TWI627498B - Color resist composition, color filter, liquid crystal display device, and organic electro luminescence display device - Google Patents
Color resist composition, color filter, liquid crystal display device, and organic electro luminescence display device Download PDFInfo
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
本發明之目的係提供一種彩色光阻組成物,其係使用不會生成對環境與人體的累積性高之化合物的氟系界面活性劑所得到,於旋塗法等塗布方法的塗布性優良,且塗膜平滑性良好,塗布時不易有液體回流,製造效率高,另外還提供使用其之彩色濾光片、液晶顯示裝置及有機EL顯示裝置。而本發明提供一種彩色光阻組成物,其係含有鹼溶性樹脂(A)、聚合性化合物(B)、著色劑(C)及氟系界面活性劑(D)之彩色光阻組成物,其中前述氟系界面活性劑(D)係聚合物,其具有聚合性單體的聚合物結構及聚(全氟伸烷基醚)鏈,複數個前述聚合物結構係透過前述聚(全氟伸烷基醚)鏈連結,且於前述聚合物結構的側鏈具有氧伸烷基。 An object of the present invention is to provide a color photoresist composition obtained by using a fluorine-based surfactant that does not generate a compound having a high cumulative effect on the environment and the human body, and has excellent coatability in coating methods such as a spin coating method, In addition, the coating film has good smoothness, it is difficult to have liquid reflow during coating, and the manufacturing efficiency is high. In addition, a color filter, a liquid crystal display device, and an organic EL display device using the same are also provided. The present invention provides a color photoresist composition, which is a color photoresist composition containing an alkali-soluble resin (A), a polymerizable compound (B), a colorant (C), and a fluorine-based surfactant (D). The fluorine-based surfactant (D) -based polymer has a polymer structure of a polymerizable monomer and a poly (perfluoroalkylene ether) chain, and a plurality of the polymer structures are passed through the poly (perfluoroalkylene) (Ether) chain, and has an oxyalkylene group in a side chain of the aforementioned polymer structure.
Description
本發明係關於彩色光阻組成物,其係使用不會生成對環境或人體的累積性高之化合物的氟系界面活性劑所得到,於旋塗法等塗布方法的塗布性優良,且塗膜的平滑性良好,於塗布時不易有液體回流,另外還關於使用其之彩色濾光片、液晶顯示裝置及有機EL顯示裝置。 The present invention relates to a color photoresist composition, which is obtained by using a fluorine-based surfactant that does not generate a compound having a high cumulative effect on the environment and the human body. It has excellent coatability in coating methods such as a spin coating method and a coating film. It has good smoothness, and it is difficult to have liquid reflow during coating. In addition, it also relates to a color filter, a liquid crystal display device, and an organic EL display device using the same.
彩色液晶顯示裝置所使用之彩色濾光片,一般具有紅(R)、綠(G)、藍(B)之各像素,及在其間為了提升顯示對比等目的所形成之黑色矩陣(BM)的基本結構。而在彩色濾光片之製作中,一般係以旋塗法、狹縫塗布法等塗布方法將彩色光阻組成物塗布在玻璃基板上,乾燥後使用光罩曝光,然後顯影形成著色圖案。 The color filters used in color liquid crystal display devices generally have red (R), green (G), and blue (B) pixels, and a black matrix (BM) formed between them for the purpose of improving display contrast. basic structure. In the production of a color filter, a color photoresist composition is generally coated on a glass substrate by a coating method such as a spin coating method or a slit coating method, dried, and then exposed using a photomask, and then developed to form a colored pattern.
在彩色濾光片之製造中,在將彩色光阻組成物塗布於玻璃基板上時,於塗布面(塗膜面)的平滑性不好而有塗膜的膜厚不均之情形,或有縮孔等情況,會發生像素的色彩不均。在使用此種具有色彩不均的彩色濾光片來製作液晶顯示裝置或有機EL顯示裝置的情形,該顯示裝置所得到的圖像亦會有產生色彩不均的問題發生。因此,彩色濾光片的這些R、G、B各像素及BM的表面被要求高平滑性,因此在塗布彩色光阻組成物時,有必要以膜厚均勻,且不發生塗布不均與縮孔,不會有色彩不均的方式來進行塗布。 In the manufacture of color filters, when a color photoresist composition is coated on a glass substrate, the smoothness of the coating surface (coating film surface) may be poor and the thickness of the coating film may be uneven. Pixel shrinkage and other conditions can cause pixel color unevenness. When such a color filter having color unevenness is used to make a liquid crystal display device or an organic EL display device, an image obtained by the display device may cause color unevenness. Therefore, the surface of each of the R, G, and B pixels and the BM of the color filter is required to have high smoothness. Therefore, when applying the color photoresist composition, it is necessary to make the film thickness uniform without causing uneven coating and shrinkage. Holes are applied in a way that does not have uneven color.
為了防止因塗布不均、縮孔等造成色彩不均,而提 案有在彩色光阻組成物中含有氟系界面活性劑之方法,並且為了提升其效果,進行使用於該界面活性劑之共聚物的結構成分之改良(例如參照專利文獻1)。具體來說,專利文獻1中揭示由含有碳原子數為8以上之全氟烷基的乙烯性不飽和單體與具有矽氧鏈之乙烯性不飽和單體之共聚物所構成之氟系界面活性劑。使用這些氟系界面活性劑的彩色光阻組成物,藉由降低表面張力而可使彩色光阻組成物的調平性提升,並且可提升塗膜的平滑性。 In order to prevent uneven color due to uneven coating, shrinkage, etc., There is a method of including a fluorine-based surfactant in a color photoresist composition, and in order to improve the effect, a structural component of a copolymer of the surfactant is improved (for example, refer to Patent Document 1). Specifically, Patent Document 1 discloses a fluorine-based interface composed of a copolymer of an ethylenically unsaturated monomer containing a perfluoroalkyl group having 8 or more carbon atoms and a ethylenically unsaturated monomer having a siloxane chain. Active agent. The color photoresist composition using these fluorine-based surfactants can reduce the surface tension, improve the leveling property of the color photoresist composition, and improve the smoothness of the coating film.
然而,在使用專利文獻1所揭示之氟系界面活性劑作為彩色光阻組成物的成分之一的情形,於近年來彩色濾光片的基板之大型化,旋塗法、狹縫塗布法等塗布方法之多樣化的進展之現況下,防止組成物之塗布不均的效果不再要求實用水準,而被要求改良。 However, in the case where the fluorine-based surfactant disclosed in Patent Document 1 is used as one of the components of the color photoresist composition, the substrate of a color filter has been enlarged in recent years, a spin coating method, a slit coating method, and the like. Under the current state of progress in diversification of coating methods, the effect of preventing uneven coating of the composition is no longer required for practical use, and improvement is required.
此外,彩色光阻組成物還被要求在具有前述不易產生塗布不均之特性的同時,還具有在以旋塗法等塗布時,在玻璃基板周邊部的組成物的回流(液體回流)少之特性。然而,即便使用前述專利文獻1所揭示之氟系界面活性劑,也難以讓前述液體回流降低到所要求的水準。 In addition, the color photoresist composition is required to have the above-mentioned characteristics that it is not easy to cause uneven coating, and also to have less reflow (liquid reflow) of the composition in the peripheral portion of the glass substrate when applied by a spin coating method or the like. characteristic. However, even if the fluorine-based surfactant disclosed in the aforementioned Patent Document 1 is used, it is difficult to reduce the reflux of the liquid to a required level.
而在近年,已經很清楚於專利文獻1等所使用的具有碳原子數8之全氟烷基的乙烯性不飽和單體,經由分解會生成對環境及生物體的累積性高之全氟辛磺酸(以下簡稱為「PFOS」。)或全氟辛酸(以下簡稱為「PFOA」。)。因此,要求使用沒有碳原子數8之全氟烷基的化合物之界面活性劑。 In recent years, it has become clear that ethylenically unsaturated monomers having a perfluoroalkyl group having 8 carbon atoms, which are used in Patent Documents 1 and the like, undergo decomposition to generate perfluorooctane which is highly cumulative to the environment and organisms. Sulfonic acid (hereinafter referred to as "PFOS") or perfluorooctanoic acid (hereinafter referred to as "PFOA"). Therefore, it is required to use a surfactant without a compound having a perfluoroalkyl group having 8 carbon atoms.
[專利文獻1]日本特開平10-230154號公報 [Patent Document 1] Japanese Patent Application Laid-Open No. 10-230154
本發明欲解決之課題係提供一種彩色光阻組成物,其係使用不會生成對環境與人體的累積性高之化合物的氟系界面活性劑所得到,於旋塗法等塗布方法的塗布性優良,且塗膜平滑性良好,不易有液體回流,另外提供使用其之彩色濾光片、液晶顯示裝置及有機EL顯示裝置。 The problem to be solved by the present invention is to provide a color photoresist composition obtained by using a fluorine-based surfactant that does not generate a compound having a high cumulative effect on the environment and the human body. Excellent, and the coating film is smooth, and it is not easy to have liquid reflow. In addition, it provides color filters, liquid crystal display devices, and organic EL display devices.
本發明團隊為了解決上述課題不斷戮力研究的結果,發現一種聚合物,其具有聚合性單體的聚合物結構及聚(全氟伸烷基醚)鏈,複數個前述聚合物結構係透過前述聚(全氟伸烷基醚)鏈連結,且於前述聚合物結構的側鏈具有氧伸烷基,讓該聚合物作為氟系界面活性劑,則不會生成對環境與人體的累積性高之化合物,而藉由使用該氟系界面活性劑,即可得到塗布性優良、塗膜的平滑性良好,且不易有液體回流之彩色光阻組成物,而終至完成本發明。 In order to solve the above problems, the team of the present invention has continuously researched and found a polymer having a polymer structure of a polymerizable monomer and a poly (perfluoroalkylene ether) chain. A plurality of the aforementioned polymer structures are transmitted through the aforementioned Poly (perfluoroalkylene ether) chain is connected, and the side chain of the aforementioned polymer structure has an oxyalkylene group. When the polymer is used as a fluorosurfactant, it does not generate high accumulation to the environment and the human body. By using this compound, a color photoresist composition having excellent coating properties, good smoothness of the coating film, and less likely to have liquid reflow can be obtained by using the fluorine-based surfactant, and the present invention has finally been completed.
亦即,本發明提供一種彩色光阻組成物,其係含有鹼溶性樹脂(A)、聚合性化合物(B)、著色劑(C)及氟系界面活性劑(D)之彩色光阻組成物,其特徵為:前述氟系界面活性劑(D)係聚合物,該聚合物具有聚合性單體的聚合物結構及聚(全氟伸烷基醚)鏈,複數個前述聚合物結構 係透過前述聚(全氟伸烷基醚)鏈連結,且於前述聚合物結構的側鏈具有氧伸烷基。 That is, the present invention provides a color photoresist composition which is a color photoresist composition containing an alkali-soluble resin (A), a polymerizable compound (B), a colorant (C), and a fluorine-based surfactant (D). , Characterized in that the aforementioned fluorine-based surfactant (D) -based polymer has a polymer structure of a polymerizable monomer and a poly (perfluoroalkylene ether) chain, and a plurality of the aforementioned polymer structures It is connected through the poly (perfluoroalkylene ether) chain, and has an oxyalkylene group in a side chain of the polymer structure.
此外,本發明提供一種彩色濾光片,其具有前述彩色光阻組成物之硬化塗膜。 In addition, the present invention provides a color filter having a hardened coating film of the aforementioned color photoresist composition.
再者,本發明提供一種液晶顯示裝置,其特徵為具有:背光板、偏光板、至少2片基板、被包夾於前述基板間的液晶層及安裝於前述基板的至少一部分之前述彩色濾光片。 Furthermore, the present invention provides a liquid crystal display device, comprising: a backlight plate, a polarizing plate, at least two substrates, a liquid crystal layer sandwiched between the substrates, and the color filter mounted on at least a part of the substrates. sheet.
本發明更提供一種有機EL顯示裝置,其特徵為具有本發明之彩色濾光片。 The invention further provides an organic EL display device, which is characterized by having the color filter of the invention.
本發明之彩色光阻組成物係使用不會生成對環境與人體的累積性高之化合物的氟系界面活性劑所得到,塗布性優良,塗膜的平滑性良好,亦不易有液體回流。因此,藉由使用該彩色光阻組成物,能高產量地製造無色彩不均、色彩再現性優良,且以高精度形成著色圖案之彩色濾光片。另外,藉由使用該彩色濾光片,可提供顯示特性優良的液晶顯示裝置及有機EL顯示裝置。 The color photoresist composition of the present invention is obtained by using a fluorine-based surfactant that does not generate a compound having a high cumulative effect on the environment and the human body. It has excellent coating properties, good smoothness of the coating film, and no liquid reflow. Therefore, by using the color photoresist composition, a color filter without color unevenness, excellent color reproducibility, and a colored pattern formed with high accuracy can be manufactured at a high yield. In addition, by using this color filter, a liquid crystal display device and an organic EL display device having excellent display characteristics can be provided.
使用於本發明之鹼溶性樹脂(A),只要是可溶於鹼性顯影液者即無特別限定,較佳為具有從羧基、酚性羥基及磺酸基之群組中所選出的至少一個酸基或其鹽之樹脂。 The alkali-soluble resin (A) used in the present invention is not particularly limited as long as it is soluble in an alkaline developer, and preferably has at least one selected from the group consisting of a carboxyl group, a phenolic hydroxyl group, and a sulfonic acid group. Resin of acid group or its salt.
若更具體說明前述鹼溶性樹脂(A),可舉出例如以下 之樹脂等。 To explain the alkali-soluble resin (A) more specifically, for example, the following Of resin, etc.
‧以具有酸性基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合所得到之鹼溶性樹脂(A1)。 ‧Base-soluble resin (A1) obtained by polymerizing a (meth) acrylic polymerizable monomer having an acidic group as an essential component.
‧讓以具有官能基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合而得之沒有酸性基的聚合物,與具有對該官能基有反應性之反應基與酸基的化合物進行反應所得到之鹼溶性樹脂(A2)。 ‧The polymer without (acid group) obtained by polymerizing a (meth) acrylic polymerizable monomer having a functional group as an essential component, and a compound having a reactive group and an acid group reactive with the functional group The alkali-soluble resin (A2) obtained by the reaction.
‧對含有環氧基之(甲基)丙烯酸酯與其它聚合性單體的共聚物,將不飽和單羧酸加成至該共聚物所具有之環氧基的至少一部分,再進一步讓藉由不飽和單羧酸的加成反應所生成之羥基的至少一部分,對多元羧酸之酸酐作加成反應所得到之鹼溶性樹脂(A3)。 ‧For a copolymer of (meth) acrylate containing epoxy groups and other polymerizable monomers, an unsaturated monocarboxylic acid is added to at least a part of the epoxy groups of the copolymer, and further passed An alkali-soluble resin (A3) obtained by adding at least a part of the hydroxyl groups generated by the addition reaction of an unsaturated monocarboxylic acid to an acid anhydride of a polycarboxylic acid.
‧具有羧基之環氧(甲基)丙烯酸酯樹脂(A4)。 ‧Epoxy (meth) acrylate resin (A4) with a carboxyl group.
以下,詳細說明上述(A1)~(A4)。 Hereinafter, the above (A1) to (A4) will be described in detail.
前述鹼溶性樹脂(A1)可舉出例如:以具有羧基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合而得之鹼溶性樹脂,與以具有磺酸基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合而得之鹼溶性樹脂等。其中,較佳為以具有羧基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合而得之鹼溶性樹脂。 Examples of the alkali-soluble resin (A1) include an alkali-soluble resin obtained by polymerizing a (meth) acrylic polymerizable monomer having a carboxyl group as an essential component and a (meth) acrylic acid having a sulfonic acid group. The polymerizable monomer is an alkali-soluble resin or the like obtained by polymerizing an essential component. Among these, an alkali-soluble resin obtained by polymerizing a (meth) acrylic polymerizable monomer having a carboxyl group as an essential component is preferred.
前述具有羧基之(甲基)丙烯酸系聚合性單體可舉出例如:(甲基)丙烯酸、順丁烯二酸、巴豆酸、伊康酸、反丁烯二酸、桂皮酸、丁二酸2-(甲基)丙烯醯氧基乙酯、己二酸2-(甲基)丙烯醯氧基乙酯、順丁烯二酸2-(甲基)丙烯醯氧基乙酯、六氫鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯 、鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、丁二酸2-(甲基)丙烯醯氧基丙酯、己二酸2-(甲基)丙烯醯氧基丙酯、順丁烯二酸2-(甲基)丙烯醯氧基丙酯、六氫鄰苯二甲酸2-(甲基)丙烯醯氧基丙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基丙酯、丁二酸2-(甲基)丙烯醯氧基丁酯、己二酸2-(甲基)丙烯醯氧基丁酯、順丁烯二酸2-(甲基)丙烯醯氧基丁酯、六氫鄰苯二甲酸2-(甲基)丙烯醯氧基丁酯、鄰苯二甲酸2-(甲基)丙烯醯氧基丁酯等聚合性單體; 讓ε-己內酯、β-丙內酯、γ-丁內酯、δ-戊內酯等內酯加成至丙烯酸而成的聚合性單體;讓丁二酸、順丁烯二酸、鄰苯二甲酸、或它們的酸酐加成至(甲基)丙烯酸羥烷基酯而成的聚合性單體等。這些具有羧基的(甲基)丙烯酸系聚合性單體可僅使用1種,亦可2種以上併用。前述具有羧基之(甲基)丙烯酸系聚合性單體之中,較佳為(甲基)丙烯酸、丁二酸2-(甲基)丙烯醯氧基乙酯。 Examples of the (meth) acrylic polymerizable monomer having a carboxyl group include (meth) acrylic acid, maleic acid, crotonic acid, itaconic acid, fumaric acid, cinnamic acid, and succinic acid. 2- (meth) acryloxyethyl ester, 2- (meth) acryloxyethyl adipate, 2- (meth) acryloxyethyl maleate, hexahydroortho 2- (meth) acryloxyethyl phthalate , 2- (meth) acryloxyethyl phthalate, 2- (meth) acryloxypropyl succinate, 2- (meth) acryloxypropyl adipate, 2- (meth) acryloxypropyl maleate, 2- (meth) acryloxypropyl hexahydrophthalate, 2- (meth) acryloxy phthalate Propyl propyl ester, 2- (meth) acryloxybutyl succinate, 2- (meth) acryloxybutyl adipate, 2- (meth) acryloxy maleate Polymerizable monomers such as butyl butyl, 2- (meth) acryloxybutyl hexahydrophthalate, and 2- (meth) acryloxybutyl phthalate; Polymerizable monomers obtained by adding lactones such as ε-caprolactone, β-propiolactone, γ-butyrolactone, and δ-valerolactone to acrylic acid; let succinic acid, maleic acid, Phthalic acid or a polymerizable monomer obtained by adding an anhydride thereof to a hydroxyalkyl (meth) acrylate. These (meth) acrylic polymerizable monomers having a carboxyl group may be used alone or in combination of two or more. Among the (meth) acrylic polymerizable monomers having a carboxyl group, (meth) acrylic acid and 2- (meth) acrylic acid ethoxyethyl succinate are preferred.
前述具有磺酸基之(甲基)丙烯酸系聚合性單體可舉出例如:(甲基)丙烯酸-2-磺乙酯、(甲基)丙烯酸-2-磺丙酯、2-羥基-3-(甲基)丙烯醯氧基丙磺酸、2-(甲基)丙烯醯胺-2-甲基丙磺酸或它們的鹽等。 Examples of the (meth) acrylic polymerizable monomer having a sulfonic acid group include 2-sulfoethyl (meth) acrylate, 2-sulfopropyl (meth) acrylate, and 2-hydroxy-3 -(Meth) acrylic acid oxypropanesulfonic acid, 2- (meth) acrylamido-2-methylpropanesulfonic acid, or a salt thereof, and the like.
在調製鹼溶性樹脂(A1)時,於不損害本發明之效果的範圍內,亦可併用其它聚合性單體。其它單體可舉出例如:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸芐酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苯氧基乙酯、 (甲基)丙烯酸苯氧基甲酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸2-羥乙酯、丙三醇單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯等(甲基)丙烯酸酯; (甲基)丙烯酸2-羥乙酯、(甲基)丙烯酸羥丙酯、(甲基)丙烯酸4-羥丁酯等(甲基)丙烯酸羥烷基酯、丙三醇單(甲基)丙烯酸酯等有羥基之(甲基)丙烯酸酯; 苯乙烯及其衍生物等芳香族乙烯基化合物;N-乙烯基吡咯啶酮等乙烯基化合物;N-環己基順丁烯二醯亞胺、N-苯基順丁烯二醯亞胺、N-芐基順丁烯二醯亞胺等N-取代順丁烯二醯亞胺; 聚(甲基)丙烯酸甲酯高分子單體、聚苯乙烯高分子單體、聚(甲基)丙烯酸2-羥乙酯高分子單體、聚乙二醇高分子單體、聚丙二醇高分子單體、聚己內酯高分子單體等高分子單體等。其它聚合性單體可僅使用1種,亦可2種以上併用。 When preparing the alkali-soluble resin (A1), other polymerizable monomers may be used in combination as long as the effect of the present invention is not impaired. Other monomers include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, butyl (meth) acrylate, ( Isobutyl (meth) acrylate, benzyl (meth) acrylate, phenyl (meth) acrylate, cyclohexyl (meth) acrylate, phenoxyethyl (meth) acrylate, Phenoxymethyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isoamyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, glycerol mono (methyl) ) (Meth) acrylates such as acrylate, tetrahydrofurfuryl (meth) acrylate; 2-hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, hydroxyalkyl (meth) acrylate, and glycerol mono (meth) acrylate (Meth) acrylic acid esters with hydroxyl groups; Aromatic vinyl compounds such as styrene and its derivatives; Vinyl compounds such as N-vinylpyrrolidone; N-cyclohexylcis-butenedifluoreneimide, N-phenylcis-butenedifluorine -N-substituted maleimide, such as benzylcis butene diimide; Poly (meth) acrylate polymer monomer, polystyrene polymer monomer, poly (meth) acrylate 2-hydroxyethyl polymer monomer, polyethylene glycol polymer monomer, polypropylene glycol polymer Monomers, polymer monomers such as polycaprolactone polymer monomers, and the like. The other polymerizable monomers may be used alone or in combination of two or more.
上述其它聚合性單體之中,從透明性良好且不損害耐熱性的點來說,較佳為苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸芐酯、(甲基)丙烯酸4-羥丁酯、(甲基)丙烯酸2-羥乙酯、(甲基)丙烯酸羥丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、N-環己基順丁烯二醯亞胺、N-芐基順丁烯二醯亞胺、N-苯基順丁烯二醯亞胺。 Among the other polymerizable monomers, styrene, methyl (meth) acrylate, cyclohexyl (meth) acrylate, and (meth) are preferred in terms of good transparency without impairing heat resistance. Benzyl acrylate, 4-hydroxybutyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate Ester, N-cyclohexylcis-butenedifluoreneimide, N-benzylcisbutenedifluoreneimine, N-phenylcisbutenedifluoreneimine.
這些其它聚合性單體之使用量,較佳為全部聚合性單體成分中的95質量%以下,更佳為85質量%以下。 The use amount of these other polymerizable monomers is preferably 95% by mass or less, more preferably 85% by mass or less, of the total polymerizable monomer components.
鹼溶性樹脂(A1)的具體例可舉出例如:(甲基)丙烯酸與(甲基)丙烯酸甲酯、(甲基)丙烯酸芐酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸環己酯、環己基順丁烯二醯亞胺等不含羥基的聚合性單體與(甲基)丙烯酸2-羥乙酯、(甲基)丙烯酸羥丙酯、(甲基)丙烯酸4-羥丁酯等含有羥基之聚合性單體的共聚物; (甲基)丙烯酸與(甲基)丙烯酸甲酯、(甲基)丙烯酸芐酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、甲基丙烯酸2-羥乙酯等(甲基)丙烯酸酯的共聚物; (甲基)丙烯酸與苯乙烯的共聚物;(甲基)丙烯酸、苯乙烯與α-甲基苯乙烯的共聚物;(甲基)丙烯酸與環己基順丁烯二醯亞胺的共聚物等。鹼溶性樹脂(A1)之中,從得到顏料分散性優良之彩色光阻組成物來看,較佳為使用(甲基)丙烯酸芐酯之鹼溶性樹脂。 Specific examples of the alkali-soluble resin (A1) include, for example, (meth) acrylic acid and methyl (meth) acrylate, benzyl (meth) acrylate, butyl (meth) acrylate, and (meth) acrylic acid. Hydroxyl-free polymerizable monomers such as butyl ester, cyclohexyl (meth) acrylate, cyclohexyl succinimide, and 2-hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate Copolymers of polymerizable monomers containing hydroxyl groups such as 4-hydroxybutyl (meth) acrylate; (Meth) acrylic acid and methyl (meth) acrylate, benzyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, 2-hydroxyethyl methacrylate, etc. Based) acrylate copolymer; Copolymer of (meth) acrylic acid and styrene; copolymer of (meth) acrylic acid, styrene and α-methylstyrene; copolymer of (meth) acrylic acid and cyclohexyl maleimide . Among the alkali-soluble resins (A1), an alkali-soluble resin using benzyl (meth) acrylate is preferable in terms of obtaining a color photoresist composition having excellent pigment dispersibility.
前述鹼溶性樹脂(A1)的酸價較佳在30~500之範圍,更佳在40~350之範圍,進一步更佳在50~300之範圍。又,前述鹼溶性樹脂(A1)之以GPC測定的以聚苯乙烯換算之重量平均分子量(Mw)較佳在2,000~80,000之範圍,更佳在3,000~50,000之範圍,進一步更佳在4,000~30,000之範圍。 The acid value of the alkali-soluble resin (A1) is preferably in the range of 30 to 500, more preferably in the range of 40 to 350, and even more preferably in the range of 50 to 300. The weight-average molecular weight (Mw) of the aforementioned alkali-soluble resin (A1) measured by GPC in terms of polystyrene is preferably in the range of 2,000 to 80,000, more preferably in the range of 3,000 to 50,000, and even more preferably in the range of 4,000 to 4,000. 30,000 range.
本發明中,數量平均分子量(Mn)及重量平均分子量(Mw)係基於GPC測定以聚苯乙烯換算所得之值。其中,GPC的測定條件係如下所述。 In the present invention, the number average molecular weight (Mn) and the weight average molecular weight (Mw) are values obtained in terms of polystyrene based on GPC measurement. The measurement conditions of GPC are as follows.
測定裝置:Tosoh股份有限公司製「HLC-8220 GPC」 Measuring device: "HLC-8220 GPC" manufactured by Tosoh Corporation
管柱:Tosoh股份有限公司製保護管柱「HHR-H」(6.0mmI.D.×4cm)+Tosoh股份有限公司製「TSK-GEL GMHHR」(7.8mmI.D.×30cm)+Tosoh股份有限公司製「TSK-GEL GMHHR」(7.8mmI.D.×30cm)+Tosoh股份有限公司製「TSK-GEL GMHHR」(7.8mmI.D.×30cm)+Tosoh股份有限公司製「TSK-GEL GMHHR」(7.8mmI.D.×30cm) Column: Tosoh Co., Ltd. Protective Column "HHR-H" (6.0mmI.D. x 4cm) + Tosoh Co., Ltd. "TSK-GEL GMHHR" (7.8mmI.D. x 30cm) + Tosoh Co., Ltd. "TSK-GEL GMHHR" (7.8mmI.D. × 30cm) made by the company + "TSK-GEL GMHHR" (7.8mmI.D. × 30cm) made by Tosoh Corporation + "TSK-GEL GMHHR" made by Tosoh Corporation (7.8mmI.D. × 30cm)
檢測器:ELSD(ORTEC製「ELSD2000」) Detector: ELSD ("ELSD2000" manufactured by ORTEC)
資料處理:Tosoh股份有限公司製「GPC-8020 Model II version.4.10」 Data processing: "GPC-8020 Model II version.4.10" made by Tosoh Corporation
測定條件:管柱溫度40℃、展開溶劑四氫呋喃、流速1.0ml/分鐘 Measurement conditions: column temperature 40 ° C, developing solvent tetrahydrofuran, flow rate 1.0ml / min
標準:依據前述「GPC-8020 Model II version.4.10」之測定手冊,使用分子量已知的下述單分散聚苯乙烯。 Standard: According to the measurement manual of "GPC-8020 Model II version. 4.10", the following monodisperse polystyrene with a known molecular weight is used.
