TWI697356B - Fluid mixer - Google Patents

Abstract

A fluid mixer includes a connecting cover body, a three-way pipe body and a needle hole injection part. The connecting cover includes a first connecting part; the three-way pipe body is connected to the connecting cover, and includes a second connecting part, an output part and a cavity, wherein the second connecting part, the output part and the cavity communicate with each other; a needle hole injection part It is connected to the connecting cover and includes a pinhole channel. The pinhole channel has a first port and a second port opposite to the first port. The first port is connected to the first connecting portion, and the second port is connected to the second connecting portion And the output department.

Description

Fluid mixer

The invention relates to a mixing device; in particular, it refers to a fluid mixer.

In the high-tech field, it is necessary to use high-purity chemical liquids with stable concentrations to manufacture high-tech product parts (for example, semiconductor chips, display devices, touch panels, etc.). Such high-purity chemical liquid with stable concentration usually requires a large amount of deionized water to dilute the chemical liquid to the required concentration.

For example, a gradual and staged method is generally used to dilute a high-concentration chemical stock solution to a low-concentration chemical liquid. Therefore, if you want to obtain a chemical liquid with a smaller concentration (such as ppm level), a very large amount of deionization must be consumed. water. Furthermore, because the above-mentioned dilution method can usually only be used to prepare a large amount of low-concentration chemical liquids at one time, if it is not used up in a short time, the concentration of the prepared chemical liquid may fluctuate, thereby reducing the manufacture of high-tech products. Quality stability of parts.

In addition, the above-mentioned traditional chemical liquid dilution method has the problem of consuming a large amount of deionized water, resulting in waste of water resources and energy, and a large consumption of filter materials. This chemical liquid dilution method also has the inability to accurately adjust the chemical liquid. The problem of diluting to a smaller concentration (such as ppm level) has caused the manufacturing precision of high-tech product parts to be limited.

To sum up, it can be seen that the existing related devices for chemical liquid dilution still need to be improved to improve the many problems existing in the related devices for traditional chemical liquid dilution.

In view of this, the purpose of the present invention is to provide a fluid mixer that can be applied to chemical liquid dilution systems (such as ammonia solution dilution systems), which can maintain the chemical liquid at the required concentration for a long time, thereby improving high-tech product parts The quality stability.

In order to achieve the above-mentioned objective, the present invention provides a fluid mixer, which includes a connecting cover, a three-way tube, and a needle injection part. The connecting cover includes a first connecting part; the three-way pipe body is connected to the connecting cover, and includes a second connecting part, an output part and a cavity, wherein the second connecting part, the output part and the cavity communicate with each other; a needle hole injection part It is connected to the connecting cover and includes a pinhole channel. The pinhole channel has a first port and a second port opposite to the first port. The first port is connected to the first connecting portion, and the second port is connected to the second connecting portion And the output department.

The effect of the present invention is that the fluid mixer provided by the present invention can be applied to a chemical liquid dilution system, so that the chemical liquid dilution system can reduce the usage of deionized water, and use pressure control and venturi effect to dilute the chemical liquid to all Need concentration. In addition, in order to dilute to a smaller concentration (for example, ppm level), the fluid mixer of the present invention can be used to inject fluid to mix a trace amount of fluid with the liquid, and the diluted chemical liquid has a ppm level trace concentration. On the other hand, with the fluid mixer provided by the present invention, the diluted chemical liquid produced by it can maintain the required concentration for a long time, thereby improving the quality stability of the parts of high-tech products.

32: Fluid mixer

32a: The first connecting part

32b: The second connecting part

32c: output section

322: Connector

3221: external thread

3222: pinhole channel

3222a: the first port

3222b, 3222c: second port

3224: Input

3226: output

324: Connect the cover

3241: internal thread

3242: Internal groove

3243: external thread

326: Tee tube body

3262: cavity

3263: internal thread

3264: inner circle mouth

D1: first aperture

D2: second aperture

L: length

Fig. 1 is a cross-sectional view of a fluid mixer according to a first embodiment of the present invention; Fig. 2 is a perspective view of a connector according to a preferred embodiment of the present invention; Fig. 3 is a cross-sectional view of a connecting piece according to a preferred embodiment of the present invention; Fig. 4 is a cross-sectional view of a connecting cover according to a preferred embodiment of the present invention; Fig. 5 is a three-way pipe body according to a preferred embodiment of the present invention Figure 6 is a cross-sectional view of the fluid mixer of the second embodiment of the present invention; Figure 7 is a diagram of the relationship between the pressure difference and the conductivity of the aqueous ammonia solution.

