TWI730211B - Processing device - Google Patents

Abstract

Enables the operator to easily and reliably confirm the setting of operating conditions

A processing device that processes an object to be processed in various components in a fully automatic operation in accordance with a series of processing procedures, and forms the following structure: It is equipped with processing that performs various processing in each component. Components, the operation panel that receives the operating conditions of each constituent element, the screen image storage section that stores the processing actions corresponding to the operating conditions into a screen image, and the screen image of each processing action is in accordance with the full A series of processing sequence of the automatic action is displayed on the operation panel.

Description

Processing device Field of invention

The present invention relates to a processing device for processing objects to be processed.

Background of the invention

Regarding ICs, LSIs, and other wafers formed with multiple devices, they are thinned by a grinding device and a polishing device, singulated by a laser processing device and a dicing device, and cleaned by a cleaning device. Various processes are performed to form individual elements (see, for example, Patent Document 1). For example, in a grinding and polishing device, various processes such as wafer position detection, rough and fine grinding, grinding, and cleaning are implemented in a fully automatic manner, and the optimal operation for the workpiece is set for each process. condition. These operating conditions are individually set on the setting screen such as component data displayed on the operation panel on the side of the device.

Prior art literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 8-107095

Summary of the invention

However, in a fully automatic operation, because the process covers many aspects, if the operating conditions are set in detail for each process, there will be the following problems: The setting items of the component data setting screen increase, and the operator is confirming all It takes a lot of time to set up. In addition, if the component data is set incorrectly due to the operator's misconfirmation, the component data setting error will be discovered after the automatic operation is started. Therefore, it is necessary to spend time on restoring operations such as suspending the fully automatic operation and returning the processed object to its original position, which results in the production being forced to stop in the middle, which is not economical.

The present invention is an invention made in view of the above-mentioned problems, and one of its objects is to provide a processing device that allows an operator to easily and surely confirm the setting of operating conditions.

The processing device of one aspect of the present invention is a fully automatic operation method to process the workpiece in each component in a series of processing sequences, and at least has a work clamp table for holding the workpiece, and the workpiece is held in the The processing assembly for processing the processed object on the work clamp table, the cassette containing multiple processed objects, the cassette mounting table where the cassette is placed, and the processed object facing the cassette mounted on the cassette mounting table. The film cassette, and the conveying components that are carried in and out of the work clamp table, the control components that control each component, and the operation panel for inputting and setting the operating conditions of each component, the processing device is characterized in that: the control component has a screen Image storage unit, the screen image storage unit is to form a screen image and store each processing action corresponding to a plurality of operating conditions that can be set in each component element. On the operation panel, it will respond to the setting The painting that matches the operating conditions The surface image is displayed according to a series of processing sequence of a fully automatic operation, and it is possible to confirm whether the setting of the operating conditions of each component element is correct or not before the fully automatic operation.

According to this configuration, the screen image of the processing operation stored in the screen image storage unit can be read based on the operating conditions of each component element set and input on the operation panel. Since the screen image is displayed as a preview according to a series of processing procedures of fully automatic operation, the operator can easily and surely confirm whether there are any errors in the setting of the operating conditions of each component through the preview before fully automatic operation. .

According to the present invention, since the screen image can be previewed and displayed in accordance with the processing sequence of the fully automatic operation in response to the setting input of the operation panel, the operator can easily and surely confirm the setting of the operating conditions.

1: Processing device

11: Abutment

12: front

13, 14: Cassette mounting table (cassette mounting table)

17: Opening

18: Waterproof cover

21: Multi-joint robot (transport unit)

22: Robotic arm

23: hands

24, 62, 68: mobile mechanism

25: Positioning mechanism (components)

26: Positioning workbench

27, 73: Mounting pins (processing components)

28: Optical sensor

31: work clamp

32: keep noodles

41: Cutting mechanism (components)

42: Blade unit

43: Column

44: Blade unit moving mechanism

45: Y-axis table

46: Z-axis table

47: Spindle

48: Cutting knife (processing component)

51: Camera mechanism

52: height sensor

55: Cleaning mechanism of work clamp table (components)

56: Cleaning nozzle (processing component)

57: Drying nozzle (processing component)

58: Two-fluid nozzle (processing component)

