KR101005203B1 - Facing target type sputtering apparatus - Google Patents

Abstract

The present invention implements a high-density, high-ionized plasma by inducing rotational reciprocating motion along the magnetic lines of electrons confined between opposing targets using an opposing sputtering device, and prevents substrate damage due to low temperature deposition and high ion energy. The present invention relates to an opposing target sputtering device capable of enabling the target. Specifically, a permanent magnet having the same polarity is arranged on both sides of each target to densify the magnetic flux density at the end of the target. A counter-targeting sputtering apparatus which is prevented to improve plasma density.

Description

Opposing Targeted Sputtering Equipment {FACING TARGET TYPE SPUTTERING APPARATUS}

1 is a cross-sectional view of a conventional magnetron sputtering apparatus.

2 is a cross-sectional view of a conventional counter target sputtering apparatus.

3 shows a magnetic force line forming shape of a general counter target sputtering apparatus.

4A schematically illustrates a sputtering source of an opposingly targeted sputtering apparatus according to an embodiment of the present invention.

4b to 4d show magnetic field formation characteristics in the permanent magnet array of FIG. 4a.

5A schematically illustrates a sputtering deposition source of an opposing target sputtering apparatus according to another embodiment of the present invention.

5b to 5d show magnetic field formation characteristics in a permanent magnet arrangement of the type shown in FIG. 5a.

6 shows the potential difference with distance between opposing targets.

7 shows Ar ion distribution between opposing targets.

* Description of the symbols for the main parts of the drawings *

1: target 2: permanent magnet

3: ferrite

The present invention implements a high-density, high-ionized plasma by inducing rotational reciprocating motion along the magnetic lines of electrons confined between opposing targets using an opposing sputtering device, and prevents substrate damage due to low temperature deposition and high ion energy. The present invention relates to an opposing target sputtering device capable of enabling the target. Specifically, a permanent magnet having the same polarity is arranged on both sides of each target to densify the magnetic flux density at the end of the target. A counter-targeting sputtering apparatus which is prevented to improve plasma density.

The present invention also relates to an opposing target type sputtering apparatus which separates each opposing target into two target portions and arranges one permanent magnet on the rear of each target portion to form a uniform plasma over the target surface. .

The present invention relates to an opposing sputtering apparatus having a recessed or stepped magnet structure in which a uniform magnetic field is formed on a target front surface of a sputtering apparatus to increase the uniformity of thin film deposition on a substrate.

Sputtering is a widely used method in thin film coatings and is used in various industrial fields such as display, optical, abrasion resistant coating, and semiconductor.

Conventional magnetron sputtering techniques are widely used as a technique for forming a film on a substrate using a target facing the substrate surface. 1 shows a conventional magnetron sputtering apparatus. As shown in FIG. 1, a conventional magnetron sputtering device forms a magnetic field for electron and ion confinement in front of a target, and target atoms are sputtered by momentum transfer, for example, when ionized Ar ions collide with the target. However, since the magnetron sputtering technology opposes the target on the substrate surface and the kinetic energy of the sputtered deposition material is excessively high, when the ions having high kinetic energy are sputtered on the polymer or the organic layer of the organic light emitting device, the polymer layer or the organic layer There is a problem that this can be damaged.

Therefore, as one solution to solve this problem, an opposing target sputtering apparatus having a structure that does not directly face the target and the substrate is used.

The opposing target sputtering apparatus according to the prior art has a structure in which a portion of the target except for the opposing target surface is covered with an anode, and a permanent magnet is disposed on the rear surface of the opposing target so as to form a magnetic field perpendicular to the target. It has a structure to constrain it.

A typical counter target sputtering apparatus is shown in FIG. 2. As shown in FIG. 2, a conventional counter sputtering apparatus is composed of an opposing target installed in a vacuum chamber, a permanent magnet installed on a rear surface thereof, a power supply device, and a substrate support for supporting a substrate.

