TWI662250B - System and method for marking defective items in multiple passive elements on a carrier - Google Patents
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Abstract
本發明是一種標記載體上的多個被動元件中的缺陷品的系統及其方法,其系統包含:輸送單元、影像擷取單元、辨識單元、標記單元以及元件脫離單元,輸送單元用以將載體與其被動元件移送至第一、二工作位置;影像擷取單元擷取被動元件的標記前影像,或標記後影像;辨識單元根據被動元件的缺陷品分佈狀態建立缺陷品位置標記資訊;標記單元用以根據辨識單元的缺陷品位置標記資訊,在第一工作位置上的各個缺陷品上標示記號。The invention is a system for marking defective products among a plurality of passive components on a carrier and a method thereof. The system includes: a conveying unit, an image capturing unit, an identification unit, a marking unit, and a component detaching unit. The passive components are transferred to the first and second working positions; the image capture unit captures the pre-marked image or the post-marked image of the passive component; the identification unit establishes the defective position marking information according to the defective component distribution status of the passive component; Marking is performed on each defective product at the first working position according to the defective product position marking information of the identification unit.
Description
本發明係一種標記載體上的多個被動元件中的缺陷品的系統及其方法,特別是有關於應用影像辨識技術分析經由缺陷品檢測設備檢測後之缺陷品檢測圖,再進行對應的被動元件實體之可視標記的系統及方法。The invention relates to a system and a method for marking defective products among a plurality of passive components on a carrier, and in particular, it relates to the application of image recognition technology to analyze a defective product detection chart detected by a defective product detection device, and then perform corresponding passive components. System and method for visual marking of entities.
目前對於批次式、小型化的電子元件檢測後的缺陷品剔除方案,大多是以人工方式,使用目檢機檢視該檢測機台所輸出的缺陷檢測圖資訊,將對應載體上的大量的小型化的電子元件的缺陷位置之電子元件剔除,因此在剔除效率及剔除正確率上,難以獲得改善。At present, most batch-type, miniaturized electronic component inspection defect detection schemes are mostly manual, using a visual inspection machine to view the defect inspection map information output by the inspection machine, and will reduce the amount of miniaturization on the corresponding carrier. It is difficult to improve the rejection efficiency and rejection accuracy of the electronic components at the defective position of the electronic components.
然而,除非是在採購缺陷檢測機台時即結合檢驗後的缺陷品剔除方案一併設計,否則,若要進行與既有的缺陷檢測機台結合自動化的缺陷品剔除作業,則會因該缺陷檢測機台的檢驗規格不一,而難以自動化地將該缺陷檢測機台的檢驗結果,延續至後續的缺陷品剔除作業。However, unless the defect inspection program is designed in conjunction with the defect inspection program when the defect inspection machine is purchased, if the defect inspection is automated in combination with the existing defect inspection machine, the defect will be caused by the defect. The inspection specifications of the inspection machine are different, and it is difficult to automate the inspection results of the inspection machine to the subsequent defect rejection operation.
本發明主要目在應用影像處理技術,讀取並分析一缺陷檢測機台的缺陷檢測圖資訊,並在對應的載體上的被動元件標示出缺陷品座標,以便後續以一元件脫離單元,根據標記位置將其被動元件缺陷品與載體分離。The main purpose of the present invention is to apply image processing technology to read and analyze the defect detection map information of a defect detection machine, and mark the defective product coordinates on the passive component on the corresponding carrier, so that a component can be detached from the unit in accordance with the mark. The location separates its passive component defect from the carrier.