61, 64, 67: conveying components

70: Rotating table

71: Backside cleaning mechanism (components)

72: Front washing mechanism (components)

74: Rotating brush

75: control components

76: Display control section

77: Screen image storage section

78: Fixture Department

79: Operation panel

80: Graphical screen

81: Symbolic image

82: Image of processed object

83: Image of cassette for moving in

84: Image of cassette for moving out

85: Multi-joint robot image

86: Positioning workbench image

87: Conveying component image

88: Image of work clamp

90: Setting screen

91: check box

92: input box

A1: Move in area

A2: Processing area

A3: Washing area

C1: Film cassette for loading (film cassette)

C2: Cassette for moving out (cassette)

IM, IM11, IM12, IM21, IM22, IM23, IM24, IM25, IM31, IM32: screen image

N: Notch

W: to be processed

X, Y, Z: direction

Fig. 1 is a schematic view of the upper surface of the processing device of this embodiment.

Fig. 2 is a diagram showing an example of a screen display of an operation panel.

Fig. 3 is a functional block diagram showing the display function of the preview image of this embodiment.

Fig. 4 is a diagram showing a display example of a screen image of the positioning process of the present embodiment.

Fig. 5 is a diagram showing a display example of a screen image of the trimming process of the present embodiment.

Figure 6 is a display example showing the cleaning process of the work clamp table of this embodiment 之图.

Fig. 7 is a diagram showing an example of a setting screen of the present embodiment.

The form used to implement the invention

Hereinafter, with reference to the drawings, a processing device with a preview image display function of this embodiment will be described. Fig. 1 is a schematic view of the upper surface of the processing device of this embodiment. Fig. 2 is a diagram showing an example of a screen display of an operation panel. In addition, in the following description, although the display function of the preview image is applied to the structure of the processing apparatus for trimming the outer peripheral portion of the wafer, the present invention is not limited to this structure. In addition, the preview image display function can also be used in other processing devices.

As shown in Fig. 1, the processing device 1 is a fully automatic processing device, and is configured to implement fully automatic processing of carrying in, cutting, cleaning, and unloading of a disc-shaped workpiece W A series of operations. On the outer peripheral edge of the workpiece W, a chamfered portion (not shown) is formed for preventing cracking or dust generation in the manufacturing process. In addition, a notch N showing a crystal orientation is formed in the outer peripheral portion of the workpiece W. Furthermore, the workpiece W may be a semiconductor wafer in which semiconductor elements are formed on a semiconductor substrate, or an optical element wafer in which optical elements are formed on a sapphire substrate.

In the processing device 1, a loading area A1 is set in front of the device, a processing area A2 is set behind the device, and a washing area A3 is set adjacent to the loading area A1 and the processing area A2. In addition, in the front face 12 of the processing device 1, a pair of cassette carriers are provided so as to protrude forward from the carry-in area A1. Tables (cartridge mounting table) 13,14. The cassette C1 for carrying-in in which the to-be-processed object W before processing is accommodated is placed on the cassette stage 13. A cassette C2 for carrying out storing the processed object W after processing is placed on the cassette stage 14. The cassette stage 13 functions as an inlet of the processing device 1, and the cassette stage 14 functions as an outlet of the processing device 1.

In the carry-in area A1, an articulated robot (transport unit) 21 for carrying in and out of the workpiece W with respect to the carrying-in cassette C1 and the carrying-out cassette C2 is provided. The articulated robot 21 is constructed by mounting a robot arm 22 on the sliding head of a linear motor-type moving mechanism 24 and mounting a hand 23 on the front end of the robot arm 22. The multi-joint robot 21 is moved in the X-axis direction by the moving mechanism 24, and the rotation of each joint of the robot arm 22 is controlled by a servo motor, etc., so that it can be relative to the cassette C1 for carrying in and the cassette C2 for carrying out. The hand 23 is adjusted to a desired position or posture.

