TWI724098B - Heater and fixing device, image forming device and heating device provided with the same - Google Patents

Heater and fixing device, image forming device and heating device provided with the same Download PDF

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TWI724098B
TWI724098B TW106103315A TW106103315A TWI724098B TW I724098 B TWI724098 B TW I724098B TW 106103315 A TW106103315 A TW 106103315A TW 106103315 A TW106103315 A TW 106103315A TW I724098 B TWI724098 B TW I724098B
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layer
heater
heat
soaking
heating
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TW106103315A
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TW201740227A (en
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梅村裕司
青山智克
加藤祥平
森田智博
松田美穂
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日商美鈴工業股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • G03G15/20Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat
    • G03G15/2003Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat using heat
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • G03G15/20Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/0095Heating devices in the form of rollers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/004Heaters using a particular layout for the resistive material or resistive elements using zigzag layout
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Fixing For Electrophotography (AREA)

Abstract

提供一種在與被加熱物對面之狀態下,掃掠被加熱物及主加熱器(1)中之一方而加熱被加熱物的加熱器,其藉由具備:基體(11);被設置在基體(11)之一面(11a)側的發熱層(12);被配置在基體(11)和發熱層(12)之層間,及基體(11)之另一面(11b)側中之至少一方,藉由熱傳導率大於構成基體(11)之材料的材料而被形成的均熱層(13),使因發熱層所引起的熱之起伏難以反映在加熱面,均熱性優良的加熱器、具備此之定影裝置、畫像形成裝置及加熱裝置。 Provided is a heater that scans one of the object to be heated and the main heater (1) while facing the object to be heated, and heats the object to be heated. The heater is provided with: a base body (11); (11) The heating layer (12) on one side (11a); is arranged between the substrate (11) and the heating layer (12), and at least one of the other side (11b) side of the substrate (11), by The soaking layer (13) formed by a material with a higher thermal conductivity than the material constituting the base (11) makes it difficult for the fluctuations of heat caused by the heating layer to be reflected on the heating surface. A heater with excellent soaking property is equipped with this Fixing device, image forming device and heating device.

Description

加熱器和具備此之定影裝置、畫像形成裝置及加熱裝置 Heater and fixing device, image forming device and heating device provided with the same

本發係關於加熱器和具備此之定影裝置、畫像形成裝置及加熱裝置。詳細而言,關於均熱性優良的加熱器和具備此之定影裝置、畫像形成裝置及加熱裝置。 This invention relates to a heater, a fixing device, an image forming device, and a heating device equipped with the heater. In detail, regarding the heater with excellent heat uniformity, the fixing device, the image forming device, and the heating device provided with the heater.

作為用以進行對象物之熱處理的加熱手段,所知的有利用在被形成薄的基體,在其一面設置有通電發熱之發熱層的加熱器。由於如此之加熱器可以形成小型,故在例如被組裝於影印機或印表機等而在記錄媒體定影碳粉或油墨等之目的下被使用,或在被組裝於乾燥機而使面板等之被處理體均勻加熱乾燥之目的下被使用。如此之加熱器揭示於下述專利文獻1。 As a heating means for heat treatment of an object, a heater is known that uses a thin substrate formed with a heat generating layer provided on one side of the substrate. Since such a heater can be made compact, it is used for the purpose of fixing toner or ink to the recording medium, for example, when it is assembled in a photocopier or printer, or when it is assembled in a dryer to make the panel, etc. It is used for the purpose of uniform heating and drying of the processed body. Such a heater is disclosed in Patent Document 1 below.

〔先前技術文獻〕 [Prior technical literature] 〔專利文獻〕 〔Patent Literature〕

[專利文獻1]國際公開第2013/073276號冊子 [Patent Document 1] International Publication No. 2013/073276 pamphlet

在如此之加熱器中,藉由利用被形成薄的基體,可以省電力,並且取得快速上升特性。另外,在當使用被形成薄的基體時,則有被設置在其一面之發熱層的例如因圖案形狀等所引起之熱的起伏,容易出現在加熱面之問題。並且,近來,要求較以往更小型的加熱器,尤其要求較掃掠方向寬窄的加熱器。如此朝掃掠方向之寬窄化,牽扯到更顯著地朝加熱面反映因發熱層之圖案所引起之熱的起伏,其對策成為必要。 In such a heater, by using a thin base, power can be saved and rapid rise characteristics can be achieved. In addition, when a thin substrate is used, there is a problem of heat fluctuations of the heat generating layer provided on one side of the heat generating layer, for example, caused by the shape of the pattern, which is likely to occur on the heating surface. In addition, recently, heaters with a smaller size than in the past are required, especially heaters that are wider and narrower than the sweep direction. This narrowing of the width in the sweep direction involves more prominently reflecting the heat fluctuations caused by the pattern of the heating layer toward the heating surface, and countermeasures are necessary.

本發明係鑒於上述課題而創作出,其目的係提供因發熱層所引起之熱的起伏難以反映在加熱面,且均熱性優良的加熱器,和具備此之定影裝置、畫像形成裝置及加熱裝置。 The present invention was created in view of the above-mentioned problems, and its purpose is to provide a heater that is difficult to reflect the fluctuation of heat caused by the heating layer on the heating surface and has excellent heat uniformity, and a fixing device, an image forming device, and a heating device provided with the heater .

本發明如同下述般。 The present invention is as follows.

請求項1所記載之加熱器係在與被加熱物面對面之狀態下,掃掠上述被加熱物及主加熱器中之一方而加熱上述被加熱物,其要旨係該加熱器具備:基體;發熱層,其係被設置在上述基體之一面側;及均熱層,其係被配置在上述基體和上述發熱層之層間,及上述基體之另一面側中之至少一方,藉由熱傳導率大於構成上述基體之材料的材料而被形成。 The heater described in claim 1 is in a state facing the object to be heated, sweeps one of the object to be heated and the main heater to heat the object to be heated, and the gist of the heater is that the heater includes: a substrate; heat generation The layer, which is provided on one side of the substrate; and the heat-dissipating layer, which is provided between the substrate and the heating layer, and at least one of the other side of the substrate, is formed by having a thermal conductivity greater than The material of the above-mentioned base body is formed.

請求項2所記載之加熱器係如請求項1所記載之加熱器中,其要旨係作為上述均熱層,具有直接積層於上述基體之直接積層型的均熱層。 The heater described in claim 2 is the heater described in claim 1, and its gist is as the above-mentioned soaking layer, which has a direct-layered type soaking layer directly laminated on the above-mentioned substrate.

請求項3所記載之加熱器係如請求項1或2所記載之加熱器中,其要旨係作為上述均熱層,具有使玻璃釉層介於與上述基體之間而被積層之間接積層型的均熱層。 The heater described in claim 3 is the heater described in claim 1 or 2, and its gist is as the above-mentioned heat-dissipating layer, which has a laminated type with a glass glaze layer interposed between the substrate and the laminated layer. The soaking layer.

如請求項4所記載之加熱器係如請求項1至3中之任一項所記載之加熱器中,其要旨係上述均熱層,具有包含切口,或在表背貫通的貫通孔的缺漏部,隔著上述缺漏部,與上述均熱層之一面側鄰接之層,和與上述均熱層之另一面側鄰接之層接合。 The heater described in claim 4 is the heater described in any one of claims 1 to 3, and the gist of the heater is the above-mentioned soaking layer, which has an omission including a cutout or a through hole penetrating through the front and back The part is a layer adjacent to one side of the heat equalizing layer and a layer adjacent to the other side of the heat equalizing layer via the missing portion.

請求項5所記載之加熱器係如請求項1至4中之任一項所記載之加熱器中,其要旨係上述均熱層具有複數之金屬粒子相連而被形成的金屬多孔部,和被配置在上述金屬多孔部之間隙的非金屬部。 The heater described in claim 5 is the heater described in any one of claims 1 to 4, and its gist is that the heat spreading layer has a metal porous portion formed by connecting a plurality of metal particles, and is covered The non-metal part arranged in the gap between the metal porous part.

請求項6所記載之加熱器係如請求項1至5中之任一項所記載之加熱器中,其要旨係上述發熱層具備被電性並聯連接的複數之電阻發熱單元,各上述電阻發熱單元具有電阻發熱配線,其係連結被配置成相對於上述掃掠方向呈略垂直的複數之橫配線部,和連接上述橫配線部間的縱配線部而被形成髮夾彎狀,在相鄰之上述電阻發熱單元彼此之間,具有不形成上述電阻發熱配線的非形成部。 The heater described in claim 6 is the heater described in any one of claims 1 to 5, the gist of which is that the heating layer includes a plurality of resistance heating units electrically connected in parallel, and each of the resistance heating The unit has resistance heating wiring, which connects a plurality of horizontal wiring portions arranged to be slightly perpendicular to the scanning direction, and a vertical wiring portion that connects the horizontal wiring portions to form a hairpin bend. The resistance heating units have a non-formed portion where the resistance heating wiring is not formed between each other.

請求項7所記載之定影裝置之要旨係具備如請求項1 至6中之任一項所記載之加熱器。 The gist of the fixing device described in claim 7 is that it has the following requirements: The heater described in any one of to 6.

請求項8所記載之畫像形成裝置之要旨係具備如請求項1至6中之任一項所記載之加熱器。 The gist of the image forming apparatus described in claim 8 is to include the heater described in any one of claims 1 to 6.

請求項9所記載之加熱裝置之要旨係具備如請求項1至6中之任一項所記載之加熱器。 The gist of the heating device described in claim 9 is to include the heater described in any one of claims 1 to 6.

若藉由本發明之加熱器,可以使成為因發熱層所引起之熱的起伏難以反映在加熱面,且均熱性優良的加熱器。 According to the heater of the present invention, it is possible to make the fluctuation of heat caused by the heating layer difficult to be reflected on the heating surface, and has excellent heat uniformity.

作為均熱層,在具有直接被積層在基體之直接積層型的均熱層之情況下,比起不具有該均熱層之情況下可以取得更優良的均熱性。 As the soaking layer, in the case of a direct-laminated type soaking layer that is directly laminated on the substrate, better heat soaking properties can be obtained than in the case of not having the soaking layer.

作為均熱層,在具有使玻璃釉層介於與基體之間而被積層之間接積層型的均熱層之情況下,比起不具有該均熱層之情況下可以取得更優良的均熱性。 As the soaking layer, when the glass glaze layer is interposed with the substrate and the laminated layer is connected between the laminated layers, it can achieve better heat soaking than the case without the soaking layer. .

1‧‧‧加熱器 1‧‧‧Heater

1a‧‧‧加熱器之一面 1a‧‧‧One side of heater

1b‧‧‧加熱器之另一面(加熱面) 1b‧‧‧The other side of the heater (heating surface)

11‧‧‧基體 11‧‧‧Matrix

11a‧‧‧基體之一面 11a‧‧‧One side of the substrate

11b‧‧‧基體之另一面 11b‧‧‧The other side of the substrate

12‧‧‧發熱層 12‧‧‧Heating layer

121‧‧‧電阻發熱配線 121‧‧‧Resistance heating wiring

122‧‧‧橫配線部 122‧‧‧Horizontal wiring part

123‧‧‧縱配線部 123‧‧‧Vertical wiring part

124‧‧‧電阻發熱單元 124‧‧‧Resistance heating unit

125‧‧‧非形成部 125‧‧‧Non-formed part

13‧‧‧均熱層 13‧‧‧Heat layer

131‧‧‧直接積層型之均熱層 131‧‧‧Direct stack type thermal layer

132‧‧‧間接積層型之均熱層 132‧‧‧Indirect laminated type thermal layer

133X‧‧‧缺漏部 133X‧‧‧Missing part

133H‧‧‧貫通孔 133H‧‧‧Through hole

133S‧‧‧切口 133S‧‧‧Cut

135a‧‧‧金屬多孔部 135a‧‧‧Metal porous part

135b‧‧‧非金屬部 135b‧‧‧Non-metallic Department

14、141、142、143‧‧‧絕緣層(玻璃釉層) 14,141,142,143‧‧‧Insulation layer (glass glaze layer)

2‧‧‧被加熱物 2‧‧‧Object to be heated

4‧‧‧畫像形成裝置 4‧‧‧Portrait forming device

41‧‧‧雷射掃描器 41‧‧‧Laser Scanner

42‧‧‧反射鏡 42‧‧‧Mirror

43‧‧‧帶電裝置 43‧‧‧Charged device

44‧‧‧感光滾筒 44‧‧‧Photosensitive drum

45‧‧‧顯像器 45‧‧‧Visualizer

46‧‧‧轉印滾筒 46‧‧‧Transfer roller

47‧‧‧轉印用輥 47‧‧‧Transfer Roller

5‧‧‧定影裝置(定影手段) 5‧‧‧Fixing device (fixing means)

51‧‧‧定影用輥 51‧‧‧Fixing roller

52‧‧‧加壓用輥 52‧‧‧Pressure roller

53‧‧‧加熱器保持器 53‧‧‧Heater holder

54‧‧‧加壓用輥 54‧‧‧Pressure roller

P‧‧‧記錄用媒體 P‧‧‧Recording media

D1‧‧‧掃掠方向 D 1 ‧‧‧Sweep direction

D2‧‧‧寬度方向 D 2 ‧‧‧Width direction

圖1為表示主加熱器之型態之一例(實施例1)的示意性之剖面圖。 Fig. 1 is a schematic cross-sectional view showing an example (embodiment 1) of the type of the main heater.

圖2為表示主加熱器之型態之另一例(實施例2)的示意性之剖面圖。 Fig. 2 is a schematic cross-sectional view showing another example (embodiment 2) of the type of the main heater.

圖3為表示主加熱器之型態之另一例(實施例3)的 示意性之剖面圖。 Figure 3 shows another example (embodiment 3) of the type of the main heater Schematic cross-sectional view.

圖4為表示主加熱器之型態之另一例(實施例4)的示意性之剖面圖。 Fig. 4 is a schematic cross-sectional view showing another example (Embodiment 4) of the type of the main heater.

圖5為表示主加熱器之型態之另一例(實施例7)的示意性之剖面圖。 Fig. 5 is a schematic cross-sectional view showing another example (Embodiment 7) of the type of the main heater.

圖6為表示主加熱器之型態之另一例(實施例8)的示意性之剖面圖。 Fig. 6 is a schematic cross-sectional view showing another example (Embodiment 8) of the type of the main heater.

圖7為表示主加熱器之型態之另一例的示意性之剖面圖。 Fig. 7 is a schematic cross-sectional view showing another example of the type of the main heater.

圖8為例示主加熱器中之發熱層和均熱層之相關的示意性之俯視圖。 Fig. 8 is a schematic plan view illustrating the relationship between the heat generating layer and the heat spreading layer in the main heater.

圖9為說明在主加熱器中之均熱層之一例的缺漏部的說明圖。 Fig. 9 is an explanatory diagram illustrating a missing portion of an example of a thermal layer in the main heater.

圖10為表示使用主加熱器之定影裝置之一例的概略斜視圖。 Fig. 10 is a schematic perspective view showing an example of a fixing device using a main heater.

圖11為表示使用主加熱器之定影裝置之另一例的概略斜視圖。 Fig. 11 is a schematic perspective view showing another example of a fixing device using a main heater.

圖12為表示使用主加熱器之畫像形成裝置之一例的概略圖。 Fig. 12 is a schematic view showing an example of an image forming apparatus using a main heater.

圖13為表示與實施例1至4有關之加熱器所造成的均熱效果的曲線圖。 Fig. 13 is a graph showing the heat equalization effect caused by the heaters related to Examples 1 to 4.

圖14為表示與實施例5至9有關之加熱器所造成的均熱效果的曲線圖。 Fig. 14 is a graph showing the heat equalization effect caused by the heaters related to Examples 5 to 9.

圖15為表示以往之加熱器(比較例1)之的示意性 之剖面圖。 Figure 15 is a schematic diagram showing a conventional heater (Comparative Example 1) 的sectional view.

圖16為示意性表示在均熱層中之金屬多孔部和非金屬部的說明圖。 Fig. 16 is an explanatory diagram schematically showing the metal porous part and the non-metal part in the heat-soaking layer.

圖17為表示均熱層之平面形狀的多種變化的說明圖。 Fig. 17 is an explanatory diagram showing various changes in the planar shape of the heat-soaking layer.

圖18為表示與實施例5至14有關之加熱器所造成的均熱效果的曲線圖。 Fig. 18 is a graph showing the heat equalization effect caused by the heaters related to Examples 5 to 14.

以下,一面參照圖面,一面詳細說明本發明。 Hereinafter, the present invention will be described in detail with reference to the drawings.

[1]加熱器 [1] Heater

主加熱器(1)係在與被加熱物面對面之狀態下,掃掠被加熱物及主加熱器(1)之中之至少一方而加熱被加熱物的加熱器。 The main heater (1) is a heater that sweeps at least one of the object to be heated and the main heater (1) while facing the object to be heated to heat the object.