Tosoh股份有限公司製「A-500」 Tosoh Corporation `` A-500 ''
Tosoh股份有限公司製「A-1000」 Tosoh Corporation `` A-1000 ''
Tosoh股份有限公司製「A-2500」 `` A-2500 '' by Tosoh Corporation
Tosoh股份有限公司製「A-5000」 Tosoh Corporation `` A-5000 ''
Tosoh股份有限公司製「F-1」 Tosoh Corporation `` F-1 ''
Tosoh股份有限公司製「F-2」 Tosoh Corporation `` F-2 ''
Tosoh股份有限公司製「F-4」 Tosoh Corporation `` F-4 ''
Tosoh股份有限公司製「F-10」 Tosoh Corporation `` F-10 ''
Tosoh股份有限公司製「F-20」 Tosoh Corporation `` F-20 ''
Tosoh股份有限公司製「F-40」 Tosoh Corporation `` F-40 ''
Tosoh股份有限公司製「F-80」 Tosoh Corporation `` F-80 ''
Tosoh股份有限公司製「F-128」 Tosoh Corporation `` F-128 ''
試樣:將以樹脂固體成分換算為1.0質量%之四氫呋喃溶液用微孔過濾器過濾所得之物(100μl)。 Sample: A tetrahydrofuran solution having a resin solid content of 1.0% by mass was filtered with a microporous filter (100 μl).
本發明中,亦可使用將含有環氧基之不飽和化合物,加成到以具有羧基之(甲基)丙烯酸系聚合性單體為必須成分加以聚合所得到之含有羧基的鹼溶性樹脂之羧基,所生成的鹼溶性樹脂(A1-1)。 In the present invention, a carboxyl group of an alkali-soluble resin containing a carboxyl group obtained by adding an unsaturated compound containing an epoxy group to a (meth) acrylic polymerizable monomer having a carboxyl group as an essential component may be used. , The resulting alkali-soluble resin (A1-1).
前述含有環氧基之不飽和化合物可舉出例如:(甲基)丙烯酸環氧丙酯、烯丙基環氧丙基醚、丙烯酸環氧丙基α-乙酯、巴豆醯基環氧丙基醚、(異)巴豆酸環氧丙基醚、N-(3,5-二甲基-4-環氧丙基)芐基丙烯醯胺、(甲基)丙烯酸4-羥丁酯環氧丙基醚等。而從謀取耐熱性之提升,與使用顏料作為後述之著色劑(C)時的分散性之提升來看,較佳為含有脂環式環氧基之不飽和化合物。 Examples of the unsaturated compound containing an epoxy group include, for example, glycidyl (meth) acrylate, allyl glycidyl ether, glycidyl α-ethyl acrylate, and crotonyl glycidyl propyl Ether, (iso) crotonic acid glycidyl ether, N- (3,5-dimethyl-4-glycidyl) benzylacrylamide, 4-hydroxybutyl (meth) acrylate glycidol Ether. From the viewpoint of improving heat resistance and improving dispersibility when a pigment is used as a coloring agent (C) described later, an unsaturated compound containing an alicyclic epoxy group is preferred.
前述含有脂環式環氧基之不飽和化合物所具有的脂環式環氧基,可舉出例如:2,3-環氧環戊基、3,4-環氧環己基、7,8-環氧[三環[5.2.1.0]癸-2-基]基等。而作為乙烯性不飽和基,較佳為(甲基)丙烯醯基。含有脂環式環氧基之不飽和化合物可僅使用1種,亦可2種以上併用。 Examples of the alicyclic epoxy group contained in the alicyclic epoxy-containing unsaturated compound include, for example, 2,3-epoxycyclopentyl, 3,4-epoxycyclohexyl, and 7,8- Epoxy [tricyclo [5.2.1.0] dec-2-yl] yl and the like. As the ethylenically unsaturated group, a (meth) acrylfluorenyl group is preferred. The unsaturated compound containing an alicyclic epoxy group may be used alone or in combination of two or more.
為了將前述含有環氧基之不飽和化合物加成至前述含有羧基之鹼溶性樹脂的羧基部分,可使用已知手法。例如,可讓含有羧基之鹼溶性樹脂與含有環氧基之不飽和化合物,在三乙胺、芐基甲基胺等三級胺;氯化十二基三甲基銨、氯化四甲基銨、氯化四乙基銨、氯化四丁 基銨、氯化芐基三乙基銨等四級銨鹽;吡啶、三苯基膦等觸媒的存在下,在有機溶劑中,以50~150℃的反應溫度,進行數小時~數十小時的反應,來將含有環氧基之不飽和化合物加成至樹脂之羧基。 In order to add the said unsaturated compound containing an epoxy group to the carboxyl part of the said alkali-soluble resin containing a carboxyl group, a well-known method can be used. For example, an alkali-soluble resin containing a carboxyl group and an unsaturated compound containing an epoxy group can be used in tertiary amines such as triethylamine and benzylmethylamine; dodecyltrimethylammonium chloride and tetramethyl chloride Ammonium, tetraethylammonium chloride, tetrabutyl chloride Quaternary ammonium salts such as ammonium chloride and benzyltriethylammonium chloride; in the presence of catalysts such as pyridine and triphenylphosphine, in an organic solvent at a reaction temperature of 50 to 150 ° C for several hours to dozens The reaction lasts for an hour to add an unsaturated compound containing an epoxy group to the carboxyl group of the resin.
前述鹼溶性樹脂(A1-1)的酸價較佳在10~200之範圍,更佳在20~150之範圍,進一步更佳在30~150之範圍。又,鹼溶性樹脂(A1-1)之以GPC測定的以聚苯乙烯換算之重量平均分子量較佳在2,000~100,000之範圍,更佳在4,000~50,000之範圍,進一步更佳在5,000~30,000之範圍。 The acid value of the alkali-soluble resin (A1-1) is preferably in the range of 10 to 200, more preferably in the range of 20 to 150, and even more preferably in the range of 30 to 150. The weight-average molecular weight of the alkali-soluble resin (A1-1) measured by GPC in terms of polystyrene is preferably in the range of 2,000 to 100,000, more preferably in the range of 4,000 to 50,000, and even more preferably in the range of 5,000 to 30,000. range.
又,前述鹼溶性樹脂(A1)之中,更佳為使用醚二聚物或具有金剛烷基等脂環結構之(甲基)丙烯酸酯作為聚合性單體所得到的鹼溶性樹脂(A1-2)。 Among the above-mentioned alkali-soluble resins (A1), more preferred are alkali-soluble resins (A1- obtained by using an ether dimer or a (meth) acrylate having an alicyclic structure such as adamantyl group as a polymerizable monomer. 2).
作為前述醚二聚物,可舉出例如:二甲基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二乙基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二正丙基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二異丙基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二正丁基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二異丁基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(三級丁基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(三級戊基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(十八基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(月桂基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(2-乙基己基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(1-甲氧基乙基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(1-乙氧基乙基) -2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二苄基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二苯基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二環己基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(三級丁基環己基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(二環戊二烯基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(三環癸基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二異莰基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二金剛烷基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二(2-甲基-2-金剛烷基)-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯等。這些之中較佳為:二甲基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二乙基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二環己基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯、二苄基-2,2’-[氧基雙(亞甲基)]雙-2-丙烯酸酯。這些醚二聚物,可僅使用1種,亦可2種以上併用。 Examples of the ether dimer include dimethyl-2,2 '-[oxybis (methylene)] bis-2-acrylate and diethyl-2,2'-[oxy Bis (methylene)] bis-2-acrylate, di-n-propyl-2,2 '-[oxybis (methylene)] bis-2-acrylate, diisopropyl-2,2' -[Oxybis (methylene)] bis-2-acrylate, di-n-butyl-2,2 '-[oxybis (methylene)] bis-2-acrylate, diisobutyl- 2,2 '-[oxybis (methylene)] bis-2-acrylate, bis (tertiary butyl) -2,2'-[oxybis (methylene)] bis-2-acrylic acid Ester, bis (tertiary pentyl) -2,2 '-[oxybis (methylene)] bis-2-acrylate, bis (octadecyl) -2,2'-[oxybis (ethylene (Meth)] bis-2-acrylate, di (lauryl) -2,2 '-[oxybis (methylene)] bis-2-acrylate, bis (2-ethylhexyl) -2, 2 '-[oxybis (methylene)] bis-2-acrylate, bis (1-methoxyethyl) -2,2'-[oxybis (methylene)] bis-2- Acrylate, bis (1-ethoxyethyl) -2,2 '-[oxybis (methylene)] bis-2-acrylate, dibenzyl-2,2'-[oxybis (methylene)] bis-2-acrylate, di Phenyl-2,2 '-[oxybis (methylene)] bis-2-acrylate, dicyclohexyl-2,2'-[oxybis (methylene)] bis-2-acrylate Bis (tri-butylcyclohexyl) -2,2 '-[oxybis (methylene)] bis-2-acrylate, bis (dicyclopentadienyl) -2,2'-[oxy Bis (methylene)] bis-2-acrylate, bis (tricyclodecyl) -2,2 '-[oxybis (methylene)] bis-2-acrylate, diisofluorenyl- 2,2 '-[oxybis (methylene)] bis-2-acrylate, diadamantyl-2,2'-[oxybis (methylene)] bis-2-acrylate, di (2-methyl-2-adamantyl) -2,2 '-[oxybis (methylene)] bis-2-acrylate and the like. Among these, dimethyl-2,2 '-[oxybis (methylene)] bis-2-acrylate, diethyl-2,2'-[oxybis (methylene )] Bis-2-acrylate, dicyclohexyl-2,2 '-[oxybis (methylene)] bis-2-acrylate, dibenzyl-2,2'-[oxybis (methylene (Meth)] bis-2-acrylate. These ether dimers may be used alone or in combination of two or more.
在使用醚二聚物作為鹼溶性樹脂(A1-2)之原料的情形,從抑制凝膠化並得到低分子量的鹼溶性樹脂,成為透明性與耐熱性優良之彩色光阻組成物來看,聚合性單體中醚二聚物的比例較佳在全部聚合性單體之質量的2~60質量%之範圍,更佳在5~55質量%之範圍,進一步更佳在5~50重量%之範圍。 When an ether dimer is used as a raw material of the alkali-soluble resin (A1-2), from the viewpoint of suppressing gelation and obtaining a low-molecular-weight alkali-soluble resin, and being a color photoresist composition having excellent transparency and heat resistance, The proportion of the ether dimer in the polymerizable monomer is preferably in the range of 2 to 60% by mass based on the mass of the total polymerizable monomer, more preferably in the range of 5 to 55% by mass, and even more preferably 5 to 50% by weight. Range.
另一方面,在使用具有金剛烷基等脂環結構之(甲基)丙烯酸酯作為鹼溶性樹脂(A1-2)之原料的情形,從可提升使用顏料作為著色劑(C)時的顏料分散性,並能得到殘留(scum)性質良好的彩色光阻組成物來看,該(甲基)丙烯酸酯的使用比例較佳在全部聚合性單體之質量的0.5~60 質量%之範圍,更佳在1~55質量%之範圍,進一步更佳在5~50重量%之範圍。 On the other hand, when a (meth) acrylic acid ester having an alicyclic structure such as adamantyl is used as a raw material for the alkali-soluble resin (A1-2), the pigment dispersion when using a pigment as the colorant (C) can be improved. From the viewpoint of obtaining a color photoresist composition with good scum properties, the use ratio of the (meth) acrylate is preferably 0.5 to 60% of the mass of all polymerizable monomers. The range of mass% is more preferably in the range of 1 to 55 mass%, and even more preferably in the range of 5 to 50% by weight.
使用於本發明之鹼溶性樹脂(A1)之製造方法,並無特別限制,可採用過去已知的各種方法,而特別以溶液聚合法為佳。其中,聚合溫度或聚合濃度(聚合濃度=[聚合性單體的總重量/(聚合性單體的總重量+溶劑重量)]×100),係依使用之聚合性單體的種類與比率、目標之鹼溶性樹脂的分子量而不同。而關於聚合溫度,較佳係在40~150℃之範圍,聚合溫度更佳係在60~130℃之範圍。又,關於聚合濃度,較佳係在5~50%之範圍,更佳係在10~40%之範圍。 The method for producing the alkali-soluble resin (A1) used in the present invention is not particularly limited, and various conventionally known methods can be adopted, and a solution polymerization method is particularly preferred. Among them, the polymerization temperature or the polymerization concentration (polymerization concentration = [total weight of polymerizable monomer / (total weight of polymerizable monomer + solvent weight)] × 100) is based on the type and ratio of the polymerizable monomer used, The molecular weight of the target alkali-soluble resin varies. The polymerization temperature is preferably in the range of 40 to 150 ° C, and the polymerization temperature is more preferably in the range of 60 to 130 ° C. The polymerization concentration is preferably in the range of 5 to 50%, and more preferably in the range of 10 to 40%.
使用於溶液聚合法之溶劑,可使用通常自由基聚合反應所使用者。具體來說可舉出例如:四氫呋喃、二烷、乙二醇二甲基醚、二乙二醇二甲基醚等醚類;丙酮、甲基乙基酮、甲基異丁基酮、環己酮等酮類;乙酸乙酯、乙酸丁酯、丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等酯類;甲醇、乙醇、異丙醇、正丁醇、乙二醇單甲基醚、丙二醇單甲基醚等醇類;甲苯、二甲苯、乙苯等芳香族烴類;氯仿;二甲基亞碸等。這些溶劑可僅使用1種,亦可2種以上併用。 The solvent used in the solution polymerization method can be used by a user generally used for radical polymerization. Specific examples include: tetrahydrofuran, Ethers such as alkane, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone; ethyl acetate, butyl acetate Esters, propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, and other esters; alcohols such as methanol, ethanol, isopropanol, n-butanol, ethylene glycol monomethyl ether, and propylene glycol monomethyl ether ; Toluene, xylene, ethylbenzene and other aromatic hydrocarbons; chloroform; dimethyl sulfene and so on. These solvents may be used alone or in combination of two or more.
在聚合前述聚合性單體時,依需要亦可使用聚合起始劑。聚合起始劑可舉出例如:氫過氧化異丙苯、氫過氧化二異丙苯、過氧化二(三級丁基)、過氧化月桂醯基、過氧化苯甲醯基、過氧化異丙基碳酸三級丁酯、過氧化-2-乙基己酸三級戊酯、過氧化-2-乙基己酸三級丁酯等 有機過氧化物;2,2’-偶氮雙(異丁腈)、1,1’-偶氮雙(環己烷羰腈)、2,2’-偶氮雙(2,4-二甲基戊腈)、2,2’-偶氮雙(2-甲基丙酸)二甲酯等偶氮化合物等。這些聚合起始劑可僅使用1種,亦可2種以上併用。這些聚合起始劑的使用量,只要依使用之單體的組合、反應條件、目標之鹼溶性樹脂(A1)的分子量等來適當設定即可,無特別限定,而從不會凝膠化並可得到重量平均分子量為數千~數萬的鹼溶性樹脂來看,相對於全部聚合性單體成分,較佳在0.1~15質量%之範圍,更佳在0.5~10質量%之範圍。 When polymerizing the polymerizable monomer, a polymerization initiator may be used as necessary. Examples of the polymerization initiator include cumene hydroperoxide, dicumyl hydroperoxide, di (tertiary butyl) peroxide, lauryl peroxide, benzamyl peroxide, and isopropyl peroxide. Propyl tert-butyl carbonate, tert-amyl peroxy-2-ethylhexanoate, tert-butyl peroxy-2-ethylhexanoate, etc. Organic peroxides; 2,2'-azobis (isobutyronitrile), 1,1'-azobis (cyclohexanecarbonitrile), 2,2'-azobis (2,4-dimethylformaldehyde) Valeronitrile), azo compounds such as 2,2'-azobis (2-methylpropanoic acid) dimethyl, and the like. These polymerization initiators may be used alone or in combination of two or more. The amount of these polymerization initiators to be used may be appropriately set depending on the combination of monomers used, reaction conditions, the molecular weight of the target alkali-soluble resin (A1), and the like, and is not particularly limited. From the viewpoint of obtaining an alkali-soluble resin having a weight-average molecular weight of several thousands to tens of thousands, it is preferably in the range of 0.1 to 15% by mass, more preferably in the range of 0.5 to 10% by mass, relative to the total polymerizable monomer component.
又,為了調整分子量,亦可添加鏈轉移劑。鏈轉移劑可舉出例如:正十二基硫醇、巰基乙酸、巰基乙酸甲酯等硫醇系鏈轉移劑;可舉出α-甲基苯乙烯二聚物等,而較佳為鏈轉移效果高,可減少殘存於反應系內的聚合性單體,且容易取得之正十二基硫醇、巰基乙酸。在使用鏈轉移劑之情形的使用量,只要依使用之單體的組合、反應條件、目標之單體的分子量等來適當設定即可,無特別限定,而從不會凝膠化並可得到重量平均分子量為數千~數萬的鹼溶性樹脂來看,相對於全部單體,較佳在0.1~15質量%之範圍,更佳在0.5~10質量%之範圍。 Further, in order to adjust the molecular weight, a chain transfer agent may be added. Examples of the chain transfer agent include thiol-based chain transfer agents such as n-dodecyl mercaptan, mercaptoacetic acid, and methyl mercaptoacetate; and examples include α-methylstyrene dimer, and chain transfer is preferred. The effect is high, and the polymerizable monomers remaining in the reaction system can be reduced, and n-dodecyl mercaptan and thioglycolic acid can be easily obtained. In the case of using a chain transfer agent, the amount to be used may be appropriately set depending on the combination of monomers used, reaction conditions, the molecular weight of the target monomer, and the like, and is not particularly limited. From the viewpoint of the alkali-soluble resin having a weight-average molecular weight of thousands to tens of thousands, it is preferably in the range of 0.1 to 15% by mass, and more preferably in the range of 0.5 to 10% by mass, relative to all monomers.
使用於本發明之鹼溶性樹脂(A2),係讓以具有官能基之(甲基)丙烯酸系聚合性單體為必須成分,加以聚合所得到的沒有酸性基之聚合物,與具有對該官能基的反應基與酸基之化合物進行反應來得到。鹼溶性樹脂(A2),例如可例示以下的鹼溶性樹脂。 The alkali-soluble resin (A2) used in the present invention is a polymer having no acidic group obtained by polymerizing a (meth) acrylic polymerizable monomer having a functional group as an essential component, and a polymer having the functional group. It is obtained by reacting a reactive group of an acid group with a compound of an acid group. Examples of the alkali-soluble resin (A2) include the following alkali-soluble resin.
‧得到以如(甲基)丙烯酸2-羥乙酯之具有羥基的聚合 性單體為必須成分之聚合物後,加成丁二酸酐、四氫鄰苯二甲酸酐、順丁烯二酸酐等酸酐所得到之鹼溶性樹脂。 ‧ Polymerization with hydroxyl groups such as 2-hydroxyethyl (meth) acrylate Alkali-soluble resins obtained by adding an essential monomer to a polymer of an essential component, and adding acid anhydrides such as succinic anhydride, tetrahydrophthalic anhydride, and maleic anhydride.
‧得到以(甲基)丙烯酸環氧丙酯等具有環氧基之聚合性單體為必須成分的聚合物後,加成N-甲基胺基苯甲酸、N-甲基胺基酚等有胺基與酸基之化合物所得到之鹼溶性樹脂。 ‧After obtaining a polymer containing an epoxy-based polymerizable monomer such as glycidyl (meth) acrylate as an essential component, addition of N-methylaminobenzoic acid, N-methylaminophenol, etc. Alkali-soluble resins obtained from amine and acid compounds.
‧得到以(甲基)丙烯酸2-異氰酸基乙酯等具有異氰酸酯基之聚合性單體為必須成分的聚合物後,加成2-羥基丁酸等具有羥基與酸基之化合物所得到的鹼溶性樹脂。 ‧Obtaining a polymer containing a polymerizable monomer having an isocyanate group such as 2-isocyanate ethyl (meth) acrylate as an essential component, and adding a compound having a hydroxyl group and an acid group such as 2-hydroxybutyric acid Alkali-soluble resin.
前述鹼溶性樹脂(A2)的重量平均分子量,從可得到塗膜形成良好且耐熱性優良之塗膜來看,以GPC測定之以聚苯乙烯換算的重量平均分子量較佳在1,000~200,000之範圍,更佳在2,000~50,000之範圍,進一步更佳在2,000~30,000之範圍。另外,視需要亦可併用使用於前述鹼溶性樹脂(A1)之調製的聚合性單體來得到鹼溶性樹脂(A2)。 The weight-average molecular weight of the alkali-soluble resin (A2) is preferably in the range of 1,000 to 200,000 in terms of polystyrene-equivalent weight-average molecular weight measured by GPC from the viewpoint that a coating film having good coating film formation and excellent heat resistance can be obtained. , More preferably in the range of 2,000 to 50,000, and even more preferably in the range of 2,000 to 30,000. Further, if necessary, a polymerizable monomer prepared for use in the alkali-soluble resin (A1) may be used in combination to obtain an alkali-soluble resin (A2).
而本發明中,「(甲基)丙烯酸」係指甲基丙烯酸與丙烯酸中的一者或兩者,「(甲基)丙烯醯基」係指甲基丙烯醯基與丙烯醯基中的一者或兩者,「(甲基)丙烯酸酯」係指甲基丙烯酸酯與丙烯酸酯中的一者或兩者。 In the present invention, "(meth) acrylic acid" refers to one or both of methacrylic acid and acrylic acid, and "(meth) acrylfluorenyl" refers to one of methacrylfluorenyl and acrylfluorenyl. Either or both, "(meth) acrylate" means one or both of methacrylate and acrylate.
使用於本發明之鹼溶性樹脂(A3),係對含有環氧基之(甲基)丙烯酸酯與其它聚合性單體之共聚物,將不飽和單羧酸加成至該共聚物所具有的環氧基之至少一部分,接著讓經由不飽和單羧酸的加成反應所產生的羥基之 至少一部分對多元羧酸的酸酐作加成反應而得。 The alkali-soluble resin (A3) used in the present invention is a copolymer of (meth) acrylate containing epoxy groups and other polymerizable monomers, and an unsaturated monocarboxylic acid is added to the copolymer. At least a part of the epoxy group, and then the hydroxyl group generated by the addition reaction of the unsaturated monocarboxylic acid At least a part of the polycarboxylic acid anhydride is obtained by an addition reaction.
前述含有環氧基之(甲基)丙烯酸酯可舉出例如:(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸(3,4-環氧環己基)甲酯、(甲基)丙烯酸4-羥丁酯環氧丙基醚等。其中較佳為(甲基)丙烯酸環氧丙酯。這些含有環氧基之(甲基)丙烯酸酯可僅使用1種,亦可2種以上併用。 Examples of the epoxy-containing (meth) acrylate include, for example, glycidyl (meth) acrylate, 3,4-butylene oxide (meth) acrylate, and (3,4) (meth) acrylate -Epoxycyclohexyl) methyl ester, 4-hydroxybutyl (meth) acrylate glycidyl ether, and the like. Among them, propylene oxide (meth) acrylate is preferred. These (meth) acrylates containing an epoxy group may be used alone, or two or more of them may be used in combination.
又,前述鹼溶性樹脂(A3)的原料之含有環氧基之(甲基)丙烯酸酯以外的其它聚合性單體,若使用降莰烯骨架、雙環戊二烯骨架等有脂環式結構之單體,因可提升本發明之彩色光阻組成物的硬化物之耐熱性、機械強度而為優選。 In addition, as for the polymerizable monomers other than the epoxy-containing (meth) acrylate containing the raw material of the alkali-soluble resin (A3), an alicyclic structure such as norbornene skeleton and dicyclopentadiene skeleton is used. The monomer is preferred because it can improve the heat resistance and mechanical strength of the cured product of the color photoresist composition of the present invention.
另外,亦可使用沒有脂環式結構之聚合性單體作為前述含有環氧基之(甲基)丙烯酸酯以外的其它聚合性單體。此種聚合性單體可舉出例如:苯乙烯、苯乙烯的α-、o-、m-、p-烷基、硝基、氰基、醯胺基、酯衍生物等乙烯基芳香族類;丁二烯、2,3-二甲基丁二烯、異戊二烯、氯平等二烯類;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸二級丁酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸新戊酯、(甲基)丙烯酸異戊酯、(甲基)丙烯酸己酯、(甲基)丙烯酸-2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸十二酯、(甲基)丙烯酸環戊 酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸-2-甲基環己酯、(甲基)丙烯酸二環己酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸金剛烷酯、(甲基)丙烯酸炔丙酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸萘酯、(甲基)丙烯酸蒽酯、(甲基)丙烯酸蒽酮酯、(甲基)丙烯酸向日葵酯、(甲基)丙烯酸水楊酯、(甲基)丙烯酸呋喃酯、(甲基)丙烯酸糠酯、(甲基)丙烯酸四氫呋喃、(甲基)丙烯酸哌喃酯、(甲基)丙烯酸芐基、(甲基)丙烯酸苯乙酯、(甲基)丙烯酸甲酚酯、(甲基)丙烯酸-1,1,1-三氟乙酯、(甲基)丙烯酸全氟乙酯、(甲基)丙烯酸全氟正丙酯、(甲基)丙烯酸全氟異丙酯、(甲基)丙烯酸三苯基甲基、(甲基)丙烯酸異丙苯酯、(甲基)丙烯酸-3-(N,N-二甲基胺)丙酯、(甲基)丙烯酸-2-羥乙酯、(甲基)丙烯酸-2-羥丙酯等(甲基)丙烯酸酯類;(甲基)丙烯醯胺、(甲基)丙烯醯N,N-二甲基胺、(甲基)丙烯醯N,N-二乙基胺、(甲基)丙烯醯N,N-二丙基胺、(甲基)丙烯醯-N,N-二異丙基胺、(甲基)丙烯醯蒽基胺等(甲基)丙烯醯胺;(甲基)丙烯醯苯胺、(甲基)丙烯醯腈、丙烯醛、氯乙烯、偏二氯乙烯、氟乙烯、偏二氟乙烯、N-乙烯基吡咯啶酮、乙烯基吡啶、乙酸乙烯酯等乙烯基化合物類;甲基順丁烯二酸二乙酯、順丁烯二酸二乙酯、反丁烯二酸二乙酯、伊康酸二乙酯等不飽和二羧酸二酯類;N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、N-十二基順丁烯二醯亞胺、N-(4-羥基苯基)順丁烯二醯亞胺等單順丁烯二醯亞胺類;N-(甲基)丙烯醯基鄰苯二甲 醯亞胺等。 In addition, a polymerizable monomer having no alicyclic structure may be used as a polymerizable monomer other than the epoxy group-containing (meth) acrylate. Examples of such polymerizable monomers include vinyl aromatics such as styrene, α-, o-, m-, p-alkyl, nitro, cyano, amido, and ester derivatives of styrene. ; Butadiene, 2,3-dimethylbutadiene, isoprene, chloroprene; methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate Ester, isopropyl (meth) acrylate, n-butyl (meth) acrylate, secondary butyl (meth) acrylate, tertiary butyl (meth) acrylate, amyl (meth) acrylate, (formyl) Base) neopentyl acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate, (meth) acrylic acid Dodecyl ester, cyclopentyl (meth) acrylate Ester, cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, dicyclohexyl (meth) acrylate, isoamyl (meth) acrylate, adamantane (meth) acrylate Alkyl ester, propargyl (meth) acrylate, phenyl (meth) acrylate, naphthyl (meth) acrylate, anthracene (meth) acrylate, anthrone (meth) acrylate, (meth) acrylic acid Sunflower ester, salicyl (meth) acrylate, furan (meth) acrylate, furfuryl (meth) acrylate, tetrahydrofuran (meth) acrylate, piperanyl (meth) acrylate, benzyl (meth) acrylate Base, phenethyl (meth) acrylate, cresol (meth) acrylate, -1,1,1-trifluoroethyl (meth) acrylate, perfluoroethyl (meth) acrylate, (methyl) Perfluoron-propyl acrylate, perfluoroisopropyl (meth) acrylate, triphenylmethyl (meth) acrylate, cumene (meth) acrylate, 3- (N) acrylic acid (meth) acrylate (N-dimethylamine) propyl, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate and other (meth) acrylates; (meth) acrylamide , (Meth) acrylic acid N, N-dimethylamine, (meth) acrylic acid N, N-diethylamine (Meth) acrylic acid N, N-dipropylamine, (meth) acrylic acid N-N, N-diisopropylamine, (meth) acrylic acid anthracenylamine, etc. ; (Meth) acrylic acid aniline, (meth) acrylic acid nitrile, acrolein, vinyl chloride, vinylidene chloride, vinyl fluoride, vinylidene fluoride, N-vinyl pyrrolidone, vinyl pyridine, vinyl acetate Vinyl compounds such as esters; unsaturated dicarboxylic acid diesters such as methyl maleate, diethyl maleate, diethyl fumarate, diethyl iconate, etc. Class; N-phenyl-cis-butene-diimide, N-cyclohexyl-cis-butene-diimide, N-dodecyl-cis-butene-diimide, N- (4-hydroxyphenyl) -cis-butene Mono-cis-butene diimides such as enediimides; N- (meth) acrylfluorenyl phthalates 醯 imine and so on.
