JP6925459B2

JP6925459B2 - Fluid mixer

Info

Publication number: JP6925459B2
Application number: JP2020006318A
Authority: JP
Inventors: 士堡簡; 曜臺楊
Original assignee: 信紘科技股▲分▼有限公司
Priority date: 2019-03-12
Filing date: 2020-01-17
Publication date: 2021-08-25
Anticipated expiration: 2040-01-17
Also published as: JP2020146678A; JP3226930U; TW202033267A; TWI697356B

Description

本発明は、混合装置に関し、特に、流体ミキサーに関する。 The present invention relates to a mixing device, in particular to a fluid mixer.

ハイ−テックの分野において、濃度が安定である高純度の化学液体を用いて、ハイ−テック製品の部品（例えば、半導体チップ、表示機器、タッチパネルなど）を製造する。このような濃度の安定の高純度の化学液体は、通常、大量の脱イオン水を利用して、化学液体を必要な濃度に希釈する必要がある。 In the field of high-tech, high-purity chemical liquids with stable concentrations are used to manufacture parts for high-tech products (for example, semiconductor chips, display devices, touch panels, etc.). A high-purity chemical liquid having such a stable concentration usually needs to dilute the chemical liquid to a required concentration by utilizing a large amount of deionized water.

例えば、一般的には、高濃度の化学原液を漸進的にまたは階段的に低濃度の化学液体に希釈するので、より微量な濃度（例えばｐｐｍレベル）の化学液体を取得するには、非常に大量の脱イオン水を必要とする。また、上記の希釈方法では、通常、大量の低濃度の化学液体を一度に調製しなければならないので、短時間に使用し尽くさなければ、調製した化学液体の濃度が変動して、ハイ−テック製品の部品の品質の安定性を低下させる。 For example, in general, a high concentration chemical stock solution is diluted gradually or stepwise into a low concentration chemical liquid, so that it is very difficult to obtain a chemical liquid having a smaller concentration (for example, ppm level). Requires a large amount of deionized water. In addition, in the above dilution method, a large amount of low-concentration chemical liquid must be prepared at one time. Therefore, if the chemical liquid is not used up in a short time, the concentration of the prepared chemical liquid will fluctuate and high-tech. Decreases the stability of the quality of product parts.

また、上記の伝統的な化学液体希釈方法は、大量の脱イオン水を消耗する必要があって、水資源およびエネルギーが無駄になったり、フィルタリング材料を大量に消費するだけではなく、このような化学液体希釈方法は、化学液体を正確により微量な濃度（例えば、ｐｐｍレベル）に希釈することができず、ハイ−テック製品の部品の製造の精密度は制限されている。 Also, the traditional chemical liquid dilution method described above requires the consumption of a large amount of deionized water, wasting water resources and energy, and consuming a large amount of filtering material, as well as such. Chemical liquid dilution methods cannot accurately dilute chemical liquids to trace concentrations (eg, ppm levels), limiting the precision of manufacturing parts for high-tech products.

以上により、従来の化学液体希釈方法に関する装置は、前記伝統的な化学液体希釈方法に存在する問題を解決するための解決方策を必要としている。 As described above, the device relating to the conventional chemical liquid dilution method requires a solution for solving the problem existing in the conventional chemical liquid dilution method.

これを鑑みて、本発明は、化学液体希釈システム（例えば、アンモニアの水溶液の希釈システム）に応用され、化学液体を長時間に必要な濃度に維持して、ハイ−テック製品の部品の品質の安定性を向上させる、流体ミキサーを提供することを目的とする。 In view of this, the present invention has been applied to chemical liquid dilution systems (eg, aqueous aqueous solution dilution systems of ammonia) to maintain the chemical liquid at the required concentration for a long period of time to improve the quality of parts of high-tech products. It is an object of the present invention to provide a fluid mixer that improves stability.

