TWI649285B - Method of horizontal glass etching - Google Patents

Method of horizontal glass etching Download PDF

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TWI649285B
TWI649285B TW105117931A TW105117931A TWI649285B TW I649285 B TWI649285 B TW I649285B TW 105117931 A TW105117931 A TW 105117931A TW 105117931 A TW105117931 A TW 105117931A TW I649285 B TWI649285 B TW I649285B
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glass
horizontal
agent
spraying
etching according
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TW201742845A (en
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陳欽典
張世羣
林瑞欽
韋健凡
葉龍凱
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全鴻精研股份有限公司
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Abstract

一種水平式玻璃蝕刻的方法,包括: A010:提供一玻璃,以水平放置該玻璃,該玻璃包括一第一表面與一第二表面; A020:於該玻璃之該第二表面設置一薄膜; A030:在該玻璃之該第一表面噴塗一去氧化層活化劑; A040:在該玻璃之該第一表面噴塗一第一霧化劑,在該第一表面上形成多個第一霧化顆粒; A050:在該玻璃之該第一表面噴塗一第二霧化劑,使該第一霧化顆粒形成多個第二霧化顆粒; A060:在該玻璃之該第一表面噴塗一除晶劑; A070:在該玻璃之該第一表面噴塗一光化劑,使該第二霧化顆粒形成多個光化結構;及 A080:移除該薄膜。A method for horizontal glass etching, comprising: A010: providing a glass to horizontally place the glass, the glass comprising a first surface and a second surface; A020: providing a film on the second surface of the glass; A030 Spraying a deoxidizing layer activator on the first surface of the glass; A040: spraying a first atomizing agent on the first surface of the glass to form a plurality of first atomizing particles on the first surface; A050: spraying a second atomizing agent on the first surface of the glass to form the plurality of second atomizing particles; A060: spraying a de-crystalizing agent on the first surface of the glass; A070: spraying an actinizing agent on the first surface of the glass to form the second atomized particles to form a plurality of actinic structures; and A080: removing the film.

Description

水平式玻璃蝕刻的方法Horizontal glass etching method

一種玻璃蝕刻的方法,特別是一種以水平放置玻璃的玻璃蝕刻方法。A method of glass etching, in particular, a glass etching method in which glass is placed horizontally.

