TWI758185B - Imprint method for improving demolding stability and the related imprint system - Google Patents

Abstract

The present invention provides an imprint method comprises: adding a soluble material to a master mold; solidifying the soluble material to form a soluble mold, the soluble mold having a mold pattern; forming an adhesive agent on a side of the soluble mold opposite to the master mold; placing a taking device to the adhesive agent, wherein the taking device comprises: a frame and a support plate positioned on the frame, and the support plate is contacted with the adhesive agent; removing the taking device from the master mold, wherein the soluble mold is associated with the taking device as the taking device is removed; placing the soluble mold on a polymer layer; applying a high temperature and a pressure to the soluble mold to make the polymer layer have an imprint pattern corresponding to the mold patter and solidify the polymer layer; and providing a solvent to dissolve the soluble mold to separate the solidified polymer layer and the support plate to form an imprint workpiece having the imprint pattern.

Description

Imprinting method and related imprinting system for improving demolding stability

The present invention relates to an imprinting method, and particularly relates to an imprinting method and related imprinting system using a solvent to remove a mold core.

The so-called "imprinting" is to form the pattern of the imprinting material on the substrate by using the mold, wherein, the hot imprinting method is to press the mold on the polymer resin heated above the glass transition temperature, and then cool to the glass transition temperature. After the temperature is below, the mold is released from the mold, thereby transferring the fine structure to the resin on the substrate. According to S. Chou et al., Appl. Phys. Lett. 67, 3114 (1995), it is a hot embossing method using thermoplastic resin as the material to be processed. According to J. Haisma et al., J. Vac. Sci. Technol. B 14(6), 4124 (1996), a photoimprinting method of curable compositions is proposed.

The process of removing the mold from the transfer object is called "mold release". Since the imprint method has the step of peeling off the mold, the mold release is an important consideration, which affects the maintenance of the mold and the integrity of the transfer structure. According to M.W.Lin et al., J.Micro/Nanolith.MEMS MOEMS 7(3), 033005 (2008), the curable composition contains fluorine-containing monomer molecules or non-reactive fluorine-containing compounds to Improve its releasability. US Patent Publication No. US6,849,558B2 and US Patent Publication No. US2006/0249886A1 both propose a mold that can be dissolved by a solvent. This kind of dissolvable mold is obtained by pouring dissolvable material into the mold to solidify, and then using a preform from the mold Remove the mold. According to Journal of Vacuum Science & Technology B 21, 2961 (2003), the preform is the same material as the dissolvable material and is attached to the dissolvable material before the dissolvable material is fully cured. Generally speaking, the concentration and thickness of the soluble material will affect the curing time, so the degree to which the preform can be adhered to the soluble material is a test of the operator's expertise and experience.

The so-called "molecular transfer lithography" is to use exposure and development to describe the geometric structure on the photoresist layer, and then transfer the pattern on the photomask to the substrate through the etching process, which can precisely control the shape and size of the formed pattern, It is an important process in the semiconductor field. According to Nanotechnology 24 (2013) 085302 (6pp), although the mold is also a dissolvable mold, the rollers are used to make the mold evenly placed on the object, resulting in the subsequent expansion of the fine structure spacing and deformation.

The problem to be solved by the present invention is to provide an imprinting method to prevent the mold core from deforming, shifting or expanding its structure during the imprinting process, resulting in defects in the objects that are transferred by the mold core.

In order to solve the above problems, the present invention provides an imprinting method, which includes: adding a dissolvable material into a mold; curing the dissolvable material to form a dissolvable mold core, the mold core having a concave-convex structure ; Form an adhesive on one side of the mold core relative to the sample mold; attach a mold-taking device to the adhesive, wherein the mold-taking device comprises: a frame structure; an adhesive tape, which is arranged on the frame structure; and a supporting backing plate, which is arranged on the tape, wherein the die-taking device is in contact with the adhesive with the supporting backing plate; the die-taking device is separated from the prototype, wherein the dissolving The mold core is separated from the sample mold with the mold taking device; the dissolvable mold core is placed on a polymer material layer; the first high temperature and pressure are applied to the dissolvable mold core to make the polymer The material layer has a pair of transfer structures corresponding to the concave-convex structure, and separates the support backboard from the adhesive tape, wherein: the first high temperature is 50 to 160° C.; applying a second high temperature to the dissolvable mold core, wherein: the second high temperature is 120 to 180° C., and the second high temperature is greater than the first high temperature, so that the polymer material layer is cured; and providing A solvent dissolves the soluble mold core, and separates the cured polymer material layer from the support backplane to obtain a transfer object with the transfer structure.

More preferably, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer includes: placing an object to be transferred on a machine platform, the to-be-transferred object The printed object has a base material layer between the polymer material layer and the machine platform, and the base material layer has a second alignment mark; a base material disposed on the mold-taking device opposite to one of the dissolvable mold cores The imaging element on the side or an imaging element disposed on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the second alignment mark are aligned; and if they are aligned, the dissolvable The dissolvable mold core is in contact with the polymer material layer; if it is not aligned, adjust the X-axis and Y-axis of the dissolvable mold core and the θ angle on the X-Y plane with the machine platform as the X-Y plane until the first The alignment mark is aligned with the second alignment mark; the step of placing the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, and the to-be-transferred object has a base material layer Between the polymer material layer and the machine platform, the base material layer has a second alignment mark; the dissolvable mold core is in contact with the polymer material layer; An imaging element on one side of the dissolvable mold core or an imaging element disposed on a side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the second alignment mark are aligned; If it is not aligned, adjust the X-axis and Y-axis of the mold core and its θ angle on the X-Y plane with the machine platform as the X-Y plane until the first alignment mark is aligned with the second alignment mark; the placement The step of forming the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, the to-be-transferred object having a base material layer between the polymer material layer and the machine platform, The base material layer has a second alignment mark; move a camera element between the dissolvable mold core and the to-be-transferred object to confirm the first Whether the alignment mark and the second alignment mark are aligned; and if they are aligned, reset the camera element and the dissolvable mold core is in contact with the polymer material layer; if not, take the machine platform as the X-Y plane Adjust the X-axis and Y-axis of the mold core and the θ angle in the X-Y plane until the first alignment mark is aligned with the second alignment mark.

