TWI723548B - Edge detecting device - Google Patents

Abstract

An edge detecting device includes a conveying device, a coaxial light source, a plurality of reflecting elements and an image capturing device. The conveying device includes a detecting portion, a first conveying portion and a second conveying portion. The first conveying portion is disposed at one side of the detecting portion. The second conveying portion is disposed at the other side of the detecting portion. The image capturing device is disposed at one side of the conveying device so as to scan an analyte. The coaxial light source is coaxially disposed with the image capturing device and provides a coaxial light source ray to irradiate the analyte and produces a plurality of an analyte reflecting rays. The reflecting elements transmit the coaxial light source ray or the analyte reflecting rays. Therefore, the edge detecting device can reduce a detecting time and avoids the analyte damage.

Description

Edge inspection device

The present invention relates to an edge inspection device, in particular to an edge inspection device having a plurality of reflection elements to transmit a plurality of edge images of an object to be tested.

The object to be tested (such as wafers) will be inspected by the edge inspection device before packaging (such as appearance defects). In order to detect the multiple edges of the object to be tested, the conventional edge inspection device will use the rotating station to adjust the object to be tested. The placement angle on the transfer mechanism is used to detect the multiple edges of the object to be tested. However, the object to be tested is often damaged due to the external force of the rotating station, and the speed of the transfer mechanism must be reduced, resulting in an increase in the damage rate of the object to be tested and edge inspection The detection time of the device.

In view of this, it is a development trend in the industry to develop an edge inspection device that can prevent the object to be tested from being damaged during edge inspection and can increase the inspection speed.

The edge inspection device provided by the present invention allows the edge inspection device to selectively detect multiple edges of the object to be tested without setting a rotating station through the arrangement of the sensing system, the light source and the reflective element.

According to an embodiment of the present invention, an edge inspection device is provided, which includes a transfer mechanism, an image capture device, an external coaxial light source, and a plurality of reflective elements. The transfer mechanism includes a detection part, a first conveying part and a second conveying part. The first transfer part is arranged on one side of the detection part to transfer the object to be tested to the detection part. The second transmission part is arranged on the other side of the detection part to receive and transfer the object to be tested. The image capturing device is arranged on one side of the transfer mechanism to scan the object to be tested. The external coaxial light source is coaxially arranged with the image capturing device. The external coaxial light source is between the image capturing device and the detecting part. The external coaxial light source provides external coaxial light to illuminate the object under test to generate a plurality of reflected light from the object under test. The complex reflection element is arranged in the detection part. The plurality of reflective elements are used to reflect external coaxial light or the object under test respectively. In this way, the edge inspection device can detect the multiple edges of the object under test through the arrangement of the plurality of reflection elements, avoid damage to the object under test due to external forces, and can increase the detection speed of the edge inspection device.

According to another embodiment of the present invention, an edge inspection device is provided, which includes a transfer mechanism, a plurality of linear light sources, a plurality of image capturing devices, and a plurality of reflection element groups. The transfer mechanism includes a detection part, a first conveying part and a second conveying part. The first transfer part is arranged on one side of the detection part to transfer the object to be tested to the detection part. The second transmission part is arranged on the other side of the detection part to receive and transfer the object to be tested. The plural linear light sources are respectively arranged on two opposite sides of the transfer mechanism to provide plural linear light to irradiate the object to be measured and generate a plurality of reflected light from the object to be measured. The plural image capturing devices are respectively arranged on two opposite sides of the transfer mechanism to scan the object to be tested. The plurality of reflective element groups are respectively connected with the image capturing device for transmitting the light reflected by the object to be measured to the image capturing device. In this way, the edge inspection device can prevent the object to be tested from being collided and damaged by external forces, and the detection speed of the edge inspection device can be increased.

According to still another embodiment of the present invention, an edge inspection device is provided, which includes a transfer mechanism, an image capture device, a plurality of illuminating point light sources, and a plurality of reflective elements. The transfer mechanism includes a detection part, a first conveying part and a second conveying part. The first transfer part is arranged on one side of the detection part to transfer the object to be tested to the detection part. The second transmission part is arranged on the other side of the detection part to receive and transfer the object to be tested. The image capturing device is arranged on one side of the transfer mechanism to scan the object to be tested. The illuminating point-shaped light sources are respectively arranged on opposite sides of the image capturing device, and each illuminating point-shaped light source provides illuminating light to irradiate the object under test to generate a plurality of reflected light from the object under test. The plurality of reflection elements are arranged in the detection part to reflect the irradiated light or the object to be measured respectively. In this way, the edge inspection device can detect the multiple edges of the object under test through the arrangement of the plurality of reflection elements, avoid damage to the object under test due to external forces, and can increase the detection speed of the edge inspection device.

