CN107534006B - Improved spring cushion for film frame conveyor - Google Patents
Improved spring cushion for film frame conveyor Download PDFInfo
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- CN107534006B CN107534006B CN201680023676.XA CN201680023676A CN107534006B CN 107534006 B CN107534006 B CN 107534006B CN 201680023676 A CN201680023676 A CN 201680023676A CN 107534006 B CN107534006 B CN 107534006B
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- comb
- film frame
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A film frame conveyor provides enhanced prevention of film frame bounce within the film frame conveyor. In addition, the structure for preventing jumping also enhances the alignment of the film frame during loading into the conveyor. Further, in certain embodiments, such structures enable a tighter tolerance fit between the thickness of the film frame and the registration groove, thereby reducing the play between the film frame and the registration groove and the attendant particle generation.
Description
Related application
This application claims the benefit of U.S. provisional patent application No. 62/133,131, filed 3/13/2015, the disclosure of which is incorporated by reference herein in its entirety.
Technical Field
The present invention relates generally to wafer conveyors and more particularly to film or tape frame conveyors.
Background
The film or tape frame is typically comprised of a stainless steel frame with a film extending across the frame. The film has an adhesive on one side thereof. After processing, a circular semiconductor wafer is typically placed on the membrane. After being positioned on the film, the semiconductor wafer may be singulated into individual pieces (e.g., chips), shipped for further processing, or stored. The semiconductor processing industry is using larger and thinner wafers that face handling, shipping, and storage handling challenges due to their greater fragility. To this end, conventional film frame wafer carriers may be modified to handle film frames having such larger and thinner wafers.
Film frame conveyors are widely used in the semiconductor manufacturing industry to transport film frames. Various film frame conveyors provide a safe and efficient way to transfer and store up to 25 wafers or singulated dies mounted to a film frame. The replaceable top cover mat allows the conveyor to be reused. The film frame conveyors are suitable for film frames for conveying 300mm, 200mm and 150mm diameter wafers.
Film frames loaded within conventional film frame conveyors are known to "jump" during an impact event. For example, when a film frame conveyor drops at a corner, the significant weight of the film frame therein can cause the shape of the polymer to momentarily deform, and the inertial force of the film frame received therein can cause the film frame to disengage from its designated registration slot and contact an adjacent film frame and wafer or conveyor thereon, resulting in damage to the respective wafer.
Referring to fig. 5, a known film frame 40 is depicted. The film frame 40 includes a frame 42, the frame 42 defining an outer edge 44. A bonding membrane 46 spans the frame 42 and a wafer 48 is bonded to the bonding membrane 46. When a film frame breaks away during an impact event, the wafer on the broken away film frame may contact other wafers, portions of the frame 42 or conveyor, resulting in damage to the wafer.
A film frame conveyor that more reliably holds film frames in a prescribed registration position during a shock event would be welcomed.
Disclosure of Invention
Various embodiments of the present invention provide enhanced prevention of film frame bounce within a film frame conveyor. In addition, the structure to prevent bouncing also enhances the alignment of the film frame during loading onto the conveyor. Further, in certain embodiments, such structures enable a tighter tolerance fit between the thickness of the film frame and the registration groove, thereby reducing the play between the film frame and the registration groove and the attendant particle generation.
Each wafer is supported on a metal or polymer wafer support ring or frame. The wafer support ring is received in and retained by spring pads positioned at the top and/or bottom of the film frame conveyor. The spring pads exert a radial force on the film frames to secure each film frame within a respective registration slot, thereby reducing movement of the film frames within the registration slots during transport and reducing particle transfer or generation during transport. In some embodiments, the spring pad is removable and/or replaceable and may include a snap feature that facilitates coupling the spring pad to the conveyor. Additional features of the film frame conveyor include: a positive (positive) snap latch for securing closure of the conveyor; non-mandatory latch and stackable designs for reducing storage space and transportation costs; and rounded and beveled sides for reducing water retention during cleaning. The film frame conveyor may use ESD safe materials. Radio Frequency Identification (RFID) and laser marking options may also be used.
Drawings
FIG. 1 is an assembly view of a film frame conveyor and a resident film frame in an embodiment of the present invention.
Fig. 2A is a schematic view of a film frame loaded into a container of the film frame conveyor of fig. 1.
