TWI645759B - Surface-treated copper foil for printed wiring board, copper-clad laminated board for printed wiring board, and printed wiring board - Google Patents

Surface-treated copper foil for printed wiring board, copper-clad laminated board for printed wiring board, and printed wiring board Download PDF

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TWI645759B
TWI645759B TW105140617A TW105140617A TWI645759B TW I645759 B TWI645759 B TW I645759B TW 105140617 A TW105140617 A TW 105140617A TW 105140617 A TW105140617 A TW 105140617A TW I645759 B TWI645759 B TW I645759B
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copper foil
printed wiring
wiring board
coupling agent
roughened
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TW201735754A (en
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齋藤貴広
繪面健
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古河電氣工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

一種印刷配線板用表面處理銅箔,其在形成有粗化粒子的表面上具有矽烷耦合劑層,在該矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,該矽烷耦合劑層表面之BET表面積比為1.2以上,細微表面係數Cms為2.0以上且未達8.0。 A surface-treated copper foil for a printed wiring board includes a silane coupling agent layer on a surface on which roughened particles are formed, and an average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.5 μm. The BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more, and the fine surface coefficient Cms is 2.0 or more and less than 8.0.

Description

印刷配線板用表面處理銅箔、印刷配線板用覆銅積層板及印刷配線板 Surface-treated copper foil for printed wiring board, copper-clad laminated board for printed wiring board, and printed wiring board

本發明係有關於一種印刷配線板用表面處理銅箔。此外,本發明係有關於一種使用該印刷配線板用表面處理銅箔的印刷配線板用覆銅積層板及使用該印刷配線板用表面處理銅箔的印刷配線板。 The present invention relates to a surface-treated copper foil for a printed wiring board. The present invention also relates to a copper-clad laminate for a printed wiring board using the surface-treated copper foil for a printed wiring board and a printed wiring board using the surface-treated copper foil for the printed wiring board.

近年來,伴隨著電腦或是資訊通訊機器的高性能、高機能化,或網際網路化的發展,有必要將大容量之資訊以更加高速的方式進行傳輸處理。因此,所傳輸的訊號有趨於更加高頻化的傾向,而要求印刷配線板可抑制高頻訊號的傳輸損耗。在製作印刷配線板中,通常為積層銅箔與絕緣性基材(樹脂基材),製作將其等進行加熱、加壓而接著的覆銅積層板,使用該覆銅積層板而形成導體電路。當將高頻訊號傳輸(高頻傳輸)至該導體電路之際的傳輸損耗方面,為與導體損耗、介電損耗、輻射損耗這三個要素有關。 In recent years, with the development of high performance and high performance of computers or information communication equipment, or the development of the Internet, it is necessary to transfer and process large-capacity information at a higher speed. Therefore, the transmitted signals tend to be more high-frequency, and printed wiring boards are required to suppress the transmission loss of high-frequency signals. In the production of a printed wiring board, a copper foil and an insulating base material (resin base material) are usually laminated, and a copper-clad laminated board which is heated and pressurized is produced, and a conductor circuit is formed using the copper-clad laminated board . When transmitting high-frequency signals (high-frequency transmission) to the conductor circuit, the transmission loss is related to the three elements of conductor loss, dielectric loss, and radiation loss.

導體損耗,係起因於導體電路之表面電阻而產生者。在使用覆銅積層板而形成的導體電路中傳輸高頻訊號後,產生集膚效應(skin-effect)現象。亦即,當在導體電路中流通交流電後,磁束便產生變化,而在導體電路之中心部產生反電動勢,其結果,造成電流難以在導體中心部流動,反而產生導體表面部分(表皮部分)的電流密度升高的現象。此種集膚效應現象係為,為使導體之有效斷面積減少,而產生所謂的表面電阻。 電流所流動的表皮部分之厚度(集膚深度),為與頻率的平方根成反比例。 Conductor loss is caused by the surface resistance of the conductor circuit. After a high-frequency signal is transmitted in a conductor circuit formed using a copper-clad laminated board, a skin-effect phenomenon occurs. That is, when alternating current flows in a conductor circuit, the magnetic beam changes, and a back electromotive force is generated in the center portion of the conductor circuit. As a result, it is difficult for a current to flow in the center portion of the conductor, and instead, a conductor surface portion (skin portion) is generated. The phenomenon of increased current density. Such a skin effect phenomenon is that in order to reduce the effective cross-sectional area of a conductor, so-called surface resistance is generated. The thickness (skin depth) of the epidermal portion through which the current flows is inversely proportional to the square root of the frequency.

近年來,開發有如超過20GHz的高頻對應機器。當頻率在導體電路中傳輸GHz波段的高頻訊號時,集膚深度約形成為2μm或其以下,造成電流僅僅在導體的極為表層上流動。因此,在該高頻對應機器中使用的覆銅積層板中,若銅箔的表面粗度變大時,由該銅箔所形成之導體的傳輸路徑(也就是表皮部分的傳輸路徑)也會變長,增加傳輸損耗。從而,對高頻對應機器種所採用的覆銅積層板之銅箔,期望能減小其表面粗度。 In recent years, high-frequency compatible devices such as those exceeding 20 GHz have been developed. When a high-frequency signal in the GHz band is transmitted in a conductor circuit at a frequency, the skin depth is formed to be about 2 μm or less, causing current to flow only on the extreme surface layer of the conductor. Therefore, in the copper-clad laminated board used in this high-frequency-compatible device, if the surface roughness of the copper foil becomes larger, the transmission path of the conductor formed by the copper foil (that is, the transmission path of the skin portion) also becomes It becomes longer and increases transmission loss. Therefore, it is desirable to reduce the surface roughness of the copper foil of the copper-clad laminated board used in the high-frequency corresponding equipment.

另一方面,一般在印刷配線板中所使用的銅箔,為利用電鍍或蝕刻等手法,在其表面形成粗化處理層(形成粗化粒子之層),藉由物理性的效果(定錨效應,Anchoring Effect)而提升與樹脂基材之間的接著力。不過,若為了有效提升與樹脂基材之間的接著力,而增大形成於銅箔表面上的粗化粒子時,如上所述,將導致傳輸損耗的増加。 On the other hand, the copper foil generally used in printed wiring boards uses a method such as plating or etching to form a roughened layer (a layer that forms roughened particles) on the surface, and uses a physical effect (anchoring Effect, Anchoring Effect) to improve adhesion to the resin substrate. However, if the roughened particles formed on the surface of the copper foil are increased in order to effectively improve the adhesion with the resin substrate, as described above, the transmission loss will increase.

介電損耗,係起因於樹脂基材之介電率或正切損耗(dissipation factor)。當將脈衝訊號流動於導體電路時,導體電路周遭的電場便會產生變化。當該電場進行變化的周期(頻率)接近樹脂基材之分極的緩和時間(產生分極之荷電體的移動時間)時(亦即,進行高頻化後),在電場變化中便會發生遲延。在該種狀態之下,樹脂內部產生分子摩擦、而有熱產生,造成傳輸損耗。為了抑制該介電損耗,作為覆銅積層板之樹脂基材,為必須採用極性較大、且置換基之量較少的樹脂,或是須採用不具有極性大之置換基的樹脂,而使得難以產生伴隨於電場變化的樹脂基材之分極。 Dielectric loss is caused by the dielectric constant or tangent loss of the resin substrate. When a pulse signal flows through a conductor circuit, the electric field around the conductor circuit changes. When the period (frequency) at which the electric field changes is close to the relaxation time (moving time of the charged body that generates the polarization) of the resin substrate (that is, after the high frequency is generated), a delay occurs in the electric field change. In this state, molecular friction is generated inside the resin, and heat is generated, causing transmission loss. In order to suppress the dielectric loss, as the resin substrate of the copper-clad laminated board, a resin having a large polarity and a small amount of substitution group must be used, or a resin having no substitution group having a large polarity must be used, so that It is difficult to generate a polarization of the resin substrate accompanying the change in the electric field.

另一方面,印刷配線板中所使用的銅箔,除了形成該粗化處理層之外,還藉由矽烷耦合劑而將銅箔表面進行處理,藉此以化學性的提升與樹脂基材之間的接著力。當化學性的提升矽烷耦合劑與樹脂基材之間的接著力時,樹脂基材有必要具有某種程度的極性較大的置換劑,然而,為了抑制介電損耗,使用減少樹脂基材中極性大的置換基之量的低介電性基材時,將造成化學性接著力降低,難以確保銅箔與樹脂基材間之充分的接著性。 On the other hand, in addition to forming the roughened layer, the copper foil used in the printed wiring board is treated with a silane coupling agent to treat the surface of the copper foil. Time between forces. When the adhesion between the silane coupling agent and the resin substrate is chemically improved, it is necessary for the resin substrate to have a somewhat polar displacement agent. However, in order to suppress the dielectric loss, it is necessary to reduce the When a low-dielectric base material having a large amount of a substituent group is used, the chemical adhesion force is lowered, and it is difficult to ensure sufficient adhesion between the copper foil and the resin base material.

如此,在覆銅積層板中,抑制傳輸損耗以及提升(提升耐久性)銅箔與樹脂基材間之密接性(接著性),存在著一種相互權衡取捨(trade off)的關係。 As described above, in a copper clad laminate, there is a trade-off relationship between suppression of transmission loss and improvement (improvement in durability) of the adhesion (adhesion) between the copper foil and the resin substrate.

近年來,高頻對應印刷配線板在更加要求可靠度之領域中迅速發展。例如,作為在車載用途等移動通訊的印刷配線基板的使用上,為要求即使在高溫環境等嚴苛環境下仍可使用的高可靠度。為了因應此種要求,於覆銅積層板方面,則必須要高度提升銅箔與樹脂基材間的密接性。 In recent years, high-frequency compatible printed wiring boards have been rapidly developed in areas where reliability is more required. For example, the use of printed wiring boards for mobile communications such as automotive applications requires high reliability even in severe environments such as high-temperature environments. In order to meet such requirements, in terms of copper clad laminates, it is necessary to highly improve the adhesion between the copper foil and the resin substrate.

為了滿足該等需求,展開有各式技術的開發。例如,在專利文獻1中記載有一種表面處理銅箔,為使粗化粒子附著至銅箔,形成表面粗度Rz為1.5至4.0μm、明度值為30以下的粗化面,該粗化粒子以指定密度呈現略均等狀的分布,而在該表面處理銅箔則具有由該粗化粒子所形成之突起物,該突起物為具有指定的高度及寬度,且於專利文獻1中還記載,藉由使用該種表面處理銅箔,可提升以液晶聚合物為始之與高頻電路基板用樹脂基材之間的密接性。 To meet these needs, various technologies have been developed. For example, Patent Document 1 describes a surface-treated copper foil that forms a roughened surface having a surface roughness Rz of 1.5 to 4.0 μm and a lightness value of 30 or less in order to adhere the roughened particles to the copper foil. It has a slightly uniform distribution at a specified density, and the surface-treated copper foil has protrusions formed of the roughened particles, the protrusions have a specified height and width, and are also described in Patent Document 1, By using such a surface-treated copper foil, the adhesion between a liquid crystal polymer and a resin base material for a high-frequency circuit board can be improved.

在智慧型手機或平板電腦這一類型的小型電子機器中,由容易配線或輕量性的觀點,採用可撓性印刷配線板(以下,簡稱為FPC)。近 年來,伴隨著該等小型電子機器的高機能化,亦有訊號傳輸速度高速化的傾向,FPC之阻抗匹配(輸出阻抗與輸入阻抗的匹配)便成為重要的課題。為實現針對訊號傳輸速度之高速化的阻抗匹配,實施有將作為FPC基礎的樹脂基材(具代表性的為聚醯亞胺)厚層化的措施。 In a small electronic device such as a smart phone or a tablet, a flexible printed wiring board (hereinafter, referred to as FPC) is used from the viewpoint of easy wiring and light weight. near Over the years, along with the high performance of these small electronic devices, and the tendency of high-speed signal transmission, the impedance matching (matching of output impedance and input impedance) of FPC has become an important issue. In order to achieve high-speed impedance matching for signal transmission speeds, measures have been taken to thicken a resin substrate (typically polyfluorene), which is the basis of FPC.

