CN111729528B - Fluid mixer - Google Patents
Fluid mixer Download PDFInfo
- Publication number
- CN111729528B CN111729528B CN201910225339.4A CN201910225339A CN111729528B CN 111729528 B CN111729528 B CN 111729528B CN 201910225339 A CN201910225339 A CN 201910225339A CN 111729528 B CN111729528 B CN 111729528B
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- port
- fluid mixer
- pinhole
- fluid
- aperture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/405—Methods of mixing liquids with liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
- B01F23/451—Mixing liquids with liquids; Emulsifying using flow mixing by injecting one liquid into another
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/48—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids
- B01F23/483—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids using water for diluting a liquid ingredient, obtaining a predetermined concentration or making an aqueous solution of a concentrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/2204—Mixing chemical components in generals in order to improve chemical treatment or reactions, independently from the specific application
Abstract
A fluid mixer comprises a connecting cover body, a three-way pipe body and a pinhole injection piece. The connecting cover body comprises a first connecting part; the three-way pipe body is connected with the connecting cover body and comprises a second connecting part, an output part and a cavity, wherein the second connecting part, the output part and the cavity are communicated with each other; the pinhole injection piece is connected to the connection cover body and comprises a pinhole channel, the pinhole channel is provided with a first port and a second port opposite to the first port, the first port is communicated with the first connection part, and the second port is communicated with the second connection part and the output part.
Description
Technical Field
The present invention relates to mixing devices; in particular to a fluid mixer.
Background
In the high-tech field, it is required to use a high-purity chemical liquid with a stable concentration for manufacturing high-tech product components (e.g., semiconductor wafers, display devices, touch panels, etc.). Such high purity chemical liquids that are stable in concentration typically require large amounts of deionized water to dilute the chemical liquid to the desired concentration.
For example, high concentration chemical stock solutions are typically diluted to low concentration chemical liquids in a gradual and stepwise manner, so that very large amounts of deionized water must be consumed to obtain chemical liquids at even trace concentrations (e.g., ppm levels). Furthermore, since the above dilution method can only prepare a large amount of chemical liquid with low concentration at one time, if the dilution method is not used in a short time, the concentration of the prepared chemical liquid may be changed, thereby reducing the quality stability of the parts for manufacturing high-tech products.
In addition, the conventional chemical liquid dilution method has problems of water and energy waste due to consumption of a large amount of deionized water and large consumption of a filter material, and also has a problem that the chemical liquid cannot be accurately diluted to a trace concentration (for example, ppm level), so that the precision of manufacturing high-tech product parts is limited.
In summary, there is still a need for improvement of the existing apparatus for diluting chemical liquid, so as to improve the problems of the conventional apparatus for diluting chemical liquid.
Disclosure of Invention
Accordingly, the present invention is directed to a fluid mixer, which can be applied to a chemical liquid dilution system (such as an ammonia solution dilution system) to maintain a desired concentration of a chemical liquid for a long time, thereby improving the quality stability of high-tech product components.
In order to achieve the above object, the present invention provides a fluid mixer, which includes a connection cover, a three-way tube and a needle injection member. The connecting cover body comprises a first connecting part; the three-way pipe body is connected with the connecting cover body and comprises a second connecting part, an output part and a cavity, wherein the second connecting part, the output part and the cavity are communicated with each other; the pinhole injection piece is connected to the connection cover body and comprises a pinhole channel, the pinhole channel is provided with a first port and a second port opposite to the first port, the first port is communicated with the first connection part, and the second port is communicated with the second connection part and the output part.
The fluid mixer provided by the invention can be applied to a chemical liquid dilution system, so that the chemical liquid dilution system can reduce the using amount of deionized water, and the chemical liquid is diluted to the required concentration by utilizing pressure control and venturi effect. In addition, in order to dilute to a trace concentration (for example, ppm level), a fluid may be injected using the fluid mixer of the present invention, a trace amount of the fluid is mixed with a liquid, and the diluted chemical liquid has a trace concentration of ppm level. On the other hand, the fluid mixer provided by the invention can maintain the generated diluted chemical liquid at the required concentration for a long time, thereby improving the quality stability of manufacturing high-tech product parts.