上述其它聚合性單體之中,從可提升本發明之彩色光阻組成物的硬化物之耐熱性、機械強度來看,較佳為使用苯乙烯、(甲基)丙烯酸芐基及單順丁烯二醯亞胺類之中的至少一種。苯乙烯、(甲基)丙烯酸芐基及單順丁烯二醯亞胺類的使用比例,以其它聚合性單體的總量為基準,較佳為1~70莫耳%,更佳為3~50莫耳%。 Among the other polymerizable monomers mentioned above, from the viewpoint of improving the heat resistance and mechanical strength of the cured product of the color photoresist composition of the present invention, it is preferable to use styrene, benzyl (meth) acrylate, and monocis. At least one of enediimides. The proportion of styrene, benzyl (meth) acrylate, and mono-cis-butene diimide, based on the total amount of other polymerizable monomers, is preferably 1 to 70 mole%, and more preferably 3 ~ 50 Mol%.
其中,前述含有環氧基之(甲基)丙烯酸酯,與前述其它聚合性單體的共聚合反應,可用使用自由基聚合起始劑之溶液聚合法等已知的聚合方法。使用之溶劑只要是對自由基聚合不具活性者即無特別限定,可用通常使用之有機溶劑。 Among them, the copolymerization reaction of the epoxy group-containing (meth) acrylate and the other polymerizable monomers can be performed by a known polymerization method such as a solution polymerization method using a radical polymerization initiator. The solvent to be used is not particularly limited as long as it is inactive to radical polymerization, and an organic solvent generally used may be used.
作為前述含有環氧基之(甲基)丙烯酸酯與前述其它聚合性單體的共聚物,較佳為由5~90莫耳%的源自含有環氧基之(甲基)丙烯酸酯的重複單元,及10~95莫耳%的源自其它自由基聚合性單體的重複單元所構成者,更佳為由20~80莫耳%的前者,及80~20莫耳%的後者所構成者,進一步更佳為由30~70莫耳%的前者,及70~30莫耳%的後者所構成者。 As the copolymer of the epoxy group-containing (meth) acrylate and the other polymerizable monomer, it is preferred that the copolymer derived from the epoxy group-containing (meth) acrylate is repeated in an amount of 5 to 90 mole%. Units composed of 10 to 95 mol% of repeating units derived from other radically polymerizable monomers, more preferably 20 to 80 mol% of the former and 80 to 20 mol% of the latter It is further more preferable that the former is composed of 30 to 70 mol% and the latter is composed of 70 to 30 mol%.
前述鹼溶性樹脂(A3)可藉由讓上述含有環氧基之(甲基)丙烯酸酯與其它聚合性單體的共聚物之環氧基部分,與不飽和單羧酸(聚合性成分)、多元羧酸之酸酐(鹼溶性成分)反應來得到。 The alkali-soluble resin (A3) can be obtained by allowing an epoxy group of a copolymer of the epoxy-containing (meth) acrylate and another polymerizable monomer to react with an unsaturated monocarboxylic acid (polymerizable component), An acid anhydride (an alkali-soluble component) of a polycarboxylic acid is obtained by reaction.
前述不飽和單羧酸可舉出例如:(甲基)丙烯酸、巴豆酸、鄰-、間-、對-乙烯基苯甲酸、α-位為被鹵烷基、 烷氧基、鹵素原子、硝基、或氰基等取代之(甲基)丙烯酸等單羧酸等。這些之中較佳為(甲基)丙烯酸。這些不飽和單羧酸可僅使用1種,亦可2種以上併用。藉由使用此不飽和單羧酸,可對前述鹼溶性樹脂(A3)賦予聚合性。 Examples of the unsaturated monocarboxylic acid include (meth) acrylic acid, crotonic acid, ortho-, meta-, p-vinylbenzoic acid, an a-haloalkyl group at the α-position, Monocarboxylic acids such as (meth) acrylic acid substituted with alkoxy, halogen atom, nitro, or cyano. Among these, (meth) acrylic acid is preferred. These unsaturated monocarboxylic acids may be used alone or in combination of two or more. By using this unsaturated monocarboxylic acid, polymerizability can be imparted to the alkali-soluble resin (A3).
前述不飽和單羧酸,通常較佳係加成至前述共聚物所具有之環氧基的10~100莫耳%,更佳係加成至30~100莫耳%,進一步更佳係加成至50~100莫耳%。 The unsaturated monocarboxylic acid is usually preferably added to 10 to 100 mol% of the epoxy group of the copolymer, more preferably to 30 to 100 mol%, and even more preferably to the addition. To 50 ~ 100 mol%.
前述多元羧酸的酸酐可舉出例如:順丁烯二酸酐、丁二酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、氯橋酸酐等二羧酸的酸酐;偏苯三甲酸酐、均苯四甲酸酐、二苯基酮四羧酸酐、聯苯四羧酸酐等有3個以上羧基之羧酸酐。這些之中,較佳為四氫鄰苯二甲酸酐、丁二酸酐。這些多元羧酸的酸酐可僅使用1種,亦可2種以上併用。藉由使用此多元羧酸之酸酐,可賦予前述鹼溶性樹脂(A3)鹼溶性。 Examples of the anhydride of the polycarboxylic acid include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and chlorobridged anhydride. And other dicarboxylic acid anhydrides; trimellitic anhydride, pyromellitic anhydride, diphenyl ketone tetracarboxylic anhydride, biphenyltetracarboxylic anhydride and other carboxylic acid anhydrides having more than three carboxyl groups. Among these, tetrahydrophthalic anhydride and succinic anhydride are preferred. These polycarboxylic acid anhydrides may be used alone or in combination of two or more. By using the acid anhydride of this polycarboxylic acid, the said alkali-soluble resin (A3) can be made alkali-soluble.
前述多元羧酸的酸酐,通常較佳係被將不飽和單羧酸加成至對前述共聚物所具有的環氧基所生成之羥基的10~100莫耳%加成,更佳係被20~90莫耳%加成,進一步更佳係被30~80莫耳%加成。 The anhydride of the aforementioned polycarboxylic acid is usually preferably an addition of an unsaturated monocarboxylic acid to 10 to 100 mole% of the hydroxyl group generated from the epoxy group of the copolymer, and more preferably 20 ~ 90 Molar% bonus, even better is 30 ~ 80 Molar% bonus.
前述鹼溶性樹脂(A3)之以凝膠滲透層析(GPC)測定的以聚苯乙烯換算之重量平均分子量(Mw)較佳在3,000~100,000之範圍,更佳在5,000~50,000之範圍。另外,前述鹼溶性樹脂(A3)的分散度(Mw/Mn)較佳在2.0~5.0之範圍。 The weight-average molecular weight (Mw) in terms of polystyrene as measured by gel permeation chromatography (GPC) of the alkali-soluble resin (A3) is preferably in the range of 3,000 to 100,000, and more preferably in the range of 5,000 to 50,000. The dispersion degree (Mw / Mn) of the alkali-soluble resin (A3) is preferably in the range of 2.0 to 5.0.
使用於本發明之環氧丙基(甲基)丙烯酸酯樹脂(A4),係例如藉由讓α,β-不飽和單羧酸或在酯部分有羧基之α,β-不飽和單羧酸酯加成至環氧樹脂,再進一步與多元酸酐反應來得到。 The epoxypropyl (meth) acrylate resin (A4) used in the present invention is, for example, by allowing an α, β-unsaturated monocarboxylic acid or an α, β-unsaturated monocarboxylic acid having a carboxyl group in the ester portion. The ester is added to the epoxy resin and further reacted with a polybasic acid anhydride to obtain it.
前述環氧樹脂可使用例如:雙酚A型環氧樹脂(市售品有Japan Epoxy Resin股份有限公司製的「EPIKOTE 828」、「EPIKOTE 1001」、「EPIKOTE 1002」、「EPIKOTE 1004」等)、雙酚A型環氧樹脂的醇性羥基與表氯醇反應所得到之環氧樹脂(市售品有日本化藥股份有限公司製的「NER-1302」(環氧基當量323,軟化點76℃))、雙酚F型樹脂(市售品有Japan Epoxy Resin股份有限公司製的「EPIKOTE 807」、「EP-4001」、「EP-4002」、「EP-4004」等)、雙酚F型環氧樹脂的醇性羥基與表氯醇反應所得到之環氧樹脂(市售品有日本化藥股份有限公司製的「NER-7406」(環氧基當量350,軟化点66℃))、雙酚S型環氧樹脂、聯苯環氧丙基醚(市售品有Japan Epoxy Resin股份有限公司製的「YX-4000」)、酚醛型環氧樹脂(市售品有日本化藥股份有限公司製的「EPPN-201」、Japan Epoxy Resin股份有限公司製的「EP-152」、「EP-154」、Dow Chemical日本股份有限公司製的「DEN-438」)、甲酚酚醛型環氧樹脂(市售品有日本化藥股份有限公司製的「EOCN-102S」、「EOCN-1020」、「EOCN-104S」)、三聚異氰酸三環氧丙酯(市售品有日產化學工業股份有限公司製的「TEPIC」)、參苯酚甲烷型環氧樹脂(市售品有日本化藥股份有限公司製的「EPPN-501」、「EPN-502 」、「EPPN-503」)、茀環氧樹脂(市售品有新日鐵化學股份有限公司製的Cardo環氧樹脂「ESF-300」)、脂環式環氧樹脂(Daicel化學工業股份有限公司製的「CELLOXIDE 2021P」、「CELLOXIDE EHPE」)、將二環戊二烯與酚的反應所生成的酚樹脂環氧丙基化而成之二環戊二烯型環氧樹脂(例如日本化藥股份有限公司製的「XD-1000」,DIC股份有限公司製的「EXA-7200」,日本化藥股份有限公司製的「NC-3000」、「NC-7300」)、具有茀骨架之環氧樹脂(參照日本特開平4-355450號公報)等。這些環氧樹脂可僅使用1種,亦可2種以上併用。 The epoxy resin can be, for example, bisphenol A epoxy resin (commercially available are "EPIKOTE 828", "EPIKOTE 1001", "EPIKOTE 1002", "EPIKOTE 1004", etc., manufactured by Japan Epoxy Resin Co., Ltd.), An epoxy resin obtained by reacting an alcoholic hydroxyl group of bisphenol A epoxy resin with epichlorohydrin (commercially available is "NER-1302" (epoxy equivalent 323, softening point 76, manufactured by Nippon Kayaku Co., Ltd.) ° C)), bisphenol F-type resin (commercially available are "EPIKOTE 807", "EP-4001", "EP-4002", "EP-4004", etc., manufactured by Japan Epoxy Resin Co., Ltd.), bisphenol F Epoxy resin obtained by reacting an alcoholic hydroxyl group of an epoxy resin with epichlorohydrin (commercially available product is "NER-7406" (epoxy equivalent 350, softening point 66 ° C) manufactured by Nippon Kayaku Co., Ltd.) Bisphenol S-type epoxy resin, biphenylepoxypropyl ether (commercially available as "YX-4000" manufactured by Japan Epoxy Resin Co., Ltd.), phenolic epoxy resin (commercially available as Nippon Kayaku Co., Ltd. Co., Ltd.'s "EPPN-201", Japan Epoxy Resin Co., Ltd. "EP-152", "EP-154", Dow Chemical Japan `` DEN-438 '' by Co., Ltd.), cresol novolac epoxy resin (commercially available are EOCN-102S, EOCN-1020, and EOCN-104S by Nippon Kayaku Co., Ltd.) , Triglycidyl isocyanate (commercially available "TEPIC" manufactured by Nissan Chemical Industry Co., Ltd.), ginsenophenol methane type epoxy resin (commercially available is "Nippon Chemical Co., Ltd." EPPN-501 "," EPN-502 "," EPPN-503 "), 茀 epoxy resin (commercially available Cardo epoxy resin" ESF-300 "manufactured by Nippon Steel Chemical Co., Ltd.), alicyclic epoxy resin (Daicel Chemical Industry Co., Ltd. "CELLOXIDE 2021P" and "CELLOXIDE EHPE" manufactured by the company), and dicyclopentadiene-type epoxy resins (e.g., Nippon Chemical Co., Ltd.) obtained by epoxy-propylating a phenol resin produced by the reaction of dicyclopentadiene and phenol. "XD-1000" by Pharma Co., Ltd., "EXA-7200" by DIC Co., Ltd., "NC-3000" and "NC-7300" by Nippon Kayaku Co., Ltd.), Ring with osmium skeleton Oxygen resin (see Japanese Patent Application Laid-Open No. 4-355450) and the like. These epoxy resins may be used alone or in combination of two or more.
環氧樹脂的其它例子可舉出共聚合型環氧樹脂。共聚合型環氧樹脂可舉出例如:讓(甲基)丙烯酸環氧丙酯、(甲基)丙烯醯基甲基環氧環己烷、乙烯基環氧環己烷等有環氧基之單體,與(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、丙烯酸2-羥乙酯、(甲基)丙烯酸2-羥丙酯、(甲基)丙烯酸、苯乙烯、(甲基)丙烯酸苯氧乙酯、(甲基)丙烯酸芐酯、α-甲基苯乙烯、丙三醇單(甲基)丙烯酸酯、具有聚氧伸烷基鏈之(甲基)丙烯酸酯等沒有環氧基的聚合性單體進行共聚合所得到的共聚物。 Other examples of the epoxy resin include a copolymer type epoxy resin. Examples of the copolymerizable epoxy resin include epoxy-based (meth) acrylic acid, (meth) acryl-methyl methyl epoxycyclohexane, and vinyl epoxycyclohexane. Monomers with methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl (meth) acrylate, (meth) Acrylic acid, styrene, phenoxyethyl (meth) acrylate, benzyl (meth) acrylate, α-methylstyrene, glycerol mono (meth) acrylate, A copolymer obtained by copolymerizing a polymerizable monomer having no epoxy group such as a meth) acrylate.
前述具有聚氧伸烷基鏈之(甲基)丙烯酸酯可舉出例如:二乙二醇單(甲基)丙烯酸酯、三乙二醇單(甲基)丙烯酸酯、四乙二醇單(甲基)丙烯酸酯等聚乙二醇單(甲基)丙烯酸酯;甲氧基二乙二醇單(甲基)丙烯酸酯、甲氧基三乙二醇單(甲基)丙烯酸酯、甲氧基四乙二醇單(甲基)丙烯酸酯等烷氧基聚乙二醇(甲基)丙烯酸酯等。 Examples of the (meth) acrylate having a polyoxyalkylene chain include diethylene glycol mono (meth) acrylate, triethylene glycol mono (meth) acrylate, and tetraethylene glycol mono ( Polyethylene glycol mono (meth) acrylate such as meth) acrylate; methoxydiethylene glycol mono (meth) acrylate, methoxytriethylene glycol mono (meth) acrylate, methoxy Alkoxy polyethylene glycol (meth) acrylate and the like such as tetrakiethylene glycol mono (meth) acrylate and the like.
前述共聚合型環氧樹脂的分子量較佳在1,000~200,000之範圍。又,使用作為共聚合型環氧樹脂之原料的具有環氧基之單體的使用量,相對於沒有環氧基之單體,較佳在10~70質量%之範圍,更佳在20~50質量%之範圍。 The molecular weight of the copolymerized epoxy resin is preferably in the range of 1,000 to 200,000. In addition, the amount of the epoxy-containing monomer used as a raw material of the copolymerized epoxy resin is preferably in the range of 10 to 70% by mass, and more preferably in the range of 20 to 70% by weight relative to the monomer having no epoxy group. A range of 50% by mass.
前述共聚合型環氧樹脂之市售品可舉出例如:日油股份有限公司製的「CP-15」、「CP-30」、「CP-50」、「CP-20SA」、「CP-510SA」、「CP-50S」、「CP-50M」、「CP-20MA」等。 Examples of the commercially available products of the copolymerized epoxy resin include "CP-15", "CP-30", "CP-50", "CP-20SA", "CP- 510SA "," CP-50S "," CP-50M "," CP-20MA ", etc.
前述環氧樹脂的分子量,從讓塗膜形成良好,且可防止在α,β-不飽和單羧酸之加成反應時的凝膠化來看,以GPC測定之以聚苯乙烯換算的重量平均分子量,較佳在200~200,000之範圍,更佳在300~100,000之範圍。 The molecular weight of the epoxy resin is good in terms of polystyrene conversion as measured by GPC from the viewpoint of allowing the coating film to form well and preventing gelation during the addition reaction of α, β-unsaturated monocarboxylic acids. The average molecular weight is preferably in the range of 200 to 200,000, and more preferably in the range of 300 to 100,000.
α,β-不飽和單羧酸可舉出例如:伊康酸、巴豆酸、桂皮酸、丙烯酸、甲基丙烯酸等,較佳為丙烯酸及甲基丙烯酸,從讓反應性變好來看更佳為丙烯酸。在酯部分有羧基之α,β-不飽和單羧酸酯可舉出:丙烯酸-2-琥珀醯氧基乙酯、丙烯酸-2-馬來醯氧基乙酯、丙烯酸-2-酞醯氧基乙酯、丙烯酸-2-六氫酞醯氧基乙酯、甲基丙烯酸-2-琥珀醯氧基乙酯、甲基丙烯酸-2-馬來醯氧基乙酯、甲基丙烯酸-2-酞醯氧基乙酯、甲基丙烯酸-2-六氫酞醯氧基乙酯、巴豆酸-2-琥珀醯氧基乙酯等,較佳為丙烯酸-2-馬來醯氧基乙酯及丙烯酸-2-酞醯氧基乙酯,更佳為丙烯酸-2-馬來醯氧基乙酯。這些α,β-不飽和單羧酸及α,β-不飽和單羧酸酯可僅使用1種,亦可2種以上併用。 Examples of the α, β-unsaturated monocarboxylic acid include iconic acid, crotonic acid, cinnamic acid, acrylic acid, and methacrylic acid. Acrylic acid and methacrylic acid are preferable, and the reactivity is more preferable. For acrylic. Examples of α, β-unsaturated monocarboxylic acid esters having a carboxyl group in the ester portion include 2-succinyloxyethyl acrylate, 2-maleyloxyethyl acrylate, and 2-phthaloyl acrylate Ethyl ester, 2-hexahydrophthaloyloxyethyl acrylate, 2-succinyloxyethyl methacrylate, 2-maleoxyethyl methacrylate, 2-methyl acrylate Phthalomethylethoxyethyl, 2-hexahydrophthaloyloxyethyl methacrylate, crotonic acid-2-succinomethyloxyethyl, etc., preferably 2-maleyloxyethyl acrylate and Acrylic-2-phthaloethoxyethyl is more preferred, and 2-maleimoxyethyl acrylate is preferred. These α, β-unsaturated monocarboxylic acids and α, β-unsaturated monocarboxylic acid esters may be used alone or in combination of two or more.
α,β-不飽和單羧酸或其酯與環氧樹脂之加成反應可使用已知方法,可舉出例如在酯化觸媒存在下,於50~150℃之溫度予以反應之方法。酯化觸媒可使用:三乙胺、三甲胺、芐基二甲基胺、芐基二乙基胺等三級胺;氯化四甲銨、氯化四乙銨、氯化十二基三甲基銨等四級銨鹽等。 A known method can be used for the addition reaction of the α, β-unsaturated monocarboxylic acid or an ester thereof with an epoxy resin, and examples thereof include a method of reacting at a temperature of 50 to 150 ° C. in the presence of an esterification catalyst. Esterification catalysts can be used: triethylamine, trimethylamine, benzyldimethylamine, benzyldiethylamine and other tertiary amines; tetramethylammonium chloride, tetraethylammonium chloride, dodecyltrichloride Quaternary ammonium salts such as methyl ammonium and the like.
α,β-不飽和單羧酸或其酯的使用量,相對於作為原料的環氧樹脂之1當量的環氧基,較佳在0.5~1.2當量之範圍,更佳在0.7~1.1當量之範圍。 The amount of α, β-unsaturated monocarboxylic acid or its ester is preferably in the range of 0.5 to 1.2 equivalents, and more preferably in the range of 0.7 to 1.1 equivalents relative to 1 equivalent of epoxy groups in the epoxy resin as the raw material. range.
在經α,β-不飽和羧酸或其酯加成的環氧樹脂中,進一步加成之多元酸酐可舉出例如:順丁烯二酸酐、丁二酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、均苯四甲酸酐、偏苯三甲酸酐、二苯基酮四羧酸二酐、甲基六氫鄰苯二甲酸酐、內亞甲四氫鄰苯二甲酸酐、氯橋酸酐、甲基四氫鄰苯二甲酸酐、聯苯四酸二酐等。這些之中,較佳為順丁烯二酸酐、丁二酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、均苯四甲酸酐、偏苯三甲酸酐、聯苯四酸二酐,更佳為四氫鄰苯二甲酸酐及聯苯四酸二酐。這些多元酸酐可僅使用1種,亦可2種以上併用。 Examples of the polybasic acid anhydride to be added to the epoxy resin added with an α, β-unsaturated carboxylic acid or an ester thereof include maleic anhydride, succinic anhydride, itaconic anhydride, and phthalic acid. Acid anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, pyromellitic anhydride, trimellitic anhydride, diphenylketone tetracarboxylic dianhydride, methylhexahydrophthalic anhydride, internal Methylenetetrahydrophthalic anhydride, chlorobridged anhydride, methyltetrahydrophthalic anhydride, biphenyltetracarboxylic dianhydride, etc. Among these, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, pyromellitic anhydride, and Trimellitic anhydride and biphenyltetracarboxylic dianhydride, more preferably tetrahydrophthalic anhydride and biphenyltetracarboxylic dianhydride. These polybasic acid anhydrides may be used alone or in combination of two or more.
多元酸酐之加成反應亦可使用已知方法,可在與α,β-不飽和羧酸或其酯的加成反應相同之條件下連續進行反應。多元酸酐的使用量從讓鹼性顯影性及塗膜形成變好來看,生成之環氧基(甲基)丙烯酸酯樹脂的酸價較佳在10~150之範圍的量,更佳在20~140之範圍的量。 The addition reaction of the polybasic acid anhydride can also use a known method, and the reaction can be continuously performed under the same conditions as the addition reaction of an α, β-unsaturated carboxylic acid or an ester thereof. The amount of the polybasic acid anhydride is from the viewpoint of improving the alkali developability and coating film formation. The amount of the acid value of the epoxy (meth) acrylate resin to be produced is preferably in the range of 10 to 150, more preferably 20 Amount in the range of ~ 140.
而具有羧基之環氧基(甲基)丙烯酸酯樹脂可例示記載於日本特開平6-49174號公報記載的含有萘之樹脂;記載於日本特開2003-89716號公報、日本特開2003-165830號公報、日本特開2005-325331號公報、日本特開2001-354735號公報記載的含有茀之樹脂;記載於日本特開2005-126674號公報、日本特開2005-55814號公報、日本特開2004-295084號公報等之樹脂。另外,作為市售品,亦可例示Daicel化學工業股份有限公司製的「ACA-200M」等。 An epoxy (meth) acrylate resin having a carboxyl group can be exemplified by a resin containing naphthalene described in Japanese Unexamined Patent Publication No. 6-49174; Japanese Unexamined Patent Publication No. 2003-89716 and Japanese Unexamined Patent Application No. 2003-165830 Japanese Patent Laid-Open No. 2005-325331, Japanese Patent Laid-Open No. 2001-354735, a resin containing thallium; described in Japanese Patent Laid-Open No. 2005-126674, Japanese Patent Laid-Open No. 2005-55814, and Japanese Patent Laid-Open 2004-295084 and other resins. In addition, as a commercially available product, "ACA-200M" manufactured by Daicel Chemical Industry Co., Ltd. can also be exemplified.
使用於本發明之鹼溶性樹脂(A)可使用上述鹼溶性樹脂(A1)~(A4)中的單獨一種,亦可2種以上併用。另外,鹼溶性樹脂(A)藉由與後述之顏料分散劑併用,因為可以形成在基板上的非像素部不殘存未溶解物,且與基板的密着性優良之高濃度的色像素而為優選。具體來說,較佳為將一部分的鹼溶性樹脂(A)與後述之顏料分散劑一起使用於分散處理步驟。在此情形,鹼溶性樹脂(A)相對於顏料,較佳在5~200質量%之範圍內,更佳在10~100質量%之範圍內使用。 The alkali-soluble resin (A) used in the present invention may be used alone or in combination of two or more of the above-mentioned alkali-soluble resins (A1) to (A4). In addition, the alkali-soluble resin (A) is preferably used in combination with a pigment dispersant to be described later, because it can be formed in a non-pixel portion on a substrate without leaving undissolved matter and has a high concentration of color pixels with excellent adhesion to the substrate. . Specifically, it is preferable to use a part of the alkali-soluble resin (A) together with a pigment dispersant described later in the dispersion treatment step. In this case, the alkali-soluble resin (A) is preferably used in a range of 5 to 200% by mass, and more preferably in a range of 10 to 100% by mass, relative to the pigment.
另外,使用於本發明之鹼溶性樹脂(A),亦可使用上述鹼溶性樹脂(A1)~(A4)以外的鹼溶性樹脂。此種樹脂可舉出例如,使用具有酚性羥基為酸性基之聚合性單體作為必須成分所得到的鹼溶性樹脂,與使用具有磺酸基為酸性基之聚合性單體作為必須成分所得到的鹼溶性樹脂等。此處,前述具有酚性羥基之聚合性單體可舉出例如鄰羥基苯乙烯、間羥基苯乙烯、對羥基苯乙烯等。另外 ,還可舉出鍵結至這些單體的芳香環之酚性羥基及乙烯基以外的1個以上氫原子,被取代為烷基、烷氧基、鹵素原子、硝基、氰基、醯胺基而成的化合物等。而具有磺酸基為酸性基之聚合性單體可舉出例如:乙烯基磺酸、苯乙烯磺酸、(甲基)烯丙基磺酸、2-羥基-3-(甲基)烯丙基氧基丙烷磺酸、(甲基)丙烯酸-2-磺乙酯、或它們的鹽等。 In addition, the alkali-soluble resin (A) used in the present invention may be an alkali-soluble resin other than the above-mentioned alkali-soluble resins (A1) to (A4). Examples of such a resin include an alkali-soluble resin obtained using a polymerizable monomer having a phenolic hydroxyl group as an acidic group as an essential component, and a resin obtained using a polymerizable monomer having a sulfonic acid group as an acidic group as an essential component. Alkali-soluble resins. Here, the polymerizable monomer having a phenolic hydroxyl group includes, for example, o-hydroxystyrene, m-hydroxystyrene, and p-hydroxystyrene. In addition In addition, one or more hydrogen atoms other than the phenolic hydroxyl group and the vinyl group of the aromatic ring bonded to these monomers may be substituted with an alkyl group, an alkoxy group, a halogen atom, a nitro group, a cyano group, and amidine. Based compounds. Examples of the polymerizable monomer having a sulfonic acid group as an acidic group include vinylsulfonic acid, styrenesulfonic acid, (meth) allylsulfonic acid, and 2-hydroxy-3- (meth) allyl. Oxypropanesulfonic acid, 2-sulfoethyl (meth) acrylate, or salts thereof.
本發明之彩色光阻組成物中,前述鹼溶性樹脂(A)的含有比例,從讓塗膜的外觀與對基板的密著性變好來看,於總固體成分中較佳在0.1~80質量%之範圍,更佳在1~60質量%之範圍。 In the color photoresist composition of the present invention, the content ratio of the alkali-soluble resin (A) is preferably 0.1 to 80 in the total solid content in terms of improving the appearance of the coating film and adhesion to the substrate. The mass% range is more preferably in the range of 1 to 60 mass%.
使用於本發明之聚合性化合物(B),只要是具有能經由紫外線等活性能量線照射而產生聚合或交聯反應之光聚合性官能基的化合物即可無特別限制地使用。此種聚合性化合物(B)可舉出例如:(甲基)丙烯酸等不飽和羧酸、單羥基化合物與不飽和羧酸之酯、脂肪族多羥基化合物與不飽和羧酸之酯、芳香族聚羥基化合物與不飽和羧酸之酯、得自不飽和羧酸與多元羧酸及前述脂肪族多羥基化合物、芳香族聚羥基化合物等多元羥基化合物的酯化反應之酯、讓聚異氰酸酯化合物與含有(甲基)丙烯醯基之羥基化合物反應而成的有胺基甲酸酯骨架之聚合性化合物等。 The polymerizable compound (B) used in the present invention can be used without particular limitation as long as it is a compound having a photopolymerizable functional group capable of undergoing polymerization or crosslinking reaction by irradiation with active energy rays such as ultraviolet rays. Examples of such polymerizable compounds (B) include unsaturated carboxylic acids such as (meth) acrylic acid, esters of monohydroxy compounds and unsaturated carboxylic acids, esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids, and aromatics. An ester of a polyhydroxy compound and an unsaturated carboxylic acid, an ester obtained from an esterification reaction of an unsaturated carboxylic acid with a polycarboxylic acid and the aforementioned polyhydric hydroxy compound such as an aliphatic polyhydroxy compound, an aromatic polyhydroxy compound, etc., and a polyisocyanate compound and A polymerizable compound having a urethane skeleton and the like formed by reacting a (meth) acrylfluorenyl-containing hydroxy compound.
