TWI707742B - Window structure for measuring thickness of workpiece - Google Patents

Abstract

Provided is a window structure for measuring thickness of workpiece capable of stably fixing a window member on a surface of a surface plate. A window structure 1 for measuring the thickness of a workpiece comprises a measurement hole 2 penetrating upper and lower surfaces 211a, 211b of an upper surface plate 211 of a polishing apparatus 201 for polishing a thin plate-like workpiece W, and a window member 3 inserted into the measurement hole 2. The window member 3 has a cylindrical portion 31 whose lower end side is inserted into the measurement hole 2 and a translucent window plate 32 provided at the lower end of the cylindrical portion 31. Further, the window structure 1 for measuring the thickness of a workpiece comprises a fixing portion 4 holds the outer peripheral surface 31a on the upper end side of the cylindrical portion 31 so as to make surface contact and is fixed to the upper surface 211a of the upper surface plate 211.

Description

Window structure for thickness measurement of workpiece

The invention relates to a window structure for measuring the thickness of a workpiece.

Conventionally, in order to flatten both sides or one side of thin-plate-shaped workpieces such as silicon wafers, glass, ceramics, and crystals, a polishing device for polishing workpieces has been used.

Generally speaking, this type of grinding device is connected to a plate thickness measuring device that measures the thickness of the workpiece when grinding the workpiece. As such a thickness measuring device, for example, a device that irradiates infrared rays on a workpiece and receives reflected light to measure the thickness of the workpiece.

The platen of the polishing apparatus is provided with a window structure for measurement (a window structure for measuring the thickness of a workpiece) as shown in Patent Document 1, for example. This measuring window structure is formed by installing window members in measuring holes penetrating the surface and back of the fixed plate of the polishing device. The window member is composed of a cylindrical part inserted into the measuring hole at one end side, a translucent window plate provided at one end of the cylindrical part, and a fixing part provided at the other end of the cylindrical part. The fixing part is fixed to the surface of the platen. The measurement window structure of Patent Document 1 constructed in this way is such that the infrared rays emitted from the plate thickness measuring device penetrate the window plate through the cylindrical portion and irradiate the surface of the workpiece, and the reflected light reflected by the surface and back of the workpiece The penetrating window is received by the thickness measuring device through the cylindrical portion. Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 2013-223908

Problems to be solved by the invention

However, in the measurement window structure of Patent Document 1, since the fixing part holds the other end of the cylindrical part of the window member and is fixed to the surface of the table, the window member may be accidentally tilted due to the vibration of the table. . In this case, since the window member becomes unable to penetrate the infrared or reflected light necessary for measuring the thickness of the workpiece, the accuracy of the measurement value of the thickness that can be obtained by the thickness measurement device is reduced. Therefore, it is desired to have a window structure for plate thickness measurement that can stably fix the window member on the surface of the platen.

The present invention was developed in view of the above-mentioned problems, and its object is to provide a window structure for measuring plate thickness of a workpiece that can stably fix the window member on the surface of the table plate.

Means to solve the problem

The window structure for measuring the thickness of the workpiece of the present invention is provided with: a measuring hole, which penetrates the surface and back of the table of the polishing device for grinding a thin-plate-shaped workpiece; and a window member having a cylindrical part inserted into the measuring hole at one end and set in The translucent window at one end of the cylindrical portion; and a fixing portion that holds the outer peripheral surface of the other end of the cylindrical portion in a surface contact manner and is fixed to the surface of the platen.

Invention effect

In the window structure for measuring the plate thickness of the workpiece of the present invention, the fixing portion holds the outer peripheral surface of the other end side of the cylindrical portion in a surface contact manner. Thereby, since the range of the fixing portion holding the cylindrical portion of the window member is wider than before, it becomes possible to continuously hold the cylindrical portion of the window member while maintaining the pre-adjusted angle. Therefore, the window structure for measuring the thickness of the workpiece of the present invention can stably fix the window member on the surface of the table.

Hereinafter, embodiments of the present invention will be described based on the drawings.

FIG. 1 is a schematic diagram showing the structure of a polishing system 101 using a window structure 1 for measuring plate thickness of a workpiece according to an embodiment of the present invention. Such a polishing system 101 includes a polishing device 201 and a plate thickness measuring device 301 connected to the polishing device 201. The structure of the polishing device 201 and the plate thickness measuring device 301 will be briefly described using FIG. 1.

The polishing device 201 is a device for polishing both sides of a thin-plate-shaped workpiece W using an abrasive. Such a polishing device 201 includes an upper plate 211 and a lower plate 212 that are rotationally driven; and a control unit 213 that controls the driving of the upper plate 211 and the lower plate 212.

Polishing pads (not shown) are attached to the lower surface 211b of the upper platen 211 and the upper surface 212a of the lower platen 212, respectively. A star wheel 214 is arranged between the polishing pads of both sides, and is placed on the lower platen 212. The planetary wheel 214 holds the workpiece W. The polishing device 201 is constructed in the following manner. The upper surface plate 211 and the lower surface plate 212 are rotationally driven, and both sides of the workpiece W are polished with both polishing pads while the abrasive is supplied.

The plate thickness measuring device 301 is a device for measuring the plate thickness Wt of the workpiece W being polished. The thickness measuring device 301 is provided with a measuring device body 311, a laser head 312 connected to the measuring device body 311, and a data analysis unit 313.

Although not shown, the measuring device main body 311 includes an oscillator that emits infrared rays Ra and a measuring device that measures the interference intensity of the reflected light Rb (see FIG. 13). The laser head 312 is constructed in the following way. While irradiating the infrared rays Ra emitted from the oscillator to the surface Wa of the workpiece W being polished, it also receives the reflected light Rb reflected by the surface Wa and the back surface Wb of the workpiece W.

The input side of the data analysis unit 313 is connected to the measuring device of the measuring device body 311, and the output side is connected to the control unit 213 of the polishing device 201. The data analysis unit 313 is constructed in the following manner. The measurement value of the interference intensity is obtained from the measuring device, and the plate thickness Wt of the workpiece W is calculated in real time based on the measurement value. Furthermore, the data analysis unit 313 is also configured in the following manner, and can send the calculated thickness Wt of the workpiece W to the control unit 213. The control unit 213 is configured in the following manner, and controls the rotational driving of the upper platen 211 and the lower platen 212.

