JP2014190408A - Manifold valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve mixing efficiency, and to suppress mixing of unnecessary fluid components even immediately after switching of fluid components to be mixed, in a valve for mixing a plurality of kinds of fluids.SOLUTION: A manifold valve 11 includes: an inlet-side main flow channel 13 branched into a plurality of branch flow channels 19; an outlet-side main flow channel 15 where a plurality of joining channels join; and a plurality of valve portions disposed between the inlet-side main flow channel 13 and the outlet-side main flow channel 15. Each of the plurality of valve portions has a valve chest 25 provided with a branch flow channel communicating port communicating with at least one of the plurality of branch flow channels 19, a joining flow channel communicating port communicating with at least one of the plurality of joining flow channels 21, and a sub-fluid flow channel communicating port communicating with a sub-fluid flow channel 31, a valve element 27 for opening and closing the sub fluid flow channel communicating port, and a driving portion 29 for driving the valve element 27.

Description

  The present invention relates to a manifold valve for mixing a plurality of types of fluids used in piping lines in various industrial fields such as chemical factories, semiconductor manufacturing, food, and biotechnology.

  In semiconductor manufacturing, a mixture of a plurality of types of liquids at a predetermined concentration is used as a cleaning liquid. As described above, as an apparatus that can be used to mix a plurality of types of fluids attached in the flow path, for example, a drainage switching valve 106 used in a substrate processing apparatus as shown in FIG. Yes (see, for example, Patent Document 1). The drainage switching valve 106 is provided for each of the introduction channels 102, the plurality of discharge channels 103A, 103B, and 103C connected to the introduction channel 102, and each of the discharge channels. , A valve body 104 that opens and closes the discharge passage, and pneumatic cylinder portions 105A, 105B, and 105C that are provided for each valve body 104 and that open and close the valve body 104. In this configuration, the discharged fluid is branched into the discharge passages 103A, 103B, and 103C to flow out. The drainage switching valve shown in FIG. 6 is not originally intended to mix fluid in the valve. However, when the flow direction of the fluid is reversed, it can be used for the purpose of mixing plural kinds of fluids.

JP 2000-133628 A

  In the drainage switching valve as shown in FIG. 6, each of three types of fluids (subfluid A, subfluid B, and main fluid) is introduced from the discharge passages 103A, 103B, and 103C at a constant flow ratio. The drainage switching valve can be used as a mixing valve by flowing into the passage 102, mixing the subfluid A and subfluid B with the main fluid and letting it flow out of the inflow pipe portion 101. However, in this case, since the subfluid A and the subfluid B are simply joined to the main fluid, the mixing stage of the subfluid A and the subfluid B becomes only one stage, and the mixing is insufficient. There is a problem that it is difficult to obtain a mixed fluid in which the components of the auxiliary fluid A and the auxiliary fluid B are uniformly mixed.

  Further, for example, when switching from three types of mixing of the main fluid and the subfluid A and the subfluid B to two types of mixing of the main fluid and the subfluid A, the discharge flow path 103B into which the subfluid B flows is closed and the main fluid The mixed fluid of the main fluid and the subfluid A is caused to flow out from the inflow conduit 101 by opening the discharge passages 103A and 103C through which the subfluid A and the subfluid A are introduced. Since the sub-fluid B remains up to 101, unnecessary sub-fluid B may be mixed. However, a concentration meter or the like for measuring the concentrations of the secondary fluid A and the secondary fluid B is installed on the downstream side of the drainage switching valve. Based on the measured value, each fluid flowing from the discharge pipes 103A, 103B, 103C is measured. In the case of controlling the flow rate to be fed back, if an unintended unnecessary subfluid is mixed, feedback control is performed based on erroneous information, and the time until the feedback control is stabilized is adversely affected.