上記の目的を達成するために、本発明による流体ミキサーは、第１の接続部を含む接続カバーと、接続カバーに接続され、互いに連通する第２の接続部、出力部及びキャビティを含むティーチューブ装置と、接続カバーに接続され、第１の接続部に連通する第１のポートと、第２の接続部及び出力部にそれぞれ連通するとともに第１のポートにとは反対側に配置された第２のポートとを備えるピンホール通路を含む接続部材と、を備える。 To achieve the above object, the fluid mixer according to the present invention has a connection cover including a first connection and a tea tube including a second connection, an output and a cavity which are connected to and communicate with each other. A first port that is connected to the device and the connection cover and communicates with the first connection, and a first port that communicates with the second connection and the output, respectively, and is located on the opposite side of the first port. It comprises a connecting member including a pinhole passage with the two ports.

本発明の流体ミキサーによれば、化学液体希釈システムに応用され、脱イオン水の使用量を減少させて、圧力控制およびベンチュリー管効果によって化学液体を必要な濃度に希釈することができる。他方、より微量な濃度（例如ｐｐｍレベル）に希釈するために、本発明の流体ミキサーを利用して流体を注入して、微量な流体と液体とを混合させることによって、希釈した化学液体がｐｐｍレベルの微量な濃度を有する。他方、本発明による流体ミキサーは、生成した希釈した化学液体を長時間に必要な濃度に維持して、ハイ−テック製品の部品の製造品質の安定性を向上させる。 According to the fluid mixer of the present invention, it can be applied to a chemical liquid dilution system to reduce the amount of deionized water used and dilute the chemical liquid to the required concentration by pressure control and Venturi tube effect. On the other hand, in order to dilute to a smaller concentration (eg ppm level), the diluted chemical liquid is ppm by injecting the fluid using the fluid mixer of the present invention and mixing the trace amount of fluid and liquid. Has a trace concentration of levels. On the other hand, the fluid mixer according to the present invention maintains the produced diluted chemical liquid at a required concentration for a long period of time to improve the stability of manufacturing quality of parts of high-tech products.

本発明に係わる第一の実施形態の流体ミキサーを示す断面図である。It is sectional drawing which shows the fluid mixer of 1st Embodiment which concerns on this invention. 本発明に係わる好ましい実施形態の接続部材の斜視図である。It is a perspective view of the connection member of a preferable embodiment which concerns on this invention. 本発明に係わる好ましい実施形態の接続部材の断面図である。It is sectional drawing of the connection member of a preferable embodiment which concerns on this invention. 本発明に係わる好ましい実施形態の接続カバーの断面図である。It is sectional drawing of the connection cover of the preferable embodiment which concerns on this invention. 本発明に係わる好ましい実施形態のティーチューブ装置の断面図である。It is sectional drawing of the tea tube apparatus of a preferable embodiment which concerns on this invention. 本発明に係わる第二の実施形態の流体ミキサーを示す断面図である。It is sectional drawing which shows the fluid mixer of the 2nd Embodiment which concerns on this invention. 圧力差とアンモニアの水溶液の導電度との関係を示す図である。It is a figure which shows the relationship between the pressure difference and the conductivity of an aqueous solution of ammonia.

以下、図面を参照しながら、本発明の好ましい実施形態を詳細に説明する。図１に示したように、図１は本発明に係わる第一の実施形態の流体ミキサー３２を示す断面図であり、本発明の流体ミキサー３２は、アンモニアの水溶液を希釈するように用いられるが、これに限っていない。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, FIG. 1 is a cross-sectional view showing the fluid mixer 32 of the first embodiment according to the present invention, and the fluid mixer 32 of the present invention is used to dilute an aqueous solution of ammonia. , Not limited to this.

