TWI709576B - Color resist composition, color filter and manufacturing method of color resist composition - Google Patents
Color resist composition, color filter and manufacturing method of color resist composition Download PDFInfo
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Abstract
提供一種可獲得可得到平滑之彩色阻劑層,可抑制該彩色阻劑層中之源自顏料等著色劑之異物產生,而且顯影性亦優異之阻劑組成物的無規共聚物(氟系界面活性劑)、使用其之阻劑組成物、濾色器。具體而言,係一種無規共聚物、使用其之阻劑組成物、濾色器,該無規共聚物係聚合性單體(a1)與聚合性單體(a2)的無規共聚物,且重量平均分子量(Mw)與數量平均分子量(Mn)之比(Mw/Mn)為1.0~1.8,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。 To provide a random copolymer (fluorine-based resist composition) that can obtain a smooth color resist layer, can suppress the generation of foreign matter originating from pigments and other colorants in the color resist layer, and has excellent developability. Surfactant), resist composition and color filter using it. Specifically, it is a random copolymer, a resist composition using the same, and a color filter. The random copolymer is a random copolymer of a polymerizable monomer (a1) and a polymerizable monomer (a2), And the ratio of weight average molecular weight (Mw) to number average molecular weight (Mn) (Mw/Mn) is 1.0~1.8, the polymerizable monomer (a1) has a carbon atom number of 1~6 directly bonded to fluorine atom A fluorinated alkyl group and a polymerizable unsaturated group, and the polymerizable monomer (a2) has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group.
Description
本發明係關於一種可獲得可得到平滑之彩色阻劑層,可抑制該彩色阻劑層中之源自顏料等著色劑之異物產生,而且顯影性亦優異之阻劑組成物的無規共聚物(氟系界面活性劑)、使用其之阻劑組成物、濾色器。又,本發明係關於一種上述無規共聚物的製造方法。 The present invention relates to a random copolymer of a resist composition that can obtain a smooth color resist layer, can suppress the generation of foreign matter derived from pigments and other colorants in the color resist layer, and has excellent developability (Fluorine-based surfactant), resist composition and color filter using it. In addition, the present invention relates to a method for producing the aforementioned random copolymer.
以往於各種塗佈領域中,為了提高所獲得之塗膜之均質性及平滑性,而使用烴系、聚矽氧系、氟系等各種被稱為調平劑之界面活性劑。其中,氟系界面活性劑由於其表面張力降低能力高,且塗佈後之污染少,故而被廣泛使用。 In the past, in various coating fields, in order to improve the homogeneity and smoothness of the obtained coating film, various surfactants called leveling agents such as hydrocarbon-based, silicone-based, and fluorine-based surfactants have been used. Among them, fluorine-based surfactants are widely used due to their high surface tension reduction ability and less pollution after coating.
上述氟系界面活性劑中,應用碳原子數為8以上之全氟烷基之界面活性劑之源自其表面張力降低能力的作為調平劑之性能優異,但該具有碳原子數8以上之全氟烷基之界面活性劑會生成全氟辛烷磺酸等有於環境及活體蓄積之顧慮之化合物,因此提出有應用碳原子數小於8之全氟烷基之界面活性劑。作為此種界面活性劑,例如提出有藉由使具有碳原子數6以下之氟化烷基之單體與非氟系單體於共存下進行活性自由基聚合而製造之無規共聚物(例如,參照專利文獻1)。 Among the above-mentioned fluorine-based surfactants, surfactants that use perfluoroalkyl groups with 8 or more carbon atoms have excellent performance as a leveling agent derived from their surface tension reduction ability, but those with 8 or more carbon atoms Surfactants based on perfluoroalkyls can generate compounds that have concerns about environmental and living body accumulation, such as perfluorooctane sulfonic acid. Therefore, surfactants using perfluoroalkyls with less than 8 carbon atoms have been proposed. As such a surfactant, for example, a random copolymer produced by living radical polymerization of a monomer having a fluorinated alkyl group with carbon atoms of 6 or less and a non-fluorine-based monomer in the coexistence (such as , Refer to Patent Document 1).
又,於上述塗佈領域中,尤其是對於用以製造濾色器之組成物(彩色阻劑組成物),要求有即便置於用作顯影液之鹼性水溶液中,塗膜亦難以變色(難以產生水漬)之性能。為了獲得具有此種性能之阻劑組成物,而提出有如下為嵌段共聚物之氟系界面活性劑,該嵌段共聚物具有:具有碳原子數1~6之氟化烷基之聚合性單體之聚合物鏈段;與具有橋聯環烴之骨架之聚合性單體之聚合物鏈段(例如,參照專利文獻2)。然而,含有上述專利文獻2所揭示之氟系界面活性劑之阻劑組成物存在鹼性水溶液帶來之顯影性並不充分之問題。
In addition, in the above-mentioned coating field, especially for the composition (color resist composition) used to manufacture color filters, it is required that the coating film is difficult to change color even if it is placed in an alkaline aqueous solution used as a developer ( Hard to produce water stains) performance. In order to obtain a resist composition with such properties, the following fluorine-based surfactants are proposed as block copolymers, which have the polymerizability of a fluorinated alkyl group having 1 to 6 carbon atoms A polymer segment of a monomer; a polymer segment of a polymerizable monomer having a skeleton of a bridged cyclic hydrocarbon (for example, refer to Patent Document 2). However, the resist composition containing the fluorine-based surfactant disclosed in
除此以外,於形成彩色阻劑組成物之塗膜(彩色阻劑圖案)等經著色之塗膜層時,亦要求有所需之色相。為了獲得具有所需之色相之塗膜層、例如具有亮度優異之色相之彩色阻劑圖案,而使用亮度優異之C.I.顏料紅254等顏料(著色劑)。然而,上述C.I.顏料紅254等顏料具有容易昇華,又因其分子間相互作用而結晶容易成長之性質,因此於形成濾色器時之加熱步驟中,自塗膜昇華之顏料分子會於塗膜表面發生結晶化、凝集化而導致異物產生。若產生此種異物,則會導致由粒子引起之光散射或顏料分散之不均化,其結果為,變得難以獲得上述所需之色相。 In addition, when forming a colored coating layer such as a coating film (color resist pattern) of the color resist composition, a desired hue is also required. In order to obtain a coating layer with a desired hue, such as a color resist pattern with a hue with excellent brightness, pigments (colorants) such as C.I. Pigment Red 254 with excellent brightness are used. However, the aforementioned CI Pigment Red 254 and other pigments are easy to sublime, and crystals are easy to grow due to their intermolecular interaction. Therefore, in the heating step when forming the color filter, the pigment molecules sublimated from the coating film will be on the coating film. The surface is crystallized and agglomerated to cause foreign matter. If such foreign matter is generated, light scattering caused by the particles or uneven dispersion of the pigment will result. As a result, it will become difficult to obtain the desired hue.
[先前技術文獻] [Prior Technical Literature]
[專利文獻] [Patent Literature]
[專利文獻1]日本特開2013-6928號公報 [Patent Document 1] JP 2013-6928 A
[專利文獻2]國際公開第2015/137229號說明書 [Patent Document 2] International Publication No. 2015/137229 Specification
本發明所欲解決之課題在於提供一種可獲得可得到平滑之彩色阻劑層,亦可抑制源自該彩色阻劑層中之著色劑之異物產生,而且顯影性亦優異之阻劑組成物的共聚物(氟系界面活性劑)、使用其之阻劑組成物、濾色器。又,本發明所欲解決之課題在於提供一種上述含氟聚合物(活性自由基聚合之無規共聚物)之製造方法。 The problem to be solved by the present invention is to provide a resist composition that can obtain a smooth color resist layer, can suppress the generation of foreign matter originating from the coloring agent in the color resist layer, and has excellent developability. Copolymer (fluorine-based surfactant), resist composition and color filter using it. In addition, the problem to be solved by the present invention is to provide a method for producing the above-mentioned fluoropolymer (living radical polymerization random copolymer).
本發明人等進行深入研究,結果發現如下等情況:藉由使用具有氟化烷基與聚合性不飽和基之聚合性單體、與具有金剛烷環與聚合性不飽和基之聚合性單體等具有橋聯環烴之骨架與聚合性不飽和基的聚合性單體,可獲得可用作界面活性劑之無規共聚物;藉由添加該無規共聚物中,重量平均分子量(Mw)與數量平均分子量(Mn)之比[(Mw)/(Mn)]處於1.0~1.8之範圍內之無規共聚物,可獲得即便使用容易昇華或結晶化之著色劑,於塗膜中亦難以產生異物之阻劑組成物;該阻劑組成物之顯影性亦優異;及藉由使用該等組成物,可獲得具有所需之色相之濾色器,從而完成本發明。 The inventors of the present invention conducted intensive studies and found the following: by using a polymerizable monomer having a fluorinated alkyl group and a polymerizable unsaturated group, and a polymerizable monomer having an adamantane ring and a polymerizable unsaturated group Such as polymerizable monomers having a bridged cyclic hydrocarbon backbone and polymerizable unsaturated groups, a random copolymer that can be used as a surfactant can be obtained; by adding the random copolymer, the weight average molecular weight (Mw) Random copolymers whose ratio to number average molecular weight (Mn) [(Mw)/(Mn)] are in the range of 1.0~1.8 can be obtained even if a coloring agent that is easy to sublime or crystallize is used, it is difficult to apply in the coating film A resist composition that generates foreign matter; the resist composition is also excellent in developability; and by using these compositions, a color filter with a desired hue can be obtained, thereby completing the present invention.
即,本發明提供一種無規共聚物,其特徵在於:其係聚合性單體(a1)與聚合性單體(a2)的無規共聚物,且重量平均分子量(Mw)與數量平均分子量(Mn)之比(Mw/Mn)為1.0~1.8,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。 That is, the present invention provides a random copolymer characterized in that it is a random copolymer of a polymerizable monomer (a1) and a polymerizable monomer (a2), and has a weight average molecular weight (Mw) and a number average molecular weight ( The ratio (Mw/Mn) of Mn) is 1.0 to 1.8. The polymerizable monomer (a1) has a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group. The polymerizable monomer (a2) has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group.
又,本發明提供一種阻劑組成物,其特徵在於含有:上述無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)。 Furthermore, the present invention provides a resist composition characterized by containing the random copolymer (A), a colorant (B), an alkali-soluble resin (C), and a polymerizable compound (D).
又,本發明提供一種濾色器,其特徵在於:於基板上形成有上述阻劑組成物之塗膜層。 In addition, the present invention provides a color filter characterized in that a coating film layer of the above-mentioned resist composition is formed on a substrate.
又,本發明提供一種無規共聚物之製造方法,其特徵在於:使聚合性單體(a1)與聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)的共存下進行活性自由基聚合,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。 In addition, the present invention provides a method for producing a random copolymer, which is characterized in that the polymerizable monomer (a1) and the polymerizable monomer (a2) are combined with the polymerizable monomer (a1) and the polymerizable monomer (a2). Living radical polymerization is carried out in the coexistence of the polymerizable monomer (a1) having a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group, and the polymerizable monomer (a1) a2) Having a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group.
本發明可提供一種可獲得可得到平滑之彩色阻劑層,亦可抑制源自該彩色阻劑層中之著色劑之異物產生,而且顯影性亦優異之阻劑組成物之無規共聚物與其製造方法。又,本發明可提供一種可獲得所需之色相之塗膜層之阻劑組成物及具有所需之色相之塗膜層的濾色器。 The present invention can provide a random copolymer of a resist composition that can obtain a smooth color resist layer, can also suppress the generation of foreign matter originating from the coloring agent in the color resist layer, and has excellent developability. Manufacturing method. In addition, the present invention can provide a resist composition that can obtain a coating layer of a desired hue and a color filter having a coating layer of a desired hue.
又,本發明之無規共聚物不僅可較佳地用於彩色阻劑組成物,亦可較佳地用於用以形成黑矩陣之組成物、用以於電子機器等之殼體等物品之表面形成塗膜層之組成物等。 In addition, the random copolymer of the present invention can be preferably used not only in color resist compositions, but also in compositions used to form black matrices, and used in the housings of electronic devices, etc. The composition of the coating layer formed on the surface.
圖1係實施例1中所獲得之無規共聚物(1)之IR光譜之線圖。 Fig. 1 is a line graph of the IR spectrum of the random copolymer (1) obtained in Example 1.
圖2係實施例1中所獲得之無規共聚物(1)之13C-NMR圖譜之線圖。 2 is a line chart of the 13 C-NMR spectrum of the random copolymer (1) obtained in Example 1.
圖3係實施例1中所獲得之無規共聚物(1)之GPC之線圖。 Fig. 3 is a GPC graph of the random copolymer (1) obtained in Example 1.
本發明提供一種無規共聚物,其特徵在於:其係聚合性單體(a1)與聚合性單體(a2)的無規共聚物,且重量平均分子量(Mw)與數量平均分子量(Mn)之比(Mw/Mn)為1.0~1.8,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。 The present invention provides a random copolymer characterized in that it is a random copolymer of a polymerizable monomer (a1) and a polymerizable monomer (a2), and has a weight average molecular weight (Mw) and a number average molecular weight (Mn) The ratio (Mw/Mn) is 1.0 to 1.8. The polymerizable monomer (a1) has a fluorinated alkyl group with 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group. The monomer (a2) has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group.
作為上述具有直接鍵結有氟原子之碳原子數為1~6之氟化烷基與聚合性不飽和基之聚合性單體(a1),只要為於分子中具有上述氟化烷基與聚合性不飽和基之化合物,則可無特別限制地使用。 As the above-mentioned polymerizable monomer (a1) having a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group, as long as it has the above-mentioned fluorinated alkyl group in the molecule and polymerized Compounds with a sexually unsaturated group can be used without particular restrictions.
此處,直接鍵結有氟原子之碳原子數為1~6之氟化烷基係直接鍵結有氟原子之碳原子數為1~6之全氟烷基或將氫原子之一部分設為氟原子的部分氟化烷基。該等氟化烷基中,就所獲得之聚合物作為界面活性劑之效果高之方面而言,較佳為全氟烷基。進一步,直接鍵結有氟原子之碳原子數越多越佳,直接鍵結有氟原子之碳原子數尤佳為4~6。 Here, a fluorinated alkyl group with 1 to 6 carbon atoms directly bonded to a fluorine atom is a perfluoroalkyl group with 1 to 6 carbon atoms directly bonded to a fluorine atom, or a part of the hydrogen atom is set as Partially fluorinated alkyl groups of fluorine atoms. Among these fluorinated alkyl groups, a perfluoroalkyl group is preferable in terms of the high effect of the obtained polymer as a surfactant. Furthermore, the more carbon atoms directly bonded to fluorine atoms, the better, and the number of carbon atoms directly bonded to fluorine atoms is particularly preferably 4-6.
作為上述聚合性單體(a1)所具有之聚合性不飽和基,例如可列舉:(甲基)丙烯醯基、乙烯基、順丁烯二醯亞胺基等。該等中,就原料之獲取容易;於使用所獲得之無規共聚物製造阻劑組成物或塗佈組成物時容易控制無規共聚物對組成物中之摻合成分之相容性;及聚合反應性良好之方面而言,較佳為(甲基)丙烯醯基。作為具有該(甲基)丙烯醯基之具體例,例如可較佳地例示下述通式(1)表示之單體。又,上述聚合性 單體(a1)可僅使用1種,亦可併用2種以上。 As a polymerizable unsaturated group which the said polymerizable monomer (a1) has, (meth)acryloyl group, a vinyl group, a maleimide group etc. are mentioned, for example. Among them, it is easy to obtain raw materials; when using the obtained random copolymer to manufacture a resist composition or a coating composition, it is easy to control the compatibility of the random copolymer with the blending components in the composition; and In terms of good polymerization reactivity, a (meth)acryloyl group is preferred. As a specific example having this (meth)acryloyl group, for example, a monomer represented by the following general formula (1) can be preferably exemplified. Also, the above-mentioned polymerizability Monomer (a1) may use only 1 type, and may use 2 or more types together.
[上述通式(1)中,R1表示氫原子、氟原子、甲基、氰基、苯基、苄基或-CnH2n-Rf'(n表示1~8之整數,Rf'表示下述式(Rf-1)~(Rf-4)中之任一基),X表示下述式(X-1)~(X-10)中之任一基,Rf表示下述式(Rf-1)~(Rf-4)中之任一基。] [In the above general formula (1), R 1 represents a hydrogen atom, a fluorine atom, a methyl group, a cyano group, a phenyl group, a benzyl group, or -C n H 2n -Rf' (n represents an integer from 1 to 8, and Rf' represents Any one of the following formulas (Rf-1)~(Rf-4)), X represents any one of the following formulas (X-1)~(X-10), Rf represents the following formula (Rf -1)~(Rf-4) any group. ]
-OCnH2n- (X-1) -OC n H 2n- (X-1)
-OCH2CH2OCH2- (X-2) -OCH 2 CH 2 OCH 2- (X-2)
[上述式(X-1)、(X-3)、(X-4)、(X-5)、(X-6)及(X-7)中之n表示1~8之整數。上述式(X-8)、(X-9)及(X-10)中之m表示1~8之整數,n表示0~8之整數。上述式(X-6)及(X-7)中之Rf"表示下述式(Rf-1)~(Rf-4)中之任一基。] [N in the above formulas (X-1), (X-3), (X-4), (X-5), (X-6) and (X-7) represents an integer of 1-8. In the above formulas (X-8), (X-9) and (X-10), m represents an integer from 1 to 8, and n represents an integer from 0 to 8. Rf" in the above formulas (X-6) and (X-7) represents any one of the following formulas (Rf-1) to (Rf-4).]
-CnF2n+1 (Rf-1) -C n F 2n+1 (Rf-1)
-CnF2nH (Rf-2) -C n F 2n H (Rf-2)
-CnF2n-1 (Rf-3) -C n F 2n-1 (Rf-3)
-CnF2n-3 (Rf-4) -C n F 2n-3 (Rf-4)
[上述式(Rf-1)及(Rf-2)中之n表示1~6之整數。上述式(Rf-3)中之n表示2~6之整數。上述式(Rf-4)中之n表示4~6之整數] [N in the above formulas (Rf-1) and (Rf-2) represents an integer of 1 to 6. In the above formula (Rf-3), n represents an integer of 2-6. In the above formula (Rf-4), n represents an integer from 4 to 6)
再者,於本發明中,所謂「(甲基)丙烯酸酯」,係指甲基丙烯酸酯與丙烯酸酯中之一者或兩者,所謂「(甲基)丙烯酸」,係指甲基丙烯酸與丙烯酸中之一者或兩者。 Furthermore, in the present invention, the so-called "(meth)acrylate" refers to one or both of methacrylate and acrylate, and the so-called "(meth)acrylic acid" refers to methacrylic acid and acrylate One or both of acrylic.
上述聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。於使用含有本發明之無規共聚物之阻劑組成物所獲得之塗膜層的最表面,含有該無規共聚物之層(以下,有時稱為阻擋(block)層)會偏集存在於表面。本發明之無規共聚物因存在上述橋聯環烴之骨架而玻璃轉移溫度(Tg)高,其結果為,上述阻擋層成為堅固之層。即,於下述濾色器之製造方法中所形成之塗膜層藉由存在橋聯環烴之骨架而具有硬度高之阻擋層。發明人等推測:該硬度高之阻擋層防止塗膜層中之顏料等著色劑析出 (昇華)至最表面,又,阻擋層中之橋聯環烴之骨架會對分散於位於阻擋層下方之塗膜層中的顏料產生某些影響,其結果為,抑制源自顏料等著色劑之異物形成。 The polymerizable monomer (a2) has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group. On the outermost surface of the coating film layer obtained by using the resist composition containing the random copolymer of the present invention, the layer containing the random copolymer (hereinafter, sometimes referred to as a block layer) will be concentrated于surface. The random copolymer of the present invention has a high glass transition temperature (Tg) due to the presence of the bridged cyclic hydrocarbon skeleton. As a result, the barrier layer becomes a strong layer. That is, the coating film layer formed in the following color filter manufacturing method has a high-hardness barrier layer due to the presence of the skeleton of the bridged cyclic hydrocarbon. The inventors speculated that the barrier layer with high hardness prevents the precipitation of colorants such as pigments in the coating layer (Sublimation) to the outermost surface. In addition, the skeleton of the bridged cyclic hydrocarbon in the barrier layer has some influence on the pigment dispersed in the coating layer below the barrier layer. As a result, it suppresses the colorant derived from the pigment The formation of foreign bodies.
作為上述橋聯環烴之骨架,例如可列舉:金剛烷環、全氫茚環、十氫萘環、全氫茀環、全氫蒽環、全氫菲環、二環戊烷環、二環戊烯環、全氫苊環、全氫萉環、降烷(norbornane)環、降莰烯環等。其中,就於塗膜最表面可形成Tg更高之阻擋層,並且可抑制源自顏料之異物產生之方面而言,較佳為金剛烷環、二環戊烷環、降烷環、降莰烯環,更佳為金剛烷環。 Examples of the skeleton of the bridged cyclic hydrocarbon include: adamantane ring, perhydroindene ring, decahydronaphthalene ring, perhydropyridine ring, perhydroanthracene ring, perhydrophenanthrene ring, dicyclopentane ring, and bicyclic ring. Pentene ring, perhydroacenaphthylene ring, perhydrogen ring, drop Alkane (norbornane) ring, norbornene ring, etc. Among them, in terms of forming a barrier layer with a higher Tg on the outermost surface of the coating film and suppressing the generation of foreign matter originating from the pigment, the adamantane ring, the dicyclopentane ring, and the lower The alkane ring and norbornene ring are more preferably an adamantane ring.
以下,對本發明中可較佳地用作聚合性單體(a2)之具有金剛烷環與聚合性不飽和基之聚合性單體進行說明。 Hereinafter, the polymerizable monomer having an adamantane ring and a polymerizable unsaturated group that can be preferably used as the polymerizable monomer (a2) in the present invention will be described.
作為上述具有金剛烷環與(甲基)丙烯醯基之聚合性單體,例如可列舉:下述式(a2-1)、(a2-2)表示之化合物等。 Examples of the polymerizable monomer having an adamantane ring and a (meth)acryloyl group include compounds represented by the following formulas (a2-1) and (a2-2).
(式中,L表示反應性官能基,X及Y表示2價之有機基或單鍵,R表示氫原子、甲基或CF3) (In the formula, L represents a reactive functional group, X and Y represent a divalent organic group or a single bond, and R represents a hydrogen atom, a methyl group or CF 3 )
作為上述反應性官能基,例如可列舉:羥基、異氰酸基、環氧基、羧基、羧酸鹵化物基、酸酐基等。其中,就可獲得於使用所獲得之無規共聚物製造阻劑組成物或塗佈組成物時與組成物中之摻合成分之相容性良好之無規共聚物的方面而言,較佳為羥基。 As said reactive functional group, a hydroxyl group, an isocyanate group, an epoxy group, a carboxyl group, a carboxylic acid halide group, an acid anhydride group etc. are mentioned, for example. Among them, it is preferable to obtain a random copolymer having good compatibility with the blending component in the composition when the obtained random copolymer is used to produce a resist composition or a coating composition. For hydroxyl.
上述通式(a2-1)中之-X-L所表示之具有上述反應性官能基之有機基及Y之鍵結位置可鍵結於金剛烷環中之任意碳原子,又,-X-L亦可具有2個以上。進一步,鍵結於構成金剛烷環之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。又,上述通式(a2-1)中之X及Y係2價之有機基或單鍵,作為該2價之有機基,可列舉:亞甲基、丙基、亞異丙基等碳原子數1~8之伸烷基(alkylene group)。
The bonding position of the organic group with the above reactive functional group and Y represented by -XL in the above general formula (a2-1) can be bonded to any carbon atom in the adamantane ring, and -XL may also have 2 or more. Furthermore, a part or all of the hydrogen atoms bonded to the carbon atoms constituting the adamantane ring may be substituted with fluorine atoms, alkyl groups, or the like. In addition, X and Y in the general formula (a2-1) are divalent organic groups or single bonds. Examples of the divalent organic groups include carbon atoms such as methylene, propyl, and isopropylidene. The
又,於上述式(a2-2)表示之化合物中,(甲基)丙烯醯基可鍵結於金剛烷環中之任意碳原子。又,上述通式(a2-1)中之鍵結於構成金剛烷結構之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。 In addition, in the compound represented by the above formula (a2-2), the (meth)acryloyl group may be bonded to any carbon atom in the adamantane ring. In addition, a part or all of the hydrogen atoms bonded to the carbon atoms constituting the adamantane structure in the general formula (a2-1) may be substituted with fluorine atoms, alkyl groups, or the like.
作為上述通式(a2-1)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 As more specific examples of the polymerizable monomer represented by the above general formula (a2-1), for example, the compounds shown below can be cited.
又,作為通式(a2-2)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 In addition, as a more specific example of the polymerizable monomer represented by the general formula (a2-2), for example, the compounds shown below can be cited.
具有金剛烷環與(甲基)丙烯醯基之聚合性單體中,就可獲得使用所獲得之無規共聚物製造阻劑組成物時與組成物中之摻合成分之相容性良好之無規共聚物的方面而言,較佳為上述式(a2-2)表示之化合物,更佳為上述式(a2-2-1)表示之化合物。 Among the polymerizable monomers having an adamantane ring and a (meth)acrylic acid group, the obtained random copolymer can be used to produce a resist composition with good compatibility with the blending components in the composition. In terms of random copolymers, the compound represented by the above formula (a2-2) is preferred, and the compound represented by the above formula (a2-2-1) is more preferred.
以下,對本發明中可較佳地用作聚合性單體(a2)之具有二環戊烷環與聚合性不飽和基之聚合性單體進行說明。 Hereinafter, the polymerizable monomer having a dicyclopentane ring and a polymerizable unsaturated group that can be preferably used as the polymerizable monomer (a2) in the present invention will be described.
作為上述具有二環戊烷環與(甲基)丙烯醯基之聚合性單體,例如可列舉:下述式(a2-3)表示之化合物等。 Examples of the polymerizable monomer having a dicyclopentane ring and a (meth)acryloyl group include compounds represented by the following formula (a2-3).
(式中,R表示氫原子、甲基或CF3) (In the formula, R represents a hydrogen atom, a methyl group or CF 3 )
又,上述式(a2-3)表示之化合物中,(甲基)丙烯醯基可 鍵結於二環戊烷環中之任意碳原子。又,上述通式(a2-3)中之鍵結於構成二環戊烷環之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。 In addition, in the compound represented by the above formula (a2-3), the (meth)acryloyl group may Bonded to any carbon atom in the dicyclopentane ring. In addition, a part or all of the hydrogen atoms bonded to the carbon atoms constituting the dicyclopentane ring in the general formula (a2-3) may be substituted with fluorine atoms, alkyl groups, or the like.
作為上述通式(a2-3)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 As more specific examples of the polymerizable monomer represented by the above general formula (a2-3), for example, the compounds shown below can be cited.
具有二環戊烷環與(甲基)丙烯醯基之聚合性單體中,就可獲得塗膜之Tg高之阻劑組成物之方面而言,較佳為上述式(a2-3-2)表示之化合物。 Among the polymerizable monomers having a dicyclopentane ring and a (meth)acrylic acid group, in terms of obtaining a resist composition with a high Tg of the coating film, the above-mentioned formula (a2-3-2 ) Represents the compound.
以下,對本發明中可較佳地用作聚合性單體(a2)之具有二環戊烯環與聚合性不飽和基之聚合性單體進行說明。 Hereinafter, the polymerizable monomer having a dicyclopentene ring and a polymerizable unsaturated group that can be preferably used as the polymerizable monomer (a2) in the present invention will be described.
作為上述具有二環戊烯環與(甲基)丙烯醯基之聚合性單體,例如可列舉下述式(a2-4)表示之化合物等。 Examples of the polymerizable monomer having a dicyclopentene ring and a (meth)acryloyl group include compounds represented by the following formula (a2-4).
(式中,R表示氫原子、甲基或CF3) (In the formula, R represents a hydrogen atom, a methyl group or CF 3 )
又,於上述式(a2-4)表示之化合物中,(甲基)丙烯醯基可鍵結於二環戊烯環中之任意碳原子。又,上述通式(a2-3)中之鍵結於構成二環戊烯環之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。 In addition, in the compound represented by the above formula (a2-4), the (meth)acryloyl group may be bonded to any carbon atom in the dicyclopentene ring. In addition, part or all of the hydrogen atoms bonded to the carbon atoms constituting the dicyclopentene ring in the general formula (a2-3) may be substituted with fluorine atoms, alkyl groups, or the like.
作為上述通式(a2-4)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 As more specific examples of the polymerizable monomer represented by the above general formula (a2-4), for example, the compounds shown below can be cited.
具有二環戊烯環與(甲基)丙烯醯基之聚合性單體中,就可獲得塗膜之Tg高之阻劑組成物之方面而言,較佳為上述式(a2-4-2)表示之化合物。 Among the polymerizable monomers having a dicyclopentene ring and a (meth)acryloyl group, in terms of obtaining a high Tg resist composition of the coating film, the above-mentioned formula (a2-4-2 ) Represents the compound.
以下,對本發明中可較佳地用作聚合性單體(a2)之具有降烷環與聚合性不飽和基之聚合性單體進行說明。 Hereinafter, the present invention can be preferably used as the polymerizable monomer (a2) has a decrease The polymerizable monomer of an alkane ring and a polymerizable unsaturated group will be described.
作為上述具有降烷環與(甲基)丙烯醯基之聚合性單體,例如可列舉下述式(a2-5)表示之化合物等。 As the above has a drop Examples of the polymerizable monomer of an alkane ring and a (meth)acryloyl group include compounds represented by the following formula (a2-5).
(式中,R表示氫原子、甲基或CF3) (In the formula, R represents a hydrogen atom, a methyl group or CF 3 )
又,上述式(a2-5)表示之化合物中,(甲基)丙烯醯基可鍵結於降烷環中之任意碳原子。又,上述通式(a2-5)中之鍵結於構成降烷環之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。 In addition, in the compound represented by the above formula (a2-5), the (meth)acryloyl group may be bonded to Any carbon atom in the alkane ring. Moreover, the bond in the above general formula (a2-5) is A part or all of the hydrogen atoms of the carbon atoms of the alkane ring may be substituted with fluorine atoms, alkyl groups, and the like.
作為上述通式(a2-5)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 As more specific examples of the polymerizable monomer represented by the above general formula (a2-5), for example, the compounds shown below can be cited.
具有降烷環與(甲基)丙烯醯基之聚合性單體中,就可獲得塗膜之Tg高之阻劑組成物之方面而言,較佳為上述式(a2-5-2)表示之化合物。 With drop Among the polymerizable monomers of alkane ring and (meth)acryloyl group, the compound represented by the above formula (a2-5-2) is preferred in terms of obtaining a high Tg resist composition of the coating film .
以下,對本發明中可較佳地用作聚合性單體(a2)之具有降莰烯環與聚合性不飽和基之聚合性單體進行說明。 Hereinafter, the polymerizable monomer having a norbornene ring and a polymerizable unsaturated group that can be preferably used as the polymerizable monomer (a2) in the present invention will be described.
作為上述具有降莰烯環與(甲基)丙烯醯基之聚合性單體,例如可列舉下述式(a2-6)表示之化合物等。 Examples of the polymerizable monomer having a norbornene ring and a (meth)acryloyl group include compounds represented by the following formula (a2-6).
(式中,R表示氫原子、甲基或CF3) (In the formula, R represents a hydrogen atom, a methyl group or CF 3 )
又,於上述式(a2-6)表示之化合物中,(甲基)丙烯醯基可鍵結於降莰烯環中之任意碳原子。又,上述通式(a2-6)中之鍵結於構成降莰烯環之碳原子之氫原子亦可其一部分或全部被取代為氟原子、烷基等。 In addition, in the compound represented by the above formula (a2-6), the (meth)acryloyl group may be bonded to any carbon atom in the norbornene ring. In addition, part or all of the hydrogen atoms bonded to the carbon atoms constituting the norbornene ring in the general formula (a2-6) may be substituted with fluorine atoms, alkyl groups, or the like.
作為上述通式(a2-6)表示之聚合性單體之更具體之例,例如可列舉下述所表示之化合物等。 As more specific examples of the polymerizable monomer represented by the above general formula (a2-6), for example, the compounds shown below can be cited.
具有降莰烯環與(甲基)丙烯醯基之聚合性單體中,就可獲得塗膜之Tg高之阻劑組成物之方面而言,較佳為上述式(a2-6-2)表示之化合物。 Among the polymerizable monomers having a norbornene ring and a (meth)acrylic acid group, the above-mentioned formula (a2-6-2) is preferred in terms of obtaining a high Tg resist composition of the coating film Represents the compound.
本發明提供一種無規共聚物,其特徵在於:其係聚合性單體(a1)與聚合性單體(a2)的無規共聚物,且重量平均分子量(Mw)與數量平均分子量(Mn)之比(Mw/Mn)為1.0~1.8,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該 聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。此處,若比(Mw/Mn)超過1.8,則無法形成堅固之塗膜表面,故而欠佳。比(Mw/Mn)更佳為1.0~1.7之範圍,進一步較佳為1.0~1.5之範圍。 The present invention provides a random copolymer characterized in that it is a random copolymer of a polymerizable monomer (a1) and a polymerizable monomer (a2), and has a weight average molecular weight (Mw) and a number average molecular weight (Mn) The ratio (Mw/Mn) is 1.0 to 1.8. The polymerizable monomer (a1) has a fluorinated alkyl group with 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group. The polymerizable monomer (a2) has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group. Here, if the ratio (Mw/Mn) exceeds 1.8, a strong coating film surface cannot be formed, which is not preferable. The ratio (Mw/Mn) is more preferably in the range of 1.0 to 1.7, and still more preferably in the range of 1.0 to 1.5.
關於本發明之無規共聚物之重量平均分子量(Mw),就成為可獲得更堅固之塗膜表面,且具有良好之調平性之無規共聚物之方面而言,較佳為500~200,000,更佳為1,000~150,000之範圍,進一步較佳為1,500~100,000之範圍。 Regarding the weight average molecular weight (Mw) of the random copolymer of the present invention, it is preferably 500 to 200,000 in terms of obtaining a stronger coating film surface and having good leveling properties. , More preferably in the range of 1,000 to 150,000, still more preferably in the range of 1,500 to 100,000.
又,關於本發明之無規共聚物之數量平均分子量(Mn),就成為可獲得更堅固之塗膜表面,且具有良好之調平性之無規共聚物之方面而言,較佳為300~120,000,更佳為500~80,000之範圍,進一步較佳為800~60,000之範圍。 In addition, regarding the number average molecular weight (Mn) of the random copolymer of the present invention, it is preferably 300 in terms of obtaining a stronger coating film surface and having good leveling properties. ~120,000, more preferably in the range of 500 to 80,000, further preferably in the range of 800 to 60,000.
此處,數量平均分子量(Mn)及重量平均分子量(Mw)係基於凝膠滲透層析法(以下,簡稱為「GPC」)測量,並經聚苯乙烯換算所得之值。再者,GPC之測量條件係如下所示。 Here, the number average molecular weight (Mn) and the weight average molecular weight (Mw) are measured based on gel permeation chromatography (hereinafter referred to as "GPC") and converted into polystyrene. Furthermore, the measurement conditions of GPC are as follows.
[GPC測量條件] [GPC measurement conditions]
測量裝置:Tosoh股份有限公司製造之「HLC-8220 GPC」、 Measuring device: "HLC-8220 GPC" manufactured by Tosoh Co., Ltd.,
管柱:Tosoh股份有限公司製造之保護管柱「HHR-H」(6.0mmI.D.×4cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm) Column: Protection column "HHR-H" (6.0mmI.D.×4cm) manufactured by Tosoh Co., Ltd. + "TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) manufactured by Tosoh Co., Ltd. +"TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) made by Tosoh Co., Ltd.+"TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) made by Tosoh Co., Ltd.+Tosoh "TSK-GEL GMHHR-N" manufactured by Co., Ltd. (7.8mmI.D.×30cm)
檢測器:ELSD(Alltech Japan股份有限公司製造之「ELSD2000」) Detector: ELSD ("ELSD2000" manufactured by Alltech Japan Co., Ltd.)
資料處理:Tosoh股份有限公司製造之「GPC-8020模型II資料解析版本4.30」 Data processing: "GPC-8020 Model II Data Analysis Version 4.30" manufactured by Tosoh Co., Ltd.
試樣:利用微過濾器將樹脂固形物成分換算計1.0質量%之四氫呋喃溶液進行過濾而獲得者(5μl)。 Sample: obtained by filtering a 1.0% by mass tetrahydrofuran solution (5 μl) in terms of resin solid content using a microfilter.
標準試樣:依據上述「GPC-8020模型II資料解析版本4.30」之測量指南,使用分子量已知之下述之單分散聚苯乙烯。 Standard sample: According to the measurement guide of "GPC-8020 Model II Data Analysis Version 4.30", the following monodisperse polystyrene with known molecular weight is used.
(單分散聚苯乙烯) (Monodisperse polystyrene)
Tosoh股份有限公司製造之「A-500」 "A-500" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-1000」 "A-1000" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-2500」 "A-2500" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-5000」 "A-5000" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-1」 "F-1" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-2」 "F-2" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-4」 "F-4" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-10」 "F-10" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-20」 "F-20" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-40」 "F-40" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-80」 "F-80" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-128」 "F-128" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-288」 "F-288" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-550」 "F-550" manufactured by Tosoh Co., Ltd.
關於本發明之無規共聚物中之氟原子含有率,就成為塗佈不均少,表現出良好之調平性之無規共聚物之方面而言,較佳為4~40質量%之範圍,更佳為5~35質量%之範圍,進一步較佳為6~30質量%之範圍。再者,氟原子含有率可藉由燃燒離子層析法進行測量。 Regarding the fluorine atom content in the random copolymer of the present invention, it is preferably in the range of 4-40% by mass in terms of a random copolymer with less uneven coating and good leveling properties. , More preferably in the range of 5 to 35% by mass, still more preferably in the range of 6 to 30% by mass. Furthermore, the fluorine atom content rate can be measured by combustion ion chromatography.