隨科技進步,許多電子裝置陸續採用觸控裝置來取代傳統的機械式操作裝置,並且加大操作空間與顯示器的大小,提供較為直覺與方便的操作方式,例如智慧型手機或汽車的中控螢幕等裝置。在這樣的背景下,觸控裝置在不同領域的需求性大增,觸控裝置上的防眩玻璃(AG Glass,以下簡稱AG玻璃)需求量也隨之增加。 目前相關應用的市場競爭逐漸激烈,以及近年逐漸受到重視的車載面板市場,使得AG玻璃在需求與品質要求上大幅度的提高。目前市場主流應用的AG玻璃式採用鍍膜製程,是以藥劑噴塗在玻璃表面,再透過加熱的方式使藥劑在玻璃表面形成微結構,達到防眩的功能。 然而,鍍膜是的AG玻璃其耐磨性較差,長時間使用經常有微結構脫落的現象,導致面板的使用手感不佳。更進一步的,在車載面板中的AG玻璃,由於車內環境經常處於高溫狀態,AG玻璃的鍍膜微結構在高溫下非常容易剝落。因此鍍膜式AG玻璃並無法應用在車載面板上。而蝕刻式AG玻璃之微結構是由玻璃本身形成,耐磨性較佳,對溫度的敏感度也較低,勢必成為未來AG玻璃的主流產品。 而目前市場上常見的蝕刻玻璃,多是以浸泡式蝕刻技術製成。浸泡式蝕刻技術是將蝕刻液體放置於一製程槽中,再將玻璃垂直由上而下浸泡至蝕刻液體中,以形成玻璃表面的紋路。但是,浸泡式的玻璃蝕刻技術有以下缺點: 1. 玻璃在進出蝕刻液體時,其蝕刻液體會因重力向下流動,導致玻璃表面形成液體流動的痕跡。 2. 由於玻璃是垂直進入蝕刻液體,玻璃下端浸泡在蝕刻液體中的時間相對長,導致表面紋路形成不平均。 3. 若玻璃尺寸較大或厚度較薄,其站立時受力不均,玻璃容易彎曲或斷裂。 因此,有鑑於浸泡式玻璃蝕刻技術有著多種缺陷,現階段難以符合市場AG玻璃的要求。故如何提供一種更好玻璃蝕刻技術,便是本領域具通常知識者值得去思量地。With the advancement of technology, many electronic devices have gradually replaced the traditional mechanical operating devices with touch devices, and increased the operating space and display size to provide a more intuitive and convenient operation, such as a central control screen for smart phones or automobiles. And other devices. Under such a background, the demand for touch devices in various fields has increased greatly, and the demand for anti-glare glass (AG Glass, hereinafter referred to as AG glass) on touch devices has also increased. At present, the market competition of related applications is fierce, and the automotive panel market, which has been gradually valued in recent years, has greatly improved the demand and quality requirements of AG glass. At present, the AG glass type, which is mainly used in the market, adopts a coating process, which is sprayed on the surface of the glass by means of a chemical agent, and then forms a microstructure on the surface of the glass by means of heating to achieve an anti-glare function. However, the AG glass coated with the coating has poor abrasion resistance, and the microstructural peeling often occurs for a long time, resulting in a poor hand feeling of the panel. Further, in the AG glass in the vehicle panel, since the interior environment of the vehicle is often at a high temperature, the coating microstructure of the AG glass is easily peeled off at a high temperature. Therefore, coated AG glass cannot be applied to the vehicle panel. The microstructure of the etched AG glass is formed by the glass itself, which has better wear resistance and lower sensitivity to temperature, and is bound to become the mainstream product of the future AG glass. The etching glass commonly used on the market is mostly made by immersion etching technology. The immersion etching technique places the etching liquid in a process tank, and then immerses the glass vertically from top to bottom into the etching liquid to form a grain of the glass surface. However, the immersion glass etching technique has the following disadvantages: 1. When the glass enters and exits the etching liquid, the etching liquid flows downward by gravity, causing a trace of liquid flow on the surface of the glass. 2. Since the glass enters the etching liquid vertically, the lower end of the glass is immersed in the etching liquid for a relatively long time, resulting in uneven surface texture. 3. If the glass is large in size or thin in thickness, it will be unevenly stressed when standing, and the glass will be easily bent or broken. Therefore, in view of the various defects of the immersion glass etching technology, it is difficult to meet the requirements of the market AG glass at this stage. Therefore, how to provide a better glass etching technology is worthy of consideration in the field.

