TWI740509B - 靜電放電緩和管 - Google Patents
靜電放電緩和管 Download PDFInfo
- Publication number
- TWI740509B TWI740509B TW109117153A TW109117153A TWI740509B TW I740509 B TWI740509 B TW I740509B TW 109117153 A TW109117153 A TW 109117153A TW 109117153 A TW109117153 A TW 109117153A TW I740509 B TWI740509 B TW I740509B
- Authority
- TW
- Taiwan
- Prior art keywords
- conductive
- tube
- electrostatic discharge
- tube segment
- conductive polymer
- Prior art date
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Abstract
本發明揭示一種靜電放電管片段,其包含一多孔非導電內表面及一鄰近導電聚合物部分。該導電聚合物部分經組態以將藉由行進通過該管片段之一帶電流體產生之靜電荷轉移至接地使得可緩和靜電放電。
Description
本發明之實施例係關於可用於(例如)流體處置系統中且更具體言之用於需要靜電放電緩和之超純流體處置系統中之靜電放電(ESD)緩和管。
提供高純度標準之流體處置系統在先進技術應用中具有許多用途。此等應用包含處理及製造太陽能面板、平板顯示器且在半導體產業中用於諸如光微影、散裝化學品遞送、化學機械拋光(CMP)、濕式蝕刻及清潔之應用。在此等應用中使用之某些化學品尤其係腐蝕性的,由於流體處置組件之可能腐蝕及化學品至環境中之滲濾而排除一些習知流體處置技術之使用。
為了滿足此等應用之耐腐蝕性及純度要求,流體處置系統提供由惰性聚合物製成之管、接頭、閥及其他元件。此等惰性聚合物可包含(但不限於)氟聚合物,諸如四氟乙烯聚合物(PTFE)、全氟烷氧基烷烴聚合物(PFA)、乙烯及四氟乙烯聚合物(ETFE)、乙烯四氟乙烯及六氟丙烯聚合物(EFEP)及氟化乙烯丙烯聚合物(FEP)。除了提供一非腐蝕性及惰性構造之外,許多氟聚合物(諸如PFA)亦係可射出成型及可擠壓的。由此等聚合物製成之若干類型之連接器接頭可用且已知,諸如PRIMELOCK®接
頭、PILLAR®接頭、廣口接頭及其他接頭。例如,在美國專利第5,154,453號、第6,409,222號、第6,412,832號、第6,601,879號、第6,758,104號及第6,776,440號中繪示例示性接頭。
靜電放電(ESD)係半導體產業中及其他技術應用中之流體處置系統之一重要技術問題。流體與流體系統中之各種操作組件(例如,管或管路、閥、接頭、過濾器等)之表面之間之摩擦接觸可導致靜電荷之產生及累積。電荷產生之程度取決於各種因素,包含(但不限於)組件及流體之性質、流體速度、流體黏度、流體之導電性、至接地之路徑、液體中之紊流及剪切、流體中空氣之存在及表面積。此等性質及用於緩和由此等性質引起之所非要靜電荷之方式在NFPA 77,「Recommended Practice on Static Electricity」,77-1至77-67頁,2014年中論述及報告。
此外,隨著流體流動通過系統,電荷可在其中電荷可累積超出電荷起源之處之稱為一流電荷之一現象中被攜載至下游。充分電荷累積可在各種程序步驟處引起管或管路壁、組件表面處或甚至至基板或晶圓上之ESD。
在一些應用中,半導體基板或晶圓對於靜電荷高度敏感且此ESD可導致基板或晶圓之損害或破壞。例如,歸因於不受控制的ESD,基板上之電路可被損壞且光活化化合物可在規則曝光之前被活化。另外,累積靜電荷可自流體處置系統內放電至外部環境,潛在地損害流體處置系統中之組件(例如,管或管路、接頭、組件、容器、過濾器等),此可導致系統中之流體之洩漏、溢出及組件之經降低效能。在此等情境中,當在受損流體處置系統中使用易燃、有毒及/或腐蝕性流體時,此放電可導致潛在火災或爆炸。
可期望改良超純流體處置系統中之ESD緩和以改良組件效能且減少潛在地損害ESD事件。
本發明之一或多項實施例係關於靜電放電(ESD)緩和管。在一或多項實施例中,該靜電放電(ESD)緩和管包含一多孔非導電聚合物內表面及將來自行進通過該管之一帶電流體之靜電荷轉移至接地之一鄰近導電聚合物。
在一些實施例中,該多孔內表面係發泡體層、一穿孔層、包括孔隙之一層或包括電荷轉移導管之一層。在此等實施例中,該多孔內表面包括孔隙、孔、流道、流體通道、電荷轉移導管或其他類型之多孔性、孔隙或穿孔。
在某些實施例中,該多孔非導電聚合物內表面係在一導電聚合物管之內表面上之非導電聚合物之一穿孔層。
在一些實施例中,該非導電聚合物係氟聚合物,且該導電聚合物係一導電多氟聚合物。
在其他實施例中,該ESD緩和管進一步包括氟聚合物之一外部層。
在一些實施例中,該多孔非導電聚合物內表面係一非導電聚合物管且該導電聚合物包括安置於該非導電聚合物管之一內表面與一外表面之間之將來自行進通過該管之一帶電流體之靜電荷轉移至接地之一或多個導電聚合物條。在某些實施例中,該ESD緩和管包含與該一或多個導電聚合物條電荷轉移接觸之一導電聚合物外部層。在此等實施例中,該等條可係線型軸向條、非線性軸向條、螺狀條、螺旋條或其他幾何形狀。在
此等實施例中,該等導電條係導電氟聚合物條。
本發明之一或多項實施例包含一種使用經揭示ESD緩和管消散靜電荷之方法,其包括:使一流體行進通過包含一非導電多孔內表面及一鄰近導電部分之一管片段之一內通道;及經由該導電部分將靜電荷自該管片段轉移至接地。