FDC則接合於液晶基材,或搭載IC芯片等,被進行規定之加工。進行該加工時之對位方面,將可透過藉由蝕刻被去除之樹脂基材來辨識的定位圖案作為指標而進行。因此,在調合上述位置時,樹脂基材之透過性(可辨識性)變得很重要。這種樹脂基材的透過性為,通常利用可見領域的全光透光率和霧度(霧影值)來進行評估和管理。近年來,伴隨著樹脂基材的厚層化和調位置程序之多樣化的發展,對蝕刻後的樹脂基材所要求之透過性的水準亦有提高的趨勢。蝕刻法後的樹脂基材之透過性,除了樹脂本身的特性之外,對與樹脂基材相貼合的銅箔表面的形狀亦發揮較大的影響。 FDC is bonded to a liquid crystal substrate, or mounted with an IC chip, and is subjected to a predetermined process. Regarding the alignment during the processing, the positioning pattern that can be identified through the resin substrate removed by etching is used as an index. Therefore, when the above positions are blended, the permeability (identifiability) of the resin substrate becomes important. The transmittance of such a resin substrate is generally evaluated and managed using the total light transmittance and haze (haze value) in the visible range. In recent years, with the development of thickening of resin substrates and the diversification of position adjustment procedures, the level of permeability required for resin substrates after etching has also increased. The permeability of the resin substrate after the etching method has a large influence on the shape of the surface of the copper foil bonded to the resin substrate in addition to the characteristics of the resin itself.

具有如聚酸亞胺和液晶聚合物等這種可撓性樹脂基材,將在高溫高壓條件下與銅箔相貼合。在這種情況下,因為樹脂滲入至形成於銅箔之粗化處理表面上的粗化粒子之根部,粗化粒子越大則被轉印至樹脂上的凹凸亦越深,結果導致透過蝕刻後的樹脂基材的光線容易散亂,有透光性變差的傾向。 Flexible resin substrates such as polyimide and liquid crystal polymers will be bonded to copper foil under high temperature and high pressure conditions. In this case, because the resin penetrates into the roots of the roughened particles formed on the roughened surface of the copper foil, the larger the roughened particles, the deeper the unevenness that is transferred to the resin, resulting in after-etching. The light of the resin substrate is easy to be scattered, and the light transmittance tends to be deteriorated.

此外,在有關FPC的專利文獻2中記載有一種適用於晶粒軟模封裝(COF)形式的FPC,該FPC所具有的電解銅箔係構成為,在接著至絕緣層的接著面上,具備由鎳-鋅合金形成的防鏽處理層,該接著面的表面粗度(Rz)為0.05至1.5μm,於入射角60°中的鏡面光澤度達250以上;並記載有,該FPC顯示優良的光透過率,且銅箔與樹脂之間的密接性 為優良。 In addition, Patent Document 2 concerning FPC describes an FPC suitable for a die flexible mold package (COF) format. The FPC has an electrolytic copper foil structure that is provided on a bonding surface that is bonded to an insulating layer. An anti-rust treatment layer made of a nickel-zinc alloy, the surface roughness (Rz) of the bonding surface is 0.05 to 1.5 μm, and the specular gloss at an angle of incidence of 60 ° is more than 250; it is also described that the FPC shows excellent Light transmittance and adhesion between copper foil and resin As excellent.

此外,在專利文獻3中則記載有一種表面處理銅箔,為藉由粗化處理形成粗化粒子,係將粗化處理面的平均粗度Rz設為0.5至1.3μm、光澤度設為4.8至68、粗化粒子的表面積A與由該銅箔表面側俯視觀察粗化粒子所得的面積B間之比A/B設為2.00至2.45;並記載有,將該表面處理銅箔與樹脂基板積層所形成的銅張積層板為,經蝕刻銅箔之後的樹脂透明性則良好,且銅箔與樹脂之間的密接性為優良。 In addition, Patent Document 3 describes a surface-treated copper foil. In order to form roughened particles by roughening, the roughened surface has an average roughness Rz of 0.5 to 1.3 μm and a gloss of 4.8. To 68. The ratio A / B between the surface area A of the roughened particles and the area B of the roughened particles as viewed from the surface of the copper foil is 2.00 to 2.45; and it is described that the surface-treated copper foil and the resin substrate The copper-clad laminated board formed by the lamination has good resin transparency after etching the copper foil, and excellent adhesion between the copper foil and the resin.

【先行技術文獻】[Advanced technical literature] 【專利文獻】[Patent Literature]

專利文獻1:日本專利第4833556號公報 Patent Document 1: Japanese Patent No. 4833556

專利文獻2:日本專利第4090467號公報 Patent Document 2: Japanese Patent No. 4090467

專利文獻3:日本專利第5497808號公報 Patent Document 3: Japanese Patent No. 5497808

上述專利文獻1所記載的表面處理銅箔為,與高頻對應樹脂基材之間的密接性良好,但使用該表面處理銅箔地覆銅積層板在GHz波段之高頻波段中,傳輸損耗高、無法充分滿足高頻對應印刷配線板所需之高要求。 The surface-treated copper foil described in the above-mentioned Patent Document 1 has good adhesion to a high-frequency-resisting resin substrate, but the copper-clad laminated board using the surface-treated copper foil has a transmission loss in the high-frequency band of the GHz band. High, can not fully meet the high requirements of high frequency corresponding printed wiring board.

此外,在上述專利文獻2中所記載之FPC所採用的電解銅箔,並未實施粗化處理,除了COF以外,並無法實現在印刷配線板中所要求之與樹脂基材之間的高密接性。 In addition, the electrolytic copper foil used in the FPC described in the above-mentioned Patent Document 2 has not been subjected to a roughening treatment, and in addition to COF, the high-tightness and resin substrate required for a printed wiring board cannot be achieved. Sex.

此外,在上述專利文獻3中記載之表面處理銅箔為,作為樹脂基材使用低介電基材的情況之下不能得到與樹脂基材之間的足夠的密接性。 Moreover, the surface-treated copper foil described in the said patent document 3 is that when the low-dielectric base material is used as a resin base material, sufficient adhesiveness with a resin base material cannot be obtained.

本發明之課題在於提供一種如後所述之印刷配線板用表面處理銅箔,藉由該印刷配線板用表面處理銅箔,可獲得即便傳輸GHz波段之高頻訊號時,仍能高度抑制傳輸損耗,仍能提高銅箔與樹脂基材之間的密接性,且具有優越的耐久性及可辨識性的印刷配線板。此外,本發明之課題在於提供使用該印刷配線板用表面處理銅箔的印刷配線板用覆銅積層板、以及使用該印刷配線板用表面處理銅箔的印刷配線板(電路基板)。 The object of the present invention is to provide a surface-treated copper foil for a printed wiring board, which will be described later. By using the surface-treated copper foil for a printed wiring board, it is possible to achieve a high degree of transmission suppression even when transmitting high-frequency signals in the GHz band. Loss, printed wiring board that can still improve the adhesion between the copper foil and the resin substrate, and has superior durability and recognizability. Another object of the present invention is to provide a copper-clad laminated board for a printed wiring board using the surface-treated copper foil for a printed wiring board, and a printed wiring board (circuit board) using the surface-treated copper foil for the printed wiring board.

本發明之上述課題係可藉由下述手段獲得解決。 The above-mentioned problems of the present invention can be solved by the following means.

【1】一種印刷配線板用表面處理銅箔,其在形成有粗化粒子的表面具有矽烷耦合劑層,在該矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,在該矽烷耦合劑層表面中的BET表面積比為1.2以上,細微表面係數Cms為2.0以上且未達8.0。 [1] A surface-treated copper foil for a printed wiring board, which has a silane coupling agent layer on a surface on which roughened particles are formed, and an average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.5 μm, the BET surface area ratio on the surface of the silane coupling agent layer is 1.2 or more, and the fine surface coefficient Cms is 2.0 or more and less than 8.0.

【2】如(1)之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.3μm。 [2] The surface-treated copper foil for a printed wiring board according to (1), wherein the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.3 μm.

【3】 如(1)或(2)之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層表面的L*a*b*表色系中的L*為40以上且未達60。 [3] (1) or (2) of the printed wiring board surface treated copper foil, wherein, in the L * a * b surface layer of the silane-coupling agent * color system of L * is 40 or more and less than 60.

【4】如(1)至(3)之印刷配線板用表面處理銅箔,在上述已形成粗化粒子的表面,係具備具有選自鉻(Cr)、鐵(Fe)、鈷(Co)、鎳(Ni)、銅(Cu)、鋅(Zn)、鉬(Mo)、及錫(Sn)中之至少一種金屬的金屬處理層,或是較佳為具備具有選自由鉻、鐵、鈷、鎳、銅、鋅、鉬、及錫中之至少兩種以上之金屬所形成之合金的金屬處理層。 [4] The surface-treated copper foil for printed wiring boards according to (1) to (3), which has a surface on which the roughened particles have been formed, is provided with a material selected from the group consisting of chromium (Cr), iron (Fe), and cobalt (Co). , Nickel (Ni), copper (Cu), zinc (Zn), molybdenum (Mo), and tin (Sn) at least one metal metal treatment layer, or preferably has a metal selected from the group consisting of chromium, iron, cobalt A metal-treated layer of an alloy formed of at least two metals of nickel, copper, zinc, molybdenum, and tin.

【5】如(1)至(4)中任一項之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層中所含有的矽元素量為0.5μg/dm2以上且未達15μg/dm2[5] The surface-treated copper foil for a printed wiring board according to any one of (1) to (4), wherein the amount of the silicon element contained in the silane coupling agent layer is 0.5 μg / dm 2 or more and less than 15 μg / dm 2 .

【6】如(1)至(5)中任一項之印刷配線板用表面處理銅箔,其中,該矽烷耦合劑具有選自環氧基、胺基、乙烯基、(甲基)丙烯醯基、苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基中之至少一種官能基。 [6] The surface-treated copper foil for a printed wiring board according to any one of (1) to (5), wherein the silane coupling agent has a member selected from the group consisting of an epoxy group, an amino group, a vinyl group, and a (meth) acrylic acid. At least one of functional groups, such as methyl, styryl, urea, isocyanurate, mercapto, sulfide, and isocyanate.

【7】一種印刷配線板用覆銅積層板,係在(1)至(6)中任一項之印刷配線板用表面處理銅箔的該矽烷耦合劑層表面積層樹脂層而成。 [7] A copper-clad laminated board for a printed wiring board, comprising a resin layer of the silane coupling agent layer surface area layer of the surface-treated copper foil for a printed wiring board according to any one of (1) to (6).

【8】一種印刷配線板,其使用(7)之印刷配線板用覆銅積層板。 [8] A printed wiring board using the copper-clad laminated board for a printed wiring board of (7).

本發明之印刷配線板用表面處理銅箔係為,藉由將其使用在印刷配線板之導體電路,而可獲得可高度抑制傳輸GHz波段之高頻訊號時的傳輸損耗,並可提升銅箔與樹脂基材(樹脂層)間之密接性,且具有優越的耐久性和可辨識性的印刷配線板。 The surface-treated copper foil for a printed wiring board of the present invention is such that by using it in a conductor circuit of a printed wiring board, it is possible to obtain a high degree of suppression of transmission loss when transmitting high-frequency signals in the GHz band, and to improve the copper foil. A printed wiring board with excellent adhesion to a resin substrate (resin layer) and superior durability and recognizability.

本發明之印刷配線板用覆銅積層板係為,藉由將其作為印刷配線板的基板使用,所獲得的印刷配線板將具有傳輸GHz波段之高頻訊號時的傳輸損耗得以受到高度抑制,並且可提升銅箔與樹脂基材間之密接性,且具有優越的耐久性和可辨識性。 The copper-clad laminated board for a printed wiring board of the present invention is such that by using it as a substrate for a printed wiring board, the transmission loss of the obtained printed wiring board when transmitting high-frequency signals in the GHz band can be highly suppressed. And it can improve the adhesion between the copper foil and the resin substrate, and has superior durability and recognizability.

本發明之印刷配線板係為,傳輸GHz波段之高頻訊號時的傳輸損耗得以受到高度抑制,並且可提升銅箔與樹脂基材間之密接性,且具有優越的耐久性和可辨識性的印刷配線板。 The printed wiring board of the present invention is such that the transmission loss when transmitting high-frequency signals in the GHz band is highly suppressed, and the adhesion between the copper foil and the resin substrate is improved, and it has excellent durability and recognizability. Printed wiring board.

適當參照附圖並根據下述記載,可明確本發明之上述及其他特徵以及優點。 The above and other features and advantages of the present invention will be made clear with reference to the drawings and the following description, as appropriate.

圖1所示為測定粗化粒子高度之方法之一例的說明圖。 FIG. 1 is an explanatory diagram showing an example of a method for measuring the height of roughened particles.

圖2所示為測定粗化粒子高度之方法之一例的說明圖。 FIG. 2 is an explanatory diagram showing an example of a method for measuring the height of roughened particles.