Drawings
FIG. 1 is a cross-sectional view of a fluid mixer according to a first embodiment of the present invention;
FIG. 2 is a perspective view of a connector according to a preferred embodiment of the present invention;
FIG. 3 is a cross-sectional view of a connector in accordance with a preferred embodiment of the present invention;
FIG. 4 is a cross-sectional view of a connecting cover according to a preferred embodiment of the present invention;
FIG. 5 is a cross-sectional view of a three-way tube according to a preferred embodiment of the present invention;
FIG. 6 is a cross-sectional view of a fluid mixer according to a second embodiment of the present invention;
FIG. 7 is a graph of pressure difference versus conductivity of an aqueous ammonia solution.
Detailed Description
In order to more clearly illustrate the present invention, a preferred embodiment will be described in detail below with reference to the accompanying drawings. Referring to fig. 1, fig. 1 is a cross-sectional view of a fluid mixer 32 according to a first embodiment of the present invention, and the fluid mixer 32 provided by the present invention can be used for diluting ammonia, but is not limited thereto.
The fluid mixer 32 includes a connector 322, a connecting cover 324, and a three-way pipe 326. The connection cover 324 is connected to the tee pipe 326 and the connector 322, and the first connection portion 32a is located on the connection cover 324. The three-way pipe 326 has a second connection portion 32b, an output portion 32c and a cavity 3262, wherein the second connection portion 32b, the output portion 32c and the cavity 3262 are communicated with each other.
The connecting element 322 has a needle hole channel 3222, an input end 3224 and an output end 3226, wherein a first port 3222a of the needle hole channel 3222 is communicated with the first connecting portion 32a, and a second port 3222b is communicated with the second connecting portion 32b and the output portion 32 c. In the embodiment of the present invention, the connecting element 322 is connected to the connecting cover 324 through the input end 3224, and the output end 3226 of the connecting element 322 is located in the cavity 3262 of the three-way tube 326. In the embodiment of the present invention, a portion of the connection cover 324 is located between the connection member 322 and the tee pipe 326. In the embodiment of the present invention, the second connecting portion 32b is perpendicular to the first connecting tube 32a and the output portion 32c, i.e. the second connecting portion 32b is perpendicular to the first connecting tube 32a and perpendicular to the output portion 32 c. In the embodiment of the present invention, the pinhole passageway 3222 of the connecting member 322 has a first aperture (D1) at the first port 3222a and a second aperture (D2) at the second port 3222b, wherein the first aperture (D1) is larger than the second aperture (D2), that is, the pinhole passageway 3222 is composed of two segments of passageways, and the aperture of one segment of the passageway is the first aperture (D1), and the aperture of the other segment of the passageway is the second aperture (D2). In an embodiment of the present invention, the second aperture diameter (D2) ranges from 0.01 mm to 0.1 mm, which is preferably from 0.04 mm to 0.07 mm. In the present embodiment, the length (L) of the needle passage 3222 of the connecting member 322 ranges from 20 mm to 30 mm, and preferably ranges from 23 mm to 27 mm. Since the pinhole passageway 3222 is narrower than the two, the pinhole passageway 3222 exhibits venturi effect in the connecting member 322, and the purpose of diluting the fluid to a desired conductivity and a desired concentration is achieved by the venturi effect and the pressure difference between the first connecting portion and the second connecting portion.
In the present embodiment, the pinhole passageway 3222 of the connecting member 322 conforms to the following equation:
wherein Q is the flow rate of the fluid;
d is the second aperture (D2) of the pinhole passageway 3222;
l is the length (L) of the pinhole channel 3222;
Δ P is the pressure differential between the first port 3222a and the second port 3222b of the pinhole passage 3222.
