JP7403379B2 - processing equipment - Google Patents

Description

The present invention relates to processing equipment.

Processing devices are known in which a screen for operating each component unit of the processing device is operated to operate the component units within the device, and a workpiece is processed by operating each component unit (for example, , see Patent Document 1).

Japanese Patent Application Publication No. 2018-122421

Since the screens for operating each component unit are located at a deeper level than the main menu, operations must be performed by switching between multiple screens, which is inefficient.

The present invention has been made in view of such problems, and its purpose is to provide a processing apparatus that allows easy operation of each component unit and processing of a workpiece.

In order to solve the above-mentioned problems and achieve the objects, the processing apparatus of the present invention includes a holding table that holds a workpiece, a processing unit that processes the workpiece held on the holding table, and a processing apparatus that processes the workpiece that is held on the holding table. A cassette containing a plurality of objects, a transfer arm that transports the workpiece between the plurality of constituent units in the processing device, and an illustration of the inside of the device consisting of the plurality of constituent unit illustrations and the workpiece illustration. A processing device comprising a display touch panel and a control unit, the control unit including a fully automatic operation storage section that stores a series of operations of a plurality of constituent units when fully automatically processing a workpiece; It has a position reflection unit that grasps the current position of the workpiece and reflects it in the position of the workpiece illustration, and a progress storage unit that stores the progress of fully automatic machining for each workpiece. When the operator selects an arbitrary workpiece illustration from the in-apparatus illustration while the process is suspended, the constituent units that can process the workpiece are displayed in an identifiable manner for the operator to identify. The method is characterized in that by selecting the constituent unit, the workpiece is transported to the constituent unit.

Based on the progress storage section, the control unit may display constituent units that perform processes that have not yet been completed in the series of operations of the fully automatic machining in an identifiable manner as processable constituent units.

The control unit further includes a processing understanding unit that determines whether each component unit is processing the workpiece, and displays the component units that are not processing the workpiece so that they can be identified as processing-capable component units. Good too.

Moreover, in order to solve the above-mentioned problems and achieve the purpose, the processing apparatus of the present invention includes a holding table that holds a workpiece, a processing unit that processes the workpiece held on the holding table, This is an illustration of a cassette stage on which a cassette containing multiple workpieces is placed, a transfer arm that transports the workpieces between multiple component units in a processing device, and multiple component units and workpieces. A processing device comprising a touch panel that displays an illustration of the inside of the device configured, and a control unit, the control unit having a component unit operation storage section that stores a plurality of operations of each component unit, When an operator selects an illustration of a constituent unit, options for the operation of the constituent unit are displayed on the in-device illustration, and the item selected by the operator is implemented.

The action options may be displayed as an illustration or a moving image expressing the action.

According to the present invention, each component unit can be easily operated and a workpiece can be processed easily.

FIG. 1 is a perspective view showing a configuration example of a processing device according to a first embodiment. FIG. 2 is a diagram schematically showing an example of the functional configuration of the processing apparatus shown in FIG. FIG. 3 is a diagram showing an example of full-auto operation data stored in the full-auto operation storage section of FIG. 2. FIG. 4 is a diagram illustrating an example of progress data stored in the progress storage section of FIG. 2. FIG. 5 is a diagram illustrating an example of processing by the processing unit in FIG. 2. FIG. 6 is a diagram illustrating an example of processing by the processing unit in FIG. 2. FIG. 7 is a diagram illustrating an example of processing status data grasped by the processing grasping unit of the processing apparatus according to the second embodiment. FIG. 8 is a diagram illustrating an example of constituent unit operation data stored in the constituent unit operation storage section of the processing apparatus according to the third embodiment. FIG. 9 is a diagram illustrating an example of processing of the processing unit of the processing apparatus according to the third embodiment. FIG. 10 is a diagram illustrating an example of processing of the processing unit of the processing apparatus according to Modification 1.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus 1 according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 1 according to the first embodiment. FIG. 2 is a diagram schematically showing an example of the functional configuration of the processing apparatus 1 of FIG. 1. As shown in FIG. As shown in FIG. 1, the processing apparatus 1 according to the first embodiment includes a holding table 10, a turntable 20, a temporary table 30, a processing unit 40, a transport arm 50, a touch panel 60, and a cleaning unit 70. , a cassette stage 80 , cassettes 81 and 82 , and a control unit 90 . In the first embodiment, the processing apparatus 1 includes an apparatus base 2 and an apparatus cover 3, and each component of the processing apparatus 1 described above is provided on the apparatus base 2, and each of the above-mentioned components except the touch panel 60 is provided. is covered with a device cover 3. The structural unit according to the present invention is a component of the processing apparatus 1 described above, in which a workpiece 100 (described later) is carried out from the cassettes 81, 82, processed by the processing unit 40, and carried into the cassettes 81, 82. It is a general unit that performs predetermined operations in between to perform processing such as holding, transporting, and processing the workpiece 100, and in this embodiment, specifically, it includes a holding table 10, a turntable 20, A temporary table 30, a processing unit 40, a transport arm 50, a cleaning unit 70, and cassettes 81 and 82 are shown.

In Embodiment 1, a workpiece 100 to be processed by the processing apparatus 1 is, as shown in FIG. 1, a disk whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. These include shaped semiconductor wafers and optical device wafers. The workpiece 100 has a chip-sized device formed in a region defined by a plurality of dividing lines formed in a lattice shape on a flat surface. In the present invention, the workpiece 100 may have an adhesive tape attached to the back side of the front surface, and an annular frame attached to the outer edge of the adhesive tape. Further, in the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

In the first embodiment, the processing device 1 automatically causes each component unit of the processing device 1 to perform a series of operations to repeatedly transport and process the workpiece 100, and transfers and processes the workpiece 100 stored in the cassettes 81 and 82. Fully automatic processing is performed to sequentially process 100 pieces.

Holding table 10 holds workpiece 100 on holding surface 11 . The holding table 10 has a flat holding surface 11 for holding a workpiece 100 formed on the upper surface, and a disk-shaped suction part made of porous ceramic or the like having a large number of porous holes, and a suction part located at the center of the upper surface. It is disc-shaped and includes a frame that is fitted into the recess and fixed. The holding surface 11 is formed generally parallel to the XY plane, which is a horizontal plane. The holding table 10 is rotatably provided around an axis parallel to the Z-axis direction perpendicular to the horizontal plane by a rotational drive source (not shown). The holding table 10 has a suction section connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and suctions and holds the workpiece 100 on the entire holding surface 11 . In the first embodiment, the operations of the holding table 10 include an operation of sucking and holding the workpiece 100 on the holding surface 11 and an operation of releasing the suction and holding of the workpiece 100 on the holding surface 11. The holding table 10 is provided with a sensor (not shown). The sensor provided on the holding table 10 detects the workpiece 100 held on the holding surface 11, the start of suction holding operation of the workpiece 100 on the holding surface 11, and the end of the operation (suction holding release operation). , and the occurrence of an error in the operation, and transmits the detection result to the control unit 90.

As shown in FIG. 1, two holding tables 10 are installed on a turntable 20. These two holding tables 10 are provided on the turntable 20 so as to be rotatable in a substantially horizontal plane independently of the turntable 20. As shown in FIG. 1, the turntable 20 is a disc-shaped table, is provided rotatably within a horizontal plane, and is driven to rotate at a predetermined timing to move the holding table 10 and place it on the holding table 10. The workpiece 100 is transported. The two holding tables 10 are arranged on the turntable 20 at equal intervals with a phase angle of, for example, 180°. These two holding tables 10 are sequentially moved to the loading/unloading position and the processing position by rotation of the turntable 20. In the first embodiment, the operation of the turntable 20 includes an operation of rotating the turntable 20 to move the holding table 10 on the turntable 20 from the loading/unloading position to a processing position, and an operation of rotating the turntable 20 to move the holding table 10 on the turntable 20 from the loading/unloading position to the processing position. These operations include moving the holding table 10 from the processing position to the loading/unloading position. The turntable 20 is provided with a sensor (not shown). The sensor provided on the turntable 20 detects the rotation angle of the turntable 20, the start of rotation operation of the turntable 20, the end of the rotation operation, and the occurrence of an error in the operation, and sends the detection results to the control unit 90. do.

