TWI667814B - Light emitting element, light emitting device and manufacturing method thereof - Google Patents

Light emitting element, light emitting device and manufacturing method thereof Download PDF

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TWI667814B
TWI667814B TW103139149A TW103139149A TWI667814B TW I667814 B TWI667814 B TW I667814B TW 103139149 A TW103139149 A TW 103139149A TW 103139149 A TW103139149 A TW 103139149A TW I667814 B TWI667814 B TW I667814B
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phosphor
phosphor film
emitting element
light
substrate
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TW103139149A
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TW201535800A (en
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傳井美史
阿部譽史
佐藤豐
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日本特殊陶業股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/501Wavelength conversion elements characterised by the materials, e.g. binder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/505Wavelength conversion elements characterised by the shape, e.g. plate or foil
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0041Processes relating to semiconductor body packages relating to wavelength conversion elements

Abstract

提供一種發光元件及發光裝置,其提升耐熱性且能小型化。 Provided are a light-emitting element and a light-emitting device which have improved heat resistance and can be miniaturized.

發光元件10係具備例如配設於基板11的一面上之半導體發光元件12、及配設於基板11的另一面上之螢光體膜13。螢光體膜13係例如於基板11的另一面塗布含有螢光體材料及依水解或氧化而成為氧化矽的氧化矽前驅物等之黏合劑原料的螢光體膜原料,透過在常溫使之反應,或在500℃以下的溫度作熱處理所形成者。 The light emitting element 10 includes, for example, a semiconductor light emitting element 12 arranged on one surface of the substrate 11 and a phosphor film 13 arranged on the other surface of the substrate 11. The phosphor film 13 is, for example, a phosphor film material that is coated on the other side of the substrate 11 with a binder material containing a phosphor material and a silicon oxide precursor that becomes silicon oxide by hydrolysis or oxidation, and is passed through at normal temperature. Formed by reaction or heat treatment at a temperature below 500 ° C.

Description

發光元件、發光裝置及其製造方法 Light emitting element, light emitting device and manufacturing method thereof

本發明係有關一種使用螢光體材料的發光元件、發光裝置及其製造方法。 The present invention relates to a light-emitting element using a phosphor material, a light-emitting device, and a method for manufacturing the same.

在使用螢光體的發光裝置方面,例如,可知悉一種使螢光體分散並配置於環氧樹脂或矽氧樹脂者(例如,參照專利文獻1或專利文獻2)。但是,就此發光裝置而言,具有所謂伴隨LED的高輸出化或LED之發熱使環氧樹脂或矽氧樹脂劣化、變形、剝離而難以謀求高輸出化之問題。關於其解決對策方面,例如開發一種取代環氧樹脂或矽氧樹脂而使螢光體分散於玻璃的發光裝置(例如,參照專利文獻3~專利文獻5)。依據此發光裝置,藉由於分散劑使用無機材料而能提升構造的耐熱性。 As for a light-emitting device using a phosphor, for example, there is known a type in which the phosphor is dispersed and disposed in an epoxy resin or a silicone resin (for example, refer to Patent Document 1 or Patent Document 2). However, this light-emitting device has a problem that it is difficult to achieve high output due to deterioration, deformation, and peeling of the epoxy resin or silicone resin due to the increase in output of the LED or heat generated by the LED. As a countermeasure, for example, a light-emitting device in which a phosphor is dispersed in glass instead of an epoxy resin or a silicone resin has been developed (for example, refer to Patent Documents 3 to 5). According to this light emitting device, the heat resistance of the structure can be improved by using an inorganic material as the dispersant.

先行技術文獻 Advance technical literature 專利文獻 Patent literature

專利文獻1 日本特許第3364229號公報 Patent Document 1 Japanese Patent No. 3364229

專利文獻2 日本特許第3824917號公報 Patent Document 2 Japanese Patent No. 3824917

專利文獻3 日本特開2009-91546號公報 Patent Document 3 Japanese Patent Laid-Open No. 2009-91546

專利文獻4 日本特開2008-143978號公報 Patent Document 4 Japanese Patent Laid-Open No. 2008-143978

專利文獻5 日本特開2008-115223號公報 Patent Document 5 Japanese Patent Laid-Open No. 2008-115223

然而,一般的低熔點玻璃若沒有在實質500℃以上進行加熱則難軟化到能使螢光體分散的程度(參照引用文獻4實施例)。例如,透過添加鉛等之重金屬雖可達低熔點化,惟從環境或對人體影響的觀點考量,其等元素被許可之用途極少。因此,會有依螢光體的不同而性能因熱的影響而劣化的情況之問題。 However, it is difficult to soften a general low-melting glass to such an extent that it can disperse the phosphor unless it is heated at substantially 500 ° C. or higher (see Example of Reference 4). For example, although heavy metals such as lead can be lowered in melting point, from the perspective of the environment or the impact on the human body, there are very few approved uses of these elements. Therefore, there is a problem that the performance may be deteriorated by the influence of heat depending on the phosphor.

又,在使螢光體分散於玻璃的情況,為維持作為母材的玻璃之強度而無法提高螢光體的填充率,伴隨LED的高亮度化,產生所謂超過所需的激發光透射之問題。要抑制此透射時,必須加厚供螢光體分散用的玻璃之厚度。其結果,無法謀求發光裝置的薄型化,又,因玻璃的厚度增加而光透射性降低,再者,亦有散熱受到阻礙等之問題。 In addition, in the case where the phosphor is dispersed in glass, in order to maintain the strength of the glass as a base material, it is not possible to increase the filling rate of the phosphor. With the increase in the brightness of the LED, there is a problem that the excitation light is transmitted more than necessary. . To suppress this transmission, it is necessary to increase the thickness of the glass for phosphor dispersion. As a result, it is not possible to reduce the thickness of the light-emitting device, and the light transmittance is reduced due to an increase in the thickness of the glass. Furthermore, there is a problem that heat dissipation is hindered.

本發明係基於此種問題而完成者,目的在於提供一種可提升耐熱性且小型化之發光元件及發光裝置。 The present invention has been made based on such problems, and an object thereof is to provide a light-emitting element and a light-emitting device which can improve heat resistance and be miniaturized.

本發明的發光元件為,具備配設於基板的一面上之半導體發光元件及配設於基板的另一面上且含有粒子狀的螢光體材料及黏合劑的螢光體膜,螢光體膜係於前述基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成,該螢光體膜原料包含:前述螢光體材料;及含有由依水解或氧化 而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。 The light-emitting element of the present invention includes a semiconductor light-emitting element disposed on one surface of the substrate, and a phosphor film and a phosphor film disposed on the other surface of the substrate and containing a particulate phosphor material and an adhesive. It is formed by coating a phosphor film raw material on the other surface of the substrate, and reacting it at normal temperature or performing heat treatment at a temperature below 500 ° C. The phosphor film raw material includes: the aforementioned phosphor material; Or oxidation At least one kind of adhesive raw material among a group consisting of a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that becomes silicon oxide.

本發明的發光裝置係具備本發明的發光元件。 The light-emitting device of the present invention includes the light-emitting element of the present invention.

本發明的發光元件的製造方法及發光裝置的製造方法為,包含螢光體膜形成步驟,係在一面上形成有半導體發光元件之基板的另一面上,形成含有粒子狀的螢光體材料與黏合劑的螢光體膜,在螢光體膜形成步驟中,於基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。 The method for manufacturing a light-emitting element and the method for manufacturing a light-emitting device according to the present invention include a step of forming a phosphor film, forming a phosphor material containing particles and In the phosphor film of the adhesive, in the phosphor film forming step, the phosphor film material is coated on the other surface of the substrate, and the phosphor film is formed by reacting it at normal temperature or by heat treatment at a temperature below 500 ° C. The phosphor film raw material includes: a particulate phosphor material; and at least one of a group consisting of a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that is converted to silicon oxide by hydrolysis or oxidation. 1 kind of adhesive material.

本發明的其他發光元件的製造方法及發光裝置的製造方法為,包含:於基板的一面上形成半導體發光元件之半導體發光元件形成步驟;及於基板的另一面上形成含有粒子狀的螢光體材料與黏合劑的螢光體膜之螢光體膜形成步驟,在螢光體膜形成步驟中,於基板的另一面塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。 A method of manufacturing another light-emitting element and a method of manufacturing a light-emitting device according to the present invention include: a semiconductor light-emitting element forming step of forming a semiconductor light-emitting element on one surface of a substrate; and forming a phosphor containing particles on the other surface of the substrate The phosphor film forming step of the phosphor film of the material and the adhesive. In the phosphor film forming step, the phosphor film raw material is coated on the other side of the substrate, and reacted at room temperature or at a temperature below 500 ° C. The phosphor film is formed by heat treatment, and the raw material of the phosphor film includes: a granular phosphor material; and a silicon oxide precursor, a silicate compound, silica, and a non-silicon oxide containing silicon oxide by hydrolysis or oxidation. A binder raw material for at least one of the groups composed of crystalline silicon.

