TWI693658B - Modified spring cushion for film frame shipper - Google Patents

Abstract

A film frame shipper. Various embodiments of the disclosure provide enhanced prevention against the jumping of film frames within the film frame shipper. In addition, the structures that prevent jumping also augment alignment of the film frames during loading into the shipper. Furthermore, in certain embodiments, these structures enable a closer tolerance fit between the thickness of the film frames and the registration slots, thereby reducing play between the film frame and the registration slot and attendant particle generation.

Description

Modified spring pad for membrane rack conveyor 【Related application】

This application claims the right of US Provisional Patent Application No. 62/133,131 filed on March 13, 2015. The disclosure content of the US Provisional Patent Application is incorporated herein by reference in its entirety.

The present invention generally relates to a wafer transfer device, and more specifically relates to a film frame or tape frame shipper.

The film frame or tape frame is generally composed of a stainless steel frame and a film extending across the frame. The film has an adhesive on one side. After processing, a round semiconductor wafer is usually placed on the film. After positioning on the film, the semiconductor wafer may be diced into individual pieces (eg, wafers), transported for further processing, or stored. The wafers used in the semiconductor processing industry are getting larger and thinner, and these wafers present processing, transportation, and storage and transportation problems due to their greater fragility. For this reason, in order to transport film holders with these large and thin wafers, conventional film holder wafer carriers can be improved.

In the semiconductor manufacturing industry, the film frame conveying device is widely used to convey the film frame. A variety of membrane rack transfer devices provide a safe and effective way to transfer and store up to 25 wafers or diced die mounted to the membrane rack. A lid on the top of the container makes it possible to reuse the conveyor Set. There may be a film frame transfer device suitable for film frames for transferring wafers with diameters of 300 mm, 200 mm, and 150 mm.

It is known that the film rack loaded in the conventional film rack conveyor will "jump" during an impact event. That is, the deformation induced on the casing of the membrane rack conveying device can cause the membrane rack to detach from the designated registration slot. This situation can cause the resident wafer to be damaged, and collide and damage the adjacent wafer.

A film frame transfer device that also maintains the film frame in a designated alignment position more reliably during an impact event will be welcomed.

Various embodiments of the present invention provide enhanced prevention of the jitter of the membrane rack within a membrane rack conveyor. In addition, the structure for preventing bouncing also enhances the alignment of the film holder during loading into the conveyor. In addition, in some embodiments, these structures achieve a tighter tolerance fit between the thickness of the membrane holder and the alignment slot, thereby reducing the play between the membrane holder and the alignment slot and reducing concomitant Particle generation.

Each wafer is supported on a metal or polymer wafer support ring or shelf. The wafer support ring is received in and held by a spring cushion positioned at the top and/or bottom of the film frame transfer device. The spring pad exerts a radial force on the membrane holder to fix each membrane holder in a corresponding alignment slot, thereby reducing the movement of the membrane holder in the alignment slot and reducing particle transfer or generation during transport. In some embodiments, the spring pad is removable and/or replaceable, and may include snap features for facilitating coupling of the spring pad to the transfer device. Other features of the film frame conveyor include: a mandatory snap latch (positive snap latch) used to secure the closure of the conveyor; a non-blocking latch and stackable design (non-obtrusive latch and stackable design), used to reduce storage space and reduce transmission costs; and rounded corners and inclined sides, used to reduce water retention during cleaning. An ESD (Electro-Static discharge) material can be used for the film frame conveying device. Radio frequency identification (RFID) and laser tag selection schemes can also be used.

