TWI854304B - Robotic arm - Google Patents

Abstract

A robotic arm includes a base, a first arm body, a second arm body, a motor, a first belt set, a first harmonic drive, a second belt set, and a second harmonic drive and a third belt set. The first arm body can rotate relative to the base and the second arm body can rotate relative to the first arm body. The motor and the first belt set are disposed in the base, the second belt set is disposed in the first arm body, and the third belt set is disposed in the second arm body. The first harmonic drive and the second harmonic drive are connected to the second belt set. The motor can transfer power through the first belt set, the second belt set and the third belt set, can drive the first arm body to rotate through the first harmonic drive, and can drive the second arm body to rotate through the second harmonic drive. An operation end of the second arm body can be moved to the position to drive an object to move linearly. Therefore, it merely a single motor is required to reduce the manufacturing cost and the accumulated error, and to increase the positioning accuracy.

Description

Robotic Arm

The present invention relates to a mechanical arm, in particular to a mechanical arm driven by a single motor and capable of driving an object to move linearly.

With the development of the semiconductor industry, integrated circuits need to go through multiple complicated processing procedures, such as etching, grinding, diffusion and deposition, before they can be produced. In the semiconductor manufacturing process, robots are often used to move objects such as wafer carriers. However, existing robots usually need to be driven by multiple motors, which makes it difficult to reduce the manufacturing cost. Although there are robots driven by a single motor on the market, a single motor will have the problem of cumulative error, which reduces the positioning accuracy.

The technical problem to be solved by the present invention is to provide a mechanical arm that only needs to be equipped with a single motor to reduce manufacturing costs, and has good stability, which can reduce cumulative errors and increase positioning accuracy.

In order to solve the above technical problems, the present invention provides a robot arm, comprising: a base, a first space is formed in the base; a first arm body, a second space is formed in the first arm body, one end of the first arm body is close to the base, and the first arm body can rotate relative to the base; a second arm body, a third space is formed in the second arm body, one end of the second arm body is close to the other end of the first arm body, the second arm body can rotate relative to the first arm body, and the other end of the second arm body forms an operating end; a motor, the motor is arranged in the first space of the base; a first belt assembly, the first belt assembly is arranged in the first space of the base, the first belt assembly is arranged in the first space of the base, and the second belt assembly is arranged in the first space of the base. A belt set is connected to the motor; a first harmonic reducer; a second belt set, the second belt set is arranged in the second space of the first arm, the first harmonic reducer is connected to the second belt set; a second harmonic reducer, the second harmonic reducer is connected to the second belt set; and a third belt set, the third belt set is arranged in the third space of the second arm; wherein the motor can transmit power through the first belt set, the second belt set and the third belt set, and drive the first arm to rotate through the first harmonic reducer, and drive the second arm to rotate through the second harmonic reducer, so that the operating end of the second arm can move to a position.

The beneficial effect of the present invention is that the robot arm provided by the present invention includes a base, a first arm body, a second arm body, a motor, a first belt set, a first harmonic reducer, a second belt set, a second harmonic reducer and a third belt set. The first arm body can rotate relative to the base, the second arm body can rotate relative to the first arm body, the motor and the first belt set are arranged in the base, the second belt set is arranged in the first arm body, the third belt set is arranged in the second arm body, and the first harmonic reducer and the second harmonic reducer are connected to the second belt set. The motor can transmit power through the first belt assembly, the second belt assembly and the third belt assembly, and drive the first arm body to rotate through the first harmonic reducer, and drive the second arm body to rotate through the second harmonic reducer, so that the operating end of the second arm body can be moved to a position. The present invention only needs to set a single motor, so the manufacturing cost can be reduced, and the first harmonic reducer and the second harmonic reducer are set to drive the first arm body and the second arm body respectively, so that the transmission accuracy is improved and more stable, so the cumulative error can be reduced to increase the positioning accuracy.

To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only used for reference and description and are not used to limit the present invention.

The following is an explanation of the relevant implementation methods disclosed by the present invention through specific concrete embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation methods will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention. In addition, the term "or" used in this article may include any one or more combinations of the related listed items depending on the actual situation.

[Example]

Please refer to Figures 1 to 4. The present invention provides a robot arm that can be used to transport objects such as wafer boxes or mask boxes. The robot arm includes a base 1, a first arm body 2, a second arm body 3, a motor 4, a first belt assembly 5, a first harmonic reducer 6, a second belt assembly 7, a second harmonic reducer 8 and a third belt assembly 9. The drawings of this embodiment reveal two robot arms, which share a base 1. The two robot arms form a double-arm structure and can clamp objects together.