流体ミキサー３２は、接続部材３２２と、接続カバー３２４と、ティーチューブ装置３２６とを含む。接続カバー３２４はティーチューブ装置３２６および接続部材３２２にそれぞれ接続して、第１の接続部３２ａは、接続カバー３２４に位置する。ティーチューブ装置３２６は、第２の接続部３２ｂ、出力部３２ｃおよびキャビティ３２６２を有し、その中の第２の接続部３２ｂ、出力部３２ｃおよびキャビティ３２６２は互いに連通している。 The fluid mixer 32 includes a connecting member 322, a connecting cover 324, and a tea tube device 326. The connection cover 324 is connected to the tea tube device 326 and the connection member 322, respectively, and the first connection portion 32a is located on the connection cover 324. The tea tube device 326 has a second connecting portion 32b, an output portion 32c and a cavity 3262, in which the second connecting portion 32b, the output unit 32c and the cavity 3262 communicate with each other.

接続部材３２２は、ピンホール通路３２２２と、入力端３２２４と、出力端３２２６とを含み、ピンホール通路３２２２の第１のポート３２２２ａは、第１の接続部３２ａに連通して、第２のポート３２２２ｂは、第２の接続部３２ｂおよび出力部３２ｃに連通している。本発明の実施形態において、接続部材３２２は、入力端３２２４を介して接続カバー３２４に接続する。接続部材３２２の出力端３２２６は、ティーチューブ装置３２６のキャビティ３２６２の中に位置する。本発明の実施形態において、接続カバー３２４の一部は、接続部材３２２とティーチューブ装置３２６との間に位置する。本発明の実施形態において、第２の接続部３２ｂは、第１の接続管３２ａおよび出力部３２ｃにそれぞれ垂直である。即ち、第２の接続部３２ｂは、第１の接続管３２ａに垂直であるとともに、出力部３２ｃに垂直である。本発明の実施形態において、接続部材３２２のピンホール通路３２２２は、第１のポート３２２２ａでは第１の口径（Ｄ１）を有するとともに、第２のポート３２２２ｂでは第２の口径（Ｄ２）を有する。第１の口径（Ｄ１）は、第２の口径（Ｄ２）よりも大きい。本発明の実施形態では、第２の口径（Ｄ２）は、０．０１ｍｍ以上０．１ｍｍ以下であり、好ましくは、０．０４ｍｍ以上０．０７ｍｍ以下である。本発明の実施形態では、接続部材３２２のピンホール通路３２２２は、長さ(L)が２０ｍｍ以上３０ｍｍ以下であり、好ましくは、２３ｍｍ以上２７ｍｍ以下である。ピンホール通路３２２２は、前記二者に比較すれば狭い通路であるので、ピンホール通路３２２２は、接続部材３２２においてベンチュリー管効果があり、ベンチュリー管効果、第１の接続部と第２の接続部との圧力差により、希釈した流体を必要の導電度および必要の濃度にコントロールするという目的を達成する。 The connecting member 322 includes a pinhole passage 3222, an input end 3224, and an output end 3226, and the first port 3222a of the pinhole passage 3222 communicates with the first connecting portion 32a to form a second port. The 3222b communicates with the second connecting portion 32b and the output portion 32c. In the embodiment of the present invention, the connecting member 322 is connected to the connecting cover 324 via the input end 3224. The output end 3226 of the connecting member 322 is located in the cavity 3262 of the tea tube device 326. In the embodiment of the present invention, a part of the connection cover 324 is located between the connection member 322 and the tea tube device 326. In the embodiment of the present invention, the second connecting portion 32b is perpendicular to the first connecting pipe 32a and the output portion 32c, respectively. That is, the second connecting portion 32b is perpendicular to the first connecting pipe 32a and perpendicular to the output portion 32c. In the embodiment of the present invention, the pinhole passage 3222 of the connecting member 322 has a first diameter (D1) at the first port 3222a and a second diameter (D2) at the second port 3222b. The first caliber (D1) is larger than the second caliber (D2). In the embodiment of the present invention, the second diameter (D2) is 0.01 mm or more and 0.1 mm or less, preferably 0.04 mm or more and 0.07 mm or less. In the embodiment of the present invention, the pinhole passage 3222 of the connecting member 322 has a length (L) of 20 mm or more and 30 mm or less, preferably 23 mm or more and 27 mm or less. Since the pinhole passage 3222 is a narrow passage as compared with the above two, the pinhole passage 3222 has a Venturi pipe effect in the connecting member 322, and has a Venturi pipe effect, a first connecting portion and a second connecting portion. By the pressure difference with, the purpose of controlling the diluted fluid to the required conductivity and the required concentration is achieved.