More preferably, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer includes: placing an object to be transferred on a machine platform, the to-be-transferred object The printed object has a base material layer between the polymer material layer and the machine platform, and the machine platform has a third alignment mark; one is disposed on the mold-taking device opposite to one of the dissolvable mold cores The imaging element on the side or an imaging element disposed on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the third alignment mark are aligned; and if they are aligned, the dissolvable The mold core is in contact with the polymer material layer; if it is not aligned, use the machine platform as the XY plane to adjust the X-axis and Y-axis of the mold core and the θ angle on the XY plane until the first alignment mark aligned with the third alignment mark; the step of placing the mold core on the polymer material layer may include: placing an object to be transferred on a machine platform, the object to be transferred has a substrate layer on the high Between the molecular material layer and the machine platform, the machine platform has a third alignment mark; the dissolvable mold core is in contact with the polymer material layer; An imaging element on one side of the dissolving mold core or an imaging element disposed on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the third alignment mark are aligned; if not aligned , then use the machine platform as the XY plane to adjust the X-axis and Y-axis of the mold core and its θ angle on the XY plane until the first alignment mark is aligned with the third alignment mark; the mold core is placed in The step on the polymer material layer may include: placing an object to be transferred on a machine platform, the object to be transferred has a substrate layer between the polymer material layer and the machine platform, the machine platform The platform has a third alignment mark; move a camera element between the dissolvable mold core and the object to be transferred to confirm whether the first alignment mark and the third alignment mark are aligned; and if aligned, Then reset the imaging element and the dissolvable mold core is in contact with the polymer material layer; if not aligned, adjust the X-axis and Y-axis of the mold core and its θ in the XY plane with the machine platform as the XY plane angle until the first registration mark is aligned with the third registration mark.

More preferably, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer includes: placing an object to be transferred on a machine platform, the to-be-transferred object The printed object has a base material layer between the polymer material layer and the machine platform, and the polymer material layer has a fourth alignment mark; a set on the mold-taking device opposite to the dissolvable mold core An imaging element on one side or an imaging element disposed on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the fourth alignment mark are aligned; and if they are aligned, the The dissolving mold core is in contact with the polymer material layer; if it is not aligned, use the machine platform as the X-Y plane to adjust the X-axis and Y-axis of the dissolving mold core and the θ angle on the X-Y plane until the first The alignment mark is aligned with the fourth alignment mark; the step of placing the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, the to-be-transferred object having a base material layered between the polymer material layer and the machine platform, the polymer material layer has a fourth alignment mark; the dissolvable mold core is in contact with the polymer material layer; and a A camera on a side of the device opposite to the dissolvable mold core or a camera on a side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the fourth alignment mark are Alignment; if not aligned, adjust the X-axis and Y-axis of the mold core and its θ angle on the X-Y plane with the machine platform as the X-Y plane, until the first alignment mark is aligned with the fourth alignment mark; The step of placing the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, the to-be-transferred object having a substrate layer between the polymer material layer and the machine platform During the time, the polymer material layer has a fourth alignment mark; move a camera element to the dissolvable mold core and the to-be-transferred object between to confirm whether the first alignment mark and the fourth alignment mark are aligned; and if they are aligned, reset the imaging element and the dissolvable mold core is in contact with the polymer material layer; if they are not aligned, use The machine platform adjusts the X-axis and Y-axis of the mold core and its θ angle in the X-Y plane for the X-Y plane until the first alignment mark is aligned with the fourth alignment mark.

More preferably, the present invention further provides an imprinting system, which includes: a machine platform for placing an object to be transferred, a dissolvable mold core, and a mold taking device, and the object to be transferred is placed. It has a base material layer and a polymer material layer arranged on the base material layer. The mold core is placed on the polymer material layer of the object to be transferred and has a concave-convex structure and a first alignment mark. The mold taking device is attached to the mold core, wherein the base material layer has a second alignment mark, the machine platform has a third alignment mark, or the polymer material layer has a fourth alignment mark; and a The imaging element is used to confirm whether the first alignment mark and the second alignment mark are aligned, whether the first alignment mark and the third alignment mark are aligned, or the first alignment mark and the fourth alignment mark Whether the registration mark is aligned.

More preferably, the imprinting system further comprises: an infrared emitting element, which emits an infrared ray to irradiate the first alignment mark and the second alignment mark, the first alignment mark and the third alignment mark, or The first alignment mark and the fourth alignment mark are used to confirm whether they are aligned.

More preferably, wherein the imaging element is disposed on the side of the mold-taking device opposite to the dissolvable mold core or on the side of the machine platform opposite to the object to be transferred; or the imaging element is configured After moving between the dissolvable mold core and the object to be transferred, it resets.

Compared with the prior art, the effect of the present invention is that: since the supporting back plate is bonded to the dissolvable mold core by an adhesive, when the dissolvable mold core is separated from the sample mold; the When the dissolving mold core is in contact with or aligning with the polymer material layer; when a high temperature or pressure is applied to the dissolving mold core; when the frame structure is separated from the supporting backplane; the frame structure and the setting on the frame body structure tape When separated from the supporting backing plate; and when dissolving the dissolving mold core, the supporting backing plate can maintain the structure of the dissolving mold core, so that the dissolving mold core does not produce offset or deformation, so that the final The imprinted transfer object is free of defects.