As can be seen from the above equation, after the fluid mixer 32 is manufactured, d and L are fixed values, and in practice, the flow rate of the fluid through the pinhole passageway 3222 can be controlled by controlling the pressure difference Δ P.
It is worth mentioning that in addition to reducing the pressure difference Δ P to a very small value, it is also possible to reduce (d) 4 L) to perform the desired infinitesimal control. In other words, to reduce (d) 4 L), i.e., to minimize the second aperture (D2) or to maximize the length (L) of the pinhole passageway 3222. However, in consideration of the convenience of practical application and the convenience of controlling the pressure difference Δ P, the fluid mixer 3 provided by the embodiment of the present invention2 has a very small second pore size (D2) and length (L) and can therefore be applied to ultra-micro chemical liquid dilution systems.
Referring to fig. 2 to 5, the input end 3224 of the connecting element 322 is cylindrical, and the connecting cover 324 has an inner circular groove 3242, wherein the input end 3224 of the connecting element 322 is correspondingly connected to the inner circular groove 3242 of the connecting cover 324. In the embodiment of the present invention, the input end 3224 of the connecting member 322 has an external thread 3221, the inner circular groove 3242 of the connecting cover 324 has an internal thread 3241, and the input end 3224 and the inner circular groove 3242 are connected by the threaded relationship between the external thread 3221 and the internal thread 3241, but not limited thereto; in practice, the input end 3224 and the inner circular groove 3242 may be connected in other suitable manners (e.g., rotating buckle).
In the embodiment of the present invention, the output end 3226 of the connecting member 322 has a quadrangular prism shape, but is not limited thereto; in practice, the output end 3226 of the connecting member 322 may also have a cylindrical shape. In the embodiment of the present invention, the output end 3226 of the connecting element 322 corresponds to the second connecting portion 32b of the three-way tube 326 by using one edge or one surface of the quadrangular prism, but not limited thereto; in practice, one or one of the edges of the quadrangular prism corresponding to the second connection portion 32b of the three-way pipe 326 does not affect the preparation result of the mixed chemical liquid.
The connecting cover 324 has an outer circular wall 324, and the three-way pipe 326 has an inner circular opening 3264, wherein the outer circular wall 324 of the connecting cover 324 is correspondingly connected to the inner circular opening 3264 of the three-way pipe 326. In the embodiment of the present invention, the outer circular wall 324 of the connecting cover 324 has outer threads 3243, the inner circular port 3264 of the three-way tube 326 has inner threads 3263, and the outer circular wall 324 and the inner circular port 3264 are connected by the threaded relationship between the outer threads 3243 and the inner threads 3263, but not limited thereto; in practice, the outer circular wall 324 and the inner circular opening 3264 may be connected by other suitable means (e.g., turnbuckle).
In another embodiment of the present invention, the connecting member 322 is integrally formed with the three-way pipe 326 and is further fixedly connected to the connecting cover 324. In the embodiment of the present invention, the connecting member 322, the connecting cover 324 and the three-way pipe 326 are made of plastic to prevent metal materials from corroding or contaminating the diluted chemical liquid.
Referring to fig. 1 and 6 together, fig. 1 is a cross-sectional view of a fluid mixer according to a first embodiment of the present invention, and fig. 6 is a cross-sectional view of a fluid mixer according to a second embodiment of the present invention. In FIG. 1, the second port 3222b of the connecting member 322 is lower than the lowest position 32b1 of the channel in the second connecting portion 32 b; in this embodiment, since the second port 3222b of the connecting member 322 is lower than the lowest position 32b1 of the passage in the second connecting portion 32b, the second fluid introduced from the second connecting portion 32b does not affect the output of the first fluid flowing through the pinhole passage 3222. Conversely, in FIG. 6, the second port 3222c of the connecting member 322 is higher than the lowest position 32b1 of the passage in the second connecting portion 32 b; in the second embodiment, since the second port 3222c of the connecting element 322 is higher than the lowest position 32b1 of the passage in the second connecting portion 32b, the second fluid introduced from the second connecting portion 32b can form a back pressure at the second port 3222c of the connecting element 322, thereby affecting the outflow of the first fluid flowing through the pinhole passage 3222.
