TWI715393B - Tray positioning method, tray positioning device and associated - Google Patents

Abstract

The present invention provides a tray positioning method, including: S1, controlling a tray to rotate with a first preset rotation speed; S2, controlling the tray to slow down until it stops when a positioning structure of the tray is detected, and controlling the tray to rotate along an opposite direction of the last rotation direction with a slower speed. S3, repeating S2; S4, controlling the tray to stop immediately when the speed of the tray is down to or below a second preset rotation speed and the positioning structure is detected again. In the present invention, the tray rotates back and forth with a speed gradually reduces, so that the speed is low enough when the tray stops. The angle caused by the inertia when the tray stops immediately is reduced, the accuracy of positioning the tray can be increased, and the wear between the tray and the motion connecting part is decreased.

Description

Tray positioning method, tray positioning device and related semiconductor processing equipment

The present invention relates to the technical field of microelectronic processing, in particular, to a tray positioning method, a tray positioning device for implementing the method, and a semiconductor processing equipment including the tray positioning device.

Equipment used for chemical vapor deposition (CVD, chemical vapor deposition) processes, such as atmospheric-pressure chemical vapor deposition (APCVD, atmospheric-pressure chemical vapor deposition) equipment, etc. usually include a reaction chamber and a device set in the reaction chamber A tray carrying wafers to be processed can be rotated around the center of rotation of the tray under the drive of a rotating motor, so that multiple wafers can be placed one by one in different placement positions on the tray.

At present, it is usually necessary to locate the wafer placement position before placing the wafer. The positioning process usually involves the sensing device set above the tray and the positioning structure set on the tray (such as protrusions, notches, or special color graphics, etc. ) The completion of the cooperation includes: controlling the rotating motor to drive the tray to start rotating in a certain direction. When the induction device detects that the positioning structure has passed its detection position, it can determine the positioning and placing position, and then control the rotating motor to stop emergency.

However, in the application process of the wafer placement position positioning method, the positioning accuracy usually decreases gradually, so that the wafer cannot be accurately placed in the placement position.

The invention aims to provide a tray positioning method, which can improve the positioning accuracy and positioning efficiency of the tray.

As a first embodiment of the present invention, a method for positioning a tray is provided, including: S1, controlling the tray to rotate in a first direction at a first preset speed; S2, when a positioning structure on the tray is detected , Control the pallet to decelerate until it stops rotating, and again control the pallet to rotate in the direction opposite to the previous rotation, and the rotation speed is less than the previous rotation speed; S3, cycle execution of step S2; S4, the rotation of the pallet When the speed drops to less than or equal to a second preset speed and the positioning structure is detected again, the tray is controlled to stop immediately.

Preferably, controlling the tray to stop immediately includes: controlling the tray to decelerate at a maximum braking angular acceleration until it stops.

Preferably, step S2 further includes: when the tray rotates beyond a first preset angle and the positioning structure has not been detected, controlling the tray to decelerate until it stops rotating, and again controlling the tray to move in the direction opposite to the previous rotation The direction of rotation, and the rotation speed is less than the previous rotation speed.

Preferably, the first preset angle is 360°.

Preferably, before step S1, the method further includes: S0, when the positioning structure is detected before the tray starts to rotate, controlling the tray to rotate in a second direction opposite to the first direction by a second preset angle .

As a second embodiment of the present invention, a tray positioning device is provided, including: a controller, a sensor, and a driver, wherein the driver is used to drive the tray to rotate and is also used to stop the tray from rotating; The sensor is used to detect a positioning structure on the tray; the controller is connected to the driver and the sensor, and the controller is used to control the driver to drive the tray to rotate in a first direction at a first preset speed The controller is also used to cyclically when the sensor detects the positioning structure on the tray, control the driver to decelerate the tray until it stops rotating, and again control the driver to drive the tray along with the previous rotation Rotate in the opposite direction, and the rotation speed is less than the previous rotation speed; the controller is also used for when the rotation speed of the tray drops to less than or equal to a second preset speed and the sensor detects the positioning structure again When, control the drive to stop the tray immediately.

