JP5871550B2 - Transfer robot and vacuum device - Google Patents

Transfer robot and vacuum device Download PDF

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Publication number
JP5871550B2
JP5871550B2 JP2011223399A JP2011223399A JP5871550B2 JP 5871550 B2 JP5871550 B2 JP 5871550B2 JP 2011223399 A JP2011223399 A JP 2011223399A JP 2011223399 A JP2011223399 A JP 2011223399A JP 5871550 B2 JP5871550 B2 JP 5871550B2
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arm
drive
driven arm
drive shaft
parallel crank
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JP2013082031A (en
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孝広 吉野
孝広 吉野
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Ulvac Inc
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Ulvac Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Description

本発明は、例えば基板等の搬送物を搬送する搬送装置に関し、特に、半導体製造装置等における真空装置に好適な搬送ロボットの技術に関する。   The present invention relates to a transfer apparatus that transfers a transfer object such as a substrate, and more particularly to a transfer robot technique suitable for a vacuum apparatus in a semiconductor manufacturing apparatus or the like.

従来、この種の搬送ロボットとしては、スループットを向上させるため、基板載置部をそれぞれ有する二つの搬送機構を設けたものが知られている。
しかし、搬送機構を二つ設ける場合には、搬送機構同士の接触を避けるために搬送機構を上下に配置する必要があり、その結果、搬送ロボットを配置する真空装置の高さが高くなるという問題がある。 Conventionally, as this kind of transfer robot, one provided with two transfer mechanisms each having a substrate mounting portion is known in order to improve throughput.
However, when two transport mechanisms are provided, it is necessary to arrange the transport mechanisms up and down in order to avoid contact between the transport mechanisms, and as a result, there is a problem that the height of the vacuum device in which the transport robot is disposed is increased. There is.

本発明は、このような従来の技術の課題を解決するためになされたもので、その目的とするところは、複数の搬送機構を有する搬送ロボットにおいて、スループットを向上させるとともに、搬送ロボット及びこれを配置する真空装置の高さを低く抑える技術を提供することにある。   The present invention has been made in order to solve the above-described problems of the prior art, and an object of the present invention is to improve throughput in a transfer robot having a plurality of transfer mechanisms, An object of the present invention is to provide a technique for reducing the height of a vacuum device to be arranged.

上記目的を達成するためになされた本発明は、所定の回転軸を中心として水平面内で回転可能に設けられた第１、第２及び第３の駆動軸と、前記第１の駆動軸に固定された第１の上側駆動アームと、前記第１の上側駆動アームの下方において前記第２の駆動軸に固定された第２の上側駆動アームと、前記第１及び第２の上側駆動アームの先端部にそれぞれ水平面内において回転可能に連結された第１の上側従動アーム及び第２の上側従動アームとからなる第１の上側平行クランク機構と、前記第１の上側平行クランク機構の上方に配置され、前記第２の上側従動アームと、当該第２の上側従動アームの両端部においてそれぞれ水平面内において回転可能に連結された第３の上側従動アーム及び第４の上側従動アームと、当該第３の上側従動アーム及び第４の上側従動アームの先端部にそれぞれ水平面内において回転可能に連結された第５の上側従動アームとからなる第２の上側平行クランク機構と、前記第５の上側従動アームの先端部に取り付けられた上側搬送部とを有する上側搬送機構と、前記第２の上側駆動アームの下方において前記第３の駆動軸に固定された第１の下側駆動アームと、前記第２の上側駆動アームの下側で且つ前記第１の下側駆動アームの上側において前記第２の駆動軸に前記第２の上側駆動アームに対して所定の角度で固定された第２の下側駆動アームと、前記第１及び第２の下側駆動アームの先端部にそれぞれ水平面内において回転可能に連結された第１の下側従動アーム及び第２の下側従動アームとからなる第１の下側平行クランク機構と、前記第２の下側従動アームと、当該第２の下側従動アームの両端部においてそれぞれ水平面内において回転可能に連結された第３の下側従動アーム及び第４の下側従動アームと、当該第３の下側従動アーム及び第４の下側従動アームの先端部にそれぞれ水平面内において回転可能に連結された第５の下側従動アームとからなる第２の下側平行クランク機構と、前記第５の下側従動アームの先端部で、前記第１の上側平行クランク機構と前記第２の上側平行クランク機構の間の高さ位置に設けられ、他の部材に接触しないように形成された下側搬送部とを有する下側搬送機構と、を有し、前記上側搬送機構を伸縮させる際、前記第２の駆動軸と前記第３の駆動軸を同一方向に回転させ、かつ、前記下側搬送機構を伸縮させる際、前記第１の駆動軸と前記第２の駆動軸を同一方向に回転させるように構成されている搬送ロボットである。
本発明では、前記上側搬送部及び前記下側搬送部が、それぞれ二つの載置部を有している場合にも効果的である。
また、本発明は、真空槽と、前記真空槽内に設けられた、上述したいずれかの搬送ロボットとを有する真空装置である。 The present invention, which has been made to achieve the above object, includes first, second and third drive shafts which are rotatably provided in a horizontal plane around a predetermined rotation shaft, and are fixed to the first drive shaft. A first upper drive arm, a second upper drive arm fixed to the second drive shaft below the first upper drive arm, and tips of the first and second upper drive arms. A first upper parallel crank mechanism composed of a first upper driven arm and a second upper driven arm that are rotatably connected to each other in a horizontal plane, and are disposed above the first upper parallel crank mechanism. , said second upper follower arm, and the third upper driven arm and the fourth upper follower arm of which is rotatably coupled at the second upper follower arm, respectively in a horizontal plane at both ends of the third Upper follower A second upper parallel crank mechanism comprising a fifth upper driven arm rotatably connected in a horizontal plane to the front end of the first upper arm and the fourth upper driven arm, and a front end of the fifth upper driven arm An upper transport mechanism, an upper transport mechanism, a first lower drive arm fixed to the third drive shaft below the second upper drive arm, and the second upper drive. A second lower drive arm fixed to the second drive shaft at a predetermined angle with respect to the second upper drive arm, below the arm and above the first lower drive arm; A first lower parallel crank comprising a first lower driven arm and a second lower driven arm that are rotatably connected to the front ends of the first and second lower drive arms in a horizontal plane, respectively. A mechanism and the second A side driven arm, a third lower driven arm and a fourth lower driven arm, which are rotatably connected in a horizontal plane at both ends of the second lower driven arm, and the third lower side A second lower parallel crank mechanism comprising a fifth lower driven arm rotatably connected to the distal ends of the driven arm and the fourth lower driven arm in a horizontal plane, and the fifth lower side A lower conveying portion provided at a height position between the first upper parallel crank mechanism and the second upper parallel crank mechanism at a distal end portion of the driven arm and formed so as not to contact other members ; have a, a lower transport mechanism having the time of expanding and contracting the upper transport mechanism, the third drive shaft and the second drive shaft is rotated in the same direction, and stretching the lower conveying mechanism The first drive shaft and the second drive shaft Is a transfer robot configured to rotate the drive shaft in the same direction .
In this invention, it is effective also when the said upper conveyance part and the said lower conveyance part each have two mounting parts.
Moreover, this invention is a vacuum apparatus which has a vacuum chamber and one of the conveyance robots mentioned above provided in the said vacuum chamber.

