CN112703391A - 浓度测定方法 - Google Patents

浓度测定方法 Download PDF

Info

Publication number
CN112703391A
CN112703391A CN201980050994.9A CN201980050994A CN112703391A CN 112703391 A CN112703391 A CN 112703391A CN 201980050994 A CN201980050994 A CN 201980050994A CN 112703391 A CN112703391 A CN 112703391A
Authority
CN
China
Prior art keywords
concentration
light
measured
temperature
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980050994.9A
Other languages
English (en)
Chinese (zh)
Inventor
永濑正明
石井秀和
西野功二
池田信一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN112703391A publication Critical patent/CN112703391A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59Transmissivity
    • G01N21/5907Densitometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/031Multipass arrangements
    • G01N2021/0314Double pass, autocollimated path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1731Temperature modulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • G01N2021/8578Gaseous flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274Calibration, base line adjustment, drift correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/12Circuits of general importance; Signal processing
    • G01N2201/121Correction signals
    • G01N2201/1211Correction signals for temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/12Circuits of general importance; Signal processing
    • G01N2201/121Correction signals
    • G01N2201/1218Correction signals for pressure variations

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
CN201980050994.9A 2018-09-28 2019-09-18 浓度测定方法 Pending CN112703391A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018-185495 2018-09-28
JP2018185495 2018-09-28
PCT/JP2019/036481 WO2020066769A1 (ja) 2018-09-28 2019-09-18 濃度測定方法

Publications (1)

Publication Number Publication Date
CN112703391A true CN112703391A (zh) 2021-04-23

Family

ID=69950684

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980050994.9A Pending CN112703391A (zh) 2018-09-28 2019-09-18 浓度测定方法

Country Status (6)

Country Link
US (1) US11460396B2 (enExample)
JP (1) JP7305200B2 (enExample)
KR (1) KR102514737B1 (enExample)
CN (1) CN112703391A (enExample)
TW (1) TWI719650B (enExample)
WO (1) WO2020066769A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114324212A (zh) * 2021-12-30 2022-04-12 杭州谱育科技发展有限公司 流体检测装置和方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3151399B1 (fr) * 2023-07-18 2025-07-11 Ifp Energies Now Procédé pour le suivi dans le temps de la concentration en un composé chimique d’un fluide, au moyen d’un système de mesure optique et d’un capteur de température
CN117470795B (zh) * 2023-12-27 2024-03-29 成都千嘉科技股份有限公司 非分光型红外气体传感器及其气体测试方法
JP7658022B1 (ja) * 2024-10-24 2025-04-07 荏原実業株式会社 濃度測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5886719A (ja) * 1981-11-18 1983-05-24 Clarion Co Ltd 薄膜気相成長装置
JP2018025499A (ja) * 2016-08-12 2018-02-15 株式会社フジキン 濃度測定装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743296A (ja) * 1993-07-24 1995-02-14 Horiba Ltd 気体試料の濃度・温度同時計測方法
JP2007232742A (ja) * 1998-05-15 2007-09-13 Mitsui Mining & Smelting Co Ltd 対象物内部品質測定装置および測定方法
US6137581A (en) 1998-05-15 2000-10-24 Mitsui Mining & Smelting Co., Ltd. Measurement apparatus for measuring internal quality of object
US6527089B2 (en) * 2000-04-06 2003-03-04 Avid, L.L.C. Caliper drive for a bicycle ball bearing mechanical disc brake caliper
US20160351443A1 (en) * 2001-07-18 2016-12-01 Regents Of The University Of Colorado A Body Corporate Inorganic ald film on an organic polymer surface
KR20060066561A (ko) * 2004-12-13 2006-06-16 한국표준과학연구원 오존 농도의 절대 측정을 위한 자외선 흡수 광도계의 광흡수용 시료셀과 평행광 선택 투과기
JP5885699B2 (ja) 2013-05-09 2016-03-15 株式会社フジキン 脆性破壊性光透過窓板の固定構造及びこれを用いた脆性破壊性光透過窓板の固定方法
JP2015114260A (ja) * 2013-12-13 2015-06-22 三菱日立パワーシステムズ株式会社 排ガス分析装置
WO2015119127A1 (ja) * 2014-02-07 2015-08-13 株式会社村田製作所 ガス濃度検出装置
JP2016080431A (ja) 2014-10-14 2016-05-16 住友電気工業株式会社 光プローブ、測定装置及び測定方法
US10408742B2 (en) * 2014-11-23 2019-09-10 Fujikin Incorporated Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method
CN106062533A (zh) * 2015-01-20 2016-10-26 株式会社东芝 呼气测量装置和呼气测量方法以及气室
JP6912766B2 (ja) 2016-07-29 2021-08-04 国立大学法人徳島大学 濃度測定装置
US10697889B2 (en) 2017-07-21 2020-06-30 Chevron Phillips Chemical Company Lp Methods for determining transition metal compound concentrations in multicomponent liquid systems
US10030086B1 (en) 2017-07-21 2018-07-24 Chevron Phillips Chemical Company Lp Methods for determining transition metal compound concentrations in multicomponent liquid systems

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5886719A (ja) * 1981-11-18 1983-05-24 Clarion Co Ltd 薄膜気相成長装置
JP2018025499A (ja) * 2016-08-12 2018-02-15 株式会社フジキン 濃度測定装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HIDEO OKABE ET AL.: "Temperature-dependent ultraviolet absorption spectra of group IIIb and Vb compounds used in photo-assisted chemical vapor deposition", J. APPL. PHYS., vol. 69, no. 3, pages 1730 - 1735 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114324212A (zh) * 2021-12-30 2022-04-12 杭州谱育科技发展有限公司 流体检测装置和方法

Also Published As

Publication number Publication date
KR102514737B1 (ko) 2023-03-29
WO2020066769A1 (ja) 2020-04-02
JP7305200B2 (ja) 2023-07-10
JPWO2020066769A1 (ja) 2021-08-30
TWI719650B (zh) 2021-02-21
TW202028718A (zh) 2020-08-01
US11460396B2 (en) 2022-10-04
US20220003662A1 (en) 2022-01-06
KR20210027428A (ko) 2021-03-10

Similar Documents

Publication Publication Date Title
CN112703391A (zh) 浓度测定方法
KR102535963B1 (ko) 농도 측정 장치
TWI762233B (zh) 濃度測定方法及濃度測定裝置
JP7360100B2 (ja) 濃度測定装置
JP7492269B2 (ja) 濃度測定装置
US11686671B2 (en) Concentration measurement device
JP7244900B2 (ja) 反射部材の表裏識別方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20210423

WD01 Invention patent application deemed withdrawn after publication