The upper plate 211 is provided with the window structure 1 for measuring the thickness of the workpiece of the present embodiment. The window structure 1 for measuring the thickness of the workpiece is shown in FIG. 13, and its purpose is to allow the infrared rays Ra emitted from the laser head 312 to pass and irradiate the surface Wa of the workpiece W, and to allow the surface Wa and the back surface Wb of the workpiece W The reflected light Rb passes through and is received by the laser head 312. The structure of the window structure 1 for plate thickness measurement of this work is specifically demonstrated below.

Fig. 2 is a longitudinal sectional view of the window structure 1 for measuring the thickness of the workpiece. The window structure 1 for measuring plate thickness of this workpiece is provided with a measuring hole 2, which penetrates the upper and lower surfaces (surface and back) 211a and 211b of the upper surface of the upper plate 211 of the polishing device 201; the window member 3 is inserted into the measuring hole 2; and the fixing part 4. The window member 3 is held and fixed to the upper surface 211a of the upper platen 211. Furthermore, the window structure 1 for plate thickness measurement of this workpiece is equipped with the outer cover 5, covers the window member 3 and the fixing part 4, and is fixed to the upper surface 211a of the upper platen 211.

The path of the measuring hole 2 is formed from the lower surface 211b of the upper platen 211 toward the upper surface 211a. A bolt 6 with a hole is inserted and fixed in the upper part of the measuring hole 2. Here, the bolt 6 with a hole is provided with an insertion hole 6a penetrating the upper and lower surfaces. A bush 7 fixed to the upper surface 211a of the upper platen 211 is fitted into the outer periphery of the bolt 6 with a hole. On the upper surface 7a of the bush 7, a plurality of fixing holes 7c are provided around the central hole 7b through which the holed bolt 6 passes. The plurality of fixing holes 7c are arranged in the circumferential direction of the bush 7 at predetermined intervals. In addition, the fixing portion 4 holding the window member 3 may be fixed to the upper surface 211 a of the upper platen 211 without passing through the bolt 6 or the bush 7.

Next, the structure of the window member 3 is demonstrated. This window member 3 is provided with a cylindrical part 31 inserted into the measuring hole 2 and a window plate 32 provided at the lower end of the cylindrical part 31. The coating material 33 is further provided to cover the outer peripheral surface 31 a of the cylindrical portion 31.

The cylindrical portion 31 is formed into a cylindrical shape by using glass materials such as quartz glass and BK-7, sapphire, and resin. The cylindrical portion 31 has an opening at one end. This cylindrical part 31 is inserted into the measuring hole 2 from the middle part to the lower part 31b. The upper edge portion 31d of the cylindrical portion 31 is bent outward to be formed in a flange shape.

The window plate 32 is formed into a plate shape by using glass-based materials such as quartz glass and BK-7, sapphire, resin, and other light-transmitting materials. The window plate 32 is arranged at the lower end of the cylindrical portion 31 by welding, bonding, or integral forming. In addition, from the viewpoint of preventing scratches caused by abrasives, grinding scum, etc., it is preferable that the cylindrical portion 31 and the window plate 32 are formed of a brittle material having translucency. In addition, when a brittle material is selected as the material of the cylindrical portion 31 and the window plate 32, the window plate 32 is preferably provided on the cylindrical portion 31 by welding. The covering material 33 is composed of a heat-shrinkable tube made of resin. The covering material 33 is in close contact with the outer peripheral surface 31 a of the cylindrical portion 31.

Next, the structure of the fixed part 4 is demonstrated. The fixing portion 4 includes an insertion portion 41 that penetrates the upper portion 31 c of the cylindrical portion 31, and a fixing portion main body 42 that is fixed to the upper surface 211 a of the upper platen 211 inserted into the outer periphery of the insertion portion 41.

The insertion portion 41 is provided with a sleeve 411; an annular elastic member 412 fitted into the lower part of the outer circumferential surface 411e of the sleeve 411; and a collar 413 fitted into the middle part of the outer circumferential surface 411e of the sleeve 411. The insertion portion 41 further includes an annular elastic member 414, which is fitted into the upper part of the outer peripheral surface 411e of the sleeve 411.

The sleeve 411 is formed into a substantially cylindrical shape by resin. The upper part 31c of the cylindrical part 31 penetrates the inside of the sleeve 411 through the covering material 33. The upper edge portion 31 d of the cylindrical portion 31 is locked on the upper surface 411 a of the sleeve 411 through the covering material 33.

FIG. 3 is a plan view of the sleeve 411. FIG. 4 is a front view of the sleeve 411. The sleeve 411 is provided with a sleeve body 4111; and a flange portion 4112, which is integrally formed on the outer periphery of the lower part of the sleeve body 4111. The sleeve body 4111 is formed in a cylindrical shape. The flange 4112 is formed in an annular shape.

A plurality of upper notches 411b are provided on the upper surface 411a of the sleeve 411 (the upper surface of the sleeve body 4111) downward. The plurality of upper notches 411b are arranged in the circumferential direction of the sleeve 411 at predetermined intervals. On the lower surface 411c of the sleeve 411 (the lower surface of the sleeve body 4111 and the flange portion 4112), a plurality of lower notches 411d are provided upward. The multiple lower notches 411d are arranged between adjacent upper notches 411b and 411b in the circumferential direction of the sleeve 411.

As shown in FIG. 2, the annular elastic member 412 is formed of an elastic member such as a rubber material such as silicone (for example, an O-ring). The annular elastic member 412 is supported by the flange portion 4112 of the sleeve 411 and is embedded in the lower part of the outer peripheral surface 411e of the sleeve body 4111.

Fig. 5 is a longitudinal sectional view of the collar 413. This collar 413 is formed in a cylindrical shape. The upper part 413b of the inner peripheral surface 413a of the collar 413 is formed so as to expand into a conical shape on the outside of the middle portion 413c of the inner peripheral surface 413a. The lower portion 413d of the inner peripheral surface 413a of the collar 413 is formed so as to expand into a conical shape on the outside of the middle portion 413c of the inner peripheral surface 413a. As shown in FIG. 2, the collar 413 abuts the annular elastic member 412 with the lower portion 413d of the inner circumferential surface 413a, and is embedded in the middle portion of the outer circumferential surface 411e of the sleeve body 4111.

