TWI740098B - Magnetic target material with different magnetic strength distribution - Google Patents

Abstract

A magnetic target material with different magnetic strength distribution includes a substrate, a target material module, and a magnetic module. The target material module and the magnetic module are disposed on two opposite faces of the substrate. The target module includes an inner target ring, a middle target, and an outer target ring.The outer target ring has two straight sections and two connection sections connecting the two straight sections, respectively. The magnetic module includes a first magnetic unit disposed corresponding to the middle target, a second magnetic unit disposed corresponding to the two straight sections, and a third magnetic unit disposed corresponding to the two connection sections. Therefore, with the three magnetic units having different magnetic strengths, the ionic strikes upon the target material module are balanced, improving the service life of the target material module.

Description

Magnetic target with different magnetic intensity distribution

The present invention relates to a magnetic target material, especially a magnetic target material with a different magnetic intensity distribution.

According to the current magnetron sputtering system (magnetron sputtering system), it is mainly to install a permanent magnet group on the back of the sputtering target, so that the magnetic field lines generated by the permanent magnet group cross the sputtering target upwards, and then the sputtering target The closed magnetic field lines required for operation are formed on the target surface of the plating target, which promotes the trajectory of the electrons to move forward in a spiral path along the direction of the magnetic field lines, thereby increasing the probability of electrons colliding with argon molecules, and achieving the purpose of improving the utilization rate of the target material and the coating rate .

However, in the actual bombardment of the sputtering target, the bombardment of the sputtering target will not be uniformly reduced, especially the position outside the short side of the sputtering target, the bombardment consumption rate is the highest, according to which the sputtering target is uneven in the bombardment rate Under these conditions, the uneven bombardment rate of the sputtering target may be caused, and a relatively large part of the target material is still unused when the target is replaced, thus causing the problem of wasting the sputtering target.

The main purpose of the present invention is to solve the problem of the uneven bombardment rate of the conventional sputtering target, which causes the unevenness of the thickness of the sputtering target and reduces the service life of the sputtering target.

In order to solve the above-mentioned problems, the present invention provides a magnetic target with a different magnetic intensity distribution, which includes a substrate, a target module, and a magnetic module. The substrate has a first surface and a second surface opposite to the first surface; the target module is disposed on the first surface of the substrate, and the target module includes a ring-shaped inner ring target and a target disposed on the inner ring The inner target material on the inner side of the material, and a ring set on the outer ring target material on the outer side of the inner ring target material. The outer ring target material has two opposite straight sections and two connecting sections respectively connecting the ends of the two straight sections; the magnetic module, It is arranged on the second surface of the substrate, and the magnetic module includes a first magnetic unit corresponding to the inner target position, a second magnetic unit corresponding to the two straight section positions, and a third magnetic unit corresponding to the two The connecting section, wherein the magnetic strength of the first magnetic unit is greater than the magnetic strength of the second magnetic unit, and the magnetic strength of the second magnetic unit is greater than the magnetic strength of the third magnetic unit.

In this way, the present invention reduces the magnetic strength of the two connecting sections corresponding to the outer ring target by installing the first magnetic unit, the second magnetic unit and the third magnetic unit with different magnetic strengths, and at the same time improves the corresponding inner target The magnetic strength is used to balance the ion bombardment rate of the target module to achieve the effect of the average bombardment thickness of the target module, so as to extend the service life of the target module.

In order to facilitate the description of the central idea of the present invention expressed in the column of the above-mentioned summary of the invention, specific embodiments are used to express it. Various objects in the embodiments are drawn according to the proportions suitable for enumeration and description, rather than according to the proportions of actual elements, and are described first.

Please refer to FIG. 1 to FIG. 6, the present invention provides a magnetic target with a different magnetic intensity distribution, which includes a substrate 10, a target module 20 and a magnetic module 30.

The substrate 10 is a non-magnetic material. The substrate 10 has a first surface 11 and a second surface 12 opposite to the first surface 11.

The target module 20 is arranged on the first surface 11 of the substrate 10. The target module 20 includes a ring-shaped inner ring target 21 and an inner target 22 arranged inside the inner ring target 21, And a ring is set on the outer ring target 23 outside the inner ring target 21, the inner target 22 is generally a long rectangle, and the inner target 22 has a long side direction 221 and a short side direction 222 perpendicular to the long side direction 221, The outer ring target 23 is composed of two straight sections 231 and two connecting sections 232. In this embodiment, the two straight sections 231 are arranged opposite to each other and are respectively arranged along the long side direction 221 of the inner target 22 , And the two connecting sections 232 are respectively connected to the two ends of the two straight sections 231, and are respectively arranged along the short side direction 222 on both sides of the inner target material 22, the length of each straight section 231 is greater than the length of each connecting section 232 Furthermore, each connecting section 232 is composed of a straight portion 232a and two extension portions 232b. One end of each extension portion 232b is connected to each straight portion 232a in an arc shape, and the other end is connected to each straight portion 232a in an arc shape.段231.