前述脂肪族多羥基化合物與不飽和羧酸的酯可舉出例如:乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷 三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、丙三醇(甲基)丙烯酸酯等(甲基)丙烯酸酯。又,亦可舉出將這些丙烯酸酯的(甲基)丙烯酸之部分,替代為伊康酸之伊康酸酯、替代為巴豆酸之巴豆酸酯、或替代為順丁烯二酸之順丁烯二酸酯等。 Examples of the ester of the aliphatic polyhydroxy compound and an unsaturated carboxylic acid include ethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, and trimethylolpropane tri (methyl) ) Acrylate, Trimethylolethane Tris (meth) acrylate, neopentaerythritol di (meth) acrylate, neopentaerythritol tri (meth) acrylate, neopentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (Meth) acrylates, such as (di) pentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, glycerol (meth) acrylate and the like. In addition, the (meth) acrylic acid part of these acrylates may be replaced by the itonic acid ester of itaconic acid, the crotonic acid ester of crotonic acid, or the maleic acid of maleic acid. Esterates and the like.
前述芳香族聚羥基化合物與不飽和羧酸的酯可舉出例如:氫醌二(甲基)丙烯酸酯、間苯二酚二(甲基)丙烯酸酯、苯三酚三(甲基)丙烯酸酯等。而得自不飽和羧酸、多元羧酸及多元羥基化合物之酯化反應的酯,可為純物質,亦可為混合物。此種酯可舉出例如:得自(甲基)丙烯酸、鄰苯二甲酸及乙二醇之酯,得自(甲基)丙烯酸、順丁烯二酸及二乙二醇之酯,得自(甲基)丙烯酸、對苯二甲酸及新戊四醇之酯,得自(甲基)丙烯酸、己二酸、丁二醇及丙三醇之酯等。 Examples of the ester of the aromatic polyhydroxy compound and an unsaturated carboxylic acid include hydroquinone di (meth) acrylate, resorcinol di (meth) acrylate, and pyrogallol tri (meth) acrylate. Wait. The ester obtained from the esterification reaction of unsaturated carboxylic acid, polycarboxylic acid and polyhydroxy compound may be a pure substance or a mixture. Examples of such esters include: esters obtained from (meth) acrylic acid, phthalic acid, and ethylene glycol; esters obtained from (meth) acrylic acid, maleic acid, and diethylene glycol; Esters of (meth) acrylic acid, terephthalic acid and neopentyl tetraol, which are obtained from esters of (meth) acrylic acid, adipic acid, butanediol, and glycerol.
前述具有讓聚異氰酸酯化合物與含有(甲基)丙烯醯基之羥基化合物反應而成的胺基甲酸酯骨架之聚合性化合物,可舉出六亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯等脂肪族二異氰酸酯;環己烷二異氰酸酯、異佛爾酮二異氰酸酯等脂環式二異氰酸酯;甲苯二異氰酸酯、二苯基甲烷二異氰酸酯等芳香族二異氰酸酯,與(甲基)丙烯酸2-羥乙酯、3-羥基[1,1,1-三(甲基)丙烯醯氧基甲基]丙烷等具有(甲基)丙烯醯基之羥基化合物的反應 物。 Examples of the polymerizable compound having a urethane skeleton obtained by reacting a polyisocyanate compound with a (meth) acrylfluorene-containing hydroxy compound include hexamethylene diisocyanate and trimethylhexamethylene Aliphatic diisocyanates such as diisocyanate; alicyclic diisocyanates such as cyclohexane diisocyanate and isophorone diisocyanate; aromatic diisocyanates such as toluene diisocyanate and diphenylmethane diisocyanate, and (meth) acrylic acid 2 Reaction of hydroxy compounds having (meth) acrylfluorenyl groups such as 3-hydroxyethyl ester, 3-hydroxy [1,1,1-tris (meth) acryloxymethyl] propane Thing.
上述以外之使用於本發明的聚合性化合物(B)可舉出例如:伸乙雙(甲基)丙烯醯胺等(甲基)丙烯醯胺;鄰苯二甲酸二烯丙酯等烯丙酯;鄰苯二甲酸二乙烯酯等有乙烯基之化合物等。 Examples of the polymerizable compound (B) used in the present invention other than the above include (meth) acrylamide such as ethylene bis (meth) acrylamide, and allyl esters such as diallyl phthalate. ; Vinyl compounds, such as divinyl phthalate.
另外,作為前述聚合性化合物(B),亦可使用具有酸基的聚合性化合物。此具有酸基的聚合性化合物,係例如脂肪族多羥基化合物與不飽和羧酸的酯,而較佳為讓非芳香族羧酸酐反應於脂肪族多羥基化合物的未反應羥基而成的具酸基之多官能單體。又,特佳為前述脂肪族多羥基化合物使用新戊四醇、二新戊四醇者。這些單體可僅使用1種,亦可2種以上併用。另外,亦可併用有酸基的單體與沒有酸基的單體。 In addition, as the polymerizable compound (B), a polymerizable compound having an acid group may be used. The polymerizable compound having an acid group is, for example, an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and is preferably an acid formed by reacting a non-aromatic carboxylic anhydride with an unreacted hydroxyl group of the aliphatic polyhydroxy compound. Polyfunctional monomer. In addition, it is particularly preferable to use neopentyl tetraol and dipentaerythritol as the aliphatic polyhydroxy compound. These monomers may be used alone or in combination of two or more. In addition, a monomer having an acid group and a monomer having no acid group may be used in combination.
此外,具有酸基的多官能聚合性化合物的較佳具體例可舉出例如:來自東亞合成股份有限公司的作為「ARONIX TO-1382」市售之以二新戊四醇六丙烯酸酯、二新戊四醇五丙烯酸酯及二新戊四醇五丙烯酸酯的丁二酸酯為主成分的混合物。此多官能聚合性化合物亦可與其它多官能聚合性化合物併用。 Examples of preferable specific examples of the polyfunctional polymerizable compound having an acid group include, for example, dipentaerythritol hexaacrylate commercially available from East Asia Synthesis Co., Ltd. as "ARONIX TO-1382", dixin A mixture of succinate esters of pentaerythritol pentaacrylate and dinepentaerythritol pentaacrylate as main components. This polyfunctional polymerizable compound may be used in combination with other polyfunctional polymerizable compounds.
前述具有酸基的多官能聚合性化合物之酸價,從讓顯影性、硬化性等變好來看,較佳在0.1~40之範圍,更佳在5~30之範圍。而在併用2種以上酸價不同的多官能聚合性化合物之情形,或在併用沒有酸基的多官能聚合性化合物之情形,較佳為讓混合全部的多官能聚合性化合物後的混合物之酸價在上述之範圍內。 The acid value of the polyfunctional polymerizable compound having an acid group is preferably in the range of 0.1 to 40, and more preferably in the range of 5 to 30 in terms of improving developability and hardenability. In the case where two or more kinds of polyfunctional polymerizable compounds having different acid values are used in combination, or in the case where a polyfunctional polymerizable compound having no acid group is used in combination, the acid of the mixture obtained by mixing all the polyfunctional polymerizable compounds is preferred. The price is within the above range.
本發明之彩色光阻組成物中,前述聚合性化合物(B)的含有比例,在總固體成分中較佳在5~80質量%之範圍,更佳在10~70質量%之範圍,進一步更佳在20~50質量%之範圍。另外,對於後述的著色劑(C)之前述聚合性化合物(B)的比率較佳在5~200質量%,更佳在10~100質量%之範圍,進一步更佳在20~80質量%之範圍。 In the color photoresist composition of the present invention, the content ratio of the polymerizable compound (B) in the total solid content is preferably in a range of 5 to 80% by mass, more preferably in a range of 10 to 70% by mass, and further more It is preferably in a range of 20 to 50% by mass. The ratio of the polymerizable compound (B) to the colorant (C) described later is preferably 5 to 200% by mass, more preferably 10 to 100% by mass, and still more preferably 20 to 80% by mass. range.
作為本發明所使用之著色劑(C),只要是能著色者,顏料或染料均可無特別限制地使用。又,顏料可使用有機顏料、無機顏料中的任一種。前述有機顏料可使用紅色顏料、綠色顏料、藍色顏料、黃色顏料、紫色顏料、橘色顏料、棕色顏料等各色相之顏料。而有機顏料的化學結構可舉出例如:偶氮系、酞菁系、喹吖酮系、苯并咪唑酮系、異吲哚啉酮系、二系、陰丹士林系、苝系等。又,下述的「C.I.」係指比色指數(color index)。 As the coloring agent (C) used in the present invention, any pigment or dye can be used without particular limitation as long as it can be colored. As the pigment, any of an organic pigment and an inorganic pigment can be used. As the organic pigment, pigments of various colors such as a red pigment, a green pigment, a blue pigment, a yellow pigment, a purple pigment, an orange pigment, and a brown pigment can be used. Examples of the chemical structure of the organic pigment include: azo-based, phthalocyanine-based, quinacridone-based, benzimidazolone-based, isoindolinone-based, and Department, Yin Dan Shilin Department, Sacrifice Department, etc. The "CI" below refers to a color index.
前述紅色顏料可舉出例如:C.I.Pigment Red 1、2、3、4、5、6、7、8、9、12、14、15、16、17、21、22、23、31、32、37、38、41、47、48、48:1、48:2、48:3、48:4、49、49:1、49:2、50:1、52:1、52:2、53、53:1、53:2、53:3、57、57:1、57:2、58:4、60、63、63:1、63:2、64、64:1、68、69、81、81:1、81:2、81:3、81:4、83、88、90:1、101、101:1、104、108、108:1、109、112、113、114、122、123、144、146、147、149、151、166、168、169、170、172、173、174、175、176、177、178、179、181、184、185、187、188、190、193、194、200、202、206 、207、208、209、210、214、216、220、221、224、230、231、232、233、235、236、237、238、239、242、243、245、247、249、250、251、253、254、255、256、257、258、259、260、262、263、264、265、266、267、268、269、270、271、272、273、274、275、276等。這些之中,較佳為C.I.Pigment Red 48:1、122、168、177、202、206、207、209、224、242或254,更佳為C.I.Pigment Red 177、209、224或254。 Examples of the red pigment include: CIPigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 37 , 38, 41, 47, 48, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53, 53 : 1, 53: 2, 53: 3, 57, 57: 1, 57: 2, 58: 4, 60, 63, 63: 1, 63: 2, 64, 64: 1, 68, 69, 81, 81 : 1, 81: 2, 81: 3, 81: 4, 83, 88, 90: 1, 101, 101: 1, 104, 108, 108: 1, 109, 112, 113, 114, 122, 123, 144 , 146, 147, 149, 151, 166, 168, 169, 170, 172, 173, 174, 175, 176, 177, 178, 179, 181, 184, 185, 187, 188, 190, 193, 194, 200 , 202, 206 , 207, 208, 209, 210, 214, 216, 220, 221, 224, 230, 231, 232, 233, 235, 236, 237, 238, 239, 242, 243, 245, 247, 249, 250, 251 , 253, 254, 255, 256, 257, 258, 259, 260, 262, 263, 264, 265, 266, 267, 268, 269, 270, 271, 272, 273, 274, 275, 276, etc. Among these, C.I. Pigment Red 48: 1, 122, 168, 177, 202, 206, 207, 209, 224, 242, or 254 is preferable, and C.I. Pigment Red 177, 209, 224, or 254 is more preferable.
前述綠色顏料可舉出例如:C.I.Pigment Green 1、2、4、7、8、10、13、14、15、17、18、19、26、36、45、48、50、51、54、55、58等。這些之中,較佳為C.I.Pigment Green 7、36或58。 Examples of the green pigment include: CIPigment Green 1, 2, 4, 7, 8, 10, 13, 14, 15, 17, 18, 19, 26, 36, 45, 48, 50, 51, 54, 55 , 58 and so on. Among these, C.I. Pigment Green 7, 36, or 58 is preferred.
前述藍色顏料可舉出例如:C.I.Pigment Blue 1、1:2、9、14、15、15:1、15:2、15:3、15:4、15:6、16、17、19、25、27、28、29、33、35、36、56、56:1、60、61、61:1、62、63、66、67、68、71、72、73、74、75、76、78、79等。這些之中,較佳為C.I.Pigment Blue 15、15:1、15:2、15:3、15:4、或15:6,更佳為C.I.Pigment Blue 15:6。 Examples of the blue pigment include: CIPigment Blue 1, 1: 2, 9, 14, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 17, 19, 25, 27, 28, 29, 33, 35, 36, 56, 56: 1, 60, 61, 61: 1, 62, 63, 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79 and so on. Among these, C.I. Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, or 15: 6 is preferable, and C.I.Pigment Blue 15: 6 is more preferable.
前述黃色顏料可舉出例如:C.I.Pigment Yellow 1、1:1、2、3、4、5、6、9、10、12、13、14、16、17、24、31、32、34、35、35:1、36、36:1、37、37:1、40、41、42、43、48、53、55、61、62、62:1、63、65、73、74、75,81、83、87、93、94、95、97、100、101、104、105、108、109、110、111、116、117、119、120 、126、127、127:1、128、129、133、134、136、138、139、142、147、148、150、151、153、154、155、157、158、159、160、161、162、163、164、165、166、167、168、169、170、172、173、174、175、176、180、181、182、183、184、185、188、189、190、191、191:1、192、193、194、195、196、197、198、199、200、202、203、204、205、206、207、208等。這些之中,較佳為C.I.Pigment Yellow 83、117、129、138、139、150、154、155、180或185,更佳為C.I.Pigment Yellow 83、138、139、150或180。 Examples of the yellow pigment include: CIPigment Yellow 1, 1: 1, 2, 3, 4, 5, 6, 9, 10, 12, 13, 14, 16, 17, 24, 31, 32, 34, 35 , 35: 1, 36, 36: 1, 37, 37: 1, 40, 41, 42, 43, 48, 53, 55, 61, 62, 62: 1, 63, 65, 73, 74, 75, 81 , 83, 87, 93, 94, 95, 97, 100, 101, 104, 105, 108, 109, 110, 111, 116, 117, 119, 120 , 126, 127, 127: 1, 128, 129, 133, 134, 136, 138, 139, 142, 147, 148, 150, 151, 153, 154, 155, 157, 158, 159, 160, 161, 162 , 163, 164, 165, 166, 167, 168, 169, 170, 172, 173, 174, 175, 176, 180, 181, 182, 183, 184, 185, 188, 189, 190, 191, 191: 1 , 192, 193, 194, 195, 196, 197, 198, 199, 200, 202, 203, 204, 205, 206, 207, 208, etc. Among these, C.I. Pigment Yellow 83, 117, 129, 138, 139, 150, 154, 155, 180, or 185 is preferable, and C.I. Pigment Yellow 83, 138, 139, 150, or 180 is more preferable.
前述紫色顏料可舉出例如:C.I.Pigment Violet 1、1:1、2、2:2、3、3:1、3:3、5、5:1、14、15、16、19、23、25、27、29、31、32、37、39、42、44、47、49、50等。這些之中,較佳為C.I.Pigment Violet 19或23,更佳為C.I.Pigment Violet 23。 Examples of the purple pigment include: CIPigment Violet 1, 1, 1, 2, 2: 2, 3, 3: 1, 3: 3, 5, 5: 1, 14, 15, 16, 19, 23, 25 , 27, 29, 31, 32, 37, 39, 42, 44, 47, 49, 50, etc. Among these, C.I.Pigment Violet 19 or 23 is preferable, and C.I.Pigment Violet 23 is more preferable.
前述橘色顏料可舉出例如:C.I.Pigment Orange 1、2、5、13、16、17、19、20、21、22、23、24、34、36、38、39、43、46、48、49、61、62、64、65、67、68、69、70、71、72、73、74、75、77、78、79等。這些之中較佳為C.I.Pigment Orange 38或71。 Examples of the orange pigment include: CIPigment Orange 1, 2, 5, 13, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 43, 46, 48, 49, 61, 62, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79 and so on. Among these, C.I. Pigment Orange 38 or 71 is preferable.
由於使用於液晶顯示裝置及有機EL顯示裝置的彩色濾光片之3原色的各像素係紅(R)、綠(G)、藍(B),故以前述紅色顏料、綠色顏料及藍色顏料為主成分,而以提升色彩再現性之目的,亦可使用黃色、紫色、橘色等色的有機顏料來作色相調整。 Since each pixel of the three primary colors of the color filter used in the liquid crystal display device and the organic EL display device is red (R), green (G), and blue (B), the aforementioned red pigment, green pigment, and blue pigment are used. As the main component, and for the purpose of improving color reproducibility, yellow, purple, orange and other organic pigments can also be used for hue adjustment.
而前述無機顏料可舉出例如:硫酸鋇、硫酸鉛、氧化鈦、鉻黃、三氧化二鐵、氧化鉻等。 Examples of the inorganic pigment include barium sulfate, lead sulfate, titanium oxide, chrome yellow, ferric oxide, and chromium oxide.
其中,前述有機顏料的平均粒徑,為了提高彩色液晶顯示裝置及有機EL顯示裝置的輝度,較佳為1μm以下,更佳為0.5μm以下,進一步更佳為0.3μm以下。較佳將有機顏料分散處理成如此之平均粒徑再使用。而前述有機顏料的平均一次粒徑較佳為100nm以下,更佳為50nm以下,進一步更佳為40nm以下,特佳為10~30nm之範圍。其中,有機顏料的平均粒徑係以動態光散射式粒度分布計測定,能以例如日機裝股份有限公司製的NanoTrac粒度分布測定裝置「UPA-EX150」、「UPA-EX250」等來測定。 The average particle diameter of the organic pigment is preferably 1 μm or less, more preferably 0.5 μm or less, and even more preferably 0.3 μm or less in order to improve the brightness of the color liquid crystal display device and the organic EL display device. It is preferred to disperse the organic pigment to such an average particle diameter before use. The average primary particle diameter of the organic pigment is preferably 100 nm or less, more preferably 50 nm or less, even more preferably 40 nm or less, and particularly preferably in a range of 10 to 30 nm. Here, the average particle diameter of the organic pigment is measured with a dynamic light scattering particle size distribution meter, and can be measured with, for example, NanoTrac particle size distribution measuring devices "UPA-EX150" and "UPA-EX250" manufactured by Nikkiso Co., Ltd.
另一方面,在將本發明之彩色光阻組成物使用在形成黑色矩陣(BM)之情形所使用的著色劑(C),只要是黑色即無特別限制,可舉出:碳黑、燈黑、乙炔黑、骨黑、熱裂法碳黑、槽法碳黑、爐黑、石墨、鐵黑、及鈦黑等。而混合2種以上有機顏料,以混色來成為黑色的組合也沒關係。這些之中,從遮光率、圖像特性的觀點來看,較佳為碳黑、鈦黑。 On the other hand, the coloring agent (C) used when the color photoresist composition of the present invention is used to form a black matrix (BM) is not particularly limited as long as it is black, and examples include carbon black and lamp black. , Acetylene black, bone black, thermal cracking carbon black, channel black, furnace black, graphite, iron black, and titanium black. It does not matter if you mix two or more organic pigments and mix them to make them black. Among these, carbon black and titanium black are preferred from the viewpoints of light shielding rate and image characteristics.
前述碳黑的市售品,例如三菱化學股份有限公司製的可舉出MA7、MA8、MA11、MA100、MA100R、MA220、MA230、MA600、#5、#10、#20、#25、#30、#32、#33、#40、#44、#45、#47、#50、#52、#55、#650、#750、#850、#950、#960、#970、#980、#990、#1000、#2200、#2300、#2350、#2400、#2600、#3050、#3150、#3250 、#3600、#3750、#3950、#4000、#4010、OIL7B、OIL9B、OIL11B、OIL30B、OIL31B等,Evonik Degussa Japan股份有限公司製的可舉出Printex3、Printex3OP、Printex30、Printex30OP、Printex40、Printex45、Printex55、Printex60、Printex75、Printex80、Printex85、Printex90、Printex A、Printex L、Printex G、Printex P、Printex U、Printex V、Printex G、SpecialBlack550、SpecialBlack350、SpecialBlack250、SpecialBlack100、SpecialBlack6、SpecialBlack5、SpecialBlack4、Color Black FW1、Color Black FW2、Color Black FW2V、Color Black FW18、Color Black FW18、Color Black FW200、Color Black S160、Color Black S170等,Cabot Japan股份有限公司製的可舉出MonarcH120、MonarcH280、MonarcH460、MonarcH800、MonarcH880、MonarcH900、MonarcH1000、MonarcH1100、MonarcH1300、MonarcH1400、MonarcH4630、REGAL99、REGAL99R、REGAL415、REGAL415R、REGAL250、REGAL250R、REGAL330、REGAL400R、REGAL55R0、REGAL660R、BLACK PEARLS480、PEARLS130、VULCAN XC72R、ELFTEX-8等,Columbia Carbon公司製的可舉出RAVEN11、RAVEN14、RAVEN15、RAVEN16、RAVEN22RAVEN30、RAVEN35、RAVEN40、RAVEN410、RAVEN420、RAVEN450、RAVEN500、RAVEN780、RAVEN850、RAVEN890H、RAVEN1000、RAVEN1020、RAVEN1040、RAVEN1060U、RAVEN1080U、RAVEN1170、RAVEN1190U、RAVEN1250、RAVEN1500、RAVEN2000 、RAVEN2500U、RAVEN3500、RAVEN5000、RAVEN5250、RAVEN5750、RAVEN7000等。 Examples of the commercially available carbon black include MA7, MA8, MA11, MA100, MA100R, MA220, MA230, MA600, # 5, # 10, # 20, # 25, # 30, and the like manufactured by Mitsubishi Chemical Corporation. # 32, # 33, # 40, # 44, # 45, # 47, # 50, # 52, # 55, # 650, # 750, # 850, # 950, # 960, # 970, # 980, # 990 , # 1000, # 2200, # 2300, # 2350, # 2400, # 2600, # 3050, # 3150, # 3250 , # 3600, # 3750, # 3950, # 4000, # 4010, OIL7B, OIL9B, OIL11B, OIL30B, OIL31B, etc. Evonik Degussa Japan Co., Ltd. can include Printex3, Printex3OP, Printex30, Printex30OP, Printex40, Printex45, Printex55, Printex60, Printex75, Printex80, Printex85, Printex90, Printex A, Printex L, Printex G, Printex P, Printex U, Printex V, Printex G, SpecialBlack550, SpecialBlack350, SpecialBlack250, SpecialBlack100, SpecialBlack6, SpecialBlack5, SpecialBlack4, Color Black FW1 Color Black FW2 Color Black FW2V Color Black FW18 Color Black FW18 Color Black FW200 Color Black S160 Color Black S170 MonarcH900, MonarcH1000, MonarcH1100, MonarcH1300, MonarcH1400, MonarcH4630, REGAL99, REGAL99R, REGAL415, REGAL415R, REGAL250, REGAL250R, REGAL330, REGAL400R, REGAL55R0, REGAL660R, BLACK PEARLS480, PEARLS130V, PEARLS130V TEX-8, etc., manufactured by Columbia Carbon include RAVEN11, RAVEN14, RAVEN15, RAVEN16, RAVEN22RAVEN30, RAVEN35, RAVEN40, RAVEN410, RAVEN420, RAVEN450, RAVEN500, RAVEN780, RAVEN850, RAVEN890H, RAVEN1000, RAVEN1020, RAVEN1040, RAVEN1060U, RAVEN1080 , RAVEN1170, RAVEN1190U, RAVEN1250, RAVEN1500, RAVEN2000 , RAVEN2500U, RAVEN3500, RAVEN5000, RAVEN5250, RAVEN5750, RAVEN7000, etc.
上述的碳黑之中,作為具有彩色濾光片的黑色矩陣所要求之高光學濃度及高表面電阻率者,較佳為使用以樹脂被覆之碳黑。而以樹脂被覆之碳黑能藉由例如以記載於日本特開平9-26571號公報、日本特開平9-71733號公報、日本特開平9-95625號公報、日本特開平9-238863號公報或日本特開平11-60989號公報之方法,處理已知的碳黑來得到。 Among the above-mentioned carbon blacks, as the high optical density and high surface resistivity required for a black matrix having a color filter, it is preferable to use a resin-coated carbon black. The carbon black coated with a resin can be described in, for example, Japanese Patent Laid-Open No. 9-26571, Japanese Patent Laid-Open No. 9-71733, Japanese Patent Laid-Open No. 9-95625, Japanese Patent Laid-Open No. 9-238863 The method disclosed in Japanese Patent Laid-Open No. 11-60989 is obtained by treating known carbon black.
而前述鈦黑的製作方法可舉出:日本特開昭49-5432號公報所記載,在還原環境下加熱並還原二氧化鈦與金屬鈦的混合體之方法;日本特開昭57-205322號公報所記載,在包含氫之還原環境中,把高溫水解四氯化鈦所得到的超微細二氧化鈦加以還原之方法;日本特開昭60-65069號公報及日本特開昭61-201610號公報所記載,在氨存在下將二氧化鈦或氫氧化鈦高溫還原之方法;日本特開昭61-201610號公報記載之,讓釩化合物附著於二氧化鈦或氫氧化鈦,並在氨存在下加以高溫還原之方法等。鈦黑的市售品可舉出例如:Mitsubishi Material股份有限公司製的鈦黑10S、12S、13R、13M、13M-C等。 The method for producing the aforementioned titanium black includes the method described in Japanese Patent Application Laid-Open No. 49-5432, which is a method of heating and reducing a mixture of titanium dioxide and metallic titanium in a reducing environment; Japanese Patent Application Laid-Open No. 57-205322 It describes the method of reducing ultrafine titanium dioxide obtained by high temperature hydrolysis of titanium tetrachloride in a reducing environment containing hydrogen; it is described in Japanese Patent Application Laid-Open No. 60-65069 and Japanese Patent Application Laid-Open No. 61-201610. A method for high-temperature reduction of titanium dioxide or titanium hydroxide in the presence of ammonia; a method described in Japanese Patent Application Laid-Open No. 61-201610, a method in which a vanadium compound is attached to titanium dioxide or titanium hydroxide, and high-temperature reduction is performed in the presence of ammonia. Examples of commercially available titanium blacks include titanium blacks 10S, 12S, 13R, 13M, 13M-C, and the like manufactured by Mitsubishi Material Co., Ltd.
混合2種以上有機顏料,藉由混色而成為黑色的組合,可舉出混合紅色、綠色、藍色三色的顏料所成之黑色顏料。為了調製黑色顏料所能混合使用之色材可舉出:Victoria Pure Blue(C.I.42595)、Auramine O(C.I.41000)、Cathilon Brilliant Flavin(Basic 13)、Rhodamine 6GCP (C.I.45160)、Rhodamine B(C.I.45170)、Safranine OK70:100(C.I.50240)、Erioglaucine X(C.I.42080)、No.120/Lionel Yellow(C.I.21090)、Lionel Yellow GRO(C.I.21090)、Symuler Fast Yellow 8GF(C.I.21105)、Benzidine Yellow 4T-564D(C.I.21095)、Symuler Fast Red 4015(C.I.12355)、Lionel Red 7B4401(C.I.15850)、Fastogen Blue TGR-L(C.I.74160)、Lionel Blue SM(C.I.26150)、Lionel Blue ES(C.I.Pigment Blue 15:6)、Lionogen Red GD(C.I.Pigment Red 168)、Lionel Green 2YS(C.I.Pigment Green 36)等。 A combination in which two or more organic pigments are mixed and the mixture becomes black by mixing colors includes a black pigment made by mixing red, green, and blue pigments. Examples of color materials that can be mixed for the preparation of black pigments include: Victoria Pure Blue (C.I.42595), Auramine O (C.I.41000), Cathilon Brilliant Flavin (Basic 13), Rhodamine 6GCP (CI45160), Rhodamine B (CI45170), Safranine OK70: 100 (CI50240), Erioglaucine X (CI42080), No. 120 / Lionel Yellow (CI21090), Lionel Yellow GRO (CI21090), Symuler Fast Yellow 8GF (CI21105), Benzidine Yellow 4T-564D (CI21095), Symuler Fast Red 4015 (CI12355), Lionel Red 7B4401 (CI15850), Fastogen Blue TGR-L (CI74160), Lionel Blue SM (CI26150) , Lionel Blue ES (CIPigment Blue 15: 6), Lionogen Red GD (CIPigment Red 168), Lionel Green 2YS (CIPigment Green 36), etc.