1: Transfer objects

62: substrate layer

11: Transfer structure

621: Second alignment mark

12: Adhesive

622: Perforation

2: Soluble materials

7: Machine platform

3: Prototype

71: Third registration mark

31: Prototype structure

8: camera element

32: Token structure

9: Position adjustment components

4: Soluble mold kernel

10: Infrared emitting element

41: Concave and convex structure

20: Transfer element

42: First alignment mark

201: Heating element

5: Die-taking device

202: Blow element

51: Frame structure

30: Dissolve Elements

511: Support Department

301: Solvent

512: Operation Department

52: Tape

521: Protrusion

53: Support backplane

6: Objects to be transferred

61: polymer material layer

611: Fourth registration mark

1 to 5 are a series of schematic diagrams illustrating the imprinting method of the present invention, wherein: Figs. 1A to 1B are used to illustrate the first step of the present invention; Figs. 2A to 2F are used to illustrate the second step of the present invention; Fig. 3A 3G to 3G are used to illustrate the third step of the present invention; FIGS. 4A to 4C are used to illustrate the fourth step of the present invention; FIGS. 5A to 5D are used to illustrate the fifth step of the present invention.

In order to make the above-mentioned and/or other purposes, effects and features of the present invention more obvious and easy to understand, preferred embodiments are given below, and are described in detail below:

Please refer to FIGS. 1 to 5 to illustrate the imprinting method of the present invention. The detailed steps of the method of this embodiment are described as follows:

1A and 1B below illustrate the first step of the present invention: forming a dissolvable mold core (4) on the same mold (3).

As shown in FIG. 1A , first, a dissolvable material (2) is added to the mold (3), wherein the mold (3) has a mold structure (31) and a mark structure (32); dissolving the material (2) to form a dissolvable mold core (4), the mold core (4) having a first pair of concave-convex structures (41) corresponding to the mold-like structure (31) and a corresponding marking structure (32) Bit notation (42). Preferably, the The soluble material (2) is selected from the group consisting of: water-soluble polyacrylamide (PAM), polyurethane, polyurea, polyamide, polyester, polyurethane, polyvinyl Pyrrolidone, ethylene-vinyl alcohol, polyacrylamide-glyoxal polymer, polyacrylic acid, or a combination thereof, but not limited thereto. The thickness of the dissolvable material (2) in the sample mold (3) is 10 to 1,000 μm, so the mold core (4) obtained subsequently has a flexible characteristic in addition to dissolving properties. The dissolvable material (2) can be added to the sample mold (3) in the form of a solution, and its concentration can be 5 to 50 wt% of the solution, but not limited thereto. If the concentration is lower than this lower limit, the imperfection of the concave-convex structure (41) will increase, resulting in structural defects, thereby affecting the imprint quality. In addition, the dissolvable material (2) may be added by spin coating or slot die coating; in the case of spin coating, the rotational speed of the spin coating may be 100 to 5,000 rpm, But not limited to this. Preferably, the material of the sample (3) is silicon.

As shown in FIG. 1B, after the dissolvable material (2) is cured and a dissolvable mold core (4) is formed, the dissolvable mold core (4) is relative to one of the sample molds (3). An adhesive (12) is formed on the side. Understandably, the adhesive (12) can be formed by spraying, coating or pouring, but not limited thereto. Preferably, the adhesive (12) is uniformly formed on one side of the dissolvable mold core (4) opposite to the sample mold (3). Preferably, the adhesive (12) is a colloid or liquid, and its types include: light-curing adhesive, UV-curable adhesive, light-to-heat conversion (LTHC) adhesive, thermosetting adhesive or hydrolyzable adhesive resin, but not limited thereto. The so-called "curing" can be thermal curing or light curing (such as: UV curing); in the case of thermal curing, the thermal curing temperature can be room temperature to 160 ℃, and the thermal curing time can be 5 to 60 minutes, but not limited. If the time exceeds this upper limit value, the difficulty of peeling off the mold core (4) will increase, and the concave-convex structure (41) will be defective.

The following Figures 2A to 2F illustrate the second step of the present invention: disengaging the dissolvable mold core (4) from the sample mold (3).

The first embodiment of the present invention is shown in FIGS. 2A, 2B, and 2C. First, a mold-taking device (5) is provided, and the mold-taking device (5) is attached to the adhesive (12), wherein the mold-taking device (5) is attached to the adhesive (12). The device (5) comprises: a frame body structure (51); and a support back plate (53), which is arranged on the frame body structure (51). The second embodiment of the present invention is shown in FIGS. 2D , 2E and 2F. First, a mold taking device (5) is provided, and the mold taking device (5) is attached to the adhesive (12), wherein the mold taking device (5) is attached to the adhesive (12). (5) comprising: a frame body structure (51); an adhesive tape (52) arranged on the frame body structure (51); and a support back plate (53) arranged on the adhesive tape (52). Preferably, the mold taking device (5) is attached to the adhesive (12) by the support back plate (53), so that the support back plate (53) and the dissolvable mold core (4) pass through the adhesion The agent (12) is bonded. Preferably, the frame structure (51) is an annular frame, wherein the annular frame (51) has a support portion (511) and an operation portion (512) connected to the support portion (511). Preferably, the support back plate (53) or the adhesive tape (52) is arranged on the operation part (512). Preferably, the area of the support back plate (53) can completely cover the area of the adhesive (12), so that the dissolvable mold core (4) can be tightly adhered to the support back plate (53), preventing the The dissolvable mold core (4) moves with respect to the sample mold (3), resulting in an offset or error due to shaking. Preferably, the material of the adhesive tape (52) can be thermally dissociable styrofoam or UV dissociable styrofoam, but not limited thereto. Preferably, the thermally dissociable foamed adhesive is polystyrene adhesive, polyurethane adhesive (PU), or polystyrene adhesive (PS), and its thickness is 100 to 1,000 μm. Preferably, the adhesive tape (52) has a protruding portion (521), wherein the adhesive tape (52) is disposed on the operating portion (512) of the frame structure (51) with the protruding portion (521). Preferably, the supporting backboard (53) has a protruding portion (521), wherein the supporting backboard (53) is disposed on the operating portion (512) of the frame structure (51) by the protruding portion (521). .