本発明実施形態において、接続部材３２２のピンホール通路３２２２は、下記式（１）で表される関係を満たす。 In the embodiment of the present invention, the pinhole passage 3222 of the connecting member 322 satisfies the relationship represented by the following formula (1).

但し、Ｑは流体の流量、ｄはピンホール通路３２２２の第２の口径（Ｄ２）、Ｌはピンホール通路３２２２の長さ（Ｌ）、ΔＰはピンホール通路３２２２の第１のポート３２２２ａと第２のポート３２２２ｂとの圧力差である。 However, Q is the flow rate of the fluid, d is the second diameter (D2) of the pinhole passage 3222, L is the length (L) of the pinhole passage 3222, and ΔP is the first port 3222a and the first port 3222a of the pinhole passage 3222. This is the pressure difference between port 3222b and port 2.

上述の式（１）から分かるように、流体ミキサー３２を製造した後、ｄ及びＬが固定値となり、実際の操作において、圧力差ΔＰを制御することでピンホール通路３２２２を流れる流体の流量を調節することができる。 As can be seen from the above equation (1), after the fluid mixer 32 is manufactured, d and L become fixed values, and in the actual operation, the flow rate of the fluid flowing through the pinhole passage 3222 is controlled by controlling the pressure difference ΔP. Can be adjusted.

なお、必要な極微量の制御をするように、圧力差ΔＰを極めて小さい値に縮小することに加えて、（ｄ^４／Ｌ）の値を縮小することもできる。言い換えれば、（ｄ^４／Ｌ）の値を縮小するには、第２の口径（Ｄ２）をできるだけ小さくする、またはピンホールチャネル３２２２の長さ（Ｌ）をできるだけ長くする。しかしながら、利用の便利性や圧力差ΔＰを容易に制御することを考慮すると、本発明に係わる実施形態によって提供された流体ミキサー３２は、極めて小さい第２の口径（Ｄ２）及び長さ（Ｌ）を有する。従って、超微量の化学液体希釈システムに応用することができる。 In addition to reducing the pressure difference ΔP to an extremely small value so as to control the required minute amount, the value of (d ⁴ / L) can also be reduced. In other words, ^{to reduce the value of (d 4} / L), the second aperture (D2) is made as small as possible, or the length (L) of the pinhole channel 3222 is made as long as possible. However, considering the convenience of use and the easy control of the pressure difference ΔP, the fluid mixer 32 provided by the embodiment according to the present invention has an extremely small second diameter (D2) and length (L). Has. Therefore, it can be applied to an ultratrace chemical liquid dilution system.

図２ないし図５を参照すれば、接続部材３２２の入力端３２２４は円柱状になし、接続カバー３２４は、内円溝３２４２を有する。接続部材３２２の入力端３２２４は、接続カバー３２４の内円溝３２４２に対応して接続する。本発明の実施形態では、接続部材３２２の入力端３２２４は、おねじ３２２１を有し、接続カバー３２４の内円溝３２４２は、めねじ３２４１を有し、入力端３２２４と内円溝３２４２は、おねじ３２２１とめねじ３２４１との螺合関係により接続するが、これに限っていない。実務上、入力端３２２４と内円溝３２４２とは、他の適当的な形態（例えば回転留め具）で接続してもよい。 Referring to FIGS. 2 to 5, the input end 3224 of the connecting member 322 has a columnar shape, and the connecting cover 324 has an inner circular groove 3242. The input end 3224 of the connecting member 322 is connected corresponding to the inner circular groove 3242 of the connecting cover 324. In the embodiment of the present invention, the input end 3224 of the connecting member 322 has a male thread 3221, the inner circular groove 3242 of the connecting cover 324 has a female thread 3241, and the input end 3224 and the inner circular groove 3242 have an inner circular groove 3242. The connection is made by the screwing relationship between the male screw 3221 and the female screw 3241, but the connection is not limited to this. In practice, the input end 3224 and the inner circular groove 3242 may be connected in another suitable form (eg, a rotary fastener).