20: Film rack conveyor

22: Container

24: cover

26: interior room

28: Formwork

32: side

34: Guide

36: Spring frame pad

36a: Spring frame

36b: Spring frame

38: Slotted rail

40: Membrane frame

42: frame

44: outer edge

46: Adhesive diaphragm

48: Wafer

52: Opposite rail/opposite sidewall/first opposing sidewall

54: Opposite rail/opposite sidewall/second opposing sidewall

55: end wall

56: front and back direction

57: end wall

58: Main pad

59: rectangular frame

60: spring pad element

62: Align slot

64: landscape orientation

72: First comb structure

74: first comb-shaped protrusion

76: vertical

78: first comb gap

79: Straight

80: tapered part

82: Second comb structure

84: second comb protrusion

88: second comb gap

92: Near end

94: far end

96: tapered profile

98: protrusion axis

102: through slot

104: tapered column

105: slot

106: inner surface

107: rib

108: slot

110: base comb structure

112: base

114: base comb protrusion

116: Align rail

118: base comb gap/gap

122: rail height

124: proximal end

126: gap offset

128: distal tip

132: protrusion height

140: side comb structure

142: side comb protrusion

148: side comb gap

152: gap depth

154: proximal end

156: protrusion height

158: distal tip

162: Slot depth

164: facing up

166: Slot

172: minimum gap size

184: corner

186: protrusion

Figure 1 is an assembly diagram of a film rack conveying device and a resident film rack in an embodiment of the present invention; Figure 2A is a film rack being loaded into a container of the film rack conveying device shown in Figure 1 Figure 1B is a perspective view of a film rack container loaded with a plurality of film racks; Figure 3 is a perspective view of a film rack conveying device shown in Figure 1; Figure 4A is a view of Figure 1 Fig. 4B is a perspective cross-sectional view of the membrane rack conveying apparatus shown in Fig. 1; Fig. 5 is a plan view of a prior art membrane rack; Fig. 6 is the basis A perspective view of a spring frame cushion in an embodiment of the invention; FIG. 6A is an enlarged perspective view of a spring frame cushion shown in FIG. 6 in an embodiment of the invention; FIG. 7 is an embodiment of the invention A perspective view of a spring frame pad in the embodiment; Figure 8 is a cross-sectional view of any one of the spring frames shown in Figure 6 or Figure 7; Figure 8A is a film frame conveyance shown in Figure 1 Inside the cover of the device, a perspective view of a plurality of attachment posts for receiving the spring frame is shown; Figure 8B is a perspective cross-sectional view of a film frame conveying device according to an embodiment of the present invention; Figure 9 is a perspective cross-sectional view of a film frame conveying device according to an embodiment of the present invention; Figure 10 is an embodiment of the present invention FIG. 9 is an enlarged perspective cross-sectional view of one of the comb structures on one side; FIG. 11 is an enlarged perspective cross-sectional view of one of the bottom comb structures shown in FIG. 9 in an embodiment of the present invention; A schematic cross-sectional view of a film frame conveying device with an upper spring frame pad and a lower spring frame pad in an embodiment of the invention; and FIG. 13 is an embodiment of the invention with an upper spring frame pad and a pair of A schematic cross-sectional view of the film frame conveying device of the lower spring frame pad.

FIGS. 1 to 4 illustrate a film frame conveying device 20 according to an embodiment of the invention. The membrane rack conveying device 20 includes a container 22 and a lid 24. The lid 24 forms a closure on the container portion to define an internal chamber 26 for storing a plurality of membrane racks 28. The container 22 includes a side portion 32, which may include a guide 34 (FIG. 2) for guiding the film holder 28 into the container 22. A spring frame cushion 36 is coupled to at least one of the container 22 and the lid 24. In one embodiment, the spring holder pad 36 is detachably mounted to the slotted rail 38 on the container 22 or the lid 24.

See FIG. 5, which shows a film holder 40. The membrane frame 40 includes a frame 42 that defines an outer edge 44. An adhesive membrane 46 spans the shelf 42 and a wafer 48 is adhered to the adhesive membrane 46.