為了達成上述目的,本發明所採用的技術手段在於提供一種標記載體上的多個被動元件中的缺陷品的系統,係預先以一缺陷品檢測設備檢測出該些被動元件的缺陷品分佈狀態訊息的一缺陷檢測圖資訊,其包含:一輸送單元,用以將一載體與該載體上所承載的包含缺陷品的該些被動元件移送至一第一工作位置或移至一第二工作位置;一影像擷取單元,用以擷取涵蓋該些被動元件在移入該第一工作位置前的一標記前影像,或擷取涵蓋該些被動元件在移出該第一工作位置後的一標記後影像;一辨識單元,分析該缺陷檢測圖資訊的該些被動元件的缺陷品分佈狀態訊息,並在該缺陷檢測圖資訊上將各個缺陷品標示出來,以獲得一缺陷品位置標記資訊;一標記單元,用以根據該缺陷品位置標記資訊,在該第一工作位置上對應於該些被動元件實體的各個缺陷品上標示記號。In order to achieve the above object, the technical means adopted by the present invention is to provide a system for marking defective products among a plurality of passive components on a carrier. The defective component distribution status information of the passive components is detected in advance by a defect detection device. Information of a defect detection map, which includes: a conveying unit for moving a carrier and the passive components containing defective products carried on the carrier to a first work position or to a second work position; An image capturing unit for capturing a pre-marked image covering the passive components before moving into the first working position, or capturing a post-marking image covering the passive components after moving out of the first working position An identification unit that analyzes the defective product distribution status information of the passive components of the defect detection map information, and marks each defective product on the defect detection map information to obtain a defective location marking information; a marking unit For marking the defective parts corresponding to the passive component entities in the first working position according to the position information of the defective parts. Shows mark.
在一實施例中,更包括一元件脫離單元,包含一藉由三維空間移動機構移動的自動剔除機構,用以在該第二工作位置上根據各個標示記號自動剔除遭標記的該些被動元件於該載體。In one embodiment, it further includes a component detaching unit, including an automatic rejection mechanism moved by the three-dimensional space moving mechanism, for automatically removing the marked passive components at the second working position according to each marking mark. The carrier.
更包含:一自動目檢機,用以將標示記號位置之各個被動元件予以與非缺陷品的被動元件分離。It also includes: an automatic visual inspection machine for separating each passive component marked with a mark position from the non-defective passive component.
在一實施例中,該辨識單元係應用光學辨識技術讀取並分析該缺陷檢測圖資訊,進而建立該座標基準點及各個座標位置。In one embodiment, the identification unit uses optical identification technology to read and analyze the defect detection map information, and then establish the coordinate reference point and each coordinate position.
在一實施例中,該載體為膠帶載體,該些被動元件係微形化、高密度化地矩陣式或不規則式附著於該膠帶載體。In one embodiment, the carrier is a tape carrier, and the passive components are micro-shaped, high-density matrix or irregularly attached to the tape carrier.
在一實施例中,該標記單元之標示記號係應用噴碼機噴印技術、雷射標記技術或應用麥克筆標記。In one embodiment, the marking mark of the marking unit is applied with a printer inkjet technology, a laser marking technology, or a mark pen.
在一實施例中,該第一工作位置與該第二工作位置係位於同一輸送帶的前、後或分屬於不同輸送帶。In an embodiment, the first working position and the second working position are located in front of, behind or on the same conveyor belt, or belong to different conveyor belts.
本發明的另一目的在於,應用顯像處理技術,讀取並分析一缺陷檢測機台經檢測一載體上的多個被動元件的良品後的缺陷檢測圖資訊,並在對應的載體上的被動元件標示出缺陷品座標,再根據該標記位置將其被動元件缺陷品與載體分離。Another object of the present invention is to use imaging processing technology to read and analyze defect detection map information of a defect detection machine after detecting good products of a plurality of passive components on a carrier, and to passively pass the corresponding carrier on the corresponding carrier. The component is marked with the defective product coordinates, and then the passive component defective product is separated from the carrier according to the marked position.