本発明の場合、第１及び第２の駆動軸に固定された第１及び第２の上側駆動アームによって構成される上側搬送機構と、第２及び第３の駆動軸に固定された第１及び第２の下側駆動アームによって構成される下側搬送機構とを有し、これら第１、第２及び第３の駆動軸は同心状に設けられていることから、上側搬送機構と下側搬送機構とを回転軸に対してそれぞれ側方に配置して動作させることができ、これにより複数の搬送物を同時に搬送することによりスループットを向上させるとともに、搬送ロボット及びこれを配置する真空装置の高さを低く抑えることができる。また、大きな真空槽内において搬送物を搬送することも可能になる。   In the case of the present invention, the upper transport mechanism composed of the first and second upper drive arms fixed to the first and second drive shafts, and the first and second fixed to the second and third drive shafts. A lower transport mechanism including a second lower drive arm, and the first, second, and third drive shafts are provided concentrically, so that the upper transport mechanism and the lower transport mechanism are provided. The mechanism can be arranged and operated laterally with respect to the rotation axis, thereby improving the throughput by simultaneously transporting a plurality of transported objects, and improving the height of the transport robot and the vacuum device in which the transport robot is disposed. Can be kept low. It is also possible to transport the transported object in a large vacuum chamber.

本発明によれば、複数の搬送機構を有する搬送ロボットにおいて、スループットを向上させるとともに、搬送ロボット及びこれを配置する真空装置の高さを低く抑える技術を提供することにある。
また、搬送物の搬送時における振動をできるだけ少なくすることができる。 According to the present invention, in a transfer robot having a plurality of transfer mechanisms, it is possible to improve the throughput and to provide a technique for reducing the height of the transfer robot and a vacuum device in which the transfer robot is arranged.
Moreover, the vibration at the time of conveyance of a conveyed product can be minimized.

（ａ）：本発明に係る搬送ロボットの実施の形態の構成を示す平面図（ｂ）：同搬送ロボットの構成を示す正面図(A): Plan view showing the configuration of the embodiment of the transfer robot according to the present invention (b): Front view showing the configuration of the transfer robot 第１〜第３の駆動軸の構成を示す断面図Sectional drawing which shows the structure of the 1st-3rd drive shaft 同搬送ロボットの上側搬送機構を示す平面図Top view showing the upper transfer mechanism of the transfer robot 同搬送ロボットの下側搬送機構を示す平面図Top view showing the lower transfer mechanism of the transfer robot 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その１）A top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 1) 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その２）Plan view showing the extension operation of the upper transfer mechanism of the transfer robot (part 2) 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その３）Top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 3) 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その４）Top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 4) 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その５）Plan view showing the extension operation of the upper transfer mechanism of the transfer robot (part 5) 同搬送ロボットの上側搬送機構の伸長動作を示す平面図（その６）FIG. 6 is a plan view showing the extension operation of the upper transfer mechanism of the transfer robot (No. 6). 同搬送ロボットの下側搬送機構の伸長動作を示す平面図（その１）Top view showing extension operation of lower transfer mechanism of transfer robot (Part 1) 同搬送ロボットの下側搬送機構の伸長動作を示す平面図（その２）Plan view showing the extension operation of the lower transfer mechanism of the transfer robot (part 2) 同搬送ロボットの下側搬送機構の伸長動作を示す平面図（その３）Top view showing extension operation of lower transfer mechanism of transfer robot (Part 3) 同搬送ロボットの下側搬送機構の伸長動作を示す平面図（その４）Plan view showing the extension operation of the lower transfer mechanism of the transfer robot (part 4) 同搬送ロボットの下側搬送機構の伸長動作を示す平面図（その５）Top view showing extension operation of lower transfer mechanism of transfer robot (Part 5)

以下、本発明の好ましい実施の形態を図面を参照して詳細に説明する。
図１（ａ）は、本発明に係る搬送ロボットの実施の形態の構成を示す平面図、図１（ｂ）は、同搬送ロボットの構成を示す正面図である。
図２は、第１〜第３の駆動軸の構成を示す断面図である。図３は、同搬送ロボットの上側搬送機構を示す平面図、図４は、同搬送ロボットの下側搬送機構を示す平面図である。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A is a plan view showing the configuration of the embodiment of the transfer robot according to the present invention, and FIG. 1B is a front view showing the configuration of the transfer robot.
FIG. 2 is a cross-sectional view showing the configuration of the first to third drive shafts. FIG. 3 is a plan view showing an upper transfer mechanism of the transfer robot, and FIG. 4 is a plan view showing a lower transfer mechanism of the transfer robot.

