TWI694260B - Apparatus for inspecting display cells - Google Patents

Abstract

An apparatus for inspecting display cells is disclosed. The apparatus includes a substrate stage for supporting a substrate such that display cells formed on the substrate face downward, a card stage disposed below the substrate stage to support a probe card for applying inspection signals to the display cells, a card cassette disposed at one side of the card stage to accommodate a plurality of probe cards, a card transfer unit for transferring the probe card between the card stage and the card cassette to replace the probe card, and a stage driving unit for moving the substrate stage in vertical and horizontal directions. Particularly, the card transfer unit is mounted on the stage driving unit and moved along with the substrate stage.

Description

Device for checking display unit

The invention relates to a device for inspecting a display unit. More specifically, the present invention relates to a device for electrically and optically inspecting a display unit, such as an OLED (organic light emitting diode) unit formed on a substrate.

Generally, an OLED unit includes a thin film transistor (TFT) layer formed on a substrate and an organic light emitting layer formed on the TFT layer. The organic light-emitting layer includes a lower electrode, a hole injection layer, a hole transport layer, an emission layer, an electron transport layer, and an upper electrode.

In particular, after forming a plurality of OLED cells on the substrate, the OLED cells can be inspected by the inspection device. For example, the image quality, brightness, color coordinates, color temperature, alignment of thin film patterns, etc. of the OLED unit can be checked by the inspection device. The inspection device may include an inspection camera for inspecting image quality and brightness; a spectroscope for inspecting color coordinates and color temperature; and a fluorescent microscope for inspecting the alignment of the film pattern.

In addition, the inspection device may use the probe card to apply the inspection signal to the display unit. The inspection device may include a substrate table for clamping the substrate; a table driving unit for moving the substrate in the vertical and horizontal directions; and a card table, which is provided below the substrate table to support the probe card. In addition, the inspection device may include a card case, which is used to accommodate a plurality of probe cards; and a card transfer unit, which is used to The display unit selects one of the probe cards accommodated in the cassette and transfers the selected probe card to the card table.

The card transfer unit may be provided below the stage driving unit. However, since the size of the card transfer unit is relatively large, it is difficult to arrange the card transfer unit below the stage driving unit. In addition, the stage driving unit and the card transfer unit may collide with each other.

The present invention provides an apparatus for inspecting a display unit, which can eliminate the possibility of collision between the stage driving unit and the card transfer unit and reduce the space occupied by the stage driving unit and the card transfer unit.

According to some exemplary embodiments of the present invention, an apparatus for inspecting a display unit includes a substrate table for supporting a substrate such that a display unit formed on the substrate faces downward; a chuck table is provided below the substrate table To support the probe card for applying the inspection signal to the display unit; the card box, which is provided on one side of the card table to accommodate a plurality of probe cards; the card transfer unit, which is used between the card table and the card box Transfer the probe card to replace the probe card; and the stage drive unit, which is used to move the substrate stage in the vertical and horizontal directions. In particular, the card transfer unit may be installed on the stage driving unit and may move together with the substrate stage.

According to some exemplary embodiments of the present invention, the stage driving unit may include a vertical driving part for moving the substrate stage in the vertical direction; a first horizontal driving part for moving the vertical driving part in the first horizontal direction; And a second horizontal driving part for moving the first horizontal driving part in a second horizontal direction perpendicular to the first horizontal direction. In particular, the card transfer unit may be installed on the first horizontal driving part and may be moved in the second horizontal direction by the second horizontal driving part.

According to some exemplary embodiments of the present invention, the first horizontal driving part may include a movable block configured to be movable in the second horizontal direction by the second horizontal driving part, and the card transfer unit may be installed on the movable On the block.

According to some exemplary embodiments of the present invention, the card transfer unit may include a holder part for clamping the probe card; and a second vertical driving part, which is mounted on the table driving unit and moves in the vertical direction Holder part to transfer the probe card to the card table.

According to some exemplary embodiments of the present invention, the holder part may include a transfer board connected to the second vertical driving part; a holder, which is mounted to the transfer board to hold the probe card; and a holder The driving part, which is used to operate the gripper.

According to some exemplary embodiments of the present invention, each of the holders may rotate the shaft, which is rotatably mounted to the transfer plate; and at least one hook, which is mounted on the lower portion of the rotating shaft in the radial direction. At this time, the probe card may have a key hole, the lower part of the rotating shaft and the hook of the holder are inserted into the key hole, and the holder driving part may rotate the holder inserted into the key hole by a predetermined angle to clamp Probe card.