Next, move the mold-taking device (5), so that the mold core moves relative to the sample mold (3) along with the mold-taking device (5), so as to separate the mold core from the sample mold (3). Preferably, when the dissolvable mold core (4) leaves the sample mold (3), the operating portion of the ring frame (51) can be operated in a forward peeling or side peeling manner. (512).

3A to 3G below illustrate the third step of the present invention: placing a dissolvable mold core (4) on a polymer material layer (61).

3A and 3B, in one embodiment, a substrate layer (62) of the object (6) to be transferred is first placed on a machine platform (7), and the substrate layer (62) has a The second alignment mark (621); then, the polymer material layer (61) is formed on the base material layer (62); An imaging element (8) on one side or an imaging element (8) arranged on the side of the machine platform (7) opposite to the object to be transferred (6) confirms the first alignment mark ( 42) Whether the second alignment mark (621) of the base material layer (62) is aligned; and if aligned, the dissolvable mold core (4) is in contact with the polymer material layer (61) and the subsequent steps are performed; if not To align, use a position adjustment element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and the θ angle on the X-Y plane with the machine platform (7) as the X-Y plane until they are aligned. 3C and 3D, in another embodiment, a substrate layer (62) of the object (6) to be transferred is first placed on a machine platform (7), and the substrate layer (62) has a second alignment mark (621); then, a polymer material layer (61) is formed on the base material layer (62); then, the dissolvable mold core (4) is in contact with the polymer material layer (61); then , with a camera element (8) arranged on the side of the mold taking device (5) opposite to the dissolvable mold core (4) or a camera element (8) arranged on the machine platform (7) opposite to the object to be transferred (6) The imaging element (8) on one side confirms whether the first alignment mark (42) of the mold core (4) and the second alignment mark (621) of the base material layer (62) are aligned; and if they are aligned, proceed to the subsequent steps If it is not aligned, then use a position adjustment element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and its θ angle in the X-Y plane with the machine platform (7) as the X-Y plane until it is aligned. Referring to FIG. 3E, in another embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7), and the substrate layer (62) has a first Two pair marks (621); then, form a high Molecular material layer (61) on the base material layer (62); then, move a camera element (8) between the dissolvable mold core (4) and the object to be transferred (6) to confirm the first alignment mark (42) whether it is aligned with the second alignment mark (621); and if aligned, reset the imaging element (8) and the dissolvable mold core (4) is in contact with the polymer material layer (61), and perform subsequent steps; If it is not aligned, use a position adjusting element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and the θ angle on the X-Y plane with the machine platform (7) as the X-Y plane until they are aligned.

Referring to FIG. 3F , in one embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7), and the machine platform (7) has a third Alignment marks (71); then, a polymer material layer (61) is formed on the base material layer (62); after that, a set on the mold-taking device (5) opposite to one of the dissolvable mold cores (4) The imaging element (8) on the side or an imaging element (8) arranged on the side of the machine platform (7) opposite to the object to be transferred (6) confirms the first alignment mark (42) of the mold core (4). Whether it is aligned with the third alignment mark (71) of the machine platform (7); and if aligned, the dissolvable mold core (4) is in contact with the polymer material layer (61) and the subsequent steps are performed; if it is not aligned, Then use a position adjusting element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and the θ angle on the X-Y plane with the machine platform (7) as the X-Y plane until they are aligned. In another embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7), and the machine platform (7) has a third alignment mark ( 71); then, forming a polymer material layer (61) on the base material layer (62); then, the dissolvable mold core (4) is in contact with the polymer material layer (61); The imaging element (8) of the device (5) opposite to the side of the dissolvable mold core (4) or an imaging element (8) arranged on the side of the machine platform (7) opposite to the object to be transferred (6) ) confirm whether the first alignment mark (42) of the mold core (4) is aligned with the third alignment mark (71) of the machine platform (7); and if aligned, carry out subsequent steps; if not aligned, utilize A position adjusting element (9) adjusts the mold core (4) with the machine platform (7) as the X-Y plane The X-axis and Y-axis positions and their θ angles in the X-Y plane until they are aligned. In yet another embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7), and the machine platform (7) has a third alignment mark ( 71); then, forming a polymer material layer (61) on the base material layer (62); then, moving an imaging element (8) between the dissolvable mold core (4) and the object to be transferred (6) To confirm whether the first alignment mark (42) and the third alignment mark (71) are aligned; and if they are aligned, reset the imaging element (8) and the dissolvable mold core (4) and the polymer material layer (61) contact, and carry out subsequent steps; if not aligned, use a position adjustment element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and its θ in the X-Y plane with the machine platform (7) as the X-Y plane corners until aligned.