図１（ａ）に示すように、本発明の搬送ロボット１は、例えば真空槽（図示せず）内において搬送物である基板１０の搬送を行うもので、図３に示す上側搬送機構１Ａと、図４に示す下側搬送機構１Ｂとを有している。   As shown in FIG. 1A, the transfer robot 1 of the present invention transfers a substrate 10 which is a transfer object in, for example, a vacuum chamber (not shown), and includes an upper transfer mechanism 1A shown in FIG. , And a lower transport mechanism 1B shown in FIG.

図２に示すように、本実施の形態では、独立した駆動源（図示せず）からそれぞれ時計回り方向又は反時計回り方向の回転動力が伝達される同心状の第１、第２及び第３の駆動軸１１、１２、１３を有している。
ここで、第１の駆動軸１１は、最も内側に配置され、その周囲に第２の駆動軸１２及び第３の駆動軸１３が配置され、回転軸Ｏを中心として水平方向に回転するように構成されている。
第２の駆動軸１２は、段付きの形状に形成され、その上部に第１の連結部１２ａが設けられ、第１の連結部１２ａの下方に第１の連結部１２ａより径の大きな第２の連結部１２ｂが設けられている。 As shown in FIG. 2, in the present embodiment, concentric first, second, and third torques transmitted in the clockwise direction or the counterclockwise direction are respectively transmitted from independent drive sources (not shown). Drive shafts 11, 12, and 13.
Here, the first drive shaft 11 is arranged on the innermost side, and the second drive shaft 12 and the third drive shaft 13 are arranged around the first drive shaft 11 so as to rotate in the horizontal direction around the rotation axis O. It is configured.
The second drive shaft 12 is formed in a stepped shape, and a first connecting portion 12a is provided on the upper portion thereof, and a second larger diameter than the first connecting portion 12a is provided below the first connecting portion 12a. The connecting portion 12b is provided.

図３に示すように、上側搬送機構１Ａは、それぞれ直線状に延びる、第１の上側駆動アーム２１と、第２の上側駆動アーム２２と、第１の上側従動アーム３１と、第２の上側従動アーム３２によって構成される第１の上側平行クランク機構４を有している。   As shown in FIG. 3, the upper transport mechanism 1 </ b> A includes a first upper drive arm 21, a second upper drive arm 22, a first upper driven arm 31, and a second upper side, each extending linearly. The first upper parallel crank mechanism 4 constituted by the driven arm 32 is provided.

ここで、第１の上側駆動アーム２１は第１の駆動軸１１に連結され、第２の上側駆動アーム２２は、第２の駆動軸１２の第１の連結部１２ａに連結されている。
第１の上側駆動アーム２１の他方の端部（先端部）には、第１の上側従動アーム３１の一方の端部（基端部）が、第１の上側駆動アーム２１の下方において支軸Ａを中心として水平方向に回転自在に取り付けられている。 Here, the first upper drive arm 21 is connected to the first drive shaft 11, and the second upper drive arm 22 is connected to the first connection portion 12 a of the second drive shaft 12.
At the other end (front end) of the first upper drive arm 21, one end (base end) of the first upper driven arm 31 is a support shaft below the first upper drive arm 21. It is attached so as to be rotatable in the horizontal direction around A.

また、第２の上側駆動アーム２２の他方の端部（先端部）には、第２の上側従動アーム３２の一方の端部（基端部）が、第２の上側駆動アーム２２の上方において支軸Ｂを中心として水平方向に回転自在に取り付けられている。   In addition, one end (base end) of the second upper driven arm 32 is located above the second upper drive arm 22 at the other end (tip) of the second upper drive arm 22. It is attached so as to be rotatable in the horizontal direction around the support shaft B.

さらに、第１の上側従動アーム３１の他方の端部（先端部）と、第２の上側従動アーム３２の他方の端部（先端部）とが、第２の上側従動アーム３２の下方において支軸Ｃ、Ｂを中心としてそれぞれ水平方向に回転自在に取り付けられている。   Further, the other end portion (tip portion) of the first upper driven arm 31 and the other end portion (tip portion) of the second upper driven arm 32 are supported below the second upper driven arm 32. The shafts C and B are attached so as to be rotatable in the horizontal direction.

本実施の形態の場合、支軸ＡＣ間の軸間距離は、回転軸Ｏ及び支軸Ｂ間の距離と同一となるように設定されている。また、支軸ＢＣ間の軸間距離は、回転軸Ｏ及び支軸Ａ間の距離と同一となるように設定されている。
なお、支軸ＡＣ間の軸間距離と回転軸Ｏ及び支軸Ｂ間の距離が、支軸ＢＣ間の軸間距離と回転軸Ｏ及び支軸Ａ間の距離より長くなるように構成されている。 In the case of the present embodiment, the inter-axis distance between the support shafts AC is set to be the same as the distance between the rotation shaft O and the support shaft B. Further, the distance between the support shafts BC is set to be the same as the distance between the rotation shaft O and the support shaft A.
Note that the distance between the support shafts AC and the distance between the rotation shaft O and the support shaft B are longer than the distance between the support shafts BC and the distance between the rotation shaft O and the support shaft A. Yes.

第１の上側平行クランク機構４の先端部即ち動作側端部には、第２の上側平行クランク機構５が連結されている。
この第２の上側平行クランク機構５は、第１の上側平行クランク機構４の第２の上側従動アーム３２と、第３の上側従動アーム３３と、第４の上側従動アーム３４と、第５の上側従動アームである上側エンドエフェクタ４０の一部３６によって構成されている。 A second upper parallel crank mechanism 5 is connected to a tip end portion, that is, an operation side end portion of the first upper parallel crank mechanism 4.
The second upper parallel crank mechanism 5 includes a second upper driven arm 32, a third upper driven arm 33, a fourth upper driven arm 34, and a fifth It is comprised by the part 36 of the upper end effector 40 which is an upper driven arm.