According to some exemplary embodiments of the present invention, each of the holders may include a cam follower, which is installed on an upper portion of the rotating shaft to be spaced a predetermined distance from the central axis of the rotating shaft. At this time, the gripper driving part may include a cam plate having a cam groove into which the cam follower of the gripper is inserted; and a cam operating part for moving the cam plate in the horizontal direction so that Rotate the gripper.

According to some exemplary embodiments of the present invention, the card table may have an alignment pin for aligning the position of the probe card, and the probe card may have an alignment hole into which the alignment pin is inserted.

According to some exemplary embodiments of the present invention, the device may further include a clamping unit, which is provided on the card table to clamp the probe card.

According to some exemplary embodiments of the present invention, the probe card may have lower grooves respectively formed at the side surface portions, and upper grooves respectively formed to have a predetermined inclination upward from the lower grooves. At this time, the clamping unit may include clamps, each of which has fixing pins, which are configured to be inserted into the lower grooves, respectively; and a clamp operation portion, which is used to move the clamps in the horizontal direction, respectively, so that The upper slot moves the fixing pin inserted into the lower slot, thereby fixing the probe card to the card table.

The above summary of the present invention is not intended to describe each illustrated embodiment or every implementation of the present invention. The specific embodiments and patent application scope below exemplify these examples more specifically.

10: substrate

20: OLED unit

100: inspection device

102: Examination room

110: substrate stage

112: drive unit

114: Vertical drive section

116: The first horizontal driving part

118: movable block

119: First camera alignment

120: The second horizontal driving part

130: Probe card

132: Probe

136: slot

136A: Lower slot

136B: Upper slot

140: card table

142: Card room

144: Card box

146: Box drive unit

148: Home

150: Card transfer unit

152: Holder part

154: connecting bracket

156: Second vertical drive section

158: Transfer board

160: gripper

162: Rotating axis

164: hook

166: Cam Follower

168: gripper drive part

170: cam plate

172: Cam slot

174: Cam operation part

180: Alignment pin

182: clamping unit

184: Fixture

186: fixed pin

188: Fixture operation part

190: light inspection unit

192: Check the camera

194: Beamsplitter

196: Fluorescence microscope

198: Second alignment camera

According to the following description in conjunction with the accompanying drawings, the exemplary embodiments can be understood in more detail, wherein: FIG. 1 is a schematic diagram illustrating an OLED unit formed on a substrate; FIG. 2 is a diagram illustrating an exemplary embodiment according to the present invention. FIG. 3 is a schematic plan view showing the substrate stage as shown in FIG. 2; FIG. 4 is a schematic side showing the substrate stage as shown in FIG. 2 FIG. 5 is a schematic plan view showing the probe card as shown in FIG. 2; FIG. 6 is a schematic front view showing the probe card as shown in FIG. 2; FIG. 7 is a view FIG. 5 is a schematic side view of the probe card as shown in FIG. 5; FIG. 8 is a schematic side view showing the holder part as shown in FIG. 3; FIG. 9 is a schematic side view as shown in FIG. A schematic plan view of the gripper portion shown in FIG. 10 and 11 are schematic diagrams showing the operation of the gripper portion as shown in FIG. 9; 12 and 13 are schematic plan views showing the card table as shown in FIG. 2; and FIGS. 14 and 15 are schematic side views showing the card table as shown in FIG.

Although various embodiments are suitable for various modifications and alternative forms, specific details thereof have been shown in the drawings by way of examples and will be described in more detail. However, it should be understood that the intention is not to limit the claimed invention to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter as defined by the scope of the patent application.

Hereinafter, embodiments of the present invention are described in more detail with reference to the drawings. However, the present invention is not limited to the embodiments described below and is implemented in various other forms. The following embodiments are not intended to completely complete the present invention, but to fully convey the scope of the present invention to those skilled in the art.

In the specification, when a component is referred to as being on or connected to another component or layer, it can be directly on the other component or layer, be directly connected to it, or can also exist Intermediate components or layers. Unlike this, it will be understood that when a component is referred to as being directly on or connected to another component or layer, it means that there are no intervening components. In addition, although terms like the first, second, and third are used to describe various regions and layers in various embodiments of the present invention, the regions and layers are not limited to these terms.