有鑑於上述原因,本發明提供一種水平式玻璃蝕刻方法,能夠更有效率的製作蝕刻玻璃,提高產能與良率。 本發明提供一種水平式玻璃蝕刻的方法,包括: A010:提供一玻璃,以水平放置該玻璃,該玻璃包括一第一表面與一第二表面; A020:於該玻璃之該第二表面設置一薄膜; A030:在該玻璃之該第一表面噴塗一去氧化層活化劑; A040:在該玻璃之該第一表面噴塗一第一霧化劑,在該第一表面上形成多個第一霧化顆粒; A050:在該玻璃之該第一表面噴塗一第二霧化劑,使該第一霧化顆粒形成多個第二霧化顆粒; A060:在該玻璃之該第一表面噴塗一除晶劑; A070:在該玻璃之該第一表面噴塗一光化劑,使該第二霧化顆粒形成多個光化結構;及 A080:移除該薄膜。 上述之水平式玻璃蝕刻的方法,其中其中在步驟A10與A20之間還包括: A011:清潔該玻璃;及 A012:乾燥該玻璃; 在步驟A80之後還包括: A081:清潔該玻璃;及 A082:乾燥該玻璃。 上述之水平式玻璃蝕刻的方法,其中,在步驟A011、A081中,是使用中性清潔劑清洗該玻璃。 上述之水平式玻璃蝕刻的方法,其中,在步驟A030中,該第一表面之去氧化深度是控制在300奈米以下。 上述之水平式玻璃蝕刻的方法,其中,在步驟A040中,該第一霧化顆粒尺寸是介於100~500奈米之間;在步驟A050中,該第二霧化顆粒尺寸是介於20~90奈米之間。 上述之水平式玻璃蝕刻的方法,其中,在步驟A060中,該除晶劑是一種酸性物質,適於除去該第一霧化顆粒或該第二霧化顆粒間的矽晶沙。 上述之水平式玻璃蝕刻的方法,其中,在步驟A070中,該光化結構的厚度是控制在100奈米以下。 上述之水平式玻璃蝕刻的方法,其中,在步驟A070中,該光化劑為一種無氫氟混酸鹽物質。 上述之水平式玻璃蝕刻的方法,其中,在步驟A012、A082中,是使用風刀使該玻璃乾燥。 上述之水平式玻璃蝕刻的方法,其中,在步驟A020中,該薄膜為一抗氟酸高分子薄膜。In view of the above, the present invention provides a horizontal glass etching method capable of more efficiently producing etched glass and improving productivity and yield. The invention provides a method for horizontal glass etching, comprising: A010: providing a glass to horizontally place the glass, the glass comprising a first surface and a second surface; A020: providing a second surface of the glass a film; A030: spraying a deoxidizing layer activator on the first surface of the glass; A040: spraying a first atomizing agent on the first surface of the glass, forming a plurality of first fogs on the first surface A050: spraying a second atomizing agent on the first surface of the glass to form the plurality of second atomized particles; A060: spraying a first surface of the glass a crystallization agent; A070: spraying an actinizing agent on the first surface of the glass to form the plurality of actinic structures; and A080: removing the film. The above method of horizontal glass etching, wherein the step A10 and A20 further comprises: A011: cleaning the glass; and A012: drying the glass; after the step A80 further comprising: A081: cleaning the glass; and A082: The glass is dried. The above method of horizontal glass etching, wherein in steps A011, A081, the glass is cleaned using a neutral detergent. In the above method of horizontal glass etching, in step A030, the deoxidation depth of the first surface is controlled to be less than 300 nm. The above method for horizontal glass etching, wherein, in step A040, the first atomized particle size is between 100 and 500 nm; and in step A050, the second atomized particle size is between 20 and 20 ~90 nm between. The above method of horizontal glass etching, wherein, in step A060, the seed remover is an acidic substance suitable for removing the first atomized particles or the twinned sand between the second atomized particles. In the above method of horizontal glass etching, in step A070, the thickness of the actinic structure is controlled to be less than 100 nm. The above method of horizontal glass etching, wherein in step A070, the actin is a hydrofluorinated acid-free substance. In the above method of horizontal glass etching, in steps A012 and A082, the glass is dried using an air knife. In the above method for horizontal glass etching, in the step A020, the film is a fluorine-resistant polymer film.