In the processing area A2, a positioning mechanism 25 and a cutting mechanism (processing assembly) 41 are provided. The positioning mechanism 25 temporarily places the workpiece W before processing in a positioning state on the positioning table 26. The cutting mechanism 41 is in The work chuck 31 cuts the outer peripheral portion of the front surface of the workpiece W. In the positioning mechanism 25, a plurality of mounting pins 27 are protrudingly provided on the positioning table 26, and the outer peripheral portion of the wafer W is supported on the plurality of mounting pins 27 from below. The wafer W is positioned in a floating state. In addition, an optical sensor 28 for detecting the notch N is provided near the positioning table 26 (refer to FIG. 4A). Behind the positioning table 26, there is provided a work clamp table 31 that can move back and forth in the X-axis direction between the carrying-in position and the cutting position of the workpiece W. On the base 11, there is formed along the movement trajectory of the work clamp 31 and An opening 17 extending in the X-axis direction.

The opening 17 is covered by a bellows-shaped waterproof cover 18, and under the waterproof cover 18 is provided a feed screw type work chuck table moving mechanism (not shown) that moves the work chuck table 31 back and forth in the X-axis direction . On the surface of the work chuck table 31, a holding surface 32 for adsorbing the workpiece W is formed by a porous material. The holding surface 32 is connected to a suction source (not shown) through a flow path in the work clamp table 31, and sucks and holds the workpiece W due to the negative pressure generated on the holding surface 32. In addition, the work clamp table 31 is configured to be rotatable around the Z axis by a rotating mechanism (not shown).

The cutting mechanism 41 is configured to alternately use a pair of blade units 42 to cut the outer periphery of the workpiece W on the work clamp table 31. The cutting mechanism 41 has a gate-shaped column portion 43 that is erected on the base 11 so as to straddle the opening portion 17. On the surface of the column portion 43, a blade unit moving mechanism 44 of the feed screw type for moving the pair of blade units 42 is provided. The blade unit moving mechanism 44 has a pair of Y-axis tables 45 that move in the Y-axis direction, and a Z-axis table 46 that moves in the Z-axis direction with respect to each Y-axis table 45. The blade unit 42 is movable in the Y-axis direction and the Z-axis direction by the Y-axis table 45 and the Z-axis table 46.

The blade unit 42 is configured by attaching a disc-shaped cutter 48 to the front end of the main shaft 47. By rotating the work chuck table 31 with the cutting knife 48 rotating at a high speed into the chamfered part of the workpiece W on the work chuck table 31, the chamfered part of the workpiece W can be covered all around. Perform trimming processing. By removing the chamfered portion on the front side from the outer periphery of the workpiece W, even if the workpiece W is ground from the back side to the finished product in the subsequent grinding step The thickness will not leave the chamfered portion, and the outer periphery of the workpiece W will not be formed in the shape of a knife edge.

In addition, an imaging mechanism 51 for calibration is provided in the blade unit 42 (refer to FIG. 5A). The captured image of the imaging mechanism 51 is used for the calibration process of the cutting blade 48 and the workpiece W. In addition, a height sensor 52 that measures the height of the upper surface of the workpiece W in a non-contact manner is provided near the blade unit 42 (see FIG. 5B). As the height sensor 52, for example, NSD (Non Contact Surface Detector) can be used to detect the back pressure value when the gas is discharged from the nozzle, and to detect the upper surface position of the workpiece W. By using the height sensor 52, the cutting amount of the workpiece W can be adjusted accurately.

In addition, on the base 11, adjacent to the cutting mechanism 41, there is provided a work chuck table cleaning mechanism 55 that cleans the work chuck table 31 after the workpiece W has been conveyed. The work chuck washing mechanism 55 is provided with a washing nozzle 56 and a drying nozzle 57 extending in parallel to the Y-axis direction above the base 11. The water curtain can be formed by the washing water from the washing nozzle 56 and the air curtain can be formed by the gas from the drying nozzle 57. By allowing the work clamp table 31 to drill through the water curtain and the air curtain, the holding surface 32 of the work clamp table 31 can be washed and dried. In addition, the work chuck washing mechanism 55 is provided with a two-fluid nozzle 58 near the outer edge of the washing holding surface 32 (refer to FIG. 6B).

In the processing area A2, the workpiece W is transported to the work clamp table 31 by the edge clamp type conveying assembly 61, and the workpiece W is moved from the work by the edge clamp type transport assembly 64 The clamping table 31 is moved out. In this case, the transport assembly 61 is used to pick up and add from the positioning table 26. The workpiece W before the work is transported to the work chuck table 31 by the linear motor type moving mechanism 62. In addition, the processed workpiece W is picked up from the work chuck table 31 by the transport unit 64, and the workpiece W is transported to the washing area A3 by rotational movement centering on the base end of the transport unit 64.