3 shows the magnetic force line forming shape of a general counter target sputtering apparatus. As shown in FIG. 3, a line of magnetic force is formed between two opposing targets in a vertical direction of the target. At this time, the electric electrons and ions rotate around the line of magnetic force and the collision probability between the electrons and the neutral particles increases, By reciprocating between two opposing targets, the plasma density is increased. At this time, the rotation radius of the charge is determined according to the intensity of the applied magnetic field, and as the magnetic field strength increases, the rotation radius of the charge becomes smaller.

2 and 3, when a negative voltage is simultaneously applied from the power supply to the opposing sputtering target 6, the opposing targets 6 are caused by a magnetic field generated by the permanent magnet 7 as a magnetic field generating means. Sputtering plasma is confined in the space between. In this case, the plasma is composed of gamma electrons, anions, cations, neutral particles, and the like. At this time, the electrons in the plasma maintain a high density plasma while reciprocating by (-) power applied to a pair of sputtering targets while forming a high density plasma while rotating along a magnetic force line connecting opposite sputtering targets. That is, since all electrons or ions in the plasma reciprocate while rotating along the magnetic force line, charged particles with high energy are accelerated to opposite targets and confined in the plasma formed in the space between the targets. Therefore, the high energy charged particles are confined to the target space and are deposited on the substrate located to the side of the opposing target mainly by diffusion of neutral particles having relatively low energy, thereby avoiding damage to the substrate due to high energy particle collision. Thin film formation takes place.

In addition, in the conventional target-type sputtering apparatus according to the prior art, since the substrate surface does not face the target but is located on the side of the opposite target, deposition is performed by sputter atoms having relatively low energy deposited, thereby forming a polymer layer or an organic layer on the substrate. There is an advantage not to damage.

 However, since the uniformity of the magnetic field formed on the front surface of the target is not high in the counter-target sputtering apparatus according to the prior art of this type, there is a problem that the deposition uniformity is not high when the substrate installed on the side of the conventional target is deposited.

In addition, the conventional counter-targeting sputtering apparatus has a problem that the plasma density is low because the magnetic flux density is not dense.

The present invention has been made to solve the above problems, and aims to increase the uniformity of the deposition of the substrate installed on the opposite target side by increasing the uniformity of the magnetic field formed on the front surface of the target.

In addition, an object of the present invention is to confine the plasma to prevent the loss of electrons diffused into the space by increasing the magnetic flux density to improve the plasma density.

In order to achieve this problem, in the opposite target type sputtering apparatus of the present invention, the permanent magnets having the same polarity are arranged on both sides of each target to densify the magnetic flux density at the end of the target, thereby restricting the plasma and preventing the loss of electrons diffused into the space. Improve plasma density.

In addition, in the opposite target type sputtering apparatus according to the present invention, by forming a permanent magnet to form a uniform magnetic field on the back of the opposite target, it is possible to form a uniform plasma on the front surface of the target.

Hereinafter, an opposing target sputtering apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

4A schematically illustrates a sputtering source of an opposingly targeted sputtering apparatus according to an embodiment of the present invention. As shown in Fig. 4A, in the sputtering source of this embodiment, each of the opposing targets is separated into two target portions (partial permanent magnet arrangement), and permanent magnets having the same polarity on both sides of the back of each target portion are formed. Are arranged. Each opposite target has a different polarity. 4b to 4d show magnetic field formation characteristics in the permanent magnet array of FIG. 4a. 4B shows magnetic field formation characteristics for one opposing target pair of two pairs of opposing targets, and FIGS. 4C and 4D show magnetic field formation characteristics for all two pairs of opposing targets. As shown in FIGS. 4B to 4D, the sputtering source according to the present embodiment has a structure of confining the magnetic flux density at the end of the target to constrain the plasma to prevent loss of electrons diffused into the space to improve the plasma density.

5A schematically illustrates a sputtering source of an opposingly targeted sputtering apparatus according to another embodiment of the present invention. As shown in Fig. 5A, in the sputtering source of this embodiment, each of the opposing targets is also separated into two target portions. However, one permanent magnet is arranged at the rear of each target portion (front permanent magnet arrangement). Each opposite target has a different polarity. 5b to 5d show magnetic field formation characteristics in a permanent magnet arrangement of the type shown in FIG. 5a. FIG. 5B shows magnetic field formation characteristics for one opposing target pair of two pairs of opposing targets, and FIGS. 5C and 5D show magnetic field formation characteristics for all two pairs of opposing targets. As shown in FIGS. 5B to 5D, the sputtering source according to the present exemplary embodiment may form a uniform plasma at the front surface of the target because a uniform magnetic field is formed on the back surface of the opposing target.