請參閱圖1A、圖1B與圖2A至圖2P,圖1A與圖1B所繪示為本發明之水平式玻璃蝕刻的方法。圖2A至圖2P水平式玻璃蝕刻的示意圖。本發明提供一種以水平放置玻璃100,並透過蝕刻手段加工玻璃100的表面,在玻璃100的表面形成微結構,使玻璃100達到防眩的功效。以下配合圖1A、圖1B的流程圖與圖2A至圖2P之示意圖說明。 首先,提供一玻璃100,並將玻璃100以水平放置。玻璃100還包括了一第一表面110與一第二表面120(步驟S010、圖2A)、圖2A。第一表面110為玻璃110的加工製程面,因此放置時是朝上放置,以利後續的加工製程。第二表面120則是朝下放置。在某些實施例中,第一表面110稱作Tin面;第二表面120則稱作Air面。 接著,清潔玻璃100(步驟S011、圖2B),洗去玻璃100上的汙物、附著物、灰塵或其他雜質。避免在蝕刻的過程中影響玻璃100表面結構的形成。在本實施例中,步驟S011是使用中性清潔劑11清潔玻璃100,並且是針對第一表面110進行清潔。 接下來,乾燥玻璃100(步驟S012、圖2C),去除玻璃100上的液體或其他物質,使玻璃100保持乾燥。在本實施例中,是使用風刀裝置10進行乾燥。風刀裝置10能夠提供乾燥、乾淨的高壓空氣。以高壓空氣去除玻璃100第一表面110上殘餘的中性清潔劑11,並使玻璃100保持乾燥狀態。 再來,於玻璃100之第二表面120上設置一薄膜121(步驟S020、圖2D),薄膜121是貼附在玻璃100的第二表面120,並能夠保護第二表面120在接下來的製程中不受到影響。在本實施例中,薄膜121是一種抗氟酸高分子薄膜,能夠保護玻璃100之第二表面120不受汙染,以利後續製程進行。 薄膜121設置完成後,在玻璃100之第一表面110噴塗一去氧化層活化劑12(步驟S030、圖2E)。去氧化層活化劑12能夠去除第一表面110之氧化層,並使第一表面110活化。活化過的第一表面110可在後續的步驟中,更充分與蝕刻液體或藥劑進行反應。在本實施例中,去氧化層活化劑12是一種鹼性物質,並且在去氧化過程中,去氧化的深度將控制在300奈米以內。接下來,清潔玻璃100(步驟S031、圖2F),將玻璃100第一表面110上的去氧化層活化劑12去除。在本實施例中,步驟S031中是以超純水(DIW)清潔玻璃100與其第一表面110 之後,在玻璃100之第一表面110上噴塗一第一霧化劑14,並在第一表面110上形成多個第一霧化顆粒111(步驟S040、圖2G)。第一霧化劑14能夠在第一表面110上初步形成微結構(即第一霧化顆粒111),並初步使玻璃110表面形成霧化的效果。在本實施例中,第一霧化劑14是一種微米級霧化劑,而所形成第一霧化顆粒111之尺寸是在100奈米至500奈米之間。 再來,在玻璃100之第一表面110上噴塗一第二霧化劑15,使第一霧化顆粒111形成多個第二霧化顆粒112(步驟S050、圖2H)。第二霧化劑15能夠使第一霧化顆粒111進一步細化成第二霧化顆粒112。因此,在本實施例中,第二霧化劑15是一種奈米級的霧化劑,而所形成的第二霧化顆粒的尺寸是在20奈米至90奈米之間。進一步使玻璃100之第一表面110形成霧化的效果。接下來,清潔玻璃(步驟S051),去除第一表面110上殘餘的第一霧化劑14與第一霧化劑15,在步驟S061中,是使用超純水13清潔玻璃100。 再來,在玻璃100之第一表面110上噴塗除晶劑16(步驟S060、圖2J)。在前述步驟S040、S050中,第一霧化顆粒111與第二霧化顆粒112形成時,其第一霧化顆粒111或第二霧化顆粒112之間會產生細晶沙113,而除晶劑16能夠消除這些矽晶沙113。在本實施例中,除晶劑16是一種酸性物質,除晶劑16適於除去第一霧化顆粒111或第二霧化顆粒112間的矽晶沙113。之後,清潔玻璃100(步驟S061、圖2K),去除第一表面110上殘餘之除晶劑16。在步驟S061中,是使用超純水13清潔玻璃100。 接下來,在玻璃100之第一表面110上噴塗一光化劑17,使第二霧化顆粒112形成多個光化結構114。光化結構114形成於玻璃100之第一表面110後,便可使玻璃100具備防眩之功效。在本實施例中,光化劑17是一種無氫氟混酸鹽物質,且所形成的光化結構114的厚度將控制在100奈米以下。然後,清潔玻璃100(步驟S071、圖2M),去除玻璃100第一表面110上殘餘的光化劑17。在步驟S071中,是使用超純水13清潔玻璃100。 在一系列的表面處理後,便可將第二表面120上之薄膜121移除(步驟S080、圖2N)。接下來,在一次清潔玻璃100(步驟S081、圖2O),清除玻璃100第一表面110上的髒污。在步驟S081中,是使用中性清潔劑11清潔玻璃。再來,乾燥玻璃100(步驟S082、圖2P),使用風刀裝置10以高壓空氣除去玻璃100上殘餘的液體或藥劑,保持玻璃100的乾燥。 至此便完成水平式玻璃蝕刻的方法,而經過前述步驟S010~S082的玻璃100,其第一表面110形成了光化結構114。光化結構114便是玻璃100表面構成防眩功效的微結構。接下來玻璃100便可進入檢查程序,進一步檢查玻璃100表面之光化結構114是否具有瑕疵。在某些實施例中,玻璃100可放置於一輸送帶上,並配合每一步驟設計對應的設備,讓玻璃100水平依序通過對應的設備,已完成前述水平式玻璃蝕刻的方法。 本發明之水平式玻璃蝕刻的方法,是以水平的手段對玻璃100進行加工。相較於習知垂直浸泡的技術,前述垂直浸泡所產生的缺陷均可被克服,即玻璃100以水平放置,霧化劑與光化劑不會因重力流動而產生額外的痕跡;玻璃100以水平放置,玻璃100在接受霧化劑與光化劑噴塗時,玻璃100各部位可均勻接受霧化劑與光化劑噴塗;玻璃100以水平放置,玻璃100不會因受力不均而彎曲或斷裂。本發明之水平式玻璃蝕刻的方法能夠大大提高玻璃100的製作良率,生產效率與品質也能有顯著的提升,並且能夠製作出符合市場需求的高品質防眩玻璃產品。 本發明說明如上,然其並非用以限定本創作所主張之專利權利範圍。其專利保護範圍當視後附之申請專利範圍及其等同領域而定。凡本領域具有通常知識者,在不脫離本專利精神或範圍內,所作之更動或潤飾,均屬於本創作所揭示精神下所完成之等效改變或設計,且應包含在下述之申請專利範圍內。Please refer to FIG. 1A, FIG. 1B and FIG. 2A to FIG. 2P. FIG. 1A and FIG. 1B illustrate a method for horizontal glass etching according to the present invention. 2A to 2P are schematic views of horizontal glass etching. The present invention provides a method of placing the glass 100 horizontally and processing the surface of the glass 100 by etching to form a microstructure on the surface of the glass 100 to achieve the anti-glare effect of the glass 100. The following is a description of the flowcharts of FIGS. 1A and 1B and the schematic diagrams of FIGS. 2A to 2P. First, a glass 100 is provided and the glass 100 is placed horizontally. The glass 100 further includes a first surface 110 and a second surface 120 (step S010, FIG. 2A), FIG. 2A. The first surface 110 is a processing surface of the glass 110, so it is placed upward when placed for subsequent processing. The second surface 120 is then placed face down. In some embodiments, the first surface 110 is referred to as a Tin surface; the second surface 120 is referred to as an Air surface. Next, the glass 100 is cleaned (step S011, FIG. 2B), and dirt, deposits, dust, or other impurities on the