TWI703079B - Transport device - Google Patents

Abstract

A transport device comprises a driving mechanism, an active arm, a slave arm, a load module, and a linkage mechanism. The active arm has a first rotating shaft, which is erected and driven to rotate by the driving mechanism, and a first arm body, which is horizontally disposed and rotates in conjunction with the first rotating shaft. The slave arm has a second rotating shaft, which is rotatably connected to the first arm body, and a second arm body, which rotates in conjunction with the second rotating shaft. The load module has a third rotating shaft, which is rotatably connected to the second arm body, and a tray, which rotates in conjunction with the third rotating shaft. The linkage mechanism includes a first linkage module, which is disposed in the first arm body to rotate the second rotating shaft in reverse with the first rotating shaft, and a second linkage module, which is disposed in the second arm body to rotate the third rotating shaft in reverse with the second rotating shaft

Description

Conveying device

The invention relates to a conveying device, in particular to a conveying device that uses a single power source to rotate and transport.

In the semiconductor manufacturing process, it is often necessary to transfer substrates between different workstations for different manufacturing processes. Due to the position of the machine table of each workstation, the direction of substrate entry and exit may not be in the same straight line. For example, when moving from the first workstation to the second workstation, the direction of the substrate entering and exiting the second workstation needs to be rotated 90 degrees.

At present, the method of moving the substrate from the first station to the second station and rotating the angle as in the previous example is to first transfer the substrate from the first station to the second station by a linear conveying device, and then use a rotating device to transfer the substrate After rotating 90 degrees, it is transported to the machine of the second workstation. In this way, the linear conveying device and the rotating device are combined to complete the transfer of the substrate, which makes the overall transfer equipment more complicated.

Therefore, one of the objectives of the present invention is to provide a conveying device that utilizes a single power source to achieve the functions of moving the object to be conveyed and changing the conveying direction.

Therefore, in some embodiments, the conveying device of the present invention includes a driving mechanism, a driving arm, a driven arm, a load module, and a linkage mechanism. The active arm has a first rotating shaft and a first arm body. The first rotating shaft is arranged upright and driven to rotate by the driving mechanism. The first arm body is arranged horizontally and connected to the first rotating shaft and linked with the first rotating shaft. Spin. The driven arm has a second rotating shaft and a second arm body. The second rotating shaft is arranged upright and rotatably connected to the first arm body. The second arm body is arranged horizontally and connected to the second rotating shaft and is connected to the The second rotating shaft rotates continuously. The load module has a third rotating shaft and a tray. The third rotating shaft is arranged upright and rotatably connected with the second arm body. The tray is arranged horizontally and connected to the third rotating shaft and rotates in conjunction with the third rotating shaft. , The tray has an in and out path for an object to be conveyed to move in and out in a straight line. The linkage mechanism includes a first linkage module and a second linkage module. The first linkage module is arranged on the first arm body and has a first driving wheel and a first transmission assembly. The first driving wheel and the first rotating shaft are arranged coaxially, and the first transmission assembly is connected to the first drive. The wheel and the second rotating shaft enable the first driving wheel to rotate in conjunction with the second rotating shaft, and the rotation direction of the second rotating shaft is opposite to the first rotating shaft. The second linkage module is arranged on the second arm body and has a second driving wheel and a second transmission assembly. The second driving wheel is arranged coaxially with the second shaft, and the second transmission assembly is connected to the second drive. The wheel and the third rotating shaft enable the second driving wheel to rotate in conjunction with the third rotating shaft, and the rotation direction of the third rotating shaft is opposite to the second rotating shaft.

In some embodiments, the driving mechanism includes a base, the first driving wheel is fixedly connected to the base, and the second driving wheel is fixedly connected to the first arm; defining the rotation of the first driving wheel The radius is wr1, the turning radius of the second rotating shaft is sr2, the turning radius of the second driving wheel is wr2, and the turning radius of the third rotating shaft is sr3; when the rotating angle of the active arm relative to a reference axis is θ1, The tray is linked and the rotation angle relative to the reference axis is θ3, where θ3=θ1×(1-wr1/sr2+wr1wr2/sr2sr3).

In some embodiments, the distance between the shaft center of the first shaft and the shaft center of the second shaft is equal to the distance between the shaft center of the second shaft and the shaft center of the third shaft.

In some implementation aspects, wr1: sr2=2:1; wr2: sr3=3:4.