關於本發明之印刷配線板用表面處理銅箔較佳實施形態,說明如下。 The preferable embodiment of the surface-treated copper foil for printed wiring boards of this invention is demonstrated below.

〔印刷配線板用表面處理銅箔〕 [Surface-treated copper foil for printed wiring boards]

本發明之印刷配線板用表面處理銅箔(以下,簡稱為「本發明之表面處理銅箔」)係為,藉由矽烷耦合劑處理(亦即,在已形成粗化粒子之表面上具有矽烷耦合劑層)已形成粗化粒子的表面(因應需要,又附著有防腐金屬之面),在該矽烷耦合劑層表面(表面處理銅箔最表面),粗化粒子之平均高度為0.05μm以上、未達0.5μm,該矽烷耦合劑層表面之BET表面積比為1.2以上。且、該矽烷耦合劑層表面的細微表面積係數(Cms)為2.0以上,未達8.0。在本發明之表面處理銅箔中,是為矽烷耦合劑層表面,且於該表面所測定之粗化粒子的平均高度為0.05μm以上、未達0.5μm,並且將該表面之BET表面積比達1.2以上,且該表面的Cms為2.0以上,未達8.0的面,單純稱之為「粗化處理面」。粗化處理面雖較佳為使其整體由矽烷耦合劑所覆蓋,不過,只要可達到本發明之效果,亦可使矽烷耦合劑僅覆蓋粗化處理面的一部分(亦即,只要可達到本發明之效果,即使粗化處理面之矽烷耦合劑層的一部分發生有膜缺損的情況亦可,該形態亦包含於本發明中之「具有矽烷耦合劑層」的形態中)。 The surface-treated copper foil for a printed wiring board of the present invention (hereinafter, simply referred to as the "surface-treated copper foil of the present invention") is treated with a silane coupling agent (that is, having a silane on the surface on which roughened particles have been formed). Coupling agent layer) The surface of roughened particles has been formed (the surface with anti-corrosion metal attached if necessary). On the surface of the silane coupling agent layer (the surface of the surface-treated copper foil), the average height of the roughened particles is 0.05 μm or more. And less than 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more. The fine surface area coefficient (Cms) of the surface of the silane coupling agent layer is 2.0 or more and less than 8.0. The surface-treated copper foil of the present invention is the surface of the silane coupling agent layer, and the average height of the roughened particles measured on the surface is 0.05 μm or more and less than 0.5 μm, and the BET surface area ratio of the surface is 1.2 or more, and the surface with a Cms of 2.0 or more and less than 8.0 is simply called a "roughened surface". Although the roughened surface is preferably covered with a silane coupling agent as a whole, as long as the effect of the present invention can be achieved, the silane coupling agent can also cover only a part of the roughened surface (that is, as long as the According to the effect of the invention, even if a film defect occurs in a part of the silane coupling agent layer on the roughened surface, this form is also included in the form of "having a silane coupling agent layer" in the present invention).

本發明之表面處理銅箔,僅至少單面為粗化處理面即可,亦可雙面皆為粗化處理面。本發明之表面處理銅箔,一般為僅有單面為粗化處理面之形態。 The surface-treated copper foil of the present invention only needs to be a roughened surface on at least one side, or both sides may be roughened surfaces. The surface-treated copper foil of the present invention generally has a form in which only one surface is a roughened surface.

在本發明之表面處理銅箔中,粗化處理面即使粗化粒子的平均高度未達0.5μm而呈現較低狀,BET表面積比仍為1.2以上而呈較大值。因此,在經由該粗化處理面積層表面處理銅箔與樹脂層,製作覆銅積層板之際,藉由粗化粒子的定錨效應與較大的表面積之結合,將可高度提升銅箔與樹脂層間之密接性,獲得具優越耐熱性的覆銅積層板。此外,由於該 粗化處理面,其粗化粒子的平均高度未達0.5μm而呈現較低狀,故而可降低粗化粒子的存在對傳輸路徑長度的影響。因此,在使用該覆銅積層板之導體電路中,當傳輸GHz波段之高頻訊號之際,亦可有效的抑制傳輸損耗。 In the surface-treated copper foil of the present invention, even if the roughened surface shows an average height of less than 0.5 μm of roughened particles, the BET surface area ratio is still larger than 1.2. Therefore, when the copper foil and the resin layer are processed through the surface of the roughened area layer to produce a copper-clad laminate, the anchoring effect of the roughened particles and a large surface area can be used to highly enhance the copper foil and Adhesiveness between resin layers to obtain a copper-clad laminate with superior heat resistance. In addition, since the The roughened surface has an average height of the roughened particles that is less than 0.5 μm and appears relatively low, so the influence of the presence of the roughened particles on the length of the transmission path can be reduced. Therefore, in the conductor circuit using the copper-clad laminated board, when transmitting high-frequency signals in the GHz band, transmission loss can also be effectively suppressed.

在此之前,人們無法得知在銅箔表面上形成平均高度未達0.5μm之微小粗化粒子的同時將BET表面積比提升至1.2以上的方法。本發明者們在此種狀況下,藉由採用後述之特定的粗化電鍍處理條件,成功製作出具有平均高度為0.05μm以上、未達0.5μm的粗化粒子,且BET表面積比達1.2以上的銅箔表面,進而完成本發明。 Prior to this, it was not known how to increase the BET surface area ratio to 1.2 or more while forming micro-roughened particles with an average height of less than 0.5 μm on the surface of the copper foil. Under these circumstances, the present inventors have successfully produced roughened particles having an average height of 0.05 μm or more and less than 0.5 μm, and a BET surface area ratio of 1.2 or more by using specific roughening plating treatment conditions described later. Surface of the copper foil to complete the present invention.

從維持與樹脂基材間之高密接性的同時,更加有效的減低傳輸損耗的觀點,在上述粗化處理面中之上述粗化粒子的平均高度,較佳為0.05μm以上、未達0.5μm,更佳為0.05μm以上、未達0.3μm。 From the viewpoint of more effectively reducing transmission loss while maintaining high adhesion to the resin substrate, the average height of the roughened particles on the roughened surface is preferably 0.05 μm or more and less than 0.5 μm. , More preferably 0.05 μm or more and less than 0.3 μm.

在本發明中,粗化粒子較佳係形成為在粗化處理面整體呈一樣(均質)狀。粗化粒子的平均高度則藉由後述實施例所記載的方法進行測定。 In the present invention, the roughened particles are preferably formed so as to be uniform (homogeneous) over the entire roughened surface. The average height of the roughened particles was measured by a method described in Examples described later.

上述BET表面積比,為藉由BET法,依據表面積的測定方法計算而得。亦即,上述BET表面積比係為,使吸附占有面積為已知的氣體分子吸附至試料表面,根據該吸附量而求出試料的表面積(BET測定表面積),從該BET測定表面積減去假設於試料表面無凹凸狀態之表面積(試料切出面積)之值,該值對該試料切出面積之比則為BET表面積比,藉由後述實施例中所記載的方法來進行測定。 The above-mentioned BET surface area ratio is calculated by a BET method based on a measurement method of a surface area. That is, the above-mentioned BET surface area ratio is such that a gas molecule having a known adsorption occupied area is adsorbed on the sample surface, and the surface area (BET measurement surface area) of the sample is obtained based on the adsorption amount, and the BET measurement surface area is subtracted from The value of the surface area (sample cut-out area) where the surface of the sample has no unevenness, and the ratio of this value to the sample cut-out area is the BET surface area ratio, and is measured by the method described in the examples described later.

在本發明之表面處理銅箔中,粗化處理面的BET表面積比係為,其值越大,則意味著表面積越大。從而,粗化處理面之上述BET表面積比越大,則更加提升與樹脂間之相互作用性,伴隨著粗化粒子的定錨效應,提升積 層樹脂層時之銅箔與樹脂層間之密接性。在本發明之表面處理銅箔中,粗化處理面之BET表面積比係以1.2以上、10以下為佳,以4以上、8以下為更佳。 In the surface-treated copper foil of the present invention, the BET surface area ratio of the roughened surface is such that the larger the value, the larger the surface area. Therefore, the larger the above-mentioned BET surface area ratio of the roughened surface, the more the interaction with the resin is improved, and the anchoring effect of the roughened particles increases the product. The adhesion between the copper foil and the resin layer when the resin layer is laminated. In the surface-treated copper foil of the present invention, the BET surface area ratio of the roughened surface is preferably 1.2 or more and 10 or less, and more preferably 4 or more and 8 or less.

在銅箔的表面積測定中,一般採用之利用雷射顯微鏡所實施的表面積測定方面,在原理上,由於粗化粒子的形狀造成雷射光無法到達的形成為「陰」部分的測定是不可能的,此外,亦難以藉由高感度的方式檢測出極細微的凹凸部分之表面積。例如,即使是高度與直徑相同的粗化粒子,但比較根部內縮的粗化粒子與無內縮的粗化粒子,雖然與樹脂密接面積較多為前者,但在藉由雷射顯微鏡所進行的表面積測定中,則呈現幾乎相同的測定值。 In the measurement of the surface area of copper foil, the surface area measurement using a laser microscope is generally used. In principle, it is impossible to measure the formation of the "negative" part due to the shape of the roughened particles, which is not reached by laser light. In addition, it is difficult to detect the surface area of extremely fine uneven portions by a high sensitivity method. For example, even rough particles with the same height and diameter, compared with roughened particles with root shrinkage and roughened particles without shrinkage, although the former has a large area of close contact with the resin, it is performed by a laser microscope. In the measurement of the surface area, almost the same measured value is displayed.

相較之下,在利用BET法所進行的表面積之測定中,由於利用氣體分子的吸附來測定表面積,因此對細微凹凸有較高的感度,且亦可測定對雷射光而言形成為「陰」的部分。從而,相較於使用雷射顯微鏡進行測定的情況,一般而言可以較高的精度測定已形成有粗化粒子之試料的表面積。 In contrast, in the measurement of the surface area by the BET method, since the surface area is measured by the adsorption of gas molecules, it has a high sensitivity to fine unevenness, and it can also be measured that the laser light forms "negative" "part. Therefore, as compared with the case where the measurement is performed using a laser microscope, the surface area of the sample on which the roughened particles have been formed can generally be measured with higher accuracy.

本發明者們係藉由實施後述之特定的粗化電鍍處理,成功的增大在雷射顯微鏡中無法測定之「陰」的部分或細微凹凸部分之表面積的比例。藉此發現到,抑制粗化粒子之平均高度,在有效的抑制傳輸高頻訊號時的傳輸損耗,同時亦可大幅度提高與樹脂基材間之密接性,且能夠得以維持蝕刻性後的樹脂基材的可辨識性,進而達成本發明。 The present inventors have succeeded in increasing the ratio of the surface area of the "negative" portion or the fine uneven portion that cannot be measured in a laser microscope by performing a specific roughening plating process described later. It was found that by suppressing the average height of the coarse particles, it can effectively suppress the transmission loss when transmitting high-frequency signals, and at the same time, it can greatly improve the adhesion with the resin substrate, and can maintain the resin after etching. The identifiability of the base material further reaches the invention.

該細微表面積係數(Cms)係指,藉由BET法所測定之表面積比相對於以雷射顯微鏡所測定之表面積比的比較值,為將在雷射顯微鏡中無法測定之「陰」的部分或細微凹凸部分之表面積的比例進行數值化後 的結果。Cms的計算方法之細部內容,如同後述實施例中所記載之內容。在本發明之表面處理銅箔中,粗化處理面之Cms為2.0以上、未達8.0。藉由將在粗化處理表面之粗化粒子的平均高度和粗化處理面的BET表面積比設定在本發明規定範圍內,且將粗化處理面的Cms設定為2.0以上,未達8.0,可高度提高該表面和樹脂基材之密接性的同時又能良好的保持蝕刻後的樹脂之可辨識性。Cms較佳為2.5以上、未達5.0。 The fine surface area coefficient (Cms) refers to a comparison value of the surface area ratio measured by the BET method with respect to the surface area ratio measured by a laser microscope, and is a portion of the "yin" that cannot be measured by a laser microscope or Numerically quantify the ratio of the surface area of fine unevenness the result of. The details of the Cms calculation method are the same as those described in the examples described later. In the surface-treated copper foil of the present invention, the Cms of the roughened surface is 2.0 or more and less than 8.0. By setting the average height of the roughened particles on the roughened surface and the BET surface area ratio of the roughened surface within the range specified in the present invention, and setting the Cms of the roughened surface to 2.0 or more and less than 8.0, the The adhesion between the surface and the resin substrate is highly improved, and at the same time, the identifiability of the resin after etching is well maintained. Cms is preferably 2.5 or more and less than 5.0.