The temporary holding table 30 temporarily places the unprocessed workpiece 100 taken out from the cassettes 81 and 82 placed on the cassette stage 80 before it is carried into the holding table 10, and aligns the center of the workpiece 100. I do. In the first embodiment, the operation of the temporary table 30 is an operation for aligning the center of the workpiece 100 carried out onto the temporary table 30. The temporary table 30 is provided with a sensor (not shown). The sensor provided on the temporary holding table 30 detects the workpiece 100 held by the temporary holding table 30, the start of the center positioning operation of the workpiece 100 by the temporary holding table 30, the end of the said operation, and the said operation. The occurrence of an error is detected and the detection result is sent to the control unit 90.

The processing unit 40 processes the workpiece 100 held on the holding table 10. In the first embodiment, the processing unit 40 is a grinding unit and includes a grinding wheel 41. The grinding wheel 41 has an annularly arranged grinding wheel, and rotates the workpiece 100 held on the holding table 10 positioned at the processing position while being rotated about the axis parallel to the Z-axis direction. is pressed along the Z-axis direction to grind the workpiece 100. In the first embodiment, the operation of the processing unit 40 is an operation of grinding the workpiece 100 with the grinding wheel 41, and the like. The processing unit 40 is provided with a sensor (not shown). The sensor provided in the processing unit 40 detects the workpiece 100 being ground by the processing unit 40, the start of the grinding operation of the workpiece 100 by the processing unit 40, the end of the operation, and the occurrence of an error in the operation. is detected and the detection result is sent to the control unit 90.

The transport arm 50 transports the workpiece 100 between the plurality of constituent units within the processing apparatus 1 . In the first embodiment, the transport arm 50 includes a first transport arm 51 and a second transport arm 52. The first transport arm 51 is, for example, a robot pick equipped with a U-shaped hand, and transports the workpiece 100 by sucking and holding the workpiece 100 with the U-shaped hand. The first transfer arm 51 takes out one workpiece 100 before processing from the cassettes 81 and 82 and carries it out to the temporary storage table 30, and also transports the workpiece 100 after processing from the cleaning unit 70 to the cassettes 81 and 82. Transport to. The first transfer arm 51 transports the processed and cleaned workpiece 100, which was housed in the cassette 81 before processing, into the cassette 81, and carries the processed and cleaned workpiece 100, which was housed in the cassette 82 before processing, into the cassette 81. The subsequent workpiece 100 is carried into the cassette 82. The second transport arm 52 has a suction pad, and suction-holds the unprocessed workpiece 100 aligned on the temporary holding table 30, and transports it onto the holding table 10 located at the carry-in/unload position. The processed workpiece 100 held on the holding table 10 located at the carry-in and carry-out position is held by suction and carried out onto the cleaning table 71 of the cleaning unit 70.

In the first embodiment, the operations of the first transfer arm 51 include an operation of sucking and holding the workpiece 100, an operation of releasing the suction and holding of the workpiece 100, an operation of moving the cassettes 81 and 82 forward, and a temporary holding table. 30, and the operation of moving the cleaning unit 70 onto the cleaning table 71. In the first embodiment, the operation of the first transport arm 51 during fully automatic processing includes an operation of taking out one workpiece 100 from the cassettes 81 and 82 and transporting (unloading) it to the temporary table 30; 100 from the cleaning unit 70 to the cassettes 81 and 82. The first transport arm 51 is provided with a sensor (not shown). The sensor provided on the first transport arm 51 collects drive information, which is information regarding the drive of the first transport arm 51, such as the rotation angle of each arm constituting the first transport arm 51; It detects the workpiece 100 held by suction and its position, the start of each of the above operations, the end of the operation, and the occurrence of an error in the operation, and sends these detection results to the control unit 90.

In the first embodiment, the operations of the second transport arm 52 include an operation of suction-holding the workpiece 100, an operation of releasing the suction-holding of the workpiece 100, and an operation of moving onto the holding table 10 located at the loading/unloading position. These include an operation, an operation of moving onto the temporary table 30, an operation of moving the cleaning unit 70 onto the cleaning table 71, etc. In the first embodiment, the operation of the second transport arm 52 during fully automatic processing includes the operation of transporting (carrying in) the workpiece 100 from the temporary table 30 to the holding table 10 located at the carry-in and carry-out position, and the workpiece This includes the operation of transporting (carrying out) the object 100 from the holding table 10 located at the loading/unloading position to the cleaning unit 70. The second transport arm 52 is provided with a sensor (not shown). The sensor provided on the second transport arm 52 detects drive information, which is information regarding the drive of the second transport arm 52, such as the rotation angle and position of each arm constituting the second transport arm 52, and the second transport arm. The workpiece 100 held by the arm 52 by suction, the start of each of the above operations, the end of the operation, and the occurrence of an error in the operation are detected, and these detection results are transmitted to the control unit 90.

As shown in FIG. 1, the touch panel 60 is installed on the device cover 3 with the display surface facing outward. The touch panel 60 includes a monitor 61 that displays various information regarding the processing apparatus 1, and an input section 62 that receives various operational inputs regarding the processing apparatus 1 from an operator, such as inputting settings for processing conditions. The touch panel 60 displays on the monitor 61 an in-apparatus illustration 300 (see FIG. 5) that includes a plurality of component unit illustrations 301 (see FIG. 5) and a workpiece illustration 302 (see FIG. 5). The touch panel 60 receives, through the input unit 62, an input by the operator of the processing apparatus 1 to select the constituent unit illustration 301 and workpiece illustration 302 displayed on the monitor 61.

The cleaning unit 70 has a cleaning table 71 that holds the workpiece 100 after being ground. The cleaning unit 70 cleans the workpiece 100 after being ground on the cleaning table 71 and removes contamination such as grinding debris adhering to the ground surface. In the first embodiment, the operations of the cleaning unit 70 include an operation of holding the workpiece 100 on the cleaning table 71, an operation of releasing the holding of the workpiece 100 on the cleaning table 71, and an operation of holding the workpiece 100 on the cleaning table 71. cleaning operations, etc. The cleaning unit 70 is provided with a sensor (not shown). The sensor provided in the cleaning unit 70 detects the workpiece 100 held by the cleaning table 71, the start of the cleaning operation of the workpiece 100 by the cleaning unit 70, the end of the operation, and the occurrence of an error in the operation. and transmits the detection result to the control unit 90.

The cassette stage 80 is a mounting table on which cassettes 81 and 82, which are containers for accommodating a plurality of workpieces 100, are mounted. In the first embodiment, the processing apparatus 1 includes two cassette stages 80, on which the cassette 81 is placed and the cassette 82 is placed on the other, but the present invention is not limited to this, and at least one It suffices if the number of cassette stages 80 is greater than the number of locations.

The cassettes 81 and 82 allow the workpieces 100 to be taken in and out through the openings, and are provided with a plurality of slots that hold the workpieces 100 at intervals in the Z-axis direction. In the processing apparatus 1, the workpieces 100 accommodated in the cassettes 81 and 82 are managed and handled one by one according to the number of stages of the slots accommodated. In the first embodiment, the operations of the cassettes 81 and 82 include an operation of accepting each operation of carrying out and carrying in the workpiece 100 by the first transport arm 51. In the first embodiment, each of the cassettes 81 and 82 has 10 layers of slots, and the 10 workpieces 100 are handled separately, but the present invention is not limited to this, and the slots may have any number of layers. . The cassettes 81 and 82 are placed on the cassette stage 80 with their openings facing the first transfer arm 51 side.