Fig. 2B is a perspective view of the film frame container loaded with the film frame.
Fig. 3 is a perspective view of the film frame conveyor of fig. 1.
Fig. 4A is a cross-sectional view of the film frame conveyor of fig. 1.
Fig. 4B is a perspective cross-sectional view of the film frame conveyor and film frame of fig. 1.
Fig. 5 is a plan view of a prior art membrane frame.
Fig. 6 is a perspective view of a spring cage pad of an embodiment of the present invention.
Fig. 6A is an enlarged perspective view of the spring cage pad of fig. 6 in an embodiment of the present invention.
Fig. 7 is a perspective view of a spring cage pad in an embodiment of the present invention.
Fig. 8 is a cross-sectional view of either of the spring carriers of fig. 6 or 7.
Fig. 8A is a perspective view of the inside of a top cover of the film frame conveyor of fig. 1 illustrating attachment posts for receiving spring frames.
Fig. 8B is the view of fig. 8A with the spring holder received therein.
Fig. 9 is a perspective sectional view of a film frame conveyor in an embodiment of the invention.
Fig. 10 is an enlarged perspective cross-sectional view of the side comb structure of fig. 9 in an embodiment of the invention.
Fig. 11 is an enlarged perspective cross-sectional view of the bottom comb structure of fig. 9 in an embodiment of the invention.
Fig. 12 is a schematic cross-sectional view of a film frame conveyor having upper and lower spring frame cushions in an embodiment of the invention.
Fig. 13 is a cross-sectional schematic view of a film frame conveyor having an upper spring frame cushion and a pair of lower spring frame cushions in an embodiment of the invention.
Detailed Description
Fig. 1-4 depict a film frame conveyor 20 in an embodiment of the present invention. The film rack conveyor 20 includes a container 22 and a lid 24, the lid 24 forming a closure over the container portion to define an interior chamber 26 for storing a plurality of film racks 28. The container 22 includes a side 32, and the side 32 may include a guide 34 (fig. 2) for guiding the film frame 28 into the container 22. A spring cage pad 36 is coupled to at least one of the container 22 and the lid 24. In one embodiment, shelf pad 36 is removably mounted to a slotted rail 38 on container 22 or lid 24. As shown, the film frame 28 is directed into the interior chamber 26 of the container 22 in direction a, and then the lid 24 is moved in the same direction a to couple with the container 22.
Referring to fig. 6-8, a form of the spring holder 36 in an embodiment of the present invention is depicted. The spring mounts 36 are specifically referred to as spring mounts 36a (fig. 6) and spring mounts 36b (fig. 7), and are generally or collectively referred to as spring mounts 36. The spring carrier 36 includes opposing rails or side walls 52, 54, with the opposing rails or side walls 52, 54 extending in a forward/rearward direction 56 and connected to end walls 55, 57 to form a rectangular frame 59. The rails support main pad sections 58 with a plurality of spring pad elements 60 spanning between the main pad sections 58. Each spring pad element 60 defines a registration slot 62. Each of the plurality of registration slots 62 extends in a transverse direction 64 orthogonal to the anterior/posterior direction 56, the registration slots 62 being adapted to capture the outer edge 44 of the film frame 40 to limit movement of the film frame 40 in the anterior/posterior direction 56.
In various embodiments, the first comb structure 72 includes a plurality of first comb projections 74, the plurality of first comb projections 74 extending in a vertical direction 76 from the first opposing sidewalls 52 of the spring frame pad 36. (the vertical direction 76 is orthogonal to the front/back direction 56 and orthogonal to the lateral direction 64.) the plurality of first comb projections 74 are spaced apart from one another to define a plurality of first comb gaps 78. Each protrusion has a straight portion 79 and a tapered portion 80. Adjacent ones of the plurality of first comb projections 74 are adapted to engage and receive the outer edge of the film frame 40, and each of a plurality of first comb gaps 78 is defined between adjacent ones of the first comb projections 74 of the first comb structure 72, the plurality of comb gaps 78 being adapted to catch the outer edge 44 of the film frame 40 to limit movement of the outer edge 44 in the forward/rearward direction 56. Further, each of the plurality of registration slots 62 is aligned in the lateral direction 64 with a respective one of the plurality of first comb gaps 78.