ここで、第２の上側従動アーム３２の第１の上側従動アーム３１側の端部には、第２の上側従動アーム３２の上方において、第３の上側従動アーム３３の一方の端部（基端部）が、上述した支軸Ｃを中心として水平方向に回転自在に取り付けられている。   Here, the end of the second upper driven arm 32 on the first upper driven arm 31 side is located above one end (base) of the third upper driven arm 33 above the second upper driven arm 32. (End part) is attached so that rotation in the horizontal direction centering | focusing on the spindle C mentioned above is possible.

また、第２の上側従動アーム３２の第２の上側駆動アーム２２側の端部には、第２の上側従動アーム３２の上方において、第４の上側従動アーム３４の一方の端部（基端部）が、上述した支軸Ｂを中心として水平方向に回転自在に取り付けられている。
これら第３及び第４の上側従動アーム３３，３４は、第２の上側駆動アーム２２及び第１の上側従動アーム３１と軸間距離が同一となるように構成されている。 Further, one end portion (base end) of the fourth upper driven arm 34 is provided above the second upper driven arm 32 at the end portion of the second upper driven arm 32 on the second upper drive arm 22 side. Part) is attached so as to be rotatable in the horizontal direction around the above-mentioned support shaft B.
The third and fourth upper driven arms 33 and 34 are configured to have the same inter-axis distance as the second upper drive arm 22 and the first upper driven arm 31.

さらに、第３及び第４の上側従動アーム３３，３４の他方の端部（先端部）は、上側エンドエフェクタ４０の下方において、支軸ＢＣ間の距離と同一の軸間距離を有する位置に設けられた支軸Ｄ、Ｅ中心として水平方向に回転自在に取り付けられている。   Further, the other ends (tip portions) of the third and fourth upper driven arms 33 and 34 are provided below the upper end effector 40 at a position having the same inter-axis distance as the distance between the support shafts BC. The shafts D and E are attached so as to be rotatable in the horizontal direction.

本実施の形態では、第２の上側従動アーム３２に、第１の上側駆動アーム２２と第３の上側従動アーム３３の回転方向が反対方向で且つ同一の角度となるように構成されたギアボックスからなる動力伝達機構３５が設けられている。   In the present embodiment, the second upper driven arm 32 is configured such that the rotation directions of the first upper drive arm 22 and the third upper driven arm 33 are opposite and at the same angle. A power transmission mechanism 35 is provided.

すなわち、第２の上側駆動アーム２２の動力が第２の上側従動アーム３２の動力伝達機構３５を介して伝達され、第３の上側従動アーム３３が第１の上側駆動アーム２２と同一角度で反対方向に回転するように構成されている。
そして、このような構成により、第２の上側平行クランク機構５の動作先端部の支軸Ｄ、Ｅが基板搬送方向Ｐに沿って直進し、回転軸Ｏ上を通過するようになっている。 That is, the power of the second upper drive arm 22 is transmitted via the power transmission mechanism 35 of the second upper driven arm 32, and the third upper driven arm 33 is opposite to the first upper drive arm 22 at the same angle. It is configured to rotate in the direction.
With such a configuration, the support shafts D and E at the operating tip of the second upper parallel crank mechanism 5 travel straight along the substrate transport direction P and pass on the rotation axis O.

本実施の形態の上側エンドエフェクタ４０は、上述した支軸Ｄ、Ｅから基板搬送方向Ｐに延び所定の間隔で設けられた二つの支持アーム４１、４２を有し、各支持アーム４１、４２の先端部に、基板１０を載置する基板載置部４３、４４がそれぞれ設けられている。   The upper end effector 40 of the present embodiment has two support arms 41 and 42 that extend in the substrate transport direction P from the support shafts D and E described above, and are provided at predetermined intervals. Substrate placement portions 43 and 44 for placing the substrate 10 are provided at the distal end portions, respectively.

図４に示すように、下側搬送機構１Ｂは、それぞれ直線状に延びる、第１の下側駆動アーム５１と、第２の下側駆動アーム５２と、第１の下側従動アーム６１と、第２の下側従動アーム６２によって構成される第１の下側平行クランク機構６を有している。
ここで、第１の下側駆動アーム５１は第３の駆動軸１３に連結され、第２の下側駆動アーム５２は、第２の駆動軸１２の第２の連結部１２ｂに連結されている。 As shown in FIG. 4, the lower transport mechanism 1B includes a first lower drive arm 51, a second lower drive arm 52, a first lower driven arm 61, each extending linearly, It has a first lower parallel crank mechanism 6 constituted by a second lower driven arm 62.
Here, the first lower drive arm 51 is connected to the third drive shaft 13, and the second lower drive arm 52 is connected to the second connection portion 12 b of the second drive shaft 12. .

第１の下側駆動アーム５１の他方の端部（先端部）には、第１の下側従動アーム６１の一方の端部（基端部）が、第１の下側駆動アーム５１の上方において支軸Ｆを中心として水平方向に回転自在に取り付けられている。   One end portion (base end portion) of the first lower driven arm 61 is located above the first lower drive arm 51 at the other end portion (front end portion) of the first lower drive arm 51. In FIG. 1, the shaft is mounted so as to be rotatable in the horizontal direction around the support shaft F.

また、第２の下側駆動アーム５２の他方の端部（先端部）には、第２の下側従動アーム６２の一方の端部（基端部）が、第２の下側駆動アーム５２の上方において支軸Ｇを中心として水平方向に回転自在に取り付けられている。 In addition, one end portion (base end portion) of the second lower driven arm 62 is connected to the other end portion (front end portion) of the second lower drive arm 52. It is rotatably mounted in the horizontal direction about the support shaft G in the upper.

