TWI627307B - Surface-treated copper foil for printed wiring board, copper-clad laminate for printed wiring board, and printed wiring board - Google Patents

Surface-treated copper foil for printed wiring board, copper-clad laminate for printed wiring board, and printed wiring board Download PDF

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TWI627307B
TWI627307B TW105140618A TW105140618A TWI627307B TW I627307 B TWI627307 B TW I627307B TW 105140618 A TW105140618 A TW 105140618A TW 105140618 A TW105140618 A TW 105140618A TW I627307 B TWI627307 B TW I627307B
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copper foil
printed wiring
wiring board
coupling agent
silane coupling
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TW105140618A
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TW201739958A (en
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Takahiro Saito
Takeshi Ezura
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Furukawa Electric Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/14Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

一種印刷配線板用表面處理銅箔,在形成有粗化粒子的表面上具有矽烷耦合劑層,其特徵在於,在上述矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,上述矽烷耦合劑層表面之BET表面積比為1.2以上。 A surface-treated copper foil for a printed wiring board having a silane coupling agent layer on the surface on which roughened particles are formed, characterized in that the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more Up to 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more.

Description

印刷配線板用表面處理銅箔、印刷配線板用覆銅積層板及印刷配線板 Surface-treated copper foil for printed wiring boards, copper-clad laminates for printed wiring boards and printed wiring boards

本發明係有關於一種印刷配線板用表面處理銅箔。此外,本發明係有關於一種使用該印刷配線板用表面處理銅箔的印刷配線板用覆銅積層板及使用該印刷配線板用表面處理銅箔的印刷配線板。 The present invention relates to a surface-treated copper foil for printed wiring boards. In addition, the present invention relates to a copper-clad laminate for a printed wiring board using the surface-treated copper foil for a printed wiring board and a printed wiring board using the surface-treated copper foil for the printed wiring board.

近年來,伴隨著電腦或是資訊通訊機器的高性能、高機能化,或網際網路化的發展,有必要將大容量之資訊以更加高速的方式進行傳輸處理。因此,所傳輸的訊號有趨於更加高頻化的傾向,而要求印刷配線板可抑制高頻訊號的傳輸損耗。在製作印刷配線板中,通常為積層銅箔與絕緣性基材(樹脂基材)製作將其等進行加熱、加壓而接著的覆銅積層板,使用該覆銅積層板而形成導體電路。當將高頻訊號傳輸(高頻傳輸)至上述導體電路之際的傳輸損耗方面,為與導體損耗、介電損耗、輻射損耗這三個要素有關。 In recent years, with the development of high-performance, high-functioning computers or information communication equipment, or the development of the Internet, it is necessary to transmit large-capacity information in a faster manner. Therefore, the transmitted signal tends to be more high-frequency, and the printed wiring board is required to suppress the transmission loss of the high-frequency signal. In the production of a printed wiring board, a copper-clad laminate in which laminated copper foil and an insulating base material (resin substrate) are heated and pressurized is generally produced, and a conductor circuit is formed using the copper-clad laminate. When transmitting a high-frequency signal (high-frequency transmission) to the above conductor circuit, the transmission loss is related to the three elements of conductor loss, dielectric loss, and radiation loss.

導體損耗,係起因於導體電路之表面電阻而產生者。在使用覆銅積層板而形成的導體電路中傳輸高頻訊號後,產生集膚效應(skin-effect)現象。亦即,當在導體電路中流通交流電後,磁束便產生變化,而在導體電路之中心部產生反電動勢,其結果,造成電流難以在導體中心部流動,反而產生導體表面部分(表皮部分)的電流密度升高的現象。此種集膚效應現象使導體之有效斷面積減少,而產生所謂的表面電阻。電流所 流動的表皮部分之厚度(集膚深度),為與頻率的平方根成反比例。 The conductor loss is caused by the surface resistance of the conductor circuit. After transmitting high-frequency signals in a conductor circuit formed by using a copper clad laminate, a skin-effect phenomenon occurs. That is, when alternating current circulates in the conductor circuit, the magnetic beam changes, and a back electromotive force is generated in the center of the conductor circuit. As a result, it is difficult for current to flow in the center of the conductor, but the surface portion (skin portion) of the conductor The phenomenon of increased current density. This phenomenon of skin effect reduces the effective cross-sectional area of the conductor and produces the so-called surface resistance. Current The thickness of the flowing epidermis (skin depth) is inversely proportional to the square root of the frequency.

近年來,開發有如超過20GHz的高頻對應機器。當頻率在導體電路中傳輸GHz波段的高頻訊號時,集膚深度約形成為2μm或其以下,造成電流僅僅在導體的極為表層上流動。因此,在該高頻對應機器中使用的覆銅積層板中,若銅箔的表面粗度變大時,由該銅箔所形成之導體的傳輸路徑(也就是表皮部分的傳輸路徑)也會變長,增加傳輸損耗。因為如此,對高頻對應機器種所採用的覆銅積層板之銅箔,期望能減小其表面粗度。 In recent years, high-frequency compatible devices such as over 20 GHz have been developed. When the frequency transmits high-frequency signals in the GHz band in a conductor circuit, the skin depth is formed to be about 2 μm or less, causing current to flow only on the extreme surface layer of the conductor. Therefore, in the copper-clad laminate used in the high-frequency compatible device, if the surface roughness of the copper foil becomes larger, the transmission path of the conductor formed by the copper foil (that is, the transmission path of the skin part) will also Lengthening increases transmission loss. Because of this, it is desirable to reduce the surface roughness of the copper foil of the copper-clad laminate used in high-frequency compatible models.

另一方面,一般在印刷配線板中所使用的銅箔,為利用電鍍或蝕刻等手法,在其表面形成粗化處理層(形成粗化粒子之層),藉由物理性的效果(定準效應Anchoring Effect)而提升與樹脂基材之間的接著力。不過,若為了有效提升與樹脂基材之間的接著力,而增大形成於銅箔表面上的粗化粒子時,如上所述,將導致傳輸損耗的増加。 On the other hand, the copper foil commonly used in printed wiring boards is to form a roughening treatment layer (a layer for forming roughened particles) on the surface by means of electroplating or etching. Anchoring Effect) to improve the adhesion with the resin substrate. However, if the roughened particles formed on the surface of the copper foil are increased in order to effectively improve the adhesion with the resin base material, as described above, the transmission loss will increase.

介電損耗,係起因於樹脂基材之介電率或正切損耗(dissipation factor)。當將脈衝訊號流動於導體電路時,導體電路周遭的電場便會產生變化。當上述電場進行變化的周期(頻率)接近樹脂基材之分極的緩和時間(產生分極之荷電體的移動時間)時(亦即,進行高頻化後),在電場變化中便會發生遲延。在該種狀態之下,樹脂內部產生分子摩擦而有熱產生,造成傳輸損耗。為了抑制該介電損耗,作為覆銅積層板之樹脂基材,為必須採用極性較大、且置換基之量較少的樹脂,或是須採用極性大之不具有置換基的樹脂,而使得難以產生伴隨於電場變化的樹脂基材之分極。 The dielectric loss is caused by the dielectric constant or tangent loss of the resin substrate. When the pulse signal flows through the conductor circuit, the electric field around the conductor circuit changes. When the period (frequency) at which the above-mentioned electric field changes is close to the relaxation time of the polarization of the resin base material (movement time of the polarization-generating charged body) (that is, after high-frequency increase), delay will occur in the change of the electric field. In this state, molecular friction occurs inside the resin and heat is generated, causing transmission loss. In order to suppress this dielectric loss, as the resin substrate of the copper-clad laminate, it is necessary to use a resin with a large polarity and a small amount of replacement groups, or a resin with a large polarity and no replacement groups, so that It is difficult to cause polarization of the resin base material accompanying changes in the electric field.

另一方面,印刷配線板中所使用的銅箔,除了形成上述粗化處理層之外,還藉由矽烷耦合劑而將銅箔表面進行處理,藉此以化學性的提升與樹脂基材之間的接著力。為了提升矽烷耦合劑與樹脂基材之間的化學性接著性,樹脂基材必須要具有一定程度之大極性置換基。然而,為了抑制介電損耗,使用減少樹脂基材中極性大的置換基之量的低介電性基材時,將造成化學性接著力降低,難以確保銅箔與樹脂基材間之充分的接著性。 On the other hand, in addition to forming the roughened layer, the copper foil used in the printed wiring board is also treated with a silane coupling agent to chemically enhance the surface of the resin foil. Adhesion. In order to improve the chemical adhesion between the silane coupling agent and the resin substrate, the resin substrate must have a certain degree of large polar substituents. However, in order to suppress dielectric loss, the use of a low-dielectric substrate that reduces the amount of highly polar substituents in the resin substrate will result in a reduction in chemical adhesion, making it difficult to ensure sufficient adhesion between the copper foil and the resin substrate Continuity.

如此,在覆銅積層板中,抑制傳輸損耗以及提升(提升耐久性)銅箔與樹脂基材間之密接性(接著性),存在著一種相互權衡取捨(trade-off)的關係。 In this way, in copper-clad laminates, there is a trade-off relationship between suppressing transmission loss and improving (improving durability) the adhesion (adhesion) between the copper foil and the resin substrate.

近年來,高頻對應印刷配線板在更加要求可靠度之領域中迅速發展。例如,作為在車載用途等移動通訊的印刷配線基板的使用上,要求即使在高溫環境等嚴苛環境下,為仍可使用的高可靠度。為了因應此種要求,於覆銅積層板方面,則必須要高度提升銅箔與樹脂基材間的密接性,例如,要求即使在150℃的溫度下仍可承受1000小時之嚴苛實驗的密接性。 In recent years, high-frequency compatible printed wiring boards have rapidly developed in fields where reliability is more demanded. For example, the use of printed wiring boards for mobile communications such as in-vehicle applications requires high reliability that can be used even in severe environments such as high-temperature environments. In order to meet this requirement, in the copper-clad laminate, the adhesion between the copper foil and the resin substrate must be highly improved, for example, it is required to withstand the rigorous experiment of 1000 hours even at a temperature of 150 ℃ Sex.

為了滿足該等需求,展開有各式技術的開發。例如,在專利文獻1中記載有一種表面處理銅箔,為使粗化粒子附著至銅箔,形成表面粗度Rz為1.5~4.0μm、亮度值為30以下的粗化面,該粗化粒子以指定密度呈現略均等狀的分布,而該表面處理銅箔則具有由該粗化粒子所形成之突起物,該突起物為具有指定的高度及寬度,且於專利文獻1中還記載,藉由使用該種表面處理銅箔,可提升以液晶聚合物為始之與高頻電路基板用樹脂基材之間的密接性。 In order to meet these needs, various technologies have been developed. For example, Patent Literature 1 describes a surface-treated copper foil that forms roughened surfaces with a surface roughness Rz of 1.5 to 4.0 μm and a brightness value of 30 or less in order to attach roughened particles to the copper foil. It exhibits a slightly uniform distribution at a specified density, and the surface-treated copper foil has protrusions formed by the roughened particles. The protrusions have a specified height and width, and are also described in Patent Document 1. By using such surface-treated copper foil, the adhesion between the liquid crystal polymer and the resin substrate for high-frequency circuit boards can be improved.

在智慧型手機或平板電腦這一類型的小型電子機器中,由容易配線或輕量性的觀點來看,係採用可撓性印刷配線板(以下,簡稱為FPC)。近年來,伴隨著該等小型電子機器的高機能化,亦有訊號傳輸速度高速化的傾向,FPC之阻抗匹配(輸出阻抗與輸入阻抗的匹配)便成為重要的課題。為實現對訊號傳輸速度之高速化的阻抗匹配,實施有將作為FPC基礎的樹脂基材(具代表性為聚醯亞胺)厚層化的措施。 From the viewpoint of easy wiring or light weight, a flexible printed wiring board (hereinafter, abbreviated as FPC) is used in a small electronic device such as a smartphone or a tablet. In recent years, with the high performance of these small electronic devices and the tendency to increase the signal transmission speed, impedance matching (matching of output impedance and input impedance) of FPC has become an important issue. In order to achieve impedance matching for the high-speed signal transmission speed, measures have been taken to thicken the resin substrate (typically polyimide) as the basis of FPC.