The control unit 90 controls each constituent unit of the processing apparatus 1 and causes the processing apparatus 1 to perform each operation related to processing for processing the workpiece 100. The control unit 90 receives detection results from sensors provided in each component unit. Furthermore, the control unit 90 controls the function of accepting input to the in-device illustration 300 of the monitor 61 and the in-device illustration 300 controlled by the input unit 62, based on the detection results of these sensors. The control unit 90 includes a storage section 91 and a processing section 92, as shown in FIG.

The storage unit 91 stores programs that implement functions such as various processes of the processing device 1 executed by the processing unit 92, data (processing conditions) used for processing by the programs, and the like. The storage unit 91 is a nonvolatile or volatile memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), and EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory). This includes storage devices such as digital semiconductor memory. The program stored in the storage unit 91 is a program having a non-transitory storage medium that is readable by the processor and includes a plurality of instructions for performing data processing that can be executed by the processor included in the processing unit 92. It can also be said to be a product. The storage unit 91 can also be used as a temporary work area when the processor included in the processing unit 92 executes instructions written in a program.

As shown in FIG. 2, the storage unit 91 according to the first embodiment includes an illustration storage unit 93, a fully automatic operation storage unit 94, a progress storage unit 95, and a constituent unit operation storage unit 96. The functions of the illustration storage section 93, the fully automatic operation storage section 94, the progress storage section 95, and the constituent unit operation storage section 96 are realized by a storage device included in the storage section 91.

The illustration storage unit 93 stores a plurality of constituent unit illustrations 301 that are illustrations of each constituent unit, and a workpiece illustration 302 that is an illustration of the workpiece 100. In the first embodiment, each constituent unit illustration 301 stored in the illustration storage section 93 is a plan view illustration showing the external shape of each constituent unit as viewed from above the processing apparatus 1. The illustration storage unit 93 stores illustrations of a plurality of plan views at a plurality of rotation angles when the outer shapes of the first transfer arm 51 and the second transfer arm 52 change due to rotational movement. The illustration storage unit 93 stores only one illustration of a plan view of each constituent unit as the constituent unit illustration 301 of each constituent unit other than the first transport arm 51 and the second transport arm 52. Here, in the first embodiment, the constituent unit illustrations 301 of each constituent unit other than the first transport arm 51 and the second transport arm 52 are the constituent unit illustration 301 of the holding table 10 and the constituent unit illustration 301 of the turntable 20. , a constituent unit illustration 301 of the temporary storage table 30, a constituent unit illustration 301 of the processing unit 40, a constituent unit illustration 301 of the cleaning unit 70, and a constituent unit illustration 301 of the cassettes 81 and 82.

In the first embodiment, the constituent unit illustration 301 of the cleaning unit 70 stored in the illustration storage section 93 is a plan view illustration in which the portion covering the upper part of the cleaning unit 70 is omitted, and is substantially the configuration of the cleaning table 71. It is a unit illustration 301. Further, in the first embodiment, the constituent unit illustrations 301 of the cassettes 81 and 82 stored in the illustration storage section 93 are plan view illustrations in which the portions covering the upper portions of the cassettes 81 and 82 are omitted. As a result, the workpiece illustration 302 representing the workpiece 100 housed on the cleaning table 71 and in the cassettes 81 and 82 is replaced by the component unit illustration 301 of each of the cleaning table 71 and the cassettes 81 and 82 in the apparatus interior illustration 300. It is displayed on the front side, making it easier to see on the monitor 61 and easier to select on the input section 62.

In the first embodiment, the workpiece illustration 302 stored in the illustration storage unit 93 is such that the workpiece 100 is accommodated before processing in a plan view showing the outer diameter of the workpiece 100 as seen from above the processing apparatus 1. 2 is an illustration of a workpiece 100 with an indication of the number of slot stages. Note that the workpiece illustration 302 is associated with the number of stages of slots accommodated before processing for each workpiece 100, so that the workpiece illustration 302 can be identified by the number of the slots accommodated before processing.

The illustration storage unit 93 also stores arrangement data that is data on the arrangement position and arrangement order of each constituent unit illustration 301 in the in-apparatus illustration 300 displayed on the monitor 61. These configuration unit illustrations 301, workpiece illustrations 302, and arrangement data for each configuration unit illustration 301 are stored in advance in the illustration storage unit 93 by an operator, administrator, or the like of the processing apparatus 1.

FIG. 3 is a diagram showing an example of full-auto operation data 201 stored in the full-auto operation storage section 94 of FIG. 2. As shown in FIG. The fully automatic operation storage unit 94 stores a series of operations of a plurality of constituent units when processing the workpiece 100 in fully automatic machining. Specifically, as shown in FIG. 3, the fully automatic operation storage unit 94 stores the order in which the operations of the plurality of constituent units of the processing apparatus 1 are carried out during fully automatic machining and the order in which each operation is executed. The constituent unit holding the workpiece 100 and the content of the operation to be performed on the workpiece 100 are stored in a one-to-one correspondence as fully automatic operation data 201. The fully automatic operation data 201 is stored in advance in the fully automatic operation storage section 94 by an operator, administrator, or the like of the processing apparatus 1.

In the example shown in FIG. 3, the fully automatic operation data 201 includes an operation in which the first transport arm 51 first takes out one workpiece 100 from the cassettes 81 and 82 and transports (unloads) it to the temporary storage table 30. Second, the second transport arm 52 transports the workpiece 100 from the temporary storage table 30 to the holding table 10 located at the loading/unloading position, and third, positioning the workpiece 100 at the processing position. The processing unit 40 performs an operation of grinding the workpiece 100 on the holding table 10 that has been moved, and fourthly, the second transfer arm 52 carries the workpiece 100 from the holding table 10 located at the loading/unloading position. Fifthly, the cleaning unit 70 performs a cleaning operation of the workpiece 100 on the cleaning table 71, and sixth, the first transport arm 51 transfers the workpiece 100 to the cleaning unit 70. This shows that the operation of transporting (carrying in) from the cleaning unit 70 to the cassettes 81 and 82 is carried out. In addition, in the example shown in FIG. 3, the fully automatic operation data 201 shows only a part of the operations of the plurality of constituent units included in the processing apparatus 1 during fully automatic machining, but in reality, A more detailed and larger number of operations executed by a plurality of constituent units included in the processing apparatus 1 from the start to the end of fully automatic processing are stored.

FIG. 4 is a diagram showing an example of progress data 202 stored in the progress storage section 95 of FIG. 2. As shown in FIG. The progress storage unit 95 stores the progress of fully automatic machining for each workpiece 100. The progress storage unit 95 records changes in the content of each operation stored in the fully automatic operation data 201 based on the detection results of sensors provided in each component unit obtained in real time during execution of fully automatic machining. Each time it is detected, the fact that the content of the operation has changed is stored and updated as the progress of fully automatic machining. Here, changes in the content of the operation include the start of the operation, the end of the operation, and the occurrence of an error during the operation, and include movement of the workpiece 100 due to the operation. The progress storage unit 95 stores the changes in the contents of each operation stored in the fully automatic operation data 201 in this way, and thereby records the progress of the fully automatic machining for each workpiece 100 as shown in FIG. It is stored as progress data 202. The progress storage unit 95 also stores data based on the detection results of the sensors provided in each configuration unit when the fully automatic machining is interrupted and the processing unit 92 causes each configuration unit to operate as described later. Each time a change in the contents of each operation stored in the fully automatic operation data 201 is detected, the change in the contents of the operation is stored and updated as the progress of the fully automatic machining.