The washing area A3 is provided with a back washing mechanism 71 for washing the back surface of the workpiece W, and a front washing mechanism 72 for washing the front surface of the workpiece W. In the back surface cleaning mechanism 71, in a state where the outer peripheral portion of the wafer W is supported on a plurality of mounting pins 73, the cleaning water is sprayed toward the back surface of the workpiece W and performed by the rotating brush 74 Wash the back. The workpiece W after back washing is picked up from the back washing mechanism 71 by the clip-type conveying unit 67 and is conveyed to the front washing mechanism 72 by the linear motor type moving mechanism 68. In the front surface cleaning mechanism 72, the outer peripheral portion of the wafer W is held by the plurality of clamps 78 of the rotating table 70, and then washing water is sprayed toward the workpiece W to perform the front surface cleaning. Dry air for drying.

In addition, the processing device 1 is provided with a control unit 75 that performs integrated control of each component that performs positioning processing, finishing processing, front washing processing, back washing processing, and the like. The control unit 75 is constituted by a processor, a memory, or the like that causes the processing device 1 to operate. The memory is composed of one or more storage media such as ROM (Read Only Memory) and RAM (Random Access Memory) due to application. In addition, on the device side of the processing device 1, there is an operation panel for inputting and setting the operating conditions of each component. 79. In the processing device 1, the workpiece W is processed in each constituent element in a full-automatic manner in accordance with the operating conditions in accordance with a series of processing procedures.

As shown in FIG. 2A, an illustration screen 80 for monitoring the processing status of the workpiece W is displayed on the operation panel 79 (refer to FIG. 1). On the illustration screen 80, symbol images 81 that can represent each component of a series of processing are displayed, and the processing status of the workpiece W can be confirmed by moving the workpiece image 82 on these symbol images 81. However, in the illustration screen 80, although it is possible to confirm a series of processing conditions for the workpiece W, it is not possible to confirm whether the correct processing has been performed. For example, although you can specify options such as calibration in the grinding process, it is impossible to confirm whether or not calibration is actually performed.

Therefore, under normal circumstances, as shown in FIG. 2B, in the setting screen 90 of the component data for each process displayed on the operation panel 79 (refer to FIG. 1), it is confirmed whether it is an additional calibration, etc. before the full-automatic operation starts. Handling of options. Specifically, in the setting screen 90, various input boxes or check boxes that accept the input of operating conditions are displayed, and the parameters of these input boxes or the check of the check boxes can be confirmed. However, in the fully automatic processing device 1, the number of setting screens 90 increases, which becomes a burden on the operator. In addition, if the operator overlooks that the setting of the setting screen 90 is wrong, it is necessary to stop the operation after the start of the full-automatic operation and perform the recovery operation.

Therefore, in the processing device 1 of the present embodiment, based on the operating conditions input to the setting screen 90, before the start of the full-automatic operation, the processed screen images are processed in accordance with the processing sequence of the workpiece W. A preview is formed and displayed on the operation panel 79. Since the actual processing operation is displayed as a preview before the fully automatic operation, the operator does not need to confirm a large number of setting items of the setting screen 90, and can directly let the operator grasp the actual processing operation. According to this, the operator can easily and surely confirm whether the operating conditions set on the setting screen 90 are incorrect.

Hereinafter, the display processing of the preview image will be described with reference to FIGS. 3 to 7. Fig. 3 is a functional block diagram showing the display function of the preview image of this embodiment. Fig. 4 is a diagram showing a display example of a screen image of the positioning process of the present embodiment. Fig. 5 is a diagram showing a display example of a screen image of the trimming process of the present embodiment. Fig. 6 is a diagram showing a display example of the cleaning process of the work clamp table of the present embodiment. Fig. 7 is a diagram showing an example of a setting screen of the present embodiment.