100, 200, 300, 500‧‧‧Edge inspection device

110, 210, 310, 510‧‧‧Transfer mechanism

111, 211, 311, 511‧‧‧Detection Department

112, 212, 312, 512‧‧‧th A transmission department

330a‧‧‧First linear light source

330b‧‧‧Second linear light source

351a, 351b‧‧‧Extension ring

352a, 352b‧‧‧first reflective element

353a, 353b‧‧‧Second reflective element

113, 213, 313, 513‧‧‧Second Transmission Unit

120‧‧‧Induction system

121‧‧‧Sensor

122‧‧‧Processor

130‧‧‧Light source

140、240、540‧‧‧Reflective element

150, 250, 350a, 350b, 550‧‧‧Image capture device

160‧‧‧Judgment unit

230‧‧‧External coaxial light source

231‧‧‧fill light point light source

241, 541‧‧‧Rotating reflection element

242、542‧‧‧Edge reflection element

251, 551‧‧‧Lens

260、560‧‧‧Motor

270, 360, 570‧‧‧Object to be tested

354a, 354b‧‧‧First inspection lens

355a, 355b‧‧‧Second inspection lens

356a, 356b‧‧‧reflective element group

531‧‧‧fill light point light source

532a‧‧‧First illuminating point light source

532b‧‧‧Second illuminating point light source

P1‧‧‧First detection zone

P2‧‧‧Second Inspection Area

Fig. 1 is a block diagram of an edge inspection device according to an embodiment of the present invention; Fig. 2A is a schematic diagram of an edge inspection device according to another embodiment of the present invention; Fig. 2B is a front view of the edge inspection device according to the embodiment of Fig. 2A View; Figure 2C shows a schematic diagram of another state of the edge inspection device of the embodiment of Figure 2A; Figure 2D shows a top view of the edge inspection device of the embodiment of Figure 2A; Figure 3A shows another of the present invention A schematic diagram of the edge inspection device of the embodiment; FIG. 3B is a schematic diagram of another state of the edge inspection device of the embodiment of FIG. 3A; Fig. 3C is a schematic diagram of another state of the edge inspection device of the embodiment in Fig. 3A; Fig. 3D is a schematic diagram of another state of the edge inspection device of the embodiment of Fig. 3A; Fig. 3E is a diagram of Fig. 3A A schematic diagram of another state of the edge inspection device of the embodiment; FIG. 3F shows a schematic diagram of another state of the edge inspection device of the embodiment in FIG. 3A; FIG. 4A shows another state of the edge inspection device of another embodiment of the present invention Schematic diagram; and FIG. 4B is a schematic diagram showing another state of the edge inspection device of the embodiment of FIG. 4A.

Hereinafter, various embodiments of the present invention will be described with reference to the drawings. For clarity, many practical details will be explained in the following description. However, it should be understood that these practical details should not be used to limit the present invention. In other words, in some embodiments of the present invention, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventionally used structures and elements will be shown schematically in the drawings; and repeated elements may be represented by the same numbers.

FIG. 1 is a block diagram of an edge inspection device 100 according to an embodiment of the present invention. The edge inspection device 100 includes a transfer mechanism 110, a sensing system 120, at least one light source 130, a plurality of reflective elements 140, and at least one image capturing device 150. The sensing system 120 can be installed in the transfer machine of the edge inspection device 100 The structure 110 or the image capturing device 150 of the edge inspection device 100 may be installed in other stations. The present invention is not limited to this, and the following embodiments are also the same, and will not be repeated. Specifically, in Figure 1, the sensing system 120 is electrically connected to the image capturing device 150 and the light source 130, and the sensing system 120 is disposed on the transfer mechanism 110 to sense the object to be measured 270 (please refer to Figure 2A for implementation) The mark of the method).

In detail, the transfer mechanism 110 includes a detection unit 111, a first transfer unit 112 and a second transfer unit 113. The first conveying part 112 is disposed on one side of the detecting part 111 to convey the test object 270 to the detecting part 111. The second transmission part 113 is disposed on the other side of the detection part 111 to receive and transfer the object to be tested 270. The sensing system 120 is disposed at the first transmission part 112 to sense the object to be measured 270. At least one light source 130 is electrically connected to the sensing system 120 and is actuated by the sensing system 120. The at least one light source 130 is used to provide at least one light source to illuminate the object 270 and generate a plurality of reflected light from the object. The plurality of reflective elements 140 are respectively used to transmit light from the light source or reflected light from the object under test. At least one image capturing device 150 is electrically connected to the sensing system 120 and is actuated by the sensing system 120. The image capturing device 150 receives the reflected light from the object to be tested to generate a plurality of detection images. In other words, the first transfer unit 112 of the transfer mechanism 110 can transfer the object 270 to the detection unit 111 for edge detection. In the transmission process of the first transmission part 112, when the sensing system 120 provided in the first transmission part 112 senses the object 270, the light source 130 and the image capturing device can be actuated according to the transmission speed of the transfer mechanism 110. 150. The transfer speed of the transfer mechanism 110 may be 500 mm/s, but it is not limited to this. When the test object 270 passes through the detection unit 111, the light source 130 provides light from the light source to irradiate the test object 270, thereby generating a plurality of reflected light from the test object. The reflective element 140 can be used to transmit light from the light source to illuminate the multiple edges or corners of the object to be measured 270 and generate reflected light from the object to be measured, or The reflected light from the object to be measured is transmitted to the image capturing device 150. In other words, the reflected light from the object under test can be generated by the light from the light source directly irradiating the object 270, or by reflecting the light from the light source through the reflective element 140 to irradiate the object 270. The image capturing device 150 receives the reflected light from the object under test and generates a plurality of detection images, which can be used to determine whether the object under test 270 is flawed. After the test object 270 passes the detection unit 111, the second transmission unit 113 receives the test object 270 that has passed the detection unit 111, and transfers the test object 270 to the next station for subsequent processing. In this way, the edge inspection device 100 does not need to slow down and adjust the direction of the test object 270 with the help of external force to perform edge detection of the test object 270, which can prevent the test object 270 from being damaged by the collision of the external force during the detection process. Reduce the size.