為了調製黑色顏料所能混合使用之其它色材可舉出例如:C.I.黃色顏料20、24、86、93、109、110、117、125、137、138、147、148、153、154、166,C.I.橘色顏料36、43、51、55、59、61,C.I.紅色顏料9、97、122、123、149、168、177、180、192、215、216、217、220、223、224、226、227、228、240,C.I.紫色顏料19、23、29、30、37、40、50,C.I.藍色顏料15、15:1、15:4、22、60、64,C.I.綠色顏料7,C.I.棕色顏料23、25、26等。 Other color materials that can be mixed for use in the preparation of black pigments include, for example: CI yellow pigments 20, 24, 86, 93, 109, 110, 117, 125, 137, 138, 147, 148, 153, 154, 166, CI orange pigment 36, 43, 51, 55, 59, 61, CI red pigment 9, 97, 122, 123, 149, 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226 , 227, 228, 240, CI purple pigment 19, 23, 29, 30, 37, 40, 50, CI blue pigment 15, 15: 1, 15: 4, 22, 60, 64, CI green pigment 7, CI Brown pigments 23, 25, 26 and so on.
另一方面,在使用碳黑作為黑色顏料的情形,平均一次粒徑較佳在0.01~0.08μm之範圍,從顯影性良好來看更佳係在0.02~0.05μm之範圍。而使用之碳黑的鄰苯二甲酸二丁酯(以下簡稱為「DBP」。)吸收量較佳在40~100cm3/100g之範圍,而從分散性/顯影性良好來看,更佳在50~80cm3/100g之範圍。此外,使用之碳黑的以 BET法測得的比表面積較佳在50~120m2/g之範圍,從分散安定性良好來看,更佳在60~95m2/g之範圍。 On the other hand, when carbon black is used as the black pigment, the average primary particle diameter is preferably in the range of 0.01 to 0.08 μm, and more preferably in the range of 0.02 to 0.05 μm from the viewpoint of good developability. The carbon black dibutyl phthalate (hereinafter referred to as "DBP") absorption is preferably in the range of 40 ~ 100cm 3 / 100g, and from the viewpoint of good dispersibility / developing property, it is more preferable. The range is 50 ~ 80cm 3 / 100g. In addition, the specific surface area of the carbon black used measured by the BET method is preferably in the range of 50 to 120 m 2 / g, and from the viewpoint of good dispersion stability, more preferably in the range of 60 to 95 m 2 / g.
另外,碳黑的粒子形狀與有機顏料等不同,存在稱為1次粒子熔接而成的結構體之狀態,並有以後處理在粒子表面形成微細的細孔之情況。因此,為了表示碳黑的粒子形狀,一般除了以與前述有機顏料相同之方法所求得的1次粒子之平均粒徑以外,較佳測定DBP吸收量(JIS K6221)與得自BET法之比表面積(JIS K6217)作為結構體與細孔量的指標。 In addition, the particle shape of carbon black is different from organic pigments and the like, and it may be in a state called a structure formed by primary particle fusion, and fine pores may be formed on the particle surface after the treatment. Therefore, in order to express the particle shape of carbon black, it is generally better to measure the ratio of the DBP absorption (JIS K6221) to the BET method, except for the average particle diameter of the primary particles obtained by the same method as the organic pigment. The surface area (JIS K6217) is used as an index of the structure and the amount of pores.
另外,亦可使用染料作為本發明所用之著色劑。此種染料可舉出例如:偶氮系染料、蒽醌系染料、酞菁系染料、醌亞胺系染料、喹啉系染料、硝基系染料、羰基系染料、次甲基系染料等。 In addition, a dye may be used as a coloring agent used in the present invention. Examples of such dyes include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinone imine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes.
前述偶氮系染料可舉出例如:C.I.Acid Yellow 11、C.I.Acid Orange 7、C.I.Acid Red 37、C.I.Acid Red 180、C.I.Acid Blue 29、C.I.Direct Red 28、C.I.Direct Red 83、C.I.Direct Yellow 12、C.I.Direct Orange 26、C.I.Direct Green 28、C.I.Direct Green 59、C.I.Reactive Yellow 2、C.I.Reactive Red 17、C.I.Reactive Red 120、C.I.Reactive Black 5、C.I.Disperse Orange 5、C.I.Disperse Red 58、C.I.Disperse Blue 165、C.I.Basic Blue41、C.I.Basic Red 18、C.I.Mordant Red 7、C.I.Mordant Yellow 5、C.I.Mordant Black 7等。 Examples of the azo dye include: CIacid Yellow 11, CIacid Orange 7, CIacid Red 37, CIacid Red 180, CIacid Blue 29, CIDirect Red 28, CIDirect Red 83, CIDirect Yellow 12, CIDirect Orange 26, CIDirect Green 28, CIDirect Green 59, CIReactive Yellow 2, CIReactive Red 17, CIReactive Red 120, CIReactive Black 5, CIDisperse Orange 5, CIDisperse Red 58, CIDisperse Blue 165, CIBasic Blue41, CIBasic Red 18, CIMordant Red 7, CIMordant Yellow 5, CIMordant Black 7, etc.
前述蒽醌系染料可舉出例如:C.I.Vat Blue 4、C.I.Acid Blue 40、C.I.Acid Green 25、C.I.Reactive Blue 19、C.I.Reactive Blue 49、C.I.Disperse Red 60、C.I.Disperse Blue 56、C.I.Disperse Blue 60等。 Examples of the anthraquinone dye include C.I.Vat Blue 4, C.I.Acid Blue 40, C.I.Acid Green 25, and C.I.Reactive Blue. 19. C.I.Reactive Blue 49, C.I.Disperse Red 60, C.I.Disperse Blue 56, C.I.Disperse Blue 60, etc.
前述酞菁系染料可舉出例如C.I.Vat Blue5等,前述醌亞胺系染料可舉出例如C.I.Basic Blue 3、C.I.Basic Blue 9等,前述喹啉系染料可舉出例如C.I.Solvent Yellow 33、C.I.Acid Yellow 3、C.I.Disperse Yellow 64等,前述硝基系染料可舉出例如C.I.Acid Yellow 1、C.I.Acid Orange 3、C.I.Disperse Yellow 42等。 Examples of the phthalocyanine dyes include CIVat Blue5, and examples of the quinimine dyes include CIBasic Blue 3, CIBasic Blue 9, and the like. Examples of the quinoline dyes include CISolvent Yellow 33, CI. Acid Yellow 3, CIDisperse Yellow 64, and the like. Examples of the nitro dye include CIacid Yellow 1, CIacid Orange 3, and CIDisperse Yellow 42.
上述舉出的著色劑(C)之中,就最終得到的塗膜之耐光性、耐氣候性及牢固性優良的點來說,較佳為使用顏料,而為了進行色相的調整,亦可依需要將染料併用於顏料。 Among the colorants (C) listed above, in terms of the light resistance, weather resistance, and fastness of the coating film finally obtained, it is preferable to use a pigment, and in order to adjust the hue, It is necessary to use dyes in combination with pigments.
本發明之彩色光阻組成物中的前述著色劑(C)之含有比率,在總固體成分中較佳在1質量%以上,更佳在5~80質量%之範圍,進一步更佳在5~70質量%之範圍。 The content ratio of the colorant (C) in the color photoresist composition of the present invention is preferably 1% by mass or more, more preferably 5 to 80% by mass, and still more preferably 5 to 80% by mass in the total solid content. A range of 70% by mass.
而在使用本發明之彩色光阻組成物來形成彩色濾光片之紅(R)、綠(G)、藍(B)各像素的情形,本發明之彩色光阻組成物中的前述著色劑(C)之含有比率,在總固體成分中較佳在5~60質量%之範圍,更佳在10~50質量%之範圍。 In the case where the red (R), green (G), and blue (B) pixels of the color filter are formed using the color photoresist composition of the present invention, the aforementioned colorant in the color photoresist composition of the present invention The content ratio of (C) is preferably in a range of 5 to 60% by mass, and more preferably in a range of 10 to 50% by mass in the total solid content.
另外,在使用本發明之彩色光阻組成物來形成彩色濾光片之黑色矩陣的情形,本發明之彩色光阻組成物中的前述著色劑(C)之含有比率,在總固體成分中較佳在20~80質量%之範圍,更佳在30~70質量%之範圍。 In addition, in the case where the black matrix of a color filter is formed using the color photoresist composition of the present invention, the content ratio of the colorant (C) in the color photoresist composition of the present invention is relatively small in the total solid content. It is preferably in a range of 20 to 80% by mass, and more preferably in a range of 30 to 70% by mass.
本發明之彩色光阻組成物中,在前述著色劑(C)為顏 料的情形,較佳使用預先調製使用分散劑在有機溶劑中分散所調製成的顏料分散液。前述分散劑可舉出:界面活性劑;顏料的中間體或衍生物;染料之中間體或衍生物;聚醯胺系樹脂、聚胺基甲酸酯系樹脂、聚酯系樹脂、丙烯酸系樹脂等樹脂型分散劑等。這些之中,較佳為具有氮原子之接枝共聚物、具有氮原子之丙烯酸系嵌段共聚物、胺基甲酸酯樹脂分散劑等。這些分散劑因具有氮原子,氮原子對顏料表面具親和性,並藉由提高氮原子以外之部分對於媒質的親和性,提升分散安定性。又,這些分散劑可使用單獨一種,亦可2種以上併用。 In the color photoresist composition of the present invention, the colorant (C) is a pigment. In the case of raw materials, it is preferred to use a pigment dispersion liquid prepared in advance by dispersing it in an organic solvent using a dispersant. Examples of the dispersant include: surfactants; intermediates or derivatives of pigments; intermediates or derivatives of dyes; polyamide resins, polyurethane resins, polyester resins, and acrylic resins And other resin-based dispersants. Among these, a graft copolymer having a nitrogen atom, an acrylic block copolymer having a nitrogen atom, a urethane resin dispersant, and the like are preferred. These dispersants have nitrogen atoms, and the nitrogen atoms have an affinity for the pigment surface, and the dispersion stability is improved by increasing the affinity of the parts other than the nitrogen atoms to the medium. Moreover, these dispersing agents may be used individually by 1 type, and may use 2 or more types together.
前述分散劑的市售品可舉出:Efka Chemicals公司製的「EFKA」系列(「EFKA 46」等);BYK Japan股份有限公司製的「Disperbyk」系列、「BYK」系列(「BYK-160」、「BYK-161」、「BYK-2001」等);Lubrizol Japan股份有限公司製的「SolSPerSe」系列;信越化學工業股份有限公司製的「KP」系列、共榮社化學股份有限公司製的「POLYFLOW」系列;楠本化成股份有限公司製的「DISPARLON」系列;Ajinomoto Fine-Techno股份有限公司製的「AJISPER」系列(「AJISPER PB-814」等)等。 Examples of commercially available dispersants include: "EFKA" series ("EFKA 46", etc.) manufactured by Efka Chemicals; "Disperbyk" series, "BYK" series ("BYK-160"), manufactured by BYK Japan Co., Ltd. , "BYK-161", "BYK-2001", etc.); "SolSPerSe" series by Lubrizol Japan Co., Ltd .; "KP" series by Shin-Etsu Chemical Industry Co., Ltd., and "KP" by Kyoeisha Chemical Co., Ltd. "Polyflow" series; "DISPARLON" series manufactured by Kusumoto Chemical Co., Ltd .; "AJISPER" series ("AJISPER PB-814", etc.) manufactured by Ajinomoto Fine-Techno Co., Ltd.
而在調製前述顏料分散液時使用的有機溶劑,可舉出例如:丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯等乙酸酯系溶劑;乙氧基丙酸酯等丙酸酯系溶劑;甲苯、二甲苯、甲氧基苯等芳香族系溶劑;丁基賽路蘇、丙二醇單甲基醚、二乙二醇乙基醚、二乙二醇二甲基醚等醚系溶劑;甲基乙基酮、甲基異丁基酮、環己酮等酮 系溶劑;己烷等脂肪族烴系溶劑;N,N-二甲基甲醯胺、γ-丁內醯胺、N-甲基-2-吡咯啶酮等氮化合物系溶劑;γ-丁內酯等內酯系溶劑;胺甲酸酯等。這些溶劑可使用單獨一種,亦可2種以上併用。 Examples of the organic solvent used in preparing the pigment dispersion liquid include acetate-based solvents such as propylene glycol monomethyl ether acetate and propylene glycol monoethyl ether acetate; and acrylic solvents such as ethoxypropionate. Ester-based solvents; Aromatic solvents such as toluene, xylene, and methoxybenzene; Ethers such as butylcellulose, propylene glycol monomethyl ether, diethylene glycol ethyl ether, and diethylene glycol dimethyl ether Series solvents; ketones such as methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone Solvent; aliphatic hydrocarbon solvents such as hexane; nitrogen compound solvents such as N, N-dimethylformamidine, γ-butyrolactam, N-methyl-2-pyrrolidone; γ-butane Lactone-based solvents such as esters; urethanes and the like. These solvents may be used alone or in combination of two or more.
作為前述顏料分散液的調製方法,可舉出經過著色劑(C)的混練分散步驟及微分散步驟之方法,僅進行微分散步驟之方法等。前述混練分散步驟,是將著色劑(C)、鹼溶性樹脂(A)的一部分、及視需要的前述分散劑加以混合並混練。使用於混練的機械可舉出雙輥、三輥、球磨機、石磨機、分散機、捏合機、共捏合機、均質機、攪拌機、單軸或雙軸之擠出機等,藉由邊使用這些混練機施加強剪切力邊加以分散,可將著色劑分散。另外,著色劑(C)較佳在進行上述混練前,以鹽磨法等先將粒子尺寸微細化。 Examples of the method for preparing the pigment dispersion include a method in which a kneading and dispersing step and a microdispersing step of the colorant (C) are performed, and a method in which only the microdispersing step is performed. In the kneading and dispersing step, the colorant (C), a part of the alkali-soluble resin (A), and the dispersant, if necessary, are mixed and kneaded. Machines used for kneading include double rolls, three rolls, ball mills, stone mills, dispersers, kneaders, co-kneaders, homogenizers, mixers, uniaxial or biaxial extruders, etc. These kneaders disperse while applying strong shearing forces to disperse the colorant. In addition, before the colorant (C) is subjected to the above-mentioned kneading, the particle size is preferably reduced by a salt milling method or the like.
另一方面,於前述微分散步驟,藉由把對包含在前述混練分散步驟所得到的著色劑(C)之組成物添加溶劑而成之物,或把混合了著色劑(C)、鹼溶性樹脂(A)、溶劑及視需要的前述分散劑而成之物,使用分散機與玻璃、氧化鋯或陶瓷微粒等分散用媒體將其混合分散,能將著色劑(C)的粒子分散至接近一次粒子的微小狀態。 On the other hand, in the micro-dispersing step, a solvent is added to the composition containing the coloring agent (C) obtained in the kneading and dispersing step, or the coloring agent (C) and alkali-soluble are mixed. The resin (A), the solvent, and the aforementioned dispersant, if necessary, can be mixed and dispersed by using a disperser and a dispersion medium such as glass, zirconia, or ceramic particles to disperse the particles of the colorant (C) close to each other. The tiny state of a primary particle.
而從提升彩色濾光片的透光率、對比等的觀點來看,著色劑(C)的一次粒子之平均粒徑較佳為10~100nm,更佳為10~60nm。其中,此著色劑(C)的平均粒徑係以動態光散射式粒度分布計測定,能例如以日機裝股份有限公司製的NanoTrac粒度分布測定裝置「UPA-EX150」、「 UPA-EX250」等測定。 From the viewpoint of improving the light transmittance and contrast of the color filter, the average particle diameter of the primary particles of the colorant (C) is preferably 10 to 100 nm, and more preferably 10 to 60 nm. The average particle diameter of the colorant (C) is measured by a dynamic light scattering particle size distribution meter, and, for example, NanoTrac particle size distribution measuring devices "UPA-EX150" and "UPA-EX150" manufactured by Nikkiso Co., Ltd. can be used. UPA-EX250 "and other measurements.
本發明所用之氟系界面活性劑(D)係具有聚合性單體的聚合物結構與聚(全氟伸烷基醚)鏈,複數個前述聚合物結構係透過前述聚(全氟伸烷基醚)鏈連結,且具有在前述聚合物結構的側鏈有氧伸烷基之樹脂結構的聚合物。 The fluorine-based surfactant (D) used in the present invention is a polymer structure having a polymerizable monomer and a poly (perfluoroalkylene ether) chain, and a plurality of the aforementioned polymer structures are transmitted through the poly (perfluoroalkylene) An ether) chain-linked polymer having a resin structure having an oxyalkylene group in a side chain of the aforementioned polymer structure.
此處構成聚合物結構之聚合性單體可舉出:丙烯酸系單體、芳香族乙烯基系單體、乙烯基酯系單體、順丁烯二醯亞胺系單體等,前述聚合物結構為它們的均聚物或共聚物之直鏈結構的結構部位。本發明所用之氟系界面活性劑(D)係如後述,較佳為以具有聚(全氟伸烷基醚)鏈並在其兩末端有聚合性不飽和基之聚合性單體(d1),與具有氧伸烷基及聚合性不飽和基之聚合性單體(d2)為必須單體,加以共聚合而成的共聚物,在此情形,聚合物結構中係包含源自前述聚合性單體(d1)與聚合性單體(d2)之結構部位。以下詳述以前述聚合性單體(d1)與聚合性單體(d2)為必須單體加以共聚合而成的共聚物。 Examples of the polymerizable monomer constituting the polymer structure include acrylic monomers, aromatic vinyl monomers, vinyl ester monomers, maleimide monomers, and the like. The aforementioned polymers The structure is a structural part of the linear structure of their homopolymer or copolymer. The fluorine-based surfactant (D) used in the present invention is as described later, and it is preferably a polymerizable monomer (d1) having a poly (perfluoroalkylene ether) chain and polymerizable unsaturated groups at both ends thereof. A copolymer obtained by copolymerizing a polymerizable monomer (d2) having an oxyalkylene group and a polymerizable unsaturated group as an essential monomer. In this case, the polymer structure includes the polymerizable origin Structural parts of the monomer (d1) and the polymerizable monomer (d2). Hereinafter, a copolymer obtained by copolymerizing the polymerizable monomer (d1) and the polymerizable monomer (d2) as essential monomers will be described in detail.
聚合性單體(d1)所具有的聚(全氟伸烷基醚)鏈,可舉出例如具有碳原子數1~3的2價氟化碳基與氧原子交互連結而成的結構者。碳原子數1~3的2價氟化碳基可為1種,亦可為複數種混合,具體來說可舉出以下述結構式(a1)所表示者。 Examples of the poly (perfluoroalkylene ether) chain possessed by the polymerizable monomer (d1) include a structure in which a divalent fluorocarbon group having 1 to 3 carbon atoms and an oxygen atom are alternately connected. The divalent fluorinated carbon group having 1 to 3 carbon atoms may be one kind or a mixture of plural kinds, and specific examples thereof include those represented by the following structural formula (a1).
-CF-CF 22 - (a1-1) -(a1-1)
-CF-CF 22 CFCF 22 - (a1-2) -(a1-2)
-CF-CF 22 CFCF 22 CFCF 22 - (a1-3)-(a1-3)
這些之中,從讓添加有本發明之氟系界面活性劑的塗布組成物之調平性變好,並可得到平滑的塗膜的點來看,特佳為以前述結構式(a1-1)所表示之全氟亞甲基結構,與以前述結構式(a1-2)所表示之全氟伸乙烷結構共存。此處,以前述結構式(a1-1)所表示的全氟亞甲基結構,與以前述結構式(a1-2)所表示之全氟伸乙烷結構的存在比率,在莫耳比率[結構(a1-1)/結構(a1-2)]為1/10~10/1之比例時,因可得到調平性優良的塗布組成物而為較佳,而前述結構式(a1)中的n值較佳在3~100之範圍,更佳在6~70之範圍。 Among these, from the viewpoint of improving the leveling property of the coating composition to which the fluorine-based surfactant of the present invention is added and obtaining a smooth coating film, it is particularly preferable to use the aforementioned structural formula (a1-1). The perfluoromethylene structure represented by) coexists with the perfluoroethylene structure represented by the aforementioned structural formula (a1-2). Here, the existence ratio of the perfluoromethylene structure represented by the aforementioned structural formula (a1-1) to the perfluoroethylene ethane structure represented by the aforementioned structural formula (a1-2) is in the molar ratio [ When the ratio of the structure (a1-1) / structure (a1-2)] is 1/10 to 10/1, it is preferable because a coating composition having excellent leveling property can be obtained. In the aforementioned structural formula (a1), The value of n is preferably in the range of 3 to 100, and more preferably in the range of 6 to 70.
又,前述聚(全氟伸烷基醚)鏈從可兼顧塗布組成物的調平性與對塗布組成物中的非氟系材料之溶解性的點來看,在一條聚(全氟伸烷基醚)鏈中所含有的氟原子之 合計較佳在18~200個之範圍,更佳在25~150個之範圍。 The poly (perfluoroalkylene ether) chain can balance the leveling property of the coating composition with the solubility of non-fluorine-based materials in the coating composition. Alkyl ether) The total number is preferably in the range of 18 to 200, and more preferably in the range of 25 to 150.
此處,要讓前述聚(全氟伸烷基醚)鏈的兩端鍵結至聚合性單體的聚合物結構,並使複數個前述聚合物結構透過前述聚(全氟伸烷基醚)鏈形成連結之狀態,只要使後述之具有氧伸烷基及聚合性不飽和基的聚合性單體(d2),與在聚(全氟伸烷基醚)鏈及其兩末端有自由基聚合性不飽和基的結構部位之化合物(d1)一起共聚合即可。 Here, both ends of the poly (perfluoroalkylene ether) chain are bonded to a polymer structure of a polymerizable monomer, and a plurality of the polymer structures are allowed to pass through the poly (perfluoroalkylene ether). In a state where the chains are connected, as long as the polymerizable monomer (d2) having an oxyalkylene group and a polymerizable unsaturated group described below is radically polymerized with the poly (perfluoroalkylene ether) chain and both ends thereof The compounds (d1) at the structural site of the unsaturated group may be copolymerized together.
前述化合物(d1)可例如藉由以後述方法,將下述所示之(U-1)~(U-6)所表示的聚合性不飽和基導入到以下的一般式(a2-1)~(a2-7)所例示之在兩末端有反應性基之化合物來得到。 The said compound (d1) can introduce the polymerizable unsaturated group represented by (U-1) to (U-6) shown below into the following general formula (a2-1) by the method mentioned later, for example. (a2-7) It is obtained by exemplifying a compound having a reactive group at both ends.
下述顯示一般式(a2-1)~(a2-7)。其中,各結構式中的「-PFPE-」係表示上述的聚(全氟伸烷基醚)鏈。 The general formulae (a2-1) to (a2-7) are shown below. Here, "-PFPE-" in each structural formula represents the above-mentioned poly (perfluoroalkylene ether) chain.
HO-CHHO-CH 22 -PFPE-CH-PFPE-CH 22 -OH (a2-1) -OH (a2-1)
HO-CHHO-CH 22 CHCH 22 -PFPE-CH-PFPE-CH 22 CHCH 22 -OH (a2-2) -OH (a2-2)
OCN-PFPE-NCO (a2-5)OCN-PFPE-NCO (a2-5)
前述聚合性單體(d1)之在聚(全氟伸烷基醚)鏈的兩末端所具有的聚合性不飽和基,可舉出例如以下述結構式U-1~U-6所示之具有聚合性不飽和基者。 Examples of the polymerizable unsaturated groups of the polymerizable monomer (d1) at both ends of the poly (perfluoroalkylene ether) chain include those represented by the following structural formulas U-1 to U-6. Those with polymerizable unsaturated groups.
前述U-6所表示之聚合性不飽和基中,A係表示鹵素原子。 In the polymerizable unsaturated group represented by the aforementioned U-6, A is a halogen atom.
在這些聚合性不飽和基之中,特別從聚合性單體(d1)本身的取得或製造的容易性,或從與後述之聚合性單體(d2)的共聚合之容易性來看,較佳為以結構式U-1表示之丙烯醯氧基,或以結構式U-2表示之甲基丙烯醯氧基。另外,藉由使用以結構式U-6表示之丙烯醯氧基,以該丙烯醯基所具有的鹵素原子讓氟系界面活性劑(D)的主 鏈不易動作。結果具有氟原子的基被固定,而藉由表面偏析可發揮更良好的調平性。 Among these polymerizable unsaturated groups, the ease of obtaining or producing the polymerizable monomer (d1) itself, or the ease of copolymerization with the polymerizable monomer (d2) described later, is particularly disadvantageous. Preferably, it is a propylene fluorenyl group represented by the structural formula U-1, or a methacryl fluorenyl group represented by the structural formula U-2. In addition, by using a propenyloxy group represented by the structural formula U-6, a halogen atom of the propenyl group is used to make the main of the fluorine-based surfactant (D) The chain does not move easily. As a result, the group having a fluorine atom is fixed, and more favorable leveling properties can be exhibited by surface segregation.
前述聚合性單體(d1)之製造方法可舉出例如:對於在聚(全氟伸烷基醚)鏈的兩末端各具有1個羥基之化合物,將氯化(甲基)丙烯酸進行脫氯化氫反應來得到之方法、將(甲基)丙烯酸進行脫水反應來得到之方法、將異氰酸2-(甲基)丙烯醯基氧乙酯進行胺基甲酸酯化反應來得到之方法、將伊康酸酐進行酯化反應來得到之方法、將有氯甲基之苯乙烯在鹼基存在下進行反應來得到之方法;對於在聚(全氟伸烷基醚)鏈的兩末端各具有1個羧基之化合物,將4-羥基丁基丙烯酸酯環氧丙基醚進行酯化反應來得到之方法、將(甲基)丙烯酸環氧丙酯進行酯化反應來得到之方法;對於在聚(全氟伸烷基醚)鏈的兩末端各具有1個異氰酸酯基之化合物,將(甲基)丙烯酸2-羥乙酯進行反應而導入之方法、將2-羥乙基(甲基)丙烯醯胺進行反應之方法。這些之中,對於在聚(全氟伸烷基醚)鏈的兩末端各有1個羥基之化合物,將氯化(甲基)丙烯酸進行脫氯化氫反應來得到之方法,與將異氰酸2-(甲基)丙烯醯基氧乙酯進行胺酯化反應來得到之方法,從合成上容易得到來看為特別優選。 Examples of the method for producing the polymerizable monomer (d1) include, for example, dehydrochlorinated (meth) acrylic acid for a compound having one hydroxyl group at each end of a poly (perfluoroalkylene ether) chain. A method of obtaining by reaction, a method of obtaining (meth) acrylic acid by dehydration reaction, a method of obtaining by urethane reaction of 2- (meth) acrylfluorenyloxyethyl isocyanate, Iconic anhydride is obtained by an esterification reaction, a method in which chloromethyl-containing styrene is reacted in the presence of a base; each of the poly (perfluoroalkylene ether) chain has 1 at each end A carboxyl compound, a method obtained by esterifying 4-hydroxybutyl acrylate glycidyl ether, and a method obtained by subjecting glycidyl (meth) acrylate to esterification; Perfluoroalkylene ether) A compound having one isocyanate group at each end of the chain, and a method of introducing and reacting 2-hydroxyethyl (meth) acrylate, and 2-hydroxyethyl (meth) acrylic acid Method for amine reaction. Among these, a compound obtained by dehydrochlorinating a (meth) acrylic acid with a compound having one hydroxyl group at each end of a poly (perfluoroalkylene ether) chain, and isocyanate 2 -A method in which (meth) acrylfluorenyloxyethyl ester is subjected to an amine esterification reaction is particularly preferable from the viewpoint of easy synthesis.
而本發明中「(甲基)丙烯醯基」係指甲基丙烯醯基與丙烯醯基中的一者或兩者,「(甲基)丙烯酸酯」係指甲基丙烯酸酯與丙烯酸酯中的一者或兩者,「(甲基)丙烯酸」係指甲基丙烯酸與丙烯酸中的一者或兩者。 In the present invention, "(meth) acrylfluorenyl" refers to one or both of methacrylfluorenyl and acrylfluorenyl, and "(meth) acrylate" refers to methacrylate and acrylate. "(Meth) acrylic acid" means one or both of methacrylic acid and acrylic acid.
前述聚合性單體(A)的具體例可舉出以下述結構式 (A-1)~(A-13)所表示者。其中,下述的各結構式中之「-PFPE-」係表示聚(全氟伸烷基醚)鏈。 Specific examples of the polymerizable monomer (A) include the following structural formulas. (A-1) ~ (A-13). Here, "-PFPE-" in each of the following structural formulas represents a poly (perfluoroalkylene ether) chain.
這些之中,從容易在工業上製造聚合性單體(A)的點來說,較佳為以前述結構式(d1-1)、(d1-2)、(d1-5)、(d1-6)所表示者,從可更提升作為調平劑的性能來看,更佳為以前述結構式(d1-1)所表示之在聚(全氟伸烷基醚)鏈的兩末端有丙烯醯基者。 Among these, from the point that it is easy to manufacture the polymerizable monomer (A) industrially, it is preferable to use the aforementioned structural formulae (d1-1), (d1-2), (d1-5), (d1- 6) From the standpoint of improving the performance as a leveling agent, it is more preferable to have propylene at both ends of the poly (perfluoroalkylene ether) chain represented by the aforementioned structural formula (d1-1).醯 基 者.