依據本發明,因為螢光體膜使用主要由無機材料構成的黏合劑,故能提升對從半導體發光元件產生的熱之耐熱性,可謀求高輸出化及高亮度化。又,因為螢光體膜係塗布包含螢光體材料及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料之螢光體膜原料而形成,故可提高在螢光體膜中之螢光體材料的填充率,可減少螢光體膜的厚度。再者,因為於基板的一面上形成半導體發光元件,於基板的另一面上形成螢光體膜,故能使發光元件及發光裝置更小型化,並且使從螢光體材料產生的熱經由半導體發光元件擴散,能提升散熱性。再加上,由於螢光體膜係在常溫反應或在500℃以下的溫度作熱處理而獲得,故能在低溫下形成,可抑制螢光體材料之特性劣化。 According to the present invention, since the phosphor film uses a binder mainly composed of an inorganic material, the heat resistance to heat generated from a semiconductor light emitting element can be improved, and high output and high brightness can be achieved. In addition, the phosphor film is coated with at least one selected from the group consisting of a phosphor material and a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that are converted to silicon oxide by hydrolysis or oxidation. It is formed by the raw material of the phosphor film of the adhesive material, so the filling rate of the phosphor material in the phosphor film can be increased, and the thickness of the phosphor film can be reduced. Furthermore, since a semiconductor light-emitting element is formed on one surface of the substrate and a phosphor film is formed on the other surface of the substrate, the light-emitting element and the light-emitting device can be miniaturized, and heat generated from the phosphor material can be passed through the semiconductor. Diffusion of light emitting elements can improve heat dissipation. In addition, since the phosphor film is obtained by reaction at normal temperature or by heat treatment at a temperature below 500 ° C, it can be formed at a low temperature, and the deterioration of the characteristics of the phosphor material can be suppressed.

再者,若螢光體材料之一次粒子的平均粒徑設為1μm以上20μm以下,或螢光體膜的表面粗糙度依算術平均粗糙度Ra計而設為10μm以下,或螢光體膜的膜厚分布設為±10%以內,則可抑制色斑、可均一化並使性能穩定化。 In addition, if the average particle diameter of the primary particles of the phosphor material is set to 1 μm or more and 20 μm or less, or the surface roughness of the phosphor film is set to 10 μm or less according to the arithmetic mean roughness Ra meter, or When the film thickness distribution is set to within ± 10%, it is possible to suppress stain, uniformize, and stabilize performance.

再者,若於基板的另一面上形成螢光體膜後,切斷基板而晶片化,則可容易地製造本發明的發光元件及發光裝置,同時能提升製造效率。 Furthermore, if a phosphor film is formed on the other surface of the substrate, and then the substrate is cut to form a wafer, the light-emitting element and the light-emitting device of the present invention can be easily manufactured, and the manufacturing efficiency can be improved.

10‧‧‧發光元件 10‧‧‧Light-emitting element

11‧‧‧基板 11‧‧‧ substrate

12‧‧‧半導體發光元件 12‧‧‧Semiconductor light emitting element

12A、12B‧‧‧電極 12A, 12B‧‧‧electrode

13‧‧‧螢光體膜 13‧‧‧ phosphor film

20‧‧‧發光裝置 20‧‧‧light-emitting device

21‧‧‧配線基板 21‧‧‧wiring board

21A、21B‧‧‧配線 21A, 21B‧‧‧Wiring

22A、22B‧‧‧突塊 22A, 22B‧‧‧

23‧‧‧反射器框 23‧‧‧ reflector frame

圖1係表示本發明的一實施形態的發光元件的構成之圖。 FIG. 1 is a diagram showing a configuration of a light emitting element according to an embodiment of the present invention.

圖2係表示本發明的一實施形態的發光元件的製程之流程圖。 FIG. 2 is a flowchart showing a manufacturing process of a light emitting device according to an embodiment of the present invention.

圖3係表示使用圖1所示的發光元件之發光裝置的構成之圖。 FIG. 3 is a diagram showing a configuration of a light-emitting device using the light-emitting element shown in FIG. 1.

圖4係表示在85℃、85%RH的高溫高濕度環境下的曝露試驗中之亮度的經時變化之特性圖。 FIG. 4 is a characteristic diagram showing a change with time of brightness in an exposure test under a high temperature and high humidity environment of 85 ° C. and 85% RH.

圖5係表示在150℃的乾燥高溫環境下的曝露試驗中之亮度的經時變化之特性圖。 FIG. 5 is a characteristic diagram showing a change with time of brightness in an exposure test under a dry and high-temperature environment at 150 ° C.

圖6係表示在200℃的乾燥高溫環境下的曝露試驗中之亮度的經時變化之特性圖。 FIG. 6 is a characteristic diagram showing a change with time of brightness in an exposure test under a dry and high-temperature environment at 200 ° C.

圖7係表示在乾燥高溫環境下的曝露試驗中之曝露溫度與24小時後的發光亮度之關係的特性圖。 FIG. 7 is a characteristic diagram showing the relationship between the exposure temperature and the luminous brightness after 24 hours in an exposure test in a dry high-temperature environment.

以下,針對本發明的實施形態,參照圖面作詳細說明。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

圖1係表示本發明的一實施形態的發光元件10的構成。此發光元件10具備例如,配設在基板11的一面之半導體發光元件12及配設在基板11的另一面之螢光體膜13。此外,圖中,各構成要素的大小係概念性地表示,並非表示實際的尺寸比例。 FIG. 1 shows a configuration of a light emitting element 10 according to an embodiment of the present invention. This light emitting element 10 includes, for example, a semiconductor light emitting element 12 disposed on one surface of the substrate 11 and a phosphor film 13 disposed on the other surface of the substrate 11. In addition, the size of each component is shown conceptually in the figure, and does not show an actual dimensional ratio.

基板11,例如由形成有半導體發光元件12 的藍寶石晶圓、GaN晶圓、Si晶圓所構成者較佳,例如在400nm至800nm的波段之光透射率越高者越好。又,基板11,例如在使用藍寶石的情況,為使光散射亦可使形成有半導體發光元件12之面的另一面的表面粗糙成毛玻璃狀、緞面狀或浮雕狀。基板11的厚度,例如在藍寶石晶圓方面一般是使用0.2mm以上1.0mm以下者。 The substrate 11 is formed of, for example, a semiconductor light emitting element 12 Sapphire wafers, GaN wafers, and Si wafers are preferred. For example, the higher the light transmittance in the band of 400nm to 800nm, the better. When the substrate 11 is made of sapphire, for example, the surface of the other surface on which the semiconductor light-emitting element 12 is formed may be roughened into a frosted glass shape, a satin shape, or a relief shape to scatter light. The thickness of the substrate 11 is generally, for example, a sapphire wafer of 0.2 mm to 1.0 mm.

此外,基板11可沿用在形成半導體發光元件 12之際所用的形成基板,亦可為與形成基板不同者。例如,可在將半導體發光元件12形成在形成基板後,分離或除去形成基板,或將形成基板的厚度作薄,將半導體發光元件12對與形成基板不同的基板11作配設。 In addition, the substrate 11 can be used to form a semiconductor light emitting element. The formation substrate used in the case of 12 may be different from the formation substrate. For example, after the semiconductor light-emitting element 12 is formed on the formation substrate, the formation substrate is separated or removed, or the thickness of the formation substrate is made thin, and the semiconductor light-emitting element 12 is disposed on a substrate 11 different from the formation substrate.

半導體發光元件12,例如具有將含有發光層的複數個半導體層積層的構造,配設有一對的電極12A、12B。半導體發光元件12例如為LED,且建構成在激發光方面是發出紫外光,藍色光,或綠色光者較佳。其中,半導體發光元件12方面,以發出藍色光者較佳。原因在於能容易獲得白色,並且相對於紫外光會有使周圍的構材劣化等之影響,而藍色光在那樣的影響上較小。此半導體發光元件12,例如以構成基板11之側成為發光面者較佳。 The semiconductor light emitting element 12 has, for example, a structure in which a plurality of semiconductor layers including a light emitting layer are laminated, and a pair of electrodes 12A and 12B are arranged. The semiconductor light emitting element 12 is, for example, an LED, and it is preferable that the semiconductor light emitting element 12 emits ultraviolet light, blue light, or green light in terms of excitation light. Among them, the semiconductor light emitting element 12 is preferably one that emits blue light. The reason is that it is easy to obtain white, and it has the effect of deteriorating the surrounding materials with respect to ultraviolet light, and blue light has less influence on that. This semiconductor light emitting element 12 is preferably a light emitting surface on the side constituting the substrate 11, for example.