為達成上述方法,本發明提供一種標記載體上的多個被動元件中的缺陷品的方法,包括:提供一缺陷檢測圖資訊:該缺陷檢測圖資訊包含一載體上所承載的多個被動元件的一每個缺陷品分佈狀態資訊;計算缺陷檢測圖標記資訊:辨識該缺陷檢測圖資訊,並在該缺陷檢測圖資訊上將各個缺陷品標示出來,以獲得一缺陷品位置標記資訊;計算被動元件缺陷品的座標:擷取置於一輸送單元上的該載體及其承載的被動元件的一標記前影像,比對該缺陷品位置標記資訊與該標記前影像,並據而決定該標記前影像中的缺陷品座標資訊;標示出被動元件缺陷品:以該輸送單元將該載體輸送至一標記單元,依據該缺陷品座標資訊,在該載體上標記出各個缺陷品;檢驗載體的標記正確性:擷取置於該輸送單元上的該載體及其承載的被動元件的一標記後影像,比對該缺陷檢測圖標記資訊與該標記後影像,確定已正確標記出被動元件缺陷品。In order to achieve the above method, the present invention provides a method for marking defective products among a plurality of passive components on a carrier, including: providing a defect detection map information: the defect detection map information includes a plurality of passive components carried on a carrier. -Information on the distribution status of each defective product; Calculate the defect detection chart mark information: identify the defect detection map information, and mark each defective product on the defect detection map information to obtain a defective position mark information; calculate passive components Coordinates of the defective product: capture a pre-marked image of the carrier and its passive components placed on a transport unit, compare the position information of the defective product with the pre-marked image, and determine the pre-marked image accordingly Defective coordinate information in the mark; mark passive component defective products: transport the carrier to a marking unit with the transport unit, mark each defective product on the carrier according to the coordinate information of the defective product; check the correctness of the carrier's marking : Capture a labeled image of the carrier and the passive components carried on the transport unit, and compare the FIG detecting mark after image information and the tag, a passive tag is properly determined as defective elements.
在一實施例中,更包含下個步驟:在載體上剔除各個缺陷品:應用一藉由三維移動機構進行移動的剔除設備,將載體上之各個標示記號之被動元件予以剔除於該載體之外。In one embodiment, the method further includes the following steps: removing each defective product on the carrier: applying a rejection device that moves by a three-dimensional moving mechanism, and removing the passive components marked on the carrier from the carrier. .
在另一實施方式中,更包含下個步驟:剔除各個缺陷品:應用一自動目檢機偵測通過的該被動元件的標示記號,並藉由一吹氣裝置予以與非缺陷品的被動元件分離。In another embodiment, the method further includes the following steps: removing each defective product: using an automatic visual inspection machine to detect the marking mark of the passive component, and using a blowing device to pass the non-defective passive component to the passive component. Separation.
在一實施例中,擷取該與該載體及其承載的被動元件的標記前影像與標記後影像為同一影像擷取單元。In one embodiment, capturing the pre-labeled image and the post-labeled image with the carrier and the passive component carried by the carrier are the same image capturing unit.
在一實施例中,該辨識該缺陷檢測圖資訊步驟係應用光學辨識技術讀取並分析該缺陷檢測圖資訊,進而建立一座標基準點及相對應於該座標基準點的各個座標位置的資訊。In one embodiment, the step of identifying the defect detection map information is to read and analyze the defect detection map information by using an optical identification technology, and then establish a coordinate datum point and information of each coordinate position corresponding to the coordinate datum point.
在一實施例中,該座標基準點位於該載體或該些被動元件。In one embodiment, the coordinate reference point is located on the carrier or the passive components.
本發明的特點在於:由於本發明可辨識被動元件缺陷品檢測機台經檢測後所輸出的缺陷檢測圖資訊(包含該批載體上的多個被動元件中的至少一缺陷品的相對於該載體的座標位置),因此本發明可在不更換被動元件缺陷品檢測機台的狀態下,接續進行自動化解析該被動元件缺陷品檢測機台的圖型化的檢測資訊,並將載體上的缺陷品標記,以利後續缺陷品的剔除的作業;另外,本創作在該載體承載的被動元件實體進行其缺陷品標記後、在實際進行被動元件實體剔除前,進行了檢驗載體的標記正確性檢查,以避免在後續被動元件實體剔除作業產生誤剔除的情形。The present invention is characterized in that: the present invention can identify the defect detection map information (including at least one defective product among multiple passive components on the batch of carriers relative to the carrier) output by the passive component defect machine inspection machine after detection. Coordinate position), the present invention can continue to automatically analyze the graphical inspection information of the passive component defect detection machine without replacing the passive component defect detection machine, and the defective product on the carrier can be analyzed. Marking to facilitate the subsequent removal of defective products; In addition, after the passive component entity carried on the carrier is marked with its defective product and before the passive component entity is actually removed, it is checked for the correctness of the marking of the carrier. To avoid the situation of false rejection in the subsequent physical rejection of passive components.
