以下、この排気ファン１４から排出された空気を「空気ＡＲ２」と言う。これにより、所定の湿度を有する空気ＡＲ２がクリーンルーム３０内に供給させることとなり、よって、クリーンルーム３０内の湿度を調整することができる。
　なお、連結管２３は、本実施形態では全体が筐体１５内に収納されているが、これに限定されず、例えば、一部が筐体１５の外部に露出していてもよい。 The refrigerator 11, the cooling coil 12, the electric heater 13, the exhaust fan 14, and the humidity controller 2 are housed in the housing 15. The housing 15 has a suction port 151 for sucking the air AR1 in the clean room 30. The temperature of the air AR1 is adjusted in the housing 15 by the cooling coil 12 and the electric heater 13, and the air AR1 is discharged from the exhaust fan 14 together with the steam ST from the steam discharge pipe 22. Hereinafter, the air discharged from the exhaust fan 14 is referred to as "air AR2". As a result, the air AR2 having a predetermined humidity is supplied into the clean room 30, and thus the humidity in the clean room 30 can be adjusted.
In the present embodiment, the connecting pipe 23 is entirely housed in the housing 15, but the present invention is not limited to this, and for example, a part of the connecting pipe 23 may be exposed to the outside of the housing 15.
　湿度検出部１６は、湿度調整装置１が用いられている環境の湿度、すなわち、クリーンルーム３０内の湿度を検出するセンサである。湿度検出部１６は、クリーンルーム３０内の任意の位置に配置して用いられる。湿度検出部１６としては、特に限定されず、例えば、半導体を有する電気式湿度計、感湿シートと金属板とが積層されたバイメタル式湿度計等が挙げられる。 The humidity detection unit 16 is a sensor that detects the humidity of the environment in which the humidity control device 1 is used, that is, the humidity in the clean room 30. The humidity detection unit 16 is used by arranging it at an arbitrary position in the clean room 30. The humidity detection unit 16 is not particularly limited, and examples thereof include an electric hygrometer having a semiconductor, a bimetal hygrometer in which a humidity sensitive sheet and a metal plate are laminated, and the like.
　図２に示すように、制御部１７は、冷凍機１１、電気ヒータ１３と、排気ファン１４、湿度調整器２、湿度検出部１６に電気接続されている。そして、冷凍機１１、電気ヒータ１３と、排気ファン１４、湿度調整器２、湿度検出部１６は、制御部１７を介して電圧が印加されるとともに、制御部１７によって作動が制御される。制御部１７の構成としては、特に限定されず、例えば、ＣＰＵ１７１と、記憶部１７２とを有する構成とすることができる。ＣＰＵ１７１は、例えば、記憶部１７２に予め記憶されている制御プログラムを実行することができる。制御プログラムには、例えば、冷凍機１１、電気ヒータ１３と、排気ファン１４、湿度調整器２、湿度検出部１６の作動条件（作動タイミング）を制御して、湿度を調整するためのプログラム等が含まれる。 As shown in FIG. 2, the control unit 17 is electrically connected to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16. A voltage is applied to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16 via the control unit 17, and the operation is controlled by the control unit 17. The configuration of the control unit 17 is not particularly limited, and may be, for example, a configuration including a CPU 171 and a storage unit 172. The CPU 171 can execute, for example, a control program stored in advance in the storage unit 172. The control program includes, for example, a program for adjusting the humidity by controlling the operating conditions (operating timing) of the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16. included.
　また、湿度調整装置１は、制御部１７に対する電圧印加（電力供給）のＯＮ／ＯＦＦ操作が行われる電源スイッチ１８を備える。電源スイッチ１８は、例えばコンセント等の外部電源４０と電気接続される。 Further, the humidity adjusting device 1 includes a power switch 18 for performing an ON / OFF operation of applying a voltage (power supply) to the control unit 17. The power switch 18 is electrically connected to an external power source 40 such as an outlet.
　図２に示すように、湿度調整器２は、無接点リレー２５を備える。無接点リレー２５は、ヒータ２４２に対する電圧印加と、電圧印加停止との切換えを行う。無接点リレー２５は、半導体リレー（solid-state relay／略称：SSR）であり、例えば、photo-coupled SSR、transformer-coupled SSR、hybrid SSR等で構成される。これにより、例えば機械式リレー等の有接点リレーに比べて応答性に優れ、電圧印加と電圧印加停止との切換え動作を高頻度に行うことができる。そして、湿度調整装置１では、蒸気ＳＴの発生量を正確に調整することができ、よって、きめ細かな安定した湿度調整が可能となる。なお、無接点リレー２５は、本実施形態では湿度調整器２に内蔵されているが、これにより、例えば、外付けであってもよい。 As shown in FIG. 2, the humidity controller 2 includes a non-contact relay 25. The non-contact relay 25 switches between applying a voltage to the heater 242 and stopping the application of the voltage. The non-contact relay 25 is a solid-state relay (abbreviation: SSR), and is composed of, for example, a photo-coupled SSR, a transformer-coupled SSR, a hybrid SSR, and the like. As a result, the responsiveness is superior to that of a contact relay such as a mechanical relay, and the switching operation between voltage application and voltage application stop can be performed with high frequency. Then, in the humidity adjusting device 1, the amount of steam ST generated can be accurately adjusted, and thus fine and stable humidity adjustment becomes possible. Although the non-contact relay 25 is built in the humidity controller 2 in this embodiment, it may be externally attached, for example.
　次に、制御部１７による無接点リレー２５の切換え制御プログラムについて、図３、図４に示すフローチャートを参照して説明する。なお、この切換え制御プログラムは、記憶部１７２に予め記憶されている。
　図３に示すように、まず、ＣＰＵ１７１は、電源スイッチ１８がＯＮ操作されたか否かを判断して（ステップＳ１０１）、ＯＮ操作されたと判断した場合には、ステップＳ２００を実行する。ステップＳ２００は、湿度調整制御のためのサブルーチンである。 Next, the switching control program of the non-contact relay 25 by the control unit 17 will be described with reference to the flowcharts shown in FIGS. 3 and 4. This switching control program is stored in advance in the storage unit 172.
As shown in FIG. 3, first, the CPU 171 determines whether or not the power switch 18 has been turned ON (step S101), and if it is determined that the power switch 18 has been turned ON, executes step S200. Step S200 is a subroutine for humidity adjustment control.