本発明の実施形態では、接続部材３２２の出力端３２２６は四角柱状であるが、これに限っていない。実務上、接続部材３２２の出力端３２２６は円柱状であってもよい。本発明の実施形態では、接続部材３２２の出力端３２２６は、四角柱の一角またはその中の一面がティーチューブ装置３２６の第２の接続部３２ｂに対応するが、これに限っていない。実際使用の際、四角柱のいずれか一つの角または一つの面が、ティーチューブ装置３２６の第２の接続部３２ｂに対応しても、混合した化学液体の調製結果に影響しない。 In the embodiment of the present invention, the output end 3226 of the connecting member 322 has a square columnar shape, but the present invention is not limited to this. In practice, the output end 3226 of the connecting member 322 may be cylindrical. In the embodiment of the present invention, one corner of the square pillar or one surface thereof corresponds to the second connecting portion 32b of the tea tube device 326, but the output end 3226 of the connecting member 322 is not limited to this. In actual use, even if any one corner or one surface of the square pillar corresponds to the second connection portion 32b of the tea tube device 326, it does not affect the preparation result of the mixed chemical liquid.

接続カバー３２４は、外円壁３２４を有し、ティーチューブ装置３２６は内円口３２６４を有し、接続カバー３２４の外円壁３２４とティーチューブ装置３２６の内円口３２６４とは対応して接続する。本発明の実施形態において、接続カバー３２４の外円壁３２４はおねじ３２４３を有する一方、ティーチューブ装置３２６の内円口３２６４はめねじ３２６３を有する。外円壁３２４と内円口３２６４とは、おねじ３２４３とめねじ３２６３との螺合により接続されるが、これに限っていない。実務には、外円壁３２４と内円口３２６４とは、他の適当的な形態（例えば、回転留め具）で接続してもよい。 The connection cover 324 has an outer circular wall 324, the tea tube device 326 has an inner circular opening 3264, and the outer circular wall 324 of the connection cover 324 and the inner circular opening 3264 of the tea tube device 326 are connected correspondingly. do. In an embodiment of the present invention, the outer circular wall 324 of the connection cover 324 has a male thread 3243, while the inner circular opening 3264 female thread 3263 of the tea tube device 326 has. The outer circular wall 324 and the inner circular opening 3264 are connected by screwing the male screw 3243 and the female screw 3263, but the present invention is not limited to this. In practice, the outer circular wall 324 and the inner circular opening 3264 may be connected in other suitable forms (eg, rotary fasteners).

本発明の別の実施形態において、接続部材３２２とティーチューブ装置３２６とが一体成形され、接続カバー３２４に固定に接続されている。本発明の実施形態において、金属材料が希釈した化学液体を腐食または汚染するのを防ぐために、接続部材３２２、接続カバー３２４及びティーチューブ装置３２６は、プラスチックからなる。 In another embodiment of the present invention, the connecting member 322 and the tea tube device 326 are integrally molded and fixedly connected to the connecting cover 324. In an embodiment of the invention, the connecting member 322, the connecting cover 324 and the tea tube device 326 are made of plastic in order to prevent the metal material from corroding or contaminating the diluted chemical liquid.