茲配合圖式將本創作實施例詳細說明如下,其所附圖式均為簡化之示意圖,僅以示意方式說明本創作之基本結構,因此在該等圖式中僅標示與本創作有關之元件,且所顯示之元件並非以實施時之數目、形狀、尺寸比例等加以繪製,其實際實施時之規格尺寸實為一種選擇性之設計,且其元件佈局形態有可能更為複雜。The following is a detailed description of this creative embodiment in conjunction with the drawings. The drawings are simplified schematic diagrams, which illustrate the basic structure of the creative only in a schematic way. Therefore, only the components related to the creative are marked in these drawings. Moreover, the displayed components are not drawn according to the number, shape, size ratio, etc. of the implementation, and the actual implementation specifications are an optional design, and the component layout may be more complicated.
首先請參照圖1所示。本實施例之標記載體上的多個被動元件中的缺陷品的系統1,其係預先以一缺陷品檢測設備10檢測出該些被動元件P的缺陷品D分佈狀態訊息的一缺陷檢測圖資訊A,該標記載體上的多個被動元件中的缺陷品的系統1包含:一輸送單元11、一影像擷取單元12、一辨識單元13、一標記單元14以及一元件脫離單元15;一輸送單元11,一般為一輸送機台,用以將一載體C與該載體C上所承載的包含缺陷品D的該些被動元件P移送至一第一工作位置L1或移至一第二工作位置L2(具體而言,該第一工作位置L1與該第二工作位置L2會在該輸送單元11的輸送路徑上);該影像擷取單元12,一般為一CCD或CMOS鏡頭,係用以擷取涵蓋該些被動元件P在移入該第一工作位置L1前的一標記前影像M1,或擷取涵蓋該些被動元件在移出該第一工作位置後的一標記後影像M2;辨識單元13,分析該缺陷檢測圖資訊A的該些被動元件的缺陷品分佈狀態訊息,並在該缺陷檢測圖資訊A上將各個缺陷品D的位置標示出來,以獲得一缺陷品位置標記資訊A’;標記單元14,用以根據該缺陷品位置標記資訊A’,在該第一工作位置L1上對應於該些被動元件實體的各個缺陷品D上標示可視的記號。Please refer to FIG. 1 first. The system 1 for marking defective products among a plurality of passive components on the carrier of the present embodiment is a defect detection map information for detecting the distribution status information of the defective products D of the passive components P by a defective product detection device 10 in advance. A. The system 1 for marking defective products among a plurality of passive components on the carrier includes: a conveying unit 11, an image capturing unit 12, an identifying unit 13, a marking unit 14 and a component disengaging unit 15; a conveying The unit 11 is generally a conveyor platform for transferring a carrier C and the passive components P containing the defective product D carried on the carrier C to a first work position L1 or to a second work position L2 (specifically, the first working position L1 and the second working position L2 will be on the conveying path of the conveying unit 11); the image capturing unit 12, generally a CCD or CMOS lens, is used for capturing Taking a pre-marked image M1 covering the passive components P before moving into the first working position L1, or capturing a post-marking image M2 covering the passive components after moving out of the first working position; identification unit 13, Analyze the defect detection chart Information of the defective product distribution status information of the passive components of A, and the position of each defective product D is marked on the defect detection map information A to obtain a defective position marking information A '; a marking unit 14 for According to the defective product position marking information A ′, a visible mark is marked on the first working position L1 corresponding to each defective product D of the passive component entities.