In order to explain the present invention more clearly, a preferred embodiment is given in detail in conjunction with the drawings as follows. Please refer to FIG. 1. FIG. 1 is a cross-sectional view of the fluid mixer 32 according to the first embodiment of the present invention, and the fluid mixer 32 provided by the present invention can be used for diluting ammonia water, but it is not limited thereto.

The fluid mixer 32 includes a connecting piece 322, a connecting cover 324 and a three-way pipe 326. The connecting cover 324 is respectively connected to the three-way pipe body 326 and the connecting piece 322, and the first connecting portion 32 a is located on the connecting cover 324. The three-way tube 326 has a second connecting portion 32b, an output portion 32c, and a cavity 3262, wherein the second connecting portion 32b, the output portion 32c, and the cavity 3262 communicate with each other.

The connector 322 has a pinhole channel 3222, an input end 3224, and an output end 3226. The first port 3222a of the pinhole channel 3222 is connected to the first connecting portion 32a, and the second port 3222b is connected to the second connecting portion 32b and the output部32c. In the embodiment of the present invention, the connecting piece 322 is connected to the connecting cover 324 by the input end 3224, and the output end 3226 of the connecting piece 322 is located in the cavity 3262 of the three-way pipe 326. In the embodiment of the present invention, a part of the connecting cover 324 is located between the connecting piece 322 and the three-way pipe 326. In the embodiment of the present invention, the second connecting portion 32b is perpendicular to the first connecting portion 32a and the output portion 32c, respectively, that is, the second connecting portion 32b is perpendicular to the first connecting portion 32a and perpendicular to the output portion 32c. In the embodiment of the present invention, the pinhole channel 3222 of the connector 322 has a first port 3222a. Aperture (D1), and the second port 3222b has a second aperture (D2), wherein the first aperture (D1) is larger than the second aperture (D2). In the embodiment of the present invention, the range of the second aperture (D2) is between 0.01 mm and 0.1 mm, preferably between 0.04 mm and 0.07 mm. In the embodiment of the present invention, the length (L) of the pinhole channel 3222 of the connecting member 322 ranges from 20 mm to 30 mm, and preferably ranges from 23 mm to 27 mm. Since the pinhole channel 3222 is a narrow channel compared to the other two, the pinhole channel 3222 exhibits a venturi effect in the connecting piece 322, and the venturi effect and the pressure difference between the first connection part and the second connection part , To achieve the purpose of diluting the fluid to the required conductivity and concentration.

In the embodiment of the present invention, the pinhole channel 3222 of the connector 322 meets the following equation:

Among them, Q is the flow rate of the fluid; d is the second aperture (D2) of the pinhole channel 3222; L is the length (L) of the pinhole channel 3222; △P is the first port 3222a and the second port of the pinhole channel 3222 3222b pressure difference.

It can be seen from the above equation that after the fluid mixer 32 is manufactured, d and L become fixed values. In actual operation, the flow rate of the fluid through the pinhole channel 3222 can be controlled by controlling the pressure difference ΔP.

It is worth mentioning that, in addition to reducing the pressure difference △P to a very small value, the value of (d ⁴ /L) can also be reduced to perform the required very small control. In other words, to reduce the value of (d ⁴ /L), that is, to reduce the second aperture (D2) as much as possible, or to extend the length (L) of the pinhole channel 3222 as much as possible. However, considering the convenience of practical application and the ease of controlling the pressure difference ΔP, the fluid mixer 32 provided by the embodiment of the present invention has a very small second aperture (D2) and length (L), so it can be applied to ultra-micro Chemical liquid dilution system.

2 to 5 together, the input end 3224 of the connecting member 322 is cylindrical, and the connecting cover 324 has an inner circular groove 3242, wherein the input end 3224 of the connecting member 322 and the inner circular groove of the connecting cover 324 3242 corresponds to the connection. In the embodiment of the present invention, the input end 3224 of the connecting member 322 has an outer thread 3221, and the inner circular groove 3242 connected to the cover 324 has an inner thread 3241, and the input end 3224 and the inner circular groove 3242 are formed by the outer thread The threaded relationship between the thread 3221 and the internal thread 3241 is not limited to this; in practice, the input end 3224 and the internal circular groove 3242 can also be connected in other applicable ways (such as a buckle).