螢光體膜13,例如直接配設於基板11的另一面。螢光體膜13,例如含有粒子狀的螢光體材料及黏著此螢光體材料的黏合劑,亦可視需要含有填料。又,螢光體膜13係在基板11的另一面上塗布含有螢光體材 料及黏合劑原料的螢光體膜原料,在常溫使之反應,或在500℃以下的溫度作熱處理而形成者。塗布的方法方面,例如可舉出印刷法、噴霧法、依據分配器的描圖法、或噴射法。其中,較佳為印刷法或噴霧法,更較為印刷法。 The phosphor film 13 is directly disposed on the other surface of the substrate 11, for example. The phosphor film 13, for example, contains a particulate phosphor material and an adhesive to adhere to the phosphor material, and may optionally contain a filler. The phosphor film 13 is coated on the other surface of the substrate 11 with a phosphor-containing material. The raw material of the phosphor film and the raw material of the adhesive are formed by reacting them at room temperature or by heat treatment at a temperature below 500 ° C. As a method of coating, for example, a printing method, a spray method, a drawing method by a dispenser, or a spray method may be mentioned. Among them, a printing method or a spray method is preferable, and a printing method is more preferable.

螢光體材料,例如含有螢光體粒子,亦可於 螢光體粒子的表面形成被覆層。螢光體粒子係例如藉由從半導體發光元件12發光的激發光而發出螢光者,可因應於半導體發光元件12的種類等而選擇。螢光體材料係可使用1種或2種以上的螢光體粒子,在使用複數種的情況,亦可混合使用,又,亦可分成複數層並積層。 Phosphor materials, such as those containing phosphor particles, can also be used in A coating layer is formed on the surface of the phosphor particles. The phosphor particles can be selected according to the type of the semiconductor light-emitting element 12 and the like, for example, if the fluorescent light is emitted by the excitation light emitted from the semiconductor light-emitting element 12. As the phosphor material, one kind or two or more kinds of phosphor particles can be used. When plural kinds are used, they can also be mixed and used, and they can also be divided into multiple layers and laminated.

螢光體粒子方面,例如可舉出 BaMgAl10O17:Eu、ZnS:Ag,Cl、BaAl2S4:Eu或CaMgSi2O6:Eu等之藍色系螢光體;Zn2SiO4:Mn、(Y,Gd)BO3:Tb、ZnS:Cu,Al、(M1)2SiO4:Eu、(M1)(M2)2S:Eu、(M3)3Al5O12:Ce、SiAlON:Eu、CaSiAlON:Eu、(M1)Si2O2N:Eu或(Ba,Sr,Mg)2SiO4:Eu,Mn等之黃色或綠色系螢光體;(M1)3SiO5:Eu或(M1)S:Eu等之黃色、橙色或紅色系螢光體;(Y,Gd)BO3:Eu、Y2O2S:Eu、(M1)2Si5N8:Eu、(M1)AlSiN3:Eu或YPVO4:Eu等之紅色系螢光體。此外,在上述化學式中,M1含有由Ba、Ca、Sr及Mg構成的群當中至少一者,M2含有Ga及Al當中至少一者,M3含有由Y、Gd、Lu及Te構成的群當中至少一者。 Examples of the phosphor particles include blue phosphors such as BaMgAl 10 O 17 : Eu, ZnS: Ag, Cl, BaAl 2 S 4 : Eu, or CaMgSi 2 O 6 : Eu; Zn 2 SiO 4 : Mn, (Y, Gd) BO 3 : Tb, ZnS: Cu, Al, (M1) 2 SiO 4 : Eu, (M1) (M2) 2 S: Eu, (M3) 3 Al 5 O 12 : Ce, SiAlON : Eu, CaSiAlON: Eu, (M1) Si 2 O 2 N: Eu or (Ba, Sr, Mg) 2 SiO 4 : Yellow or green phosphors such as Eu, Mn; (M1) 3 SiO 5 : Eu Or (M1) S: yellow, orange or red phosphors such as Eu; (Y, Gd) BO 3 : Eu, Y 2 O 2 S: Eu, (M1) 2 Si 5 N 8 : Eu, (M1 ) AlSiN 3 : Eu or YPVO 4 : Red-based phosphors such as Eu. In addition, in the above chemical formula, M1 contains at least one of the group consisting of Ba, Ca, Sr, and Mg, M2 contains at least one of Ga and Al, and M3 contains at least one of the group consisting of Y, Gd, Lu, and Te. One.

其中,當考慮螢光體膜13的耐熱性時,螢光 體粒子係以(M3)3Al5O12:Ce、SiAlON:Eu、CaSiAlON:Eu、(M1)Si2O2N:Eu、(M1)2Si5N8:Eu或(M1)AlSiN3:Eu所構成者較佳。M1及M3係如上述。 Wherein, when considering the heat resistance of the phosphor film 13, the phosphor particles to line (M3) 3 Al 5 O 12 : Ce, SiAlON: Eu, CaSiAlON: Eu, (M1) Si 2 O 2 N: Eu, (M1) 2 Si 5 N 8 : Eu or (M1) AlSiN 3 : Eu is preferred. M1 and M3 are as described above.

螢光體粒子的被覆層,例如以主成分是含有 由稀土類氧化物、氧化鋯、氧化鈦、氧化鋅、氧化鋁、釔/鋁/石榴石等之釔與鋁的複合氧化物、氧化鎂、以及MgAl2O4等之鋁及鎂的複合氧化物構成的群當中的至少1種金屬氧化物者較佳。原因在於能提升耐水性及耐紫外光等之特性。其中,以稀土類氧化物或氧化鋯較佳。 稀土類氧化物方面,以含有由釔、釓、鈰及鑭構成的群當中至少1種元素者更佳,又,若使用氧化鋯更好。原因在於可獲得較高的效應,且能抑制成本。 The coating layer of the phosphor particles includes, for example, a composite oxide containing yttrium and aluminum, such as rare earth oxides, zirconia, titanium oxide, zinc oxide, aluminum oxide, yttrium / aluminum, and garnet, and magnesium oxide. And at least one metal oxide in the group consisting of aluminum and magnesium composite oxides such as MgAl 2 O 4 and the like. The reason is to improve the characteristics of water resistance and ultraviolet light resistance. Among them, rare earth oxides or zirconia are preferred. Regarding rare earth oxides, those containing at least one element from the group consisting of yttrium, scandium, cerium, and lanthanum are more preferred, and zirconia is more preferred. The reason is that a higher effect can be obtained and costs can be suppressed.

螢光體材料之一次粒子的平均粒徑,例如以 1μm以上20μm以下較佳。原因在於將平均粒徑設小則可抑制色斑、可均一化。但太小時,有不少螢光體材料本身的光學特性降低的情況,且有不少小於1μm的小粒子會二次凝集而喪失微小化效果之情形,故以1μm以上較佳。 The average particle size of the primary particles of the phosphor material, such as It is preferably 1 μm or more and 20 μm or less. The reason is that the smaller the average particle diameter is, the more the stains can be suppressed and the uniformity can be achieved. However, if it is too small, there are many cases where the optical properties of the phosphor material itself are reduced, and there are many cases where small particles smaller than 1 μm may agglomerate twice and lose the effect of miniaturization, so it is preferably 1 μm or more.

黏合劑係藉由使含有由依水解或氧化而成為 氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料在常溫使之反應,或在500℃以下的溫度作熱處理所獲得者。氧化矽前驅物方面,較佳為例如可舉出以全氫聚矽氮烷、矽酸乙脂、矽酸甲酯作為主成分者。原因在於:此等氧化矽前 驅物容易因常溫或熱處理中之水解或氧化而成為二氧化矽等之氧化矽,可作為黏合劑發揮機能的緣故。此外,黏合劑方面,沒有必要氧化矽前驅物反應而完全成為氧化矽,亦可含有未反應部分或不完全反應部分。 Adhesives are made by hydrolyzing or oxidizing At least one of the binder raw materials of the group consisting of silicon oxide precursors, silicate compounds, silica, and amorphous silicon is reacted at room temperature or obtained by heat treatment at a temperature below 500 ° C. In terms of the silicon oxide precursor, for example, those containing perhydropolysilazane, ethyl silicate, and methyl silicate as main components are preferred. The reason is that before these silicas The flooding material is easily converted to silicon dioxide, such as silicon dioxide, by hydrolysis or oxidation during normal temperature or heat treatment, and can function as an adhesive. In addition, in terms of adhesives, it is not necessary for the silica precursor to react completely to become silica, and it may also contain unreacted portions or incompletely reacted portions.