ところで、本実施の形態では、図２に示すように、第１の下側平行クランク機構６の第２の下側駆動アーム５２は第２の駆動軸１２の第２の連結部１２ｂに連結され、第１の上側平行クランク機構４の第２の上側駆動アーム２２は、第２の駆動軸１２の第１の連結部１２ａに連結されている。   By the way, in the present embodiment, as shown in FIG. 2, the second lower drive arm 52 of the first lower parallel crank mechanism 6 is connected to the second connection portion 12 b of the second drive shaft 12. The second upper drive arm 22 of the first upper parallel crank mechanism 4 is connected to the first connection portion 12 a of the second drive shaft 12.

ここで、第１の下側平行クランク機構６の第２の下側駆動アーム５２は、上述した第１の上側平行クランク機構４の第２の上側駆動アーム２２と共に第２の駆動軸１２に固定されているため、第２の駆動軸１２を回転させると、同じ方向に同じ角度回転する。   Here, the second lower drive arm 52 of the first lower parallel crank mechanism 6 is fixed to the second drive shaft 12 together with the second upper drive arm 22 of the first upper parallel crank mechanism 4 described above. Therefore, when the second drive shaft 12 is rotated, the second drive shaft 12 rotates in the same direction by the same angle.

なお、本実施の形態では、第１の上側平行クランク機構４の第２の上側駆動アーム２２と、第１の下側平行クランク機構６の第２の下側駆動アーム５２とは、同一の軸間距離を有するように構成されており、図１、３、４に示すように、ホームポジションにある場合に、基板搬送方向Ｐに対して線対称となるようにこの角度が定められている。   In the present embodiment, the second upper drive arm 22 of the first upper parallel crank mechanism 4 and the second lower drive arm 52 of the first lower parallel crank mechanism 6 have the same axis. As shown in FIGS. 1, 3, and 4, this angle is determined so as to be axisymmetric with respect to the substrate transport direction P when in the home position.

そして、第１の下側平行クランク機構６の第１の下側従動アーム６１の他方の端部（先端部）と、第２の下側駆動アーム５２の他方の端部（先端部）とが、第２の下側従動アーム６２の下方において支軸Ｈ、Ｇを中心としてそれぞれ水平方向に回転自在に取り付けられている。 Then, the other end portion (tip portion) of the first lower driven arm 61 of the first lower parallel crank mechanism 6 and the other end portion (tip portion) of the second lower drive arm 52 are connected. , spindle H below the second lower follower arm 62 is attached rotatably respectively in the horizontal direction about the G.

本実施の形態の場合、支軸ＦＨ間の軸間距離は、回転軸Ｏ及び支軸Ｇ間の距離と同一となるように設定されている。また、支軸ＧＨ間の軸間距離は、回転軸Ｏ及び支軸Ｆ間の距離と同一となるように設定されている。
なお、支軸ＦＨ間の軸間距離と回転軸Ｏ及び支軸Ｇ間の距離が、支軸ＧＨ間の軸間距離と回転軸Ｏ及び支軸Ｆ間の距離より長くなるように構成されている。 In the case of the present embodiment, the inter-axis distance between the support shafts FH is set to be the same as the distance between the rotation shaft O and the support shaft G. The inter-axis distance between the support shafts GH is set to be the same as the distance between the rotation shaft O and the support shaft F.
The distance between the support shafts FH and the distance between the rotation shaft O and the support shaft G are longer than the distance between the support shafts GH and the distance between the rotation shaft O and the support shaft F. Yes.

第１の下側平行クランク機構６の先端部即ち動作側端部には、第２の下側平行クランク機構７が連結されている。
この第２の下側平行クランク機構７は、第１の下側平行クランク機構６の第２の下側従動アーム６２と、第３の下側従動アーム６３と、第４の下側従動アーム６４と、下側エンドエフェクタ７０の一部６６によって構成されている。 A second lower parallel crank mechanism 7 is connected to a tip end portion of the first lower parallel crank mechanism 6, that is, an operation side end portion.
The second lower parallel crank mechanism 7 includes a second lower driven arm 62, a third lower driven arm 63, and a fourth lower driven arm 64 of the first lower parallel crank mechanism 6. And a part 66 of the lower end effector 70.

ここで、第２の下側従動アーム６２の第１の下側従動アーム６１側の端部には、第２の下側従動アーム６２の上方において、第３の下側従動アーム６３の一方の端部（基端部）が、上述した支軸Ｈを中心として水平方向に回転自在に取り付けられている。 Here, one end of the third lower driven arm 63 is located above the second lower driven arm 62 at the end of the second lower driven arm 62 on the first lower driven arm 61 side. An end portion (base end portion) is attached so as to be rotatable in the horizontal direction around the support shaft H described above.

また、第２の下側従動アーム６２の第２の下側駆動アーム５２側の端部には、第２の下側従動アーム６２の上方において、第４の下側従動アーム６４の一方の端部（基端部）が、上述した支軸Ｇを中心として水平方向に回転自在に取り付けられている。
これら第３及び第４の下側従動アーム６３、６４は、第２の下側駆動アーム５２及び第１の下側従動アーム６１と軸間距離が同一となるように構成されている。 Further, one end of the fourth lower driven arm 64 is located above the second lower driven arm 62 at the end of the second lower driven arm 62 on the second lower drive arm 52 side. The portion (base end portion) is attached so as to be rotatable in the horizontal direction around the above-described support shaft G.
The third and fourth lower driven arms 63 and 64 are configured to have the same inter-axis distance as the second lower drive arm 52 and the first lower driven arm 61.

さらに、第３及び第４の下側従動アーム６３、６４の他方の端部（先端部）は、下側エンドエフェクタ７０の下方において、支軸ＧＨ間の距離と同一の軸間距離を有する位置に設けられた支軸Ｉ、Ｊ中心として水平方向に回転自在に取り付けられている。   Further, the other end portions (tip portions) of the third and fourth lower driven arms 63 and 64 are positioned below the lower end effector 70 and have the same inter-axis distance as the distance between the support shafts GH. It is attached so that it can rotate in the horizontal direction about the spindles I and J provided on the center.