另外,利用雷射顯微鏡所測定之表面積與利用BET法所測定的表面積之間,由於表面積的測定原理不同,因此有可能會依據粗化處理面的形狀,產生Cms未達1的情況。 In addition, between the surface area measured by a laser microscope and the surface area measured by the BET method, since the principle of measuring the surface area is different, there may be cases where the Cms does not reach 1 depending on the shape of the roughened surface.

在本發明之表面處理銅箔中,粗化處理面的明度指數L*(Lightness),較佳為40以上,未達60較佳,更佳為40以上,未達55。若為如所謂的黑化處理一樣的茶褐色至黑色的處理表面(合金和氧化銅所形成的表面),則有L*為小,傳輸損耗升高的傾向。另一方面,若粗化粒子之形狀發圓,則有L*上升,與樹脂基體之密接性有降低的傾向。L*則藉由後述實施例所記載的方法進行測定。 In the surface-treated copper foil of the present invention, the lightness index L * (Lightness) of the roughened surface is preferably 40 or more, preferably 60 or less, more preferably 40 or more, and 55 or less. If it is a dark brown to black treated surface (a surface formed by an alloy and copper oxide) like a so-called blackening treatment, L * tends to be small and the transmission loss tends to increase. On the other hand, if the shape of the roughened particles is rounded, L * tends to increase and the adhesion to the resin matrix tends to decrease. L * is measured by the method described in Examples described later.

在本發明之表面處理銅箔中,矽烷耦合劑處理前之已形成粗化粒子的表面,係具備具有由鉻(Cr)、鐵(Fe)、鈷(Co)、鎳(Ni)、銅(Cu)、鋅(Zn)、鉬(Mo)、及錫(Sn)中選擇的至少一種金屬的金屬處理層,或是較佳為具備具有由鉻、鐵、鈷、鎳、銅、鋅、鉬、及錫選擇至少兩種以上之金屬所形成之合金的金屬處理層。該金屬處理層係為,一種具備具有由鎳、鋅、及鉻中選擇的至少一種金屬的金屬處理層,或是較佳為一種具備具有由鎳、鋅、及鉻選擇兩種以上之金屬所形成之合金的金屬 處理層。 In the surface-treated copper foil of the present invention, the surface on which the roughened particles have been formed before the silane coupling agent treatment is provided with a layer made of chromium (Cr), iron (Fe), cobalt (Co), nickel (Ni), copper ( Cu), zinc (Zn), molybdenum (Mo), and tin (Sn) at least one metal selected from a metal treatment layer, or preferably has a metal treatment layer comprising chromium, iron, cobalt, nickel, copper, zinc, molybdenum And a metal treatment layer of an alloy formed of at least two metals selected from tin and tin. The metal treatment layer is a metal treatment layer including at least one metal selected from nickel, zinc, and chromium, or preferably a metal treatment layer including two or more metals selected from nickel, zinc, and chromium. Formed alloy metal Processing layer.

本發明之表面處理銅箔所採用的覆銅積層板或印刷配線板,為在其製作程序中,例如在樹脂與銅箔之間的接著程序、或是焊接程序等,經常進行加熱。藉由該加熱,使銅擴散至樹脂側,雖使銅與樹脂之間的密接性降低,不過,藉由設置上述金屬處理層而可防止銅的擴散,進而更加穩定的維持與樹脂基材之間的高度密接性。此外,構成金屬處理層的金屬,亦可作為防止銅鏽之防鏽金屬的作用。 The copper-clad laminated board or printed wiring board used for the surface-treated copper foil of the present invention is often heated during the manufacturing process, such as a bonding process between a resin and a copper foil, or a soldering process. By this heating, copper is diffused to the resin side, and the adhesion between copper and resin is reduced. However, by providing the above-mentioned metal treatment layer, copper diffusion can be prevented, and the resin substrate can be more stably maintained. High degree of tightness. In addition, the metal constituting the metal treatment layer can also function as a rust preventive metal for preventing patina.

從更加提升銅箔之蝕刻性的觀點來看,矽烷耦合劑處理前之在已形成粗化粒子的表面上,控制作為防鏽金屬之鎳量亦相當重要。亦即,鎳附著量較多的情況下,雖然有難以產生銅鏽、且提升在高溫下之與樹脂間的密接性的傾向,然而,在蝕刻後卻容易殘留鎳,難以獲得充分的絕緣可靠度。在本發明之表面處理銅箔具有金屬處理層的情況下,從兼具高溫下之密接性與蝕刻性的觀點來看,粗化處理面上的含有的鎳元素量較佳為0.1mg/dm2以上、未達0.3mg/dm2From the viewpoint of further improving the etchability of copper foil, it is also important to control the amount of nickel as a rust-preventive metal on the surface where roughened particles have been formed before the silane coupling agent is processed. That is, when there is a large amount of nickel attached, although it is difficult to generate patina and to improve the adhesion with the resin at a high temperature, nickel remains easily after etching, and it is difficult to obtain sufficient insulation reliability. . When the surface-treated copper foil of the present invention has a metal-treated layer, the amount of the nickel element contained on the roughened surface is preferably 0.1 mg / dm from the viewpoint of both adhesion and etching at high temperatures. 2 or more and less than 0.3 mg / dm 2 .

〔製造印刷配線板用表面處理銅箔〕 [Surface-treated copper foil for manufacturing printed wiring boards] <銅箔> <Copper foil>

作為在製造本發明之表面處理銅箔中所採用的銅箔,可因應用途或其他目的,選擇如壓延銅箔、電解銅箔等。本發明之表面處理銅箔中所採用之銅箔的箔厚,並未有特別限制,可因應目的而做適當之挑選。而上述箔厚,一般為4至120μm,以5至50μm為佳,6至18μm為較佳。 As the copper foil used in the production of the surface-treated copper foil of the present invention, a rolled copper foil, an electrolytic copper foil, or the like can be selected depending on the application or other purposes. The thickness of the copper foil used in the surface-treated copper foil of the present invention is not particularly limited, and can be appropriately selected according to the purpose. The thickness of the foil is generally 4 to 120 μm, preferably 5 to 50 μm, and more preferably 6 to 18 μm.

<粗化電鍍處理><Roughening Plating Treatment>

在製造本發明之表面處理銅箔中,上述粗化處理面的形成,可為適當使用特定的粗化電鍍條件。亦即,本發明之依據為,本發明者們在將鉬濃度設定在特定範圍內,並且藉由在後述特定條件下實施電鍍處理,據此發現出可形成上述粗化處理面。 In the production of the surface-treated copper foil of the present invention, the formation of the above-mentioned roughened surface can be carried out by appropriately using specific roughened plating conditions. That is, the present invention is based on the fact that the inventors have set the molybdenum concentration within a specific range and performed the plating treatment under specific conditions described later, and have found out that the roughened surface can be formed.

(粗化電鍍處理條件) (Roughening Plating Treatment Conditions)

為了可形成上述粗化處理面,在粗化電鍍處理(電鍍處理)中,必須將鉬濃度控制在50mg/L以上、600mg/L以下。此外,若將鉬濃度形成為未達50mg/L,則產生粉末掉落等問題、若超過600mg/L時,雖然能滿足其他特性,但卻難以將矽烷耦合劑處理後的表面(也就是粗化處理面)之BET表面積比提升至1.2以上。 In order to form the roughened surface, it is necessary to control the molybdenum concentration to be 50 mg / L or more and 600 mg / L or less in the roughening plating treatment (plating treatment). In addition, if the concentration of molybdenum is less than 50 mg / L, problems such as powder dropping will occur. If it exceeds 600 mg / L, although other characteristics can be satisfied, it is difficult to treat the surface of the silane coupling agent (that is, the rough surface). The chemically treated surface) has a BET surface area ratio of 1.2 or more.

為了可形成上述粗化處理面,在粗化電鍍處理中,必須將電極間隙間的流速設定在0.15m/秒以上、0.4m/秒以下。倘若電極間隙間的流速未達0.15m/秒時,在銅箔上發生之氫氣的脫離作業無法進行,難以獲得鉬的效果而導致發生粉體剝落等問題。此外,當電極間隙間的流速超過0.4m/秒後,對細微凹部之銅離子的供應便會過剩,使得凹部被電鍍所掩埋,難以將矽烷耦合劑處理後的表面之BET表面積比提高至1.2以上。 In order to form the roughened surface, it is necessary to set the flow velocity between the electrode gaps to be not less than 0.15 m / s and not more than 0.4 m / s during the roughening plating process. If the flow velocity between the electrode gaps is less than 0.15 m / sec, the hydrogen detachment operation on the copper foil cannot be performed, and it is difficult to obtain the effect of molybdenum, causing problems such as powder peeling. In addition, when the flow velocity between the electrode gaps exceeds 0.4m / sec, the supply of copper ions to the fine recesses will be excessive, making the recesses buried by electroplating, and it is difficult to increase the BET surface area ratio of the surface treated by the silane coupling agent to 1.2. the above.

為了可形成上述粗化處理面,在粗化電鍍處理中,必須將電流密度乘以處理時間值設定在20(A/dm2).秒以上、250(A/dm2).秒以下。當該值未達20(A/dm2).秒時,在矽烷耦合劑處理後,由於粗化處理面之粗化粒子的平均高度難以形成為0.05μm以上,因此不容易確保與積層 之樹脂間有充分的密接性。此外,若超過250(A/dm2).秒時,由於所形成的粗化粒子的平均高度難以形成為未達0.5μm,因此容易造成傳輸損耗的惡化。上述之電流密度乘以處理時間值,較佳為20(A/dm2).秒以上、未達160(A/dm2).秒。 In order to form the above-mentioned roughened surface, it is necessary to set the current density multiplied by the processing time to 20 (A / dm 2 ) in the roughening plating process. More than 250 seconds (A / dm 2 ). Below seconds. When the value does not reach 20 (A / dm 2 ). In seconds, since the average height of the roughened particles on the roughened surface after the silane coupling agent treatment is difficult to form 0.05 μm or more, it is not easy to ensure sufficient adhesion to the laminated resin. In addition, if it exceeds 250 (A / dm 2 ). In seconds, since the average height of the roughened particles formed is difficult to be less than 0.5 μm, the transmission loss is likely to deteriorate. The current density multiplied by the processing time is preferably 20 (A / dm 2 ). More than seconds, less than 160 (A / dm 2 ). second.

為了可形成上述粗化處理面,在粗化電鍍處理中,必須將電流密度乘以處理時間值,且以鉬濃度所除之值設定在1.0{(A/dm2).秒}/(mg/L)以上,3.0{(A/dm2).秒}/(mg/L)以下。當該值未達1.0{(A/dm2).秒}/(mg/L)時,雖然可滿足其他特性,卻難以獲得足夠的BET表面積比。此外,若該值超過3.0{(A/dm2).秒}/(mg/L),卻有難以將Cms形成為未達8.0的傾向。上述之電流密度乘以處理時間,且除以鉬濃度的值,較佳為1.2(A/dm2).秒以上且未達2.4(A/dm2).秒。 In order to form the above roughened surface, the current density must be multiplied by the processing time in the roughening plating process, and the value divided by the concentration of molybdenum must be set to 1.0 {(A / dm 2 ). Seconds} / (mg / L) or more, 3.0 {(A / dm 2 ). Seconds} / (mg / L) or less. When the value does not reach 1.0 {(A / dm 2 ). At sec} / (mg / L), it is difficult to obtain a sufficient BET surface area ratio, although other characteristics can be satisfied. In addition, if the value exceeds 3.0 {(A / dm 2 ). Seconds} / (mg / L), but it is difficult to form Cms below 8.0. The current density is multiplied by the processing time and divided by the concentration of molybdenum, preferably 1.2 (A / dm 2 ). More than seconds and less than 2.4 (A / dm 2 ). second.

為可形成上述粗化處理面,而將較佳的粗化電鍍處理條件揭示如下。 In order to form the above-mentioned roughening treatment surface, preferable roughening plating treatment conditions are disclosed below.

