TWI719650B - 濃度測定方法 - Google Patents
濃度測定方法 Download PDFInfo
- Publication number
- TWI719650B TWI719650B TW108134607A TW108134607A TWI719650B TW I719650 B TWI719650 B TW I719650B TW 108134607 A TW108134607 A TW 108134607A TW 108134607 A TW108134607 A TW 108134607A TW I719650 B TWI719650 B TW I719650B
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- Taiwan
- Prior art keywords
- light
- concentration
- measurement
- temperature
- fluid
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Links
- 238000000691 measurement method Methods 0.000 title claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 89
- 239000012530 fluid Substances 0.000 claims abstract description 37
- 238000002835 absorbance Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 238000004364 calculation method Methods 0.000 claims abstract description 9
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 claims description 28
- 239000007789 gas Substances 0.000 description 55
- 239000013307 optical fiber Substances 0.000 description 19
- 238000002834 transmittance Methods 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 9
- 239000000539 dimer Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 230000031700 light absorption Effects 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/5907—Densitometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
- G01N2021/0314—Double pass, autocollimated path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1731—Temperature modulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N2021/8578—Gaseous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/121—Correction signals
- G01N2201/1211—Correction signals for temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/121—Correction signals
- G01N2201/1218—Correction signals for pressure variations
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-185495 | 2018-09-28 | ||
| JP2018185495 | 2018-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202028718A TW202028718A (zh) | 2020-08-01 |
| TWI719650B true TWI719650B (zh) | 2021-02-21 |
Family
ID=69950684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108134607A TWI719650B (zh) | 2018-09-28 | 2019-09-25 | 濃度測定方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11460396B2 (enExample) |
| JP (1) | JP7305200B2 (enExample) |
| KR (1) | KR102514737B1 (enExample) |
| CN (1) | CN112703391A (enExample) |
| TW (1) | TWI719650B (enExample) |
| WO (1) | WO2020066769A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324212A (zh) * | 2021-12-30 | 2022-04-12 | 杭州谱育科技发展有限公司 | 流体检测装置和方法 |
| FR3151399B1 (fr) * | 2023-07-18 | 2025-07-11 | Ifp Energies Now | Procédé pour le suivi dans le temps de la concentration en un composé chimique d’un fluide, au moyen d’un système de mesure optique et d’un capteur de température |
| CN117470795B (zh) * | 2023-12-27 | 2024-03-29 | 成都千嘉科技股份有限公司 | 非分光型红外气体传感器及其气体测试方法 |
| JP7658022B1 (ja) * | 2024-10-24 | 2025-04-07 | 荏原実業株式会社 | 濃度測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016080431A (ja) * | 2014-10-14 | 2016-05-16 | 住友電気工業株式会社 | 光プローブ、測定装置及び測定方法 |
| JP2018025499A (ja) * | 2016-08-12 | 2018-02-15 | 株式会社フジキン | 濃度測定装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5886719A (ja) * | 1981-11-18 | 1983-05-24 | Clarion Co Ltd | 薄膜気相成長装置 |
| JPH0743296A (ja) * | 1993-07-24 | 1995-02-14 | Horiba Ltd | 気体試料の濃度・温度同時計測方法 |
| JP2007232742A (ja) * | 1998-05-15 | 2007-09-13 | Mitsui Mining & Smelting Co Ltd | 対象物内部品質測定装置および測定方法 |
| US6137581A (en) | 1998-05-15 | 2000-10-24 | Mitsui Mining & Smelting Co., Ltd. | Measurement apparatus for measuring internal quality of object |
| US6527089B2 (en) * | 2000-04-06 | 2003-03-04 | Avid, L.L.C. | Caliper drive for a bicycle ball bearing mechanical disc brake caliper |
| US20160351443A1 (en) * | 2001-07-18 | 2016-12-01 | Regents Of The University Of Colorado A Body Corporate | Inorganic ald film on an organic polymer surface |
| KR20060066561A (ko) * | 2004-12-13 | 2006-06-16 | 한국표준과학연구원 | 오존 농도의 절대 측정을 위한 자외선 흡수 광도계의 광흡수용 시료셀과 평행광 선택 투과기 |
| JP5885699B2 (ja) | 2013-05-09 | 2016-03-15 | 株式会社フジキン | 脆性破壊性光透過窓板の固定構造及びこれを用いた脆性破壊性光透過窓板の固定方法 |
| JP2015114260A (ja) * | 2013-12-13 | 2015-06-22 | 三菱日立パワーシステムズ株式会社 | 排ガス分析装置 |
| WO2015119127A1 (ja) * | 2014-02-07 | 2015-08-13 | 株式会社村田製作所 | ガス濃度検出装置 |
| US10408742B2 (en) * | 2014-11-23 | 2019-09-10 | Fujikin Incorporated | Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method |
| CN106062533A (zh) * | 2015-01-20 | 2016-10-26 | 株式会社东芝 | 呼气测量装置和呼气测量方法以及气室 |
| JP6912766B2 (ja) | 2016-07-29 | 2021-08-04 | 国立大学法人徳島大学 | 濃度測定装置 |
| US10697889B2 (en) | 2017-07-21 | 2020-06-30 | Chevron Phillips Chemical Company Lp | Methods for determining transition metal compound concentrations in multicomponent liquid systems |
| US10030086B1 (en) | 2017-07-21 | 2018-07-24 | Chevron Phillips Chemical Company Lp | Methods for determining transition metal compound concentrations in multicomponent liquid systems |
-
2019
- 2019-09-18 KR KR1020217003063A patent/KR102514737B1/ko active Active
- 2019-09-18 WO PCT/JP2019/036481 patent/WO2020066769A1/ja not_active Ceased
- 2019-09-18 US US17/279,179 patent/US11460396B2/en active Active
- 2019-09-18 JP JP2020548533A patent/JP7305200B2/ja active Active
- 2019-09-18 CN CN201980050994.9A patent/CN112703391A/zh active Pending
- 2019-09-25 TW TW108134607A patent/TWI719650B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016080431A (ja) * | 2014-10-14 | 2016-05-16 | 住友電気工業株式会社 | 光プローブ、測定装置及び測定方法 |
| JP2018025499A (ja) * | 2016-08-12 | 2018-02-15 | 株式会社フジキン | 濃度測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102514737B1 (ko) | 2023-03-29 |
| WO2020066769A1 (ja) | 2020-04-02 |
| JP7305200B2 (ja) | 2023-07-10 |
| JPWO2020066769A1 (ja) | 2021-08-30 |
| CN112703391A (zh) | 2021-04-23 |
| TW202028718A (zh) | 2020-08-01 |
| US11460396B2 (en) | 2022-10-04 |
| US20220003662A1 (en) | 2022-01-06 |
| KR20210027428A (ko) | 2021-03-10 |
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