又,矽酸鹽化合物方面,較佳為例如可舉出 矽酸鈉。矽酸鹽化合物可使用脫水狀態者,亦可使用水合物。矽石或非結晶矽方面,較佳為例如,使用奈米大小的超微粒子粉末,例如,使用一次粒徑的平均粒徑是5nm以上100nm以下的超微粒子粉末,使用5nm以上50nm以下的超微粒子粉末更佳。此等矽酸鹽化合物、矽石或非結晶矽係透過於溶媒溶解或分散並熱處理、乾燥而固形化,可作為黏合劑發揮機能。 In terms of silicate compounds, for example, preferable examples include Sodium silicate. The silicate compound may be used in a dehydrated state or a hydrate. In the case of silica or amorphous silicon, for example, nanometer-sized ultrafine particle powder is preferably used. For example, ultrafine particle powder having an average primary particle diameter of 5 nm to 100 nm is used, and ultrafine particles of 5 nm to 50 nm are used. Powder is better. These silicate compounds, silica or amorphous silicon are dissolved or dispersed in a solvent, heat-treated, dried and solidified, and can function as an adhesive.

黏合劑原料的熱處理溫度,為減少對基板 11、半導體發光元件12及螢光體材料之熱的影響,故以500℃以下較佳,在有必要使熱的影響更小的情況,以300℃以下更佳,若設為200℃以下更好。又,若使黏合劑原料在常溫反應,則因無熱的影響而較佳。因應基板11、半導體發光元件12及螢光體材料的耐熱特性,選擇黏合劑原料的種類,藉以調節使黏合劑原料在常溫反應,或作幾次熱處理者為宜。又,在螢光體材料因熱而容易氧化並劣化的情況,熱處理之際的環境宜設成氮氣環境等之非氧化環境。 Adhesive material heat treatment temperature to reduce substrate 11. The influence of the heat of the semiconductor light-emitting element 12 and the phosphor material, so it is better to be below 500 ° C. When it is necessary to make the heat effect smaller, it is better to be below 300 ° C. If it is set to be below 200 ° C, it is good. In addition, if the raw material of the adhesive is allowed to react at normal temperature, it is preferable because there is no influence of heat. In accordance with the heat resistance characteristics of the substrate 11, the semiconductor light emitting element 12, and the phosphor material, it is appropriate to select the type of the adhesive raw material, and adjust the reaction of the adhesive raw material at room temperature, or perform several heat treatments. In addition, in the case where the phosphor material is easily oxidized and deteriorated due to heat, the environment during the heat treatment should preferably be a non-oxidizing environment such as a nitrogen environment.

填料係例如調整螢光體材料的填充率者,以 由具透光性的無機材料構成者較佳,可舉出氧化矽粒子、氧化鋁粒子或氧化鋯粒子等。更佳為氧化矽粒子, 其形態可為結晶亦可為玻璃。填料的平均粒徑,例如以與螢光體材料相同的1μm至20μm左右較佳。 The filler is, for example, one that adjusts the filling rate of the phosphor material to The light-transmitting inorganic material is preferred, and examples thereof include silica particles, alumina particles, and zirconia particles. More preferably, silicon oxide particles, Its form can be crystalline or glass. The average particle diameter of the filler is preferably, for example, about 1 to 20 μm, which is the same as that of the phosphor material.

螢光體膜13的厚度,例如以10μm以上1mm以下較佳,20μm以上500μm以下更佳。原因在於當太薄時螢光體材料的量變少,難以調色,而太厚時光的散射過度增加使光的吸收顯著而導致難將光取出於外部。螢光體膜13的表面粗糙度,即,螢光體膜13之與基板11反對側的表面的表面粗糙度係以算術平均粗糙度Ra計而為10μm以下較佳,又,螢光體膜13的膜厚分布係以±10%以內較佳。原因在於可抑制色斑、使之均一化、使性能穩定化。螢光體膜13的表面粗糙度或螢光體膜13的膜厚分布亦可例如在形成螢光體膜13後,藉由研磨或研削表面作調整。 The thickness of the phosphor film 13 is preferably, for example, 10 μm or more and 1 mm or less, and more preferably 20 μm or more and 500 μm or less. The reason is that when the thickness is too thin, the amount of phosphor material becomes small and it is difficult to adjust the color, while when the thickness is too thick, the excessive scattering of light increases the absorption of light and makes it difficult to take the light out. The surface roughness of the phosphor film 13, that is, the surface roughness of the surface of the phosphor film 13 on the side opposite to the substrate 11 is preferably 10 μm or less in terms of the arithmetic average roughness Ra. Furthermore, the phosphor film The film thickness distribution of 13 is preferably within ± 10%. The reason is that the stain can be suppressed, uniformized, and performance stabilized. The surface roughness of the phosphor film 13 or the film thickness distribution of the phosphor film 13 can also be adjusted by, for example, grinding or grinding the surface after the phosphor film 13 is formed.

此發光元件10,例如可按以下那樣來製造。圖2係表示此發光元件10的一製程例之流程圖。首先,例如,準備一可形成複數個發光元件10之大小的基板11,於基板11的一面上形成複數個半導體發光元件(步驟S101;半導體發光元件形成步驟)。那時,半導體發光元件12亦可直接形成於基板11的一面上,又,在形成於與基板11不同的形成基板上之後,分離或除去形成基板,或將形成基板的厚度作薄,將半導體發光元件12配設在基板11的一面上亦可。 This light-emitting element 10 can be manufactured, for example, as follows. FIG. 2 is a flowchart showing an example of a process of the light emitting device 10. First, for example, a substrate 11 having a size capable of forming a plurality of light-emitting elements 10 is prepared, and a plurality of semiconductor light-emitting elements are formed on one surface of the substrate 11 (step S101; semiconductor light-emitting element forming step). At that time, the semiconductor light emitting element 12 may also be directly formed on one side of the substrate 11, and after being formed on a formation substrate different from the substrate 11, the formation substrate is separated or removed, or the thickness of the formation substrate is made thin, and the semiconductor The light emitting element 12 may be disposed on one surface of the substrate 11.

其次,例如,於形成有半導體發光元件12之基板11的另一面上形成螢光體膜13(步驟S102;螢光體膜形成步驟)。具體言之,首先,於基板11的另一面 上塗布含有螢光體材料與黏合劑原料的螢光體膜原料。 例如,若為使用印刷法的情況,則將1種或2種以上的螢光體材料、黏合劑原料、稀釋溶媒、填料(視需要)混合而作成膏狀的螢光體膜原料,再以印刷法,例如網版印刷塗布於基板11的另一面上。若藉由網版印刷塗布,則可提高螢光體膜13之面內的膜厚分布之均一性,故較佳。又,例如,若為使用噴霧法的情況,則將1種或2種以上的螢光體材料、黏合劑原料、稀釋溶媒、填料(視需要)混合而作成漿狀的螢光體膜原料,使用噴槍連同噴霧氣體一起塗布於基板11的另一面上。調節噴霧的噴霧直徑,使噴槍以一定的速度一邊橫動一邊均一地移動,藉此可提高螢光體膜13之面內的膜厚分布之均一性,故較佳。塗布亦可反複進行直到成為必要的膜厚為止。 Next, for example, a phosphor film 13 is formed on the other surface of the substrate 11 on which the semiconductor light emitting element 12 is formed (step S102; a phosphor film forming step). Specifically, first, on the other side of the substrate 11 A phosphor film material containing a phosphor material and a binder material is applied thereon. For example, if the printing method is used, one or two or more phosphor materials, adhesive materials, diluent solvents, and fillers (if necessary) are mixed to form a paste-like phosphor film material, and then The printing method is, for example, screen printing applied to the other surface of the substrate 11. If applied by screen printing, the uniformity of the film thickness distribution in the surface of the phosphor film 13 can be improved, which is preferable. For example, if the spray method is used, one or two or more phosphor materials, a binder raw material, a diluent solvent, and a filler (if necessary) are mixed to form a slurry-like phosphor film raw material. A spray gun is used to coat the other surface of the substrate 11 together with the spray gas. It is preferable to adjust the spray diameter of the spray to make the spray gun move uniformly while traversing at a certain speed, thereby improving the uniformity of the film thickness distribution in the plane of the phosphor film 13 and is therefore preferred. The application may be repeated until a necessary film thickness is obtained.