As shown in FIG. 2, the annular elastic member 414 is formed of an elastic member such as a rubber material (for example, an O-ring) such as silicone. The annular elastic member 414 is pressed against the upper part 413b of the inner peripheral surface 413a of the collar 413 and is embedded in the upper part of the outer peripheral surface 411e of the sleeve body 4111.

The fixing portion main body 42 is provided with a housing 421; and a cover 422, which is mounted on the upper surface 421a of the housing 421.

The housing 421 is formed in a cylindrical container shape. In addition, the shell 421 is supported by the bush 7. The lower surface 421b of the housing 421 is located at a position opposite to the central hole 7b of the bush 7, and is provided with a fitting hole 421c penetrating upward. The upper part of the holed bolt 6 passing through the central hole 7b of the bushing 7 is fitted into this fitting hole 421c.

The insertion portion 41 is housed in the housing 421. In addition, the shell 421 restricts the annular elastic member 414 and the annular elastic member 412 to the outer peripheral side when the annular elastic member 414, the collar 413, and the annular elastic member 412 of the insertion portion 41 are pressed by the cover 422. (The fixing part main body 42 side) is deformed, and the sleeve 411 is moved inward (window member) by deforming only the annular elastic member 414 and the annular elastic member 412 toward the inner peripheral side (the sleeve 411 side) 3 side) Shrink so that the sleeve 411 penetrates the covering material 33 to apply uniform pressure to the outer peripheral surface 31a of the upper portion 31c of the cylindrical portion 31 in a surface contact manner and tighten it.

FIG. 6 is a plan view of the housing 421. Fig. 7 is a sectional view of A-A and a sectional view of B-B of Fig. 6. In the circumferential direction of the upper surface 421a of the shell 421, a plurality of shell fixing holes 421d are provided at positions corresponding to the plurality of fixing holes 7c of the bushing 7 (refer to FIG. 2). The plurality of housing fixing holes 421d are formed from the upper surface 421a of the housing 421 to the lower surface 421b.

As shown in FIG. 2, for each housing fixing hole 421d and each fixing hole 7c of the bushing 7, a housing fixing screw 423 passes through the housing fixing hole 421d and screwed into the fixing hole 7c of the bushing 7. Thereby, the housing 421 is fixed to the upper surface 211a of the upper platen 211 through the bushing 7.

As shown in FIGS. 6 and 7, the upper surface 421a of the housing 421 is located on one side in the circumferential direction of the housing fixing hole 421d, and a plurality of housing adjustment holes 421e are provided. The plurality of housing adjustment holes 421e are formed from the upper surface 421a of the housing 421 to the lower surface 421b.

As shown in FIG. 2, the casing adjusting screw 424 is passed through and screwed to each casing adjusting hole 421e. The lower end of the housing adjustment screw 424 abuts on the upper surface 7 a of the bush 7. A screw hole 424a is provided on the upper surface of the housing adjustment screw 424. The housing adjustment screw 424 can adjust the installation angle of the housing 421 by turning the screw hole 424a to adjust the screwing amount.

Furthermore, on the upper surface 421a of the housing 421, a plurality of cover fixing holes 421f are provided on the other side in the circumferential direction of the housing fixing hole 421d. The cover fixing hole 421f is formed from the upper surface 421a of the housing 421 to the lower surface 421b.

FIG. 8 is a plan view of the cover 422. Fig. 9 is a C-C cross-sectional view and a D-D cross-sectional view of Fig. 8. The cover 422 is formed in an annular shape. An insertion hole 422c is provided in the center portion of the upper surface 422a of the cover 422. The insertion hole 422c penetrates from the upper surface 422a of the cover 422 to the lower surface 422b. As shown in FIG. 2, the insertion hole 422c passes through the sleeve 411 of the insertion portion 41 here.

Around the insertion hole 422c of the lower surface 422b of the cover 422, an annular fitting portion 4221 is provided. As shown in FIG. 2, the fitting portion 4221 is inserted between the upper end of the housing 421 and the upper end of the sleeve 411.

As shown in FIGS. 8 and 9, around the insertion hole 422c of the upper surface 422a of the cover 422, a plurality of through holes 422d for housing fixing are provided at positions corresponding to the housing fixing holes 421d (refer to FIG. 6). Each casing fixing through hole 422d is formed by penetrating from the upper surface 422a to the lower surface 422b of the cover 422 so that the casing fixing screw 423 (refer to FIG. 2) passes through.

Around the insertion hole 422c of the upper surface 422a of the cover 422, the adjustment hole 422e is provided in the position corresponding to the housing adjustment hole 421e (refer FIG. 6). Each adjustment through-hole 422e is formed by penetrating from the upper surface 422a of the cover 422 to the lower surface 422b, so that the housing adjustment screw 424 (refer to FIG. 2) penetrates.

Around the insertion hole 422c of the upper surface 422a of the cover 422, a plurality of cover fixing through holes 422f are provided at positions corresponding to the plurality of cover fixing holes 421f (refer to FIG. 6). The plurality of cover fixing through holes 422f are formed from the upper surface 422a of the cover 422 to the lower surface 422b. As shown in FIG. 2, in each cover fixing through hole 422f and cover fixing hole 421f, a cover fixing screw 425 passes through the cover fixing through hole 422f and is screwed to the cover fixing hole 421f. The cover 422 is thereby installed on the upper surface 421a of the housing 421, and the pressing of the cover 422 on the annular elastic member 414 and the annular elastic member 412 can be adjusted by adjusting the screwing amount of the cover fixing screw 425 force. When the cover fixing screw 425 is turned in the tightening direction, the pressing force of the cover 422 on the annular elastic member 414 and the annular elastic member 412 will increase, so that the annular elastic member 414 and the annular elastic member 412 The amount of deformation becomes larger. Since the annular elastic member 414 and the annular elastic member 412 abut against the cover 422, the housing 421, and the collar 413, the annular elastic member 414 and the annular elastic member 412 cannot deform in these directions, and can only move toward The direction of the sleeve 411 is deformed. If the amount of deformation of the annular elastic member 414 and the annular elastic member 412 is larger, the pushing amount (deformation amount) of the annular elastic member 414 and the annular elastic member 412 toward the sleeve 411 side will be greater. As a result, the amount of contraction of the sleeve 411 toward the inner side (window member 3 side) is increased. Therefore, by adjusting the screwing amount of the cover fixing screw 425, the amount of shrinkage of the sleeve 411 toward the inner side (window member 3 side) can be adjusted, and the outer peripheral surface 31a of the upper portion 31c of the cylindrical portion 31 can be in surface contact Apply uniform pressure and tighten it with appropriate strength. In addition, in addition to the above, it can also be adjusted so that when the screwing amount of the cover fixing screw 425 becomes the maximum, that is, when the cover fixing screw 425 is tightened, the annular elastic member 414 and the annular elastic member The amount of deformation of 412 is the most appropriate.