  Further, when the drainage switching valve as shown in FIG. 6 is used as a mixing valve, the mixed fluid flows out from the discharge conduits 103A, 103B, and 103C into which the auxiliary fluid A, the auxiliary fluid B, and the main fluid are respectively input. The distance to the inflow pipe portion 101 to be changed is different. For this reason, the mixed fluid flowing out from the inflow pipe portion 101 is a mixed liquid of the subfluid A and the subfluid B immediately after the start of mixing, and then becomes a mixed liquid of the main fluid, the subfluid A and the subfluid B, and is desired. A time lag occurs until a fluid in which three kinds of fluids are mixed is obtained. When feedback control is performed, the time lag described above adversely affects the feedback control, and the time until a mixed fluid having a desired concentration is obtained is lengthened. If a mixed fluid that does not have a desired concentration is used for a workpiece such as a semiconductor wafer, it may cause a problem in the workpiece. Therefore, a mixed fluid that does not have a desired concentration must be discarded, resulting in an increase in waste fluid. Arise.

  Therefore, the object of the present invention is to solve the problems existing in the prior art, improve the mixing efficiency in a valve for mixing a plurality of types of fluids, and is unnecessary even immediately after switching the fluid components to be mixed. It is to be able to suppress mixing of fluid components. Another object of the present invention is to make it possible to reduce the time until feedback control is stabilized in a valve for mixing a plurality of types of fluids.

  In view of the above-described object, the present invention provides an inlet-side main channel that branches into a plurality of branch channels, an outlet-side main channel where a plurality of merging channels merge, and an inlet-side main channel and an outlet-side main channel. A plurality of valve portions provided, and each of the plurality of valve portions is connected to at least one of the plurality of branch channels and the branch channel communication port communicating with at least one of the plurality of branch channels. A valve chamber provided with a communicating flow channel communicating port communicating therewith and a sub fluid flow channel communicating port communicating with the sub fluid flow channel; a valve body that opens and closes the sub fluid flow channel communicating port; and driving the valve body. And a main fluid supplied from the inlet-side main channel through the branch channel and a sub-fluid supplied from the sub-fluid channel in each valve chamber of each of the plurality of valve units. A plurality of types of mixed fluid generated by It is supplied to the flow path, to provide a manifold valve which is adapted to further mixing.

  In the manifold valve, a primary mixed fluid generated by mixing the main fluid and the subfluid in the valve chamber of each valve unit is supplied to the outlet-side main flow path, thereby further mixing a plurality of types of primary mixed fluids. Since a secondary mixed fluid is generated and mixing is performed in two stages, efficient mixing can be performed, and more sufficient mixing is performed. Moreover, in each valve part, the subfluid is supplied to the main fluid by opening and closing the subfluid communication port formed in the valve chamber with the valve body, and the space (the mixing is performed from the subfluid communication port) That is, since there is no space in which the subfluid remains until the valve chamber), it is possible to prevent unnecessary subfluid from being mixed with the main fluid when the mixed components are switched.

  In the manifold valve, a central axis of each of the plurality of merging flow paths exists in a non-coplanar manner with a central axis extending along a longitudinal direction of the outlet-side main flow path, and the merging flow path and the outlet-side main flow are It is preferable that the merging channel merges with the outlet-side main channel so that the path forms an acute angle. Since the central axis of each merging channel is not on the same plane as the central axis of the outlet-side main channel, the primary mixed fluid supplied from the merging channel will merge from the eccentric position into the outlet-side main channel. Since the merging channel and the outlet side channel are joined at an acute angle, the primary mixed fluid flows in the outlet side main channel while turning toward the downstream side along the inner peripheral surface thereof, and the like. It becomes easy to mix with the primary mixed fluid supplied from the merging flow path. In addition, since each merged flow channel is merged so as to form an acute angle rather than perpendicular to the outlet-side main flow channel, the primary mixed fluid flowing in from the merged flow channel directly collides with the peripheral surface of the outlet-side main flow channel. This prevents the inflow from being hindered.

  The merging channel that communicates with the merging channel communication port of the valve chamber of each of the plurality of valve portions may include a plurality of merging channels. In this case, the plurality of merging channels communicating with the merging channel communication port of the valve unit merge with the outlet side main channel at different positions on an axis parallel to the central axis of the outlet side main channel. It is preferable that they are arranged. The plurality of merging channels communicating with the merging channel communication port of the valve unit may be arranged so as to merge at an angle different from each other with respect to the outlet-side main channel.

  Furthermore, in a preferred embodiment, the merging channel that communicates with the merging channel communication port of the valve chamber of each of the plurality of valve portions has the outlet on the same circumference around the central axis of the outlet-side main channel. It arrange | positions so that it may merge with a side main flow path.