本發明之其他實施例包含一種用於具有至少一個入口及至少一個出口之一預定流體流動通路之流體迴路,該流體迴路包含本文中描述之任何實施例之複數個ESD緩和管片段及複數個操作組件。各操作組件包含具有一內部流體流動通路之一本體部分及複數個管連接器接頭。各操作組件在選定管連接器接頭處連接至該複數個管片段之各者,該複數個管片段及操作組件提供通過該流體迴路之該流體流動通路。各管片段包含:i)界定該流體通路之一非導電聚合物部分;及ii)軸向延伸至該等各自管片段之各者之端之導電氟聚合物之一或多個導電部分。各操作組件本體部分包含在該複數個管連接器接頭之各者之間延伸之一導電氟聚合物,其中該等管連接器接頭之各者將該本體部分之各自導體導電地連接至該管片段之一或多個導電部分。在此等實施例中,該複數個操作組件包含一閥、一筆直連接器、一T形連接器、一肘連接器、一多連接器歧管、一過濾器、一熱交換器、一淨化器、一除氣器或一感測器之任一者但不限於其等。
在某些實施例中,本發明提供一種用於具有至少一個入口及至少一個出口之一預定流體流動通路(諸如氣體或液體或兩者)之流體迴路,該流體迴路包括:複數個管片段及複數個操作組件,各操作組件包括具有一內部流體流動通路之一本體部分及複數個管連接器接頭,該等操作組件在選定管連接器接頭處連接該複數個管片段,該複數個管片段及操作
組件提供通過該流體迴路之該流體流動通路;其中各管片段包括i)界定該流體通路之一非導電聚合物部分及ii)軸向延伸至該等各自管片段之各者之端之一或多個導電氟聚合物部分,其中各操作組件本體部分包括在該複數個管連接器接頭之各者之間延伸之一導電氟聚合物,及其中該等管連接器接頭之各者將該本體部分之各自導體導電地連接至該管片段之導電氟聚合物部分。
其他經揭示實施例包含製造具有至少一個入口及至少一個出口之一預定流體流動通路之一靜電放電緩和流體迴路之方法,其包括:將複數個管片段導電地連接至複數個操作組件,各操作組件包括具有一內部流體流動通路之一本體部分及複數個管連接器接頭,該等操作組件在選定管連接器接頭處連接該複數個管片段,該複數個管片段及操作組件提供通過該流體迴路之該流體流動通路;其中各管片段包括i)界定該流體通路之一非導電聚合物部分及ii)結合至軸向延伸至該等各自管片段之各者之端之該非導電聚合物部分且與軸向延伸至該等各自管片段之各者之端之該非導電聚合物部分一致之導電氟聚合物之一或多個導電部分,其中各本體部分包括在該複數個管連接器接頭之各者之間延伸之一導電氟聚合物,及其中該等管連接器接頭之各者將該本體部分之各自導體導電地連接至該管片段之該至少一個導電氟聚合物部分;及將該靜電放電緩和流體迴路連接至接地。
在各項實施例中,為了提供通過該流體迴路之一導電路徑及流體通路,該等操作組件藉由在其等各自管連接器接頭處連接至該等組件之一或多個管片段連接。適合操作組件包含(例如)閥、筆直連接器、T形連接器、肘連接器、多連接器歧管、過濾器、熱交換器、淨化器、除氣
器或感測器但不限於其等。適合感測器可包含(例如)流量控制器、調節器、流量計、壓力計或可變面積計。在一或多項實施例中,該等操作組件之本體部分可結合至在該等連接器接頭與該流體流動通路之間延伸之一導電部分且與在該等連接器接頭與該流體流動通路之間延伸之一導電部分一致。
在某些實施例中,該複數個管片段各包含一非導電聚合物部分及與該非導電聚合物管部分軸向延伸之一或多個導電氟聚合物部分。該管片段之導電氟聚合物之部分在該等管連接器接頭處導電地連接至該本體部分之導電路徑。
上文之概述不旨在描述本發明之各經繪示實施例或每一實施方案。
10:靜電放電(ESD)緩和管片段
12:內部流體路徑
14:主要非導電或低導電部分/主要部分
15:多孔非導電聚合物內表面
16:輔助導電部分
17:外表面
20:靜電放電(ESD)緩和管片段
22:內流體通路
24:非導電部分
26a:導電聚合物條
26b:導電聚合物條
26c:導電聚合物條
26d:導電聚合物條
27:多孔非導電內表面
28:外表面
29:外部
30:靜電放電(ESD)緩和管片段
32:內流體通路
34:非導電部分
36:導電部分
37:多孔非導電內表面
38:外部部分
39:外表面
40:靜電放電(ESD)緩和管片段
42:內流體通路
44:非導電部分
45:外表面
46:外表面
47:導電部分
47a:導電聚合物條
47b:導電聚合物條
47c:導電聚合物條
47d:導電聚合物條
48:外聚合物層
49:多孔非導電內表面
50:靜電放電(ESD)緩和管片段
51:內流體通路
52:非導電部分
53:內表面
54a:導電聚合物條
54b:導電聚合物條
54c:導電聚合物條
54d:導電聚合物條
55:外表面
150:流體處置系統
152:流體供應器
156:程序階段
160:流體迴路
164:管片段
168:操作組件
170:肘形接頭
172:T形接頭
174:閥
176:過濾器
178:流量感測器
179:筆直接頭
182:本體部分
186:管連接器接頭
190:導電路徑
194:接地
198:附接配件
700:筆直連接器接頭
702:肩部區域
704:本體部分
706:頸部區域
706a:螺紋區域
706b:短接管部分
708:附接特徵部
800:三路連接器接頭
810:連接器接頭螺母
812:肋部
814:連接驗證環
900:閥組件/操作組件
902:本體部分
904:接頭螺母
906:操作閥元件
本發明中包含之圖式繪示本發明之實施例且連同描述,用於解釋本發明之原理。圖式僅繪示某些實施例且不限制本發明。
圖1係本發明之具有一多孔非導電聚合物內表面及鄰近導電聚合物之一ESD緩和管之一橫截面視圖。
圖2係本發明之具有一多孔非導電區段及導電聚合物條之一ESD緩和管之一橫截面視圖。
圖3係本發明之具有一多孔非導電聚合物內表面、一導電聚合物核心及一外部聚合物層之一ESD緩和管之一橫截面視圖。
圖4係本發明之具有一多孔非導電區段、導電聚合物條及一外部聚合物層之一ESD緩和管之一橫截面視圖。
圖5係本發明之具有一多孔非導電區段及內導電聚合物條之
一ESD緩和管之一橫截面視圖。
圖6係本發明之使用ESD緩和管之一流體處置系統之一示意圖。