The base 1 is a hollow body, and a first space 11 is formed in the base 1. The base 1 can be installed at a predetermined position. The first arm 2 is a hollow body, and a second space 21 is formed in the first arm 2. One end of the first arm 2 is close to the base 1, and the first arm 2 can rotate relative to the base 1. The second arm 3 is also a hollow body, and a third space 31 is formed in the second arm 3. One end of the second arm 3 is close to the other end of the first arm 2, and the second arm 3 can rotate relative to the first arm 2. The base 1, the first arm 2 and the second arm 3 can rotate with each other to form an articulated structure. The other end of the second arm 3 forms an operating end 32, and the operating end 32 can be used to clamp objects.

The motor 4 and the first belt set 5 are disposed in the first space 11 of the base 1, and the first belt set 5 is connected to the motor 4 so that the motor 4 can output power through the first belt set 5. The second belt set 7 is disposed in the second space 21 of the first arm 2, and the third belt set 9 is disposed in the third space 31 of the second arm 3, so that the second belt set 7 and the third belt set 9 are disposed in the first arm 2 and the second arm 3 respectively, the first harmonic reducer 6 is disposed between the first belt set 5 and the second belt set 7, and the second harmonic reducer 8 is disposed between the second belt set 7 and the third belt set 9, and the motor 4, the first belt set 5, the second belt set 7 and the third belt set 9 can form a power chain. Preferably, the first harmonic reducer 6 is disposed between the base 1 and one end of the first arm 2, and the second harmonic reducer 8 is disposed between the other end of the first arm 2 and the second arm 3. Since the first harmonic reducer 6 and the second harmonic reducer 8 are commercially available, they are not described in detail.

When the motor 4 outputs power, it can transmit power through the first belt set 5, the second belt set 7 and the third belt set 9, and drive the first arm 2 to rotate through the first harmonic reducer 6, and drive the second arm 3 to rotate through the second harmonic reducer 8, so that the operating end 32 of the second arm 3 can move to a position, and the operating end 32 can perform linear motion. The clamping mechanism (not shown) on the operating end 32 can be used to clamp an object, thereby driving the object to move linearly.

Please refer to Figures 4 to 6 again. In this embodiment, the first belt assembly 5 includes a first pulley 51, a second pulley 52 and a first belt 53. The first pulley 51 is connected to the motor 4, so that the first belt assembly 5 can be connected to the motor 4. The first belt 53 is wound between the first pulley 51 and the second pulley 52. Preferably, the first pulley 51 and the second pulley 52 are toothed pulleys, and the first belt 53 is a toothed belt, so that the transmission is more accurate and has a stable transmission ratio.

In this embodiment, the second belt set 7 is an acceleration belt set, and the second belt set 7 includes a third pulley 71, a fourth pulley 72 and a second belt 73. The second belt 73 is wound between the third pulley 71 and the fourth pulley 72. Preferably, the third pulley 71 and the fourth pulley 72 are toothed pulleys, and the second belt 73 is a toothed belt, so that the transmission is more accurate and has a stable transmission ratio.

In this embodiment, the third belt set 9 is a reduction belt set, and the third belt set 9 includes a fifth pulley 91, a sixth pulley 92 and a third belt 93. The third belt 93 is wound between the fifth pulley 91 and the sixth pulley 92. Preferably, the fifth pulley 91 and the sixth pulley 92 are toothed pulleys, and the third belt 93 is a toothed belt, so that the transmission is more accurate and has a stable transmission ratio.

The motor 4 drives the second pulley 52 through the first belt 53 via the first pulley 51, the second pulley 52 can be connected to a first axis 10, the first axis 10 can be connected to the third pulley 71, the third pulley 71 is connected to the first harmonic reducer 6, so that the first harmonic reducer 6 is connected to the second belt set 7, and the first arm 2 is driven to rotate by the first harmonic reducer 6. The third pulley 71 drives the fourth pulley 72 through the second belt 73, and the fourth pulley 72 is connected to the second harmonic reducer 8, so that the second harmonic reducer 8 is connected to the second belt set 7, and the second arm 3 is driven to rotate by the second harmonic reducer 8. One end of a second axis 20 is connected to the first arm 2, and the other end of the second axis 20 is connected to the fifth belt pulley 91. When the second arm 3 rotates, the fifth belt pulley 91 drives the sixth belt pulley 92 via the third belt 93, and the sixth belt pulley 92 drives the operating end 32 to rotate. The operating end 32 of the second arm 3 can be moved to a fixed position to drive the object to move linearly.