　そして、ステップＳ２００の実行中に、ＣＰＵ１７１が電源スイッチ１８にＯＦＦ操作がされたか否かを判断して（ステップＳ１０２）、ＯＦＦ操作がされたと判断した場合には、ステップＳ２００の実行を停止する。 Then, during the execution of step S200, the CPU 171 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is stopped.
　また、図４に示すように、湿度調整制御では、まず、ＣＰＵ１７１は、湿度検出部１６で検出された検出値Ｈが閾値（閾値湿度）αを超えたか否かを判断する（ステップＳ２０１）。閾値αは、記憶部１７２に予め記憶されている。また、閾値αは、例えば、クリーンルーム３０の使用条件にもよるが、４０％以上６０％以下の範囲内で設定変更可能である。 Further, as shown in FIG. 4, in the humidity adjustment control, the CPU 171 first determines whether or not the detection value H detected by the humidity detection unit 16 exceeds the threshold value (threshold humidity) α (step S201). The threshold value α is stored in advance in the storage unit 172. Further, the threshold value α can be changed within the range of 40% or more and 60% or less, although it depends on the usage conditions of the clean room 30, for example.
　ステップＳ２０１での判断の結果、検出値Ｈが閾値αを超えた場合には、無接点リレー２５に電圧印加停止をさせる。これにより、蒸気ＳＴの発生が抑制される。
　一方、ステップＳ２０１での判断の結果、検出値Ｈが閾値αを超えない場合には、無接点リレー２５に電圧印加をさせる。これにより、蒸気ＳＴの発生が促進される。 As a result of the determination in step S201, when the detected value H exceeds the threshold value α, the non-contact relay 25 is stopped from applying the voltage. As a result, the generation of steam ST is suppressed.
On the other hand, if the detection value H does not exceed the threshold value α as a result of the determination in step S201, the non-contact relay 25 is made to apply a voltage. This promotes the generation of steam ST.
　以上のように、湿度調整装置１では、制御部１７は、湿度検出部１６での検出結果に基づいて、無接点リレー２５の切換えを制御することができる。特に、制御部１７は、湿度検出部１６での検出結果が閾値αを超えた場合には、無接点リレー２５に電圧印加停止をさせる。また、制御部１７は、湿度検出部１６での検出結果が閾値αを超えない、すなわち、湿度検出部１６での検出結果が閾値α未満である場合には、無接点リレー２５に電圧印加をさせる。 As described above, in the humidity adjusting device 1, the control unit 17 can control the switching of the non-contact relay 25 based on the detection result of the humidity detecting unit 16. In particular, the control unit 17 causes the non-contact relay 25 to stop applying voltage when the detection result of the humidity detection unit 16 exceeds the threshold value α. Further, when the detection result of the humidity detection unit 16 does not exceed the threshold value α, that is, the detection result of the humidity detection unit 16 is less than the threshold value α, the control unit 17 applies a voltage to the non-contact relay 25. Let me.
　このような無接点リレー２５の作動によって、蒸気ＳＴの発生抑制と、蒸気ＳＴの発生促進とを細かく頻繁に繰り返すことができる。これにより、湿度調整を高精度に行うことができる。 By operating the non-contact relay 25 in this way, it is possible to repeatedly suppress the generation of steam ST and promote the generation of steam ST finely and frequently. As a result, the humidity can be adjusted with high accuracy.
　＜第２実施形態＞
  以下、図５～図７を参照して本発明の湿度調整装置の第２実施形態について説明するが、前述した実施形態との相違点を中心に説明し、同様の事項はその説明を省略する。
　本実施形態は、湿度調整装置が運転モード切換え制御を実行可能であること以外は前記第１実施形態と同様である。 <Second Embodiment>
Hereinafter, the second embodiment of the humidity control device of the present invention will be described with reference to FIGS. 5 to 7, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
The present embodiment is the same as the first embodiment except that the humidity adjusting device can execute the operation mode switching control.
　図５に示すように、制御部１７は、回数検出部１７３としての機能を有する。回数検出部１７３は、単位時間当たりの無接点リレー２５の切換えの回数を検出する。
　また、湿度調整器２は、電圧調整部２６を備える。電圧調整部２６は、ヒータ２４２に対する印加電圧の大きさを調整する。電圧調整部２６としては、特に限定されず、例えば、可変抵抗器等が挙げられる。 As shown in FIG. 5, the control unit 17 has a function as a number detection unit 173. The number-of-times detection unit 173 detects the number of times the non-contact relay 25 is switched per unit time.
Further, the humidity regulator 2 includes a voltage regulator 26. The voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242. The voltage adjusting unit 26 is not particularly limited, and examples thereof include a variable resistor and the like.
　本実施形態では、湿度調整装置１は、蒸気発生器２１から発生する蒸気量を変更する運転モード切換えを行うことができる。以下、制御部１７による運転モード切換え制御プログラムについて、図６、図７に示すフローチャートを参照して説明する。運転モードには、蒸気発生器２１から発生する蒸気量を増大させる第１運転モードと、蒸気発生器２１から発生する蒸気量を減少させる第２運転モードとがある。なお、この運転モード切換え制御プログラムは、記憶部１７２に予め記憶されている。 In the present embodiment, the humidity control device 1 can switch the operation mode to change the amount of steam generated from the steam generator 21. Hereinafter, the operation mode switching control program by the control unit 17 will be described with reference to the flowcharts shown in FIGS. 6 and 7. The operation mode includes a first operation mode in which the amount of steam generated from the steam generator 21 is increased and a second operation mode in which the amount of steam generated from the steam generator 21 is decreased. The operation mode switching control program is stored in advance in the storage unit 172.
　また、運転モード切換えを行う際、電圧調整部２６により、ヒータ２４２に対する印加電圧の大きさを、例えば、大小の２段階に調整する。これにより、第１運転モードでは、ヒータ２４２に対する印加電圧の大きさを大として、蒸気量を容易に増大させることができ、第２運転モードでは、ヒータ２４２に対する印加電圧の大きさを小として、蒸気量を容易に減少させることができる。 Further, when switching the operation mode, the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 in two stages, for example, large and small. As a result, in the first operation mode, the magnitude of the applied voltage to the heater 242 can be increased and the amount of steam can be easily increased, and in the second operation mode, the magnitude of the applied voltage to the heater 242 can be decreased. The amount of steam can be easily reduced.