  The inlet-side main flow path and the outlet-side main flow path are arranged on the same axis, and are configured by the valve section, the branch flow path connected to the valve section, and the merge flow path. More preferably, the plurality of sets of shapes are arranged at equiangular intervals around the axis.

  According to the present invention, since mixing is performed in two stages, efficient mixing can be performed, and it is possible to obtain a mixed fluid in which each component is more uniformly mixed. In addition, since there is no region where the sub-fluid remains when the supply of the sub-fluid is stopped in each valve section, unnecessary sub-fluid is mixed with the main fluid when the type of fluid to be mixed is switched. Thus, it is possible to suppress an increase in the time until the feedback control is stabilized.

It is the perspective view which fractured | ruptured and showed the principal part whole structure of the manifold valve of 1st Embodiment by this invention. FIG. 2 is a schematic diagram schematically showing a partially broken view for explaining the flow path structure of the manifold valve shown in FIG. 1. It is explanatory drawing which shows that the primary mixed fluid supplied from each confluence | merging flow path flows turning inside the exit side main flow path. It is the side view which looked at the manifold valve from the downstream which shows that each confluence | merging flow path is connected to the eccentric position with respect to the exit side main flow path. It is a schematic diagram which shows typically the manifold valve of 2nd Embodiment by this invention. It is a top view which shows the conventional drainage switching valve which can be used as a mixing valve.

Hereinafter, an embodiment of a manifold valve according to the present invention will be described with reference to the drawings.
Initially, with reference to FIG. 1, the whole structure of the manifold valve 11 of 1st Embodiment is demonstrated.

  The manifold valve 11 includes an inlet-side main flow path 13 for allowing the main fluid to flow in, an outlet-side main flow path 15 for allowing the mixed fluid of the main fluid and the sub-fluid to flow out, and the inlet-side main flow path 13 and the outlet-side main flow path 15. And a plurality of valve portions 17 arranged between each of the plurality of valve portions 17, and each valve portion 17 joins one of the plurality of branch flow channels 19 branched from the inlet side main flow channel 13 and the outlet side main flow channel 15. One of the paths 21 is connected. In the first embodiment shown in FIG. 1, three valve parts 17 are provided. Further, three branch channels 19 are branched from the inlet-side main channel 13, and three merge channels 21 are joined to the outlet-side main channel 15. However, the configuration shown in FIG. 1 is an exemplification, and two or four or more valve portions 17, branch flow paths 19, and merge flow paths 21 may be provided.

  The inlet-side main flow path 13 and the outlet-side main flow path 15 are respectively connected to the main body 23 so as to face each other with the main body 23 interposed therebetween, and a central axis extending along the longitudinal direction of the inlet-side main flow path 13 and the outlet-side main flow path A central axis extending along the longitudinal direction of 15 is arranged so as to extend on the same axis. The main body 23 can be made of, for example, polytetrafluoroethylene (PTFE).

  Each valve unit 17 includes a valve chamber 25, a valve body 27 disposed in the valve chamber 25, and a drive unit 29 for driving the valve body 27.

  The valve chamber 25 has a concave shape extending from the peripheral side surface of the main body 23 toward the center, and around the axis extending on the same axis as the central axis of the inlet-side main flow path 13 and the outlet-side main flow path 15 in the main body 23. It is formed at angular intervals. On the bottom surface of the valve chamber 25 (the surface on the center side of the main body), a sub-fluid channel communication port 33 (see FIG. 2) communicates with the sub-fluid channel 31 for supplying the sub-fluid into the valve chamber 25. Is provided. In addition, on the side surface of the valve chamber 25, a branch channel communication port 35 (see FIG. 2) that communicates with one of the plurality of branch channels 19 and a merge channel communication port that communicates with one of the plurality of merge channels 21. 37 (see FIG. 2).