The terms used below are only used to describe specific embodiments, but not to limit the present invention. Additionally, unless otherwise defined herein, all terms including technical or scientific terms may have the same meaning as commonly understood by those skilled in the art.

The embodiments of the present invention are described with reference to schematic diagrams of ideal embodiments. Accordingly, variations and/or tolerances in the manufacturing method can be expected according to the form of the drawings. Accordingly, the embodiments of the present invention are not described as being limited to specific forms or areas in the drawings and including deviations of the forms. This area may be entirely schematic, and its form may not describe or depict the exact form or structure in any given area, and is not intended to limit the scope of the invention.

FIG. 1 is a schematic diagram illustrating an OLED unit formed on a substrate; and FIG. 2 is a schematic diagram illustrating an apparatus for inspecting a display unit according to an exemplary embodiment of the present invention.

1 and 2, an apparatus 1 (hereinafter referred to as an inspection apparatus) for inspecting a display unit according to an exemplary embodiment of the present invention can be used for electrical and optical inspection of a display unit, such as being formed on a substrate 10的OLED单元20。 20 OLED unit. The OLED cells 20 may be arranged on the substrate 10 in rows and columns and may include a plurality of inspection pads 22 respectively.

The inspection apparatus 1 may include an inspection room 102 for providing a space in which electrical and optical inspection processes are performed on the OLED unit 20. In addition, the inspection apparatus 1 may include a substrate stage 110 for clamping the substrate 10; and a card stage 140 for supporting the probe card 130 used to apply the inspection signal to the OLED unit 20. The substrate stage 110 may sandwich the substrate 10 so that the OLED unit 20 faces downward, and the chuck stage 140 may be disposed below the substrate stage 110.

3 is a schematic plan view showing the substrate stage 110 as shown in FIG. 2; and FIG. 4 is a schematic side view showing the substrate stage 110 as shown in FIG.

Referring to FIGS. 3 and 4, the substrate stage 110 may have a vacuum hole (not shown) for vacuum absorbing the rear surface of the substrate 10, and may be moved in the vertical and horizontal directions by the stage driving unit 112.

The stage driving unit 112 may include a vertical driving part 114 for moving the substrate stage 110 in the vertical direction; a first horizontal driving part 116 for moving the vertical driving part in the first horizontal direction, for example, in the X-axis direction 114; and the second horizontal driving portion 120, which is used to be perpendicular to the first The second horizontal direction of the horizontal direction is registered, and the first horizontal driving portion 116 is moved in the Y-axis direction. In addition, the stage driving unit 112 may further include a rotation driving part (not shown) for rotating the substrate stage 110.

The first and second horizontal driving parts 116 and 120 may move the substrate stage 110 in the first and second horizontal directions to inspect the OLED unit 20. For example, the first and second horizontal driving portions 116 and 120 may be configured using linear motors, linear motion guides, and the like.

The vertical driving part 114 may move the substrate stage 110 in the vertical direction so as to connect the OLED unit 20 and the probe card 130. For example, the vertical driving portion 114 may be configured using a servo motor, linear motion guide, or the like. Although not shown in the figure, the rotation driving part may be used to align the OLED unit 20 with the probe card 130 and may include a motor for rotating the substrate table 110. For example, the rotary drive section can be configured using a direct drive motor, crossed roller bearings, or the like.

In particular, the first horizontal driving part 116 may include a movable block 118 configured to be movable in the second horizontal direction by the second horizontal driving part 120. For example, the first horizontal driving part 116 may be installed on the movable block 118 as shown in FIG. 3.

The probe card 130 may have a plurality of probes 132 (refer to FIG. 5 ), and the substrate stage 110 may move in the vertical direction so that the inspection pad 22 of the OLED unit 20 is connected to the probe 132 of the probe card 130.

5 is a schematic plan view showing the probe card 130 as shown in FIG. 2; FIG. 6 is a schematic front view showing the probe card 130 as shown in FIG. 2; and FIG. 7 is A schematic side view of the probe card 130 as shown in FIG. 5 is shown.

5 to 7, the probe card 130 may have a plurality of probes 132 for applying inspection signals to the OLED unit 20. For example, the probe card 130 may have a rectangular plate shape, and the probes 132 may be lined up on one side of the probe card 130.