FIG. 10 is a plan view of the cover 5. FIG. 11 is a schematic perspective view of the outer cover 5 viewed from the outer peripheral side of the upper platen 211. FIG. 12 is a schematic bottom view of the cover 5. The structure of the outer cover 5 will be described with reference to FIGS. 2 and 10 to 12. As shown in FIG. 2, the outer cover 5 includes a cover body 51; a light-transmitting plate 52 disposed on the upper surface 512b of the cover body 51; and a mounting portion 53 for mounting the light-transmitting plate 52 to the upper surface 512b of the cover body 51.

The cover body 51 covers the window member 3, the fixing portion 4, and the bushing 7 and is fixed to the upper surface 211a of the upper platen 211. In addition, the cover body 51 is formed into a cylindrical shape by transparent resin (refer to FIG. 11 ). In addition, the cover body 51 is provided with a peripheral wall 511; an upper flange 512 coupled to the upper end of the peripheral wall 511; and a bottom wall 513 coupled to the lower end of the peripheral wall 511.

The peripheral wall 511 is formed to surround the outer periphery of the window member 3 and the fixing portion 4. The upper end of the peripheral wall 511 has a shape that is cut diagonally downward from the inner peripheral side of the upper platen 211 toward the outer peripheral side (from the right to the left in FIG. 2 ).

The upper collar 512 is installed obliquely downward from the inner peripheral side of the upper platen 211 toward the outer peripheral side. The upper collar 512 is formed in an annular shape so as to cover the fixing portion 4 (refer to FIGS. 10 and 11). In the upper flange 512, a through hole 512a is provided in a portion facing the opening 31e at the upper end of the cylindrical portion 31. A plurality of mounting holes 512d are further provided on the upper surface 512b of the upper flange 512.

The bottom wall 513 is formed in an annular shape so as to surround the outer periphery of the bush 7 (refer to FIG. 12 ). The bottom wall 513 is disposed on the upper surface 211 a of the upper plate 211. The side surface of the bottom wall 513 is provided with a plurality of cover fixing holes 513a penetrating therethrough. The cover fixing screws 515 are passed through and screwed to the cover fixing holes 513a. The front end of each cover fixing screw 515 is pressed against the peripheral surface of the bush 7. Thereby, the outer cover 5 is fixed to the upper surface 211a of the upper platen 211 through the bushing 7. In addition, as shown in FIGS. 11 and 12, from the lower end of the bottom wall 513 to the lower part of the peripheral wall 511, a plurality of notches 513 b are provided along the circumferential direction of the bottom wall 513.

As shown in FIGS. 2 and 10, the light-transmitting plate 52 is configured to cover the transmission hole 512a. The light-transmitting plate 52 is formed in a plate shape from glass-based materials such as quartz glass, BK-7, sapphire, and resin.

As shown in Figures 2, 10 and 11, the mounting portion 53 is provided with a pressing plate 531 for pressing the light-transmitting plate 52 to the upper surface 512b of the flange 512 on the cover body 51; and a plurality of screws 532 to press the plate 531 Install to the upper surface 512b of the upper flange 512.

The pressing plate 531 is formed in a C-shaped plate shape that opens toward the outer peripheral side of the upper platen 211. Thereby, the pressing plate 531 is provided so as to surround the outer peripheral portion of the light-transmitting plate 52, and constitutes the surrounding portion of this embodiment. The pressing plate 531 is formed into a C-shaped plate shape that opens toward the outer peripheral side of the upper platen 211, and on the outer peripheral side of the pressing plate 531, a notch 531c (communication portion) connecting the inside and the outside of the pressing plate 531 is provided. The upper surface 531a of the pressing plate 531 is provided with a plurality of mounting holes 531b at positions corresponding to the mounting holes 512d of the flange 512 on the cover body 51. A plurality of screws 532 pass through the plurality of mounting holes 531b of the pressing plate 531 and the mounting holes 512d of the upper flange 512 and are screwed together.

Next, a method of measuring the thickness of the workpiece W using the window structure 1 for measuring the thickness of the workpiece will be described using FIG. 13. If the infrared ray Ra is irradiated to the window member 3 from the laser head 312 (refer to FIG. 1) of the plate thickness measuring device 301 through the light-transmitting plate 52 of the cover 5 when the workpiece W is being polished, the infrared ray Ra is emitted from the cylindrical portion 31 of the window member 3 The opening 31e at the upper end is irradiated to the inside. The irradiated infrared rays Ra are irradiated to the surface Wa of the workpiece W through the lower window plate 32, and the reflected light Rb reflected by the surface Wa and the back surface Wb of the workpiece W penetrates the window plate 32, passes through the opening 31e at the upper end, and passes through the cover 5. The light-transmitting plate 52 is received by the laser head 312 of the plate thickness measuring device 301.

Next, the effects of the window structure 1 for measuring the thickness of the workpiece of the present embodiment will be described.