並且,主加熱器(1)具備基體(11)、被配置在基體(11)之一面(11a)側的發熱層(12)、被配置基體(11)和發熱層(12)之層間,及基體之另一面(11b)側中之至少一方,且藉由熱傳導率大於構成基體之材料而被形成之均熱層(13)(參照圖1~圖4)。 In addition, the main heater (1) is provided with a base (11), a heat generating layer (12) arranged on one side (11a) of the base (11), a layer between the base (11) and the heat generating layer (12), and At least one of the sides of the other side (11b) of the base body has a thermal conductivity layer (13) formed by a material having a higher thermal conductivity than the material constituting the base body (refer to Figures 1 to 4).

(1)針對基體 (1) For the matrix

上述「基體(11)」為指示發熱層的基板。該基體11通常為薄板狀,將其表背之各主面,在本說明書中, 設為一面(11a)及另一面(11b)。即是,一面11a和另一面11b為互相相反的面。 The above-mentioned "base (11)" is a substrate indicating the heating layer. The base 11 is usually in the shape of a thin plate, and the main surfaces of the front and back are shown in this specification. Set one side (11a) and the other side (11b). That is, one side 11a and the other side 11b are opposite to each other.

構成基體11之材料不特別被限定,若在其表面上使發熱層發熱即可,不特別被限定。例如,可以利用金屬、陶瓷及該些複合材料等。在使用金屬等之導電性材料之情況下,基體可以在其導電性材料上設置絕緣層而構成。 The material constituting the base 11 is not particularly limited, and it is not particularly limited as long as the heat generating layer is heated on the surface thereof. For example, metals, ceramics, and these composite materials can be used. In the case of using a conductive material such as metal, the substrate may be formed by providing an insulating layer on the conductive material.

構成基體之材料中,作為金屬,可以舉出鋼等。就算在該中,在本發明中可以適合使用不鏽鋼。不鏽鋼之種類不特別被限定,以鐵氧體系不鏽鋼、肥粒鐵系不鏽鋼為佳。並且,就算在該些不鏽鋼之中,尤其以耐熱性及耐氧化性優良的品種為佳。例如,可舉出SUS430、SUS436、SUS444、SUS316L等。該些即使僅使用1種亦可,即使合併使用2種以上亦可。 Among the materials constituting the substrate, as metals, steel and the like can be cited. Even in this case, stainless steel can be suitably used in the present invention. The type of stainless steel is not particularly limited, but ferrite-based stainless steel and ferrite-based stainless steel are preferred. Moreover, even among these stainless steels, the ones with excellent heat resistance and oxidation resistance are particularly preferred. For example, SUS430, SUS436, SUS444, SUS316L, etc. can be mentioned. These may use only 1 type, and may use 2 or more types together.

並且,作為構成基體之金屬,可以使用鋁、鎂、銅及該些金屬之合金。該些即使僅使用1種亦可,即使合併使用2種以上亦可。其中,由於鋁、鎂及該些合金(鋁合金、鎂合金、Al-Mg合金等),其比重小,故可以採用該些,以謀求主加熱器之輕量化。再者,銅及其合金由於熱傳導性優良,故藉由採用該些可以謀求主加熱器之均熱性的提升。 In addition, as the metal constituting the base, aluminum, magnesium, copper, and alloys of these metals can be used. These may use only 1 type, and may use 2 or more types together. Among them, aluminum, magnesium, and these alloys (aluminum alloys, magnesium alloys, Al-Mg alloys, etc.) have a small specific gravity, so these can be used to reduce the weight of the main heater. Furthermore, copper and its alloys have excellent thermal conductivity, so by using these, the heat uniformity of the main heater can be improved.

構成基體之材料中,做為陶瓷,可舉出氧化鋁、氮化鋁、氧化鋯、二氧化矽、莫來石、尖晶石、堇青石、氮化矽等。該些即使僅使用1種亦可,即使合併使用2種以上亦可。該些之中,以氧化鋁及氮化鋁為佳。再 者,作為金屬和陶瓷之複合材料,可舉出SiC/C,或SiC/Al等。該些即使僅使用1種亦可,即使合併使用2種以上亦可。 Among the materials constituting the matrix, ceramics include alumina, aluminum nitride, zirconia, silica, mullite, spinel, cordierite, silicon nitride, and the like. These may use only 1 type, and may use 2 or more types together. Among these, alumina and aluminum nitride are preferred. again Furthermore, as a composite material of metal and ceramic, SiC/C or SiC/Al can be cited. These may use only 1 type, and may use 2 or more types together.

雖然基體11之尺寸或形狀不特別被限定,但是其厚度可以設為50μm以上700μm以下。在該範圍下,尤其可以取得省電力,同時快速上升特性。該厚度並且以100μm以上600μm以下為佳,以150μm以上500μm以下為較佳,以180μm以上450μm以下為更佳,200μm以上400μm以下為特佳。 Although the size or shape of the base 11 is not particularly limited, the thickness may be 50 μm or more and 700 μm or less. In this range, especially power saving and rapid rise characteristics can be achieved. The thickness is preferably 100 μm or more and 600 μm or less, preferably 150 μm or more and 500 μm or less, more preferably 180 μm or more and 450 μm or less, and particularly preferably 200 μm or more and 400 μm or less.

再者,基體之形狀係寬度方向(D2)之長度較掃掠方向(D1)之長度長之形狀為佳。依此,容易取得本發明之構成所造成的效果。具體而言,例如將基體之掃掠方向(D1)之長度設為LD1,將基體之寬度方向(D2)之長度設為LD2之情況下,長度之比(LD1/LD2)可以設為0.001以上0.25以下。該比並且以0.005以上0.2以下為佳,以0.01以上0.15以下為更佳。 Furthermore, the shape of the substrate is preferably a shape with a length in the width direction (D 2 ) being longer than the length in the sweep direction (D 1 ). According to this, it is easy to obtain the effect caused by the structure of the present invention. Specifically, for example, when the length in the sweep direction (D 1 ) of the substrate is set to L D1 and the length in the width direction (D 2 ) of the substrate is set to L D2 , the ratio of length (L D1 /L D2 ) Can be set to 0.001 or more and 0.25 or less. The ratio is preferably 0.005 or more and 0.2 or less, and more preferably 0.01 or more and 0.15 or less.

(2)針對發熱層 (2) For the heating layer

上述「發熱層(12)」係藉由通電發熱的層,被配置在基體11之一面11a側。發熱層12雖然通常僅被配置在基體11之一面11a側,但是亦可以設置在另一面11b側。 The above-mentioned "heat-generating layer (12)" is a layer that generates heat by energization, and is arranged on the side of one surface 11a of the base 11. Although the heat generating layer 12 is usually arranged only on the side of one surface 11a of the base 11, it may be arranged on the side of the other surface 11b.

該發熱層12之具體性形狀等不特別被限定。例如,即使為全面一樣之厚度的發熱片亦可,即使為具有被設為 一連串之特定圖案形狀的電阻發熱配線亦可。在本發明中,比起該些之上述型態的發熱層,以具備被電性並聯連接的複數之電阻發熱單元之電阻發熱配線為佳。 The specific shape and the like of the heat generating layer 12 are not particularly limited. For example, even if it is a heating sheet of the same thickness across the entire surface, even if it is set to A series of resistance heating wires with a specific pattern shape may also be used. In the present invention, compared to the heating layer of the above-mentioned type, a resistance heating wiring having a plurality of resistance heating units electrically connected in parallel is preferable.

更具體而言,各電阻發熱單元係以連結被配置成相對於掃掠方向(D1)呈略垂直的複數之橫配線部(122),和連接橫配線部(122)間的縱配線部(123)而被形成髮夾彎狀之電阻發熱配線(121)為佳(參照圖8)。 More specifically, each resistance heating unit connects a plurality of horizontal wiring portions (122) arranged to be slightly perpendicular to the sweep direction (D 1 ), and a vertical wiring portion connecting the horizontal wiring portions (122) (123) The resistance heating wiring (121) formed into a hairpin bend is preferable (refer to Fig. 8).

在被圖案製作成如此之髮夾彎狀之電阻發熱配線121之情況下,雖然即使橫配線部122較縱配線部123短亦可,但是以橫配線部122較縱配線部123長為佳。依此,容易取得藉由本發明之構成的效果。即是,在被電性並聯連接的複數之電阻發熱單元之情況下,有在各電阻發熱單元間產生熱的下降之情形,在可以均熱化上為有效用。同樣,即使在沿著掃掠方向(D1)而被配置之縱配線部123之情況下,該縱配線部123所造成的熱累積有變大之傾向,在可以均熱化上為有效用。 In the case of the resistance heating wiring 121 patterned in such a hairpin bend shape, although the horizontal wiring portion 122 may be shorter than the vertical wiring portion 123, the horizontal wiring portion 122 is preferably longer than the vertical wiring portion 123. According to this, it is easy to obtain the effect of the structure of the present invention. That is, in the case of a plurality of resistance heating units electrically connected in parallel, there is a case where the heat generation between the resistance heating units is reduced, which is effective in terms of enabling uniform heating. Similarly, even in the case of the vertical wiring portion 123 arranged along the sweeping direction (D 1 ), the heat accumulation caused by the vertical wiring portion 123 tends to increase, and it is effective in terms of heat equalization. .

從如此之觀點,在具有縱配線部123之情況下,縱配線123以對掃掠方向(D1)傾斜為佳。藉由傾斜,可以擴散1條之縱配線部123所造成的熱累積,可以取得均熱化作用。具體而言,當將被配置成相對於掃描方向(D1)呈0度之情況設為不傾斜之情況時,於傾斜之情況下,可以設為相對於掃掠方向(D1)呈-80度以上80度以下之範圍,以-60度以上60度以下為佳,以-50度以上50度以下為更佳。 From such a viewpoint, when the vertical wiring portion 123 is provided, the vertical wiring 123 is preferably inclined to the sweep direction (D 1 ). By tilting, the heat accumulation caused by one vertical wiring portion 123 can be diffused, and the heat equalization effect can be obtained. Specifically, when the case where it is arranged to be 0 degrees with respect to the scanning direction (D 1 ) is set as a non-inclined case, in the case of inclination, it can be set to be-with respect to the sweeping direction (D 1 ). The range from 80 degrees to 80 degrees is preferably from -60 degrees to 60 degrees, and more preferably from -50 degrees to 50 degrees.

在上述之各電阻發熱單元間,熱的下降係在具有被電性並聯連接的複數之電阻發熱單元124的電阻發熱配線中,於相鄰之電阻發熱單元124彼此之間存在不形成電阻發熱配線之非形成部125(尤其,相對於掃掠方向呈交叉之非形成部)之情況下為顯著。在具有如此之非形成部125之電阻發熱配線中,可以更有效果地取得具備均熱層13所造成的均熱作用。作為電阻發熱單元124(電阻發熱配線121)之型態,或非形成部125之型態,例示圖8(a)~(d)。 Among the above-mentioned resistance heating units, the decrease in heat is in the resistance heating wiring with a plurality of resistance heating units 124 electrically connected in parallel, and there is no resistance heating wiring between adjacent resistance heating units 124. The non-formed portion 125 (especially, the non-formed portion that crosses the sweep direction) is remarkable. In the resistance heating wiring having such a non-formed portion 125, the heat equalization effect caused by the provision of the heat equalization layer 13 can be more effectively achieved. As the type of the resistance heating unit 124 (resistance heating wiring 121), or the type of the non-formed portion 125, FIGS. 8(a) to (d) are illustrated.

再者,構成發熱層之電阻發熱材料若為藉由可以通電進行因應其電阻值之發熱的材料即可,其種類不特別被限定。例如,可以使用銀、銅、金、鉑、鈀、銠、鎢、鉬、錸(Re)及釕(Ru)等。該些即使僅使用1種亦可,即使合併使用2種以上亦可。在合併使用2種以上之情況下可以設為合金。更具體而言,可以利用銀-鈀合金、銀-鉑合金、鉑-銠合金、銀-釕、銀、銅及金等。 Furthermore, the resistance heating material constituting the heating layer may be a material that can generate heat according to its resistance value by energizing, and its type is not particularly limited. For example, silver, copper, gold, platinum, palladium, rhodium, tungsten, molybdenum, rhenium (Re), ruthenium (Ru), etc. can be used. These may use only 1 type, and may use 2 or more types together. When two or more types are used in combination, it can be an alloy. More specifically, silver-palladium alloy, silver-platinum alloy, platinum-rhodium alloy, silver-ruthenium, silver, copper, gold, etc. can be used.

再者,如上述般,在擁有具備被電性並聯連接的複數之電阻發熱單元之電阻發熱配線之情況下,構成各電阻發熱單元之各電阻發熱配線,雖然具有怎樣的電阻發熱特性亦可,但是以在各電阻發熱單元間,可以發揮自己溫度均衡作用(自己溫度補充作用)為佳。從觀點,構成電阻發熱單元之電阻發熱配線由具有正的電阻發熱係數之電阻發熱材料所形成為佳。具體而言,以在-200℃以上1000℃以下之溫度範圍下的電阻溫度係數為100ppm/℃以 上4400ppm/℃以下之電阻發熱材料為佳,還有,以300ppm/℃以上3700ppm/℃以下之電阻發熱材料為更佳,以500ppm/℃以上3000ppm/℃以下之電阻發熱材料為特佳。作為如此之電阻發熱材料,可舉出銀-鈀合金等之銀系合金。 Furthermore, as described above, in the case of having resistance heating wiring with a plurality of resistance heating units electrically connected in parallel, each resistance heating wiring constituting each resistance heating unit may have any resistance heating characteristics, However, it is better to have its own temperature equalization function (self-temperature supplement function) between the resistance heating units. From a viewpoint, the resistance heating wiring constituting the resistance heating unit is preferably formed of a resistance heating material having a positive resistance heating coefficient. Specifically, the temperature coefficient of resistance in the temperature range above -200℃ and below 1000℃ is 100ppm/℃ The resistance heating material below 4400ppm/℃ is better. In addition, the resistance heating material above 300ppm/℃ and below 3700ppm/℃ is more preferred, and the resistance heating material above 500ppm/℃ and below 3000ppm/℃ is especially preferred. Examples of such resistance heating materials include silver-based alloys such as silver-palladium alloys.

如此一來,使用具有正的電阻溫度係數的電阻發熱材料而形成的電阻發熱配線形成電阻發熱單元,於各個被並聯連接之情況下,該些複數之電阻發熱單元彼此達成自己溫度均衡之作用。即是,例如,在被夾於第1電阻發熱單元和第3電阻發熱單元,具有第2電阻發熱單元之情況下,當第2電阻發熱單元之溫度下降時,第2電阻發熱單元之電阻值下降。如此一來,流入該第2電阻發熱單元之電流增加,瓦數增加,第2電阻發熱單元可以動作成自律地補充溫度下降。 In this way, the resistance heating wire formed by the resistance heating material having a positive temperature coefficient of resistance forms the resistance heating unit, and when each is connected in parallel, the plurality of resistance heating units achieve their own temperature balance with each other. That is, for example, when the second resistance heating unit is sandwiched between the first resistance heating unit and the third resistance heating unit, when the temperature of the second resistance heating unit drops, the resistance value of the second resistance heating unit decline. In this way, the current flowing into the second resistance heating unit increases and the wattage increases, and the second resistance heating unit can operate to supplement the temperature drop autonomously.

各電阻發熱單元彼此係實質上成為相同之發熱量之情況下,若形成各電阻發熱單元實質上成為相同的電阻值即可。在此情況下,電阻發熱單元可以以相同的線長、相同的線寬及相同的厚度,以同樣的電阻發熱配線之圖案來形成。電阻發熱配線之厚度,例如從面積固有電阻之觀點來看,可以設為3μm以上40μm以下。 In the case where the resistance heating units have substantially the same amount of heat generation, the resistance heating units may be formed to have substantially the same resistance value. In this case, the resistance heating unit can be formed with the same line length, the same line width and the same thickness, and the same pattern of the resistance heating wiring. The thickness of the resistance heating wiring can be 3 μm or more and 40 μm or less from the viewpoint of area specific resistance, for example.

另外,實質上具有相同的發熱量係指各電阻發熱單元在相同的測量條件下,具有實質上相同的電阻溫度係數和電阻值之意。例如,可以將在電阻發熱單元間的電阻溫度係數之差異設為±20%以內,並且在電阻發熱單元間的電 阻值之差異設為±10%以內。 In addition, having substantially the same calorific value means that each resistance heating unit has substantially the same resistance temperature coefficient and resistance value under the same measurement conditions. For example, the difference in the resistance temperature coefficient between the resistance heating units can be set to within ±20%, and the electrical resistance between the resistance heating units The difference in resistance is set to within ±10%.

(3)針對絕緣層 (3) For the insulating layer

再者,如上述般,在使用導電性材料當作基體11之情況下,基體11和發熱層12之間需要絕緣。即是,可以具備絕緣層(14)。絕緣層14若可以發揮能夠絕緣從導電性材料所形成之基體11和發熱層12之絕緣性即可,不限定具體性的材料及形狀等。 Furthermore, as described above, when a conductive material is used as the base 11, insulation between the base 11 and the heating layer 12 is required. That is, an insulating layer (14) may be provided. As long as the insulating layer 14 can exhibit an insulating property that can insulate the base 11 and the heat generating layer 12 formed from a conductive material, the specific material, shape, and the like are not limited.