In the first embodiment, the progress storage unit 95 stores, for example, when the detection signal of the workpiece 100 from the sensor of the component unit before the workpiece 100 is moved disappears, and the detection signal of the workpiece 100 from the sensor of the component unit to which the workpiece 100 is moved disappears. When it is recognized that the detection signal of the workpiece 100 has been generated, it is recognized that the operation of transporting the workpiece 100 from the previous component unit to the destination component unit has been carried out, and the operation has been carried out. (started and ended) is stored and updated in the progress data 202. For example, the progress storage unit 95 may continue to receive detection signals of the workpiece 100 from the sensors of the first transfer arm 51 and the second transfer arm 52, and When detecting the detection signal of the angle of each arm from the sensor, it is recognized that the operation of transporting the workpiece 100 has started, and this fact is recorded and updated in the progress data 202.

In the example shown in FIG. 4, the progress data 202 indicates the name of the workpiece 100 by the letter of the workpiece and the number of slots in which the workpiece 100 is accommodated, and for each workpiece 100, the name of the workpiece 100 is Enter "End" in the action column, "Start" in the action column that has started, "Error" in the action column where an error occurred, and leave blank in the action column that has not yet been executed. The progress of fully automatic machining for each workpiece 100 is shown by diagonal hatching. In the example shown in FIG. 4, the progress data 202 indicates that all operations stored in the fully automatic operation data 201 have been processed for workpieces 1 to 3, and that workpiece 4 has been ground and is placed on the cleaning table 71. The workpiece 5 has been ground and is being transported to the cleaning table 71 by the second transport arm 52, and the workpiece 6 is in a state where an error has occurred during the grinding process. For workpieces 7 to 10, all operations stored in the fully automatic operation data 201 are unprocessed.

In addition to the above, the storage unit 91 stores information such as processing conditions necessary for the processing of the workpiece 100 by the processing unit 40. Information such as the processing conditions is stored in advance in the storage unit 91 by an operator, administrator, or the like of the processing apparatus 1.

The processing unit 92 includes an arithmetic processing device such as a CPU (Central Processing Unit) microprocessor, a microcomputer, a DSP (Digital Signal Processor), or a system LSI (Large Scale Integration). A processor included in the processing unit 92 executes a program loaded onto a RAM included in the storage unit 91. Thereby, functions such as various processes executed by the processing device 1 are realized. The programs loaded onto the RAM included in the storage unit 91 and executed by the processor included in the processing unit 92 include a program that displays the internal illustration 300 on the monitor 61 and receives input to the internal illustration 300 on the input unit 62; There is a program, etc. that operates each component unit of the processing device 1 based on input received by the input unit 62. The functions of various processes executed by the processing apparatus 1 include a function of processing the workpiece 100 by the processing unit 40, a function of displaying the internal illustration 300 of the apparatus by the monitor 61, and an input to the internal illustration 300 of the apparatus by the input unit 62. Examples include a receiving function and a function of operating each constituent unit of the processing apparatus 1 based on input received by the input unit 62.

The processing unit 92 operates based on a program stored in the storage unit 91, and executes various processes of the processing device 1, which will be described below. Here, in the first embodiment, various processes of the processing device 1 performed by the processing unit 92 include processing of operations of a plurality of constituent units included in the processing device 1 during fully automatic processing, and processing received by the input unit 62. This is a process of operating each constituent unit of the processing apparatus 1 based on the input. As shown in FIG. 2, the processing section 92 according to the first embodiment includes a processing section 97, a position reflecting section 98, and a processing understanding section 99. The functions of the processing section 97, the position reflecting section 98, and the processing understanding section 99 are realized by the arithmetic processing unit executing a program stored in the storage device of the storage section 91.

The processing unit 97 controls each constituent unit of the processing apparatus 1 based on information such as processing conditions stored in the storage unit 91, and executes processing of the workpiece 100 by the processing unit 40. In the first embodiment, the processing unit 97 generates an in-apparatus illustration 300 and displays it on the monitor 61 in response to receiving an input from the operator to fully automatically process the workpiece 100 through the input unit 62. The fully automatic machining is executed by causing each constituent unit to perform the operation of each constituent unit in order according to the fully automatic operation data 201. When the sensor provided in each component unit detects that an error has occurred in the operation of each component unit during execution of fully automatic machining, the processing unit 97 removes the workpiece in the component unit where the error has occurred. The processing of the workpiece 100 is stopped, the fact that the error has occurred is reflected in the display of the in-apparatus illustration 300, and the processing of the workpiece 100 in each component unit in which the error has not occurred is completed. When the processing section 97 is not executing fully automatic processing, the processing section 97 causes each component unit to operate in response to receiving an input from the operator through the input section 62 indicating that the component unit is to be operated.

The position reflection unit 98 grasps the current position of each workpiece 100 and reflects the current position of each workpiece illustration 302 in the in-apparatus illustration 300. Note that the detailed function of the position reflecting section 98 will be explained together with the explanation of the operation of the processing device 1, which will be described later. Further, although the constituent unit operation storage unit 96 and the process grasping unit 99 are illustrated in FIG. 2, they are not involved in the operation of the processing apparatus 1 according to the first embodiment described below, so In Embodiment 3, its functions and operations will be explained.

When the input unit 62 of the processing device 1 receives an input from an operator to perform fully automatic machining of the workpiece 100 or an input to perform each operation, the processing unit 97 of the processing unit 92 stores information in the illustration storage unit 93. Based on the stored arrangement data of each constituent unit illustration 301, workpiece illustration 302, and each constituent unit illustration 301, and the detection results of the sensors provided in each constituent unit, the figure is 5 is generated and displayed on the monitor 61. The processing unit 97 of the processing unit 92 first creates an illustration 301 of each constituent unit of the turntable 20, the temporary table 30, the processing unit 40, the cleaning unit 70, and the cassettes 81, 82, which do not move or rotate, in the apparatus internal illustration 300. are arranged on the in-device illustration 300 according to the arrangement data of each constituent unit illustration 301.

Next, the processing section 97 of the processing section 92 grasps the current position of each holding table 10 based on the detection results of the sensors provided in each constituent unit, and changes the constituent unit illustration 301 of each holding table 10 to each It is displayed at a position in the device internal illustration 300 that corresponds to the current position of the holding table 10. Further, the processing unit 97 of the processing unit 92 grasps the movement of the holding table 10 based on the detection results of the sensors provided in each component unit, and converts the component unit illustration 301 of each holding table 10 into The holding table 10 is moved from a position in the in-device illustration 300 corresponding to the position before the movement to a position in the in-device illustration 300 corresponding to the position after the movement of the holding table 10. The processing unit 97 of the processing unit 92 may grasp the current position and movement of each holding table 10 based on the progress data 202 updated by the progress storage unit 95 in real time during the execution of fully automatic processing. good.

The processing section 97 of the processing section 92 also grasps the movement and rotation of the first transfer arm 51 based on the detection results of the sensor provided on the first transfer arm 51, and controls the movement and rotation of the first transfer arm 51. A constituent unit illustration 301 of the first transport arm 51 having an external shape corresponding to the current state is displayed on the device internal illustration 300. The processing section 97 of the processing section 92 grasps the movement and rotation of the second transfer arm 52 based on the detection results of the sensor provided on the second transfer arm 52, and determines the current state of the second transfer arm 52. A constituent unit illustration 301 of the second transport arm 52 having an external shape corresponding to the state is displayed on the device internal illustration 300.