-粗化電鍍處理條件- -Roughening plating treatment conditions-

Cu:10至30g/L Cu: 10 to 30 g / L

H2SO4:100至200g/L H 2 SO 4 : 100 to 200 g / L

浴溫:20至30℃ Bath temperature: 20 to 30 ° C

鉬濃度:50至600mg/L Molybdenum concentration: 50 to 600 mg / L

電極間隙間的流速:0.15至0.4m/秒 Velocity between electrode gaps: 0.15 to 0.4 m / s

電流密度:15至70A/dm2 Current density: 15 to 70A / dm 2

電流密度×處理時間:0.1至10秒 Current density × processing time: 0.1 to 10 seconds

電流密度×處理時間:20至250(A/dm2).秒 Current density × processing time: 20 to 250 (A / dm 2 ). second

電流密度×處理時間÷鉬濃度:1.0至3.0{(A/dm2).秒}/(mg/L) Current density × treatment time ÷ molybdenum concentration: 1.0 to 3.0 {(A / dm 2 ). Seconds) / (mg / L)

此外,將鉬添加至電鍍液係指,將鉬作為離子而溶解的形態、只要不包含使硫酸銅電鍍液的pH發生變化,且併入至鍍銅皮膜中的金屬不純物,則未有特別的限制。例如,可將鉬酸鹽(例如,鉬酸鈉或鉬酸鉀)的水溶液添加至硫酸銅電鍍液中。 In addition, adding molybdenum to the plating solution refers to a form in which molybdenum is dissolved as ions, and as long as it does not include a change in the pH of the copper sulfate plating solution and incorporates metallic impurities into the copper plating film, there is no special limit. For example, an aqueous solution of a molybdate (for example, sodium or potassium molybdate) can be added to the copper sulfate plating solution.

<金屬處理層> <Metal treatment layer>

當本發明之表面處理銅箔具有金屬處理層的情況下,金屬處理層的形成方法並未有特別限制,可利用一般方式來形成。例如,以形成具有鎳、鋅及鉻之金屬處理層的情況為例,在下述條件中,例如以鍍鎳、鍍鋅、鍍鉻的順序,而可形成金屬處理層。 When the surface-treated copper foil of the present invention has a metal-treated layer, the method for forming the metal-treated layer is not particularly limited, and it can be formed by a general method. For example, in the case where a metal-treated layer having nickel, zinc, and chromium is formed as an example, the metal-treated layer may be formed in the following conditions, for example, in the order of nickel plating, zinc plating, and chromium plating.

〔鍍鎳〕 [Nickel plating]

Ni:10至100g/L Ni: 10 to 100g / L

H3BO3:1至50g/L H 3 BO 3 : 1 to 50g / L

PO2:0至10g/L PO 2 : 0 to 10g / L

浴溫:10至70℃ Bath temperature: 10 to 70 ° C

電流密度:1至50A/dm2 Current density: 1 to 50A / dm 2

處理時間:1秒至2分鐘 Processing time: 1 second to 2 minutes

pH:2.0至4.0 pH: 2.0 to 4.0

〔鍍鋅〕 〔Galvanized〕

Zn:1至30g/L Zn: 1 to 30g / L

NaOH:10至300g/L NaOH: 10 to 300g / L

浴溫:5至60℃ Bath temperature: 5 to 60 ° C

電流密度:0.1至10A/dm2 Current density: 0.1 to 10A / dm 2

處理時間:1秒至2分鐘 Processing time: 1 second to 2 minutes

〔鍍鉻〕 〔chrome〕

Cr:0.5至40g/L Cr: 0.5 to 40g / L

浴溫:20至70℃ Bath temperature: 20 to 70 ° C

電流密度:0.1至10A/dm2 Current density: 0.1 to 10A / dm 2

處理時間:1秒至2分鐘 Processing time: 1 second to 2 minutes

pH:3.0以下 pH: below 3.0

本發明之表面處理銅箔,較佳為存在於粗化處理面上的矽元素量(亦即,於矽烷耦合劑層中所含有的矽元素量)為0.5μg/dm2以上、未達15μg/dm2。藉由將該矽元素量設定為0.5μg/dm2以上、未達15μg/dm2,在抑制矽烷耦合劑之使用量的同時,還可有效的提高與樹脂間之密接性。矽烷耦合劑層所包含的矽元素量為,較佳為3μg/dm2以上,未達15μg/dm2、進而較佳為5μg/dm2以上,未達15μg/dm2In the surface-treated copper foil of the present invention, the amount of silicon element (that is, the amount of silicon element contained in the silane coupling agent layer) present on the roughened surface is preferably 0.5 μg / dm 2 or more and less than 15 μg. / dm 2 . By setting the amount of the silicon element to be 0.5 μg / dm 2 or more and less than 15 μg / dm 2 , it is possible to effectively improve the adhesiveness with the resin while suppressing the use amount of the silane coupling agent. The amount of silicon element contained in the silane coupling agent layer is preferably 3 μg / dm 2 or more, less than 15 μg / dm 2 , more preferably 5 μg / dm 2 or more, and less than 15 μg / dm 2 .

上述矽烷耦合劑係為,因應於構成與本發明之表面處理銅箔所積層之樹脂層的樹脂之分子構造(官能基的種類等),進行適當的選擇。其中,上述矽烷耦合劑較佳為由環氧基、胺基、乙烯基、(甲基)丙烯醯基、苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基選擇至少一種的官能基。「(甲基)丙烯醯基」為表示「丙烯醯基及/或甲基丙烯醯基」 之意。 The silane coupling agent is appropriately selected in accordance with the molecular structure (type of functional group, etc.) of the resin constituting the resin layer laminated with the surface-treated copper foil of the present invention. Among them, the silane coupling agent is preferably an epoxy group, an amino group, a vinyl group, a (meth) acryl group, a styryl group, a urea group, an isocyanurate group, a mercapto group, a sulfide group, and an isocyanate The group is selected from at least one kind of functional group. "(Meth) acrylfluorenyl" means "acrylfluorenyl and / or methacrylfluorenyl" Meaning.

藉由已形成粗化粒子之銅箔表面的矽烷耦合劑的處理,可藉由一般方式處理。例如,調製矽烷耦合劑的溶液(塗覆液),將該塗覆液塗覆於已形成有粗化粒子的銅箔表面,並加以乾燥,藉此,可使矽烷耦合劑吸附甚至是結合於已形成有粗化粒子的銅箔表面上。作為上述塗覆液,例如,採用的溶液可為使用純水而含有0.05wt%至1wt%之濃度的矽烷耦合劑。 The treatment with the silane coupling agent on the surface of the copper foil on which the roughened particles have been formed can be performed in a general manner. For example, a solution (coating solution) of a silane coupling agent is prepared, and the coating solution is coated on the surface of the copper foil on which the roughened particles have been formed, and dried, whereby the silane coupling agent can be adsorbed or even bonded to The surface of the copper foil on which the roughened particles have been formed. As the coating liquid, for example, the solution used may be a silane coupling agent having a concentration of 0.05 wt% to 1 wt% using pure water.

上述塗覆液的塗覆方法並未有特別限制,例如可為,在傾斜銅箔的狀態下,將塗覆液均勻地流動於已形成有粗化粒子的表面上,使用輥輪而去除多餘液體後加以加熱乾燥,在輥輪間,在使已形成粗化粒子之表面朝下而撐開的銅箔上,噴霧塗覆液,再以輥輪去除多餘液體後進行加熱乾燥等作業,而實施塗覆。塗覆溫度並未有特別限制,通常係以10至40℃來實施。 The coating method of the coating liquid is not particularly limited. For example, the coating liquid may be uniformly flowed on the surface on which the roughened particles have been formed in a state where the copper foil is inclined, and a roller is used to remove the excess. After the liquid is heated and dried, the coating liquid is sprayed on the copper foil with the surface of the roughened particles facing downwards and spread between the rollers, and then the roller is used to remove the excess liquid and then perform heating and drying operations. Apply coating. The coating temperature is not particularly limited, and is usually implemented at 10 to 40 ° C.

〔印刷配線板用覆銅積層板〕 [Copper-clad laminated board for printed wiring board]

本發明之印刷配線板用覆銅積層板(以下,簡稱為「本發明之覆銅積層板」),係為在本發明之表面處理銅箔之粗化處理面上,具有已積層樹脂層(樹脂基材)的構造。關於該樹脂層並未有特別限制,所採用之樹脂層,可以是在用以製作印刷配線板的覆銅積層板中,一般所採用的樹脂層。舉例來說,可採用在硬板(rigid board)(硬印刷配線板)中所使用之無鹵素低介電樹脂基材,或是採用可撓性基板中所汎用的低介電聚醯亞胺。 The copper-clad laminated board for a printed wiring board of the present invention (hereinafter referred to as "copper-clad laminated board of the present invention") is a roughened surface of the surface-treated copper foil of the present invention, and has a laminated resin layer ( Resin substrate). The resin layer is not particularly limited, and the resin layer to be used may be a resin layer generally used in a copper-clad laminated board used to produce a printed wiring board. For example, a halogen-free low-dielectric resin substrate used in a rigid board (hard printed wiring board), or a low-dielectric polyfluorene imide commonly used in flexible substrates .

表面處理銅箔與樹脂基材之間的積層方法並未有特別限制,例如,藉由使用熱壓加工機的熱壓成形法等,使銅箔與樹脂基材接著。在上述熱壓 成形法中的加壓溫度,係以設定成150至400℃左右為佳。此外,加壓面壓力以設定成1至50MPa左右為佳。 The method of laminating the surface-treated copper foil and the resin substrate is not particularly limited. For example, the copper foil and the resin substrate are bonded by a hot-press molding method using a hot-pressing machine or the like. In the hot press above The pressing temperature in the molding method is preferably set to about 150 to 400 ° C. The pressure on the pressurizing surface is preferably set to about 1 to 50 MPa.

覆銅積層板的厚度以10至1000μm為佳。 The thickness of the copper-clad laminated board is preferably 10 to 1000 μm.

〔印刷配線板〕 〔Printed wiring board〕

本發明之印刷配線板係使用本發明之覆銅積層板而製作。亦即,將本發明之覆銅積層板實施蝕刻等處理,形成導體電路圖形,更因應需要,而藉由一般方式形成或是搭載其他構件而形成者。 The printed wiring board of this invention is manufactured using the copper clad laminated board of this invention. That is, the copper-clad laminated board of the present invention is subjected to a process such as etching to form a conductor circuit pattern, and is formed in a general manner or formed by mounting other members in accordance with needs.

【實施例】[Example]

以下,根據實施例,更加詳細說明本發明。此外,以下為本發明之一例,在本發明的實施中,只要在不逸脫本發明之要旨的範圍內,可採用各種形態。 Hereinafter, the present invention will be described in more detail based on examples. In addition, the following is an example of the present invention. In the practice of the present invention, various forms can be adopted as long as they do not depart from the gist of the present invention.

〔製造銅箔〕 [Manufacture of copper foil]

作為用以實施粗化處理之基材的銅箔,使用電解銅箔或壓延銅箔。 As the copper foil used as a base material for the roughening treatment, an electrolytic copper foil or a rolled copper foil is used.

在實施例1、2、4、5、7及8、比較例1至4及7及參考例1之中,使用了以下述條件所製造之厚度為12μm的電解銅箔。 In Examples 1, 2, 4, 5, 7, and 8, Comparative Examples 1 to 4, and 7, and Reference Example 1, an electrolytic copper foil having a thickness of 12 μm manufactured under the following conditions was used.

<電解銅箔的製造條件> <Manufacturing conditions of electrolytic copper foil>

CuSO4:280g/L CuSO 4 : 280g / L

H2SO4:70g/L H 2 SO 4 : 70g / L

氯濃度:25mg/L Chlorine concentration: 25mg / L

浴溫:55℃ Bath temperature: 55 ℃

電流密度:45A/dm2 Current density: 45A / dm 2

添加劑 additive

.3-巰基1-丙烷磺酸鈉:2mg/L . Sodium 3-mercapto 1-propane sulfonate: 2mg / L

.羥乙基纖維素:10mg/L . Hydroxyethyl cellulose: 10mg / L

.低分子量膠(分子量3000):50mg/L . Low molecular weight gum (molecular weight 3000): 50mg / L

在實施例3、6、及比較例5、6中,對於市售的12μm之精煉銅壓延箔(株式會社UACJ製),為使用以下述條件實施脫脂處理之物。 In Examples 3 and 6, and Comparative Examples 5 and 6, a commercially available 12 μm refined copper rolled foil (manufactured by UACJ Co., Ltd.) was obtained by degreasing under the following conditions.