glass 100 are washed away. Avoid affecting the formation of the surface structure of the glass 100 during the etching process. In the present embodiment, step S011 is to clean the glass 100 using the neutral detergent 11, and to clean the first surface 110. Next, the glass 100 is dried (step S012, FIG. 2C), and the liquid or other substance on the glass 100 is removed to keep the glass 100 dry. In the present embodiment, drying is performed using the air knife device 10. The air knife device 10 is capable of providing dry, clean high pressure air. The residual neutral detergent 11 on the first surface 110 of the glass 100 is removed with high pressure air and the glass 100 is kept dry. Then, a film 121 is disposed on the second surface 120 of the glass 100 (step S020, FIG. 2D). The film 121 is attached to the second surface 120 of the glass 100, and can protect the second surface 120 in the subsequent process. Not affected. In the present embodiment, the film 121 is a fluorine-resistant polymer film, which can protect the second surface 120 of the glass 100 from contamination, so as to facilitate subsequent processes. After the film 121 is set, a deoxidizing layer activator 12 is sprayed on the first surface 110 of the glass 100 (step S030, FIG. 2E). The deoxidation layer activator 12 is capable of removing the oxide layer of the first surface 110 and activating the first surface 110. The activated first surface 110 can be more fully reacted with the etching liquid or agent in a subsequent step. In the present embodiment, the deoxidation layer activator 12 is an alkaline substance, and during deoxidation, the depth of deoxidation will be controlled within 300 nm. Next, the glass 100 is cleaned (step S031, FIG. 2F), and the deoxidation layer activator 12 on the first surface 110 of the glass 100 is removed. In this embodiment, after cleaning the glass 100 and its first surface 110 with ultrapure water (DIW) in step S031, a first atomizing agent 14 is sprayed on the first surface 110 of the glass 100, and on the first surface. A plurality of first atomized particles 111 are formed on 110 (step S040, FIG. 2G). The first atomizing agent 14 is capable of initially forming a microstructure (i.e., the first atomized particles 111) on the first surface 110, and initially forms an atomizing effect on the surface of the glass 110. In the present embodiment, the first atomizing agent 14 is a micron-sized atomizing agent, and the size of the first atomizing particles 111 formed is between 100 nm and 500 nm. Then, a second atomizing agent 15 is sprayed on the first surface 110 of the glass 100 to form the first atomizing particles 111 into a plurality of second atomizing particles 112 (step S050, FIG. 2H). The second atomizing agent 15 is capable of further refining the first atomized particles 111 into the second atomized particles 112. Therefore, in the present embodiment, the second atomizing agent 15 is a nano-sized atomizing agent, and the second atomizing particles formed have a size of between 20 nm and 90 nm. The first surface 110 of the glass 100 is further formed to have an atomizing effect. Next, the glass is cleaned (step S051), and the first atomizing agent 14 remaining on the first surface 110 and the first atomizing agent 15 are removed, and in step S061, the glass 100 is cleaned using the ultrapure water 13. Next, the de-crystallizing agent 16 is sprayed on the first surface 110 of the glass 100 (step S060, FIG. 2J). In the foregoing steps S040, S050, when the first atomized particles 111 and the second atomized particles 112 are formed, fine crystal sand 113 is generated between the first atomized particles 111 or the second atomized particles 112, and the crystals are removed. The agent 16 is capable of eliminating these twin sands 113. In the present