The position reflection unit 98 of the processing unit 92 also grasps the current position of each workpiece 100 based on the detection result of the sensor provided in each component unit, and changes each workpiece illustration 302 to the workpiece 100. It is displayed at each position in the in-device illustration 300 corresponding to each current position. Further, the position reflection unit 98 of the processing unit 92 grasps the movement of each workpiece 100 based on the detection results of the sensors provided in each component unit, and changes each workpiece illustration 302 to the position of the workpiece 100. The workpiece 100 is moved from a position in the in-apparatus illustration 300 corresponding to the position before the movement to a position in the in-apparatus illustration 300 corresponding to the position after the workpiece 100 has been moved. During execution of fully automatic machining, the position reflection unit 98 of the processing unit 92 grasps the current position and movement of each workpiece 100 based on progress data 202 updated by the progress storage unit 95 in real time. Good too.

The processing unit 97 of the processing unit 92 displays the in-device illustration 300 on the monitor 61 and stops the function of receiving input to the in-device illustration 300 by the input unit 62 while performing fully automatic processing. When an error occurs and fully automatic machining is interrupted, the processing unit 97 of the processing unit 92 displays the workpiece illustration 302 of the workpiece 100 that was being processed in the component unit where the error occurred or displays the error. The constituent unit illustration 301 in which the error occurred is colored or marked with a mark to make it distinguishable from other workpiece illustrations 302 or constituent unit illustrations 301. Furthermore, when an error occurs and fully automatic processing is interrupted, the processing section 97 of the processing section 92 starts receiving input to the in-device illustration 300 through the input section 62. In the first embodiment, the processing unit 97 of the processing unit 92 starts accepting input for selection of the workpiece illustration 302 of the workpiece 100 displayed on the in-apparatus illustration 300 using the input unit 62 .

5 and 6 are diagrams illustrating an example of processing by the processing unit 92 in FIG. 2. 5 and 6 both show an illustration 300 of the inside of the apparatus after an error occurs in the operation of the processing unit 40 and fully automatic processing is interrupted. The left side of FIG. 5 shows an illustration 300 of the inside of the device when an error occurs in the operation of the machining unit 40 and fully automatic machining is interrupted. The workpiece 5 (workpiece 100) is held in a cleaned state by the holding table 10 positioned at the loading/unloading position, and the workpiece 6 (workpiece 100) This shows that the grinding process has been interrupted and the grinding process is being held in the middle of the grinding process on the holding table 10 positioned at the processing position.

As shown on the left side of FIG. 5, the machining unit 97 of the processing unit 92 first receives information from the input unit 62 that allows the operator to process the workpiece 100 (work 4) while the fully automatic machining is suspended. A selection input to the object illustration 302 is accepted. The input is performed by an operator touching the monitor 61, for example.

Next, in the first embodiment, the processing unit 97 of the processing unit 92 associates the process with the workpiece illustration 302 for which the selection input has been received, based on the progress data 202 shown in FIG. 4 stored in the progress storage unit 95. A configuration unit illustration 301 of a configuration unit that performs processing that has not yet been completed in a series of fully automatic machining operations for the workpiece 100 (workpiece 4) that is currently being processed The configuration unit is displayed in an identifiable manner as a configuration unit illustration 301 of the configuration unit.

Specifically, the machining unit 97 of the processing unit 92 first determines the unprocessed items in the progress data 202 regarding the workpiece 100 (workpiece 4) during a series of operations of each component unit during fully automatic machining. Extract actions for which certain information is stored. In the example shown in FIG. 5, the processing unit 97 of the processing unit 92 extracts an operation in which the first transport arm 51 transports (carries) the workpiece 100 (workpiece 4) from the cleaning unit 70 to the cassette 82. . Next, as shown on the left side of FIG. 5, the processing section 97 of the processing section 92 generates a configuration unit illustration 301 of the cassette 82 to which the workpiece 100 (workpiece 4) is moved by the motion extracted in the previous process. is identifiably highlighted in the in-device illustration 300 (step 1011). In the first embodiment, when the operation that has not yet been completed is an operation of moving the workpiece 100, the processing unit 97 of the processing unit 92 converts the configuration unit illustration of the configuration unit to which the operation is to be moved. 301 is identifiably displayed as a constituent unit illustration 301 of a processable constituent unit. The processing section 97 of the processing section 92 then starts accepting input for selection of the constituent unit illustration 301 of the constituent unit to be identifiably displayed in the in-device illustration 300, using the input section 62.

The processing unit 97 of the processing unit 92 identifiably displays the constituent unit illustration 301 of the cassette 82 to which the workpiece 100 (workpiece 4) is to be moved as the constituent unit illustration 301 of the processable constituent units, and then 5, the input unit 62 receives an input for selecting the constituent unit illustration 301 of the cassette 82 that is displayed in an identifiable manner (step 1012).

When the processing unit 97 of the processing unit 92 receives the selection input to the constituent unit illustration 301 of the cassette 82 in step 1012, the first transfer arm 51 transfers the workpiece 100 (workpiece 4) from the cleaning unit 70 to the cassette. It is recognized that an input to perform an operation of transporting (carrying in) to 82 has been received, and the first transport arm 51 is caused to perform this action. Furthermore, the processing unit 92 generates a moving image in which the constituent unit illustration 301 of the first transport arm 51 changes in the device internal illustration 300 in accordance with the actual movement and rotation of the first transport arm 51 due to the execution of this operation. indicate. In addition, the position reflection unit 98 of the processing unit 92 displays the position of the workpiece 100 (workpiece 4) in the apparatus illustration 300 according to the actual movement of the workpiece 100 (workpiece 4) by performing this operation. A moving image of moving the object illustration 302 from the constituent unit illustration 301 of the cleaning table 71 to the constituent unit illustration 301 of the cassette 82 is displayed (step 1013). After displaying this video, the position reflecting unit 98 of the processing unit 92 moves the workpiece 100 (work 4) moved onto the component unit illustration 301 of the cassette 82, as shown on the right side of FIG. The object illustration 302 is hidden. Further, the position reflection unit 98 of the processing unit 92 hides the workpiece illustration 302 on the movement source constituent unit illustration 301 as a substitute for the moving image corresponding to the movement of the workpiece 100, and hides the workpiece illustration 302 on the movement source constituent unit illustration 301. The workpiece illustration 302 may be displayed on the illustration 301.

In the first embodiment, the processing unit 92 accepts input of selection by the operator to the workpiece illustration 302 of the workpiece 100 (work 4) and input of selection to the constituent unit illustration 301 of the cassette 82. The operation of the first transport arm 51 to transport (carry in) the workpiece 100 (work 4) from the cleaning unit 70 to the cassette 82 in response to the reception, and the configuration of the first transport arm 51 in the apparatus interior illustration 300 Although display processing was performed regarding changes in the unit illustration 301 and movement of the workpiece illustration 302 of the workpiece 100 (work 4), the present invention is not limited to this; By dragging the workpiece illustration 302 to the constituent unit illustration 301 of the cassette 82 while continuing to touch the workpiece illustration 302, the constituent unit (cassette 82) of the workpiece 100 (work 4) is dragged. ) and the display processing in the in-device illustration 300 may be performed.

The left side of FIG. 6 shows that after an error occurs in the operation of the processing unit 40 and fully automatic processing is interrupted, the first transfer arm 51 moves the workpiece 100 (workpiece 4) according to each process explained using FIG. An illustration 300 of the inside of the apparatus is shown in a state after the operation of transporting (carrying in) from the cleaning unit 70 to the cassette 82. As shown on the left side of FIG. 6, when the processing unit 97 of the processing unit 92 receives an input of selection of the workpiece 100 (workpiece 5) to the workpiece illustration 302 by the operator through the input unit 62, the processing unit 97 of the processing unit 92 The second transport arm 52 transports the workpiece 100 from the holding table 10 located at the loading/unloading position to the cleaning unit 70, and the first transport arm 51 transports the workpiece 100 from the cleaning unit 70 to the cassette 82. The operation of transporting (carrying in) is extracted, and the second transport arm 52 moves the workpiece 100 from the holding table 10 located at the transporting/unloading position to the cleaning table 71 and the cleaning unit 70, which is the movement destination. Each component unit illustration 301 with the cassette 82, which is the destination of the operation in which the transport arm 51 of No. 1 transports (loads) the workpiece 100 from the cleaning unit 70 to the cassette 82, is clearly highlighted in the apparatus illustration 300. (step 1021).