In addition, although not shown in the figure, a plurality of contact pads (not shown) may be provided on the rear surface of the probe card 130, and a plurality of contact pins (not shown) corresponding to the contact pads may be Was set Placed on the card table 140. The probe card 130 may be electrically connected to an electrical inspection unit (not shown) for providing inspection signals via contact pads and contact pins.

Referring again to FIG. 2, the inspection apparatus 1 may include a cassette 144 for accommodating a plurality of probe cards 130. For example, the card chamber 142 may be provided on one side of the card table 140 in the examination room 102, and the card cassette 144 may be provided in the card chamber 142. The probe card 130 may be accommodated in the cassette 144 in a multi-layer manner, and the cassette 144 may be moved in the vertical direction by the cassette driving unit 146.

Although not shown in the figure, the cartridge 144 may have a slot into which the probe card is inserted. According to an exemplary embodiment of the present invention, the inspection apparatus 1 may include a card transfer unit 150 for selecting one of the probe cards 130 and transferring the selected probe card 130 to the card table 140

The card compartment 142 may have an upper door 148 for vertical movement of the cassette 144. In detail, after opening the upper door 148, the cartridge 144 may be moved upward by the cartridge driving unit 146, and then the probe card 130 may be pulled out of the cartridge 144 by the card transfer unit 150.

Referring to FIGS. 2 to 4, the card transfer unit 150 may transfer the probe card 130 between the card table 140 and the card box 144 to replace the probe card 130. According to an exemplary embodiment of the present invention, the card transfer unit 150 may be installed on the stage driving unit 112 and may move together with the substrate stage 110.

In particular, the card transfer unit 150 may be installed on the movable block 118 and may always move in the second horizontal direction through the second horizontal driving part 120 and the movable block 118. At this time, the card chamber 142 may be disposed to be spaced apart from the card table 140 in the second horizontal direction, that is, in the Y-axis direction.

The card transfer unit 150 may include a gripper part 152 for gripping the probe card 130; and a second vertical driving part 156, which is mounted on the stage driving unit 112 and moves the gripper part 152 in the vertical direction In order to transfer the probe card 130 to the card table 140. For example, the second vertical driving portion 156 may be configured using a motor, ball screw, ball nut, linear motion motor, or the like.

8 is a schematic side view showing the gripper portion 152 as shown in FIG. 3; FIG. 9 is a schematic plan view showing the gripper portion 152 as shown in FIG. 8; and FIG. 10 and 11 are schematic diagrams showing the operation of the gripper portion 152 as shown in FIG. 9.

8 and 9, the holder portion 152 may include a transfer plate 158, which is connected to the second vertical driving portion 156; the holder 160, which is mounted to the transfer plate 158 to clamp the probe card 130; and the clamp The holder driving portion 168 is used to operate the holder 160.

The transfer plate 158 may have a rectangular plate shape and may be connected to the second vertical driving part 156 through the connection bracket 154.

Each of the holders 160 may include a rotating shaft 162 that is rotatably provided through the transfer plate 158; and at least one hook 164 that is mounted on the lower portion of the rotating shaft 162 in the radial direction. For example, four grippers 160 may be installed through the transfer plate 158, and three hooks 164 may be installed on the lower portion of the rotation shaft 162, respectively.

10 and 11, the probe card 130 may have a key hole 134 into which the lower portion of the rotating shaft 162 and the hook 164 of the holder 160 are inserted. The gripper driving part 168 may rotate the gripper 160 inserted into the key hole 134 by a predetermined angle to grip the probe card 130. Meanwhile, the hook 164 may have a roller shape to prevent the generation of particles due to friction with the key hole 134.

The upper part of the rotating shaft 162 may protrude upward from the transfer plate 158. Each of the holders 160 includes a cam follower 166 that is mounted on the upper portion of the rotating shaft 162 to be spaced apart from the central axis of the rotating shaft 162 by a predetermined distance. The cam follower 166 may have a roller shape, and the gripper driving part 168 may include a cam plate 170 having a cam groove 172 into which the cam follower 166 of the gripper 160 is inserted; and cam operation Part 174, which is used to move the cam plate 170 in a horizontal direction, for example, the X-axis direction, so that the holder 160 is rotated.