In some embodiments, the second comb structure 82 includes a plurality of second comb projections 84, the plurality of second comb projections 84 extending in the vertical direction 76 from the second opposing sidewalls 54 of the spring frame pad 36. The plurality of second comb projections 84 are spaced apart from one another to define a plurality of second comb gaps 88. Adjacent ones of the plurality of second comb projections 84 are adapted to engage and receive the outer edge 44 of the film frame 40, and each of a plurality of second comb gaps 88 is defined between adjacent ones of the plurality of second comb projections 84 of the second comb structure 82, each of the plurality of second comb gaps 88 being adapted to catch the outer edge 44 of the film frame 40 to limit movement of the outer edge 44 in the fore/aft direction 56. Further, each of the plurality of registration slots 62 is aligned in the lateral direction 64 with a respective one of the plurality of second comb gaps 88.
In various embodiments, as best seen in fig. 6A, at least a portion of the plurality of first comb projections 74 and/or the plurality of second comb projections 84 each include a proximal end 92 and a distal end 94, and define a tapered profile 96 that projects in the transverse direction 64. The tapered profile 96 may be symmetrical about a projection axis 98 (fig. 6A) extending in the vertical direction 76, the tapered profile 96 sloping toward the projection axis 98 from the proximal end 92 to the distal end 94. In one embodiment, at least a portion of the tapered profile 96 is arcuate (not depicted).
In one embodiment, the main pad portion 58 defines a plurality of through slots 102, each of the plurality of through slots 102 (fig. 7) disposed between adjacent trampoline elements 60, each trampoline element 60 having a respective registration slot 62.
Referring to fig. 8-9, the spring cage pad 36 is attached to the cover 24 by an interference fit with a tapered post 104, the tapered post 104 being integral with and extending from an inner surface 106 of the cover 24. The posts form slots 105 so that the rails therein are tight enough to frictionally secure the spring cage pads to the top cover. The top cover 24 and container 22 have ribs 107, the ribs 107 defining slots 108 for receiving and restraining the film frame.
Referring to fig. 9-11, other comb structures are disclosed in embodiments of the present invention. In one embodiment, at least one substrate comb structure 110 is disposed on a base 112 of the container 22, the substrate comb structure 110 including a plurality of substrate comb projections 114 extending in the vertical direction 76 from the base of the container 22 into the interior chamber 26. The plurality of base comb projections 114 are spaced apart from one another to define a plurality of base comb gaps 118. Adjacent ones of the plurality of base comb projections 114 are adapted to engage and receive the outer edge 44 of the film frame 40, and each of the plurality of base comb gaps 118 is defined between adjacent ones of the plurality of base comb projections 114 of the base comb structure 110.
The plurality of base comb gaps 118 are adapted to capture the outer edge 44 of the film frame 40 to limit movement of the outer edge 44 in the fore/aft direction 56. Further, each of the plurality of registration slots 62 of the spring frame pad 36 is in planar alignment with a respective one of the plurality of base comb gaps 118. That is, each of the base comb gaps 118 is centered on a plane that is orthogonal to the front/back direction 56, and the planar center is also centered on one of the registration slots 62. In one embodiment, at least a portion of the plurality of base comb projections 114 comprises the tapered profile depicted in FIG. 6A.
In one embodiment, a registration rail 116 projects from the base and extends in the fore/aft direction 56, the registration rail defining a rail height 122 above the base 112 of the container 22 in the vertical direction 76, wherein a proximal end 124 of each of the plurality of substrate comb gaps 118 (i.e., the "bottom" of the gap 118) defines a gap offset 126 relative to the base 112, the gap offset 126 being less than the rail height 122 (fig. 11), and wherein each of the plurality of substrate comb projections 114 defines a projection height 132 relative to a distal end 128 of the base 112 that is greater than the rail height 122.
Functionally, because the rail height 122 is greater than the gap offset 126 relative to the base 112, the film frame 40 inserted into the base comb structure 110 will rest on the registration rail 116. This may relieve some of the stress to the base comb structure 110 and provide more accurate registration of the film frame 40 within the film frame conveyor 20.
In some embodiments, at least one side comb structure 140 is disposed on the side 32 of the container 22, the side comb structure 140 including a plurality of side comb projections 142 extending into the interior chamber 26 in the vertical direction 76. The plurality of side comb projections 142 are spaced apart from one another to define a plurality of side comb gaps 148. Adjacent ones of the plurality of side comb projections 142 are adapted to engage and receive the outer edge 44 of the film frame 40, each of the plurality of side comb gaps being defined between adjacent side comb projections of the side comb structure.