作為該絕緣層14,可以使用玻璃釉層或陶瓷層。在該些之中,從加工性之觀點來看以玻璃釉層為佳。構成玻璃釉層之玻璃,即使為非晶質亦可,即使為結晶化玻璃亦可,即使為半結晶化玻璃亦可。具體而言,可舉出SiO2-Al2O3-MO系玻璃。在此,MO為鹼土類金屬之氧化物(MgO、CaO、BaO、SrO等)。 As the insulating layer 14, a glass glaze layer or a ceramic layer can be used. Among these, the glass glaze layer is preferred from the viewpoint of workability. The glass constituting the glass glaze layer may be amorphous, crystallized glass, or semi-crystallized glass. Specifically, SiO 2 -Al 2 O 3 -MO-based glass can be mentioned. Here, MO is an oxide of alkaline earth metals (MgO, CaO, BaO, SrO, etc.).

再者,絕緣層14例如即使在基體11和發熱層12之間僅具備1層亦可,即使具備2層以上亦可。作為2層以上之情況,可舉出具備不同材質的絕緣層14之情況。 In addition, the insulating layer 14 may include only one layer between the base 11 and the heat generating layer 12, or may include two or more layers. As the case of two or more layers, the case where the insulating layer 14 of different materials is provided is mentioned.

並且,絕緣層14之厚度不特別被限定,例如可以設為10μm以上400μm以下。尤其,在基體11由導電性材料(不鏽鋼等)所形成之情況下,絕緣層14承擔基體11和發熱層12的絕緣。在此情況下,在被配置基體11和發熱層12之間的絕緣層14之厚度((介入存在兩層以上不同的材質之絕緣層14之情況下,該些絕緣層14之合計厚度)),以20μm以上300μm以下為佳,以30μm以上 200μm以下為更佳,以40μm以上100μm以下為特佳。 In addition, the thickness of the insulating layer 14 is not particularly limited, and may be, for example, 10 μm or more and 400 μm or less. In particular, when the base 11 is formed of a conductive material (stainless steel or the like), the insulating layer 14 is responsible for the insulation of the base 11 and the heating layer 12. In this case, the thickness of the insulating layer 14 between the base 11 and the heating layer 12 ((In the case where there are two or more insulating layers 14 of different materials, the total thickness of the insulating layers 14)) , Preferably 20μm or more and 300μm or less, and 30μm or more It is more preferably 200 μm or less, and particularly preferably 40 μm or more and 100 μm or less.

另外,例如,在圖1中,被配置在基體11和發熱層12之間的絕緣層14為絕緣層141。因此,上述厚度能夠適用於絕緣層141之厚度。 In addition, for example, in FIG. 1, the insulating layer 14 arranged between the base 11 and the heat generating layer 12 is the insulating layer 141. Therefore, the above-mentioned thickness can be applied to the thickness of the insulating layer 141.

另外,在不以絕緣為目的,當作玻璃釉層之使用中,玻璃釉層之厚度(不介插其他層而藉由燒結被一體化之玻璃釉層全體之厚度)可以設為例如1μm以上500μm以下。該厚度以2μm以上400μm以下為佳,以3μm以上300μm以下為更佳,以4μm以上200μm以下為特佳。具體而言,例如在圖1中,較發熱層12,被配置在加熱器之一面1a側的玻璃釉層142及143為不以絕緣為目的的玻璃釉層。再者,在圖1中,較均熱層13,被配置在加熱器之另一面1b側的玻璃釉層141、142及143為不以絕緣為目的的玻璃釉層。 In addition, when used as a glass glaze layer not for the purpose of insulation, the thickness of the glass glaze layer (the thickness of the entire glass glaze layer integrated by sintering without interposing other layers) can be set to, for example, 1 μm or more Below 500μm. The thickness is preferably 2 μm or more and 400 μm or less, more preferably 3 μm or more and 300 μm or less, and particularly preferably 4 μm or more and 200 μm or less. Specifically, for example, in FIG. 1, the glass glaze layers 142 and 143 arranged on the side of the heater surface 1a compared to the heat generating layer 12 are glass glaze layers not for the purpose of insulation. In addition, in FIG. 1, the glass glaze layers 141, 142, and 143 arranged on the other side 1b of the heater are glass glaze layers that are not used for insulation.

(4)針對均熱層 (4) For the soaking layer

上述「均熱層(13)」係被配置在基體11和發熱層12之層間,及基體之另一面11b側中之至少一方的層,藉由熱傳導率大於構成基體11之材料的材料所形成的層。 The above-mentioned "heating layer (13)" is a layer arranged between the base 11 and the heating layer 12, and at least one of the other surface 11b side of the base, and is formed of a material having a higher thermal conductivity than the material constituting the base 11的层。 The layer.

該均熱層13具有使在發熱層12形成之熱的起伏均勻的作用。即是,在具有加熱溫度之下降之情況下,可以使升溫至與其周圍同等之溫度,於具有加熱溫度之突出之情況下,降溫至與其周圍同等之溫度,可以使熱的起伏均 勻。尤其,發熱層12係在使用具有特定圖案形狀之電阻發熱配線而形成之情況下,適合用以使因該圖案形狀而產生之熱的起伏均勻。即是,藉由具有圖案形狀,產生存在電阻發熱配線之部位,和不存在之部位,形成存在電阻發熱配置之部位的溫度比不存在的部位高這樣之熱的起伏。如此之熱的起伏藉由通過均熱層13均勻,可以縮小溫度差。從如此之觀點,設置均熱層13,作為發熱層12,在具備被電性並聯連接的複數之電阻發熱單元121之加熱器中具有效果。 The heat equalizing layer 13 has a function of making the fluctuations of the heat formed in the heat generating layer 12 uniform. That is, in the case of a drop in the heating temperature, the temperature can be increased to the same temperature as the surroundings, and in the case of a protrusion of the heating temperature, the temperature can be decreased to the same temperature as the surroundings, so that the heat fluctuations can be evened. uniform. In particular, when the heating layer 12 is formed by using resistance heating wiring having a specific pattern shape, it is suitable for making the fluctuations of the heat generated by the pattern shape uniform. That is, by having a pattern shape, a part where the resistance heating wiring is present and a part where there is no resistance generate heat fluctuations such that the temperature of the part where the resistance heating arrangement is located is higher than that of the non-existing part. Such heat fluctuations can be made uniform by passing through the heat-soaking layer 13, so that the temperature difference can be reduced. From such a point of view, the provision of the uniform heating layer 13 as the heating layer 12 has an effect in a heater provided with a plurality of resistance heating units 121 electrically connected in parallel.

因此,均熱層13至少被配置在基體11和發熱層12之層間,及基體11之另一面11b側(成為與被加熱物之表面側)中之至少一方。即是,被配置在較發熱層12,接近加熱面(成為與被加熱物接合之表面)之側。另外,當然亦可以合併配置在較發熱層12,接近於非加熱面(不與被加熱物相接之表面)之側。 Therefore, the heat equalizing layer 13 is arranged at least between the base 11 and the heating layer 12, and at least one of the other surface 11b side of the base 11 (to be the surface side with the object to be heated). That is, it is arranged on the side closer to the heating surface (the surface to be joined to the object to be heated) than the heat generating layer 12. In addition, of course, it can also be combined and arranged on the side of the heating layer 12, which is close to the non-heating surface (the surface not in contact with the object to be heated).

均熱層13若藉由熱傳導率大於構成基體11之材料的材料而形成即可。具體而言,例如在將熱傳導率為50W/mK以下之低熱傳導性的不鏽鋼設為基體11之情況下,以將熱傳導率為100W/mK以上之材料當作均熱層13之材料使用為佳。具體而言,可以將銀、銅、金、鋁、鎢、鎳等,或包含該些金屬中之至少1種的合金當作熱傳導金屬使用。該些熱傳導性金屬即使僅使用1種亦可,即使合併使用2種以上亦可。即使在該些之中,以銀、銅、鋁及包含該些之中之至少1種的合金為佳。 The heat equalizing layer 13 may be formed of a material having a higher thermal conductivity than the material constituting the base 11. Specifically, for example, in the case where a stainless steel with a thermal conductivity of less than 50W/mK and low thermal conductivity is used as the base 11, it is better to use a material with a thermal conductivity of 100W/mK or higher as the material of the soaking layer 13. . Specifically, silver, copper, gold, aluminum, tungsten, nickel, etc., or an alloy containing at least one of these metals can be used as the thermally conductive metal. These thermally conductive metals may use only one type, or may use two or more types in combination. Even among these, silver, copper, aluminum, and alloys containing at least one of these are preferable.

再者,例如,即使在將熱傳導率為50W/mK以下之低熱傳導性的鋁等之陶瓷設為基體11之情況下,以將熱傳導率為100W/mK以上之材料當作均熱層13之材料使用為佳。具體而言,除了可以利用氮化鋁等之熱傳導性陶瓷之外,可以使用上述之各種熱傳導性金屬。 Furthermore, for example, even when ceramics such as aluminum with a thermal conductivity of less than 50 W/mK and low thermal conductivity are used as the substrate 11, a material with a thermal conductivity of 100 W/mK or higher is used as the heat spreading layer 13. The use of materials is better. Specifically, in addition to thermally conductive ceramics such as aluminum nitride, the above-mentioned various thermally conductive metals can be used.

均熱層13即使形成怎樣亦可。具體而言,作為鍍敷層(無電解鍍敷層、電場鍍敷層、該些的複合鍍敷層等),可以設置均熱層13。再者,在印刷包含熱傳導性材料之糊料之後,利用燒結其印刷塗膜,可以形成均熱層13。例如,作為熱傳導性材料,可以利用包含金屬粒子(金屬粉末)之印刷糊料。在此情況下,印刷糊料除了金屬粒子以外,亦可以包含用以糊料化之載劑,或作為相同質地之玻璃成份或陶瓷成份。 The uniform heat layer 13 may be formed in any way. Specifically, as a plating layer (an electroless plating layer, an electric field plating layer, these composite plating layers, etc.), a soaking layer 13 may be provided. Furthermore, after printing the paste containing the thermally conductive material, the printing coating film is sintered to form the soaking layer 13. For example, as a thermally conductive material, a printing paste containing metal particles (metal powder) can be used. In this case, in addition to metal particles, the printing paste may also contain a carrier for paste, or a glass component or ceramic component of the same texture.

燒結如此之印刷糊料而取得的均熱層13,例如能得到具有圖16(a)及圖16(b)所示的複數之金屬粒子相連而被形成的金屬多孔部135a,和被配置在金屬多孔部135a之間隙的非金屬部135b之均熱層13。再者,在圖16中,圖16(a)表示複數之金屬粒子互相接合而相連的金屬多孔部135a,圖16(b)表示複數之金屬粒子彼此藉由燒結互相融合而相連的金屬多孔部135a。在本發明之加熱器1中,雖然均熱層13即使呈圖16(a)之型態亦可,即使呈圖16(b)之型態亦可,即使為複合性地具有該些雙方之型態亦可,但是以具有圖16(b)之型態為佳。即是,均熱層13以具有複數之金屬粒 子互相融合而相連的金屬多孔部135a為佳。在該型態中,可以取得更高的熱傳導。 The soaking layer 13 obtained by sintering such a printing paste can obtain, for example, a metal porous portion 135a formed by connecting a plurality of metal particles as shown in FIGS. 16(a) and 16(b), and is arranged in The heat spreading layer 13 of the non-metal part 135b in the gap of the metal porous part 135a. Furthermore, in FIG. 16, FIG. 16(a) shows a porous metal part 135a in which a plurality of metal particles are joined to each other, and FIG. 16(b) shows a porous metal part 135a in which a plurality of metal particles are fused to each other by sintering. 135a. In the heater 1 of the present invention, although the heat-soaking layer 13 may be in the form of FIG. 16(a), it may be in the form of FIG. 16(b), even if it is a composite having both of these The type is also possible, but it is better to have the type shown in FIG. 16(b). That is, the thermal layer 13 has a plurality of metal particles Preferably, the porous metal part 135a is connected by fusion with each other. In this type, higher heat transfer can be achieved.

另外,非金屬部135b係藉由玻璃成份或陶瓷成份(包含陶瓷及玻璃陶瓷)而被形成。即是,在本發明之加熱器1中之均熱層13具有非金屬部135b之情況下,非金屬部135b可以僅由玻璃,或是玻璃及陶瓷所構成。 In addition, the non-metal portion 135b is formed of a glass component or a ceramic component (including ceramics and glass ceramics). That is, in the case where the thermal layer 13 in the heater 1 of the present invention has the non-metallic portion 135b, the non-metallic portion 135b may be composed of only glass, or glass and ceramics.

在具有金屬多孔部135a及非金屬部135b之情況,將該些合計設為100質量%之情況(尤其,金屬多孔部135a為銀,非金屬部135b為玻璃之情況)下,非金屬部135b之比率不特別被限定,但是以0.1質量%以上為佳。藉由具有如此之非金屬部135b,可以使均熱層13介入存在,而一面提升其一面側之鄰接層,和另一面側之鄰接層的接合性,一面取得優良的均熱性。再者,非金屬部135b通常設為20質量%以下為佳。該比率並且以0.2質量%以上15質量%以下為佳,以0.5質量%以上12質量%以下為更佳。 In the case of the porous metal part 135a and the non-metal part 135b, the total of these is 100% by mass (especially, when the porous metal part 135a is silver and the non-metal part 135b is glass), the non-metal part 135b The ratio is not particularly limited, but it is preferably 0.1% by mass or more. By having such a non-metal portion 135b, the heat spreading layer 13 can be intervened, and the adhesion between the adjacent layer on one side and the adjacent layer on the other side can be improved, and excellent heat uniformity can be obtained. In addition, the non-metal portion 135b is usually preferably 20% by mass or less. The ratio is preferably 0.2% by mass or more and 15% by mass or less, and more preferably 0.5% by mass or more and 12% by mass or less.

均熱層13如上述般,若配置在基體11和發熱層12之層間,及基體之另一面11b側之中之至少一方即可。因此,作為均熱層13,例如可出下述(1)之直接積層型之均熱層(131),和下述(2)之間接積層型之均熱層(132)的兩個型態。 As described above, the heat equalizing layer 13 may be disposed at least one of the layer between the base 11 and the heating layer 12 and the other surface 11b side of the base. Therefore, as the heat isolating layer 13, for example, there can be two types of the following (1) direct build-up type heating layer (131), and the following (2) inter-layer build-up type heating layer (132). .

(1)直接積層型之均熱層131為直接被積層於基體11的均熱層13。該直接積層型之均熱層131不使絕緣層14等之其他層介於基體11和均熱層13之層間而被積 層。 (1) The direct build-up type thermal uniform layer 131 is the thermal uniform layer 13 directly laminated on the base 11. The direct build-up type thermal layer 131 does not allow other layers such as the insulating layer 14 to be interposed between the substrate 11 and the thermal layer 13 and is stacked Floor.

(2)間接積層型之均熱層132係使其他層介於基體11和均熱層13之間而被積層。作為其他層,具體而言,可舉出玻璃釉層(絕緣層14)。 (2) The indirect laminated type thermal layer 132 is laminated with other layers between the base 11 and the thermal layer 13. As another layer, specifically, a glass glaze layer (insulating layer 14) is mentioned.

該些直接積層型之均熱層131,和間接積層型之均熱層132,在一個加熱器中,即使僅具有其中之一方亦可,即使具備該些之雙方亦可。 The direct build-up type heat spreading layer 131 and the indirect build-up type heat spreading layer 132 may have only one of them in one heater, even if they have both of them.

作為直接積層型之均熱層131之情況,可舉出僅在基體11之一面(11a)具備的型態,僅在基體11之另一面(11b)之型態,在基體11之一面(11a)及另一面(11b)之雙面具備的型態。在該些之中,以僅在基體11之一面(11a)具備的型態,或在基體11之一面(11a)及另一面(11b)之雙面具備的型態為佳。 As the case of the direct build-up type thermal layer 131, there may be a type provided only on one side (11a) of the base 11, a type provided only on the other side (11b) of the base 11, and one side (11a) of the base 11 ) And the other side (11b) with both sides. Among these, a type provided only on one side (11a) of the base 11, or a type provided on both sides of one side (11a) and the other side (11b) of the base 11 is preferable.

雖然該直接積層型之均熱層131之層厚不特別被限定,但是在將均熱層(13、131)之厚度設為D1,將基體11之厚度設為D2之情況下,D1和D2之比D1/D2以0.6以下為佳。該比並且以0.001以上0.6以下為更佳,以0.005以上0.57以下為更佳,以0.008以上0.53以下為又更佳,以0.01以上0.50以下為特佳。更具體而言,直接積層型之均熱層131之層厚以1μm以上250μm以下為佳,以1μm以上150μm以下為更佳,以2μm以上120μm以下為更佳,以3μm以上60μm以下為又更佳,以3μm以上40μm以下為特佳,以3μm以上30μm以下為更特佳。 Although the layer thickness of the direct build-up type thermal layer 131 is not particularly limited, when the thickness of the thermal layer (13, 131) is set to D 1 and the thickness of the substrate 11 is set to D 2 , D D 1 and D 2 ratio of 1 / D 2 preferably 0.6 or less. The ratio is more preferably 0.001 or more and 0.6 or less, more preferably 0.005 or more and 0.57 or less, more preferably 0.008 or more and 0.53 or less, and particularly preferably 0.01 or more and 0.50 or less. More specifically, the thickness of the direct build-up type thermal layer 131 is preferably 1 μm or more and 250 μm or less, more preferably 1 μm or more and 150 μm or less, more preferably 2 μm or more and 120 μm or less, and more preferably 3 μm or more and 60 μm or less. Preferably, it is particularly preferably 3 μm or more and 40 μm or less, and more preferably 3 μm or more and 30 μm or less.