The present invention has at least the following effects: the driven arm and the load module can be driven to rotate by the driving mechanism to drive the active arm to rotate, and the load module can move position and change simultaneously by the same power source The conveying direction can not only reduce the mechanism action, but also reduce the transportation time.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are represented by the same numbers.

1 and 2, an embodiment of the conveying device of the present invention includes a driving mechanism 1, a driving arm 2, a driven arm 3, a loading module 4 and a linkage mechanism 5.

The driving mechanism 1 includes a motor 11 and a pulley 12 connected to the motor 11. In this embodiment, the driving mechanism 1 further includes a base 13, and the motor 11 and the pulley 12 are provided on the base 13.

The active arm 2 has a first rotating shaft 21 and a first arm body 22. The first rotating shaft 21 is arranged upright and driven to rotate by the driving mechanism 1, and the first arm body 22 is arranged horizontally and connected to the first rotating shaft 21 and rotates in conjunction with the first rotating shaft 21. In this embodiment, the bottom end of the first rotating shaft 21 is connected to the pulley 12 to be driven to rotate by the motor 11.

The driven arm 3 has a second rotating shaft 31 and a second arm body 32. The second rotating shaft 31 is arranged upright and rotatably connected with the first arm body 22. The second arm body 32 is arranged horizontally and connected to the second rotating shaft 31 and rotates in conjunction with the second rotating shaft 31.

The loading module 4 has a third rotating shaft 41 and a tray 42. The third rotating shaft 41 is arranged upright and rotatably connected with the second arm body 32. The tray 42 is arranged horizontally and connected to the third rotating shaft 41 and rotates in conjunction with the third rotating shaft 41. The tray 42 has a space for transporting An entry and exit path P in which the object (not shown) moves linearly. The object to be transported may, for example, contain a cassette of multiple substrates, and the in-out path P is the conveying direction of the tray 42 to transport the object to be transported. In this embodiment, the tray 42 has a rectangular disk body 421 and four stoppers 422. The length of the disk body 421 is in the same direction as the access path P. The stoppers 422 are distributed on the tray. The four corners of the body 421 extend parallel to the access path P.

The linkage mechanism 5 includes a first linkage module 51 and a second linkage module 52.

The first linkage module 51 is disposed on the first arm body 22 and has a first driving wheel 511 and a first transmission assembly 512. The first driving wheel 511 is arranged coaxially with the first shaft 21, and the first transmission The component 512 connects the first driving wheel 511 and the second rotating shaft 31 so that the first driving wheel 511 can rotate the second rotating shaft 31, and the rotation direction of the second rotating shaft 31 is opposite to the first rotating shaft 21. In this embodiment, the first driving wheel 511 and the second rotating shaft 31 are respectively located at the longitudinal ends of the first arm 22, and the first driving wheel 511 is fixedly connected to the base 13, and the The two rotating shafts 31 can be linked by the first transmission assembly 512 to rotate relative to the first arm body 22. The first transmission assembly 512 includes a first transmission belt 512a. The first transmission belt 512a surrounds the first driving wheel 511 and the second rotation shaft 31. When the driving arm 2 is driven by the driving mechanism 1, it is driven by the When a rotating shaft 21 links the first arm body 22 to rotate, since the first driving wheel 511 does not rotate, the first transmission belt 512a drives the second rotating shaft 31 to rotate in the opposite direction relative to the first arm body 22, for example, the When the first arm 22 rotates clockwise, the first driving wheel 511 does not move, but because the first arm 22 rotates clockwise, the first driving wheel 511 is opposite to the first arm 22 It rotates clockwise, so the first transmission belt 512a can drive the second rotating shaft 31 to rotate counterclockwise. In a modified embodiment, the first transmission assembly 512 may also be composed of multiple gears.