(1) The window structure 1 for measuring the thickness of the workpiece of the present embodiment is provided with a measuring hole 2 which penetrates the upper and lower surfaces 211a and 211b of the upper platen 211; and a window member 3 having a cylindrical portion 31 with a lower end side (one end side) ) Insert the measuring hole 2 and the light-transmitting window plate 32, which is arranged at one end of the cylindrical portion 31. The window structure 1 for measuring the thickness of the workpiece of the present embodiment further includes a fixing portion 4, which holds the outer peripheral surface 31a on the upper end side (the other end side) of the cylindrical portion 31 in surface contact and is fixed to the upper plate 211上面211a. That is, in the window structure 1 for measuring the thickness of the workpiece of the present embodiment, the fixing portion 4 holds the outer peripheral surface 31a on the other end side of the cylindrical portion 31 in a surface contact manner. As a result, the fixing portion 4 holds the cylindrical portion 31 of the window member 3 in a wider range than before. Therefore, it becomes possible to continuously hold the cylindrical portion 31 of the window member 3 while maintaining the pre-adjusted angle. Therefore, the window structure 1 for measuring the plate thickness of the workpiece of the present embodiment can stably fix the window member 3 to the upper surface 211a of the upper platen 211. In addition, the window member 3 is stably fixed to the upper surface 211a of the upper platen 211, so that accidental inclination due to vibration of the upper platen 211 or the like is suppressed. Thereby, since the window member 3 can reliably transmit the infrared rays Ra and the reflected light Rb necessary for measuring the plate thickness Wt of the workpiece W, it is possible to suppress the decrease in the measurement accuracy of the plate thickness Wt.

(2) In the window structure 1 for measuring the thickness of the workpiece of this embodiment, the fixing part 4 is provided with a sleeve 411 through which the upper end side of the cylindrical part 31 passes; and annular elastic members 414 and 412 are inserted On the outer peripheral surface 411e of the sleeve 411. The fixing part 4 further includes a fixing part body 42, which restrains the outer circumference of the annular elastic member and is fixed to the upper surface 211 a of the upper platen 211. The fixing part main body 42 squeezes the outer circumference of the annular elastic member, so that the sleeve 411 is in surface contact with the outer peripheral surface 31a on the upper end side of the cylindrical part 31 by applying uniform pressure and tightened, thereby making surface contact The outer peripheral surface 31a is held and fixed to the upper surface 211a of the upper platen 211 in a manner. As a result, since the fixed portion 4 holds the cylindrical portion 31 of the window member 3 in a wider range, it becomes possible to continuously hold the cylindrical portion 31 of the window member 3 while maintaining the pre-adjusted angle. Therefore, the window structure 1 for measuring the plate thickness of the workpiece of the present embodiment can stably fix the window member 3 to the upper surface 211a of the upper platen 211. Especially when the cylindrical portion 31 uses glass materials such as quartz glass, BK-7, or a brittle material like sapphire, the outer peripheral surface 31a on the upper end side of the cylindrical portion 31 can be held in surface contact by the sleeve 411 , While distributing the pressing force, no localized pressure is applied. Therefore, the window structure 1 for measuring the thickness of the workpiece of this embodiment can prevent the window member 3 from being damaged, and at the same time, the window member 3 can be stably fixed to the upper surface 211a of the upper platen 211.

(3) In the window structure 1 for measuring the thickness of the workpiece of this embodiment, a plurality of notches (upper notch 411b, lower notch 411d) are provided at predetermined intervals in the circumferential direction on both ends of the sleeve 411. Therefore, the sleeve 411 is easier to shrink as a whole compared with the case where there is no notch, and the contact area with the outer peripheral surface 31a on the upper end side of the cylindrical portion 31 increases. Thereby, the fixing portion 4 can further maintain the outer peripheral surface 31a on the upper end side of the cylindrical portion 31 while distributing the pressing force without applying localized pressure. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further prevent the window member 3 from being damaged, and at the same time, the window member 3 can be stably fixed to the upper surface 211a of the upper platen 211.

(4) In the window member 1 for measuring the thickness of the workpiece of the present embodiment, the cylindrical portion 31 and the window plate 32 are formed of a brittle material having translucency. Thereby, the cylindrical portion 31 and the window plate 32 can suppress the generation of the main factors that hinder the transmission of the infrared rays Ra or the reflected light Rb, wherein the main factors are scratches caused by abrasives or grinding slag. In addition, since the window plate 32 is welded and provided at one end of the cylindrical portion 31, it becomes difficult to peel off compared to a case where it is adhesively provided on one end of the cylindrical portion 31. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can improve the durability of the window member 3 while stably fixing the window member 3 on the upper surface 211a of the upper platen 211, and at the same time, it can measure accurately and reliably. Workpiece W.

(5) The window structure 1 for measuring the plate thickness of the workpiece of the present embodiment includes an outer cover 5 covering the window member 3 and the fixing portion 4, and is fixed to the upper surface 211a of the upper platen 211. In addition, the cover 5 is provided with a light-transmitting plate 52 corresponding to a light-transmitting portion having light-transmitting properties at a portion facing the opening 31e at the upper end of the cylindrical portion 31. Thereby, the infrared rays Ra penetrate into the cylindrical portion 31 through the light-transmitting plate 52, and the outer cover 5 can prevent abrasives, washing water, dust, etc. from entering the cylindrical portion 31. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can improve the waterproof and dustproof properties.

(6) In the window structure 1 for measuring the thickness of the workpiece of this embodiment, the light-transmitting plate 52 of the cover 5 is set from the inner peripheral side of the upper plate 211 to the outer peripheral side with respect to the upper surface 211a of the upper plate 211 The configuration is inclined obliquely downward. Thereby, when polishing the workpiece W, even if abrasive, washing water, dust, etc. adhere to the light-transmitting plate 52, the rotation of the upper plate 211 can be used to efficiently remove the abrasive and wash from the surface of the light-transmitting plate 52. Clean water, dust, etc. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further improve the waterproof and dustproof properties. In addition, since the light-transmitting plate 52 is arranged in an oblique manner with respect to the upper surface 211a of the upper platen 211, when the infrared rays Ra are irradiated from the laser head 312 to the light-transmitting plate 52, the reflected light from the light-transmitting plate 52 can be It is reflected to a direction different from the installation direction of the laser head 312. Thereby, the laser head 312 can be prevented from receiving reflected light different from the reflected light Rb from the workpiece W, and the measurement accuracy of the plate thickness Wt can be prevented from decreasing.

(7) In the window structure 1 for measuring the plate thickness of the workpiece of the present embodiment, a pressing plate 531 (surrounding portion) surrounding the outer peripheral portion of the light transmitting plate 52 is provided around the light transmitting plate 52 of the cover 5. Furthermore, on the outer peripheral side of the fixed plate 211 above the pressing plate 531, a notch 531c (communication portion) that communicates the inside and the outside of the pressing plate 531 is provided. Thereby, even if abrasives, washing water, dust, etc. are attached to the light-transmitting plate 52, the rotation of the upper plate 211 can be used from the surface of the light-transmitting plate 52 through the notch 531c on the outer peripheral side of the upper plate 211 Efficiently remove abrasives, washing water, dust, etc. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further improve the waterproof and dustproof properties.