embodiment, the crystallization remover 16 is an acidic substance, and the crystallization remover 16 is adapted to remove the twinned sand 113 between the first atomized particles 111 or the second atomized particles 112. Thereafter, the glass 100 is cleaned (step S061, FIG. 2K), and the residual crystallizing agent 16 on the first surface 110 is removed. In step S061, the glass 100 is cleaned using ultrapure water 13. Next, an actin 17 is sprayed onto the first surface 110 of the glass 100 to form the second atomized particles 112 into a plurality of actinic structures 114. After the actinic structure 114 is formed on the first surface 110 of the glass 100, the glass 100 can be made to have an anti-glare effect. In the present embodiment, the actinator 17 is a hydrofluorinated acid-free substance, and the thickness of the formed actinic structure 114 is controlled to be less than 100 nm. Then, the glass 100 is cleaned (step S071, FIG. 2M), and the residual actin 17 on the first surface 110 of the glass 100 is removed. In step S071, the glass 100 is cleaned using ultrapure water 13. After a series of surface treatments, the film 121 on the second surface 120 can be removed (step S080, Fig. 2N). Next, the glass 100 is cleaned once (step S081, FIG. 2O), and the stain on the first surface 110 of the glass 100 is removed. In step S081, the glass is cleaned using the neutral detergent 11. Then, the glass 100 is dried (step S082, FIG. 2P), and the liquid or the remaining liquid on the glass 100 is removed by high-pressure air using the air knife device 10 to keep the glass 100 dry. Thus, the method of horizontal glass etching is completed, and the glass 100 of the foregoing steps S010 to S082 has its first surface 110 formed with an actinic structure 114. The actinic structure 114 is a microstructure in which the surface of the glass 100 constitutes an anti-glare effect. Next, the glass 100 can enter an inspection procedure to further check whether the actinic structure 114 on the surface of the glass 100 has flaws. In some embodiments, the glass 100 can be placed on a conveyor belt, and the corresponding equipment is designed in each step, and the glass 100 is sequentially passed through the corresponding equipment horizontally, and the above-described horizontal glass etching method has been completed. The horizontal glass etching method of the present invention processes the glass 100 in a horizontal manner. Compared with the conventional vertical immersion technique, the defects caused by the aforementioned vertical immersion can be overcome, that is, the glass 100 is placed horizontally, and the atomizing agent and the actin agent do not generate additional traces due to gravity flow; the glass 100 When placed horizontally, when the glass 100 is sprayed with the atomizing agent and the actin agent, the glass 100 can be uniformly sprayed with the atomizing agent and the actin agent; the glass 100 is placed horizontally, and the glass 100 is not bent due to uneven force. Or break. The horizontal glass etching method of the present invention can greatly improve the production yield of the glass 100, and can also significantly improve the production efficiency and quality, and can produce a high-quality anti-glare glass product that meets market demands. The present invention has been described above, but it is not intended to limit the scope of patent rights claimed herein. The scope of patent protection is subject to the scope of the patent application and its equivalent fields. Any changes or modifications made by those skilled in the art without departing from the spirit or scope of this patent are subject to the equivalent changes or designs made in the spirit of the present disclosure and should be included in the scope of the patent application below. Inside.