Preferably, the controller is further configured to control the driver to make the tray at a maximum braking angle when the rotation speed of the tray drops to less than or equal to the second preset speed and the sensor detects the positioning structure again The acceleration decelerates until it stops.

Preferably, the controller is also used to control the driver to decelerate the tray until it stops rotating when the tray rotates more than a predetermined angle and the sensor has not detected the positioning structure, and control the driver again Drive the tray to rotate in the direction opposite to the previous rotation, and the rotation speed is lower than the previous rotation speed.

Preferably, the controller is further configured to control the driver to drive the tray to rotate in a second direction opposite to the first direction when the positioning structure can be detected by the sensor before the tray starts to rotate. Preset angle.

As a third embodiment of the present invention, a semiconductor processing equipment is provided, which includes a processing chamber and a tray arranged in the processing chamber. The tray can rotate and a positioning structure is provided on the tray. The semiconductor processing equipment It also includes the aforementioned tray positioning device.

In the tray positioning method provided by the present invention, the tray rotates repeatedly, and each rotation speed is lower than the previous rotation speed, so that each time the tray decelerates to stop rotation, the stop position of the positioning structure gradually approaches the predetermined position. In addition, the rotation speed of the tray at the last stop is sufficiently low, so the angle at which the tray rotates forward during an emergency stop can be reduced, thereby improving the positioning accuracy of the tray. In addition, the rotation speed of the tray at the last stop is much lower than the first preset rotation speed at the start of rotation, and the inertia of the tray is small, which can reduce the wear between the tray and the moving connector and avoid a decrease in positioning accuracy. In addition, since the initial rotation process of the first preset speed is only used to initially find the position of the positioning structure, and will not affect the final positioning accuracy, the first preset speed can be higher than the rotation in the existing fixed-speed positioning method Speed, thereby improving the positioning efficiency of the tray.

The above-mentioned tray positioning device and semiconductor processing equipment provided by the present invention can be used to realize the above-mentioned tray positioning method, and therefore can also achieve the technical effects of improving the positioning accuracy of the tray, avoiding the decrease of the positioning accuracy of the tray, and improving the efficiency of the tray positioning.

The following disclosure provides many different embodiments or examples of different components used to implement the disclosure. Specific examples of components and configurations are described below to simplify the disclosure. Of course, these are only examples and are not intended to be limiting. For example, in the following description, a first member formed on or on a second member may include an embodiment in which the first member and the second member are formed in direct contact, and may also include additional members therein An embodiment that can be formed between the first member and the second member so that the first member and the second member may not directly contact. In addition, the present disclosure may repeat reference numbers and/or letters in each example. This repetition is for the purpose of simplification and clarity and does not in itself indicate the relationship between the various embodiments and/or configurations discussed.

In addition, for ease of description, spatially relative terms such as "below", "below", "below", "above", "upper" and the like can be used herein to describe one element or component and another(s) The relationship between components or components is illustrated in the figure. Spatial relative terms are intended to cover different orientations of devices in use or operation other than those depicted in the figures. The device can be oriented in other ways (rotated by 90 degrees or in other orientations) and therefore the spatial relative descriptors used in this article can also be interpreted.

Although the numerical ranges and parameters stated in the broad scope of this disclosure are approximate values, the numerical values stated in the specific examples are reported as accurately as possible. However, any numerical value inherently contains certain errors that are necessarily due to the standard deviation seen in the respective test measurement. Furthermore, as used herein, the term "about" generally means within 10%, 5%, 1%, or 0.5% of a given value or range. Alternatively, the term "approximately" means within one acceptable standard error of the mean when considered by a general technician of the technology. Except in the operation/work example, or unless explicitly specified in other ways, such as the total numerical range of the quantity of the material disclosed in this article, the duration of time, the temperature, the operating condition, the ratio of the quantity and the like, Quantities, values and percentages should be understood as modified by the term "about" in all examples. Correspondingly, unless otherwise indicated, the numerical parameters stated in the scope of the present disclosure and the accompanying invention application are approximate values that can be changed as needed. At the very least, each numerical parameter should be explained at least in view of the number of significant digits reported and by applying ordinary rounding techniques. Ranges can be expressed herein as from one endpoint to the other or between two endpoints. All ranges disclosed herein include endpoints unless otherwise specified.