Refer to FIG. 6 to FIG. 8, which illustrate several forms of the spring frame pad 36 in the embodiment of the present invention. The spring holder pad 36 is specifically referred to as a spring holder 36a (Figure 6) and a spring holder 361b (No. 7)), and is generally or collectively referred to as a spring holder pad 36. The spring frame pad 36 includes a plurality of opposed rails or opposed side walls 52 and 54 that extend along a fore/aft direction 56 and are connected to the plurality of end walls 55 and 57 to A rectangular framework 59 is formed. The rail supports a main cushion portion 58, and a plurality of spring cushion elements 60 spans between the main cushion portions 58. Each spring cushion element 60 defines a plurality of alignment slots 62. Each of the alignment slots 62 extends in a transverse direction 64 orthogonal to the front-rear direction 56. The alignment slots 62 are suitable for catching the outer edge 44 of the film holder 40 to restrict the movement of the film holder 40 in the front-rear direction 56.

In various embodiments, a first comb structure 72 includes a plurality of first comb-shaped protrusions 74 extending from the first opposing side wall 52 of the spring frame pad 36 A vertical direction 76 extends. (The vertical direction 76 is orthogonal to the front-rear direction 56 and to the transverse direction 64.) The first comb-shaped protrusions 74 are spaced apart from each other to define a plurality of first comb-shaped gaps 78. Each of the first comb-shaped protrusions 74 has a straight portion 79 (straight portion) and a tapered portion 80 (tapered portion). The adjacent first comb-shaped protrusions 74 of the first comb-shaped protrusions 74 are adapted to engage and receive the outer edge of the membrane frame 40, and each of the first comb-shaped gaps 78 is defined in the first comb-shaped structure 72 Between the adjacent ones of the first comb-shaped protrusions 74, the first comb-shaped gaps 78 are suitable for catching the outer edge 44 of the membrane frame 40 to restrict the movement of the outer edge 44 in the front-rear direction 56. In addition, each of the alignment slots 62 is aligned with one of the first comb gaps 78 in the lateral direction 64.

In some embodiments, a second comb-shaped structure 82 includes a plurality of second comb-shaped protrusions 84 that extend from the second opposing side wall 54 of the spring holder pad 36 along the vertical direction 76 extend. The second comb-shaped protrusions 84 are spaced apart from each other to define a plurality of second comb-shaped spaces Gap 88. The adjacent ones of the second comb-shaped protrusions 84 are adapted to engage and receive the outer edge 44 of the membrane frame 40, and each of the second comb-shaped gaps 88 is defined in the second comb-shaped structures 82 Between adjacent ones of the comb-shaped protrusions 84, each of the second comb-shaped gaps 88 is suitable for catching the outer edge 44 of the membrane frame 40 to restrict the movement of the outer edge 44 in the front-rear direction 56. In addition, each of the alignment slots 62 is aligned with one of the second comb gaps 88 in the lateral direction 64.

In various embodiments, at least a portion of the first comb-shaped protrusions 74 and/or the second comb-shaped protrusions 84 each include a proximal end 92 and a distal end 94 and define a protrusion extending in the lateral direction 64 One tapered profile 96. The tapered profile 96 may be symmetrical about one of the protrusion axes 98 (FIG. 6A) extending in the vertical direction 76, and the tapered profile 96 is inclined toward the protrusion axis 98 from the proximal end 92 to the distal end 94. In one embodiment, at least a portion of the tapered profile 96 is arched (not shown).

In one embodiment, the main pad portion 58 defines a plurality of through-slots 102, each of the through-slots 102 is disposed between a plurality of adjacent spring pad elements 60, and each of the spring pads The pad elements 60 have respective alignment slots 62.

Referring to FIGS. 8 to 9, the spring frame pad 36 is attached to the cover 24 by interference fit with a single tapered post 104 and extends from the inner surface 106 of the cover 24. The plurality of tapered posts 104 form a plurality of slots 105 so that the plurality of rails are tight enough to frictionally fix the spring holder pad to the top cover. The cover 24 and the container 22 have a plurality of ribs 107 that define a plurality of slots 108 to receive and stabilize the plurality of membrane shelves.