10‧‧‧風刀裝置10‧‧‧Air knife device

11‧‧‧中性清潔劑11‧‧‧Neutral detergent

12‧‧‧去氧化層活化劑12‧‧‧Deoxidized layer activator

13‧‧‧超純水13‧‧‧Ultra pure water

14‧‧‧第一霧化劑14‧‧‧First atomizing agent

15‧‧‧第二霧化劑15‧‧‧Second atomizer

16‧‧‧除晶劑16‧‧‧Desalting agent

17‧‧‧光化劑17‧‧‧Photochemical

100‧‧‧玻璃100‧‧‧ glass

110‧‧‧第一表面110‧‧‧ first surface

111‧‧‧第一霧化顆粒111‧‧‧First atomized particles

112‧‧‧第二霧化顆粒112‧‧‧Second atomized particles

113‧‧‧矽晶沙113‧‧‧矽晶沙

114‧‧‧光化結構114‧‧‧Photochemical structure

120‧‧‧第二表面120‧‧‧second surface

121‧‧‧薄膜121‧‧‧film

S010~S082‧‧‧流程圖步驟S010~S082‧‧‧ Flowchart steps

圖1A與圖1B所繪示為本發明之水平式玻璃蝕刻的方法。 圖2A至圖2P水平式玻璃蝕刻的示意圖。1A and 1B illustrate a method of horizontal glass etching of the present invention. 2A to 2P are schematic views of horizontal glass etching.