再者,上述中,在兩面具備的型態中,即使各直接積 層型之均熱層131分別為相同的厚度亦可,不同的厚度亦可。並且,即使為相同的形狀(圖案形狀等)亦可,即使為不同的形狀亦可。 Furthermore, in the above, in the two-sided type, even if each direct product The layer-type heat-dissipating layers 131 may have the same thickness, or different thicknesses. In addition, it may be the same shape (pattern shape, etc.), or may be a different shape.

另外,作為間接積層型之均熱層132之情況,可舉出僅在基體11之一面(11a)側具備的型態,僅在基體11之另一面(11b)側之型態,在基體11之一面(11a)側及另一面(11b)之雙面側具備的型態。在該些之中,以僅在基體11之一面(11a)具備的型態為佳。間接積層型之均熱層132比起直接積層型之均熱層131,設置在基板11之另一面(11b)所造成的對加熱器1全體的均熱效果低之故。 In addition, as the case of the indirect laminated type thermal layer 132, a type provided only on one side (11a) of the base 11, a type provided only on the other side (11b) of the base 11, and a type provided on the other side (11b) of the base 11 can be mentioned. A type with one side (11a) side and the other side (11b) on both sides. Among these, a type provided only on one surface (11a) of the base 11 is preferable. The indirect build-up type heat spreading layer 132 is provided on the other side (11b) of the substrate 11, resulting in a lower heat spreading effect on the entire heater 1 than the direct build-up type heat spreading layer 131.

雖然該間接積層型之均熱層132之層厚不特別被限定,但是在將均熱層(13、132)之厚度設為D1,將基體11之厚度設為D2之情況下,D1和D2之比D1/D2以0.6以下為佳。該比並且以0.001以上0.6以下為更佳,以0.005以上0.57以下為更佳,以0.008以上0.53以下為又更佳,以0.01以上0.50以下為特佳。更具體而言,間接積層型之均熱層132之層厚以1μm以上250μm以下為佳,以1μm以上150μm以下為更佳,以2μm以上120μm以下為更佳,以3μm以上60μm以下為又更佳,以3μm以上40μm以下為特佳,以3μm以上30μm以下為更特佳。 Although the layer thickness of the indirect laminated type thermal layer 132 is not particularly limited, when the thickness of the thermal layer (13, 132) is set to D 1 and the thickness of the substrate 11 is set to D 2 , D D 1 and D 2 ratio of 1 / D 2 preferably 0.6 or less. The ratio is more preferably 0.001 or more and 0.6 or less, more preferably 0.005 or more and 0.57 or less, more preferably 0.008 or more and 0.53 or less, and particularly preferably 0.01 or more and 0.50 or less. More specifically, the thickness of the indirect layered heat-soaking layer 132 is preferably 1 μm or more and 250 μm or less, more preferably 1 μm or more and 150 μm or less, more preferably 2 μm or more and 120 μm or less, and more preferably 3 μm or more and 60 μm or less. Preferably, it is particularly preferably 3 μm or more and 40 μm or less, and more preferably 3 μm or more and 30 μm or less.

再者,間接積層型之均熱層132即使在一個加熱器1中具備任何層亦可。即是,即使具備1層亦可,即使具備2層以上亦可。通常,雖然藉由具備更多的層 數,能取得更高的均熱性,但是間接積層型之均熱層132之層數的過度增加,從加熱器1之耐熱衝擊,或翹曲防止之觀點來看為不理想。因此,以1層以上10層以下為佳,以1層以上5層以下為更佳,以1層以上3層以下為特佳。在具備2層以上的間接積層型之均熱層132之情況下,各個的均熱層13即使為相同厚度亦可,即使為不同的厚度亦可。並且,即使為相同的形狀(圖案形狀等)亦可,即使為不同的形狀亦可。 In addition, the indirect laminated type thermal uniform layer 132 may include any layer in one heater 1. That is, even if it has one layer, it may have two or more layers. Usually, although by having more layers However, an excessive increase in the number of layers of the indirect laminated type of the heat-soaking layer 132 is undesirable from the viewpoint of the thermal shock resistance of the heater 1 or the prevention of warpage. Therefore, it is preferable to have 1 layer or more and 10 layers or less, more preferably 1 layer or more and 5 layers or less, and particularly preferably 1 layer or more and 3 layers or less. In the case of providing two or more layers of indirect build-up-type soaking layers 132, each of the soaking layers 13 may have the same thickness or different thicknesses. In addition, it may be the same shape (pattern shape, etc.), or may be a different shape.

尤其,在基體11為厚度100μm以上600μm以下之不鏽鋼基體(不鏽鋼製之基體)之情況下,均熱層13藉由將其合計厚度抑制成60μm以下(還有,30μm以下),可以有效果地防止加熱器全體之翹曲,同時可以以均熱作用優良的範圍之層厚予以利用。 In particular, when the base 11 is a stainless steel base (a base made of stainless steel) with a thickness of 100 μm or more and 600 μm or less, the total thickness of the soaking layer 13 can be effectively suppressed to 60 μm or less (and 30 μm or less). It prevents warpage of the heater as a whole, and can be used with a layer thickness within a range of excellent heat soaking effect.

另外,從均熱化之觀點來看,均熱層13之厚度較厚之一方容易取得效果,例如,在基體11之另一面11b側,設置有合計厚度超過30μm之均熱層13之情況下,在基體11之一面11a側(尤其,基體11和發熱層12之層間為佳),將相同的厚度之均熱層13設置成對稱配置而可以防止加熱器全體之翹曲。並且,在難以設置相同的厚度之均熱層13之情況下,相對於被設置在基體11之另一面11b側之均熱層13之合計厚度,將成為25%以上95%以下之厚度比率的均熱層13,設置在基體11之一面11a側(尤其,以基體11和發熱層12之層間為佳),依此可以充分抑制加熱器全體之翹曲。上述厚度比率係以 30%以上92%以下為佳,以35%以上88%以下為更佳,以40%以上85%以下為特佳(參照圖7)。 In addition, from the viewpoint of soaking, the thicker thickness of the soaking layer 13 is easier to achieve the effect. For example, when the soaking layer 13 with a total thickness of more than 30 μm is provided on the other side 11b of the base 11 On the side of one surface 11a of the base 11 (especially, the interlayer between the base 11 and the heating layer 12 is preferable), the heat-soaking layer 13 of the same thickness is arranged in a symmetrical configuration to prevent the entire heater from warping. In addition, when it is difficult to provide the same thickness of the heat spreading layer 13, relative to the total thickness of the heat spreading layer 13 provided on the other surface 11b side of the base 11, the thickness ratio will be 25% or more and 95% or less. The heat equalizing layer 13 is provided on the side of one surface 11a of the base 11 (especially, the interlayer between the base 11 and the heating layer 12 is preferred), so that the warpage of the entire heater can be sufficiently suppressed. The above thickness ratio is based on 30% or more and 92% or less is preferable, 35% or more and 88% or less is more preferable, and 40% or more and 85% or less is particularly preferable (refer to Figure 7).

另外,均熱層13之厚度較厚之一方容易取得效果,但是有即使過度增大厚度,相對於厚度之增加部分,所取得之均熱作用亦變小之傾向。因此,例如相對於基體11為厚度100μm以上600μm以下之不鏽鋼基體,均熱層13之合計層厚如上述般以250μm以下為佳。 In addition, if the thickness of the soaking layer 13 is thicker, it is easier to obtain the effect, but even if the thickness is excessively increased, the soaking effect obtained by the increased thickness tends to be smaller. Therefore, for example, with respect to a stainless steel substrate having a thickness of 100 μm or more and 600 μm or less, the total layer thickness of the heat-soaking layer 13 is preferably 250 μm or less as described above.

在主加熱器1中,當比較直接積層型之均熱層131,和間接積層型之均熱層132時,有表示直接積層型之均熱層131之一方顯示較高的均熱性之傾向。因此,在本發明之加熱器1中,以具備有直接積層型之均熱層131為佳。 In the main heater 1, when comparing the direct stacking type thermal layer 131 with the indirect stacking thermal layer 132, there is a tendency that one of the direct stacking type thermal layer 131 exhibits higher thermal uniformity. Therefore, in the heater 1 of the present invention, it is preferable to have the direct-layered type thermal uniform layer 131.

再者,在主加熱器1中,具備直接積層型之均熱層131,還有具備間接積層型之均熱層132之情況下,相對於直接積層型之均熱層131,間接積層型之均熱層132以配置在更接近於加熱面之側為佳。 Furthermore, in the case where the main heater 1 is provided with the direct-layered heat-soaking layer 131 and the indirect-layered heat-soaking layer 132, compared to the direct-layered heat-soaking layer 131, the indirect-layered heat The heat-soaking layer 132 is preferably arranged on the side closer to the heating surface.

尤其,在以導電性材料設為基體材料之加熱器1(例如,不鏽鋼基板)中,需要絕緣基體11和發熱層12,設置絕緣層14。絕緣層14可以藉由玻璃釉形成。而且,在設置如此之絕緣層14之情況下,因相對於基體11,設置成在表背成為均等之配置及厚度,依此防止加熱器1全體之翹曲,故即使在基體11和發熱層12之層間以外,亦不以絕緣為目的,以防止翹曲之目的,設置絕緣層14之情形為多。如此之絕緣層14通常係熱傳導性低的材 料,例如玻璃釉之熱傳導率為5W/mK以下。因此,在主加熱器1中,設置間接積層型之均熱層132這樣係成為在熱傳導性低之絕緣層14(即使非以絕緣為目的之層亦可)之層間設置均熱層13,從取得均熱效果之觀點來看為佳。 In particular, in the heater 1 (for example, a stainless steel substrate) using a conductive material as a base material, an insulating base 11 and a heating layer 12 are required, and an insulating layer 14 is provided. The insulating layer 14 may be formed by glass glaze. Moreover, when such an insulating layer 14 is provided, it is provided with the same arrangement and thickness on the front and back of the base 11 to prevent warpage of the heater 1 as a whole, so that even the base 11 and the heat generating layer In addition to the interlayer 12, insulation is not used as the purpose, and the insulating layer 14 is often provided for the purpose of preventing warpage. Such an insulating layer 14 is usually a material with low thermal conductivity Materials, such as glass glaze, have a thermal conductivity of 5W/mK or less. Therefore, in the main heater 1, the indirect build-up type heat spreading layer 132 is provided so that the heat spreading layer 13 is provided between the insulating layers 14 with low thermal conductivity (even if the layer is not intended for insulation). It is preferable from the viewpoint of obtaining a soaking effect.

並且,雖然如上述般,具有在間接積層型之均熱層132,藉由玻璃釉層(絕緣層14)覆蓋表面及背面,以作為均熱層13的型態,但是在該情況下,可以設為在間接積層型之均熱層132設置缺漏部(133X)(參照圖8(a)及圖9),使經由該缺漏部133X,覆蓋間接積層型之均熱層132之表面的玻璃釉層(絕緣層14),和覆蓋間接積層型之均熱層132之背面的玻璃釉層(絕緣層14)融合之型態。藉由如此地使玻璃釉層在表背融合,可以提升在具備加熱器1之間接積層型之均熱層132之層間的接合性,同時可以提升加熱器1之耐熱衝擊性及翹曲防止性。 In addition, although as described above, there is an indirect build-up type of soaking layer 132, covered with a glass glaze layer (insulating layer 14) to cover the surface and back as the type of soaking layer 13, but in this case, you can It is assumed that a missing portion (133X) is provided on the indirect laminated type thermal layer 132 (refer to Figures 8(a) and 9), so that the glass glaze covers the surface of the indirect laminated type thermal layer 132 through the missing portion 133X Layer (insulating layer 14), and the glass glaze layer (insulating layer 14) covering the back surface of the indirect layered thermal soaking layer 132. By fusing the glass glaze layer on the front and back in this way, it is possible to improve the bondability between the layers with the laminated heat-soaking layer 132 between the heaters 1, and at the same time, the heat shock resistance and warpage prevention of the heater 1 can be improved. .

作為上述缺漏部133X,可舉出切口(133S),或在貫通表背之貫通孔(133H)(參照圖8(a)及圖9)。該些即使僅具有一方亦可,即使具有雙方亦可。再者,在具備有缺漏部133X之情況下,以該缺漏部133X被配置在熱起伏較小之處為佳。即是,因藉由設置缺漏部133X,該部位之均熱性比其他部位下降,故該處以配置在發熱層12所造成的溫度差小之位置為佳。 Examples of the missing portion 133X include a cutout (133S) or a through hole (133H) penetrating the front and back (see Fig. 8(a) and Fig. 9). These may have only one side, and may have both sides. Furthermore, in the case where the missing portion 133X is provided, it is preferable that the missing portion 133X is arranged in a place where the thermal fluctuation is small. That is, by providing the missing part 133X, the heat uniformity of this part is lower than that of other parts, so it is better to arrange the part where the temperature difference caused by the heating layer 12 is small.

更具體而言,在具備發熱層12被電性並聯連接的複 數之電阻發熱單元之情況下,以在各電阻發熱單元間配置缺漏部133X為佳(參照圖8(a))。再者,在電阻發熱單元具有被配置成相對掃掠方向(D1)呈略垂直的複數之橫配線部,和連接橫配線部間的縱配線部,連結橫配線部122及縱配線部123而被形成髮夾彎狀之電阻發熱配線121之情況下,以避開對應的縱配線部123而配置缺漏部133X為佳。即是,在俯視觀看加熱器1之情況下,以配置成縱配線部123之投影像,和缺漏部133X之投影像不重疊為佳(參照圖8(a))。並且,若換言之,以縱配線部123之投影像與均熱層13之實在部重疊為佳。 More specifically, when a plurality of resistance heating units in which the heating layer 12 is electrically connected in parallel is provided, it is preferable to arrange the missing portion 133X between the resistance heating units (see FIG. 8(a)). Furthermore, the resistance heating unit has a plurality of horizontal wiring portions arranged to be slightly perpendicular to the sweep direction (D 1 ), and vertical wiring portions connecting the horizontal wiring portions, connecting the horizontal wiring portion 122 and the vertical wiring portion 123 In the case of the resistance heating wiring 121 formed in a hairpin bend shape, it is preferable to arrange the missing portion 133X to avoid the corresponding vertical wiring portion 123. That is, when viewing the heater 1 from the top, it is preferable that the projection image of the vertical wiring portion 123 and the projection image of the missing portion 133X do not overlap (see FIG. 8(a)). Moreover, in other words, it is better that the projection image of the vertical wiring portion 123 overlaps the actual portion of the heat uniform layer 13.

再者,當然與具有上述般之缺漏部133X(包含切口133S及貫通孔133H)之均熱層13,為直接積層型之均熱層131,或間接積層型之均熱層132並無關係,即使哪一個的均熱層13均有效果。即是,在均熱層13具有缺漏部133之情況下,隔著缺口部133接合與均熱層之一面側鄰接之層,和與均熱層之另一面側鄰接之層,可以取得更高耐久性的加熱器1。具體而言,在間接積層型之均熱層132之情況下,如上述般,與均熱層之一面側鄰接之層,還有與均熱層之另一面側鄰接之層,皆為玻璃釉層,該些玻璃釉層彼此被接合。再者,為直接積層型之均熱層131之情況,且基板11為不鏽鋼基板之情況下,與均熱層之一面側鄰接之層為不鏽鋼基板,可以將與均熱層之另一面側鄰接之層設為玻璃釉層。在此情況下,可以取得不鏽鋼基板和玻璃釉層之緊固的接合。 Furthermore, of course, it has nothing to do with the direct build-up type heating layer 131 or the indirect build-up type heating layer 132, which has the above-mentioned missing portion 133X (including the cutout 133S and the through hole 133H). Even any heat spreading layer 13 has an effect. That is, in the case where the soaking layer 13 has the missing portion 133, the layer adjacent to one side of the soaking layer and the layer adjacent to the other side of the soaking layer can be joined via the notch portion 133, so that higher Durable heater 1. Specifically, in the case of the indirect laminated type thermal layer 132, as described above, the layer adjacent to one side of the thermal layer and the layer adjacent to the other side of the thermal layer are all glass glazes. Layer, the glass glaze layers are joined to each other. Furthermore, in the case of the direct layered heat-distribution layer 131, and the substrate 11 is a stainless steel substrate, the layer adjacent to one side of the heat-distributing layer is a stainless steel substrate, and it can be adjacent to the other side of the heat-dissipating layer The layer is set as a glass glaze layer. In this case, a tight joint between the stainless steel substrate and the glass glaze layer can be achieved.