In the embodiment of the present invention, the output end 3226 of the connecting member 322 is in a quadrangular column shape, but it is not limited thereto; in practice, the output end 3226 of the connecting member 322 may also be cylindrical. In the embodiment of the present invention, the output end 3226 of the connecting member 322 has one corner or one of the sides corresponding to the second connecting portion 32b of the tee body 326, but it is not limited to this; in actual use, no matter what One corner or one side of the four-corner column corresponds to the second connecting portion 32b of the three-way pipe body 326, which does not affect the mixing result of the chemical liquid.

The connecting cover 324 has an outer circular wall 324, and the three-way pipe body 326 has an inner circular opening 3264, and the outer circular wall 324 of the connecting cover 324 is connected to the inner circular opening 3264 of the three-way tube 326 correspondingly. In the embodiment of the present invention, the outer circular wall 324 connecting the cover body 324 has an outer thread 3243, and the inner circular opening 3264 of the three-way pipe body 326 has an inner thread 3263, and the outer circular wall 324 and the inner circular opening 3264 are connected to each other. The screw connection between the outer thread 3243 and the inner thread 3263 is not limited to this. In practice, the outer circular wall 324 and the inner circular opening 3264 can also be connected in other applicable ways (such as turning buckle).

In another embodiment of the present invention, the connecting member 322 and the three-way pipe body 326 are integrally formed, and then fixedly connected to the connecting cover body 324. In the embodiment of the present invention, the connecting member 322, connecting The cover body 324 and the three-way pipe body 326 are made of plastic to avoid corrosion of metal materials or contamination of the diluted chemical liquid.

Please refer to FIGS. 1 and 6 together. FIG. 1 is a cross-sectional view of a fluid mixer according to a first embodiment of the present invention, and FIG. 6 is a cross-sectional view of a fluid mixer according to a second embodiment of the present invention. In FIG. 1, the second port 3222b of the connecting piece 322 is lower than the lowest position 32b1 of the channel in the second connecting portion 32b; in this embodiment, the second port 3222b of the connecting piece 322 is lower than the second connecting portion 32b1. The lowest position 32b1 of the channel in 32b, therefore, the second fluid introduced by the second connecting portion 32b will not affect the output of the first fluid flowing through the pinhole channel 3222. Conversely, in Figure 6, the second port 3222c of the connecting member 322 is higher than the lowest position 32b1 of the channel in the second connecting portion 32b; in the second embodiment, since the second port 3222c of the connecting member 322 is higher than the first The lowest position 32b1 of the channel in the second connecting portion 32b, so the second fluid passed in from the second connecting portion 32b will form a back pressure at the second port 3222c of the connecting piece 322, thereby affecting the first fluid flowing through the pinhole channel 3222 Of outflow.

For example, if it is desired to prepare a diluted mixed fluid with a dilution concentration of 1 ppm in the first embodiment (Figure 1), and the pressure value of the second fluid passed through the second connecting portion 32b is 10 psi, the first The pressure value of the first fluid passing through the connecting portion 32a and flowing through the pinhole passage 3222 is 20 psi. However, in the second embodiment (FIG. 6), since the second fluid passed through the second connecting portion 32b will form a back pressure at the second port 3222b of the connecting piece 322, and affect the second fluid flowing through the pinhole channel 3222 A fluid flows out, so if it is desired to prepare a diluted mixed fluid with a dilution concentration of 1 ppm in the second embodiment (Figure 6), and the pressure value of the second fluid passed through the second connecting portion 32b is also 10 psi, then The pressure value of the first fluid passing through the first connecting portion 32a and flowing through the pinhole channel 3222 needs to be increased to 30 psi, so that the first fluid can flow out of the pinhole channel 3222 smoothly.

From this, it can be seen that when preparing a diluted mixed fluid with the same dilution concentration, compared to the first embodiment, the fluid mixer of the second embodiment needs to provide a larger amount between the first connecting portion 32a and the second connecting portion 32b. The pressure difference (△P).

