TWI643893B - 光壓印用硬化性組成物、圖案形成方法及圖案 - Google Patents
光壓印用硬化性組成物、圖案形成方法及圖案 Download PDFInfo
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- TWI643893B TWI643893B TW104108893A TW104108893A TWI643893B TW I643893 B TWI643893 B TW I643893B TW 104108893 A TW104108893 A TW 104108893A TW 104108893 A TW104108893 A TW 104108893A TW I643893 B TWI643893 B TW I643893B
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- curable composition
- meth
- acrylate
- fluorine
- photoimprint
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Classifications
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- C08F222/10—Esters
- C08F222/1006—Esters of polyhydric alcohols or polyhydric phenols
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| JP2014-063489 | 2014-03-26 | ||
| JP2014063489A JP6114221B2 (ja) | 2014-03-26 | 2014-03-26 | 光インプリント用硬化性組成物、パターン形成方法およびパターン |
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| JP (1) | JP6114221B2 (ko) |
| KR (1) | KR101855232B1 (ko) |
| TW (1) | TWI643893B (ko) |
| WO (1) | WO2015146710A1 (ko) |
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| JP6734913B2 (ja) * | 2016-02-29 | 2020-08-05 | 富士フイルム株式会社 | パターン積層体の製造方法、反転パターンの製造方法およびパターン積層体 |
| JP7175092B2 (ja) * | 2018-03-16 | 2022-11-18 | 東京応化工業株式会社 | 光硬化性組成物及びパターン形成方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201038596A (en) * | 2009-03-09 | 2010-11-01 | Fujifilm Corp | Curable composition for imprint, patterning method and pattern |
| TW201141687A (en) * | 2010-04-07 | 2011-12-01 | Fujifilm Corp | Pattern forming method and process for producing pattern substrates |
| CN102947359A (zh) * | 2010-06-23 | 2013-02-27 | 旭硝子株式会社 | 固化性组合物和固化膜的制造方法 |
| TW201319738A (zh) * | 2011-11-10 | 2013-05-16 | Canon Kk | 光可固化組成物，及使用彼之圖案化方法 |
| TW201334031A (zh) * | 2012-02-09 | 2013-08-16 | Canon Kk | 光固化產物及製造彼之方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201038596A (en) * | 2009-03-09 | 2010-11-01 | Fujifilm Corp | Curable composition for imprint, patterning method and pattern |
| TW201141687A (en) * | 2010-04-07 | 2011-12-01 | Fujifilm Corp | Pattern forming method and process for producing pattern substrates |
| CN102947359A (zh) * | 2010-06-23 | 2013-02-27 | 旭硝子株式会社 | 固化性组合物和固化膜的制造方法 |
| TW201319738A (zh) * | 2011-11-10 | 2013-05-16 | Canon Kk | 光可固化組成物，及使用彼之圖案化方法 |
| TW201334031A (zh) * | 2012-02-09 | 2013-08-16 | Canon Kk | 光固化產物及製造彼之方法 |
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| JP2015185798A (ja) | 2015-10-22 |
| KR20160125453A (ko) | 2016-10-31 |
| KR101855232B1 (ko) | 2018-05-08 |
| WO2015146710A1 (ja) | 2015-10-01 |
| TW201538600A (zh) | 2015-10-16 |
| JP6114221B2 (ja) | 2017-04-12 |
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