圖7係本發明之使用ESD緩和管之一雙路連接器組件之一透視圖。
圖8係本發明之使用ESD緩和管之一三路連接器組件之一透視圖。
圖9係本發明之使用ESD緩和管之閥組件之一透視圖。
本發明之實施例服從各種修改及替代形式,且某些細節已(例如)在圖式中展示且將詳細描述。應理解,不旨在將本發明限於所述特定實施例,旨在涵蓋落在本發明之精神及範疇內之全部修改、等效物及替代例。
本申請案主張2019年5月23日申請之美國臨時申請案第62/851,962號之優先權及權利,該申請案之全文為了全部目的以引用的方式併入本文中。
本發明報告用於與具有自一流體供應器至一或多個下游程序階段之一流體流動通路之一流體處置系統一起使用之靜電放電(ESD)緩和管之實施例。此系統之實施例包含一流體迴路,該流體迴路包含經導電連接之操作組件及ESD緩和管片段。例如,在國際專利申請案WO 2017/210293中報告習知及一些ESD緩和流體迴路,該案以引用的方式併入本文中,惟其中含有之明確定義或專利發明申請專利範圍除外。
ESD緩和管
本發明中之管片段通常係指適用於裝納或運輸流體之任何可撓性或非可撓性管路或管。根據各項實施例,管片段係導電的,從而提供沿著流體迴路中之各管片段之長度之一導電路徑。導電管可由包含以下者之材料構成:某些金屬;填充有一導電材料之聚合物材料,其在本文中稱為經填充聚合物;或固有導電聚合物(ICP)。一經填充聚合物包含填充有一固體導電材料之聚合物,固體導電材料包含(但不限於)鋼絲、鋁片、塗佈鎳之石墨、碳纖維、碳粉、碳奈米管或其他導電材料。
在一些例項中,管片段部分導電。部分導電管片段可包含由非導電或低導電材料構成之一主要部分及由諸如上文揭示之一導電材料構成之一輔助部分。適用於管片段之例示性非導電或低導電材料包含各種烴類及非烴類聚合物,諸如(但不限於)聚酯、聚碳酸酯、聚醯胺、聚醯亞胺、聚氨酯、聚烯、聚苯乙烯、聚酯、聚碳酸酯、多酮、聚脲、聚乙烯樹脂、聚丙烯酸酯、聚甲基丙烯酸酯及氟聚合物。在一些實施例中,非導電或低導電材料係氟聚合物。例示性氟聚合物包含(但不限於)全氟烷氧基烷烴聚合物(PFA)、乙烯四氟乙烯聚合物(ETFE)、乙烯四氟乙烯及六氟丙烯聚合物(EFEP)、氟化乙烯丙烯聚合物(FEP)、四氟乙烯聚合物(PTFE)、聚氯三氟乙烯(PCTFE)或其他適合聚合物材料。在一項實施例中,氟聚合物係全氟烷氧基烷烴聚合物(PFA)。
圖1係界定一內流體通路12且包含一主要非導電或低導電部分14及鄰近主要部分14之輔助導電部分16之一ESD緩和管片段10之一橫截面視圖。在各項實施例中,主要非導電或低導電部分14可包含一多孔非導電聚合物內表面15。在一些實施例中,主要部分14之多孔非導電內表
面15係一發泡體層、一穿孔層、包括孔隙之一層或包括電荷轉移導管之一層。在一些實施例中,主要部分14可由氟聚合物形成。例如,在一項實施例中,主要部分14可由全氟烷氧基烷烴(PFA)形成。輔助導電部分16可結合至主要部分14之一外表面17且與該外表面17均勻,且可由一導電聚合物材料(諸如本文中描述之該等導電材料)構成。在一些實施例中,輔助導電部分16由填充有一導電材料之氟聚合物且更特定言之,在某些實施例中,填充有一導電材料之一PFA構成。用於填充PFA之導電材料包含(但不限於)碳纖維與塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。導電部分16可提供在下文描述之管連接器接頭之各者之間延伸之一導電路徑。為主要部分14及導電部分16選擇相同聚合物材料促進兩個部分之間之結合。然而,亦預想可使用不同聚合物材料以形成管片段10之部分14、16之各者。
根據製造管片段10之一項實施例,首先將一導電全氟烷氧基烷烴(PFA)聚合物管與一非導電氟聚合物內表面擠壓。接著將一金屬接地棒放置於內流體通路中且將一高頻靜電產生器附接至接地棒且在接地棒之尖端處產生一靜電放電。靜電放電在非導電氟聚合物表面中產生非常圓的清潔邊緣孔,其等提供一多孔非導電內表面及將靜電荷自行進通過管之一帶電流體轉移至接地之一鄰近導電聚合物。
圖2係根據本發明之另一例示性實施例之一ESD緩和管片段20之一橫截面視圖。圖2中展示之管片段20部分導電。管片段20界定一內流體通路22且包含一非導電部分24及由沿著管片段20之一長度在沿著其縱向軸線之一方向上延伸之複數個導電聚合物條26a、26b、26c及26d(統稱為「26」)界定之一導電部分26。通常應理解,導電聚合物條之數目可
變動。導電聚合物條之間之間距亦可變動。在一些實施例中,非導電部分24至少部分多孔且界定管片段20之一多孔非導電內表面27。界定導電部分26之導電聚合物條26a、26b、26c及26d至少部分安置成鄰近且接觸非導電部分24之一外表面28且形成管片段20之一外部29之至少一部分。
在各項實施例中,非導電部分24可由如本文中描述之非導電材料或低導電材料之一者構成。在一些實施例中,非導電部分24可由氟聚合物形成。在一項例示性實施例中,非導電部分24可由全氟烷氧基烷烴(PFA)形成。界定導電部分26之導電條26a、26b、26c及26d可結合至非導電部分24之一外表面28且與該外表面28一致,且可由一導電聚合物材料(諸如本文中描述之該等導電聚合物材料)構成。在一些實施例中,導電部分由填充有一導電材料之氟聚合物且更特定言之,在某些實施例中,填充有一導電材料之一PFA構成。用於填充PFA之導電材料可包含(但不限於)碳纖維與塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。
圖3係根據本發明之又一實施例之一ESD緩和管片段30之一橫截面視圖。如同圖2中繪示之管片段20,圖3中展示之管片段30部分導電。管片段30界定一內流體通路32且包含非導電部分34、一導電部分36及一外部部分38。在一些實施例中,非導電部分34、導電部分36及外部部分38形成為個別層。在一些情況中,層可經共同擠壓。