図１及び図６を参照すれば、図１は、本発明に係わる第一の実施形態の流体ミキサーの断面図であり、図６は、本発明に係わる第二の実施形態の流体ミキサーの断面図である。図１において、接続部材３２２の第２のポート３２２２ｂは、第２の接続部３２ｂの通路の最低位置３２ｂ１より低い。本実施形態において、接続部材３２２の第２のポート３２２２ｂは、第２の接続部３２ｂの通路の最低位置３２ｂ１より低いため、第２の接続部３２ｂから導入する第２の流体がピンホール通路３２２２を流れる第１の流体の出力に影響を与えない。逆に、図６において、接続部材３２２の第２のポート３２２２ｃが第２の接続部３２ｂの通路の最低位置３２ｂ１より高い。第二の実施形態において、接続部材３２２の第２のポート３２２２ｃが第２の接続部３２ｂの通路の最低位置３２ｂ１より高いため、第２の接続部３２ｂから導入する第２の流体により接続部材３２２の第２のポート３２２２ｃに背圧が形成されてピンホール通路３２２２を流れる第１の流体の出力に影響を与える。 With reference to FIGS. 1 and 6, FIG. 1 is a cross-sectional view of the fluid mixer of the first embodiment according to the present invention, and FIG. 6 is a cross-sectional view of the fluid mixer of the second embodiment according to the present invention. It is a figure. In FIG. 1, the second port 3222b of the connecting member 322 is lower than the lowest position 32b1 of the passage of the second connecting portion 32b. In the present embodiment, since the second port 3222b of the connecting member 322 is lower than the lowest position 32b1 of the passage of the second connecting portion 32b, the second fluid introduced from the second connecting portion 32b is the pinhole passage 3222. Does not affect the output of the first fluid flowing through. Conversely, in FIG. 6, the second port 3222c of the connecting member 322 is higher than the lowest position 32b1 of the passage of the second connecting portion 32b. In the second embodiment, since the second port 3222c of the connecting member 322 is higher than the lowest position 32b1 of the passage of the second connecting portion 32b, the connecting member 322 is driven by the second fluid introduced from the second connecting portion 32b. Back pressure is formed in the second port 3222c of the above, which affects the output of the first fluid flowing through the pinhole passage 3222.

例えば、第一の実施形態（図１）において、希釈濃度が１ｐｐｍである混合流体を調製したいが、第２の接続部３２ｂから導入する第２の流体の圧力値が１０ｐｓｉである場合、第１の接続部３２ａから導入してピンホール通路３２２２を流れる第１の流体の圧力値が２０ｐｓｉである。しかしながら、第二の実施形態（図６）において、第２の接続部３２ｂから導入する第２の流体により接続部材３２２の第２のポート３２２２ｂに背圧が形成されてピンホール通路３２２２を流れる第１の流体の出力に影響を与えるため、第二の実施形態（図６）において、希釈濃度が１ｐｐｍである混合流体を調製し、第２の接続部３２ｂから導入する第２の流体の圧力値も１０ｐｓｉである場合、第１の接続部３２ａから導入してピンホール通路３２２２を流れる第１の流体の圧力値が３０ｐｓｉまで向上する限り、第１の流体をピンホール通路３２２２からスムーズに流出させることができる。 For example, in the first embodiment (FIG. 1), when it is desired to prepare a mixed fluid having a dilution concentration of 1 ppm, but the pressure value of the second fluid introduced from the second connecting portion 32b is 10 psi, the first The pressure value of the first fluid introduced from the connecting portion 32a of the above and flowing through the pinhole passage 3222 is 20 psi. However, in the second embodiment (FIG. 6), a back pressure is formed in the second port 3222b of the connecting member 322 by the second fluid introduced from the second connecting portion 32b and flows through the pinhole passage 3222. In order to affect the output of the fluid of 1, in the second embodiment (FIG. 6), a mixed fluid having a dilution concentration of 1 ppm is prepared, and the pressure value of the second fluid introduced from the second connecting portion 32b. Also, when the pressure is 10 psi, the first fluid is smoothly discharged from the pinhole passage 3222 as long as the pressure value of the first fluid introduced from the first connection portion 32a and flowing through the pinhole passage 3222 is improved to 30 psi. be able to.