此外,由於噴霧法是在局部排氣裝置內進 行,所以在噴霧之際會有螢光體膜原料被排氣而導致產量不佳,相較之下網版印刷法沒有那樣的問題,能提高螢光體膜原料之利用效率,故較佳。又,網版印刷法為,在基板側不作遮掩,藉由網版側的遮罩反複進行相同的圖案化,更能僅塗布必要的部位,不會附著於不必要的部分,亦無朝治具等附著,故治具可連續使用,能提高量產時的生產性,故較佳。 In addition, because the spray method OK, so during the spraying, there will be exhaust of the phosphor film raw material, resulting in poor yield. In contrast, screen printing method does not have such a problem, and it can improve the utilization efficiency of the phosphor film raw material, so it is better. Moreover, the screen printing method does not cover the substrate side, and repeats the same patterning by using the mask on the screen side, so that only the necessary parts can be coated, it will not be attached to unnecessary parts, and there is no treatment. Since the fixture is attached, the fixture can be used continuously, which can improve the productivity during mass production, so it is better.

其次,例如,使已塗布的螢光體膜原料乾燥 以除去稀釋溶媒。在那時,視需要在500℃以下,更佳為300℃以下,再者於200℃以下的範圍加熱亦可。藉此,黏合劑原料依常溫或熱處理而反應,或依熱處理而 固形化。此外,螢光體膜13可形成在基板11的全面上,又,亦可對應於配置在一面上的複數個半導體發光元件12進行圖案化而形成。接著,將配設有半導體發光元件12及螢光體膜13的基板11,例如,按半導體發光元件12切斷而晶片化(步驟S103;晶片化步驟)。藉此可獲得發光元件10。 Next, for example, the coated phosphor film material is dried. To remove the dilution vehicle. At that time, if necessary, the temperature may be 500 ° C or lower, more preferably 300 ° C or lower, and heating may be performed in a range of 200 ° C or lower. Thus, the raw material of the adhesive reacts at normal temperature or heat treatment, or Solidification. In addition, the phosphor film 13 may be formed on the entire surface of the substrate 11, or may be formed by patterning a plurality of semiconductor light emitting elements 12 arranged on one surface. Next, the substrate 11 on which the semiconductor light-emitting element 12 and the phosphor film 13 are arranged is cut into wafers, for example, by cutting the semiconductor light-emitting element 12 (step S103; wafer formation step). Thereby, the light emitting element 10 can be obtained.

此外,在上述發光元件10的製程中,雖針對 於基板11的一面上形成半導體發光元件12後,在基板11的另一面上形成螢光體膜13的情況作說明,但亦可於基板11的另一面上形成螢光體膜13後,在基板11的一面上形成半導體發光元件12。 In addition, in the manufacturing process of the light-emitting element 10 described above, although After the semiconductor light-emitting element 12 is formed on one surface of the substrate 11, the case where the phosphor film 13 is formed on the other surface of the substrate 11 will be described. However, after the phosphor film 13 is formed on the other surface of the substrate 11, A semiconductor light emitting element 12 is formed on one surface of the substrate 11.

圖3係顯示使用此螢光元件10的發光裝置 20之一構成例。此發光裝置20為配線基板21之上搭載有發光元件10。在配線基板21之上,例如配設有配線21A、21B。發光元件10為,例如將半導體發光元件12設為配線基板21之側,使電極12A、12B與配線21A、21B對應,藉由突塊22A、22B等將倒裝晶片安裝於配線基板21之上。在發光元件10的周圍形成例如反射器框23。發光元件10的周圍亦可不配設密封劑。原因是若以樹脂的密封劑包覆時會導致散熱性降低。又,雖無圖示,但在發光元件10的側部亦可配置密封劑,保護配線基板21上的配線。再者,雖無圖示,但亦能以覆蓋發光元件10的上面之方式配置密封劑。原因在於可減輕因來自外部的水分或有害的氣體直接接觸所導致的影響。此外,此發光裝置20,例如可使用按上述方式製造的發光元件10來製造。 FIG. 3 shows a light-emitting device using the fluorescent element 10 One of 20 constitution examples. In this light-emitting device 20, a light-emitting element 10 is mounted on a wiring substrate 21. On the wiring substrate 21, for example, wirings 21A and 21B are arranged. For the light-emitting element 10, for example, the semiconductor light-emitting element 12 is set on the side of the wiring substrate 21, the electrodes 12A, 12B correspond to the wiring 21A, 21B, and the flip chip is mounted on the wiring substrate 21 by the bumps 22A, 22B, and the like . A reflector frame 23 is formed around the light emitting element 10, for example. The sealant may not be provided around the light emitting element 10. The reason is that when the resin is coated with a sealant, the heat dissipation is reduced. Although not shown, a sealant may be disposed on the side of the light emitting element 10 to protect the wiring on the wiring substrate 21. Although not shown, a sealant may be disposed so as to cover the upper surface of the light emitting element 10. The reason is that the influence caused by direct contact with moisture or harmful gas from the outside can be reduced. The light-emitting device 20 can be manufactured using, for example, the light-emitting element 10 manufactured as described above.

如此,依據本實施形態,由於螢光體膜13 主要使用由無機材料構成的黏合劑,故能提升對從半導體發光元件12產生的熱之耐熱性,可謀求高輸出化及高亮度化。又,由於螢光體膜13係塗布包含螢光體材料及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料之螢光體膜原料而形成,故可提高在螢光體膜13中之螢光體材料的填充率,可減少螢光體膜13的厚度。再者,由於是在基板11的一面上形成半導體發光元件12,在基板11的另一面上形成螢光體膜13,故可將發光元件10及發光裝置20更小型化,並將從螢光體材料產生的熱經由半導體發光元件12擴散,能提升散熱性。再加上,由於螢光體膜13可藉由在常溫反應或在500℃以下的溫度作熱處理而獲得,故能在低溫形成,能抑制螢光體材料之特性劣化。 Thus, according to this embodiment, since the phosphor film 13 Since an adhesive mainly composed of an inorganic material is used, heat resistance to heat generated from the semiconductor light emitting element 12 can be improved, and high output and high brightness can be achieved. In addition, the phosphor film 13 is coated with at least one selected from the group consisting of a phosphor material and a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that are converted to silicon oxide by hydrolysis or oxidation. It is formed from the raw material of the phosphor film of the adhesive material, so the filling rate of the phosphor material in the phosphor film 13 can be increased, and the thickness of the phosphor film 13 can be reduced. Furthermore, since the semiconductor light-emitting element 12 is formed on one surface of the substrate 11 and the phosphor film 13 is formed on the other surface of the substrate 11, the light-emitting element 10 and the light-emitting device 20 can be further miniaturized, and The heat generated by the bulk material is diffused through the semiconductor light emitting element 12, which can improve heat dissipation. In addition, since the phosphor film 13 can be obtained by reaction at normal temperature or heat treatment at a temperature of 500 ° C. or less, it can be formed at a low temperature, and the deterioration of the characteristics of the phosphor material can be suppressed.

再者,若螢光體材料之一次粒子的平均粒徑 設為1μm以上20μm以下,或螢光體膜13的表面粗糙度依算術平均粗糙度Ra計而設為10μm以下,或螢光體膜13的膜厚分布設為±10%以內,則可抑制色斑、可均一化並使性能穩定化。 Furthermore, if the average particle diameter of the primary particles of the phosphor material is It can be suppressed if it is 1 μm or more and 20 μm or less, or the surface roughness of the phosphor film 13 is set to 10 μm or less according to the arithmetic mean roughness Ra meter, or the film thickness distribution of the phosphor film 13 is within ± 10%. Color spots, can be uniformized and stabilize performance.

再加上,若於基板11的另一面上形成螢光體 膜13後,切斷基板11而晶片化,則可容易地製造本實施形態的發光元件10及發光裝置20,同時能提升製造效率。 In addition, if a phosphor is formed on the other surface of the substrate 11 After the film 13 is cut and the substrate 11 is cut into wafers, the light-emitting element 10 and the light-emitting device 20 of this embodiment can be easily manufactured, and the manufacturing efficiency can be improved.

實施例Examples (實施例1-1~1-4) (Examples 1-1 to 1-4)

首先,準備在一面上形成有半導體發光元件12的基板11。半導體發光元件12使用由氮化物系半導體構成的藍色LED,基板11使用厚度為0.6mm的藍寶石基板。 First, a substrate 11 having a semiconductor light emitting element 12 formed on one surface is prepared. As the semiconductor light emitting element 12, a blue LED made of a nitride-based semiconductor is used, and as the substrate 11, a sapphire substrate having a thickness of 0.6 mm is used.