Refer to FIG. 9 to FIG. 11, which disclose other comb structures in the embodiments of the present invention. In one embodiment, at least one base comb structure 110 is disposed on a base 112 of the container 22. The base comb structure 110 includes a plurality of base comb protrusions 114. The base comb protrusions 114 are formed from the container 22. The base of the base extends into the inner chamber 26 in a vertical direction 76, and the bases are comb-shaped The outlets 114 are spaced apart from each other to define a plurality of base comb gaps 118. The adjacent ones of the base comb protrusions 114 are adapted to engage and receive the outer edge 44 of the membrane holder 40, and each base comb gap 118 is defined by the base comb protrusions of the base comb structure 110 114 between the neighbors.

The base comb-shaped gaps 118 are suitable for clamping the outer edge 44 of the film holder 40 to restrict the movement of the outer edge 44 in the front-rear direction 56. In addition, each of the alignment slots 62 of the spring holder pad 36 is in plane alignment with one of the base comb gaps 118. That is, each of the base comb gaps 118 is centered on a plane, and the plane is also centered on one of the alignment slots 62, and the plane is orthogonal to the front-rear direction 56. In one embodiment, at least a portion of the base comb protrusions 114 includes the tapered outline depicted in FIG. 6A.

In one embodiment, an alignment rail 116 extends from the base portion and extends in the front-rear direction 56. The alignment rail 116 defines a rail height 122 above the base portion 112 of the container 22 in the vertical direction 76, wherein each of the bases is comb-shaped A proximal end 124 of the gap 118 (ie, the "bottom" of the gap 118) defines a gap offset 126 relative to the base 112, the gap offset 126 is less than the rail height 122 (Figure 11), and each of the bases A distal end 128 of comb-shaped protrusion 114 relative to base portion 112 defines a protrusion height 132 that is greater than rail height 122.

Functionally, since the rail height 122 is greater than the gap offset 126 relative to the base 112, one of the membrane frames 40 inserted into the base 112 will rest on the alignment rail 116. This can relieve some stress for the base comb structure 110 and achieve a more accurate alignment of the film holder 40 in the film holder conveying device 20.

In some embodiments, at least one side comb structure 140 is disposed on the side portion 32 of the container 22, and the side comb structure 140 includes a plurality of sides extending into the inner chamber 26 along the vertical direction 76 The comb-shaped protrusions 142 and the side comb-shaped structure 140 include a plurality of side comb-shaped protrusions 142 spaced apart from each other to define a plurality of side comb-shaped gaps 148. The adjacent ones of the side comb protrusions 142 are adapted to engage and receive the outer edge 44 of the membrane frame 40, and each of the side comb gaps 148 is defined by the adjacent side comb protrusions 142 of the side comb structure 140 between.

The side comb gaps 148 are suitable for clamping the outer edge 44 of the film holder 40 to restrict the movement of the outer edge 44 in the front-rear direction 56. In addition, each of the alignment slots 62 of the spring holder pad 36 is planarly aligned with a corresponding one of the side comb gaps 148. In one embodiment, at least a portion of the side comb protrusions 142 includes the tapered profile depicted in FIG. 6A.

In various embodiments, and referring to FIG. 8, each of the first comb gap 78 and the second comb gap 88 defines a gap depth 152 having a proximal end 154. Each of the first comb-shaped protrusions 74 and the second comb-shaped protrusions 84 extends from the proximal end 154 of one of the adjacent ones of the first comb-shaped gap 78 and the second comb-shaped gap 88 in the vertical direction 76 to the The distal tip 158 of one of the adjacent first comb protrusions 74 / second comb protrusions 84 defines a protrusion height 156. Each of the alignment slots 62 defines a slot depth 162 in the vertical direction 76 relative to one of the main pad portions 58 toward the upper surface 164.