本發明中,聚合性單體(a1)與聚合性單體(a2)之無規共聚物亦可於無損本發明之效果之範圍內具有聚合性單體(a1)與聚合性單體(a2)以外之源自聚合性單體(a3)的結構。 In the present invention, the random copolymer of polymerizable monomer (a1) and polymerizable monomer (a2) may have polymerizable monomer (a1) and polymerizable monomer (a2) within a range that does not impair the effects of the present invention. The structure other than) is derived from the polymerizable monomer (a3).
作為上述聚合性單體(a3),例如可列舉:具有氧伸烷基之單體(a3-1)、具有烷基之單體(a3-2)等。此處,作為上述聚合性單體(a3)所具有之聚合性不飽和基,可列舉:(甲基)丙烯醯基、乙烯基、順丁烯二醯亞胺基等,但於上述聚合性單體(a1)及聚合性單體(a2)具有之聚合性不飽和基為(甲基)丙烯醯基之情形時,就共聚合性變良好之方面而言,較佳為上述聚合性單體(a3)所具有之聚合性不飽和基亦為(甲基)丙烯醯基。 As said polymerizable monomer (a3), the monomer (a3-1) which has an oxyalkylene group, the monomer (a3-2) which has an alkyl group, etc. are mentioned, for example. Here, examples of the polymerizable unsaturated group possessed by the polymerizable monomer (a3) include (meth)acrylic acid groups, vinyl groups, maleimide groups, etc. However, the above-mentioned polymerizable unsaturated groups When the polymerizable unsaturated group possessed by the monomer (a1) and the polymerizable monomer (a2) is a (meth)acryloyl group, the above-mentioned polymerizable monomer is preferred in terms of better copolymerizability The polymerizable unsaturated group possessed by the body (a3) is also a (meth)acryloyl group.
作為上述具有氧伸烷基之單體(a3-1),可列舉:下述通式(a3-1)表示之單體。 Examples of the monomer (a3-1) having an oxyalkylene group include monomers represented by the following general formula (a3-1).
(式中,R2為氫原子或甲基,Y1X及Y2為分別獨立之伸烷基,p及q 分別為0或1以上之整數,且p與q之合計為1以上,R3為氫原子或碳原子數1~6之烷基) (In the formula, R 2 is a hydrogen atom or a methyl group, Y 1 X and Y 2 are independent alkylene groups, p and q are each an integer of 0 or 1 or more, and the total of p and q is 1 or more, R 3 is a hydrogen atom or an alkyl group with 1 to 6 carbon atoms)
上述通式(a3-1)中之Y1及Y2係伸烷基,但該伸烷基亦包括具有取代基者。作為-O-(Y1O)n-(Y2O)m-部分之具體例,可列舉:重複單位數p為1且m為0,且Y1為伸乙基之乙二醇殘基;重複單位數p為1且m為0,且Y1為伸丙基之丙二醇殘基;重複單位數p為1且m為0,且Y1為伸丁基之丁二醇殘基;重複單位數p為2以上之整數且q為0,且Y1為伸乙基之聚乙二醇殘基;重複單位數p為2以上之整數且q為0,且Y1為伸丙基之聚丙二醇殘基;重複單位數p及q均為1以上之整數,且Y1或Y2為伸乙基且另一者為伸丙基之環氧乙烷與環氧丙烷之共聚物之殘基等聚伸烷基二醇之殘基。 The Y 1 and Y 2 in the above general formula (a3-1) are alkylene groups, but the alkylene groups also include those having substituents. Specific examples of the -O-(Y 1 O)n-(Y 2 O)m- moiety include: the number of repeating units p is 1, m is 0, and Y 1 is an ethylene glycol residue The number of repeating units p is 1 and m is 0, and Y 1 is a propylene glycol residue of propylene; the number of repeating units p is 1 and m is 0, and Y 1 is a butanediol residue of butylene; repeats The number of units p is an integer of 2 or more and q is 0, and Y 1 is an ethylene glycol residue; the number of repeating units p is an integer of 2 or more and q is 0, and Y 1 is an ethylene glycol residue Polypropylene glycol residue; the number of repeating units p and q are both integers greater than 1, and Y 1 or Y 2 is ethylene and the other is the residue of a copolymer of ethylene oxide and propylene oxide The residues of polyalkylene glycol such as groups.
上述具有氧伸烷基之單體(a3-1)中之聚伸烷基二醇之聚合度、即通式(a3-1)中之p及q之合計較佳為1~100之範圍者,更佳為2~80之範圍者,更佳為3~50之範圍者。再者,含有Y1之重複單位及含有Y2之重複單位可無規狀地配置,亦可嵌段狀地配置。 The degree of polymerization of the polyalkylene glycol in the monomer (a3-1) having an oxyalkylene group, that is, the total of p and q in the general formula (a3-1) is preferably in the range of 1 to 100 , More preferably in the range of 2 to 80, more preferably in the range of 3 to 50. Furthermore, the repeating unit containing Y 1 and the repeating unit containing Y 2 may be arranged randomly or in a block shape.
上述通式(a3-1)中之R3為氫或碳原子數1~6之烷基。於R3為氫之情形時,單體成為聚乙二醇、聚丙二醇、聚丁二醇等伸烷基二醇之單(甲基)丙烯酸酯,於R3為碳原子數1~6之情形時,成為並非伸烷基二醇之單(甲基)丙烯酸酯之(甲基)丙烯酸酯的末端經碳原子數1~6之烷基封端者。 R 3 in the above general formula (a3-1) is hydrogen or an alkyl group having 1 to 6 carbon atoms. When R 3 is hydrogen, the monomer becomes a mono(meth)acrylate of alkylene glycols such as polyethylene glycol, polypropylene glycol, and polybutylene glycol, and R 3 is a carbon number of 1 to 6 In this case, the end of the (meth)acrylate which is not the mono(meth)acrylate of the alkylene glycol is terminated by an alkyl group having 1 to 6 carbon atoms.
上述具有氧伸烷基之單體(a3-1)中,較佳為具有由複數個氧伸烷基所構成之聚(氧伸烷)基之單體,作為具體之例,可列舉:聚 丙二醇單(甲基)丙烯酸酯、聚乙二醇單(甲基)丙烯酸酯、聚1,3-丙二醇單(甲基)丙烯酸酯、聚1,4-丁二醇單(甲基)丙烯酸酯、聚(乙二醇‧丙二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚丙二醇單(甲基)丙烯酸酯、聚(乙二醇‧1,4-丁二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚1,4-丁二醇單(甲基)丙烯酸酯、聚(丙二醇‧1,4-丁二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚1,4-丁二醇單(甲基)丙烯酸酯、聚(丙二醇‧丁二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚(乙二醇‧丁二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚(四乙二醇‧丁二醇)單(甲基)丙烯酸酯、聚四乙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚丁二醇單(甲基)丙烯酸酯、聚(乙二醇‧1,3-丙二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚1,3-丙二醇單(甲基)丙烯酸酯、聚(丙二醇‧1,3-丙二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚1,3-丙二醇單(甲基)丙烯酸酯、聚(1,3-丙二醇‧1,4-丁二醇)單(甲基)丙烯酸酯、聚1,3-丙二醇‧聚1,4-丁二醇單(甲基)丙烯酸酯、聚(丁二醇‧1,3-丙二醇)單(甲基)丙烯酸酯、聚丁二醇‧聚1,3-丙二醇單(甲基)丙烯酸酯等。再者,「聚(乙二醇‧丙二醇)」意指乙二醇與丙二醇之無規共聚物,「聚乙二醇‧聚丙二醇」意指乙二醇與丙二醇之嵌段共聚物。其他者亦相同。於本發明之含氟聚合物之製造方法中,於使用具有氧伸烷基之單體(a3-1)之情形時,就可獲得與阻劑組成物或塗佈組成物中之其他成分之相容性良好之含氟聚合物的方面而言,較佳為聚丙二醇單(甲基)丙烯酸酯、聚乙二醇單(甲基)丙烯酸酯、聚乙二醇‧聚丙二醇單(甲基)丙烯酸酯。 Among the above-mentioned monomers (a3-1) having an oxyalkylene group, a monomer having a poly(oxyalkylene) group composed of a plurality of oxyalkylene groups is preferred. Specific examples include: poly(oxyalkylene) Propylene glycol mono(meth)acrylate, polyethylene glycol mono(meth)acrylate, poly 1,3-propylene glycol mono(meth)acrylate, poly 1,4-butanediol mono(meth)acrylate , Poly(ethylene glycol‧propylene glycol) mono(meth)acrylate, polyethylene glycol‧polypropylene glycol mono(meth)acrylate, poly(ethylene glycol‧1,4-butanediol)mono(methyl) )Acrylate, polyethylene glycol‧poly1,4-butanediol mono(meth)acrylate, poly(propylene glycol‧1,4-butanediol)mono(meth)acrylate, polypropylene glycol‧poly1 ,4-Butanediol mono(meth)acrylate, poly(propylene glycol‧butanediol) mono(meth)acrylate, polypropylene glycol‧polybutylene glycol mono(meth)acrylate, poly(ethylene glycol) ‧Butylene glycol) mono(meth)acrylate, polyethylene glycol‧Polybutylene glycol mono(meth)acrylate, poly(tetraethylene glycol‧butanediol) mono(meth)acrylate, poly Tetraethylene glycol‧polybutylene glycol mono(meth)acrylate, polybutylene glycol mono(meth)acrylate, poly(ethylene glycol‧1,3-propanediol)mono(meth)acrylate, poly Ethylene glycol‧poly1,3-propylene glycol mono(meth)acrylate, poly(propylene glycol‧1,3-propylene glycol) mono(meth)acrylate, polypropylene glycol‧poly1,3-propylene glycol mono(meth) Acrylate, poly(1,3-propanediol‧1,4-butanediol) mono(meth)acrylate, poly1,3-propanediol‧poly1,4-butanediol mono(meth)acrylate, Poly(butylene glycol‧1,3-propylene glycol) mono(meth)acrylate, polybutylene glycol‧poly1,3-propylene glycol mono(meth)acrylate, etc. Furthermore, "poly(ethylene glycol‧propylene glycol)" means a random copolymer of ethylene glycol and propylene glycol, and "polyethylene glycol‧polypropylene glycol" means a block copolymer of ethylene glycol and propylene glycol. The others are the same. In the production method of the fluoropolymer of the present invention, when the monomer (a3-1) having an oxyalkylene group is used, it can be combined with other components in the resist composition or coating composition. In terms of fluoropolymers with good compatibility, polypropylene glycol mono(meth)acrylate, polyethylene glycol mono(meth)acrylate, polyethylene glycol‧polypropylene glycol mono(methyl) )Acrylate.
又,作為具有氧伸烷基之單體(a3-1)之市售品,例如可列舉:新中村化學工業股份有限公司製造之「NK ESTER M-20G」、「NK ESTER M-40G」、「NK ESTER M-90G」、「NK ESTER M-230G」、「NK ESTER AM-90G」、「NK ESTER AMP-10G」、「NK ESTER AMP-20G」、「NK ESTER AMP-60G」;日油股份有限公司製造之「Blemmer PE-90」、「Blemmer PE-200」、「Blemmer PE-350」、「Blemmer PME-100」、「Blemmer PME-200」、「Blemmer PME-400」、「Blemmer PME-4000」、「Blemmer PP-1000」、「Blemmer PP-500」、「Blemmer PP-800」、「Blemmer 70PEP-350B」、「Blemmer 55PET-800」、「Blemmer 50POEP-800B」、「Blemmer 10PPB-500B」、「Blemmer NKH-5050」、「Blemmer AP-400」、「Blemmer AE-350」等。該等具有氧伸烷基之單體(a3-1)可單獨地使用,亦可併用2種以上。 Moreover, as a commercially available product of the monomer (a3-1) having an oxyalkylene group, for example, "NK ESTER M-20G", "NK ESTER M-40G" manufactured by Shin Nakamura Chemical Industry Co., Ltd., "NK ESTER M-90G", "NK ESTER M-230G", "NK ESTER AM-90G", "NK ESTER AMP-10G", "NK ESTER AMP-20G", "NK ESTER AMP-60G"; NOF "Blemmer PE-90", "Blemmer PE-200", "Blemmer PE-350", "Blemmer PME-100", "Blemmer PME-200", "Blemmer PME-400", "Blemmer PME" manufactured by Co., Ltd. -4000", "Blemmer PP-1000", "Blemmer PP-500", "Blemmer PP-800", "Blemmer 70PEP-350B", "Blemmer 55PET-800", "Blemmer 50POEP-800B", "Blemmer 10PPB- 500B", "Blemmer NKH-5050", "Blemmer AP-400", "Blemmer AE-350", etc. These oxyalkylene-containing monomers (a3-1) may be used alone or in combination of two or more kinds.
作為上述具有烷基之單體(a3-2),例如可列舉:下述通式(a3-2)表示之單體等。 Examples of the monomer (a3-2) having an alkyl group include monomers represented by the following general formula (a3-2).
(式中,R4為氫原子或甲基,R5為碳原子數1~18之直鏈狀、支鏈狀或具有環結構之烷基) (In the formula, R 4 is a hydrogen atom or a methyl group, R 5 is a linear, branched or cyclic alkyl group with 1 to 18 carbon atoms)
再者,上述通式(a3-2)中之R5為碳原子數1~18之直鏈狀、支鏈狀或具有環結構之烷基,該烷基亦可具有脂肪族或芳香族之烴基、羥基等取代基。作為上述具有烷基之單體(a3-2)之具體例,可列舉:(甲 基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸辛酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸癸酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸硬脂酯等(甲基)丙烯酸之碳原子數為1~18之烷基酯;(甲基)丙烯酸雙環戊基氧基乙酯、(甲基)丙烯酸異莰基氧基乙酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸金剛烷基酯、(甲基)丙烯酸二甲基金剛烷基酯、(甲基)丙烯酸雙環戊酯、(甲基)丙烯酸二環戊烯基酯等(甲基)丙烯酸之碳原子數1~18之上述(a2)以外之橋聯環狀烷基酯等。該等具有烷基之單體(a3-2)可單獨地使用,亦可併用2種以上。 Furthermore, R 5 in the above general formula (a3-2) is a linear, branched or cyclic alkyl group with 1 to 18 carbon atoms, and the alkyl group may have an aliphatic or aromatic Substituents such as hydrocarbon groups and hydroxyl groups. Specific examples of the monomer (a3-2) having an alkyl group include: methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate Ester, octyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, decyl (meth)acrylate, dodecyl (meth)acrylate, stearyl (meth)acrylate, etc. (Meth) acrylic acid alkyl esters with 1 to 18 carbon atoms; (meth) biscyclopentyloxy ethyl acrylate, (meth) acrylate isobornyloxy ethyl, (meth) acrylate iso Camphenyl ester, adamantyl (meth)acrylate, dimethyladamantyl (meth)acrylate, dicyclopentyl (meth)acrylate, dicyclopentenyl (meth)acrylate, etc. (meth) ) Bridged cyclic alkyl esters of acrylic acid other than the above (a2) with 1 to 18 carbon atoms. These monomers (a3-2) having an alkyl group may be used singly or in combination of two or more kinds.
於將聚合性單體(a3)與上述聚合性單體(a1)、聚合性單體(a2)併用之情形時,關於其使用量,就調平性、與可獲得抑制源自顏料等著色劑之異物產生,而且亦可表現出源自單體(a3)之各種效果之無規共聚物之方面而言,較佳為相對於單體(a1)、單體(a2)之合計100質量份,為1~100質量份,更佳為1~50質量份。 When the polymerizable monomer (a3) is used in combination with the above-mentioned polymerizable monomer (a1) and polymerizable monomer (a2), regarding the amount of use, the leveling property and the suppression of coloring derived from pigments In terms of random copolymers that produce foreign matter in the agent and can also exhibit various effects derived from the monomer (a3), it is preferably 100 mass relative to the total of the monomer (a1) and the monomer (a2) Parts, 1-100 parts by mass, more preferably 1-50 parts by mass.
本發明之無規共聚物例如可藉由如下方式而較佳地獲得:使聚合性單體(a1)與聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)的共存下進行活性自由基聚合,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基。 The random copolymer of the present invention can be preferably obtained, for example, by combining the polymerizable monomer (a1) and the polymerizable monomer (a2) in the polymerizable monomer (a1) and the polymerizable monomer (a2). ) In the coexistence of living radical polymerization, the polymerizable monomer (a1) has a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group, the polymerizable monomer (a2) It has a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group.
於上述活性自由基聚合中,活性聚合末端被原子或原子團保護之休眠物質可逆地使自由基產生而與單體進行反應,藉此生長反應進行。作為此種活性自由基聚合之例,可列舉:原子轉移自由基聚合(ATRP)、 可逆加成-裂解型自由基聚合(RAFT)、經由氮氧自由基之自由基聚合(NMP)、使用有機碲之自由基聚合(TERP)等。該等中,使用該等中何種方法並無特別限制,就控制之容易性等方面而言,較佳為上述ATRP。ATRP係以有機鹵化物、或鹵化磺醯基化合物等為起始劑,以由過渡金屬化合物與配位基所構成之金屬錯合物為觸媒而進行聚合。 In the above-mentioned living radical polymerization, a dormant substance whose living polymerization terminal is protected by an atom or an atom group reversibly generates free radicals and reacts with the monomer, whereby the growth reaction proceeds. As examples of such living radical polymerization, atom transfer radical polymerization (ATRP), Reversible addition-cracking radical polymerization (RAFT), radical polymerization via nitroxide radicals (NMP), radical polymerization using organic tellurium (TERP), etc. Among these, there is no particular restriction on which method is used, and in terms of ease of control, etc., the above-mentioned ATRP is preferred. ATRP uses organic halides or halogenated sulfonyl compounds as initiators, and uses metal complexes composed of transition metal compounds and ligands as catalysts for polymerization.
上述ATRP中所使用之聚合起始劑可使用有機鹵化化合物。具體而言,可列舉:1-苯乙基氯及1-苯乙基溴、氯仿、四氯化碳、2-氯丙腈、α,α'-二氯二甲苯、α,α'-二溴二甲苯、六(α-溴甲基)苯、碳原子數1~6之2-鹵化羧酸(例如2-氯丙酸、2-溴丙酸、2-氯異丁酸、2-溴異丁酸等)之碳原子數1~6之烷基酯等。又,作為碳原子數1~6之2-鹵化羧酸之碳原子數1~6之烷基酯的更具體例,例如可列舉:2-氯丙酸甲酯、2-氯丙酸乙酯、2-溴丙酸甲酯、2-溴異丁酸乙酯等。 The polymerization initiator used in the ATRP can be an organic halogenated compound. Specifically, examples include: 1-phenethyl chloride and 1-phenethyl bromide, chloroform, carbon tetrachloride, 2-chloropropionitrile, α,α'-dichloroxylene, α,α'-di Bromoxylene, hexa(α-bromomethyl)benzene, 2-halogenated carboxylic acids with 1 to 6 carbon atoms (e.g. 2-chloropropionic acid, 2-bromopropionic acid, 2-chloroisobutyric acid, 2-bromo Isobutyric acid, etc.) alkyl esters with 1 to 6 carbon atoms. Furthermore, as more specific examples of the alkyl ester of 2-halogenated carboxylic acid having 1 to 6 carbon atoms and having 1 to 6 carbon atoms, for example, methyl 2-chloropropionate and ethyl 2-chloropropionate can be cited. , 2-bromopropionic acid methyl ester, 2-bromoisobutyric acid ethyl ester, etc.
上述ATRP中所使用之過渡金屬化合物係Mn+Xn所表示者。作為過渡金屬之Mn+可選自由Cu+、Cu2+、Fe2+、Fe3+、Ru2+、Ru3+、Cr2+、Cr3+、Mo0、Mo+、Mo2+、Mo3+、W2+、W3+、Rh3+、Rh4+、Co+、Co2+、Re2+、Re3+、Ni0、Ni+、Mn3+、Mn4+、V2+、V3+、Zn+、Zn2+、Au+、Au2+、Ag+及Ag2+組成之群。又,X可選自由鹵素原子、碳原子數1~6之烷氧基、(SO4)1/2、(PO4)1/3、(HPO4)1/2、(H2PO4)、三氟甲磺酸鹽、六氟磷酸鹽、甲磺酸鹽、芳基磺酸鹽(較佳為苯磺酸鹽或甲苯磺酸鹽)、SeR1、CN及R2COO組成之群。此處,R1表示芳基、直鏈狀或支鏈狀之碳原子數1~20(較佳為碳原子數1~10)之烷基,R2表示氫原子、可經鹵素取代1~5次(較佳為經氟或氯取代1~3次)之直鏈狀或支鏈狀之碳原子數1~6之烷基(較佳為甲基)。進一步,n表示金屬
上之形式電荷,為0~7之整數。
The transition metal compound used in the ATRP is represented by M n + X n . M n+ as a transition metal can be selected from Cu + , Cu 2+ , Fe 2+ , Fe 3+ , Ru 2+ , Ru 3+ , Cr 2+ , Cr 3+ , Mo 0 , Mo + , Mo 2+ , Mo 3+ , W 2+ , W 3+ , Rh 3+ , Rh 4+ , Co + , Co 2+ , Re 2+ , Re 3+ , Ni 0 , Ni + , Mn 3+ , Mn 4+ , V 2+ , V 3+ , Zn + , Zn 2+ , Au + , Au 2+ , Ag + and Ag 2+ . Further, X may be selected from a halogen atom, an alkoxy group of 1 to 6 carbon atoms, (SO 4) 1/2, ( PO 4) 1/3, (HPO 4) 1/2, (
作為上述過渡金屬錯合物,並無特別限定,作為較佳者,可列舉:7、8、9、10、11族之過渡金屬錯合物,作為進一步較佳者,可列舉:0價之銅、1價之銅、2價之釕、2價之鐵或2價之鎳之錯合物。
The transition metal complexes are not particularly limited. Preferred ones include transition metal complexes of
作為上述具有可與過渡金屬進行配位鍵結之配位基之化合物,可列舉:具有可經由σ鍵與過渡金屬進行配位之含有1個以上之氮原子、氧原子、磷原子或硫原子之配位基的化合物、具有可經由π鍵與過渡金屬進行配位之含有2個以上之碳原子之配位基的化合物、具有可經由μ鍵或η鍵與過渡金屬進行配位之配位基之化合物。 Examples of the above-mentioned compound having a ligand capable of coordinately bonding with a transition metal include: having a nitrogen atom, an oxygen atom, a phosphorus atom, or a sulfur atom that can coordinate with the transition metal via a σ bond Compounds with ligands, compounds with ligands containing 2 or more carbon atoms that can be coordinated to transition metals via π bonds, and coordination that can coordinate with transition metals via mu bonds or η bonds Based compound.
作為上述具有配位基之化合物之具體例,例如於中心金屬為銅之情形時,可列舉:2,2'-聯吡啶及其衍生物、1,10-啡啉及其衍生物、四甲基乙二胺、五甲基二伸乙基三胺、六甲基三(2-胺基乙基)胺等與多胺等配位基之錯合物。又,作為2價之釕錯合物,可列舉:二氯三(三苯基膦)釕、二氯三(三丁基膦)釕、二氯(環辛二烯)釕、二氯苯釕、二氯對伸苯基釕、二氯(降莰二烯)釕、順-二氯雙(2,2'-聯吡啶)釕、二氯三(1,10-啡啉)釕、羰基氯氫三(三苯基膦)釕等。進一步作為2價之鐵錯合物,可列舉:雙三苯基膦錯合物、三氮雜環壬烷錯合物等。 As a specific example of the compound having a ligand, for example, in the case where the central metal is copper, examples include: 2,2'-bipyridine and its derivatives, 1,10-phenanthroline and its derivatives, tetramethyl Complexes of ethylenediamine, pentamethyldiethylenetriamine, hexamethyltris(2-aminoethyl)amine and polyamines. In addition, as divalent ruthenium complexes, dichlorotris(triphenylphosphine)ruthenium, dichlorotris(tributylphosphine)ruthenium, dichloro(cyclooctadiene)ruthenium, dichlorobenzene ruthenium , Dichloro p-phenylene ruthenium, dichloro (norbornadiene) ruthenium, cis-dichlorobis(2,2'-bipyridine) ruthenium, dichlorotris(1,10-phenanthroline) ruthenium, carbonyl chloride Hydrogen tris (triphenylphosphine) ruthenium and the like. Further examples of the bivalent iron complex include bistriphenylphosphine complexes, triazacyclononane complexes, and the like.
又,於上述活性自由基聚合中,較佳為使用溶劑。作為所使用之溶劑,例如可列舉:乙酸乙酯、乙酸丁酯、丙二醇單甲醚乙酸酯等酯系溶劑;二異丙醚、二甲氧基乙烷、二乙二醇二甲醚等醚系溶劑;二氯甲烷、二氯乙烷等鹵素系溶劑;甲苯、二甲苯等芳香族系溶劑;甲基乙基酮、甲基異丁基酮、環己酮等酮系溶劑;甲醇、乙醇、異丙醇等醇系溶劑;二 甲基甲醯胺、二甲基亞碸等非質子性極性溶劑等。又,該等溶劑可單獨地使用,亦可併用2種以上。 In addition, in the above-mentioned living radical polymerization, it is preferable to use a solvent. As the solvent used, for example, ester solvents such as ethyl acetate, butyl acetate, and propylene glycol monomethyl ether acetate; diisopropyl ether, dimethoxyethane, diethylene glycol dimethyl ether, etc. Ether solvents; halogen solvents such as dichloromethane and dichloroethane; aromatic solvents such as toluene and xylene; ketone solvents such as methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone; methanol, Alcohol solvents such as ethanol and isopropanol; two Aprotic polar solvents such as methylformamide and dimethyl sulfide. Moreover, these solvents may be used individually, and 2 or more types may be used together.
於本發明之無規共聚物之製造方法中,較佳為於聚合起始劑、過渡金屬化合物、具有可與該過渡金屬進行配位鍵結之配位基之化合物及溶劑之存在下,使聚合性單體(a1)與聚合性單體(a2)進行活性自由基聚合。 In the method for producing the random copolymer of the present invention, it is preferable to use a polymerization initiator, a transition metal compound, a compound having a ligand capable of coordinate bonding with the transition metal, and a solvent. The polymerizable monomer (a1) and the polymerizable monomer (a2) undergo living radical polymerization.
於本發明之無規共聚物之製造方法中,作為聚合性單體(a1)與聚合性單體(a2)之使用比例(反應比例),就可獲得調平性良好且顏料昇華抑制效果高之無規共聚物之方面而言,較佳為相對於聚合性單體(a1)100質量份,使用聚合性單體(a2)50~900質量份,更佳為相對於聚合性單體(a1)100質量份,使用聚合性單體(a2)100~800質量份。 In the production method of the random copolymer of the present invention, as the use ratio (reaction ratio) of the polymerizable monomer (a1) to the polymerizable monomer (a2), a good leveling property and a high pigment sublimation inhibitory effect can be obtained In terms of the random copolymer, it is preferable to use 50 to 900 parts by mass of the polymerizable monomer (a2) relative to 100 parts by mass of the polymerizable monomer (a1), and more preferably relative to the polymerizable monomer ( a1) 100 parts by mass, using 100 to 800 parts by mass of the polymerizable monomer (a2).
活性自由基聚合時之聚合溫度較佳為室溫直至120℃之範圍。 The polymerization temperature during the living radical polymerization is preferably in the range of room temperature to 120°C.
又,於藉由本發明之無規共聚物之製造方法而製造本發明之無規共聚物的情形時,存在源自上述過渡金屬化合物之金屬會殘留在該無規共聚物中之情況。因此,於若金屬殘留則產生問題之光阻劑組成物等之半導體用途中藉由本發明之製造方法而使用無規共聚物的情形時,較佳為於聚合反應後使用活性氧化鋁等將殘留金屬去除。 In addition, when the random copolymer of the present invention is produced by the method of producing the random copolymer of the present invention, the metal derived from the transition metal compound may remain in the random copolymer. Therefore, when a random copolymer is used by the manufacturing method of the present invention for semiconductor applications such as photoresist compositions that cause problems if the metal remains, it is preferable to use activated alumina or the like to remove the residue after the polymerization reaction. Metal removal.
本發明提供一種阻劑組成物,其特徵在於含有:本發明之無規共聚物(以下,有時將其稱為「無規共聚物(A)」)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)。該阻劑組成物例如可藉由阻劑組成物之製造方法而較佳地提供,該阻劑組成物之製造方法之特徵在於含有如下 步驟:使聚合性單體(a1)與聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)的共存下進行活性自由基聚合,藉此獲得活性自由基聚合之無規共聚物(A),該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基;將該無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合。上述獲得無規共聚物(A)之步驟係相當於本發明之無規共聚物之製造方法的步驟。 The present invention provides a resist composition characterized by containing: the random copolymer of the present invention (hereinafter, sometimes referred to as "random copolymer (A)"), coloring agent (B), and alkali-soluble resin (C) and polymerizable compound (D). The resist composition can be preferably provided by, for example, a method of manufacturing a resist composition. The method of manufacturing the resist composition is characterized by containing the following Step: Live radical polymerization of polymerizable monomer (a1) and polymerizable monomer (a2) in the coexistence of polymerizable monomer (a1) and polymerizable monomer (a2) to obtain living radical polymerization The random copolymer (A), the polymerizable monomer (a1) has a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group, the polymerizable monomer ( a2) Having a bridged cyclic hydrocarbon skeleton and a polymerizable unsaturated group; this random copolymer (A), colorant (B), alkali-soluble resin (C), and polymerizable compound (D) are mixed. The above-mentioned step of obtaining the random copolymer (A) corresponds to the step of the method for producing the random copolymer of the present invention.
上述著色劑(B)可列舉顏料或染料,又,顏料可為有機顏料,亦可為無機顏料。上述有機顏料可使用紅色顏料、綠色顏料、藍色顏料、黃色顏料、紫色顏料、橙色顏料等各色相之顏料。又,作為有機顏料之化學結構,例如可列舉:喹吖酮系、苝系、吡咯并吡咯(pyrrolopyrrole)系、蒽醌系、酞青素系、陰丹士林系、鹵化酞青素系、四氯異吲哚啉酮系、漢薩黃系、聯苯胺黃系、偶氮系、苯并咪唑酮系、異吲哚啉酮系、二系等。再者,下述之「C.I.」意指色指數(C.I.;The Society of Dyers and Colourists公司發行)。 The colorant (B) may be a pigment or a dye, and the pigment may be an organic pigment or an inorganic pigment. The above-mentioned organic pigments can use pigments of various hues such as red pigments, green pigments, blue pigments, yellow pigments, purple pigments, and orange pigments. In addition, as the chemical structure of organic pigments, for example, quinacridone series, perylene series, pyrrolopyrrole series, anthraquinone series, phthalocyanine series, indanthrene series, halogenated phthalocyanine series, Tetrachloroisoindolinone series, Hansa yellow series, benzidine yellow series, azo series, benzimidazolone series, isoindolinone series, two Department etc. Furthermore, the following "CI" means color index (CI; issued by The Society of Dyers and Colourists).
作為上述紅色顏料,例如可列舉:C.I.顏料紅1、C.I.顏料紅2、C.I.顏料紅3、C.I.顏料紅4、C.I.顏料紅5、C.I.顏料紅6、C.I.顏料紅7、C.I.顏料紅8、C.I.顏料紅9、C.I.顏料紅12、C.I.顏料紅14、C.I.顏料紅15、C.I.顏料紅16、C.I.顏料紅17、C.I.顏料紅21、C.I.顏料紅22、C.I.顏料紅23、C.I.顏料紅31、C.I.顏料紅32、C.I.顏料紅37、C.I.顏料紅38、C.I.顏料紅41、C.I.顏料紅47、C.I.顏料紅48、C.I.顏料紅48:1、C.I.顏料紅48:2、C.I.顏料紅48:3、C.I.顏料紅48:4、C.I.顏料紅49、C.I.顏料紅49:1、C.I.顏料紅 49:2、C.I.顏料紅50:1、C.I.顏料紅52:1、C.I.顏料紅52:2、C.I.顏料紅53、C.I.顏料紅53:1、C.I.顏料紅53:2、C.I.顏料紅53:3、C.I.顏料紅57、C.I.顏料紅57:1、C.I.顏料紅57:2、C.I.顏料紅58:4、C.I.顏料紅60、C.I.顏料紅63、C.I.顏料紅63:1、C.I.顏料紅63:2、C.I.顏料紅64、C.I.顏料紅64:1、C.I.顏料紅68、C.I.顏料紅69、C.I.顏料紅81、C.I.顏料紅81:1、C.I.顏料紅81:2、C.I.顏料紅81:3、C.I.顏料紅81:4、C.I.顏料紅83、C.I.顏料紅88、C.I.顏料紅90:1、C.I.顏料紅97、C.I.顏料紅101、C.I.顏料紅101:1、C.I.顏料紅104、C.I.顏料紅108、C.I.顏料紅108:1、C.I.顏料紅109、C.I.顏料紅112、C.I.顏料紅113、C.I.顏料紅114、C.I.顏料紅122、C.I.顏料紅123、C.I.顏料紅144、C.I.顏料紅146、C.I.顏料紅147、C.I.顏料紅149、C.I.顏料紅151、C.I.顏料紅166、C.I.顏料紅168、C.I.顏料紅169、C.I.顏料紅170、C.I.顏料紅172、C.I.顏料紅173、C.I.顏料紅174、C.I.顏料紅175、C.I.顏料紅176、C.I.顏料紅177、C.I.顏料紅178、C.I.顏料紅179、C.I.顏料紅180、C.I.顏料紅181、C.I.顏料紅184、C.I.顏料紅185、C.I.顏料紅187、C.I.顏料紅188、C.I.顏料紅190、C.I.顏料紅192、C.I.顏料紅193、C.I.顏料紅194、C.I.顏料紅200、C.I.顏料紅202、C.I.顏料紅206、C.I.顏料紅207、C.I.顏料紅208、C.I.顏料紅209、C.I.顏料紅210、C.I.顏料紅213、C.I.顏料紅214、C.I.顏料紅215、C.I.顏料紅216、C.I.顏料紅217、C.I.顏料紅220、C.I.顏料紅221、C.I.顏料紅223、C.I.顏料紅224、C.I.顏料紅226、C.I.顏料紅227、C.I.顏料紅228、C.I.顏料紅230、C.I.顏料紅231、C.I.顏料紅232、C.I.顏料紅233、C.I.顏料紅235、C.I.顏料紅236、C.I.顏料紅237、C.I.顏料紅238、C.I.顏料紅239、C.I.顏料紅240、C.I.顏料紅242、C.I.顏料紅243、C.I.顏料紅245、C.I.顏料紅247、C.I.顏料紅 249、C.I.顏料紅250、C.I.顏料紅251、C.I.顏料紅253、C.I.顏料紅254、C.I.顏料紅255、C.I.顏料紅256、C.I.顏料紅257、C.I.顏料紅258、C.I.顏料紅259、C.I.顏料紅260、C.I.顏料紅262、C.I.顏料紅263、C.I.顏料紅264、C.I.顏料紅265、C.I.顏料紅266、C.I.顏料紅267、C.I.顏料紅268、C.I.顏料紅269、C.I.顏料紅270、C.I.顏料紅271、C.I.顏料紅272、C.I.顏料紅273、C.I.顏料紅274、C.I.顏料紅275、C.I.顏料紅276等。 Examples of the red pigment include: CI Pigment Red 1, CI Pigment Red 2, CI Pigment Red 3, CI Pigment Red 4, CI Pigment Red 5, CI Pigment Red 6, CI Pigment Red 7, CI Pigment Red 8, CI Pigment Red 9, CI Pigment Red 12, CI Pigment Red 14, CI Pigment Red 15, CI Pigment Red 16, CI Pigment Red 17, CI Pigment Red 21, CI Pigment Red 22, CI Pigment Red 23, CI Pigment Red 31, CI Pigment Red 32, CI Pigment Red 37, CI Pigment Red 38, CI Pigment Red 41, CI Pigment Red 47, CI Pigment Red 48, CI Pigment Red 48:1, CI Pigment Red 48: 2, CI Pigment Red 48: 3, CI Pigment Red 48:4, CI Pigment Red 49, CI Pigment Red 49:1, CI Pigment Red 49:2, CI Pigment Red 50:1, CI Pigment Red 52:1, CI Pigment Red 52:2, CI Pigment Red 53, CI Pigment Red 53:1, CI Pigment Red 53:2, CI Pigment Red 53:3 , CI Pigment Red 57, CI Pigment Red 57:1, CI Pigment Red 57: 2, CI Pigment Red 58: 4, CI Pigment Red 60, CI Pigment Red 63, CI Pigment Red 63:1, CI Pigment Red 63: 2 , CI Pigment Red 64, CI Pigment Red 64:1, CI Pigment Red 68, CI Pigment Red 69, CI Pigment Red 81, CI Pigment Red 81:1, CI Pigment Red 81: 2, CI Pigment Red 81: 3, CI Pigment Red 81: 4, CI Pigment Red 83, CI Pigment Red 88, CI Pigment Red 90:1, CI Pigment Red 97, CI Pigment Red 101, CI Pigment Red 101:1, CI Pigment Red 104, CI Pigment Red 108, CI Pigment Red 108:1, CI Pigment Red 109, CI Pigment Red 112, CI Pigment Red 113, CI Pigment Red 114, CI Pigment Red 122, CI Pigment Red 123, CI Pigment Red 144, CI Pigment Red 146, CI Pigment Red 147, CI Pigment Red 149, CI Pigment Red 151, CI Pigment Red 166, CI Pigment Red 168, CI Pigment Red 169, CI Pigment Red 170, CI Pigment Red 172, CI Pigment Red 173, CI Pigment Red 174, CI Pigment Red 175, CI Pigment Red 176, CI Pigment Red 177, CI Pigment Red 178, CI Pigment Red 179, CI Pigment Red 180, CI Pigment Red 181, CI Pigment Red 184, CI Pigment Red 185, CI Pigment Red 187, CI Pigment Red 188, CI Pigment Red 190, CI Pigment Red 192, CI Pigment Red 193, CI Pigment Red 194, CI Pigment Red 200, CI Pigment Red 202, CI Pigment Red 206, CI Pigment Red 207, CI Pigment Red 208, CI Pigment Red 209, CI Pigment Red 210, CI Pigment Red 213, CI Pigment Red 214, CI Pigment Red 215, CI Pigment Red 216, CI Pigment Red 217, CI Pigment Red 220, CI Pigment Red 221, CI Pigment Red 223, CI Pigment Red 224, CI Pigment Red 226, CI Pigment Red 227, CI Pigment Red 228, CI Pigment Red 230, CI Pigment Red 231, CI Pigment Red 232, CI Pigment Red 233, CI Pigment Red 235, CI Pigment Red 236, CI Pigment Red 237, CI Pigment Red 238, CI Pigment Red 239, CI Pigment Red 240, CI Pigment Red 242, CI Pigment Red 243, CI Pigment Red 245, CI Pigment Red 247, CI Pigment red 249, CI Pigment Red 250, CI Pigment Red 251, CI Pigment Red 253, CI Pigment Red 254, CI Pigment Red 255, CI Pigment Red 256, CI Pigment Red 257, CI Pigment Red 258, CI Pigment Red 259, CI Pigment Red 260, CI Pigment Red 262, CI Pigment Red 263, CI Pigment Red 264, CI Pigment Red 265, CI Pigment Red 266, CI Pigment Red 267, CI Pigment Red 268, CI Pigment Red 269, CI Pigment Red 270, CI Pigment Red 271, CI Pigment Red 272, CI Pigment Red 273, CI Pigment Red 274, CI Pigment Red 275, CI Pigment Red 276, etc.