其次,混合螢光體材料、黏合劑原料、填料及稀釋溶媒,製造螢光體膜原料。螢光體材料方面,使用一次粒子的平均粒徑分別是15μm左右的由Y3Al5O12:Ce構成的螢光體粒子與由CaAlSiN3:Eu構成的螢光體粒子。黏合劑原料方面,在實施例1-1使用矽酸乙脂,在實施例1-2使用全氫聚矽氮烷,在實施例1-3使用矽酸鈉的水合物,或在實施例1-4使用藉溶劑使矽石或非結晶矽的超微粒子粉末懸浮化者。填料方面,使用平均粒徑為15μm左右的二氧化矽粒子。稀釋溶媒方面,使用萜品醇。 Next, a phosphor material, a binder material, a filler, and a diluent are mixed to produce a phosphor film material. For the phosphor material, phosphor particles composed of Y 3 Al 5 O 12 : Ce and phosphor particles composed of CaAlSiN 3 : Eu, each having an average particle diameter of about 15 μm, were used. In terms of binder raw materials, ethyl silicate was used in Example 1-1, perhydropolysilazane was used in Example 1-2, sodium silicate hydrate was used in Example 1-3, or Example 1 -4 Suspended ultrafine particles of silica or amorphous silicon by solvent. For the filler, silica particles having an average particle diameter of about 15 μm are used. For dilution of the solvent, terpineol was used.

接著,於基板11的另一面上印刷所製造的螢光體膜原料而塗布成必要的厚度。之後,在150℃使之乾燥,以除去稀釋溶媒。藉此,按各實施例獲得於基板11的另一面上形成有厚度約80μm的螢光體膜13之發白色光的發光元件10。經測定所製造的螢光體膜13的表面粗糙度後,算術平均粗糙度Ra為10μm以下。經測定螢光體膜13的膜厚分布後,為±10%以內。又,針對所製造的各實施例之發光元件10進行通電,進行發光試驗的結果,均獲得良好的白色發光。 Next, the manufactured phosphor film material is printed on the other surface of the substrate 11 and applied to a necessary thickness. After that, it was dried at 150 ° C to remove the dilution solvent. As a result, a white light-emitting light-emitting element 10 having a phosphor film 13 having a thickness of about 80 μm formed on the other surface of the substrate 11 was obtained according to each embodiment. After the surface roughness of the manufactured phosphor film 13 was measured, the arithmetic average roughness Ra was 10 μm or less. The thickness distribution of the phosphor film 13 was measured to be within ± 10%. In addition, when the light-emitting element 10 of each of the manufactured examples was energized and a light-emitting test was performed, good white light emission was obtained.

(實施例2-1~2-33,比較例2-1~2-4) (Examples 2-1 to 2-33, Comparative Examples 2-1 to 2-4)

首先,混合螢光體材料與黏合劑原料,視情況混合稀釋溶媒、填料而製造螢光體膜原料。表1~4顯示各實施例及各比較例中的螢光體材料之螢光體粒子的材質/螢光體粒子的平均粒徑(粒徑)/添加量,填料的材質/平均粒徑(粒徑)/添加量,黏合劑原料的材質/添加量。此外,螢光體材料方面,使用螢光體材料A與螢光體材料B兩者,或任一者。稀釋溶媒方面,使用α-萜品醇。 First, a phosphor material and a binder material are mixed, and a solvent and a filler are mixed and diluted to produce a phosphor film material as appropriate. Tables 1 to 4 show the material of the phosphor particles / average particle diameter (particle diameter) / addition amount of the phosphor particles, the material of the filler / average particle diameter ( Particle size) / addition amount, material of the adhesive raw material / addition amount. In addition, as for the phosphor material, both of the phosphor material A and the phosphor material B, or any of them are used. For the dilution solvent, alpha-terpineol was used.

其次,在由100mm平方的藍寶石板構成的基板11的另一面上塗布所製造的螢光體膜原料,在熱處理或室溫處理,形成既定厚度的螢光體膜13後,於基板11的一面上形成半導體發光元件12,獲得發光元件10。表2、4顯示各實施例及各比較例中的螢光體膜原料的塗布法、熱處理溫度、螢光體膜13的平均膜厚、螢光體膜13的膜厚分布及螢光體膜13的算術平均粗糙度Ra。表2、4記載所說的塗布法之印刷,具體來說是網版印刷。 Next, the manufactured phosphor film material is coated on the other surface of the substrate 11 made of a 100 mm square sapphire plate, and then processed by heat treatment or room temperature to form a phosphor film 13 of a predetermined thickness, and then on one surface of the substrate 11 A semiconductor light emitting element 12 is formed thereon, and a light emitting element 10 is obtained. Tables 2 and 4 show the coating method, the heat treatment temperature, the average film thickness of the phosphor film 13, the film thickness distribution of the phosphor film 13, and the phosphor film in each example and each comparative example. The arithmetic mean roughness Ra of 13. Tables 2 and 4 describe the printing by the coating method, specifically, screen printing.

此外,螢光體膜13的膜厚之測定係事前測定基板11的厚度,測定已形成螢光體膜13後的厚度,將其差設為膜厚。平均膜厚係針對100mm平方的基板11的縱5列、橫5行共計25點作測定,將其膜厚的平均值設為平均膜厚。又,螢光體膜13的膜厚分布係按如次的計算式算出。此外,最大膜厚為所測定的25點的膜厚中之最大值,最小膜厚為所測定的25點的膜厚中之最小值。 The measurement of the film thickness of the phosphor film 13 is performed by measuring the thickness of the substrate 11 in advance, measuring the thickness after the phosphor film 13 has been formed, and setting the difference as the film thickness. The average film thickness was measured for a total of 25 points in 5 columns and 5 rows of the substrate 11 with a square of 100 mm square. The average value of the film thickness was defined as the average film thickness. The film thickness distribution of the phosphor film 13 is calculated by the following calculation formula. In addition, the maximum film thickness is the maximum value among the film thicknesses measured at 25 points, and the minimum film thickness is the minimum value among the film thicknesses measured at 25 points.

膜厚分布(%)={(最大膜厚-最小膜厚)/(最大膜厚+最小膜厚)}×100 Film thickness distribution (%) = ((maximum film thickness-minimum film thickness) / (maximum film thickness + minimum film thickness)) × 100

螢光體膜13的算術平均粗糙度Ra係藉由觸針式表面粗糙度測定器作測定。 The arithmetic average roughness Ra of the phosphor film 13 is measured by a stylus-type surface roughness measuring device.

如表1、2所示,依據將螢光體粒子及填料的平均粒徑設為20μm以下的實施例2-1~2-33,作成螢光體膜13的膜厚分布在±10%以內,算術平均粗糙度Ra為10μm以下。 As shown in Tables 1 and 2, according to Examples 2-1 to 2-33 in which the average particle diameter of the phosphor particles and the filler is 20 μm or less, the film thickness distribution of the phosphor film 13 is made within ± 10%. The arithmetic mean roughness Ra is 10 μm or less.

針對在各實施例及各比較例所製造的螢光體膜13,調查初期特性的初期發光亮度。又,在高溫高濕試驗方面,進行在85℃、85%RH的高溫高濕度環境下之曝露試驗,調查經過2000小時後的發光亮度之降低率。再者,在乾燥高溫試驗方面,進行在150℃或200℃的乾燥高溫環境下之曝露試驗,調查經過2000小時後的發光亮度之降低率。所獲得之結果顯示於表5、6。表5、6中,初期特性的發光亮度係實施例2-27的發光亮度設為100的情況之相對發光亮度。高溫高濕試驗及乾燥高溫試驗中的發光亮度之降低率係來自於各實施例及各比較例中的初期特性的發光亮度之降低率。 Regarding the phosphor film 13 manufactured in each example and each comparative example, the initial emission brightness of the initial characteristics was investigated. In the high-temperature and high-humidity test, an exposure test was performed in a high-temperature and high-humidity environment at 85 ° C and 85% RH, and the reduction rate of the luminous brightness after 2000 hours was investigated. Furthermore, in the dry high temperature test, an exposure test was performed in a dry high temperature environment at 150 ° C or 200 ° C, and the reduction rate of the luminous brightness after 2000 hours was investigated. The obtained results are shown in Tables 5 and 6. In Tables 5 and 6, the light emission luminance of the initial characteristics is the relative light emission luminance when the light emission luminance of Example 2-27 is set to 100. The reduction rate of the luminous brightness in the high-temperature and high-humidity test and the drying high-temperature test is the reduction rate of the luminous brightness derived from the initial characteristics in each Example and each Comparative Example.