以上からわかるように、同じ希釈濃度を有する混合流体を調製する場合、第一の実施形態に比べて、第二の実施形態の流体ミキサーに対して、第１の接続部３２ａと第２の接続部３２ｂとの間により大きい圧力差が必要である。 As can be seen from the above, when preparing a mixed fluid having the same dilution concentration, the first connection portion 32a and the second connection are connected to the fluid mixer of the second embodiment as compared with the first embodiment. A larger pressure difference with the portion 32b is required.

図７を参照し、図７は圧力差とアンモニアの水溶液の導電度との関係を示す図である。図７において、左側の線分（・）は、第一実施形態に係わる圧力差とアンモニアの水溶液の導電度との関係を示し、右側の線分（△）は、第二実施形態に係わる圧力差とアンモニアの水溶液の導電度との関係を示す。図７からわかるように、同じアンモニアの水溶液の導電度に対して、第二の実施形態の圧力差が第一の実施形態の圧力差より大きい。しかしながら、流体ミキサー、液体管路や管路同士の接続箇所に耐圧値は上限があり、即ち、第１の接続部３２ａと第２の接続部３２ｂとの間の圧力差も上限があるため、第二の実施形態の流体ミキサー（図６）で調製できる希釈した混合流体の濃度の範囲は第一の実施形態の流体ミキサー（図１）で調製できる希釈した混合流体の濃度範囲より小さい。 With reference to FIG. 7, FIG. 7 is a diagram showing the relationship between the pressure difference and the conductivity of the aqueous solution of ammonia. In FIG. 7, the line segment (・) on the left side shows the relationship between the pressure difference according to the first embodiment and the conductivity of the aqueous solution of ammonia, and the line segment (Δ) on the right side shows the pressure according to the second embodiment. The relationship between the difference and the conductivity of the aqueous solution of ammonia is shown. As can be seen from FIG. 7, the pressure difference of the second embodiment is larger than the pressure difference of the first embodiment with respect to the conductivity of the same aqueous solution of ammonia. However, there is an upper limit to the withstand voltage value at the fluid mixer, the liquid pipeline, and the connection point between the pipelines, that is, the pressure difference between the first connection portion 32a and the second connection portion 32b also has an upper limit. The concentration range of the diluted mixed fluid that can be prepared by the fluid mixer of the second embodiment (FIG. 6) is smaller than the concentration range of the diluted mixed fluid that can be prepared by the fluid mixer of the first embodiment (FIG. 1).

尚、第二の実施形態の流体ミキサー（図６）で調製される希釈した混合流体の濃度範囲が小さいが、本発明において、第二の実施形態により提供された流体ミキサーも化学液体希釈システムに適用でき、微量の流体と液体とを混合させて希釈した化学液体をｐｐｍレベルの微量な濃度を具備させる。 Although the concentration range of the diluted mixed fluid prepared by the fluid mixer of the second embodiment (FIG. 6) is small, in the present invention, the fluid mixer provided by the second embodiment is also used in the chemical liquid dilution system. Applicable, a chemical liquid diluted by mixing a trace amount of fluid and liquid is provided with a trace concentration of ppm level.

本発明の実施形態の構造により、本発明の流体ミキサーは、化学液体希釈システムに応用され、圧力制御および流体ミキサーによるベンチュリー管効果を利用して流体を注入して、微量の流体と液体とを混合することによって、希釈した化学液体がｐｐｍレベルの微量な濃度を有する。例えば、本発明による化学液体希釈システムおよび方法は、リアルタイムに２〜３ｐｐｍの機能水（アンモニアの水溶液）を調製して、例えばウエハの清浄に使用されえる。したがって、大量の脱イオン水を無駄に消耗して過剰的な希釈した化学液体を製造する必要がない。他方、本発明による化学液体希釈システムおよび方法は、生成した希釈した化学液体を長時間に必要的な濃度に維持して、ハイ−テック製品の部品の製造品質の安定性をさらに向上させる。 Due to the structure of the embodiments of the present invention, the fluid mixer of the present invention is applied to a chemical liquid dilution system to inject a fluid by utilizing pressure control and the Venturi tube effect of the fluid mixer to produce a trace amount of fluid and liquid. By mixing, the diluted chemical liquid has a trace concentration of ppm level. For example, the chemical liquid dilution system and method according to the present invention can prepare 2-3 ppm of functional water (aqueous solution of ammonia) in real time and can be used, for example, for cleaning wafers. Therefore, it is not necessary to wastefully consume a large amount of deionized water to produce an excessively diluted chemical liquid. On the other hand, the chemical liquid dilution system and method according to the present invention maintain the produced diluted chemical liquid at the required concentration for a long period of time to further improve the stability of the manufacturing quality of parts of high-tech products.