作為上述綠色顏料,例如可列舉:C.I.顏料綠1、C.I.顏料綠2、C.I.顏料綠4、C.I.顏料綠7、C.I.顏料綠8、C.I.顏料綠10、C.I.顏料綠13、C.I.顏料綠14、C.I.顏料綠15、C.I.顏料綠17、C.I.顏料綠18、C.I.顏料綠19、C.I.顏料綠26、C.I.顏料綠36、C.I.顏料綠45、C.I.顏料綠48、C.I.顏料綠50、C.I.顏料綠51、C.I.顏料綠54、C.I.顏料綠55、C.I.顏料綠58、C.I.顏料綠59等。
Examples of the above-mentioned green pigments include:
作為上述藍色顏料,例如可列舉:C.I.顏料藍1、C.I.顏料藍1:2、C.I.顏料藍9、C.I.顏料藍14、C.I.顏料藍15、C.I.顏料藍15:1、C.I.顏料藍15:2、C.I.顏料藍15:3、C.I.顏料藍15:4、C.I.顏料藍15:6、C.I.顏料藍16、C.I.顏料藍17、C.I.顏料藍19、C.I.顏料藍22、C.I.顏料藍25、C.I.顏料藍27、C.I.顏料藍28、C.I.顏料藍29、C.I.顏料藍33、C.I.顏料藍35、C.I.顏料藍36、C.I.顏料藍56、C.I.顏料藍56:1、C.I.顏料藍60、C.I.顏料藍61、C.I.顏料藍61:1、C.I.顏料藍62、C.I.顏料藍63、C.I.顏料藍64、C.I.顏料藍66、C.I.顏料藍67、C.I.顏料藍68、C.I.顏料藍71、C.I.顏料藍72、C.I.顏料藍73、C.I.顏料藍74、C.I.顏料藍75、C.I.顏料藍76、C.I.顏料藍78、C.I.顏料藍79等。
Examples of the blue pigments include
作為上述黃色顏料,例如可列舉:C.I.顏料黃1、C.I.顏料黃1:1、C.I.顏料黃2、C.I.顏料黃3、C.I.顏料黃4、C.I.顏料黃5、C.I.顏料黃6、C.I.顏料黃9、C.I.顏料黃10、C.I.顏料黃12、C.I.顏料黃13、C.I.顏料黃14、C.I.顏料黃16、C.I.顏料黃17、C.I.顏料黃20、C.I.顏料黃24、C.I.顏料黃31、C.I.顏料黃32、C.I.顏料黃34、C.I.顏料黃35、C.I.顏料黃35:1、C.I.顏料黃36、C.I.顏料黃36:1、C.I.顏料黃37、C.I.顏料黃37:1、C.I.顏料黃40、C.I.顏料黃41、C.I.顏料黃42、C.I.顏料黃43、C.I.顏料黃48、C.I.顏料黃53、C.I.顏料黃55、C.I.顏料黃61、C.I.顏料黃62、C.I.顏料黃62:1、C.I.顏料黃63、C.I.顏料黃65、C.I.顏料黃73、C.I.顏料黃74、C.I.顏料黃75、C.I.顏料黃81、C.I.顏料黃83、C.I.顏料黃86、C.I.顏料黃87、C.I.顏料黃93、C.I.顏料黃94、C.I.顏料黃95、C.I.顏料黃97、C.I.顏料黃100、C.I.顏料黃101、C.I.顏料黃104、C.I.顏料黃105、C.I.顏料黃108、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃111、C.I.顏料黃116、C.I.顏料黃117、C.I.顏料黃119、C.I.顏料黃120、C.I.顏料黃125、C.I.顏料黃126、C.I.顏料黃127、C.I.顏料黃127:1、C.I.顏料黃128、C.I.顏料黃129、C.I.顏料黃133、C.I.顏料黃134、C.I.顏料黃136、C.I.顏料黃137、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃142、C.I.顏料黃147、C.I.顏料黃148、C.I.顏料黃150、C.I.顏料黃151、C.I.顏料黃153、C.I.顏料黃154、C.I.顏料黃155、C.I.顏料黃157、C.I.顏料黃158、C.I.顏料黃159、C.I.顏料黃160、C.I.顏料黃161、C.I.顏料黃162、C.I.顏料黃163、C.I.顏料黃164、C.I.顏料黃165、C.I.顏料黃166、C.I.顏料黃167、C.I.顏料黃168、C.I.顏料黃169、C.I.顏料黃170、C.I.顏料黃172、C.I.顏料黃173、C.I.顏料黃174、C.I.顏料黃175、C.I.顏料黃176、C.I.顏料黃180、C.I.顏料黃181、C.I.顏料黃
182、C.I.顏料黃183、C.I.顏料黃184、C.I.顏料黃185、C.I.顏料黃188、C.I.顏料黃189、C.I.顏料黃190、C.I.顏料黃191、C.I.顏料黃191:1、C.I.顏料黃192、C.I.顏料黃193、C.I.顏料黃194、C.I.顏料黃195、C.I.顏料黃196、C.I.顏料黃197、C.I.顏料黃198、C.I.顏料黃199、C.I.顏料黃200、C.I.顏料黃202、C.I.顏料黃203、C.I.顏料黃204、C.I.顏料黃205、C.I.顏料黃206、C.I.顏料黃207、C.I.顏料黃208等。
Examples of the above-mentioned yellow pigments include:
作為上述紫色顏料,例如可列舉:C.I.顏料紫1、C.I.顏料紫1:1、C.I.顏料紫2、C.I.顏料紫2:2、C.I.顏料紫3、C.I.顏料紫3:1、C.I.顏料紫3:3、C.I.顏料紫5、5:1、C.I.顏料紫14、C.I.顏料紫15、C.I.顏料紫16、C.I.顏料紫19、C.I.顏料紫23、C.I.顏料紫25、C.I.顏料紫27、C.I.顏料紫29、顏料紫30、C.I.顏料紫31、C.I.顏料紫32、C.I.顏料紫37、C.I.顏料紫39、顏料紫40、C.I.顏料紫42、C.I.顏料紫44、C.I.顏料紫47、C.I.顏料紫49、C.I.顏料紫50等。
Examples of the purple pigments include
作為上述橙色顏料,例如可列舉:C.I.顏料橙1、C.I.顏料橙2、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙16、C.I.顏料橙17、C.I.顏料橙19、C.I.顏料橙20、C.I.顏料橙21、C.I.顏料橙22、C.I.顏料橙23、C.I.顏料橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙39、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙48、C.I.顏料橙49、C.I.C.I.顏料橙51、C.I.顏料橙55、C.I.顏料橙59、顏料橙61、C.I.顏料橙62、C.I.顏料橙64、C.I.顏料橙65、C.I.顏料橙67、C.I.顏料橙68、C.I.顏料橙69、C.I.顏料橙70、C.I.顏料橙71、C.I.顏料橙72、C.I.顏料橙73、C.I.顏料橙74、C.I.顏料橙75、C.I.顏料橙77、C.I.顏料橙78、C.I.顏料橙79等。
Examples of the orange pigments include
液晶顯示裝置及有機EL顯示裝置所使用之濾色器之3原色之各像素係紅色(R)、綠色(G)、藍色(B),因此亦可以上述紅色顏料、綠色顏料及藍色顏料為主成分,並以提高色再現性為目的而使用上述黃色、紫色、橙色等顏色之有機顏料以進行色相調整。 The pixels of the three primary colors of the color filters used in liquid crystal display devices and organic EL display devices are red (R), green (G), and blue (B), so the above-mentioned red pigments, green pigments and blue pigments can also be used It is a main component and uses organic pigments of the above-mentioned yellow, purple, and orange colors for the purpose of improving color reproducibility for hue adjustment.
又,作為上述無機顏料,例如可列舉:硫酸鋇、硫酸鉛、氧化鈦、黃丹、鐵丹、氧化鉻等。 Moreover, as said inorganic pigment, barium sulfate, lead sulfate, titanium oxide, yellow plum, iron plum, chromium oxide, etc. are mentioned, for example.
作為本發明中所使用之染料,例如可較佳地例示下述(b1) As the dye used in the present invention, for example, the following (b1) can be preferably exemplified
所表示之鹽或二苯并哌喃系染料等。 Said salt or dibenzopyran dyes, etc.
作為上述二苯并哌喃系染料,例如可列舉:C.I.酸性紅51、52、87、92、289、388、C.I.酸性紫9、30、C.I.鹼性紅8、C.I.媒染紅(Mordant Red)27、孟加拉玫瑰紅B、磺醯玫瑰紅(sulforhodamine)G、玫瑰紅6G、日本特開2010-032999號公報或日本特開2011-138094號公報等所記載之二苯并哌喃系染料等。
Examples of the dibenzopyran-based dye include: CI Acid Red 51, 52, 87, 92, 289, 388, CI Acid Violet 9, 30,
上述二苯并哌喃系染料中,較佳為將下述式(b2) Among the above-mentioned dibenzopyran-based dyes, it is preferable to combine the following formula (b2)
[式(1)中,R1~R4分別獨立地表示氫原子、-R8或碳原子數6~10之1價芳香族烴基,該芳香族烴基所含有之氫原子亦可經鹵素原子、-R8、-OH、-OR8、-SO3-、-SO3H、-SO3 -M+、-CO2H、-CO2R8、-SO3R8或-SO2NR9R10取代。 [In formula (1), R 1 to R 4 each independently represent a hydrogen atom, -R 8 or a monovalent aromatic hydrocarbon group with 6 to 10 carbon atoms. The hydrogen atom contained in the aromatic hydrocarbon group may also be a halogen atom , -R 8 , -OH, -OR 8 , -SO 3 -, -SO 3 H, -SO 3 - M + , -CO 2 H, -CO 2 R 8 , -SO 3 R 8 or -SO 2 NR 9 R 10 replaced.
R5表示-OH、-SO3-、-SO3H、-SO3 -M+、-CO2H、-CO2 -M+、-CO2R8、-SO3R8或-SO2NR9R10。 R 5 represents -OH, -SO 3 -, -SO 3 H, -SO 3 - M + , -CO 2 H, -CO 2 - M + , -CO 2 R 8 , -SO 3 R 8 or -SO 2 NR 9 R 10 .
m表示0~5之整數。於m為2以上之整數之情形時,複數個R5相同或互不相同。 m represents an integer from 0 to 5. When m is an integer of 2 or more, a plurality of R 5 are the same or different from each other.
R6及R7分別獨立地表示碳數1~6之烷基。 R 6 and R 7 each independently represent an alkyl group having 1 to 6 carbon atoms.
M+表示+N(R11)4、Na+或K+。 M + represents + N(R 11 ) 4 , Na + or K + .
X表示鹵素原子。 X represents a halogen atom.
a表示0或1之整數。 a represents an integer of 0 or 1.
R8表示碳原子數1~20之1價飽和烴基,該飽和烴基所含有之氫原子亦可經鹵素原子取代。 R 8 represents a monovalent saturated hydrocarbon group with 1 to 20 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a halogen atom.
R11分別獨立地表示氫原子、碳原子數1~20之1價飽和烴基或碳原子數7~10之芳烷基。 R 11 each independently represents a hydrogen atom, a monovalent saturated hydrocarbon group with 1 to 20 carbon atoms, or an aralkyl group with 7 to 10 carbon atoms.
R9及R10分別獨立地表示氫原子、或碳原子數1~20之1價飽和烴基,該飽和烴基所含有之氫原子亦可經-OH或鹵素原子取代,該飽和脂肪族烴基所含有之-CH2-亦可經-O-、-CO-、-NH-或-NR8-取代,R9及R10亦可相互鍵結而形成含有氮原子之3~10員環之雜環]。 R 9 and R 10 each independently represent a hydrogen atom or a monovalent saturated hydrocarbon group with 1 to 20 carbon atoms. The hydrogen atom contained in the saturated hydrocarbon group may be substituted with -OH or halogen atoms. The saturated aliphatic hydrocarbon group contains The -CH 2 -can also be substituted by -O-, -CO-, -NH- or -NR 8 -, R 9 and R 10 can also be bonded to each other to form a 3- to 10-membered heterocyclic ring containing a nitrogen atom ].
所表示之化合物設為主成分之染料。 The indicated compound is used as the main component of the dye.
作為上述式(b2)中之R1~R4中之碳原子數6~10之1價芳香族烴基,例如可列舉:苯基、甲苯甲醯基、二甲苯基、2,4,6-三甲苯基、丙基苯基及丁基苯基等。 Examples of the monovalent aromatic hydrocarbon group having 6 to 10 carbon atoms in R 1 to R 4 in the above formula (b2) include: phenyl, tolyl, xylyl, 2,4,6- Mesityl, propylphenyl and butylphenyl etc.
上述式(b2)中之碳原子數6~10之1價芳香族烴基較佳為具有選自由-SO3-、-SO3H、-SO3 -M+及-SO2NR9R10組成之群中之至少1種作為取代基,更佳為具有選自由-SO3 -M+及-SO2NR9R10組成之群中之至少1種作為取代基。作為該情形時之-SO3 -M+,較佳為-SO3 -+N(R11)4。若R1~R4為該等基,則可期待阻劑組成物獲得異物之產生少,且耐熱性優異之塗膜層。 The monovalent aromatic hydrocarbon group having 6 to 10 carbon atoms in the above formula (b2) preferably has a composition selected from -SO 3 -, -SO 3 H, -SO 3 - M + and -SO 2 NR 9 R 10 At least one of the group consisting of as a substituent, more preferably has at least one selected from the group consisting of -SO 3 - M + and -SO 2 NR 9 R 10 as a substituent. As -SO 3 - M + in this case, -SO 3 -+ N(R 11 ) 4 is preferable. If R 1 to R 4 are these groups, the resist composition can be expected to obtain a coating layer with less foreign matter generation and excellent heat resistance.
作為上述式(b2)中之R8~R11中之碳原子數1~20之1價飽和烴基,例如可列舉:甲基、乙基、丙基、異丙基、丁基、異丁基、戊基、異戊基、新戊基、己基、庚基、辛基、2-乙基己基、壬基、癸基、十二烷基、十六烷基、二十烷基等碳數1~20之烷基;環丙基、環戊基、環己基、環庚基、環辛基、三環癸基等碳原子數3~20之環烷基等。
Examples of monovalent saturated hydrocarbon groups with 1 to 20 carbon atoms in R 8 to R 11 in the above formula (b2) include methyl, ethyl, propyl, isopropyl, butyl, and isobutyl. , Pentyl, isopentyl, neopentyl, hexyl, heptyl, octyl, 2-ethylhexyl, nonyl, decyl, dodecyl, hexadecyl, eicosyl, etc.
作為上述式(b2)中之R6及R7中之碳原子數1~6之烷基,例如可列舉:上述中所列舉之烷基中碳原子數1~6者等。 Examples of the alkyl group having 1 to 6 carbon atoms in R 6 and R 7 in the above formula (b2) include those having 1 to 6 carbon atoms in the alkyl groups listed above.
作為上述式(b2)中之R11中之碳原子數7~10之芳烷基, 例如可列舉:苄基、苯乙基、苯丁基等。 Examples of the aralkyl group having 7 to 10 carbon atoms in R 11 in the above formula (b2) include benzyl, phenethyl, and phenbutyl.
上述M+例如為+N(R11)4、Na+或K+,較佳為+N(R11)4。作為上述+N(R11)4,例如較佳為4個R11中至少2個為碳原子數5~20之1價飽和烴基。又,4個R11之合計碳數較佳為20~80,更佳為20~60。若R11為該等基,則可期待本發明之阻劑組成物形成異物少之著色塗膜或圖案。 The above-mentioned M + is, for example, + N(R 11 ) 4 , Na + or K + , preferably + N(R 11 ) 4 . As the above-mentioned + N(R 11 ) 4 , for example, it is preferable that at least two of the four R 11 are monovalent saturated hydrocarbon groups having 5 to 20 carbon atoms. In addition, the total carbon number of the four R 11 is preferably 20 to 80, more preferably 20 to 60. If R 11 is such a group, the resist composition of the present invention can be expected to form a colored coating film or pattern with less foreign matter.
又,上述二苯并哌喃系染料中,更佳為下述式(b3) Moreover, among the above-mentioned dibenzopyran dyes, the following formula (b3) is more preferable
[式(b3)中,R21~R24分別獨立地表示氫原子、-R26或碳原子數6~10之1價芳香族烴基,該芳香族烴基所含有之氫原子亦可經-SO3-、-SO3 -Ma+、-SO3H、-SO3R26或-SO2NHR26取代。 [In formula (b3), R 21 ~ R 24 each independently represent a hydrogen atom, -R 26 or a monovalent aromatic hydrocarbon group with 6 to 10 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may also be passed through -SO 3 -, -SO 3 - Ma + , -SO 3 H, -SO 3 R 26 or -SO 2 NHR 26 are substituted.
X表示鹵素原子。 X represents a halogen atom.
a1表示0或1之整數。 a1 represents an integer of 0 or 1.
m1表示0~5之整數。於m1為2以上之整數之情形時,複數個R25相同或互不相同。 m1 represents an integer from 0 to 5. When m1 is an integer of 2 or more, a plurality of R 25 are the same or different from each other.
Ma+表示+N(R27)4、Na+或K+。 Ma + represents + N(R 27 ) 4 , Na + or K + .
R25表示-SO3-、-SO3 -Ma+、-SO3H或SO2NHR26。 R 25 represents -SO 3 -, -SO 3 - Ma + , -SO 3 H, or SO 2 NHR 26 .
R26表示碳原子數1~20之1價飽和烴基。 R 26 represents a monovalent saturated hydrocarbon group with 1 to 20 carbon atoms.
R27分別獨立地表示碳原子數1~20之1價飽和烴基或苄基。] R 27 each independently represents a monovalent saturated hydrocarbon group having 1 to 20 carbon atoms or a benzyl group. ]
所表示之染料。 The dye represented.
作為上述式(b3)中之R21~R24中之碳原子數6~10之1價芳香族烴基,例如可列舉:與作為R1~R4中之芳香族烴基所列舉者相同之基。其中,較佳為R21及R23為氫原子,且R22及R24為碳原子數6~10之1價芳香族烴基,且該芳香族烴基所含有之氫原子可經-SO3-、-SO3-M+、-SO3H、-SO3R26或-SO2NHR26取代者。進一步較佳為R21及R23為氫原子,且R22及R24為碳原子數6~10之1價芳香族烴基,且該芳香族烴基所含有之氫原子經-SO3 -M+或-SO2NHR26取代者。若R21~R24為該等基,則期待含有化合物(b-2-3)之阻劑組成物可形成耐熱性優異之著色塗膜或圖案。 Examples of the monovalent aromatic hydrocarbon groups having 6 to 10 carbon atoms in R 21 to R 24 in the above formula (b3) include the same groups as those listed as the aromatic hydrocarbon groups in R 1 to R 4 . Among them, it is preferable that R 21 and R 23 are hydrogen atoms, and R 22 and R 24 are monovalent aromatic hydrocarbon groups with 6 to 10 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon groups may be through -SO 3- , -SO 3- M + , -SO 3 H, -SO 3 R 26 or -SO 2 NHR 26 replacement. More preferably, R 21 and R 23 are hydrogen atoms, and R 22 and R 24 are monovalent aromatic hydrocarbon groups with 6 to 10 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon groups are through -SO 3 - M + Or -SO 2 NHR 26 replacement. If R 21 to R 24 are these groups, it is expected that the resist composition containing the compound (b-2-3) can form a colored coating film or pattern with excellent heat resistance.
作為上述式(b3)中之R26及R27中之碳原子數1~20之1價飽和烴基,例如可列舉:與作為上述R8~R11中之飽和烴基所列舉者相同之基等。 Examples of the monovalent saturated hydrocarbon group having 1 to 20 carbon atoms in R 26 and R 27 in the above formula (b3) include the same groups as those listed as the saturated hydrocarbon group in R 8 to R 11 , etc. .
上述式(b3)中之R21~R24中之-R26較佳為分別獨立為氫原子、甲基或乙基。 -R 26 in R 21 to R 24 in the above formula (b3) is preferably a hydrogen atom, a methyl group or an ethyl group independently.
作為上述式(b3)中之-SO3R26及-SO2NHR26中之R26,較佳為碳原子數3~20之支鏈狀烷基,更佳為碳原子數6~12之支鏈狀烷基,進一步較佳為2-乙基己基。若R26為該等基,則期待含有化合物(b3)之阻劑組成物可形成異物之產生少之著色塗膜或圖案。 As in the above formula (b3) -SO 3 R 26 and -SO 2 NHR 26 in the R 26, preferably a carbon atom number of a branched chain alkyl of 3 to 20, more preferably 6 to 12 carbon atoms, the The branched alkyl group is more preferably 2-ethylhexyl. If R 26 is such a group, it is expected that the resist composition containing the compound (b3) can form a colored coating film or pattern with less foreign matter generation.
上述Ma+為+N(R27)4、Na+或K+,較佳為+N(R27)4。作為上述+N(R27)4,較佳為4個R27中至少2個為碳原子數5~20之1價飽和烴基。又,4個R27之合計碳原子數較佳為20~80,更佳為20~60。期待含有R27為該等基之化合物(b3)之阻劑組成物可形成異物之產生少之塗膜層或圖案。 The aforementioned Ma + is + N(R 27 ) 4 , Na + or K + , preferably + N(R 27 ) 4 . As the above-mentioned + N(R 27 ) 4 , it is preferable that at least two of the four R 27 are monovalent saturated hydrocarbon groups having 5 to 20 carbon atoms. In addition, the total number of carbon atoms of 4 R 27 is preferably 20 to 80, more preferably 20 to 60. It is expected that the resist composition containing the compound (b3) in which R 27 is these groups can form a coating layer or pattern with less foreign matter generation.
作為本發明中可使用之較佳之二苯并哌喃系染料,例如可列舉:將式(b4)~式(b21)表示之化合物設為主成分之染料等。再者,下述式中,Ra表示2-乙基己基。 As preferred dibenzopyran-based dyes that can be used in the present invention, for example, dyes in which compounds represented by formulas (b4) to (b21) are used as main components, etc. can be cited. In addition, in the following formula, Ra represents 2-ethylhexyl.
成為二苯并哌喃系染料之主成分之化合物中,較佳為C.I.酸性紅289之磺醯胺化物或C.I.酸性紅289之四級銨鹽。作為此種化合物,例如可列舉:式(b4)~式(b11)、式(b16)及式(b17)表示之化合物等。 Among the compounds that become the main component of dibenzopiperan dyes, the sulfonamide of C.I. Acid Red 289 or the quaternary ammonium salt of C.I. Acid Red 289 is preferred. Examples of such compounds include compounds represented by formula (b4) to formula (b11), formula (b16), and formula (b17).
上述式(b1)表示之化合物例如可藉由如下方式進行製造:藉由慣例使具有-SO3H之色素或色素中間物氯化,使具有所獲得之-SO2Cl之色素或色素中間物與R8-NH2所表示之胺進行反應。又,亦可藉由如下方式進行製造:與上述同樣地,使藉由日本特開平3-78702號公報第3頁之右上欄~左下欄所記載之方法所製造之色素在氯化後與胺進行反應。 The compound represented by the above formula (b1) can be produced, for example, by chlorinating a pigment or pigment intermediate having -SO 3 H by convention to obtain a pigment or pigment intermediate having -SO 2 Cl It reacts with the amine represented by R 8 -NH 2 . In addition, it can also be manufactured by the following method: in the same way as above, the dye manufactured by the method described in the upper right column to the lower left column on page 3 of JP 3-78702 A is chlorinated with an amine To react.
本發明中所使用之染料(b2)亦可使用上述式(b1)表示之鹽或二苯并哌喃系染料以外之其他染料。作為上述其他染料,例如可列舉:油溶性染料、酸性染料、酸性染料之胺鹽或酸性染料之磺醯胺衍生物等染料等,具體而言,例如可列舉:以色指數(The Society of Dyers and Colourists出版)被分類為染料之化合物、或染色筆記(Dyeing Note)(色染社)所記載之各種染料等。 The dye (b2) used in the present invention may also use dyes other than the salt represented by the above formula (b1) or the dibenzopyran dye. Examples of the above-mentioned other dyes include dyes such as oil-soluble dyes, acid dyes, amine salts of acid dyes, or sulfonamide derivatives of acid dyes. Specifically, for example, color index (The Society of Dyers and Colourists) is classified as a compound of dyes, or various dyes described in Dyeing Note (Dyeing Note).
作為上述其他染料,例如可列舉:C.I.溶劑黃4(以下,將C.I.溶劑黃之記載進行省略,僅記載編號)、14、15、23、24、38、62、63、68、82、94、98、99;C.I.溶劑紅45、49、125、130;C.I.溶劑橙2、7、11、15、26、56;等C.I.溶劑染料、C.I.酸性黃1、3、7、9、11、17、23、25、29、34、36、38、40、42、54、65、72、73、76、79、98、99、111、112、113、114、116、119、123、128、134、135、138、139、140、144、150、155、157、160、161、163、168、169、172、177、178、179、184、190、193、196、197、199、202、203、204、205、207、212、214、220、221、228、230、232、235、238、240、242、243、251;C.I.酸性紅1、4、8、14、17、18、26、27、29、31、34、35、
37、42、44、50、51、52、57、66、73、80、87、88、91、92、94、97、103、111、114、129、133、134、138、143、145、150、151、158、176、182、183、198、206、211、215、216、217、227、228、249、252、257、258、260、261、266、268、270、274、277、280、281、195、308、312、315、316、339、341、345、346、349、382、383、394、401、412、417、418、422、426;C.I.酸性橙6、7、8、10、12、26、50、51、52、56、62、63、64、74、75、94、95、107、108、169、173;C.I.酸性紫6B、7、9、17、19;等C.I.酸性染料、C.I.直接黃2、33、34、35、38、39、43、47、50、54、58、68、69、70、71、86、93、94、95、98、102、108、109、129、136、138、141;C.I.直接紅79、82、83、84、91、92、96、97、98、99、105、106、107、172、173、176、177、179、181、182、184、204、207、211、213、218、220、221、222、232、233、234、241、243、246、250;C.I.直接橙34、39、41、46、50、52、56、57、61、64、65、68、70、96、97、106、107;C.I.直接紫47、52、54、59、60、65、66、79、80、81、82、84、89、90、93、95、96、103、104;等C.I.直接染料、C.I.媒染黃5、8、10、16、20、26、30、31、33、42、43、45、56、61、62、65;C.I.媒染紅1、2、3、4、9、11、12、14、17、18、19、22、23、24、25、26、30、32、33、36、37、38、39、41、43、45、46、48、53、56、63、71、74、85、86、88、90、94、95;C.I.媒染橙3、4、5、8、12、13、14、20、21、23、24、28、
29、32、34、35、36、37、42、43、47、48;C.I.媒染紫1、2、4、5、7、14、22、24、30、31、32、37、40、41、44、45、47、48、53、58;等C.I.媒染染料等。
Examples of the above-mentioned other dyes include: CI Solvent Yellow 4 (hereinafter, the description of CI Solvent Yellow is omitted, and only the number is described), 14, 15, 23, 24, 38, 62, 63, 68, 82, 94, 98, 99; CI solvent red 45, 49, 125, 130; CI solvent orange 2, 7, 11, 15, 26, 56; and other CI solvent dyes, CI acid yellow 1, 3, 7, 9, 11, 17, 23, 25, 29, 34, 36, 38, 40, 42, 54, 65, 72, 73, 76, 79, 98, 99, 111, 112, 113, 114, 116, 119, 123, 128, 134, 135, 138, 139, 140, 144, 150, 155, 157, 160, 161, 163, 168, 169, 172, 177, 178, 179, 184, 190, 193, 196, 197, 199, 202, 203, 204, 205, 207, 212, 214, 220, 221, 228, 230, 232, 235, 238, 240, 242, 243, 251; CI Acid Red 1, 4, 8, 14, 17, 18, 26, 27 , 29, 31, 34, 35,
37, 42, 44, 50, 51, 52, 57, 66, 73, 80, 87, 88, 91, 92, 94, 97, 103, 111, 114, 129, 133, 134, 138, 143, 145, 150,151,158,176,182,183,198,206,211,215,216,217,227,228,249,252,257,258,260,261,266,268,270,274,277, 280, 281, 195, 308, 312, 315, 316, 339, 341, 345, 346, 349, 382, 383, 394, 401, 412, 417, 418, 422, 426; CI Acid Orange 6, 7, 8 , 10, 12, 26, 50, 51, 52, 56, 62, 63, 64, 74, 75, 94, 95, 107, 108, 169, 173; CI Acid Violet 6B, 7, 9, 17, 19; Other CI acid dyes, CI direct yellow 2, 33, 34, 35, 38, 39, 43, 47, 50, 54, 58, 68, 69, 70, 71, 86, 93, 94, 95, 98, 102, 108, 109, 129, 136, 138, 141; CI direct red 79, 82, 83, 84, 91, 92, 96, 97, 98, 99, 105, 106, 107, 172, 173, 176, 177, 179 , 181, 182, 184, 204, 207, 211, 213, 218, 220, 221, 222, 232, 233, 234, 241, 243, 246, 250; CI direct orange 34, 39, 41, 46, 50, 52, 56, 57, 61, 64, 65, 68, 70, 96, 97, 106, 107; CI direct purple 47, 52, 54, 59, 60, 65, 66, 79, 80, 81, 82, 84 , 89, 90, 93, 95, 96, 103, 104; etc. CI direct dyes, CI mordant yellow 5, 8, 10, 16, 20, 26, 30, 31, 33, 42, 43, 45, 56, 61 , 62, 65; CI mordant red 1, 2, 3, 4, 9, 11, 12, 14, 17, 18, 19, 22, 23, 24, 25, 26, 30, 32, 33, 36, 37, 38, 39, 41, 43, 45, 46, 48, 53, 56, 63, 71, 74, 85, 86, 88, 90, 94, 95;
另一方面,作為用以形成黑矩陣(BM)之著色劑(B),只要為黑色,則無特別限定,例如較佳為碳黑、金屬氧化物、由2種以上之金屬氧化物所構成之複合金屬化合物等顏料。又,亦可為如下組合:將選自具有紅色、藍色、綠色、紫色、黃色、青色、洋紅(magenta)之色相之顏料中之2種以上的有機顏料進行混合,藉由混色而製成黑色。 On the other hand, the coloring agent (B) used to form the black matrix (BM) is not particularly limited as long as it is black. For example, carbon black, metal oxide, or two or more metal oxides are preferred. The composite metal compound and other pigments. In addition, it can also be a combination of: mixing two or more organic pigments selected from pigments with hues of red, blue, green, purple, yellow, cyan, and magenta to produce by mixing colors black.
作為上述碳黑,例如可列舉:燈黑、乙炔黑、熱碳黑、煙囪黑、爐黑等。作為上述金屬氧化物,可列舉:藉由鈦之氧化或二氧化鈦之還原而獲得之鈦黑。通常鈦黑由TimO2m-1(m為1以上之數)表示。又,作為金屬氧化物,亦可列舉:銅、鐵、鉻、錳、鈷等之金屬氧化物。進一步,作為由2種以上之金屬氧化物所構成之複合金屬化合物,例如可列舉:銅-鉻之氧化物、銅-鉻-錳之氧化物、銅-鐵-錳之氧化物或鈷-鐵-錳之氧化物等。 As said carbon black, lamp black, acetylene black, thermal black, chimney black, furnace black, etc. are mentioned, for example. Examples of the above-mentioned metal oxide include titanium black obtained by oxidation of titanium or reduction of titanium dioxide. Titanium black is generally represented by 2m-1 (m is a number of 1 or more of) a Ti m O. In addition, examples of metal oxides include metal oxides such as copper, iron, chromium, manganese, and cobalt. Further, as a composite metal compound composed of two or more metal oxides, for example, copper-chromium oxide, copper-chromium-manganese oxide, copper-iron-manganese oxide, or cobalt-iron oxide -Manganese oxide, etc.
作為上述碳黑之市售品,例如可列舉:三菱化學股份有限公司製造之MA7、MA8、MA11、MA100、MA100R、MA220、MA230、MA600、#5、#10、#20、#25、#30、#32、#33、#40、#44、#45、#47、#50、#52、#55、#650、#750、#850、#950、#960、#970、#980、#990、#1000、#2200、#2300、#2350、#2400、#2600、#3050、#3150、#3250、#3600、#3750、#3950、#4000、#4010、OIL7B、OIL9B、OIL11B、OIL30B、OIL31B等;或Evonik Degussa Japan股份有限公司製造之Printex3、 Printex3OP、Printex30、Printex30OP、Printex40、Printex45、Printex55、Printex60、Printex75、Printex80、Printex85、Printex90、Printex A、Print ex L、Printex G、Printex P、Printex U、Printex V、Printex G、Special Black550、Special Black 350、Special Black250、Special Black100、Special Black6、Special Black5、Special Black4、Color Black FW1、Color Black FW2、Color Black FW2V、Color Black FW18、Color Black FW18、Color Black FW200、Color Black S160、Color Black S170;或Cabot Japan股份有限公司製造之Monarch120、Monarch280、Monarch460、Monarch800、Monarch880、Monarch900、Monarch1000、Monarch1100、Monarch1300、Monarch1400、Monarch4630、REGAL99、REGAL99R、REGAL415、REGAL415R、REGAL250、REGAL250R、REGAL330、REGAL400R、REGAL55R0、REGAL660R、BLACK PEARLS480、PEARLS130、VULCAN XC72R、ELFTEX-8等;或Columbian Chemicals公司製造之RAVEN11、RAVEN14、RAVEN15、RAVEN16、RAVEN22RAVEN30、RAVEN35、RAVEN40、RAVEN410、RAVEN420、RAVEN450、RAVEN500、RAVEN780、RAVEN850、RAVEN890H、RAVEN1000、RAVEN1020、RAVEN1040、RAVEN1060U、RAVEN1080U、RAVEN1170、RAVEN1190U、RAVEN1250、RAVEN1500、RAVEN2000、RAVEN2500U、RAVEN3500、RAVEN5000、RAVEN5250、RAVEN5750、RAVEN7000等。 Examples of commercially available products of the above carbon black include: MA7, MA8, MA11, MA100, MA100R, MA220, MA230, MA600, #5, #10, #20, #25, #30 manufactured by Mitsubishi Chemical Corporation , #32, #33, #40, #44, #45, #47, #50, #52, #55, #650, #750, #850, #950, #960, #970, #980, # 990, #1000, #2200, #2300, #2350, #2400, #2600, #3050, #3150, #3250, #3600, #3750, #3950, #4000, #4010, OIL7B, OIL9B, OIL11B, OIL30B, OIL31B, etc.; or Printex3, manufactured by Evonik Degussa Japan Co., Ltd. Printex3OP, Printex30, Printex30OP, Printex40, Printex45, Printex55, Printex60, Printex75, Printex80, Printex85, Printex90, Printex A, Print ex L, Printex G, Printex P, Printex U, Printex V, Printex G, Special Black550, Special Black 350 , Special Black250, Special Black100, Special Black6, Special Black5, Special Black4, Color Black FW1, Color Black FW2, Color Black FW2V, Color Black FW18, Color Black FW18, Color Black FW200, Color Black S160, Color Black S170; or Cabot Monarch120, Monarch280, Monarch460, Monarch800, Monarch880, Monarch900, Monarch1000, Monarch1100, Monarch1300, Monarch1400, Monarch4630, REGAL99, REGAL99R, REGAL415, REGAL415R, REGAL250, REGAL250R, REGAL330, REGAL400R, REGAL55R0, PREGAL660480R , PEARLS130, VULCAN XC72R, ELFTEX-8, etc.; or RAVEN11, RAVEN14, RAVEN15, RAVEN16, RAVEN22, RAVEN30, RAVEN35, RAVEN40, RAVEN410, RAVEN420, RAVEN450, RAVEN500, RAVEN780, RAVEN850, RAVEN890H, RAVEN1000, RAVEN104010 manufactured by Columbia Chemicals , RAVEN1060U, RAVEN1080U, RAVEN1170, RAVEN1190U, RAVEN1250, RAVEN1500, RAVEN2000, RAVEN2500U, RAVEN3500, R AVEN5000, RAVEN5250, RAVEN5750, RAVEN7000, etc.
上述之碳黑中,較佳為使用經樹脂被覆之碳黑作為濾色器之黑矩陣所要求之具有高光學濃度及高表面電阻率者。再者,經樹脂被覆之碳黑例如可藉由如下方式獲得:利用日本特開平9-26571號公報、日本特開平9-71733號公報、日本特開平9-95625號公報、日本特開平9-238863 號公報或日本特開平11-60989號公報所記載之方法對公知之碳黑進行處理。 Among the above-mentioned carbon blacks, it is preferable to use resin-coated carbon black as the black matrix of the color filter with high optical density and high surface resistivity required. Furthermore, resin-coated carbon black can be obtained, for example, by using Japanese Patent Application Publication No. 9-26571, Japanese Patent Application Publication No. 9-71733, Japanese Patent Application Publication No. 9-95625, and Japanese Patent Application Publication No. 9- 238863 The known carbon black is processed by the method described in Bulletin No. 11-60989 or JP-A No. 11-60989.