Referring to FIG. 3G, in one embodiment, a substrate layer (62) of the object (6) to be transferred is first placed on a machine platform (7); then, a polymer material layer (61) is formed on on the base material layer (62), and the polymer material layer (61) has a fourth alignment mark (611); An imaging element (8) on one side or an imaging element (8) arranged on the side of the machine platform (7) opposite to the object to be transferred (6) confirms the first alignment mark (42) of the mold core (4). ) is aligned with the fourth alignment mark (611) of the polymer material layer (61); and if aligned, the dissolvable mold core (4) is in contact with the polymer material layer (61) and the subsequent steps are performed; if not To align, use a position adjustment element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and the θ angle on the X-Y plane with the machine platform (7) as the X-Y plane until they are aligned. In another embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7); then, a polymer material layer (61) is formed on the substrate layer ( 62), and the polymer material layer (61) has a fourth alignment mark (611); then, the dissolvable mold core (4) is in contact with the polymer material layer (61); An imaging element (8) on the side of the mold device (5) opposite to the dissolvable mold core (4) or an imaging element ( 8) Confirm the first pair of mold kernels (4) Whether the positioning mark (42) and the fourth positioning mark (611) of the polymer material layer (61) are aligned; and if they are aligned, perform subsequent steps; The platform (7) adjusts the X-axis and Y-axis positions of the mold core (4) and the θ angle to the X-Y plane for the X-Y plane until they are aligned. In yet another embodiment, a substrate layer (62) of the object to be transferred (6) is first placed on a machine platform (7); then, a polymer material layer (61) is formed on the substrate layer (7). 62), and the polymer material layer (61) has a fourth alignment mark (611); then, move a camera element (8) to the dissolvable mold core (4) and the object to be transferred (6) time to confirm whether the first alignment mark (42) and the fourth alignment mark (611) are aligned; and if they are aligned, reset the imaging element (8) and the dissolvable mold core (4) and the polymer material layer (61) ) contact, and carry out subsequent steps; if not aligned, then use a position adjustment element (9) to adjust the X-axis and Y-axis positions of the mold core (4) and its position on the X-Y plane with the machine platform (7) as the X-Y plane θ angle until aligned.

More preferably, the polymer material layer (61) can be obtained by spin coating to form a polymer material with a glass transition temperature lower than that of the mold core (4) on the base material layer (62); or spin coating can also be used first. A polymer material with a glass temperature lower than that of the mold core (4) is formed on the base material layer (62) by means of cloth, and then soft-baked to obtain it. Preferably, the glass transition temperature of the polymer material is 20 to 150° C., the rotational speed of the spin coating is 1,000 to 5,000 rpm, and the coating thickness is 0.05 to 1,000 μm. It should be noted that whether the polymer material is to be soft-baked depends on the properties of the material; preferably, the soft-bake temperature is 80 to 150° C., and the soft-bake time is 3 to 5 minutes. In addition to the spin coating method, a film sticking element (not shown) can also be used to form the polymer material layer (61) on the base material layer (62) by means of a stamping method. Wherein, the second alignment mark (621) can be arranged on a surface of the base material layer (62) opposite to the dissolvable mold core (4); or arranged on a surface opposite to the machine platform (7). When the second alignment mark (621) of the base material layer (62) is provided on a surface of the base material layer (62) opposite to the dissolvable mold core (4), the base material layer (62) may interfere with the imaging element ( 8) Fetch the first pair The image of the alignment mark (42) and the second alignment mark (621), so the base material layer (62) can be further opened with a through hole (622) to expose the second alignment mark (621). Furthermore, in order to facilitate the camera element (8) to capture the images of the first alignment mark (42) and the second alignment mark (621), the base material layer (62) is preferably a transparent base material layer. Wherein, the third alignment mark (71) is arranged on the machine platform (7). In order to prevent the substrate layer (62) from possibly interfering with the image capture of the first alignment mark (42) and the third alignment mark (71) by the camera element (8), the substrate layer (62) may further have a through hole formed therein (622) to expose the third alignment mark (71). Furthermore, in order to facilitate the imaging element (8) to capture the images of the first alignment mark (42) and the third alignment mark (71), the base material layer (62) is preferably a transparent base material layer. Wherein, the fourth alignment mark (611) can be arranged on a surface of the polymer material layer (61) opposite to the dissolvable mold core (4); or arranged on a surface opposite to the machine platform (7). When the fourth alignment mark (611) of the polymer material layer (61) is disposed on a surface of the base material layer (62) opposite to the dissolvable mold core (4), the polymer material layer (61) may interfere with imaging The element (8) captures the images of the first alignment mark (42) and the fourth alignment mark (611), so the polymer material layer (61) can further open a hole (622) to expose the fourth alignment mark ( 611). Furthermore, in order to facilitate the imaging element (8) to capture the images of the first alignment mark (42) and the fourth alignment mark (611), the polymer material layer (61) is preferably a transparent polymer material layer.

In addition, in order to avoid insufficient clarity caused by light reflection noise when the imaging element (8) captures the images of the first alignment mark (42) and the second alignment mark (621), an infrared emitting element ( 10) Irradiate the first alignment mark (42) and the second alignment mark (621); in order to prevent the camera element (8) from capturing the images of the first alignment mark (42) and the third alignment mark (71) Insufficient clarity caused by light reflection noise, an infrared emitting element (10) can be used to irradiate the first alignment mark (42) and the third alignment mark (71); When the images of the alignment mark (42) and the fourth alignment mark (611) are insufficiently sharp due to light reflection noise, an infrared ray can be used to emit The element (10) is irradiated with the first alignment mark (42) and the fourth alignment mark (611). The infrared emitting element (10) can be arranged on the side of the mold-taking device (5) opposite to the dissolvable mold core (4) or on the side of the machine platform (7) opposite to the object to be transferred (6). , but not limited to this.

The difference between the embodiment shown in FIG. 3F and the embodiment shown in FIGS. 3A to 3E is that the position of the alignment mark is different. Apart from this, other operation details and functions are basically the same, and will not be repeated here. The difference between the embodiment shown in FIG. 3G and the embodiment shown in FIGS. 3A to 3F is that the alignment mark and the position of the perforation ( 622 ) are different. Apart from that, other operation details and functions are basically the same, here No longer.