The sensing system 120 may include a sensor 121 and a processor 122. The sensor 121 is used to sense the object under test 270 and generate a sensing signal. The processor 122 is electrically connected to the sensor 121 and the image capturing device 150, and receives the sensing signal to turn on and off the image capturing device 150. The processor 122 can be used to execute a control program. In detail, the sensor 121 can be disposed on the first transmission part 112. When the sensor 121 senses the object 270, the sensor 121 can transmit the sensing signal to the processor 122. The processor 122 can execute a control program according to the sensing signal to activate the light source 130 and the image capturing device 150. In other words, after the sensor 121 detects the object 270, the edge inspection device 100 can activate the light source 130 and the image capturing device 150 according to the control program. In this way, the light source 130 and the image capturing device 150 can be prevented from being activated for a long time, which leads to waste of resources, and the interference between the light of the light source can be prevented from affecting the quality of the detected image. Of course, in other embodiments, the light source 130 and the image capturing device 150 can also be maintained in the normally-on mode, or be turned on and off as the edge inspection device 100 is turned on and off.

The edge inspection device 100 may further include a determining unit 160. The determining unit 160 is electrically connected to the image capturing device 150 to receive the detected image. The judging unit 160 can make a defect judgment based on the detected image to generate a judgment result. The judgment result can be a defective object to be tested or a non-defective object to be tested. The judging unit 160 can further judge the type and size of the defect based on the detected image.

As can be seen from FIGS. 2A to 2C, the edge inspection device 200 includes a transfer mechanism 210, a sensing system 120, an image capture device 250, at least one light source, and a plurality of reflective elements 240. Specifically, the at least one light source is an external coaxial light source 230. The sensing system 120 is disposed on the transfer mechanism 210 and is electrically connected to the image capturing device 250 and the external coaxial light source 230. The image capturing device 250 is disposed on one side of the transfer mechanism 210. The external coaxial light source 230 and the image capturing device 250 are coaxially arranged, and the external coaxial light source 230 is interposed between the image capturing device 250 and the transfer mechanism 210. The reflective element 240 is disposed on the transfer mechanism 210. The image capturing device 250 is electrically connected to the sensing system 120 and is activated by the sensing system 120 to scan the object 270. The scanning may be a line scan, but is not limited to this.

In detail, the transfer mechanism 210 includes a detection unit 211, a first transfer unit 212 and a second transfer unit 213. The first conveying part 212 is disposed on one side of the detecting part 211 to convey the test object 270 to the detecting part 211. The second transmission part 213 is disposed on the other side of the detection part 211 to receive and transfer the object to be tested 270. The sensing system 120 is disposed at the first transmission part 212 to sense the object to be measured 270. The external coaxial light source 230 provides external coaxial light to illuminate the object 270 to generate reflected light from the object. The plurality of reflection elements 240 are disposed in the detection part 211 to reflect external coaxial light or the object to be measured, respectively. The sensing system 120 can respectively actuate the external coaxial light source 230 and the image capturing device 250 according to the transmission speed of the transfer mechanism 210, but is not limited to this. image The capture device 250 is actuated to scan the object 270 to generate a plurality of detection images, wherein the scan may be a line scan, but is not limited to this. Specifically, the image capturing device 250 may include a lens 251, wherein the lens 251 is directed toward the detection portion 211 of the transfer mechanism 210 to scan the object 270 to be measured. The external coaxial light source 230 and the image capturing device 250 are coaxially arranged on the same side of the transfer mechanism 210, and the external coaxial light source 230 is interposed between the image capturing device 250 and the detection part 211. In FIG. 2A, the lens 251 and the external coaxial light source 230 are arranged coaxially. The external coaxial light source 230 is actuated by the sensing system 120 to provide external coaxial light to illuminate the object 270 passing through the detection part 211, so that the object 270 is illuminated by the external coaxial light to generate reflected light of the object. The multiple reflection element 240 allows the light reflected by the object to be measured to be transmitted to the lens 251 of the image capturing device 250. The image capture device 250 receives the reflected light from the object to be measured and generates a plurality of detection images according to the reflected light of the object to determine whether the object 270 is flawed, wherein the plurality of detection images include a front edge scan image, a side edge scan image, and a rear edge Scan the image. After the test object 270 passes the detection unit 211, the second transmission unit 213 receives the test object 270 that has passed the detection unit 211, and transfers it to the next station for subsequent processing. Thereby, the edge inspection device 200 can prevent the object 270 from being damaged by external force during edge inspection and has a shorter inspection time, thereby improving inspection efficiency and product yield.

The structure of the sensing system 120 of the edge inspection device 200 and the operation relationship with the external coaxial light source 230 and the image capturing device 250 are the same as those of the sensing system 120 and the light source 130 and the image capturing device 150 in FIG. Another repeat.

The edge inspection device 200 may further include a plurality of complementary light point light sources 231. The supplementary light point light source 231 is arranged on two opposite sides of the detection part 211 and is connected to the sensor The system 120 is electrically connected and activated by the induction system 120. The supplementary light point light source 231 can provide point light to illuminate the object 270 to be measured. Specifically, in Figure 2D, the number of light supplement point light sources 231 of the edge inspection device 200 is 4. When the test object 270 is square, the four corners of the test object 270 can be filled with light, so that the The lead angle of the measured object 270 is irradiated by the point-shaped light to generate the lead angle measured object reflected light, wherein the lead angle measured object reflected light includes the leading angle measured object reflected light and the rear lead angle measured object reflected light.