又,作為上述鈦黑之製作方法,可列舉:將日本特開昭49-5432號公報記載之二氧化鈦與金屬鈦之混合體於還原性環境下進行加熱而使之還原的方法、將日本特開昭57-205322號公報記載之四氯化鈦之經高溫水解所得之超微細二氧化鈦於含有氫的還原性環境中進行還原之方法、將日本特開昭60-65069號公報及日本特開昭61-201610號公報記載之二氧化鈦或氫氧化鈦於氨存在下進行高溫還原之方法、使釩化合物附著於日本特開昭61-201610號公報記載之二氧化鈦或氫氧化鈦並於氨存在下進行高溫還原之方法等。作為鈦黑之市售品,例如可列舉:三菱綜合材料股份有限公司製造之鈦黑10S、12S、13R、13M、13M-C等。 In addition, as a method of producing the above-mentioned titanium black, a method of heating a mixture of titanium dioxide and metallic titanium described in JP Sho 49-5432 A to reduce it in a reducing environment, and JP The method of reducing ultrafine titanium dioxide obtained by high-temperature hydrolysis of titanium tetrachloride in a reducing environment containing hydrogen, as described in Bulletin No. 57-205322, is described in Japanese Patent Application Publication No. 60-65069 and Japanese Patent Application Publication No. 61 -The method of high-temperature reduction of titanium dioxide or titanium hydroxide in the presence of ammonia as described in the 201610 publication, attaching a vanadium compound to the titanium dioxide or titanium hydroxide described in JP 61-201610, and performing high-temperature reduction in the presence of ammonia The method and so on. As a commercially available product of titanium black, for example, titanium black 10S, 12S, 13R, 13M, 13M-C, etc. manufactured by Mitsubishi Materials Corporation can be cited.
作為將2種以上之有機顏料進行混合,並藉由混色而製成黑色之組合,可列舉:將紅色、綠色、藍色這三色之顏料進行混合而成之黑色顏料。作為用以製備黑色顏料之可混合使用之色材,可列舉:維多利亞純藍(C.I.42595)、金黃胺O(C.I.41000)、卡磁隆亮黃(Cathilon Brilliant flavin)(鹼性13)、玫瑰紅6GCP(C.I.45160)、玫瑰紅B(C.I.45170)、番紅OK70:100(C.I.50240)、羊毛罌紅(Erioglaucine)X(C.I.42080)、No.120/雷奧諾爾黃(Lionol Yellow)(C.I.21090)、雷奧諾爾黃GRO(C.I.21090)、斯姆勒耐曬黃(Symuler Fast Yellow)8GF(C.I.21105)、聯苯胺黃4T-564D(C.I.21095)、斯姆勒耐曬紅4015(C.I.12355)、雷奧諾爾紅7B4401(C.I.15850)、Fastgen Blue TGR-L(C.I.74160)、雷奧諾爾藍SM(C.I.26150)、雷奧諾爾藍ES(C.I.顏料藍15:6)、Lionogen Red GD(C.I.顏料紅168)、雷奧諾爾綠2YS(C.I.顏 料綠36)等。 As a combination of mixing two or more kinds of organic pigments and mixing them to produce black, there can be mentioned: black pigments that are mixed with three colors of red, green, and blue. As color materials that can be mixed for the preparation of black pigments, include: Victoria Pure Blue (CI42595), Chrysanthemum O (CI41000), Cathilon Brilliant flavin (Alkaline 13), Rose Red 6GCP (CI45160), Rose Red B (CI45170), Safranin OK70:100 (CI50240), Erioglaucine X (CI42080), No.120/Lionol Yellow (CI 21090), Reonor Yellow GRO (CI21090), Symuler Fast Yellow 8GF (CI21105), Benzidine Yellow 4T-564D (CI21095), Smoler Fast Yellow 4015 (CI 12355), Leonor Red 7B4401 (CI15850), Fastgen Blue TGR-L (CI74160), Leonor Blue SM (CI26150), Leonor Blue ES (CI Pigment Blue 15: 6), Lionogen Red GD (CI Pigment Red 168), Leonor Green 2YS (CI Yan Material Green 36) and so on.
作為用以製備黑色顏料之可混合使用之其他色材,例如可列舉:C.I.顏料黃20、C.I.顏料黃24、C.I.顏料黃86、C.I.顏料黃93、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃117、C.I.顏料黃125、C.I.顏料黃137、C.I.顏料黃138、C.I.顏料黃147、C.I.顏料黃148、C.I.顏料黃153、C.I.顏料黃154、C.I.顏料黃166、C.I.顏料橙36、C.I.顏料橙43、C.I.顏料橙51、C.I.顏料橙55、C.I.顏料橙59、C.I.顏料橙61、C.I.顏料紅9、C.I.顏料紅97、C.I.顏料紅122、C.I.顏料紅123、C.I.顏料紅149、C.I.顏料紅168、C.I.顏料紅177、C.I.顏料紅180、C.I.顏料紅192、C.I.顏料紅215、C.I.顏料紅216、C.I.顏料紅217、C.I.顏料紅220、C.I.顏料紅223、C.I.顏料紅224、C.I.顏料紅226、C.I.顏料紅227、C.I.顏料紅228、C.I.顏料紅240、C.I.C.I.顏料紫19、C.I.顏料紫23、C.I.顏料紫29、C.I.顏料紫30、C.I.顏料紫37、C.I.顏料紫40、C.I.顏料紫50、C.I.顏料藍15、C.I.顏料藍15:1、C.I.顏料藍15:4、C.I.顏料藍22、C.I.顏料藍60、C.I.顏料藍64、C.I.顏料綠7、C.I.棕顏料23、25、26等。 As other color materials that can be mixed for use in the preparation of black pigments, for example, CI Pigment Yellow 20, CI Pigment Yellow 24, CI Pigment Yellow 86, CI Pigment Yellow 93, CI Pigment Yellow 109, CI Pigment Yellow 110, CI Pigment Yellow 117, CI Pigment Yellow 125, CI Pigment Yellow 137, CI Pigment Yellow 138, CI Pigment Yellow 147, CI Pigment Yellow 148, CI Pigment Yellow 153, CI Pigment Yellow 154, CI Pigment Yellow 166, CI Pigment Orange 36, CI Pigment Orange 43, CI Pigment Orange 51, CI Pigment Orange 55, CI Pigment Orange 59, CI Pigment Orange 61, CI Pigment Red 9, CI Pigment Red 97, CI Pigment Red 122, CI Pigment Red 123, CI Pigment Red 149, CI Pigment Red 168, CI Pigment Red 177, CI Pigment Red 180, CI Pigment Red 192, CI Pigment Red 215, CI Pigment Red 216, CI Pigment Red 217, CI Pigment Red 220, CI Pigment Red 223, CI Pigment Red 224, CI Pigment Red 226, CI Pigment Red 227, CI Pigment Red 228, CI Pigment Red 240, CICI Pigment Violet 19, CI Pigment Violet 23, CI Pigment Violet 29, CI Pigment Violet 30, CI Pigment Violet 37, CI Pigment Violet 40, CI Pigment Violet 50, CI Pigment Blue 15, CI Pigment Blue 15:1, CI Pigment Blue 15:4, CI Pigment Blue 22, CI Pigment Blue 60, CI Pigment Blue 64, CI Pigment Green 7, CI Brown Pigment 23, 25, 26 and so on.
於使用碳黑作為黑色顏料之情形時,平均一次粒徑較佳為0.01~0.08μm之範圍,就顯影性良好之方面而言,更佳為0.02~0.05μm之範圍。又,所使用之碳黑之鄰苯二甲酸二丁酯(以下,簡稱為「DBP」)吸收量較佳為40~100cm3/100g之範圍,就分散性、顯影性良好之方面而言,更佳為50~80cm3/100g之範圍。進一步,所使用之碳黑之基於BET法之比表面積較佳為50~120m2/g之範圍,就分散穩定性良好之方面而言,更佳為60~95m2/g之範圍。 When carbon black is used as a black pigment, the average primary particle diameter is preferably in the range of 0.01 to 0.08 μm, and in terms of good developability, it is more preferably in the range of 0.02 to 0.05 μm. In addition, the absorption amount of dibutyl phthalate (hereinafter referred to as "DBP") of the carbon black used is preferably in the range of 40 to 100 cm 3 /100 g. In terms of good dispersibility and developability, More preferably, it is in the range of 50~80cm 3 /100g. Furthermore, the specific surface area based on the BET method of the carbon black used is preferably in the range of 50 to 120 m 2 /g, and in terms of good dispersion stability, it is more preferably in the range of 60 to 95 m 2 /g.
又,碳黑其粒子形狀與有機顏料等不同,以稱為1次粒子融 合而成之結構之狀態存在,又,存在藉由後處理而於粒子表面形成微細之細孔之情形。因此,為了表示碳黑之粒子形狀,通常而言,除利用與上述有機顏料相同之方法所求出之1次粒子之平均粒徑外,較佳為對DBP吸收量(JIS K6221)與基於BET法之比表面積(JIS K6217)進行測量而設為結構或細孔量之指標。 In addition, the particle shape of carbon black is different from that of organic pigments, and is called primary particle fusion. The state of the combined structure exists, and there are cases where fine pores are formed on the particle surface by post-processing. Therefore, in order to express the particle shape of carbon black, in general, in addition to the average particle size of the primary particles obtained by the same method as the above-mentioned organic pigments, the DBP absorption (JIS K6221) and BET based The specific surface area (JIS K6217) of the method is measured and used as an index of the structure or the amount of pores.
著色劑(B)中,就獲得生產性良好,且色濃度較濃,而且耐久性亦優異之塗膜層之方面而言,較佳為顏料,就可最大限度地發揮本發明之效果,即亦抑制源自著色劑之異物產生之方面而言,更佳為選自由C.I.顏料紅177、C.I.顏料紅207、C.I.顏料紅254、C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠58、C.I.顏料綠59、C.I.顏料黃83、C.I.顏料黃93、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃129、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃150、C.I.顏料黃154、C.I.顏料黃180、C.I.顏料黃185、C.I.顏料藍15:1、C.I.顏料藍15:2、C.I.顏料藍15:6及C.I.顏料紫23組成之群中之一種以上之顏料。
Among the colorants (B), in terms of obtaining a coating film layer with good productivity, high color density, and excellent durability, pigments are preferred to maximize the effects of the present invention, namely In terms of also suppressing the generation of foreign matter originating from colorants, it is more preferably selected from CI Pigment Red 177, CI Pigment Red 207, CI Pigment Red 254,
上述著色劑(B)可單獨地使用,亦可併用2種以上。 The said coloring agent (B) may be used individually, and may use 2 or more types together.
上述著色劑(B)之摻合量較佳為相對於下述之鹼可溶性樹脂(C)與聚合性化合物(D)之合計100質量份,以質量基準計為10~80質量份之範圍,更佳為15~65質量份之範圍。 The blending amount of the above-mentioned colorant (B) is preferably in the range of 10 to 80 parts by mass relative to the total of 100 parts by mass of the alkali-soluble resin (C) and polymerizable compound (D) described below. More preferably, it is in the range of 15 to 65 parts by mass.
作為本發明中所使用之鹼可溶性樹脂(C),係可溶於鹼性顯影液者。鹼可溶性樹脂(C)較佳為具有選自羧基、酚性羥基及磺酸基之群中之至少1個酸性基或其鹽之樹脂。 The alkali-soluble resin (C) used in the present invention is one that is soluble in an alkaline developer. The alkali-soluble resin (C) is preferably a resin having at least one acidic group or a salt thereof selected from the group consisting of a carboxyl group, a phenolic hydroxyl group, and a sulfonic acid group.
關於上述鹼可溶性樹脂(C),若更具體地進行說明,則例 如可列舉以下之樹脂等。 Regarding the above-mentioned alkali-soluble resin (C), if it is more specifically described, an example Examples include the following resins.
‧將具有酸性基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之鹼可溶性樹脂(C1)。 ‧Alkali-soluble resin (C1) obtained by polymerizing a (meth)acrylic polymerizable monomer having an acidic group as an essential component.
‧使將具有反應性基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之不具有酸性基之聚合物、與具有對該反應性基具有反應性之反應性基與酸基之化合物進行反應所得之鹼可溶性樹脂(C2) ‧Polymers without acidic groups obtained by polymerizing (meth)acrylic polymerizable monomers with reactive groups as essential components, and reactive groups with reactive groups that are reactive with the reactive groups Alkali-soluble resin (C2) obtained by reaction of acid-based compounds
‧針對含環氧基之(甲基)丙烯酸酯、與其他聚合性單體之共聚物,使不飽和單羧酸加成於該共聚物所具有之環氧基之至少一部分,進一步使多羧酸之酸酐與因不飽和單羧酸之加成反應而產生之羥基的至少一部分進行加成反應所得之鹼可溶性樹脂(C3)。 ‧For copolymers of epoxy-containing (meth)acrylates and other polymerizable monomers, unsaturated monocarboxylic acid is added to at least a part of the epoxy groups in the copolymer to further increase Alkali-soluble resin (C3) obtained by the addition reaction of an acid anhydride and at least a part of the hydroxyl group produced by the addition reaction of an unsaturated monocarboxylic acid.
‧具有羧基之環氧(甲基)丙烯酸酯樹脂(C4) ‧Epoxy (meth)acrylate resin with carboxyl group (C4)
以下,對上述(C1)~(C4)詳細地進行說明。 Hereinafter, the above (C1) to (C4) will be described in detail.
作為上述鹼可溶性樹脂(C1),例如可列舉:將具有羧基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之鹼可溶性樹脂;或將具有磺酸基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之鹼可溶性樹脂等。其中,較佳為將具有羧基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之鹼可溶性樹脂。 Examples of the alkali-soluble resin (C1) include: an alkali-soluble resin obtained by polymerizing a (meth)acrylic polymerizable monomer having a carboxyl group as an essential component; or a (methyl) ) Alkali-soluble resin obtained by polymerization of acrylic polymerizable monomer as an essential component. Among them, preferred is an alkali-soluble resin obtained by polymerizing a (meth)acrylic polymerizable monomer having a carboxyl group as an essential component.
作為上述具有羧基之(甲基)丙烯酸系聚合性單體,例如可列舉:(甲基)丙烯酸、馬來酸、丁烯酸、伊康酸、富馬酸、肉桂酸、2-(甲基)丙烯醯氧基乙基琥珀酸、2-(甲基)丙烯醯氧基乙基己二酸、2-(甲基)丙烯醯氧基乙基馬來酸、2-(甲基)丙烯醯氧基乙基六氫鄰苯二甲酸、2-(甲基)丙烯醯氧基乙基鄰苯二甲酸、2-(甲基)丙烯醯氧 基丙基琥珀酸、2-(甲基)丙烯醯氧基丙基己二酸、2-(甲基)丙烯醯氧基丙基馬來酸、2-(甲基)丙烯醯氧基丙基氫鄰苯二甲酸、2-(甲基)丙烯醯氧基丙基鄰苯二甲酸、2-(甲基)丙烯醯氧基丁基琥珀酸、2-(甲基)丙烯醯氧基丁基己二酸、2-(甲基)丙烯醯氧基丁基馬來酸、2-(甲基)丙烯醯氧基丁基氫鄰苯二甲酸、2-(甲基)丙烯醯氧基丁基鄰苯二甲酸等聚合性單體;使ε-己內酯、β-丙內酯、γ-丁內酯、δ-戊內酯等內酯加成於丙烯酸而成之聚合性單體;使琥珀酸、馬來酸、鄰苯二甲酸、或該等之酸酐加成於(甲基)丙烯酸羥基烷基酯而成之聚合性單體等。該等具有羧基之(甲基)丙烯酸系聚合性單體可僅使用1種,亦可併用2種以上。上述具有羧基之(甲基)丙烯酸系聚合性單體中,較佳為(甲基)丙烯酸、2-(甲基)丙烯醯氧基乙基琥珀酸。 Examples of the (meth)acrylic polymerizable monomer having a carboxyl group include (meth)acrylic acid, maleic acid, crotonic acid, itaconic acid, fumaric acid, cinnamic acid, 2-(methyl) )Acrylic oxyethyl succinic acid, 2-(meth)acrylic oxyethyl adipic acid, 2-(meth)acryloxyethyl maleic acid, 2-(meth)acrylic acid Oxyethylhexahydrophthalic acid, 2-(meth)acryloxyethyl phthalic acid, 2-(meth)acryloxy Propyl succinic acid, 2-(meth)acryloxypropyl adipic acid, 2-(meth)acryloxypropyl maleic acid, 2-(meth)acryloxypropyl Hydrophthalic acid, 2-(meth)acryloxypropyl phthalic acid, 2-(meth)acryloxybutyl succinic acid, 2-(meth)acryloxybutyl Adipic acid, 2-(meth)acryloxybutyl maleic acid, 2-(meth)acryloxybutylhydrophthalic acid, 2-(meth)acryloxybutyl Polymerizable monomers such as phthalic acid; polymerizable monomers made by adding lactones such as ε-caprolactone, β-propiolactone, γ-butyrolactone, and δ-valerolactone to acrylic acid; A polymerizable monomer formed by adding succinic acid, maleic acid, phthalic acid, or these acid anhydrides to hydroxyalkyl (meth)acrylate. These carboxyl group-containing (meth)acrylic polymerizable monomers may be used alone or in combination of two or more kinds. Among the above-mentioned (meth)acrylic polymerizable monomers having a carboxyl group, (meth)acrylic acid and 2-(meth)acryloxyethyl succinic acid are preferred.
作為上述具有磺酸基之(甲基)丙烯酸系聚合性單體,例如可列舉:(甲基)丙烯酸-2-磺乙酯、(甲基)丙烯酸-2-磺丙酯、2-羥基-3-(甲基)丙烯醯氧基丙磺酸、2-(甲基)丙烯醯胺-2-甲基丙磺酸或該等之鹽等。 Examples of the (meth)acrylic polymerizable monomer having a sulfonic acid group include 2-sulfoethyl (meth)acrylate, 2-sulfopropyl (meth)acrylate, and 2-hydroxy- 3-(meth)acryloyloxypropanesulfonic acid, 2-(meth)acrylamide-2-methylpropanesulfonic acid or their salts, etc.
於製備鹼可溶性樹脂(C1)時,亦可於無損本發明之效果之範圍內併用其他聚合性單體。作為其他單體,例如可列舉:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸苯氧基甲酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸異莰酯、 (甲基)丙烯酸2-羥基乙酯、甘油單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯等(甲基)丙烯酸酯;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸4-羥基丁酯等(甲基)丙烯酸羥基烷基酯、甘油單(甲基)丙烯酸酯等具有羥基之(甲基)丙烯酸酯;苯乙烯及其衍生物等芳香族乙烯系化合物;N-乙烯基吡咯啶酮等乙烯系化合物;N-環己基順丁烯二醯亞胺、N-苯基順丁烯二醯亞胺、N-苄基順丁烯二醯亞胺等N-取代順丁烯二醯亞胺;聚(甲基)丙烯酸甲酯巨單體、聚苯乙烯巨單體、聚(甲基)丙烯酸2-羥基乙酯巨單體、聚乙二醇巨單體、聚丙二醇巨單體、聚己內酯巨單體等巨單體等。其他聚合性單體可僅使用1種,亦可併用2種以上。 When preparing the alkali-soluble resin (C1), other polymerizable monomers may be used in combination within a range that does not impair the effects of the present invention. As other monomers, for example, methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, isopropyl (meth)acrylate, butyl (meth)acrylate, Isobutyl (meth)acrylate, benzyl (meth)acrylate, phenyl (meth)acrylate, cyclohexyl (meth)acrylate, phenoxyethyl (meth)acrylate, (meth)acrylic acid Phenoxy methyl ester, 2-ethylhexyl (meth)acrylate, isobornyl (meth)acrylate, (Meth) acrylate such as 2-hydroxyethyl (meth)acrylate, glycerol mono(meth)acrylate, tetrahydrofurfuryl (meth)acrylate; 2-hydroxyethyl (meth)acrylate, (meth)acrylate (Meth)acrylic acid esters such as hydroxyalkyl (meth)acrylate such as hydroxypropyl acrylate, 4-hydroxybutyl (meth)acrylate, glycerol mono(meth)acrylate, etc.; styrene and Aromatic vinyl compounds such as its derivatives; vinyl compounds such as N-vinylpyrrolidone; N-cyclohexyl maleimide, N-phenyl maleimide, N-benzyl N-substituted maleimides such as maleimides; polymethyl (meth)acrylate macromonomers, polystyrene macromonomers, poly(meth)acrylate 2-hydroxyethyl macromonomers Monomers, macromonomers such as polyethylene glycol macromonomers, polypropylene glycol macromonomers, polycaprolactone macromonomers, etc. As for other polymerizable monomers, only 1 type may be used, and 2 or more types may be used together.
上述其他聚合性單體中,就透明性良好,且難以損害耐熱性之方面而言,較佳為苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸4-羥基丁酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、N-環己基順丁烯二醯亞胺、N-苄基順丁烯二醯亞胺、N-苯基順丁烯二醯亞胺。 Among the above-mentioned other polymerizable monomers, styrene, methyl (meth)acrylate, cyclohexyl (meth)acrylate, and (meth)acrylate are preferable in terms of good transparency and hardly impairing heat resistance. Benzyl acrylate, 4-hydroxybutyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, butyl (meth)acrylate, isobutyl (meth)acrylate Esters, N-cyclohexyl maleimide, N-benzyl maleimide, N-phenyl maleimide.
關於該等其他聚合性單體之使用量,於全部聚合性單體成分中較佳為95質量%以下,更佳為85質量%以下。 Regarding the usage amount of these other polymerizable monomers, it is preferably 95% by mass or less, and more preferably 85% by mass or less in all polymerizable monomer components.
作為鹼可溶性樹脂(C1)之具體例,例如可列舉:(甲基)丙烯酸、與(甲基)丙烯酸甲酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸環己酯、環己基順丁烯二醯亞 胺等不含羥基之聚合性單體、與(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸4-羥基丁酯等含羥基之聚合性單體的共聚物;(甲基)丙烯酸、與(甲基)丙烯酸甲酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、甲基丙烯酸2-羥基乙酯等(甲基)丙烯酸酯之共聚物;(甲基)丙烯酸與苯乙烯之共聚物;(甲基)丙烯酸與苯乙烯與α-甲基苯乙烯之共聚物;(甲基)丙烯酸與環己基順丁烯二醯亞胺之共聚物等。鹼可溶性樹脂(C1)中,就可獲得顏料分散性優異之阻劑組成物之方面而言,較佳為使用(甲基)丙烯酸苄酯之鹼可溶性樹脂。 As a specific example of the alkali-soluble resin (C1), for example, (meth)acrylic acid, and methyl (meth)acrylate, benzyl (meth)acrylate, butyl (meth)acrylate, (meth) Isobutyl acrylate, cyclohexyl (meth)acrylate, cyclohexyl maleic acid Amines and other non-hydroxyl polymerizable monomers, and hydroxyl-containing polymerizable monomers such as 2-hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, etc. Copolymer of (meth)acrylic acid, and methyl (meth)acrylate, benzyl (meth)acrylate, butyl (meth)acrylate, isobutyl (meth)acrylate, 2-hydroxy methacrylate Copolymers of (meth)acrylates such as ethyl ester; copolymers of (meth)acrylic acid and styrene; copolymers of (meth)acrylic acid, styrene and α-methylstyrene; (meth)acrylic acid and Copolymer of cyclohexyl maleimide, etc. Among the alkali-soluble resins (C1), it is preferable to use an alkali-soluble resin of benzyl (meth)acrylate in terms of obtaining a resist composition having excellent pigment dispersibility.
上述鹼可溶性樹脂(C1)之酸值較佳為10~500mgKOH/g之範圍,更佳為30~350mgKOH/g之範圍,進一步較佳為40~300mgKOH/g之範圍。又,上述鹼可溶性樹脂(C1)之利用GPC所測得之聚苯乙烯換算之重量平均分子量(Mw)較佳為2,000~100,000之範圍,更佳為3,000~80,000之範圍,進一步較佳為4,000~50,000之範圍。 The acid value of the alkali-soluble resin (C1) is preferably in the range of 10 to 500 mgKOH/g, more preferably in the range of 30 to 350 mgKOH/g, and still more preferably in the range of 40 to 300 mgKOH/g. In addition, the weight average molecular weight (Mw) of the alkali-soluble resin (C1) measured by GPC in terms of polystyrene is preferably in the range of 2,000 to 100,000, more preferably in the range of 3,000 to 80,000, and still more preferably 4,000 ~50,000 range.
本發明中,亦可使用如下鹼可溶性樹脂(C1-1),該鹼可溶性樹脂(C1-1)係使含環氧基之不飽和化合物加成於將具有羧基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得之含羧基鹼可溶性樹脂的羧基而成。 In the present invention, the following alkali-soluble resin (C1-1) can also be used. The alkali-soluble resin (C1-1) is made by adding an epoxy group-containing unsaturated compound to polymerize (meth)acrylic acid with a carboxyl group. It is made from the carboxyl group of the carboxyl group-containing alkali-soluble resin obtained by polymerization as an essential component.
作為上述含環氧基之不飽和化合物,例如可列舉:(甲基)丙烯酸環氧丙酯、烯丙基環氧丙基醚、丙烯酸環氧丙基-α-乙酯、丁烯醯基環氧丙基醚、(異)丁烯酸環氧丙基醚、N-(3,5-二甲基-4-環氧丙 基)苄基丙烯醯胺、(甲基)丙烯酸4-羥基丁酯環氧丙基醚等。又,就謀求提高耐熱性、提高使用顏料作為上述著色劑(B)時之分散性之方面而言,較佳為含脂環式環氧基之不飽和化合物。 As the above-mentioned epoxy group-containing unsaturated compound, for example, glycidyl (meth)acrylate, allyl glycidyl ether, glycidyl-α-ethyl acrylate, butenyl ring Oxypropyl ether, (iso)butenoic acid glycidyl ether, N-(3,5-dimethyl-4-epoxypropyl) Benzyl acrylamide, 4-hydroxybutyl (meth)acrylate glycidyl ether, etc. Furthermore, in terms of improving heat resistance and improving the dispersibility when using a pigment as the colorant (B), an unsaturated compound containing an alicyclic epoxy group is preferred.
作為上述含有脂環式環氧基之不飽和化合物所具有之脂環式環氧基,例如可列舉:2,3-環氧基環戊基、3,4-環氧基環己基、7,8-環氧基[三環[5.2.1.0]十-2-基]等。又,作為乙烯性不飽和基,較佳為(甲基)丙烯醯基。含有脂環式環氧基之不飽和化合物可僅使用1種,亦可併用2種以上。 Examples of the alicyclic epoxy group possessed by the above-mentioned alicyclic epoxy group-containing unsaturated compound include: 2,3-epoxycyclopentyl, 3,4-epoxycyclohexyl, 7, 8-Epoxy [tricyclo[5.2.1.0]dec-2-yl] and so on. Moreover, as an ethylenic unsaturated group, a (meth)acryloyl group is preferable. The unsaturated compound containing an alicyclic epoxy group may use only 1 type, and may use 2 or more types together.
使上述含有環氧基之不飽和化合物加成於上述含有羧基之鹼可溶性樹脂之羧基部分時,可使用公知之方法。例如使含羧基之鹼可溶性樹脂與含環氧基之不飽和化合物於三乙胺、苄基甲基胺等三級胺;十二烷基三甲基氯化胺、四甲基氯化銨、四乙基氯化銨、四丁基氯化銨、苄基三乙基氯化銨等四級銨鹽;吡啶、三苯基膦等觸媒之存在下,且於有機溶劑中,以反應溫度50~150℃進行數小時~數十小時反應,藉此可使含環氧基之不飽和化合物加成於樹脂之羧基。 When adding the epoxy group-containing unsaturated compound to the carboxyl part of the carboxyl-containing alkali-soluble resin, a known method can be used. For example, make alkali-soluble resins containing carboxyl groups and unsaturated compounds containing epoxy groups in tertiary amines such as triethylamine and benzylmethylamine; dodecyltrimethylammonium chloride, tetramethylammonium chloride, Tetraethylammonium chloride, tetrabutylammonium chloride, benzyltriethylammonium chloride and other quaternary ammonium salts; in the presence of pyridine, triphenylphosphine and other catalysts, and in an organic solvent, the reaction temperature The reaction is carried out at 50~150°C for several hours to tens of hours, whereby the unsaturated compound containing epoxy group can be added to the carboxyl group of the resin.
上述鹼可溶性樹脂(C1-1)之酸值較佳為10~500mgKOH/g之範圍,更佳為30~350mgKOH/g之範圍,進一步較佳為40~300mgKOH/g之範圍。又,鹼可溶性樹脂(C1-1)之利用GPC所測得之聚苯乙烯換算之重量平均分子量較佳為2,000~100,000之範圍,更佳為3,000~80,000之範圍,進一步較佳為4,000~50,000之範圍。 The acid value of the alkali-soluble resin (C1-1) is preferably in the range of 10 to 500 mgKOH/g, more preferably in the range of 30 to 350 mgKOH/g, and still more preferably in the range of 40 to 300 mgKOH/g. In addition, the weight average molecular weight of the alkali-soluble resin (C1-1) measured by GPC in terms of polystyrene is preferably in the range of 2,000 to 100,000, more preferably in the range of 3,000 to 80,000, and still more preferably in the range of 4,000 to 50,000 The scope.
又,上述鹼可溶性樹脂(C1)中,更佳為使用醚二聚物或具有金剛烷基等脂環結構之(甲基)丙烯酸酯作為聚合性單體所得之鹼可 溶性樹脂(C1-2)。 In addition, among the above-mentioned alkali-soluble resins (C1), it is more preferable to use ether dimers or (meth)acrylates having alicyclic structures such as adamantyl groups as polymerizable monomers. Soluble resin (C1-2).
作為上述醚二聚物,例如可列舉:2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二甲酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二乙酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(正丙基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(異丙基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(正丁基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(異丁基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(三級丁基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(三級戊基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(硬脂基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(月桂基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(2-乙基己基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(1-甲氧基乙基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(1-乙氧基乙基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二苄酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二苯基酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二環己酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(三級丁基環己基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(二環戊二烯基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(三環癸基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(異莰基)酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二金剛烷基酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二(2-甲基-2-金剛烷基)酯等。該等中,較佳為2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二甲酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二乙酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二環己酯、2,2'-[氧基雙(亞甲基)]雙-2-丙烯酸二苄酯。 該等醚二聚物可僅使用1種,亦可併用2種以上。 As the ether dimer, for example, 2,2'-[oxybis(methylene)]bis-2-dimethyl acrylate, 2,2'-[oxybis(methylene)] Diethyl bis-2-acrylate, 2,2'-[oxybis(methylene)] bis(n-propyl) bis-2-acrylate, 2,2'-[oxybis(methylene) )]Bis-2-acrylate di(isopropyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylate di(n-butyl) ester, 2,2'-(oxy Bis(methylene)]bis-2-acrylate di(isobutyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylate di(tertiary butyl) ester, 2,2'-[Oxybis(methylene)]bis-2-acrylate di(tertiary amyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylate (Stearyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylate di(lauryl) ester, 2,2'-[oxybis(methylene)]bis -2-Acrylate di(2-ethylhexyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylate bis(1-methoxyethyl) ester, 2,2' -[Oxybis(methylene)]bis-2-acrylic acid bis(1-ethoxyethyl) ester, 2,2'-[oxybis(methylene)]bis-2-acrylic acid dibenzyl Esters, 2,2'-[oxybis(methylene)]bis-2-diphenyl acrylate, 2,2'-[oxybis(methylene)]bis-2-dicyclohexyl acrylate Esters, 2,2'-[oxybis(methylene)]bis-2-acrylate di(tertiary butylcyclohexyl) ester, 2,2'-[oxybis(methylene)]bis- Bis(dicyclopentadienyl) acrylate, 2,2'-[oxybis(methylene)]bis-2-di(tricyclodecyl)acrylate, 2,2'-(oxy Bis(methylene)]bis-2-bis(isobornyl)acrylate, 2,2'-[oxybis(methylene)]bis-2-diadamantyl acrylate, 2,2 '-[Oxybis(methylene)]bis-2-acrylic acid bis(2-methyl-2-adamantyl) ester and the like. Among these, 2,2'-[oxybis(methylene)]bis-2-dimethyl acrylate, 2,2'-[oxybis(methylene)]bis-2- Diethyl acrylate, 2,2'-[oxybis(methylene)]bis-2-dicyclohexyl acrylate, 2,2'-[oxybis(methylene)]bis-2-acrylic acid Dibenzyl ester. These ether dimers may use only 1 type, and may use 2 or more types together.
於使用醚二聚物作為鹼可溶性樹脂(C1-2)之原料之情形時,關於聚合性單體中之醚二聚物之比例,就成為可獲得抑制凝膠化而低分子量之鹼可溶性樹脂,且透明性或耐熱性優異之阻劑組成物之方面而言,較佳為全部聚合性單體之質量之2~60質量%之範圍,更佳為5~55質量%之範圍,進一步較佳為5~50質量%之範圍。 When ether dimer is used as the raw material of alkali-soluble resin (C1-2), the ratio of the ether dimer in the polymerizable monomer becomes an alkali-soluble resin with a low molecular weight while inhibiting gelation. In terms of a resist composition with excellent transparency or heat resistance, it is preferably in the range of 2-60% by mass based on the mass of all polymerizable monomers, more preferably in the range of 5-55% by mass. Preferably, it is in the range of 5-50% by mass.
另一方面,於使用具有金剛烷基等脂環結構之(甲基)丙烯酸酯作為鹼可溶性樹脂(C1-2)之原料之情形時,關於該(甲基)丙烯酸酯之使用比例,就可獲得可提高上述著色劑(B)使用顏料時之顏料分散性,且乏光適應性良好之阻劑組成物之方面而言,較佳為全部聚合性單體之質量之0.5~60質量%之範圍,更佳為1~55質量%之範圍,進一步較佳為5~50質量%之範圍。 On the other hand, when a (meth)acrylate having an alicyclic structure such as adamantyl is used as the raw material of the alkali-soluble resin (C1-2), the ratio of the (meth)acrylate used can be In terms of obtaining a resist composition that can improve the dispersibility of the pigment when the colorant (B) is used and has good adaptability to low light, it is preferably 0.5-60 mass% of the mass of all polymerizable monomers The range is more preferably in the range of 1 to 55% by mass, and still more preferably in the range of 5 to 50% by mass.
作為本發明中所使用之鹼可溶性樹脂(C1)之製造方法,並無特別限制,可採用以往公知之各種方法,尤佳為溶液聚合法。再者,聚合溫度或聚合濃度(聚合濃度=[聚合性單體之總質量/(聚合性單體之總質量+溶劑質量)]×100)係視所使用之聚合性單體之種類或比率、設為目標之鹼可溶性樹脂之分子量而不同。關於聚合溫度,較佳為40~150℃之範圍,聚合溫度更佳為60~130℃之範圍。又,關於聚合濃度,較佳為5~50%之範圍,更佳為10~40%之範圍。 The method for producing the alkali-soluble resin (C1) used in the present invention is not particularly limited, and various conventionally known methods can be used, and the solution polymerization method is particularly preferred. Furthermore, polymerization temperature or polymerization concentration (polymerization concentration = [total mass of polymerizable monomers/(total mass of polymerizable monomers + solvent mass)]×100) depends on the type or ratio of polymerizable monomers used , The molecular weight of the alkali-soluble resin set as the target varies. The polymerization temperature is preferably in the range of 40 to 150°C, and the polymerization temperature is more preferably in the range of 60 to 130°C. In addition, the polymerization concentration is preferably in the range of 5 to 50%, and more preferably in the range of 10 to 40%.
溶液聚合法中所使用之溶劑可為通常之自由基聚合反應中所使用者。具體而言,例如可列舉:四氫呋喃、二烷、乙二醇二甲醚、二乙二醇二甲醚等醚類;丙酮、甲基乙基酮、甲基異丁基酮、環己酮等酮 類;乙酸乙酯、乙酸丁酯、丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等酯類;甲醇、乙醇、異丙醇、正丁醇、乙二醇單甲醚、丙二醇單甲醚等醇類;甲苯、二甲苯、乙基苯等芳香族烴類;氯仿;二甲基亞碸等。該等溶劑可僅使用1種,亦可併用2種以上。 The solvent used in the solution polymerization method can be the one used in ordinary radical polymerization reactions. Specifically, for example, tetrahydrofuran, two Ethers such as alkane, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone; ethyl acetate, butyl acetate, Propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate and other esters; methanol, ethanol, isopropanol, n-butanol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether and other alcohols; toluene, two Aromatic hydrocarbons such as toluene and ethylbenzene; chloroform; dimethyl sulfide etc. These solvents may use only 1 type, and may use 2 or more types together.