本実施の形態では、第２の下側従動アーム６２に、第２の下側駆動アーム５２と第３の下側従動アーム６３の回転方向が反対方向で且つ同一の角度となるように構成されたギアボックスからなる動力伝達機構６５が設けられている。   In the present embodiment, the second lower driven arm 62 is configured such that the rotation directions of the second lower drive arm 52 and the third lower driven arm 63 are opposite and at the same angle. A power transmission mechanism 65 comprising a gearbox is provided.

すなわち、第２の下側駆動アーム５２の動力が第２の下側従動アーム６２の動力伝達機構６５を介して伝達され、第３の下側従動アーム６３が第２の下側駆動アーム５２と同一角度で反対方向に回転するように構成されている。
そして、このような構成により、第２の下側クランク機構７の動作先端部の支軸Ｉ、Ｊが基板搬送方向Ｐに沿って直進し、回転軸Ｏ上を通過するようになっている。 That is, the power of the second lower drive arm 52 is transmitted via the power transmission mechanism 65 of the second lower driven arm 62, and the third lower driven arm 63 is connected to the second lower drive arm 52. It is configured to rotate in the opposite direction at the same angle.
With such a configuration, the support shafts I and J at the operating tip of the second lower crank mechanism 7 go straight along the substrate transport direction P and pass on the rotary shaft O.

本実施の形態の下側エンドエフェクタ７０は、上述した支軸Ｉ、Ｊから基板搬送方向Ｐに延び所定の間隔で設けられた二つの支持アーム７１、７２を有し、各支持アーム７１、７２の先端部に、基板を載置する基板載置部７３、７４がそれぞれ設けられている。   The lower end effector 70 according to the present embodiment has two support arms 71 and 72 extending from the above-described support shafts I and J in the substrate transport direction P and provided at a predetermined interval. Substrate mounting portions 73 and 74 for mounting the substrate are provided at the front end portion of each.

さらに、図１（ｂ）に示すように、下側エンドエフェクタ７０は、上側搬送機構１Ａの第１の上側平行クランク機構４と第２の上側平行クランク機構５の間の高さ位置に設けられ、また各部材同士が接触しないように、それぞれの形状及び大きさが定められている。   Further, as shown in FIG. 1B, the lower end effector 70 is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. In addition, the shape and size of each member are determined so that the members do not contact each other.

以下、本実施の形態の動作について説明する。
まず、図５に示す原点位置から上側搬送機構を伸長させる場合について、図６〜図１０を参照して説明する。 Hereinafter, the operation of the present embodiment will be described.
First, the case where the upper transport mechanism is extended from the origin position shown in FIG. 5 will be described with reference to FIGS.

この場合は、図６に示すように、第２の駆動軸１２を時計回り方向に所定角度回転させると同時に、図７に示すように、第３の駆動軸１３を時計回り方向に同じ角度回転させる。
本実施の形態の場合、第２の駆動軸１２には、下側搬送機構１Ｂの第２の下側駆動アーム５２が固定されているため、この第２の下側駆動アーム５２も時計回り方向に所定角度回転する。 In this case, as shown in FIG. 6, the second drive shaft 12 is rotated by a predetermined angle in the clockwise direction, and at the same time, the third drive shaft 13 is rotated in the clockwise direction by the same angle as shown in FIG. Let
In the present embodiment, since the second lower drive arm 52 of the lower transport mechanism 1B is fixed to the second drive shaft 12, the second lower drive arm 52 is also rotated in the clockwise direction. To a predetermined angle.

そして、この回転動作により、第１の上側平行クランク機構４と第２の上側平行クランク機構５が基板搬送方向Ｐに移動し、図８に示すように、上側エンドエフェクタ４０が回転軸Ｏに対して基板搬送方向Ｐの下流側に配置される。   As a result of this rotation operation, the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 move in the substrate transport direction P, and the upper end effector 40 moves relative to the rotation axis O as shown in FIG. And disposed downstream of the substrate transport direction P.

一方、下側搬送機構１Ｂは、回転軸Ｏを中心として、時計回り方向に所定角度旋回し、図９に示す姿勢になる。
そして、以上の動作により、図１０に示すように、上側搬送機構１Ａが伸長するとともに、下側搬送機構１Ｂが所定角度旋回した状態になる。 On the other hand, the lower transport mechanism 1B turns around the rotation axis O by a predetermined angle clockwise and assumes the posture shown in FIG.
As a result of the above operation, as shown in FIG. 10, the upper transport mechanism 1A is extended and the lower transport mechanism 1B is turned by a predetermined angle.

なお、下側搬送機構１Ｂの下側エンドエフェクタ７０は、上側搬送機構１Ａの第１の上側平行クランク機構４と第２の上側平行クランク機構５の間の高さ位置に設けられているため、上側搬送機構１Ａには接触しない。   The lower end effector 70 of the lower transport mechanism 1B is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. It does not contact the upper transport mechanism 1A.

一方、上側搬送機構１Ａと下側搬送機構１Ｂを原点位置に戻す場合には、第２の駆動軸１２を反時計回り方向に所定角度回転させると同時に、第３の駆動軸１３を反時計回り方向に同じ角度回転させる。   On the other hand, when the upper transport mechanism 1A and the lower transport mechanism 1B are returned to the origin positions, the second drive shaft 12 is rotated counterclockwise by a predetermined angle and at the same time the third drive shaft 13 is rotated counterclockwise. Rotate the same angle in the direction.

次に、図５に示す原点位置から下側搬送機構１Ｂを伸長させる場合について、図１１〜図１５を参照して説明する。
この場合は、図１１に示すように、第２の駆動軸１２を反時計回り方向に所定角度回転させると同時に、図１２に示すように、第１の駆動軸を反時計回り方向に同じ角度回転させる。
本実施の形態の場合、第２の駆動軸１２には、上側搬送機構１Ａの第２の上側駆動アーム２２が固定されているため、この第２の上側駆動アーム２２も反時計回り方向に所定角度回転する。 Next, a case where the lower transport mechanism 1B is extended from the origin position shown in FIG. 5 will be described with reference to FIGS.
In this case, as shown in FIG. 11, the second drive shaft 12 is rotated by a predetermined angle in the counterclockwise direction, and at the same time, the first drive shaft is rotated at the same angle in the counterclockwise direction as shown in FIG. Rotate.
In the case of the present embodiment, since the second upper drive arm 22 of the upper transport mechanism 1A is fixed to the second drive shaft 12, the second upper drive arm 22 is also predetermined in the counterclockwise direction. Rotate the angle.