此外,在有關FPC的專利文獻2中記載有一種適用於晶粒軟模封裝(COF)形式的FPC,上述FPC所具有的電解銅箔係構成為在接著至絕緣層的接著面上,具備由鎳-鋅合金形成的防鏽處理層,該接著面的表面粗度(Rz)為0.05~1.5μm,於入射角60°中的鏡面光澤度達250以上。根據專利文獻2所揭內容,該種FPC顯示出優越的透光率,且銅箔與樹脂基材間之密接性亦呈現良好狀。 In addition, Patent Document 2 on FPC describes an FPC suitable for use in a die soft mold package (COF) format. The electrolytic copper foil included in the FPC is configured to include The surface roughness (Rz) of the surface of the rust-preventive treatment layer formed by the nickel-zinc alloy is 0.05 to 1.5 μm, and the specular gloss at an incident angle of 60° is 250 or more. According to the disclosure of Patent Document 2, this FPC shows excellent light transmittance, and the adhesion between the copper foil and the resin substrate also shows good shape.

此外,在專利文獻3中則記載有一種表面處理銅箔,為藉由粗化處理形成粗化粒子,係將粗化處理面的平均粗度Rz設為0.5~1.3μm、光澤度設為4.8~68、粗化粒子的表面積A與由上述銅箔表面側俯視觀察粗化粒子所得的面積B間之比A/B設為2.00~2.45。在專利文獻3中還記載,積層上述表面處理銅箔與樹脂基板而形成的覆銅積層板,在蝕刻除去銅箔後的樹脂透明性良好,且銅箔與樹脂間之密接性亦呈現良好狀。 In addition, Patent Document 3 describes a surface-treated copper foil, in order to form roughened particles by roughening, the average roughness Rz of the roughened surface is set to 0.5 to 1.3 μm, and the gloss is set to 4.8 ~68. The ratio A/B between the surface area A of the roughened particles and the area B obtained by viewing the roughened particles from the copper foil surface side in plan view is set to 2.00 to 2.45. Patent Document 3 also describes that a copper-clad laminate formed by laminating the above-mentioned surface-treated copper foil and a resin substrate has good transparency of the resin after etching away the copper foil, and the adhesion between the copper foil and the resin also shows good shape .

【先前技術】【Prior Technology】 專利文獻Patent Literature

專利文獻1:日本專利第4833556號公報 Patent Document 1: Japanese Patent No. 4833556

專利文獻2:日本專利第4090467號公報 Patent Document 2: Japanese Patent No. 4090467

專利文獻3:日本專利第5497808號公報 Patent Document 3: Japanese Patent No. 5497808

上述專利文獻1所記載的表面處理銅箔,在與高頻對應樹脂基材之間具有優越的密接性。不過,使用該種表面處理銅箔的覆銅積層板在GHz波段之高頻波段中,傳輸損耗高、無法充分滿足高頻對應印刷配線板所需之高要求。 The surface-treated copper foil described in the above-mentioned Patent Document 1 has excellent adhesion to a resin substrate corresponding to a high frequency. However, the copper-clad laminates using this kind of surface-treated copper foil have high transmission loss in the high-frequency band of the GHz band, and cannot fully meet the high requirements for high-frequency corresponding printed wiring boards.

此外,在上述專利文獻2中記載之FPC所採用的電解銅箔,並未實施粗化處理,除了COF以外,並無法實現在印刷配線板中所要求之與樹脂基材之間的高密接性。 In addition, the electrolytic copper foil used in the FPC described in the above Patent Document 2 is not roughened, and besides COF, it cannot achieve the high adhesion to the resin substrate required in the printed wiring board .

此外,上述專利文獻3中記載之表面處理銅箔,在高溫下與樹脂基材間之密接性並不充分。因此,使用該種表面處理銅箔的印刷配線板,例如在溫度150℃、1000小時之嚴苛條件下,並無法滿足高可靠度的要求。 In addition, the surface-treated copper foil described in Patent Document 3 described above has insufficient adhesion to a resin base material at high temperatures. Therefore, the printed wiring board using this kind of surface-treated copper foil, for example, under the severe conditions of a temperature of 150°C and 1000 hours, cannot meet the requirements of high reliability.

本發明之課題在於提供一種如後所述之印刷配線板用表面處理銅箔,藉由該印刷配線板用表面處理銅箔,即便傳輸GHz波段之高頻訊號時,仍高度抑制傳輸損耗,且即使在高溫下,仍提高銅箔與樹脂基材之間的密接性,在嚴苛條件下仍具有優越的耐久性,更可獲得難以短路之印刷配線板。此外,本發明之課題在於提供使用該印刷配線板用表面處理銅箔的印刷配線板用覆銅積層板、以及使用該印刷配線板用表面處理銅箔的印刷配線板(電路基板)。 An object of the present invention is to provide a surface-treated copper foil for a printed wiring board as described later. By using the surface-treated copper foil for a printed wiring board, the transmission loss is highly suppressed even when a high-frequency signal in the GHz band is transmitted, and Even at high temperatures, the adhesion between the copper foil and the resin substrate is improved, and it has excellent durability under severe conditions, and a printed circuit board that is difficult to short-circuit can be obtained. In addition, an object of the present invention is to provide a copper-clad laminate for a printed wiring board using the surface-treated copper foil for a printed wiring board, and a printed wiring board (circuit board) using the surface-treated copper foil for the printed wiring board.

本發明之上述課題係可藉由下述手段獲得解決。 The above-mentioned problems of the present invention can be solved by the following means.

〔1〕一種印刷配線板用表面處理銅箔,在形成有粗化粒子的表面上具有矽烷耦合劑層,其中,在上述矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,上述矽烷耦合劑層表面之BET表面積比為1.2以上。 [1] A surface-treated copper foil for a printed wiring board having a silane coupling agent layer on the surface on which roughened particles are formed, wherein the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and Less than 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more.

〔2〕如〔1〕之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.3μm。 [2] The surface-treated copper foil for a printed wiring board according to [1], wherein the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.3 μm.

〔3〕如〔1〕或〔2〕之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層表面中,細微表面係數Cms為0.6以上且未達2.0。 [3] The surface-treated copper foil for printed wiring boards according to [1] or [2], wherein, on the surface of the silane coupling agent layer, the fine surface coefficient Cms is 0.6 or more and less than 2.0.

〔4〕如〔1〕~〔3〕中任一項之印刷配線板用表面處理銅箔,其中,形成有上述粗化粒子的表面具有含鎳之金屬處理層,在上述金屬處理層中所含有的鎳元素量為0.1mg/dm2以上且未達0.3mg/dm2[4] The surface-treated copper foil for printed wiring boards according to any one of [1] to [3], wherein the surface on which the roughened particles are formed has a nickel-containing metal treatment layer, which is formed in the metal treatment layer The amount of nickel element contained is 0.1 mg/dm 2 or more and less than 0.3 mg/dm 2 .

〔5〕如〔1〕~〔4〕中任一項之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層中所含有的矽元素量為0.5μg/dm2以上且未達15μg/dm2[5] The surface-treated copper foil for printed wiring boards according to any one of [1] to [4], wherein the amount of silicon element contained in the silane coupling agent layer is 0.5 μg/dm 2 or more and is not up to 15μg/dm 2 .

〔6〕如〔1〕~〔5〕中任一項之印刷配線板用表面處理銅箔,其中,上述矽烷耦合劑,具有選自由環氧基、胺基、乙烯基、(甲基)丙烯醯基、苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基中之至少一種官能基。 [6] The surface-treated copper foil for printed wiring boards according to any one of [1] to [5], wherein the silane coupling agent has a group selected from epoxy groups, amine groups, vinyl groups, (meth)acrylic At least one functional group among an acyl group, a styryl group, a urea group, an isocyanurate group, a mercapto group, a sulfide group, and an isocyanate group.

〔7〕一種印刷配線板用覆銅積層板,其中在〔1〕~〔6〕中任一項之印刷配線板用表面處理銅箔的上述矽烷耦合劑層表面上,積層有樹脂層。 [7] A copper-clad laminate for a printed wiring board, wherein a resin layer is laminated on the surface of the silane coupling agent layer surface of the surface-treated copper foil for a printed wiring board of any one of [1] to [6].

〔8〕一種印刷配線板,其使用〔7〕之印刷配線板用覆銅積層板。 [8] A printed wiring board using the copper clad laminate for printed wiring board of [7].

本發明之印刷配線板用表面處理銅箔係藉由將其使用在印刷配線板之導體電路,從而可獲得在嚴苛條件仍具有優越的耐久性、更具有優越絕緣可靠度的印刷配線板,其可高度抑制傳輸GHz波段之高頻訊號時的傳輸損耗,並且即使在高溫下,仍可提升銅箔與樹脂基材(樹脂層)間之密接性。 The surface-treated copper foil for a printed wiring board of the present invention is used in a conductor circuit of a printed wiring board to obtain a printed wiring board having excellent durability under severe conditions and superior insulation reliability. It can highly suppress the transmission loss when transmitting high-frequency signals in the GHz band, and even at high temperatures, can improve the adhesion between the copper foil and the resin substrate (resin layer).

本發明之印刷配線板用覆銅積層板係藉由將其作為印刷配線板的基板使用,所獲得的印刷配線板將具有傳輸GHz波段之高頻訊號時的傳輸損耗得以受到高度抑制,並且即使在高溫下仍可提升銅箔與樹脂基材間之密接性,而在嚴苛條件下的耐久性亦顯優越,更具有極佳的絕緣可靠度。 The copper-clad laminate for a printed wiring board of the present invention is used as a substrate of a printed wiring board, and the obtained printed wiring board has a highly suppressed transmission loss when transmitting a high-frequency signal in the GHz band, and even It can still improve the adhesion between the copper foil and the resin substrate at high temperatures, and the durability under severe conditions is also superior, and it has excellent insulation reliability.

本發明之印刷基板係在傳輸GHz波段之高頻訊號時的傳輸損耗得以受到高度抑制,並且即使在高溫下仍可提升銅箔與樹脂基材間之密接性,而在嚴苛條件下的耐久性亦顯優越,更難以產生短路。 The transmission loss of the printed circuit board of the present invention when transmitting high-frequency signals in the GHz band is highly suppressed, and the adhesion between the copper foil and the resin substrate can be improved even at high temperatures, and the durability under severe conditions The performance is also superior, and it is more difficult to produce a short circuit.

適當參照附圖並根據下述記載,可明確瞭解本發明之上述及其他特徵以及優點。 The above and other features and advantages of the present invention can be clearly understood with reference to the drawings and the following description.

圖1所示為測定粗化粒子高度之方法之一例的說明圖。 FIG. 1 is an explanatory diagram showing an example of a method for measuring the height of coarsened particles.

圖2所示為測定粗化粒子高度之方法之一例的說明圖。 FIG. 2 is an explanatory diagram showing an example of a method for measuring the height of coarsened particles.

關於本發明之印刷配線板用表面處理銅箔較佳實施形態,說明如下。 The preferred embodiment of the surface-treated copper foil for printed wiring boards of the present invention will be described below.

〔印刷配線板用表面處理銅箔〕 [Surface-treated copper foil for printed wiring boards]

本發明之印刷配線板用表面處理銅箔(以下,簡稱為「本發明之表面處理銅箔」)係藉由矽烷耦合劑處理(亦即,在形成有粗化粒子之表面上具有矽烷耦合劑層)形成有粗化粒子的表面(因應需要,又附著有防腐金屬之面),在該矽烷耦合劑層表面(表面處理銅箔最表面),粗化粒子之平均高度為0.05μm以上且未達0.5μm,該矽烷耦合劑層表面之BET表面積比為1.2以上。本發明之表面處理銅箔係當使其兩面以矽烷耦合劑進行處理,而該處理後之表面具有平均高度為0.05μm以上且未達0.5μm之粗化粒子的情況下,只要至少一面的BET表面積比達1.2以上即可,亦可為兩面之BET表面積比達1.2以上。 The surface-treated copper foil for printed wiring boards of the present invention (hereinafter, simply referred to as "surface-treated copper foil of the present invention") is treated with a silane coupling agent (that is, a silane coupling agent is formed on the surface on which roughened particles are formed) Layer) the surface on which the roughened particles are formed (the surface to which the anticorrosive metal is attached as required), on the surface of the silane coupling agent layer (the surface of the surface-treated copper foil), the average height of the roughened particles is 0.05 μm or more and not Up to 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more. When the surface-treated copper foil of the present invention is treated with a silane coupling agent on both sides, and the surface after the treatment has roughened particles with an average height of 0.05 μm or more and less than 0.5 μm, as long as the BET on at least one side The surface area ratio may be 1.2 or more, or the BET surface area ratio of both sides may be 1.2 or more.