In various embodiments, the ratio of protrusion height 156 to slot depth 162 is in the range of 1.5 to 5 and inclusive. In some embodiments, the ratio is in the range of 2 to 4 and inclusive. In some embodiments, the ratio is between 2.5 and 3.5 and includes one of 2.5 and 3.5. (In this context, a range called "inclusive" includes the endpoints of the stated range.) In all such embodiments, the first comb-shaped protrusion 74 and the second comb-shaped protrusion 84 Both are greater than the slot depth 162.

Functionally, both the first comb-shaped protrusion 74 and the second comb-shaped protrusion 84 are larger than the narrow The situation of the groove depth 162 helps prevent or resist "jumping" of the membrane holder 40 during an impact event. The figures provided herein show that the spring holder pad 36 is in an undeflected state; after being loaded with a membrane holder 40, the main pad portion 58 will deflect so that the bottom of one of the slots 166 and the proximal end 154 are at the same height. Therefore, if the membrane frame 40 "jumps" the alignment slot 62, the greater height of the first comb gap 78 and the second comb gap 88 of the first comb protrusion 74 and the second comb protrusion 84 will be The outer edge 44 of the membrane holder 40 is blocked and the membrane holder 40 is redirected back into the alignment slot 62.

Referring again to FIG. 6A, in one embodiment, at least a portion of the first comb gap 78 and the second comb gap 88 each define a minimum gap size 172 along the front-rear direction 56. The minimum gap size 172 can be determined as a size for achieving a tight sliding fit with the membrane frame 40. In some embodiments, the minimum gap size 172 is between 0.05 inches and 0.085 inches and includes a range of 0.05 inches and 0.085 inches. In some embodiments, the minimum gap size 172 is between 0.055 inches and 0.075 inches and includes a range of 0.055 inches and 0.075 inches. In some embodiments, the minimum gap size 172 is between 0.055 inches and 0.065 inches and includes a range of 0.055 inches and 0.065 inches.

Functionally, the tighter the tolerance of the minimum gap size 172 relative to the outer edge 44 of the membrane frame 40, the tighter the holding of the membrane frame 40, thereby reducing the movement of the membrane frame 40 in the front-rear direction 56, which serves to reduce The role of particles. At the same time, the slot 62 may be kept too large to accommodate easy alignment during loading and realignment during an impact event.

In various embodiments, the spring frame pad 36 is detachable from the membrane frame transfer device 20 by being installed into the slotted rail 38 in a press-fit form.

Referring to FIG. 12, a first spring holder pad 36 is provided on the lid and a second spring holder pad 36 is provided on the container.

Referring to FIG. 13, a third spring frame cushion 36 is provided on the container.

In various embodiments, and referring again to FIGS. 6 and 7, the spring frame pad 32 includes a continuous frame 182. The continuous frame 182 includes four walls to define four corners 184. For the spring holder 36b, the first comb structure 72 and the second comb structure 82 include protrusions 186 extending around the four corners 184.

22‧‧‧Container

24‧‧‧ cover

28‧‧‧Mold

Claims (8)