在一實施例中,為剔除標記的被動元件缺陷品,可更包含一元件脫離單元15,包含一藉由三維空間移動機構151移動的自動剔除機構152,用以在該第二工作位置L2上根據各個標示記號自動剔除遭標記的該些被動元件P,使與該載體C分離。詳細言之,在標記單元14完成的被動元件缺陷品D的標示之後,可在同一輸送單元11上,藉由元件脫離單元15(包含三維空間移動機構151以及自動剔除機構152)將標記的該些被動元件予以與論載體C分離。實務上,該元件脫離單元15可應用台灣專利公告M552102號「被動元件批次式檢測之缺陷品的剔除系統」為之。In an embodiment, in order to remove the marked passive component defects, a component disengaging unit 15 may be further included, including an automatic rejection mechanism 152 moved by the three-dimensional space moving mechanism 151 for use in the second working position L2. The marked passive components P are automatically removed according to each marking mark, so as to be separated from the carrier C. In detail, after the marking of the defective passive component D by the marking unit 14 is completed, the marked separation can be performed on the same conveying unit 11 by the component separation unit 15 (including the three-dimensional space moving mechanism 151 and the automatic rejection mechanism 152). These passive components are separated from the carrier C. In practice, the component detachment unit 15 can apply Taiwan Patent Bulletin No. M552102 "Removal System for Defective Products of Passive Component Batch Inspection".
在一實施例中,為剔除標記的被動元件缺陷品D,可更包含:一自動目檢機153,用以辨識標示記號位置之各個被動元件P,再以一吹氣裝置154予以與非缺陷品的被動元件分離。詳細言之,在標記單元14完成的被動元件缺陷品D的標示之後,即可將包含缺陷品與非缺陷品的所有被動元件自載體C上剝除,再以一輸送裝置使該些被動元件通過元件脫離單元15’(包含該自動目檢機153及吹氣裝置154),藉由自動目檢機153檢測出標示記號的被動元件,再由吹氣裝置154使與無標示記號的被動元件分離。In an embodiment, in order to eliminate the marked defective passive component D, it may further include: an automatic visual inspection machine 153 for identifying each passive component P marked with a mark position, and an air blowing device 154 for non-defective Separated passive components. In detail, after the marking of the passive component defective product D completed by the marking unit 14, all passive components including defective and non-defective products can be stripped from the carrier C, and then the passive components are made by a conveying device. Pass the component disengagement unit 15 '(including the automatic visual inspection machine 153 and the blowing device 154), the passive component with a marked mark is detected by the automatic visual inspection machine 153, and the passive component without the marked is passed by the blowing device 154 Separation.
在一實施例中,該辨識單元13係應用光學辨識技術讀取並分析該缺陷檢測圖資訊A,進而建立位於該載體C上的該座標基準點B及各個座標位置(即缺陷品D的相對於該座標基準點B的座標位置)。In an embodiment, the identification unit 13 uses optical identification technology to read and analyze the defect detection map information A, and then establishes the coordinate reference point B and each coordinate position (that is, the relative position of the defective product D) on the carrier C. At the coordinate position of the coordinate reference point B).
實務上,在一實施例中,上述該載體C係可為膠帶載體,該些被動元件P係微形化、高密度化地矩陣式或不規則式附著於該膠帶載體。In practice, in one embodiment, the carrier C described above may be a tape carrier, and the passive elements P are micro-shaped, high-density matrix or irregularly attached to the tape carrier.
另外,在一實施例中,該標記單元14之標示記號係應用噴碼機噴印技術、雷射標記技術等非接觸式標記,或應用麥克筆標記之接觸式標記,或其他可標註記號之方式皆可為之。In addition, in an embodiment, the marking mark of the marking unit 14 is a non-contact mark using inkjet printing technology, laser marking technology, or a contact mark using a microphone pen mark, or other marks that can be marked with a mark. You can do it all.