The second linkage module 52 is disposed on the second arm body 32 and has a second driving wheel 521 and a second transmission assembly 522. The second driving wheel 521 is coaxially arranged with the second rotating shaft 31, and the second transmission assembly 522 connects the second driving wheel 521 and the third rotating shaft 41 so that the second driving wheel 521 can rotate the third rotating shaft 41 , And the rotation direction of the third rotating shaft 41 is opposite to the second rotating shaft 31. In this embodiment, the second driving wheel 521 and the third rotating shaft 41 are respectively located at the longitudinal ends of the second arm body 32, the second driving wheel 521 is fixedly connected to the first arm body 22, and the The third rotating shaft 41 can be linked by the second transmission assembly 522 to rotate relative to the second arm body 32. The second transmission assembly 522 includes a second transmission belt 522a. The second transmission belt 522a surrounds the second driving wheel 521 and the third rotation shaft 41. When the driven arm 3 is linked by the first linkage module 51 When the second arm body 32 is linked by the second rotating shaft 31 to rotate relative to the first arm body 22, since the second drive wheel 521 does not rotate relative to the first arm body 22, the second transmission belt 522a drives the first arm body 22 The three rotating shaft 41 rotates in the opposite direction relative to the second arm body 32. For example, when the second arm body 32 rotates counterclockwise, the second driving wheel 521 does not move, but because the second arm body 32 rotates counterclockwise, the second The driving wheel 521 rotates clockwise relative to the second arm body 32, so the second transmission belt 522a can drive the third rotating shaft 41 to rotate clockwise. That is, in this embodiment, the third rotating shaft 41 and the first rotating shaft 21 rotate in the same direction, and the second rotating shaft 31 rotates in the opposite direction to the first rotating shaft 21 and the third rotating shaft 41. In a modified embodiment, the second transmission assembly 522 may also be composed of multiple gears.

A straight line defined on the first arm body 22 through the axis X1 of the first rotating shaft 21 and the axis X2 of the second rotating shaft 31 is a first axis L1. A straight line defined on the second arm body 32 through the axis X2 of the second rotating shaft 31 and the axis X3 of the third rotating shaft 41 is a second axis L2. A straight line defined on the tray 42 passing through the axis X3 of the third rotating shaft 41 and parallel to the in and out path P is a third axis L3. It is defined that the radius of rotation of the first driving wheel 511 is wr1, the radius of rotation of the second rotation shaft 31 is sr2, the radius of rotation of the second driving wheel 521 is wr2, and the radius of rotation of the third rotation shaft 41 is sr3. The aforementioned turning radius of the second rotating shaft 31 refers to the radius of the portion where the second rotating shaft 31 is connected to the first transmission assembly 512 to be driven. Similarly, the turning radius of the third rotating shaft 41 refers to the connecting portion of the third rotating shaft 41 The radius of the driven part of the second transmission assembly 522. It is defined that the clockwise rotation angle is positive and the counterclockwise rotation angle is negative. When the conveying device is running, the following conditions are met. At the initial position, the first axis L1, the second axis L2, and the third axis L3 are coaxial and common A reference axis LB is defined. When the driving arm 2 rotates so that the rotation angle of the first axis L1 relative to the reference axis LB is θ1, the driven arm 3 is linked to rotate the second axis L2 relative to the reference axis LB The angle is θ2, and the tray 42 is linked so that the rotation angle of the third axis L3 relative to the reference axis LB is θ3, while the rotation angle of the second axis L2 relative to the first axis L1 is A1, and the third axis The rotation angle of the axis L3 relative to the second axis L2 is A2, where A1=-θ1×wr1/sr2 θ2=A1+θ1 A2=-A1×wr2/sr3 θ3=A2+θ2=(-A1×wr2/sr3)+( A1+θ1) =A1(1- wr2/sr3)+θ1 =(-θ1×wr1/sr2)×(1- wr2/sr3)+θ1 =θ1×(1-wr1/sr2+wr1wr2/sr2sr3)

In this embodiment, the distance between the axis X1 of the first rotating shaft 21 and the axis X2 of the second rotating shaft 31 is equal to the difference between the axis X2 of the second rotating shaft 31 and the axis X3 of the third rotating shaft 41 The distance between the active arm 2 and the slave arm 3 is the same, and wr1: sr2=2:1; wr2: sr3=3:4, that is, wr1/sr2=2, wr2/ sr3=3/4.

As shown in Figure 2, when the active arm 2, the driven arm 3, and the load module 4 are in the initial position, the first axis L1, the second axis L2, and the third axis L3 are all in the On the reference axis LB, that is, the active arm 2, the driven arm 3, and the load module 4 are arranged in a straight line. At this time, the in and out path P of the tray 42 (same as the third axis L3) and the reference axis LB include an angle of 0 degree.