　図６に示すように、まず、ＣＰＵ１７１は、電源スイッチ１８がＯＮ操作されたか否かを判断して（ステップＳ１０１）、ＯＮ操作されたと判断した場合には、ステップＳ２００、ステップＳ３００を順に実行する。ステップＳ３００は、運転モード切換え制御のためのサブルーチンであり、Ｓ２００と平行して実行される。これにより、無接点リレー２５に前記の電圧印加をさせて蒸気ＳＴを発生させる際に、第１運転モードが選択された場合、蒸気発生器２１から発生する蒸気量が大となり、第２運転モードが選択された場合、蒸気発生器２１から発生する蒸気量が小となる。 As shown in FIG. 6, first, the CPU 171 determines whether or not the power switch 18 has been turned ON (step S101), and if it determines that the power switch 18 has been turned ON, executes step S200 and step S300 in that order. .. Step S300 is a subroutine for operation mode switching control, and is executed in parallel with S200. As a result, when the first operation mode is selected when the non-contact relay 25 is applied with the voltage to generate the steam ST, the amount of steam generated from the steam generator 21 becomes large, and the second operation mode When is selected, the amount of steam generated from the steam generator 21 becomes small.
　そして、ステップＳ２００およびステップＳ３００の実行中に、ＣＰＵ１７１が電源スイッチ１８にＯＦＦ操作がされたか否かを判断して（ステップＳ１０２）、ＯＦＦ操作がされたと判断した場合には、ステップＳ２００の実行を停止する。 Then, during the execution of step S200 and step S300, the CPU 171 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is executed. Stop.
　また、図７に示すように、運転モード切換え制御では、まず、ＣＰＵ１７１は、回数検出部１７３で検出された検出値Ｎが閾値（閾値回数）βを超えたか否かを判断する（ステップＳ３０１）。閾値βは、記憶部１７２に予め記憶されている。また、閾値βは、適宜設定変更可能である。 Further, as shown in FIG. 7, in the operation mode switching control, the CPU 171 first determines whether or not the detection value N detected by the number-of-times detection unit 173 exceeds the threshold value (threshold number of times) β (step S301). .. The threshold value β is stored in advance in the storage unit 172. Further, the threshold value β can be set and changed as appropriate.
　ステップＳ３０１での判断の結果、検出値Ｎが閾値βを超えた場合には、第１運転モードとする。これにより、蒸気発生器２１から発生する蒸気量が増大する。
　一方、ステップＳ３０１での判断の結果、検出値Ｎが閾値βを超えない場合には、第２運転モードとする。これにより、蒸気発生器２１から発生する蒸気量が減少する。 As a result of the determination in step S301, when the detected value N exceeds the threshold value β, the first operation mode is set. As a result, the amount of steam generated from the steam generator 21 increases.
On the other hand, if the detection value N does not exceed the threshold value β as a result of the determination in step S301, the second operation mode is set. As a result, the amount of steam generated from the steam generator 21 is reduced.
　無接点リレー２５は、前述したように応答性が有接点リレーよりも優れている分、単位時間当たりの切換えの回数が有接点リレーに比べて多くなる傾向にある。従って、例えば蒸気発生器２１の蒸気発生能力の程度によっては、無接点リレー２５の単位時間当たりの切換えの回数が多ければ多いほど、単位時間当たりのクリーンルーム３０への蒸気ＳＴの総供給量が不足する場合がある。 As described above, the non-contact relay 25 is superior to the contact relay in responsiveness, so the number of switchings per unit time tends to be larger than that of the contact relay. Therefore, for example, depending on the degree of steam generation capacity of the steam generator 21, the greater the number of switching times of the non-contact relay 25 per unit time, the insufficient the total amount of steam ST supplied to the clean room 30 per unit time. May be done.
　そこで、湿度調整装置１では、制御部１７は、回数検出部１７３での検出結果に基づいて、運転モード切換えを行うことができる。特に、制御部１７は、回数検出部１７３での検出結果が閾値βを超えた場合には、前記蒸気ＳＴの総供給量の不足分を補うように、蒸気量を増大させる第１運転モードとする。また、制御部１７は、回数検出部１７３での検出結果が閾値βを超えない、すなわち、回数検出部１７３での検出結果が閾値β未満の場合には、蒸気量を減少させる第２運転モードとする。
　このような運転モード切換えにより、蒸気量を調整することができ、よって、より高精度な湿度調整に寄与する。 Therefore, in the humidity adjusting device 1, the control unit 17 can switch the operation mode based on the detection result of the number of times detection unit 173. In particular, when the detection result by the number detection unit 173 exceeds the threshold value β, the control unit 17 has a first operation mode in which the amount of steam is increased so as to make up for the shortage of the total supply amount of the steam ST. do. Further, the control unit 17 reduces the amount of vapor when the detection result of the number detection unit 173 does not exceed the threshold value β, that is, when the detection result of the number of times detection unit 173 is less than the threshold value β. And.
By such operation mode switching, the amount of steam can be adjusted, which contributes to more accurate humidity adjustment.
　＜第３実施形態＞
  以下、図８を参照して本発明の湿度調整装置の第３実施形態について説明するが、前述した実施形態との相違点を中心に説明し、同様の事項はその説明を省略する。
　本実施形態は、湿度調整装置が漏水防止部を備えること以外は前記第１実施形態と同様である。 <Third Embodiment>
Hereinafter, a third embodiment of the humidity control device of the present invention will be described with reference to FIG. 8, but the differences from the above-described embodiment will be mainly described, and the same matters will be omitted.
The present embodiment is the same as the first embodiment except that the humidity control device includes a water leakage prevention unit.
　湿度調整装置１では、蒸気排出管２２から蒸気が排出される際に、蒸気排出管２２と電気ヒータ１３を通過した空気ＡＲ1とが接触することで、蒸気排出管２２に結露が生じて、蒸気排出管２２から水Ｑ１が滴下するおそれがある。つまり、蒸気排出管２２と電気ヒータ１３を通過した空気ＡＲ1との間に温度差があると、蒸気排出管２２から水滴が形成され、滴下されるおそれがある。
　そこで、図８に示すように、湿度調整装置１は、蒸気発生が原因で生じた水滴のぬれ広がりを防止する漏水防止部３を備える。漏水防止部３は、水Ｑ１を受ける受け部３１と、水Ｑ１を一時的に貯留する貯留部３２と、受け部３１と貯留部３２と連結する連結管３３と、貯留部３２内の水Ｑ１を排出する排出部３４とを有する。 In the humidity control device 1, when steam is discharged from the steam discharge pipe 22, the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13 come into contact with each other, causing dew condensation on the steam discharge pipe 22 and steam. Water Q1 may drip from the discharge pipe 22. That is, if there is a temperature difference between the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13, water droplets may be formed from the steam discharge pipe 22 and dropped.