在本發明之表面處理銅箔中,是矽烷耦合劑層表面,且於該表面所測定之粗化粒子的平均高度為0.05μm以上且未達0.5μm,並且將該表面之BET表面積比達1.2以上的表面,單純稱之為「粗化處理面」。粗化處理面雖較佳可使其整體由矽烷耦合劑所覆蓋,不過,只要可達到本發明之效果,亦可使矽烷耦合劑僅覆蓋粗化處理面的一部分(亦即,只要可達到本發明之效果,即使粗化處理面之矽烷耦合劑層的一部分發生有膜缺損的情況亦是可允許的,該形態亦包含於本發明中之「具有矽烷耦合劑層」的形態中)。 In the surface-treated copper foil of the present invention, it is the surface of the silane coupling agent layer, and the average height of the roughened particles measured on the surface is 0.05 μm or more and less than 0.5 μm, and the BET surface area ratio of the surface reaches 1.2 The above surface is simply called "roughened surface". Although the roughened surface can preferably be covered with the silane coupling agent as a whole, as long as the effect of the present invention can be achieved, the silane coupling agent may also cover only a part of the roughened surface (that is, as long as the The effect of the invention is permissible even if a part of the silane coupling agent layer on the roughened surface has a film defect, and this form is also included in the "form with a silane coupling agent layer" in the present invention).

本發明之表面處理銅箔,僅至少單面為粗化處理面即可,亦可雙面皆為粗化處理面。本發明之表面處理銅箔,一般為僅有單面為粗化 處理面之形態。 In the surface-treated copper foil of the present invention, only at least one side may be a roughened surface, or both sides may be roughened surfaces. The surface-treated copper foil of the present invention is generally roughened only on one side The shape of the treatment surface.

在本發明之表面處理銅箔中,粗化處理面即使粗化粒子的平均高度未達0.5μm而呈現較低狀,BET表面積比仍為1.2以上而呈較大值。因此,在經由該粗化處理面積層表面處理銅箔與樹脂層,製作覆銅積層板之際,伴隨著粗化粒子的定準效應與較大的表面積,將可高度提升銅箔與樹脂層間之密接性,獲得具優越耐熱性的覆銅積層板。此外,由於該粗化處理面,其粗化粒子的平均高度未達0.5μm而呈現較低狀,故而可降低存在的粗化粒子對傳輸路徑長度的影響。因此,在使用該覆銅積層板之導體電路中,當傳輸GHz波段之高頻訊號之際,亦可有效的抑制傳輸損耗。 In the surface-treated copper foil of the present invention, even if the average height of the roughened particles does not reach 0.5 μm and is relatively low, the BET surface area ratio is still greater than 1.2 or more. Therefore, when the copper foil and the resin layer are surface-treated by this roughening area layer surface to produce a copper-clad laminate, the alignment effect of the roughened particles and the large surface area will highly enhance the height between the copper foil and the resin layer The adhesion is good, and the copper-clad laminate with excellent heat resistance is obtained. In addition, since the roughened surface has an average height of roughened particles that is less than 0.5 μm, it is relatively low, so that the influence of the existing roughened particles on the transmission path length can be reduced. Therefore, in the conductor circuit using the copper-clad laminate, when transmitting high-frequency signals in the GHz band, the transmission loss can also be effectively suppressed.

在此之前,即使在銅箔表面上形成平均高度未達0.5μm之微小粗化粒子,仍無法得知將BET表面積比提升至1.2以上的方法。本發明者們在此種狀況下,藉由採用後述之特定的粗化鍍敷處理條件,成功製作出具有平均高度為0.05μm以上且未達0.5μm的粗化粒子,且BET表面積比達1.2以上的銅箔表面,進而完成本發明。 Prior to this, even if fine roughened particles with an average height of less than 0.5 μm were formed on the surface of the copper foil, a method of increasing the BET surface area ratio to 1.2 or more was not known. In this situation, the inventors succeeded in producing coarse particles having an average height of 0.05 μm or more and less than 0.5 μm by using specific roughening plating conditions described below, and the BET surface area ratio reached 1.2 The above copper foil surface completes the present invention.

從維持與樹脂基材間之高密接性的同時並更加有效的減低傳輸損耗的觀點而言,在上述粗化處理面中之上述粗化粒子的平均高度,較佳為0.05μm以上且未達0.5μm,更佳為0.05μm以上且未達0.3μm。在粗化處理面中之粗化粒子的平均高度,係利用後述之實施例中所記載的方法來測定。 From the viewpoint of maintaining high adhesion to the resin substrate and reducing transmission loss more effectively, the average height of the roughened particles in the roughened surface is preferably 0.05 μm or more and less than 0.5 μm, more preferably 0.05 μm or more and less than 0.3 μm. The average height of the roughened particles on the roughened surface is measured by the method described in the examples described later.

在本發明中,粗化粒子較佳係形成為在粗化處理面整體呈一様(均質)狀。粗化粒子的平均高度則藉由後述實施例所記載的方法進行測定。 In the present invention, the roughened particles are preferably formed in a uniform (homogeneous) shape across the roughened surface. The average height of the roughened particles is measured by the method described in the examples described below.

上述BET表面積比,為藉由BET法而依據表面積的測定方法計算而得。亦即,上述BET表面積比係為,使吸附占有面積為已知的氣體分子吸附至試料表面,根據該吸附量而求出試料的表面積(BET測定表面積),從該BET測定表面積減去假設於試料表面無凹凸狀態之表面積(試料切出面積)之值,該值對該試料切出面積之比則為BET表面積比,藉由後述實施例中所記載的方法來進行測定。 The above BET surface area ratio is calculated by the BET method according to the surface area measurement method. That is, the BET surface area ratio is such that gas molecules with a known occupied area are adsorbed onto the surface of the sample, and the surface area of the sample (BET measured surface area) is obtained from the amount of adsorption, and subtracted from the BET measured surface area. The value of the surface area (sample cut-out area) of the sample surface without unevenness, and the ratio of this value to the sample cut-out area is the BET surface area ratio, which was measured by the method described in the examples described later.

在本發明之表面處理銅箔中,粗化處理面的BET表面積比值如係越大,則意味著表面積越大。從而,粗化處理面之上述BET表面積比越大,則更加提升與樹脂間之相互作用性,伴隨著粗化粒子的定準效應,提升積層樹脂層時之銅箔與樹脂層間之密接性。在本發明之表面處理銅箔中,粗化處理面之BET表面積比係以1.2以上且10以下為佳,以1.2以上且4以下為更佳。 In the surface-treated copper foil of the present invention, the larger the ratio of the BET surface area of the roughened surface, the larger the surface area. Therefore, the larger the BET surface area ratio of the roughened surface is, the more the interaction with the resin is improved, and the alignment effect of the roughened particles improves the adhesion between the copper foil and the resin layer when the resin layer is laminated. In the surface-treated copper foil of the present invention, the BET surface area ratio of the roughened surface is preferably 1.2 or more and 10 or less, and more preferably 1.2 or more and 4 or less.

在銅箔的表面積測定中,一般採用之利用雷射顯微鏡所實施的表面積測定方面,在原理上,因粗化粒子的形狀而造成雷射光無法到達的形成為「陰」部分的測定是不可能的,此外,亦難以藉由高感度的方式檢測出極細微的凹凸部分之表面積。例如,即使是高度與直徑相同的粗化粒子,但比較根部內縮的粗化粒子與無內縮的粗化粒子,雖然與樹脂密接面積較多為前者,但在藉由雷射顯微鏡所進行的表面積測定中,則呈現幾乎相同的測定值。 In the measurement of the surface area of copper foil, the measurement of the surface area using a laser microscope is generally adopted. In principle, the measurement of the "negative" portion that cannot be reached by the laser light due to the roughened particle shape is impossible. In addition, it is also difficult to detect the surface area of extremely fine concave-convex parts by means of high sensitivity. For example, even if it is a roughened particle with the same height and diameter, comparing the roughened particles retracted at the root with the roughened particles without shrinkage, although the area of contact with the resin is larger, it is the former, but it is carried out by a laser microscope. In the measurement of the surface area, it shows almost the same measured value.

相較之下,在利用BET法所進行的表面積之測定中,由於利用氣體分子的吸附來測定表面積,因此對細微凹凸有較高的感度,且亦可測定對雷射光而言形成為「陰」的部分。從而,相較於使用雷射顯微鏡 進行測定的情況,一般而言可以較高的精度測定已形成有粗化粒子之試料的表面積。 In contrast, in the measurement of the surface area by the BET method, since the surface area is measured by the adsorption of gas molecules, it has a higher sensitivity to fine irregularities, and can also be measured as "negative" for laser light. "part. Thus, compared to using a laser microscope In the case of performing the measurement, in general, the surface area of the sample on which the coarsened particles have been formed can be measured with high accuracy.

本發明者們係藉由實施後述之特定的粗化鍍敷處理,成功的增大在雷射顯微鏡中無法測定之「陰」的部分或細微凹凸部分之表面積的比例。藉此,抑制粗化粒子之平均高度,有效的抑制傳輸高頻訊號時的傳輸損耗,同時發現到可大幅度提高與樹脂基材間之密接性,進而達成本發明。 The inventors succeeded in increasing the ratio of the surface area of the "negative" part or the fine concave-convex part that could not be measured by a laser microscope by performing a specific roughening plating process described later. In this way, the average height of the coarsened particles is suppressed, the transmission loss when transmitting high-frequency signals is effectively suppressed, and at the same time, it is found that the adhesiveness with the resin substrate can be greatly improved, thereby achieving cost invention.

細微表面積係數(Cms)係指,藉由BET法所測定之表面積比相對於以雷射顯微鏡所測定之表面積比的比較值,該值係將在雷射顯微鏡中無法測定之「陰」的部分或細微凹凸部分之表面積的比例進行數值化後的結果。Cms的計算方法之細部內容,如同後述實施例中所記載之內容。在本發明之表面處理銅箔中,粗化處理面之Cms較佳為0.6以上且未達2.0。藉由將粗化處理面的Cms形成為0.6以上且未達2.0,而可更加提高該表面與樹脂基材間之密接性,以獲得在高溫下具有優越可靠度的覆銅積層板。 The fine surface area coefficient (Cms) refers to the comparison value of the surface area ratio measured by the BET method relative to the surface area ratio measured by the laser microscope, which is the "negative" part that cannot be measured in the laser microscope Or the result of quantifying the ratio of the surface area of the fine uneven portions. The details of the calculation method of Cms are the same as those described in the embodiments described later. In the surface-treated copper foil of the present invention, the Cms of the roughened surface is preferably 0.6 or more and less than 2.0. By forming the Cms of the roughened surface to be 0.6 or more and less than 2.0, the adhesion between the surface and the resin substrate can be further improved to obtain a copper-clad laminate with excellent reliability at high temperatures.

在本發明之表面處理銅箔中,粗化處理面的Cms過大時,在高溫下之密接性有略顯降低的傾向。其理由雖尚未有所定論,不過可推斷為,當在雷射顯微鏡中無法測定之細微凹凸部分的表面積比例過大時,未填充樹脂之凹凸部便容易作為空隙而殘留,而以該空隙部分作為起點,在加熱時將加速樹脂界面之銅的氧化,造成密接性降低的原因之一。 In the surface-treated copper foil of the present invention, when the Cms of the roughened surface is too large, the adhesion at a high temperature tends to slightly decrease. The reason for this has not yet been determined, but it can be inferred that when the surface area ratio of fine irregularities that cannot be measured in a laser microscope is too large, the uneven portions that are not filled with resin tend to remain as voids, and the voids are used as The starting point will accelerate the oxidation of copper at the resin interface during heating, causing one of the reasons for the decrease in adhesion.

此外,在本發明之表面處理銅箔中,粗化處理面的Cms雖可未達0.6,不過,當Cms過小時,在高溫下會有降低密接性的傾向。其詳細的機制雖未有定論,不過,所謂Cms過小,係意味著在雷射顯微鏡中無 法測定的「陰」部分、或是細微的凹凸部分的比例較少的意思,可推斷其為機械性密接效果(一般而言,又稱之為定準效應)降低,使得在高溫下容易加速樹脂界面之銅的氧化的原因之一。因此,粗化處理面之Cms較佳為0.6以上且未達2.0,更佳為0.8以上且未達1.8。 In addition, in the surface-treated copper foil of the present invention, the Cms of the roughened surface may not reach 0.6, but when the Cms is too small, there is a tendency to reduce the adhesion at high temperatures. Although the detailed mechanism is inconclusive, the so-called Cms is too small, which means that there is no The "negative" part measured by the method, or the proportion of the fine uneven part is less, it can be inferred that the mechanical adhesion effect (generally, also known as the calibrated effect) is reduced, making it easy to accelerate at high temperatures One of the reasons for the oxidation of copper at the resin interface. Therefore, the Cms of the roughened surface is preferably 0.6 or more and less than 2.0, and more preferably 0.8 or more and less than 1.8.