The following FIGS. 4A to 4C illustrate the fourth step of the present invention: applying a high temperature or pressure to the dissolvable mold core (4) to cure the polymer material layer (61).

As shown in FIG. 4A, in the first embodiment of this step, a transfer element (20) is used to apply high temperature and pressure to the dissolvable mold core (4), so that the polymer material layer (61) has a corresponding The transfer structure (11) of the concave-convex structure (41), and after the polymer material layer (61) is cured, the frame structure (51) is separated from the supporting backplane (53). Wherein, the support backplane (53) is solidified after the polymer material layer (61); and the frame structure (51) can still be stably attached to the dissolvable mold when separated from the support backplane (53). The core (4) is to keep the structure of the dissolvable mold core (4) stable; and the first alignment mark (42) is not displaced to affect the shape of the polymer material layer (61). Specifically, from before the mold-taking device (5) is in contact with the polymer material layer (61); during the curing process of the polymer material; and the frame structure (51) is relative to the support backplane (53) After separation, the support back plate (53) is stably attached to the dissolvable mold core (4) to maintain its structural stability. In one embodiment, the mold taking device (5) includes a frame structure (51) and a supporting backplane (53). Preferably, the high temperature enables the temperature of the polymer material layer (61) to reach its glass transition temperature first, and the pressure enables the material of the polymer material layer (61) to sufficiently flow into the concave-convex structure (41), and then the high temperature can increase the temperature of the polymer material layer (61). make a high score The material of the sub-material layer (61) is cured so that the transfer structure (11) of the polymer material layer (61) completely corresponds to the concave-convex structure (41). Preferably, the time for applying high temperature and pressure is 1 to 20 minutes, but not limited thereto. Preferably, the high temperature is 50 to 160°C, but not limited thereto. It should be noted that the time range for applying high temperature and pressure and the high temperature temperature range can be determined according to the material of the polymer material layer (61); on the whole, the top of the polymer material layer (61) does not dissolve without causing the transfer structure (11) The principle of producing structural defects. In addition, applying pressure may apply a positive pressure to the side of the dissolvable mold core (4) opposite to the polymer material layer (61); or apply a positive pressure to the dissolvable mold core (4) adjacent to the polymer material layer (61). 61) to apply negative pressure; or to apply positive pressure and negative pressure at the same time. Preferably, the positive pressure is +20 to +600 kPa, and the negative pressure is -10 to -101.3 kPa, but not limited thereto. It should be noted that the volatile solvent ( 301 ) in the polymer material layer ( 61 ) that is thermally dissipated by the negative pressure can be extracted to avoid remaining in the polymer material layer ( 61 ) and causing the transfer structure ( 11 ) produce structural defects. Also as shown in FIG. 4A , the transfer element (20) includes a heating element (201) for providing high temperature and a blowing element (202) for providing pressure, but not limited thereto.

As shown in FIGS. 4B and 4C , the second embodiment of this step is shown. As shown in FIG. 4B, a transfer element (20) is used to apply a first high temperature and pressure to the dissolvable mold core (4), so that the polymer material layer (61) has a corresponding concave-convex structure (41) for transfer printing structure (11) and separate the support backing plate (53) from the tape (52). Specifically, under the condition that the mold-taking device (5) comprises a frame structure (51) and an adhesive tape (52) and the material of the adhesive tape (52) is a thermally dissociable foam adhesive, the dissociation temperature (relatively higher) of the adhesive tape (52) is passed through. It is preferably 80 to 150° C.) lower than the first high temperature temperature, so that the adhesive tape (52) can be dissociated and cracked at the first high temperature temperature. In addition, the first high temperature enables the temperature of the polymer material layer (61) to reach its glass transition temperature first, and the pressure enables the material of the polymer material layer (61) to sufficiently flow into the concave-convex structure (41). Preferably, the time for applying the first high temperature and pressure is 1 to 20 minutes, but not limited thereto. Preferably, the high temperature is 50 to 160°C, but Not limited to this. It should be noted that the time range for applying the first high temperature and pressure and the first high temperature temperature range can be determined according to the material of the polymer material layer (61). The transfer structure (11) produces structural defects as a principle. In addition, applying pressure may apply a positive pressure to the side of the dissolvable mold core (4) opposite to the polymer material layer (61); or apply a positive pressure to the dissolvable mold core (4) adjacent to the polymer material layer (61). 61) to apply negative pressure; or to apply positive pressure and negative pressure at the same time. Preferably, the positive pressure is +20 to +600 kPa, and the negative pressure is -10 to -101.3 kPa, but not limited thereto. It should be noted that the volatile solvent ( 301 ) in the polymer material layer ( 61 ) that is thermally dissipated by the negative pressure can be extracted to avoid remaining in the polymer material layer ( 61 ) and causing the transfer structure ( 11 ) produce structural defects. More preferably, the transfer element (20) includes a heating element (201) for providing a first high temperature and a blowing element (202) for providing pressure, but not limited thereto.

As shown in FIG. 4C , the transfer element (20) is used to apply a second high temperature to the dissolvable mold core (4), and the second high temperature is greater than the first high temperature, so that the polymer material layer (61) is cured. Specifically, the second high temperature can enable the temperature of the polymer material layer (61) to reach its curing temperature so as to cross-link and cure the material. In this way, the elasticity of the polymer material layer (61) can be reduced so that the transfer structure (11) of the polymer material layer (61) can completely correspond to the concave-convex structure (41). Preferably, the second high temperature is 120 to 180° C., but not limited thereto. This step is performed especially when the material of the polymer material layer (61) is a thermosetting resin (eg, epoxy resin). Specifically, this step can ensure that the polymer material layer (61) will not deform when placed in a temperature environment lower than the second high temperature. More preferably, the second high temperature can be provided by the heating element (201) of the transfer element (20). It can be understood that in the process of applying the first high temperature and the second high temperature, the supporting back plate (53) is tightly bonded to the dissolvable mold core (4), so that the dissolvable mold core (4) ) during the heating process to maintain structural stability without offset or deformation.