The rotation shaft 162 can be rotated by moving the cam plate 170 in the horizontal direction, and thus the probe card 130 can be clamped or released by the hook 164. For example, two cam plates 170 may be provided at On the transfer plate 158, and the cam operation portion 174 may be provided between the two cam plates 170. The cam operation portion 174 may be configured using a motor, ball screw, ball nut, linear motion motor, or the like. Alternatively, the cam operation portion 174 may be configured using a pneumatic cylinder. In addition, the cam plate 170 can be guided in the horizontal direction by a linear motion guide.

In particular, the card transfer unit 150 may be mounted to the movable block 118 of the stage driving unit 112 and may be moved in the second horizontal direction by the second horizontal driving part 120. In detail, the card transfer unit 150 may be moved adjacent to the cassette 144 by the second horizontal driving part 120 to pull the probe card 130 out of the cassette 144 or receive the probe card 130 in the cassette 144. In addition, the card transfer unit 150 may move on the card table 140, and the second vertical driving part 156 may move the gripper part 152 in the vertical direction to transfer the probe card 130 to or from the card table 140 Remove the probe card 130.

12 and 13 are schematic plan views showing the card table 140 as shown in FIG. 2; and FIGS. 14 and 15 are schematic side views showing the card table 140 as shown in FIG.

12 to 15, the card table 140 may have an alignment pin 180 for aligning the position of the probe card 130, and the probe card 130 may have an alignment hole 138 into which the alignment pin 180 is inserted. In addition, a clamping unit 182 for clamping the probe card 130 may be provided on the card table 140. For example, the clamping unit 182 may clamp the side surface of the probe card 130 transferred onto the card table 140.

The clamping unit 182 may include jigs 184 each of which has a fixing pin 186 for fixing the probe card 130 on the card table 140 and a jig operating portion 188 for operating the fixing pin 184.

Meanwhile, as shown in FIGS. 5 to 7, the probe card 130 may have grooves 136 formed at side surface portions, respectively. In particular, the probe card 130 may have lower grooves 136A respectively formed at the side surface portions, and upper grooves 136B respectively formed to have a predetermined inclination upward from the lower groove 136A.

The fixing pin 186 may be inserted into the groove 136. In detail, the second vertical driving portion 156 can move the probe card 130 downward so that the alignment pins 180 and the fixing pins 186 are inserted into the alignment holes 138 and In the lower slot 136A. Then, the jig operation portions 188 can move the jigs 184 in the horizontal direction, respectively, so that the fixing pins 186 inserted into the lower grooves are moved along the upper grooves 136B, respectively, thereby fixing the probe card 130 to the card table 140. For example, the clamp operation portion 188 may be configured using a pneumatic cylinder.

After the probe card 130 is fixed to the card table 140, the substrate table 110 may be moved downward so that the probe 132 of the probe card 130 may be in contact with the inspection pad 22 of the OLED unit 20, and then the inspection The signal is applied to the OLED unit 20.

The electrical inspection unit may inspect the electrical characteristics of the OLED unit 20 through the probe card 130.

In addition, the inspection device 1 can inspect the optical characteristics of the OLED unit 20. The inspection apparatus 1 may include a light inspection unit 190, which is disposed below the substrate stage 110, as shown in FIGS. 2 and 4. The light inspection unit 190 may include an inspection camera 192 for inspecting the image quality and brightness of the OLED unit 20; a dichroic mirror 194 for inspecting color coordinates and color temperature; and a fluorescent microscope 196 for inspecting the formation on the substrate 10 Alignment of the film pattern.

In addition, the inspection apparatus 1 may include alignment cameras 119 and 198 and a light inspection unit 190 for aligning the OLED unit 20. Although not shown in the figure, alignment marks (not shown) may be formed on the substrate 10 and the probe card 130, respectively. For example, a first alignment camera 119 for detecting alignment marks of the probe card 130 may be installed on the substrate stage 110, and a second alignment camera 198 for detecting alignment marks of the substrate 10 may be installed in the light inspection unit 190 on.

According to the exemplary embodiment of the present invention as described above, the inspection apparatus 1 may include the substrate stage 110 for supporting the substrate 10 such that the OLED unit 20 formed on the substrate 10 faces downward; the card stage 140, which is provided at Below the substrate stage 110 to support the probe card 130 for applying the inspection signal to the OLED unit 20; a card box 144, which is provided on one side of the card stage 140 to accommodate a plurality of probe cards 130; card transfer unit 150 , Which is used to transfer the probe card 130 between the card table 140 and the cassette 144 to replace the probe card 130; and a table drive unit 112, which is used to move the substrate table 110 in the vertical and horizontal directions. At this time, the card transfer unit 150 may be mounted on the stage driving unit 112 and may move together with the substrate stage 110.