另外,利用雷射顯微鏡所測定之表面積與利用BET法所測定的表面積之間,由於表面積的測定原理不同,因此有可能會依據粗化處理面的形狀,產生Cms未達1的情況。 In addition, between the surface area measured by the laser microscope and the surface area measured by the BET method, since the measurement principle of the surface area is different, there may be cases where Cms is less than 1 depending on the shape of the roughened surface.

在本發明之表面處理銅箔中,矽烷耦合劑處理前之形成有粗化粒子的表面,係具有由鉻(Cr)、鐵(Fe)、鈷(Co)、鎳(Ni)、銅(Cu)、鋅(Zn)、鉬(Mo)、及錫(Sn)選擇至少一種金屬的金屬處理層,或是較佳為具有由鉻、鐵、鈷、鎳、銅、鋅、鉬、及錫選擇至少兩種以上之金屬所形成之合金的金屬處理層。該金屬處理層係一種具有由鎳、鋅、及鉻選擇至少一種金屬的金屬處理層,或是較佳為一種具有由鎳、鋅、及鉻選擇兩種以上之金屬所形成之合金的金屬處理層。 In the surface-treated copper foil of the present invention, the surface on which roughened particles are formed before the silane coupling agent treatment is made of chromium (Cr), iron (Fe), cobalt (Co), nickel (Ni), and copper (Cu ), zinc (Zn), molybdenum (Mo), and tin (Sn), a metal treatment layer selected from at least one metal, or preferably having a chromium, iron, cobalt, nickel, copper, zinc, molybdenum, and tin selection A metal treatment layer of an alloy formed by at least two metals. The metal treatment layer is a metal treatment layer having at least one metal selected from nickel, zinc, and chromium, or preferably a metal treatment having an alloy formed of two or more metals selected from nickel, zinc, and chromium Floor.

本發明之表面處理銅箔所採用的覆銅積層板或印刷配線板的製作程序中,例如在樹脂與銅箔之間的接著程序、或是焊接程序等,經常進行加熱。藉由該加熱,使銅擴散至樹脂側,雖使銅與樹脂之間的密接性降低,不過,藉由設置上述金屬處理層而可防止銅的擴散,進而更加穩定的維持與樹脂基材之間的高度密接性。此外,構成金屬處理層的金屬,亦可作用為防止銅鏽之防鏽金屬 In the manufacturing process of the copper-clad laminate or printed wiring board used for the surface-treated copper foil of the present invention, for example, the bonding process between the resin and the copper foil, or the welding process, etc., are often heated. By this heating, copper is diffused to the resin side, although the adhesion between copper and resin is reduced, but by providing the above-mentioned metal treatment layer, the diffusion of copper can be prevented, and the resin substrate can be more stably maintained. Between the high degree of tightness. In addition, the metal constituting the metal treatment layer can also act as a rust-proof metal to prevent copper rust

從更加提升銅箔之蝕刻性的觀點來看,矽烷耦合劑處理前之在已形成粗化粒子的表面上,控制作為防鏽金屬之鎳量亦相當重要。亦即, 鎳附著量較多的情況下,雖然有難以產生銅鏽、且提升在高溫下之與樹脂間的密接性的傾向,但在蝕刻後卻容易殘留鎳,難以獲得充分的絕緣可靠度。在本發明之表面處理銅箔具有金屬處理層的情況下,從兼具高溫下之密接性與蝕刻性的觀點來看,金屬處理層中所含有的鎳元素量較佳為0.1mg/dm2以上且未達0.3mg/dm2From the viewpoint of further improving the etching properties of copper foil, it is also very important to control the amount of nickel as an anti-rust metal on the surface where roughened particles have been formed before the silane coupling agent treatment. That is, when there is a large amount of nickel adhesion, although copper rust is hard to be generated and the adhesion between the resin and the resin at a high temperature tends to be improved, nickel tends to remain after etching, and it is difficult to obtain sufficient insulation reliability. In the case where the surface-treated copper foil of the present invention has a metal-treated layer, the amount of nickel elements contained in the metal-treated layer is preferably 0.1 mg/dm 2 from the viewpoint of having both adhesion and etching properties at high temperatures. Above and below 0.3mg/dm 2 .

〔製造印刷配線板用表面處理銅箔〕 [Surface-treated copper foil for the manufacture of printed wiring boards]

<銅箔> <copper foil>

作為在製造本發明之表面處理銅箔中所採用的銅箔,可因應用途或其他目的,選擇如壓延銅箔、電解銅箔等。 As the copper foil used in the production of the surface-treated copper foil of the present invention, for example, rolled copper foil, electrolytic copper foil, etc. can be selected according to the application or other purposes.

本發明之表面處理銅箔中所採用之銅箔的箔厚,並未有特別限制,可因應目的而做適當之挑選。而上述箔厚,一般為4~120μm,以5~50μm為佳,6~18μm為較佳。 The thickness of the copper foil used in the surface-treated copper foil of the present invention is not particularly limited, and can be appropriately selected according to the purpose. The thickness of the foil is generally 4 to 120 μm, preferably 5 to 50 μm, and preferably 6 to 18 μm.

<粗化鍍敷處理> <roughening plating treatment>

在製造本發明之表面處理銅箔中,上述粗化處理面的形成,可為在銅箔表面上以特定條件實施粗化鍍敷處理。亦即,本發明之依據為,本發明者們在將鉬濃度設定在特定範圍內,並且藉由在後述特定條件下實施電鍍處理,據此發現出可形成上述粗化處理面。 In the production of the surface-treated copper foil of the present invention, the roughened surface may be formed by performing roughening plating on the surface of the copper foil under specific conditions. That is, the basis of the present invention is that the inventors set the molybdenum concentration within a specific range, and by performing electroplating treatment under specific conditions described later, it was found that the roughened surface can be formed.

(粗化鍍敷處理條件) (Roughening plating treatment conditions)

為了可形成上述粗化處理面,在粗化鍍敷處理(電鍍處理)中,必須將鉬濃度控制在50mg/L以上且600mg/L以下。若鉬濃度未達50mg/L,則容易發生如粉體掉落等問題。此外,若超過600mg/L時,雖然能滿足其他特性,但卻難以將矽烷耦合劑處理後的表面(也就是粗化 處理面)之BET表面積比提升至1.2以上。 In order to form the above roughened surface, in the roughening plating process (electroplating process), the molybdenum concentration must be controlled to 50 mg/L or more and 600 mg/L or less. If the molybdenum concentration is less than 50 mg/L, problems such as powder falling are likely to occur. In addition, if it exceeds 600mg/L, although other characteristics can be satisfied, it is difficult to treat the surface after the silane coupling agent is treated (that is, roughened The BET surface area ratio of the treated surface was increased to 1.2 or more.

為了可形成上述粗化處理面,在粗化鍍敷處理中,必須將電極間隙間的流速設定在0.15m/秒以上且0.4m/秒以下。倘若電極間隙間的流速未達0.15m/秒時,在銅箔上發生之氫氣的脫離作業無法進行,難以獲得鉬的效果而導致發生粉體剝落等問題。此外,當電極間隙間的流速超過0.4m/秒後,對細微凹部之銅離子的供應便會過剩,使得凹部被電鍍所掩埋,難以將矽烷耦合劑處理後的表面之BET表面積比提高至1.2以上。 In order to form the above roughened surface, in the roughening plating process, it is necessary to set the flow velocity between the electrode gaps to 0.15 m/sec or more and 0.4 m/sec or less. If the flow velocity between the electrode gaps does not reach 0.15 m/sec, the hydrogen gas separation operation on the copper foil cannot be performed, and it is difficult to obtain the molybdenum effect and cause problems such as powder flaking. In addition, when the flow velocity between the electrode gaps exceeds 0.4m/sec, the supply of copper ions to the fine recesses will be excessive, making the recesses buried by electroplating, making it difficult to increase the BET surface area ratio of the surface treated with the silane coupling agent to 1.2 the above.

為了可形成上述粗化處理面,在粗化鍍敷處理中,必須將電流密度乘以處理時間值設定在20(A/dm2)‧秒以上且250(A/dm2)‧秒以下。當該值未達20(A/dm2)‧秒時,在矽烷耦合劑處理後,由於粗化處理面之粗化粒子的高度難以形成為0.05μm以上,因此不容易確保與積層之樹脂間有充分的密接性。此外,若超過250(A/dm2)‧秒時,在矽烷耦合劑處理後,由於粗化處理面之粗化粒子的高度難以形成為未達0.5μm,因此容易造成傳輸損耗的惡化。上述之電流密度乘以處理時間值,較佳為20(A/dm2)‧秒以上、未達160(A/dm2)‧秒。 In order to form the above roughened surface, in the roughening plating process, the current density multiplied by the processing time value must be set at 20 (A/dm 2 ) ‧ seconds or more and 250 (A/dm 2 ) ‧ seconds or less. When the value is less than 20 (A/dm 2 ) ‧ seconds, after the silane coupling agent treatment, the height of the roughened particles on the roughened surface is difficult to form at least 0.05 μm, so it is not easy to ensure There is full adhesion. In addition, if it exceeds 250 (A/dm 2 ) ‧ seconds, after the silane coupling agent treatment, the height of the roughened particles on the roughened surface is difficult to be less than 0.5 μm, so the transmission loss is likely to deteriorate. The above-mentioned current density multiplied by the processing time value is preferably 20 (A/dm 2 ) seconds or more and less than 160 (A/dm 2 ) seconds.

為了可形成上述粗化處理面,在粗化鍍敷處理中,必須將電流密度乘以處理時間值,且以鉬濃度所除之值設定在0.2{(A/dm2)‧秒}/(mg/L)以上。當該值未達0.2{(A/dm2)‧秒}/(mg/L)時,雖然可滿足其他特性,卻形成為難以將矽烷耦合劑處理後的表面之BET表面積比提高至1.2以上。此外,即使該值超過3.0{(A/dm2)‧秒}/(mg/L),雖可能形成上述粗化處理面,但卻在滿足其他特性的同時,出現難以將粗化處理面之Cms形成為未達2.0的傾向。將上述電流密度乘以處理 時間值,除以Mo濃度之值,較佳為0.2{(A/dm2)‧秒}/(mg/L)以上、3.0{(A/dm2)‧秒}/(mg/L)以下,更佳為0.2{(A/dm2)‧秒}/(mg/L)以上、未達1.0{(A/dm2)‧秒}/(mg/L)。 In order to form the above roughened surface, in the roughening plating process, the current density must be multiplied by the treatment time value, and the value divided by the molybdenum concentration is set at 0.2{(A/dm 2 )‧sec}/( mg/L) or more. When the value is less than 0.2{(A/dm 2 )‧sec}/(mg/L), although other characteristics can be satisfied, it is difficult to increase the BET surface area ratio of the surface treated by the silane coupling agent to 1.2 or more . In addition, even if the value exceeds 3.0{(A/dm 2 )‧sec}/(mg/L), although the above roughened surface may be formed, it is difficult to reduce the roughened surface while satisfying other characteristics Cms tends to be less than 2.0. The current density is multiplied by the processing time value and divided by the Mo concentration value, preferably 0.2{(A/dm 2 )‧sec}/(mg/L) or more, 3.0{(A/dm 2 )‧sec} /(mg/L) or less, more preferably 0.2{(A/dm 2 )‧ seconds}/(mg/L) or more and less than 1.0{(A/dm 2 )‧ seconds}/(mg/L).

為可形成上述粗化處理面,而將較佳的粗化鍍敷處理條件揭示如下。 In order to form the above roughened surface, preferred roughening plating treatment conditions are disclosed below.

-粗化鍍敷處理條件- -Roughening plating treatment conditions-

Cu:10~30g/L Cu: 10~30g/L

H2SO4:100~200g/L H 2 SO 4 : 100~200g/L

浴溫:20~30℃ Bath temperature: 20~30℃

鉬濃度:50~600mg/L Molybdenum concentration: 50~600mg/L

電極間隙間的流速:0.15~0.4m/秒 Velocity between electrode gaps: 0.15~0.4m/sec

電流密度:15~70A/dm2 Current density: 15~70A/dm 2

電流密度×處理時間:0.1~10秒 Current density × processing time: 0.1 to 10 seconds

電流密度×處理時間:20~250(A/dm2)‧秒 Current density × processing time: 20 ~ 250 (A/dm 2 ) ‧ seconds

電流密度×處理時間÷鉬濃度:0.2~3.0{(A/dm2)‧秒}/(mg/L) Current density × treatment time ÷ molybdenum concentration: 0.2~3.0{(A/dm 2 )‧sec}/(mg/L)

此外,將鉬添加至電鍍液係指,將鉬作為離子而溶解的形態、只要不包含使硫酸銅電鍍液的pH發生變化,且併入至鍍銅皮膜中的金屬不純物,則未有特別的限制。例如,可將鉬酸鹽(例如,鉬酸鈉或鉬酸鉀)的水溶液添加至硫酸銅電鍍液中。 In addition, the addition of molybdenum to the plating solution refers to a form in which molybdenum is dissolved as ions, as long as it does not contain the metal impurities that change the pH of the copper sulfate plating solution and are incorporated into the copper plating film, there is no particular limit. For example, an aqueous solution of molybdate (for example, sodium molybdate or potassium molybdate) may be added to the copper sulfate plating solution.