Claims (10)

一種水平式玻璃蝕刻的方法,包括: A010:提供一玻璃,以水平放置該玻璃,該玻璃包括一第一表面與一第二表面; A020:於該玻璃之該第二表面設置一薄膜; A030:在該玻璃之該第一表面噴塗一去氧化層活化劑; A040:在該玻璃之該第一表面噴塗一第一霧化劑,在該第一表面上形成多個第一霧化顆粒; A050:在該玻璃之該第一表面噴塗一第二霧化劑,使該第一霧化顆粒形成多個第二霧化顆粒; A060:在該玻璃之該第一表面噴塗一除晶劑; A070:在該玻璃之該第一表面噴塗一光化劑,使該第二霧化顆粒形成多個光化結構;及 A080:移除該薄膜。A method for horizontal glass etching, comprising: A010: providing a glass to horizontally place the glass, the glass comprising a first surface and a second surface; A020: providing a film on the second surface of the glass; A030 Spraying a deoxidizing layer activator on the first surface of the glass; A040: spraying a first atomizing agent on the first surface of the glass to form a plurality of first atomizing particles on the first surface; A050: spraying a second atomizing agent on the first surface of the glass to form the plurality of second atomizing particles; A060: spraying a de-crystalizing agent on the first surface of the glass; A070: spraying an actinizing agent on the first surface of the glass to form the second atomized particles to form a plurality of actinic structures; and A080: removing the film. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,其中在步驟A10與A20之間還包括: A011:清潔該玻璃;及 A012:乾燥該玻璃; 在步驟A80之後還包括: A081:清潔該玻璃;及 A082:乾燥該玻璃。The method of horizontal glass etching according to claim 1, wherein the step A10 and A20 further comprises: A011: cleaning the glass; and A012: drying the glass; and after step A80, further comprising: A081: cleaning the Glass; and A082: Dry the glass. 如申請專利範圍第2項之水平式玻璃蝕刻的方法,其中,步驟A011、A081中,是使用中性清潔劑清洗該玻璃。A method of horizontal glass etching according to claim 2, wherein in steps A011 and A081, the glass is cleaned using a neutral detergent. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A030中,該第一表面之去氧化深度是控制在300奈米以下。In the method of horizontal glass etching according to claim 1, in step A030, the deoxidation depth of the first surface is controlled to be less than 300 nm. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A040中,該第一霧化顆粒尺寸是介於100~500奈米之間;在步驟A050中,該第二霧化顆粒尺寸是介於20~90奈米之間。In the method of horizontal glass etching according to claim 1, in step A040, the first atomized particle size is between 100 and 500 nanometers; in step A050, the second atomized particle size is It is between 20 and 90 nm. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A060中,該除晶劑是一種酸性物質,適於除去該第一霧化顆粒或該第二霧化顆粒間的矽晶沙。The method of horizontal glass etching according to claim 1, wherein in step A060, the seed remover is an acidic substance suitable for removing the first atomized particles or the twinned sand between the second atomized particles. . 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A070中,該光化結構的厚度是控制在100奈米以下。In the method of horizontal glass etching according to claim 1, in step A070, the thickness of the actinic structure is controlled to be less than 100 nm. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A070中,該光化劑為一種無氫氟混酸鹽物質。In the method of horizontal glass etching according to claim 1, in step A070, the actin is a hydrofluorinated acid-free substance. 如申請專利範圍第2項之水平式玻璃蝕刻的方法,在步驟A012、A082中,是使用風刀使該玻璃乾燥。In the method of horizontal glass etching according to item 2 of the patent application, in steps A012 and A082, the glass is dried using an air knife. 如申請專利範圍第1項之水平式玻璃蝕刻的方法,在步驟A020中,該薄膜為一抗氟酸高分子薄膜。In the method of horizontal glass etching according to claim 1 of the patent application, in step A020, the film is a polymer film of a hydrofluoric acid resistant polymer.
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