The following Figures 5A to 5D illustrate the fifth step of the present invention: dissolving the The dissolvable mold core separates the cured polymer material layer (61) from the support backplane (53).

As shown in Figs. 5A to 5D, a solvent (301) is provided by a dissolving element (30) to dissolve the dissolvable mold core (4), so that the cured polymer material layer (61) and the supporting back plate (53) are formed. Separation to obtain a transfer object (1) having a transfer structure (11). It should be noted that the type of the solvent ( 301 ) can be determined according to the material of the dissolvable mold core ( 4 ). Preferably, the material of the dissolvable mold core (4) is water-soluble polyacrylamide (PAM), polyurethane, polyurea, polyamide, polyester, polyurethane, polyvinylpyrrolidone, In the case of ethylene-vinyl alcohol, polyacrylamide-glyoxal polymer, or polyacrylic acid, the solvent (301) is water, but not limited thereto.

Wherein, the dissolvable mold core (4) can be dissolved with a solvent (301) on the machine platform (7) to separate the cured polymer material layer (61) from the support backplane (53). Preferably, after the curing step of the polymer material layer (61) and before the dissolving step of the dissolvable mold core (4), the frame structure (51) is relative to the support backplane (53) separation. Preferably, after the curing step of the polymer material layer (61) and before the dissolving step of the dissolvable mold core (4), the frame structure (51) is arranged on the frame structure (51) ) of the tape (52) is separated with respect to the support back plate (53). Preferably, when the dissolvable mold core (4) is dissolved with the solvent (301), it can be performed on the machine platform (7), but it can also be performed in an area other than the machine platform (7). Specifically, the base material layer (62), the cured polymer material layer (61), the dissolvable mold core (4), and the supporting back plate (53) disposed on the base material layer (62) ) together into a container containing a solvent (301), dissolve the soluble mold core (4) with the solvent (301), and separate the cured polymer material layer (61) from the support backplane (53), In order to obtain a transfer object (1) with the transfer structure (11).

Since the support back plate (53) is bonded with the dissolvable mold core (4) by an adhesive (12), the dissolvable mold core (4) is separated from the sample mold (3) when the dissolvable mold core (4) is in contact with or aligned with the polymer material layer (61); when a high temperature or pressure is applied to the dissolvable mold core (4); When the frame body structure (51) is separated from the support backplane (53); when the frame body structure (51) and the adhesive tape (52) arranged on the frame body structure (51) are separated from the support backboard (53); And when dissolving the dissolvable mold core (4), the support back plate (53) can maintain the structure of the dissolvable mold core (4), so that the dissolvable mold core (4) does not produce offset or Deformation, so that the final imprinted transfer object (1) does not produce defects.

However, the above are only preferred embodiments of the present invention, but cannot limit the scope of implementation of the present invention; therefore, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the description of the invention, All still fall within the scope of the patent of the present invention.

4: Soluble mold kernel

42: First alignment mark

6: Objects to be transferred

61: polymer material layer

62: substrate layer

621: Second alignment mark

622: Perforation

7: Machine platform

8: camera element

9: Position adjustment components

10: Infrared emitting element

12: Adhesive

51: Frame structure

53: Support backplane

Claims (7)