The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not used to limit the present invention.

The embodiment of the present invention provides a pallet positioning method. As shown in Figure 1, the method includes:

Step S1: Control the tray to rotate in a first direction at a first preset speed.

Step S2: When the positioning structure on the tray is detected, the tray is controlled to decelerate until it stops rotating, and the tray is again controlled to rotate in a direction opposite to the previous rotation direction, and the rotation speed is lower than the previous rotation speed.

Step S3: cyclically execute step S2;

Step S4: When the rotation speed of the tray drops to less than or equal to the second preset rotation speed and the positioning structure is detected again, the tray is controlled to stop immediately.

After research, the applicant found that the existing tray positioning step only controls the tray to rotate in one direction at a rotation speed. In order to ensure positioning efficiency, the rotation speed is usually not very low (usually 0.6 rpm). When the structure reaches the predetermined position and performs an emergency stop, the tray will continue to rotate forward to a certain angle during the emergency stop, which affects the positioning accuracy of the tray. In addition, the inertia of the tray is relatively large at a higher rotation speed, and the emergency stop action is likely to cause wear between the tray and the moving connector, and the positioning accuracy of the tray gradually decreases.

Therefore, the applicant designed the tray to rotate repeatedly around the tray, and each rotation speed is lower than the previous rotation speed, so that each time the tray decelerates to stop rotation, the stop position of the positioning structure gradually approaches the predetermined position (that is, the detection positioning The location of the structure). Since the rotation speed of the tray at the last stop is sufficiently low (less than or equal to the second preset speed), the angle at which the tray rotates forward during an emergency stop (that is, when the tray is immediately stopped in step S4) can be reduced, thereby increasing the tray The positioning accuracy. In addition, the rotation speed of the tray at the last stop (less than or equal to the second preset speed) is much lower than the first preset speed at the start of rotation, and the inertia of the tray is small, which can reduce the wear between the tray and the moving connector , To avoid the decrease of positioning accuracy.

In addition, since the initial rotation process of the first preset speed is only used to initially find the position of the positioning structure, and will not affect the final positioning accuracy, the first preset speed can be higher than the rotation in the existing fixed-speed positioning method Speed (for example, can be no less than 3rpm), thereby improving the positioning efficiency of the tray.

It should be noted that, in the present invention, in order to reduce the wear between the tray and the moving connector, in step S2 executed cyclically, the angular acceleration of the tray decelerating until it stops rotating is less than the angular acceleration of the tray emergency stop in the prior art.

To further improve the positioning accuracy of the tray, preferably, as shown in Figure 2, the above step S4 may include: when the rotation speed of the tray drops to less than or equal to the second preset speed and the positioning structure is detected again, controlling the tray to brake at the maximum The angular acceleration decelerates until it stops.

Wherein, the maximum braking angular acceleration refers to the angular acceleration of the tray when it stops suddenly, and the angular acceleration is greater than the angular acceleration of the tray at any one time before step S4 decelerates until it stops rotating.

Since the rotation speed of the tray at the last stop (less than or equal to the second preset speed) is much lower than the first preset speed at the start of rotation, the inertia of the tray is small. Therefore, the applicant designed the tray to stop in an emergency at the last time Braking further improves the positioning accuracy of the pallet on the premise that it will not cause abrasion between the pallet and the moving connector.

In order to improve the positioning efficiency of the tray, preferably, as shown in Figure 3, step S2 may further include:

When the tray rotates beyond the first preset angle and the positioning structure has not been detected, control the tray to decelerate until it stops rotating, and again control the tray to rotate in the opposite direction to the previous rotation, and the rotation speed is less than the previous rotation speed .