In addition, the upper edge portion 31 d of the cylindrical portion 31 is locked by the upper surface 411 a of the sleeve 411 of the fixing portion 4 and held by the fixing portion 4. Thereby, the window member 3 can be prevented from falling off from the fixing portion 4. Therefore, the window member 1 for measuring the plate thickness of the workpiece of the present embodiment can more stably fix the window member 3 to the upper surface 211a of the upper platen 211. Furthermore, the upper edge portion 31d of the cylindrical portion 31 is formed in a flange shape and locked to the upper surface 411a of the sleeve 411 of the fixing portion 4. Thereby, the window member 3 can be prevented from falling off with a simple structure. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can more stably fix the window member 3 to the upper surface 211a of the upper platen 211 while suppressing the manufacturing cost.

Furthermore, the window plate 32 is formed of a light-transmitting material. Particularly, when brittle materials are used for the cylindrical portion 31 and the window plate 32, heat resistance can be improved. In addition, when the window plate 32 is formed of a light-transmitting brittle material, it is possible to suppress the generation of scratches that are the main cause of obstructing the transmission of infrared rays Ra and reflected light Rb, so that the workpiece W can be measured more reliably. The infrared rays Ra and the reflected light Rb necessary for the board thickness Wt are transmitted, so that the accuracy of the measured value of the board thickness Wt can be further suppressed from decreasing.

In addition, the window member 3 is provided with a resin covering material 33 covering the outer peripheral surface 31 a of the cylindrical portion 31. Thereby, the window member 3 can protect the cylindrical portion 31 by the covering material 33 to increase the strength. In addition, if the cylindrical portion 31 is damaged, the covering material 33 can also prevent the fragments from scattering. In addition, since the fixing portion 4 holds the outer circumferential surface 31a of the cylindrical portion 31 through the covering material 33, the outer circumferential surface 31a of the cylindrical portion 31 can be surely held by using the sigh and friction coefficient of the covering material 33. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can more stably fix the window member 3 to the upper surface 211a of the upper platen 211.

In addition, since the collar 413 is fitted between the annular elastic member 414 and the annular elastic member 412 of the sleeve 411, the positions of the annular elastic member 414 and the annular elastic member 412 are fixed. Thereby, the sleeve 411 tightens the outer peripheral surface 31 a on the upper end side of the cylindrical portion 31 through the annular elastic member 414 and the annular elastic member 412 to apply uniform pressure. Thereby, the fixing part 4 can hold the outer peripheral surface 31a on the upper end side of the cylindrical part 31 without applying a localized pressure while reliably distributing the pressing force. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further prevent the window member 3 from being damaged, and more stably fix the window member 3 to the upper surface 211a of the upper platen 211.

Furthermore, the upper part 413b of the inner peripheral surface 413a of the collar 413 is formed so as to expand into a conical shape on the outside of the middle portion 413c of the inner peripheral surface 413a, and supports the annular elastic member 414. Therefore, the position of the annular elastic member 414 is reliably fixed. In addition, the lower portion 413d of the inner peripheral surface 413a of the collar 413 is formed so as to expand into a conical shape on the outside of the intermediate portion 413c of the inner peripheral surface 413a, and abuts against the annular elastic member 412. Therefore, the position of the annular elastic member 412 is reliably fixed. The upper part 413b and the lower part 413d of the inner peripheral surface 413a of the collar 413 are formed in such a way as to expand into a conical shape more outside than the middle part 413c of the inner peripheral surface 413a. Therefore, if the ring-shaped elastic member 414 and When the 412 is pressed, it deforms in such a way that it is surely pushed only in the direction of the sleeve 411. Thereby, the sleeve 411 further tightens the outer peripheral surface 31a on the upper end side of the cylindrical portion 31 through the annular elastic member 414 and the annular elastic member 412 so as to apply uniform pressure. Thereby, the fixing part 4 can hold the outer peripheral surface 31a on the upper end side of the cylindrical part 31 without applying a localized pressure while distributing the pressing force more reliably. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further prevent the window member 3 from being damaged, and more stably fix the window member 3 to the upper surface 211a of the upper platen 211.

In addition, the fixing portion main body 42 of the fixing portion 4 is provided with a housing 421 accommodating the insertion portion 41 and a cover 422 installed on the upper surface 421 a of the housing 421. Thereby, the fixing part 4 can prevent abrasives, washing water, dust, etc. from entering the housing 421 through the cover 422. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further improve the waterproof and dustproof properties.

In addition, the light-transmitting plate 52 is formed of a material having light-transmitting properties. In particular, when a brittle material is used for the light-transmitting plate 52, it is possible to suppress scratches caused by abrasives, abrasive dust, etc., which are the main factors that hinder the transmission of infrared rays Ra and reflected light Rb. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can improve the durability of the light-transmitting plate 52. In addition, since scratches can be suppressed by the light-transmitting plate 52 and a decrease in light transmittance can be suppressed, it is possible to reliably transmit the infrared rays Ra and the reflected light Rb necessary for measuring the thickness Wt of the workpiece W. This can further suppress the decrease in the accuracy of the measured value of the plate thickness Wt. In addition, the heat resistance can be improved by forming the light-transmitting plate 52 with a brittle material having light-transmitting properties.

In addition, a notch 513b is provided from the lower end of the bottom wall 513 of the cover body 51 to the lower part of the peripheral wall 511. Thereby, even if abrasive, washing water, dust, etc. enter the housing body 51 when the workpiece W is being polished, the rotation of the upper platen 211 can also be used to discharge the abrasive, washing water, dust, etc. from the notch 513b to The outer side of the cover body 51. Therefore, the window structure 1 for measuring the thickness of the workpiece of the present embodiment can further improve the waterproof and dustproof properties.

Above, the embodiment of the present invention has been described in detail with reference to the drawings, but the specific structure is not limited by this embodiment, and design changes that do not deviate from the spirit of the present invention are also included in the present invention.