在一實施例中,本標記載體上的多個被動元件中的缺陷品的系統1更包含一缺陷品檢測設備10,用以對該載體C及該載體C承載的多個被動元件P進行缺陷品檢測,並輸出該缺陷檢測圖資訊A。In an embodiment, the system 1 for marking defective products among a plurality of passive components on the carrier further includes a defective product detection device 10 for performing defects on the carrier C and the plurality of passive components P carried by the carrier C. Product inspection, and output the defect inspection chart information A.
值得一提的是,上述該第一工作位置L1與該第二工作位置L2係可位於同一輸送帶的前、後或分屬於不同輸送帶上。It is worth mentioning that the above-mentioned first working position L1 and the second working position L2 may be located in front of, behind the same conveyor belt, or on different conveyor belts.
再請參照圖2所示,本實施例之標記載體上的多個被動元件中的缺陷品的方法,其步驟包含:Please refer to FIG. 2 again, the method for marking defective products in a plurality of passive components on a carrier according to this embodiment includes the following steps:
提供一缺陷檢測圖資訊(步驟S10),該缺陷檢測圖資訊包含一載體上所承載的多個被動元件的一每個缺陷品分佈狀態資訊;Providing a defect detection map information (step S10), the defect detection map information includes information on each defective product distribution state of a plurality of passive components carried on a carrier;
計算缺陷檢測圖標記資訊(步驟S20):辨識該缺陷檢測圖資訊,並在該缺陷檢測圖資訊上將各個缺陷品標示出來,以獲得一缺陷品位置標記資訊;Calculate the defect detection map mark information (step S20): identify the defect detection map information, and mark each defective product on the defect detection map information to obtain a defective product location mark information;
計算被動元件缺陷品的座標(步驟S30):擷取置於一輸送單元上的該載體及其承載的被動元件的一標記前影像,比對該缺陷品位置標記資訊與該標記前影像,並據而決定該標記前影像中的缺陷品座標資訊;Calculate the coordinates of the defective part of the passive component (step S30): capture a pre-marked image of the carrier and the passive component carried on a transport unit, compare the position information of the defective part with the pre-marked image, and According to this, the coordinate information of the defective product in the image before the marking is determined;
標示出被動元件缺陷品(步驟S40):以該輸送單元將該載體輸送至一標記單元,依據該缺陷品座標資訊,在該載體上標記出各個缺陷品;Marking defective products of passive components (step S40): transport the carrier to a marking unit by the transport unit, and mark each defective product on the carrier according to the coordinate information of the defective product;
檢驗載體的標記正確性(步驟S50):擷取置於該輸送單元上的該載體及其承載的被動元件的一標記後影像,比對該缺陷檢測圖標記資訊與該標記後影像,確定已正確標記出被動元件缺陷品。Checking the correctness of the marking of the carrier (step S50): taking a marked image of the carrier and the passive component carried on the conveying unit, comparing the marked information of the defect detection map with the marked image to determine that Correctly mark defective passive components.
剔除各個缺陷品如圖2所示,在一實施例中,於上述實施例之下,再結合剔除各個缺陷品的步驟,更包含:在載體上剔除各個缺陷品(步驟S60A):應用一藉由三維移動機構進行移動的剔除設備,將載體上之各個標示記號之被動元件予以剔除於該載體之外。Removal of each defective product is shown in FIG. 2. In one embodiment, under the above embodiment, the step of eliminating each defective product is further included, further including: removing each defective product on the carrier (step S60A): applying a loan The rejection device which is moved by the three-dimensional moving mechanism removes the passive components marked on the carrier from the carrier.
如圖2所示,在一實施例中,另一種結合剔除各個缺陷品的步驟,更包含下個步驟:剔除各個缺陷品(步驟S60B):應用一自動目檢機偵測通過的該被動元件的標示記號,並藉由一吹氣裝置予以與非缺陷品的被動元件分離。As shown in FIG. 2, in one embodiment, another step of removing each defective product further includes the next step: removing each defective product (step S60B): applying an automatic visual inspection machine to detect the passive component that has passed. Mark, and separated from non-defective passive components by a blower.