そして、この回転動作により、第１の下側平行クランク機構６と第２の下側平行クランク機構７が基板搬送方向Ｐに移動し、図１３に示すように、下側エンドエフェクタ７０が回転軸Ｏに対して基板搬送方向Ｐ下流側に配置される。
また、上側搬送機構１Ａが回転軸Ｏを中心として、反時計回り方向に所定角度旋回し、図１４に示す姿勢になる。 As a result of this rotating operation, the first lower parallel crank mechanism 6 and the second lower parallel crank mechanism 7 move in the substrate transport direction P, and the lower end effector 70 rotates as shown in FIG. It is arranged downstream of the substrate transport direction P with respect to O.
Further, the upper transport mechanism 1A turns around the rotation axis O by a predetermined angle in the counterclockwise direction and assumes the posture shown in FIG.

そして、以上の動作により、図１５に示すように、下側搬送機構１Ｂが伸長するとともに、上側搬送機構１Ａが所定角度旋回した状態になる。
なお、下側搬送機構１Ｂの下側エンドエフェクタ７０は、上側搬送機構１Ａの第１の上側平行クランク機構４と第２の上側平行クランク機構５の間の高さ位置に設けられているため、上側搬送機構１Ａには接触しない。 With the above operation, as shown in FIG. 15, the lower transport mechanism 1 </ b> B extends and the upper transport mechanism 1 </ b> A is turned by a predetermined angle.
The lower end effector 70 of the lower transport mechanism 1B is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. It does not contact the upper transport mechanism 1A.

一方、上側搬送機構１Ａと下側搬送機構１Ｂを原点位置に戻す場合には、第２の駆動軸１２を反時計回り方向に所定角度回転させると同時に、第３の駆動軸１３を反時計回り方向に同じ角度回転させる。
なお、搬送ロボット１を旋回させる場合には、ホームポジションの状態において、第１〜第３の駆動軸１１〜１３を同時に同一方向へ同じ角度回転させればよい。 On the other hand, when the upper transport mechanism 1A and the lower transport mechanism 1B are returned to the origin positions, the second drive shaft 12 is rotated counterclockwise by a predetermined angle and at the same time the third drive shaft 13 is rotated counterclockwise. Rotate the same angle in the direction.
Note that when the transport robot 1 is turned, the first to third drive shafts 11 to 13 may be simultaneously rotated in the same direction by the same angle in the home position state.

以上述べたように本実施の形態にあっては、第１及び第２の駆動軸１１、１２に固定された第１及び第２の上側駆動アーム２１、２２によって構成される上側搬送機構１Ａと、第２及び第３の駆動軸１２、１３に固定された第１及び第２の下側駆動アーム５１、５２によって構成される下側搬送機構１Ｂとを有し、これら第１〜３の駆動軸１１〜１３は同心状に設けられていることから、上側搬送機構１Ａと下側搬送機構１Ｂとを第１〜３の駆動軸１１〜１３に対してそれぞれ側方に配置して動作させることができ、これにより複数の搬送物を同時に搬送することによりスループットを向上させるとともに、搬送ロボット及びこれを配置する真空装置の高さを低く抑えることができる。また、大きな真空槽内において搬送物を搬送することも可能になる。   As described above, in the present embodiment, the upper transport mechanism 1A configured by the first and second upper drive arms 21 and 22 fixed to the first and second drive shafts 11 and 12; , The lower transport mechanism 1B configured by the first and second lower drive arms 51 and 52 fixed to the second and third drive shafts 12 and 13, and these first to third drives Since the shafts 11 to 13 are provided concentrically, the upper transport mechanism 1 </ b> A and the lower transport mechanism 1 </ b> B are arranged on the side with respect to the first to third drive shafts 11 to 13 and operated. Thus, the throughput can be improved by simultaneously transporting a plurality of transported objects, and the height of the transport robot and the vacuum device in which the transport robot is disposed can be kept low. It is also possible to transport the transported object in a large vacuum chamber.

なお、本発明は上述の実施の形態に限られることなく、種々の変更を行うことができる。
例えば、上記実施の形態では、上側搬送機構１Ａと下側搬送機構１Ｂの対応するアームの軸間距離が同一となるようにしたが、本発明はこれに限られず、上側搬送機構１Ａと下側搬送機構１Ｂとにおいて各アームの軸間距離を異なるように構成することもできる。
さらに、上記実施の形態では、各エンドエフェクタにそれぞれ載置部を二つ設けたが、本発明はこれに限られず、一つ又は三つ以上設けることもできる。 The present invention is not limited to the above-described embodiment, and various changes can be made.
For example, in the above embodiment, the distance between the axes of the corresponding arms of the upper transport mechanism 1A and the lower transport mechanism 1B is the same, but the present invention is not limited to this, and the upper transport mechanism 1A and the lower The distance between the axes of each arm may be different from that of the transport mechanism 1B.
Furthermore, in the above-described embodiment, each of the end effectors is provided with two mounting portions. However, the present invention is not limited to this, and one or three or more can be provided.