使上述聚合性單體進行聚合時,亦可視需要而使用聚合起始劑。作為聚合起始劑,例如可列舉:氫過氧化異丙苯、過氧化氫二異丙基苯、過氧化二-三級丁基、過氧化月桂醯、過氧化苯甲醯、過氧化三級丁基碳酸異丙酯、過氧化三級戊基2-乙基己酸酯、過氧化三級丁基2-乙基己酸酯等有機過氧化物;2,2'-偶氮雙(異丁腈)、1,1'-偶氮雙(環己甲腈)、2,2'-偶氮雙(2,4-二甲基戊腈)、二甲基2,2'-偶氮雙(2-甲基丙酸酯)等偶氮化合物等。該等聚合起始劑可僅使用1種,亦可併用2種以上。該等聚合起始劑之使用量只要視所使用之單體之組合、或反應條件、設為目標之鹼可溶性樹脂(C1)之分子量等而適當設定即可,並無特別限定,就可獲得不會凝膠化而重量平均分子量為數千~數萬之鹼可溶性樹脂之方面而言,相對於全部聚合性單體成分,較佳為0.1~15質量%之範圍,更佳為0.5~10質量%之範圍。
When polymerizing the above-mentioned polymerizable monomer, a polymerization initiator may be used as needed. As the polymerization initiator, for example, cumene hydroperoxide, diisopropylbenzene hydroperoxide, di-tertiary butyl peroxide, laurel peroxide, benzyl peroxide, tertiary peroxide Organic peroxides such as butyl isopropyl carbonate, tertiary pentyl peroxide 2-ethylhexanoate, tertiary butyl peroxide 2-ethylhexanoate; 2,2'-azobis(iso Butyronitrile), 1,1'-azobis (cyclohexamethylene cyanide), 2,2'-azobis (2,4-dimethylvaleronitrile),
又,為了調整分子量,亦可添加鏈轉移劑。作為鏈轉移劑,例如可列舉:正十二硫醇、巰基乙酸、巰基乙酸甲酯等硫醇繫鏈轉移劑;α-甲基苯乙烯二聚物等,較佳為鏈轉移效果高,可減少殘存於反應系統內之聚合性單體,且獲取亦容易之正十二硫醇、巰基乙酸。關於使用鏈轉移劑之情形時之使用量,只要視所使用之單體之組合、或反應條件、設為目標之單體之分子量等而適當設定即可,並無特別限定,就可獲得不會凝 膠化而重量平均分子量為數千~數萬之鹼可溶性樹脂之方面而言,相對於全部單體,較佳為0.1~15質量%之範圍,更佳為0.5~10質量%之範圍。 In addition, in order to adjust the molecular weight, a chain transfer agent may be added. As the chain transfer agent, for example, thiol-based chain transfer agents such as n-dodecanethiol, thioglycolic acid, and methyl thioglycolate; α-methylstyrene dimer, etc., preferably have a high chain transfer effect and can Reduce the polymerizable monomer remaining in the reaction system, and easily obtain n-dodecanethiol and thioglycolic acid. Regarding the amount of use in the case of using a chain transfer agent, as long as it is appropriately set depending on the combination of the monomers used, or the reaction conditions, the molecular weight of the target monomer, etc., it is not particularly limited. Will congeal In terms of gelling alkali-soluble resins with a weight average molecular weight of several thousands to tens of thousands, it is preferably in the range of 0.1 to 15% by mass, and more preferably in the range of 0.5 to 10% by mass relative to all monomers.
上述鹼可溶性樹脂(C2)係使將具有反應性基之(甲基)丙烯酸系聚合性單體設為必需成分而進行聚合所得的不具有酸性基之聚合物、與具有對該反應性基具有反應性之基與酸基之化合物進行反應而獲得。鹼可溶性樹脂(C2)例如可例示以下之鹼可溶性樹脂。 The alkali-soluble resin (C2) is a polymer having no acidic group obtained by polymerizing a (meth)acrylic polymerizable monomer having a reactive group as an essential component, and a polymer having the reactive group It is obtained by reacting a reactive group with an acid group compound. Examples of the alkali-soluble resin (C2) include the following alkali-soluble resins.
‧將如(甲基)丙烯酸2-羥基乙酯之具有羥基之聚合性單體設為必需成分而獲得聚合物後,加成琥珀酸酐、四氫鄰苯二甲酸酐、馬來酸酐等酸酐所得之鹼可溶性樹脂。 ‧The polymerizable monomer with hydroxyl group such as 2-hydroxyethyl (meth)acrylate is used as an essential component to obtain the polymer, and then added with succinic anhydride, tetrahydrophthalic anhydride, maleic anhydride and other acid anhydrides The alkali-soluble resin.
‧將(甲基)丙烯酸環氧丙酯等具有環氧基之聚合性單體設為必需成分而獲得聚合物後,加成N-甲基胺基苯甲酸、N-甲基胺基苯酚等具有胺基與酸基之化合物所得之鹼可溶性樹脂。 ‧Polymerizable monomers with epoxy groups such as glycidyl (meth)acrylate are used as essential components to obtain the polymer, and then N-methylaminobenzoic acid, N-methylaminophenol, etc. are added Alkali-soluble resin obtained from compounds with amine groups and acid groups.
‧將(甲基)丙烯酸2-異氰酸酯基乙酯等具有異氰酸基之聚合性單體設為必需成分而獲得聚合物後,加成2-羥丁酸等具有羥基與酸基之化合物所得之鹼可溶性樹脂。 ‧After obtaining a polymer by using polymerizable monomers with isocyanate groups such as 2-isocyanatoethyl (meth)acrylate as an essential component, add 2-hydroxybutyric acid and other compounds with hydroxyl and acid groups The alkali-soluble resin.
關於上述鹼可溶性樹脂(C2)之重量平均分子量,就可獲得塗膜形成良好且耐熱性優異之塗膜之方面而言,利用GPC所測得之聚苯乙烯換算之重量平均分子量較佳為1,000~200,000之範圍,更佳為2,000~50,000之範圍,進一步較佳為2,000~30,000之範圍。又,亦可視需要,併用上述鹼可溶性樹脂(C1)之製備所使用之聚合性單體而獲得鹼可溶性樹脂(C2)。 Regarding the weight average molecular weight of the alkali-soluble resin (C2), in terms of obtaining a coating film with good coating film formation and excellent heat resistance, the weight average molecular weight measured by GPC in terms of polystyrene is preferably 1,000 The range of ~200,000 is more preferably the range of 2,000 to 50,000, and the range of 2,000 to 30,000 is still more preferable. Furthermore, if necessary, the polymerizable monomer used in the preparation of the alkali-soluble resin (C1) may be used in combination to obtain the alkali-soluble resin (C2).
上述鹼可溶性樹脂(C3)係針對含環氧基之(甲基)丙烯 酸酯、與其他聚合性單體之共聚物,使不飽和單羧酸加成於該共聚物所具有之環氧基之至少一部分,進一步使多羧酸之酸酐與因不飽和單羧酸之加成反應而產生之羥基的至少一部分進行加成反應而獲得。 The above alkali-soluble resin (C3) is for epoxy-containing (meth)propylene The copolymer of acid esters and other polymerizable monomers adds unsaturated monocarboxylic acid to at least part of the epoxy groups of the copolymer, and further makes the anhydride of polycarboxylic acid and unsaturated monocarboxylic acid At least a part of the hydroxyl group generated by the addition reaction is obtained by the addition reaction.
作為上述含環氧基之(甲基)丙烯酸酯,例如可列舉:(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸(3,4-環氧基環己基)甲酯、(甲基)丙烯酸4-羥基丁酯環氧丙基醚等。其中,較佳為(甲基)丙烯酸環氧丙酯。該等含環氧基之(甲基)丙烯酸酯可僅使用1種,亦可併用2種以上。 Examples of the epoxy group-containing (meth)acrylate include glycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, and (meth)acrylic acid (3, 4-epoxycyclohexyl) methyl ester, 4-hydroxybutyl (meth)acrylate glycidyl ether, etc. Among them, glycidyl (meth)acrylate is preferred. These epoxy group-containing (meth)acrylates may be used alone or in combination of two or more.
又,關於作為上述鹼可溶性樹脂(C3)之原料之含環氧基之(甲基)丙烯酸酯以外的其他聚合性單體,若使用具有降莰烯骨架、二環戊二烯骨架等脂環式結構之單體,則可提高本發明之彩色阻劑組成物之硬化物之耐熱性、機械強度,故而較佳。 Also, regarding other polymerizable monomers other than epoxy group-containing (meth)acrylate as the raw material of the alkali-soluble resin (C3), if an alicyclic ring having a norbornene skeleton or a dicyclopentadiene skeleton is used The monomer of the formula structure can improve the heat resistance and mechanical strength of the hardened material of the color resist composition of the present invention, so it is preferred.
又,亦可使用不具有脂環式結構之聚合性單體作為上述含環氧基之(甲基)丙烯酸酯以外之其他聚合性單體。作為此種聚合性單體,例如可列舉:苯乙烯、苯乙烯之α-、o-、m-、p-烷基、硝基、氰基、醯胺、酯衍生物等乙烯基芳香族類;丁二烯、2,3-二甲基丁二烯、異戊二烯、氯丁二烯等二烯類;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸-正丙酯、(甲基)丙烯酸-異丙酯、(甲基)丙烯酸-正丁酯、(甲基)丙烯酸-第二丁酯、(甲基)丙烯酸-三級丁酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸新戊酯、(甲基)丙烯酸異戊酯、(甲基)丙烯酸己酯、(甲基)丙烯 酸-2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸環戊酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸-2-甲基環己酯、(甲基)丙烯酸二環己酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸金剛烷基酯、(甲基)丙烯酸丙炔酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸萘酯、(甲基)丙烯酸蒽酯、(甲基)丙烯酸蒽醌酯、(甲基)丙烯酸向日葵酯、(甲基)丙烯酸水楊酸酯、(甲基)丙烯酸呋喃酯、(甲基)丙烯酸糠酯、(甲基)丙烯酸四氫呋喃酯、(甲基)丙烯酸吡喃基酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸苯乙酯、(甲基)丙烯酸甲苯酯、(甲基)丙烯酸-1,1,1-三氟乙酯、(甲基)丙烯酸全氟乙酯、(甲基)丙烯酸全氟-正丙酯、(甲基)丙烯酸全氟-異丙酯、(甲基)丙烯酸三苯基甲酯、(甲基)丙烯酸異丙苯基酯、(甲基)丙烯酸-3-(N,N-二甲胺基)丙酯、(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸-2-羥基丙酯等(甲基)丙烯酸酯類;(甲基)丙烯酸醯胺、(甲基)丙烯酸N,N-二甲基醯胺、(甲基)丙烯酸N,N-二乙基醯胺、(甲基)丙烯酸N,N-二丙基醯胺、(甲基)丙烯酸-N,N-二-異丙基醯胺、(甲基)丙烯酸蒽基醯胺等(甲基)丙烯酸醯胺;(甲基)丙烯酸醯苯胺、(甲基)丙烯醯腈、丙烯醛、氯乙烯、偏二氯乙烯、氟乙烯、偏二氟乙烯、N-乙烯基吡咯啶酮、乙烯基吡啶、乙酸乙烯酯等乙烯系化合物類;檸康酸二乙酯、馬來酸二乙酯、富馬酸二乙酯、伊康酸二乙酯等不飽和二羧酸二酯類;N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、N-月桂基順丁烯二醯亞胺、N-(4-羥基苯基)順丁烯二醯亞胺等單順丁烯二醯亞胺類;N-(甲基)丙烯醯基鄰苯二甲醯亞胺等。 In addition, polymerizable monomers that do not have an alicyclic structure can also be used as polymerizable monomers other than the epoxy group-containing (meth)acrylate. Examples of such polymerizable monomers include vinyl aromatics such as styrene, α-, o-, m-, p-alkyl, nitro, cyano, amide, and ester derivatives of styrene and styrene. ; Dienes such as butadiene, 2,3-dimethylbutadiene, isoprene, chloroprene; methyl (meth)acrylate, ethyl (meth)acrylate, (meth) Acrylic acid-n-propyl ester, (meth)acrylic acid-isopropyl ester, (meth)acrylic acid-n-butyl ester, (meth)acrylic acid-second butyl ester, (meth)acrylic acid-tertiary butyl ester, (meth)acrylate Base) amyl acrylate, neopentyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate, (meth)propylene 2-ethylhexyl acid, lauryl (meth)acrylate, dodecyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, (meth) 2-methylcyclohexyl acrylate, dicyclohexyl (meth)acrylate, isobornyl (meth)acrylate, adamantyl (meth)acrylate, propynyl (meth)acrylate, (meth)acrylate Base) phenyl acrylate, naphthyl (meth)acrylate, anthracene (meth)acrylate, anthraquinone (meth)acrylate, sunflower (meth)acrylate, salicylate (meth)acrylate, ( Furan (meth)acrylate, furfuryl (meth)acrylate, tetrahydrofuran (meth)acrylate, pyranyl (meth)acrylate, benzyl (meth)acrylate, phenethyl (meth)acrylate, Toluene (meth)acrylate, 1,1,1-trifluoroethyl (meth)acrylate, perfluoroethyl (meth)acrylate, perfluoro-n-propyl (meth)acrylate, (methyl) ) Perfluoro-isopropyl acrylate, triphenylmethyl (meth)acrylate, cumyl (meth)acrylate, -3-(N,N-dimethylamino)acrylate (meth)acrylate (Meth)acrylates such as 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, etc.; (meth)acrylamide, (meth)acrylic acid N, N -Dimethylamide, (meth)acrylic acid N,N-diethylamide, (meth)acrylic acid N,N-dipropylamide, (meth)acrylic acid-N,N-di-iso (Meth)acrylic acid amides such as propyl amide, (meth)acrylic anthryl amide; (meth)acrylic acid aniline, (meth)acrylonitrile, acrolein, vinyl chloride, vinylidene chloride, Vinyl fluoride, vinylidene fluoride, N-vinylpyrrolidone, vinyl pyridine, vinyl acetate and other vinyl compounds; diethyl citraconic acid, diethyl maleate, diethyl fumarate, Unsaturated dicarboxylic acid diesters such as diethyl iconate; N-phenyl maleimide, N-cyclohexyl maleimide, N-lauryl maleimide Monomaleimines such as amines and N-(4-hydroxyphenyl)maleimide; N-(meth)acrylonitrile phthalimide, etc.
上述其他聚合性單體中,就可提高本發明之彩色阻劑組成物之硬化物之耐熱性、機械強度之方面而言,較佳為自苯乙烯、(甲基)丙烯酸苄酯及單順丁烯二醯亞胺類之中使用至少1種。關於苯乙烯、(甲基)丙烯酸苄酯及單順丁烯二醯亞胺類之使用比例,以其他聚合性單體之總量為基準,較佳為1~70莫耳%,更佳為3~50莫耳%。 Among the above-mentioned other polymerizable monomers, in terms of improving the heat resistance and mechanical strength of the cured product of the color resist composition of the present invention, preferably selected from styrene, benzyl (meth)acrylate and monocis At least one of the butenediimines is used. Regarding the use ratio of styrene, benzyl (meth)acrylate and monomaleimines, based on the total amount of other polymerizable monomers, it is preferably 1 to 70 mol%, more preferably 3~50 mole%.
再者,上述含環氧基之(甲基)丙烯酸酯、與上述其他聚合性單體之共聚合反應可使用應用自由基聚合起始劑之溶液聚合法等公知之聚合方法。所使用之溶劑只要為對自由基聚合非活性者,則無特別限定,可使用通常所使用之有機溶劑。 Furthermore, for the copolymerization reaction of the epoxy group-containing (meth)acrylate and the other polymerizable monomer, a known polymerization method such as a solution polymerization method using a radical polymerization initiator can be used. The solvent used is not particularly limited as long as it is inactive for radical polymerization, and commonly used organic solvents can be used.
作為上述含環氧基之(甲基)丙烯酸酯與上述其他聚合性單體之共聚物,較佳為由源自含環氧基之(甲基)丙烯酸酯之重複單位5~90莫耳%、與源自其他自由基聚合性單體之重複單位10~95莫耳%所構成者,更佳為由前者20~80莫耳%、與後者80~20莫耳%所構成者,進一步較佳為由前者30~70莫耳%、與後者70~30莫耳%所構成者。 As a copolymer of the above-mentioned epoxy-containing (meth)acrylate and the above-mentioned other polymerizable monomer, it is preferably composed of a repeating unit derived from epoxy-containing (meth)acrylate of 5 to 90 mol% , It is composed of 10~95 mol% of repeating units derived from other radical polymerizable monomers, and more preferably is composed of 20~80 mol% of the former and 80~20 mol% of the latter. Preferably, it is composed of the former 30~70 mol% and the latter 70~30 mol%.
上述鹼可溶性樹脂(C3)係藉由使上述含環氧基之(甲基)丙烯酸酯與其他聚合性單體之共聚物之環氧基部分、與不飽和單羧酸(聚合性成分)、多羧酸之酸酐(鹼可溶性成分)進行反應而獲得。 The alkali-soluble resin (C3) is obtained by combining the epoxy portion of the copolymer of the epoxy-containing (meth)acrylate and other polymerizable monomers with an unsaturated monocarboxylic acid (polymerizable component), The acid anhydride (alkali-soluble component) of polycarboxylic acid is obtained by reacting.
作為上述不飽和單羧酸,例如可列舉:(甲基)丙烯酸、丁烯酸、鄰乙烯基苯甲酸、間乙烯基苯甲酸、對乙烯基苯甲酸、α-位經鹵烷基、烷氧基、鹵素原子、硝基、或氰基等取代之(甲基)丙烯酸等單羧酸等。該等中,較佳為(甲基)丙烯酸。該等不飽和單羧酸可僅使用1種,亦可併用2種以上。藉由使用該不飽和單羧酸,可對上述鹼可溶性樹脂(A3) 賦予聚合性。 As the above-mentioned unsaturated monocarboxylic acid, for example, (meth)acrylic acid, crotonic acid, o-vinyl benzoic acid, m-vinyl benzoic acid, p-vinyl benzoic acid, α-position via haloalkyl, alkoxy Monocarboxylic acids such as (meth)acrylic acid substituted with groups, halogen atoms, nitro groups, or cyano groups. Among them, (meth)acrylic acid is preferred. These unsaturated monocarboxylic acids may use only 1 type, and may use 2 or more types together. By using the unsaturated monocarboxylic acid, the alkali-soluble resin (A3) Give polymerization.
上述不飽和單羧酸通常較佳為加成於上述共聚物所具有之環氧基之10~100莫耳%,更佳為加成於30~100莫耳%,進一步較佳為加成於50~100莫耳%。 The above-mentioned unsaturated monocarboxylic acid is usually preferably added to 10-100 mol% of the epoxy group of the above copolymer, more preferably added to 30-100 mol%, and further preferably added to 50~100 mole%.
作為上述多羧酸之酸酐,例如可列舉:馬來酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、氯橋酸酐等二羧酸之酸酐;1,2,4-苯三甲酸酐、1,2,4,5-苯四甲酸酐、二苯甲酮四羧酸酐、聯苯四羧酸酐等具有3個以上之羧基之羧酸之無水物等。該等中,較佳為四氫鄰苯二甲酸酐、琥珀酸酐。該等多羧酸之酸酐可僅使用1種,亦可併用2種以上。藉由使用該多羧酸之酸酐,可對上述鹼可溶性樹脂(C3)賦予鹼可溶性。 Examples of the anhydrides of the above-mentioned polycarboxylic acids include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and chloro bridged anhydride. Anhydrides of carboxylic acids; 1,2,4-benzenetricarboxylic acid anhydride, 1,2,4,5-pyromellitic acid anhydride, benzophenonetetracarboxylic acid anhydride, biphenyltetracarboxylic acid anhydride, etc. Carboxylic acid with more than 3 carboxyl groups Anhydrous acid, etc. Among them, tetrahydrophthalic anhydride and succinic anhydride are preferred. The acid anhydrides of these polycarboxylic acids may use only 1 type, and may use 2 or more types together. By using the acid anhydride of the polycarboxylic acid, alkali solubility can be imparted to the alkali-soluble resin (C3).
上述多羧酸之酸酐通常較佳為加成於藉由使不飽和單羧酸加成於上述共聚物所具有之環氧基而產生的羥基之10~100莫耳%,更佳為加成於20~90莫耳%,進一步較佳為加成於30~80莫耳%。 The anhydride of the polycarboxylic acid is usually preferably added to 10-100 mol% of the hydroxyl group generated by the addition of an unsaturated monocarboxylic acid to the epoxy group possessed by the copolymer, more preferably an addition It is in the range of 20-90 mol%, more preferably in the range of 30-80 mol%.
上述鹼可溶性樹脂(C3)之利用凝膠滲透層析法(GPC)所測得之聚苯乙烯換算之重量平均分子量(Mw)較佳為3,000~100,000之範圍,更佳為5,000~50,000之範圍。又,上述鹼可溶性樹脂(C3)之分散度(Mw/Mn)較佳為2.0~5.0之範圍。 The weight average molecular weight (Mw) of the alkali-soluble resin (C3) measured by gel permeation chromatography (GPC) in terms of polystyrene is preferably in the range of 3,000 to 100,000, more preferably in the range of 5,000 to 50,000 . In addition, the dispersion degree (Mw/Mn) of the alkali-soluble resin (C3) is preferably in the range of 2.0 to 5.0.
上述環氧(甲基)丙烯酸酯樹脂(C4)例如可藉由使α,β-不飽和單羧酸或酯部分具有羧基之α,β-不飽和單羧酸酯加成於環氧樹脂,進一步使多元酸酐進行反應而獲得。 The above-mentioned epoxy (meth)acrylate resin (C4) can be added to epoxy resin by adding α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group in the ester portion, for example, It is obtained by further reacting a polybasic acid anhydride.
作為上述環氧樹脂,例如可使用雙酚A型環氧樹脂(作為 市售品,三菱化學股份有限公司製造之「jER828」、「jER1001」、「jER1002」、「jER1004」等)、藉由雙酚A型環氧樹脂之醇性羥基與表氯醇之反應而獲得之環氧樹脂(作為市售品,日本化藥股份有限公司製造之「NER-1302」(環氧當量323,軟化點76℃))、雙酚F型樹脂(作為市售品,三菱化學股份有限公司製造之「jER807」、「EP-4001」、「EP-4002」、「EP-4004」等)、藉由雙酚F型環氧樹脂之醇性羥基與表氯醇之反應而獲得之環氧樹脂(作為市售品,日本化藥股份有限公司製造之「NER-7406」(環氧當量350,軟化點66℃))、雙酚S型環氧樹脂、聯苯環氧丙基醚(作為市售品,三菱化學股份有限公司製造之「YX-4000」)、酚系酚醛清漆型環氧樹脂(作為市售品,日本化藥股份有限公司製造之「EPPN-201」、三菱化學股份有限公司製造之「EP-152」、「EP-154」、陶氏化學日本股份有限公司製造之「DEN-438」)、甲酚酚醛清漆型環氧樹脂(作為市售品,日本化藥股份有限公司製造之「EOCN-102S」、「EOCN-1020」、「EOCN-104S」)、三環氧丙基三聚異氰酸酯(作為市售品,日產化學工業股份有限公司製造之「TEPIC」)、三苯酚甲烷型環氧樹脂(作為市售品,日本化藥股份有限公司製造之「EPPN-501」、「EPN-502」、「EPPN-503」)、茀環氧樹脂(作為市售品,新日鐵化學股份有限公司製造之酚酞基環氧樹脂「ESF-300」)、脂環式環氧樹脂(Daicel化學工業股份有限公司製造之「Celloxide 2021P」、「Celloxide EHPE」)、基於二環戊二烯與苯酚之反應之使酚系樹脂進行環氧丙基化而成之二環戊二烯型環氧樹脂(例如,日本化藥股份有限公司製造之「XD-1000」、DIC股份有限公司製造之「EXA-7200」、日本化藥股份有限公司製造之「NC-3000」、「NC-7300」)、具有茀骨架之環氧樹脂(參 照日本特開平4-355450號公報)等。該等環氧樹脂可僅使用1種,亦可併用2種以上。 As the above epoxy resin, for example, bisphenol A type epoxy resin (as Commercially available products, "jER828", "jER1001", "jER1002", "jER1004", etc. manufactured by Mitsubishi Chemical Co., Ltd.), obtained by the reaction of the alcoholic hydroxyl group of bisphenol A epoxy resin with epichlorohydrin Epoxy resin (as a commercial product, "NER-1302" (epoxy equivalent 323, softening point 76℃) manufactured by Nippon Kayaku Co., Ltd.), bisphenol F resin (as a commercial product, Mitsubishi Chemical "JER807", "EP-4001", "EP-4002", "EP-4004", etc. manufactured by Co., Ltd., obtained by the reaction of the alcoholic hydroxyl group of bisphenol F epoxy resin with epichlorohydrin Epoxy resin (as a commercially available product, "NER-7406" manufactured by Nippon Kayaku Co., Ltd. (epoxy equivalent 350, softening point 66°C)), bisphenol S type epoxy resin, biphenyl glycidyl ether (As a commercial product, "YX-4000" manufactured by Mitsubishi Chemical Co., Ltd.), phenol novolac type epoxy resin (as a commercial product, "EPPN-201" manufactured by Nippon Kayaku Co., Ltd., Mitsubishi Chemical "EP-152" and "EP-154" manufactured by Co., Ltd., "DEN-438" manufactured by Dow Chemical Japan Co., Ltd.), cresol novolac type epoxy resin (as a commercial product, Nippon Kayaku "EOCN-102S", "EOCN-1020", "EOCN-104S") manufactured by Co., Ltd., triglycidyl isocyanate (as a commercial product, "TEPIC" manufactured by Nissan Chemical Industry Co., Ltd.) , Triphenol methane type epoxy resin (as a commercial product, "EPPN-501", "EPN-502", "EPPN-503" manufactured by Nippon Kayaku Co., Ltd.), 茀 epoxy resin (as a commercial product , Phenolphthalein-based epoxy resin "ESF-300" manufactured by Nippon Steel Chemical Co., Ltd.), alicyclic epoxy resin ("Celloxide 2021P" and "Celloxide EHPE" manufactured by Daicel Chemical Industry Co., Ltd.), based on two The reaction of cyclopentadiene and phenol is a dicyclopentadiene epoxy resin obtained by epoxidizing phenolic resin (for example, "XD-1000" manufactured by Nippon Kayaku Co., Ltd., DIC Co., Ltd. "EXA-7200" manufactured by Nippon Kayaku Co., Ltd., "NC-3000" and "NC-7300" manufactured by Nippon Kayaku Co., Ltd.), epoxy resin with a skeleton (see According to Japanese Patent Laid-Open No. 4-355450) etc. These epoxy resins may use only 1 type, and may use 2 or more types together.
作為環氧樹脂之其他例,可列舉共聚合型環氧樹脂。作為共聚合型環氧樹脂,例如可列舉:使(甲基)丙烯酸環氧丙酯、(甲基)丙烯醯基甲基環氧環己烷、乙烯基環氧環己烷等具有環氧基之單體、與(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸、苯乙烯、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸苄酯、α-甲基苯乙烯、單(甲基)丙烯酸甘油酯、具有聚氧伸烷基鏈之(甲基)丙烯酸酯等不具有環氧基之聚合性單體進行共聚合所得之共聚物。 As other examples of epoxy resins, copolymerized epoxy resins can be cited. As a copolymerized epoxy resin, for example, glycidyl (meth)acrylate, (meth)acryloyl methyl cyclohexane, vinyl epoxy cyclohexane, etc. have epoxy groups. The monomers, and methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl (meth)acrylate, (methyl) )Acrylic acid, styrene, phenoxyethyl (meth)acrylate, benzyl (meth)acrylate, α-methylstyrene, glycerol mono(meth)acrylate, which has a polyoxyalkylene chain ( A copolymer obtained by copolymerizing polymerizable monomers without epoxy groups such as meth)acrylate.
作為上述具有聚氧伸烷基鏈之(甲基)丙烯酸酯,例如可列舉:二乙二醇單(甲基)丙烯酸酯、三乙二醇單(甲基)丙烯酸酯、四乙二醇單(甲基)丙烯酸酯等聚乙二醇單(甲基)丙烯酸酯;甲氧基二乙二醇單(甲基)丙烯酸酯、甲氧基三乙二醇單(甲基)丙烯酸酯、甲氧基四乙二醇單(甲基)丙烯酸酯等烷氧基聚乙二醇(甲基)丙烯酸酯等。 Examples of the (meth)acrylate having a polyoxyalkylene chain include diethylene glycol mono(meth)acrylate, triethylene glycol mono(meth)acrylate, and tetraethylene glycol mono(meth)acrylate. (Meth)acrylate and other polyethylene glycol mono(meth)acrylates; methoxydiethylene glycol mono(meth)acrylate, methoxytriethylene glycol mono(meth)acrylate, methacrylate Alkoxy polyethylene glycol (meth)acrylate such as oxytetraethylene glycol mono(meth)acrylate.
上述共聚合型環氧樹脂之分子量較佳為1,000~200,000之範圍。又,關於用作共聚合型環氧樹脂之原料之具有環氧基之單體的使用量,相對於不具有環氧基之單體,較佳為10~70質量%之範圍,更佳為20~50質量%之範圍。 The molecular weight of the aforementioned copolymerized epoxy resin is preferably in the range of 1,000 to 200,000. In addition, the amount of the monomer having epoxy group used as the raw material of the copolymerized epoxy resin is preferably in the range of 10 to 70% by mass relative to the monomer having no epoxy group, and more preferably The range of 20-50% by mass.
作為上述共聚合型環氧樹脂之市售品,例如可列舉:日油股份有限公司製造之「CP-15」、「CP-30」、「CP-50」、「CP-20SA」、「CP-510SA」、「CP-50S」、「CP-50M」、「CP-20MA」等。 Examples of commercially available products of the aforementioned copolymerized epoxy resin include: "CP-15", "CP-30", "CP-50", "CP-20SA", and "CP -510SA", "CP-50S", "CP-50M", "CP-20MA", etc.
關於上述環氧樹脂之分子量,就塗膜形成良好且可防止α,β-不飽和單羧酸之加成反應時之凝膠化之方面而言,以利用GPC所測得之聚苯乙烯換算之重量平均分子量計,較佳為200~200,000之範圍,更佳為300~100,000之範圍。 Regarding the molecular weight of the above epoxy resin, in terms of good film formation and preventing gelation during the addition reaction of α,β-unsaturated monocarboxylic acid, it is calculated as polystyrene measured by GPC The weight average molecular weight is preferably in the range of 200 to 200,000, more preferably in the range of 300 to 100,000.
作為α,β-不飽和單羧酸,例如可列舉:伊康酸、丁烯酸、桂皮酸、丙烯酸、甲基丙烯酸等,較佳為丙烯酸及甲基丙烯酸,就反應性良好之方面而言,更佳為丙烯酸。作為酯部分具有羧基之α,β-不飽和單羧酸酯,可列舉:丙烯酸-2-琥珀醯氧基乙酯、丙烯酸-2-馬來醯氧基乙酯、丙烯酸-2-鄰苯二甲醯氧基乙酯、丙烯酸-2-六氫鄰苯二甲醯氧基乙酯、甲基丙烯酸-2-琥珀醯氧基乙酯、甲基丙烯酸-2-馬來醯氧基乙酯、甲基丙烯酸-2-鄰苯二甲醯氧基乙酯、甲基丙烯酸-2-六氫鄰苯二甲醯氧基乙酯、丁烯酸-2-琥珀醯氧基乙酯等,較佳為丙烯酸-2-馬來醯氧基乙酯及丙烯酸-2-鄰苯二甲醯氧基乙酯,更佳為丙烯酸-2-馬來醯氧基乙酯。該等α,β-不飽和單羧酸及α,β-不飽和單羧酸酯可僅使用1種,亦可併用2種以上。 As the α,β-unsaturated monocarboxylic acid, for example, itaconic acid, crotonic acid, cinnamic acid, acrylic acid, methacrylic acid, etc., are preferably acrylic acid and methacrylic acid, in terms of good reactivity , More preferably acrylic. Examples of α,β-unsaturated monocarboxylic acid esters having a carboxyl group in the ester portion include: 2-succinoxyethyl acrylate, 2-maleoxyethyl acrylate, and 2-phthalic acrylate Methoxyethyl, 2-hexahydrophthalate oxyethyl acrylate, 2-succinooxyethyl methacrylate, 2-maleoxyethyl methacrylate, 2-phthaloxyethyl methacrylate, 2-hexahydrophthaloxyethyl methacrylate, 2-succinooxyethyl methacrylate, etc., preferably They are 2-maleoxyethyl acrylate and 2-phthaloxyethyl acrylate, and more preferably 2-maleoxyethyl acrylate. These α,β-unsaturated monocarboxylic acids and α,β-unsaturated monocarboxylic acid esters may be used alone or in combination of two or more kinds.
α,β-不飽和單羧酸或其酯、與環氧樹脂之加成反應可使用公知之方法,例如可列舉:於酯化觸媒存在下,以50~150℃之溫度進行反應之方法。作為酯化觸媒,可使用三乙胺、三甲胺、二甲苄胺、二乙苄胺等三級胺;四甲基氯化銨、四乙基氯化銨、十二烷基三甲基氯化胺等四級銨鹽等。 The addition reaction of α,β-unsaturated monocarboxylic acid or its ester and epoxy resin can use known methods, for example, a method of reacting at a temperature of 50 to 150°C in the presence of an esterification catalyst . As esterification catalysts, tertiary amines such as triethylamine, trimethylamine, dimethylbenzylamine, and diethylbenzylamine can be used; tetramethylammonium chloride, tetraethylammonium chloride, dodecyltrimethyl Quaternary ammonium salts such as amine chloride, etc.
關於α,β-不飽和單羧酸或其酯之使用量,相對於成為原料之環氧樹脂之環氧基1當量,較佳為0.5~1.2當量之範圍,更佳為0.7~ 1.1當量之範圍。 Regarding the amount of α,β-unsaturated monocarboxylic acid or its ester used, it is preferably in the range of 0.5 to 1.2 equivalents, and more preferably 0.7 to 1 equivalent of epoxy group used as the raw material. 1.1 The range of equivalents.
作為進一步加成於加成有α,β-不飽和羧酸或其酯之環氧樹脂之多元酸酐,例如可列舉:馬來酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、1,2,4,5-苯四甲酸酐、1,2,4-苯三甲酸酐、二苯甲酮四羧酸二酐、甲基六氫鄰苯二甲酸酐、內亞甲基四氫鄰苯二甲酸酐、氯橋酸酐、甲基四氫鄰苯二甲酸酐、聯苯四羧酸二酐等。該等中,較佳為馬來酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、1,2,4,5-苯四甲酸酐、1,2,4-苯三甲酸酐、聯苯四羧酸二酐,更佳為四氫鄰苯二甲酸酐及聯苯四羧酸二酐。該等多元酸酐可僅使用1種,亦可併用2種以上。 Examples of polybasic acid anhydrides that are further added to epoxy resins to which α, β-unsaturated carboxylic acids or their esters are added include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, and tetrahydro Phthalic anhydride, hexahydrophthalic anhydride, 1,2,4,5-pyromellitic anhydride, 1,2,4- trimellitic anhydride, benzophenonetetracarboxylic dianhydride, methylhexa Hydrogen phthalic anhydride, internal methylene tetrahydro phthalic anhydride, chloro bridged anhydride, methyl tetrahydro phthalic anhydride, biphenyl tetracarboxylic dianhydride, etc. Among them, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, 1,2,4,5-benzenetetrahydrophthalic anhydride are preferred. Formic anhydride, trimellitic anhydride, biphenyltetracarboxylic dianhydride, more preferably tetrahydrophthalic anhydride and biphenyltetracarboxylic dianhydride. These polybasic acid anhydrides may use only 1 type, and may use 2 or more types together.
關於多元酸酐之加成反應,亦可使用公知之方法,可於與α,β-不飽和羧酸或其酯之加成反應相同之條件下連續地進行反應。關於多元酸酐之使用量,就可使鹼顯影性及塗膜形成變良好之方面而言,較佳為如所生成之環氧(甲基)丙烯酸酯樹脂之酸值成為10~150之範圍的量,更佳為如成為20~140之範圍之量。 Regarding the addition reaction of the polybasic acid anhydride, a known method can also be used, and the reaction can be continuously performed under the same conditions as the addition reaction of the α,β-unsaturated carboxylic acid or its ester. Regarding the amount of polybasic acid anhydride used, in terms of improving alkali developability and coating film formation, it is preferable that the acid value of the produced epoxy (meth)acrylate resin is in the range of 10 to 150 The amount is more preferably an amount in the range of 20 to 140.
又,亦可例示日本特開平6-49174號公報記載之含萘樹脂;日本特開2003-89716號公報、日本特開2003-165830號公報、日本特開2005-325331號公報、日本特開2001-354735號公報記載之含茀樹脂;日本特開2005-126674號公報、日本特開2005-55814號公報、日本特開2004-295084號公報等所記載之樹脂作為具有羧基之環氧(甲基)丙烯酸酯樹脂。又,作為市售品,亦可例示Daicel化學工業股份有限公司製造之「ACA-200M」等。 In addition, examples of naphthalene-containing resins described in Japanese Patent Application Laid-Open No. 6-49174; Japanese Patent Application Publication No. 2003-89716, Japanese Patent Application Publication No. 2003-165830, Japanese Patent Application Publication No. 2005-325331, Japanese Patent Application Publication No. 2001 -354735 No. 茀-containing resin; JP 2005-126674 A, JP 2005-55814, JP 2004-295084, etc. are described as epoxy (methyl) ) Acrylic resin. In addition, as a commercially available product, "ACA-200M" manufactured by Daicel Chemical Industry Co., Ltd. can also be exemplified.
上述鹼可溶性樹脂(C)可單獨使用上述鹼可溶性樹脂(C1)~(C4)中之1種,亦可併用2種以上。又,鹼可溶性樹脂(C)藉由與下述之顏料分散劑進行併用,可形成未溶解物不會殘留於基板上之非像素部而與基板之密接性優異之高濃度色像素,故而較佳。具體而言,較佳為將鹼可溶性樹脂(C)之一部分與下述之顏料分散劑一併用於分散處理步驟。於該情形時,鹼可溶性樹脂(C)較佳為相對於顏料,以5~200質量%之範圍使用,更佳為以10~100質量%之範圍使用。 The alkali-soluble resin (C) may be used alone or in combination of two or more of the alkali-soluble resins (C1) to (C4). In addition, by using the alkali-soluble resin (C) in combination with the pigment dispersant described below, it is possible to form high-density color pixels with excellent adhesion to the substrate without undissolved matter remaining in the non-pixel portion on the substrate. good. Specifically, it is preferable to use a part of the alkali-soluble resin (C) together with the following pigment dispersant in the dispersion treatment step. In this case, the alkali-soluble resin (C) is preferably used in the range of 5 to 200% by mass relative to the pigment, and more preferably used in the range of 10 to 100% by mass.