  The drive unit 29 is disposed at equiangular intervals around an axis extending on the same axis as the central axis of the inlet-side main flow path 13 and the outlet-side main flow path 15 so as to face the valve chamber 25, and is attached to the main body 23. Yes. Each drive unit 29 includes a cylinder body 39, a piston 41 having a connecting portion 41 a extending into the valve chamber 25, and a diaphragm presser 43. The piston 41 is made of, for example, polyvinylidene fluoride (PVDF), and is slidably accommodated in a cylinder chamber 45 formed inside the cylinder body 39. The cylinder body 39 is fixed to the body 23 by bolts and nuts (not shown). The diaphragm retainer 43 is formed of, for example, PVDF, and has a through hole 43a through which the connecting portion 41a of the piston 41 passes at the center, and is sandwiched between the main body 23 and the cylinder main body 39. Air ports 47 and 49 for introducing compressed air are formed on the peripheral side surface of the cylinder body 39, and the first is formed by the ceiling surface and inner peripheral surface of the cylinder chamber 45 and the upper end surface of the piston 41. The space 51 communicates with the second space 53 formed by the inner peripheral surface of the cylinder chamber 45, the upper end surface of the diaphragm retainer 43, and the lower end surface of the piston 41. Here, for convenience of explanation, the main body side is referred to as “lower”, and the side opposite to the main body is referred to as “upper” or “ceiling”.

  The valve body 27 accommodated in the valve chamber 25 is formed of PTFE, for example, and is attached to the tip of the connecting portion 41a of the piston 41 with a screw, and moves up and down in the axial direction in accordance with the vertical movement of the piston 41. Thus, the auxiliary fluid flow passage 33 is opened and closed by being separated from and in contact with a valve seat formed around the auxiliary fluid flow passage 33 of the valve chamber 25. The valve body 27 has a diaphragm 55 on the outer periphery, and the outer peripheral edge of the diaphragm 55 is sandwiched between the diaphragm presser 43 and the main body 23.

  Next, with reference to FIGS. 2 to 4, the details of the piping structure of the inlet side main flow path 13, the outlet side main flow path 15, the branch flow path 19, the merge flow path 21, and the sub fluid flow path 31 will be described.

  A branch channel 19 branched from the inlet-side main channel 13, a valve unit 17 communicating with the branch channel 19, and a merge channel 21 communicating with the valve unit 17 and joining the outlet-side main channel 15 are combined into a plurality of identical shapes. Are arranged at equiangular intervals around an axis extending on the same straight line as the central axis of the inlet-side main channel 13 and the outlet-side main channel 15 between the inlet-side main channel 13 and the outlet-side main channel 15. . Accordingly, the plurality of branch channels 19 are branched from the inlet side main channel 13 on the same circumference around the central axis of the inlet side main channel 13, and the plurality of merge channels 21 are formed on the outlet side main channel. The outlet main flow path 15 is merged on the same circumference around the 15 central axis.

  The plurality of branch channels 19 branching from the inlet-side main channel 13 are arranged so that the angle formed by the central axis extending along the longitudinal direction and the center axis of the inlet-side main channel 13 on the downstream side is an acute angle. The plurality of merge channels 21 that extend radially from the peripheral surface of the upstream end of the side main channel 13 and merge with the outlet side main channel 15 have an acute angle with the outlet side main channel 15 and the upstream side. In this way, it merges with the upstream end of the outlet side main flow path 15.

  Further, as can be seen from FIG. 4 in particular, each merging channel 21 merges with the outlet side main channel 15 from an eccentric position. Here, the “eccentric position” means a positional relationship that exists on a non-coplanar surface so that the central axis of the merging channel 21 does not intersect with the central axis of the outlet main channel 15.

Next, the operation of the manifold valve 11 of the first embodiment will be described.
The main fluid is supplied to the inlet-side main flow path 13 of the manifold valve 11, and different types of sub-fluids are supplied to the sub-fluid flow paths 31, so that the main fluid and one or more types of sub-fluids are contained in the manifold valve 11. The mixed fluid mixed in (1) flows out from the outlet-side main flow path 15.