前述聚合性單體(d2)為具有氧伸烷基及聚合性不飽和基之聚合性單體。作為聚合性單體(d2)所具有的聚合性不飽和基,可舉出(甲基)丙烯醯基、乙烯基、順丁烯二醯亞胺基等,而從容易與前述聚合性單體(d1)共聚合來看,較佳為(甲基)丙烯醯基。 The polymerizable monomer (d2) is a polymerizable monomer having an oxyalkylene group and a polymerizable unsaturated group. Examples of the polymerizable unsaturated group possessed by the polymerizable monomer (d2) include a (meth) acrylfluorenyl group, a vinyl group, and a maleimide group, and the polymerizable monomer (d2) is easily compatible with the polymerizable monomer. In view of (d1) copolymerization, a (meth) acrylfluorenyl group is preferred.
又,前述聚合性單體(d2)的具體例,例如可較佳例示以下述一般式(d2-1)所表示之單體。 In addition, specific examples of the polymerizable monomer (d2) include, for example, monomers represented by the following general formula (d2-1).
上述一般式(d2-1)中的X、Y及Z為伸烷基,而此伸烷基亦包含具有取代基者。-O-(XO)p-(YO)q-(ZO)r-部分的具體例可舉出:重複單元數p為1而q及r為0,且X為伸乙基的乙二醇殘基;重複單元數p為1而q及r為0,且X為伸丙基的丙二醇殘基;重複單元數p為1而q及r為0,且X為伸丁基的丁二醇殘基;重複單元數p為2以上的整數而q及r為0,且X為伸乙基的聚乙二醇殘基;重複單元數p為2以上的整數而q及r為0,且X為1-甲基伸乙基(伸丙基)的聚丙二醇殘基;重複單元數p及q均為1以上的整數而r為0,且X或Y為伸乙基且另一者為1-甲基伸乙基(伸丙基)的環氧乙烷與環氧丙烷之共聚物的殘基;重複單元數p、q及r均為1以上的整數,且X及Z為伸乙基,且Y為1-甲基伸乙基(伸丙基)的環氧乙烷與環氧丙烷之共聚物的殘基等聚伸烷二醇之殘基。 X, Y, and Z in the general formula (d2-1) are alkylene groups, and the alkylene groups also include those having a substituent. Specific examples of the -O- (XO) p- (YO) q- (ZO) r- moiety include: the number of repeating units p is 1, q and r are 0, and X is ethylene glycol residue The number of repeating units p is 1 and q and r are 0, and X is a propylene glycol residue of propylene; the number of repeating units p is 1 and q and r are 0, and X is a butylene glycol residue of butylene The number of repeating units p is an integer of 2 or more and q and r are 0, and X is a polyethylene glycol residue of ethylene; the number of repeating units is an integer of 2 or more and q and r are 0, and X Is a polypropylene glycol residue of 1-methylethylene (propylene); the number of repeating units p and q are both integers of 1 or more and r is 0, and X or Y is ethylene and the other is 1 -A residue of a copolymer of ethylene oxide and propylene oxide of methyl ethylene (propylene); the number of repeating units p, q and r are all integers of 1 or more, and X and Z are ethylene And Y is a residue of a poly (alkylene glycol) such as a residue of a copolymer of ethylene oxide and propylene oxide of 1-methylethylene (propylene).
前述聚伸烷二醇的聚合度,亦即一般式(d2-1)中的p、q及r之合計較佳為1~80者,更佳為3~50者。其中,包含X的重複單元、包含Y的重複單元及包含Z的重複單元,可配置成無規狀,亦可配置成嵌段狀。 The degree of polymerization of the aforementioned polyalkylene glycol, that is, the sum of p, q, and r in the general formula (d2-1) is preferably 1 to 80, and more preferably 3 to 50. Among them, the repeating unit including X, the repeating unit including Y, and the repeating unit including Z may be arranged in a random shape or in a block shape.
上述一般式(d2-1)中的R2為氫或碳原子數1~6之烷基。在R2為氫的情形,聚合性單體(d2)會變成聚乙二醇、聚丙二醇、聚丁二醇等伸烷二醇的單(甲基)丙烯酸酯,而在R2為碳原子數1~6之情形,在伸烷二醇的單(甲基)丙烯酸酯的非(甲基)丙烯酸酯之末端,會變成以碳原子數1~6的烷基封端。 R 2 in the general formula (d2-1) is hydrogen or an alkyl group having 1 to 6 carbon atoms. When R 2 is hydrogen, the polymerizable monomer (d2) becomes a mono (meth) acrylate of an alkylene glycol such as polyethylene glycol, polypropylene glycol, and polybutylene glycol, and R 2 is a carbon atom. When the number is from 1 to 6, the non- (meth) acrylic acid terminal of the mono (meth) acrylate of butanediol is terminated with an alkyl group having 1 to 6 carbon atoms.
前述單體(d2-1)的更具體例子可舉出:聚丙二醇單( 甲基)丙烯酸酯、聚乙二醇單(甲基)丙烯酸酯、聚伸丁二醇(甲基)丙烯酸酯、聚(乙二醇‧丙二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚丙二醇單(甲基)丙烯酸酯、聚(乙二醇‧伸丁二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚伸丁二醇單(甲基)丙烯酸酯、聚(丙二醇‧伸丁二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚伸丁二醇單(甲基)丙烯酸酯、聚(丙二醇‧丁二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚(乙二醇‧丁二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚(四乙二醇‧丁二醇)單(甲基)丙烯酸酯、聚四乙二醇‧聚丁二醇單(甲基)丙烯酸酯、聚丁二醇單(甲基)丙烯酸酯、聚(乙二醇‧伸丙二醇)單(甲基)丙烯酸酯、聚乙二醇‧聚伸丙二醇單(甲基)丙烯酸酯、聚(丙二醇‧伸丙二醇)單(甲基)丙烯酸酯、聚丙二醇‧聚伸丙二醇單(甲基)丙烯酸酯、聚(伸丙二醇‧伸丁二醇)單(甲基)丙烯酸酯、聚伸丙二醇‧聚伸丁二醇單(甲基)丙烯酸酯、聚(丁二醇‧伸丙二醇)單(甲基)丙烯酸酯、聚丁二醇‧聚伸丙二醇單(甲基)丙烯酸酯等。其中,「聚(乙二醇‧丙二醇)」係指乙二醇與丙二醇的無規共聚物,「聚乙二醇‧聚丙二醇」係指乙二醇與丙二醇的嵌段共聚物。其它亦相同。這些單體(d2-1)之中,從與本發明之彩色光阻組成物中的其它成分具良好的相溶性來看,較佳為:聚丙二醇單(甲基)丙烯酸酯、聚乙二醇單(甲基)丙烯酸酯、聚乙二醇‧聚丙二醇單(甲基)丙烯酸酯。 More specific examples of the monomer (d2-1) include polypropylene glycol mono ( (Meth) acrylate, polyethylene glycol mono (meth) acrylate, polybutylene glycol (meth) acrylate, poly (ethylene glycol, propylene glycol) mono (meth) acrylate, polyethylene glycol ‧Polypropylene glycol mono (meth) acrylate, poly (ethylene glycol‧butylene glycol) mono (meth) acrylate, polyethylene glycol‧polybutylene glycol mono (meth) acrylate, poly ( Propylene glycol, butylene glycol) mono (meth) acrylate, polypropylene glycol, polybutylene glycol mono (meth) acrylate, poly (propylene glycol, butanediol) mono (meth) acrylate, polypropylene glycol, etc. Polybutylene glycol mono (meth) acrylate, poly (ethylene glycol‧butanediol) mono (meth) acrylate, polyethylene glycol‧polybutylene glycol mono (meth) acrylate, poly (quad Ethylene glycol, butylene glycol) mono (meth) acrylate, polytetraethylene glycol, polybutylene glycol mono (meth) acrylate, polybutylene glycol mono (meth) acrylate, poly (ethylene glycol) Alcohol‧propylene glycol) mono (meth) acrylate, polyethylene glycol‧polypropylene glycol mono (meth) acrylate, poly (propylene glycol‧propylene glycol) mono (meth) acrylate, polypropylene glycol‧polypropylene glycol Mono (meth) acrylic Esters, poly (propylene glycol, butylene glycol) mono (meth) acrylate, poly (propylene glycol), poly (butylene glycol) mono (meth) acrylate, poly (butylene glycol, butylene glycol) mono (methyl) ) Acrylate, polybutylene glycol, polypropylene glycol mono (meth) acrylate, etc. Among them, "poly (ethylene glycol · propylene glycol)" refers to a random copolymer of ethylene glycol and propylene glycol, and "polyethylene glycol · polypropylene glycol" refers to a block copolymer of ethylene glycol and propylene glycol. The other is the same. Among these monomers (d2-1), in view of good compatibility with other components in the color photoresist composition of the present invention, polypropylene glycol mono (meth) acrylate and polyethylene glycol are preferred. Alcohol mono (meth) acrylate, polyethylene glycol ‧ polypropylene glycol mono (meth) acrylate.
又,作為前述單體(d2-1)的市售品,可舉出例如:新 中村化學工業股份有限公司製的「NK Ester M-20G」、「NK Ester M-40G」、「NK Ester M-90G」、「NK Ester M-230G」、「NK Ester AM-90G」、「NK Ester AMP-10G」、「NK Ester AMP-20G」、「NK Ester AMP-60G」、日油股份有限公司製的「BLEMMER PE-90」、「BLEMMER PE-200」、「BLEMMER PE-350」、「BLEMMER PME-100」、「BLEMMER PME-200」、「BLEMMER PME-400」、「BLEMMER PME-4000」、「BLEMMER PP-1000」、「BLEMMER PP-500」、「BLEMMER PP-800」、「BLEMMER 70PEP-350B」、「BLEMMER 55PET-800」、「BLEMMER 50POEP-800B」、「BLEMMER 10PPB-500B」、「BLEMMER NKH-5050」、「BLEMMER AP-400」、「BLEMMER AE-350」等。這些單體(d2-1)可單獨使用一種,亦可2種以上併用。 In addition, as a commercially available product of the monomer (d2-1), for example, new "NK Ester M-20G", "NK Ester M-40G", "NK Ester M-90G", "NK Ester M-230G", "NK Ester AM-90G", "NK" "Ester AMP-10G", "NK Ester AMP-20G", "NK Ester AMP-60G", "BLEMMER PE-90", "BLEMMER PE-200", "BLEMMER PE-350", manufactured by Japan Oil Corporation, "BLEMMER PME-100", "BLEMMER PME-200", "BLEMMER PME-400", "BLEMMER PME-4000", "BLEMMER PP-1000", "BLEMMER PP-500", "BLEMMER PP-800", " "BLEMMER 70PEP-350B", "BLEMMER 55PET-800", "BLEMMER 50POEP-800B", "BLEMMER 10PPB-500B", "BLEMMER NKH-5050", "BLEMMER AP-400", "BLEMMER AE-350", etc. These monomers (d2-1) may be used individually by 1 type, and may use 2 or more types together.
本發明所用之氟系界面活性劑(D)如上所述,能藉由例如以聚合性單體(d1)及聚合性單體(d2)為必須成分加以共聚合而得。作為除此之外的聚合性單體,亦能以(甲基)丙烯酸烷酯(d3)為原料併用。此(甲基)丙烯酸烷酯(d3)的具體例可舉出:以下述一般式(d3-1)所表示者。 The fluorine-based surfactant (D) used in the present invention can be obtained by copolymerizing the polymerizable monomer (d1) and the polymerizable monomer (d2) as essential components, as described above. As other polymerizable monomers, alkyl (meth) acrylate (d3) can also be used in combination. Specific examples of the alkyl (meth) acrylate (d3) include those represented by the following general formula (d3-1).
而上述一般式(d3-1)中的R4為碳原子數1~18之直鏈 狀、分枝狀或具有環結構的烷基,且包括此烷基中具有脂肪族或芳香族的烴基、羥基等取代基者。前述(甲基)丙烯酸烷基酯(d3)的更具體例子可舉出:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸辛酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸癸酯、(甲基)丙烯酸十二酯、(甲基)丙烯酸十八酯等(甲基)丙烯酸的碳原子數為1~18之烷基酯;(甲基)丙烯酸三環[5.2.1.02,6]癸-8-氧乙酯、(甲基)丙烯酸異莰基氧乙酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸金剛烷酯、(甲基)丙烯酸二甲基金剛烷酯、(甲基)丙烯酸三環[5.2.1.02,6]癸-8-酯、(甲基)丙烯酸三環[5.2.1.02,6]癸-3-烯-8-酯等(甲基)丙烯酸的碳原子數1~18之橋接環狀烷基酯等。這些聚合性單體(d3)可使用單獨一種,亦可2種以上併用。 R 4 in the above general formula (d3-1) is a linear, branched, or cyclic alkyl group having 1 to 18 carbon atoms, and includes an aliphatic or aromatic hydrocarbon group in the alkyl group And hydroxyl groups. More specific examples of the alkyl (meth) acrylate (d3) include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and butyl (meth) acrylate. Ester, octyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, decyl (meth) acrylate, dodecyl (meth) acrylate, octadecyl (meth) acrylate, etc. Base) alkyl esters of acrylic acid having 1 to 18 carbon atoms; tricyclo [5.2.1.0 2,6 ] dec-8-oxyethyl (meth) acrylate, isoamyloxyethyl (meth) acrylate , Isoamyl (meth) acrylate, adamantane (meth) acrylate, dimethyladamantyl (meth) acrylate, tricyclic (meth) acrylate [5.2.1.0 2,6 ] dec-8- (5.2.1.0 2,6 ] dec-3-ene-8-ester such as (meth) acrylic acid, bridged cyclic alkyl esters having 1 to 18 carbon atoms of (meth) acrylic acid, etc.). These polymerizable monomers (d3) may be used alone or in combination of two or more.
又,本發明所用之氟系界面活性劑(D)的原料,作為前述聚合性單體(d1)、(d2)及(d3)以外的聚合性單體,可使用:苯乙烯、α-甲基苯乙烯、p-甲基苯乙烯、p-甲氧基苯乙烯等芳香族乙烯基化合物;順丁烯二醯亞胺、甲基順丁烯二醯亞胺、乙基順丁烯二醯亞胺、丙基順丁烯二醯亞胺、丁基順丁烯二醯亞胺、己基順丁烯二醯亞胺、辛基順丁烯二醯亞胺、十二基順丁烯二醯亞胺、十八基順丁烯二醯亞胺、苯基順丁烯二醯亞胺、環己基順丁烯二醯亞胺等順丁烯二醯亞胺化合物等。此外,亦可使用具有碳原子數1~6之氟化烷基的聚合性單體等。 As the raw material of the fluorine-based surfactant (D) used in the present invention, as the polymerizable monomer other than the polymerizable monomers (d1), (d2), and (d3), styrene, α-formaldehyde can be used. Aromatic vinyl compounds such as methylstyrene, p-methylstyrene, p-methoxystyrene; maleimide, methylmaleimide, methylimide, ethylmaleimide Imine, propyl maleimide diimide, butyl maleimide diimide, hexyl maleimide diimide, octyl maleimide diimide, dodecyl maleimide diimide, ten Maleic compounds such as octayl maleimide, phenyl maleimide diimide, cyclohexyl maleimide diimide, and the like. In addition, a polymerizable monomer or the like having a fluorinated alkyl group having 1 to 6 carbon atoms can also be used.
製造本發明所用之氟系界面活性劑(D)的方法無特 別限制,可舉出:使用自由基聚合起始劑,讓聚合性單體(d1)、聚合性單體(d2)、與視需要使用之除此之外的聚合性單體,在有機溶劑中聚合之方法。此處所用的有機溶劑,較佳為酮類、酯類、醯胺類、亞碸類、醚類、及烴類,具體來說可舉出:丙酮、甲基乙基酮、甲基異丁基酮、環己酮、乙酸乙酯、乙酸丁酯、丙二醇單甲醚乙酸酯、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯啶酮、二甲基亞碸、二乙基醚、二異丙基醚、四氫呋喃、二烷、甲苯、二甲苯等。此等係考慮沸點、相溶性、聚合性來適當選擇。自由基聚合起始劑可例示例如過氧化苯甲醯基等過氧化物、偶氮雙異丁腈等偶氮化合物等。進一步依需要可使用:十二硫醇、2-巰基乙醇、硫甘油、氫硫乙酸乙酯、氫硫乙酸辛酯等鏈轉移劑。 The method for producing the fluorine-based surfactant (D) used in the present invention is not particularly limited, and examples thereof include the use of a radical polymerization initiator to allow the polymerizable monomer (d1), the polymerizable monomer (d2), and the A method of polymerizing other polymerizable monomers in an organic solvent is required. The organic solvents used herein are preferably ketones, esters, amidines, fluorenes, ethers, and hydrocarbons. Specific examples include acetone, methyl ethyl ketone, and methyl isobutyl. Ketone, cyclohexanone, ethyl acetate, butyl acetate, propylene glycol monomethyl ether acetate, dimethylformamide, dimethylacetamide, N-methylpyrrolidone, dimethylsulfenyl , Diethyl ether, diisopropyl ether, tetrahydrofuran, di Alkane, toluene, xylene, etc. These are appropriately selected in consideration of boiling point, compatibility, and polymerizability. Examples of the radical polymerization initiator include peroxides such as benzamyl peroxide and azo compounds such as azobisisobutyronitrile. Further, if necessary, chain transfer agents such as dodecyl mercaptan, 2-mercaptoethanol, thioglycerin, ethyl hydrothioacetate, and octyl hydrothioacetate can be used.
本發明所用之氟系界面活性劑(D)的數量平均分子量(Mn)及重量平均分子量(Mw),從與鹼溶性樹脂(A)、聚合性化合物(B)、著色劑(C)具良好相溶性,並可實現高度調平性來看,數量平均分子量(Mn)較佳在500~20,000之範圍,更佳在1,500~10,000之範圍。另外,重量平均分子量(Mw)較佳在2,000~100,000之範圍,更佳在3,000~50,000之範圍。其中,數量平均分子量(Mn)及重量平均分子量(Mw)係基於凝膠滲透層析(以下簡稱為「GPC」。)測定,以聚苯乙烯換算之值。 The number-average molecular weight (Mn) and weight-average molecular weight (Mw) of the fluorine-based surfactant (D) used in the present invention are good from the alkali-soluble resin (A), the polymerizable compound (B), and the colorant (C) In terms of compatibility and high leveling, the number average molecular weight (Mn) is preferably in the range of 500 to 20,000, and more preferably in the range of 1,500 to 10,000. The weight average molecular weight (Mw) is preferably in the range of 2,000 to 100,000, and more preferably in the range of 3,000 to 50,000. Here, the number average molecular weight (Mn) and the weight average molecular weight (Mw) are values measured by gel permeation chromatography (hereinafter referred to simply as "GPC") and converted into polystyrene.
又,使用作為本發明所用之氟系界面活性劑(D)的原料的前述聚合性單體(d1)、聚合性單體(d2)、及視需要使用之除此之外的聚合性單體之合計中的氟原子之含有率 ,從可讓本發明之彩色光阻組成物具充分調平性,並能與彩色光阻組成物中的其它成分具良好相溶性來看,較佳在2~40質量%之範圍,更佳在5~30質量%之範圍,進一步更佳在10~25質量%之範圍。其中,前述含氟率,係相對於使用作為本發明所用之氟系界面活性劑(D)的原料的聚合性單體之合計量,所算出的氟原子之質量比率。 In addition, the polymerizable monomer (d1), the polymerizable monomer (d2), and other polymerizable monomers used as necessary as the raw material of the fluorine-based surfactant (D) used in the present invention are used. Content of fluorine atom in total From the viewpoint of allowing the color photoresist composition of the present invention to have sufficient leveling properties and good compatibility with other components in the color photoresist composition, it is preferably in the range of 2 to 40% by mass, and more preferably In the range of 5 to 30% by mass, it is more preferably in the range of 10 to 25% by mass. The above-mentioned fluorine content is a mass ratio of the fluorine atom calculated with respect to the total amount of the polymerizable monomer used as a raw material of the fluorine-based surfactant (D) used in the present invention.
從可得到調平性,並能抑制塗工時的起泡等問題來看,本發明之彩色光阻組成物中氟系界面活性劑(D)的調配量,相對於彩色光阻組成物中的總固體成分100質量份,較佳為0.0001~10質量份,更佳為0.001~5質量份,進一步更佳為0.01~2質量份。 From the viewpoint of obtaining leveling properties and suppressing foaming during the coating process, the amount of the fluorine-based surfactant (D) in the color photoresist composition of the present invention is relative to that in the color photoresist composition. The total solid content is 100 parts by mass, preferably 0.0001 to 10 parts by mass, more preferably 0.001 to 5 parts by mass, and still more preferably 0.01 to 2 parts by mass.
在照射紫外線、可見光等活性能量線,使本發明之彩色光阻組成物硬化的情形,對本發明之彩色光阻組成物調配光聚合起始劑(E)。此光聚合起始劑(E)可舉出例如:二茂鈦衍生物、聯咪唑衍生物、鹵甲基化二唑衍生物、鹵甲基對稱三衍生物、α-胺基烷基苯基酮衍生物、肟酯衍生物、苯偶姻烷基醚衍生物、蒽醌衍生物、二苯基酮衍生物、苯乙酮衍生物、9-氧硫衍生物、苯甲酸酯衍生物、吖啶衍生物、啡衍生物、蒽酮衍生物、N-苯基甘胺酸等的N-芳基-α-胺基酸、N-芳基-α-胺基酸塩、N-芳基-α-胺基酸酯等。 When the color photoresist composition of the present invention is cured by irradiating active energy rays such as ultraviolet rays and visible light, the color photoresist composition of the present invention is formulated with a photopolymerization initiator (E). Examples of the photopolymerization initiator (E) include titanocene derivatives, biimidazole derivatives, and halomethylation. Diazole derivatives, halomethyl symmetrical tris Derivatives, α-Aminoalkylphenylketone derivatives, oxime ester derivatives, benzoin alkyl ether derivatives, anthraquinone derivatives, diphenylketone derivatives, acetophenone derivatives, 9-oxo sulfur Derivatives, benzoate derivatives, acridine derivatives, brown Derivatives, anthrone derivatives, N-aryl-α-amino acids such as N-phenylglycine, N-aryl-α-amino acids, N-aryl-α-amino acids, N-aryl-α-amino acids Esters, etc.
前述二茂鈦衍生物的具體例可舉出:二氯化二茂鈦、雙苯基二茂鈦、雙(2,3,4,5,6-五氟苯-1-基)二茂鈦、雙(2,3,5,6-四氟苯-1-基)二茂鈦、雙(2,4,6-三氟苯-1-基)二茂鈦、二(2,6-二氟苯-1-基)二茂鈦、二(2,4-二氟苯-1-基) 二茂鈦、雙(2,3,4,5,6-五氟苯-1-基)二甲茂鈦、雙(2,6-二氟苯-1-基)二甲茂鈦、[2,6-二-氟-3-(吡咯-1-基)-苯-1-基]二茂鈦等。 Specific examples of the titanocene derivative include titanocene dichloride, bisphenyl titanocene, and bis (2,3,4,5,6-pentafluorophenyl-1-yl) titanocene Bis (2,3,5,6-tetrafluorophenyl-1-yl) titanocene, bis (2,4,6-trifluorophenyl-1-yl) titanocene, bis (2,6-di Fluorophenyl-1-yl) titanocene, bis (2,4-difluorobenzene-1-yl) Titanocene, bis (2,3,4,5,6-pentafluorophenyl-1-yl) dimethyl titanocene, bis (2,6-difluorophenyl-1-yl) dimethyl titanocene, [2 , 6-di-fluoro-3- (pyrrole-1-yl) -phenyl-1-yl] titanocene and the like.
前述聯咪唑衍生物的具體例可舉出:2-(2’-氯苯基)-4,5-二苯基咪唑二聚物、2-(2’-氯苯基)-4,5-雙(3’-甲氧基苯基)咪唑二聚物、2-(2’-氟苯基)-4,5-二苯基咪唑二聚物、2-(2’-甲氧基苯基)-4,5-二苯基咪唑二聚物、(4’-甲氧基苯基)-4,5-二苯基咪唑二聚物等。 Specific examples of the biimidazole derivative include 2- (2'-chlorophenyl) -4,5-diphenylimidazole dimer and 2- (2'-chlorophenyl) -4,5- Bis (3'-methoxyphenyl) imidazole dimer, 2- (2'-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (2'-methoxyphenyl) ) -4,5-diphenylimidazole dimer, (4'-methoxyphenyl) -4,5-diphenylimidazole dimer, and the like.
前述鹵甲基化二唑衍生物的具體例可舉出:2-三氯甲基-5-(2’-苯并呋喃基)-1,3,4-二唑、2-三氯甲基-5-[β-(2’-苯并呋喃基)乙烯基]-1,3,4-二唑、2-三氯甲基-5-[β-(2’-(6”-苯并呋喃基)乙烯基)]-1,3,4-二唑、2-三氯甲基-5-呋喃基-1,3,4-二唑等。 Halomethylation Specific examples of the diazole derivative include 2-trichloromethyl-5- (2'-benzofuranyl) -1,3,4- Diazole, 2-trichloromethyl-5- [β- (2'-benzofuranyl) vinyl] -1,3,4- Diazole, 2-trichloromethyl-5- [β- (2 '-(6 ”-benzofuranyl) vinyl)]-1,3,4- Diazole, 2-trichloromethyl-5-furanyl-1,3,4- Diazole and so on.
前述鹵甲基對稱三衍生物的具體例可舉出:2-(4-甲氧基苯基)-4,6-雙(三氯甲基)對稱三、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)對稱三、2-(4-乙氧基萘基)-4,6-雙(三氯甲基)對稱三、2-(4-乙氧基羰基萘基)-4,6-雙(三氯甲基)對稱三等。 Halomethyl Specific examples of the derivative include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) symmetric tris , 2- (4-methoxynaphthyl) -4,6-bis (trichloromethyl) symmetrical tris , 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) symmetrical tris , 2- (4-ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) symmetric tris Wait.
前述α-胺基烷基苯基酮衍生物的具體例可舉出:2-甲基-1-[4-(甲硫)苯基]-2-N-啉基丙-1-酮、2-芐基-2-二甲胺基-1-(4-N-啉基苯基)-丁酮-1、2-芐基-2-二甲胺基-1-(4-N-啉基苯基)丁-1-酮、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸異戊酯、4-二乙胺基苯乙酮、4-二甲胺基丙醯苯、1,4-二甲胺基苯甲酸2-乙基己酯、2,5-雙(4-二乙胺基亞苄基)環己酮、7-二乙胺基-3-(4-二乙胺基苯 甲醯基)香豆素、4-(二乙胺基)查酮等。 Specific examples of the α-aminoalkylphenyl ketone derivative include 2-methyl-1- [4- (methylthio) phenyl] -2-N- Phenylpropan-1-one, 2-benzyl-2-dimethylamino-1- (4-N- Phenylphenyl) -butanone-1, 2-benzyl-2-dimethylamino-1- (4-N- (Phenylphenyl) butan-1-one, 4-dimethylaminobenzoic acid ethyl ester, 4-dimethylaminobenzoic acid isoamyl ester, 4-diethylaminoacetophenone, 4-dimethylamino group Propylbenzene, 2-ethylhexyl 1,4-dimethylaminobenzoate, 2,5-bis (4-diethylaminobenzylidene) cyclohexanone, 7-diethylamino-3- (4-Diethylaminobenzyl) coumarin, 4- (diethylamino) chaconone, and the like.
前述肟酯衍生物的具體例可舉出:1,2-辛二酮、1-[4-(苯硫基)苯基]、2-(鄰苯甲醯基肟)、乙酮、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]、1-(鄰乙醯基肟)等。 Specific examples of the oxime ester derivative include 1,2-octanedione, 1- [4- (phenylthio) phenyl], 2- (o-benzophenyIxime), ethyl ketone, 1- [9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl], 1- (o-acetamidooxime), and the like.
前述苯偶姻烷基醚衍生物的具體例可舉出:苯偶姻甲基醚、苯偶姻苯基醚、苯偶姻異丁基醚、苯偶姻異丙基醚等。 Specific examples of the benzoin alkyl ether derivative include benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, benzoin isopropyl ether, and the like.
前述蒽醌衍生物的具體例可舉出:2-甲基蒽醌、2-乙基蒽醌、2-三級丁基蒽醌、1-氯蒽醌等。 Specific examples of the anthraquinone derivative include 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, and 1-chloroanthraquinone.
前述二苯基酮衍生物的具體例可舉出:二苯基酮、米其勒酮(Michler’s Ketone)、2-甲基二苯基酮、3-甲基二苯基酮、4-甲基二苯基酮、2-氯二苯基酮、4-溴二苯基酮、2-羧基二苯基酮等。 Specific examples of the diphenyl ketone derivative include diphenyl ketone, Michler's Ketone, 2-methyldiphenyl ketone, 3-methyldiphenyl ketone, and 4-methyl Diphenyl ketone, 2-chlorodiphenyl ketone, 4-bromodiphenyl ketone, 2-carboxydiphenyl ketone and the like.