<脫脂處理條件> <Degreasing processing conditions>

脫脂溶液:清洗劑160S(Meltec株式會社製)的水溶液 Degreasing solution: Aqueous solution of cleaning agent 160S (Meltec)

濃度:60g/L水溶液 Concentration: 60g / L aqueous solution

浴溫:60℃ Bath temperature: 60 ℃

電流密度:3A/dm2 Current density: 3A / dm 2

通電時間:10秒 Power on time: 10 seconds

〔形成粗化處理面〕 [Forming a roughened surface]

藉由電鍍處理,而於上述銅箔的單面形成粗化電鍍處理面。該粗化電鍍處理面,係使用下述粗化電鍍液基本浴組成,將鉬濃度設定為如下述表1所記載之內容,且將電極間隙間的流速、電流密度、處理時間設定成如下述表1所記載,形成該粗化電鍍處理面。鉬濃度,為藉由將鉬酸鈉已溶解至純水中的水溶液添加至基本浴中而進行調整。 By the electroplating process, a roughened electroplated surface is formed on one side of the copper foil. This roughened plating treatment surface uses the following roughening plating bath basic bath composition, sets the molybdenum concentration as described in Table 1 below, and sets the flow velocity, current density, and processing time between the electrode gaps as follows Table 1 describes the roughened plated surface. The concentration of molybdenum is adjusted by adding an aqueous solution in which sodium molybdate has been dissolved in pure water to a basic bath.

<粗化電鍍液基本浴組成> <Basic bath composition of roughened plating solution>

Cu:25g/L Cu: 25g / L

H2SO4:180g/L H 2 SO 4 : 180g / L

浴溫:25℃ Bath temperature: 25 ℃

<形成金屬處理層> <Forming a metal-treated layer>

接著,在如上所述而形成的粗化電鍍處理面上,再以下述電鍍條件,以Ni、Zn、Cr的順序實施金屬電鍍,形成金屬處理層。另外、參考例1中,並未形成金屬處理層。 Next, on the roughened plated surface formed as described above, metal plating was performed in the order of Ni, Zn, and Cr under the following plating conditions to form a metal-treated layer. In addition, in Reference Example 1, a metal-treated layer was not formed.

<鍍鎳> <Nickel plating>

Ni:40g/L Ni: 40g / L

H3BO3:5g/L H 3 BO 3 : 5g / L

浴溫:20℃ Bath temperature: 20 ℃

pH:3.6 pH: 3.6

電流密度:0.2A/dm2 Current density: 0.2A / dm 2

通電時間:10秒 Power on time: 10 seconds

<鍍鋅> <Galvanized>

Zn:2.5g/L Zn: 2.5g / L

NaOH:40g/L NaOH: 40g / L

浴溫:20℃ Bath temperature: 20 ℃

電流密度:0.3A/dm2 Current density: 0.3A / dm 2

通電時間:5秒 Power on time: 5 seconds

〔鍍鉻〕 〔chrome〕

Cr:5g/L Cr: 5g / L

浴溫:30℃ Bath temperature: 30 ℃

pH:2.2 pH: 2.2

電流密度:5A/dm2 Current density: 5A / dm 2

通電時間:5秒 Power on time: 5 seconds

<塗覆矽烷耦合劑(形成粗化處理面)> <Coating Silane Coupling Agent (Roughened Surface)>

在上述金屬處理層表面之整體上,塗覆於表2所記載之市售矽烷耦合劑的溶液(30℃),以刮刀(squeegee)去除多餘溶液後,在120℃大氣下乾燥30秒的期間。各矽烷耦合劑之溶液的調製方法如下所述。 The entire surface of the metal-treated layer was coated with a solution (30 ° C) of a commercially available silane coupling agent described in Table 2, and the excess solution was removed with a squeegee, followed by drying at 120 ° C for 30 seconds in the atmosphere. . The method of preparing each silane coupling agent solution is as follows.

3-環氧丙氧基丙基甲基二甲氧基矽烷(3-Glycidoxypropylmethyldimethoxysilane)(信越化學株式會社製KBM-402):以純水調製0.3wt%溶液。 3-Glycidoxypropylmethyldimethoxysilane (KBM-402 manufactured by Shin-Etsu Chemical Co., Ltd.): A 0.3 wt% solution was prepared with pure water.

3-胺丙基三甲氧基矽烷(3-Aminopropyltrimethoxysilane)(信越化學株式會社製KBM-903):以純水調製0.25wt%溶液。 3-Aminopropyltrimethoxysilane (KBM-903 manufactured by Shin-Etsu Chemical Co., Ltd.): A 0.25% by weight solution was prepared with pure water.

乙烯基三甲氧基矽烷(Vinyltrimethoxysilane)(信越化學株式會社製KBM-1003):在純水添加硫酸,以調整為pH3的溶液調製0.2wt%溶液。 Vinyltrimethoxysilane (KBM-1003, manufactured by Shin-Etsu Chemical Co., Ltd.): Add sulfuric acid to pure water to adjust the solution to pH 3 to prepare a 0.2 wt% solution.

3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷(3-Methacryloxypropylmethyldimethoxysilane)(信越化學株式會社製KBM-502):在純水添加硫酸,以調整為pH3的溶液調製0.25wt%溶液。 3-Methacryloxypropylmethyldimethoxysilane (KBM-502, manufactured by Shin-Etsu Chemical Co., Ltd.): Add sulfuric acid to pure water to adjust the solution to pH 3 to prepare a 0.25% solution .

3-異氰酸酯丙基三乙氧基矽烷(3-Isocyanatopropyl triethoxysilane)(信越化學株式會社製KBE-9007):在純水中添加硫酸,以調整為pH3的溶液調製0.2wt%溶液。 3-Isocyanatopropyl triethoxysilane (KBE-9007 manufactured by Shin-Etsu Chemical Co., Ltd.): sulfuric acid was added to pure water to adjust the solution to pH 3 to prepare a 0.2 wt% solution.

3-脲基丙基三乙氧基矽烷(3-Ureidopropyltriethoxysilane)(信越化學株式會社製KBE-585):將乙醇與純水以1:1混合,將該混合溶液調製0.3wt%溶液。 3-Ureidopropyltriethoxysilane (KBE-585 manufactured by Shin-Etsu Chemical Co., Ltd.): Ethanol and pure water were mixed at 1: 1, and the mixed solution was prepared as a 0.3 wt% solution.

〔測定粗化粒子的平均高度〕 [Measure the average height of the roughened particles]

藉由SEM影像觀察與經過離子研磨處理所得之銅箔厚度方向呈平行之斷面,求出在粗化處理面中之粗化粒子的平均高度。詳細內容說明如下。 A cross section parallel to the thickness direction of the copper foil obtained by the ion polishing treatment was observed with an SEM image, and the average height of the roughened particles on the roughened surface was obtained. Details are explained below.

圖1所示的SEM影像,係為平行於在比較例6中製造之表面處理銅箔的粗化處理面(矽烷耦合劑處理後的表面)之厚度方向的斷面。同樣的,在各銅箔的斷面中,在視野範圍內可確認到粗化粒子之頭頂部與底部,並且,將倍率調節至可觀察到約十個左右的粗化粒子,在無限制之下針對不同的五個視野進行SEM觀察。分別對一個銅箔中之五個視野範圍內,測定高度最高之粗化粒子的高度,將所得之五個測定值(最大值)之平均,設 為在該銅箔之粗化處理面中的粗化粒子之平均高度。 The SEM image shown in FIG. 1 is a cross section parallel to the thickness direction of the roughened surface (surface after silane coupling agent treatment) of the surface-treated copper foil manufactured in Comparative Example 6. Similarly, in the cross section of each copper foil, the top and bottom of the roughened particles can be confirmed in the visual field, and the magnification is adjusted so that about ten roughened particles can be observed. SEM observations are performed for five different fields. Measure the height of the roughest particles with the highest height within the five fields of view of a copper foil, and average the five measured values (maximum values) obtained. The average height of the roughened particles on the roughened surface of the copper foil.

使用圖面詳細說明粗化粒子之高度的測定方法。如圖1所示,針對作為測定對象的粗化粒子,連結左右最底部之直線(連結a點與b點的直線)的最短距離為最長,將該粗化粒子之頭頂部(c點)與連結a點及b點之直線間的最短距離,設為粗化粒子的高度H。 The method of measuring the height of the roughened particles will be described in detail using drawings. As shown in FIG. 1, for the roughened particles to be measured, the shortest distance between the straight line connecting the left and right bottoms (the straight line connecting points a and b) is the longest, and the top of the roughened particle (point c) and The shortest distance between the lines connecting point a and point b is the height H of the roughened particles.

圖2所示的SEM影像,係為平行於在實施例2製造之表面處理銅箔的粗化處理面(矽烷耦合劑處理後的表面)之厚度方向的斷面。當粗化粒子形成如所示之分枝狀況時,為將包含分枝構造的整體視為一個粗化粒子。亦即,連結形成為樹枝狀之粗化粒子的左右最底部之直線(連結d點與e點的直線)的最短距離為最長,將該粗化粒子之頭頂部(f點)與連結d點及e點之直線間的最短距離,設為粗化粒子的高度H。 The SEM image shown in FIG. 2 is a cross section parallel to the thickness direction of the roughened surface (the surface treated with the silane coupling agent) of the surface-treated copper foil produced in Example 2. When the roughened particles form a branched state as shown, the whole including the branched structure is regarded as one roughened particle. That is, the shortest distance between the left and right straight lines (straight lines connecting point d and e) of the roughened particles formed into dendritic shapes is the longest, and the top of the roughened particles (point f) and the point d are connected. The shortest distance between the straight line and point e is the height H of the roughened particles.

將結果揭示於下述表3。 The results are shown in Table 3 below.

〔測定BET表面積比A〕 [Measurement of BET surface area ratio A]

BET表面積比A的計算,為將以BET法所測定之粗化處理面的表面積(BET測定表面積),除以形成俯視面積之試料切出面積而求得。 The calculation of the BET surface area ratio A is obtained by dividing the surface area of the roughened surface (BET measurement surface area) measured by the BET method by the cut-out area of the sample forming the plan view area.

BET測定表面積係使用Micromeritics公司製氣體吸附細孔分布測定裝置ASAP2020型,利用氪氣吸附BET多點法進行測定。在測定前,作為前處理為在150℃的溫度下進行6小時的減壓乾燥。 The BET measurement surface area was measured using a gas adsorption pore distribution measuring device ASAP2020, manufactured by Micromeritics, using a radon adsorption BET multipoint method. Prior to the measurement, as a pretreatment, drying under reduced pressure was performed at a temperature of 150 ° C for 6 hours.

在測定中使用的試料(銅箔)係為,切出形成約3g的3dm2,再切割成5mm方形後,導入測定裝置內。 The sample (copper foil) used in the measurement was cut out to form about 3 g of 3 dm 2 , cut into a 5 mm square, and then introduced into a measurement device.

在藉由BET法進行表面積測定中,由於是測定導入至裝置內的試料全 面之表面積,因此,無法只測定已實施單面粗化處理之上述表面處理銅箔中僅實施該粗化處理面的表面積。在此,BET表面積比A,實際上係由下所述式而計算。 In the surface area measurement by the BET method, the total amount of the sample introduced into the device is measured. Because of the surface area of the surface, it is not possible to measure only the surface area of only the roughened surface of the surface-treated copper foil that has been subjected to the single-side roughening treatment. Here, the BET surface area ratio A is actually calculated by the following formula.

<BET表面積比A> <BET surface area ratio A>

將未實施粗化處理之面(與上述粗化處理面相反側之面)的表面積比設為1,也就是視為與試料切出面積相同,利用下述式而計算出BET表面積比A。 The surface area ratio of the surface on which the roughening treatment has not been performed (the surface opposite to the roughening treatment surface) is set to 1, that is, the surface area ratio is regarded as the same as the cut-out area of the sample, and the BET surface area ratio A is calculated by the following formula.

(BET表面積比A)=〔(BET測定表面積)-(試料切出面積)〕/(試料切出面積) (BET surface area ratio A) = [(BET measured surface area)-(sample cut-out area)] / (sample cut-out area)

此外,在BET法的表面積測定方面,對於粗化處理面以及未實施粗化處理之面以外的面(側面)的表面積亦進行測定,不過,在本發明所推定的箔厚(例如,即使最大也在120μm左右)中,在全俯視面積中側面所佔的比例極少,實際上可以忽略。 In terms of surface area measurement by the BET method, the surface area of the roughened surface and the surface (side surface) other than the surface not subjected to the roughening treatment is also measured. However, the foil thickness estimated in the present invention (for example, even the largest (Also at about 120 μm), the proportion of the side surface in the total plan view area is very small, which can actually be ignored.