在一些實施例中,非導電部分34至少部分多孔且界定管片段30之一多孔非導電內表面37。在一些實施例中,非導電部分34係一發泡體層、一穿孔層、包括孔隙之一層或包括電荷轉移導管之一層。非導電部分34可由如本文中描述之非導電材料或低導電材料之一者構成。在一些實施例中,非導電部分34可由氟聚合物形成。在一項例示性實施例中,非
導電部分34可由全氟烷氧基烷烴(PFA)形成。
導電部分36可安置成鄰近且接觸非導電部分34之一外表面39,使得導電部分36沿著管片段30之一長度在沿著其縱向軸線之一方向上延伸。導電部分36可經提供為一或多個層且可由一導電材料(諸如本文中描述之該等導電材料)構成。在一些實施例中,導電部分36由填充有一導電材料之氟聚合物且更特定言之在某些實施例中填充有一導電材料之一PFA構成。用於填充PFA之導電材料可包含(但不限於)碳纖維與塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。
外部部分38可由一非導電聚合物(其係與用於形成非導電部分34或導電部分36之聚合物相同或不同)形成。在一些情況中,外部部分38亦部分導電。
各種部分34、36及38可藉由在一個部分上方依序擠壓另一部分而形成。在一項實施例中,可取決於針對各部分選擇之材料而將至少兩個部分共同擠壓在一起。
圖4係根據本發明之又一實施例之一ESD緩和管片段40之一橫截面視圖。如圖4中展示,管片段界定一內流體通路42且包含一非導電部分44、由導電聚合物條47a、47b、47c及47d界定之一導電部分47及一外部聚合物層48。通常應理解,導電聚合物條47a、47b、47c及47d之數目可變動。導電聚合物條47a、47b、47c及47d之間之間距亦可變動。在一些實施例中,非導電部分44至少部分多孔且界定管片段40之一多孔非導電內表面49。界定導電部分47之導電聚合物條47a、47b、47c及47d至少部分安置成鄰近且接觸非導電部分24之一外表面28且沿著管片段40之一長度在沿著其縱向軸線之一方向上延伸。
在各項實施例中,非導電部分44可由如本文中描述之非導電材料或低導電材料之一者構成。在一些實施例中,非導電部分44可由氟聚合物形成。在一項例示性實施例中,非導電部分44可由全氟烷氧基烷烴(PFA)形成。界定導電部分47之導電條47a、47b、47c及47d可安置成鄰近且接觸非導電部分44之外表面45之一部分,且可由一導電聚合物材料(諸如本文中描述之該等導電聚合物材料)構成。在一些實施例中,導電部分47由填充有一導電材料之氟聚合物且更特定言之在某些實施例中填充有一導電材料之一PFA構成。用於填充PFA之導電材料可包含(但不限於)碳纖維與塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。
外部部分48可由一非導電聚合物(其係與用於形成非導電部分44或導電部分47之聚合物相同或不同)形成。在一些情況中,外部部分38亦部分導電。外部部分48安置成鄰近且接觸非導電部分之外表面45之至少一部分及導電部分47之外表面46之至少一部分。
各種部分44、47及48可藉由在一個部分上方依序擠壓另一部分而形成。在一項實施例中,可取決於針對各部分選擇之材料而將至少兩個部分共同擠壓在一起。
圖5係根據本發明之又一實施例之一ESD緩和管片段50之一橫截面視圖。管片段50界定一內流體通路51、一非導電部分52及在管片段50之一內表面53與一外表面55之間嵌入非導電部分52內且沿著管片段50之一長度在沿著其縱向軸線之一方向上延伸之複數個導電聚合物條54a、54b、54c及54d。通常應理解,導電聚合物條54a、54b、54c及54d之數目可變動。導電聚合物條54a、54b、54c及54d之間之間距亦可變動。在一些實施例中,如描繪,導電聚合物條54a、54b、54c及54d可繞
管片段50之一外部圓周彼此間隔一相等距離。在其他實施例中,一非均勻間距可存在於導電聚合物條54a、54b、54c及54d之間。在一些實施例中,非導電部分52至少部分多孔且界定管片段50之一多孔非導電內表面53。
在各項實施例中,非導電部分52可由如本文中描述之非導電材料或低導電材料之一者構成。在一些實施例中,非導電部分52可由氟聚合物形成。在一項例示性實施例中,非導電部分52可由全氟烷氧基烷烴(PFA)形成。導電條54a、54b、54c及54d在管片段50之一內表面53與一外表面55之間嵌入非導電部分52內,且可由一導電聚合物材料(諸如本文中描述之該等導電聚合物材料)構成。在一些實施例中,導電聚合物條54a、54b、54c及54d由填充有一導電材料之氟聚合物且更特定言之在某些實施例中填充有一導電材料之一PFA構成。用於填充PFA之導電材料可包含(但不限於)碳纖維與塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。
在一些實施例中,管片段50亦可包括與安置於非導電部分內之一或多個導電聚合物條電荷轉移接觸之一外部導電聚合物層。
流體迴路及處置系統
圖6係在本文中根據本發明之各項實施例描述之併入ESD緩和管片段10、20、30、40或50之任一者之一流體處置系統之一示意圖。圖6描繪根據本發明之一或多項實施例之一流體處置系統150。系統150提供供流體自一流體供應器152流動至定位於流體供應源之下游之一或多個程序階段156之一流體路徑。系統150包含一流體迴路160,該流體迴路160包含流體處置系統150之流體路徑之一部分。流體迴路160包含管片段
164及經由管片段164互連之複數個操作組件168。在圖6中,操作組件168包含一肘形接頭170、T形接頭172、一閥174、過濾器176、流量感測器178及筆直接頭179。然而,在各項實施例中,流體迴路160可包含數目及類型上額外或更少之操作組件168。例如,流體迴路160可取代或另外包含泵、混合器、施配頭、噴霧器噴嘴、壓力調節器、流量控制器、除氣器、淨化器或其他類型之操作組件。