For example, if a diluted mixed fluid with a dilution concentration of 1 ppm is prepared in the first embodiment (fig. 1), and the pressure value of the second fluid introduced from the second connection portion 32b is 10 psi, the pressure value of the first fluid introduced from the first connection portion 32a and flowing through the pinhole passage 3222 is 20 psi. However, in the second embodiment (fig. 6), since the second fluid introduced from the second connecting portion 32b will form a back pressure at the second port 3222b of the connecting member 322 and affect the outflow of the first fluid flowing through the pinhole channel 3222, if a diluted mixed fluid with a dilution concentration of 1 ppm is to be prepared in the second embodiment (fig. 6), and the pressure value of the second fluid introduced from the second connecting portion 32b is also 10 psi, the pressure value of the first fluid introduced from the first connecting portion 32a and flowing through the pinhole channel 3222 needs to be increased to 30 psi, so that the first fluid can smoothly flow out of the pinhole channel 3222.
It can be seen that, when preparing a diluted mixed fluid with the same dilution concentration, the fluid mixer of the second embodiment needs to provide a larger pressure difference (Δ P) between the first connection portion 32a and the second connection portion 32b than the first embodiment.
Referring to FIG. 7, FIG. 7 is a graph showing the relationship between the pressure difference and the conductivity of the ammonia solution. In FIG. 7, the left line segment (. DELTA.) shows the relationship between the pressure difference and the conductivity of the aqueous ammonia solution in the first embodiment, and the right line segment (. DELTA.) shows the relationship between the pressure difference and the conductivity of the aqueous ammonia solution in the second embodiment. As can be seen from fig. 7, the pressure difference of the second embodiment is larger than that of the first embodiment under the same conductivity of the ammonia solution; however, since the pressure resistance of the fluid mixer, the liquid pipeline and the connection between the pipelines has its upper limit, i.e. the pressure difference between the first connection portion 32a and the second connection portion 32b has its upper limit, the concentration range of the diluted mixed fluid that can be prepared by the fluid mixer of the second embodiment (fig. 6) is smaller than that of the fluid mixer of the second embodiment (fig. 1).
It should be noted that although the fluid mixer (fig. 6) of the second embodiment can be used to prepare a diluted mixed fluid with a small concentration range, the fluid mixer of the second embodiment is still suitable for a chemical liquid dilution system in the present invention, and can mix a small amount of fluid with a liquid to make the diluted chemical liquid have a micro concentration in the ppm level.
By means of the design of the embodiment of the invention, the fluid mixer provided by the invention can be applied to a chemical liquid dilution system, and injects fluid by utilizing the venturi effect generated by pressure control and the fluid mixer, and mixes trace fluid with liquid, so that the diluted chemical liquid has trace concentration of ppm level. For example, the chemical liquid dilution system and method provided by the invention can be used for preparing 2-3 ppm of functional water (ammonia solution) in real time, for example, the functional water can be used for cleaning wafers, so that a large amount of deionized water is not wasted to prepare excessive diluted chemical liquid. On the other hand, the chemical liquid dilution system and the method provided by the invention can maintain the required concentration of the diluted chemical liquid for a long time, thereby improving the quality stability of the manufactured high-tech product parts.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications to the present invention as described and claimed should be included in the scope of the present invention.