The reflection element 240 of the edge inspection device 200 includes a rotating reflection element 241 and a plurality of edge reflection elements 242. The rotating reflection element 241 is rotatably provided in the detection part 211. The edge reflection elements 242 are respectively disposed on two opposite sides of the rotating reflection element 241. Specifically, the rotating reflection element 241 and the edge reflection element 242 may be total reflection elements, but not limited thereto. In addition, the edge inspection device 200 may further include a motor 260. The motor 260 is electrically connected to the rotating reflective element 241 and the sensing system 120 and is actuated by the sensing system 120 to adjust the rotating reflective element 241. Specifically, in Figure 2A, the rotating reflection angle of the rotating reflection element 241 is the first reflection angle to reflect the external coaxial light provided by the external coaxial light source 230 to the front end of the object under test 270, and the front end of the object under test 270 After being irradiated by the external coaxial light, the reflected light from the front-end object to be measured can be generated and transmitted to the lens 251 of the image capturing device 250 to form a front-end edge scanning image. After the front edge scanning is completed, the motor 260 is actuated by the processor 122 of the sensing system 120 to adjust the rotation reflection angle of the rotating reflection element 241, that is, the rotation reflection element 241 is adjusted from the first reflection angle to the second reflection angle. In FIG. 2B, the number of edge reflection elements 242 is two and they are respectively disposed on two opposite sides of the rotating reflection element 241. The external coaxial light provided by the external coaxial light source 230 can illuminate the side edge of the test object 270 and produce The side edge of the object to be measured reflects light, and the edge reflection element 242 is used to reflect the light reflected from the side edge of the object to be measured to the lens 251 of the image capturing device 250 to form a side edge scanning image. In Figure 2C, the rotating reflection angle of the rotating reflection element 241 is the second reflection angle to reflect the external coaxial light to the rear end of the test object 270. The rear end of the test object 270 receives the external coaxial light to produce a back end test The object reflects light and transmits it to the lens 251 of the image capturing device 250 to form a rear edge scan image. It is worth mentioning that the external coaxial light source 230 includes a light source part (not shown) and an external coaxial reflector (not shown). The light source part is used to provide external coaxial light, and the external coaxial light passes through the external coaxial half mirror to reflect The external coaxial light is reflected to the detection part 211. The light reflected by the object to be measured at the front end, the light reflected from the object to be measured at the side edge and the light reflected from the object to be measured at the rear end can penetrate the outer coaxial half mirror and be transmitted to the lens 251.

In addition, the edge inspection device 200 may further include a judging unit 160 (please cooperate with Fig. 1). The image capturing device 250 transmits the front edge scan image, the side edge scan image, and the rear edge scan image to the determining unit 160 to perform defect determination and generate a determination result.

After the sensor 121 of the sensing system 120 arranged in the first transmitting part 212 senses the object 270, the sensor 121 transmits the sensing signal to the processor 122 to respectively actuate the external coaxial light source 230, the supplementary light point light source 231 and Image capture device 250. When the front end of the test object 270 enters the detection area of the detection section 211, the external coaxial light source 230, the supplementary light point light source 231 for illuminating the front end of the test object 270 and the image capturing device 250 are actuated by the sensing system 120 The supplementary light point light source 231 used to illuminate the leading angle of the front end of the test object 270 is the two supplementary light point light sources 231 close to the second transmission part 213. The external coaxial light source 230 provides external coaxial light illumination The rotating reflecting element 241 and the edge reflecting element 242 of the reflective element 240, wherein the rotating reflecting element 241 reflects the external coaxial light to the front edge of the test object 270 to form the front end of the test object to reflect the light and transmit it to the image capturing device 250. The supplementary light point light source 231 illuminating the front lead angle of the test object 270 provides spot light to illuminate the front lead angle of the test object 270 and forms a lead angle to reflect the light from the test object and transmit it to the image capturing device 250. The image capturing device 250 receives the light reflected from the front end object to be measured and the leading angle reflected light from the object to be measured to generate a front edge scan image. After the front edge is scanned, the motor 260 is actuated by the sensing system 120 to adjust the rotating reflection angle of the rotating reflection element 241 to the second reflection angle. The complementary light point light source 231 that illuminates the leading angle of the test object 270 is actuated by the sensing system 120 and turned off after the scanning of the front edge of the object 270 is completed.

After the front edge scanning is completed, the external coaxial light source 230 continuously provides external coaxial light to illuminate the side edge of the object to be measured 270 to form the side edge of the object to be measured to reflect the light. The edge reflection element 242 is used to reflect the light reflected from the side edge of the object to be measured to The image capturing device 250 forms a side edge scan image.