In the present invention, when the rotating angle of the tray is greater than the preset angle and the arrival of the positioning structure is not detected, the tray is directly controlled to decelerate and stop rotating, and enter the next lower rotation speed reverse rotation process, thereby avoiding the tray rotating speed too much. The positioning structure cannot be detected quickly, which causes the tray to rotate too many times, which improves the positioning efficiency of the tray.

The present invention does not specifically limit the size of the first preset angle. For example, in order to improve the accuracy of determining the "idling state", the first preset angle may be 540°. In order to improve the positioning efficiency of the tray, preferably, the first preset angle may be 360°.

The probability that the positioning structure is not detected when the tray rotates at a low rotation speed is small. Therefore, optionally, step S2 may include: when the rotation speed of the tray is not lower than the third preset rotation speed, and the tray rotation exceeds the first preset rotation speed. When the angle is set and the positioning structure has not been detected, the tray is controlled to decelerate until it stops rotating, and the tray is again controlled to rotate in the direction opposite to the previous rotation, and the rotation speed is less than the previous rotation speed. Wherein, the third preset speed is less than the first preset speed, and the third preset speed is greater than the second preset speed.

The applicant also found that the positioning structure of the tray may have appeared at the predetermined position when the positioning of the tray started. However, in the tray positioning method provided by the present invention, in order to improve the positioning efficiency, the rotation speed of the first few rotations of the tray is preferably a higher rotation speed. Compared with the conventional positioning mode, the too high rotation speed may easily cause the positioning structure The adjacent induction pulses of the induction device pass through a predetermined position, so the positioning structure in the present invention preferably has a certain width. But accompanying it, affected by the width of the positioning structure, in the solution of the present invention, detecting the positioning structure is actually "detecting the edge of the positioning structure", so only the accidental phenomenon that the positioning structure is initially at the predetermined position The positioning accuracy of the pallet cannot be guaranteed.

In order to solve the above-mentioned problems and further improve the positioning accuracy of the tray, preferably, as shown in Figure 4, the above-mentioned tray positioning method may further include performing before step S1:

Step S0: When the positioning structure is detected before the tray starts to rotate, the tray is controlled to rotate in a second direction opposite to the first direction by a second preset angle.

In the present invention, when the positioning structure designed by the applicant is initially at the predetermined position, the tray rotates in the second direction by a second predetermined angle, so that the tray restarts positioning according to the situation that the positioning structure is not at the predetermined position, thereby ensuring the positioning accuracy of the tray .

In the present invention, one of the first direction and the second direction is a clockwise direction, and the other is a counterclockwise direction.

The present invention does not specifically limit the number of cycles of step S2. For example, in order to ensure the positioning accuracy of the tray, preferably, the number of cycles of step S2 is not less than three times.

In order to avoid the wear between the tray and the moving connecting piece causing the positioning accuracy of the tray to decrease, preferably, the process of controlling the rotation of the tray each time includes:

Control the tray to accelerate to a predetermined rotation speed;

The tray is controlled to rotate at a predetermined rotation speed at a uniform speed.

In order to further reduce the wear between the tray and the moving connector caused by excessive angular acceleration, preferably, during the acceleration process when the tray starts to rotate, the angular acceleration of the tray is not greater than the angular acceleration when the tray decelerates and stops rotating.

To facilitate the understanding of those skilled in the art, a specific implementation of the tray positioning method provided by the present invention is given below:

As shown in FIGS. 5 and 6, in the semiconductor processing equipment, the positioning structure 21 on the tray 20 is a notch provided at the edge of the tray, and the sensor 30 is used to detect the notch. The pallet positioning method is as follows:

The control tray rotates in a counterclockwise direction (first direction) at a speed of 3rpm (first preset speed).

(At this time, the rotation speed of the tray is greater than the third preset speed 1.8rpm) If the positioning structure is not detected after 30 seconds (that is, when the rotation angle is greater than the preset angle 540°), the tray is controlled to decelerate until it stops rotating, and Control the tray to rotate in the clockwise direction again, and the rotation speed is 1.5rpm;

If the positioning structure on the tray is detected, the tray is controlled to decelerate until it stops rotating, and the tray is controlled to rotate in a clockwise direction again, and the rotation speed is 1.5 rpm.