  The mixed fluid flowing out from the outlet-side main flow path 15 of the manifold valve 11 is controlled so as to be repeatedly supplied and stopped, for example, in accordance with the timing at which the processing of the semiconductor wafer is completed and replaced with the next semiconductor wafer. In addition, the type of sub-fluid mixed with the main fluid is switched according to the type of processing of the semiconductor wafer. Such supply / stop of the mixed fluid and switching of the type of the sub-fluid mixed with the main fluid are performed by stopping the supply of the main fluid to the inlet-side flow path 13 of the manifold valve 11 and by the valve body in each valve portion 17. This is performed by opening and closing the fluid flow path communication port 33. Since the supply of the main fluid to the inlet-side flow path 13 is stopped by another valve provided outside the manifold valve 11, the sub-fluid flow path communication by the valve elements 27 arranged in the respective valve portions 17 is performed here. The procedure for opening and closing the mouth 33 will be mainly described.

  When compressed air is injected as working fluid into the second space 53 through the air port 49 of the drive unit 29 from the outside, the piston 41 is moved in a direction away from the valve chamber 25 by the pressure of the compressed air. Thus, the valve element 27 coupled to the connecting portion 41a of the piston 41 is separated from the peripheral edge portion of the auxiliary fluid passage communicating port 33 that functions as a valve seat, and the subsidiary fluid passage communicating port 33 is opened. Thereby, supply of the subfluid to the main fluid can be started. On the other hand, when compressed air is injected into the first space 51 from the air port 47, the piston 41 is moved in a direction approaching the valve chamber 25 by the pressure of the compressed air, and accordingly, the connecting portion 41a of the piston 41 is moved to the connecting portion 41a. The connected valve body 27 comes into contact with the peripheral portion of the sub-fluid flow passage communication port 33 that functions as a valve seat, and the sub-fluid flow passage communication port 33 is closed. Thereby, supply of the subfluid to the main fluid can be stopped.

  Since the branch channel communication port 35 and the merge channel communication port 37 of the valve chamber 25 are always open, when the sub fluid channel communication port 33 is opened by the valve element 27, it is supplied from the sub fluid channel 31. The secondary fluid is joined to the main fluid supplied from the branch channel 19 into the valve chamber 25 and mixed, and a primary mixed fluid is generated in the valve chamber 25. The primary mixed fluid generated in the valve chamber 25 of each valve unit 17 is supplied to the outlet-side main channel 15 through the merging channel 21, and plural types of primary mixed fluids are merged and mixed in the outlet-side main channel 15. To produce a secondary mixed fluid.

  Thus, in the manifold valve 11, the mixing of the main fluid and the subfluid is performed in two stages, so that the mixing efficiency is increased as compared with the case where the mixing is performed in one stage. Therefore, it is possible to generate a uniform mixed fluid with less unevenness of the mixed components.

  Further, since the angle formed by the central axis of the inlet-side main flow path 13 and the central axis of each of the plurality of branch flow paths 19 is an acute angle, the main fluid flowing through the inlet-side main flow path 13 smoothly flows into the inlet-side main flow. It flows into the branch channel 19 from the path 13. Further, since the angle formed on the upstream side by the outlet-side main channel 15 and each of the plurality of merged channels 21 is an acute angle, the fluid flowing in the merged channel 21 smoothly flows into the mouth-side main channel 15 and flows upstream. Come to head.

  In addition, since the merging channel 21 communicating with the valve chamber 25 of each valve unit 17 merges from the eccentric position with respect to the outlet side main channel 15, the main fluid and one type of sub-fluid are allowed to flow in each valve unit 17. When the mixed primary mixed fluid merges from the merging channel 21 to the outlet side main channel 15, the inside of the outlet side main channel 15 extends along its inner peripheral surface as indicated by arrows in FIGS. 3 and 4. And flows while turning toward the downstream side. As a result, a spiral vortex flow is generated in the outlet-side main flow path 15, and the primary mixed fluid merged from one merge flow path 21 is more easily mixed with the primary mixed fluid merged from the other merge flow path 21. Become. Further, the primary mixed fluids merged from the merged flow channels 21 to the outlet main flow channel 15 do not collide with each other, and the other primary mixed fluids are not inhibited from joining the outlet side main flow channel 15.