When the back end of the test object 270 enters the detection area of the detection part 211, the supplementary light point light source 231 that illuminates the back end of the test object 270 is actuated by the sensing system 120 to provide a point light to illuminate the back end of the test object 270 The lead angle is used to generate the trailing angle to reflect the light from the object to be measured and transmit it to the image capturing device 250. The supplementary light point light source 231 irradiating the trailing angle of the test object 270 is the second supplementary light point light source 231 close to the first conveying part 212. The coaxial light outside the external coaxial light source 230 irradiates the rotating reflecting element 241 with the second reflection angle. The rotating reflecting element 241 reflects the external coaxial light to the rear edge of the test object 270 to form the rear end of the test object to reflect the light and transmit it to the image Extraction device 250. When the rear edge scan is completed, the external coaxial light source 230. The complementary light point light source 231 and the image capturing device 250 that illuminate the trailing angle of the test object 270 are actuated by the sensing system 120 to turn off. The second transfer unit 213 can transfer the object 270 to the next station for subsequent processing. In other embodiments, the external coaxial light source 230, the supplementary light point light source 231, and the image capturing device 250 can also be maintained in the normally-on mode, or opened and closed as the edge inspection device 200 is switched on and off.

It can be seen from FIGS. 3A to 3F that the edge inspection device 300 includes a transfer mechanism 310, a sensing system 120, a plurality of image capturing devices 350a, 350b, and a plurality of reflective element groups 356a, 356b, wherein the sensing system 120 can be installed in the edge inspection device 300 The transfer mechanism 310 of the edge inspection device 300, the image capturing devices 350a, 350b of the edge inspection device 300, or other stations are used to sense the object 360. In the embodiment of FIGS. 3A to 3F, at least one light source is a plurality of linear light sources (not marked separately), which are respectively the first linear light source 330a and the second linear light source 330b, but the invention is not limited thereto. The sensing system 120 is electrically connected to the image capturing devices 350a, 350b and the linear light source. The first and second linear light sources 330a, 330b are respectively disposed on two opposite sides of the transfer mechanism 310 and are electrically connected to the sensing system 120, and are actuated by the sensing system 120 to illuminate the test object 360, and generate a plurality of test objects Reflect light. The plural image capturing devices 350a and 350b are respectively disposed on two opposite sides of the transfer mechanism 310 to scan the object 360 to be tested. The plurality of reflective element groups 356a and 356b are respectively arranged in the image capturing devices 350a and 350b.

In detail, the transfer mechanism 310 includes a detection part 311, a first transfer part 312 and a second transfer part 313. The first transfer part 312 is arranged on one side of the detection part 311 to transfer the object 360 to the detection part 311. The second transmission part 313 is disposed on the other side of the detection part 311 to receive and transfer the object 360 to be tested. The sensing system 120 includes a sensor 121 and a processor 122. Specifically, in Figure 3A, the sensor 121 is disposed in the image capturing device 350a to sense the object 360 to be measured and generate a sensing signal to the processor 122. It is worth mentioning that the sensor 121 can also be arranged in the image capturing device 350a, and sense the object 360 through the image capturing device 350a. The processor 122 can execute a control program according to the sensing signal. The plurality of reflective element groups 356a and 356b are connected to the image capturing devices 350a and 350b, respectively, for transmitting the reflected light from the object to be measured to the image capturing devices 350a and 350b. In other words, the first transfer part 312 of the transfer mechanism 310 can transfer the test object 360 to the detection part 311 for edge detection. In the transmission process of the first transmission part 312, when the sensor 121 of the sensing system 120 provided in the image capturing device 350a senses the object to be measured 360, the processor 122 can be actuated separately according to the transmission speed of the transfer mechanism 310 The first and second linear light sources 330a, 330b and the image capturing devices 350a, 350b. In other words, the processor 122 executes a control program according to the sensing signal to activate the first and second linear light sources 330a, 330b and the image capturing devices 350a, 350b. When the test object 360 passes through the detection part 311, the first and second linear light sources 330a, 330b are actuated by the sensing system 120 to provide linear light to irradiate the test object 360, thereby generating a plurality of reflected light from the test object. The image capturing devices 350a and 350b are actuated by the sensing system 120 to scan the object 360 and receive light reflected by the object. The image capturing devices 350a and 350b form a detection image according to the reflected light of the object to be tested to determine whether the object 360 is flawed. The detection image may include the front upper surface detection image, the front edge detection image, the front lower surface detection image, and the back upper surface. Surface inspection image, trailing edge inspection image, and posterior lower surface inspection image. The reflective element groups 356a, 356b are arranged in the image capturing devices 350a, 350b to transmit the reflected light from the object to be measured to the image capturing devices 350a, 350b, so that the image capturing devices 350a, 350b can form a detection shadow based on the reflected light from the object to be measured. Like. Specifically, in Figure 3A, the number of linear light sources (that is, the first linear light source 330a and the second linear light source 330b), the image capturing devices 350a, 350b, and the reflective element groups 356a, 356b are all two. The first linear light source 330a is located above the first conveying portion 312 of the transfer mechanism 310 and is used to provide the first detection area P1 of the first linear light irradiating the detection portion 311. The second linear light source 330b is located under the second conveying portion 313 of the transfer mechanism 310, and is used to provide the second linear light irradiating the second detection area P2 of the detection portion 311 (as shown in FIG. 3B). The image capturing device 350 a is disposed on the upper side of the second transfer portion 313 of the transfer mechanism 310. The image capturing device 350b is disposed under the first transfer portion 312 of the transfer mechanism 310. In this way, the edge inspection device 300 does not need to adjust the direction of the object 360 to be tested with the help of external force to perform edge detection on the edge of the object 360 to be tested perpendicular to the transmission direction, which can prevent the object to be tested 360 from being damaged by the collision of the external force. The detection speed of the edge inspection device 300 is improved. Therefore, product yield and detection efficiency can be improved.