The plurality of side comb gaps are adapted to capture the outer edge 44 of the film frame 40 to limit movement of the outer edge 44 in the fore/aft direction 56. Further, each of the plurality of registration slots 62 of the spring frame pad 36 is in planar alignment with a respective one of the plurality of side comb gaps 148. In one embodiment, at least a portion of the plurality of side comb projections 142 comprise the tapered profile depicted in fig. 6A.
In various embodiments and referring to fig. 8, each of the plurality of first and second comb gaps 78, 88 defines a gap depth 152 having a proximal end 154. Each of the plurality of first and second comb projections 74, 84 defines a projection height 156 in the vertical direction 76 from a proximal end 154 of an adjacent one of the plurality of first and second comb gaps 78, 88 to a distal end 158 of an adjacent one of the plurality of first/ second comb projections 74, 84. Each of the plurality of registration grooves 62 defines a groove depth 162 in the vertical direction 76 relative to an upper surface 164 of the main pad 58.
In various embodiments, the ratio of protrusion height 152 to groove depth 162 is in the range of 1.5 to 5 and including 1.5 and 5. In some embodiments, the ratio is in the range of 2 to 4 and includes 2 and 4. In some embodiments, the ratio is in the range of 2.5 to 3.5 and including 2.5 and 3.5. (the range referred to herein as "comprising" includes the endpoints of that range.) in all such embodiments, the first and second comb projections 74, 84 are greater than the slot depth 162.
Functionally, the first and second comb projections 74, 84 being larger than the slot depth 162 helps to prevent or resist "jumping" of the film frame 40 during an impact event. The drawings presented herein depict the spring cage pad 36 in an undeflected state; when loaded with the membrane holder 40, the main pad 58 will deflect such that the bottom of the slot 166 is at the same height as the proximal end 154. Thus, if the film frame 40 "jumps" within the registration slot 62, the greater height of the protrusions 78, 88 will stop the outer edge 44 of the film frame 40 and redirect the film frame 40 back into the registration slot 62.
Referring again to fig. 6A, in one embodiment, at least a portion of the plurality of first and second comb gaps 78, 88 each define a minimum gap dimension 172 in the fore/aft direction 56. The minimum gap dimension 172 may be sized to closely slip fit with the membrane frame 40. In some embodiments, the minimum gap dimension 172 is in the range of 0.05 inches to 0.085 inches and includes 0.05 inches and 0.085 inches. In some embodiments, the minimum clearance dimension 172 is in the range of 0.055 inches to 0.075 inches, and including 0.055 inches and 0.075 inches. In some embodiments, the minimum gap dimension 172 is in the range of 0.055 inches to 0.065 inches, and including 0.055 inches and 0.065 inches.
Functionally, the tighter the tolerance of the minimum gap dimension 172 relative to the outer edge 44 of the film frame 40, the tighter the film frame 40 is held, thereby reducing movement of the film frame 40 in the fore/aft direction 56, which acts to reduce particle generation. At the same time, the slot 62 may remain oversized to accommodate easy alignment during loading and realignment during a shock event.
In various embodiments, the spring frame pad 36 is detachable from the film frame conveyor 20 by being installed into the slotted track 38 with a press fit.
Referring to fig. 12, a first spring mount pad 36 is disposed on the lid and a second spring mount pad 36 is disposed on the container.
Referring to fig. 13, a third spring frame pad 36 is positioned on the container.
In various embodiments and referring again to fig. 6 and 7, the spring frame pad 32 includes a continuous frame 182. The continuous shelf 182 includes four walls to define four corners 184. For spring frame pad 36b, first comb structure 72 and second comb structure 82 include protrusions 186 that extend around four corners 184.