Therefore, as shown in FIG. 8, the humidity control device 1 includes a water leakage prevention unit 3 for preventing the wet spread of water droplets generated due to the generation of steam. The water leakage prevention unit 3 includes a receiving unit 31 that receives the water Q1, a storage unit 32 that temporarily stores the water Q1, a connecting pipe 33 that connects the receiving unit 31 and the storage unit 32, and the water Q1 in the storage unit 32. It has a discharge unit 34 for discharging the water.
　受け部３１は、蒸気排出管２２から滴下する水Ｑ１を受けるトレイ状（平皿状）の部材である。受け部３１は、蒸気排出管２２と電気ヒータ１３との間に配置されている。これにより、蒸気排出管２２から滴下する水Ｑ１を受けて、湿度調整器２の周辺にある電気機器、すなわち、電気ヒータ１３が濡れてしまうのを防止することができる。これにより、漏電や、水Ｑ１でショートすることによる電気ヒータ１３の破損等を防止することができる。 The receiving portion 31 is a tray-shaped (flat plate-shaped) member that receives the water Q1 dripping from the steam discharge pipe 22. The receiving portion 31 is arranged between the steam discharge pipe 22 and the electric heater 13. As a result, it is possible to prevent the electric device around the humidity controller 2, that is, the electric heater 13, from getting wet by receiving the water Q1 dripping from the steam discharge pipe 22. As a result, it is possible to prevent electric leakage and damage to the electric heater 13 due to a short circuit with water Q1.
　受け部３１は、上側から見たとき、蒸気排出管２２を十分に包含することができる程度の大きさ（面積）を有する。これにより、蒸気排出管２２からの水Ｑ１の滴下箇所に関わらず、水Ｑ１を漏れなく受けることができる。
　また、受け部３１は、水平方向に対し傾斜して配置されている。これにより、受け部３１で受けた水Ｑ１を迅速に連結管３３に向かわせることができる。 The receiving portion 31 has a size (area) sufficient to include the steam discharge pipe 22 when viewed from above. As a result, the water Q1 can be received without leakage regardless of the location where the water Q1 is dropped from the steam discharge pipe 22.
Further, the receiving portion 31 is arranged so as to be inclined with respect to the horizontal direction. As a result, the water Q1 received by the receiving portion 31 can be quickly directed to the connecting pipe 33.
　貯留部３２は、連結管３３を通過した水Ｑ１を一時的に貯留するトレイ状（平皿状）の部材である。貯留部３２は、湿度調整器２の下側に配置されている。
　貯留部３２の下部には、排出部３４が設けられている。排出部３４は、貯留部３２に貯留された水Ｑ１を排出する排出口である。これにより、例えば定期的に水Ｑ１を排出すれば、水Ｑ１が貯留部３２から溢れるのを防止することができる。
　また、排出部３４は、前方を向いている。これにより、水Ｑ１の排出作業を容易に行うことができる。 The storage unit 32 is a tray-shaped (flat plate-shaped) member that temporarily stores the water Q1 that has passed through the connecting pipe 33. The storage unit 32 is arranged below the humidity controller 2.
A discharge unit 34 is provided below the storage unit 32. The discharge unit 34 is a discharge port for discharging the water Q1 stored in the storage unit 32. Thereby, for example, if the water Q1 is discharged periodically, it is possible to prevent the water Q1 from overflowing from the storage unit 32.
Further, the discharge unit 34 faces forward. As a result, the water Q1 discharge operation can be easily performed.
　＜第４実施形態＞
  以下、図９～図１３を参照して本発明の湿度調整装置の第４実施形態について説明するが、前述した実施形態との相違点を中心に説明し、同様の事項はその説明を省略する。
　本実施形態は、湿度調整装置が陰圧状態緩和部を備えること以外は前記第１実施形態と同様である。 <Fourth Embodiment>
Hereinafter, a fourth embodiment of the humidity control device of the present invention will be described with reference to FIGS. 9 to 13, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
The present embodiment is the same as the first embodiment except that the humidity adjusting device includes a negative pressure state relaxation unit.
　図９に示すように、湿度調整装置１は、陰圧状態緩和部４を備える。
　ところで、湿度調整装置１では、ファン１４の空気ＡＲ２の排出力の大きさ、すなわち、ファンの回転数によっては、筐体１５内が大気圧よりも陰圧状態となる場合がある。この陰圧状態は、湿度調整器２の貯留部２４１内にも及ぶ。 As shown in FIG. 9, the humidity control device 1 includes a negative pressure state relaxation unit 4.
By the way, in the humidity adjusting device 1, the inside of the housing 15 may be in a negative pressure state rather than the atmospheric pressure depending on the magnitude of the discharge force of the air AR2 of the fan 14, that is, the rotation speed of the fan. This negative pressure state also extends to the inside of the storage unit 241 of the humidity controller 2.
　図１０、図１１に示すように、湿度調整器２の貯留部２４１には、水Ｑ２を供給する供給口２７が設けられている。これにより、貯留部２４１に水Ｑ２を貯留することができる。そして、この水Ｑ２を加熱することにより、蒸気ＳＴを生じさせることができる。
　また、貯留部２４１には、フロート２８１と、栓体２８２と、フロート２８１と栓体２８２とを連結する連結部２８３とが設けられている。 As shown in FIGS. 10 and 11, the storage unit 241 of the humidity controller 2 is provided with a supply port 27 for supplying water Q2. As a result, water Q2 can be stored in the storage unit 241. Then, steam ST can be generated by heating the water Q2.
Further, the storage portion 241 is provided with a float 281, a plug body 282, and a connecting portion 283 for connecting the float 281 and the plug body 282.
　フロート２８１は、貯留部２４１内の水Ｑ２の液面の高さに応じて、上下方向の位置が変化する。
　栓体２８２は、フロート２８１の位置変化に連動して、供給口２７に対して、接近したり、離間したりすることができる。図１０に示すように、栓体２８２が供給口２７から離間状態では、供給口２７が開放して、水Ｑ２を供給することができる。図１１に示すように、栓体２８２が供給口２７から接近状態では、供給口２７を閉塞させて、水Ｑ２の供給を停止することができる。これにより、貯留部２４１への水Ｑ２の過剰供給を防止することができる。 The position of the float 281 changes in the vertical direction according to the height of the liquid level of the water Q2 in the storage portion 241.