前述苯乙酮衍生物的具體例可舉出:2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基苯乙酮、1-羥基環己基苯基酮、α-羥基-2-甲基苯基丙酮、1-羥基-1-甲基乙基-(對異丙基苯基)酮、1-羥基-1-(對十二基苯基)酮、2-甲基-(4’-甲硫苯基)-2-啉基-1-丙酮、1,1,1-三氯甲基-(對丁基苯基)酮等。 Specific examples of the acetophenone derivative include 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, and 1-hydroxycyclohexylphenylketone. , Α-hydroxy-2-methylphenylacetone, 1-hydroxy-1-methylethyl- (p-isopropylphenyl) ketone, 1-hydroxy-1- (p-dodecylphenyl) ketone, 2-methyl- (4'-methylthiophenyl) -2- Phenyl-1-acetone, 1,1,1-trichloromethyl- (p-butylphenyl) ketone and the like.
前述9-氧硫衍生物的具體例有:9-氧硫、2-乙基-9-氧硫、2-異丙基-9-氧硫、2-氯-9-氧硫、2,4-二甲基-9-氧硫、2,4-二乙基-9-氧硫、2,4-二異丙基-9-氧硫等種類。 The aforementioned 9-oxysulfur Specific examples of derivatives are: 9-oxysulfur , 2-ethyl-9-oxysulfur , 2-isopropyl-9-oxysulfur , 2-chloro-9-oxysulfur 2,4-dimethyl-9-oxysulfur , 2,4-diethyl-9-oxysulfur 2,4-diisopropyl-9-oxysulfur And other types.
前述苯甲酸酯衍生物的具體例可舉出:對二甲胺基 苯甲酸乙酯、對二乙胺基苯甲酸乙酯等。前述吖啶衍生物的具體例可舉出:9-苯基吖啶、9-(對甲氧基苯基)吖啶等。前述啡衍生物的具體例可舉出9,10-二甲基苯并啡等。前述蒽酮衍生物的具體例可舉出苯并蒽酮等種類。這些光聚合起始劑(E)可僅使用1種,亦可2種以上併用。 Specific examples of the benzoate derivative include ethyl p-dimethylaminobenzoate and ethyl p-diethylaminobenzoate. Specific examples of the acridine derivative include 9-phenylacridine and 9- (p-methoxyphenyl) acridine. Aforementioned brown Specific examples of the derivatives include 9,10-dimethylbenzophene Wait. Specific examples of the anthrone derivative include benzoanthrone and the like. These photopolymerization initiators (E) may be used alone or in combination of two or more.
另外,依需要,除了上述光聚合起始劑(E)以外,亦可使用聚合促進劑。此聚合促進劑可舉出例如:N,N-二甲基胺基苯甲酸乙酯等N,N-二烷基胺基苯甲酸烷基酯;2-巰基苯并噻唑、2-巰基苯并唑、2-巰基苯并咪唑等有雜環的巰基化合物;脂肪族多官能巰基化合物等巰基化合物等。這些聚合促進劑可僅使用1種,亦可2種以上併用。 If necessary, a polymerization accelerator may be used in addition to the photopolymerization initiator (E). Examples of the polymerization accelerator include: N, N-dialkylaminobenzoic acid alkyl esters such as ethyl N, N-dimethylaminobenzoate; 2-mercaptobenzothiazole, 2-mercaptobenzo Heterocyclic mercapto compounds such as azole and 2-mercaptobenzimidazole; mercapto compounds such as aliphatic polyfunctional mercapto compounds and the like. These polymerization accelerators may be used alone or in combination of two or more.
聚合起始劑(E)的調配量,相對於彩色光阻組成物中的總固體成分100質量份,較佳在0.01~30質量份之範圍,更佳在0.1~15質量份之範圍,進一步更佳在0.5~10質量份之範圍。而在使用聚合促進劑之情形,同樣以讓聚合起始劑(E)與聚合促進劑的合計在此範圍為佳。 The blending amount of the polymerization initiator (E) is preferably in the range of 0.01 to 30 parts by mass and more preferably in the range of 0.1 to 15 parts by mass relative to 100 parts by mass of the total solid content in the color photoresist composition. More preferably, it is in the range of 0.5 to 10 parts by mass. In the case of using a polymerization accelerator, it is also preferable that the total of the polymerization initiator (E) and the polymerization accelerator falls within this range.
此外,為了提升聚合敏感度,亦可使用敏化色素。此敏化色素係依用於聚合的光之波長來適當選擇,可舉出例如:系色素、香豆素系色素、3-酮香豆素系色素、具有二烷胺基苯骨架之色素等。 In addition, in order to increase the polymerization sensitivity, a sensitizing dye may be used. This sensitizing dye is appropriately selected depending on the wavelength of light used for polymerization, and examples include: Pigments, coumarin pigments, 3-ketocoumarin pigments, pigments having a dialkylaminobenzene skeleton, and the like.
上述敏化色素之中,較佳為具有胺基者,更佳為具有胺基及苯基者。具體來說可舉出:4,4’-二甲胺基二苯基酮、4,4’-二乙胺基二苯基酮、2-胺基二苯基酮、4-胺 基二苯基酮、4,4’-二胺基二苯基酮、3,3’-二胺基二苯基酮、3,4-二胺基二苯基酮等二苯基酮系化合物;2-(對二甲胺基苯基)苯并唑、2-(對二乙胺基苯基)苯并唑、2-(對二甲胺基苯基)苯并[4,5]苯并唑、2-(對二甲胺基苯基)苯并[6,7]苯并唑、2,5-雙(對二乙胺基苯基)-1,3,4-唑、2-(對二甲胺基苯基)苯并噻唑、2-(對二乙胺基苯基)苯并噻唑、2-(對二甲胺基苯基)苯并咪唑、2-(對二乙胺基苯基)苯并咪唑、2,5-雙(對二乙胺基苯基)-1,3,4-噻二唑、(對二甲胺基苯基)吡啶、(對二乙胺基苯基)吡啶、(對二甲胺基苯基)喹啉、(對二乙胺基苯基)喹啉、(對二甲胺基苯基)嘧啶、(對二乙胺基苯基)嘧啶等含有對二烷胺基苯基之化合物等。其中最佳為4,4’-二烷胺基二苯基酮。這些敏化色素可僅使用1種,亦可2種以上併用。 Among the sensitizing dyes, those having an amine group are preferred, and those having an amine group and a phenyl group are more preferred. Specific examples include: 4,4'-dimethylaminodiphenyl ketone, 4,4'-diethylaminodiphenyl ketone, 2-aminodiphenyl ketone, 4-aminodiphenyl Diphenyl ketone compounds such as methyl ketone, 4,4'-diamino diphenyl ketone, 3,3'-diamino diphenyl ketone, 3,4-diamino diphenyl ketone; 2- (P-dimethylaminophenyl) benzo Azole, 2- (p-diethylaminophenyl) benzo Azole, 2- (p-dimethylaminophenyl) benzo [4,5] benzo Azole, 2- (p-dimethylaminophenyl) benzo [6,7] benzo Azole, 2,5-bis (p-diethylaminophenyl) -1,3,4- Azole, 2- (p-dimethylaminophenyl) benzothiazole, 2- (p-diethylaminophenyl) benzothiazole, 2- (p-dimethylaminophenyl) benzimidazole, 2- ( P-diethylaminophenyl) benzimidazole, 2,5-bis (p-diethylaminophenyl) -1,3,4-thiadiazole, (p-dimethylaminophenyl) pyridine, (p-dimethylaminophenyl) Diethylaminophenyl) pyridine, (p-dimethylaminophenyl) quinoline, (p-diethylaminophenyl) quinoline, (p-dimethylaminophenyl) pyrimidine, (p-diethylamino) Phenyl) pyrimidine and other compounds containing p-dialkylaminophenyl and the like. Among them, 4,4'-dialkylamino diphenyl ketone is the most preferable. These sensitizing dyes may be used alone or in combination of two or more.
光敏化劑的調配量,相對於彩色光阻組成物中的總固體成分100質量份,較佳在0.01~30質量份之範圍,更佳在0.1~15質量份之範圍,進一步更佳在0.5~10質量份之範圍。 The blending amount of the photosensitizer is preferably in the range of 0.01 to 30 parts by mass, more preferably in the range of 0.1 to 15 parts by mass, and even more preferably 0.5 in relation to 100 parts by mass of the total solid content in the color photoresist composition. Range of ~ 10 parts by mass.
此外,本發明之彩色光阻組成物依用途、特性等目的,在不損害本發明之效果的範圍內,可調配有機溶劑、聚合抑制劑、抗靜電劑、消泡劑、黏度調整劑、光穩定劑、熱穩定劑、抗氧化劑等添加劑。 In addition, the color photoresist composition of the present invention may be provided with an organic solvent, a polymerization inhibitor, an antistatic agent, a defoaming agent, a viscosity adjusting agent, a Additives such as stabilizers, thermal stabilizers, antioxidants.
又,為了賦予本發明之彩色光阻組成物塗布適性,亦可添加有機溶劑來進行黏度調整。在此可使用的有機溶劑,較佳為對上述鹼溶性樹脂(A)、聚合性化合物(B) 、著色劑(C)、氟系界面活性劑(D)、光聚合起始劑(E)等調配成分的溶解性良好者。此種有機溶劑可例示例如:甲醇、乙醇、正丙醇、異丙醇等醇系溶劑;甲氧基醇、乙氧基醇等賽路蘇系溶劑;2-(2-甲氧基乙氧基)乙醇、2-(2-乙氧基乙氧基)乙醇等卡必醇系溶劑;乙酸乙酯、乙酸丁酯、甲氧基丙酸甲酯、乙氧基丙酸乙酯、乳酸乙酯等酯系溶劑;丙酮、甲基異丁基酮、環己酮等酮系溶劑;乙酸2-甲氧乙酯、乙酸2-乙氧乙酯、乙酸乙基賽路蘇等乙酸賽路蘇系溶劑;乙酸2-(2-甲氧基乙氧基)乙酯、乙酸2-(2-乙氧基乙氧基)乙酯等卡必醇乙酸酯系溶劑;二乙基醚、乙二醇二甲基醚、二乙二醇二甲基醚、四氫呋喃等醚系溶劑;N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等非質子性醯胺溶劑;γ-丁內酯等內酯系溶劑;苯、甲苯、二甲苯、萘等不飽和烴系溶劑;正庚烷、正己烷、正辛烷等飽和烴系溶劑等有機溶劑。這些溶劑之中,特別適合使用:乙酸2-甲氧乙酯、乙酸2-乙氧乙酯、乙酸乙基賽路蘇等乙酸賽路蘇系溶劑;乙酸2-(2-甲氧基乙氧基)乙酯、乙酸2-(2-乙氧基乙氧基)乙酯等卡必醇乙酸酯系溶劑;乙二醇二甲基醚、二乙二醇二甲基醚、丙二醇二乙基醚等醚系溶劑;N,N-二甲基乙醯胺等非質子性醯胺溶劑;甲氧基丙酸甲酯、乙氧基丙酸乙酯、乳酸乙酯等酯系溶劑。特佳可使用:N,N-二甲基乙醯胺、MBA(乙酸-3-甲氧基丁酯,CH3CH(OCH3)CH2CH2OCOCH3)、PGMEA(丙二醇單甲醚乙酸酯,CH3OCH2CH(CH3)OCOCH3)、DMDG(二乙二醇 二甲基醚,H3COC2H4OCH3)或混合此等者。而在本發明之彩色光阻組成物中,較佳使用這些有機溶劑將固體成分濃度調製為10~70質量%。 In addition, in order to impart coating suitability to the color photoresist composition of the present invention, an organic solvent may be added to adjust viscosity. The organic solvent usable here is preferably the above-mentioned alkali-soluble resin (A), polymerizable compound (B), colorant (C), fluorine-based surfactant (D), and photopolymerization initiator (E). Such as those with good solubility. Examples of such organic solvents include: alcohol solvents such as methanol, ethanol, n-propanol, and isopropanol; thioluth solvents such as methoxy alcohol and ethoxy alcohol; 2- (2-methoxyethoxy Carbitol solvents such as ethyl alcohol, 2- (2-ethoxyethoxy) ethanol; ethyl acetate, butyl acetate, methyl methoxypropionate, ethyl ethoxypropionate, ethyl lactate Ester solvents such as esters; ketone solvents such as acetone, methyl isobutyl ketone, cyclohexanone; 2-methoxyethyl acetate, 2-ethoxyethyl acetate, ethyl celex acetate Solvents; carbitol acetate solvents such as 2- (2-methoxyethoxy) ethyl acetate and 2- (2-ethoxyethoxy) ethyl acetate; diethyl ether, ethyl Ether solvents such as glycol dimethyl ether, diethylene glycol dimethyl ether, and tetrahydrofuran; N, N-dimethylformamide, N, N-dimethylacetamide, and N-methylpyrrolidine Aprotic solvents such as ketones; lactone solvents such as γ-butyrolactone; unsaturated hydrocarbon solvents such as benzene, toluene, xylene, and naphthalene; saturated hydrocarbon solvents such as n-heptane, n-hexane, and n-octane And other organic solvents. Among these solvents, particularly suitable are: 2-methoxyethyl acetate, 2-ethoxyethyl acetate, ethyl cyrusthru acetate acetate, etc .; 2- (2-methoxyethoxyacetate) Carbitol acetate solvents such as ethyl), 2- (2-ethoxyethoxy) ethyl acetate; ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, propylene glycol diethyl Ether solvents such as methyl ether; aprotic solvents such as N, N-dimethylacetamide; and ester solvents such as methyl methoxypropionate, ethyl ethoxypropionate, and ethyl lactate. Particularly good to use: N, N-dimethylacetamide, MBA (3-methoxybutyl acetate, CH 3 CH (OCH 3 ) CH 2 CH 2 OCOCH 3 ), PGMEA (propylene glycol monomethyl ether ethyl) Acid ester, CH 3 OCH 2 CH (CH 3 ) OCOCH 3 ), DMDG (diethylene glycol dimethyl ether, H 3 COC 2 H 4 OCH 3 ), or a mixture of these. In the color photoresist composition of the present invention, it is preferable to use these organic solvents to adjust the solid content concentration to 10 to 70% by mass.
又,較佳為依本發明之彩色光阻組成物的塗布方法選擇適當有機溶劑。例如,在以旋塗機、狹縫&旋轉塗布機、狹縫模具式塗布機等來形成塗膜的情形,係如例如日本特開2003-330187號公報、日本特開2004-246340號公報、日本特開2004-346218號公報、日本特開2004-354601號公報等所揭示般,較佳為適當地混合沸點等物性不同的溶劑來使用。而在以噴墨法形成像素的情形,例如如日本特開2009-7560等所揭示般,較佳為使用高沸點溶劑。 In addition, it is preferable to select an appropriate organic solvent according to the coating method of the color photoresist composition of the present invention. For example, when a coating film is formed by a spin coater, a slit & spin coater, a slit die coater, or the like, for example, Japanese Patent Application Laid-Open No. 2003-330187, Japanese Patent Application Laid-Open No. 2004-246340, As disclosed in Japanese Patent Application Laid-Open No. 2004-346218, Japanese Patent Application Laid-Open No. 2004-354601, and the like, it is preferable to appropriately use solvents having different physical properties such as boiling points. When a pixel is formed by an inkjet method, for example, as disclosed in Japanese Patent Application Laid-Open No. 2009-7560, it is preferable to use a high boiling point solvent.
使本發明之彩色光阻組成物硬化之活性能量線,可舉出光、電子線、放射線等活性能量線。具體的能量源或硬化裝置可舉出例如以殺菌燈、紫外線用螢光燈、碳弧、氙氣燈、複寫用高壓汞燈、中壓或高壓汞燈、超高壓汞燈、無電極燈、金屬鹵化物燈、自然光等為光源之紫外線,或由掃描型、簾式電子線加速器產生的電子線等。其中在以電子線硬化之情形,不需要對本發明的彩色光阻組成物調配前述聚合起始劑(E)。 Examples of the active energy rays which harden the color photoresist composition of the present invention include active energy rays such as light, electron rays, and radiation. Specific energy sources or hardening devices include, for example, germicidal lamps, ultraviolet fluorescent lamps, carbon arcs, xenon lamps, high-pressure mercury lamps for replication, medium- or high-pressure mercury lamps, ultra-high-pressure mercury lamps, electrodeless lamps, and metals. Halogen lamps, natural light, etc. are the ultraviolet rays of light sources, or electron beams generated by scanning, curtain electron beam accelerators, etc. However, when the electron beam is hardened, it is not necessary to mix the aforementioned polymerization initiator (E) with the color photoresist composition of the present invention.
這些活性能量線中,特別以紫外線為較佳。另外,若在氮氣等惰性氣體環境下照射,則因提升塗膜表面硬化性而為較佳。另外,亦可依需要將熱作為能量源併用,在用活性能量線硬化後,進行熱處理。 Among these active energy rays, ultraviolet rays are particularly preferred. In addition, when irradiated in an inert gas environment such as nitrogen, it is preferable to improve the surface hardenability of the coating film. In addition, heat may be used in combination as an energy source as required, and after being hardened with active energy rays, heat treatment may be performed.
本發明之彩色濾光片的特徵為具有本發明之彩色光 阻組成物的硬化塗膜。彩色濾光片能如後述般經由以下步驟來製造。 The color filter of the present invention is characterized by having the color light of the present invention. Resistive composition hardened coating film. The color filter can be manufactured through the following steps as described later.
(1)於基板上塗布本發明之彩色光阻組成物。 (1) The color photoresist composition of the present invention is coated on a substrate.
(2)乾燥經塗布的彩色光阻組成物(預烘烤)。 (2) The coated color photoresist composition is dried (pre-baking).
(3)使用光罩來曝光為所期望的圖案。 (3) Use a photomask to expose to a desired pattern.
(4)使用鹼性顯影液來進行顯影處理。 (4) Development processing is performed using an alkaline developer.
(5)以蒸餾水洗淨(沖洗)後,乾燥。 (5) After washing (rinsing) with distilled water, it is dried.
於前述(1)步驟所用的基板,只要是透明且具適度的強度者,其材質即無特別限制。材質可舉出例如:聚對苯二甲酸乙二酯等聚酯系樹脂;聚丙烯、聚乙烯等聚烯烴系樹脂;聚碳酸酯系樹脂;聚甲基丙烯酸甲酯等丙烯酸系樹脂;聚碸系樹脂等熱塑性樹脂製薄片;環氧樹脂、不飽和聚酯樹脂等熱硬化性樹脂薄片;或各種玻璃等。其中,從耐熱性的觀點來看,較佳為玻璃、耐熱性樹脂。為了對這些透明基板改良接著性等表面物性,亦可依需要進行電暈放電處理與臭氧處理等表面處理,以矽烷偶合劑與胺基甲酸酯系樹脂等各種樹脂等所作的薄膜形成處理等。透明基板的厚度通常為0.05mm以上,較佳為0.1mm以上,又,通常為10mm以下,較佳為7mm以下之範圍。另外,在進行以各種樹脂作薄膜形成處理的情形,其膜厚通常為0.01μm以上,較佳為0.05μm以上,又,通常為10μm以下,較佳為5μm以下之範圍。 The substrate used in the step (1) is not particularly limited as long as it is transparent and has a suitable strength. Examples of the material include polyester resins such as polyethylene terephthalate; polyolefin resins such as polypropylene and polyethylene; polycarbonate resins; acrylic resins such as polymethyl methacrylate; polyfluorene Sheets made of thermoplastic resins such as resins; thermosetting resin sheets such as epoxy resins and unsaturated polyester resins; or various glasses. Among them, glass and a heat-resistant resin are preferred from the viewpoint of heat resistance. In order to improve surface properties such as adhesion to these transparent substrates, surface treatments such as corona discharge treatment and ozone treatment may be performed as needed, and film formation treatments using various resins such as silane coupling agents and urethane resins, etc. . The thickness of the transparent substrate is usually 0.05 mm or more, preferably 0.1 mm or more, and usually 10 mm or less, and preferably 7 mm or less. In the case where various resins are used for thin film formation, the film thickness is usually 0.01 μm or more, preferably 0.05 μm or more, and usually 10 μm or less, and preferably 5 μm or less.
藉由在上述透明基板上設置黑色矩陣,再進一步形成通常為紅色、綠色、藍色的各像素圖像,可製作彩色濾光片。黑色矩陣係利用遮光金屬薄膜,或本發明之著 色樹脂組成物,形成於透明基板上。 By providing a black matrix on the transparent substrate, and further forming each pixel image that is usually red, green, and blue, a color filter can be produced. The black matrix uses a light-shielding metal film, or a work of the present invention The colored resin composition is formed on a transparent substrate.
作為前述遮光金屬材料,可使用金屬鉻、氧化鉻、氮化鉻等鉻化合物、鎳與鎢的合金等,亦可將它們積層為複數層狀。這些遮光金屬薄膜能以一般的濺鍍法形成,也能以正型光阻,於膜上形成所期望的圖案。 As the light-shielding metal material, a chromium compound such as metallic chromium, chromium oxide, and chromium nitride, an alloy of nickel and tungsten, or the like may be used, or these may be laminated in a plurality of layers. These light-shielding metal thin films can be formed by a general sputtering method, and can also form a desired pattern on the film with a positive photoresist.
對前述鉻係使用硝酸鈰銨與過氯酸及/或硝酸混合而成的蝕刻液,對其它材料係依材料使用蝕刻液加以蝕刻,最後經由以專用的剝離劑來剝離正型光阻,藉此可形成黑色矩陣。在此情形,首先以蒸鍍或濺鍍法等,在透明基板上形成此等金屬或金屬‧金屬氧化物之薄膜。接下來,於此薄膜上形成本發明之彩色光阻用組成物的塗布膜。接下來,使用具有條紋、馬賽克、三角等重覆圖案的光罩,將塗布膜曝光、顯影,形成圖像。然後,可對此塗布膜施以蝕刻處理形成黑色矩陣。 For the above-mentioned chromium-based etching solution containing ammonium cerium nitrate mixed with perchloric acid and / or nitric acid, for other materials, etching is performed by using an etching solution depending on the material, and finally, the positive-type photoresist is peeled off by using a special release agent. This can form a black matrix. In this case, first, a thin film of such a metal or metal ‧ metal oxide is formed on a transparent substrate by a vapor deposition method or a sputtering method. Next, a coating film of the color photoresist composition of the present invention is formed on the thin film. Next, using a photomask having repeated patterns such as stripes, mosaics, and triangles, the coating film is exposed and developed to form an image. Then, the coating film may be subjected to an etching treatment to form a black matrix.
另外,亦可使用含有黑色顏料的光聚合性著色樹脂組成物,來形成黑色矩陣。例如使用含有單獨一種或複數種碳黑、石墨、鐵黑、鈦黑等黑色顏料的著色樹脂組成物,或含有將從無機或有機的顏料中適當選擇出的紅色、綠色、藍色等顏料加以混合而得之黑色顏料的著色樹脂組成物,以與後述形成紅色、綠色、藍色的像素圖像之相同方法,可形成黑色矩陣。 In addition, a black matrix may be formed using a photopolymerizable colored resin composition containing a black pigment. For example, a colored resin composition containing black pigments such as carbon black, graphite, iron black, and titanium black alone, or pigments such as red, green, and blue, which are appropriately selected from inorganic or organic pigments, are used. The coloring resin composition of the black pigment obtained by mixing can form a black matrix in the same manner as described later to form pixel images of red, green, and blue.
關於黑色的著色組成物係在前述透明基板上,經過塗布、加熱乾燥、圖像曝光、顯影及熱硬化等各處理,形成黑色的像素圖像,而關於紅色、綠色、藍色的著色組成物,則係於形成在透明基板上的樹脂黑色矩陣形成 面上,或在使用鉻化合物等其它遮光金屬材料所形成之金屬黑色矩陣形成面上,經過塗布、加熱乾燥、圖像曝光、顯影及熱硬化等各處理,形成各色的像素圖像。 The black coloring composition is formed on the transparent substrate, and is subjected to various processes such as coating, heating and drying, image exposure, development, and thermal curing to form a black pixel image, and the red, green, and blue coloring composition Is formed by a resin black matrix formed on a transparent substrate On the surface, or on a metal black matrix formation surface formed using other light-shielding metal materials such as a chromium compound, a pixel image of each color is formed through various processes such as coating, heating and drying, image exposure, development, and thermal curing.
在設置有黑色矩陣的透明基板上,塗布含有紅色、綠色、藍色中的一色之色材的著色樹脂組成物,於乾燥後,在塗布膜上覆蓋光罩,透過此光罩將圖像曝光,顯影,依需要以熱硬化或光硬化形成像素圖像,製作著色層。藉由對紅色、綠色、藍色三色的著色樹脂組成物分別進行此操作,可形成彩色濾光片圖像。 On a transparent substrate provided with a black matrix, a coloring resin composition containing one color material of red, green, and blue is coated, and after drying, a coating is covered on the coating film, and the image is exposed through this mask , Develop, if necessary, form a pixel image by thermal curing or light curing, and make a colored layer. By performing this operation on the colored resin compositions of red, green, and blue, respectively, a color filter image can be formed.
將本發明之彩色光阻用組成物供給到基板之方法,可舉出例如:使用凹版印刷塗布機、輥塗機、缺角輪塗布機(comma coater)、刮刀塗布機、簾式塗布機、淋浴式塗布機、旋塗機、狹縫塗布機、狹縫&旋轉塗布機、狹縫模具式塗布機、浸漬、網版印刷、噴塗、塗抹機、棒式塗布機等的塗布方法。 Examples of the method for supplying the color photoresist composition of the present invention to a substrate include a gravure coater, a roll coater, a comma coater, a blade coater, a curtain coater, Coating methods such as shower coater, spin coater, slit coater, slit & spin coater, slit die coater, dip, screen printing, spray coating, applicator, bar coater, etc.
塗布膜的厚度若過厚,則在圖案顯影變難的同時,在液晶胞化步驟會難以調整間隙,而另一方面若過薄時,則會難以提高顏料濃度,而會無法展現所期望的色彩。塗布膜的厚度,以乾燥後的膜厚來說,通常為0.2μm以上,較佳為0.5μm以上,更佳為0.8μm以上,另外通常為20μm以下,較佳為10μm以下,更佳為5μm以下之範圍。 If the thickness of the coating film is too thick, it will be difficult to adjust the gap in the liquid crystal cellization step while pattern development becomes difficult. On the other hand, if it is too thin, it will be difficult to increase the pigment concentration and the desired color will not be displayed. . The thickness of the coating film is usually 0.2 μm or more, preferably 0.5 μm or more, more preferably 0.8 μm or more, and usually 20 μm or less, preferably 10 μm or less, and more preferably 5 μm. The following range.
把將著色樹脂組成物塗布於基板後的塗布膜,於(2)步驟加以乾燥(預烘烤)。乾燥(預烘烤)能藉由以加熱板、烤箱等在50~140℃之溫度範圍加熱10~300秒鐘來進行。 其中,較佳為在70~130℃之溫度範圍加熱30~180秒鐘,更佳為在80~120℃之溫度範圍加熱30~90秒鐘。另外,為了進行更完全的乾燥,亦可在乾燥(預烘烤)前進行真空乾燥。 The coating film after the colored resin composition is applied to the substrate is dried (pre-baked) in step (2). Drying (pre-baking) can be performed by heating a hot plate, an oven, or the like in a temperature range of 50 to 140 ° C for 10 to 300 seconds. Among them, heating is preferably performed at a temperature range of 70 to 130 ° C for 30 to 180 seconds, and more preferably, heating is performed at a temperature range of 80 to 120 ° C for 30 to 90 seconds. For more complete drying, vacuum drying may be performed before drying (pre-baking).
乾燥(預烘烤)後,在(3)步驟使用光罩來曝光為所期望的圖案。具體來說,例如,在經過乾燥(預烘烤)的塗布膜上,覆蓋負型的矩陣圖案,透過此光罩圖案,進行照射紫外線或可見光線之光源。此時,依需要,為了防止以著色樹脂組成物所形成的光聚合性層因氧而降低敏感度,亦可在光聚合性層上形成聚乙烯醇層等氧阻隔層後,再進行曝光。 After drying (pre-baking), a photomask is used in step (3) to expose a desired pattern. Specifically, for example, a dried (pre-baked) coating film is covered with a negative matrix pattern, and the light source pattern is irradiated with ultraviolet or visible light through this mask pattern. At this time, in order to prevent the photopolymerizable layer formed of the colored resin composition from reducing sensitivity due to oxygen, an oxygen barrier layer such as a polyvinyl alcohol layer may be formed on the photopolymerizable layer before exposure.