在組裝時,操作組件168係藉由在其等各自管連接器接頭186處連接至組件168之複數個管片段164連接在一起。經連接在一起之複數個管片段164及操作組件168提供通過流體迴路160自流體供應器152且朝向程序階段156之一流體通道。在某些實施例中,操作組件168各包含界定流體流動通路之一本體部分182及一或多個管連接器接頭186。在一些實施例中,管連接器接頭186之至少一者係用於接收流體至本體部分182中之一入口部分且管連接器接頭186之至少另一者係用於輸出經由入口部分接收之流體之一出口部分。例如,T形接頭172包含一個管連接器接頭186(其係自流體供應器152接收流體之一入口部分)及兩個管連接器接頭186(其等係朝向程序階段156輸出流體之出口部分)。在某些實施例中,入口部分及出口部分各連接至或可連接至一管片段164。然而,在(例如)其中流體迴路160中之操作組件168包含一噴霧嘴之一些實施例中,僅需要入口部分可連接至一管片段164。在一些實施例中,操作組件168之一或多者包含一單一管連接器或接頭179。
如圖6中繪示之操作組件168之各者包含用於將本體部分182之各自導電路徑導電地連接至經連接至操作組件168之管片段164之導電部分之一橋接組件。因而,在某些實施例中,經連接操作組件168及管
片段164形成沿著整個流體迴路160之一電路徑,從而消除管片段160之間之導電性之斷裂。在各項實施例中,導電材料具有小於約1 x 1010 ohm-m之一電阻率位準,而非導電材料具有大於約1 x 1010 ohm-m之一電阻率位準。在某些實施例中,導電材料具有小於約1 x 109 ohm-m之一電阻率位準,而非導電材料具有大於約1 x 109 ohm-m之一電阻率位準。
在某些實施例中,為了緩和靜電荷累積,經由一或多個附接配件198將一或多個操作組件168電連接至接地194。隨著靜電荷在流體迴路160中累積,接地附接配件198藉由提供自導電路徑190至接地194之一路徑而連續地分散靜電荷。
操作組件
本發明中之操作組件係指具有一流體輸入及一流體輸出且與管連接用於引導或提供流體之流動之任何組件或裝置。操作組件之實例包含(但不限於)接頭、閥、過濾器、熱交換、感測器、泵、混合器、噴霧嘴、淨化器、除氣器及施配頭。例如,在美國專利第5,672,832號、第5,678,435號、第5,869,766號、第6,412,832號、第6,601,879號、第6,595,240號、第6,612,175號、第6,652,008號、第6,758,104號、第6,789,781號、第7,063,304號、第7,308,932號、第7,383,967號、第8,561,855號、第8,689,817號及第8,726,935號中繪示操作組件之此等及額外非限制性實例,該等專利之各者以引用的方式併入本文中,惟所列舉文獻中含有之明確定義或專利發明申請專利範圍除外。
操作組件可由包含(例如)以下各者之導電氟聚合物構成:全氟烷氧基烷烴聚合物(PFA)、乙烯及四氟乙烯聚合物(ETFE)、乙烯四氟乙烯及六氟丙烯聚合物(EFEP)、氟化乙烯丙烯聚合物(FEP)、四氟乙烯聚
合物(PTFE)、聚氯三氟乙烯聚合物(PCTFE)或其他適合聚合物材料。例如,在一些實施例中,導電氟聚合物係填充有導電材料之PFA(例如,經填充PFA)。此經填充PFA包含(但不限於)填充有碳纖維之PFA、塗佈鎳之石墨、碳纖維、碳粉、碳奈米管、金屬粒子及鋼纖維。在各項實施例中,導電材料具有小於約1 x1010 ohm-m之一電阻率位準而非導電材料具有大於約1 x1010 ohm-m之一電阻率位準。在某些實施例中,導電材料具有小於約1 x109 ohm-m之一電阻率位準而非導電材料具有大於約1 x109 ohm-m之一電阻率位準。當經揭示流體處置系統經組態以用於超純流體處置應用中時,管片段及操作組件兩者通常由聚合物材料構成以滿足純度及耐腐蝕性標準。
圖7係根據本文中描述之各項實施例之使用ESD緩和管片段之一雙路連接器組件之一透視圖。圖7繪示用於連接兩個管片段之一筆直連接器接頭700。連接器接頭700包含鄰近一操作組件之一本體部分704且向外延伸以形成一頸部區域706、一螺紋區域706a及一短接管部分706b之一肩部區域702。管片段164由短接管部分706b接納,在某些實施例中,該短接管部分706b可經組態為(例如)一FLARETEK®接頭。連接器接頭700亦包含一附接特徵件708,其係與本體部分704導電地連接用於附接至一外部電接觸件且接著至接地之一導電材料。例如,附接特徵部708可連接至一電接觸件,該電接觸件經接地以便組態操作組件連接器接頭400用於ESD緩和。
圖8係根據本文中描述之各項實施例之使用ESD緩和管片段之一三路連接器組件之一透視圖。在圖8中繪示之實施例中,三路連接器接頭800包含用於接合至連接器之一螺紋區域以固定管片段164之一連接
器接頭螺母810。在一些實施例中,接頭螺母可係(例如)一壓縮螺母。隨著接頭螺母810經旋轉且經拴緊至螺紋區域上,管片段164接合連接器接頭使得管將導電部分導電地連接至短接管部分,以及在管與連接器接頭之間形成一防漏密封。在一或多項實施例中,接頭螺母810具有具備包含用於與螺紋區域配接之螺紋之一內表面之一大體上圓柱形形狀。另外,接頭螺母810可具有一結構化外表面,諸如(例如)肋部812,其中肋部繞外表面對稱地安置以與一扳手或鎖定裝置配接用於接頭螺母810在連接器之螺紋區域上之拴緊或鬆開。
在一或多項實施例中,接頭螺母810由聚合物材料構成。例如,在某些實施例中,接頭螺母810由PFA、聚苯胺或其他適合聚合物構成。
在一些實施例中,連接器接頭800係一導電聚合物材料(諸如填充碳之PFA)或(例如)使用習知模製程序形成之其他適合導電聚合物。
在某些實施例中,當將連接器接頭800與管片段164組裝時,接頭螺母810在短接管向前部分處接觸管片段164之外表面且在管片段164與連接器接頭800之間形成一連續流體通路。當接頭螺母810經旋轉且經拴緊時,定位於接頭螺母810與肩部部分之間之連接驗證環814接觸接頭螺母之外表面及肩部部分兩者以提供一防漏連接。