又,所獲得之結果當中的實施例2-1及比較例2-1的結果顯示於圖4~6。圖4係在85℃、85%RH的高溫高濕度環境下之曝露試驗的結果,圖5係在150℃的乾燥高溫環境下之曝露試驗的結果,圖6係在200℃ 的乾燥高溫環境下之曝露試驗的結果。圖4至圖6中的縱軸係各個初期亮度設為100的情況之相對亮度值。 The results of Example 2-1 and Comparative Example 2-1 among the obtained results are shown in FIGS. 4 to 6. Figure 4 shows the results of the exposure test in a high-temperature and high-humidity environment at 85 ° C and 85% RH. Figure 5 shows the results of the exposure test in a dry and high-temperature environment at 150 ° C. Figure 6 shows the results at 200 ° C. Results of exposure tests in dry, high-temperature environments. The relative brightness values in the case where the initial brightness of each of the vertical axis systems in FIG. 4 to FIG. 6 is set to 100.

再者,在大氣烘箱中加熱實施例2-1~2-4 及比較例2-1的螢光體膜13,進行100℃至500℃為止的乾燥高溫環境曝露試驗,調查亮度的經時變化。又,由於在超過200℃的高溫領域,會有螢光體膜13破壞等之可能性,故亦同時進行以目視確認外觀。各溫度的曝露時間設為24小時。所獲得之結果當中的實施例2-1及比較例2-1的結果顯示於圖7。圖7中的縱軸係將各個初期亮度設為100的情況之相對亮度值。此外,雖無圖示,但關於實施例2-2~2-4,亦會獲得與實施例2-1同樣的結果。 Furthermore, Examples 2-1 to 2-4 were heated in an atmospheric oven. And the phosphor film 13 of Comparative Example 2-1 was subjected to a dry high-temperature environment exposure test at 100 ° C to 500 ° C, and the change with time in brightness was investigated. In addition, since the phosphor film 13 may be broken or the like in a high-temperature region exceeding 200 ° C., the appearance is also checked visually at the same time. The exposure time at each temperature was set to 24 hours. Among the obtained results, the results of Example 2-1 and Comparative Example 2-1 are shown in FIG. 7. The vertical axis in FIG. 7 is a relative brightness value when each initial brightness is set to 100. In addition, although not shown in the drawings, the same results as in Example 2-1 were obtained in Examples 2-2 to 2-4.

如表5、6所示,依據本實施例,初期特性的相對發光亮度係80%以上,但在550℃以上且已熱處理的比較例2-2~2-4中,低到70%以下。 As shown in Tables 5 and 6, according to this embodiment, the relative luminous brightness of the initial characteristics is 80% or more, but in Comparative Examples 2-2 to 2-4 that have been heat-treated at 550 ° C or higher, it is as low as 70% or less.

又,如表5、6及圖4~6所示,在使用矽氧樹脂的比較例2-1中,高溫高濕試驗中的發光亮度降低率為15%,150℃的高溫乾燥試驗中的發光亮度降低率為12%,200℃的乾燥高溫試驗中,螢光體膜在1200小時後剝離,1000小時後的發光亮度降低率為33%。相對地,依據本實施例,在高溫高濕試驗、150℃的高溫乾燥試驗及200℃的乾燥高溫試驗任一者,發光亮度降低率均大幅地改善為7%以下。 In addition, as shown in Tables 5, 6 and FIGS. 4 to 6, in Comparative Example 2-1 using a silicone resin, the reduction rate of luminous brightness in the high-temperature and high-humidity test was 15%. The reduction rate of luminous brightness was 12%. In a dry high-temperature test at 200 ° C, the phosphor film was peeled off after 1200 hours, and the reduction rate of luminous brightness after 1000 hours was 33%. In contrast, according to this embodiment, in any one of the high-temperature and high-humidity test, the high-temperature drying test at 150 ° C, and the high-temperature drying test at 200 ° C, the reduction rate of the luminous brightness was significantly improved to 7% or less.

再者,如圖7所示,在使用矽氧樹脂的比較例2-1中,亮度維持率隨著溫度變高而降低,螢光體膜在300℃以上會因為熱所導致的化學變化而成粉碎剝離。相對地,實施例3-1~3-4中,無外觀上的變化,亦未見亮度維持率之降低。 In addition, as shown in FIG. 7, in Comparative Example 2-1 in which a silicone resin was used, the brightness maintenance ratio decreased as the temperature became higher, and the phosphor film was subjected to chemical changes due to heat at temperatures above 300 ° C. Into smash and peel. In contrast, in Examples 3-1 to 3-4, there was no change in appearance and no decrease in brightness maintenance rate was seen.

再加上,如表1、2、5所示,相較於螢光體粒子的平均粒徑大於20μm、螢光體膜13的膜厚分布大於±10%、算術平均粗糙度Ra大於10μm的實施例2-34~2-36,若依據螢光體粒子及填料的平均粒徑設為 20μm以下、螢光體膜13的膜厚分布設為±10%以內、算術平均粗糙度Ra設為10μm以下的實施例2-1~2-33,則是提高了初期特性的相對發光亮度。 In addition, as shown in Tables 1, 2, and 5, compared with the average particle diameter of the phosphor particles greater than 20 μm, the film thickness distribution of the phosphor film 13 is greater than ± 10%, and the arithmetic average roughness Ra is greater than 10 μm. In Examples 2-34 to 2-36, if the average particle diameter of the phosphor particles and the filler is set as Examples 2-1 to 2-33 in which the thickness of the phosphor film 13 is 20 μm or less, the film thickness distribution of the phosphor film 13 is within ± 10%, and the arithmetic mean roughness Ra is 10 μm or less, the relative emission luminance of the initial characteristics is improved.

(實施例3-1、3-2) (Examples 3-1, 3-2)

首先,混合螢光體材料、黏合劑原料、填料及稀釋溶媒,製造螢光體膜原料。表7、8顯示各實施例中的螢光體材料的螢光體粒子的材質/螢光體粒子的平均粒徑(粒徑)/添加量,填料的材質/平均粒徑(粒徑)/添加量,黏合劑原料的材質/添加量。稀釋溶媒方面使用α-萜品醇。其次,在由100mm平方的藍寶石板構成的基板11的另一面上藉噴霧法或刷毛塗布所製造的螢光體膜原料,藉熱處理或在室溫處理而形成既定厚度的螢光體膜13。表8顯示各實施例中的螢光體膜原料的塗布法、熱處理溫度、螢光體膜13的平均膜厚、螢光體膜13的膜厚分布、及螢光體膜13的算術平均粗糙度Ra。表8記載所說的塗布法之印刷,具體來說是網版印刷。此外,表7、8亦一併顯示實施例2-1的值。 First, a phosphor material, a binder material, a filler, and a diluent are mixed to produce a phosphor film material. Tables 7 and 8 show the material of the phosphor particles of the phosphor material in each example / the average particle diameter (particle diameter) of the phosphor particles / added amount, the material of the filler / average particle diameter (particle diameter) / Adding amount, material / adding amount of adhesive raw material. For the dilution solvent, alpha-terpineol was used. Next, on the other surface of the substrate 11 composed of a 100 mm square sapphire plate, a phosphor film material manufactured by spraying or brush coating is formed, and then a phosphor film 13 having a predetermined thickness is formed by heat treatment or processing at room temperature. Table 8 shows the coating method, the heat treatment temperature, the average film thickness of the phosphor film 13, the film thickness distribution of the phosphor film 13, and the arithmetic average roughness of the phosphor film 13 in each example. Degrees Ra. Table 8 describes the printing by the coating method, specifically, screen printing. Tables 7 and 8 also show the values of Example 2-1.

如表7、8所示,比起藉由印刷法塗布的實施 例2-1,在以噴霧法或刷毛塗布的實施例3-1、3-2中,螢光體膜13的膜厚分布及算術平均粗糙度Ra変大,初期特性的相對發光亮度降低。即,得知若螢光體膜13以印刷法塗布則較佳。 As shown in Tables 7 and 8, compared with the application by printing method, In Example 2-1, in Examples 3-1 and 3-2 that were applied by a spray method or a bristle, the film thickness distribution and arithmetic mean roughness Ra of the phosphor film 13 were large, and the relative luminous brightness of the initial characteristics was reduced. That is, it was found that it is preferable that the phosphor film 13 is applied by a printing method.

以上,已舉出實施形態說明本發明,本發明 不受限於上述實施形態,可為各種變形。例如,在上述實施形態中,雖已就發光元件10及發光裝置20的構造作具體說明,但亦可建構成具有其他構造。 The present invention has been described with reference to the embodiments. The present invention It is not limited to the above-mentioned embodiment, and various modifications are possible. For example, although the structures of the light-emitting element 10 and the light-emitting device 20 have been specifically described in the above embodiment, other structures may be constructed.

