TWI640435B - Refractive index matching film and ito conductive film - Google Patents

Refractive index matching film and ito conductive film Download PDF

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TWI640435B
TWI640435B TW106114531A TW106114531A TWI640435B TW I640435 B TWI640435 B TW I640435B TW 106114531 A TW106114531 A TW 106114531A TW 106114531 A TW106114531 A TW 106114531A TW I640435 B TWI640435 B TW I640435B
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refractive index
layer
low
film
refractive
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TW201823007A (en
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王平
張玉春
尹錚杰
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張家港康得新光電材料有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports

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Abstract

本發明公開了一種折射率匹配膜及ITO導電膜。該折射率匹配膜包括依次層疊設置的第一低折射光學匹配層、基材、防粘連硬化層,第一低折射光學匹配層的材料包括含氟化合物和金屬氧化物的混合物。本發明還公開了在該折射率匹配膜上依次層疊設置第二低折射光學匹配層和ITO導電層形成ITO導電膜。本發明的折射率匹配膜通過第一低折射匹配層的材料的優化,既維持了產品性能,又顯著降低成本,並且兼顧油墨印刷、黃光和雷射工藝;同時利用基材本身高折射特性,塗布第一低折射光學匹配層可以降低後續鍍層厚度,提高鍍膜走速,有效降低了ITO導電膜的成本。 The invention discloses a refractive index matching film and an ITO conductive film. The refractive index matching film includes a first low-refractive optical matching layer, a substrate, and an anti-blocking and hardening layer, which are sequentially stacked, and a material of the first low-refractive optical matching layer includes a mixture of a fluorine-containing compound and a metal oxide. The invention also discloses that an ITO conductive film is formed by sequentially stacking a second low-refractive optical matching layer and an ITO conductive layer on the refractive index matching film. Through the optimization of the material of the first low-refractive index matching layer of the present invention, the material of the first low-refractive index matching layer not only maintains the product performance, but also significantly reduces the cost, and takes into account ink printing, yellow light, and laser processes; meanwhile, it uses the high refractive index of the substrate itself. The coating of the first low-refractive optical matching layer can reduce the thickness of subsequent plating layers, increase the speed of the plating film, and effectively reduce the cost of the ITO conductive film.

Description

折射率匹配膜及ITO導電膜    Refractive index matching film and ITO conductive film   

本發明屬於光學技術領域,具體涉及一種折射率匹配膜及ITO導電膜。 The invention belongs to the field of optical technology, and particularly relates to a refractive index matching film and an ITO conductive film.

在當前手機和平板電腦的電容式觸控面板中,使用最廣泛的透明導電膜是ITO(氧化銦錫)導電膜。在導電膜實際生產中,按照基材可以分為兩類製程:第一類是基於玻璃的ITO膜(下稱ITO Glass),如in-cell or OGS(One Glass Solution),在玻璃上直接濺鍍ITO膜;第二類是基於柔性塑膠基材(PET)的ITO導電膜(下稱ITO film)。第二種工藝路線由於其基於柔性基材,適合卷對卷大規模快速生產,在基材和製程的成本上較ITO Glass更低,且有良好的光電和機械特性,在當前智慧手機和平板電腦上得到廣泛的應用。 In the current capacitive touch panels of mobile phones and tablet computers, the most widely used transparent conductive film is an ITO (Indium Tin Oxide) conductive film. In the actual production of conductive films, there are two types of processes according to the substrate: the first type is glass-based ITO film (hereinafter referred to as ITO Glass), such as in-cell or OGS (One Glass Solution), which is directly spattered on glass ITO film; the second type is ITO conductive film (hereinafter referred to as ITO film) based on flexible plastic substrate (PET). The second process route is based on flexible substrates, which is suitable for large-scale rapid roll-to-roll production. The cost of the substrate and process is lower than that of ITO Glass, and it has good optoelectronic and mechanical characteristics. It is currently used in smart phones and tablets. Widely used on computers.

ITO film的常見PET基材膜分為兩種:Hard-coated-PET和Index-Matched PET,稱為雙面硬化膜和折射率匹配膜,下面簡稱HC-PET和IM-PET,可參見本申請人之前申請的專利CN103756383A和CN104485156A。一般來說,HC-PET基材結構為在基材兩側分別塗布硬化層和防粘連硬化層,硬化層的厚度為 4~4.5μm,折射率為1.5~1.52;防粘連硬化層的厚度為2~4μm,折射率為1.5~1.52。IM-PET基材結構為在基材一面塗布硬化層,另一面塗布折射率匹配層,該折射率匹配層的厚度為0.8~1.5μm,折射率為1.6~1.75;硬化層的厚度為4~4.5μm,折射率為1.5~1.52。 Common PET substrate films for ITO film are divided into two types: Hard-coated-PET and Index-Matched PET, which are called double-sided hardened films and refractive index matching films, hereinafter referred to as HC-PET and IM-PET. See this application People have previously applied for patents CN103756383A and CN104485156A. Generally, the structure of HC-PET substrate is coated with a hardened layer and an anti-blocking hardened layer on both sides of the base material. The thickness of the hardened layer is 4 ~ 4.5μm and the refractive index is 1.5 ~ 1.52. The thickness of the anti-blocked hardened layer is 2 ~ 4μm, refractive index is 1.5 ~ 1.52. The IM-PET substrate structure is coated with a hardened layer on one side of the substrate and coated with a refractive index matching layer on the other side. The thickness of the refractive index matching layer is 0.8 to 1.5 μm and the refractive index is 1.6 to 1.75; the thickness of the hardened layer is 4 to 4.5 μm, refractive index is 1.5 ~ 1.52.