<金屬處理層> <metal treatment layer>

當本發明之表面處理銅箔具有金屬處理層的情況下,金屬處理層的形成方法並未有特別限制,可利用一般方式來形成。例如,以形成具有鎳、鋅及鉻之金屬處理層的情況為例,在下述條件中,例如以鍍鎳、鍍鋅、鍍鉻的順序,而可形成金屬處理層。 When the surface-treated copper foil of the present invention has a metal-treated layer, the method of forming the metal-treated layer is not particularly limited, and can be formed by a general method. For example, taking the case of forming a metal treatment layer having nickel, zinc, and chromium as an example, the metal treatment layer can be formed in the following conditions, for example, in the order of nickel plating, zinc plating, and chromium plating.

(鍍鎳) (Nickel plated)

Ni:10~100g/L Ni: 10~100g/L

H3BO3:1~50g/L H 3 BO 3 : 1~50g/L

PO2:0~10g/L PO 2 : 0~10g/L

浴溫:10~70℃ Bath temperature: 10~70℃

電流密度:1~50A/dm2 Current density: 1~50A/dm 2

處理時間:1秒~2分鐘 Processing time: 1 second to 2 minutes

pH:2.0~4.0 pH: 2.0~4.0

〔鍍鋅〕 〔Galvanized〕

Zn:1~30g/L Zn: 1~30g/L

NaOH:10~300g/L NaOH: 10~300g/L

浴溫:5~60℃ Bath temperature: 5~60℃

電流密度:0.1~10A/dm2 Current density: 0.1~10A/dm 2

處理時間:1秒~2分鐘 Processing time: 1 second to 2 minutes

〔鍍鉻〕 〔chrome〕

Cr:0.5~40g/L Cr: 0.5~40g/L

浴溫:20~70℃ Bath temperature: 20~70℃

電流密度:0.1~10A/dm2 Current density: 0.1~10A/dm 2

處理時間:1秒~2分鐘 Processing time: 1 second to 2 minutes

pH:3.0以下 pH: below 3.0

本發明之表面處理銅箔,較佳為存在於粗化處理面上的矽元素量(亦即,於矽烷耦合劑層中所含有的矽元素量)為0.5μg/dm2以上且未達15μg/dm2。藉由將上述矽元素量設定為0.5μg/dm2以上且未達15μg/dm2,在抑制矽烷耦合劑之使用量的同時,還可有效的提高與樹脂間之密接性。矽烷耦合劑層中所含有的矽元素量,更佳為2μg/dm2以上且未達8μg/dm2In the surface-treated copper foil of the present invention, the amount of silicon elements present on the roughened surface (that is, the amount of silicon elements contained in the silane coupling agent layer) is preferably 0.5 μg/dm 2 or more and less than 15 μg /dm 2 . By setting the amount of the silicon element to 0.5 μg/dm 2 or more and less than 15 μg/dm 2 , while suppressing the amount of silane coupling agent used, it can effectively improve the adhesion with the resin. The amount of silicon element contained in the silane coupling agent layer is more preferably 2 μg/dm 2 or more and less than 8 μg/dm 2 .

上述矽烷耦合劑係因應於構成與本發明之表面處理銅箔所積層之樹脂層的樹脂之分子構造(官能基的種類等),而進行適當的選擇。其中,上述矽烷耦合劑較佳為由環氧基、胺基、乙烯基、(甲基)丙烯醯基、 苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基選擇至少一種的官能基。「(甲基)丙烯醯基」為表示「丙烯醯基及/或甲基丙烯醯基」之意。 The silane coupling agent is appropriately selected according to the molecular structure (type of functional group, etc.) of the resin constituting the resin layer laminated with the surface-treated copper foil of the present invention. Among them, the silane coupling agent is preferably an epoxy group, an amine group, a vinyl group, a (meth)acryloyl group, The styrene group, urea group, isocyanurate group, mercapto group, sulfide group, and isocyanate group select at least one functional group. "(Meth)acryloyl" means "acryloyl and/or methacryloyl".

藉由已形成粗化粒子之銅箔表面的矽烷耦合劑的處理,可藉由一般方式處理。例如,調製矽烷耦合劑的溶液(塗覆液),將該塗覆液塗覆於已形成有粗化粒子的銅箔表面,並加以乾燥,藉此可使矽烷耦合劑吸附甚至是結合於已形成有粗化粒子的銅箔表面上。作為上述塗覆液,例如,採用的溶液可為使用純水而含有0.05wt%~1wt%之濃度的矽烷耦合劑。 By the treatment of the silane coupling agent on the surface of the copper foil on which roughened particles have been formed, it can be treated in a general manner. For example, a solution (coating liquid) of a silane coupling agent is prepared, and the coating liquid is applied to the surface of the copper foil on which roughened particles have been formed and dried, thereby allowing the silane coupling agent to adsorb or even bind to the On the surface of the copper foil on which roughened particles are formed. As the above coating liquid, for example, the solution used may be a silane coupling agent containing pure water at a concentration of 0.05 wt% to 1 wt%.

上述塗覆液的塗覆方法並未有特別限制,例如可在傾斜銅箔的狀態下,將塗覆液均勻地流動於已形成有粗化粒子的表面上,使用輥輪而去除多餘液體後加以加熱乾燥,在輥輪間,在使已形成粗化粒子之表面朝下而撐開的銅箔上,噴霧塗覆液,再以輥輪去除多餘液體後進行加熱乾燥等作業,而實施塗覆。塗覆溫度並未有特別限制,通常係以10~40℃來實施。 The coating method of the above coating liquid is not particularly limited. For example, in a state where the copper foil is inclined, the coating liquid can be evenly flowed on the surface on which roughened particles have been formed, and after removing excess liquid using a roller Heat and dry, spray the coating liquid on the copper foil between the rollers with the surface where the roughened particles have been formed facing down, and then remove the excess liquid with the rollers, perform heating and drying, etc. cover. The coating temperature is not particularly limited, and it is usually carried out at 10 to 40°C.

〔印刷配線板用覆銅積層板〕 [Copper-clad laminates for printed wiring boards]

本發明之印刷配線板用覆銅積層板(以下,簡稱為「本發明之覆銅積層板」),係在本發明之表面處理銅箔之粗化處理面上,具有已積層樹脂層(樹脂基材)的構造。關於該樹脂層並未有特別限制,所採用之樹脂層,可以是在用以製作印刷配線板的覆銅積層板中,一般所採用的樹脂層。舉例來說,可採用在硬板(rigid board)(硬印刷配線板)中所使用的玻璃-環氧系(glass epoxy-based)之無鹵素低介電樹脂基材,或是採用可撓性基板中所經常使用的聚醯亞胺系之低介電樹脂基材。 The copper-clad laminate for printed wiring boards of the present invention (hereinafter, abbreviated as "copper-clad laminate of the present invention") has a layered resin layer (resin on the roughened surface of the surface-treated copper foil of the present invention) Substrate). The resin layer is not particularly limited, and the resin layer used may be a resin layer generally used in copper-clad laminates used for producing printed wiring boards. For example, a glass epoxy-based halogen-free low-dielectric resin substrate used in rigid boards (hard printed wiring boards) may be used, or flexible Polyimide-based low-dielectric resin substrates often used in substrates.

表面處理銅箔與樹脂基材之間的積層方法並未有特別限制,例如,藉由使用熱壓加工機的熱壓成形法等,使銅箔與樹脂基材接著。在上述熱壓成形法中的加壓溫度,係以設定成150~400℃左右為佳。此外,加壓面壓力以設定成1~50MPa左右為佳。 The method of laminating the surface-treated copper foil and the resin substrate is not particularly limited. For example, the copper foil and the resin substrate are bonded by a hot press forming method using a hot press machine. The pressing temperature in the above hot press forming method is preferably set to about 150 to 400°C. In addition, the pressure surface pressure is preferably set to about 1 to 50 MPa.

覆銅積層板的厚度以10~1000μm為佳。 The thickness of the copper-clad laminate is preferably 10 to 1000 μm.

〔印刷配線板〕 〔Printed wiring board〕

本發明之印刷配線板係使用本發明之覆銅積層板而製作。亦即,將本發明之覆銅積層板實施蝕刻等處理,形成導體電路圖形,更可因應需要,而藉由一般方式形成或是搭載其他構件而形成者。 The printed wiring board of the present invention is produced using the copper-clad laminate of the present invention. That is, the copper clad laminate of the present invention is subjected to etching and other treatments to form a conductor circuit pattern, which can be formed by a general method or mounted with other members as required.

實施例 Examples

以下,根據實施例,更加詳細說明本發明。此外,以下為本發明之一例,在本發明的實施中,只要在不背離本發明之要旨的範圍內,均可採用各種形態。 Hereinafter, the present invention will be described in more detail based on examples. In addition, the following is an example of the present invention. In the practice of the present invention, various forms can be adopted as long as they do not deviate from the gist of the present invention.

〔製造銅箔〕 〔Copper foil manufacturing〕

作為用以實施粗化處理之基材的銅箔,使用電解銅箔或壓延銅箔。 As the copper foil used as the base material for roughening treatment, electrolytic copper foil or rolled copper foil is used.

在實施例2~4、6~16、比較例1~4、6、7及參考例1之中,使用的係由以下述條件所製造之厚度為12μm的電解銅箔。 In Examples 2 to 4, 6 to 16, Comparative Examples 1 to 4, 6, 7 and Reference Example 1, an electrolytic copper foil with a thickness of 12 μm manufactured under the following conditions was used.

<電解銅箔的製造條件> <Manufacturing conditions of electrolytic copper foil>

CuSO4:280g/L CuSO 4 : 280g/L

H2SO4:70g/L H 2 SO 4 : 70g/L

氯濃度:25mg/L Chlorine concentration: 25mg/L

浴溫:55℃ Bath temperature: 55℃

電流密度:45A/dm2 Current density: 45A/dm 2

添加劑 additive

‧3-巰基1-丙烷磺酸鈉:2mg/L ‧Sodium 3-mercapto 1-propane sulfonate: 2mg/L

‧羥乙基纖維素:10mg/L ‧Hydroxyethyl cellulose: 10mg/L

‧低分子量膠(分子量3000):50mg/L ‧Low molecular weight glue (MW 3000): 50mg/L

在實施例1、5、及比較例5中,對於市售的12μm之精煉銅壓延箔(株式會社UACJ製),為使用以下述條件實施脫脂處理之物。 In Examples 1, 5 and Comparative Example 5, commercially available 12-μm refined copper rolled foil (manufactured by UACJ Co., Ltd.) was used to perform degreasing treatment under the following conditions.

<脫脂處理條件> <Degreasing treatment conditions>

脫脂溶液:清洗劑160S(Meltec株式會社製)的水溶液 Degreasing solution: aqueous solution of cleaning agent 160S (made by Meltec Corporation)

脫脂溶液濃度:60g/L水溶液 Degreasing solution concentration: 60g/L aqueous solution

浴溫:60℃ Bath temperature: 60℃

電流密度:3A/dm2 Current density: 3A/dm 2

通電時間:10秒 Power-on time: 10 seconds

〔形成粗化處理面〕 [Form roughening surface]

藉由電鍍處理,而於上述銅箔的單面實施粗化鍍敷處理。上述粗化鍍敷處理面,係使用下述粗化鍍敷液基本浴組成,將鉬濃度設定為如下述表1所記載之內容,且將電極間隙間的流速、電流密度、處理時間設定成如下述表1所記載,形成上述粗化鍍敷處理面。鉬濃度為藉由將鉬酸鈉已溶解至純水中的水溶液添加至基本浴中而進行調整。 A rough plating process is performed on one side of the copper foil by electroplating. The roughening plating treatment surface is composed of the following roughening plating solution basic bath composition, the molybdenum concentration is set as described in Table 1 below, and the flow velocity, current density, and processing time between the electrode gaps are set to As described in Table 1 below, the roughened plated surface was formed. The molybdenum concentration is adjusted by adding an aqueous solution in which sodium molybdate has been dissolved in pure water to the basic bath.