The magnetic module 30 is arranged on the second surface 12 of the substrate 10. The magnetic module 30 includes a first magnetic unit 31 corresponding to the position of the inner target material 22, and a second magnetic unit 32 corresponding to the two straight sections 231 Position, and a third magnetic unit 33 corresponding to the two connecting sections 232, so that the second magnetic unit 32 and the third magnetic unit 33 are arranged around the first magnetic unit 31, wherein the first magnetic unit 31, the second magnetic unit 31 The magnetic strength of the two magnetic units 32 and the third magnetic unit 33 are different from each other. In this embodiment, the magnetic strength of the first magnetic unit 31 is greater than the magnetic strength of the second magnetic unit 32, and the magnetic strength of the second magnetic unit 32 The magnetic strength is greater than that of the third magnetic unit 33, and the first magnetic unit 31 and the second magnetic unit 32 are adjacent to the same end of the substrate 10 and the magnetic poles are arranged in different poles, and the second magnetic unit 32 and the third magnetic unit 33 are adjacent to each other. The magnetic poles at the same end of the substrate 10 are arranged in the same pole; please cooperate with Figures 3 to 6. In this embodiment, the S pole of the first magnetic unit 31 is adjacent to the substrate 10, and the N pole is far away from the substrate 10. On the contrary, the N pole of the second magnetic unit 32 and the third magnetic unit 33 is adjacent to the substrate 10, and the S pole is far away from the substrate 10, so that the magnetic field of the magnetic module 30 is caused by the second magnetic unit 32 and the third magnetic unit 32. The magnetic unit 33 and the first magnetic unit 31 have different polarities to form closed magnetic lines of force.

Furthermore, please cooperate with FIG. 3, the first magnetic unit 31 is a plurality of circular magnetic parts, wherein the first magnetic unit 31 has a plurality of first magnetic parts 311 and a plurality of second magnetic parts 312, each of the first magnetic The diameter of the member 311 is greater than the diameter of each second magnetic member 312. In this embodiment, the first magnetic members 311 are arranged side by side along the longitudinal direction 221 of the inner target 22, and the second magnetic members 312 are correspondingly arranged along the The short side direction 222 on both sides of the inner target material 22 is arranged in an arc shape; the second magnetic unit 32 is a plurality of circular magnetic parts, and the circular magnetic parts of the second magnetic unit 32 are arranged along each straight section 231 corresponding to each other. Are arranged at intervals, the third magnetic unit 33 is a plurality of circular magnetic parts, and the circular magnetic parts of the third magnetic unit 33 are arranged along each straight portion 232a and each extension portion 232b. Among them, the third magnetic unit 33 is The second magnetic member 312 adjacent to the first magnetic unit 31, and the second magnetic member 312 is arranged in an arc shape corresponding to the third magnetic unit 33, and the second magnetic unit 32 at the junction of each connecting section 232 and each straight section 231 And the third magnetic unit 33 are not in contact with each other; therefore, the present invention uses the third magnetic unit 33 to reduce the magnetic intensity of the two connecting sections 232 corresponding to the outer ring target 23, and relatively raises the corresponding inner target through the first magnetic unit 31 The magnetic strength of the material 22 balances the ion bombardment rate of the target module 20 to achieve an average bombardment thickness of the target module 20.

It is worth noting that, please cooperate with the figures shown in FIG. 3 and FIG. 4, the present invention can appropriately adjust the number and range of the second magnetic unit 32 and the third magnetic unit 33 according to the sputtering requirements; for example, please follow the figure As shown in Fig. 3, in the embodiment of the present invention, the arrangement range of the second magnetic unit 32 is slightly equal to the arrangement range of the first magnetic unit 31, and the third magnetic unit 33 is arranged longitudinally on the straight portion 232a and arranged in an arc shape. The position of the extension 232b is such that the arrangement range of the third magnetic unit 33 is located on both sides of the first magnetic unit 31, so as to reduce the magnetic strength of the corresponding connecting section 232; please refer to FIG. 4, in another embodiment of the present invention , The number of second magnetic units 32 can be appropriately reduced, so as to relatively shorten the arrangement range of the second magnetic units 32, and then increase the number of third magnetic units 33, so that the extent of the extension 232b defined by each connecting section 232 is two The straight section 231 extends in the direction, so as to increase the arrangement range of the third magnetic unit 33 and achieve the purpose of adjusting and balancing the bombardment rate of the target module 20.

In particular, please refer to FIGS. 5 and 6, the magnetic field lines of the first magnetic unit 31, the second magnetic unit 32 and the third magnetic unit 33 will pass through the inner ring target 21 and the outer ring target 23. Gap guidance, wherein the outer ring target 23 has an inner side 233, the inner side 233 is adjacent to the first surface 11 of the substrate 10 and surrounds the inner ring target 21, and the second magnetic unit 32 and the third magnetic unit The edge of 33 is longitudinally aligned with the inner side 233, so the second magnetic unit 32 and the third magnetic unit 33 can effectively allow the magnetic lines of force to pass through the gap between the inner ring target 21 and the outer ring target 23, avoiding the loss of magnetic force .