曝光後,於(4)步驟進行顯影處理。在上述的顯影處理將未曝光的未硬化部分溶出到鹼性顯影液,僅留下經過光硬化的硬化部分。作為鹼性顯影液,只要是將未硬化部分溶解,且不會溶解RGB的各像素部及成為黑色矩陣部之硬化部分者,即可無特別限制地使用。具體的鹼性顯影液可舉出例如:氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉、偏矽酸鈉、氨水、乙胺、二乙胺、二甲基乙醇胺、氫氧化四甲基銨、氫氧化四乙基銨、膽鹼(choline)、吡咯、哌啶、1,8-二吖雙環-[5,4,0]-7-十一烯等鹼性化合物的水溶液。此鹼性顯影液的鹼濃度較佳為0.001~10質量%,更佳為0.01~1質量%。另外,顯影溫度通常在20℃~30℃,顯影時間較佳在20~90秒之範圍。 After the exposure, a development process is performed in step (4). The unexposed unhardened portion is eluted into the alkaline developing solution in the above-mentioned development process, leaving only the hardened portion that has undergone photo-hardening. The alkaline developer can be used without particular limitation as long as it dissolves the uncured portion and does not dissolve the pixel portions of RGB and the cured portion that becomes the black matrix portion. Specific examples of the alkaline developer include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, sodium metasilicate, ammonia, ethylamine, diethylamine, dimethylethanolamine, and hydrogen. Tetramethylammonium oxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazinebi- [5,4,0] -7-undecene and other basic compounds Aqueous solution. The alkali concentration of this alkaline developer is preferably 0.001 to 10% by mass, and more preferably 0.01 to 1% by mass. In addition, the development temperature is usually 20 ° C to 30 ° C, and the development time is preferably in the range of 20 to 90 seconds.
於顯影處理後,在(5)步驟以蒸餾水洗淨(沖洗)後,乾燥。在洗淨、乾燥時可依需要進行後烘烤處理。後烘 烤係為了讓硬化完全所進行的顯影後加熱處理,通常在200~250℃之溫度範圍加熱。後烘烤處理係對顯影後的層,以成為前述條件之方式使用加熱板、對流烤箱(熱風循環式乾燥機)、與高頻加熱機等加熱手段,能以連續式或批次式進行。 After the development process, it is washed (rinsed) with distilled water in step (5), and then dried. After washing and drying, post-baking treatment can be performed as required. After baking The baking system is usually heated at a temperature in the range of 200 to 250 ° C. for post-development heat treatment for complete curing. The post-baking treatment can be performed continuously or batchwise on the developed layer using heating means such as a hot plate, a convection oven (hot-air circulation type dryer), and a high-frequency heater so that the conditions described above are achieved.
讓如上述般製成的彩色濾光片之像素上形成有ITO等透明電極之基板與其它基板一起包夾液晶層使用作為基板,再組合背光板、偏光板、液晶層,可製成本發明之液晶顯示裝置。 The substrate with transparent electrodes such as ITO formed on the pixels of the color filter manufactured as described above is used as a substrate by sandwiching the liquid crystal layer with other substrates, and then combining the backlight plate, polarizing plate, and liquid crystal layer to form the invention. Liquid crystal display device.
使用本發明之彩色濾光片的液晶顯示裝置能廣範圍使用於例如:液晶電視、個人電腦、液晶投影機、攜帶式遊戲機、行動電話、個人數位助理(PDA)、數位音訊播放器、數位相機、數位攝影機、汽車導航等影像顯示部。 The liquid crystal display device using the color filter of the present invention can be widely used in, for example, liquid crystal televisions, personal computers, liquid crystal projectors, portable game consoles, mobile phones, personal digital assistants (PDAs), digital audio players, digital Cameras, digital cameras, car navigation and other image display units.
此外,使用在如上述般作成的彩色濾光片之像素上具有ITO等電極、單層或多層的有機發光層之基板,使用例如記載於「有機EL顯示器」(Ohm社,2004年8月20日發行,時任靜士、安達千波矢、村田英幸著)之方法等,可製作有機EL顯示器。又,本發明之彩色濾光片可適用於被動驅動式的有機EL顯示器,亦適用於主動驅動式的有機EL顯示裝置。 In addition, a substrate having electrodes such as ITO and a single-layer or multi-layer organic light-emitting layer on the pixels of the color filter prepared as described above is used as described in "Organic EL Display" (Ohm Corporation, August 20, 2004) Released at the time, and methods of Jing Shi, Adachi Chiwaya, Hideki Murata, etc., can produce organic EL displays. In addition, the color filter of the present invention can be applied to an organic EL display device of a passive driving type and an organic EL display device of an active driving type.
此外,本發明之彩色光阻組成物還可用於製造CCD圖像感測器、CMOS圖像感測器等固態攝影裝置、有機EL顯示裝置等彩色濾光片。 In addition, the color photoresist composition of the present invention can also be used for manufacturing color filters such as solid-state imaging devices such as CCD image sensors and CMOS image sensors, and organic EL display devices.
以下舉出具體實施例更詳細的說明本發明。範例中,「份」、「%」除非有特別說明,否則均為質量基準。 Hereinafter, the present invention will be described in more detail with reference to specific examples. In the examples, "part" and "%" are quality standards unless otherwise specified.
於配備有攪拌裝置、溫度計、冷凝管、及滴下裝置之玻璃燒瓶中,進料20g的以下式(a2-1-1)表示之於兩末端具有羥基的全氟聚醚化合物、20g作為溶劑的二異丙基醚、0.02g作為聚合抑制劑的對甲氧基苯酚及3.1g作為中和劑的三乙胺,在空氣氣流下開始攪拌,邊讓燒瓶內保持在10℃邊花1小時將2.7g的氯化丙烯酸滴入。滴入結束後,於10℃攪拌1小時,升溫,於30℃攪拌1小時後,升溫至50℃,經由攪拌10小時進行反應,以氣相層析儀測定,確認氯化丙烯酸消失。接下來,追加40g作為溶劑的二異丙基醚後,以混合攪拌80g的離子交換水後靜置之將水層分離除去之方法,重複3次洗淨。接下來,添加0.02份作為聚合抑制劑的對甲氧基苯酚,再添加8份作為脫水劑的硫酸鎂,藉由靜置1天完全脫水後,將脫水劑濾除。 In a glass flask equipped with a stirring device, a thermometer, a condensing tube, and a dropping device, 20 g of the following formula (a2-1-1) was fed. As a solvent, 20 g of a perfluoropolyether compound having hydroxyl groups at both ends was used. Diisopropyl ether, 0.02 g of p-methoxyphenol as a polymerization inhibitor, and 3.1 g of triethylamine as a neutralizing agent, start stirring under an air stream, and spend 1 hour while keeping the inside of the flask at 10 ° C. 2.7 g of chlorinated acrylic acid was dropped. After completion of the dropping, the mixture was stirred at 10 ° C. for 1 hour and heated up, and after stirring at 30 ° C. for 1 hour, the temperature was raised to 50 ° C., and the reaction was performed by stirring for 10 hours. Next, after adding 40 g of diisopropyl ether as a solvent, 80 g of ion-exchanged water was mixed and stirred, and then the water layer was separated and removed by standing, and the washing was repeated 3 times. Next, 0.02 parts of p-methoxyphenol as a polymerization inhibitor was added, and 8 parts of magnesium sulfate as a dehydrating agent was added. After being left to stand for 1 day to completely dehydrate, the dehydrating agent was filtered off.
接下來,藉由在減壓下餾除溶劑,得到具有以下式(d1-1-1)表示之聚(全氟伸烷基醚)鏈及在其兩末端有丙 烯醯基之聚合性單體。 Next, by distilling off the solvent under reduced pressure, a poly (perfluoroalkylene ether) chain having the following formula (d1-1-1) is obtained, and propylene is provided at both ends thereof. Alkenyl group polymerizable monomer.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶,進料30g的以下式(d2’-1)表示之環氧乙烷與環氧丙烷的嵌段共聚物、2.8g的丙烯酸、64g作為溶劑的甲苯、0.03g作為聚合抑制劑的啡噻及0.6g作為觸媒的甲磺酸,在空氣氣流下開始攪拌,加熱到120℃,回流脫水。確認0.63g的脫水後,冷卻到65℃,用三乙胺中和。中和後,升溫至85℃,添加2.3g的離子交換水,分液,抽取出下層。測定下層的pH,在pH達7以上之前,重複實施洗淨操作。冷卻至30℃後,以甲苯稀釋,得到含有55質量%以下式(d2-1)表示之聚合性單體的甲苯溶液。 In a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, 30 g of a block copolymer of ethylene oxide and propylene oxide represented by the following formula (d2'-1), 2.8 g of acrylic acid, 64 g of toluene as a solvent and 0.03 g of phenanthrene as a polymerization inhibitor And 0.6 g of methanesulfonic acid as a catalyst, stirring was started under an air flow, heated to 120 ° C, and dehydrated under reflux. After confirming 0.63 g of dehydration, it was cooled to 65 ° C and neutralized with triethylamine. After neutralization, the temperature was raised to 85 ° C., 2.3 g of ion-exchanged water was added, and the liquid was separated to extract the lower layer. The pH of the lower layer was measured, and the washing operation was repeatedly performed until the pH reached 7 or more. After cooling to 30 ° C, it was diluted with toluene to obtain a toluene solution containing 55 mass% of a polymerizable monomer represented by the following formula (d2-1).
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之 玻璃燒瓶注入297.5g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將59.5g的合成例1所得到的聚合性單體、238g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-1000」,氧伸丙基單元的重複數:平均6)溶解於154.4質量份的甲基異丁基酮而成之單體溶液,及將44.6g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於100.6g的甲基異丁基酮而成的聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D1)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D1)之分子量的結果,數量平均分子量為2,500,重量平均分子量為6,000。另外,使用之原料單體中的含氟率為11質量%。 For those equipped with a stirring device, thermometer, condensation tube, and dripping device A glass flask was charged with 297.5 g of methyl isobutyl ketone as a solvent, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, 59.5 g of the polymerizable monomer obtained in Synthesis Example 1 and 238 g of polypropylene glycol monomethacrylate ("BLEMMER PP-1000" manufactured by Nippon Oil Co., Ltd.) were used. : Average 6) A monomer solution prepared by dissolving 154.4 parts by mass of methyl isobutyl ketone, and 44.6 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator was dissolved in Three kinds of dripping solutions of a polymerization initiator solution made of 100.6 g of methyl isobutyl ketone were set in respective dropping devices, and the flask was dropped for 2 hours while keeping the inside of the flask at 105 ° C. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D1) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D1) by GPC (molecular weight converted into polystyrene), the number average molecular weight was 2,500, and the weight average molecular weight was 6,000. The fluorine content in the raw material monomer used was 11% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入112.4g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將59.5g的合成例1所得到的聚合性單體、238g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-1000」、氧伸丙基單元之重複數:平均6)溶解於167.5g的甲基異丁基酮而成之單體溶液,及將44.6g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於83.7g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴 下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D2)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D2)之分子量的結果,數量平均分子量為3,000,重量平均分子量為12,000。另外,使用之原料單體中的含氟率為11質量%。 A glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device was charged with 112.4 g of methyl isobutyl ketone as a solvent, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, the number of repeats of 59.5 g of the polymerizable monomer obtained in Synthesis Example 1, 238 g of polypropylene glycol monomethacrylate ("BLEMMER PP-1000" manufactured by Nippon Oil Co., Ltd., and oxypropylene units was repeated. : Average 6) A monomer solution prepared by dissolving in 167.5 g of methyl isobutyl ketone, and 44.6 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator were dissolved in 83.7 Three kinds of drops of a polymerization initiator solution made of g of methyl isobutyl ketone were set in respective drops. The apparatus was lowered, and it was dripped in for 2 hours while keeping the inside of the flask at 105 ° C. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D2) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D2) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 3,000, and the weight average molecular weight was 12,000. The fluorine content in the raw material monomer used was 11% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入100.3g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將20g的合成例1所得到的聚合性單體,與145.5g的合成例2所得到的聚合性單體溶液(80g的單體)混合而成之單體溶液,及將15g的自由基聚合起始劑之過氧-2-乙基己酸三級丁酯溶解於20g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D3)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D3)之分子量的結果,數量平均分子量為5,500,重量平均分子量為25,000。另外,使用之原料單體中的含氟率為11質量%。 100.3 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, a monomer solution obtained by mixing 20 g of the polymerizable monomer obtained in Synthesis Example 1 with 145.5 g of the polymerizable monomer solution (80 g of monomer) obtained in Synthesis Example 2 and 15 g 3 kinds of dripping solution of polymerization initiator solution obtained by dissolving tertiary butyl peroxy-2-ethylhexanoate of free radical polymerization initiator in 20 g of methyl isobutyl ketone, respectively The dropping device was dripped for 2 hours while keeping the inside of the flask at 105 ° C. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D3) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D3) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 5,500, and the weight average molecular weight was 25,000. The fluorine content in the raw material monomer used was 11% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入143.4g作為溶劑的甲基異丁基酮,在氮氣 流下邊攪拌邊升溫至105℃。接下來,把將68.1g的合成例1所得到的聚合性單體、57.9g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-1000」、氧伸丙基單元之重複數:平均6)溶解於68.5g的甲基異丁基酮而成之單體溶液,及將18.9g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於21.9g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D4)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D4)之分子量的結果,數量平均分子量為2,600,重量平均分子量為7,000。另外,使用之原料單體中的含氟率為30質量%。 143.4 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condensing tube, and a dropping device. The temperature was raised to 105 ° C while stirring. Next, 68.1 g of the polymerizable monomer obtained in Synthesis Example 1, 57.9 g of polypropylene glycol monomethacrylate ("BLEMMER PP-1000" manufactured by Nippon Oil Co., Ltd., and oxypropylene units were repeated. Number: Average 6) A monomer solution prepared by dissolving in 68.5 g of methyl isobutyl ketone, and 18.9 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator were dissolved in Three kinds of drops of a polymerization initiator solution made of 21.9 g of methyl isobutyl ketone were set in respective dropping devices, and the flask was kept dripping for 2 hours while keeping the inside of the flask at 105 ° C. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D4) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D4) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 2,600, and the weight average molecular weight was 7,000. The fluorine content in the raw material monomer used was 30% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入141.3g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將68.5g的合成例1所得到的聚合性單體、58.4g的聚乙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PE-350」、氧伸乙基單元之重複數:平均8)溶解於72.4g的甲基異丁基酮而成之單體溶液,及將19g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於22g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。 滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D5)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D5)之分子量的結果,數量平均分子量為1,800,重量平均分子量為20,500。另外,使用之原料單體中的含氟率為30質量%。 141.3 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, 68.5 g of the polymerizable monomer obtained in Synthesis Example 1 and 58.4 g of a polyethylene glycol monomethacrylate ("BLEMMER PE-350" manufactured by Nippon Oil Co., Ltd.) and an oxyethyl unit were used. Repeat number: on average 8) A monomer solution prepared by dissolving in 72.4 g of methyl isobutyl ketone, and 19 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator are dissolved Three kinds of drops of a polymerization initiator solution made of 22 g of methyl isobutyl ketone were set in respective dropping devices, and the flask was dropped for 2 hours while keeping the inside of the flask at 105 ° C. After completion of the dropping, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D5) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D5) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 1,800, and the weight average molecular weight was 20,500. The fluorine content in the raw material monomer used was 30% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入148.3g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將70g的合成例1所得到的聚合性單體、59.6g的聚乙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PE-200」,氧伸乙基單元的重複數:平均4.5)溶解於71g的甲基異丁基酮而成之單體溶液,及將19.4g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於21.3g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D6)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D6)之分子量的結果,數量平均分子量為1,800,重量平均分子量為11,500。另外,使用之原料單體中的含氟率為30質量%。 148.3 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, 70 g of the polymerizable monomer obtained in Synthesis Example 1 and 59.6 g of polyethylene glycol monomethacrylate ("BLEMMER PE-200" manufactured by Nippon Oil Co., Ltd.) were used. Repeat number: 4.5 on average) A monomer solution prepared by dissolving in 71 g of methyl isobutyl ketone, and 19.4 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator were dissolved in Three kinds of dripping solutions of a polymerization initiator solution made of 21.3 g of methyl isobutyl ketone were set in respective dropping devices, and while keeping the inside of the flask at 105 ° C., dripping was performed for 2 hours. After completion of the dropping, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D6) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D6) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 1,800, and the weight average molecular weight was 11,500. The fluorine content in the raw material monomer used was 30% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之 玻璃燒瓶注入152.7g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將70g的合成例1所得到的聚合性單體,59.6g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-800」,氧伸丙基單元之重複數:平均13)溶解於66.5g的甲基異丁基酮而成之單體溶液,及將19.4g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於21.5g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D7)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D7)之分子量的結果,數量平均分子量為2,200,重量平均分子量為4,200。另外,使用之原料單體中的含氟率為30質量%。 For those equipped with a stirring device, thermometer, condensation tube, and dripping device A glass flask was charged with 152.7 g of methyl isobutyl ketone as a solvent, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, 70 g of the polymerizable monomer obtained in Synthesis Example 1 and 59.6 g of polypropylene glycol monomethacrylate ("BLEMMER PP-800" manufactured by Nippon Oil Co., Ltd.) were used. : Average 13) Monomer solution prepared by dissolving in 66.5 g of methyl isobutyl ketone, and 19.4 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator was dissolved in 21.5 Three kinds of drops of a polymerization initiator solution made of g of methyl isobutyl ketone were set in respective dropping devices, and the flask was kept dripping for 2 hours while keeping the inside of the flask at 105 ° C. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D7) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D7) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 2,200, and the weight average molecular weight was 4,200. The fluorine content in the raw material monomer used was 30% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入146.6g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至105℃。接下來,把將69.9g合成例1所得到的聚合性單體、45.9g的甲氧基聚乙二醇甲基丙烯酸酯(新中村化學工業股份有限公司製「NK Ester M-230G」,氧伸丙基單元之重複數:平均23)、13.7g的丙烯酸三環[5.2.1.02,6]癸-8-基酯(日立化成股份有限公司製「Fancryl FA-513A」)溶解於72.2g的甲基異丁基酮而成之單體溶液,及將19.4g作為自由基聚合起始劑的過 氧-2-乙基己酸三級丁酯溶解於21.6g的甲基異丁基酮而成之聚合起始劑溶液之3種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在105℃的同時,邊花2小時滴入。滴入結束後,於105℃攪拌10小時後,經由在減壓下餾除溶劑,得到氟系界面活性劑之氟系共聚物(D8)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D8)之分子量的結果,數量平均分子量為3,300,重量平均分子量為8,800。另外,使用之原料單體中的含氟率為30質量%。 146.6 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 105 ° C. while stirring under a nitrogen stream. Next, 69.9 g of the polymerizable monomer obtained in Synthesis Example 1 and 45.9 g of methoxypolyethylene glycol methacrylate ("NK Ester M-230G" manufactured by Shin Nakamura Chemical Industry Co., Ltd. Repeat number of propylene units: 23 on average, 13.7 g of tricyclo [5.2.1.0 2,6 ] dec-8-yl acrylate ("Fancryl FA-513A" manufactured by Hitachi Chemical Co., Ltd.) was dissolved in 72.2 g Monomer solution made of methyl isobutyl ketone, and 19.4 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator was dissolved in 21.6 g of methyl isobutyl ketone Three kinds of dripping solution of the obtained polymerization initiator solution were set in respective dropping devices, and while keeping the inside of the flask at 105 ° C., dripping was performed for 2 hours. After the dropwise addition was completed, the mixture was stirred at 105 ° C. for 10 hours, and then the solvent was distilled off under reduced pressure to obtain a fluorine-based copolymer (D8) of a fluorine-based surfactant. As a result of measuring the molecular weight of this fluorine-based copolymer (D8) by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 3,300, and the weight average molecular weight was 8,800. The fluorine content in the raw material monomer used was 30% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入134g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至110℃。接下來,把將30.2份的丙烯酸(全氟辛基)乙酯(以下簡稱為「PFOEA」。)及70.4g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-1000」,氧伸丙基單元的重複數:平均6)溶解於50.3g的甲基異丁基酮而成之單體溶液,及將7.5g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於50.3份的甲基異丁基酮而成之聚合起始劑溶液之2種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在110℃的同時,邊花2小時滴入。在滴入結束後,於110℃攪拌10小時,得到比較對照用氟系界面活性劑之氟系共聚物(D’1)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D’1)之分子量的結果,數量平均分子量為2,400,重量平均分子量為4,000。另外,使用之原料單體 中的含氟率為19質量%。 134 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 110 ° C. while stirring under a nitrogen stream. Next, 30.2 parts of ethyl acrylate (perfluorooctyl) (hereinafter referred to as "PFOEA") and 70.4 g of polypropylene glycol monomethacrylate ("BLEMMER PP-1000" manufactured by Nippon Oil Co., Ltd.) Number of repeats of oxypropylene units: on average 6) a monomer solution dissolved in 50.3 g of methyl isobutyl ketone, and 7.5 g of peroxy-2-ethyl as a radical polymerization initiator Two drops of a polymerization initiator solution in which tertiary butyl hexanoate was dissolved in 50.3 parts of methyl isobutyl ketone were placed in separate dropping devices, and the flask was kept at 110 ° C while being maintained. , While taking 2 hours to drip. After the dropwise addition was completed, the mixture was stirred at 110 ° C for 10 hours to obtain a fluorine-based copolymer (D'1) of a fluorine-based surfactant for comparison. When the molecular weight of this fluorine-based copolymer (D'1) was measured by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 2,400, and the weight average molecular weight was 4,000. In addition, the raw materials used The fluorine content in the compound was 19% by mass.
於配備有攪拌裝置、溫度計、冷凝管、滴下裝置之玻璃燒瓶注入126.3g作為溶劑的甲基異丁基酮,在氮氣流下邊攪拌邊升溫至110℃。接下來,把將50.5g的PFOEA及50.5g的聚丙二醇單甲基丙烯酸酯(日油股份有限公司製「BLEMMER PP-1000」,氧伸丙基單元的重複數:平均6)溶解於12.6g的甲基異丁基酮而成之單體溶液,及將5.1g作為自由基聚合起始劑的過氧-2-乙基己酸三級丁酯溶解於12.6g的甲基異丁基酮而成之聚合起始劑溶液等2種滴液,設置於各自分別的滴下裝置,在邊讓燒瓶內保持在110℃的同時,邊花2小時滴入。在滴入結束後,於110℃攪拌10小時,得到比較對照用氟系界面活性劑之氟系共聚物(D’2)。以GPC(以聚苯乙烯換算之分子量)測定此氟系共聚物(D’2)之分子量的結果,數量平均分子量為3,500,重量平均分子量為6,500。另外,使用之原料單體中的含氟率為31質量%。 126.3 g of methyl isobutyl ketone as a solvent was poured into a glass flask equipped with a stirring device, a thermometer, a condenser, and a dropping device, and the temperature was raised to 110 ° C. while stirring under a nitrogen stream. Next, 50.5 g of PFOEA and 50.5 g of polypropylene glycol monomethacrylate ("BLEMMER PP-1000" manufactured by Nippon Oil Co., Ltd., repeat number of oxypropylene units: 6 on average) were dissolved in 12.6 g Monomer solution made of methyl isobutyl ketone, and 5.1 g of tert-butyl peroxy-2-ethylhexanoate as a radical polymerization initiator was dissolved in 12.6 g of methyl isobutyl ketone The two kinds of dripping liquids, such as the polymerization initiator solution, were set in respective dropping devices, and the mixture was dropped for 2 hours while keeping the inside of the flask at 110 ° C. After the dropwise addition was completed, the mixture was stirred at 110 ° C for 10 hours to obtain a fluorine-based copolymer (D'2) of a fluorine-based surfactant for comparison. When the molecular weight of this fluorine-based copolymer (D'2) was measured by GPC (molecular weight in terms of polystyrene), the number average molecular weight was 3,500, and the weight average molecular weight was 6,500. The fluorine content in the raw material monomer used was 31% by mass.
對進料有200份的直徑0.5mm之氧化鋯珠之高速分散機,進料8份作為著色劑的C.I.Pigment Red 254、2.5份的聚酯系分散劑(Ajinomoto Fine-Techno股份有限公司製「AJISPER PB-814」)、25份作為鹼溶性樹脂的甲基丙烯酸/甲基丙烯酸芐酯=13/87(質量比)共聚物(酸價84、數量平均分子量9,500)之丙二醇單甲醚乙酸酯(以下簡稱為「PGMEA」。)溶液(非揮發成分39.7質量%)、及64.5 份作為溶劑的PGMEA,以轉速2000rpm進行8小時分散,得到紅色顏料分散液。 For a high-speed disperser with 200 parts of zirconia beads with a diameter of 0.5 mm, 8 parts of CIPigment Red 254 as a colorant and 2.5 parts of a polyester-based dispersant (made by Ajinomoto Fine-Techno Co., Ltd. AJISPER PB-814 ''), 25 parts of propylene glycol monomethyl ether acetic acid, methacrylic acid / benzyl methacrylate = 13/87 (mass ratio) copolymer (acid value 84, number average molecular weight 9,500) as alkali-soluble resin Ester (hereinafter referred to as "PGMEA") solution (non-volatile content 39.7% by mass), and 64.5 Parts of PGMEA as a solvent were dispersed at a rotation speed of 2000 rpm for 8 hours to obtain a red pigment dispersion liquid.
對100份的調製例1所得到之紅色顏料分散液,添加7份作為聚合性化合物的二新戊四醇六丙烯酸酯、及0.3份的光聚合起始劑(BASF Japan股份有限公司「IRGACURE 369」;2-芐基-2-二甲胺基-1-(4-N-啉基苯基)-丁酮-1),混合,得到組成物。對該混合液,相對於該組成物中所含有的非揮發成分,添加0.5%的合成例3所得到之氟系共聚物(D1)混合後,以孔徑1.0μm的過濾器過濾,調製成彩色光阻組成物(1)。 To 100 parts of the red pigment dispersion liquid obtained in Preparation Example 1, 7 parts of dipentaerythritol hexaacrylate as a polymerizable compound and 0.3 parts of a photopolymerization initiator (BASF Japan Co., Ltd. "IRGACURE 369" were added. "; 2-benzyl-2-dimethylamino-1- (4-N- Phenylphenyl) -butanone-1) and mixed to obtain a composition. The mixed solution was added with 0.5% of the fluorine-based copolymer (D1) obtained in Synthesis Example 3 to the non-volatile components contained in the composition, and then filtered through a filter having a pore diameter of 1.0 μm to prepare a color. Photoresist composition (1).
對於彩色光阻組成物(1)的塗布性與防液體回流性,用以下所示之方法實施試驗,進行評價。評價結果示於表1。 The coating properties and liquid repellency of the color photoresist composition (1) were tested by the methods shown below and evaluated. The evaluation results are shown in Table 1.
將1ml的彩色光阻組成物滴在12cm見方的玻璃板上之中央部分,以轉速600rpm、回轉時間30秒鐘旋塗後,以90℃加熱乾燥3分鐘,製成於玻璃板上形成有彩色光阻組成物的塗膜之試驗片。以目視觀察試驗片上的塗膜之塗布不均的發生,依下述基準評價。而此塗布不均中係包含後述之<防液體回流性之試驗方法>中的液體回流區域。 1ml of colored photoresist composition was dropped on the central part of a 12cm square glass plate, spin-coated at a speed of 600rpm and a rotation time of 30 seconds, and then dried by heating at 90 ° C for 3 minutes to form a color on the glass plate Test piece of coating film of photoresist composition. The occurrence of coating unevenness of the coating film on the test piece was visually observed, and evaluated according to the following criteria. In addition, this coating unevenness includes a liquid reflow region in the "Test Method for Liquid Reflow Resistance" described later.
評價1:發生塗布不均的面積為塗布面積的10%以下。 Evaluation 1: The area where coating unevenness occurred was 10% or less of the coating area.
評價2:發生塗布不均的面積為塗布面積的10~50%。 Evaluation 2: The area where coating unevenness occurred was 10 to 50% of the coating area.
評價3:發生塗布不均的面積為塗布面積的50%以上。 Evaluation 3: The area where coating unevenness occurred was 50% or more of the coating area.
測定形成於前述試驗片端部之液體回流區域的寬,每1邊3處,總計12處,求平均值。此值越小即為液體越不易回流之彩色光阻組成物。 The width of the liquid recirculation region formed at the end of the test piece was measured, and there were 3 locations on each side, a total of 12 locations, and the average value was calculated. The smaller this value is the color photoresist composition that the liquid is less likely to flow back.
除了使用表1及表2所示之氟系共聚物以外,與實施例1同樣地進行,得到彩色光阻組成物(2)~(8)及比較對照用彩色光阻組成物(1’)及(2’)。進行與實施例1相同的塗布性與防液體回流性之評價。評價結果示於表1。 A color photoresist composition (2) to (8) and a comparative photoresist composition (1 ') were obtained in the same manner as in Example 1 except that the fluorine-based copolymers shown in Tables 1 and 2 were used. And (2 '). The same applicability and evaluation of liquid repellency as in Example 1 were evaluated. The evaluation results are shown in Table 1.
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