如參考例1所示,在表面未實施粗化處理的對象物中,由於BET法的測定原理,而有BET測定表面積小於切出面積的情況(亦即,BET表面積比A有未達1的情況)。另一方面,因粗化處理而形成表面具有細微凹凸的情況下,由於適用BET法,因此可高感度的檢測出細微的凹凸等,其結果,形成BET表面積比A超過1。 As shown in Reference Example 1, there may be cases where the surface area of the BET measurement is smaller than the cut-out area due to the measurement principle of the BET method in the object without roughening the surface (that is, the BET surface area ratio A is less than 1). Happening). On the other hand, when the surface with fine unevenness is formed by the roughening treatment, the BET method is applied, so that the fine unevenness and the like can be detected with high sensitivity. As a result, the BET surface area ratio A exceeds 1.

〔測定雷射表面積比B〕 [Measurement of laser surface area ratio B]

雷射表面積比B,為根據使用雷射顯微鏡VK8500(Keyence公司製)之表面積測定值而計算。更詳細來說,以倍率1000倍觀察試料(銅箔)的粗化處理面,測定平面視面積6550μm2部分的三維表面積,藉由將該三維表面積除以6550μm2而求得雷射表面積比B。測定間距設為0.01μgm。將結果揭示於表3。 The laser surface area ratio B is calculated based on a surface area measurement value using a laser microscope VK8500 (manufactured by Keyence). In more detail, the roughened surface of the sample (copper foil) was observed at a magnification of 1000 times, and the three-dimensional surface area of the plane viewing area of 6550 μm 2 was measured. The three-dimensional surface area was divided by 6550 μm 2 to obtain the laser surface area ratio B . The measurement pitch was set to 0.01 μgm. The results are shown in Table 3.

〔計算細微表面係數Cms〕 〔Calculate fine surface coefficient Cms〕

細微表面係數Cms係為,使用上述BET表面積比A與上述雷射表面積比B,根據下述公式計算而得。將結果揭示於下述表3。 The fine surface coefficient Cms is calculated from the following formula using the BET surface area ratio A and the laser surface area ratio B. The results are shown in Table 3 below.

細微表面係數Cms=BET表面積比A/雷射表面積比B Fine surface coefficient Cms = BET surface area ratio A / laser surface area ratio B

〔矽的測定〕 [Determination of Silicon]

粗化處理面的矽元素量(μg/dm2)的測定為,以塗料標記試料之未實施粗化電鍍處理的面後,切出10cm方形,以加溫至80℃之混合酸(硝酸2:鹽酸1:純水5(體積比))僅溶解表面部後,將所獲得之溶液中的矽質量,使用日立High-Tech Science公司製的原子吸光光度計(型式:Z-2300),藉由原子吸光分析法進行定量分析而求出。將結果以矽元素量揭示於下述表3。 The silicon element content (μg / dm 2 ) of the roughened surface was measured by marking the surface of the sample without the roughening plating treatment with a paint, and then cutting out a 10 cm square to heat the mixed acid (nitrate 2) to 80 ° C. : Hydrochloric acid 1: pure water 5 (volume ratio)) After dissolving only the surface portion, the mass of silicon in the obtained solution was measured using an atomic absorption spectrometer (type: Z-2300) manufactured by Hitachi High-Tech Science. Quantitative analysis was performed by atomic absorption spectrometry. The results are shown in Table 3 below in terms of the amount of silicon element.

〔明度指數L*之測定〕 [Measurement of Lightness Index L * ]

明度指數L*為於JIS-Z8729所規定之表色系L*a*b*中的L*。對明度指數L*之測定使用了日本分光製的紫外可見分光光度儀V-660(積分球單元)。在波長870至200nm之範圍,測定了粗化處理面之全光線分光反射率。根據所得光譜,利用測定儀附屬軟件計算出明度指數L*值,結果表示於表三。 Lightness index L * color system L * a * b * in the L Table prescribed in JIS-Z8729 *. The lightness index L * was measured using a UV-visible spectrophotometer V-660 (integrating sphere unit) made by Japan Spectroscopy. In the range of wavelengths from 870 to 200 nm, the total light spectral reflectance of the roughened surface was measured. Based on the obtained spectrum, the brightness index L * value was calculated using the software attached to the analyzer. The results are shown in Table 3.

〔高頻特性的評估〕 [Evaluation of high-frequency characteristics]

測定在高頻波段中的傳輸損耗,作為高頻特性的評估。將於上述事實例以及比較例中製作的,具有粗化處理面的表面處理銅箔的該粗化處理面(經矽烷耦合劑被處理的面),在面壓為3MPa,200℃的條件下貼 合於Panasonic公司所製的聚苯醚系低介電率樹脂基材MEGTRON6(厚度為50至100μm),製作了覆銅積層板。對所得的積層板進行電路加工,於其之上進一步貼合MEGTRON6而最終形成3層銅箔基層板。傳輸路徑中形成了寬度為100μm、長度40mm之微帶線。在該傳輸路徑中,使用網路分析儀,傳輸100GHz為止的高頻訊號,測定傳輸損耗。特性阻抗為50Ω。 The transmission loss in the high-frequency band was measured as an evaluation of the high-frequency characteristics. The roughened surface (surface treated with a silane coupling agent) of the surface-treated copper foil having a roughened surface prepared in the above-mentioned examples and comparative examples, under a condition of a surface pressure of 3 MPa and 200 ° C paste Combined with polyphenylene ether-based low-dielectric-resistance resin substrate MEGTRON6 (thickness: 50 to 100 μm) made by Panasonic Corporation, a copper-clad laminated board was produced. The obtained laminated board was subjected to circuit processing, and MEGTRON6 was further bonded on top of it to finally form a three-layer copper foil base board. A microstrip line having a width of 100 μm and a length of 40 mm is formed in the transmission path. In this transmission path, a network analyzer is used to transmit high-frequency signals up to 100 GHz, and the transmission loss is measured. The characteristic impedance is 50Ω.

傳輸損耗的測定值係為,絕對值越小,則傳輸損耗越少,意味著具有良好的高頻特性。在表4中,係記載於20GHz與70GHz中之傳輸損耗的評估結果。其評估基準係如下所述。 The measured value of the transmission loss is that the smaller the absolute value, the smaller the transmission loss, which means that it has good high-frequency characteristics. Table 4 shows the evaluation results of the transmission loss in 20 GHz and 70 GHz. The evaluation criteria are as follows.

<20GHz的傳輸損耗評估基準> <20GHz transmission loss evaluation standard>

◎:傳輸損耗為-6.2dB以上 ◎: Transmission loss is -6.2dB or more

○:傳輸損耗未達-6.2dB至-6.5dB以上 ○: Transmission loss does not reach -6.2dB to -6.5dB or more

×:傳輸損耗未達-6.5dB ×: Transmission loss does not reach -6.5dB

<70GHz之傳輸損耗評估基準> <70GHz Transmission Loss Evaluation Standard>

◎:傳輸損耗為-20.6dB以上 ◎: Transmission loss is -20.6dB or more

○:傳輸損耗未達-20.6dB至-24.0dB以上 ○: Transmission loss does not reach -20.6dB to -24.0dB or more

×:未達-24.0dB ×: less than -24.0dB

再者,根據上述傳輸損耗的評估結果,綜合評估依據下述評估基準的高頻特性。將結果揭示於下述表4。 Furthermore, based on the evaluation results of the transmission loss described above, the high-frequency characteristics based on the following evaluation criteria are comprehensively evaluated. The results are shown in Table 4 below.

<高頻特性綜合評估基準> <Standard for Comprehensive Evaluation of High Frequency Characteristics>

◎(優良):20GHz之傳輸損耗與70GHz之傳輸損耗的評估結果,均為◎。 ◎ (Excellent): The evaluation results of the transmission loss of 20 GHz and the transmission loss of 70 GHz are both ◎.

○(良):20GHz之傳輸損耗的評估結果為◎,70GHz之傳輸損耗的評估結果為○。 ○ (Good): The evaluation result of the transmission loss at 20 GHz was ◎, and the evaluation result of the transmission loss at 70 GHz was ○.

△(合格):70GHz之傳輸損耗的評估結果雖為×,但20GHz之傳輸損耗為◎或○。 △ (Passed): Although the evaluation result of the transmission loss at 70 GHz is ×, the transmission loss at 20 GHz is ◎ or ○.

×(不合格):20GHz之傳輸損耗與70GHz之傳輸損耗的評估結果,均為×。 × (Fail): The evaluation results of the transmission loss of 20GHz and the transmission loss of 70GHz are both ×.

〔可辨識性的評估〕 [Evaluation of identifiability]

作為可辨識性評估,進行了霧度即霧影值測定。將實施例和比較例中製造的樣品的粗化處理面作為樹脂接合面,貼合於株式會社KANEKA製的層合用聚醯亞胺PIXEO(FRS-522厚度12.5μm)的兩面上而製作了覆銅積層板。對這些銅張積層板,將於兩面貼合之銅箔利用氯化銅溶液進行蝕刻去除,製作出霧影值測定用的樣品膜。 As the evaluation of the discriminability, a haze, that is, a haze value measurement was performed. The roughened surfaces of the samples produced in the examples and comparative examples were used as resin bonding surfaces, and laminated on both sides of a lamination polyimide PIXEO (FRS-522 thickness 12.5 μm) manufactured by KANEKA Co., Ltd. to produce a coating. Copper laminate. With respect to these copper laminated laminates, the copper foils laminated on both sides were etched and removed with a copper chloride solution to produce a sample film for measuring the haze value.

對所製作的樣品膜,利用日本分光制的紫外線可見分光光度儀,即積分球單元V-660,基於JIS K 7136:2000所記載的方法測定霧影值。以(Td/Tt)×100(%)為霧影值而算出。(Tt:全光線透過率、Td:擴散透過率)。 About the produced sample film, the haze value was measured based on the method described in JIS K 7136: 2000 using an integrating sphere unit V-660, which is an ultraviolet-visible spectrophotometer made by Japan Spectroscopy. Calculated using (Td / Tt) × 100 (%) as the haze value. (Tt: total light transmittance, Td: diffuse transmittance).

霧影值表示出了樣品膜的霧度,數值越小則霧度越低,作為可辨識性為良好。基於下述評估基準,對相關的可辨識性進行了評估。將結果揭示於下述表4。 The haze value indicates the haze of the sample film. The smaller the value is, the lower the haze is, and it is good as the distinguishability. The relevant identifiability was evaluated based on the evaluation criteria described below. The results are shown in Table 4 below.

<可辨識性的評估基準> <Evaluation Criteria for Identifiability>

◎:霧影值未達30% ◎: The haze value is less than 30%

○:霧影值為30%以上,未達60%。 :: The haze value is 30% or more and less than 60%.

△:霧影值為60%以上,未達80%。 △: The haze value is 60% or more and less than 80%.

×:霧影值為80%以上。 ×: The haze value is 80% or more.

若可辨識性為◎、○或△,則可謂其具有實際應用上可容許的可辨識性。 If the identifiability is ◎, ○, or △, it can be said that it has identifiability that is allowable in practical applications.

密接性的評估-1 Evaluation of tightness-1

密接性藉由剝離試驗進行評估。與以上述〔高頻特性的評估〕製作之覆銅積層板相同的方式製作覆銅積層板,將所獲得的覆銅積層板之銅箔部以寬度10mm的膠帶進行標記。在對該覆銅積層板實施氯化銅蝕刻後去除膠帶,製作出10mm寬的電路配線板。使用東洋精機製作所社製的Tensilon測試機,就該電路配線板之寬度10mm的電路配線部分(銅箔部分),在90度方向上以50mm/分的速度,測定自樹脂基材剝離時的剝離強度。將所得之測定值作為指標,根據下述評估基準而評估密接性。另外,MEGTRON6樹脂與PIXEO樹脂比較,其對密接性的定錨效應的貢獻較大。將結果揭示於下述表4。 Adhesion was evaluated by a peel test. A copper-clad laminate was produced in the same manner as the copper-clad laminate produced in the above [Evaluation of High Frequency Characteristics], and the copper foil portion of the obtained copper-clad laminate was marked with a tape having a width of 10 mm. After the copper-clad laminated board was subjected to copper chloride etching, the tape was removed, and a 10 mm wide circuit wiring board was produced. Using a Tensilon tester manufactured by Toyo Seiki Seisakusho Co., Ltd., a circuit wiring portion (copper foil portion) with a width of 10 mm of the circuit wiring board was measured at a speed of 50 mm / min in a 90-degree direction at the time of peeling from the resin substrate. strength. Using the obtained measured value as an index, the adhesion was evaluated based on the following evaluation criteria. In addition, compared with PIXEO resin, MEGTRON6 resin has a greater contribution to the anchoring effect of adhesion. The results are shown in Table 4 below.