Therefore, the present invention has the following advantages:

1. In the present invention, a first magnetic unit 31, a second magnetic unit 32, and a third magnetic unit 33 with different magnetic strengths are installed on the substrate 10 to reduce the magnetic strength of the two connecting sections 232 corresponding to the outer ring target 23, and The magnetic strength of the corresponding inner target 22 is relatively increased to balance the ion bombardment rate of the target module 20 to achieve the effect of averaging the bombardment thickness of the target module 20, so as to extend the service life of the target module 20.

2. The second magnetic unit 32 and the third magnetic unit 33 are longitudinally aligned with the inner side 233, so that the lines of magnetic force can effectively pass through the gap between the inner ring target 21 and the outer ring target 23, avoiding the loss of magnetic force.

3. The present invention can appropriately adjust the number and range of the second magnetic unit 32 and the third magnetic unit 33 according to the sputtering requirements, so as to achieve the purpose of adjusting and balancing the bombardment rate of the target module 20.

The above-mentioned embodiments are only used to illustrate the present invention, and are not used to limit the scope of the present invention. All modifications or changes made without violating the spirit of the present invention fall within the scope of the present invention's intended protection.

10: substrate 232: connection segment 11: First side 232a: straight part 12: Second side 232b: Extension 20: Target module 233: inner side 21: Inner ring target 30: Magnetic module 22: Inside target 31: The first magnetic unit 221: Long side direction 311: The first magnet 222: Short side direction 312: The second magnet 23: Outer ring target 32: The second magnetic unit 231: Straight section 33: The third magnetic unit

Figure 1 is a three-dimensional schematic diagram of the present invention. Fig. 2 is a three-dimensional schematic diagram of the present invention from another perspective. Figure 3 is a bottom view of the present invention. Fig. 4 is a bottom view of another embodiment of the present invention. Fig. 5 is a schematic cross-sectional view of Fig. 3 along the line 5-5. Fig. 6 is a schematic cross-sectional view of Fig. 3 along the line 6-6.

10: substrate

12: Second side

20: Target module

22: Inside target

221: Long side direction

222: Short side direction

23: Outer ring target

231: Straight section

232: connection segment

232a: straight part

232b: Extension

233: inner side

30: Magnetic module

31: The first magnetic unit

311: The first magnet

312: The second magnet

32: The second magnetic unit

33: The third magnetic unit

Claims (9)

A magnetic target with a different magnetic intensity distribution, comprising: a substrate having a first surface and a second surface opposite to the first surface; a target module set on the first of the substrate Surface, the target module includes a ring-shaped inner ring target, an inner target set on the inner side of the inner ring target, and an outer ring target set on the outer side of the inner ring target, the outer ring The target has two opposite straight sections and two connecting sections respectively connecting the two ends of the two straight sections; and a magnetic module, which is arranged on the second surface of the substrate, and the magnetic module includes a first magnetic unit corresponding to A second magnetic unit is located at the inner target position, corresponding to the two straight sections, and a third magnetic unit is located at the two connecting sections, wherein the magnetic strength of the first magnetic unit is greater than that of the first magnetic unit. The magnetic strength of the two magnetic units, the magnetic strength of the second magnetic unit is greater than the magnetic strength of the third magnetic unit. The magnetic target material with different magnetic intensity distribution according to claim 1, wherein the first magnetic unit is a plurality of circular magnetic parts. The magnetic target with a different magnetic intensity distribution according to claim 2, wherein the first magnetic unit is a plurality of first magnetic parts and a plurality of second magnetic parts, and the diameter of each of the first magnetic parts is larger than the diameter of each of the second magnetic parts. The diameter of the magnetic part, the inner target material is a long rectangle, the first magnetic parts are arranged side by side along the long side direction of the inner target material, and the second magnetic parts are correspondingly arranged along the short side direction of the inner target material And the second magnetic elements are adjacent to the third magnetic unit. The magnetic target with a different magnetic intensity distribution according to claim 3, wherein the second magnetic unit is a plurality of circular magnetic parts, and the two straight sections are respectively arranged along the longitudinal direction of the inner target . The magnetic target with a different magnetic intensity distribution according to claim 3, wherein the third magnetic unit is a plurality of circular magnetic parts, and the two connecting sections are respectively formed along the short side direction on both sides of the inner target Assume. The magnetic target material with different magnetic intensity distribution according to claim 5, wherein each of the connecting sections is composed of a straight portion and two extension portions, and one end of each extension portion is arc-shaped connected to each straight portion Section, and the other end is arc-shaped connected to each of the straight sections. The magnetic target with a different magnetic intensity distribution according to claim 5, wherein the outer ring target has an inner side, and the inner side is adjacent to the first surface of the substrate and surrounds the inner ring target, The edges of the second magnetic unit and the third magnetic unit are longitudinally aligned with the inner side. The magnetic target material with a different magnetic intensity distribution according to claim 3, wherein the length of each straight section is greater than the length of each connecting section. The magnetic target material with a different magnetic intensity distribution according to claim 1, wherein the first magnetic unit and the second magnetic unit are adjacent to the same end of the substrate and are arranged in different poles, and the second magnetic unit and The third magnetic unit is adjacent to the same end magnetic pole of the substrate and is arranged in the same pole.

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