Please refer to Fig. 7, which is a graph of the relationship between the pressure difference and the conductivity of the aqueous ammonia solution. In FIG. 7, the left line segment (˙) shows the relationship between the pressure difference and the conductivity of the aqueous ammonia solution in the first embodiment, and the right line segment (△) shows the relationship between the pressure difference and the conductivity of the ammonia aqueous solution in the second embodiment. It can be seen from Figure 7 that under the same conductivity of the aqueous ammonia solution, the pressure difference of the second embodiment is greater than that of the first embodiment; however, due to the pressure resistance of the fluid mixer, the liquid pipeline and the connection of each pipeline It has its upper limit, that is, the pressure difference between the first connecting portion 32a and the second connecting portion 32b also has its upper limit. Therefore, the concentration range of the diluted mixed fluid that can be prepared by the fluid mixer of the second embodiment (Figure 6) is less than The fluid mixer of the second embodiment (Figure 1).

It is worth noting that although the concentration range of the diluted mixed fluid that can be prepared by the fluid mixer of the second embodiment (Figure 6) is relatively small, in the present invention, the fluid mixer provided by the second embodiment is still suitable for application It is used in the chemical liquid dilution system, and mixes a small amount of fluid with the liquid, so that the diluted chemical liquid has a trace concentration of ppm level.

With the design of the embodiments of the present invention, the fluid mixer provided by the present invention can be applied to a chemical liquid dilution system, which uses pressure control and the venturi effect generated by the fluid mixer to inject fluid and mix a small amount of fluid with the liquid , Make the diluted chemical liquid have a trace concentration of ppm level. For example, the chemical liquid dilution system and method provided by the present invention can immediately prepare 2~3ppm functional water (aqueous ammonia), for example, can be used for cleaning wafers, so there is no need to waste a lot of deionized water to prepare excessive dilution chemicals. liquid. On the other hand, the chemical liquid dilution system and method provided by the present invention can make the diluted chemical The liquid maintains the required concentration for a long time, thereby improving the quality stability of the parts of high-tech products.

The above are only the preferred and feasible embodiments of the present invention. Any equivalent changes made by applying the specification of the present invention and the scope of the patent application should be included in the patent scope of the present invention.

32: Fluid mixer

32a: The first connecting part

32b: The second connecting part

32c: output section

322: Pinhole injection parts

3222: pinhole channel

3222a: the first port

3222b: second port

3224: Input

3226: output

324: Connect the cover

326: Tee tube body

3262: cavity

Claims (9)

A fluid mixer includes: a connecting cover, including a first connecting portion; a three-way pipe body, connected to the connecting cover, and including a second connecting portion, an output portion and a cavity, wherein the first The two connecting parts, the output part and the cavity are in communication with each other, wherein the second connecting part is perpendicular to the first connecting part and the output part; and a connecting piece is connected to the connecting cover and includes a needle Hole channel, the pinhole channel has a first port and a second port opposite to the first port, the first port is connected to the first connecting portion, and the second port is connected to the second connecting portion and The output section. The fluid mixer according to claim 1, wherein the connecting member further includes an input end and an output end opposite to the input end, the first port of the pinhole channel is located at the input end, and the second The port is located at the output end, the connecting piece is connected to the connecting cover by the input end, and the output end of the connecting piece is located in the cavity of the three-way pipe body. The fluid mixer according to claim 1, wherein the first port of the pinhole channel has a first aperture, and the second port has a second aperture, wherein the first aperture is larger than the second aperture. The fluid mixer according to claim 3, wherein the range of the second aperture is 0.01 mm to 0.1 mm. The fluid mixer according to claim 4, wherein the range of the second aperture is 0.04 mm to 0.07 mm. The fluid mixer according to claim 2, wherein the input end of the connecting member is cylindrical, and the connecting cover has an inner circular groove, and the input end of the connecting member is connected to the inner circle of the connecting cover The slots correspond to the connection. The fluid mixer according to claim 1, wherein the connecting cover has an outer circular wall, and the tee tube body has an inner circular opening, and the outer circular wall of the connecting cover and the tee tube body The inner circular port is correspondingly connected. The fluid mixer according to claim 1, wherein a part of the connecting cover is located between the connecting piece and the three-way pipe body. The fluid mixer according to claim 1, wherein the connecting piece and the three-way pipe body are respectively integrally formed.

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