(At this time, the rotation speed of the tray is already less than the third preset rotation speed of 1.8rpm) When the positioning structure on the tray is detected, the tray is controlled to decelerate until it stops rotating, and the tray is again controlled to rotate in the counterclockwise direction, and the rotation speed is 0.6 rpm.

When the positioning structure on the tray is detected, the tray is controlled to decelerate until it stops rotating, and the tray is controlled to rotate in a clockwise direction again, and the rotation speed is 0.1 rpm (the second preset speed).

(At this time, the rotation speed of the tray is already less than the second preset rotation speed of 0.1 rpm) When the positioning structure is detected, the control tray immediately stops.

Under the same conditions, the steps of conventional pallet positioning usually include:

Rotate the tray clockwise at a speed of 0.6rpm;

When the positioning structure is detected, the pallet is controlled to stop emergency.

As shown in Fig. 10, when the angle between the initial position of the positioning structure and the position of the sensor 30 is 180°, the rotation speed of the tray changes with time under the control of the two methods. It can be seen from the drawings that the tray positioning method provided by the present invention only takes 30 seconds to complete the positioning of the tray, and its efficiency is much higher than the conventional positioning efficiency in 53 seconds.

In order to facilitate those skilled in the art to more intuitively understand the advantages of the method provided by the present invention that are different from conventional technologies. As shown in FIG. 7, the angle of the tray 20 is divided according to the number of detection pulses (20,000 pulses) emitted by the sensor 30 when the tray 20 rotates one revolution. As shown in Figure 11, it is a schematic diagram of the relationship between the initial angle between the positioning structure on the tray and the sensor 30 and the time spent in the positioning process. The data in the figure clearly shows that the tray positioning method provided by the present invention can be used in The positioning is achieved within 18~39 seconds, while the conventional fixed-speed positioning method requires 0-100 seconds, and the time required for the positioning process in the pallet positioning method provided by the present invention is in most cases lower than the time spent in conventional positioning , Its positioning efficiency is significantly higher than that of conventional positioning methods.

The embodiment of the present invention also provides a tray positioning device. As shown in Figures 8 and 9, the tray positioning device includes a controller 10, a sensor 30 and a driver 60, wherein:

The driver 60 is used to drive the tray 20 to rotate, and is also used to stop the tray 20 from rotating;

The sensor 30 is used to detect the positioning structure on the tray 20;

The controller 10 is connected to the driver 60 and the sensor 30 for controlling the driver 60 to drive the tray 20 to rotate in a first direction at a first preset speed.

The controller 10 is also used to cyclically control the driver 60 to decelerate the tray 20 until the rotation of the tray 20 is stopped when the sensor 30 detects the positioning structure on the tray 20, and again to control the driver 60 to drive the tray 20 in the direction opposite to the previous rotation. The direction of rotation, and the rotation speed is less than the previous rotation speed.

The controller 10 is also used to control the driver 60 to stop the tray 20 immediately when the rotation speed of the tray 20 drops to less than or equal to the second preset speed and the sensor 30 detects the positioning structure again.

Figures 8 and 9 are schematic diagrams showing the positional relationship between the sensor 30 and the driver 60 of the tray positioning device and the tray 20. The above-mentioned embodiments of the present invention have performed the beneficial effects of the tray positioning method for semiconductor processing equipment. The detailed description will not be repeated here.

In order to further improve the positioning accuracy of the tray, preferably, the controller 10 is also used to control the driver 60 to make the tray 20 when the rotation speed of the tray 20 drops to less than or equal to the second preset speed and the sensor 30 detects the positioning structure again. Decelerate at the maximum braking angular acceleration until it stops.

In order to improve the positioning efficiency of the tray, preferably, the controller 10 is also used to control the driver 60 to decelerate the tray 20 until it stops rotating when the tray 20 rotates more than a predetermined angle and the sensor 30 has not detected the positioning structure. And again, the driver 60 is controlled to drive the tray 20 to rotate in a direction opposite to the previous rotation direction, and the rotation speed is lower than the previous rotation speed.