6 shows the potential difference with distance between opposing targets. As shown in FIG. 6, it can be seen that the deposition source arranged with the front permanent magnet has a higher potential difference as compared with the case of the partial permanent magnet arrangement, whereby the energy of ions between the two opposing targets is increased. It can be seen that the case is high.

7 shows Ar ion distribution between opposing targets. At the center of the opposing target, we have a higher plasma density of 3.37E10 / cm3 for partial permanent magnet arrays and 4.48E10 / cm3 for front permanent magnet arrays in the case of Ar ion density. It can be seen from Figure 7 having a uniform distribution.

What has been described above has described one embodiment according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the following claims, without departing from the gist of the present invention, the field to which the present invention pertains. It will be said that the scope of the present invention to the extent that those skilled in the art can change.

The counter sputtering source and the sputtering apparatus using the same according to the present invention have the effect of increasing the uniformity of deposition during deposition of the substrate installed on the side of the target by increasing the uniformity of the magnetic field formed on the front surface of the target.

In addition, the present invention has an effect of improving the plasma density by confining the magnetic flux density to prevent the loss of electrons confining the plasma to diffuse into the space.

Claims (8)

In an opposed target type sputtering source having a structure in which a target having a magnetic field generating means disposed on the rear face thereof, Each of the opposing targets is separated into two target portions disposed adjacent to each other. The magnetic field generating means having different polarities are disposed on the rear surfaces of the two target portions, respectively. The magnetic field generating means is a permanent magnet having the same polarity and is disposed at both ends of the rear surface of the target portion to densify the magnetic flux density at both ends of the target portion to confine the plasma and prevent the loss of electrons diffused into the space, thereby reducing the plasma density. Opposite target sputtering source, characterized in that to enhance. The method of claim 1, And the target portions facing each other have different polarities. In an opposed target type sputtering source having a structure in which a target having a magnetic field generating means disposed on the rear face thereof, Each of the opposing targets is separated into two target portions disposed adjacent to each other. Opposing target sputtering source, characterized in that to form a uniform plasma on the front of the target by placing one permanent magnet having a different polarity, respectively on the back of the two target portions separated. The method of claim 3, wherein And the target portions facing each other have different polarities. A pair of opposing targets located in the chamber and disposed to face each other at a predetermined distance, and having a magnetic field generating means disposed on a rear surface thereof, and a substrate positioned to support the substrate in a side of the opposing target in the chamber; A sputtering apparatus comprising a power supply for supplying power to form a plasma in a space between a support and the opposing target, Each of the opposing targets is separated into two target portions disposed adjacent to each other. The magnetic field generating means having different polarities are disposed on the rear surfaces of the two target portions, respectively. The magnetic field generating means is a permanent magnet having the same polarity and is disposed at both ends of the rear side of the target portion to densify the magnetic flux density at both ends of the target portion to confine the plasma and prevent the loss of electrons diffused into the space. Sputtering apparatus, characterized in that to improve. The method of claim 5, Sputtering apparatus, characterized in that the target portions facing each other have different polarities. A pair of opposing targets located in the chamber and disposed to face each other at a predetermined distance, and having a magnetic field generating means disposed on a rear surface thereof, and a substrate positioned to support the substrate in a side of the opposing target in the chamber; A sputtering apparatus comprising a power supply for supplying power to form a plasma in a space between a support and the opposing target, Each of the opposing targets is separated into two target portions disposed adjacent to each other. Sputtering apparatus, characterized in that to form a uniform plasma on the front of the target by arranging one permanent magnet having a different polarity on the rear of the two target portions separated. The method of claim 7, wherein Sputtering apparatus, characterized in that the target portions facing each other have different polarities.

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