As shown in FIG. 3, a control unit 75 is connected to the operation panel 79, and operating conditions can be input to the control unit 75 from a setting screen 90 of component data and the like displayed on the operation panel 79. In addition, the control unit 75 can form a preview of the processing action of each component element according to the operating condition and the graphic screen 80 and display it on the operation panel 79. The control unit 75 is provided with a display control unit 76 and a screen image storage unit 77. The display control unit 76 controls the display of the setting screen 90 and the illustration screen 80 of the operation panel 79. The screen image storage unit 77 is The processing actions corresponding to a plurality of operating conditions that can be set in each component are each formed into a screen image IM and stored.

In the screen image storage unit 77, processing is performed for each component element, and the operating conditions and the screen image are associated and stored. E.g, In the positioning process, the presence or absence of notch detection can be set as an option method as an operating condition, and the screen images IM11 and IM12 of the positioning process are stored for each option (refer to FIG. 4). In the dressing process, as an operating condition, you can set the presence or absence of cut, alignment, NSD (upper surface height measurement), air cutting, etc. as options, and store the dressing for each option Processed screen images IM21~IM25 (refer to Figure 5).

In addition, the so-called air cutting means that when the cutting blade 48 is brought close to the workpiece W, the approach speed of the cutting blade 48 is decelerated in front of the workpiece W to perform air cutting (see FIG. 5C). Thereby, the cutting blade 48 does not forcefully collide with the workpiece W, and the workpiece W and the cutting blade 48 can be prevented from being damaged. In the cleaning process of the work clamp table, you can set the presence or absence of the water curtain, the presence or absence of the air curtain, the presence or absence of dual-fluid cleaning, etc., and the screen images IM31, IM32 of the work clamp cleaning process can be stored for each option (refer to Figure 6). In addition to the aforementioned options, the screen image storage unit 77 may also store a screen image IM corresponding to other options such as automatic setting of the cutter 48.

When the display control unit 76 inputs the operating conditions from the operation panel 79, it selects an option for matching processing from various information included in the operating conditions, and the screen image storage unit 77 reads the screen image IM corresponding to this option. . In addition, the display control unit 76 displays the graphic screen 80 on the operation panel 79, and displays the screen image as a preview in accordance with a series of processing procedures of the fully automatic operation on the graphic screen 80. As a result, it becomes possible for the operator to confirm the implementation of various processes before the fully automatic operation of the processing device 1 Whether the setting of the operating conditions of each component of the component is correct or not.

In addition, the screen image storage unit 77 may store an error-processed screen image estimated by the operating condition. For example, if the notch detection option is set for the workpiece without notch as the operating condition of the positioning process, the screen image of the error processing will be displayed as a preview. In addition, as the operating condition of the trimming process, if the value to be cut by the cutter 48 (see FIG. 5A) is set to be greater than the thickness of the workpiece W, the erroneously processed screen image is formed as a preview and displayed. The screen image may be displayed on the operation panel 79 as a moving image, or may be displayed on the operation panel 79 as a captured image of the actual action.

In addition, the operating condition is not limited to the condition input by the operator, and may be a condition detected by a sensor in the device or the like. For example, a sensor for detecting the presence or absence of a cassette may be provided on the cassette stage, and the detection result of this sensor may be input to the control unit 75 as an operating condition. In the case that the cassette is not detected by the cassette stage, it is deemed that the processing device 1 has not performed various processing on the workpiece W, and the screen image of the error processing is formed as a preview during all processing. display. In this way, in addition to the operating conditions set by the operator, the operating conditions may also include operating conditions set automatically by the device itself.

As shown in FIG. 4A, on the illustration screen 80 of the operation panel 79 (refer to FIG. 3), symbol images representing constituent elements for performing various processes are displayed. For example, shown as symbol images in FIG. 4 are: cassette image 83 for loading, cassette image 84 for loading, articulated robot image 85, positioning table image 86, conveying unit image 87. Work clamp image 88. In addition, in the illustration screen 80, it is displayed that the to-be-processed image 82 moves on the symbol images of these constituent elements. In addition, in accordance with the movement of the workpiece image 82, the screen image of the processing operation of each component can be displayed in accordance with a series of processing procedures.