The image capturing devices 350a, 350b include extension rings 351a, 351b, first detection lenses 354a, 354b, and second detection lenses 355a, 355b. The extension rings 351a and 351b include a reflective side and a semi-reflective side. The first detection lens 354a, 354b is connected to the semi-reflective side of the extension ring 351a, 351b. The second detecting lens 355a, 355b is connected to the reflection side of the extension ring 351a, 351b. The reflective element groups 356a and 356b include first reflective elements 352a and 352b and second reflective elements 353a and 353b. The first reflective elements 352a and 352b are arranged on the semi-reflective side of the extension rings 351a and 351b. The second reflective elements 353a and 353b are arranged on the reflective side of the extension rings 351a and 351b. Specifically, the first reflective elements 352a and 352b are semi-reflective elements, and the second reflective elements 353a and 353b are total reflective elements, but it is not limited thereto. In detail, the first inspection lens 354a, 354b and the second inspection lens The measuring lenses 355a and 355b are set toward the detection part 311 of the transfer mechanism 310 to scan the object 360 to be measured. Part of the reflected light of the test object generated by the linear light irradiating the test object 360 can enter the semi-reflective side of the extension ring 351a, 351b through the first detection lens 354a, 354b, and penetrate the semi-reflective side of the extension ring 351a, 351b The first reflective elements 352a and 352b are transferred to the image capturing devices 350a and 350b. The reflected light of another part of the test object generated by the linear light irradiating the test object 360 can enter the reflection side of the extension ring 351a, 351b through the second detection lens 355a, 355b, and pass through the reflection side of the extension ring 351a, 351b. The second reflective elements 353a and 353b are reflected to the first reflective elements 352a and 352b. The first reflective elements 352a and 352b receive the reflected light from the object to be measured and then reflect the reflected light from the measured object to the image capturing devices 350a and 350b.

In addition, the edge inspection device 300 may further include a judgment unit 160 (please refer to FIG. 1 for cooperation). The determining unit 160 is electrically connected to the image capturing devices 350a and 350b. The image capturing devices 350a and 350b transfer the front upper surface detection image, the front edge detection image, the front lower surface detection image, the rear upper surface detection image, the rear edge detection image, and the rear lower surface detection image to the judgment unit 160 for defect judgment. And produce the judgment result.

Please follow Fig. 3A. After the sensor 121 of the sensing system 120 senses the object 360, the sensor 121 transmits a sensing signal to the processor 122, and the processor 122 executes a control program according to the sensing signal to activate the first and second Two-line light sources 330a, 330b and image capturing device 350a. When the upper surface of the front section of the test object 360 reaches the first detection zone P1, the first linear light source 330a provides first line light to illuminate the upper surface of the front section of the test object 360 to form the front upper surface of the test object reflecting light and pass through The first detection lens 354a enters the half reflection of the extension ring 351a On the side, the first reflective element 352a located on the semi-reflective side of the extension ring 351a receives the reflected light from the upper surface of the front section and transmits the reflected light from the upper surface of the front section to transmit the reflected light from the upper surface of the front section. To the image capturing device 350a, the image capturing device 350a receives the light reflected from the object to be tested on the upper surface of the front section, and generates a detection image of the upper surface of the front section according to the light reflected from the object to be measured on the upper surface of the front section. When the upper surface of the front section of the test object 360 passes through the first detection area P1, the first linear light source 330a stops providing the first linear light.

Please follow Figure 3B. When the front edge and lead angle of the test object 360 reach the second detection area P2 of the detection part 311, the second linear light source 330b is used to provide second linear light to illuminate the front edge and guide angle of the test object 360. Angle to form the front edge of the object to be measured to reflect light. The light reflected from the front edge of the object to be measured enters the reflection side of the extension ring 351a through the second detection lens 355a. The second reflective element 353a disposed on the reflection side of the extension ring 351a receives the light reflected by the front edge of the object to be measured, and sets the front edge to be measured. The reflected light from the object is reflected to the first reflective element 352a. After the first reflective element 352a receives the light reflected from the front edge of the object to be measured, it reflects the light reflected from the front edge of the object to be measured to the image capturing device 350a, and the image capturing device 350a receives the front The edge of the object to be measured reflects light, and a front edge detection image is generated based on the light reflected from the front edge of the object to be measured. After the front edge of the test object 360 passes through the second detection area P2, the second linear light source 330b continuously provides the second linear light.

Please follow Fig. 3B and Fig. 3C together. When the front edge and lead angle of the test object 360 reach the second detection area P2 of the detection part 311, the second linear light source 330b is used to provide a second line of light to illuminate the test object 360 The lower surface of the front section is formed to reflect light from the object under test on the lower surface of the front section. The light reflected from the lower surface of the front section enters the semi-reflective side of the extension ring 351b through the first detection lens 354b, and is arranged in the extension ring The first reflective element 352b on the semi-reflective side of 351b receives the reflected light from the lower surface of the front section to be measured, and allows the reflected light from the lower surface of the front section to be measured to penetrate to the image capturing device 350b, and the image capturing device 350b receives the lower surface of the front section to be measured The object reflects light, and the front lower surface detection image is generated according to the reflected light from the lower surface of the object to be tested. After the lower surface of the front section of the test object 360 passes through the second detection area P2, the second linear light source 330b stops providing the second linear light.