又,在上述實施形態中,雖已針對在基板11 的他面上形成含有1種或2種以上的螢光體材料之螢光體膜13的情況作說明,但亦可為不混用2種螢光體材料而是在基板11的他面上積層形成含有不同螢光體材料的螢光體膜。 Moreover, in the above-mentioned embodiment, The case where a phosphor film 13 containing one or more phosphor materials is formed on the other surface will be described, but it is also possible to laminate the other surface of the substrate 11 without mixing the two phosphor materials. Forming a phosphor film containing different phosphor materials.

再者,在上述實施形態中,雖已針對半導體 發光元件12是使用LED的情況作說明,但亦可為使用雷射發光二極體等之其他半導體發光元件。特別是,依據本發明,能謀求高輸出化,故可適當使用於需高輸出的用途,例如雷射投影機、LED頭燈、或雷射頭燈。 Moreover, in the above-mentioned embodiment, although the semiconductor The light-emitting element 12 is described using a LED, but may be another semiconductor light-emitting element using a laser light-emitting diode or the like. In particular, according to the present invention, since high output can be achieved, it can be suitably used for applications requiring high output, such as laser projectors, LED headlights, or laser headlights.

[產業上可利用性][Industrial availability]

可使用於採用LED或雷射發光二極體等之半導體發光元件的發光元件及發光裝置。 It can be used in light-emitting elements and light-emitting devices using semiconductor light-emitting elements such as LEDs or laser light-emitting diodes.

Claims (11)

一種發光元件,其特徵為具備:配設於基板的一面上之半導體發光元件;及配設於前述基板的另一面上且含有粒子狀的螢光體材料及黏合劑的螢光體膜,前述螢光體膜係於前述基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成,且含有前述螢光體材料中所含之螢光體粒子與氧化矽,該螢光體膜原料包含:前述螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。A light-emitting element, comprising: a semiconductor light-emitting element disposed on one surface of a substrate; and a phosphor film disposed on the other surface of the substrate and containing a particulate phosphor material and an adhesive. The phosphor film is formed by coating a phosphor film material on the other side of the substrate, and reacting it at room temperature or performing heat treatment at a temperature below 500 ° C, and contains the phosphor contained in the phosphor material. Particles and silicon oxide, and the raw material of the phosphor film includes: the aforementioned phosphor material; and a group consisting of a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that become silicon oxide by hydrolysis or oxidation At least one of these is a binder material. 如請求項1之發光元件,其中前述螢光體材料之一次粒子的平均粒徑為1μm以上20μm以下。The light-emitting element according to claim 1, wherein the average particle diameter of the primary particles of the phosphor material is 1 μm or more and 20 μm or less. 如請求項1之發光元件,其中前述螢光體膜的表面粗糙度係依算術平均粗糙度Ra計而為10μm以下。The light-emitting element according to claim 1, wherein the surface roughness of the phosphor film is 10 μm or less based on the arithmetic average roughness Ra. 如請求項1之發光元件,其中前述螢光體膜的膜厚分布為±10%以內。For example, the light-emitting element of claim 1, wherein the thickness distribution of the phosphor film is within ± 10%. 一種發光裝置,其特徵為具備如請求項1至4中任一項之發光元件。A light-emitting device comprising the light-emitting element according to any one of claims 1 to 4. 一種發光元件的製造方法,其特徵為包含螢光體膜形成步驟,其係在一面上形成有半導體發光元件之基板的另一面上,形成含有粒子狀的螢光體材料與黏合劑的螢光體膜,在前述螢光體膜形成步驟中,於基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜含有前述螢光體材料中所含之螢光體粒子與氧化矽;該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。A method for manufacturing a light-emitting element, comprising a step of forming a phosphor film, which is formed on one side of a substrate on which a semiconductor light-emitting element is formed on the other side to form a fluorescent light containing a particulate fluorescent material and a binder. For a body film, in the foregoing phosphor film forming step, a phosphor film material is coated on the other surface of the substrate, and reacted at room temperature or heat-treated at a temperature below 500 ° C to form a phosphor film. The body film contains the phosphor particles and silicon oxide contained in the foregoing phosphor material; the raw materials of the phosphor film include: a particulate phosphor material; and a silicon oxide precursor containing silicon oxide by hydrolysis or oxidation At least one kind of adhesive raw material among the group consisting of polymer, silicate compound, silica and amorphous silicon. 一種發光元件的製造方法,其特徵為包含:於基板的一面上形成半導體發光元件之半導體發光元件形成步驟;及於基板的另一面上形成含有粒子狀的螢光體材料與黏合劑的螢光體膜之螢光體膜形成步驟,在前述螢光體膜形成步驟中,於基板的另一面塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜含有前述螢光體材料中所含之螢光體粒子與氧化矽;該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。A method for manufacturing a light-emitting element, comprising: a semiconductor light-emitting element forming step of forming a semiconductor light-emitting element on one surface of a substrate; and forming fluorescent light containing a particulate phosphor material and an adhesive on the other surface of the substrate In the phosphor film forming step of a body film, in the aforementioned phosphor film forming step, a phosphor film raw material is coated on the other side of the substrate, and reacted at room temperature or heat treated at a temperature below 500 ° C to form fluorescence. A body film containing phosphor particles and silicon oxide contained in the aforementioned phosphor material; the raw material of the phosphor film comprises: a particulate phosphor material; and a component formed by hydrolysis or oxidation At least one kind of binder raw material among a group consisting of a silicon oxide precursor, a silicate compound, silica, and amorphous silicon. 如請求項6或7之發光元件的製造方法,其中在前述螢光體膜形成步驟之後,包含切斷基板而晶片化之晶片化步驟。The method for manufacturing a light-emitting element according to claim 6 or 7, further comprising a wafer-forming step of cutting the substrate to form a wafer after the phosphor film forming step. 如請求項6或7之發光元件的製造方法,其中在前述螢光體膜形成步驟中,藉由印刷法或噴塗法將螢光體膜原料塗布於基板的另一面上。The method for manufacturing a light-emitting element according to claim 6 or 7, wherein, in the aforementioned phosphor film forming step, the phosphor film raw material is coated on the other surface of the substrate by a printing method or a spray coating method. 一種發光裝置的製造方法,其特徵為包含在一面上形成有半導體發光元件的基板的另一面上,形成含有粒子狀的螢光體材料與黏合劑的螢光體膜之螢光體膜形成步驟,在前述螢光體膜形成步驟中,於基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜含有前述螢光體材料中所含之螢光體粒子與氧化矽;該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。A method for manufacturing a light emitting device, comprising a phosphor film forming step of forming a phosphor film containing a particulate phosphor material and an adhesive on the other surface of a substrate on which a semiconductor light emitting element is formed on one surface. In the foregoing phosphor film forming step, a phosphor film material is coated on the other surface of the substrate, and reacted at normal temperature or subjected to heat treatment at a temperature below 500 ° C. to form a phosphor film. Containing the phosphor particles and silicon oxide contained in the foregoing phosphor material; the phosphor film raw material includes: a particulate phosphor material; and a silicon oxide precursor containing silicon oxide by hydrolysis or oxidation, A binder material for at least one of the group consisting of silicate compounds, silica, and amorphous silicon. 一種發光裝置的製造方法,其特徵為包含:於基板的一面上形成半導體發光元件之半導體發光元件形成步驟;及於基板的另一面上形成含有粒子狀的螢光體材料與黏合劑的螢光體膜之螢光體膜形成步驟,在前述螢光體膜形成步驟中,於基板的另一面上塗布螢光體膜原料,在常溫使之反應或在500℃以下的溫度作熱處理而形成螢光體膜,該螢光體膜含有前述螢光體材料中所含之螢光體粒子與氧化矽;該螢光體膜原料包含:粒子狀的螢光體材料;及含有由依水解或氧化而成為氧化矽的氧化矽前驅物、矽酸鹽化合物、矽石及非結晶矽所構成的群當中至少1種之黏合劑原料。A method for manufacturing a light-emitting device, comprising: a semiconductor light-emitting element forming step of forming a semiconductor light-emitting element on one surface of a substrate; and forming fluorescent light containing a particulate fluorescent material and a binder on the other surface of the substrate In the phosphor film forming step of a body film, in the aforementioned phosphor film forming step, a phosphor film raw material is coated on the other surface of the substrate and reacted at room temperature or heat-treated at a temperature below 500 ° C to form a phosphor. A phosphor film containing phosphor particles and silicon oxide contained in the aforementioned phosphor material; the phosphor film raw material comprises: a particulate phosphor material; and It is a binder raw material for at least one of a group consisting of a silicon oxide precursor, a silicate compound, silica, and amorphous silicon that is a silicon oxide.
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