Claims (10)
1. A film frame conveyor, comprising:
a container;
a lid that forms a closure over the container portion to define an interior chamber;
a spring frame cushion coupled to at least one of the container and the lid, the spring frame including opposing side walls extending in a front/back direction and supporting a main cushion portion, the main cushion portion defining a plurality of registration slots, each of the plurality of registration slots extending in a lateral direction orthogonal to the front/back direction and adapted to catch an outer edge of a film frame to limit movement of the film frame in the front/back direction; and
a first comb structure including a plurality of first comb-shaped protrusions extending from a first one of the opposing sidewalls of the spring cage pad in a vertical direction that is orthogonal to the front/rear direction and orthogonal to the lateral direction, the plurality of first comb-shaped protrusions being spaced apart from one another to define a plurality of first comb-shaped gaps,
wherein adjacent ones of the plurality of first comb-like projections are adapted to engage and receive the outer edge of the film frame, and each of the plurality of first comb-like gaps is defined between adjacent ones of the first comb-like projections of the first comb-like structure, each of the plurality of first comb-like gaps is adapted to catch the outer edge of the film frame to limit movement of the outer edge in the fore/aft direction, and
wherein each of the plurality of registration slots is aligned in the lateral direction with a respective one of the plurality of first comb gaps,
wherein the spring frame cushion is loaded with the film frame transitioning from an undeflected state to a deflected state, wherein in the undeflected state a bottom of one of the registration slots is at an elevational position between a proximal end of the first comb gap and a distal end of the first comb gap, wherein in the deflected state the main cushion portion is deflected such that the bottom of the registration slot is at the same elevational position as the proximal end.
2. The film frame shipper of claim 1, comprising:
a second comb structure including a plurality of second comb-shaped protrusions extending in the vertical direction from a second one of the opposing sidewalls of the spring cage pad, the plurality of second comb-shaped protrusions being spaced apart from one another to define a plurality of second comb-shaped gaps,
wherein adjacent ones of the plurality of second comb-like projections are adapted to engage and receive the outer edge of the film frame, and second ones of the plurality of second comb-like gaps are defined between the adjacent second comb-like projections of the second comb-like structure, the second comb-like gaps being adapted to catch the outer edge of the film frame to limit movement of the outer edge in the fore/aft direction, and
wherein each of the plurality of registration slots is aligned in the lateral direction with a respective one of the plurality of second comb gaps.
3. The film frame shipper of claim 1, wherein the main cushion defines a plurality of through slots, each of the plurality of through slots disposed between adjacent ones of the plurality of registration slots.
4. The film frame shipper of claim 1, comprising
At least one base comb structure disposed on a base of the container, the base comb structure including a plurality of base comb projections extending in the vertical direction from the base of the container into the internal chamber, the base comb structure including a plurality of base comb projections spaced apart from one another to define a plurality of base comb gaps,
wherein adjacent ones of the plurality of base comb projections are adapted to engage and receive the outer edge of the film frame, each of the plurality of base comb gaps is defined between adjacent ones of the plurality of base comb projections, the plurality of base comb gaps are adapted to capture the outer edge of the film frame to limit movement of the outer edge in the fore/aft direction, and
wherein each of the plurality of registration slots of the spring frame pad is in planar alignment with a respective one of the plurality of base comb gaps.
5. The film frame conveyor of claim 4, comprising a registration rail protruding from the base and extending in the fore/aft direction, the registration rail defining a rail height above the base of the container in the vertical direction, wherein a proximal end of each of the plurality of substrate comb gaps defines a gap offset relative to the base that is less than the rail height, and wherein each of the plurality of substrate comb protrusions defines a protrusion height relative to a distal end of the base that is greater than the rail height.
6. The film frame shipper of claim 4, comprising:
at least one side comb structure disposed on a side of the container, the side comb structure including a plurality of side comb projections extending into the interior chamber in the vertical direction, the side comb structure including a plurality of side comb projections spaced apart from one another to define a plurality of side comb gaps,
wherein adjacent ones of the plurality of side comb projections are adapted to engage and receive the outer edge of the film frame, each of the plurality of side comb gaps is defined between adjacent ones of the plurality of side comb projections, each of the plurality of side comb gaps is adapted to catch the outer edge of the film frame to limit movement of the outer edge in the fore/aft direction, and
wherein each of the plurality of registration slots of the spring frame pad is in planar alignment with a respective one of the plurality of side comb gaps.
7. The film frame conveyor of claim 6, wherein at least a portion of the plurality of first comb projections, the plurality of second comb projections, the plurality of base comb projections, and/or the plurality of side comb projections each include a proximal end and a distal end, and define a tapered profile projecting in the lateral direction that is symmetrical about a projection axis extending in the vertical direction, the tapered profile sloping toward the projection axis from the proximal end to the distal end.