As shown in Figure 3, when the driving arm 2 is driven to rotate 30 degrees clockwise, that is, θ1=30, the driven arm 3 is driven to rotate 60 degrees counterclockwise relative to the driving arm 2 and relative to the reference axis LB Rotate 30 degrees counterclockwise. At this time, the load module 4 is also driven to rotate 45 degrees clockwise relative to the driven arm 3 and 15 degrees clockwise relative to the reference axis LB. Specifically, the rotation angle of the slave arm 3 relative to the driving arm 2 is the rotation angle A1 of the second axis L2 relative to the first axis L1, A1=-θ1×wr1/sr2=-30×2=- 60, that is, relatively counterclockwise rotation 60 degrees, and the rotation angle of the driven arm 3 relative to the reference axis LB is the rotation angle θ2 of the second axis L2 relative to the reference axis LB, θ2=A1+θ1=-60+ 30=-30, that is, rotate 30 degrees counterclockwise. The rotation angle of the load module 4 relative to the driven arm 3 is the rotation angle A2 of the third axis L3 relative to the second axis L2, A2=-A1×wr2/sr3=-(-60)×3/ 4=45, that is, relatively clockwise rotation 45 degrees, and the rotation angle of the load module 4 relative to the reference axis LB is the rotation angle θ3 of the third axis L3 relative to the reference axis LB, θ3=A2+θ2= 45+(-30)=15, that is, rotate 15 degrees clockwise.

As shown in FIG. 4, when the driving arm 2 is driven to rotate clockwise by 160 degrees, that is, when θ1=160, the driven arm 3 is driven to rotate 320 degrees counterclockwise relative to the driving arm 2 and relative to the reference axis LB Rotate 160 degrees counterclockwise. At this time, the load module 4 is also driven to rotate 240 degrees clockwise relative to the driven arm 3 and rotate 80 degrees clockwise relative to the reference axis LB. Specifically, the rotation angle of the slave arm 3 relative to the driving arm 2 is the rotation angle A1 of the second axis L2 relative to the first axis L1, A1=-θ1×wr1/sr2=-160×2=- 320, that is, relatively counterclockwise rotation 320 degrees, and the rotation angle of the driven arm 3 relative to the reference axis LB is the rotation angle θ2 of the second axis L2 relative to the reference axis LB, θ2=A1+θ1=-320+ 160=-160, that is, rotate 160 degrees counterclockwise. The rotation angle of the load module 4 relative to the driven arm 3 is the rotation angle A2 of the third axis L3 relative to the second axis L2, A2=-A1×wr2/sr3=-(-320)×3/ 4=240, that is, relatively clockwise rotation 240 degrees, and the rotation angle of the load module 4 relative to the reference axis LB is the rotation angle θ3 of the third axis L3 relative to the reference axis LB, θ3=A2+θ2= 240+(-160)=80, that is, rotate 80 degrees clockwise.

As shown in FIG. 5, when the driving arm 2 is driven to rotate 180 degrees clockwise, that is, when θ1=180, the driven arm 3 is driven to rotate 360 degrees counterclockwise relative to the driving arm 2 and relative to the reference axis LB Rotate 180 degrees counterclockwise. At this time, the load module 4 is also driven to rotate 270 degrees clockwise relative to the driven arm 3 and 90 degrees clockwise relative to the reference axis LB. Specifically, the rotation angle of the slave arm 3 relative to the driving arm 2 is the rotation angle A1 of the second axis L2 relative to the first axis L1, A1=-θ1×wr1/sr2=-180×2=- 360, that is, relatively counterclockwise rotation 360 degrees, and the rotation angle of the driven arm 3 relative to the reference axis LB is the rotation angle θ2 of the second axis L2 relative to the reference axis LB, θ2=A1+θ1=-360+ 180=-180, that is, rotate 180 degrees counterclockwise. The rotation angle of the load module 4 relative to the driven arm 3 is the rotation angle A2 of the third axis L3 relative to the second axis L2, A2=-A1×wr2/sr3=-(-360)×3/ 4=270, that is, relatively clockwise rotation 270 degrees, and the rotation angle of the load module 4 relative to the reference axis LB is the rotation angle θ3 of the third axis L3 relative to the reference axis LB, θ3=A2+θ2= 270+(-180)=90, that is, rotate 90 degrees clockwise.

