JPH07205061A - Conveyance device - Google Patents

Abstract

PURPOSE:To provide a conveyance device which realizes high speed operation with high positioning precision. CONSTITUTION:First and second links 5a, 5b are rotatably connected through first and second rotary joints 6a, 6b to first and second direct drive motors 2a, 2b to rotate first and second arms 4a, 4b whose rotary center shafts are positioned in parallel with each other and which are fitted diametrically. The other ends of the first and second links 5a, 5b are connected rotatably to each other by means of a connection joint 7, and a suction pad 8 to retain a transported member is fitted to the connection joint 7. Also, pulleys are fitted coaxially to the first rotary joint 6 and the connection joint 7, and a timing belt 12 is hung around these pulleys.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device used for accurately transferring a work, which is a member to be transferred, to a predetermined position.

[0002]

2. Description of the Related Art In various mass-produced parts and product assembly plants, automation of assembly is spread to every corner, and in many cases, a work is also held by a transfer device and transferred to a predetermined position.

Here, when the work is a semiconductor chip, high positioning accuracy is required because the transfer position is on the die pad of the lead frame or on the TAB, so that the transfer device also determines a predetermined work. What can be accurately conveyed to the position is required.

[0004]

However, since a gear and a feed screw are used in the transport mechanism in the conventional transport device to cause backlash, an error corresponding to the backlash occurs during the reversing operation, and accurate transport is not possible. It was difficult.

Further, from the viewpoint of improving the transfer efficiency, it is desirable that the transfer device operates at the highest speed possible. However, in the conventional transfer device, the motor has a movable portion, so that the moment of inertia becomes large and the operation speed is increased. There was a limit.

Therefore, an object of the present invention is to provide a technique relating to a carrying device capable of carrying a member to be conveyed with high positioning accuracy.

Another object of the present invention is to provide a technique relating to a conveying device capable of high speed operation.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0009]

Of the inventions disclosed in the present application, a representative one will be briefly described below.
It is as follows.

That is, in the carrying device of the present invention, the first and second arms, which are provided such that the central axes of rotation thereof are positioned parallel to each other and which are mounted in the radial direction, rotate in the circumferential direction, respectively. Two rotary drive means, and first and second links rotatably connected to the first and second arms via first and second rotary joints, respectively.
A connecting joint provided with a holding means for rotatably connecting the first and second links to each other and holding a transported member such as a semiconductor chip, and one of the first and second rotary joints. It is composed of a pair of pulleys coaxially attached to the coupling joint, and a timing belt wound around the pair of pulleys.

In this case, the above-mentioned first and second
For example, a direct drive motor can be used as the rotation driving means.

[0012]

According to the transporting device having the above-described structure, since the gear and the feed screw that cause backlash are not used, an operation error does not occur during the reversing operation due to repeated use, and the transported member is high. It becomes possible to carry the sheet accurately with the positioning accuracy.

Further, since there is no heavy object such as a motor in the movable part, the moment of inertia during transportation becomes small,
The high-speed operation makes it possible to convey the conveyed member.

[0014]

Embodiments of the present invention will now be described in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is a perspective view showing a carrying device according to an embodiment of the present invention, FIG. 2 is a sectional view showing a connecting joint of the carrying device, and FIG. 3 is an operating state of the carrying device. FIG.

The carrying device 1 of the present embodiment is a carrying device for carrying and placing a member to be carried such as a semiconductor chip at a predetermined position with high accuracy and carrying it, and as shown in FIG. A first direct drive motor (hereinafter referred to as "DD motor") whose central axes are positioned parallel to each other.
(First rotation driving means) 2a and second DD motor (second
Rotation driving means) 2b is attached to the base 3. First and second arms 4a and 4b connected to a motor shaft (not shown) are attached to the upper portions of the first and second DD motors 2a and 2b so as to extend in the respective radial directions. The two DD motors 2a and 2b are rotated in the circumferential direction.

At the tips of the first and second arms 4a and 4b, first and second links 5a and 5b are respectively provided.
Are rotatably connected. That is, one ends of the first and second links 5a and 5b are axially connected to the tip ends of the first and second arms 4a and 4b, that is, the first and second links 5a and 5b are the rotation center axes. Are connected to form the first and second rotary joints 6a and 6b, and the first and second links 5a and 6b are thereby formed.
5b is rotatable on the same plane as the first and second arms 4a and 4b.