A film frame shipper includes: a container; a lid for forming a closure on the container portion to define an internal chamber; and a spring frame cushion coupled to the container and At least one of the cover, the spring frame includes opposing side walls extending in a fore/aft direction and supporting a main pad portion, the main pad portion defining a plurality of alignment slots, each of the alignment slots along A transverse direction orthogonal to the front-rear direction and suitable for catching an outer edge of a membrane frame to restrict the movement of the membrane frame in the front-rear direction; and a first comb structure including a plurality of First comb-shaped protrusions, the first comb-shaped protrusions extend in a vertical direction from one of the opposed side walls of the spring holder pad, the first comb-shaped protrusions are spaced apart from each other To define a plurality of first comb-shaped gaps, the vertical direction is orthogonal to the front-rear direction and to the transverse direction; wherein the adjacent ones of the first comb-shaped protrusions are suitable for engaging and receiving the film The outer edge of the frame, and each of the first comb-shaped gaps is defined between adjacent ones of the first comb-shaped protrusions of the first comb-shaped structure, each of the first comb-shaped gaps is suitable for clamping Hold the outer edge of the membrane frame to restrict the movement of the outer edge in the front-to-rear direction; wherein each of the alignment slots is aligned with one of the first comb gaps along the lateral direction; wherein the protrusion The length of the portion is greater than the depth of the slot; and wherein the spring holder pad transitions from an undeflected state to a deflected state, in which the bottom of one of the aligned slots is located at the proximal end and far A height level between the side ends, when the spring frame pad is loaded with the membrane frame in the deflected state, the main pad portion is deflected so that the bottom of the alignment slot and the proximal end are at the same level quasi. The film frame conveying device according to claim 1, comprising: a second comb-shaped structure, including a plurality of second comb-shaped protrusions, the second comb-shaped protrusions are from the opposite side walls of the spring frame pad One of the second ones extends along the vertical direction, the second comb-shaped protrusions are spaced apart from each other to define a plurality of second comb-shaped gaps; wherein the adjacent second combs among the second comb-shaped protrusions The protruding portion is suitable for engaging and receiving the outer edge of the membrane frame, and one of the second comb-shaped gaps is defined in the adjacent second comb-shaped structures of the second comb-shaped structure Between the protrusions, the second comb-shaped gap is suitable for clamping the outer edge of the membrane frame to restrict the movement of the outer edge in the front-rear direction, and wherein each of the alignment slots along the lateral direction and the first One of the two comb gaps is aligned accordingly. The film frame conveying device according to claim 1, wherein the main pad portion defines a plurality of through-slots, and each of the through-slots is provided in an adjacent one of the alignment slots between. The film rack conveying device according to any one of claims 1 to 3, comprising: at least one base comb structure provided on one base of the container, the base comb structure including a plurality of base comb protrusions , The base comb-like protrusions extend from the base of the container along the vertical direction into the inner chamber, the base comb-like structure includes a plurality of base comb-like protrusions spaced apart from each other to define a plurality of base comb-like Gap; wherein the adjacent ones of the base comb protrusions are adapted to engage and receive the outer edge of the membrane holder, each of the base comb protrusions is defined between the adjacent ones of the base comb protrusions The comb-shaped gaps between the bases are suitable for clamping the outer edge of the film holder to limit the movement of the outer edge in the front-back direction; and wherein the alignment slots of the spring holder pad are in contact with the bases One of the comb gaps A corresponding plane is aligned. The film rack conveying device according to claim 4, comprising an alignment rail extending from the base and extending in the front-back direction, the alignment rail being defined above the base of the container in the vertical direction A rail height, wherein a proximal end of each of the base comb gaps defines a gap offset with respect to the base bottom, the gap offset is less than the rail height, and wherein each of the base comb protrusions relative to the A distal end of one of the base portions defines a protrusion height greater than the height of the rail. The membrane rack conveying device according to claim 4, comprising: at least one side comb-like structure provided on one side of the container, the side comb-like structure including a plurality of extending into the internal chamber in the vertical direction A side comb-shaped protrusion, the side comb-shaped structure includes a plurality of side comb-shaped protrusions spaced apart from each other to define a plurality of side comb-shaped gaps; wherein adjacent ones of the side comb-shaped protrusions are suitable for engaging and receiving For the outer edge of the membrane frame, each of the side comb gaps is defined between adjacent ones of the side comb protrusions, and each of the side comb gaps is suitable for catching the outer edge of the membrane frame, In order to restrict the movement of the outer edge in the front-rear direction; and wherein the alignment slots of the spring frame pad are in plane alignment with one of the side comb gaps. The membrane rack transfer device of claim 1, wherein the at least one spring rack pad is detachable from the membrane rack transfer device. The film frame conveying device according to claim 1 or claim 7, wherein the at least one spring frame pad includes a first spring frame pad provided on the lid and a second spring frame pad provided on the container.

Images