For example, in this embodiment, the window structure 1 for measuring the thickness of the workpiece is provided on the upper surface 211a of the upper platen 211, but the lower surface 212b on the surface of the lower platen 212 may be provided.

In addition, although the light-transmitting plate 52 formed of a brittle material having light-transmitting properties is used in this embodiment, the material forming the light-transmitting plate 52 may not be limited to a brittle material having light-transmitting properties. When the material of the light plate 52 is resin, the same effect as the present embodiment can also be obtained. In addition, although the window structure 1 for measuring the thickness of the workpiece in this embodiment is suitable for the polishing device 201 for polishing both sides of the workpiece W, it is also applicable to the polishing device for polishing one side of the workpiece W.

In addition, although the outer cover 5 of this embodiment is applied to the window member 3 and the fixing portion 4 according to the present invention, it can also be applied to the window member and the fixing portion other than the present invention. In this case, the window structure for measuring the thickness of the workpiece is provided with a measuring hole, which penetrates the surface and back of the table of the polishing device for grinding the thin-plate-shaped workpiece; and the window member has a cylindrical portion with one end inserted into the measuring hole And a translucent window plate provided at one end of the aforementioned cylindrical portion. In this case, the window structure for measuring the thickness of the workpiece further includes a fixing part that holds the cylindrical part and is fixed to the surface of the fixed plate; and a cover that covers the cylindrical part and the fixed part and is fixed to the fixed part. The surface of the disk. The outer cover is further provided with a light-transmitting portion having a light-transmitting property at a portion opposed to the opening at the other end of the cylindrical portion. In the conventional window structure for measuring the thickness of the workpiece, since the cylindrical part is exposed, there is a problem that abrasive, washing water, dust, etc. enter the cylindrical part. However, in the window structure for measuring the thickness of the workpiece in this case, since the outer cover prevents abrasives, washing water, dust, etc. from entering the cylindrical portion, the water resistance and dust resistance can be improved.

In addition, the insertion portion 41 of this embodiment is composed of ring-shaped elastic members 412 and 414, and a collar 413. However, it is also possible to provide a plurality of collars and provide a circle between the plurality of collars. In the form of a ring-shaped elastic member, more contact points are used to allow the sleeve 411 to contract toward the inner side (window member 3 side) through the ring-shaped elastic member. In this case, the pressing force from the ring-shaped elastic member can be applied to the sleeve 411 while more evenly distributing the pressing force, and the pressing force can be more surely dispersed and maintained without applying localized pressure. The outer peripheral surface 31 a on the upper end side of the cylindrical portion 31. In addition, although a plurality of annular elastic members are used in this embodiment, a single one can also obtain the same effect as the present invention.

1‧‧‧Window structure for measuring the thickness of the workpiece 2‧‧‧Measurement hole 3‧‧‧Window member 4‧‧‧Fixed part 5‧‧‧Cover 6‧‧‧Bolt with hole 6a‧‧‧Insulation hole 7 ‧‧‧Sleeve 7a‧‧‧Upper surface 7b‧‧‧Central hole 7c‧‧‧Fixed hole 31‧‧‧Cylinder part 31a‧‧‧Outer peripheral surface 31b‧‧‧The middle part to the lower part 31c‧‧‧ Upper part 31d‧‧‧Upper edge part 31e‧‧‧Opening part 32‧‧‧Window plate 33‧‧‧Coating material 41‧‧‧Insulation part 42‧‧‧Fixed part body 51‧‧‧Cover body 52‧‧ ‧Translucent plate (translucent part) 53‧‧‧Mounting part 101‧‧‧Grinding system 201‧‧‧Grinding device 211‧‧‧Upper plate (fixed plate) 211a‧‧‧Upper surface (surface) 211b‧‧ ‧Bottom surface (back) 212‧‧‧Bottom plate 212a‧‧‧Upper surface 212b‧‧‧Bottom surface 213‧‧‧Control part 214‧‧‧Plug wheel 301‧‧‧Plate thickness measuring device 311‧‧‧Measurement device Body 312‧‧‧Laser head 313‧‧‧Data analysis part 411‧‧‧Sleeve 411a‧‧Upper surface 411b‧‧‧Upper notch 411c‧‧Lower surface 411d‧‧‧Lower notch 411e‧‧Outer periphery Surface 412‧‧‧Annular elastic member 413‧‧‧Collar 413a‧‧‧Inner peripheral surface 413b‧‧‧Upper part 4413c‧‧‧Middle part 413d‧‧‧Lower part 414‧‧‧Annular elastic member 421‧ ‧‧Shell 421a‧‧‧Upper surface 421b‧‧‧Bottom surface 421c‧‧‧Fitting hole 421d‧‧‧Case fixing hole 421e‧‧Shell adjusting hole 421f‧‧‧Cover fixing hole 422‧‧‧Cover 422a‧ ‧‧Upper surface 422b‧‧‧Lower surface 422c‧‧‧Insulation hole 422d‧‧‧Case fixing through hole 422e‧‧‧Adjustment through hole 422f‧‧‧Cover fixing through hole 423‧‧‧For housing fixing Screw 424‧‧‧Case adjustment screw 424a‧‧‧Screw hole 425‧‧‧Screw 511 for cover fixing 512‧‧‧Upper flange 512a‧‧ Through hole 512b‧‧‧Upper surface 512d‧‧‧ Mounting hole 513‧‧‧Bottom wall 513a‧‧‧Cover fixing hole 513b‧‧Notch 515‧‧‧Cover fixing screw 531‧‧Pressing plate (surround part) 531a‧‧‧Upper surface 531b‧‧‧Mounting hole 531c‧‧‧Notch (connecting part) 532‧‧‧Screw 4111‧‧‧Sleeve body 4112‧‧‧Flange part 4221‧‧‧Fitting part Ra‧‧‧Infrared Rb‧‧‧Reflected light W‧‧‧Workpiece Wa‧‧‧Surface Wb‧‧‧Back Wt‧‧‧Board thickness