In order to further improve the positioning accuracy of the tray, preferably, the controller 10 is also used to control the driver 60 to drive the tray 20 in a second direction opposite to the first direction when the positioning structure can be detected by the sensor 30 before the tray 20 starts to rotate. The direction is rotated by a second preset angle.

As a third embodiment of the present invention, there is also provided a semiconductor processing equipment, as shown in Figure 6, Figure 8, and Figure 9. The semiconductor processing equipment includes a process chamber 50 and a process chamber 50 arranged in the process chamber 50. The tray 20 is capable of rotating, and a positioning structure 21 is provided on the tray 20. The semiconductor processing equipment further includes the aforementioned tray positioning device.

The present invention does not specifically limit how the driver 60 of the tray positioning device drives the tray 20 to perform rotation, deceleration, acceleration and other actions. For example, as shown in Figures 8 and 9, the driver 60 may include a rotating motor, and the output of the rotating motor The shaft is connected to the rotation center of the tray 20. The present invention does not specifically limit the material of the tray 20. For example, the tray 20 may be a graphite plate. As shown in Figs. 5 and 6, a wafer slot 22 for placing wafers is also formed on the tray 20. The semiconductor processing equipment may also include a manipulator. After the tray is positioned, the manipulator clamps the wafers and puts the wafers into the wafer slot 22 one by one.

The present invention does not specifically limit the specific structure of the positioning structure 21, as long as the positioning structure 21 can be sensed by the sensor 30. For example, the positioning structure 21 may be protrusions, depressions, through holes, or edges on the tray 20. Gap or special color lines, etc.

As shown in Figures 6, 8, and 9, when the positioning structure 21 is a notch on the edge of the tray 20 or a through hole that penetrates the tray 20 in the thickness direction, the sensor 30 can be a distance sensor. The distance measuring sensor is used to detect a certain position (that is, a predetermined position) passed by the gap. When the positioning structure 21 does not reach the predetermined position, the distance measuring sensor detects the distance h1 from itself to the tray 20, When the positioning structure 21 reaches the predetermined position, the detection pulse of the distance measuring sensor directly passes through the gap or through hole, and the detection result becomes the distance h2 from the distance measuring sensor to the wall of the process chamber 50, thereby realizing the positioning structure 21 position observation.

In order to improve the signal quality of the detection pulse, preferably, as shown in FIG. 5, the top wall of the process chamber 50 may include a process window 51 through which the sensing device observes the positioning structure 21 on the tray 20.

In order to improve the process effect of the microelectronics manufacturing process, preferably, as shown in FIGS. 5 and 6, the semiconductor processing equipment further includes a cylinder 40, and one end of the cylinder 40 is connected to a sensor 30 (eg, a ranging sensor) , The other end of the cylinder 40 is fixedly connected to the process chamber 50, and is used to extend when the tray 20 is positioned to send the sensing device above the process window, and shorten after the tray 20 is positioned to drive the sensor 30 to leave the process window In order to prevent the electronic devices in the sensor 30 from affecting the electromagnetic field distribution in the process chamber 50.

It can be understood that the above implementations are merely exemplary implementations used to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.

The terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

In the description of this application, it should be noted that the terms "installation", "connection", and "connection" should be interpreted broadly unless otherwise clearly specified and limited. For example, it can be a fixed connection or a detachable connection. Connected or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication between two components. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present utility model can be understood under specific circumstances.