  The start and stop of the supply of the sub fluid to the main fluid is performed by opening and closing the sub fluid channel communication port 33 communicating with the sub fluid channel 31 in the valve chamber 25 by the valve body 27. For this reason, there is no region where the subfluid stays and remains between the junction with the main fluid after the supply of the subfluid to the main fluid is stopped, and the type of subfluid mixed with the main fluid Immediately after the switching is performed, it is possible to prevent the unnecessary fluid from being mixed with the main fluid. As a result, when feedback control based on the measurement result of a measuring instrument such as a concentration meter provided at the outlet side main flow path 15 or downstream thereof is performed, extra feedback is caused by temporarily mixing an unnecessary sub-fluid. It can be suppressed that the time until the feedback control is stabilized after being performed becomes long.

  Further, a plurality of sets having the same shape constituted by the branch flow path 19, the valve portion 17, and the merge flow path 21 are arranged at equiangular intervals around the central axis of the outlet side main flow path 15. Therefore, the shape and size of the plurality of branch channels 19 branched from the inlet-side main channel 13, the angle formed between the inlet-side main channel 15 and each branch channel 19, the valve chamber 25 of the valve unit 17, and the sub-fluid channel 31 and the like, the shape and size of a plurality of merging channels that merge with the outlet-side main channel 15, and the angles formed by the outlet-side main channel 15 and each merging channel 21 are all equal. The flowing fluid pressures are almost equal to each other. Therefore, the fluid flowing through the inlet-side main flow channel 15 flows into each branch flow channel 19 at substantially the same flow rate, and the primary mixed fluid mixed in the valve chamber 25 is merged flow channel 21 at approximately the same flow rate and at the same angle. To the outlet-side main flow path 15. Further, the merging channels 57 and 59 communicating with the valve chambers 25 of the different valve portions 17 merge with the outlet side main channel 15 on the circumference around the central axis of the outlet side main channel 15. Accordingly, the spiral flows formed by the primary mixed fluids supplied from different valve portions 17 are less likely to interfere with each other, and the distance over which the spiral flows are maintained increases, so that the mixing is effectively performed while reducing the pressure loss. It becomes possible.

  Further, the merging flow path 21 communicating with the valve chamber 25 of the different valve portion 17 has the same distance from the sub-fluid flow passage communication port 33 of the different valve portion 17 to the outlet-side flow passage 15 and the center of the outlet-side main flow passage 15. Since they merge into the outlet-side main flow path 15 on the circumference around the axis, when the sub-fluid supply to the main fluid is started simultaneously, the sub-fluids supplied from the sub-fluid flow path communication ports 33 of the different valve portions 17 are simultaneously It will reach the outlet side main flow path 15 and join. That is, if the sub-fluid channel communication port 33 is opened at the same time, mixing is simultaneously started in the outlet-side main channel 15, so that unnecessary feedback control is caused due to the time lag of the sub-fluid reaching the outlet-side main channel 15. Can be suppressed, and the time until the feedback control is stabilized can be shortened. Thereby, the amount of the mixed fluid discarded because the desired mixing ratio is not achieved can be reduced, and the occurrence of defective products can be reduced.

  Next, a manifold valve 11 ′ according to the second embodiment will be described with reference to FIG. In the manifold valve 11 ′ of the second embodiment shown in FIG. 5, the same reference numerals are given to the components common to the manifold valve 11 of the first embodiment. The description of is omitted here.

  The manifold valve 11 ′ of the second embodiment is different from the manifold valve 11 of the first embodiment in that only one merging channel 21 communicates with the valve chamber 25 of each valve portion 17. In the manifold valve 11 ′ of the second embodiment, a plurality of merging passages 21 communicate with the valve chambers 25 of the valve portions 17, and a plurality of merging passages 21 communicate with the valve chambers 25 of the valve portions 17. Are joined to the outlet main passage 15 at different positions on one axis extending at different angles with respect to the central axis of the outlet main passage 15 and parallel to the central axis of the outlet main passage 15. It is different and common in other respects. In FIG. 5, the two merging channels 21 communicate with the valve chambers 25 of the valve units 17, but three or more merging channels may communicate with each valve chamber 25.

  The outlet side main flow path 15 is located at different positions along one axis where the plurality of merging flow paths 57 and 59 communicating with the valve chamber 25 of each valve portion 17 can extend in parallel with the central axis of the outlet side main flow path 15. Therefore, the spiral flow starts from a different position when it flows while turning along the inner peripheral surface of the outlet-side main flow path 15. Therefore, if the other merging channel joins the outlet main channel 15 during the distance traveled during one revolution of the spiral flow, the flow of the primary mixed fluid merging from the merging channels 57 and 59 is increased. In this case, the gaps between the spiral streamlines when turning downstream along the inner peripheral surface of the outlet-side main flow path 15 after the merge are filled with each other, so that the mixing is performed more efficiently. .