An imprinting method, comprising: adding a dissolvable material into a mold; curing the dissolvable material to form a dissolvable mold core, the mold core having a concave-convex structure; An adhesive is formed on one side of the mold; a mold-taking device is attached to the adhesive, wherein the mold-taking device comprises: a frame structure; an adhesive tape, which is arranged on the frame structure; and a support back plate, which is arranged on the adhesive tape, wherein the mold-taking device is in contact with the adhesive with the support back plate; the mold-taking device is separated from the sample mold, wherein the dissolvable mold core is accompanied by the mold-taking device Separate relative to the sample mold; place the dissolvable mold core on a polymer material layer; apply a first high temperature and pressure to the dissolvable mold core, so that the polymer material layer has a corresponding concave-convex structure. transfer the structure and separate the support back plate from the adhesive tape, wherein: the first high temperature is 50 to 160°C; a second high temperature is applied to the dissolvable mold core, wherein: the second high temperature is 120 to 180°C ℃, and the second high temperature is higher than the first high temperature, so that the polymer material layer is cured; and a solvent is provided to dissolve the soluble mold core, so that the cured polymer material layer is separated from the support backplane to obtain A transfer object with the transfer structure. The imprinting method of claim 1, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer comprises: placing a to-be-transferred object on a machine platform, the to-be-transferred object having a substrate layer on the polymer material layer and the machine Between the platforms, the base material layer has a second alignment mark; a camera element arranged on the side of the mold-taking device opposite to the dissolvable mold core or a camera element arranged on the machine platform opposite to the to-be-turned The imaging element on one side of the printed object confirms whether the first alignment mark and the second alignment mark are aligned; and if they are aligned, the dissolvable mold core is in contact with the polymer material layer; if they are not aligned, use The machine platform adjusts the X-axis and Y-axis of the dissolvable mold core and its θ angle in the X-Y plane for the X-Y plane until the first alignment mark is aligned with the second alignment mark; the mold core is placed at The step on the polymer material layer may include: placing an object to be transferred on a machine platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, the base material The layer has a second alignment mark; the dissolving mold core is in contact with the polymer material layer; The imaging element on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the second alignment mark are aligned; if not, adjust the mold core with the machine platform as the X-Y plane The X axis and the Y axis and the θ angle of the X-Y plane until the first alignment mark is aligned with the second alignment mark; the step of placing the mold core on the polymer material layer may include: placing a to-be-turned printing an object on a machine platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, the base material layer has a second alignment mark; moving a camera element to Confirm whether the first alignment mark and the second alignment mark are aligned between the dissolvable mold core and the object to be transferred; and If it is aligned, reset the camera element and the dissolvable mold core is in contact with the polymer material layer; if not, adjust the X-axis and Y-axis of the mold core and the X-Y axis of the mold core with the machine platform as the X-Y plane. Theta angle of the plane until the first registration mark is aligned with the second registration mark. The imprinting method of claim 1, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer comprises: placing an object to be transferred on a machine On the stage platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, and the machine platform has a third alignment mark; a set on the mold-taking device is opposite to An imaging element on one side of the dissolvable mold core or an imaging element disposed on a side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the third alignment mark are aligned; and If it is aligned, the dissolvable mold core is in contact with the polymer material layer; if it is not aligned, the X-axis and Y-axis of the mold core and the θ angle on the X-Y plane are adjusted with the machine platform as the X-Y plane. Until the first alignment mark is aligned with the third alignment mark; the step of placing the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, the to-be-transferred object has A base material layer is between the polymer material layer and the machine platform, the machine platform has a third alignment mark; the dissolvable mold core is in contact with the polymer material layer; and a A camera element on the side of the mold-taking device opposite to the dissolvable mold core or a camera element disposed on the side of the machine platform opposite to the object to be transferred confirms the first alignment mark and the third alignment mark Whether the marks are aligned; if not, use the machine platform as the X-Y plane to adjust the X-axis and Y-axis of the mold core and its θ angle on the X-Y plane until the first alignment mark and the third alignment mark Alignment; the step of placing the mold core on the polymer material layer may include: placing an object to be transferred on a machine platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, the machine platform has a third alignment mark; moving An imaging element is placed between the dissolvable mold core and the object to be transferred to confirm whether the first alignment mark and the third alignment mark are aligned; and if they are aligned, reset the imaging element and the dissolvability The mold core is in contact with the polymer material layer; if it is not aligned, use the machine platform as the X-Y plane to adjust the X-axis and Y-axis of the mold core and the θ angle on the X-Y plane until the first alignment mark and The third alignment mark is aligned. The imprinting method of claim 1, wherein the dissolvable mold core has a first alignment mark, and the step of placing the mold core on the polymer material layer comprises: placing an object to be transferred on a machine On the table platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, and the polymer material layer has a fourth alignment mark; on the other hand, the object to be transferred has a fourth alignment mark. An imaging element on one side of the dissolvable mold core or an imaging element disposed on a side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the fourth alignment mark are aligned; And if it is aligned, the dissolvable mold core is in contact with the polymer material layer; if it is not aligned, the X-axis and the Y-axis of the dissolvable mold core are adjusted with the machine platform as the X-Y plane and their alignment on the X-Y plane θ angle until the first alignment mark is aligned with the fourth alignment mark; the step of placing the mold core on the polymer material layer may include: placing a to-be-transferred object on a machine platform, the to-be-transferred object The transfer object has a base material layer between the polymer material layer and the machine platform, the polymer material layer has a fourth alignment mark; the dissolvable mold core is in contact with the polymer material layer; and With a camera element or a device disposed on the side of the mold-taking device opposite to the dissolvable mold core The imaging element on the side of the machine platform opposite to the object to be transferred confirms whether the first alignment mark and the fourth alignment mark are aligned; if they are not aligned, use the machine platform as the X-Y plane to adjust the The X axis and the Y axis of the mold core and the θ angle on the X-Y plane until the first alignment mark is aligned with the fourth alignment mark; the step of placing the mold core on the polymer material layer may include: placing a The object to be transferred is placed on a machine platform, the object to be transferred has a base material layer between the polymer material layer and the machine platform, and the polymer material layer has a fourth alignment mark; moving a The imaging element is placed between the dissolvable mold core and the object to be transferred to confirm whether the first alignment mark and the fourth alignment mark are aligned; and if they are aligned, reset the imaging element and the dissolvable mold The kernel is in contact with the polymer material layer; if it is not aligned, adjust the X-axis and Y-axis of the mold kernel and the θ angle on the X-Y plane with the machine platform as the X-Y plane, until the first alignment mark and the The fourth registration mark is aligned. An imprinting system includes: a machine platform for placing an object to be transferred, a dissolvable mold core, and a mold taking device, the object to be transferred has a base material layer and a setting The polymer material layer on the base material layer, the mold core is placed on the polymer material layer of the object to be transferred and has a concave-convex structure and a first alignment mark, the mold taking device is attached to the mold core , wherein the base material layer has a second alignment mark, the machine platform has a third alignment mark, or the polymer material layer has a fourth alignment mark; and a camera element is used to confirm the Whether the first alignment mark is aligned with the second alignment mark, the first alignment mark is aligned with the third alignment mark, or the first alignment mark is aligned with the fourth alignment mark. The imprinting system according to claim 5, further comprising: an infrared emitting element, which emits an infrared ray to irradiate the first alignment mark and the second alignment mark mark, the first alignment mark and the third alignment mark, or the first alignment mark and the fourth alignment mark, to confirm whether the two are aligned. The imprinting system as claimed in claim 5, wherein the imaging element is disposed on a side of the mold-taking device opposite to the dissolvable mold core or on a side of the machine platform opposite to the object to be transferred ; or the imaging element is configured to move between the dissolvable mold core and the object to be transferred and then reset.

Images