在主加熱器1中,不管均熱層13係直接積層型的均熱層131,或間接積層型之均熱層132,可以具有圖案製作(即是,具有缺漏部133X之平面形狀)。具體而言,均熱層13可以以非連續的層來配置。例如,在特定之層間中,僅在熱起伏大之處配置補片(均熱層13之一部分),熱起伏小之處設為缺漏部133X(參照圖8(a))。並且,在特定之層間,可以增厚熱起伏大之處的均熱層13之厚度,將熱起伏小之處的均熱層13之厚度形成相對性較薄。 In the main heater 1, regardless of whether the soaking layer 13 is a direct stacking type soaking layer 131 or an indirect stacking type soaking layer 132, it can be patterned (that is, a flat shape with a missing portion 133X). Specifically, the heat isolating layer 13 may be arranged as a discontinuous layer. For example, in a specific interlayer, the patch (a part of the thermal layer 13) is arranged only where the thermal fluctuation is large, and the place with the small thermal fluctuation is the missing portion 133X (refer to FIG. 8(a)). Moreover, between specific layers, the thickness of the soaking layer 13 where the thermal fluctuation is large can be increased, and the thickness of the soaking layer 13 where the thermal fluctuation is small can be made relatively thin.

並且,構成具有缺漏部133X之俯視形狀的均熱層13之具體性形狀不被限定,除圖8(a)及圖9以外,可以例示圖17(b)~(g)等(圖17(a)例示不具有缺漏部133X之平面形狀)。 In addition, the specific shape of the thermal layer 13 that constitutes the top-view shape with the missing portion 133X is not limited. In addition to FIGS. 8(a) and 9, FIGS. 17(b) to (g), etc. (FIG. 17( a) Illustrate the planar shape without the missing portion 133X).

即是,圖17(b)係以被各個片化成圓點花紋般之均熱層片的集合體,形成均熱層13的型態,具有連續的缺漏部133X,以作為各均熱層片之間隙。再者,圖17(c)及圖17(d)係被圖案製作成朝窄寬度方向(掃掠方向)的面積率一致的均熱層13。其中,圖17(c)具有長方形狀之貫通孔133H,和長方形狀之缺漏部133S,以作為缺漏部133X。另外,圖17(d)係以被各個片化成長方形狀之均熱層片的集合體,形成均熱層13的型態,具有以各均熱層片之間隙而連續的缺漏部133X。 That is, Fig. 17(b) is an assembly of the soaking layer sheets that are converted into a polka dot pattern by each sheet to form the type of the soaking layer 13, which has a continuous missing portion 133X as each of the soaking layer sheets.的 gap. Furthermore, FIG. 17(c) and FIG. 17(d) are patterned so that the area ratio in the narrow width direction (sweeping direction) is uniform in the heat spreading layer 13. Among them, FIG. 17(c) has a rectangular through hole 133H and a rectangular missing portion 133S as the missing portion 133X. In addition, FIG. 17(d) is a form in which the heat spreading layer 13 is formed by an assembly of the rectangular heat spreading layer sheets that are sliced, and has a missing portion 133X that is continuous with the gap between the heat spreading sheets.

並且,圖17(e)~(g)中之任一者皆以被各個片化成條紋形狀之均熱層片的集合體,形成均熱層 13的型態,具有對應的條紋狀之缺漏部133X,以作為各均熱層片之間隙。其中,圖17(e)係沿著長邊方向之(與掃掠方向正交)之條紋形狀之均熱層13。再者,圖17(f)係在長邊方向還有寬度方向傾斜成交差(在掃掠方向傾斜)的條紋形狀之均熱層13。並且,圖17(g)係沿著寬度方向(與長邊方向,且沿著掃掠方向)之條紋形狀的均熱層13。另外,在該些的條紋形狀之均熱層13中,因應所需,可以設在條紋寬度或缺漏部133X之寬度,設置粗密。 In addition, any one of Fig. 17(e)~(g) is an assembly of soaking layer sheets that are each sliced into a stripe shape to form a soaking layer The type 13 has a corresponding stripe-shaped missing part 133X as a gap between the heat-soaking layers. Among them, Fig. 17(e) is the stripe-shaped thermal layer 13 along the longitudinal direction (orthogonal to the sweep direction). In addition, FIG. 17(f) shows a stripe-shaped heat spreading layer 13 with an oblique cross in the width direction (inclination in the sweep direction) in the longitudinal direction. In addition, FIG. 17(g) shows the heat spreading layer 13 in a stripe shape along the width direction (and the longitudinal direction, and along the sweep direction). In addition, in the stripe-shaped thermal layer 13, the stripe width or the width of the missing portion 133X can be set thick and dense as needed.

(5)針對其他之層 (5) For other layers

在本發明之加熱器1中,除了基體11、發熱層12、均熱層13及絕緣層14以外,可以具備其他層。作為其他層,可以舉出以釉玻璃所構成的外塗層、以聚醯亞胺膜所構成之外塗層(聚醯亞胺層)、於特定以上之高溫時熔融而可以切斷朝發熱層12之通電的自己通電切斷層(適用日本特開2002-359059號所記載之技術)等。其中,上述外塗層係可以在以提升滑動面之耐久性(耐磨耗性),或提高潔淨性之目的下利用。該些層即使僅使用1種亦可,即使合併使用2種以上亦可。 In the heater 1 of the present invention, in addition to the base 11, the heat generating layer 12, the heat equalizing layer 13, and the insulating layer 14, other layers may be provided. Examples of other layers include an overcoat made of glazed glass, an overcoat made of polyimide film (polyimide layer), which melts at a high temperature above a certain level and can be cut off to generate heat. The energized self-energization cut-off layer of layer 12 (applying the technology described in Japanese Patent Application Publication No. 2002-359059), etc. Among them, the above-mentioned outer coating can be used for the purpose of improving the durability (wear resistance) of the sliding surface or improving the cleanliness. These layers may use only one type, and may use two or more types in combination.

(6)針對加熱器之加熱面 (6) For the heating surface of the heater

在本加熱器1中,加熱面即使相對於基體11被配置在一面11a側亦可,即使被配置在另一面11b側亦可,還 有,即使被配置在該些兩面之側亦可。即是,雖然即使用任何面而加熱被加熱物亦可,但是以將基體11之另一面11b側的表面設為被加熱物之對向面為佳。即是,發熱層12係將夾著基體11而相反側的面設為與被加熱物的對向面為佳。如此一來,藉由配置加熱面,可以更容易取得具備均熱層13所造成的均熱效果。 In this heater 1, even if the heating surface is arranged on one surface 11a side with respect to the base 11, it may be arranged on the other surface 11b side. Yes, even if it is arranged on the sides of these two sides. That is, although any surface may be used to heat the object to be heated, it is preferable that the surface on the other surface 11b side of the base 11 is the opposite surface of the object to be heated. That is, it is preferable that the heat generating layer 12 has the surface on the opposite side sandwiching the base 11 being the surface facing the object to be heated. In this way, by arranging the heating surface, it is easier to obtain the heat equalizing effect caused by having the heat equalizing layer 13.

另外,基體11即使為平板形狀亦可,亦可以設為彎曲形狀。即是,在加熱器1之加熱面和被加熱物面對面之狀態中,使被加熱物和加熱器相對性掃掠而加熱被加熱物之情況下,基體11之掃掠方向(D1)之剖面形狀,可以設為以與掃掠方向(D1)正交之軸為中心而在與被加熱物對面側呈凸狀之圓弧形狀(即是,在與中心軸平行之平面切下圓柱或圓筒的形狀)。藉由設為如此之形狀,可以在圓筒狀之輥安裝加熱器1,藉由使輥旋轉,可以有效率地加熱在輥上被掃掠之被加熱物。 In addition, the base 11 may have a flat plate shape, and may be a curved shape. That is, in the state where the heating surface of the heater 1 and the object to be heated face each other, and the object to be heated and the heater are relatively scanned to heat the object, the scanning direction (D 1 ) of the substrate 11 is The cross-sectional shape can be set as a circular arc shape that is centered on the axis orthogonal to the sweep direction (D 1 ) and is convex on the side opposite to the object to be heated (that is, a cylinder is cut in a plane parallel to the central axis Or the shape of a cylinder). With such a shape, the heater 1 can be installed on the cylindrical roller, and by rotating the roller, the heated object scanned on the roller can be heated efficiently.

(7)針對用途 (7) For purpose

本加熱器1係組裝於印刷機、影印機、傳真機等之畫像形成裝置或定影裝置等,可以作為將碳粉或油墨等定影在記錄媒體之定影用加熱器而利用。再者,可以當作被組裝於加熱機,而均勻地加熱(乾燥或燒結等)面板等之被處理體的加熱裝置而利用。其他,可以適合進行金屬製品之熱處理、被形成在各種形狀之基體的塗膜、覆膜之熱處理等。具體而言,可以利用平面顯示器用之塗膜(過濾器 構成材料)之熱處理、被塗裝之金屬製品、汽車關連製品、木工製品等之塗裝乾燥、靜電植毛接著乾燥、塑膠加工製品之熱處理、印刷基板之焊料回流、厚膜積體電路之印刷乾燥等。 The heater 1 is an image forming device or a fixing device incorporated in a printer, a photocopier, a facsimile machine, etc., and can be used as a fixing heater for fixing toner, ink, etc. to a recording medium. Furthermore, it can be used as a heating device that is incorporated in a heating machine to uniformly heat (dry, sinter, etc.) the object to be processed such as a panel. In addition, it can be suitable for heat treatment of metal products, coating films formed on substrates of various shapes, and heat treatment of coating films, etc. Specifically, the coating film (filter Constituent materials) heat treatment, coating drying of painted metal products, automobile-related products, woodworking products, etc., electrostatic flocking followed by drying, heat treatment of plastic processing products, solder reflow of printed circuit boards, printing and drying of thick film integrated circuits Wait.

[2]定影裝置 [2] Fixing device

具備本加熱器1之定影裝置可以設為藉由加熱對象或定影手段等,被適當選擇的構成。例如,在具備伴隨著壓接的定影手段,在紙等之記錄用媒體定影碳粉等之情況,或貼合複數之構件之情況,可以設為具備加熱器之加熱部,和加壓部的定影裝置。當然,亦可以設為不伴隨著壓接的定影手段。在本發明中,以使包含被形成在紙、薄膜等之記錄用媒體之表面的碳粉之未定影畫像,定影在記錄用媒體之定影裝置5為佳。 The fixing device provided with the heater 1 can be configured to be appropriately selected by the heating target, fixing means, or the like. For example, when it is equipped with a fixing means accompanied by pressure bonding, it is used to fix toner on paper and other recording media, or when a plurality of components are laminated, it can be set as a heating part with a heater and a pressure part. Fixing device. Of course, it can also be set as a fixing means not accompanied by crimping. In the present invention, it is preferable that the unfixed image including the toner formed on the surface of the recording medium such as paper and film is fixed to the fixing device 5 of the recording medium.

圖10表示被配設在電子照片方式之畫像形成裝置的定影裝置5之重要部分。定影裝置5具備能夠旋轉之定影用輥51,和能夠旋轉之加壓用輥54,加熱器1被配設在定影用輥51之內部。加熱器1理想上被配設成接近定影用輥51之內表面。 FIG. 10 shows the important part of the fixing device 5 which is arranged in the image forming device of the electrophotographic method. The fixing device 5 includes a rotatable fixing roller 51 and a rotatable pressure roller 54, and the heater 1 is arranged inside the fixing roller 51. The heater 1 is ideally arranged close to the inner surface of the fixing roller 51.

加熱器1可以設為例如圖12所示之定影手段5般,被固定在由能夠傳導加熱器1發出之熱的材料所構成之加熱器保持器53之內部,而可以將加熱器1之發熱從定影用輥51之內側傳到外表面的構造。 The heater 1 can be set as the fixing means 5 shown in FIG. 12, and is fixed in the heater holder 53 made of a material capable of conducting the heat emitted by the heater 1, and can heat the heater 1 The structure is passed from the inner side of the fixing roller 51 to the outer surface.

圖11也又表示被配設在電子照片方式之畫像 形成裝置的定影裝置5之重要部分。定影裝置5具備能夠旋轉之定影用輥51,和能夠旋轉之加壓用輥54,將熱傳達至定影用輥51之加熱器1,及與加壓用輥54同時壓接記錄用媒體之加壓用輥52被配設在定影用輥51之內部。加熱器1被配設成沿著定影用輥51之圓筒面。 Figure 11 also shows the portrait that is placed in the electronic photo method An important part of the fixing device 5 forming the device. The fixing device 5 is provided with a rotatable fixing roller 51 and a rotatable pressing roller 54, a heater 1 that transmits heat to the fixing roller 51, and a heating device that simultaneously presses the recording medium with the pressing roller 54 The pressing roller 52 is arranged inside the fixing roller 51. The heater 1 is arranged along the cylindrical surface of the fixing roller 51.

在圖10或圖11所示之定影裝置5中,藉由從無圖示之電源裝置施加電壓使加熱器1發熱,其熱被傳達至定影用輥51。而且,在表面具有未定影之碳粉畫像之記錄用媒體被供給至定影用輥51和加壓用輥54之間時,在定影用輥51及加壓用輥54之壓接部,碳粉熔融而形成定影畫像。因具有定影用輥51及加壓用輥54之壓接部,故伴隨著旋轉。如上述般,因加熱器1被抑制在使用小的記錄用媒體之時容易產生的局部性的溫度上升,故難以產生在定影用輥51的溫度不均,可以均勻進行定影。 In the fixing device 5 shown in FIG. 10 or FIG. 11, the heater 1 generates heat by applying a voltage from a power supply device (not shown), and the heat is transferred to the fixing roller 51. Furthermore, when a recording medium with an unfixed toner image on the surface is fed between the fixing roller 51 and the pressure roller 54, the pressure contact portion of the fixing roller 51 and the pressure roller 54 will cause the toner Melt to form a fixed image. Since it has the pressure contact part of the fixing roller 51 and the pressure roller 54, it rotates. As described above, since the heater 1 suppresses the local temperature rise that is likely to occur when a small recording medium is used, it is difficult to generate temperature unevenness in the fixing roller 51, and the fixing can be performed uniformly.

作為具備主加熱器1之定影裝置之其他態樣,可以設為具備上模及下膜的模具,且在上模及下模之至少一方的內部配設加熱器的態樣。 As another aspect of the fixing device provided with the main heater 1, a mold provided with an upper mold and a lower film may be provided, and a heater may be arranged inside at least one of the upper mold and the lower mold.

具備主加熱器1之定影裝置係以電子照片方向之印刷機、影印機等之畫像形成裝置為首,安裝在家庭用之電氣製品、業務用、實驗用之精密機器等,而作為加熱、保溫等之熱源為佳。 The fixing device equipped with the main heater 1 includes image forming devices such as printers and photocopiers in the direction of electrophotographs, and is installed in household electrical products, business and laboratory precision machines, etc., for heating, heat preservation, etc. The heat source is better.

[3]畫像形成裝置 [3] Image forming device

具備本加熱器1之畫像形成裝置可以設為藉由加熱對 象或加熱目的等,被適當選擇的構成。在本發明中,如圖12所示般,以具備在紙、薄膜等之記錄用媒體之表面形成未定影畫像之作像手段,和使未定影畫像定影在記錄用媒體之定影手段5,且定影手段5具備主加熱器1的畫像形成裝置4為佳。畫像形成裝置4除上述手段之外,可以具備記錄用媒體搬運手段,或用以控制各手段之控制手段而構成。 The image forming device equipped with this heater 1 can be set to The composition is appropriately selected for the purpose of heating, etc. In the present invention, as shown in FIG. 12, an imaging means for forming an unfixed image on the surface of a recording medium such as paper, film, etc., and a fixing means 5 for fixing the unfixed image on the recording medium are provided, and The fixing means 5 preferably includes the image forming device 4 having the main heater 1. In addition to the above-mentioned means, the image forming apparatus 4 may be configured with a means for transporting recording media or a control means for controlling each means.

圖12為表示電子照片方式之畫像形成裝置4之主要部分的概略圖。作為作像手段,即使為具備轉印滾筒之方式及不具備轉印滾筒之方式中之任一者皆可,圖12為具備轉印滾筒之態樣。 FIG. 12 is a schematic diagram showing the main part of the image forming apparatus 4 of the electrophotographic method. As the imaging means, even if it is a method with a transfer roller and a method without a transfer roller, FIG. 12 shows a state with a transfer roller.

在作像手段中,一面旋轉,一面在藉由帶電裝置43被帶電處理成特定之電位的感光滾筒44之帶電處理面,照射從雷射掃描器41被輸出的雷射,藉由從顯像器45被供給之碳粉,形成靜電潛像。接著,利用電位差,在與感光滾筒44連動之轉印滾筒46之表面,轉印碳粉畫像。之後,被供給至轉印滾筒46及轉印用輥47之間的記錄用媒體之表面,被轉印碳粉畫像,能取得具有未定影畫像之記錄用媒體。碳粉係包含黏結樹脂和著色劑和添加劑的粒子,黏結樹脂之熔融溫度通常為90℃~250℃。並且,可以在感光滾筒44及轉印滾筒46之表面,具備用以除去不溶的碳粉等之清掃裝置。 In the imaging means, while rotating, the charging treatment surface of the photosensitive drum 44 that is charged to a specific potential by the charging device 43 is irradiated with the laser output from the laser scanner 41, and the imaging The toner supplied to the device 45 forms an electrostatic latent image. Then, using the potential difference, the toner image is transferred to the surface of the transfer roller 46 linked with the photosensitive roller 44. After that, the surface of the recording medium fed between the transfer roller 46 and the transfer roller 47 is transferred with the toner image, and a recording medium having an unfixed image can be obtained. Carbon powder contains particles of binder resin, colorants and additives. The melting temperature of the binder resin is usually 90°C to 250°C. In addition, the surfaces of the photosensitive drum 44 and the transfer drum 46 may be provided with a cleaning device for removing insoluble carbon powder and the like.