FIG. 1 is a schematic diagram showing the configuration of a polishing system using a window structure for measuring plate thickness of a workpiece according to an embodiment of the present invention. Fig. 2 is a longitudinal sectional view of a window structure for measuring a thickness of a workpiece according to an embodiment of the present invention. Fig. 3 is a plan view of a sleeve constituting a window structure for measuring plate thickness of a workpiece in the same embodiment. Figure 4 is a front view of the sleeve of Figure 3; Fig. 5 is a longitudinal sectional view of a collar constituting a window structure for measuring plate thickness of a workpiece in the same embodiment. Fig. 6 is a plan view of the outer shell constituting the window structure for measuring the thickness of the workpiece in the same embodiment. Fig. 7 is a cross-sectional view of A-A and a cross-sectional view of B-B of Fig. 6. Fig. 8 is a plan view of the cover constituting the window structure for measuring the thickness of the workpiece in the same embodiment. Fig. 9 is a cross-sectional view of C-C and a cross-sectional view of D-D of Fig. 8. Fig. 10 is a plan view of the outer cover of the window structure for measuring the thickness of the workpiece constituting the same embodiment. Fig. 11 is a schematic perspective view of the outer cover of Fig. 10 viewed from the outer peripheral side of the upper platen. Fig. 12 is a schematic bottom view of the outer cover of Fig. 10; Fig. 13 is a diagram illustrating a method of measuring the thickness of a workpiece using the window structure for measuring the thickness of the workpiece in the same embodiment.

1‧‧‧Window structure for workpiece thickness measurement

2‧‧‧Measuring hole

3‧‧‧Window components

4‧‧‧Fixed part

5‧‧‧Cover

6‧‧‧Bolt with hole

6a‧‧‧through hole

7‧‧‧ Bush

7a‧‧‧Upper surface

7b‧‧‧Central hole

7c‧‧‧fixing hole

31‧‧‧Cylinder

31a‧‧‧Outer peripheral surface

31b‧‧‧The middle part to the lower part

31c‧‧‧Upper

31d‧‧‧Upper edge

31e‧‧‧Opening

32‧‧‧Window panel

33‧‧‧cladding material

41‧‧‧Connecting part

42‧‧‧Fixed part body

51‧‧‧Cover body

52‧‧‧Transmitting plate (transmitting part)

53‧‧‧Installation Department

211‧‧‧Upper Fix (Fix)

211a‧‧‧Upper surface (surface)

211b‧‧‧Lower surface (back)

411‧‧‧Sleeve

411a‧‧‧Upper surface

411e‧‧‧Outer peripheral surface

412‧‧‧Circular elastic member

413‧‧‧Collar

413b‧‧‧Upper

413d‧‧‧Lower

414‧‧‧Circular elastic member

421‧‧‧Shell

421a‧‧‧Upper surface

421b‧‧‧Lower surface

421c‧‧‧Mating hole

421d‧‧‧Case fixing hole

421e‧‧‧Shell adjustment hole

421f‧‧‧Cover fixing hole

422‧‧‧cover

422c‧‧‧through hole

422f‧‧‧Through hole for cover fixing

423‧‧‧Shell fixing screws

424‧‧‧Case adjustment screw

424a‧‧‧Screw hole

425‧‧‧Screw for cover fixing

511‧‧‧ Zhoubi

512‧‧‧Upper

512a‧‧‧Through hole

512b‧‧‧Upper surface

512d‧‧‧Mounting hole

513‧‧‧Bottom Wall

513a‧‧‧Cover fixing hole

513b‧‧‧Gap

515‧‧‧Screw for fixing cover

531‧‧‧Press plate (surround part)

531a‧‧‧Upper surface

531b‧‧‧Mounting hole

531c‧‧‧Gap (connecting part)

532‧‧‧screw

4111‧‧‧Sleeve body

4112‧‧‧Eb

4221‧‧‧Mating part

Claims (8)

A window structure for measuring the thickness of a workpiece, which is provided with: a measuring hole that penetrates the surface and back of the table of the grinding device for grinding a thin-plate-shaped workpiece; and a window member having a cylindrical portion inserted into the measuring hole at one end And a translucent window plate provided at one end of the cylindrical portion; and a fixing portion that holds the outer peripheral surface of the other end of the cylindrical portion in a surface contact manner and is fixed to the surface of the fixed plate; wherein The fixing part is provided with: a sleeve, in which the other end side of the cylindrical part passes through the sleeve; an annular elastic member which is embedded in the outer peripheral surface of the sleeve; and a fixing part body which restrains the ring The outer periphery of the shaped elastic member is fixed to the surface of the platen. For example, the window structure for measuring the thickness of the workpiece in the scope of the patent application, wherein a plurality of notches are provided at predetermined intervals in the circumferential direction on both ends of the sleeve. For example, the window structure for measuring the thickness of the workpiece in the first item of the scope of the patent application, wherein the cylindrical portion and the window plate are formed of a brittle material with light transmission. For example, the window structure for measuring the plate thickness of the workpiece in any one of the scope of the patent application 1 to 3 is provided with: an outer cover, covering the window member and the fixing part and fixed to the surface of the fixed plate, on the outer cover , A light-transmitting part having light-transmitting properties is provided in a part facing the opening at the other end of the cylindrical part. For example, the window structure for measuring the thickness of the workpiece in the scope of the patent application, wherein the light-transmitting part is arranged obliquely downward from the inner peripheral side to the outer peripheral side of the fixed plate relative to the surface of the fixed plate. For example, the window structure for measuring the thickness of the workpiece in item 4 of the scope of patent application, which A surrounding part surrounding the light-transmitting part is provided around the light-transmitting part, and a communicating part connecting the inside and the outside of the surrounding part is provided on the outer peripheral side of the fixed plate of the surrounding part. For example, the window structure for measuring the thickness of the workpiece in the scope of the patent application, wherein a surrounding part surrounding the transparent part is provided around the transparent part, and a communicating part is provided on the outer peripheral side of the fixed plate of the surrounding part The connecting part between the inside and the outside of the surrounding part. A window structure for measuring the thickness of a workpiece, which is provided with: a measuring hole that penetrates the surface and back of the table of the grinding device for grinding a thin-plate-shaped workpiece; and a window member having a cylindrical portion inserted into the measuring hole at one end And a translucent window plate provided at one end of the cylindrical portion; and a fixing portion that holds the outer peripheral surface of the other end of the cylindrical portion in a surface contact manner and is fixed to the surface of the fixed plate; wherein The cylindrical part and the window plate are formed of a brittle material with light permeability.

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