After performing the highlighting process as described above, the processing unit 97 of the processing unit 92 displays the configuration unit illustration 301 of the cleaning table 71 that was visibly displayed in step 1021 by the operator, as shown in the center of FIG. The selection input is accepted (step 1022).

When the processing unit 97 of the processing unit 92 receives the selection input to the component unit illustration 301 of the cleaning table 71 in step 1022, the second transfer arm 52 moves the workpiece 100 to the holding table located at the loading/unloading position. 10 to the cleaning unit 70, and causes the second transport arm 52 to perform this action. Furthermore, the processing unit 92 generates an animation in which the constituent unit illustration 301 of the second transport arm 52 changes in the device internal illustration 300 in accordance with the actual rotation and movement of the second transport arm 52 due to the execution of this operation. indicate. Further, the position reflection unit 98 of the processing unit 92 displays the workpiece 100 (workpiece 5) in the apparatus illustration 300 according to the actual movement of the workpiece 100 (workpiece 5) by performing this operation. A moving image of moving the object illustration 302 from the constituent unit illustration 301 of the holding table 10 located at the carry-in/export position to the constituent unit illustration 301 of the cleaning table 71 is displayed (step 1023).

In the processing apparatus 1, the processing unit 97 of the processing unit 92 responds to receiving input from the operator through the input unit 62 in the same manner as the processing example of the processing unit 92 described using FIGS. 5 and 6. Then, the workpiece 100 (workpiece 6) whose grinding process was interrupted due to an error is carried into the cassette 82 and recovered while it is in the middle of the grinding process. In addition, in the processing example of the processing unit 92 explained using FIG. 5 and FIG. , the workpieces 100 with the most processed operations among the series of operations of the constituent units are carried into the cassette 82 and collected in order, but the present invention is not limited to this, and the workpieces are transferred in any order. 100 may be carried into the cassette 82 and recovered.

In this way, the control unit 90 uses the processing section 97, the position reflection section 98, the illustration storage section 93, the fully automatic operation storage section 94, and the progress storage section 95 to control the state in which the fully automatic processing is interrupted in the present invention. When the operator selects an arbitrary workpiece illustration 302 from the in-apparatus illustration 300, the constituent units that can process the workpiece 100 are displayed in an identifiable manner, and the operator selects the displayed constituent unit in an identifiable manner. This realizes the function of transporting the workpiece 100 to the constituent units. The control unit 90 further uses the processing section 92 and the progress storage section 95 to display constituent units that perform processing that has not yet been completed in the series of fully automatic machining operations in an identifiable manner as processable constituent units. Achieve functionality.

In the processing apparatus 1 according to the first embodiment having the above-described configuration, the processing section 97 of the processing section 92 of the control unit 90 is configured to display any target in the apparatus internal illustration 300 while the fully automatic processing is interrupted. When an operator selects a workpiece illustration 302, a constituent unit illustration 301 of a constituent unit capable of processing the workpiece 100 related to the selected workpiece illustration 302 is displayed in an identifiable manner, and the constituent units displayed in an identifiable manner by the operator are displayed. By selecting the illustration 301, the workpiece 100 is transported to the constituent unit of the selected constituent unit illustration 301. For this reason, the processing apparatus 1 according to the first embodiment has the effect that operations for operating each component unit and processing on the workpiece 100 can be performed easily.

Conventionally, when some kind of trouble occurs in fully automatic machining equipment that automatically transports and processes workpieces, and fully automatic machining is interrupted, the operator has to perform multiple operations on each component unit that is deeper than the main menu. Since the workpieces were collected by changing the operating screen, it took a lot of time for the operator and there was a risk of mistakes occurring. However, the processing apparatus 1 according to the first embodiment can easily perform processes such as cleaning and recovering the processed workpiece 100 by performing an operation of selecting the apparatus internal illustration 300 displayed on the monitor 61. .

In addition, in the processing apparatus 1 according to the first embodiment, the processing section 97 of the processing section 92 selects constituent units that perform processing that has not yet been completed in a series of fully automatic processing operations based on the progress storage section 95. Since the constituent unit illustration 301 can be displayed in an identifiable manner as a processable constituent unit, it is possible to reduce the risk of the operator accidentally repeating a process that has already been processed.

[Embodiment 2]
A processing apparatus 1 according to a second embodiment of the present invention will be described based on the drawings. FIG. 7 is a diagram showing an example of processing state data 203 grasped by the processing grasping section 99 of the processing apparatus 1 according to the second embodiment. In FIG. 7, the same parts as those in Embodiment 1 are given the same reference numerals, and the description thereof will be omitted.

The processing apparatus 1 according to the second embodiment includes a processable component unit that is identifiably displayed after receiving an input for selecting a workpiece illustration 302 in the apparatus internal illustration 300 in the processing apparatus 1 according to the first embodiment. This is a modified method of extracting .

The processing grasping section 99 grasps in real time whether each component unit is processing the workpiece 100 based on the progress data 202 stored and updated by the progress storage section 95. The process understanding unit 99 knows, for example, whether each component unit holds a workpiece 100 (workpiece). The processing grasping unit 99 determines whether each constituent unit is capable of processing based on whether each constituent unit holds the workpiece 100 (workpiece), and specifically, For each component unit that does not hold the workpiece 100, it is determined that the workpiece 100 can be processed, and for each component unit that does hold the workpiece 100, it is determined that the workpiece 100 cannot be processed. It is determined that there is. The process understanding unit 99 understands, for example, process status data 203 shown in FIG. 7 .

In the example shown in FIG. 7, the processing status data 203 holds information on whether each constituent unit holds the workpiece 100 (workpiece), and holds information on each constituent unit that does not hold the workpiece 100. If not, each constituent unit holding the workpiece 100 is shown as being held. Further, in the example shown in FIG. 7, the processing status data 203 includes information as to whether each component unit is processable or not, and YES for each component unit that is processable, and YES for each component unit that is not processable. They each indicate NO. In the example shown in FIG. 7, the processing status data 203 indicates that the cassettes 81 and 82 can be processed, and the first transport arm 51 and the temporary table 30 are not holding the workpiece 100, so that the processing state data 203 can be processed. This indicates that the second transport arm 52, holding table 10, and cleaning table 71 are holding the workpiece 100 and therefore cannot be processed.

Next, in this specification, an example of the operation of the processing apparatus 1 according to the second embodiment will be described based on the drawings. In the second embodiment, the processing section 97 of the processing section 92 can process the constituent units that are not processing the workpiece 100 based on the processing state data 203 shown in FIG. 7 that is grasped by the processing grasping section 99. Extract as a constituent unit. In the example of the processing status data 203 shown in FIG. The storage table 30 is extracted as a processable component unit. In the example of the processing status data 203 shown in FIG. 7, the processing unit 97 of the processing unit 92 extracts the constituent unit illustration 301 of the cassette 82, which is the destination of transport by the first transport arm 51, based on the extraction result. The configuration unit illustration 301 of the temporary storage table 30 is highlighted in a distinguishable manner in the device internal illustration 300.

In the example of the processing state data 203 shown in FIG. In addition to the operation of transporting (carrying in) from the unit 70 to the cassette 82, input of the operation of the first transport arm 51 transporting (evacuating) the workpiece 100 from the cleaning unit 70 to the temporary storage table 30 can also be accepted. can.