在各項實施例中,連接驗證環814由聚合物材料(諸如PFA或其他聚合物或彈性體)構成。
圖9係根據本文中描述之各項實施例之使用ESD緩和管片段之一閥組件900之一透視圖。操作組件900包含一本體部分902、管連接器接頭及接頭螺母904。在一或多項實施例中,操作組件900另外包含本體
部分中之一操作閥元件906。在各項實施例中,操作元件900廣泛地包含用於組態操作組件900以執行各種操作之適合結構、電子器件或其他材料。
本體部分902包含在管連接器接頭904之各者之間延伸且分別在管連接器接頭之各者與管片段164之導電部分之間形成電接觸之導電PFA。
熟習此項技術者將瞭解,雖然圖8及圖9中繪示之特定實施例具有相同連接器接頭,但在某些實施例中,連接器接頭可具有不同大小,可具有各種設計(諸如步降或步進接頭)或可定位於各種類型之操作組件上。例如,在一些實施例中,操作組件可係一混合器、感測器、過濾器、泵、熱交換器或其他適合元件。因而,操作組件可組態以在一流體迴路內執行各種程序或任務。
本發明之各項實施例之描述已為了圖解之目的呈現,但不旨在為窮舉性或限於所揭示之實施例。一般技術者將明白許多修改及變動而不脫離所描述實施例之範疇及精神。選取本文中使用之術語以解釋實施例之原理、實際應用或優於在市集中找到之技術之技術改良或使其他一般技術者能夠理解本文中揭示之實施例。
10:靜電放電(ESD)緩和管片段
12:內流體通路
14:主要非導電或低導電部分/主要部分
15:多孔非導電聚合物內表面
16:輔助導電部分
Claims (14)
- 一種靜電放電緩和管片段,其包括一多孔非導電內表面及一導電部分,其中鄰近導電部分經結構設計以將藉由行進通過該管片段之一帶電流體產生之靜電荷轉移至接地使得可緩和靜電放電,其中該多孔非導電內表面係一發泡體層、一穿孔層、包括孔隙之一層或包括電荷轉移導管之一層。
- 如請求項1之靜電放電緩和管片段,其中該多孔非導電內表面係非導電聚合物之一穿孔層且該導電部分包括安置於該穿孔層上方且與該穿孔層接觸之一導電聚合物層。
- 如請求項2之靜電放電緩和管片段,其中該非導電聚合物包括氟聚合物,且該導電聚合物層包括填充有一導電材料之全氟聚合物。
- 如請求項3之靜電放電緩和管片段,其中該全氟聚合物係全氟烷氧基烷烴(PFA)。
- 如請求項1至4中任一項之靜電放電緩和管片段,其進一步包括一外部層。
- 如請求項1之靜電放電緩和管片段,其中該多孔非導電內表面由一非導電聚合物部分界定且該導電部分包括嵌入該管片段之一內表面與一外表 面之間該非導電聚合物部分內之一或多個導電聚合物條。
- 如請求項6之靜電放電緩和管片段,其進一步包括與該一或多個導電聚合物條電荷轉移接觸之一外部導電聚合物層。
- 如請求項1之靜電放電緩和管片段,其中該多孔非導電內表面由一非導電聚合物部分界定且該導電部分包括經安置鄰近且接觸該非導電聚合物部分之一外部表面之一或多個導電聚合物條,該一或多個導電聚合物條沿著該管片段之一長度在沿著一縱向軸線之一方向上延伸。
- 如請求項8之靜電放電緩和管片段,其進一步包括一外部層。
- 如請求項6至8中任一項之靜電放電緩和管片段,其中該等導電聚合物條包括填充有一導電材料之氟聚合物。
- 如請求項10之靜電放電緩和管片段,其中該非導電部分包括氟聚合物。
- 如請求項11之靜電放電緩和管片段,其中該多孔非導電內表面包括孔隙、孔、流道、流體通道或電荷轉移導管。
- 一種用於具有至少一個入口及至少一個出口之一預定流體流動通路之流體迴路,該流體迴路包括: 如請求項1、6或8中任一項之複數個靜電放電緩和管片段及複數個操作組件,各操作組件包括具有一內部流體流動通路之一本體部分及複數個管連接器接頭,該等操作組件在選定管連接器接頭處連接該複數個管片段,該複數個管片段及操作組件提供通過該流體迴路之該流體流動通路;其中各管片段包括i)界定該流體通路之一非導電部分及ii)軸向延伸至該等各自管片段之各者之端之導電氟聚合物之一或多個導電部分,及其中各操作組件本體部分包括在該複數個管連接器接頭之各者之間延伸之一導電氟聚合物,及其中該等管連接器接頭之各者將該本體部分之各自導體導電地連接至該管片段之一或多個內導電條。
- 如請求項13之流體迴路,其中該複數個操作組件包含一閥、一筆直連接器、一T形連接器、一肘連接器、一多連接器歧管、一過濾器、一熱交換器或一感測器之任一者。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008082459A (ja) * | 2006-09-28 | 2008-04-10 | Nichias Corp | 帯電防止チューブ |
JP4439889B2 (ja) * | 2003-11-28 | 2010-03-24 | 三桜工業株式会社 | 燃料チューブおよび車輌燃料配管のアース構造 |
JP2016121792A (ja) * | 2014-12-25 | 2016-07-07 | 淀川ヒューテック株式会社 | フッ素樹脂チューブ |
TW201805054A (zh) * | 2016-06-01 | 2018-02-16 | 恩特葛瑞斯股份有限公司 | 導電過濾裝置 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217486A (ja) * | 1985-07-13 | 1987-01-26 | 住友電気工業株式会社 | 可撓性チユ−ブ |
JPH0452556Y2 (zh) | 1988-10-26 | 1992-12-10 | ||
US5229200A (en) | 1991-12-18 | 1993-07-20 | W. L. Gore & Associates, Inc. | Static dissipative nonwoven textile material |