The other end of the second link 5b serves as a rotation center axis of the other end of the first link 5a and is axially connected to form a connecting joint 7, and the connecting joint 7 rotates the both. Freely interconnected. Further, as shown in FIG. 2, a suction pad (holding means) 8 for sucking and holding a predetermined member to be conveyed by vacuum is provided below the connection joint 7, and a cylinder 9 located above the suction pad 8 is provided. Rod 9a
By penetrating the collar 10 and being connected to the suction pad 8, the suction pad 8 can be moved up and down by the cylinder 9.

The above-described first rotary joint 6a (that is,
The side of the first link 5a that is the rotation center axis and this connection joint 7 (that is, the second link 5b that is the rotation center axis)
A pulley 11 is coaxially attached to each of the side) and a timing belt 12 is stretched around the pulley 11 so that the posture of the conveyed member sucked and held by the suction pad 8 during conveyance can be kept constant. Has become.

A conveying device 1 shown in this embodiment based on FIG.
I will explain the movement. First, in the state shown by the solid line in which the coupling joint 7 is located at the central position A, the first and second DD motors 2a and 2b move both the first and second arms 4a and 4b counterclockwise. When rotated, the connection joint 7 is moved to the position B indicated by the chain double-dashed line on the left side of the drawing by the first and second links 5a and 5b connected thereto. Therefore, the transported member sucked and held by the suction pad 8 provided on the coupling joint 7 is also moved from the A position to the B position.

In addition, the first and second arms 4a and 4b
When is rotated in the opposite direction, that is, clockwise, the transported member is moved to the position C on the right side of the drawing. Further, when the first and second arms 4a and 4b are rotated in directions approaching each other, the transported member is moved to the D position, and when rotated in directions away from each other, the transported member is moved to the E position. become. In this way, the first and second DD motors 2a, 2a
By setting the rotation direction and the rotation angle of b variously, the transported member can be transported to an arbitrary position.

Here, the pair of pulleys 11 attached to the first rotary joint 6a and the connecting joint 7 and the timing belt 12 wound around the pair of pulleys 11 maintain the posture of the member to be sucked and held. In this state, the first and second arms 4a and 4b are conveyed to a predetermined position in a state in which the directions on the rotation surfaces are the same as those before the conveyance.

In the carrying apparatus 1 of this embodiment, the first and second DD motors 2a and 2b, and the first DD motors 2a and 2b are provided.
And second DD motors 2a, 2b are respectively provided with first and second arms 4a, 4b, one end of which is connected to the first and second arms 4a, 4b and the other end of which is mutually connected. The first and second links 5a and 5b constitute a transport mechanism, and gears and feed screws are not used. Therefore, a positioning error at the time of the reversing operation due to backlash does not occur, and the transported member can be transported with high positioning accuracy.

Furthermore, the first and second arms 4a and 4b, which are movable parts, the first and second links 5a and 5b,
Since no heavy object such as a motor is attached to the first and second rotary joints 6a and 6b and the connecting joint 7, the moment of inertia during operation is small and the response is high, and the conveyed member is conveyed by high speed operation. be able to.

(Embodiment 2) FIG. 4 is an explanatory view showing an operating state of a carrying apparatus according to another embodiment of the present invention.

As shown in the figure, in the carrying apparatus of this embodiment, the tip end of the first arm 14a serves as the rotation center axis, and one end of the first link 15a is axially connected.
One end of the second link 15b serves as the rotation center axis
The first and second rotary joints 16a and 16b are formed by being axially connected to the arm 14b. In addition, the other end of the first link 15a serves as a rotation center axis of the other end of the second link 15b and is axially coupled to form a coupling joint 17, and the two are rotatably coupled to each other. ing.

Therefore, the pair of pulleys attached to the first rotary joint 16a and the coupling joint 17 in the conveying apparatus shown in this embodiment are different from those in the first embodiment, respectively, on the first arm 14a side and the first arm 14a side. It is provided on the link 15a side.

Also in the carrying apparatus according to the present embodiment, the member to be sucked and held by the pair of pulleys and the timing belt wound around the pulleys is carried to a predetermined position while maintaining its posture. It will be.

(Embodiment 3) FIG. 5 is an explanatory view showing an operating state of a conveying apparatus which is still another embodiment of the present invention.

In the carrying apparatus of this embodiment, unlike the first and second embodiments, the tip end of the first arm 24a serves as the rotation center axis and one end of the first link 25a is axially connected. On the other hand, one end of the second link 25b serves as a rotation center axis and is axially connected to the second arm 24b, so that the first and second rotary joints 26 are respectively connected.
a and 26b are formed. Also, the second link 25
The other end of b serves as a rotation center axis of the other end of the first link 25a and is axially connected to form a connection joint 27, which is rotatably connected to each other.