The plug body 282 can move closer to or further from the supply port 27 in conjunction with the change in the position of the float 281. As shown in FIG. 10, when the plug body 282 is separated from the supply port 27, the supply port 27 is opened and water Q2 can be supplied. As shown in FIG. 11, when the plug body 282 is approaching from the supply port 27, the supply port 27 can be closed to stop the supply of water Q2. This makes it possible to prevent an excessive supply of water Q2 to the storage unit 241.
　連結部２８３は、屈曲（または湾曲）した棒状の部材であり、その長手方向の途中が回動軸２８４を介して、回動可能に支持されている。これにより、フロート２８１の位置変化に連動して、栓体２８２で供給口２７を開閉させることができる。
　前述したように、陰圧状態が湿度調整器２の貯留部２４１内に及ぶ場合がある。この場合、フロート２８１が強制的に引張り上げられてしまい、水Ｑ２の供給が不十分にも関わらず、その供給が停止する誤作動を起こすおそれがある。 The connecting portion 283 is a bent (or curved) rod-shaped member, and the connecting portion 283 is rotatably supported in the middle of the longitudinal direction via the rotating shaft 284. As a result, the supply port 27 can be opened and closed by the plug body 282 in conjunction with the change in the position of the float 281.
As described above, the negative pressure state may extend into the storage portion 241 of the humidity controller 2. In this case, the float 281 is forcibly pulled up, which may cause a malfunction in which the supply of water Q2 is stopped even though the supply of water Q2 is insufficient.
　図９に示すように、湿度調整装置１は、陰圧状態緩和部４を備ており、陰圧状態緩和部４は、筐体１５内のファン１４の直下近傍の圧力検出する内部圧力検出部４１と、筐体１５外の吸引口１５１と反対側圧力検出する外部圧力検出部４２とを有する。また、図１０に示すように、内部圧力検出部４１と外部圧力検出部４２とは、制御部１７と電気的に接続されている。 As shown in FIG. 9, the humidity control device 1 includes a negative pressure state relaxation unit 4, and the negative pressure state relaxation unit 4 is an internal pressure detection unit that detects pressure in the vicinity of the fan 14 in the housing 15. It has 41 and an external pressure detecting unit 42 that detects pressure on the opposite side to the suction port 151 outside the housing 15. Further, as shown in FIG. 10, the internal pressure detection unit 41 and the external pressure detection unit 42 are electrically connected to the control unit 17.
　本実施形態では、陰圧状態緩和部４により、貯留部２４１内の陰圧状態を緩和する陰圧状態緩和動作を行うことができる。以下、この動作を行う制御プログラムについて、図６、図１３に示すフローチャートを参照して説明する。なお、この制御プログラムは、記憶部１７２に予め記憶されている。 In the present embodiment, the negative pressure state relaxation unit 4 can perform a negative pressure state relaxation operation for relaxing the negative pressure state in the storage unit 241. Hereinafter, the control program that performs this operation will be described with reference to the flowcharts shown in FIGS. 6 and 13. This control program is stored in advance in the storage unit 172.
　図１３に示すように、まず、ＣＰＵ１７１は、内部圧力検出部４１および外部圧力検出部４２を作動させて、内部圧力検出部４１で内部圧力Ｐ１を検出するとともに（ステップＳ４０１）、外部圧力検出部４２で外部圧力Ｐ２を検出する（ステップＳ４０２）。 As shown in FIG. 13, first, the CPU 171 operates the internal pressure detection unit 41 and the external pressure detection unit 42 to detect the internal pressure P1 by the internal pressure detection unit 41 (step S401), and the external pressure detection unit 41. The external pressure P2 is detected at 42 (step S402).
　次いで、ＣＰＵ１７１は、内部圧力Ｐ１と外部圧力Ｐ２との圧力差ΔＰを演算する（ステップＳ４０３）。
　次いで、ＣＰＵ１７１は、圧力差ΔＰが閾値γ以上か否かを判断する（ステップＳ４０４）。閾値γは、記憶部１７２に予め記憶されている。また、閾値γは、貯留部２４１内の陰圧状態が比較的高いことを示し、フロート２８１が強制的に引張り上げられてしまうとみなすことができる大きさである。また、閾値γは、例えば、実験的またはシミュレーションで求められる。 Next, the CPU 171 calculates the pressure difference ΔP between the internal pressure P1 and the external pressure P2 (step S403).
Next, the CPU 171 determines whether or not the pressure difference ΔP is equal to or greater than the threshold value γ (step S404). The threshold value γ is stored in advance in the storage unit 172. Further, the threshold value γ indicates that the negative pressure state in the storage portion 241 is relatively high, and is a size that can be regarded as forcibly pulling up the float 281. The threshold value γ is obtained, for example, experimentally or by simulation.
　ステップＳ４０４での判断の結果、圧力差ΔＰが閾値γ以上である場合には、陰圧状態緩和動作を行う（ステップＳ４０５）。一方、ステップＳ４０４での判断の結果、圧力差ΔＰが閾値γ以上ではない場合には、ステップＳ４０１に戻り、以降のステップを順次実行する。 As a result of the determination in step S404, if the pressure difference ΔP is equal to or greater than the threshold value γ, the negative pressure state relaxation operation is performed (step S405). On the other hand, if the pressure difference ΔP is not equal to or greater than the threshold value γ as a result of the determination in step S404, the process returns to step S401 and the subsequent steps are sequentially executed.
　ここで、陰圧状態緩和動作について説明する。
　図９に示すように、蒸気発生器２１は、開閉可能な蓋２１１を有する。蓋２１１は、陰圧状態緩和部４の一部を構成する。
　また、図１０に示すように、蒸気発生器２１は、蓋開閉駆動部２２を有する。蓋開閉駆動部２２は、蓋２１１を開閉させる機構であり、例えば、モータ等で構成される。蓋開閉駆動部２２も、蓋２１１と同様に、陰圧状態緩和部４の一部を構成する。 Here, the negative pressure state relaxation operation will be described.
As shown in FIG. 9, the steam generator 21 has a lid 211 that can be opened and closed. The lid 211 constitutes a part of the negative pressure state alleviating portion 4.
Further, as shown in FIG. 10, the steam generator 21 has a lid opening / closing drive unit 22. The lid opening / closing drive unit 22 is a mechanism for opening / closing the lid 211, and is composed of, for example, a motor or the like. Like the lid 211, the lid opening / closing drive unit 22 also constitutes a part of the negative pressure state relaxation unit 4.