US5759329A (en) * | 1992-01-06 | 1998-06-02 | Pilot Industries, Inc. | Fluoropolymer composite tube and method of preparation |
US5381511A (en) * | 1993-06-02 | 1995-01-10 | W. L. Gore & Associates, Inc. | Flexible electrically heatable hose |
US5678435A (en) | 1995-08-14 | 1997-10-21 | Hodson; James M. | Bicycle locking mechanism |
US5869766A (en) | 1995-10-03 | 1999-02-09 | Nt International, Inc. | Non-contaminating pressure transducer module |
US5672832A (en) | 1996-02-15 | 1997-09-30 | Nt International, Inc. | Chemically inert flow meter within caustic fluids having non-contaminating body |
DE19833493A1 (de) * | 1998-07-24 | 2000-01-27 | Wagner International Ag Altsta | Schlauch zum Fördern von fließfähigen Stoffen |
CA2292279A1 (en) | 1998-12-18 | 2000-06-18 | Fluoroware, Inc. | Creep resistant valve |
JP2000291848A (ja) * | 1999-04-02 | 2000-10-20 | Toho Kasei Kk | 球状半導体用樹脂製チューブ |
US6325932B1 (en) | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
DE10085364B4 (de) | 1999-12-29 | 2005-01-20 | Entegris, Inc., Chaska | Bauteil-zu-Bauteil Dichtverfahren |
GB0011452D0 (en) * | 2000-05-13 | 2000-06-28 | Gore W L & Ass Uk | Cyrogenic fluid transfer and storage |
US6412832B1 (en) | 2000-06-08 | 2002-07-02 | Entegris, Inc. | Self-flaring plastic fittings |
US6409222B1 (en) | 2000-06-08 | 2002-06-25 | Fluroware, Inc. | Torque confirmation fitting |
WO2001094833A1 (en) | 2000-06-08 | 2001-12-13 | Fluoroware, Inc. | Plastic fitting for flared tubing |
US6612175B1 (en) | 2000-07-20 | 2003-09-02 | Nt International, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US6789781B2 (en) | 2001-03-16 | 2004-09-14 | Entegris, Inc. | Reinforced diaphragm valve |
JP4510441B2 (ja) | 2001-05-25 | 2010-07-21 | インテグリス・インコーポレーテッド | フルオロポリマ流量計 |
JP3706813B2 (ja) | 2001-06-01 | 2005-10-19 | 日本ピラー工業株式会社 | 樹脂製管継手におけるチューブ抜止め方法及びチューブ抜止め構造 |
JP3936556B2 (ja) * | 2001-06-22 | 2007-06-27 | 東京エレクトロン株式会社 | 可燃性流体用帯電防止フッ素樹脂チューブ |
US7308932B2 (en) | 2001-10-01 | 2007-12-18 | Entegris, Inc. | Exchange apparatus |
DE20119778U1 (de) | 2001-12-06 | 2002-03-28 | Festo Ag & Co | Kunststoffschlauch, insbesondere Pneumatikschlauch |
US7063304B2 (en) | 2003-07-11 | 2006-06-20 | Entegris, Inc. | Extended stroke valve and diaphragm |
WO2005047748A1 (de) * | 2003-11-12 | 2005-05-26 | Huber+Suhner Ag | Schlauch zur förderung von elektrostatische aufladungen erzeugenden, insbesondere pulverförmigen medien |
US8561855B2 (en) | 2005-04-08 | 2013-10-22 | Entegris, Inc. | High-volume fluid dispense system |