<粗化鍍敷液基本浴組成> <Basic bath composition of roughening plating solution>

Cu:25g/L Cu: 25g/L

H2SO4:180g/L H 2 SO 4 : 180g/L

浴溫:25℃ Bath temperature: 25℃

<金形成屬處理層> <gold-forming metal processing layer>

接著,針對實施例1~6、8~16及比較例1~3、5~7,在如上所 述而形成的粗化鍍敷處理面上,再以表2所記載的電鍍條件,以Ni、Zn、Cr的順序實施金屬電鍍,形成金屬處理層。 Next, for Examples 1 to 6, 8 to 16 and Comparative Examples 1 to 3, 5 to 7, as described above On the roughened plating treatment surface formed as described above, metal plating was performed in the order of Ni, Zn, and Cr under the plating conditions described in Table 2 to form a metal treatment layer.

<鍍鎳> <nickel plating>

Ni:40g/L Ni: 40g/L

H3BO3:5g/L H 3 BO 3 : 5g/L

浴溫:20℃ Bath temperature: 20℃

pH:3.6 pH: 3.6

<鍍鋅> <galvanized>

Zn:2.5g/L Zn: 2.5g/L

NaOH:40g/L NaOH: 40g/L

浴溫:20℃ Bath temperature: 20℃

〔鍍鉻〕 〔chrome〕

Cr:5g/L Cr: 5g/L

浴溫:30℃ Bath temperature: 30℃

pH:2.2 pH: 2.2

<塗覆矽烷耦合劑(形成粗化處理面)> <Coating with silane coupling agent (forming roughened surface)>

針對實施例1~16及比較例1~7,在粗化鍍敷處理面(若已形成金屬處理層的情況下則為金屬處理層表面)之整體上,塗覆於表2所記載之市售矽烷耦合劑的溶液(30℃),以刮刀(squeegee)去除多餘溶液後,在120℃大氣下乾燥30秒的期間,形成粗化處理面。各矽烷耦合劑之溶液的調製方法如下所述。 For Examples 1 to 16 and Comparative Examples 1 to 7, the entire surface of the plating treatment surface (the surface of the metal treatment layer if a metal treatment layer has been formed) was applied to the cities listed in Table 2 After the solution (30°C) of the silane coupling agent was sold, the excess solution was removed with a squeegee, and it was dried in the atmosphere at 120°C for 30 seconds to form a roughened surface. The preparation method of each silane coupling agent solution is as follows.

3-環氧丙氧基丙基甲基二甲氧基矽烷(3-Glycidoxypropylmethyldimethoxysilane)(信越化學株式會社製KBM-402):以純水調製0.3wt%溶液。 3-Glycidoxypropylmethyldimethoxysilane (KBM-402 manufactured by Shin-Etsu Chemical Co., Ltd.): Prepare a 0.3 wt% solution with pure water.

3-胺丙基三甲氧基矽烷(3-Aminopropyltrimethoxysilane)(信越化學株式會社製KBM-903):以純水調製0.25wt%溶液。 3-Aminopropyltrimethoxysilane (KBM-903 manufactured by Shin-Etsu Chemical Co., Ltd.): Prepare a 0.25 wt% solution with pure water.

乙烯基三甲氧基矽烷(Vinyltrimethoxysilane)(信越化學株式會社製KBM-1003):在純水添加硫酸,以調整為pH3的溶液調製0.2wt%溶液。 Vinyltrimethoxysilane (KBM-1003 manufactured by Shin-Etsu Chemical Co., Ltd.): Add sulfuric acid to pure water to prepare a 0.2wt% solution by adjusting the solution to pH3.

3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷(3-Methacryloxypropylmethyldimethoxysilane)(信越化學株式會社製KBM-502):在純水添加硫酸,以調整為pH3的溶液調製0.25wt%溶液。 3-Methacryloxypropylmethyldimethoxysilane (KBM-502 manufactured by Shin-Etsu Chemical Co., Ltd.): Add sulfuric acid to pure water to adjust the solution to pH 3 to prepare a 0.25wt% solution .

3-異氰酸酯丙基三乙氧基矽烷(3-Isocyanatopropyl triethoxysilane)(信越化學株式會社製KBE-9007):在純水中添加硫酸,以調整為pH3的溶液調製0.2wt%溶液。 3-Isocyanatopropyl triethoxysilane (KBE-9007 manufactured by Shin-Etsu Chemical Co., Ltd.): Add sulfuric acid to pure water to prepare a 0.2 wt% solution by adjusting the solution to pH3.

3-脲基丙基三乙氧基矽烷(3-Ureidopropyltriethoxysilane)(信越化學株式會社製KBE-585):將乙醇與純水以1:1混合,將該混合溶液調製0.3wt%溶液。 3-Ureidopropyltriethoxysilane (KBE-585 manufactured by Shin-Etsu Chemical Co., Ltd.): 1:1 ethanol and pure water are mixed, and a 0.3 wt% solution is prepared from the mixed solution.

〔測定粗化粒子的平均高度〕 [Measure the average height of coarse particles]

藉由SEM影像觀察與經過離子研磨處理所得之銅箔厚度方向呈平行之斷面,求出在粗化處理面中之粗化粒子的平均高度。詳細內容說明如下。 The cross-section parallel to the thickness direction of the copper foil obtained by ion milling was observed by SEM image, and the average height of the roughened particles on the roughened surface was obtained. The details are as follows.

圖1所示的SEM影像,係平行於在實施例5製造之表面處理銅箔的粗化處理面(矽烷耦合劑處理後的表面)之厚度方向的斷面。同様的,在各個表面處理銅箔的斷面中,在視野範圍內可確認到粗化粒子之頭頂部與底部,並且,將倍率調節至可觀察到約十個左右的粗化粒子,在無限制之下針對不同的五個視野進行SEM影像觀察。分別對一個表面處理銅箔中之五個視野範圍內,測定高度最高之粗化粒子的高度,將所得之五個測定值(最大值)之平均,設為在該表面處理銅箔之粗化處理面中的粗化粒子之平均高度。 The SEM image shown in FIG. 1 is a cross section parallel to the thickness direction of the roughened surface (surface after the silane coupling agent treatment) of the surface-treated copper foil manufactured in Example 5. In the same section, the top and bottom of the head of the roughened particles can be confirmed in the cross-section of each surface-treated copper foil, and the magnification is adjusted so that about ten roughened particles can be observed. SEM images were observed for five different fields of view under restrictions. Measure the height of the roughened particles with the highest height in the five fields of view of a surface-treated copper foil, and set the average of the five measured values (maximum value) as the roughening of the surface-treated copper foil The average height of the roughened particles in the treatment surface.

使用圖面詳細說明粗化粒子之高度的測定方法。如圖1所示,針對作為測定對象的粗化粒子,連結左右最底部之直線(連結a點與b點的直線)的最短距離為最長,將該粗化粒子之頭頂部(c點)與連結a點及b點之直線間的最短距離,設為粗化粒子的高度H。 The method of measuring the height of the coarsened particles will be described in detail using the drawings. As shown in FIG. 1, for the roughened particles to be measured, the shortest distance of the straight line connecting the left and right bottoms (the straight line connecting points a and b) is the longest, and the top of the head of the roughened particles (point c) is The shortest distance between the straight lines connecting point a and point b is set as the height H of the coarsened particles.

圖2所示的SEM影像係平行於在實施例6製造之表面處理銅箔的粗化處理面(矽烷耦合劑處理後的表面)之厚度方向的斷面。當粗化粒子形成如所示之分枝狀況時,為將包含分枝構造的整體視為一個粗化粒子。亦即,連結形成為樹枝狀之粗化粒子的左右最底部之直線(連結d點與e點的直線)的最短距離為最長,將該粗化粒子之頭頂部(f點)與連結d點及e點之直線間的最短距離,設為粗化粒子的高度H。 The SEM image shown in FIG. 2 is a cross section parallel to the thickness direction of the roughened surface (surface after the silane coupling agent treatment) of the surface-treated copper foil produced in Example 6. When the coarsened particles form a branched state as shown, the whole including the branched structure is regarded as one coarsened particle. That is, the shortest distance between the bottom line of the left and right bottoms (the line connecting point d and point e) formed into dendritic roughened particles is the longest, and the top of the head (point f) of the roughened particles is connected to point d The shortest distance between the straight line at point e is set as the height H of the coarsened particles.

將結果揭示於下述表3。 The results are shown in Table 3 below.

〔測定BET表面積比A〕 [Determination of BET surface area ratio A]

BET表面積比A的計算,為將以BET法所測定之粗化處理面的表面積(BET測定表面積),除以形成俯視面積之試料切出面積而求得。 The calculation of the BET surface area ratio A is obtained by dividing the surface area of the roughened surface measured by the BET method (BET measurement surface area) by the sample cutout area forming the plan view area.

BET測定表面積係使用Micromeritics公司製氣體吸附細孔分布測定裝置ASAP2020型,利用氪氣吸附BET多點法進行測定。在測定前,前處理係在150℃的溫度下進行6小時的減壓乾燥。 The BET measurement surface area was measured using a gas adsorption pore distribution measurement device ASAP2020 model manufactured by Micromeritics Co., Ltd. using the krypton gas adsorption BET multipoint method. Before the measurement, the pretreatment system was dried under reduced pressure at a temperature of 150°C for 6 hours.

在測定中使用的試料(銅箔)係在切出形成約3g的3dm2,再切割成5mm方形後,導入測定裝置內。 The sample (copper foil) used for the measurement was cut out to form about 3 g of 3 dm 2 and then cut into a 5 mm square, and then introduced into the measurement device.

在藉由BET法進行表面積測定中,由於是測定導入至裝置內的試料全面之表面積,因此,無法只測定已實施單面粗化處理之上述表面處理銅箔中僅實施該粗化處理面的表面積。在此,BET表面積比A,實 際上係如下所述計算而得。 In the surface area measurement by the BET method, since the entire surface area of the sample introduced into the device is measured, it is impossible to measure only the roughened surface of the above-mentioned surface-treated copper foil that has been roughened on one side. Surface area. Here, the BET surface area ratio A is actually It is calculated as follows.

<計算BET表面積比A> <Calculate BET surface area ratio A>

將未實施粗化處理之面(與上述粗化處理面相反側之面)的表面積比設為1,也就是視為與試料切出面積相同,利用下述式而計算出BET表面積比A。 The surface area ratio of the surface not subjected to the roughening treatment (the surface on the opposite side to the roughening treatment surface) is 1, that is, the same as the sample cut-out area, and the BET surface area ratio A is calculated by the following formula.

(BET表面積比A)=〔(BET測定表面積)-(試料切出面積)〕/(試料切出面積) (BET surface area ratio A) = [(BET measured surface area)-(sample cut-out area)]/(sample cut-out area)

此外,在BET法的表面積測定方面,對於粗化處理面以及未實施粗化處理之面以外的面(側面)的表面積亦進行測定,不過,在本發明所推定的箔厚(例如,即使最大也在120μm左右)中,在全俯視面積中側面所佔的比例極少,實際上可以忽略。 In addition, in the surface area measurement of the BET method, the surface area of the surface (side surface) other than the roughened surface and the surface not roughened is also measured. However, the thickness of the foil estimated by the present invention (for example, even the maximum In the area of about 120 μm), the side surface occupies a very small proportion in the total top view area, which can actually be ignored.

如參考例1所示,在表面未實施粗化處理的對象物中,由於BET法的測定原理,而有BET測定表面積小於切出面積的情況(亦即,BET表面積比A有形成未達1的情況)。另一方面,因粗化處理而形成表面具有細微凹凸的情況下,由於適用BET法,因此可高感度的檢測出細微的凹凸等,其結果,形成BET表面積比A超過1。 As shown in Reference Example 1, in the object that has not been roughened on the surface, due to the measurement principle of the BET method, the BET measurement surface area may be smaller than the cut-out area (that is, the BET surface area is less than 1 Case). On the other hand, when the surface is formed with fine irregularities due to the roughening treatment, the BET method is applied, so that fine irregularities and the like can be detected with high sensitivity, and as a result, the BET surface area ratio A exceeds 1.

〔測定雷射表面積比B〕 [Determination of laser surface area ratio B]

雷射表面積比B,為根據使用雷射顯微鏡VK8500(Keyence公司製)之表面積測定值而計算。更詳細來說,以倍率1000倍觀察試料(銅箔)的粗化處理面,測定平面視面積6550μm2部分的三維表面積,藉由將該三維表面積除以6550μm2而求得雷射表面積比B。測定間距設為0.01μm。將結果揭示於表3。 The laser surface area ratio B is calculated based on the measured surface area using a laser microscope VK8500 (manufactured by Keyence Corporation). In more detail, the roughened surface of the sample (copper foil) was observed at a magnification of 1000 times, and the three-dimensional surface area of the portion with a plan view area of 6550 μm 2 was measured, and the laser surface area ratio B was obtained by dividing the three-dimensional surface area by 6550 μm 2 . The measurement pitch was set to 0.01 μm. The results are shown in Table 3.