定影手段5可以設為與上述定影裝置5同樣的構成,具備有加壓用輥54,和在內部具備保持進紙方 向通電型之加熱器1的加熱器保持器53,與加壓用輥54連動之定影用輥51。具有來自作像手段之未定影畫像的記錄用媒體,被供給至定影用輥51及加壓用輥54之間。定影用輥51之熱熔融記錄用媒體之碳粉畫像,並且,熔融的碳粉在定影用輥51和加壓用輥54之壓接部被加壓,碳粉畫像被定影在記錄用媒體。在圖12之定影手段5中,即使為具備接近於加熱器1而配置的定影用皮帶,以取代定影用輥51之態樣亦可。 The fixing means 5 can have the same structure as the above-mentioned fixing device 5, with a pressure roller 54 and an internal holding means for paper feeding. The heater holder 53 of the energized heater 1 has a fixing roller 51 interlocked with the pressing roller 54. The recording medium having the unfixed image from the imaging means is fed between the fixing roller 51 and the pressure roller 54. The fixing roller 51 heats the toner image of the recording medium, and the molten toner is pressurized at the pressure contact portion between the fixing roller 51 and the pressing roller 54, and the toner image is fixed to the recording medium. In the fixing means 5 of FIG. 12, even if it is provided with the fixing belt arrange|positioned close to the heater 1, instead of the aspect of the fixing roller 51, it may be sufficient.

一般而言,定影用輥51之溫度成為不均勻,於被供給至碳粉之熱量過小之情況下,碳粉從記錄用媒體剝離,另外,在熱量過大之情況下,有碳粉附著於定影用輥51,定影用輥51一圈再附著於記錄用媒體之情形。若藉由具備本發明之加熱器的定影手段5時,由於迅速地被調整成特定之溫度,故可以抑制不良因素。 Generally speaking, the temperature of the fixing roller 51 becomes uneven, and when the amount of heat supplied to the toner is too small, the toner is peeled from the recording medium, and when the heat is too large, the toner adheres to the fixing When the roller 51 and the fixing roller 51 are attached to the recording medium once again. If the fixing means 5 equipped with the heater of the present invention is used, the temperature can be quickly adjusted to a specific temperature, so that the undesirable factors can be suppressed.

本發明之畫像形成裝置於使用時抑制非進紙區域之過升溫,以作為電子照片方式之印刷機、影印機為適合。 The image forming device of the present invention suppresses the overheating of the non-paper feeding area when in use, and is suitable as a printer or photocopier of the electronic photograph method.

[4]加熱裝置 [4] Heating device

具備本加熱器之加熱裝置可以設為藉由加熱對象之大小或形狀等,被適當選擇的構成。在本發明中,可以具備例如框體部,和為了被熱處理物之進出等而被配置之能密閉的窗部,和被配置在框體部之內部的能移動的加熱器部而構成。因應所需,可以在框體部之內部,具備配置被熱處理物之被熱處理物設置部、藉由被熱處理物之加熱排出 氣體之情況,排出該氣體的排氣部、調整框體部之內部之壓力的真空泵等之壓力調整部等。再者,加熱即使在固定被熱處理物及加熱器部之狀態下進行亦可,即使一面使任一方移動一面進行亦可。 The heating device equipped with this heater can be configured to be appropriately selected according to the size or shape of the heating target. In the present invention, for example, a frame portion, a window portion that can be hermetically arranged for in and out of the heat-treated object, and a movable heater portion arranged inside the frame portion may be provided. According to the needs, it can be equipped with a setting part of the heat-treated object inside the frame part, and the heat-treated object can be discharged by the heating of the heat-treated object. In the case of gas, pressure regulators such as an exhaust part that discharges the gas, a vacuum pump that regulates the internal pressure of the frame body, etc. In addition, heating may be performed even in a state in which the object to be heat-treated and the heater portion are fixed, and it may be performed while moving either side.

主加熱裝置以在期望之溫度進行包含水、有機溶劑之被熱處理物之乾燥的裝置為適合。而且,可以當作真空乾燥機(減壓乾燥機)、加壓乾燥機、除濕乾燥機、熱風乾燥機、防爆型乾燥機等使用。再者,以作為在期望之溫度進行LCD面板、有機EL面板等之未燒結物之燒結的裝置為適合。而且,可以當作減壓燒結機、加壓燒結機等使用。 The main heating device is suitable for drying the heat-treated object containing water and an organic solvent at a desired temperature. Furthermore, it can be used as a vacuum dryer (decompression dryer), pressure dryer, dehumidifying dryer, hot air dryer, explosion-proof dryer, etc. Furthermore, it is suitable as a device for sintering green objects such as LCD panels and organic EL panels at a desired temperature. Moreover, it can be used as a vacuum sintering machine, a pressure sintering machine, and the like.

[實施例] [Example]

在以下中,使用實施例說明本發明。 In the following, examples are used to illustrate the present invention.

[1]加熱器之製作 [1] The production of heater

藉由下述要領,製作實施例1~4及比較例1之加熱器。 The heaters of Examples 1 to 4 and Comparative Example 1 were produced according to the following procedures.

(1)實施例1之加熱器(參照圖1) (1) The heater of Example 1 (refer to Figure 1)

將厚度300μm之不鏽鋼薄膜(SUS430,熱傳導率26W/mK)設為基體11。 A stainless steel thin film (SUS430, thermal conductivity of 26 W/mK) with a thickness of 300 μm was used as the base 11.

在該基體11之另一面11b側之表面,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(直接積層型之均熱層131)。 The surface on the other side 11b of the base 11 is coated with a silver paste and then sintered to form a soaking layer 13 (direct stacking type soaking layer 131) with a thickness of 8 μm.

接著,將絕緣玻璃糊料塗佈在基體11之一面11a側 之表面,及均熱層13之表面之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 Then, the insulating glass paste is coated on the side of one surface 11a of the substrate 11 After sintering the surface and the surface of the soaking layer 13, a glass glaze layer (insulating layer 141) with a thickness of 75 μm is formed.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層12包含Ag-Pd,藉由具有正的電阻發熱係數的電阻發熱配線,即具備被電性並聯連接的複數之電阻發熱單元,且各電阻發熱單元係連結被配置成相對於掃掠方向呈略垂直的複數之橫配線部,和連接該橫配線部間之縱配線部而被形成髮夾彎狀之電阻發熱配線121而被形成。另外,該發熱層12除電阻發熱配線121以外,具有用以進行朝電阻發熱配線121供電的供電銲墊及供電用配線(無圖示)。該些供電銲墊及供電用配線係在藉由銀糊料於電阻發熱配線121之形成前後藉由網版印刷及燒結而形成。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heating layer 12 includes Ag-Pd. The resistance heating wiring with a positive resistance heating coefficient is provided with a plurality of resistance heating units electrically connected in parallel, and each resistance heating unit is connected and arranged so as to be relative to the sweep A plurality of horizontal wiring portions whose directions are substantially perpendicular, and a resistance heating wiring 121 formed in a hairpin bend shape by connecting the vertical wiring portions between the horizontal wiring portions are formed. In addition, the heating layer 12 has, in addition to the resistance heating wiring 121, power supply pads and power supply wiring (not shown) for supplying power to the resistance heating wiring 121. The power supply pads and power supply wiring are formed by screen printing and sintering before and after the formation of the resistance heating wiring 121 with silver paste.

之後,將絕緣玻璃糊料塗佈在露出於基體11之另一面11b側之絕緣層141之表面,和露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the surface of the insulating layer 141 exposed on the other side 11b of the base 11, and the insulating layer 141 and the heating layer 12 exposed on the side 11a of the base 11 are sintered. , And a glass glaze layer (insulating layer 142) with a thickness of 50 μm is formed.

接著,將絕緣玻璃糊料塗佈在露出於基體11之一面11a側之絕緣層142,和露出於基體11之另一面11b側之絕緣層142之表面之後,進行燒結,而形成厚度20μm之玻璃釉層(絕緣層143),取得實施例1(圖1)之加熱器1。 Next, the insulating glass paste is coated on the insulating layer 142 exposed on one side 11a of the base 11 and the insulating layer 142 exposed on the other side 11b of the base 11, and then sintered to form a glass with a thickness of 20 μm. For the glaze layer (insulating layer 143), the heater 1 of Example 1 (FIG. 1) was obtained.

(2)實施例2之加熱器(參照圖2) (2) The heater of Example 2 (refer to Figure 2)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之一面11a側之表面,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(直接積層型之均熱層131)。 After coating the silver paste on the surface of the substrate 11 on the side 11a, it is sintered to form a soaking layer 13 (direct-layered soaking layer 131) with a thickness of 8 μm.

接著,將絕緣玻璃糊料塗佈在基體11之另一面11b側之表面,及均熱層13之表面之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 Next, the insulating glass paste is applied on the surface of the other side 11b of the base 11 and the surface of the heat-soaking layer 13, and then sintered to form a glass glaze layer (insulating layer 141) with a thickness of 75 μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層12與實施例1相同。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heat generating layer 12 is the same as in the first embodiment.

之後,將絕緣玻璃糊料塗佈在露出於基體11之另一面11b側之絕緣層141之表面,和露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the surface of the insulating layer 141 exposed on the other side 11b of the base 11, and the insulating layer 141 and the heating layer 12 exposed on the side 11a of the base 11 are sintered. , And a glass glaze layer (insulating layer 142) with a thickness of 50 μm is formed.

接著,使與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143),而取得實施例2(圖2)之加熱器1。 Next, as in Example 1, a glass glaze layer (insulating layer 143) with a thickness of 20 μm was formed, and the heater 1 of Example 2 (FIG. 2) was obtained.

(3)實施例3之加熱器(參照圖3) (3) The heater of Example 3 (refer to Figure 3)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之一面11a側之表面,及另一面11b側 之表面之兩表面,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(直接積層型之均熱層131)。 On the surface of the base 11 on the side of one side 11a and on the side of the other side 11b The two surfaces of the surface are coated with silver paste and then sintered to form a soaking layer 13 (direct-layered soaking layer 131) with a thickness of 8 μm.

接著,將絕緣玻璃糊料塗佈在基體11之一面11a側,及另一面11b側面之各個均熱層13之表面之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 Next, the insulating glass paste is coated on the surface of each heat-soaking layer 13 on one side 11a and the other side 11b of the base 11, and then sintered to form a glass glaze layer (insulating layer 141) with a thickness of 75 μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層12與實施例1相同。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heat generating layer 12 is the same as in the first embodiment.

之後,將絕緣玻璃糊料塗佈在露出於基體11之另一面11b側之絕緣層141之表面,和露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the surface of the insulating layer 141 exposed on the other side 11b of the base 11, and the insulating layer 141 and the heating layer 12 exposed on the side 11a of the base 11 are sintered. , And a glass glaze layer (insulating layer 142) with a thickness of 50 μm is formed.

接著,使與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143),而取得實施例3(圖3)之加熱器1。 Next, as in Example 1, a glass glaze layer (insulating layer 143) with a thickness of 20 μm was formed, and the heater 1 of Example 3 (FIG. 3) was obtained.

(4)實施例4之加熱器(參照圖4) (4) The heater of Example 4 (refer to Figure 4)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之另一面11b側之表面,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(直接積層型之均熱層131)。 The surface on the other side 11b of the base 11 is coated with a silver paste and then sintered to form a soaking layer 13 (direct stacking type soaking layer 131) with a thickness of 8 μm.

接著,將絕緣玻璃糊料塗佈在基體11之一面11a側之表面,及均熱層13之表面之後,進行燒結,而形成厚 度75μm之玻璃釉層(絕緣層141)。 Next, the insulating glass paste is applied to the surface of the substrate 11 on the side 11a and the surface of the soaking layer 13, and then sintered to form a thick Glass glaze layer (insulating layer 141) with a degree of 75μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層12與實施例1相同。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heat generating layer 12 is the same as in the first embodiment.

之後,在露出於基體11之另一面11b側之絕緣層141之表面,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(間接積層型之均熱層132)。 After that, the surface of the insulating layer 141 exposed on the other side 11b of the base 11 is coated with a silver paste and then sintered to form a soaking layer 13 (indirect laminated type soaking layer 132) with a thickness of 8 μm.

之後,將絕緣玻璃糊料塗佈在露出於間接積層型之均熱層132之表面,和露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is coated on the surface of the indirect laminated type heat-soaking layer 132, and the insulating layer 141 and the heating layer 12 exposed on the side 11a of the base 11, and then sintered to form A glass glaze layer (insulating layer 142) with a thickness of 50 μm.

接著,使與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143),而取得實施例4(圖4)之加熱器1。 Next, as in Example 1, a glass glaze layer (insulating layer 143) having a thickness of 20 μm was formed, and the heater 1 of Example 4 (FIG. 4) was obtained.

(5)比較例1之加熱器(參照圖15) (5) The heater of Comparative Example 1 (refer to Figure 15)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之一面11a側之表面,及另一面11b側面之表面之兩表面,塗佈絕緣玻璃糊料之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 The insulating glass paste is coated on the surface of one side 11a of the substrate 11 and the surface of the other side 11b, and then sintered to form a glass glaze layer (insulating layer 141) with a thickness of 75 μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層 12與實施例1相同。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heating layer 12 is the same as in Example 1.

之後,將絕緣玻璃糊料塗佈在露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面,和露出於基體11之另一面11b側之絕緣層141之表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the two surfaces of the insulating layer 141 and the heating layer 12 exposed on one side 11a of the base 11, and the surface of the insulating layer 141 exposed on the other side 11b of the base 11, and then sintered , And a glass glaze layer (insulating layer 142) with a thickness of 50 μm is formed.

接著,使與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143),而取得比較例1(圖15)之加熱器。 Next, as in Example 1, a glass glaze layer (insulating layer 143) with a thickness of 20 μm was formed to obtain a heater of Comparative Example 1 (FIG. 15).

[2]均熱層之效果的確認 [2] Confirmation of the effect of the soaking layer

對在上述[1]所取得之實施例1~4及比較例1之加熱器之各個,施加交流45V之電壓,在各加熱器1之表面之最高溫度到達至260℃之時點,利用紅外線熱像儀(NEC Avio紅外線科技股份有限公司製造,型式「TH9100MR」),一起取得各加熱器1全體之溫度資料。之後,從所取得之資料,拾取各加熱器1之掃掠方向(D1)之寬度中央部中之溫度資料,而予以圖形化,算出該圖形中之最高溫度和最低溫度之溫度差。 To each of the heaters of Examples 1 to 4 and Comparative Example 1 obtained in [1] above, a voltage of AC 45V was applied, and when the maximum temperature of the surface of each heater 1 reached 260°C, infrared heat was used Imager (manufactured by NEC Avio Infrared Technology Co., Ltd., model "TH9100MR"), to obtain the temperature data of the entire heater 1 together. Then, from the obtained data, pick up the temperature data in the center of the width of each heater 1 in the sweep direction (D 1 ), and graph them, and calculate the temperature difference between the highest temperature and the lowest temperature in the graph.

每個加熱器進行3次上述測量,算出所取得之溫度差的平均值,以圖形表示於圖13。其結果,對於比較例1之加熱器之溫度差為18.03℃,實施例1為13.10℃,實施例2為13.00℃,實施例3為12.43℃,實施例4為12.50℃。即是,實施例1為27.3%,實施例2為27.9%,實施例3為31.1%,實施例4為30.7%,可知可以縮小各個溫度差,任一者皆取得優良的均熱效果。 The above measurement is performed 3 times for each heater, and the average value of the obtained temperature difference is calculated, which is graphically shown in Fig. 13. As a result, the temperature difference of the heater of Comparative Example 1 was 18.03°C, Example 1 was 13.10°C, Example 2 was 13.00°C, Example 3 was 12.43°C, and Example 4 was 12.50°C. That is, Example 1 is 27.3%, Example 2 is 27.9%, Example 3 is 31.1%, and Example 4 is 30.7%. It can be seen that each temperature difference can be reduced, and any one of them can achieve an excellent soaking effect.

[3]均熱層之厚度和形成位置的相關 [3] Correlation between the thickness of the soaking layer and the formation position

(1)實施例5之加熱器(參照圖1) (1) The heater of Example 5 (refer to Figure 1)

除了在基體11之另一面11b側之表面,形成有厚度8μm之均熱層13(直接積層型之均熱層131)以外,其他與實施例1相同,取得實施例5之加熱器1。即是,實施例5之加熱器1具有合計厚度8μm之直接積層型之均熱層131。 The heater 1 of Example 5 was obtained in the same manner as in Example 1, except that a heat-soaking layer 13 (direct-layered heat-soaking layer 131) with a thickness of 8 μm was formed on the surface on the other side 11b of the base 11. That is, the heater 1 of Example 5 has a direct build-up type uniform heat layer 131 with a total thickness of 8 μm.