Please follow the 3D picture. When the upper surface of the back section of the test object 360 reaches the first detection area P1, the first linear light source 330a provides the first linear light to irradiate the upper surface of the back section of the test object 360 to form the upper surface of the back section. The object under test reflects light, and the light reflected from the upper surface of the back section enters the semi-reflective side of the extension ring 351a through the first detection lens 354a. The first reflective element 352a located on the semi-reflective side of the extension ring 351a receives the reflection from the upper surface of the back end object to be tested The light reflected from the upper surface of the rear section of the object to be measured penetrates, so as to transmit the reflected light from the upper surface of the rear section of the object to be measured to the image capturing device 350a. The image capturing device 350a receives the reflected light from the upper surface of the rear section of the object to be measured. The light reflected from the object to be tested on the upper surface of the rear section produces a detection image on the upper surface of the rear section. When the upper surface of the back section of the test object 360 passes through the first detection area P1, the first linear light source 330a continuously provides the first linear light.

Please follow Figure 3E. When the trailing edge of the test object 360 and its lead angle reach the first detection area P1 of the detection part 311, the first linear light source 330a is used to provide the first linear light to irradiate the test object 360. The edge and its leading angle form the trailing edge to reflect light from the object under test. The light reflected from the trailing edge of the object to be measured enters the reflective side of the extension ring 351b through the second detection lens 355b. The second reflective element 353b disposed on the reflective side of the extension ring 351b receives the light reflected from the trailing edge of the object to be measured, and sets the trailing edge to be measured. The object reflected light is reflected to the first reflective element located on the reflective side of the extension ring 351b 352b. The first reflective element 352b receives the light reflected from the trailing edge of the object to be measured, and reflects the trailing edge of the object to be measured to the image capturing device 350b. The image capturing device 350b receives the trailing edge of the object to be measured and reflects the light according to the trailing edge of the object to be measured. The edge of the object to be measured reflects light to produce a trailing edge detection image. After the trailing edge of the test object 360 passes through the first detection area P1, the first linear light source 330a stops providing the first linear light.

Please take the picture 3F together. When the lower surface of the test object 360 reaches the second detection area P2, the second linear light source 330b provides a second linear light to illuminate the lower surface of the test object 360 to form the lower surface of the test object 360. The object reflects light, and the reflected light from the lower surface of the back-end object enters the semi-reflective side of the extension ring 351b through the first detection lens 354b. The first reflective element 352b located on the semi-reflective side of the extension ring 351b receives the light reflected from the lower surface of the back-end object. And for the reflected light from the lower surface of the back section to pass through, so that the reflected light from the lower surface of the back section can be transmitted to the image capturing device 350b. The image capturing device 350b receives the reflected light from the lower surface of the back section to be measured according to the back section. The light reflected by the object to be tested on the lower surface produces a detection image on the lower surface of the rear section. When the lower surface of the back section of the test object 360 passes through the second detection area P2, the second linear light source 330b stops providing the second linear light.

Thereby, the edge inspection device 300 can perform front edge detection, back edge detection, front upper surface detection, back upper surface detection, back upper surface detection, front lower surface detection, and back end of the test object 360 without adjusting the direction of the test object 360 by external force. The lower surface detection can prevent the object 360 to be tested from being damaged by the impact of external force during the detection process, and can also increase the detection speed of the edge inspection device 300.

It can be seen from FIGS. 4A and 4B that the edge inspection device 500 is substantially the same as the edge inspection device 200, and also includes a transfer mechanism 510, a sensing system 120, an image capture device 550, at least one light source, and a plurality of reflective elements 540. The similarities are not repeated here. The transfer mechanism 510 may include a detection part 511, a first transfer part 512 and a second transfer part 513. The difference is that at least one light source is a plurality of illuminating point-shaped light sources (not marked separately), which are respectively arranged on opposite sides of the image capturing device 550, and each illuminating point-shaped light source provides illuminating light to illuminate the object 570 to generate a plurality of The object under test reflects light. The plural irradiation point light sources include a first irradiation point light source 532a and a second irradiation point light source 532b. The first and second illuminating point-shaped light sources 532a, 532b are respectively actuated by the processor 122 of the sensing system 120 to provide irradiated light to irradiate the test object 570 passing through the detection part 511, so that the test object 570 is irradiated by the irradiated light to produce the test object 570 Object reflects light. In this way, the edge inspection device 500 can perform edge detection on the object 570 by the arrangement of the first and second illuminating point light sources 532a and 532b, which can achieve the effect similar to or the same as that of the edge inspection device 200.