8. The film frame shipper of claim 7, wherein at least a portion of the tapered profile is arcuate.
9. The film frame shipper of claim 7, wherein:
each of the plurality of first comb gaps defining a gap depth having a proximal end;
each of the plurality of first comb projections defining a projection height in the vertical direction from the proximal end of an adjacent one of the plurality of first comb gaps to a distal end of an adjacent one of the plurality of first comb projections;
each of the plurality of registration grooves defining a groove depth in the vertical direction relative to an upper surface of the main pad; and is
A ratio of the protrusion height to the groove depth is in a range of 1.5 to 5 and including 1.5 and 5.
10. The film frame conveyor of claim 6, wherein at least a portion of the plurality of first comb gaps, the plurality of second comb gaps, the plurality of base comb gaps, and/or the plurality of side comb gaps each define a minimum gap dimension in the fore/aft direction that is sized to be a close sliding fit with the film frame.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562133131P | 2015-03-13 | 2015-03-13 | |
| US62/133,131 | 2015-03-13 | ||
| PCT/US2016/022355 WO2016149209A1 (en) | 2015-03-13 | 2016-03-14 | Modified spring cushion for film frame shipper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107534006A CN107534006A (en) | 2018-01-02 |
| CN107534006B true CN107534006B (en) | 2020-11-03 |
Family
ID=54852785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680023676.XA Active CN107534006B (en) | 2015-03-13 | 2016-03-14 | Improved spring cushion for film frame conveyor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6523479B2 (en) |
| CN (1) | CN107534006B (en) |
| TW (2) | TWM510539U (en) |
| WO (1) | WO2016149209A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI643285B (en) * | 2018-03-06 | 2018-12-01 | 段睿紘 | Buffer structure |
| CN109003928B (en) * | 2018-07-21 | 2021-03-09 | 江苏德尔科测控技术有限公司 | Silicon wafer bearing device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
| EP1133437A1 (en) * | 1998-07-10 | 2001-09-19 | Fluoroware, Inc. | Cushioned wafer container |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5207324A (en) * | 1991-03-08 | 1993-05-04 | Fluoroware, Inc. | Wafer cushion for shippers |
| JP2586364Y2 (en) * | 1992-12-28 | 1998-12-02 | 住友シチックス株式会社 | Transport wafer case |
| JP3938293B2 (en) * | 2001-05-30 | 2007-06-27 | 信越ポリマー株式会社 | Precision substrate storage container and its holding member |
| US6923325B2 (en) * | 2001-07-12 | 2005-08-02 | Entegris, Inc. | Horizontal cassette |
| JP4181926B2 (en) * | 2003-06-10 | 2008-11-19 | 信越ポリマー株式会社 | Substrate storage container |
| US20070295638A1 (en) * | 2006-06-21 | 2007-12-27 | Vantec Co., Ltd. | Wafer transportable container |
| WO2009131016A1 (en) * | 2008-04-25 | 2009-10-29 | 信越ポリマー株式会社 | Retainer and substrate storage container provided with same retainer |
| EP2544965B1 (en) * | 2010-03-11 | 2019-05-22 | Entegris, Inc. | Thin wafer shipper |
| JP6203819B2 (en) * | 2012-04-09 | 2017-09-27 | インテグリス・インコーポレーテッド | Wafer transport container |
-
2015
- 2015-04-01 TW TW104204915U patent/TWM510539U/en unknown
-
2016
- 2016-03-14 JP JP2017548150A patent/JP6523479B2/en active Active
- 2016-03-14 CN CN201680023676.XA patent/CN107534006B/en active Active
- 2016-03-14 TW TW105107756A patent/TWI693658B/en active
- 2016-03-14 WO PCT/US2016/022355 patent/WO2016149209A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
| EP1133437A1 (en) * | 1998-07-10 | 2001-09-19 | Fluoroware, Inc. | Cushioned wafer container |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107534006A (en) | 2018-01-02 |
| JP6523479B2 (en) | 2019-06-05 |
| TWI693658B (en) | 2020-05-11 |
| TW201703175A (en) | 2017-01-16 |
| JP2018509767A (en) | 2018-04-05 |
| TWM510539U (en) | 2015-10-11 |
| WO2016149209A1 (en) | 2016-09-22 |
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