As shown in FIG. 4A, when the processed object image 82 is moved to the positioning table image 86, the screen image of the positioning process and the positioning table image 86 are connected and displayed. For example, in the setting of notch detection, the screen image IM11 including the positioning table 26 and the optical sensor 28 can be read by the screen image storage unit 77 (refer to FIG. 3), and the screen image IM11 is displayed as a positive Positioning process for notch detection of workpiece W. In addition, as shown in FIG. 4B, in the setting of no notch detection, the screen image IM12 including the positioning table 26 can be read by the screen image storage unit 77, and it is displayed that there is no concave to the workpiece W. Orientation processing of mouth detection.

As shown in FIG. 5A, when the processed object image 82 is moved to the work clamp table image 88, the screen image of the trimming process and the work clamp table image 88 are connected and displayed. For example, in the setting with cutting and calibration, the screen image storage unit 77 (refer to FIG. 3) can read the screen image IM21 including the work clamp table 31, the cutting knife 48, and the imaging mechanism 51, and display it as There is a trimming process for the calibration of the workpiece W. As shown in FIG. 5B, in the setting with cutting and NSD, the screen image IM22 including the work clamp table 31, the cutting knife 48, and the height sensor 52 can be read by the screen image storage unit 77, and displayed In order to have the finishing treatment of the NSD of the workpiece W.

As shown in FIG. 5C, in the setting with air cutting, the screen image storage unit 77 (refer to FIG. 3) can read out the work clamp table 31 and the cutting table. The screen image IM23 of the cutter 48 shows that it is a finishing process of the air cutting of the workpiece W. As shown in FIG. 5D, in the setting of no cutting and NSD, the screen image IM24 including the work clamp table 31 and the height sensor 52 can be read by the screen image storage unit 77, and it is displayed that it is not aligned NSD treatment for finishing of the workpiece W. As shown in FIG. 5E, in the setting of no cutting and calibration, the screen image IM25 including the work clamp 31 and the camera mechanism 51 can be read by the screen image storage unit 77, and it is displayed that there is no adjustment to the processed object. Calibration processing of W trimming.

As shown in FIG. 6A, when the to-be-processed object image 82 is carried out from the work chuck image 88, the screen image of the work chuck cleaning process can be displayed. For example, in the setting with water curtain and air curtain, the screen image storage unit 77 (refer to FIG. 3) can read the screen image IM31 including the work clamp table 31, the cleaning nozzle 56, and the drying nozzle 57, and display the work The clamping table is cleaned. As shown in FIG. 6B, in the setting with water curtain and air curtain and two-fluid cleaning, the screen image storage unit 77 can read the work clamp table 31, the cleaning nozzle 56, the drying nozzle 57, and the two-fluid nozzle. The screen image IM32 of 58 shows that it is a work clamp cleaning process with two-fluid cleaning.

Furthermore, as shown in FIG. 7, the operating conditions of the setting screen 90 can also be set by not checking the check box 91 but by inputting a numerical value to the input box 92. For example, in the setting screen 90 of the cleaning process of the work chuck, when 0 (mm/s) is entered in the input box 92 of the air curtain passing speed, it is determined that there is no air curtain. In addition, when 60 [mm/s] is input in the input box 92 of the air curtain passing speed, it is determined that there is an air curtain. In addition, when an invalid value is input to the input box, error handling can also be displayed.

As described above, according to the processing device 1 of the present embodiment, the screen image of the processing operation stored in the screen image storage unit 77 can be read based on the operating conditions of each component set and input on the operation panel 79. Since the screen image is previewed and displayed in a series of processing procedures of fully automatic operation, the operator can easily and surely confirm whether there are any errors in the setting of the operating conditions of each component through the preview before fully automatic operation. .

In addition, in the present embodiment, although a series of fully automatic processes is formed into a preview and displayed in the dressing device, it is not limited to this configuration. The alignment device of the present invention can be applied to a fully automatic processing device. For example, as long as it is a fully automatic processing device, a cutting device, a grinding device, a polishing device, a laser processing device, a plasma etching device, an expansion device, a braking device, and a combination of these can also be combined (cluster) A series of processes of fully automatic operations of other processing devices, such as devices, are displayed as a preview.

In addition, in the present embodiment, since the processing device is not limited to the dressing device as described above, it is possible to use a processing unit according to the type of processing device. For example, as the processing component, if it is a dicing device, a dicing blade for wafer separation can be used, if it is a dicing device, a grinding wheel can be used, and if it is a polishing device, a polishing pad can be used. In this way, the processing module may be any module capable of processing the workpiece held on the work clamp table.