JP2009522526A (ja) | 2006-01-06 | 2009-06-11 | インテグリス・インコーポレーテッド | 溶接されたダイヤフラムバルブ |
JP5030441B2 (ja) * | 2006-03-09 | 2012-09-19 | オリンパスメディカルシステムズ株式会社 | 内視鏡装置 |
JP5221534B2 (ja) | 2006-07-14 | 2013-06-26 | インテグリス・インコーポレーテッド | バルブ連結管アセンブリ |
JP3126448U (ja) * | 2006-08-14 | 2006-10-26 | 十川産業株式会社 | 帯電防止樹脂チューブ |
EP2500393B1 (en) | 2011-03-15 | 2018-05-02 | W.L.Gore & Associates Gmbh | Use of an ionic fluoropolymer as antistatic coating |
EP3087388B1 (en) * | 2013-12-23 | 2021-08-18 | Agilent Technologies, Inc. | Esd protected tubing for removing charge from lumen |
DE102014103479A1 (de) * | 2014-03-14 | 2015-09-17 | Veritas Ag | Schlauchleitung für ein Fluid |
JP2016012792A (ja) | 2014-06-27 | 2016-01-21 | キヤノン株式会社 | ファクシミリ装置およびその制御方法、並びにプログラム |
CN104500873A (zh) * | 2014-12-29 | 2015-04-08 | 泉州市三星消防设备有限公司 | 能输送危险气体、液体的柔性管道 |
CN205261118U (zh) * | 2016-01-06 | 2016-05-25 | 潘庆辉 | 一种同时适用于化工气体和液体的静电导除装置 |
DE102016109967B4 (de) | 2016-05-31 | 2020-01-23 | BSH Hausgeräte GmbH | Schlauch für ein Haushaltsgerät, Schlaucheinrichtung, Vorrichtung, Haushaltsgerät sowie Verfahren zum Herstellen eines Schlauchs für ein Haushaltsgerät |
JP2018015751A (ja) | 2016-07-29 | 2018-02-01 | 株式会社潤工社 | 気体透過性チューブ |
CN116989192A (zh) * | 2018-09-27 | 2023-11-03 | 恩特格里斯公司 | 静电耗散性含氟聚合物复合物及由其所形成的物品 |
-
2020
- 2020-05-12 SG SG11202112940RA patent/SG11202112940RA/en unknown
- 2020-05-12 WO PCT/US2020/032417 patent/WO2020236454A1/en unknown
- 2020-05-12 EP EP20809314.6A patent/EP3973216A4/en active Pending
- 2020-05-12 CN CN202080046271.4A patent/CN114026963A/zh active Pending
- 2020-05-12 US US17/613,359 patent/US20220221086A1/en active Pending
- 2020-05-12 JP JP2021569469A patent/JP7331141B2/ja active Active
- 2020-05-22 TW TW109117153A patent/TWI740509B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4439889B2 (ja) * | 2003-11-28 | 2010-03-24 | 三桜工業株式会社 | 燃料チューブおよび車輌燃料配管のアース構造 |
JP2008082459A (ja) * | 2006-09-28 | 2008-04-10 | Nichias Corp | 帯電防止チューブ |
JP2016121792A (ja) * | 2014-12-25 | 2016-07-07 | 淀川ヒューテック株式会社 | フッ素樹脂チューブ |
TW201805054A (zh) * | 2016-06-01 | 2018-02-16 | 恩特葛瑞斯股份有限公司 | 導電過濾裝置 |
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EP3973216A1 (en) | 2022-03-30 |
EP3973216A4 (en) | 2023-01-04 |
JP7331141B2 (ja) | 2023-08-22 |
JP2022534050A (ja) | 2022-07-27 |
US20220221086A1 (en) | 2022-07-14 |
SG11202112940RA (en) | 2021-12-30 |
CN114026963A (zh) | 2022-02-08 |
KR20210157913A (ko) | 2021-12-29 |
WO2020236454A1 (en) | 2020-11-26 |
TW202103187A (zh) | 2021-01-16 |
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