　陰圧状態緩和動作の１つは、蓋２１１を開状態にすることである。これにより、陰圧状態が湿度調整器２の貯留部２４１内が開放されて、貯留部２４１内の陰圧状態を緩和することができる。これにより、フロート２８１が強制的に引張り上げられるのを防止することができ、よって、供給停止の誤作動を防止することができる。 One of the negative pressure state relaxation operations is to open the lid 211. As a result, the negative pressure state in the storage unit 241 of the humidity controller 2 is opened, and the negative pressure state in the storage unit 241 can be alleviated. As a result, it is possible to prevent the float 281 from being forcibly pulled up, and thus it is possible to prevent a malfunction of the supply stop.
　また、陰圧状態緩和動作の１つは、蓋２１１を開状態にすることとは別に、ファン１４による空気ＡＲ２の排出量を低下させる、すなわち、ファン１４の回転数を低下させることである。ファン１４の回転数が低下した分、貯留部２４１内の陰圧状態が緩和される。これによっても、フロート２８１が強制的に引張り上げられるのを防止することができ、よって、供給停止の誤作動を防止することができる。従って、ファン１４も陰圧状態緩和部４の一部を構成するということができる。 Further, one of the negative pressure state relaxation operations is to reduce the amount of air AR2 discharged by the fan 14, that is, to reduce the rotation speed of the fan 14, apart from opening the lid 211. As the rotation speed of the fan 14 decreases, the negative pressure state in the storage unit 241 is alleviated. This also prevents the float 281 from being forcibly pulled up, and thus prevents a malfunction of the supply stop. Therefore, it can be said that the fan 14 also constitutes a part of the negative pressure state relaxation unit 4.
　また、陰圧状態緩和動作を行うのに際して、蓋２１１を開状態にすることと、ファン１４の回転数を低下させることを併用してもよい。
　また、ステップＳ４０１とステップＳ４０２との順番は、逆転してもよい。
　また、内部圧力検出部４１および外部圧力検出部４２のうちの、外部圧力検出部４２を省略してもよい。 Further, when performing the negative pressure state relaxation operation, opening the lid 211 and reducing the rotation speed of the fan 14 may be used in combination.
Further, the order of step S401 and step S402 may be reversed.
Further, the external pressure detection unit 42 of the internal pressure detection unit 41 and the external pressure detection unit 42 may be omitted.
　＜第５実施形態＞
  以下、図１４を参照して本発明の湿度調整装置の第５実施形態について説明するが、前述した実施形態との相違点を中心に説明し、同様の事項はその説明を省略する。 <Fifth Embodiment>
Hereinafter, a fifth embodiment of the humidity control device of the present invention will be described with reference to FIG. 14, but the differences from the above-described embodiment will be mainly described, and the same matters will be omitted.
　図１４に示すように、湿度調整装置１は、クリーンルーム３０の壁際に寄せて配置されている。これにより、クリーンルーム３０で湿度調整装置１が邪魔になるのを防止することができる。
　また、クリーンルーム３０には、湿度調整装置１に接続されたダクト５０と、ダクト５０に接続されたダクト６０とが配置されている。 As shown in FIG. 14, the humidity control device 1 is arranged close to the wall of the clean room 30. This makes it possible to prevent the humidity control device 1 from getting in the way in the clean room 30.
Further, in the clean room 30, a duct 50 connected to the humidity control device 1 and a duct 60 connected to the duct 50 are arranged.
　ダクト５０は、ファン１４に接続されており、空気ＡＲ２をダクト６０に導くことができる。
　ダクト６０は、クリーンルーム３０の天井付近に、水平方向に沿って配置されている。ダクト６０に導かれた空気ＡＲ２は、そのままダクト６０を通過することができる。そして、空気ＡＲ２は、ダクト６０に開口して設けられた複数の排気口６０１を介して、排出される。これにより、空気ＡＲ２をクリーンルーム３０内に供給することができる。 The duct 50 is connected to the fan 14 and can guide the air AR2 to the duct 60.
The duct 60 is arranged along the horizontal direction near the ceiling of the clean room 30. The air AR2 guided to the duct 60 can pass through the duct 60 as it is. Then, the air AR2 is discharged through a plurality of exhaust ports 601 provided by opening in the duct 60. As a result, the air AR2 can be supplied into the clean room 30.
　＜第６実施形態＞
  以下、図１５を参照して本発明の湿度調整装置の第６実施形態について説明するが、前述した実施形態との相違点を中心に説明し、同様の事項はその説明を省略する。 <Sixth Embodiment>
Hereinafter, a sixth embodiment of the humidity control device of the present invention will be described with reference to FIG. 15, but the differences from the above-described embodiment will be mainly described, and the same matters will be omitted.
　図１５に示すように、湿度調整装置１（湿度調整器２）は、蒸気排出管２２に接続された凝縮水排出管（排出通路）２９をさらに備える。
　蒸気排出管２２と電気ヒータ１３とを通過した空気ＡＲ１の温度差で結露が発生するが、当該結露は、蒸気排出管２２の内部で凝縮水（水Ｑ３）として発生する。 As shown in FIG. 15, the humidity regulator 1 (humidity regulator 2) further includes a condensed water discharge pipe (discharge passage) 29 connected to the steam discharge pipe 22.
Condensation occurs due to the temperature difference between the air AR1 passing through the steam discharge pipe 22 and the electric heater 13, and the dew condensation occurs as condensed water (water Q3) inside the steam discharge pipe 22.
　そして、この水Ｑ３は、凝縮水排出管２９を介して、蒸気排出管２２から排出される。これにより、水Ｑ３が蒸気排出管２２の内部から溢れ出て、湿度調整器２の周辺にある電気ヒータ１３等を濡らすのを防止することができる。これにより、漏電等を防止することができる。 Then, this water Q3 is discharged from the steam discharge pipe 22 via the condensed water discharge pipe 29. As a result, it is possible to prevent the water Q3 from overflowing from the inside of the steam discharge pipe 22 and wetting the electric heater 13 or the like around the humidity controller 2. This makes it possible to prevent electric leakage and the like.
　なお、凝縮水排出管２９は、連結管３３に接続されていてもよいし、貯留部３２まで延びていてもよい。これにより、凝縮水排出管２９を通過した水Ｑ３を貯留部３２で貯留することができる。
　また、蒸気排出管２２は、水平方向に対して傾斜していてもよい。この場合、凝縮水排出管２９は、蒸気排出管２２の傾斜方向下側に接続される。これにより、蒸気排出管２２の内部で生じた水Ｑを、凝縮水排出管２９に迅速に向かわせることができる。 The condensed water discharge pipe 29 may be connected to the connecting pipe 33 or may extend to the storage unit 32. As a result, the water Q3 that has passed through the condensed water discharge pipe 29 can be stored in the storage unit 32.