Therefore, the space occupied by the stage driving unit 112 and the card transfer unit 150 can be significantly reduced, and the interference between the stage driving unit 112 and the card transfer unit 150 can also be sufficiently prevented.

Although the inspection apparatus 1 has been described with reference to a specific embodiment, it is not limited to this. Therefore, those skilled in the art will easily understand that various modifications and changes can be made without departing from the spirit and scope of the present invention defined by the scope of the appended patent application.

10‧‧‧ substrate

20‧‧‧OLED unit

100‧‧‧ Inspection device

102‧‧‧ Examination room

110‧‧‧substrate table

112‧‧‧ drive units

130‧‧‧Probe card

140‧‧‧Card

142‧‧‧card room

144‧‧‧card box

146‧‧‧Box drive unit

148‧‧‧Home

150‧‧‧Card transfer unit

190‧‧‧Light inspection unit

Claims (8)

An apparatus for inspecting a display unit, the apparatus includes: a substrate stage for supporting a substrate such that the display unit formed on the substrate faces downward; a chuck stage, which is provided below the substrate stage to support the Apply an inspection signal to the probe card of the display unit; a card box, which is provided on one side of the card table to accommodate a plurality of probe cards; a card transfer unit, which is used between the card table and the card box Transfer the probe card to replace the probe card; and a table drive unit for moving the substrate table in the vertical and horizontal directions, wherein the card transfer unit is installed on the table drive unit and connected to the substrate The stage moves together, and the card transfer unit includes: a holder part for clamping the probe card; and a second vertical driving part, which is mounted on the stage driving unit and moves the clamp in the vertical direction A holder part to transfer the probe card to the card table, wherein the holder part includes: a transfer board connected to the second vertical driving part; a holder, which is mounted to the transfer board To clamp the probe card; and a gripper driving part, which is used to operate the gripper. The device according to item 1 of the patent application scope, wherein the stage driving unit includes: a vertical driving part for moving the substrate stage in the vertical direction; and a first horizontal driving part for moving in the first horizontal direction Moving the vertical driving part; and a second horizontal driving part for moving the first horizontal driving part in a second horizontal direction perpendicular to the first horizontal direction, wherein the card transfer unit is installed at the first horizontal The second horizontal driving portion moves on and through the second horizontal driving portion. The device according to item 2 of the patent application range, wherein the first horizontal driving part includes a movable block configured to be movable in the second horizontal direction by the second horizontal driving part, and the card transfer unit It is installed on the movable block. The device according to item 1 of the scope of the patent application, wherein each of the holders includes: a rotation shaft that is rotatably mounted to the transfer plate; and at least one hook, which is radially mounted on the On the lower part of the rotating shaft, where the probe card has a key hole, the lower part of the rotating shaft and the hook of the holder are inserted into the key hole, and the holder driving part will be inserted into the key hole The holder rotates a predetermined angle to clamp the probe card. The device according to item 4 of the scope of the patent application, wherein each of the grippers includes a cam follower that is mounted on an upper portion of the rotating shaft to be spaced a predetermined distance from the central axis of the rotating shaft, And the gripper driving part includes: a cam plate having a cam groove into which the cam follower of the gripper is inserted; and a cam operation part for moving the cam plate in the horizontal direction To rotate the holder. The device according to item 1 of the scope of the patent application, wherein the card table has an alignment pin for aligning the position of the probe card, and the probe card has an alignment hole, and the alignment pin is inserted into the alignment hole. The device according to item 1 of the scope of the patent application further includes a clamping unit, which is provided on the card table to clamp the probe card. The device according to item 7 of the patent application range, wherein the probe card has lower grooves respectively formed at side surface portions, and upper grooves respectively formed to have a predetermined inclination upward from the lower groove, and the The clamping unit includes: clamps, each of which has a fixing pin, which is configured to be inserted into the lower groove, respectively; and a clamp operation portion, which is used to move the clamp in the horizontal direction, respectively, so that the clamp is inserted The fixing pins in the lower groove respectively move along the upper groove, thereby fixing the probe card to the card table.

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