  Further, since the plurality of merge channels 57 and 59 merge with the outlet main channel 15 at angles different from each other with respect to the central axis of the outlet main channel 15, they flow into the outlet main channel 15 from each. Since the spiral flows intersect with each other, further mixing becomes easier.

  Since other operations and effects are the same as those of the manifold valve 11 of the first embodiment, description thereof is omitted here.

A method of generating a mixed solution in which chemical solutions of different components are mixed using the manifold valve 11 shown in FIG. 1 will be described.
Here, for the sake of convenience, the three valve portions 17 are referred to as a first valve portion 17, a second valve portion 17, and a third valve portion 17, respectively, and components related to the first valve portion 17 are referred to as “first valve portion 17”. “1” is referred to by adding “second” to the component related to the second valve unit 17 and “third” to the component related to the third valve unit 17. . Further, pure water as a main fluid is supplied to the inlet-side main flow path 13, and the first sub-fluid flow path 31 that communicates with the valve chamber 25 of the first valve section 17 and the valve chamber 25 of the second valve section 17. NH ₄ OH as the first sub-fluid, the second sub-fluid channel 31 communicating with the third sub-fluid channel 31 communicating with the valve chamber 25 of the third valve unit 17, respectively, It is assumed that H ₂ O ₂ as a secondary fluid and HCL as a third secondary fluid are supplied. Further, a concentration meter (not shown) capable of measuring the concentrations of the first sub fluid, the second sub fluid, and the third sub fluid is disposed on the outlet side main flow path 15 of the manifold valve 11 or on the downstream side thereof. Then, based on the measurement result of the concentration meter, the valve opening degree of each valve portion 17 of the manifold valve 11 is adjusted, and the feedback control of the concentration of the mixed fluid is performed.

First, the case where the mixed fluid SC1 adjusted to a volume ratio of NH ₄ OH: H ₂ O ₂ : DIW (pure water) = 1: 2: 12 will be described. In this case, the drive unit 29 causes the valve body 27 of the first valve unit 17 and the valve body 27 of the second valve unit 17 to be connected to the first sub-fluid channel communication port 33 and the second sub-fluid channel communication port, respectively. The valve element 27 of the third valve portion 17 is closed by contacting with the third auxiliary fluid flow passage communication port 33 while being opened away from the valve 33. When the first sub fluid and the second sub fluid flow from the first sub fluid channel 31 and the second sub fluid channel 31, respectively, into the valve chamber 25 of each valve unit 17, the branch is made from the inlet side main channel 13. The flow rate of the main fluid flowing into each valve chamber 25 via the flow path 19 is balanced, and the first sub fluid is diluted with the main fluid in the valve chamber 25 of the first valve portion 17. The primary mixed fluid, the second primary mixed fluid in which the second sub-fluid is diluted with the main fluid in the valve chamber 25 of the second valve portion 17, and the main fluid that has passed through the valve chamber 25 of the third valve portion 17. Respectively flow into the outlet-side main flow channel 15 from the first merge flow channel 21, the second merge flow channel 21, and the third merge flow channel 21, and the secondary mixed fluid SC1 is generated.

Next, a description will be given of a case where the mixed fluid SC2 is generated by switching the components and adjusting the volume ratio to HCL: H ₂ O ₂ : DIW = 1: 1: 20. In this case, the drive unit 29 closes the valve body 27 of the first valve unit 17 in contact with the first sub-fluid flow passage communication port 33, while the valve body 27 and the third valve unit 27 of the second valve unit 17 are closed. The valve bodies 27 of the valve unit 17 are opened apart from the second sub-fluid channel communication port 33 and the third sub-fluid channel communication port 33, respectively. When the second sub-fluid and the third sub-fluid flow from the second sub-fluid flow path 31 and the third sub-fluid flow path 31, respectively, flow into the valve chamber 25 of each valve unit 17 from the inlet-side main flow path 13. The flow rate of the main fluid flowing into each valve chamber 25 via the flow path 19 is balanced, and the main fluid that has passed through the valve chamber 25 of the first valve portion 17 and the valve chamber 25 of the second valve portion 17 are also measured. And the third primary mixed fluid in which the third secondary fluid is diluted by the main fluid in the valve chamber 25 of the third valve portion 17. Respectively flow into the outlet main flow channel 15 from the first merge flow channel 21, the second merge flow channel 21, and the third merge flow channel 21 and are mixed to generate the secondary mixed fluid SC2.