(2)實施例6之加熱器(參照圖3) (2) The heater of Example 6 (refer to Figure 3)

除了在基體11之一面11a及另一面11b之兩表面,各形成有厚度8μm之均熱層13(直接積層型之均熱層131)以外,其他與實施例3相同,取得實施例6之加熱器1。即是,實施例6之加熱器1具有合計厚度16μm之直接積層型之均熱層131。 Except for the two surfaces of one surface 11a and the other surface 11b of the base 11, a soaking layer 13 with a thickness of 8 μm (direct-layered soaking layer 131) is formed on each of the two surfaces.器1. That is, the heater 1 of Example 6 has a direct build-up type uniform heat layer 131 with a total thickness of 16 μm.

(3)實施例7之加熱器(參照圖5) (3) The heater of Example 7 (refer to Figure 5)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之一面11a側之表面,及另一面11b側之表面之兩表面,塗佈絕緣玻璃糊料之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 After coating the insulating glass paste on both surfaces of the substrate 11 on one side 11a side and the other side 11b side, sintering is performed to form a glass glaze layer (insulating layer 141) with a thickness of 75 μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之 未燒結層之後,進行燒結,而形成發熱層12。該發熱層12與實施例1相同。 In addition, the surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form the heating layer 12 After the green layer is sintered, the heat generating layer 12 is formed. The heat generating layer 12 is the same as in the first embodiment.

並且,在形成於基體11之另一面11b側之絕緣層141之表面,藉由網版印刷,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(間接積層型之均熱層132)。 In addition, on the surface of the insulating layer 141 formed on the other side 11b of the substrate 11, the silver paste is applied by screen printing, and then sintered to form a thermal layer 13 with a thickness of 8 μm (indirect laminated type uniform Thermal layer 132).

之後,將絕緣玻璃糊料塗佈在露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面,和露出於基體11之另一面11b側之均熱層13之表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the two surfaces of the insulating layer 141 and the heating layer 12 exposed on one side 11a of the base 11, and the surface of the heat isolating layer 13 exposed on the other side 11b of the base 11. Sintering to form a glass glaze layer (insulating layer 142) with a thickness of 50 μm.

接著,使與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143),而取得實施例7(圖5)之加熱器。即是,實施例7之加熱器1具有合計厚度8μm之間接積層型之均熱層132。 Next, as in Example 1, a glass glaze layer (insulating layer 143) with a thickness of 20 μm was formed to obtain a heater of Example 7 (FIG. 5). That is, the heater 1 of Example 7 has an interlayer heat-soaking layer 132 with a total thickness of 8 μm.

(4)實施例8之加熱器(參照圖6) (4) The heater of Example 8 (refer to Figure 6)

與實施例1相同,將厚度300μm之不鏽鋼薄膜設為基體11。 As in Example 1, a stainless steel thin film with a thickness of 300 μm was used as the base 11.

在該基體11之一面11a側之表面,及另一面11b側之表面之兩表面,塗佈絕緣玻璃糊料之後,進行燒結,而形成厚度75μm之玻璃釉層(絕緣層141)。 After coating the insulating glass paste on both surfaces of the substrate 11 on one side 11a side and the other side 11b side, sintering is performed to form a glass glaze layer (insulating layer 141) with a thickness of 75 μm.

並且,在形成於基體11之一面11a側的絕緣層141之表面,藉由網版印刷,圖案製作形成成為發熱層12之未燒結層之後,進行燒結,而形成發熱層12。該發熱層 12與實施例1相同。 The surface of the insulating layer 141 formed on the side 11a of the base 11 is patterned by screen printing to form an unsintered layer that becomes the heating layer 12, and then sintered to form the heating layer 12. The heating layer 12 is the same as in Example 1.

並且,在形成於基體11之另一面11b側之絕緣層141之表面,藉由網版印刷,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(間接積層型之均熱層132)。 In addition, on the surface of the insulating layer 141 formed on the other side 11b of the substrate 11, the silver paste is applied by screen printing, and then sintered to form a thermal layer 13 with a thickness of 8 μm (indirect laminated type uniform Thermal layer 132).

之後,將絕緣玻璃糊料塗佈在露出於基體11之一面11a側之絕緣層141及發熱層12之兩表面,和露出於基體11之另一面11b側之均熱層13之表面之後,進行燒結,而形成厚度50μm之玻璃釉層(絕緣層142)。 After that, the insulating glass paste is applied on the two surfaces of the insulating layer 141 and the heating layer 12 exposed on one side 11a of the base 11, and the surface of the heat isolating layer 13 exposed on the other side 11b of the base 11. Sintering to form a glass glaze layer (insulating layer 142) with a thickness of 50 μm.

接著,與實施例1相同,形成厚度20μm之玻璃釉層(絕緣層143)。 Next, as in Example 1, a glass glaze layer (insulating layer 143) with a thickness of 20 μm was formed.

並且,在形成於基體11之另一面11b側之玻璃釉層(絕緣層143)之表面,藉由網版印刷,塗佈銀糊料之後,進行燒結,而形成厚度8μm之均熱層13(間接積層型之均熱層132),而取得實施例8(圖6)之加熱器。即是,實施例8之加熱器1具有合計厚度16μm之間接積層型之均熱層132。 In addition, on the surface of the glass glaze layer (insulating layer 143) formed on the other side 11b of the base body 11, the silver paste is applied by screen printing, and then sintered to form a soaking layer 13 (with a thickness of 8 μm). The indirect laminated type thermal layer 132), and the heater of Example 8 (FIG. 6) was obtained. That is, the heater 1 of Example 8 has an interlayer heat-dissipating layer 132 with a total thickness of 16 μm.

(5)實施例9之加熱器(參照圖5) (5) The heater of Example 9 (refer to Figure 5)

除了於塗佈3次銀糊料之後,進行燒結,形成厚度24μm之均熱層13(間接積層型之均熱層132)以外,其他與實施例7相同,取得實施例9之加熱器。即是,實施例9之加熱器1具有合計厚度24μm之間接積層型之均熱層132。 The heater of Example 9 was obtained in the same manner as in Example 7 except that the silver paste was applied three times and then sintered to form a soaking layer 13 (indirect laminated type soaking layer 132) with a thickness of 24 μm. That is, the heater 1 of the ninth embodiment has an interlayer heat-soaking layer 132 with a total thickness of 24 μm.

(6)實施例10之加熱器(參照圖1) (6) The heater of Example 10 (refer to Figure 1)

除了在基體11之另一面11b側之表面,形成有厚度24μm之均熱層13(直接積層型之均熱層131)以外,其他與實施例1相同,取得實施例10之加熱器1。即是,實施例10之加熱器1具有合計厚度24μm之直接積層型之均熱層131。 The heater 1 of Example 10 was obtained in the same manner as in Example 1 except that a heat-soaking layer 13 (direct-layered heat-soaking layer 131) with a thickness of 24 μm was formed on the surface on the other side 11b of the base 11. That is, the heater 1 of Example 10 has a direct build-up type uniform heat layer 131 with a total thickness of 24 μm.

(7)實施例11之加熱器(參照圖3) (7) The heater of Example 11 (refer to Figure 3)

除了在基體11之一面11a及另一面11b之兩表面,各形成有厚度36μm之均熱層13(直接積層型之均熱層131)以外,其他與實施例3相同,取得實施例11之加熱器1。即是,實施例11之加熱器1具有合計厚度72μm之直接積層型之均熱層131。 Except for the two surfaces of one surface 11a and the other surface 11b of the substrate 11, a heat-soaking layer 13 (direct-layered heat-soaking layer 131) with a thickness of 36 μm is formed on each of the two surfaces of the substrate 11.器1. That is, the heater 1 of Example 11 has a direct build-up type uniform heat layer 131 with a total thickness of 72 μm.

(8)實施例12之加熱器(參照圖3) (8) The heater of Embodiment 12 (refer to Figure 3)

除了在基體11之一面11a及另一面11b之兩表面,各形成有厚度54μm之均熱層13(直接積層型之均熱層131)以外,其他與實施例3相同,取得實施例11之加熱器1。即是,實施例11之加熱器1具有合計厚度108μm之直接積層型之均熱層131。 Except that on both surfaces of one surface 11a and the other surface 11b of the base 11, a heat-soaking layer 13 (direct-layered heat-soaking layer 131) with a thickness of 54 μm is formed on each of the two surfaces of the substrate 11, the rest is the same as the embodiment 3, and the heating of the embodiment 11 is obtained.器1. That is, the heater 1 of Example 11 has a direct build-up type uniform heat layer 131 with a total thickness of 108 μm.

(9)實施例13之加熱器(參照圖5) (9) The heater of embodiment 13 (refer to Figure 5)

除了形成厚度54μm之均熱層13(間接積層型之均熱 層132)以外,其他與實施例7相同,取得實施例13之加熱器。即是,實施例13之加熱器1具有合計厚度54μm之間接積層型之均熱層132。 In addition to the formation of a 54μm thick soaking layer 13 (indirect laminated type soaking Except for layer 132), the rest is the same as in Example 7, and the heater of Example 13 is obtained. That is, the heater 1 of Example 13 has an interlayer heat-soaking layer 132 with a total thickness of 54 μm.

(10)實施例14之加熱器(參照圖6) (10) The heater of embodiment 14 (refer to Figure 6)

在絕緣層141之另一面側之表面形成厚度54μm之均熱層13(間接積層型之均熱層132),且在玻璃釉層(絕緣層143)之另一面側之表面形成厚度18μm之均熱層13(間接積層型之均熱層132)以外,其他與實施例8相同,取得實施例14之加熱器。即是,實施例14之加熱器1具有合計厚度72μm之間接積層型之均熱層132。 On the other side of the insulating layer 141, a soaking layer 13 (indirect laminated type soaking layer 132) with a thickness of 54 μm is formed, and on the other side of the glass glaze layer (insulating layer 143), a soaking layer 13 with a thickness of 18 μm is formed Except for the thermal layer 13 (indirect laminated type heat-soaking layer 132), the rest is the same as that of the embodiment 8, and the heater of the embodiment 14 is obtained. That is, the heater 1 of Example 14 has an interlayer heat-soaking layer 132 with a total thickness of 72 μm.

(11)測量1 (11) Measurement 1

使用上述[3](1)~(5)所取得之實施例5~9之加熱器,針對均熱層之厚度和形成位置之相關進行討論。進行與上述[2]相同之測量,求出最高溫度和最低溫度的溫度差。並且,將其結果以圖形表示於圖14。 Using the heaters of Examples 5 to 9 obtained in [3] (1) to (5) above, the correlation between the thickness of the soaking layer and the formation position is discussed. Perform the same measurement as in [2] above to find the temperature difference between the highest temperature and the lowest temperature. In addition, the results are graphically shown in FIG. 14.

在圖14中,連結實施例5~實施例6之直線表示使用直接積層型之均熱層131之情況的均熱化效果和均熱層之厚度的相關。另外,連結實施例7~實施例9之直線表示使用間接積層型之均熱層132之情況的均熱化效果和均熱層之厚度的相關。 In FIG. 14, the straight line connecting Example 5 to Example 6 indicates the correlation between the soaking effect and the thickness of the soaking layer in the case of using the direct-laminated type of soaking layer 131. In addition, the straight line connecting Example 7 to Example 9 indicates the correlation between the soaking effect and the thickness of the soaking layer when the indirect laminated type soaking layer 132 is used.

從該圖14之結果,可知在使直接積層型之均熱層131之厚度,和間接積層型之均熱層132之厚度成為相同 的厚度之情況下,更降低溫度差的效果比較高的係直接積層型之均熱層131。 From the results of FIG. 14, it can be seen that the thickness of the direct-layered type heat spreading layer 131 and the indirect layered type heat spreading layer 132 have the same thickness. In the case of the thickness of φ, the effect of reducing the temperature difference is relatively high is the direct build-up type thermal layer 131.

(12)測量2 (12) Measurement 2

使用上述[1](5)所取得之比較例1之加熱器,針對上述[3](1)~(10)所取得之實施例5~14之加熱器,針對均熱層之厚度和形成位置之相關進行討論。進行與上述[2]相同之測量,求出最高溫度和最低溫度之溫度差(每個加熱器進行3次測量,所取得之各資料中之溫度差的平均值)。並且,將其結果以圖形表示於圖18。 Using the heater of Comparative Example 1 obtained in [1](5) above, for the heaters of Examples 5-14 obtained in [3](1)~(10) above, regarding the thickness and formation of the soaking layer Discuss about the location. Perform the same measurement as in [2] above to find the temperature difference between the highest temperature and the lowest temperature (3 measurements for each heater, and the average value of the temperature differences in the data obtained). In addition, the results are graphically shown in FIG. 18.

從該圖18之結果,可知為直接積層型之均熱層131,或間接積層型之均熱層132,藉由對比較例1,設置厚度8μm極薄之均熱層13,發揮飛躍性的均熱作用(溫度差之降低作用)。即是,比較例1中之溫度差為18.3℃,對此,在實施例5(直接積層型均熱層8μm)中為11.2℃,在實施例7(間接積層型均熱層8μm)中為13.0℃。此可以說在實施例5中能取得38.8%之均熱作用,在實施例7中能取得29.0%之均熱作用。而且,該顯著之均熱作用至合計厚度為30μm左右能可得,從圖18可知。 From the results of FIG. 18, it can be seen that the direct build-up type thermal layer 131, or the indirect build-up type thermal layer 132, by providing a very thin thermal layer 13 with a thickness of 8 μm for Comparative Example 1, it has a dramatic effect Soaking effect (reducing effect of temperature difference). That is, the temperature difference in Comparative Example 1 was 18.3°C. In this regard, it was 11.2°C in Example 5 (direct build-up type soaking layer 8μm), and Example 7 (indirect build-up type soaking layer 8μm) 13.0°C. It can be said that 38.8% of the soaking effect can be obtained in Example 5, and 29.0% of the soaking effect can be obtained in Example 7. Moreover, this remarkable soaking effect can be obtained to a total thickness of about 30 μm, as can be seen from FIG. 18.

但是,從圖18,可知不管直接積層型之均熱層131,或間接積層型之均熱層132,對於均熱層厚度之增大,所取得的均熱作用逐漸縮小的樣子。即是,相對於比較例1之實施例7、實施例8及實施例9之各均熱作用,相對於比較例1之實施例5、實施例6及實施例10 之各均熱作用極優,對此比起該些均熱作用,相對於實施例11之實施例12的均熱作用,或相對於實施例13之實施例14的均熱作用被縮小。再者,使用直接積層型之均熱層131和間接積層型之均熱132之雙方,形成合計厚度200μm之均熱層13的例中的相同之溫度差為6.7℃。 However, from FIG. 18, it can be seen that regardless of the direct build-up type heat spreading layer 131 or the indirect build-up type heat spreading layer 132, as the thickness of the heat spreading layer increases, the obtained heat spreading effect gradually decreases. That is, with respect to each of the soaking effects of Example 7, Example 8, and Example 9 of Comparative Example 1, compared to Example 5, Example 6 and Example 10 of Comparative Example 1. Each of the heat equalization effects is extremely excellent. Compared with the heat equalization effects, the soaking effect of the embodiment 12 relative to the embodiment 11, or the soaking effect of the embodiment 14 relative to the embodiment 13 is reduced. In addition, the same temperature difference in the example in which both the direct build-up type soaking layer 131 and the indirect build-up type soaking layer 132 are used to form the soaking layer 13 with a total thickness of 200 μm is 6.7°C.

從該些情形,可以說不管直接積層型之均熱層131,或間接積層型之均熱層132,當取得更有效果性的均熱作用時,以將均熱層之合計厚度設為150μm以下(通常為1μm以上)為佳,以設為60μm以下為更佳。以設為40μm以下為更佳,以設為30μm以下為特佳。 From these conditions, it can be said that regardless of the direct build-up type heat spreading layer 131 or the indirect build-up type heat spreading layer 132, when a more effective heat spreading effect is obtained, the total thickness of the heat spreading layer is set to 150μm The following (usually 1 μm or more) is preferable, and it is more preferably 60 μm or less. It is more preferably 40 μm or less, and particularly preferably 30 μm or less.

[4]均熱層之平面形狀和均熱作用之相關 [4] The relationship between the planar shape of the soaking layer and the soaking effect

被設置在上述實施例1~實施例14之加熱器1的均熱層13之平面形狀中之任一者皆為圖17(a)所示之長方形狀(沾黏塗佈型態)。對此,圖9之均熱層之平面形狀,或圖17(b)~(g)之均熱層之平面形狀中之任一者皆為缺漏部133X(包含133H及133S)之型態。如此一來,下述般評估均熱層之平面形狀和均熱作用的相關。 Any of the planar shapes of the heat-soaking layer 13 provided in the heater 1 of the above-mentioned Example 1 to Example 14 is the rectangular shape (adhesion coating type) shown in FIG. 17(a). In this regard, either the planar shape of the thermal layer in FIG. 9 or the planar shape of the thermal layer in FIGS. 17(b) to (g) is the shape of the missing portion 133X (including 133H and 133S). In this way, the correlation between the planar shape of the soaking layer and the soaking effect is evaluated as follows.