10: Controller 20: tray 21: Positioning structure 22: Wafer slot 30: Sensor 40: cylinder 50: Process chamber 51: Process window 60: drive

Figure 1 is a schematic flowchart of a tray positioning method provided by an embodiment of the present invention;

Figure 2 is a schematic diagram of an implementation manner of a tray positioning method provided by an embodiment of the present invention;

Figure 3 is a schematic diagram of still another implementation of the tray positioning method provided by the embodiment of the present invention;

Figure 4 is a schematic diagram of another implementation of the tray positioning method provided by the embodiment of the present invention;

Figure 5 is a schematic diagram of a structure of a semiconductor processing equipment provided by an embodiment of the present invention;

Figure 6 is a schematic diagram of another structure of a semiconductor processing equipment provided by an embodiment of the present invention;

FIG. 7 is a schematic diagram of an embodiment of indexing a tray in a semiconductor processing equipment according to an embodiment of the present invention;

Figure 8 is a schematic diagram of the positional relationship between the tray positioning device provided by the embodiment of the present invention and other structures of the semiconductor processing equipment provided by the embodiment of the present invention;

Figure 9 is a schematic diagram of another position of the semiconductor processing equipment provided by the embodiment of the present invention;

Figure 10 is a schematic diagram of comparing the effect of the tray positioning method provided by the embodiment of the present invention with the conventional positioning;

FIG. 11 is a schematic diagram of comparing the effects of the tray positioning method provided by the embodiment of the present invention and the conventional positioning of the tray at different initial angles.

S1-S4: steps

Claims (10)

A pallet positioning method includes: S1: Control the tray to rotate in a first direction at a first preset speed; S2: When a positioning structure on the tray is detected, control the tray to decelerate until it stops rotating, and again control the tray to rotate in a direction opposite to the previous rotation direction, and the rotation speed is less than the previous rotation speed; S3: cyclically execute step S2; S4: When the rotation speed of the tray drops to less than or equal to a second preset speed and the positioning structure is detected again, control the tray to stop immediately. The method according to claim 1, wherein controlling the tray to stop immediately includes: Control the pallet to decelerate at a maximum braking angular acceleration until it stops. The method according to claim 1, wherein step S2 further includes: When the tray rotates beyond a first preset angle and the positioning structure has not been detected, the tray is controlled to decelerate until it stops rotating, and the tray is again controlled to rotate in the direction opposite to the previous rotation, and the rotation speed is less than The last rotation speed. The method according to claim 3, wherein the first preset angle is 360°. The method according to any one of claims 1 to 4, wherein before step S1, further includes: S0: When the positioning structure is detected before the tray starts to rotate, control the tray to rotate in a second direction opposite to the first direction by a second preset angle. A tray positioning device includes: a controller, a sensor, and a driver, wherein, The driver is used to drive the tray to rotate, and is also used to stop the tray from rotating; The sensor is used to detect a positioning structure on the tray; The controller is connected with the driver and the sensor, and is used for controlling the driver to drive the tray to rotate in a first direction at a first preset speed; The controller is also used for cyclically when the sensor detects the positioning structure on the tray, control the driver to decelerate the tray until it stops rotating, and again control the driver to drive the tray in the same direction as the previous rotation Rotate in the opposite direction, and the rotation speed is less than the previous rotation speed; The controller is also used for controlling the driver to stop the tray immediately when the rotation speed of the tray drops to less than or equal to a second preset speed and the sensor detects the positioning structure again. The device according to claim 6, wherein the controller is further configured to control the driver to cause the rotation speed of the tray to decrease to less than or equal to the second preset rotation speed and the sensor detects the positioning structure again The pallet decelerates at a maximum braking angular acceleration until it stops. The device according to claim 6, wherein the controller is further configured to control the driver to decelerate the tray until it stops when the tray rotates more than a predetermined angle and the sensor has not detected the positioning structure Rotate, and control the driver again to drive the tray to rotate in a direction opposite to the previous rotation, and the rotation speed is less than the previous rotation speed. The device according to any one of claim 6 to 8, wherein the controller is further configured to control the driver to drive the tray edge and the positioning structure when the sensor detects the positioning structure before the tray starts to rotate A second direction opposite to the first direction rotates by a second predetermined angle. A semiconductor processing equipment includes a process chamber and a tray arranged in the process chamber, the tray can rotate, and a positioning structure is arranged on the tray, wherein the semiconductor processing equipment further includes as claimed in items 6 to 9 Any one of the tray positioning device.

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