  In this way, switching to a different type of mixed fluid is also easy. Further, when switching from the mixed fluid SC1 to the mixed fluid SC2, the first sub-fluid flow passage communication port 33 of the valve chamber 25 of the first valve portion 17 is closed by the valve body 27 and communicates with the valve chamber 25. Since there is no region where the first subfluid stays there, the first subfluid is not mixed immediately after switching, and the time until the concentration of the mixed fluid is stabilized after switching is shortened. Further, when the mixed fluid SC1 and the mixed fluid SC2 are generated, a primary mixed fluid obtained by mixing the main fluid and each sub-fluid is further mixed to generate a final mixed fluid, and the main fluid and various sub-fluids are generated in two stages. Since the fluid is mixed and the primary mixed fluid is mixed while swirling in the outlet-side main flow path, efficient mixing can be performed.

DESCRIPTION OF SYMBOLS 11 Manifold valve 11 'Manifold valve 13 Inlet side main flow path 15 Outlet side main flow path 17 Valve part 19 Branch flow path 21 Merge flow path 25 Valve chamber 27 Valve body 29 Drive part 31 Subfluid flow path 33 Subfluid flow path communication port 35 Branch flow channel 37 Merge flow channel 57 Merge flow channel 59 Merge flow channel

Claims (7)

  An inlet-side main channel that branches into a plurality of branch channels, an outlet-side main channel that joins the plurality of merged channels, and a plurality of valve portions that are provided between the inlet-side main channel and the outlet-side main channel. Each of the plurality of valve portions includes a branch channel communication port communicating with at least one of the plurality of branch channels, a merge channel communication port communicating with at least one of the plurality of merge channels, and a sub-port A valve chamber provided with a sub-fluid flow passage communicating with the fluid flow passage, a valve body that opens and closes the sub-fluid flow passage, and a drive unit that drives the valve body, In each of the valve chambers of the valve section, a plurality of types generated by mixing the main fluid supplied from the inlet-side main channel through the branch channel and the sub-fluid supplied from the sub-fluid channel Supply the mixed fluid to the outlet side main flow path through the merge flow path, and further mix Manifold valve, characterized in that the so that.   The merging channel and the outlet-side main channel have an acute angle such that the central axis of each of the plurality of merging channels is in a non-coplanar plane with the central axis extending along the longitudinal direction of the outlet-side main channel. 2. The manifold valve according to claim 1, wherein the merging channel merges with the outlet-side main channel.   3. The manifold valve according to claim 1, wherein the merging channel communicating with the merging channel communication port of the valve chamber of each of the plurality of valve portions includes a plurality of merging channels.   The plurality of merging channels that communicate with the merging channel communication port of the valve unit are arranged so as to merge with the outlet-side main channel at different positions on an axis parallel to the central axis of the outlet-side main channel. The manifold valve according to claim 3.   The said some confluence | merging flow path connected to the said confluence | merging flow path communication port of the said valve | bulb part is arrange | positioned so that it may merge with the mutually different angle with respect to the said exit side main flow path. Manifold valve as described.   The merging channel that communicates with the merging channel communication port of the valve chamber of each of the plurality of valve portions is joined to the outlet-side main channel on the same circumference around the central axis of the outlet-side main channel. The manifold valve according to any one of claims 3 to 5, wherein the manifold valve is disposed on the manifold.   The inlet-side main channel and the outlet-side main channel are arranged on the same axis, and have the same shape constituted by the valve unit, the branch channel and the merge channel connected to the valve unit. The manifold valve according to any one of claims 1 to 6, wherein a plurality of sets are arranged at equiangular intervals around the axis.

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