(1)實施例15之加熱器(參照圖5) (1) The heater of Example 15 (refer to Figure 5)

與實施例7相同,取得具有厚度16μm之均熱層132的實施例15之加熱器。即是,實施例15為厚度16μm,具有平面形狀為長方形狀(沾黏塗佈型態)之間接積層型之均熱層132。 In the same manner as in Example 7, a heater of Example 15 having a heat uniform layer 132 with a thickness of 16 μm was obtained. That is, Example 15 has a thickness of 16 μm and a flat shape of a rectangular shape (adhesive coating type) with an interlayer heat spreading layer 132.

(2)實施例16之加熱器(參照圖5) (2) The heater of Example 16 (refer to Figure 5)

除將均熱層13(間接積層型之均熱層132)之平面形狀設為圖17(e)所示之條紋形狀以外,其他與實施例7相同,取得厚度16μm之均熱層132的實施例15之加熱器。另外,在平面形狀中之面積率,係將實施例15之加熱器之均熱層132設為100%之情況下,實施例16之加熱器的均熱層132為60.0%。 Except that the planar shape of the soaking layer 13 (indirect laminated type soaking layer 132) is set to the stripe shape shown in FIG. 17(e), the other is the same as in Example 7, and the implementation of obtaining the soaking layer 132 with a thickness of 16 μm Example 15 heater. In addition, when the area ratio in the planar shape is set to 100% for the heating layer 132 of the heater of Example 15, the heating layer 132 of the heater of Example 16 is 60.0%.

(3)測量3 (3) Measurement 3

使用在上述[4](1)所取得之實施例15之加熱器(參照圖5),和在上述[4](2)所取得之實施例16之加熱器(參照圖5),進行與上述[2]相同的測量,求出最高溫度和最低溫度之溫度差(每個加熱器進行3次之測量,所取得之各資料中之溫度差的平均值)。 Using the heater of Example 15 (refer to FIG. 5) obtained in [4](1) above and the heater of Example 16 (refer to FIG. 5) obtained in [4](2) above, and In the same measurement as in [2] above, find the temperature difference between the highest temperature and the lowest temperature (each heater is measured 3 times, and the average value of the temperature differences in the data obtained).

其結果,實施例15之溫度差為10.7℃。另外,實施例16之溫度差為11.5℃。即是,可知實施例16之加熱器之均熱層132,不管面積率相對於實施例15為60%,亦發揮同水準的均熱作用。具體而言,實施例15之加熱器之均熱層132係每面積率1%之均熱效果為0.11℃,對此實施例16之加熱器之均熱層132係每面積率1%之均熱效果成為0.19℃,可知可以藉由更少的材料,有效率地予以均熱化。從該結果,可知藉由形成缺漏部133X,使平面形狀最佳化,能取得更高的均熱作用。 As a result, the temperature difference of Example 15 was 10.7°C. In addition, the temperature difference in Example 16 was 11.5°C. That is, it can be seen that the heat equalizing layer 132 of the heater of Example 16 exerts the same level of equalizing effect regardless of the area ratio of 60% relative to that of Example 15. Specifically, the heating layer 132 of the heater of Example 15 has an average heating effect of 0.11°C per area rate of 1%, while the heating layer 132 of the heater of Example 16 has an average rate of 1% per area. The thermal effect is 0.19°C, and it can be seen that it is possible to efficiently homogenize the heat with less material. From this result, it can be seen that by forming the missing portion 133X, the planar shape is optimized, and a higher heat equalization effect can be obtained.

另外,因上述各實施例及比較例之加熱器之均熱層13中之任一者皆燒結塗佈有銀糊料而形成,故成為具有複數之金屬粒子相連而被形成之金屬多孔部135a,和被配置在金屬多孔部之間隙的非金屬部135b之型態(參照圖16(a)及(b))。其中,金屬多孔部135a為銀粒子相連之型態,具體而言,呈圖16(b)之型態。另外,非金屬部135b藉由玻璃而被形成。 In addition, since any of the heating layers 13 of the heaters of the above-mentioned embodiments and comparative examples are formed by sintering and coating the silver paste, it becomes a porous metal part 135a formed by connecting a plurality of metal particles. , And the configuration of the non-metal part 135b arranged in the gap between the metal porous part (refer to Figure 16 (a) and (b)). Among them, the metal porous portion 135a is in a form in which silver particles are connected, specifically, it is in the form of FIG. 16(b). In addition, the non-metal portion 135b is formed of glass.

另外,在本發明中,不限定於上述具體實施型態所示者,可以設為因應目的、用途在本發明之範圍內做各種變更的實施型態。 In addition, in the present invention, it is not limited to what is shown in the above-mentioned specific embodiment, and can be set as an embodiment in which various changes are made within the scope of the present invention according to the purpose and application.

再者,本發明包含以下之發明。 Furthermore, the present invention includes the following inventions.

(1)以構成基體之材料為不鏽鋼為要旨的加熱器。 (1) A heater whose main body is stainless steel.

(2)以將基體之另一面側之表面設為與被加熱物之對向面為要旨的加熱器。 (2) A heater whose main point is that the surface on the other side of the base is the surface facing the object to be heated.

(3)構成均熱層之材料係以從銀、銅、鋁及包含該些中之至少1種之合金中被選擇為要旨的加熱器。 (3) The material constituting the thermal layer is a heater selected from silver, copper, aluminum, and alloys containing at least one of these.

(4)以將均熱層之厚度設為D1,將基體之厚度設為D2之情況下,D1和D2之比D1/D2為0.6以下為要旨的加熱器。 (4) to the average thickness of the thermal layer to D 1, the thickness of the substrate is set in the case of the D 2, D 1 and D 2 ratio D 1 / D 2 is 0.6 or less as the gist of the heater.

(5)以發熱層具備被電性並聯連接之複數之電阻發熱單元,各電阻發熱單元具有電阻發熱配線,其係連結被配置成相對於掃掠方向呈略垂直的複數之橫配線部,和連接橫配線部間的縱配線部而被形成髮夾彎狀為要旨的加熱器。 (5) The heating layer is provided with a plurality of resistance heating units electrically connected in parallel, each resistance heating unit has a resistance heating wiring, which connects a plurality of horizontal wiring portions arranged to be slightly perpendicular to the sweep direction, and A heater in which the vertical wiring portion between the horizontal wiring portions is connected to form a hairpin bend shape.

(6)以橫配線部較縱配線部長為要旨的加熱器。 (6) A heater whose main point is that the horizontal wiring is longer than the vertical wiring.

(7)以縱配線對掃掠方向傾斜為要旨的加熱器。 (7) A heater with vertical wiring inclined to the sweep direction.

(8)構成各電阻發熱單元之各電阻發熱配線具有正的電阻發熱係數的加熱器。 (8) A heater in which each resistance heating wire constituting each resistance heating unit has a positive resistance heating coefficient.

1‧‧‧加熱器 1‧‧‧Heater

1a‧‧‧加熱器之一面 1a‧‧‧One side of heater

1b‧‧‧加熱器之另一面(加熱面) 1b‧‧‧The other side of the heater (heating surface)

11‧‧‧基體 11‧‧‧Matrix

11a‧‧‧基體之一面 11a‧‧‧One side of the substrate

11b‧‧‧基體之另一面 11b‧‧‧The other side of the substrate

12‧‧‧發熱層 12‧‧‧Heating layer

13‧‧‧均熱層 13‧‧‧Heat layer

131‧‧‧直接積層型之均熱層 131‧‧‧Direct stack type thermal layer

14、141、142、143‧‧‧絕緣層(玻璃釉層) 14,141,142,143‧‧‧Insulation layer (glass glaze layer)

Claims (18)

一種加熱器,其係在與被加熱物面對面之狀態下,掃掠上述被加熱物及主加熱器中之一方而加熱上述被加熱物,該加熱器之特徵在為具備:基體;發熱層,其係被設置在上述基體之一面側;及均熱層,其係被配置在上述基體和上述發熱層之層間,及上述基體之另一面側中之至少一方,藉由熱傳導率大於構成上述基體之材料的材料而被形成,作為上述均熱層,具有使玻璃釉層介於與上述基體之間而被積層之間接積層型的均熱層。 A heater that scans one of the heated object and the main heater while facing the heated object to heat the heated object. The heater is characterized by having: a substrate; a heating layer, It is provided on one side of the base body; and a heat-soaking layer is arranged between the base body and the heating layer, and at least one of the other side of the base body, and the heat conductivity is greater than that of the base body. The material is formed, and as the above-mentioned soaking layer, there is a layered soaking layer with a glass glaze layer interposed between the substrate and the layer to be laminated. 如請求項1之加熱器,其中作為上述均熱層,具有直接積層於上述基體之直接積層型的均熱層。 The heater of claim 1, wherein as the above-mentioned soaking layer, there is a direct-laminated type of soaking layer directly laminated on the above-mentioned substrate. 如請求項1或2之加熱器,其中上述均熱層,具有包含切口,或在表背貫通的貫通孔的缺漏部,隔著上述缺漏部,與上述均熱層之一面側鄰接之層,和與上述均熱層之另一面側鄰接之層接合。 The heater according to claim 1 or 2, wherein the heat spreading layer has a missing portion including a cutout or a through hole penetrating through the front and back, and a layer adjacent to one surface side of the heat spreading layer via the missing portion, It is joined to the layer adjacent to the other surface side of the above-mentioned heat-dissipating layer. 如請求項1或2之加熱器,其中上述均熱層具有複數之金屬粒子相連而被形成的金屬多孔部,和被配置在上述金屬多孔部之間隙的非金屬部。 The heater according to claim 1 or 2, wherein the heat spreading layer has a metal porous part formed by connecting a plurality of metal particles, and a non-metal part arranged in a gap between the metal porous part. 如請求項1或2之加熱器,其中上述發熱層具備被電性並聯連接的複數之電阻發熱單 元,各上述電阻發熱單元具有電阻發熱配線,其係連結被配置成相對於上述掃掠方向呈略垂直的複數之橫配線部,和連接上述橫配線部間的縱配線部而被形成髮夾彎狀,在相鄰之上述電阻發熱單元彼此之間,具有不形成上述電阻發熱配線的非形成部。 Such as the heater of claim 1 or 2, wherein the heating layer has a plurality of resistance heating elements electrically connected in parallel Element, each of the resistance heating units has resistance heating wiring, which is connected to a plurality of horizontal wiring portions arranged to be substantially perpendicular to the scanning direction, and a vertical wiring portion connecting the horizontal wiring portions to form a hairpin The curved shape has a non-formed portion where the resistance heating wiring is not formed between the adjacent resistance heating units. 一種加熱器,其係在與被加熱物面對面之狀態下,掃掠上述被加熱物及主加熱器中之一方而加熱上述被加熱物,該加熱器之特徵在為具備:基體;發熱層,其係被設置在上述基體之一面側;及均熱層,其係被配置在上述基體和上述發熱層之層間,及上述基體之另一面側中之至少一方,藉由熱傳導率大於構成上述基體之材料的材料而被形成,上述均熱層,具有包含切口,或在表背貫通的貫通孔的缺漏部,隔著上述缺漏部,與上述均熱層之一面側鄰接之層,和與上述均熱層之另一面側鄰接之層接合。 A heater that scans one of the heated object and the main heater while facing the heated object to heat the heated object. The heater is characterized by having: a substrate; a heating layer, It is provided on one side of the base body; and a heat-soaking layer is arranged between the base body and the heating layer, and at least one of the other side of the base body, and the heat conductivity is greater than that of the base body. The soaking layer has a cutout or a through-hole penetrating through the front and back, a layer adjacent to one side of the soaking layer via the missing portion, and a layer adjacent to one side of the soaking layer. The layers adjacent to the other side of the thermal layer are joined. 如請求項6之加熱器,其中作為上述均熱層,具有直接積層於上述基體之直接積層型的均熱層。 The heater of claim 6, wherein as the above-mentioned soaking layer, there is a direct-layered type soaking layer directly laminated on the above-mentioned base. 如請求項6或7之加熱器,其中作為上述均熱層,具有使玻璃釉層介於與上述基體之間而被積層之間接積層型的均熱層。 The heater of claim 6 or 7, wherein as the above-mentioned soaking layer, a layered soaking layer is provided with a glass glaze layer interposed between the substrate and the laminated layer. 如請求項6或7之加熱器,其中上述均熱層具有複數之金屬粒子相連而被形成的金屬多孔部,和被配置在上述金屬多孔部之間隙的非金屬部。 The heater according to claim 6 or 7, wherein the heat-soaking layer has a metal porous part formed by connecting a plurality of metal particles, and a non-metal part arranged in a gap between the metal porous part. 如請求項6或7之加熱器,其中上述發熱層具備被電性並聯連接的複數之電阻發熱單元,各上述電阻發熱單元具有電阻發熱配線,其係連結被配置成相對於上述掃掠方向呈略垂直的複數之橫配線部,和連接上述橫配線部間的縱配線部而被形成髮夾彎狀,在相鄰之上述電阻發熱單元彼此之間,具有不形成上述電阻發熱配線的非形成部。 The heater of claim 6 or 7, wherein the heating layer is provided with a plurality of resistance heating units electrically connected in parallel, and each of the resistance heating units has a resistance heating wiring, which is connected to be arranged relative to the scanning direction. A plurality of horizontal wiring parts that are slightly vertical and the vertical wiring parts connecting the horizontal wiring parts are formed in a hairpin bend shape, and there is a non-formation that does not form the resistance heating wiring between the adjacent resistance heating units. unit. 一種加熱器,其係在與被加熱物面對面之狀態下,掃掠上述被加熱物及主加熱器中之一方而加熱上述被加熱物,該加熱器之特徵在為具備:基體;發熱層,其係被設置在上述基體之一面側;及均熱層,其係被配置在上述基體和上述發熱層之層間,及上述基體之另一面側中之至少一方,藉由熱傳導率大於構成上述基體之材料的材料而被形成,上述均熱層具有複數之金屬粒子相連而被形成的金屬多孔部,和被配置在上述金屬多孔部之間隙的非金屬部。 A heater that scans one of the heated object and the main heater while facing the heated object to heat the heated object. The heater is characterized by having: a substrate; a heating layer, It is provided on one side of the base body; and a heat-soaking layer is arranged between the base body and the heating layer, and at least one of the other side of the base body, and the heat conductivity is greater than that of the base body. The heat spreading layer has a metal porous part formed by connecting a plurality of metal particles, and a non-metal part arranged in the gap between the metal porous part. 如請求項11之加熱器,其中作為上述均熱層,具有直接積層於上述基體之直接積層型的均熱層。 The heater of claim 11, wherein as the above-mentioned heat-dissipating layer, there is a direct-layer type heat-dissipating layer directly laminated on the above-mentioned substrate. 如請求項11或12之加熱器,其中作為上述均熱層,具有使玻璃釉層介於與上述基體之間而被積層之間接積層型的均熱層。 The heater of claim 11 or 12, wherein as the above-mentioned soaking layer, a layered soaking layer is provided with a glass glaze layer interposed between the substrate and the laminated layer. 如請求項11或12之加熱器,其中上述均熱層,具有包含切口,或在表背貫通的貫通孔的缺漏部,隔著上述缺漏部,與上述均熱層之一面側鄰接之層,和與上述均熱層之另一面側鄰接之層接合。 The heater of claim 11 or 12, wherein the thermal layer has a missing portion including a cutout or a through hole penetrating through the front and back, and a layer adjacent to one surface side of the thermal layer via the missing portion, It is joined to the layer adjacent to the other surface side of the above-mentioned heat-dissipating layer. 如請求項11或12之加熱器,其中上述發熱層具備被電性並聯連接的複數之電阻發熱單元,各上述電阻發熱單元具有電阻發熱配線,其係連結被配置成相對於上述掃掠方向呈略垂直的複數之橫配線部,和連接上述橫配線部間的縱配線部而被形成髮夾彎狀,在相鄰之上述電阻發熱單元彼此之間,具有不形成上述電阻發熱配線的非形成部。 Such as the heater of claim 11 or 12, wherein the heating layer is provided with a plurality of resistance heating units electrically connected in parallel, and each of the resistance heating units has a resistance heating wiring, which is connected and arranged so as to be relative to the scanning direction. A plurality of horizontal wiring parts that are slightly vertical and the vertical wiring parts connecting the horizontal wiring parts are formed in a hairpin bend shape, and there is a non-formation that does not form the resistance heating wiring between the adjacent resistance heating units. unit. 一種定影裝置,其特徵為具備如請求項1至15中之任一項之加熱器。 A fixing device characterized by having a heater according to any one of claims 1 to 15. 一種畫像形成裝置,其特徵為具備如請求項1至15中之任一項之加熱器。 An image forming device characterized by having a heater as claimed in any one of Claims 1 to 15. 一種加熱裝置,其特徵為具備如請求項1至15中之任一項之加熱器。 A heating device characterized by having a heater according to any one of claims 1 to 15.
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