又,亦可使用上述之鹼可溶性樹脂(C1)~(C4)以外之鹼可溶性樹脂作為本發明中所使用之鹼可溶性樹脂(C)。作為此種樹脂,例如可列舉:使用具有酚性羥基作為酸性基之聚合性單體作為必需成分所得之鹼可溶性樹脂、或使用具有磺酸基作為酸性基之聚合性單體作為必需成分所得之鹼可溶性樹脂等。此處,作為上述具有酚性羥基之聚合性單體,例如可列舉:鄰羥基苯乙烯、間羥基苯乙烯、對羥基苯乙烯等。又,亦可列舉:鍵結於該等單體之芳香環之酚性羥基及乙烯基以外之1個以上之氫原子被取代為烷基、烷氧基、鹵素原子、硝基、氰基、醯胺基的化合物等。又,作為具有磺酸基作為酸性基之聚合性單體,例如可列舉:乙烯基磺酸、苯乙烯磺酸、(甲基)丙烯磺酸、2-羥基-3-(甲基)丙烯氧基丙磺酸、(甲基)丙烯酸-2-磺乙酯、或該等之鹽等。 In addition, alkali-soluble resins other than the above-mentioned alkali-soluble resins (C1) to (C4) can also be used as the alkali-soluble resin (C) used in the present invention. As such a resin, for example, an alkali-soluble resin obtained by using a polymerizable monomer having a phenolic hydroxyl group as an acidic group as an essential component, or an alkali-soluble resin obtained by using a polymerizable monomer having a sulfonic acid group as an acidic group as an essential component Alkali-soluble resin, etc. Here, examples of the polymerizable monomer having a phenolic hydroxyl group include ortho-hydroxystyrene, m-hydroxystyrene, and p-hydroxystyrene. In addition, one or more hydrogen atoms other than the phenolic hydroxyl group and vinyl group bonded to the aromatic ring of these monomers are substituted with alkyl groups, alkoxy groups, halogen atoms, nitro groups, cyano groups, Amido-based compounds, etc. Moreover, as a polymerizable monomer having a sulfonic acid group as an acidic group, for example, vinyl sulfonic acid, styrene sulfonic acid, (meth)propylene sulfonic acid, 2-hydroxy-3-(meth)propylene oxide Propanesulfonic acid, 2-sulfoethyl (meth)acrylate, or their salts, etc.
於本發明之阻劑組成物中,關於上述鹼可溶性樹脂(C)之含有比例,就塗膜之外觀或向基板之密接性變良好之方面而言,於全部固形物成分中較佳為0.1~80質量%之範圍,更佳為1~60質量%之範圍。 In the resist composition of the present invention, the content ratio of the alkali-soluble resin (C) is preferably 0.1 in the total solid components in terms of the appearance of the coating film or the adhesion to the substrate. The range of ~80% by mass, more preferably the range of 1-60% by mass.
作為本發明中所使用之聚合性化合物(D),例如可例示: 具有一個以上之乙烯性不飽和鍵之光聚合性化合物。 As the polymerizable compound (D) used in the present invention, for example: A photopolymerizable compound with more than one ethylenically unsaturated bond.
作為具有一個乙烯性不飽和鍵之聚合性化合物(D1),例如可列舉:作為上述(c1)、(c2)、(c3)所列舉之化合物等。其中,較佳為(甲基)丙烯酸酯類。 As the polymerizable compound (D1) having one ethylenically unsaturated bond, for example, the compounds exemplified as (c1), (c2), and (c3) above can be cited. Among them, (meth)acrylates are preferred.
作為具有兩個乙烯性不飽和鍵之聚合性化合物(D2),例如可列舉:1,3-丁二醇二(甲基)丙烯酸酯、1,3-丁二醇(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二丙烯酸酯、雙酚A之雙(丙烯醯氧基乙基)醚、乙氧化雙酚A二(甲基)丙烯酸酯、丙氧化新戊二醇二(甲基)丙烯酸酯、乙氧化新戊二醇二(甲基)丙烯酸酯、3-甲基戊二醇二(甲基)丙烯酸酯等。 As the polymerizable compound (D2) having two ethylenically unsaturated bonds, for example, 1,3-butanediol di(meth)acrylate, 1,3-butanediol (meth)acrylate, 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, Triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, polyethylene glycol diacrylate, bis(acryloxyethyl) ether of bisphenol A, ethoxylate Phenol A di(meth)acrylate, propylene oxide neopentyl glycol di(meth)acrylate, ethoxylated neopentyl glycol di(meth)acrylate, 3-methylpentanediol di(meth) Acrylic etc.
作為具有三個乙烯性不飽和鍵之聚合性化合物(D3),例如可列舉:三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、三(2-羥乙基)三聚異氰酸酯三(甲基)丙烯酸酯、乙氧化三羥甲基丙烷三(甲基)丙烯酸酯、丙氧化三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯與酸酐之反應物、己內酯改質新戊四醇三(甲基)丙烯酸酯、己內酯改質三(2-羥乙基)三聚異氰酸酯三(甲基)丙烯酸酯、己內酯改質新戊四醇三(甲基)丙烯酸酯與酸酐之反應物、己內酯改質二新戊四醇五(甲基)丙烯酸酯與酸酐之反應物等。 As the polymerizable compound (D3) having three ethylenically unsaturated bonds, for example, trimethylolpropane tri(meth)acrylate, neopentaerythritol tri(meth)acrylate, tris(2- Hydroxyethyl) trimeric isocyanate tri(meth)acrylate, ethoxylated trimethylolpropane tri(meth)acrylate, propoxylated trimethylolpropane tri(meth)acrylate, neopentylerythritol three (Meth) acrylate and acid anhydride reactant, caprolactone modified neopentyl erythritol tri(meth)acrylate, caprolactone modified tris(2-hydroxyethyl) trimeric isocyanate tri(methyl) Acrylate and caprolactone are modified reaction products of neopentyl erythritol tri(meth)acrylate and acid anhydride, and caprolactone is modified reaction products of dineopentaerythritol penta(meth)acrylate and acid anhydride.
作為具有四個乙烯性不飽和鍵之聚合性化合物(D4),例如可列舉:新戊四醇四(甲基)丙烯酸酯、三新戊四醇四(甲基)丙烯酸酯、 己內酯改質三新戊四醇四(甲基)丙烯酸酯等。 As the polymerizable compound (D4) having four ethylenically unsaturated bonds, for example, neopentaerythritol tetra(meth)acrylate, trineopentaerythritol tetra(meth)acrylate, Caprolactone is used to modify trineopentaerythritol tetra(meth)acrylate.
作為具有五個以上之乙烯性不飽和鍵之聚合性化合物(D5),例如可列舉:二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、三新戊四醇五(甲基)丙烯酸酯、三新戊四醇六(甲基)丙烯酸酯、三新戊四醇七(甲基)丙烯酸酯、三新戊四醇八(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯與酸酐之反應物;三新戊四醇七(甲基)丙烯酸酯與酸酐之反應物;己內酯改質三羥甲基丙烷三(甲基)丙烯酸酯、己內酯改質新戊四醇四(甲基)丙烯酸酯、己內酯改質二新戊四醇五(甲基)丙烯酸酯、己內酯改質二新戊四醇六(甲基)丙烯酸酯、己內酯改質三新戊四醇五(甲基)丙烯酸酯、己內酯改質三新戊四醇六(甲基)丙烯酸酯、己內酯改質三新戊四醇七(甲基)丙烯酸酯、己內酯改質三新戊四醇八(甲基)丙烯酸酯、己內酯改質三新戊四醇七(甲基)丙烯酸酯與酸酐之反應物等。 As the polymerizable compound (D5) having five or more ethylenically unsaturated bonds, for example, dineopentaerythritol penta(meth)acrylate, dineopentaerythritol hexa(meth)acrylate, three Neopentaerythritol penta(meth)acrylate, trineopentaerythritol hexa(meth)acrylate, trineopentaerythritol hepta(meth)acrylate, trineopentaerythritol octa(meth)acrylate , The reactant of pentaerythritol penta(meth)acrylate and acid anhydride; The reactant of pentaerythritol hepta(meth)acrylate and acid anhydride; Caprolactone is modified to trimethylolpropane tri(formaldehyde) Base) acrylate, caprolactone modified neopentyl erythritol tetra (meth) acrylate, caprolactone modified dineopentaerythritol penta (meth) acrylate, caprolactone modified dineopentaerythritol Hex(meth)acrylate, caprolactone modified trineopentaerythritol penta(meth)acrylate, caprolactone modified trineopentaerythritol hexa(meth)acrylate, caprolactone modified three One of neopentyl erythritol hepta (meth) acrylate, caprolactone modified trineopentaerythritol octa (meth) acrylate, caprolactone modified trineopentaerythritol hepta (meth) acrylate and acid anhydride Reactants etc.
又,亦可例示光硬化性樹脂作為本發明中所使用之聚合性化合物(D)。 In addition, a photocurable resin can also be exemplified as the polymerizable compound (D) used in the present invention.
上述光硬化性樹脂例如可列舉:(甲基)丙烯酸胺酯(urethane (meth)acrylate)樹脂、不飽和聚酯樹脂、環氧(甲基)丙烯酸酯樹脂、(甲基)丙烯酸聚酯樹脂、(甲基)丙烯酸丙烯酯樹脂、含順丁烯二醯亞胺基樹脂等。 Examples of the above-mentioned photocurable resin include urethane (meth)acrylate resin, unsaturated polyester resin, epoxy (meth)acrylate resin, (meth)acrylic polyester resin, (Meth)acrylate resin, maleimide group-containing resin, etc.
上述(甲基)丙烯酸胺酯樹脂例如可列舉:使脂肪族聚異氰酸酯化合物或芳香族聚異氰酸酯化合物與含羥基之(甲基)丙烯酸酯化合物進行反應所得之具有胺酯鍵與(甲基)丙烯醯基之樹脂等。 The above-mentioned (meth)acrylate amine ester resin includes, for example, an aliphatic polyisocyanate compound or an aromatic polyisocyanate compound and a hydroxyl group-containing (meth)acrylate compound having an amine ester bond and (meth)propylene. The resin of the base, etc.
作為上述脂肪族聚異氰酸酯化合物,例如可列舉:四亞甲基二異氰酸酯、五亞甲基二異氰酸酯、六亞甲基二異氰酸酯、七亞甲基二異氰酸酯、八亞甲基二異氰酸酯、十亞甲基二異氰酸酯、2-甲基-1,5-戊二異氰酸酯、3-甲基-1,5-戊二異氰酸酯、十二亞甲基二異氰酸酯、2-甲基五亞甲基二異氰酸酯、2,2,4-三甲基六亞甲基二異氰酸酯、2,4,4-三甲基六亞甲基二異氰酸酯、異佛酮二異氰酸酯、降烷二異氰酸酯、氫化二苯基甲烷二異氰酸酯、氫化甲苯二異氰酸酯、氫化苯二甲基二異氰酸酯、氫化四甲基苯二甲基二異氰酸酯、環己基二異氰酸酯等,又,作為芳香族聚異氰酸酯化合物,可列舉:甲苯二異氰酸酯、4,4'-二苯基甲烷二異氰酸酯、苯二甲基二異氰酸酯、1,5-萘二異氰酸酯、聯甲苯胺二異氰酸酯、對伸苯基二異氰酸酯等。 As said aliphatic polyisocyanate compound, for example, tetramethylene diisocyanate, pentamethylene diisocyanate, hexamethylene diisocyanate, heptamethylene diisocyanate, octamethylene diisocyanate, decamethylene diisocyanate Diisocyanate, 2-methyl-1,5-pentamethylene diisocyanate, 3-methyl-1,5-pentamethylene diisocyanate, dodecamethylene diisocyanate, 2-methyl pentamethylene diisocyanate, 2 , 2,4-trimethylhexamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, isophorone diisocyanate, drop Alkyl diisocyanate, hydrogenated diphenylmethane diisocyanate, hydrogenated toluene diisocyanate, hydrogenated xylylene diisocyanate, hydrogenated tetramethylxylylene diisocyanate, cyclohexyl diisocyanate, etc., and as an aromatic polyisocyanate compound Examples include toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, xylylene diisocyanate, 1,5-naphthalene diisocyanate, toluidine diisocyanate, paraphenylene diisocyanate, and the like.
作為上述含羥基之(甲基)丙烯酸酯化合物,例如可列舉:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸4-羥基丁酯、1,5-戊二醇單(甲基)丙烯酸酯、1,6-己二醇單(甲基)丙烯酸酯、新戊二醇單(甲基)丙烯酸酯、羥基新戊酸新戊二醇單(甲基)丙烯酸酯等二元醇之單(甲基)丙烯酸酯;三羥甲基丙烷二(甲基)丙烯酸酯、乙氧化三羥甲基丙烷(甲基)丙烯酸酯、丙氧化三羥甲基丙烷二(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、三聚異氰酸雙(2-(甲基)丙烯醯氧基乙基)羥乙基酯等三元醇之單或二(甲基)丙烯酸酯、或者該等之醇性羥基之一部分經ε-己內酯改質之含羥基之單及二(甲基)丙烯酸酯;新戊四醇三(甲基)丙烯酸酯、二-三羥甲基丙烷三(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯等具有1 官能之羥基與3官能以上之(甲基)丙烯醯基之化合物、或者、該化合物進一步經ε-己內酯改質之含羥基之多官能(甲基)丙烯酸酯;二丙二醇單(甲基)丙烯酸酯、二乙二醇單(甲基)丙烯酸酯、聚丙二醇單(甲基)丙烯酸酯、聚乙二醇單(甲基)丙烯酸酯等具有氧伸烷基鏈之(甲基)丙烯酸酯化合物;聚乙二醇-聚丙二醇單(甲基)丙烯酸酯、聚氧丁烯-聚氧丙烯單(甲基)丙烯酸酯等具有嵌段結構之氧伸烷基鏈之(甲基)丙烯酸酯化合物;聚(乙二醇-1,4-丁二醇)單(甲基)丙烯酸酯、聚(丙二醇-1,4-丁二醇)單(甲基)丙烯酸酯等具有無規結構之氧伸烷基鏈之(甲基)丙烯酸酯化合物等。 Examples of the hydroxyl group-containing (meth)acrylate compounds include: 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, 1,5-pentanediol mono(meth)acrylate, 1,6-hexanediol mono(meth)acrylate, neopentyl glycol mono(meth) Mono(meth)acrylate of dihydric alcohols such as acrylate, hydroxypivalate neopentyl glycol mono(meth)acrylate; trimethylolpropane di(meth)acrylate, ethoxylated trimethylol Propane (meth)acrylate, propylene oxide trimethylolpropane di(meth)acrylate, glycerol di(meth)acrylate, trimeric isocyanate bis(2-(meth)acryloyloxyethyl) Mono- or di(meth)acrylates of triols such as hydroxyethyl ester, or mono- and di(meth)acrylic acids containing hydroxyl groups in which part of these alcoholic hydroxyl groups has been modified by ε-caprolactone Esters; neopentyl erythritol tri (meth) acrylate, di-trimethylolpropane tri (meth) acrylate, dineopentaerythritol penta (meth) acrylate, etc. have 1 A compound of a functional hydroxyl group and a (meth)acrylic acid group with three or more functions, or a hydroxyl-containing polyfunctional (meth)acrylate in which the compound is further modified by ε-caprolactone; dipropylene glycol mono(methyl) )Acrylate, diethylene glycol mono(meth)acrylate, polypropylene glycol mono(meth)acrylate, polyethylene glycol mono(meth)acrylate, etc. (meth)acrylic acid with oxyalkylene chain Ester compound; polyethylene glycol-polypropylene glycol mono(meth)acrylate, polyoxybutylene-polyoxypropylene mono(meth)acrylate, etc. (meth)acrylic acid with block structure of oxyalkylene chain Ester compounds; poly(ethylene glycol-1,4-butanediol) mono(meth)acrylate, poly(propylene glycol-1,4-butanediol) mono(meth)acrylate, etc. have random structures (Meth)acrylate compound of oxyalkylene chain, etc.
上述脂肪族聚異氰酸酯化合物或芳香族聚異氰酸酯化合物與含羥基之(甲基)丙烯酸酯化合物之反應例如可於胺酯化觸媒之存在下藉由常法而進行。關於此處可使用之胺酯化觸媒,具體而言,可列舉:吡啶、吡咯、三乙胺、二乙胺、二丁胺等胺類;三苯基膦、三乙基膦等膦類;二丁基二月桂酸錫、辛基三月桂酸錫、辛基二乙酸錫、二丁基二乙酸錫、辛酸錫等有機錫化合物;辛酸鋅等有機金屬化合物。 The reaction of the aliphatic polyisocyanate compound or aromatic polyisocyanate compound and the hydroxyl group-containing (meth)acrylate compound can be carried out by a common method in the presence of an amination catalyst, for example. Regarding the amine esterification catalyst that can be used here, specifically, amines such as pyridine, pyrrole, triethylamine, diethylamine, and dibutylamine; phosphines such as triphenylphosphine and triethylphosphine ; Dibutyl tin dilaurate, octyl tin trilaurate, octyl tin diacetate, dibutyl tin diacetate, tin octoate and other organotin compounds; zinc octoate and other organometallic compounds.
該等(甲基)丙烯酸胺酯樹脂中,就硬化塗膜之透明性優異,對活性能量線之感度良好且硬化性優異之方面而言,尤佳為使脂肪族聚異氰酸酯化合物與含羥基之(甲基)丙烯酸酯化合物進行反應所得者。 Among these urethane (meth)acrylate resins, in terms of excellent transparency of the cured coating film, good sensitivity to active energy rays, and excellent curability, it is particularly preferable to combine an aliphatic polyisocyanate compound with a hydroxyl group-containing (Meth)acrylic acid ester compound reacted.
繼而,不飽和聚酯樹脂例如可列舉:α,β-不飽和二元酸或其酸酐、該二元酸或其酸酐以外之二元酸及、藉由二醇類之縮聚所得之硬化性樹脂等。作為α,β-不飽和二元酸或其酸酐,例如可列舉:馬來酸、馬來酸酐、富馬酸、伊康酸、檸康酸、氯馬來酸、及該等之酯等。 Then, the unsaturated polyester resin includes, for example, α, β-unsaturated dibasic acid or its anhydride, dibasic acid other than the dibasic acid or its anhydride, and curable resin obtained by polycondensation of diols Wait. Examples of α,β-unsaturated dibasic acid or its anhydride include maleic acid, maleic anhydride, fumaric acid, itaconic acid, citraconic acid, chloromaleic acid, and esters of these.
作為α,β-不飽和二元酸或其酸酐以外之二元酸或其酸酐,例如可列舉:芳香族飽和二元酸、脂肪族二元酸、脂環族飽和二元酸及該等之酸酐等。作為芳香族飽和二元酸或其酸酐,例如可列舉:鄰苯二甲酸、鄰苯二甲酸酐、異鄰苯二甲酸、對酞酸、硝基鄰苯二甲酸、四氫鄰苯二甲酸酐、內亞甲基四氫鄰苯二甲酸酐、鹵化鄰苯二甲酸酐及該等之酯等。作為脂肪族二元酸、脂環族飽和二元酸及該等之酸酐,例如可列舉:草酸、丙二酸、琥珀酸、己二酸、癸二酸、壬二酸、戊二酸、六氫鄰苯二甲酸酐及該等之酯等。作為二醇類,可列舉:乙二醇、丙二醇、二乙二醇、二丙二醇、1,3-丁二醇、1,4-丁二醇、2-甲基丙-1,3-二醇、新戊二醇、三乙二醇、四乙二醇、1,5-戊二醇、1,6-己二醇、雙酚A、氫化雙酚A、乙二醇碳酸酯、2,2-二-(4-羥基丙氧基二苯基)丙烷等,除此以外,亦可同樣地使用環氧乙烷、環氧丙烷等氧化物。 Examples of dibasic acids or their anhydrides other than α,β-unsaturated dibasic acids or their anhydrides include: aromatic saturated dibasic acids, aliphatic dibasic acids, alicyclic saturated dibasic acids, and the like Acid anhydride and so on. Examples of the aromatic saturated dibasic acid or its anhydride include phthalic acid, phthalic anhydride, isophthalic acid, terephthalic acid, nitrophthalic acid, and tetrahydrophthalic anhydride , Endo-methylenetetrahydrophthalic anhydride, halogenated phthalic anhydride and their esters. As the aliphatic dibasic acid, alicyclic saturated dibasic acid and the acid anhydrides thereof, for example, oxalic acid, malonic acid, succinic acid, adipic acid, sebacic acid, azelaic acid, glutaric acid, six Hydrogen phthalic anhydride and these esters, etc. Examples of glycols include ethylene glycol, propylene glycol, diethylene glycol, dipropylene glycol, 1,3-butanediol, 1,4-butanediol, and 2-methylpropane-1,3-diol , Neopentyl glycol, triethylene glycol, tetraethylene glycol, 1,5-pentanediol, 1,6-hexanediol, bisphenol A, hydrogenated bisphenol A, ethylene glycol carbonate, 2,2 -Di-(4-hydroxypropoxydiphenyl)propane, etc., in addition to this, oxides such as ethylene oxide and propylene oxide can also be used in the same manner.
繼而,作為環氧乙烯酯樹脂,例如可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、酚系酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂等使環氧樹脂之環氧基與(甲基)丙烯酸進行反應所得者等。 Then, as the epoxy vinyl ester resin, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, phenol novolak type epoxy resin, cresol novolak type epoxy resin, etc. The epoxy group of the resin reacts with (meth)acrylic acid, etc.
作為含順丁烯二醯亞胺基之樹脂,例如可列舉:使N-羥乙基順丁烯二醯亞胺與異佛酮二異氰酸酯進行胺酯化所得之2官能順丁烯二醯亞胺胺酯化合物、使順丁烯二醯亞胺乙酸與聚1,4-丁二醇進行酯化所得之2官能順丁烯二醯亞胺酯化合物、使順丁烯二醯亞胺己酸與新戊四醇之四環氧乙烷加成物進行酯化所得之4官能順丁烯二醯亞胺酯化合物、使順丁烯二醯亞胺乙酸與多元醇化合物進行酯化所得之多官能順丁烯二醯亞胺酯化合物等。該等活性能量線硬化型樹脂可單獨使用,亦可併用2種以上。
Examples of resins containing maleimide groups include: bifunctional maleimide obtained by amine esterification of N-hydroxyethyl maleimide and isophorone diisocyanate Amino amine ester compound, a bifunctional maleimide compound obtained by esterifying maleiminoacetic acid and
本發明中所使用之聚合性化合物(D)中,就塗膜層之硬度優異之方面而言,尤佳為三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯等3官能以上之多官能(甲基)丙烯酸酯。該等聚合性化合物(D)可單獨使用,亦可併用2種以上。 Among the polymerizable compounds (D) used in the present invention, in terms of excellent hardness of the coating layer, trimethylolpropane tri(meth)acrylate and neopentylerythritol tri(methyl) are particularly preferred. ) Multifunctional (meth)acrylates with three or more functions, such as acrylate, dineopentaerythritol hexa(meth)acrylate, and neopentaerythritol tetra(meth)acrylate. These polymerizable compounds (D) may be used alone or in combination of two or more kinds.
關於聚合性化合物(D)之合計含量,相對於阻劑組成物之固形物成分,較佳為10~50質量%,更佳為15~50質量%。若聚合性化合物(D)之合計含量處於上述範圍內,則有感度、或塗膜層之強度或平滑性、可靠性變良好之傾向。 Regarding the total content of the polymerizable compound (D), it is preferably 10 to 50% by mass, and more preferably 15 to 50% by mass relative to the solid content of the resist composition. If the total content of the polymerizable compound (D) is within the above-mentioned range, the sensitivity, the strength or smoothness of the coating layer, and the reliability tend to become better.
聚合性化合物(D)中,關於聚合性化合物(D5)之含量,相對於阻劑組成物之固形物成分,較佳為1~50質量%,更佳為5~40質量%,尤佳為5~35質量%。若聚合性化合物(D5)之含量處於上述範圍內,則有感度、或塗膜層之強度或平滑性、可靠性變良好之傾向。 In the polymerizable compound (D), the content of the polymerizable compound (D5) relative to the solid content of the resist composition is preferably 1-50% by mass, more preferably 5-40% by mass, and particularly preferably 5~35 mass%. If the content of the polymerizable compound (D5) is within the above-mentioned range, the sensitivity, the strength or smoothness of the coating layer, and the reliability tend to become better.
又,聚合性化合物(D)中,關於聚合性化合物(D5)之含量,相對於聚合性化合物(D1)、(D2)、(D3)、(D4)及(D5)之合計量,較佳為10~95質量%,更佳為20~90質量%。若聚合性化合物(D5)之含量處於上述範圍內,則有感度、或塗膜層之強度或平滑性、可靠性變良好之傾向。 In addition, in the polymerizable compound (D), the content of the polymerizable compound (D5) is preferably relative to the total amount of the polymerizable compounds (D1), (D2), (D3), (D4) and (D5) It is 10 to 95% by mass, more preferably 20 to 90% by mass. If the content of the polymerizable compound (D5) is within the above-mentioned range, the sensitivity, the strength or smoothness of the coating layer, and the reliability tend to become better.
上述阻劑組成物之製造方法如上所述,含有如下步驟:獲得作為本發明之第一發明之無規共聚物(A);及將該無規共聚物(A)、顏料(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合。於本發明之阻劑組成物之製造方法中,就可獲得良好之分散性,可獲得所需之色相之方 面而言,較佳為於使用顏料作為著色劑(B)之情形時,於將上述無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合時,將使用分散劑於有機溶劑中進行分散而製備之顏料分散液用作著色劑(B)。 The method for producing the above-mentioned resist composition is as described above, and includes the following steps: obtaining the random copolymer (A) as the first invention of the present invention; and the random copolymer (A), the pigment (B), and the base The soluble resin (C) and the polymerizable compound (D) are mixed. In the manufacturing method of the resist composition of the present invention, good dispersibility can be obtained, and the desired hue can be obtained. In terms of the above, it is preferable to combine the random copolymer (A), the colorant (B), the alkali-soluble resin (C) and the polymerizable compound (D) when a pigment is used as the colorant (B). When mixing, a pigment dispersion liquid prepared by dispersing in an organic solvent using a dispersant is used as the colorant (B).
作為上述分散劑,例如可列舉:界面活性劑;顏料之中間物或衍生物;聚醯胺系樹脂、聚胺酯系樹脂、聚酯系樹脂、丙烯酸系樹脂等樹脂型分散劑等。該等顏料分散劑中,較佳為樹脂型分散劑,更佳為丙烯酸系樹脂型之分散劑,進一步較佳為含有於主鏈或支鏈具有N,N-二取代胺基及酸性基之丙烯酸系聚合物之樹脂型分散劑。作為此種樹脂型分散劑之市售品,例如可列舉:BYK-Chemie公司製造之「BYK-160」、「BYK-161」、「BYK-2001」;EFKA Chemicals公司製造之「EFKA 46」;Ajinomoto Fine-Techno股份有限公司製造之「Ajisper PB-814」等。該等分散劑可單獨使用,亦可併用2種以上。 Examples of the above-mentioned dispersants include: surfactants; intermediates or derivatives of pigments; resin-type dispersants such as polyamide resins, polyurethane resins, polyester resins, and acrylic resins. Among these pigment dispersants, resin-based dispersants are preferred, acrylic resin-based dispersants are more preferred, and those containing N,N-disubstituted amino groups and acidic groups in the main chain or branch are more preferred. Resin type dispersant for acrylic polymer. Commercial products of this resin-type dispersant include, for example, "BYK-160", "BYK-161", and "BYK-2001" manufactured by BYK-Chemie; "EFKA 46" manufactured by EFKA Chemicals; "Ajisper PB-814" manufactured by Ajinomoto Fine-Techno Co., Ltd. etc. These dispersants may be used alone or in combination of two or more kinds.
作為上述顏料分散液之製備時所使用之有機溶劑,例如可列舉:丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等乙酸酯系溶劑;乙氧基丙酸酯等丙酸酯系溶劑;甲苯、二甲苯、甲氧基苯等芳香族系溶劑;丁基賽路蘇、丙二醇單甲醚、二乙二醇乙醚、二乙二醇二甲醚等醚系溶劑;甲基乙基酮、甲基異丁基酮、環己酮等酮系溶劑;己烷等脂肪族烴系溶劑;N,N-二甲基甲醯胺、γ-丁內醯胺、N-甲基-2-吡咯啶酮等氮化合物系溶劑;γ-丁內酯等內酯系溶劑;胺基甲酸酯等。該等溶劑可單獨使用,亦可併用2種以上。 As the organic solvent used in the preparation of the pigment dispersion, for example, acetate-based solvents such as propylene glycol monomethyl ether acetate and propylene glycol monoethyl ether acetate; and propionate-based solvents such as ethoxy propionate Solvents; aromatic solvents such as toluene, xylene, and methoxybenzene; ether solvents such as butyl siloxol, propylene glycol monomethyl ether, diethylene glycol ethyl ether, and diethylene glycol dimethyl ether; methyl ethyl Ketone solvents such as ketone, methyl isobutyl ketone, cyclohexanone; aliphatic hydrocarbon solvents such as hexane; N,N-dimethylformamide, γ-butyrolactamide, N-methyl-2 -Nitrogen compound solvents such as pyrrolidone; lactone solvents such as γ-butyrolactone; carbamates, etc. These solvents may be used alone or in combination of two or more kinds.
作為上述顏料分散液之製備方法,例如可列舉:經由顏料之 混練分散步驟與微分散步驟之方法、僅進行微分散步驟之方法等。 As a method of preparing the above-mentioned pigment dispersion, for example, the The method of kneading the dispersion step and the micro-dispersing step, the method of performing only the micro-dispersing step, etc.
於上述混練分散步驟中,將顏料、鹼可溶性樹脂(C)及視需要之上述分散劑進行混合而混練。混練所使用之機械例如可使用二輥機、三輥機、球磨機、轉筒篩、分散機、捏合機、雙向捏合機、均質器、攪拌器、單軸或雙軸擠出機等作為混練機,使用該等混練機一面施加強剪切力一面進行分散,藉此可將顏料分散於上述鹼可溶性樹脂(C)中。又,較佳為於將顏料進行上述之混練之前,預先藉由鹽磨法等將粒子尺寸進行微細化。此處,上述鹼可溶性樹脂可使用本發明之阻劑組成物之製造方法中所使用之全部量,亦可使用一部分。 In the above-mentioned kneading and dispersing step, the pigment, the alkali-soluble resin (C), and the above-mentioned dispersant as necessary are mixed and kneaded. The machinery used for kneading can be, for example, a two-roller, a three-roller, a ball mill, a tumbler screen, a disperser, a kneader, a two-way kneader, a homogenizer, a mixer, a single-shaft or twin-shaft extruder, etc. , Using these kneaders to disperse while applying a strong shear force, whereby the pigment can be dispersed in the alkali-soluble resin (C). Furthermore, it is preferable to refine the particle size by a salt milling method or the like before the pigment is kneaded as described above. Here, the above-mentioned alkali-soluble resin may use all the amounts used in the manufacturing method of the resist composition of this invention, and may use a part.
於上述微分散步驟中,使用玻璃、氧化鋯或陶瓷之微粒之分散用介質與分散機,將於含有上述混練分散步驟中所獲得之顏料之組成物中添加有機溶劑而成者、或將顏料、鹼可溶性樹脂(C)溶劑及視需要之上述分散劑進行混合而成者進行混合分散,藉此可將顏料之粒子分散至接近一次粒子之微小狀態。 In the above-mentioned micro-dispersion step, a dispersion medium and a dispersing machine of fine particles of glass, zirconia or ceramic are used, and an organic solvent is added to the composition containing the pigment obtained in the above-mentioned kneading and dispersion step, or the pigment , Alkali-soluble resin (C) solvent and if necessary the above-mentioned dispersant are mixed and dispersed, whereby the pigment particles can be dispersed to a tiny state close to primary particles.
作為上述有機溶劑,例如可列舉:丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等乙酸酯系溶劑;乙氧基丙酸酯等丙酸酯系溶劑;甲苯、二甲苯、甲氧基苯等芳香族系溶劑;丁基賽路蘇、丙二醇單甲醚、二乙二醇乙醚、二乙二醇二甲醚等醚系溶劑;甲基乙基酮、甲基異丁基酮、環己酮等酮系溶劑;己烷等脂肪族烴系溶劑;N,N-二甲基甲醯胺、γ-丁內醯胺、N-甲基-2-吡咯啶酮等氮化合物系溶劑;γ-丁內酯等內酯系溶劑;胺基甲酸酯等。該等溶劑可單獨使用,亦可併用2種以上。 Examples of the above-mentioned organic solvents include: acetate solvents such as propylene glycol monomethyl ether acetate and propylene glycol monoethyl ether acetate; propionate solvents such as ethoxy propionate; toluene, xylene, and methoxy Benzene and other aromatic solvents; butyl siloxol, propylene glycol monomethyl ether, diethylene glycol ethyl ether, diethylene glycol dimethyl ether and other ether solvents; methyl ethyl ketone, methyl isobutyl ketone, Ketone solvents such as cyclohexanone; aliphatic hydrocarbon solvents such as hexane; nitrogen compound solvents such as N,N-dimethylformamide, γ-butyrolactone, and N-methyl-2-pyrrolidone ; Lactone solvents such as γ-butyrolactone; urethanes, etc. These solvents may be used alone or in combination of two or more kinds.
上述顏料之一次粒子之平均粒徑較佳為10~100nm,更佳 為10~60nm。再者,該顏料(B)之平均粒徑係利用動態光散射式之粒度分佈計所測得者,例如,可利用日機裝股份有限公司製造之Nanotrac粒度分佈測量裝置「UPA-EX150」、「UPA-EX250」等進行測量。 The average particle size of the primary particles of the above-mentioned pigments is preferably 10~100nm, more preferably It is 10~60nm. Furthermore, the average particle size of the pigment (B) is measured by a dynamic light scattering particle size distribution meter. For example, the Nanotrac particle size distribution measuring device "UPA-EX150" manufactured by Nikkiso Co., Ltd. can be used. "UPA-EX250" and other measurements.
於上述阻劑組成物之製造方法中,較佳為於將無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合時,以固形物成分換算計分別成為0.0001~10質量份、5~80質量份、0.1~80質量份、5~80質量份之方式進行混合,更佳為分別為0.001~5質量份、5~70質量份、1~60質量份、10~70質量份。 In the manufacturing method of the above-mentioned resist composition, it is preferable to use a solid substance when mixing the random copolymer (A), the colorant (B), the alkali-soluble resin (C) and the polymerizable compound (D) The ingredients are converted into 0.0001 to 10 parts by mass, 5 to 80 parts by mass, 0.1 to 80 parts by mass, and 5 to 80 parts by mass, respectively. It is more preferably 0.001 to 5 parts by mass, 5 to 70 parts by mass, 1~60 parts by mass, 10~70 parts by mass.
於上述阻劑組成物之製造方法中,於將無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合時,可使用各種方法。具體而言,例如只要使用振盪機、塗料振盪機、使用攪拌翼之攪拌等方法進行混合即可,亦可於混合時視需要添加有機溶劑。有機溶劑例如可使用在上述顏料分散液之調整時可使用之有機溶劑。關於有機溶劑之使用量,例如相對於塗膜層形成成分100質量份,通常為100~1000質量份。 In the manufacturing method of the above-mentioned resist composition, various methods can be used when mixing the random copolymer (A), the colorant (B), the alkali-soluble resin (C), and the polymerizable compound (D). Specifically, for example, it is sufficient to use a shaker, a paint shaker, or a stirring method using a stirring blade for mixing, and an organic solvent may be added as necessary during mixing. The organic solvent can be, for example, an organic solvent that can be used in the adjustment of the above-mentioned pigment dispersion. Regarding the usage amount of the organic solvent, for example, it is usually 100 to 1000 parts by mass relative to 100 parts by mass of the coating film layer forming components.
如下所述,上述阻劑組成物之製造方法中所獲得之阻劑組成物為了照射紫外線等活性能量線而硬化,而通常摻合聚合起始劑。聚合起始劑可於本發明之阻劑組成物之製造方法中,於將無規共聚物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合時進行混合,亦可混合至將(A)、(B)、(C)及(D)進行混合而得之阻劑組成物中。 As described below, the resist composition obtained in the above-mentioned resist composition manufacturing method is usually blended with a polymerization initiator in order to be cured by irradiating active energy rays such as ultraviolet rays. The polymerization initiator can be used in the production method of the resist composition of the present invention when mixing the random copolymer (A), the colorant (B), the alkali-soluble resin (C) and the polymerizable compound (D) It can be mixed, and it can also be mixed in the resist composition obtained by mixing (A), (B), (C), and (D).
作為上述聚合起始劑,例如可列舉:二苯甲酮、苯乙酮、安息香、安息香乙醚、安息香異丁基醚、聯苯醯縮二甲醇、偶氮雙異丁腈、1 -羥基環己基苯基酮、2-羥基-2-甲基-1-苯基-1-酮、1-(4'-異丙基苯基)-2-羥基-2-甲基丙-1-酮、1-(4'-十二烷基苯基)-2-羥基-2-甲基丙-1-酮、3,3',4,4'-四(過氧化三級丁基羰基)二苯甲酮、4,4"-二乙基間苯二醯苯酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、安息香異丙基醚、噻噸酮、2-氯噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、2-甲基-1[4-(甲硫基)苯基]-2-嗎啉基丙-1-酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁酮-1、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基-戊基氧化膦、雙(2,4,6,-三甲基苯甲醯基)-苯基氧化膦、2,4,6-三甲基苯甲醯基二苯基氧化膦等,該等可單獨使用,亦可併用2種以上。該等中,就相對難以受到上述著色劑(B)之影響,表現出高硬化性之方面而言,較佳為2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁酮-1。 As the polymerization initiator, for example, benzophenone, acetophenone, benzoin, benzoin ethyl ether, benzoin isobutyl ether, biphenyl dimethyl acetal, azobisisobutyronitrile, 1 -Hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-phenyl-1-one, 1-(4'-isopropylphenyl)-2-hydroxy-2-methylpropan-1 -Ketone, 1-(4'-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 3,3',4,4'-tetra(tertiary butyl peroxide) ) Benzophenone, 4,4"-diethyl isophthalophenone, 2,2-dimethoxy-1,2-diphenylethane-1-one, benzoin isopropyl ether, Thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, 2-methyl-1[4-(methylthio)phenyl]-2-morpholine Propan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1, bis(2,6-dimethoxybenzyl) )-2,4,4-trimethyl-pentylphosphine oxide, bis(2,4,6,-trimethylbenzyl)-phenylphosphine oxide, 2,4,6-trimethylbenzene Formyl diphenyl phosphine oxide, etc., can be used alone or in combination of two or more. Among these, it is relatively hard to be affected by the colorant (B) and exhibits high curability. Preferably, it is 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1.