It can be seen from the illustrations in FIGS. 2 to 5 that, in this embodiment, when the active arm 2 rotates 180 degrees, the distance that the tray 42 is moved from the starting position is two times the active arm 2 plus the driven arm 3 The arm length is twice as long, and the tray 42 rotates 90 degrees relative to the starting position, that is, the entry and exit path P rotates 90 degrees, so that the object to be conveyed on the tray 42 can be moved in position and the conveying direction is changed . In addition, in this embodiment, since the arm lengths of the driving arm 2 and the driven arm 3 are equal, the third rotating shaft 41 is located on the reference axis LB during the movement, and the tray 42 is moved along the reference axis. LB moves straight. The ratio of the turning radius of the first driving wheel 511 to the turning radius of the second shaft 31 (ie wr1/sr2), and the ratio of the turning radius of the second driving wheel 521 to the turning radius of the third shaft 41 (ie wr2/sr3), which can be adjusted according to the use requirements, that is, according to the preset relationship between the angle of rotation of the active arm 2 and the driven arm 3, an appropriate ratio of wr1/sr2 can be selected, and the ratio can be adjusted according to the preset Assuming the relationship between the angles at which the slave arm 3 and the load module 4 rotate, an appropriate ratio of wr2/sr3 is selected, which is not limited to this embodiment.

In summary, by driving the driving arm 2 to rotate by the driving mechanism 1, the driven arm 3 and the load module 4 can be driven to rotate, and the load module 4 can move simultaneously by the same power source Positioning and changing the conveying direction can not only reduce mechanism actions, but also reduce transportation time.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

1: Drive mechanism

11: Motor

12: Pulley

13: Pedestal

2: active arm

21: The first shaft

22: first arm body

3: Slave arm

31: Second shaft

32: second arm

4: Load module

41: Third shaft

42: tray

421: Disc body

422: limit stop

5: Linkage mechanism

51: The first linkage module

511: first drive wheel

512: The first transmission component

512a: first drive belt

52: The second linkage module

521: second drive wheel

522: second transmission assembly

522a: second drive belt

L1: first axis

L2: second axis

L3: third axis

LB: reference axis

P: Access path

X1, X2, X3: axis

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a perspective view of an embodiment of the delivery device of the present invention; and Figures 2 to 5 are schematic top views illustrating the embodiment at different rotation positions.

1: Drive mechanism

11: Motor

12: Pulley

13: Pedestal

2: active arm

21: The first shaft

22: first arm body

3: Slave arm

31: Second shaft

32: second arm

4: Load module

41: Third shaft

42: tray

421: Disc body

422: limit stop

5: Linkage mechanism

51: The first linkage module

511: first drive wheel

512: The first transmission component

512a: first drive belt

52: The second linkage module

521: second drive wheel

522: second transmission assembly

522a: second drive belt

Claims (2)

A conveying device includes: a driving mechanism including a base; an active arm having a first rotation shaft and a first arm body, the first rotation shaft is arranged upright and driven to rotate by the driving mechanism, the first The arm body is horizontally arranged and connected to the first rotating shaft and rotates in conjunction with the first rotating shaft; a driven arm has a second rotating shaft and a second arm body, the second rotating shaft is arranged upright and can be connected to the first arm body Rotatingly connected, the second arm body is horizontally arranged and connected to the second shaft and rotates in conjunction with the second shaft; a load module has a third shaft and a tray, and the third shaft is arranged upright and connected to the second shaft. The second arm body is rotatably connected, the tray is arranged horizontally and connected to the third rotating shaft and rotates in conjunction with the third rotating shaft, the tray has an in and out path for linear movement of an object to be conveyed; and a linkage mechanism, including A first linkage module is arranged on the first arm body and has a first drive wheel and a first transmission assembly. The first drive wheel is fixedly connected to the base and coaxially arranged with the first rotating shaft. A transmission assembly connects the first driving wheel and the second rotating shaft so that the first driving wheel can rotate with the second rotating shaft, and the rotation direction of the second rotating shaft is opposite to the first rotating shaft, and a second linkage mode Set on the second arm body and having a second driving wheel and a second transmission assembly, the second driving wheel is fixedly connected to the first arm body and arranged coaxially with the second shaft, the second transmission assembly Connect the second drive wheel and the third shaft so that the second drive The wheel can be linked to the third rotating shaft to rotate, and the rotation direction of the third rotating shaft is opposite to the second rotating shaft; the rotating radius of the first driving wheel is defined as wr1, the rotating radius of the second rotating shaft is sr2, and the second driving The turning radius of the wheel is wr2, and the turning radius of the third rotating shaft is sr3, where wr1: sr2=2:1; wr2: sr3=3:4. The conveying device according to claim 1, wherein the distance between the shaft center of the first shaft and the shaft center of the second shaft is equal to the distance between the shaft center of the second shaft and the shaft center of the third shaft .

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