〔計算細微表面係數Cms〕 〔Calculate fine surface coefficient Cms〕

細微表面係數Cms係使用上述BET表面積比A與上述雷射表面積比B,根據下述公式計算而得。將結果揭示於下述表3。 The fine surface coefficient Cms is calculated using the above-mentioned BET surface area ratio A and the above-mentioned laser surface area ratio B according to the following formula. The results are shown in Table 3 below.

細微表面係數Cms=BET表面積比A/雷射表面積比B Fine surface coefficient Cms=BET surface area ratio A/laser surface area ratio B

〔鎳的測定〕 [Determination of Nickel]

鎳元素量(mg/dm2)的測定係在以塗料標記試料之未實施粗化鍍敷處理的面後,切出10cm方形,以加溫至80℃之混合酸(硝酸2:鹽酸1:純水5(體積比))僅溶解表面部後,將所獲得之溶液中的鎳質量,使用日立High-Tech Science公司製的原子吸光光度計(型式:Z-2300),藉由原子吸光分析法進行定量分析而求出。將結果於下述表3以鎳元素量所揭示。此外,以上述方式測定的鎳元素量,亦即金屬處理層中所含有的鎳元素量。 The amount of nickel element (mg/dm 2 ) was measured by marking the surface of the sample with the coating without roughening plating, and cutting out a 10 cm square to heat the mixed acid (nitric acid 2: hydrochloric acid 1: Pure water 5 (volume ratio)) After dissolving only the surface part, the mass of nickel in the obtained solution was analyzed by atomic absorption spectrometry (model: Z-2300) manufactured by Hitachi High-Tech Science Co., Ltd. Method for quantitative analysis. The results are shown in Table 3 below as the amount of nickel element. In addition, the amount of nickel element measured in the above manner, that is, the amount of nickel element contained in the metal treatment layer.

〔矽的測定〕 [Measurement of Silicon]

粗化處理面之矽元素量(μg/dm2)(亦即,在矽烷耦合劑層中所含有的矽元素量),係設定成與鎳元素量相同,藉由原子吸光分析法實施定量分析而求得矽元素量。將結果以矽元素量揭示於下述表3。 The amount of silicon element (μg/dm 2 ) in the roughened surface (that is, the amount of silicon element contained in the silane coupling agent layer) is set to be the same as the amount of nickel element, and quantitative analysis is performed by atomic absorption analysis And get the amount of silicon. The results are shown in Table 3 below as the amount of silicon element.

〔高頻特性的評估〕 [Evaluation of high frequency characteristics]

測定在高頻波段中的傳輸損耗,作為高頻特性的評估。將上述各實施例及比較例所製造之具有粗化處理面的表面處理銅箔之該粗化處理面(以矽烷耦合劑所處理之面),張貼至株式會社KANEKA製的貼合用聚醯亞胺之PIXEO(FRS-522厚度12.5μm),以溫度350℃、面壓5MPa的條件加壓20分鐘,將其作為覆銅積層板,接著形成寬度為100μm、長度40mm之微帶線(microstripline)的傳輸路徑。在該傳輸路徑中,使用網路分析儀,傳輸100GHz為止的高頻訊號,測定傳輸損耗。特性阻抗為50Ω。 The transmission loss in the high-frequency band is measured as an evaluation of high-frequency characteristics. The roughened surface (surface treated with a silane coupling agent) of the surface-treated copper foil having a roughened surface manufactured in the above examples and comparative examples was posted to a bonding polyimide manufactured by KANEKA Corporation PIXEO of imine (FRS-522 thickness 12.5 μm), pressurized at a temperature of 350° C. and a surface pressure of 5 MPa for 20 minutes, used as a copper-clad laminate, and then formed a microstrip line with a width of 100 μm and a length of 40 mm (microstripline) ) Transmission path. In this transmission path, a network analyzer is used to transmit high-frequency signals up to 100 GHz, and the transmission loss is measured. The characteristic impedance is 50Ω.

傳輸損耗的測定值係如果絕對值越小,則傳輸損耗越少,意味著具有良好的高頻特性。在表4中,係記載於20GHz與70GHz中之傳輸損耗的評估結果。其評估基準係如下所述。 The measured value of the transmission loss is that the smaller the absolute value, the smaller the transmission loss, which means that it has good high-frequency characteristics. Table 4 shows the evaluation results of the transmission loss in 20 GHz and 70 GHz. The evaluation criteria are as follows.

<20GHz的傳輸損耗評估基準> <20GHz transmission loss evaluation criteria>

◎:傳輸損耗為-6.2dB以上 ◎: Transmission loss is above -6.2dB

○:傳輸損耗未達-6.2dB至-6.5dB以上 ○: Transmission loss is less than -6.2dB to -6.5dB

×:傳輸損耗未達-6.5dB ×: Transmission loss is less than -6.5dB

<70GHz之傳輸損耗評估基準> <70GHz transmission loss evaluation criteria>

◎:傳輸損耗為-20.6dB以上 ◎: Transmission loss is above -20.6dB

○:傳輸損耗未達-20.6dB至-24.0dB以上 ○: Transmission loss is less than -20.6dB to -24.0dB

×:未達-24.0dB ×: Less than -24.0dB

再著,根據上述傳輸損耗的評估結果,綜合評估依據下述評估基準的高頻特性。將結果揭示於下述表4。 Furthermore, based on the above-mentioned evaluation results of the transmission loss, the comprehensive evaluation is based on the high-frequency characteristics of the following evaluation criteria. The results are shown in Table 4 below.

<高頻特性綜合評估基準> <Comprehensive Evaluation Criteria for High Frequency Characteristics>

◎(優良):20GHz之傳輸損耗與70GHz之傳輸損耗的評估結果,均為◎。 ◎ (Excellent): The evaluation results of the transmission loss of 20 GHz and the transmission loss of 70 GHz are both ◎.

○(良):20GHz之傳輸損耗的評估結果為◎,70GHz之傳輸損耗的評估結果為○。 ○ (Good): The evaluation result of the transmission loss of 20 GHz is ◎, and the evaluation result of the transmission loss of 70 GHz is ○.

△(合格):70GHz之傳輸損耗的評估結果雖為×,但20GHz之傳輸損耗為◎或○。 △ (Pass): Although the evaluation result of the transmission loss at 70 GHz is ×, the transmission loss at 20 GHz is ◎ or ○.

×(不合格):20GHz之傳輸損耗與70GHz之傳輸損耗的評估結果,均為×。 × (Fail): The evaluation results of the transmission loss of 20 GHz and the transmission loss of 70 GHz are both ×.

〔耐熱密接性的評估〕 [Evaluation of heat-resistant adhesion]

以上述〔高頻特性的評估〕製作之覆銅積層板相同的方式製作覆銅積層板,將所獲得的覆銅積層板之銅箔部以寬度10mm的膠帶進行標記。在對該覆銅積層板實施氯化銅蝕刻後去除膠帶,製作出10mm寬的電路配線板。將該電路配線板在150℃的加熱爐中加熱1000小時後,於常溫下使用東洋精機製作所社製的Tensilon(拉伸/壓縮)測試機,就電路配線板之寬度10mm的電路配線部分(銅箔部分),在90度方向上以50mm/分的速度,測定自聚醯亞胺樹脂基材剝離時的剝離強度。將所得之測定 值作為指標,根據下述評估基準而評估耐熱密接性。將結果揭示於下述表4。 A copper-clad laminate was produced in the same manner as the copper-clad laminate produced in the above [Evaluation of High Frequency Characteristics], and the copper foil portion of the obtained copper-clad laminate was marked with an adhesive tape having a width of 10 mm. After the copper-clad laminate was etched with copper chloride, the tape was removed, and a 10 mm-wide circuit wiring board was produced. After heating the circuit wiring board in a heating furnace at 150°C for 1000 hours, using a Tensilon (tensile/compression) tester manufactured by Toyo Seiki Co., Ltd. at room temperature, the circuit wiring part (copper) with a width of 10 mm Foil part), the peeling strength when peeling from the polyimide resin base material was measured at a speed of 50 mm/min in a 90-degree direction. The resulting measurement The value is used as an index to evaluate the heat-resistant adhesion according to the following evaluation criteria. The results are shown in Table 4 below.

<耐熱密接性的評估基準> <Evaluation criteria for heat-resistant adhesion>

◎:剝離強度為0.7kN/m以上 ◎: Peel strength is 0.7kN/m or more

○:剝離強度為0.6kN/m以上且未達0.7kN/m ○: Peel strength is 0.6kN/m or more and less than 0.7kN/m

△:剝離強度為0.5kN/m以上且未達0.6kN/m △: Peel strength is 0.5kN/m or more and less than 0.6kN/m

×:剝離強度未達0.5kN/m ×: Peel strength is less than 0.5kN/m

〔蝕刻性的評估〕 [Evaluation of Etching]

若對銅箔表面之金屬附著量過多時,在進行為了形成電路的蝕刻之際,將形成為金屬殘渣容易殘留於樹脂基材表面。當金屬殘渣殘留在樹脂基材表面後,將會導致絕緣阻抗降低之不良情況。尤其因為鎳的蝕刻速度小於銅,因此當附著量過大時,將會降低絕緣性,容易造成短路。 If the amount of metal attached to the surface of the copper foil is too large, when etching is performed to form a circuit, metal residues are likely to remain on the surface of the resin substrate. When the metal residues remain on the surface of the resin substrate, it will cause the bad situation that the insulation resistance decreases. Especially because the etching rate of nickel is lower than that of copper, when the amount of adhesion is too large, the insulation will be reduced, and short circuits are likely to be caused.

在此,使用與以上述〔高頻特性的評估〕所製作之覆銅積層板相同的方式而製作之覆銅積層板,根據IPC實驗規格TM-650的2.5.17,測定絕緣阻抗值。更加詳細來說,為將上述覆銅積層板切出10cm×10cm的尺寸,以蝕刻形成銅箔圖形。根據實驗規格,以三次實施表面阻抗的測定,求得三次測定值的平均值。將所獲得之表面阻抗值的平均值作為指標,依據下述評估基準進行蝕刻性的評估。將結果揭示於下述表3。 Here, using the copper-clad laminate manufactured in the same manner as the copper-clad laminate produced in the above [Evaluation of High Frequency Characteristics], the insulation resistance value was measured in accordance with 2.5.17 of IPC Test Specification TM-650. In more detail, in order to cut out the copper-clad laminate to a size of 10 cm×10 cm, a copper foil pattern was formed by etching. The surface impedance was measured three times in accordance with experimental specifications, and the average of the three measured values was obtained. Using the average value of the obtained surface impedance values as an index, the evaluation of the etchability was performed according to the following evaluation criteria. The results are shown in Table 3 below.

<蝕刻性的評估基準> <Evaluation criteria for etching properties>

◎:表面阻抗值的平均值為1014Ω以上。 ◎: The average value of the surface impedance value is 1014Ω or more.

○:表面阻抗值的平均值為1013Ω以上且未達1014Ω。 ○: The average value of the surface impedance value is 1013 Ω or more and less than 1014 Ω.

×:表面阻抗值的平均值為未達1013Ω。 ×: The average value of the surface impedance value is less than 1013Ω.

〔綜合評估〕 〔Comprehensive Evaluation〕

綜整上述之高頻特性、耐熱密接性及蝕刻性之全數資料,根據下述評估基準進行綜合評估。 Based on the above-mentioned high-frequency characteristics, heat-resistant adhesiveness and etching properties, comprehensive evaluation is carried out based on the following evaluation criteria.

<綜合評估的評估基準> <Evaluation criteria for comprehensive evaluation>

AA(優良):高頻特性之綜合評估、耐熱密接性及蝕刻性的評估結果,均為◎。 AA (Excellent): The comprehensive evaluation of the high-frequency characteristics, the evaluation results of the heat-resistant adhesiveness and the etchability are all ◎.

A(良):高頻特性之綜合評估、耐熱密接性及蝕刻性中之○評估有一個,其餘的兩個評估為◎。 A (good): There is one of the ○ evaluations in the comprehensive evaluation of high-frequency characteristics, heat-resistant adhesiveness, and etching properties, and the remaining two evaluations are ◎.

B(合格):不屬於上述AA及A之任一狀況,但無評估為×的狀況。 B (pass): does not belong to any of the above AA and A status, but there is no status evaluated as ×.

C(不合格):高頻特性之綜合評估、耐熱密接性及蝕刻性中,至少一個的評估結果為×。 C (Fail): At least one of the comprehensive evaluation of high-frequency characteristics, heat-resistant adhesiveness, and etching property is ×.