關於上述聚合起始劑之摻合量,相對於著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)之合計100質量份,較佳為0.01~15質量份之範圍,更佳為0.3~7質量份之範圍。 Regarding the blending amount of the polymerization initiator, it is preferably in the range of 0.01 to 15 parts by mass relative to 100 parts by mass of the total of the colorant (B), alkali-soluble resin (C) and polymerizable compound (D), and more It is preferably in the range of 0.3 to 7 parts by mass.
又,於本發明之製造方法中所獲得之阻劑組成物中,亦可視需要添加胺化合物或磷化合物等光敏劑而促進光聚合。 In addition, in the resist composition obtained in the production method of the present invention, a photosensitizer such as an amine compound or a phosphorous compound may be added as needed to promote photopolymerization.
進一步,本發明之製造方法中所獲得之阻劑組成物可視用途、特性等目的,於無損本發明之效果之範圍內摻合有機溶劑、聚合抑制劑、抗靜電劑、消泡劑、黏度調整劑、耐光穩定劑、耐熱穩定劑、抗氧化劑等添加劑。 Furthermore, the resist composition obtained in the manufacturing method of the present invention may be blended with organic solvents, polymerization inhibitors, antistatic agents, defoamers, and viscosity adjustments within a range that does not impair the effects of the present invention, depending on the purpose, characteristics, etc. Additives such as agents, light stabilizers, heat stabilizers, antioxidants, etc.
作為上述有機溶劑,例如可列舉:於上述顏料分散液之製備 方法中可使用之有機溶劑等。關於有機溶劑之使用量,係視用途或設為目標之膜厚或黏度而不同,但較佳為相對於上述鹼可溶性樹脂(C)及聚合性化合物(D)之合計,以質量基準計為0.5~6倍量之範圍。 Examples of the above-mentioned organic solvent include: preparation of the above-mentioned pigment dispersion Organic solvents that can be used in the method, etc. Regarding the amount of organic solvent used, it depends on the application or the target film thickness or viscosity, but it is preferably calculated on a mass basis relative to the total of the alkali-soluble resin (C) and polymerizable compound (D) The range of 0.5~6 times the amount.
作為上述聚合抑制劑,例如可列舉:對苯二酚、對甲氧基苯酚、二-三級丁基-對甲酚、鄰苯三酚、三級丁基鄰苯二酚、苯醌、4,4'-硫代雙(3-甲基-6-三級丁基苯酚)、2,2'-亞甲基雙(4-甲基-6-三級丁基苯酚)、N-亞硝基苯基羥胺第一鈰鹽等。 Examples of the above-mentioned polymerization inhibitor include hydroquinone, p-methoxyphenol, di-tertiary butyl-p-cresol, pyrogallol, tertiary butylcatechol, benzoquinone, 4 ,4'-thiobis(3-methyl-6-tertiary butylphenol), 2,2'-methylene bis(4-methyl-6-tertiary butylphenol), N-nitroso The first cerium salt of phenylhydroxylamine and so on.
作為上述抗靜電劑,例如可列舉:聚氧乙烯烷基醚、聚氧乙烯烷基苯酚、聚氧乙烯烷基胺、聚氧乙烯烷基醯胺、聚乙二醇脂肪酸酯、山梨醇酐脂肪酸酯、聚氧乙烯山梨醇酐脂肪酸酯、脂肪酸甘油酯、烷基聚伸乙基亞胺等非離子系抗靜電劑、烷基胺鹽、烷基四級銨鹽、烷基咪唑啉衍生物等陽離子系抗靜電劑等。 Examples of the antistatic agent include: polyoxyethylene alkyl ether, polyoxyethylene alkyl phenol, polyoxyethylene alkyl amine, polyoxyethylene alkyl amide, polyethylene glycol fatty acid ester, and sorbitol anhydride Nonionic antistatic agents such as fatty acid esters, polyoxyethylene sorbitan fatty acid esters, fatty acid glycerides, alkyl polyethylene imines, alkyl amine salts, alkyl quaternary ammonium salts, alkyl imidazolines Cationic antistatic agents such as derivatives.
作為上述消泡劑,例如可列舉:聚矽氧系消泡劑、或氟系消泡劑、非離子系界面活性劑、聚醚、高級醇、聚合物系界面活性劑等。 Examples of the above-mentioned defoaming agent include silicone-based defoaming agents, or fluorine-based defoaming agents, nonionic surfactants, polyethers, higher alcohols, polymer-based surfactants, and the like.
作為上述黏度調整劑,例如可列舉:藉由調整為鹼性而可增黏之丙烯酸系聚合物或合成橡膠乳膠、藉由分子締合而可增黏之胺酯樹脂、羥乙基纖維素、羧甲基纖維素、甲基纖維素、聚乙烯醇、氫化蓖麻油、醯胺蠟、氧化聚乙烯、金屬石鹼、二亞苄基山梨糖醇等。 As the aforementioned viscosity modifier, for example, acrylic polymer or synthetic rubber latex that can be thickened by adjusting to alkali, urethane resin that can be thickened by molecular association, hydroxyethyl cellulose, Carboxymethyl cellulose, methyl cellulose, polyvinyl alcohol, hydrogenated castor oil, amide wax, oxidized polyethylene, metal alkaloids, dibenzylidene sorbitol, etc.
作為上述耐光穩定劑,例如可列舉:受阻胺系化合物、磷系化合物、丙烯酸氰酯系化合物等。 Examples of the light resistance stabilizer include hindered amine compounds, phosphorus compounds, cyanoacrylate compounds, and the like.
作為上述耐熱穩定劑,例如可列舉:1,3,5-三甲基-2,4,6-三(3,5-二-三級丁基-4-羥基苄基)苯、1,1,3-三(2-甲基-4-羥基 -5-5-三級丁基苯基)丁烷、N,N'-六亞甲基雙(3,5-二-三級丁基-4-羥基肉桂酸醯胺)、4,4'-雙(2,6-二-三級丁基苯酚)、2,2'-亞甲基雙(4-乙基-6-三級丁基苯酚)、季戊四醇基-四[3-(3,5-二-三級丁基-4-羥基苯基)丙酸酯]等受阻酚類;N,N'-雙(β-萘基)-對苯二胺、N-N'-二苯基-對苯二胺、聚(2,2,4-三甲基-1,2-二氫喹啉)等芳香族胺類;硫代二丙酸二月桂酯等硫化合物;三(2,4-二-三級丁基苯基)亞磷酸酯等磷化合物等。 As said heat-resistant stabilizer, for example, 1,3,5-trimethyl-2,4,6-tris(3,5-di-tertiarybutyl-4-hydroxybenzyl)benzene, 1,1 ,3-Tris(2-methyl-4-hydroxy -5-5-tertiary butyl phenyl) butane, N,N'-hexamethylene bis(3,5-di-tertiary butyl-4-hydroxycinnamic acid amide), 4,4' -Bis(2,6-di-tertiary butylphenol), 2,2'-methylene bis(4-ethyl-6-tertiary butylphenol), pentaerythritol-tetra[3-(3, 5-di-tertiary butyl-4-hydroxyphenyl) propionate] and other hindered phenols; N,N'-bis(β-naphthyl)-p-phenylenediamine, N-N'-diphenyl -Aromatic amines such as p-phenylenediamine and poly(2,2,4-trimethyl-1,2-dihydroquinoline); sulfur compounds such as dilauryl thiodipropionate; tris(2,4 -Phosphorus compounds such as di-tertiary butyl phenyl) phosphite.
作為上述抗氧化劑,例如可列舉:受阻酚系抗氧化劑、受阻胺系抗氧化劑、有機硫系抗氧化劑、磷酸酯系抗氧化劑等。 Examples of the antioxidants include hindered phenol antioxidants, hindered amine antioxidants, organic sulfur antioxidants, and phosphoric ester antioxidants.
本發明可提供一種濾色器。該濾色器例如可藉由如下濾色器之製造方法而獲得,該製造方法包括:使聚合性單體(a1)與聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)的共存下進行活性自由基聚合,藉此獲得含氟聚合物(A)之步驟,該聚合性單體(a1)具有直接鍵結有氟原子之碳原子數為1~6的氟化烷基與聚合性不飽和基,該聚合性單體(a2)具有橋聯環烴之骨架與聚合性不飽和基;及將該含氟聚合物(A)、著色劑(B)、鹼可溶性樹脂(C)及聚合性化合物(D)進行混合而獲得阻劑組成物之步驟;將該阻劑組成物之塗膜層形成於基板上之步驟。獲得含氟聚合物(A)之步驟係相當於本發明之無規共聚物之製造方法之步驟。 The present invention can provide a color filter. The color filter can be obtained by, for example, the following color filter manufacturing method, the manufacturing method including: polymerizable monomer (a1) and polymerizable monomer (a2) in the polymerizable monomer (a1) and polymerizable The step of carrying out living radical polymerization under the coexistence of the monomer (a2) to obtain a fluoropolymer (A), the polymerizable monomer (a1) having 1 to 6 carbon atoms directly bonded to fluorine atoms The fluorinated alkyl group and the polymerizable unsaturated group, the polymerizable monomer (a2) has the backbone of the bridged cyclic hydrocarbon and the polymerizable unsaturated group; and the fluoropolymer (A) and the colorant (B) , The step of mixing the alkali-soluble resin (C) and the polymerizable compound (D) to obtain the resist composition; the step of forming the coating layer of the resist composition on the substrate. The step of obtaining the fluoropolymer (A) corresponds to the step of the method for producing the random copolymer of the present invention.
上述濾色器例如可利用包含以下步驟之製造方法進行製造。 The above-mentioned color filter can be manufactured by a manufacturing method including the following steps, for example.
(1)利用本發明之無規共聚物之製造方法獲得無規共聚物(A)之步驟。 (1) The step of obtaining a random copolymer (A) using the method for producing a random copolymer of the present invention.
(2)將上述步驟中所獲得之無規共聚物(A)、著色劑(B)、鹼可溶性 樹脂(C)及聚合性化合物(D)進行混合而獲得阻劑組成物之步驟。 (2) Combine the random copolymer (A), colorant (B), alkali-soluble The step of mixing the resin (C) and the polymerizable compound (D) to obtain a resist composition.
(3)將上述阻劑組成物之塗膜層形成於基板上而獲得具有塗膜層之基板之步驟。 (3) A step of forming the coating film layer of the above-mentioned resist composition on a substrate to obtain a substrate having a coating film layer.
(4)使上述塗膜層進行乾燥(預烘烤)而獲得具有乾燥之塗膜層之基板之步驟。 (4) The step of drying (pre-baking) the above-mentioned coating layer to obtain a substrate with a dried coating layer.
(5)於上述乾燥之塗膜層上使用光罩而曝光所需之圖案之步驟。 (5) The step of exposing the desired pattern by using a photomask on the above-mentioned dried coating film layer.
(6)使用鹼性顯影液而進行顯影處理之步驟。 (6) A step of performing development treatment using an alkaline developer.
(7)利用蒸餾水進行洗淨(沖洗)後,進行乾燥之步驟。 (7) After washing (rinsing) with distilled water, a step of drying is performed.
作為上述基板,只要為透明且適度之強度者,則其材質並無特別限定。作為材質,例如可列舉:聚對酞酸乙二酯等聚酯系樹脂;聚丙烯、聚乙烯等聚烯烴系樹脂;聚碳酸酯系樹脂;聚甲基丙烯酸甲酯等丙烯酸系樹脂;聚碸系樹脂等熱可塑性樹脂製片材;環氧樹脂、不飽和聚酯樹脂等熱硬化性樹脂片材;或各種玻璃等。其中,就耐熱性高之方面而言,較佳為玻璃、耐熱性樹脂。對於該等透明基板,為了改良接著性等表面物性,亦可視需要進行電暈放電處理或臭氧處理等表面處理、利用矽烷偶合劑或胺酯系樹脂等各種樹脂等之薄膜形成處理等。透明基板之厚度通常為0.05mm以上,較佳為0.1mm以上,又,通常為10mm以下,較佳為7mm以下之範圍。又,於進行利用各種樹脂之薄膜形成處理之情形時,其膜厚通常為0.01μm以上,較佳為0.05μm以上,又,通常為10μm以下,較佳為5μm以下,進一步較佳為1~2μm之範圍。 The material of the above-mentioned substrate is not particularly limited as long as it is transparent and has moderate strength. Examples of materials include polyester resins such as polyethylene terephthalate; polyolefin resins such as polypropylene and polyethylene; polycarbonate resins; acrylic resins such as polymethyl methacrylate; Thermoplastic resin sheets such as resins; thermosetting resin sheets such as epoxy resins and unsaturated polyester resins; various glasses, etc. Among them, in terms of high heat resistance, glass and heat-resistant resin are preferred. For these transparent substrates, in order to improve surface properties such as adhesiveness, surface treatments such as corona discharge treatment, ozone treatment, and thin film formation treatments using various resins such as silane coupling agents or urethane resins may be performed as needed. The thickness of the transparent substrate is usually 0.05 mm or more, preferably 0.1 mm or more, and usually 10 mm or less, preferably 7 mm or less. In addition, in the case of performing thin film formation treatment using various resins, the film thickness is usually 0.01 μm or more, preferably 0.05 μm or more, and usually 10 μm or less, preferably 5 μm or less, and more preferably 1~ 2μm range.
濾色器通常可藉由於上述基板上設置黑矩陣,進一步形成會形成紅色、綠色、藍色之各像素圖像之阻劑組成物之塗膜而製作。上述黑 矩陣亦可利用遮光金屬薄膜而形成,於本發明之阻劑組成物之製造方法中,可應用使用黑色之著色劑作為著色劑(B)所得之阻劑組成物而形成於透明基板上。 The color filter can usually be manufactured by forming a coating film of a resist composition that forms the image of each pixel of red, green, and blue due to the black matrix provided on the above-mentioned substrate. Above black The matrix can also be formed using a light-shielding metal thin film. In the method of manufacturing the resist composition of the present invention, the resist composition obtained by using a black coloring agent as the colorant (B) can be used to form the resist composition on a transparent substrate.
作為可用以形成上述遮光金屬薄膜之遮光金屬材料,例如可使用金屬鉻、氧化鉻、氮化鉻等鉻化合物、或鎳與鎢之合金等,上述遮光金屬薄膜亦可為將該等遮光金屬材料複數層狀地積層而成者。該等遮光金屬薄膜通常藉由濺鍍法而形成。 As the light-shielding metal material that can be used to form the above-mentioned light-shielding metal film, for example, chromium compounds such as metallic chromium, chromium oxide, chromium nitride, or an alloy of nickel and tungsten can be used. It is composed of multiple layers. These light-shielding metal films are usually formed by sputtering.
對於上述金屬鉻,使用將硝酸鈰銨與過氯酸及/或硝酸混合而成之蝕刻液,對於其他材料,使用對應於材料之蝕刻液進行蝕刻,最後利用專用剝離劑將阻劑組成物進行剝離,藉此可形成黑矩陣。於該情形時,首先藉由蒸鍍或濺鍍法等,於透明基板上形成該等金屬或金屬氧化物之薄膜。繼而,於該薄膜上形成利用本發明之製造方法所得之彩色阻劑組成物之塗膜層。繼而,使用具有條紋、馬賽克、三角等重複圖案之光罩,對塗膜層進行曝光、顯影而形成圖像。其後,可對該塗膜層實施蝕刻處理而形成黑矩陣。 For the above metal chromium, use an etching solution made by mixing cerium ammonium nitrate with perchloric acid and/or nitric acid. For other materials, use an etching solution corresponding to the material for etching, and finally use a special stripper to perform the resist composition Peel off, thereby forming a black matrix. In this case, the thin films of these metals or metal oxides are first formed on the transparent substrate by evaporation or sputtering. Then, a coating film layer of the color resist composition obtained by the manufacturing method of the present invention is formed on the film. Then, using a photomask with repeating patterns such as stripes, mosaics, triangles, etc., the coating layer is exposed and developed to form an image. After that, the coating layer can be etched to form a black matrix.
於設置有黑矩陣之基板上,塗佈含有紅色、綠色、藍色中一種顏色之色材之阻劑組成物,進行乾燥後,於塗膜層之上重合光罩,經由該光罩進行圖像曝光、顯影,且視需要進行熱硬化或光硬化,藉此形成像素圖像而製作著色層。針對紅色、綠色、藍色之三色之阻劑組成物分別進行該操作,藉此可形成濾色器圖像。 On a substrate with a black matrix, apply a resist composition containing a color material of one of red, green, and blue, and after drying, overlay a photomask on the coating layer, and perform the image through the photomask The image is exposed, developed, and thermally or photo-cured as necessary to form a pixel image to produce a colored layer. This operation is performed separately for the three-color resist composition of red, green, and blue, thereby forming a color filter image.
作為將上述阻劑組成物供給至基板之方法,例如可列舉:使用凹版塗佈機、輥式塗佈機、缺角輪塗佈機、刮刀塗佈機、簾幕式塗佈機、 噴塗機、旋轉塗佈機、狹縫式塗佈機、狹縫-旋轉塗佈機、狹縫式模嘴塗佈機、浸漬、網版印刷、噴霧、敷料器、棒式塗佈機等之方法等。 As a method of supplying the above-mentioned resist composition to the substrate, for example, the use of a gravure coater, a roll coater, a chipped wheel coater, a knife coater, a curtain coater, Spraying machine, spin coater, slit coater, slit-spin coater, slit die nozzle coater, dipping, screen printing, spray, applicator, bar coater, etc. Methods etc.
關於塗膜層之厚度,若過厚,則圖案顯影變困難,並且液晶單元化步驟中之間隙調整變困難,另一方面,若過薄,則難以提高顏料濃度,而所需之顏色顯現變得不可能。關於塗膜層之厚度,以乾燥後之膜厚計,通常為0.2~20μm、較佳為0.5~10μm、進一步較佳為0.8~5μm之範圍。 Regarding the thickness of the coating layer, if it is too thick, pattern development becomes difficult, and the gap adjustment in the liquid crystal cell formation step becomes difficult. On the other hand, if it is too thin, it is difficult to increase the pigment concentration, and the desired color appearance becomes It's impossible. Regarding the thickness of the coating film layer, as the film thickness after drying, it is usually in the range of 0.2 to 20 μm, preferably 0.5 to 10 μm, and more preferably 0.8 to 5 μm.
於基板塗佈阻劑組成物而將塗膜層形成於基板上後,於(4)步驟中進行乾燥(預烘烤)。乾燥(預烘烤)例如可藉由利用加熱板、烘箱等,於50~140℃之溫度範圍內進行10~300秒鐘加熱而進行。其中,較佳為於70~130℃之溫度範圍內進行30~180秒鐘加熱,更佳為於80~120℃之溫度範圍內進行30~90秒鐘加熱。又,為了更完全地進行乾燥,亦可於乾燥(預烘烤)前進行真空乾燥。 After coating the resist composition on the substrate and forming the coating film layer on the substrate, it is dried (pre-baked) in step (4). Drying (pre-baking) can be performed by heating for 10 to 300 seconds in a temperature range of 50 to 140° C. using a hot plate, oven, etc., for example. Among them, it is preferable to perform heating in a temperature range of 70 to 130°C for 30 to 180 seconds, and it is more preferable to perform heating in a temperature range of 80 to 120°C for 30 to 90 seconds. Moreover, in order to dry more completely, you may perform vacuum drying before drying (pre-baking).
於乾燥(預烘烤)後,於(5)步驟中使用光罩而曝光為所需之圖案。具體而言,例如於乾燥(預烘烤)之塗膜層上重疊負型之矩陣圖案,經由該光罩圖案進行紫外線或可見光線等活性能量線之照射。此時,亦可視需要,為了防止由阻劑組成物形成之塗膜層之由氧引起之感度降低,而於該塗膜層上形成聚乙烯醇層等氧遮斷層後進行曝光。 After drying (pre-baking), use a photomask in step (5) to expose the desired pattern. Specifically, for example, a negative matrix pattern is superimposed on a dried (pre-baked) coating film layer, and active energy rays such as ultraviolet rays or visible rays are irradiated through the mask pattern. At this time, if necessary, in order to prevent the sensitivity of the coating film layer formed of the resist composition from decreasing due to oxygen, an oxygen blocking layer such as a polyvinyl alcohol layer is formed on the coating film layer and then exposed.
作為上述活性能量線,可列舉:光、電子束、放射線等活性能量線。作為具體之能量源或硬化裝置,例如可列舉:殺菌燈、紫外線用螢光燈、碳弧、氙氣燈、影印用高壓水銀燈、中壓或高壓水銀燈、超高壓水銀燈、無電極燈、金屬鹵化物燈、將自然光等設為光源之紫外線、或利 用掃描式、幕簾式電子束加速器之電子束等。再者,於利用電子束進行硬化之情形時,無需將上述阻劑組成物摻合於上述聚合起始劑。 Examples of the above-mentioned active energy rays include active energy rays such as light, electron beams, and radiation. Specific energy sources or curing devices include, for example, germicidal lamps, ultraviolet fluorescent lamps, carbon arcs, xenon lamps, high-pressure mercury lamps for photocopying, medium or high pressure mercury lamps, ultra-high pressure mercury lamps, electrodeless lamps, and metal halide lamps. Lights, ultraviolet rays that use natural light as the light source, or Use scanning type, curtain type electron beam accelerator, etc. Furthermore, in the case of curing with an electron beam, it is not necessary to blend the above-mentioned resist composition with the above-mentioned polymerization initiator.
上述活性能量線中,尤佳為紫外線。又,若於氮氣等非活性氣體環境下進行照射,則塗膜之表面硬化性提高,故而較佳。又,亦可視需要,將熱設為能量源並進行併用,利用活性能量線進行硬化後,進行熱處理。 Among the above-mentioned active energy rays, ultraviolet rays are particularly preferred. In addition, if irradiated in an inert gas atmosphere such as nitrogen, the surface hardenability of the coating film is improved, which is preferable. In addition, if necessary, heat may be used as an energy source and used in combination, and after curing with active energy rays, heat treatment may be performed.
曝光後係於(6)步驟中進行顯影處理。於上述顯影處理中,使未曝光之未硬化部分溶出至鹼性顯影液中,而僅殘留經光硬化之硬化部分。作為鹼性顯影液,只要為使未硬化部分溶解且不會使成為RGB之各像素部及黑矩陣部之硬化部分溶解者,則可無特別限制地使用。作為具體之鹼性顯影液,例如可列舉:氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉、偏矽酸鈉、氨水、乙基胺、二乙胺、二甲基乙醇胺、氫氧化四甲基銨、氫氧化四乙基銨、膽鹼、吡咯、哌啶、1,8-二氮雜雙環-[5,4,0]-7-十一烯等鹼性化合物之水溶液。該鹼性顯影液之鹼濃度較佳為0.001~10質量%,更佳為0.01~1質量%。又,作為顯影溫度,通常為20℃~30℃,作為顯影時間,較佳為20~90秒鐘之範圍。 After exposure, the development process is carried out in step (6). In the above development process, the unexposed, unhardened part is eluted into the alkaline developing solution, and only the hardened part that has been photohardened remains. The alkaline developer can be used without particular limitation as long as it dissolves the unhardened part and does not dissolve the hardened part of each pixel part of RGB and the black matrix part. As a specific alkaline developer, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, sodium metasilicate, ammonia, ethylamine, diethylamine, dimethylethanolamine can be cited. , Tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo-[5,4,0]-7-undecene and other basic compounds Aqueous solution. The alkali concentration of the alkaline developer is preferably 0.001 to 10% by mass, more preferably 0.01 to 1% by mass. In addition, the development temperature is usually 20°C to 30°C, and the development time is preferably in the range of 20 to 90 seconds.
於顯影處理後,於(7)步驟中利用蒸餾水進行洗淨(沖洗),之後進行乾燥。於進行洗淨、乾燥時,可視需要進行後烘烤處理。後烘烤係用以使硬化完全之顯影後之加熱處理,通常於200~250℃之溫度範圍內進行加熱。後烘烤處理係針對顯影後之層,以成為上述條件之方式使用加熱板或對流烘箱(熱風循環式乾燥機)、高頻加熱機等加熱手段,以連續式或批次式進行。 After the development treatment, in step (7), it is washed (rinsed) with distilled water, and then dried. When washing and drying, post-baking can be carried out as needed. Post-baking is the heat treatment after development to complete the hardening, usually in the temperature range of 200~250℃. The post-baking treatment is performed in a continuous or batch manner using heating means such as a heating plate, a convection oven (hot air circulation type dryer), a high-frequency heater, and the like for the layer after development to meet the above conditions.
使用於以上述方式製作之濾色器之像素上形成有ITO等透明電極之基板作為與其他基板夾持液晶層的基板,並組合背光裝置、偏光板、液晶層,可製成本發明之液晶顯示裝置。 The substrate with transparent electrodes such as ITO formed on the pixels of the color filter fabricated in the above-mentioned manner is used as the substrate for sandwiching the liquid crystal layer with other substrates, and the backlight device, polarizing plate, and liquid crystal layer are combined to form the liquid crystal display of the present invention Device.
藉由將本發明之無規共聚物(A)、著色劑(B)、及熱可塑性樹脂(E)[上述共聚物(A)、鹼可溶性樹脂(C)以外之熱可塑性樹脂]進行混合,可製成塗佈組成物。具體而言,可藉由如下方法獲得上述塗佈組成物,該方法含有:使具有直接鍵結有氟原子之碳原子數為1~6之氟化烷基與聚合性不飽和基的聚合性單體(a1)和具有橋聯環烴之骨架與聚合性不飽和基之聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)之共存下進行活性自由基聚合,藉此獲得無規共聚物(A)之步驟;及將該無規共聚物(A)、著色劑(B)及熱可塑性樹脂(E)進行混合之步驟。 By mixing the random copolymer (A), colorant (B), and thermoplastic resin (E) of the present invention [thermoplastic resin other than the above-mentioned copolymer (A) and alkali-soluble resin (C)], Can be made into coating composition. Specifically, the coating composition described above can be obtained by a method comprising: polymerizing a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group The monomer (a1) and the polymerizable monomer (a2) with the backbone of the bridged cyclic hydrocarbon and the polymerizable unsaturated group carry out active free radicals in the coexistence of the polymerizable monomer (a1) and the polymerizable monomer (a2) A step of polymerization to obtain a random copolymer (A); and a step of mixing the random copolymer (A), colorant (B), and thermoplastic resin (E).
作為上述熱可塑性樹脂(E),例如可列舉:丙烯酸系樹脂、甲基丙烯酸系樹脂、丙烯酸胺酯樹脂、丙烯酸聚矽氧樹脂、丙烯酸三聚氰胺樹脂、丙烯酸改質聚烯烴、丙烯酸改質氟樹脂、芳香族聚酯樹脂、脂肪族聚酯樹脂、聚醯胺樹脂、聚碳酸酯樹脂、乙酸乙烯酯樹脂、乙烯-乙酸乙烯酯樹脂等。熱可塑性樹脂(E)中,就可獲得可得到強度高之塗膜層之塗佈組成物之方面而言,較佳為丙烯酸系樹脂、甲基丙烯酸系樹脂或丙烯酸胺酯樹脂。 As the above-mentioned thermoplastic resin (E), for example, acrylic resin, methacrylic resin, urethane acrylate resin, acrylic polysiloxane resin, acrylic melamine resin, acrylic modified polyolefin, acrylic modified fluororesin, Aromatic polyester resin, aliphatic polyester resin, polyamide resin, polycarbonate resin, vinyl acetate resin, ethylene-vinyl acetate resin, etc. Among the thermoplastic resins (E), acrylic resins, methacrylic resins, or urethane acrylate resins are preferred in terms of obtaining a coating composition capable of obtaining a coating film layer with high strength.
關於本發明之塗佈組成物,例如可列舉如下方法:使上述無規共聚物(A)、著色劑(B)及熱可塑性樹脂(E)溶解於有機溶劑中,藉由振盪機、塗料振盪機、使用攪拌翼之攪拌等方法進行混合。作為此處所使用之有機溶劑,例如可使用在上述顏料分散液之調整時可使用之有機溶 劑。有機溶劑之使用量例如相對於塗膜層形成成分100質量份,通常為100~1000質量份。 Regarding the coating composition of the present invention, for example, the following method can be cited: the random copolymer (A), the colorant (B), and the thermoplastic resin (E) are dissolved in an organic solvent, and the coating composition is shaken by a shaker. Mixing by means of machine, using agitating blades, etc. As the organic solvent used here, for example, the organic solvent that can be used in the adjustment of the above-mentioned pigment dispersion can be used. Agent. The usage amount of the organic solvent is, for example, 100 to 1000 parts by mass relative to 100 parts by mass of the coating film layer forming components.
於上述塗佈組成物中,關於將無規共聚物(A)、著色劑(B)、及熱可塑性樹脂(E)進行混合時之摻合比例,以固形物成分換算計例如分別為0.0001~10質量份、5~80質量份、0.1~80質量份,較佳為例如0.001~5質量份、5~70質量份、1~70質量份。 In the above-mentioned coating composition, the blending ratio when mixing the random copolymer (A), the coloring agent (B), and the thermoplastic resin (E) is, for example, 0.0001 to each in terms of solid content conversion. 10 parts by mass, 5 to 80 parts by mass, 0.1 to 80 parts by mass, preferably 0.001 to 5 parts by mass, 5 to 70 parts by mass, and 1 to 70 parts by mass.
使用上述塗佈組成物可製造附塗膜層之物品。附塗膜層之物品例如可藉由將該塗佈組成物之塗膜層形成於物品上而進行製造。作為上述物品,例如可列舉:屋頂材料(金屬、板岩、混凝土、瓦、水泥、塑膠等)、壁、磁磚、玻璃板、金屬、軸承塊、混凝土、塑膠、水泥、H形鋼、管道管、塗裝鋼板、信號機、擋板、夾層面板、槽等建築相關物品;車體之外飾、窗玻璃、儀錶板、把手、變速桿、輪胎等汽車相關物品:外飾、窗玻璃等航空器相關物品;空調、太陽能電池用正面/背面片材、計算機或行動電話之殼體、電漿顯示器(PDP)或有機EL顯示器等各種顯示器畫面、CD或DVD或藍光光碟、影印機或打印機等辦公自動化設備用橡膠輥、影印機或掃描儀等辦公自動化設備之讀取部之玻璃面等光學記錄媒體等電氣相關物品:CRT、液晶顯示器、電漿顯示器、投影電視等顯示裝置之抗反射過濾器、球面透鏡、非球面透鏡、菲涅耳透鏡、雙凸透鏡等透鏡零件等光學相關物品等。 The above-mentioned coating composition can be used to manufacture an article with a coating film layer. The article with a coating film layer can be manufactured by forming the coating film layer of this coating composition on an article, for example. Examples of the above-mentioned articles include roofing materials (metal, slate, concrete, tiles, cement, plastic, etc.), walls, tiles, glass plates, metals, bearing blocks, concrete, plastics, cement, H-shaped steel, pipes Construction related items such as tubes, painted steel plates, signals, baffles, sandwich panels, grooves, etc.; car body exteriors, window glass, instrument panels, handles, gear levers, tires and other automotive related items: exteriors, window glass, etc. Aircraft-related items; air conditioners, front/back sheets for solar cells, computer or mobile phone casings, plasma displays (PDP) or organic EL displays and other display screens, CD or DVD or Blu-ray discs, photocopiers or printers, etc. Electrical related articles such as optical recording media such as rubber rollers for office automation equipment, the glass surface of the reading section of office automation equipment such as photocopiers or scanners: anti-reflection filtering of display devices such as CRT, liquid crystal display, plasma display, and projection TV Optical-related items such as lens parts such as optical devices, spherical lenses, aspheric lenses, Fresnel lenses, biconvex lenses, etc.
將塗佈組成物之塗膜層形成於物品上之步驟可藉由各種方法進行。具體而言,例如可例示:輥式塗佈、靜電塗佈、棒式塗佈、凹版塗佈、刮刀塗佈、浸漬塗佈、噴塗等方法。 The step of forming the coating film layer of the coating composition on the article can be performed by various methods. Specifically, for example, methods such as roll coating, electrostatic coating, bar coating, gravure coating, knife coating, dip coating, and spray coating can be exemplified.
塗膜層之厚度只要視物品之種類或使用用途而適當選擇即可,通常以乾燥後之厚度計為0.1~100μm。 The thickness of the coating layer can be appropriately selected depending on the type of the article or the purpose of use, and it is usually 0.1-100μm as the thickness after drying.
將塗佈組成物之塗膜層形成於物品上後,藉由各種方法進行乾燥。乾燥方法只要視物品之種類或使用用途而適當選擇即可,例如可例示:藉由放置而自然乾燥之方法;或於40~300℃之環境下強制性地進行乾燥之方法。 After the coating layer of the coating composition is formed on the article, it is dried by various methods. The drying method may be appropriately selected depending on the type of the article or the purpose of use. For example, it can be exemplified: a method of natural drying by leaving it; or a method of forced drying in an environment of 40 to 300°C.
將本發明之無規共聚物(A)、著色劑(B)及聚合性化合物(D)進行混合,藉此可製成塗佈組成物。具體而言,可藉由如下方法獲得上述塗佈組成物,該方法含有:使具有直接鍵結有氟原子之碳原子數為1~6之氟化烷基與聚合性不飽和基的聚合性單體(a1)和具有橋聯環烴之骨架與聚合性不飽和基之聚合性單體(a2)於聚合性單體(a1)與聚合性單體(a2)之共存下進行活性自由基聚合,藉此獲得無規共聚物(A)之步驟;及將該無規共聚物(A)、著色劑(B)及聚合性化合物(D)進行混合之步驟。 The random copolymer (A) of the present invention, the coloring agent (B), and the polymerizable compound (D) are mixed to form a coating composition. Specifically, the coating composition described above can be obtained by a method comprising: polymerizing a fluorinated alkyl group having 1 to 6 carbon atoms directly bonded to a fluorine atom and a polymerizable unsaturated group The monomer (a1) and the polymerizable monomer (a2) with the backbone of the bridged cyclic hydrocarbon and the polymerizable unsaturated group carry out active free radicals in the coexistence of the polymerizable monomer (a1) and the polymerizable monomer (a2) A step of polymerization to obtain a random copolymer (A); and a step of mixing the random copolymer (A), colorant (B), and polymerizable compound (D).
關於上述塗佈組成物,例如可列舉如下方法:使上述無規共聚物(A)、著色劑(B)及聚合性化合物(D)視需要溶解於有機溶劑中,藉由振盪機、塗料振盪機、使用攪拌翼之攪拌等方法進行混合。作為此處所使用之有機溶劑,例如可使用在上述顏料分散液之調整時可使用之有機溶劑。於使用有機溶劑之情形時,其使用量例如相對於塗膜層形成成分100質量份,通常為100~1000質量份。 Regarding the coating composition, for example, the following method can be cited: the random copolymer (A), the colorant (B), and the polymerizable compound (D) are dissolved in an organic solvent as necessary, and the coating is shaken by a shaker. Mixing by means of machine, using agitating blades, etc. As the organic solvent used here, for example, an organic solvent that can be used in the adjustment of the above-mentioned pigment dispersion liquid can be used. In the case of using an organic solvent, the usage amount is, for example, 100 to 1000 parts by mass relative to 100 parts by mass of the coating film layer forming components.
於製造上述塗佈組成物時,關於使上述無規共聚物(A)、著色劑(B)、及聚合性化合物(D)進行混合時之摻合比例,以固形物成分 換算計例如分別為0.0001~10質量份、5~80質量份、0.1~80質量份,較佳為例如分別為0.001~5質量份、5~70質量份、1~70質量份。 When manufacturing the coating composition, the blending ratio when mixing the random copolymer (A), the coloring agent (B), and the polymerizable compound (D) is based on the solid content The conversion amount is, for example, 0.0001 to 10 parts by mass, 5 to 80 parts by mass, and 0.1 to 80 parts by mass, and preferably, for example, 0.001 to 5 parts by mass, 5 to 70 parts by mass, and 1 to 70 parts by mass, respectively.
使用上述塗佈組成物可獲得附塗膜層之物品。具體而言,附塗膜層之物品例如可藉由將該塗佈組成物之塗膜層形成於物品上而進行製造。作為上述物品,例如可例示上述物品。 By using the above coating composition, an article with a coating film layer can be obtained. Specifically, an article with a coating film layer can be manufactured by forming the coating film layer of the coating composition on the article, for example. As said article, the article mentioned above can be illustrated, for example.
將塗佈組成物之塗膜層形成於物品上之步驟可藉由各種方法進行。具體而言,例如可例示:輥式塗佈、靜電塗佈、棒式塗佈、凹版塗佈、刮刀塗佈、浸漬塗佈、噴塗等方法。 The step of forming the coating film layer of the coating composition on the article can be performed by various methods. Specifically, for example, methods such as roll coating, electrostatic coating, bar coating, gravure coating, knife coating, dip coating, and spray coating can be exemplified.
塗膜層之厚度只要視物品之種類或使用用途而適當選擇即可,通常以硬化後之厚度計為0.1~100μm。 The thickness of the coating layer can be appropriately selected depending on the type of the article or the purpose of use, and it is usually 0.1-100μm as the thickness after curing.
上述塗膜層係照射能量線而進行硬化。作為活性能量線,可列舉:如紫外線、電子束、α射線、β射線、γ射線之游離輻射等。作為活性能量線源或硬化裝置,例如可列舉:殺菌燈、紫外線用螢光燈、碳弧、氙氣燈、影印用高壓水銀燈、中壓或高壓水銀燈、超高壓水銀燈、無電極燈、金屬鹵化物燈、將自然光等設為光源之紫外線、或利用掃描式、幕簾式電子束加速器之電子束等。 The above-mentioned coating layer is cured by irradiating energy rays. Examples of active energy rays include ionizing radiation such as ultraviolet rays, electron beams, α rays, β rays, and γ rays. Examples of active energy ray sources or curing devices include: germicidal lamps, ultraviolet fluorescent lamps, carbon arcs, xenon lamps, high-pressure mercury lamps for photocopying, medium or high pressure mercury lamps, ultra-high pressure mercury lamps, electrodeless lamps, and metal halides Lamps, ultraviolet rays using natural light as the light source, or electron beams using scanning or curtain electron beam accelerators.