１…搬送ロボット
１Ａ…上側搬送機構
１Ｂ…下側搬送機構
４…第１の上側平行クランク機構
５…第２の上側平行クランク機構
６…第１の下側平行クランク機構
７…第２の下側平行クランク機構
１０…基板
１１…第１の駆動軸
１２…第２の駆動軸
１３…第３の駆動軸
２１…第１の上側駆動アーム
２２…第２の上側駆動アーム
４０…上側エンドエフェクタ（上側搬送部）
５１…第１の下側駆動アーム
５２…第２の下側駆動アーム
７０…下側エンドエフェクタ（下側搬送部） DESCRIPTION OF SYMBOLS 1 ... Transfer robot 1A ... Upper transfer mechanism 1B ... Lower transfer mechanism 4 ... First upper parallel crank mechanism 5 ... Second upper parallel crank mechanism 6 ... First lower parallel crank mechanism 7 ... Second lower side Parallel crank mechanism 10 ... board 11 ... first drive shaft 12 ... second drive shaft 13 ... third drive shaft 21 ... first upper drive arm 22 ... second upper drive arm 40 ... upper end effector (upper side) (Transport section)
51 ... First lower drive arm 52 ... Second lower drive arm 70 ... Lower end effector (lower transport section)

Claims (3)

所定の回転軸を中心として水平面内で回転可能に設けられた第１、第２及び第３の駆動軸と、
前記第１の駆動軸に固定された第１の上側駆動アームと、前記第１の上側駆動アームの下方において前記第２の駆動軸に固定された第２の上側駆動アームと、
前記第１及び第２の上側駆動アームの先端部にそれぞれ水平面内において回転可能に連結された第１の上側従動アーム及び第２の上側従動アームとからなる第１の上側平行クランク機構と、
前記第１の上側平行クランク機構の上方に配置され、前記第２の上側従動アームと、当該第２の上側従動アームの両端部においてそれぞれ水平面内において回転可能に連結された第３の上側従動アーム及び第４の上側従動アームと、当該第３の上側従動アーム及び第４の上側従動アームの先端部にそれぞれ水平面内において回転可能に連結された第５の上側従動アームとからなる第２の上側平行クランク機構と、
前記第５の上側従動アームの先端部に取り付けられた上側搬送部とを有する上側搬送機構と、
前記第２の上側駆動アームの下方において前記第３の駆動軸に固定された第１の下側駆動アームと、前記第２の上側駆動アームの下側で且つ前記第１の下側駆動アームの上側において前記第２の駆動軸に前記第２の上側駆動アームに対して所定の角度で固定された第２の下側駆動アームと、
前記第１及び第２の下側駆動アームの先端部にそれぞれ水平面内において回転可能に連結された第１の下側従動アーム及び第２の下側従動アームとからなる第１の下側平行クランク機構と、
前記第２の下側従動アームと、当該第２の下側従動アームの両端部においてそれぞれ水平面内において回転可能に連結された第３の下側従動アーム及び第４の下側従動アームと、当該第３の下側従動アーム及び第４の下側従動アームの先端部にそれぞれ水平面内において回転可能に連結された第５の下側従動アームとからなる第２の下側平行クランク機構と、
前記第５の下側従動アームの先端部で、前記第１の上側平行クランク機構と前記第２の上側平行クランク機構の間の高さ位置に設けられ、他の部材に接触しないように形成された下側搬送部とを有する下側搬送機構と、を有し、
前記上側搬送機構を伸縮させる際、前記第２の駆動軸と前記第３の駆動軸を同一方向に回転させ、かつ、前記下側搬送機構を伸縮させる際、前記第１の駆動軸と前記第２の駆動軸を同一方向に回転させるように構成されている搬送ロボット。 First, second and third drive shafts provided so as to be rotatable in a horizontal plane around a predetermined rotation axis;
A first upper drive arm fixed to the first drive shaft; a second upper drive arm fixed to the second drive shaft below the first upper drive arm;
A first upper parallel crank mechanism comprising a first upper driven arm and a second upper driven arm, which are rotatably connected to the distal ends of the first and second upper drive arms, respectively, in a horizontal plane;
A third upper driven arm disposed above the first upper parallel crank mechanism and rotatably connected to the second upper driven arm and both ends of the second upper driven arm in a horizontal plane. And a fourth upper driven arm, and a second upper driven arm that is rotatably connected to the distal ends of the third upper driven arm and the fourth upper driven arm in a horizontal plane, respectively. A parallel crank mechanism;
An upper transport mechanism having an upper transport section attached to the tip of the fifth upper driven arm;
A first lower drive arm fixed to the third drive shaft below the second upper drive arm; a lower side of the second upper drive arm and of the first lower drive arm; A second lower drive arm fixed on the second drive shaft at a predetermined angle with respect to the second upper drive arm on the upper side;
A first lower parallel crank comprising a first lower driven arm and a second lower driven arm that are rotatably connected to the front ends of the first and second lower drive arms in a horizontal plane, respectively. Mechanism,
A second lower driven arm, a third lower driven arm and a fourth lower driven arm, which are rotatably connected in a horizontal plane at both ends of the second lower driven arm, A second lower parallel crank mechanism comprising a fifth lower driven arm rotatably connected in a horizontal plane to the distal ends of the third lower driven arm and the fourth lower driven arm;
The tip of the fifth lower driven arm is provided at a height position between the first upper parallel crank mechanism and the second upper parallel crank mechanism so as not to contact other members. and lower conveying mechanism having a lower conveying section has, have a,
When expanding and contracting the upper transport mechanism, the second drive shaft and the third drive shaft are rotated in the same direction, and when expanding and contracting the lower transport mechanism, the first drive shaft and the first drive shaft A transfer robot configured to rotate two drive shafts in the same direction . 前記上側搬送部及び前記下側搬送部が、それぞれ二つの載置部を有している請求項１記載の搬送ロボット。 The upper conveyance unit and the lower conveyance unit, the transfer robot according to claim 1 Symbol mounting each have two mounting portions. 真空槽と、
前記真空槽内に設けられた請求項１又は請求項２のいずれか１項記載の搬送ロボットとを有する真空装置。 A vacuum chamber;
The vacuum apparatus which has the conveyance robot of any one of Claim 1 or Claim 2 provided in the said vacuum chamber.
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