In this way, the control unit 90 further realizes the function of displaying, through the processing section 97 and the processing understanding section 99, constituent units that have not processed the workpiece 100 in an identifiable manner as constituent units that can process them.

The processing apparatus 1 according to Embodiment 2 having the above-described configuration does not implement the method other than the method of extracting processable constituent units to be identifiably displayed after selecting the workpiece illustration 302 in the in-apparatus illustration 300. Since it is the same as the processing apparatus 1 according to the first embodiment, the same operation and effect as the processing apparatus 1 according to the first embodiment can be achieved.

Further, the processing apparatus 1 according to the second embodiment displays the constituent unit illustration 301 of the constituent unit that is not processing the workpiece 100 so that it can be identified as a constituent unit that can process the workpiece 100, so that the operator can see inside the actual machine. It is possible to reduce the number of man-hours required to perform operations after confirming and determining transportable constituent units, and it is possible to reduce the risk of erroneous execution. Further, the processing apparatus 1 according to the second embodiment selects the constituent unit illustration 301 of the constituent unit that has already processed the workpiece 100 when the constituent unit that has already processed the workpiece 100 can perform the already processed operation again. It has the effect of being able to In addition, the processing apparatus 1 according to the second embodiment performs a series of operations other than the operations of each component unit when performing full automatic processing by selecting the component illustration 301 of the component unit when the component unit can be processed. This has the advantage of being able to carry out the following.

[Embodiment 3]
A processing apparatus 1 according to a third embodiment of the present invention will be described based on the drawings. FIG. 8 is a diagram showing an example of the constituent unit operation data 204 stored in the constituent unit operation storage section 96 of the processing apparatus 1 according to the third embodiment. FIG. 9 is a diagram showing an example of processing by the processing unit 92 of the processing apparatus 1 according to the third embodiment. In FIGS. 8 and 9, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and description thereof will be omitted.

In the processing apparatus 1 according to the third embodiment, instead of accepting the selection of the workpiece illustration 302 and operating each constituent unit in the apparatus internal illustration 300, the processing apparatus 1 according to the first embodiment displays a constituent unit illustration. 301 is accepted and each component unit is operated. The processing apparatus 1 according to the third embodiment may perform fully automatic processing as in the first embodiment, or unlike the first embodiment, the processing apparatus 1 may perform each operation according to the operator's operations without performing fully automatic processing. It may also be a manual machine that does not have a transport arm to carry out this process.

As shown in FIG. 8, the constituent unit operation storage section 96 stores a plurality of operations executable by each constituent unit as constituent unit operation data 204. In the example shown in FIG. 6, the constituent unit operation data 204 shows the operation actually executed by the turntable 20 as being included in the operation of the holding table 10. Further, in the example shown in FIG. 6, the constituent unit operation data 204 omits the operations of the temporary table 30 and the processing unit 40, but in reality, the operations of the temporary table 30 and the processing unit 40 are also stored. There is. The constituent unit operation data 204 is stored in advance in the constituent unit operation storage section 96 by an operator, administrator, or the like of the processing apparatus 1.

Next, in this specification, an example of the operation of the processing apparatus 1 according to the third embodiment will be described based on the drawings. The left side of FIG. 9 shows an illustration 300 of the inside of the device in the same state as the left side of FIG. In the third embodiment, the processing unit 92 first uses the input unit 62 to start receiving input for selection of the constituent unit illustration 301 of each constituent unit displayed in the in-apparatus illustration 300. As shown on the left side of FIG. 9, the processing unit 92 receives an input of selection by the operator to the constituent unit illustration 301 of the second transport arm 52 through the input unit 62.

Next, based on the component unit operation data 204, the processing unit 92 displays the operation options 303 of the second transport arm 52 regarding the component unit illustration 301 selected in response to this selection input on the in-device illustration 300. Display (step 1031). The processing unit 97 of the processing unit 92 then starts accepting input for selecting an action option 303 to be displayed on the in-device illustration 300 using the input unit 62 . The motion options 303 displayed by the processing unit 92 are a list of motions, and each motion can be selected by the operator.

In the example shown on the left side of FIG. 6, the constituent unit illustration 301 of the second transport arm 52 is displayed on the constituent unit illustration 301 of the holding table 10 located at the carry-in/export position, so the constituent unit operation data Among all the operations of the second transport arm 52 stored in step 204, the operation of moving onto the holding table 10 located at the loading/unloading position is meaningless. The processing section 97 of the processing section 92 displays the motion options 303 while omitting such meaningless motions.

Further, although the motion options 303 displayed by the processing section 97 of the processing section 92 are a list in the third embodiment, the present invention is not limited to this, and an illustration of the second transport arm 52 expressing the motion is provided. Alternatively, the operation of the constituent units may be accepted by displaying a moving image and allowing the operator to touch and select the illustration or moving image. For example, when the second transport arm 52 is on the holding table 10 located at the loading/unloading position, the processing unit 97 of the processing unit 92 places the second transport arm 52 on the constituent unit illustration 301 of the temporary storage table 30. By displaying the constituent unit illustration 301 of the cleaning table 71, an option 303 of the operation of moving the second transport arm 52 onto the temporary table 30 is displayed, and the second transport arm 52 is displayed on the constituent unit illustration 301 of the cleaning table 71. By displaying the configuration unit illustration 301 of , an option 303 of an operation for moving the second transport arm 52 onto the cleaning table 71 of the cleaning unit 70 may be displayed. For example, when the second transport arm 52 is on the holding table 10 located at the carry-in/out position, the processing unit 97 of the processing unit 92 may By displaying an animation of moving the constituent unit illustration 301 of the second transport arm 52 from above to the constituent unit illustration 301 of the temporary storage table 30, the operation of moving the second transport arm 52 onto the temporary storage table 30 is shown. A selection 303 is displayed, and an animation is displayed in which the constituent unit illustration 301 of the second transport arm 52 is moved from the constituent unit illustration 301 of the holding table 10 located at the carry-in/export position to the constituent unit illustration 301 of the cleaning table 71. Accordingly, an option 303 for moving the second transport arm 52 onto the cleaning table 71 of the cleaning unit 70 may be displayed.

As shown in the center of FIG. 9, the processing unit 97 of the processing unit 92 receives an input of selection for the action option 303 displayed in step 1031 (step 1032). In the example shown in the center of FIG. 9, the processing unit 97 of the processing unit 92 receives an input to perform an operation in which the second transport arm 52 moves onto the cleaning table 71 of the cleaning unit 70.

As shown on the right side of FIG. 9, when the processing unit 97 of the processing unit 92 receives an input to perform an operation of moving the second transfer arm 52 onto the cleaning table 71 of the cleaning unit 70 in step 1032, , the second transport arm 52 is driven to move the workpiece 100 (workpiece 5) onto the cleaning table 71 of the cleaning unit 70 while the second transport arm 52 attracts and holds the workpiece 100 (workpiece 5). Further, the processing section 97 of the processing section 92 moves the second transfer arm 52 onto the cleaning table 71 of the cleaning unit 70 in the apparatus illustration 300 in accordance with the actual movement of the second transfer arm 52 onto the cleaning table 71 of the cleaning unit 70. 52, and moving the workpiece illustration 302 of the workpiece 100 (work 5) from the structure unit illustration 301 of the holding table 10 to the structure unit illustration 301 of the cleaning table 71. Display (step 1033). Note that the means for displaying the movement of the workpiece illustration 302 is not a moving image, but rather hides the workpiece illustration 302 on the constituent unit illustration 301 before movement and displays the workpiece illustration on the constituent unit illustration 301 after movement. 302 may be displayed.