<密接性的評估基準> <Evaluation Criteria for Adhesion>

○:剝離強度為0.6kN/m以上 ○: Peeling strength is 0.6 kN / m or more

△:剝離強度為0.5kN/m以上,未達0.6kN/m △: Peel strength is 0.5 kN / m or more and less than 0.6 kN / m

×:剝離強度未達0.5kN/m ×: Peel strength is less than 0.5kN / m

密接性的評估-2 Evaluation of tightness -2

與以上述〔可辨識性的評估〕製作之覆銅積層板相同的方式製作覆銅積層板,將所獲得的覆銅積層板之銅箔部以寬度10mm的膠帶進行標記。在對該覆銅積層板實施氯化銅蝕刻後去除膠帶,製作出10mm寬的電路配線板。使用東洋精機製作所社製的Tensilon測試機,就該電路配線板之寬度10mm的電路配線部分(銅箔部分),在90度方向上以50mm/分的速度,測定自樹脂基材剝離時的剝離強度。將所得之測定值作為指標,根據下述評估基準而評估密接性。將結果揭示於下述表4。 A copper-clad laminate was produced in the same manner as the copper-clad laminate produced in the above [Evaluability Evaluation], and the copper foil portion of the obtained copper-clad laminate was marked with a tape having a width of 10 mm. After the copper-clad laminated board was subjected to copper chloride etching, the tape was removed, and a 10 mm wide circuit wiring board was produced. Using a Tensilon tester manufactured by Toyo Seiki Seisakusho Co., Ltd., a circuit wiring portion (copper foil portion) with a width of 10 mm of the circuit wiring board was measured at a speed of 50 mm / min in a 90-degree direction at the time of peeling from the resin substrate. strength. Using the obtained measured value as an index, the adhesion was evaluated based on the following evaluation criteria. The results are shown in Table 4 below.

<密接性的評估基準> <Evaluation Criteria for Adhesion>

○:剝離強度為1kN/m以上, ○: peeling strength is 1 kN / m or more,

×:剝離強度未達1kN/m ×: Peel strength is less than 1kN / m

再著,根據上述密接性的評估結果,綜合評估依據下述評估基準的密接性。將結果揭示於下述表4。 Furthermore, based on the above-mentioned evaluation results of the tightness, the tightness based on the following evaluation criteria is comprehensively evaluated. The results are shown in Table 4 below.

<密接性的綜合評估基準> <Comprehensive Evaluation Criteria for Adhesion>

◎(優良):上述〔密接性評估-1〕及〔密接性評估-2〕的兩個評估結果均為○。 ((Excellent): Both of the above [adhesion evaluation-1] and [adhesion evaluation-2] evaluation results were ○.

○(合格):上述〔密接性評估-1〕評估結果為△、密接性評估-2〕的兩個評估結果為○。 ○ (Pass): The two evaluation results of the above [adhesion evaluation-1] evaluation result were △, and the adhesion evaluation-2] were ○.

×(不合格):上述〔密接性評估-1〕及〔密接性評估-2〕的兩個評估結果中的至少一個評估結果為×。 × (Failure): At least one of the above two evaluation results of [Adhesiveness Evaluation-1] and [Adhesiveness Evaluation-2] was evaluated as ×.

〔綜合評估〕 〔Comprehensive Evaluation〕

綜整上述之高頻特性、可辨識性及密接性之全數資訊,根據下述評估基準進行綜合評估。 Comprehensive information on the above-mentioned high-frequency characteristics, identifiability and tightness is comprehensively evaluated based on the following evaluation criteria.

<綜合評估的評估基準> <Evaluation Criteria for Comprehensive Evaluation>

A(優良):高頻特性之綜合評估、可辨識性的評估以及密接性的綜合評估結果,均為◎。 A (Excellent): The comprehensive evaluation results of high-frequency characteristics, the evaluation of identifiability, and the comprehensive evaluation of tightness are all ◎.

B:(合格):雖然不滿足上述A,卻於高頻特性之綜合評估、可辨識性的評估以及密接性的綜合評估結果中沒有×。 B: (Pass): Although the above-mentioned A was not satisfied, there was no × in the comprehensive evaluation results of the high-frequency characteristics, the evaluation of the identifiability, and the comprehensive evaluation of the tightness.

C(不合格):高頻特性之綜合評估、可辨識性的評估以及密接性的綜合評估結果中,至少一個評估結果為×。 C (Fail): At least one of the comprehensive evaluation results of high-frequency characteristics, the evaluation of identifiability, and the comprehensive evaluation of tightness is ×.

在此,探討上述各表中所示之結果。 Here, the results shown in the above tables will be discussed.

比較例1所示,為存在於表面處理銅箔之粗化處理面上的粗化粒子之平均高度小於本發明所規定之例。當使用比較例1之表面處理銅箔製作覆銅積層板的情況下,發生有銅箔與樹脂基材間之耐熱密接性惡化的結果。 As shown in Comparative Example 1, the average height of the roughened particles existing on the roughened surface of the surface-treated copper foil is smaller than that specified in the present invention. When the copper-clad laminated board was produced using the surface-treated copper foil of Comparative Example 1, the heat-resistant adhesiveness between the copper foil and the resin substrate deteriorated.

比較例2、3及7所示,均為表面處理銅箔之粗化處理面的BET表面積比及Cms小於本發明所規定之例。當使用比較例2、3及7之表面處理銅箔製作覆銅積層板的情況下,發生有銅箔與樹脂基材間之耐熱密接性惡化的結果。 As shown in Comparative Examples 2, 3, and 7, the BET surface area ratio and Cms of the roughened surface of the surface-treated copper foil were all smaller than those specified in the present invention. When the copper-clad laminated board was produced using the surface-treated copper foils of Comparative Examples 2, 3, and 7, the heat-resistant adhesiveness between the copper foil and the resin substrate deteriorated.

比較例4及5所示,分別為存在於表面處理銅箔之粗化處理面上的粗化粒子之平均高度大於本發明所規定之例。當使用比較例4及5之表面處理銅箔製作覆銅積層板、形成導體電路的情況下,發生有高頻特性以及可辨識性均為大幅惡化的結果。 As shown in Comparative Examples 4 and 5, the average heights of the roughened particles existing on the roughened surface of the surface-treated copper foil were larger than those specified in the present invention. When the surface-treated copper foils of Comparative Examples 4 and 5 were used to produce a copper-clad laminated board and a conductor circuit was formed, both the high-frequency characteristics and the discernability were significantly deteriorated.

比較例6所示,為Cms小於本發明所規定之例。當使用比較例6之表面處理銅箔製作覆銅積層板的情況下,藉由對密接性的定錨效應貢獻較大的MEGTRON6樹脂發生有密接性惡化的結果。 Comparative Example 6 shows an example in which Cms is smaller than that specified in the present invention. When the surface-treated copper foil of Comparative Example 6 was used to produce a copper-clad laminated board, the MEGTRON6 resin, which contributes a large amount to the anchoring effect of the adhesion, had a deterioration in adhesion.

另外,參考例1為於銅箔未實施粗化處理,進一步並未形成金屬處理層亦沒有實施矽烷耦合劑層處理之例子。在使用參考例1之銅箔來製作覆銅積層板的情況下,形成有銅箔與樹脂基材間之密接性大幅惡化的結果。 In addition, Reference Example 1 is an example in which the copper foil is not subjected to a roughening treatment, a metal treatment layer is not further formed, and a silane coupling agent layer treatment is not performed. When the copper-clad laminated board was produced using the copper foil of Reference Example 1, the result was that the adhesion between the copper foil and the resin substrate was significantly deteriorated.

相較之下,已形成在表面處理銅箔之粗化處理面上的粗化粒子之平均高度為在本發明所規定的範圍內,且該粗化處理面之BET表面積比,以及Cms亦滿足本發明規定之實施例1至8的表面處理銅箔,將用該表面處理銅箔製作覆銅積層板之際,銅箔與樹脂基材間呈現出優越的密接性。此外,由使用實施例1至8之表面處理銅箔之覆銅積層板所形成的導 體電路,即使傳輸高頻訊號,仍可有效的抑制傳輸損耗,進一步,積層實施例1至8之表面處理銅箔而密接的樹脂基材,則在之後藉由蝕刻去除掉銅箔之際呈現出優越的可辨識性。 In comparison, the average height of the roughened particles that have been formed on the roughened surface of the surface-treated copper foil is within the range specified in the present invention, and the BET surface area ratio of the roughened surface and Cms also satisfy In the surface-treated copper foils of Examples 1 to 8 specified in the present invention, when the surface-treated copper foil is used to produce a copper-clad laminated board, the copper foil and the resin substrate exhibit excellent adhesion. In addition, the guide formed by the copper clad laminated board using the surface-treated copper foils of Examples 1 to 8 was used. The body circuit can effectively suppress transmission loss even when transmitting high-frequency signals. Furthermore, the resin substrates laminated with the surface-treated copper foils of Examples 1 to 8 will be presented after the copper foils are removed by etching. Out of the distinguishability.

本申請案為主張2015年12月9日於日本國提出專利申請之專利申請號特願2015-240007的優先權,在此為參照該優先權,將其內容作為本說明書之記載內容的一部分。 This application claims the priority of Patent Application No. 2015-240007, filed in Japan on December 9, 2015, and the contents of this specification are hereby incorporated by reference with reference to this priority.

Claims (8)

一種印刷配線板用表面處理銅箔,其在形成有粗化粒子的表面上具有矽烷耦合劑層,其特徵在於:在該矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,該矽烷耦合劑層表面之BET表面積比為1.2以上,細微表面係數Cms為2.0以上且未達8.0。A surface-treated copper foil for a printed wiring board, comprising a silane coupling agent layer on a surface on which roughened particles are formed, characterized in that the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and When the thickness is less than 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more, and the fine surface coefficient Cms is 2.0 or more and less than 8.0. 如申請專利範圍第1項之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.3μm。For example, the surface-treated copper foil for a printed wiring board of the scope of application for a patent, wherein the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.3 μm. 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層表面的L*a*b*表色系中的L*為40以上且未達60。The scope of the patent or the printed wiring board 2 of surface treated copper foil 1, wherein the L * a * b in the surface layer of the silane-coupling agent * color system of L * is 40 or more and less than 60. 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,上述形成有粗化粒子的表面,其具備具有選自鉻(Cr)、鐵(Fe)、鈷(Co)、鎳(Ni)、銅(Cu)、鋅(Zn)、鉬(Mo)、及錫(Sn)中之至少一種金屬的金屬處理層,或是具備具有選自由鉻、鐵、鈷、鎳、銅、鋅、鉬、及錫中之至少兩種以上之金屬所形成之合金的金屬處理層。For example, the surface-treated copper foil for a printed wiring board for which the scope of patent application is item 1 or 2, wherein the surface on which the roughened particles are formed is provided with a material selected from the group consisting of chromium (Cr), iron (Fe), cobalt (Co), A metal treatment layer of at least one metal selected from the group consisting of nickel (Ni), copper (Cu), zinc (Zn), molybdenum (Mo), and tin (Sn), or a metal treatment layer having a material selected from the group consisting of chromium, iron, cobalt, nickel, and copper A metal-treated layer of an alloy formed of at least two or more metals of zinc, molybdenum, and tin. 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,在該矽烷耦合劑層中所含有的矽元素量為0.5μg/dm2以上且未達15μg/dm2For example, the surface-treated copper foil for a printed wiring board according to the first or second application scope of the patent, wherein the amount of the silicon element contained in the silane coupling agent layer is 0.5 μg / dm 2 or more and less than 15 μg / dm 2 . 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,該矽烷耦合劑具有選自環氧基、胺基、乙烯基、(甲基)丙烯醯基、苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基中之至少一種官能基。For example, the surface-treated copper foil for a printed wiring board according to item 1 or 2 of the patent application scope, wherein the silane coupling agent has a material selected from the group consisting of epoxy, amino, vinyl, (meth) acrylfluorenyl, styryl, At least one of a ureido group, an isocyanurate group, a mercapto group, a sulfide group, and an isocyanate group. 一種印刷配線板用覆銅積層板,係在申請專利範圍第1至6項中任一項之印刷配線板用表面處理銅箔的該矽烷耦合劑層表面積層樹脂層而成。A copper-clad laminated board for a printed wiring board is a resin layer on the surface area of the silane coupling agent layer of the surface-treated copper foil for a printed wiring board according to any one of claims 1 to 6. 一種印刷配線板,其使用申請專利範圍第7項之印刷配線板用覆銅積層板。A printed wiring board using a copper-clad laminated board for a printed wiring board according to item 7 of the patent application.
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