Therefore, the pair of pulleys attached to the first rotary joint 26a and the coupling joint 27 in the transport apparatus shown in this embodiment are different from those in the first and second embodiments, respectively, and are different from the first arm 24a side and the first arm 24a side, respectively. Link 2 of 25
It is provided on the b side.

Even with such a transporting apparatus, the posture of the sucked and held transported member is maintained in a constant state by the timing belt wound around the pulleys.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, in this embodiment, the first and second arms 4a, 14a, 24a, 4b, 14b, 2 are provided.
The first and second DD motors 2a and 2b are used as means for rotating the motor 4b, but this shows the best embodiment of the present invention, and other types of motors can be used. is there. Further, the operation modes of the first and second DD motors 2a and 2b may be synchronous or asynchronous.

Further, although one of the pulleys 11 is attached to the first rotary joints 6a, 16a, 26a, it is of course possible to attach it to the second rotary joints 6b, 16b, 26b.

The holding means in this embodiment is the suction pad 8 for vacuum-sucking the transported member, but the holding means is not limited to this. For example, a holding type of sandwiching the transported member from both sides. It may be a means.

Further, in the above description, the semiconductor chip carrying device 1 which is the background of the invention made mainly by the present inventor has been described, but the carrying device of the present invention is limited to carrying semiconductor chips. However, the present invention can be applied to the transfer of various other works.

The first arms 4a, 14a, 24a
And the first links 5a, 15a, 25a and the second arm 4
b, 14b, 24b and the second links 5b, 15b, 25
b, and the first and second links 5a, 15a, 25
As for the setting of the rotation center axis in the axial coupling of a, 5b, 15b, and 25b, other forms are possible other than those shown in the first, second, and third embodiments. However, when the pulleys 11 are provided at both ends of the same link, the pair of pulleys 11 do not relatively rotate due to the rotational movement, so that the posture of the conveyed member is maintained by the pulley 11 and the timing belt 12. The function does not work. Therefore, when the transported member sucked and held by the suction pad 8 is directional, it is appropriate to adopt the shaft coupling in which the pulley 11 is not provided on the same link. On the other hand, it goes without saying that the pulley 11 can be provided on the same link as long as the transported member has no directivity.

[0039]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
It is as follows.

(1). That is, in the carrying apparatus of the present invention, the carrying mechanism is constituted by the first and second rotation driving means, the first and second arms, and the first and second links, And the lead screw is not used. Therefore, there is no backlash formed by the gear and the feed screw, and no positioning error occurs during the reversing operation. Therefore, according to the transporting device of the present invention, it is possible to transport the transported member with high positioning accuracy.

(2) Further, the cylinder and the holding means are attached only to the coupling joint which is the movable portion, and other movable portions (that is, the first and second arms, the first and second links). , And the first and second rotary joints) are not attached with a heavy object such as a motor, the moment of inertia during operation is small and a high response is obtained. Therefore, according to the transfer device of the present invention, the member to be transferred can be transferred at high speed, and the transfer efficiency can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a carrying device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a connecting joint of the carrying device.

FIG. 3 is an explanatory diagram showing an operating state of the transport device.

FIG. 4 is an explanatory diagram showing an operating state of the transport device according to the second embodiment of the present invention.

FIG. 5 is an explanatory diagram showing an operating state of the transport device according to the third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Conveyor 2a 1st direct drive motor (1st rotation drive means) 2b 2nd direct drive motor (2nd rotation drive means) 3 Base 4a 1st arm 4b 2nd arm 5a 1st Link 5b Second link 6a First rotary joint 6b Second rotary joint 7 Coupling joint 8 Adsorption pad (holding means) 9 Cylinder 9a Rod 10 Color 11 Pulley 12 Timing belt 14a First arm 14b Second arm 15a 1st link 15b 2nd link 16a 1st rotary joint 16b 2nd rotary joint 17 coupling joint 24a 1st arm 24b 2nd arm 25a 1st link 25b 2nd link 26a 1st rotary joint 26b Second rotary joint 27 Connection joint

Claims (2)

[Claims] 1. First and second rotation drive means for rotating first and second arms, which are provided with their rotation center axes parallel to each other and are mounted in the radial direction, in the circumferential direction, respectively. The first and second arms respectively have first and second arms.
A first and a second link rotatably connected to each other via a rotary joint, and a holding means for rotatably connecting the first and second links to each other and holding a transported member. A coupling joint, a pair of pulleys that are coaxially attached to one of the first and second rotary couplings, and the coupling joint, and the transported member that is held and held by the pair of pulleys. And a timing belt for maintaining the posture of the conveyance device. 2. The transport apparatus according to claim 1, wherein the first and second rotation driving means are direct drive motors.