In this way, the control unit 90 further realizes the function of displaying the constituent units that do not hold the workpiece 100 in an identifiable manner as processable constituent units by the processing section 97 and the processing grasping section 99. Alternatively, the control unit 90 uses the machining processing section 97, the progress storage section 95, and the fully automatic operation storage section 94 to configure units that can perform processing that has not yet been completed in a series of fully automatic machining operations. A function of displaying them so that they can be identified as a unit may also be realized.

The processing apparatus 1 according to the third embodiment having the above configuration selects the constituent unit illustration 301 and operates each constituent unit instead of selecting the workpiece illustration 302 and operating each constituent unit. Since the processing apparatus 1 is the same as the processing apparatus 1 according to the first embodiment except that the processing apparatus 1 is configured to do so, the processing apparatus 1 has the same effects as the processing apparatus 1 according to the first embodiment.

Conventionally, even when machining is performed by an operator operating each component unit from a touch panel instead of fully automatic machining, it is necessary to change multiple screens to operate each component unit, which is inefficient. However, the processing apparatus 1 according to the third embodiment facilitates processing of the workpiece 100 after processing by performing an operation of selecting the constituent unit illustration 301 in the apparatus internal illustration 300 displayed on the monitor 61. can be done.

Furthermore, in the processing apparatus 1 according to the third embodiment, the processing unit 97 of the processing unit 92 can display the operation options 303 of the constituent units as illustrations or videos expressing the operations, so that the operator can The effect is that the operation of the constituent units can be selected intuitively.

[Modification 1]
A processing apparatus 1 according to a first modification of the present invention will be described based on the drawings. FIG. 10 is a diagram illustrating an example of processing by the processing unit 92 of the processing apparatus 1 according to the first modification. In FIG. 10, the same parts as in Embodiments 1 to 3 are denoted by the same reference numerals, and the description thereof will be omitted.

In the processing apparatus 1 according to the first to third embodiments, the processing apparatus 1 according to the first modification converts the various illustrations stored in the illustration storage section 93 into three-dimensional (three-dimensional) images when viewed diagonally from the illustration in the plan view. The displayed two-dimensional perspective illustration has been changed. In the first modification, the illustration storage unit 93 stores each configuration in each component unit illustration 401 (see FIG. 10), the workpiece illustration 402 (see FIG. 10), and the device internal illustration 400 (see FIG. 10) displayed on the monitor 61. Arrangement data, which is data on the arrangement position and arrangement order of the unit illustration 401, is stored.

In Modification 1, each constituent unit illustration 401 and workpiece illustration 402 stored in the illustration storage section 93 are two-dimensional (three-dimensional) displays in which the outer shape of each constituent unit of the processing apparatus 1 is viewed diagonally. These are three-dimensional perspective illustrations, and all are three-dimensional two-dimensional perspective images of each constituent unit of the processing device 1 viewed from the same direction. In Modification 1, each component unit illustration 401 and workpiece illustration 402 stored in the illustration storage section 93 are obtained when the operator views each component unit of the processing apparatus 1 diagonally from the position where the touch panel 60 is located. There is. The illustration storage unit 93 stores illustrations of a plurality of perspective views of the constituent units 401 of the first transport arm 51 and the second transport arm 52 having different external shapes that change depending on the operation. The illustration storage unit 93 stores only one illustration of a perspective view of each constituent unit as the constituent unit illustration 401 of each constituent unit other than the first transport arm 51 and the second transport arm 52.

These constituent unit illustrations 401, workpiece illustrations 402, and arrangement data for each constituent unit illustration 401 are stored in advance in the illustration storage section 93 by an operator, administrator, or the like of the processing apparatus 1.

In the first modification, the processing section 97 of the processing section 92 processes each component unit illustration 401, workpiece illustration 402, and each component unit illustration 401 stored in the illustration storage section 93 at the same timing as in the first embodiment. Based on the arrangement data, an internal device illustration 400 shown in FIG. 10 is generated and displayed on the monitor 61. In Modification 1, the processing section 97 of the processing section 92 receives an input of selection by the operator to each constituent unit illustration 401 or the workpiece illustration 402 of the workpiece 100 through the input section 62 . The processing section 97 of the processing section 92 receives this selection input and the subsequent processing is the same as in the first to third embodiments.

The processing device 1 according to the first modification having the above-described configuration is configured to display a two-dimensional perspective illustration that is three-dimensionally (three-dimensionally) viewed from an angle on the touch panel 60 and accept operation inputs. Other than the above, the processing apparatus 1 is the same as the processing apparatus 1 according to the first embodiment, and therefore has the same operation and effect as the processing apparatus 1 according to the first embodiment.

In addition, the processing apparatus 1 according to the first modification can display the illustrations of the constituent units and the workpiece 100 that are in a vertically overlapping positional relationship while being shifted in the vertical direction. This has the effect of being able to accurately grasp the situation.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention. In the embodiment described above, the processing device 1 provided with the touch panel 60 that receives display and operation input is a grinding device that grinds the workpiece 100; however, the present invention is not limited to the grinding device; It may be a cutting device that cuts the workpiece 100, a polishing device that polishes the workpiece 100, a laser processing device that processes the workpiece 100 with a laser beam, or a tape expansion device that expands the tape attached to the workpiece 100. Furthermore, these processing devices may further include an ultraviolet irradiation unit, and in this case, the ultraviolet irradiation unit is arranged below the cassette so as to overlap the cassette, and is provided so as to be freely raised and lowered together with the cassette by a cassette elevator. It will be done.

1 processing device 10 holding table 40 processing unit 50 transport arm 60 touch panel 80 cassette stage 81, 82 cassette 90 control unit 94 fully automatic operation storage section 95 progress storage section 96 constituent unit operation storage section 98 position reflection section 99 processing grasping section 100 target Workpiece 300,400 Illustration of equipment interior 301,401 Illustration of component unit 302,402 Workpiece illustration

Claims (5)

a holding table that holds the workpiece;
a processing unit that processes the workpiece held on the holding table;
A cassette containing multiple workpieces,
a transport arm that transports the workpiece between the plurality of constituent units in the processing device;
a touch panel that displays an illustration of the inside of the device that is composed of a plurality of component unit illustrations and a workpiece illustration;
A processing device comprising a control unit,
The control unit includes:
a fully automatic operation memory unit that stores a series of operations of the plurality of constituent units when fully automatically processing a workpiece;
a position reflection unit that grasps the current position of the workpiece and reflects it in the position of the workpiece illustration;
It has a progress storage unit that stores the progress of fully automatic machining for each workpiece,
When the operator selects any workpiece illustration in the device illustration while fully automatic machining is suspended, the constituent units that can process the workpiece are displayed so that the operator can identify them. A processing apparatus characterized in that by selecting the displayed constituent unit, a workpiece is transported to the constituent unit. The control unit is characterized in that, based on the progress storage section, a component unit that performs a process that has not yet been completed in the series of operations of the fully automatic machining is identifiably displayed as a processable component unit. The processing apparatus according to claim 1. The control unit further includes a processing grasping section that grasps whether each component unit is processing the workpiece,
2. The processing apparatus according to claim 1, wherein a component unit that is not processing a workpiece is identifiably displayed as a component unit that can be processed. a holding table that holds the workpiece;
a processing unit that processes the workpiece held on the holding table;
a cassette stage on which a cassette containing multiple workpieces is placed;
a transport arm that transports the workpiece between the plurality of constituent units in the processing device;
a touch panel that displays an illustration of the inside of the device that includes an illustration of a plurality of constituent units and a workpiece;
A processing device comprising a control unit,
The control unit includes:
It has a constituent unit operation storage unit that stores a plurality of operations of each constituent unit,
A processing apparatus characterized in that when an operator selects an illustration of a constituent unit, options for the operation of the constituent unit are displayed on the internal illustration of the apparatus, and the item selected by the operator is executed. 5. The processing apparatus according to claim 4, wherein the action options are displayed as an illustration or a moving image expressing the action.

Images