該等中,尤佳為紫外線,為了避免由氧等引起之硬化抑制,較佳為於氮氣等非活性氣體環境下照射紫外線。又,亦可視需要,將熱設為能量源並進行併用,利用紫外線進行硬化後,進行熱處理。 Among them, ultraviolet light is particularly preferred. In order to avoid curing inhibition caused by oxygen or the like, it is preferred to irradiate ultraviolet rays under an inert gas environment such as nitrogen. Furthermore, if necessary, heat may be used as an energy source and used in combination, and after curing with ultraviolet rays, heat treatment may be performed.
上述能量硬化線之照射量只要為上述塗膜層會硬化之照射量即可,例如為50mJ/cm2~3000mJ/cm2之範圍。 The irradiation amount of the energy hardening rays only needs to be the irradiation amount at which the coating film layer is hardened, for example, in the range of 50 mJ/cm 2 to 3000 mJ/cm 2 .
【實施例】 [Example]
於以下列舉實施例及比較例,對本發明進一步詳細地進行說明。例中,只要沒有特別事先說明,則份、%係質量基準。IR光譜、13C-NMR圖譜及GPC之測量條件係如下所示。 Examples and comparative examples are listed below to describe the present invention in further detail. In the examples, unless otherwise specified, parts and% are based on quality. The measurement conditions of IR spectrum, 13 C-NMR spectrum and GPC are as follows.
[IR光譜測量條件] [IR spectrum measurement conditions]
裝置:日本分光股份有限公司製造「FT/IR-6100」 Device: "FT/IR-6100" manufactured by JASCO Corporation
測量方法:KBr法 Measurement method: KBr method
[13C-NMR圖譜測量條件] [ 13 C-NMR spectrum measurement conditions]
裝置:日本電子股份有限公司製造之「JNM-AL400」 Device: "JNM-AL400" manufactured by JEOL Ltd.
溶劑:氯仿-d6 Solvent: chloroform-d 6
[GPC測量條件] [GPC measurement conditions]
測量裝置:Tosoh股份有限公司製造之「HLC-8220 GPC」、 Measuring device: "HLC-8220 GPC" manufactured by Tosoh Co., Ltd.,
管柱:Tosoh股份有限公司製造之保護管柱「HHR-H」(6.0mmI.D.×4cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm)+Tosoh股份有限公司製造之「TSK-GEL GMHHR-N」(7.8mmI.D.×30cm) Column: Protection column "HHR-H" (6.0mmI.D.×4cm) manufactured by Tosoh Co., Ltd. + "TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) manufactured by Tosoh Co., Ltd. +"TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) made by Tosoh Co., Ltd.+"TSK-GEL GMHHR-N" (7.8mmI.D.×30cm) made by Tosoh Co., Ltd.+Tosoh "TSK-GEL GMHHR-N" manufactured by Co., Ltd. (7.8mmI.D.×30cm)
檢測器:ELSD(Alltech Japan股份有限公司製造之「ELSD2000」) Detector: ELSD ("ELSD2000" manufactured by Alltech Japan Co., Ltd.)
資料處理:Tosoh股份有限公司製造之「GPC-8020模型II資料解析版本4.30」 Data processing: "GPC-8020 Model II Data Analysis Version 4.30" manufactured by Tosoh Co., Ltd.
試樣:利用微過濾器將以樹脂固形物成分換算計1.0質量%之四氫呋喃溶液進行過濾所得者(5μl)。 Sample: A tetrahydrofuran solution (5 μl) of 1.0% by mass in terms of resin solid content is filtered with a microfilter.
標準試樣:依據上述「GPC-8020模型II資料解析版本4.30」之測量指南,使用分子量已知之下述之單分散聚苯乙烯。 Standard sample: According to the measurement guide of "GPC-8020 Model II Data Analysis Version 4.30", the following monodisperse polystyrene with known molecular weight is used.
(單分散聚苯乙烯) (Monodisperse polystyrene)
Tosoh股份有限公司製造之「A-500」 "A-500" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-1000」 "A-1000" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-2500」 "A-2500" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「A-5000」 "A-5000" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-1」 "F-1" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-2」 "F-2" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-4」 "F-4" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-10」 "F-10" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-20」 "F-20" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-40」 "F-40" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-80」 "F-80" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-128」 "F-128" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-288」 "F-288" manufactured by Tosoh Co., Ltd.
Tosoh股份有限公司製造之「F-550」 "F-550" manufactured by Tosoh Co., Ltd.
參考製造例1(顏料分散液之製造) Reference manufacturing example 1 (manufacturing of pigment dispersion)
將作為紅色顏料之C.I.Pigment Red254(BASF公司製造之「IRGAPHOR RED BT-CF」)10g放入至聚乙烯瓶中,添加PGMEA 44g、DISPERBYK LPN21116(BYK-Chemie股份有限公司製造)12g、及0.3-0.4mmΦ之Sepul Beads,利用塗料調節器(東洋精機股份有限公司製造)進行2小時分散,而獲得紅色之顏料分散液(1)。 Put 10g of C.I.Pigment Red254 ("IRGAPHOR RED BT-CF" manufactured by BASF Corporation) as a red pigment into a polyethylene bottle, and add PGMEA 44g, DISPERBYK 12 g of LPN21116 (manufactured by BYK-Chemie Co., Ltd.) and Sepul Beads of 0.3-0.4 mmΦ were dispersed using a paint conditioner (manufactured by Toyo Seiki Co., Ltd.) for 2 hours to obtain a red pigment dispersion (1).
參考製造例2(同上) Reference manufacturing example 2 (same as above)
將作為黃色顏料之C.I.Pigment Yellow129(Ciba Specialty Chemicals公司製造之「Irgazin Yellow L0800」)10g放入至聚乙烯瓶中,添加PGMEA 67g、DISPERBYK 161(BYK-Chemie股份有限公司製造)23g、及0.3-0.4mmΦ之Sepul Beads,利用塗料調節器(東洋精機股份有限公司製造)進行2小時分散,而獲得黃色之顏料分散液(2)。 Put 10 g of CIPigment Yellow129 ("Irgazin Yellow L0800" manufactured by Ciba Specialty Chemicals) as a yellow pigment into a polyethylene bottle, and add 67 g of PGMEA, 23 g of DISPERBYK 161 (manufactured by BYK-Chemie Co., Ltd.), and 0.3- Sepul Beads of 0.4mmΦ were dispersed for 2 hours using a paint conditioner (manufactured by Toyo Seiki Co., Ltd.) to obtain a yellow pigment dispersion (2).
參考製造例3(同上) Reference manufacturing example 3 (same as above)
使用C.I.Pigment Yellow138(BASF公司製造之「Paliotol Yellow K0961HD」)作為黃色顏料,除此以外,以與參考製造例2相同之方式獲得黃色之顏料分散液(3)。 Except using C.I. Pigment Yellow 138 ("Paliotol Yellow K0961HD" manufactured by BASF Corporation) as the yellow pigment, a yellow pigment dispersion liquid (3) was obtained in the same manner as in Reference Manufacturing Example 2.
參考製造例4(同上) Reference manufacturing example 4 (same as above)
使用C.I.Pigment Yellow139(BASF公司製造之「Paliotol Yellow D1819」)作為黃色顏料,除此以外,以與參考製造例2相同之方式獲得黃色之顏料分散液(4)。 Except for using C.I. Pigment Yellow139 ("Paliotol Yellow D1819" manufactured by BASF Corporation) as the yellow pigment, a yellow pigment dispersion (4) was obtained in the same manner as in Reference Manufacturing Example 2.
參考製造例5(同上) Reference manufacturing example 5 (same as above)
使用C.I.Pigment Yellow150(Lanxess公司製造之「E4GNGT」)作為黃色顏料,除此以外,以與參考製造例2相同之方式獲得黃色之顏料分散液(5)。 Except using C.I. Pigment Yellow 150 ("E4GNGT" manufactured by Lanxess Corporation) as the yellow pigment, a yellow pigment dispersion (5) was obtained in the same manner as in Reference Manufacturing Example 2.
參考製造例6(同上) Reference manufacturing example 6 (same as above)
使用C.I.Pigment Yellow185(BASF公司製造之「Paliotol Yellow D1155」) 作為黃色顏料,除此以外,以與參考製造例2相同之方式獲得黃色之顏料分散液(6)。 Use C.I.Pigment Yellow185 ("Paliotol Yellow D1155" made by BASF) As the yellow pigment, except for this, a yellow pigment dispersion liquid (6) was obtained in the same manner as in Reference Production Example 2.
參考製造例7(鹼可溶性樹脂之合成) Reference Manufacturing Example 7 (Synthesis of alkali-soluble resin)
向裝備有攪拌機、溫度計、冷卻管及氮氣導入管之四口燒瓶中添加丙二醇單甲醚乙酸酯100g,於氮氣流下一面進行攪拌一面將內溫升溫至110℃。繼而,將由甲基丙烯酸苄酯80g與甲基丙烯酸20g所構成之混合液、與由丙二醇單甲醚乙酸酯46g、2-乙基己酸過氧化三級戊酯1.5g及過氧苯甲酸三級戊酯0.15g所構成之混合液分別歷時4小時滴下。滴下結束後,於保持內溫為110℃之狀態下進行8小時聚合反應。反應結束後,利用丙二醇單甲醚乙酸酯進行稀釋,而獲得不揮發分40%之鹼可溶性樹脂之樹脂溶液。該樹脂之重量平均分子量為17,000。 100 g of propylene glycol monomethyl ether acetate was added to a four-necked flask equipped with a stirrer, a thermometer, a cooling tube, and a nitrogen introduction tube, and the internal temperature was raised to 110° C. while stirring under nitrogen flow. Next, a mixed liquid composed of 80 g of benzyl methacrylate and 20 g of methacrylic acid, 46 g of propylene glycol monomethyl ether acetate, 1.5 g of tertiary amyl peroxy 2-ethylhexanoate, and peroxybenzoic acid The mixture composed of 0.15 g of tertiary amyl ester was dropped over 4 hours. After the dripping, the polymerization reaction was carried out for 8 hours while maintaining the internal temperature at 110°C. After the reaction, it is diluted with propylene glycol monomethyl ether acetate to obtain a resin solution of an alkali-soluble resin with a non-volatile content of 40%. The weight average molecular weight of this resin is 17,000.
實施例1(無規共聚物之製造) Example 1 (Manufacturing of Random Copolymer)
向經氮氣置換之燒瓶中添加作為溶劑之甲基乙基酮111g、甲基丙烯酸1-金剛烷基酯47g、及甲基丙烯酸2-(十三氟己基)乙酯25g,於氮氣流下一面進行攪拌一面升溫至60℃。繼而,添加2,2'-聯吡啶5g、氯化亞銅2g、及2-溴異丁酸乙酯3.3g,於氮氣流下以60℃反應23小時。繼而,向所獲得之反應物添加活性氧化鋁30g並進行攪拌。將活性氧化鋁進行過濾後,於減壓下將溶劑蒸餾去除而獲得無規共聚物(1)。利用GPC對無規共聚物(1)之分子量進行測量而獲得之結果為,重量平均分子量(Mw)為4,133,數量平均分子量(Mn)為3,197,且(Mw/Mn)為1.29。又,無規共聚物(1)之氟原子含量為20質量%。分別將無規共聚物(1)之IR光譜之線圖示於圖1,將13C-NMR圖譜之線圖示於圖2,將GPC之線圖示於 圖3。 To a flask replaced with nitrogen, 111 g of methyl ethyl ketone, 47 g of 1-adamantyl methacrylate, and 25 g of 2-(tridecafluorohexyl) ethyl methacrylate were added as solvents, and proceeded under nitrogen flow. The temperature was raised to 60°C while stirring. Then, 5 g of 2,2'-bipyridine, 2 g of cuprous chloride, and 3.3 g of ethyl 2-bromoisobutyrate were added, and the reaction was carried out at 60° C. for 23 hours under a nitrogen stream. Then, 30 g of activated alumina was added to the obtained reactant and stirred. After filtering the activated alumina, the solvent was distilled off under reduced pressure to obtain a random copolymer (1). The results obtained by measuring the molecular weight of the random copolymer (1) by GPC were that the weight average molecular weight (Mw) was 4,133, the number average molecular weight (Mn) was 3,197, and (Mw/Mn) was 1.29. In addition, the fluorine atom content of the random copolymer (1) is 20% by mass. The line diagram of the IR spectrum of the random copolymer (1) is shown in FIG. 1, the line diagram of the 13 C-NMR spectrum is shown in FIG. 2, and the line diagram of GPC is shown in FIG. 3.
製造含有無規共聚物(1)之組成物,依據下述方法評價所獲得之塗膜層之平滑性。將評價結果示於第1表。 A composition containing the random copolymer (1) was produced, and the smoothness of the obtained coating film layer was evaluated according to the following method. The evaluation results are shown in Table 1.
<塗膜層之平滑性之評價方法> <The evaluation method of the smoothness of the coating layer>
將鹼可溶性樹脂(甲基丙烯酸苄酯與丙烯酸之共聚物)3g、二新戊四醇五丙烯酸酯酸與二新戊四醇六丙烯酸酯酸之混合物即ARONIX M-402(東亞合成化學股份有限公司製造)1.2g、無規共聚物(1)以固形物成分換算計0.002g、丙二醇單甲醚乙酸酯(PGMEA)8.1g進行混合而獲得組成物。將該組成物3ml滴下至10cm×10cm之鍍鉻玻璃基板之中央部分,於轉數500rpm、旋轉時間30秒之條件下進行旋轉塗佈後,以110℃進行2分鐘加熱乾燥,而製作具有塗膜層之物品。利用目視觀察塗膜層,依據下述基準而評價塗膜層之平滑性。將評價結果示於第1表。 Combine 3g of alkali-soluble resin (copolymer of benzyl methacrylate and acrylic acid), a mixture of dineopentaerythritol pentaerythritol pentaacrylate acid and dineopentaerythritol hexaacrylate acid, namely ARONIX M-402 (Toya Synthetic Chemical Co., Ltd. Company make) 1.2 g, random copolymer (1) 0.002 g in solid content conversion, and 8.1 g of propylene glycol monomethyl ether acetate (PGMEA) were mixed to obtain a composition. Drop 3ml of the composition onto the central part of a 10cm×10cm chrome-plated glass substrate, spin-coated at 500 rpm and 30 seconds, and then heat and dry at 110°C for 2 minutes to produce a coating film Layer of items. The coating film layer was visually observed, and the smoothness of the coating film layer was evaluated based on the following criteria. The evaluation results are shown in Table 1.
<塗膜層之平滑性之評價基準> <Evaluation criteria for smoothness of coating layer>
○:幾乎未觀察到塗膜不均。 ○: Almost no unevenness in the coating film is observed.
△:觀察到一部分塗膜不均。 △: Partial coating film unevenness is observed.
×:觀察到大量塗膜不均。 ×: A large amount of unevenness in the coating film is observed.
實施例2(同上) Example 2 (same as above)
向經氮氣置換之燒瓶中添加作為溶劑之甲基乙基酮111g、甲基丙烯酸1-金剛烷基酯59g、及甲基丙烯酸2-(十三氟己基)乙酯12g,於氮氣流下一面進行攪拌一面升溫至60℃。繼而,添加2,2'-聯吡啶5g、氯化亞銅2g、及2-溴異丁酸乙酯3.1g,於氮氣流下以60℃進行28小時反應。繼而,向所獲得之反應物添加活性氧化鋁30g並進行攪拌。將活性氧化鋁 進行過濾後,於減壓下將溶劑蒸餾去除而獲得無規共聚物(2)。利用GPC對無規共聚物之分子量進行測量所得之結果為,重量平均分子量(Mw)為4,561,數量平均分子量(Mn)為3,824,且(Mw/Mn)為1.19。又,無規共聚物(2)之氟原子含量為10質量%。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。 Add 111 g of methyl ethyl ketone, 59 g of 1-adamantyl methacrylate, and 12 g of 2-(tridecafluorohexyl) ethyl methacrylate as solvents to a flask replaced with nitrogen, and proceed under nitrogen flow. The temperature was raised to 60°C while stirring. Then, 5 g of 2,2'-bipyridine, 2 g of cuprous chloride, and 3.1 g of ethyl 2-bromoisobutyrate were added, and the reaction was carried out at 60°C for 28 hours under a nitrogen stream. Then, 30 g of activated alumina was added to the obtained reactant and stirred. Activated alumina After filtration, the solvent was distilled off under reduced pressure to obtain a random copolymer (2). As a result of measuring the molecular weight of the random copolymer by GPC, the weight average molecular weight (Mw) was 4,561, the number average molecular weight (Mn) was 3,824, and (Mw/Mn) was 1.19. In addition, the fluorine atom content of the random copolymer (2) is 10% by mass. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1.
實施例3(同上) Example 3 (same as above)
向經氮氣置換之燒瓶中添加作為溶劑之甲基乙基酮111g、甲基丙烯酸雙環戊酯47g、甲基丙烯酸2-(十三氟己基)乙酯25g,於氮氣流下一面進行攪拌一面升溫至60℃。繼而,添加2,2'-聯吡啶5g、氯化亞銅2g、及2-溴異丁酸乙酯3.3g,於氮氣流下以60℃進行20小時反應。繼而,向所獲得之反應物中添加活性氧化鋁30g並進行攪拌。將活性氧化鋁進行過濾後,於減壓下將溶劑蒸餾去除而獲得無規共聚物(3)。利用GPC對無規共聚物(3)之分子量進行測量所得之結果為,重量平均分子量(Mw)為4,219,數量平均分子量(Mn)為3,315,且(Mw/Mn)為1.27。又,無規共聚物(3)之氟原子含量為20質量%。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。 Add 111 g of methyl ethyl ketone, 47 g of dicyclopentyl methacrylate, and 25 g of 2-(tridecafluorohexyl) ethyl methacrylate as solvents to a flask replaced by nitrogen, and the temperature is raised to the temperature while stirring under nitrogen flow. 60°C. Then, 5 g of 2,2'-bipyridine, 2 g of cuprous chloride, and 3.3 g of ethyl 2-bromoisobutyrate were added, and the reaction was carried out at 60°C for 20 hours under a nitrogen stream. Then, 30 g of activated alumina was added to the obtained reactant and stirred. After filtering the activated alumina, the solvent was distilled off under reduced pressure to obtain a random copolymer (3). As a result of measuring the molecular weight of the random copolymer (3) by GPC, the weight average molecular weight (Mw) was 4,219, the number average molecular weight (Mn) was 3,315, and (Mw/Mn) was 1.27. In addition, the fluorine atom content of the random copolymer (3) is 20% by mass. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1.
實施例4(同上) Example 4 (same as above)
向經氮氣置換之燒瓶中添加作為溶劑之甲基乙基酮111g、甲基丙烯酸異莰酯47g、甲基丙烯酸2-(十三氟己基)乙酯25g,於氮氣流下一面進行攪拌一面升溫至60℃。繼而,添加2,2'-聯吡啶4g、氯化亞銅1.5g、及2-溴異丁酸乙酯2.1g,於氮氣流下以60℃進行35小時反應。繼而,向所 獲得之反應物中添加活性氧化鋁30g並進行攪拌。將活性氧化鋁進行過濾後,於減壓下將溶劑蒸餾去除而獲得無規共聚物(4)。利用GPC對無規共聚物(4)之分子量進行測量所得之結果為,重量平均分子量(Mw)為9,182,數量平均分子量(Mn)為7,345,且(Mw/Mn)為1.25。又,無規共聚物(4)之氟原子含量為20質量%。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。 Add 111 g of methyl ethyl ketone, 47 g of isobornyl methacrylate, and 25 g of 2-(tridecafluorohexyl) ethyl methacrylate as solvents to a flask replaced by nitrogen, and the temperature was raised to the temperature while stirring under nitrogen flow. 60°C. Then, 4 g of 2,2'-bipyridine, 1.5 g of cuprous chloride, and 2.1 g of ethyl 2-bromoisobutyrate were added, and the reaction was carried out at 60°C for 35 hours under a nitrogen stream. Then, to the 30 g of activated alumina was added to the obtained reactant and stirred. After filtering the activated alumina, the solvent was distilled off under reduced pressure to obtain a random copolymer (4). As a result of measuring the molecular weight of the random copolymer (4) by GPC, the weight average molecular weight (Mw) was 9,182, the number average molecular weight (Mn) was 7,345, and (Mw/Mn) was 1.25. In addition, the fluorine atom content of the random copolymer (4) is 20% by mass. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1.
比較例1(比較對照用共聚物之製造) Comparative example 1 (manufacturing of copolymer for comparison and control)
向經氮氣置換之反應容器中添加甲醇67g、2,2'-聯吡啶0.961g、及氯化亞銅0.305g,於室溫下攪拌60分鐘。其後,添加甲基丙烯酸2-(九氟丁基)乙酯3.37g、甲基丙烯酸2-(十三氟己基)乙酯3.33g、聚(1,2-氧丁烯)丙二醇單甲基丙烯酸酯(日油股份有限公司製造之「Blemmer 10PPB-500B」;氧丁烯)之平均重複數6)13.3g、聚乙二醇單甲基丙烯酸酯(日油股份有限公司製造之「Blemmer PE-200」;氧乙烯之平均重複數4.5)20g、2-溴異丁酸乙酯0.6g,於氮氣流下以60℃進行10小時反應。繼而,向所獲得之反應物添加活性氧化鋁30g並進行攪拌。將活性氧化鋁進行過濾後,於減壓下將溶劑蒸餾去除而獲得不具有橋聯環結構之比較對照用共聚物(1')。利用GPC對比較對照用共聚物(1')之分子量進行測量所得之結果為,重量平均分子量(Mw)為17,000,數量平均分子量(Mn)為13,000,且(Mw/Mn)為1.25。又,氟原子含量為9.1質量%。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。 67 g of methanol, 0.961 g of 2,2'-bipyridine, and 0.305 g of cuprous chloride were added to the reaction vessel replaced with nitrogen, and the mixture was stirred at room temperature for 60 minutes. Thereafter, 3.37 g of 2-(nonafluorobutyl) ethyl methacrylate, 3.33 g of 2-(tridecafluorohexyl) ethyl methacrylate, and poly(1,2-oxybutene) propylene glycol monomethyl Acrylate ("Blemmer 10PPB-500B" manufactured by NOF Corporation; oxybutylene) average repeat number 6) 13.3g, polyethylene glycol monomethacrylate ("Blemmer PE manufactured by NOF Corporation" -200"; the average repetition number of oxyethylene 4.5) 20 g, 2-bromoisobutyrate ethyl 0.6 g, reacted at 60°C for 10 hours under a nitrogen stream. Then, 30 g of activated alumina was added to the obtained reactant and stirred. After filtering the activated alumina, the solvent was distilled off under reduced pressure to obtain a comparative copolymer (1') that does not have a bridged ring structure. As a result of measuring the molecular weight of the comparative copolymer (1') by GPC, the weight average molecular weight (Mw) was 17,000, the number average molecular weight (Mn) was 13,000, and (Mw/Mn) was 1.25. In addition, the fluorine atom content was 9.1% by mass. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1.
比較例2(比較對照用嵌段聚合物之製造) Comparative Example 2 (Manufacture of block polymer for comparison and control)
向經氮氣置換之燒瓶中添加作為溶劑之2-丙醇47.5g、甲基丙烯酸3 -羥基-1-金剛烷基酯25.6g,於氮氣流下一面進行攪拌一面升溫至40℃。繼而,添加2,2'-聯吡啶5.3g、氯化亞銅1.9g,一面將燒瓶內保持在40℃一面攪拌30分鐘。其後,添加2-溴異丁酸乙酯3.3g,於氮氣流下以40℃進行2小時反應,而獲得含有金剛烷環之聚合物鏈段。繼而,於含有該聚合物鏈段之反應系統中添加甲基丙烯酸2-(十三氟己基)乙酯45.9g,以40℃反應5小時而獲得反應物。繼而,向所獲得之反應物添加活性氧化鋁30g並進行攪拌。將活性氧化鋁進行過濾後,於減壓下將溶劑蒸餾去除而獲得比較對照用共聚物(2')。利用GPC對比較對照用共聚物(2')之分子量進行測量所得之結果為,重量平均分子量(Mw)為3,100,數量平均分子量(Mn)為2,700,且(Mw/Mn)為1.15。又,氟原子含量為14.5質量%。以與實施例1相同之方式進行塗膜層之平滑性之評價,將其結果示於第1表。 Add 47.5 g of 2-propanol and 3 methacrylic acid as a solvent to a flask replaced by nitrogen -25.6 g of hydroxy-1-adamantyl ester, heated to 40°C while stirring under nitrogen flow. Then, 5.3 g of 2,2'-bipyridine and 1.9 g of cuprous chloride were added, and the flask was stirred for 30 minutes while maintaining the inside of the flask at 40°C. Then, 3.3 g of ethyl 2-bromoisobutyrate was added, and the reaction was performed at 40°C for 2 hours under a nitrogen stream to obtain a polymer segment containing an adamantane ring. Then, 45.9 g of 2-(tridecafluorohexyl)ethyl methacrylate was added to the reaction system containing the polymer segment, and reacted at 40°C for 5 hours to obtain a reactant. Then, 30 g of activated alumina was added to the obtained reactant and stirred. After filtering the activated alumina, the solvent was distilled off under reduced pressure to obtain a comparative copolymer (2'). The result of measuring the molecular weight of the comparative copolymer (2') by GPC was that the weight average molecular weight (Mw) was 3,100, the number average molecular weight (Mn) was 2,700, and (Mw/Mn) was 1.15. In addition, the fluorine atom content was 14.5% by mass. The smoothness of the coating film layer was evaluated in the same manner as in Example 1, and the results are shown in Table 1.
實施例5(阻劑組成物之製造) Example 5 (manufacturing of resist composition)
相對於紅色之顏料分散液(1)5.9g,添加參考製造例7中所獲得之鹼可溶性樹脂之40質量%樹脂溶液1.5g、二新戊四醇五丙烯酸酯酸與二新戊四醇六丙烯酸酯酸之混合物即ARONIX M-402(東亞合成化學股份有限公司製造)0.6g、作為光聚合起始劑之BASF Japan股份有限公司製造之Irgacure #369 0.05g、無規共聚物(1)以固形物成分換算計0.0014g、及PGMEA 2.2 g並進行混合,而製備彩色阻劑組成物(1)。使用彩色阻劑組成物(1)而製作塗膜層,依據下述方法,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜層之利用鹼性溶液之顯影性進行評價。 With respect to 5.9 g of the red pigment dispersion (1), 1.5 g of the 40% by mass resin solution of the alkali-soluble resin obtained in Reference Production Example 7, dineopentaerythritol pentaacrylate acid and dineopentaerythritol hexadecyl A mixture of acrylate acids, 0.6 g of ARONIX M-402 (manufactured by Toa Synthetic Chemical Co., Ltd.), Irgacure #369 manufactured by BASF Japan Co., Ltd. as a photopolymerization initiator 0.05 g, random copolymer (1) The solid content is converted to 0.0014g, and PGMEA 2.2 g and mixed to prepare a color resist composition (1). The color resist composition (1) is used to produce the coating film layer. According to the following method, the ability to inhibit the generation of foreign matter (the foreign matter derived from the pigment) in the coating film layer (inhibition) and the alkalinity of the coating film layer The developability of the solution was evaluated.
<塗膜層中之異物之抑制性之評價方法> <Method for evaluating the inhibition of foreign matter in the coating layer>
將彩色阻劑組成物(1)於轉數1000rpm、旋轉時間10秒之條件下旋轉塗佈於7cm×7cm之玻璃板上後,以80℃進行3分鐘乾燥而獲得具有乾燥之塗膜層之物品。針對乾燥之塗膜層,使用高壓水銀燈以50mJ/cm2照射活性能量線,而獲得具有硬化之塗膜層之物品。其後,將物品以270℃進行1小時加熱後,利用基恩斯製造之數位顯微鏡VHX-900觀察塗膜層,依據下述基準進行評價。將評價結果示於第2表。 The color resist composition (1) was spin-coated on a 7cm×7cm glass plate under the conditions of a rotation speed of 1000 rpm and a rotation time of 10 seconds, and then dried at 80°C for 3 minutes to obtain a dry coating film layer article. For the dried coating layer, use a high-pressure mercury lamp to irradiate active energy rays at 50 mJ/cm 2 to obtain an article with a hardened coating layer. After that, the article was heated at 270°C for 1 hour, and then the coating layer was observed with a digital microscope VHX-900 manufactured by Keynes, and evaluated based on the following criteria. The evaluation results are shown in Table 2.
○:於1cm×1cm見方之塗膜層中可確認之異物為1個以下。 ○: No more than one foreign matter can be confirmed in the coating layer of 1cm×1cm square.
△:於1cm×1cm見方之塗膜層中可確認之異物為平均2~9個。 △: There are 2-9 foreign objects that can be confirmed in the coating layer of 1cm×1cm square.
×:於1cm×1cm見方之塗膜層中可確認之異物為平均10個以上。 ×: The number of foreign objects that can be confirmed in the coating layer of 1cm×1cm square is more than 10 on average.
<塗膜層之顯影性之評價方法> <The evaluation method of the developability of the coating layer>
將彩色阻劑組成物(1)於轉數1000rpm、旋轉時間10秒之條件下旋轉塗佈於7cm×7cm之玻璃板上後,以80℃進行3分鐘乾燥而獲得具有乾燥之塗膜層之物品。針對乾燥之塗膜層,使用Semi Clean DL-A4(橫浜油脂工業股份有限公司製造之鹼性顯影劑)之20倍稀釋水溶液,進行噴淋顯影(200rpm,45秒)後,利用目視,依據下述基準評價乾燥之塗膜之殘膜率。 The color resist composition (1) was spin-coated on a 7cm×7cm glass plate under the conditions of a rotation speed of 1000 rpm and a rotation time of 10 seconds, and then dried at 80°C for 3 minutes to obtain a dry coating film layer article. For the dried coating layer, use a 20-fold diluted aqueous solution of Semi Clean DL-A4 (alkaline developer manufactured by Yokohama Oil & Fat Co., Ltd.) for spray development (200 rpm, 45 seconds), and then visually observe The following criteria evaluate the residual film rate of the dried coating film.
○:殘膜率小於10%。 ○: The residual film rate is less than 10%.
△:殘膜率為10~50%。 △: The residual film rate is 10-50%.
×:殘膜率大於50%。 ×: The residual film rate is greater than 50%.
實施例6(同上) Example 6 (same as above)
相對於黃色之顏料分散液(2)6.2g,添加鹼可溶性樹脂(甲基丙烯酸苄酯與丙烯酸之共聚物)1.2g、ARONIX M-402 0.6g、作為光聚合起始劑之BASF Japan股份有限公司製造之Irgacure #369 0.05g、無規共聚物(1)以固形物成分換算計0.0017g、及PGMEA 2.2g並進行混合,而製備彩色阻劑組成物(2)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 Relative to 6.2g of yellow pigment dispersion (2), 1.2g of alkali-soluble resin (copolymer of benzyl methacrylate and acrylic acid), 0.6g of ARONIX M-402, and BASF Japan Co., Ltd. as a photopolymerization initiator are added 0.05 g of Irgacure #369 manufactured by the company, 0.0017 g of the random copolymer (1) in terms of solid content, and 2.2 g of PGMEA were mixed to prepare a color resist composition (2). The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例7(同上) Example 7 (same as above)
使用黃色之顏料分散液(3)代替黃色之顏料分散液(2),除此以外,以與實施例6相同之方式製備彩色阻劑組成物(3)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 A color resist composition (3) was prepared in the same manner as in Example 6 except that the yellow pigment dispersion liquid (3) was used instead of the yellow pigment dispersion liquid (2). The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例8(同上) Example 8 (same as above)
使用黃色之顏料分散液(4)代替黃色之顏料分散液(2),除此以外,以與實施例6相同之方式製備彩色阻劑組成物(4)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 The color resist composition (4) was prepared in the same manner as in Example 6 except that the yellow pigment dispersion (4) was used instead of the yellow pigment dispersion (2). The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例9(同上) Example 9 (same as above)
使用黃色之顏料分散液(5)代替黃色之顏料分散液(2),除此以外, 以與實施例6相同之方式製備彩色阻劑組成物(5)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 Use yellow pigment dispersion (5) instead of yellow pigment dispersion (2), in addition to that, The color resist composition (5) was prepared in the same manner as in Example 6. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例10(同上) Example 10 (same as above)
使用黃色之顏料分散液(6)代替黃色之顏料分散液(2),除此以外,以與實施例6相同之方式製備彩色阻劑組成物(6)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 Except that the yellow pigment dispersion liquid (6) was used instead of the yellow pigment dispersion liquid (2), a color resist composition (6) was prepared in the same manner as in Example 6. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例11(同上) Example 11 (same as above)
使用無規共聚物(2)代替無規共聚物(1),除此以外,以與實施例5相同之方式製備彩色阻劑組成物(7)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 The random copolymer (2) was used instead of the random copolymer (1), except that the color resist composition (7) was prepared in the same manner as in Example 5. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例12(同上) Example 12 (same as above)
使用無規共聚物(3)代替無規共聚物(1),除此以外,以與實施例5相同之方式製備彩色阻劑組成物(8)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 The random copolymer (3) was used instead of the random copolymer (1), except that the color resist composition (8) was prepared in the same manner as in Example 5. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
實施例13(同上) Example 13 (same as above)
使用無規共聚物(4)代替無規共聚物(1),除此以外,以與實施例5 相同之方式製備彩色阻劑組成物(9)。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第2表。 The random copolymer (4) is used instead of the random copolymer (1). Otherwise, the same as in Example 5 The color resist composition (9) was prepared in the same manner. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 2.
比較例3(比較對照用阻劑組成物之製造) Comparative example 3 (manufacturing of resist composition for comparative control)
使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例5相同之方式製備比較對照用彩色阻劑組成物(1')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 Except that the copolymer (1') for comparison and control was used instead of the random copolymer (1), the color resist composition (1') for comparison and control was prepared in the same manner as in Example 5. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 3.
比較例4(同上) Comparative example 4 (same as above)
使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(2')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 Except that the copolymer (1') for comparison and control was used instead of the random copolymer (1), in the same manner as in Example 6, a color resist composition (2') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 3.
比較例5(同上) Comparative example 5 (same as above)
使用黃色之顏料分散液(3)代替黃色之顏料分散液(2),且使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(3')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 The yellow pigment dispersion (3) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (1') was used instead of the random copolymer (1), except that the same as in Example 6 In this way, a color resist composition (3') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 3.
比較例6(同上) Comparative example 6 (same as above)
使用黃色之顏料分散液(4)代替黃色之顏料分散液(2),且使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(4')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 The yellow pigment dispersion (4) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (1') was used instead of the random copolymer (1), except that the same as in Example 6 In this way, a color resist composition (4') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 3.
比較例7(同上) Comparative example 7 (same as above)
使用黃色之顏料分散液(5)代替黃色之顏料分散液(2),且使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(5')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 The yellow pigment dispersion (5) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (1') was used instead of the random copolymer (1), except that the same as in Example 6 In this way, a color resist composition (5') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 3.
比較例8(同上) Comparative example 8 (same as above)
使用黃色之顏料分散液(6)代替黃色之顏料分散液(2),且使用比較對照用共聚物(1')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(6')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性) 及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第3表。 The yellow pigment dispersion (6) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (1') was used instead of the random copolymer (1), except that the same as in Example 6 In this way, a color resist composition (6') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to inhibit the generation of foreign matter (foreign matter derived from the pigment) in the coating film layer (inhibition) And evaluation of the developability of the coating film with alkaline solution. The evaluation results are shown in Table 3.
比較例9(同上) Comparative Example 9 (same as above)
使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例5相同之方式製備比較對照用彩色阻劑組成物(7')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 Except for using the copolymer (2') for comparison and control instead of the random copolymer (1), a color resist composition (7') for comparison and control was prepared in the same manner as in Example 5. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
比較例10(同上) Comparative Example 10 (same as above)
使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(8')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 Except that the copolymer (2') for comparison and control was used instead of the random copolymer (1), the color resist composition (8') for comparison and control was prepared in the same manner as in Example 6. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
比較例11(同上) Comparative Example 11 (same as above)
使用黃色之顏料分散液(3)代替黃色之顏料分散液(2),且使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(9')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 Use the yellow pigment dispersion (3) instead of the yellow pigment dispersion (2), and use the comparative copolymer (2') instead of the random copolymer (1), except that the same as in Example 6 Method Prepare the color resist composition (9') for comparison and control. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
比較例12(同上) Comparative example 12 (same as above)
使用黃色之顏料分散液(4)代替黃色之顏料分散液(2),且使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例6相同之 方式製備比較對照用彩色阻劑組成物(10')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 The yellow pigment dispersion (4) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (2') was used instead of the random copolymer (1), except that the same as in Example 6 Method Prepare a color resist composition (10') for comparison and control. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
比較例13(同上) Comparative Example 13 (same as above)
使用黃色之顏料分散液(5)代替黃色之顏料分散液(2),且使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(11')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 The yellow pigment dispersion (5) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (2') was used instead of the random copolymer (1), except that the same as in Example 6 In this way, a color resist composition (11') for comparison and control was prepared. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
比較例14(同上) Comparative Example 14 (same as above)
使用黃色之顏料分散液(6)代替黃色之顏料分散液(2),且使用比較對照用共聚物(2')代替無規共聚物(1),除此以外,以與實施例6相同之方式製備比較對照用彩色阻劑組成物(12')。以與實施例5相同之方式製作塗膜層,對抑制塗膜層中之異物(源自顏料之異物)產生之能力(抑制性)及塗膜之利用鹼性溶液之顯影性進行評價。將評價結果示於第4表。 The yellow pigment dispersion (6) was used instead of the yellow pigment dispersion (2), and the comparative copolymer (2') was used instead of the random copolymer (1), except that the same as in Example 6 Method Prepare the color resist composition (12') for comparison and control. The coating film layer was produced in the same manner as in Example 5, and the ability to suppress the generation of foreign matter (pigment-derived foreign matter) in the coating film layer (inhibition property) and the developability of the coating film with an alkaline solution were evaluated. The evaluation results are shown in Table 4.
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