Further, the steam discharge pipe 22 may be inclined with respect to the horizontal direction. In this case, the condensed water discharge pipe 29 is connected to the lower side of the steam discharge pipe 22 in the inclined direction. As a result, the water Q generated inside the steam discharge pipe 22 can be quickly directed to the condensed water discharge pipe 29.
　以上、本発明の湿度調整装置を図示の実施形態について説明したが、本発明は、これに限定されるものではなく、湿度調整装置を構成する各部は、同様の機能を発揮し得る任意の構成のものと置換することができる。また、任意の構成物が付加されていてもよい。
　また、本発明の湿度調整装置は、前記各実施形態のうちの、任意の２以上の構成（特徴）を組み合わせたものであってもよい。例えば、第３実施形態の構成に第１実施形態、第２実施形態、第４実施形態、第５実施形態、第６実施形態の構成を組み合わせることができる。 Although the humidity control device of the present invention has been described above with reference to the illustrated embodiment, the present invention is not limited to this, and each part constituting the humidity control device has an arbitrary configuration capable of exhibiting the same function. Can be replaced with one. Further, any component may be added.
Further, the humidity control device of the present invention may be a combination of any two or more configurations (features) of the above-described embodiments. For example, the configuration of the third embodiment can be combined with the configurations of the first embodiment, the second embodiment, the fourth embodiment, the fifth embodiment, and the sixth embodiment.
　また、前記第２実施形態では、電圧調整部２６により、ヒータ２４２に対する印加電圧の大きさを調整して、第１運転モードと第２転モードとの切換えを行っていたが、これに限定されない。例えば、蒸気発生器２１が複数のヒータ２４２を有している場合、蒸気ＳＴの発生に使用するヒータ２４２の数を調整して、第１運転モードと第２運転モードとの切換えを行ってもよい。 Further, in the second embodiment, the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 to switch between the first operation mode and the second rotation mode, but the present invention is not limited to this. .. For example, when the steam generator 21 has a plurality of heaters 242, even if the number of heaters 242 used to generate the steam ST is adjusted to switch between the first operation mode and the second operation mode. good.
　１　　　　　　湿度調整装置
　２　　　　　　湿度調整器
　２１　　　　　蒸気発生器
　２１１　　　　蓋
　２１２　　　　蓋開閉駆動部
　２２　　　　　蒸気排出管
　２３　　　　　連結管
　２４　　　　　加湿器
　２４１　　　　貯留部
　２４２　　　　ヒータ（蒸気発生用ヒータ）
　２５　　　　　無接点リレー
　２６　　　　　電圧調整部
　２７　　　　　供給口
　２８１　　　　フロート
　２８２　　　　栓体
　２８３　　　　連結部
　２９　　　　　凝縮水排出管（排出通路）
　３　　　　　　漏水防止部
　３１　　　　　受け部
　３２　　　　　貯留部
　３３　　　　　連結管
　３４　　　　　排出部
　４　　　　　　陰圧状態緩和部
　４１　　　　　内部圧力検出部
　４２　　　　　外部圧力検出部
　１１　　　　　冷凍機
　１２　　　　　冷却コイル
　１３　　　　　電気ヒータ
　１４　　　　　排気ファン
　１５　　　　　筐体
　１５１　　　　吸引口
　１６　　　　　湿度検出部
　１７　　　　　制御部
　１７１　　　　ＣＰＵ
　１７２　　　　記憶部
　１７３　　　　回数検出部
　１８　　　　　電源スイッチ
　３０　　　　　クリーンルーム
　４０　　　　　外部電源
　５０　　　　　ダクト
　６０　　　　　ダクト
　６０１　　　　排出口
　ＡＲ１　　　　空気
　ＡＲ２　　　　空気
　Ｈ　　　　　　検出値
　Ｐ１　　　　　内部圧力
　Ｐ２　　　　　外部圧力
　ΔＰ　　　　　圧力差
　Ｑ１　　　　　水
　Ｑ２　　　　　水
　Ｑ３　　　　　水
　ＳＴ　　　　　蒸気
　Ｓ１０１～Ｓ１０２　ステップ
　Ｓ２００～Ｓ２０３　ステップ
　Ｓ３００～Ｓ３０３　ステップ
　Ｓ４０１～Ｓ４０５　ステップ
　α　　　　　　閾値（閾値湿度）
　β　　　　　　閾値（閾値回数）
　γ　　　　　　閾値

  1 Humidity regulator 2 Humidity regulator 21 Steam generator 211 Lid 212 Lid open / close drive unit 22 Steam discharge pipe 23 Connecting pipe 24 Humidifier 241 Storage unit 242 Heater (steam generator heater)
25 Non-contact relay 26 Voltage regulator 27 Supply port 281 Float 282 Plug body 283 Connecting part 29 Condensed water discharge pipe (discharge passage)
3 Water leakage prevention part 31 Receiving part 32 Storage part 33 Connecting pipe 34 Discharge part 4 Negative pressure state relaxation part 41 Internal pressure detection part 42 External pressure detection part 11 Refrigerator 12 Cooling coil 13 Electric heater 14 Exhaust fan 15 Housing 151 Suction port 16 Humidity detection unit 17 Control unit 171 CPU
172 Storage unit 173 Number of times detection unit 18 Power switch 30 Clean room 40 External power supply 50 Duct 60 Duct 601 Discharge port AR1 Air AR2 Air H Detection value P1 Internal pressure P2 External pressure ΔP Pressure difference Q1 Water Q2 Water Q3 Water ST Steam S101 to S102 S200 to S203 Step S300 to S303 Step S401 to S405 Step α Threshold (threshold humidity)
β threshold (number of thresholds)
γ threshold

Claims (14)

  1. 　冷凍機と、該冷凍機に接続される冷却コイルと、電気ヒータと、湿度調整器とを備える湿度調整装置であって、
    　前記湿度調整器は、前記冷却コイルの吸気側に取付けられる蒸気発生器と、
    　前記冷却コイルの排気側に取付けられる蒸気排出管と、
    　前記蒸気発生器と前記蒸気排出管とを連結する連結管とを有し、
    　前記湿度調整装置は、前記蒸気排出管から滴下する水を受ける受け部を備えることを特徴とする湿度調整装置。     A humidity control device including a refrigerator, a cooling coil connected to the refrigerator, an electric heater, and a humidity controller.