在此,探討上述各表中所示之結果。 Here, the results shown in the above tables are discussed.

比較例1係存在於表面處理銅箔之粗化處理面上的粗化粒子之平均高度小於本發明所規定之例。當使用比較例1之表面處理銅箔製作覆銅積層板的情況下,發生有銅箔與樹脂基材間之耐熱密接性惡化的結果。 Comparative Example 1 is an example in which the average height of the roughened particles present on the roughened surface of the surface-treated copper foil is smaller than that specified by the present invention. When the surface-treated copper foil of Comparative Example 1 is used to produce a copper-clad laminate, a result of deterioration of the heat-resistant adhesiveness between the copper foil and the resin substrate.

比較例2、3、6及7分別係表面處理銅箔之粗化處理面的 BET表面積比小於本發明所規定之例。當使用比較例2、3、6及7之表面處理銅箔製作覆銅積層板的情況下,發生有銅箔與樹脂基材間之耐熱密接性惡化的結果。 Comparative examples 2, 3, 6 and 7 are respectively the roughened surface of the surface-treated copper foil The BET surface area ratio is smaller than the example specified in the present invention. When the surface-treated copper foils of Comparative Examples 2, 3, 6 and 7 were used to produce a copper-clad laminate, the result of deterioration of the heat-resistant adhesiveness between the copper foil and the resin substrate.

比較例4及5分別係存在於表面處理銅箔之粗化處理面上的粗化粒子之平均高度大於本發明所規定之例。當使用比較例4及5之表面處理銅箔製作覆銅積層板、形成導體電路的情況下,發生有高頻特性大幅惡化的結果。 Comparative Examples 4 and 5 are examples in which the average height of the roughened particles present on the roughened surface of the surface-treated copper foil is greater than that specified by the present invention. When the surface-treated copper foils of Comparative Examples 4 and 5 were used to fabricate a copper-clad laminate and a conductor circuit was formed, the result of a significant deterioration in high-frequency characteristics occurred.

此外,參考例1係在銅箔上未實施粗化處理的例子。在使用參考例1之銅箔來製作覆銅積層板的情況下,形成有銅箔與樹脂基材間之耐熱密接性大幅惡化的結果。 In addition, Reference Example 1 is an example in which roughening treatment was not performed on the copper foil. In the case of using the copper foil of Reference Example 1 to produce a copper-clad laminate, the result is that the heat-resistant adhesiveness between the copper foil and the resin substrate greatly deteriorates.

相較之下,已形成在表面處理銅箔之粗化處理面上的粗化粒子之平均高度為在本發明所規定的範圍內,且該粗化處理面之BET表面積比亦滿足本發明規定之實施例1~16的表面處理銅箔,將用該表面處理銅箔製作覆銅積層板之際,銅箔與樹脂基材間呈現出優越的耐熱密接性。此外,由使用實施例1~16之表面處理銅箔之覆銅積層板所形成的導體電路,即使傳輸高頻訊號,仍可有效的抑制傳輸損耗,更具有極佳的絕緣可靠度。 In contrast, the average height of the roughened particles formed on the roughened surface of the surface-treated copper foil is within the range specified by the present invention, and the BET surface area ratio of the roughened surface also meets the requirements of the present invention The surface-treated copper foils of Examples 1 to 16 are used to produce copper-clad laminates, and the copper foil and the resin substrate exhibit excellent heat-resistant adhesion. In addition, the conductor circuit formed by the copper-clad laminate using the surface-treated copper foil of Examples 1 to 16 can effectively suppress transmission loss even when transmitting high-frequency signals, and has excellent insulation reliability.

本申請案為主張2015年12月9日於日本國提出專利申請之專利申請號特願2015-240006的優先權,在此為參照該優先權,將其內容作為本說明書之記載內容的一部分。 This application is for claiming the priority of Japanese Patent Application No. Japanese Patent Application No. 2015-240006 filed in Japan on December 9, 2015. The priority here is to refer to the priority, and its contents are included as part of the contents of this specification.

Claims (8)

一種印刷配線板用表面處理銅箔,在形成有粗化粒子的表面上具有矽烷耦合劑層,其特徵在於:在上述矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.5μm,上述矽烷耦合劑層表面之BET表面積比為1.2以上。A surface-treated copper foil for a printed wiring board having a silane coupling agent layer on the surface on which roughened particles are formed, characterized in that, on the surface of the silane coupling agent layer, the average height of the roughened particles is 0.05 μm or more and is not Up to 0.5 μm, the BET surface area ratio of the surface of the silane coupling agent layer is 1.2 or more. 如申請專利範圍第1項之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層表面中,粗化粒子的平均高度為0.05μm以上且未達0.3μm。The surface-treated copper foil for printed wiring boards as claimed in item 1 of the patent scope, wherein the average height of the roughened particles on the surface of the silane coupling agent layer is 0.05 μm or more and less than 0.3 μm. 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層表面中,細微表面係數Cms為0.6以上且未達2.0。For example, the surface-treated copper foil for a printed wiring board according to item 1 or 2 of the patent application scope, wherein, on the surface of the silane coupling agent layer, the fine surface coefficient Cms is 0.6 or more and less than 2.0. 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,形成有上述粗化粒子的表面具有含鎳之金屬處理層,在上述金屬處理層中所含有的鎳元素量為0.1mg/dm2以上且未達0.3mg/dm2The surface-treated copper foil for printed wiring boards as claimed in item 1 or 2 of the patent scope, wherein the surface on which the roughened particles are formed has a metal treatment layer containing nickel, and the amount of nickel element contained in the metal treatment layer is 0.1mg/dm 2 or more and less than 0.3mg/dm 2 . 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,在上述矽烷耦合劑層中所含有的矽元素量為0.5μg/dm2以上且未達15μg/dm2The surface-treated copper foil for printed wiring boards as claimed in item 1 or 2 of the patent application, wherein the amount of silicon element contained in the silane coupling agent layer is 0.5 μg/dm 2 or more and less than 15 μg/dm 2 . 如申請專利範圍第1或2項之印刷配線板用表面處理銅箔,其中,上述矽烷耦合劑具有選自由環氧基、胺基、乙烯基、(甲基)丙烯醯基、苯乙烯基、脲基、異氰脲酸酯基、巰基、硫化物基、及異氰酸酯基中之至少一種官能基。The surface-treated copper foil for printed wiring boards as claimed in item 1 or 2 of the patent application, wherein the silane coupling agent has a group selected from epoxy, amine, vinyl, (meth)acryl, styryl, At least one functional group among urea group, isocyanurate group, mercapto group, sulfide group, and isocyanate group. 一種印刷配線板用覆銅積層板,其特徵在於:在申請專利範圍第1至6項中任一項之印刷配線板用表面處理銅箔的上述矽烷耦合劑層表面上,積層有樹脂層。A copper-clad laminate for a printed wiring board, characterized in that a resin layer is laminated on the surface of the silane coupling agent layer of the surface-treated copper foil for a printed wiring board according to any one of claims 1 to 6. 一種印刷配線板,其使用申請專利範圍第7項之印刷配線板用覆銅積層板。A printed wiring board that uses the copper-clad laminate for printed wiring boards as claimed in item 7 of the patent scope.
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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6623320B2 (en) 2017-12-05 2019-12-18 古河電気工業株式会社 Surface-treated copper foil, and copper-clad laminate and printed wiring board using the same
CN113543973A (en) 2019-02-04 2021-10-22 松下知识产权经营株式会社 Copper-clad laminate, resin-coated copper foil, and circuit board using same
WO2020162068A1 (en) 2019-02-04 2020-08-13 パナソニックIpマネジメント株式会社 Surface-treated copper foil, and copper-clad laminate plate, resin-attached copper foil and circuit board each using same
CN110838408A (en) * 2019-10-10 2020-02-25 深圳市峰泳科技有限公司 Planar capacitor with high stripping force and high dielectric constant and preparation method thereof
US20230094806A1 (en) * 2019-10-25 2023-03-30 Panasonic Intellectual Property Management Co., Ltd. Metal-clad laminate, wiring board, resin-including metal foil, and resin composition
KR20220119391A (en) * 2019-12-26 2022-08-29 나믹스 가부시끼가이샤 Composite copper member treated with silane coupling agent
CN112708909A (en) * 2020-12-18 2021-04-27 江西省江铜耶兹铜箔有限公司 Composite electroplating solution and preparation method of low-profile electrolytic copper foil for high-frequency PCB
JP7273883B2 (en) * 2021-04-09 2023-05-15 福田金属箔粉工業株式会社 Surface-treated copper foil and copper-clad laminate and printed wiring board using the surface-treated copper foil
CN117321254A (en) * 2021-05-20 2023-12-29 三井金属矿业株式会社 Roughened copper foil, copper foil with carrier, copper-clad laminate, and printed wiring board
KR20240009937A (en) * 2021-05-20 2024-01-23 미쓰이금속광업주식회사 Roughened copper foil, copper foil with carrier, copper clad laminate and printed wiring board
KR20240009403A (en) * 2021-05-20 2024-01-22 미쓰이금속광업주식회사 Roughened copper foil, copper foil with carrier, copper clad laminate and printed wiring board

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015016271A1 (en) * 2013-08-01 2015-02-05 古河電気工業株式会社 Copper foil for printed wiring board
JP2015061939A (en) * 2013-08-20 2015-04-02 Jx日鉱日石金属株式会社 Surface-treated copper foil and copper foil with carrier, laminated board, printed wiring board and electronic device using same, as well as method for producing printed wiring board
JP2015061757A (en) * 2013-08-21 2015-04-02 Jx日鉱日石金属株式会社 Copper foil with carrier and laminated board, printed wiring board and electronic device using same, as well as method for producing printed wiring board
WO2015087941A1 (en) * 2013-12-10 2015-06-18 Jx日鉱日石金属株式会社 Treated surface copper foil, copper-clad laminate, printed wiring board, electronic device, and printed wiring board manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833556B1 (en) 1968-10-12 1973-10-15
JPS57184295A (en) * 1981-05-08 1982-11-12 Furukawa Circuit Foil Copper foil for printed circuit and method of producing same
US6984456B2 (en) 2002-05-13 2006-01-10 Mitsui Mining & Smelting Co., Ltd. Flexible printed wiring board for chip-on flexibles
JP4470917B2 (en) * 2006-06-29 2010-06-02 ソニー株式会社 Electrode current collector, battery electrode and secondary battery
WO2009041292A1 (en) * 2007-09-28 2009-04-02 Nippon Mining & Metals Co., Ltd. Copper foil for printed circuit and copper clad laminate
JP2010212470A (en) * 2009-03-11 2010-09-24 Hitachi Cable Ltd Copper foil for printed wiring board and method of manufacturing the same, and printed wiring board
JP5242710B2 (en) * 2010-01-22 2013-07-24 古河電気工業株式会社 Roughening copper foil, copper clad laminate and printed wiring board
JP2011162860A (en) * 2010-02-12 2011-08-25 Furukawa Electric Co Ltd:The Surface-roughened copper foil, method of producing the same and copper-clad laminate plate
CN102884660A (en) * 2010-03-01 2013-01-16 古河电气工业株式会社 Surface treatment method for copper foil, surface treated copper foil and copper foil for negative electrode collector of lithium ion secondary battery
JP5634103B2 (en) * 2010-04-06 2014-12-03 福田金属箔粉工業株式会社 A treated copper foil for a copper clad laminate, a copper clad laminate obtained by bonding the treated copper foil to an insulating resin substrate, and a printed wiring board using the copper clad laminate.
EP2624671A4 (en) * 2010-09-27 2016-12-21 Jx Nippon Mining & Metals Corp Copper foil for printed wiring board, method for producing said copper foil, resin substrate for printed wiring board, and printed wiring board
JP5497808B2 (en) 2012-01-18 2014-05-21 Jx日鉱日石金属株式会社 Surface-treated copper foil and copper-clad laminate using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015016271A1 (en) * 2013-08-01 2015-02-05 古河電気工業株式会社 Copper foil for printed wiring board
JP2015061939A (en) * 2013-08-20 2015-04-02 Jx日鉱日石金属株式会社 Surface-treated copper foil and copper foil with carrier, laminated board, printed wiring board and electronic device using same, as well as method for producing printed wiring board
JP2015061757A (en) * 2013-08-21 2015-04-02 Jx日鉱日石金属株式会社 Copper foil with carrier and laminated board, printed wiring board and electronic device using same, as well as method for producing printed wiring board
WO2015087941A1 (en) * 2013-12-10 2015-06-18 Jx日鉱日石金属株式会社 Treated surface copper foil, copper-clad laminate, printed wiring board, electronic device, and printed wiring board manufacturing method

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