以上は、例示として、本発明の好ましい実施形態を説明したものにすぎない。本発明の明細書および特許の請求の範囲と均等する変化も、本件特許請求の範囲に属する。 The above is merely an illustration of a preferred embodiment of the present invention. Changes equivalent to the claims of the present invention and the claims also belong to the claims.

３２流体ミキサー
３２ａ第１の接続部３２ｂ第２の接続部３２ｃ出力部
３２２接続部材３２２１おねじ３２２２ピンホール通路
３２２２ａ第１のポート３２２２ｂ、３２２２ｃ第２のポート
３２２４入力端３２２６出力端３２４接続カバー
３２４１めねじ３２４２内円溝３２４３おねじ
３２６ティーチューブ装置３２６２キャビティ３２６３めねじ
３２６４内円口
Ｄ１第１の口径Ｄ２第２の口径Ｌ長さ 32 Fluid mixer 32a 1st connection 32b 2nd connection 32c Output 322 Connection member 3221 Male thread 3222 Pinhole passage 3222a 1st port 3222b, 3222c 2nd port 3224 Input end 3226 Output end 324 Connection cover 3241 Female Thread 3242 Inner Circular Groove 3243 Male Thread 326 Tee Tube Device 3262 Cavity 3263 Female Thread 3264 Inner Circular Diameter D1 First Diameter D2 Second Diameter L Length

Claims

With the connection cover including the first connection part,
A tea tube device that includes a second connection, output, and cavity that is connected to the connection cover and communicates with each other.
A first port that is connected to the connection cover and communicates with the first connection portion, and a second port that communicates with the second connection portion and the output portion, respectively, and is arranged on the opposite side of the first port. A connecting member including a pinhole passage with two ports and
Equipped with a,
A first fluid is introduced from the first connection,
A second fluid is introduced from the second connection,
In the pinhole passage, the first port has a first diameter, the second port has a second diameter, and the first diameter is larger than the second diameter.
The second diameter is 0.01 mm or more and 0.1 mm or less.
The fluid mixer you dilute the first fluid in ppm level in the second fluid.

The connecting member further includes an input end and an output end located on the side opposite to the input end, and the first port of the pinhole passage is located at the input end. The second port is located at the output end, the connecting member is connected to the connecting cover via the input end, and the output end of the connecting member is located at the cavity of the tea tube device. The fluid mixer according to claim 1, which is arranged so as to be used.

Said second connecting portion, said first connecting pipe and a fluid mixer according to claim 1 which is arranged so that a perpendicular respectively to said output unit.

The fluid mixer according to claim 1 , wherein the second diameter is 0.04 mm or more and 0.07 mm or less.

Arranged so that the input end of the connecting member has a columnar shape, the connecting cover has an inner circular groove, and the input end of the connecting member is connected corresponding to the inner circular groove of the connecting cover. The fluid mixer according to claim 1.

The connection cover has an outer circular wall, the tea tube device has an inner circular opening, and the outer circular wall of the connection cover is connected corresponding to the inner circular opening of the tea tube device. The fluid mixer according to claim 1, which is arranged.

The fluid mixer according to claim 1, wherein a part of the connection cover is arranged so as to be located between the connection member and the tea tube device.

The fluid mixer according to claim 1, wherein the connecting member and the tea tube device are integrally molded.