Description of the reference numerals
32 fluid mixer
32a first connection 32b second connection 32c output
322 connecting piece 3221 external screw thread 3222 pinhole channel
3222a first port 3222b, 3222c and a second port
3224 the input end 3226 and the output end 324 are connected with the cover body
3241 internal screw thread 3242 internal circular groove 3243 external screw thread
326 three-way pipe body 3262 internal screw thread in cavity 3263
3264 round mouth
D1 first aperture D2 second aperture L Length
Claims (7)
1. A fluid mixer, comprising:
a connecting cover body comprising a first connecting part;
the three-way pipe body is connected to the connecting cover body and comprises a second connecting part, an output part and a cavity, wherein the second connecting part, the output part and the cavity are communicated with each other; and
a connecting piece connected to the connecting cover body and including a pinhole channel, the pinhole channel having a first port and a second port opposite to the first port, the first port being communicated with the first connecting portion, and the second port being communicated with the second connecting portion and the output portion;
wherein the pinhole channel is formed by two sections of channels, one section of the channel is provided with the first port, the first port is provided with a first aperture, the other section of the channel is provided with the second port, the second port is provided with a second aperture, and the first aperture is larger than the second aperture; wherein the second aperture is in a range of 0.04 mm to 0.07 mm.
2. The fluid mixer of claim 1, wherein the connector further comprises an input end and an output end opposite the input end, the first port of the pinhole passageway is located at the input end and the second port thereof is located at the output end, the connector is connected with the connection cover from the input end, and the output end of the connector is located in the cavity of the tee pipe body.
3. The fluid mixer of claim 1, wherein the second connection is perpendicular to the first connection and the output.
4. The fluid mixer of claim 2, wherein the input end of the connecting member is cylindrical, and the connecting cover has an inner circular groove, and the input end of the connecting member is correspondingly connected to the inner circular groove of the connecting cover.
5. The fluid mixer of claim 1, wherein the connecting cover has an outer circular wall and the tee body has an inner circular opening, the outer circular wall of the connecting cover and the inner circular opening of the tee body are correspondingly connected.
6. The fluid mixer of claim 1, wherein a portion of the connection cap is positioned between the connector and the tee tube.
7. The fluid mixer of claim 1, wherein the connector is integrally formed with the three-way tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910225339.4A CN111729528B (en) | 2019-03-25 | 2019-03-25 | Fluid mixer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910225339.4A CN111729528B (en) | 2019-03-25 | 2019-03-25 | Fluid mixer |
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| Publication Number | Publication Date |
|---|---|
| CN111729528A CN111729528A (en) | 2020-10-02 |
| CN111729528B true CN111729528B (en) | 2022-08-23 |
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| CN201910225339.4A Active CN111729528B (en) | 2019-03-25 | 2019-03-25 | Fluid mixer |
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| CN102946984A (en) * | 2010-05-20 | 2013-02-27 | 顺科能源公司 | Method and device for in-line injection of flocculent agent into fluid flow of mature fine tailings |
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| CN206121542U (en) * | 2016-10-09 | 2017-04-26 | 辽宁海润环保技术股份有限公司 | Microbubble generator |
| US10279339B2 (en) * | 2016-11-02 | 2019-05-07 | Chevron U.S.A. Inc. | Integrated system to continuously inject small amounts of immiscible liquid |
| CN108194823A (en) * | 2018-02-07 | 2018-06-22 | 甘肃红峰机械有限责任公司 | A kind of inner cavity stepped hole type nozzle venturi steam trap |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5816446A (en) * | 1995-02-23 | 1998-10-06 | Ecolab Inc. | Dispensing a viscous use solution by diluting a less viscous concentrate |
| CN1218767A (en) * | 1998-09-04 | 1999-06-09 | 赖福得 | Mixer for ozone and water |
| CN101695638A (en) * | 2009-10-27 | 2010-04-21 | 金坛市旺达喷灌机有限公司 | Medical liquor supplying device of snail control machine unit |
| CN102946984A (en) * | 2010-05-20 | 2013-02-27 | 顺科能源公司 | Method and device for in-line injection of flocculent agent into fluid flow of mature fine tailings |
| CN202173892U (en) * | 2011-08-01 | 2012-03-28 | 中国石油化工集团公司 | Efficient injection agent mixer |
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| CN111729528A (en) | 2020-10-02 |
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