Similarly, the edge inspection device 500 may further include a plurality of light-filling point light sources 531, which will not be described here. In addition, the edge inspection device 500 may further include a motor 560. The motor 560 is electrically connected to the rotating reflection element 541 and the sensing system 120 and is actuated by the processor 122 of the sensing system 120 to adjust the rotating reflection element 541. Specifically, in Figure 4A, the rotating reflection angle of the rotating reflection element 541 is the first reflection angle to reflect the irradiated light provided by the first illuminating point-shaped light source 532a to the front end of the test object 570, the test object 570 After the front end is irradiated by the irradiated light, the reflected light from the front end object to be measured can be generated and transmitted to the lens 551 of the image capturing device 550 to form the front edge scanning image. After the front edge scanning is completed, the motor 560 is actuated by the processor 122 of the sensing system 120 to adjust the rotation reflection angle of the rotating reflection element 541, that is, the rotation reflection element 541 is adjusted from the first reflection angle to the second reflection angle. The illuminating light provided by the first illuminating point light source 532a and the second illuminating point light source 532b can illuminate the object 570 The side edge of the side edge generates the side edge object to be measured to reflect the light, and the edge reflection element 542 is used to reflect the side edge of the object to be measured to the lens 551 of the image capturing device 550 to form the side edge scanning image. In Figure 4B, the rotating reflection angle of the rotating reflection element 541 is the second reflection angle to reflect the illumination light provided by the second illuminating point-shaped light source 532b to the back end of the object under test 570, and the back end of the object under test 570 is The illumination light provided by the second illumination point light source 532b can generate the back-end object to be measured reflected light and transmit it to the lens 551 of the image capture device 550 to form a back-end edge scan image. In addition, the operation relationship between the edge inspection device 500 and the judgment unit 160 is the same as that of the edge inspection device 200 and the judgment unit 160 in FIG. 1 and FIG. 2A, and will not be repeated here.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone who is familiar with the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be subject to the scope of the attached patent application.

100‧‧‧Edge inspection device

110‧‧‧Transfer agency

111‧‧‧Testing Department

112‧‧‧First Transmission Department

113‧‧‧Second Transmission Department

120‧‧‧Induction system

121‧‧‧Sensor

122‧‧‧Processor

130‧‧‧Light source

140‧‧‧Reflective element

150‧‧‧Image capture device

160‧‧‧Judgment unit

Claims (10)

An edge inspection device includes: a transfer mechanism, including: a detection part; a first transfer part arranged on one side of the detection part to transfer an object to be tested to the detection part; and a second transfer part , Arranged on the other side of the detection part to receive and transfer the object to be measured; an image capture device arranged on one side of the transfer mechanism to scan the object to be measured; an external coaxial light source, and The image capturing device is arranged coaxially and between the image capturing device and the detection part, the external coaxial light source provides an external coaxial light to irradiate the object under test to generate a plurality of reflected light rays of the object under test; and The reflecting element is arranged in the detecting part and is used to reflect the external coaxial light or the reflected light of the objects to be measured respectively. For example, the edge inspection device described in item 1 of the scope of patent application further includes: a plurality of complementary light point-shaped light sources, respectively disposed on two opposite sides of the detection part, each of the complementary light point-shaped light sources provides a point-shaped light to illuminate the waiting Measured object. As for the edge inspection device described in claim 1, wherein the reflection elements include: a rotating reflection element, which is rotatably disposed on the detecting part; and a plurality of edge reflection elements are respectively disposed opposite to the rotating reflection element Two sides; and the edge inspection device further includes: a motor electrically connected to the rotating reflecting element to adjust the rotating reflecting element. An edge inspection device includes: a transfer mechanism, including: a detection part; a first transfer part arranged on one side of the detection part to transfer an object to be tested to the detection part; and a second transfer part , Arranged on the other side of the detection part to receive and transfer the object to be measured; plural linear light sources are respectively arranged on two opposite sides of the transfer mechanism to provide plural linear light to irradiate the object to be measured and generate A plurality of objects under test reflect light; a plurality of image capturing devices are respectively arranged on two opposite sides of the transfer mechanism to scan the object under test; and The plurality of reflective element groups are respectively connected with each of the image capturing devices, and used for transmitting the light reflected by the objects to be tested to each of the image capturing devices. According to the edge inspection device described in claim 4, each of the image capturing devices includes: an extension ring including a reflective side and a half-reflection side; a first detection lens and the half-reflection of the extension ring Side connection; and a second detection lens connected to the reflection side of the extension ring. According to the edge inspection device described in claim 5, each of the reflective element groups includes: a first reflective element provided on the semi-reflective side of the extension ring; and a second reflective element provided on the extension The reflective side of the ring. In the edge inspection device described in item 6 of the scope of patent application, the first reflective element is a semi-reflective element, and the second reflective element is a total-reflective element. An edge inspection device, including: a transfer mechanism, including: a detection part; A first conveying part is arranged on one side of the detecting part to convey an object to be tested to the detecting part; and a second conveying part is arranged on the other side of the detecting part to receive and transfer the to-be-tested object. Measured object; an image capture device arranged on one side of the transfer mechanism to scan the object to be measured; a plurality of irradiating point-shaped light sources are respectively arranged on opposite sides of the image capture device, and each of the irradiation points The shaped light source provides an illuminating light to irradiate the object to be measured to generate a plurality of reflected light of the object to be measured; and a plurality of reflective elements are arranged in the detection part to reflect the irradiated light or the reflected light of the objects to be measured, respectively. For example, the edge inspection device described in item 8 of the scope of patent application further includes: a plurality of supplementary light point light sources, respectively arranged on two opposite sides of the detection part, so that each supplementary light point light source provides a point light to illuminate the Analyte. The edge inspection device described in item 8 of the scope of patent application, wherein the reflection elements include: a rotating reflection element, which is rotatably disposed on the detection part; and A plurality of edge reflection elements are respectively arranged on two opposite sides of the rotating reflection element; and the edge inspection device further includes: a motor electrically connected to the rotation reflection element to adjust the rotation reflection element.

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