In addition, as the object to be processed, depending on the type of processing, for example, semiconductor element wafers, optical element wafers, packaging substrates, Various workpieces such as semiconductor substrates, inorganic material substrates, oxide wafers, unsintered ceramic substrates, and piezoelectric substrates. As semiconductor device wafers, silicon wafers or compound semiconductor wafers after device formation can also be used. As the optical element wafer, a sapphire wafer or silicon carbide wafer after element formation can also be used. In addition, a CSP (Chip Size Package) substrate can also be used as a package substrate, and silicon or gallium arsenide can also be used as a semiconductor substrate, and sapphire, ceramic, glass, etc. can also be used as an inorganic material substrate. In addition, lithium tantalate or lithium niobate after element formation or before element formation can also be used as an oxide wafer.

In addition, in this embodiment, although the articulated robot and the clamp-type conveying unit are exemplified as the conveying unit, it is not limited to this configuration. The conveying unit may be any structure that can carry the workpiece into and out of the work clamp table, and it may be, for example, a push-pull type conveying robot or a vacuum clamp type conveying unit.

In addition, in the present embodiment, although it is a configuration in which the screen image of the processing operation is stored in the screen image storage unit, it is not limited to this configuration. In the screen image storage section, screen images of various components such as work clamps or cutting knives can also be stored. In this case, it is formed with an image generation unit that combines the screen images of the component parts read by the screen image storage unit in accordance with the operating conditions to generate screen images for each processing action . In addition, the screen image storage unit may be configured so that the screen image can be externally registered, for example, the screen image may be registered in the screen image storage unit with an external storage medium, or wired or wireless.

In addition, in this embodiment, it is also possible to provide a preview display button, which is a button that displays the processing operations of the fully automatic operation in a series of processing sequences before the fully automatic operation on the operation panel.

In addition, in this embodiment, the work chuck table is not limited to a suction chuck type work table, and may be an electrostatic chuck type work table.

In addition, although the present embodiment and modification examples have been described, as other embodiments of the present invention, the above-mentioned embodiment and modification examples may be combined in whole or in part.

In addition, the embodiment of the present invention is not limited to the above-mentioned embodiment, and various changes, substitutions, and modifications may be made within the scope not departing from the technical idea of the present invention. In addition, if the technical idea of the present invention can be realized in other ways through technological progress or other derived technologies, this method can also be used to implement it. Therefore, the scope of patent application covers all embodiments that can be included in the scope of the technical idea of the present invention.

In addition, in this embodiment, although the present invention is described with respect to the configuration of a processing device suitable for a workpiece, it can also be applied to a screen image that can be previewed in accordance with the processing sequence according to the setting input of the operation panel. Display other devices.

Industrial availability

As explained above, the present invention has the following effects: it is possible for the operator to easily and surely confirm the setting of the operating conditions, especially for carrying in processing, cutting, and washing of the workpiece in a fully automatic manner. It is useful as a processing device for a series of operations consisting of clean processing and unloading processing.

75: control components

76: Display control section

77: Screen image storage section

79: Operation panel

80: Graphical screen

90: Setting screen

Claims (1)

A processing device that processes an object to be processed in each constituent element in a fully automatic manner according to a series of processing sequences, and has at least a work chuck table that holds the object to be processed, and a work chuck that is held on the work chuck table. The processing component for processing the processed object, the cassette containing a plurality of processed objects, the cassette mounting table where the cassette is placed, the cassette and the work clamp that place the processed object on the cassette mounting table The processing device is characterized in that: the transport unit that is moved in and out of the table, the control unit that controls each component element, and the operation panel that inputs and sets the operating conditions of each component element. The processing device is characterized in that: the control unit includes: a screen image storage unit, The processing actions corresponding to the plurality of operating conditions that can be set in each component form a screen image to be stored; and the display control section controls the display of the operation panel screen, and the display control section responds to the operation panel The set operating conditions of the respective constituent elements preview and display the corresponding screen image on the screen of the operation panel in accordance with a series of processing procedures of a fully automatic operation.

Images