[Beneficial Effects of the Embodiments]

The beneficial effect of the present invention is that the robot arm provided by the present invention includes a base, a first arm body, a second arm body, a motor, a first belt set, a first harmonic reducer, a second belt set, a second harmonic reducer and a third belt set. The first arm body can rotate relative to the base, the second arm body can rotate relative to the first arm body, the motor and the first belt set are arranged in the base, the second belt set is arranged in the first arm body, the third belt set is arranged in the second arm body, and the first harmonic reducer and the second harmonic reducer are connected to the second belt set. The motor can transmit power through the first belt assembly, the second belt assembly and the third belt assembly, and drive the first arm body to rotate through the first harmonic reducer, and drive the second arm body to rotate through the second harmonic reducer, so that the operating end of the second arm body can be moved to a position. The present invention only needs to set a single motor, so the manufacturing cost can be reduced, and the first harmonic reducer and the second harmonic reducer are set to drive the first arm body and the second arm body respectively, so that the transmission accuracy is improved and more stable, so the cumulative error can be reduced to increase the positioning accuracy.

The contents disclosed above are only preferred feasible embodiments of the present invention and are not intended to limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the contents of the specification and drawings of the present invention are included in the scope of the patent application of the present invention.

1: Base 11: First space 2: First arm 21: Second space 3: Second arm 31: Third space 32: Operation end 4: Motor 5: First belt assembly 51: First pulley 52: Second pulley 53: First belt 6: First harmonic reducer 7: Second belt assembly 71: Third pulley 72: Fourth pulley 73: Second belt 8: Second harmonic reducer 9: Third belt assembly 91: Fifth pulley 92: Sixth pulley 93: Third belt 10: First axis 20: Second axis

FIG. 1 is a perspective view of the robot arm of the present invention.

FIG. 2 is a three-dimensional diagram of the robot arm of the present invention from another angle.

FIG3 is a cross-sectional view taken along line III-III of FIG1 .

FIG. 4 is a perspective view of the internal structure of the robot arm of the present invention.

FIG. 5 is a three-dimensional diagram of the internal structure of the robot arm of the present invention from another angle.

FIG. 6 is a front view of the internal structure of the robot arm of the present invention.

1: Base

11: First Space

2: First arm

21: Second Space

3: Second arm

31: The Third Space

32: Operation terminal

4: Motor

5: First belt set

6: First harmonic reducer

7: Second belt set

71: Third pulley

72: Fourth pulley

73: Second belt

8: Second harmonic reducer

9: Third belt group

91: Fifth pulley

92: Sixth pulley

93: Third belt

10: First axis

20: Second axis

Claims (5)

A robot arm comprises: a base, a first space is formed in the base; a first arm body, a second space is formed in the first arm body, one end of the first arm body is close to the base, and the first arm body can rotate relative to the base; a second arm body, a third space is formed in the second arm body, one end of the second arm body is close to the other end of the first arm body, the second arm body can rotate relative to the first arm body, and the other end of the second arm body forms a third space. as an end; a motor, the motor is arranged in the first space of the base; a first belt set, the first belt set is arranged in the first space of the base, the first belt set is connected to the motor; a first harmonic reducer; a second belt set, the second belt set is arranged in the second space of the first arm, the first harmonic reducer is connected to the second belt set; a second harmonic reducer, the second harmonic reducer is connected to the second belt set; and a third belt assembly, the third belt assembly is arranged in the third space of the second arm; wherein the motor can transmit power through the first belt assembly, the second belt assembly and the third belt assembly, and drive the first arm to rotate through the first harmonic reducer, and drive the second arm to rotate through the second harmonic reducer, so that the operating end of the second arm can move to a fixed position; the first belt assembly includes a first belt pulley, a second belt pulley and a first The first belt pulley is connected to the motor, the first belt is wound between the first belt pulley and the second belt pulley, the second belt set includes a third belt pulley, a fourth belt pulley and a second belt, the second belt is wound between the third belt pulley and the fourth belt pulley, the third belt set includes a fifth belt pulley, a sixth belt pulley and a third belt, the third belt is wound between the fifth belt pulley and the sixth belt pulley. A robotic arm as described in claim 1, wherein the operating end is capable of linear motion. The robot arm as described in claim 1, wherein the second pulley is connected to a first axis, the first axis is connected to the third pulley, the third pulley is connected to the first harmonic reducer, the fourth pulley is connected to the second harmonic reducer, one end of a second axis is connected to the first arm body, and the other end of the second axis is connected to the fifth pulley. As described in claim 3, when the second arm body rotates, the fifth belt pulley drives the sixth belt pulley via the third belt, and the sixth belt pulley drives the operating end to rotate. The robot arm as described in claim 1, wherein the first harmonic reducer is disposed between the base and one end of the first arm, and the second harmonic reducer is disposed between the other end of the first arm and the second arm.