    The humidity controller includes a steam generator attached to the intake side of the cooling coil and
    A steam discharge pipe attached to the exhaust side of the cooling coil and
    It has a connecting pipe that connects the steam generator and the steam discharge pipe.
    The humidity control device is a humidity control device including a receiving portion that receives water dripping from the steam discharge pipe.
  2. 　前記受け部で受けた水を排出する排出部を備える請求項１に記載の湿度調整装置。 The humidity control device according to claim 1, further comprising a discharge unit for discharging the water received by the receiver.
  3. 　前記蒸気排出管に接続され、該蒸気排出管の内部に形成された凝縮水を排出するための排出通路をさらに備える請求項１または２に記載の湿度調整装置。 The humidity control device according to claim 1 or 2, further comprising a discharge passage connected to the steam discharge pipe and for discharging condensed water formed inside the steam discharge pipe.
  4. 　前記湿度調整器によって湿度が調整された空気を排出するファンと、
    　前記冷凍機、前記冷却コイル、前記電気ヒータ、前記湿度調整器および前記ファンを収納する筐体と、
    　前記筐体内の圧力検出する内部圧力検出部とを備え、
    　前記内部圧力検出部の検出結果に基づいて、前記ファンの作動によって生じる前記蒸気発生器内での陰圧状態を緩和するよう構成されている請求項１～３のいずれか１項に記載の湿度調整装置。     A fan that discharges air whose humidity has been adjusted by the humidity controller,
    A housing for accommodating the refrigerator, the cooling coil, the electric heater, the humidity controller, and the fan.
    It is provided with an internal pressure detection unit that detects the pressure inside the housing.
    The humidity according to any one of claims 1 to 3, which is configured to alleviate the negative pressure state in the steam generator caused by the operation of the fan based on the detection result of the internal pressure detection unit. Adjustment device.
  5. 　前記筐体外の圧力検出する外部圧力検出部とを備え、
    　前記内部圧力検出部で検出された圧力と、前記外部圧力検出部で検出された圧力との差が閾値以上の場合、前記陰圧状態を緩和するよう構成されている請求項４に記載の湿度調整装置。     It is provided with an external pressure detection unit that detects pressure outside the housing.
    The humidity according to claim 4, wherein when the difference between the pressure detected by the internal pressure detection unit and the pressure detected by the external pressure detection unit is equal to or greater than a threshold value, the negative pressure state is alleviated. Adjuster.
  6. 　前記蒸気発生器は、開閉可能な蓋を有し、
    　前記蓋を開状態にすることにより、前記陰圧状態を緩和する請求項４または５に記載の湿度調整装置。     The steam generator has a lid that can be opened and closed.
    The humidity control device according to claim 4 or 5, wherein the negative pressure state is alleviated by opening the lid.
  7. 　前記ファンによる空気の排出量を低下させることにより、前記陰圧状態を緩和する請求４～６のいずれか１項に記載の湿度調整装置。 The humidity control device according to any one of claims 4 to 6, which alleviates the negative pressure state by reducing the amount of air discharged by the fan.
  8. 　前記蒸気発生器は、電圧を印加することにより発熱するヒータを有する加湿器と、
    　前記ヒータに対する電圧印加と、電圧印加停止との切換えを行う無接点リレーとを備える請求項１～７のいずれか１項に記載の湿度調整装置。     The steam generator includes a humidifier having a heater that generates heat by applying a voltage, and
    The humidity adjusting device according to any one of claims 1 to 7, further comprising a non-contact relay for switching between applying a voltage to the heater and stopping applying the voltage.
  9. 　前記無接点リレーは、半導体リレーで構成される請求項８に記載の湿度調整装置。 The humidity control device according to claim 8, wherein the non-contact relay is composed of a semiconductor relay.
  10. 　当該湿度調整装置が用いられている環境の湿度を検出する湿度検出部と、
    　前記湿度検出部での検出結果に基づいて、前記切換えを制御する制御部とを備える請求項８または９に記載の湿度調整装置。     A humidity detector that detects the humidity of the environment in which the humidity control device is used, and
    The humidity adjusting device according to claim 8 or 9, further comprising a control unit that controls the switching based on the detection result of the humidity detecting unit.
  11. 　前記制御部は、前記湿度検出部での検出結果が閾値湿度を超えた場合には、前記無接点リレーに前記電圧印加停止をさせ、前記湿度検出部での検出結果が閾値湿度未満である場合には、前記無接点リレーに前記電圧印加をさせる請求項１０に記載の湿度調整装置。 When the detection result by the humidity detection unit exceeds the threshold humidity, the control unit causes the non-contact relay to stop applying the voltage, and when the detection result by the humidity detection unit is less than the threshold humidity. The humidity adjusting device according to claim 10, wherein the voltage is applied to the non-contact relay.
  12. 　単位時間当たりの前記切換えの回数を検出する回数検出部を備え、
    　前記制御部は、前記回数検出部での検出結果に基づいて、前記蒸気発生器から発生する蒸気量を変更する運転モード切換えを行う請求項１０または１１に記載の湿度調整装置。     A number detection unit for detecting the number of times of the switching per unit time is provided.
    The humidity adjusting device according to claim 10 or 11, wherein the control unit switches an operation mode for changing the amount of steam generated from the steam generator based on the detection result of the number of times detection unit.
  13. 　前記制御部は、前記回数検出部での検出結果が閾値回数を超えた場合には、前記蒸気発生器から発生する蒸気量を増大させる第１運転モードとし、前記回数検出部での検出結果が閾値回数未満の場合には、前記蒸気発生器から発生する蒸気量を減少させる第２運転モードとする請求項１２に記載の湿度調整装置。 When the detection result by the number-of-times detection unit exceeds the threshold number, the control unit sets the first operation mode to increase the amount of steam generated from the steam generator, and the detection result by the number-of-times detection unit is The humidity control device according to claim 12, wherein when the number of times is less than the threshold value, the second operation mode is set to reduce the amount of steam generated from the steam generator.
  14. 　前記運転モード切換えを行う際、前記ヒータに対する印加電圧の大きさを調整する電圧調整部を備える請求項１２または１３に記載の湿度調整装置。

          The humidity adjusting device according to claim 12 or 13, further comprising a voltage adjusting unit for adjusting the magnitude of the voltage applied to the heater when switching the operation mode.
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