在一實施例中,該辨識該缺陷檢測圖資訊步驟(步驟S20)係應用光學辨識技術讀取並分析該缺陷檢測圖資訊,進而建立該座標基準點及各個座標位置的資訊。In one embodiment, the step of identifying the defect detection map information (step S20) is to read and analyze the defect detection map information by using optical recognition technology, and then establish the coordinate datum point and the information of each coordinate position.
上述本所採用的技術手段之實施方式或實施例,並非用來限定本創作實施之範圍。即凡與本創作申請範圍文義相符,或依本創作專利範圍所做的均等變化與修飾,皆為本創作專利範圍所涵蓋。The above-mentioned implementation manners or embodiments of the technical means adopted by the present invention are not intended to limit the scope of this creative implementation. That is to say, all changes and modifications that are consistent with the scope of the scope of the creative application, or are made according to the scope of the creative patent, are covered by the scope of the creative patent.
1‧‧‧標記載體上的多個被動元件中的缺陷品的系統1‧‧‧ system for marking defectives in multiple passive components on a carrier
10‧‧‧缺陷品檢測設備10‧‧‧ Defective Product Inspection Equipment
11‧‧‧輸送單元11‧‧‧Conveying unit
12‧‧‧影像擷取單元12‧‧‧Image capture unit
13‧‧‧辨識單元13‧‧‧Identification unit
14‧‧‧標記單元14‧‧‧Marking Unit
141‧‧‧噴碼機141‧‧‧Inkjet printer
15,15’‧‧‧元件脫離單元15,15’‧‧‧component release unit
151‧‧‧三維空間移動機構151‧‧‧Three-dimensional space movement mechanism
152‧‧‧自動剔除機構152‧‧‧Automatic rejection mechanism
153‧‧‧自動目檢機153‧‧‧Automatic visual inspection machine
154‧‧‧吹氣裝置154‧‧‧Blowing device
A‧‧‧缺陷檢測圖資訊A‧‧‧Defect inspection chart information
A’‧‧‧缺陷品位置標記資訊A’‧‧‧ Defective Location Marking Information
B‧‧‧座標基準點B‧‧‧ coordinate datum point
C‧‧‧載體C‧‧‧ carrier
D‧‧‧缺陷品D‧‧‧ Defective
L1‧‧‧第一工作位置L1‧‧‧First working position
L2‧‧‧第二工作位置L2‧‧‧Second working position
M1‧‧‧標記前影像M1‧‧‧ before image
M2‧‧‧標記後影像M2‧‧‧Marked image
P‧‧‧被動元件P‧‧‧Passive component
步驟S10~S50‧‧‧標記載體上的多個被動元件中的缺陷品的方法步驟Steps S10-S50: Method steps for marking defective items in a plurality of passive components on a carrier
步驟S60A‧‧‧在載體上剔除各個缺陷品的步驟Step S60A‧‧‧ Step of removing each defective product on the carrier
步驟S60B‧‧‧剔除各個缺陷品的步驟Step S60B‧‧‧Removal of each defective product
[圖1]為本發明之標記載體上的多個被動元件中的缺陷品的系統之系統方塊示意圖; [圖2]為本發明之標記載體上的多個被動元件中的缺陷品的方法的步驟流程圖。[FIG. 1] A schematic block diagram of a system of a defective product among a plurality of passive components on a marking carrier according to the present invention; [FIG. 2] A method of a defective product among a plurality of passive components on a marking carrier according to the present invention Steps flowchart.
Claims (14)
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US7664608B2 (en) * | 2006-07-14 | 2010-02-16 | Hitachi High-Technologies Corporation | Defect inspection method and apparatus |
TW201814873A (en) * | 2016-09-27 | 2018-04-16 | 美商克萊譚克公司 | Defect marking for semiconductor wafer inspection |
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US7664608B2 (en) * | 2006-07-14 | 2010-02-16 | Hitachi High-Technologies Corporation | Defect inspection method and apparatus |
TW201814873A (en) * | 2016-09-27 | 2018-04-16 | 美商克萊譚克公司 | Defect marking for semiconductor wafer inspection |
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