兩種基材都能滿足現有觸控式螢幕用ITO film的基本需求,差異在於因為基材不同的光學折射率,導致為了實現透明導電的效果,後續鍍層中匹配光學層的不同。基於上述兩種基材的PVD鍍膜具體結構詳見本申請人之前提交的專利申請CN104240799A和CN104485156A。比如HC-PET表面折射率較低(約1.52),上面的物理氣相沉積鍍膜(下稱PVD鍍膜)膜層為「高折層+低折層+ITO層」,鍍層總厚度約100nm,蝕刻紋不明顯,常用於油墨印刷和黃光工藝,鍍膜厚度較厚,鍍膜走速較慢;而IM-PET表面折射率相對HC-PET表層折射率較高(約1.66),上面PVD鍍膜膜層為「低折層+ITO層」,鍍層總厚度約42nm,使用寬線寬蝕刻工藝的蝕刻紋明顯,常用於線寬較窄的黃光和雷射工藝,鍍層厚度較薄,可以用更高的速度生產。一般,蝕刻紋的明顯程度與ITO蝕刻通道和ITO非蝕刻區的可見光透射和反射全光譜差值有關,差值越小,蝕刻紋越不明顯。 The two substrates can meet the basic requirements of the existing ITO film for touch screens. The difference lies in the different optical refractive indices of the substrates, which results in different matching optical layers in subsequent coatings in order to achieve the effect of transparent conductivity. The detailed structure of the PVD coating based on the above two substrates is detailed in the patent applications CN104240799A and CN104485156A previously submitted by the applicant. For example, the surface refractive index of HC-PET is relatively low (about 1.52). The above physical vapor deposition coating (hereinafter referred to as PVD coating) film layer is "high-fold layer + low-fold layer + ITO layer". The total thickness of the coating is about 100nm. Etching The pattern is not obvious, and it is commonly used in ink printing and yellow light process. The thickness of the coating is thicker and the coating speed is slower. The refractive index of the IM-PET surface is higher than that of the HC-PET surface layer (about 1.66). The PVD coating layer is on the top. It is a "low-fold layer + ITO layer". The total thickness of the plating layer is about 42nm. The etching pattern using the wide line width etching process is obvious. It is often used in yellow light and laser processes with narrow line widths. The thickness of the coating is thinner and can be higher. Speed production. In general, the obvious degree of the etched pattern is related to the difference between the visible light transmission and reflection of the ITO etched channel and the ITO non-etched region. The smaller the difference, the less obvious the etched pattern.

2013年以來,電容面板平均單價下降了20%以上,毛利率下降明顯。要在已成紅海的ITO film市場中站穩腳跟,控制產品成本尤為關鍵。PET基材占了ITO film成本的40%左右,另外所使用的高端進口設備折舊也占了成本的10%以上,如能降低基材的成本,提高鍍膜速度,將可以有效地降低成本,提高ITO film產品的市場競爭力。 Since 2013, the average unit price of capacitive panels has dropped by more than 20%, and gross profit margin has dropped significantly. In order to gain a foothold in the red sea ITO film market, controlling product costs is especially critical. PET substrates account for about 40% of the cost of ITO film. In addition, the depreciation of the high-end imported equipment used also accounts for more than 10% of the cost. If the cost of the substrate can be reduced and the coating speed can be increased, the cost can be effectively reduced and the cost Market competitiveness of ITO film products.

從以上現有技術可看出,基於HC-PET的ITO film成本主要來自於塗布硬化層和鍍層,缺點是PVD鍍膜總厚度在100nm左右,鍍膜走速慢,鍍膜成本較高;優點是ITO蝕刻區和非蝕刻區光譜和顏色差異較小,蝕刻紋幾乎不可見,適用於油墨印刷和黃光工藝。基於IM-PET的ITO film成本主要來自於塗布硬化層和折射率匹配層,優點是鍍層總厚度不到50nm,鍍膜走速快;缺點是折射匹配層成本高,ITO蝕刻區和非蝕刻區光譜和顏色差異較大,常用於蝕刻線寬較窄的黃光和雷射蝕刻工藝。 It can be seen from the above prior art that the cost of HC-PET-based ITO film mainly comes from coating hardened layers and coatings. The disadvantage is that the total thickness of the PVD coating is about 100nm, the coating travel speed is slow, and the coating cost is high; the advantage is that the ITO etching area The difference between the spectrum and color of the non-etched area is small, and the etched pattern is almost invisible, which is suitable for ink printing and yellow light process. The cost of IM-PET-based ITO film mainly comes from coating hardened layer and refractive index matching layer. The advantage is that the total thickness of the coating is less than 50nm, and the coating speed is fast. The disadvantages are the high cost of the refractive matching layer and the spectrum of ITO etched and non-etched areas. It has a large difference with color, and is often used in yellow light and laser etching processes with narrow line width.

以上兩種基材及所製備的ITO導電膜的成本均較高,並且難以兼顧油墨印刷、黃光和雷射工藝。因此,有必要提出一種新的折射率匹配膜和ITO導電膜。 The cost of the above two substrates and the prepared ITO conductive film are relatively high, and it is difficult to balance ink printing, yellow light, and laser processes. Therefore, it is necessary to propose a new refractive index matching film and an ITO conductive film.

本發明的一個目的在於提供一種折射率匹配膜,以降低成本,又兼顧油墨印刷、黃光和雷射工藝,且利用基材本身的高折射率特性,在基材上塗布一層第一低折射光學匹配層可以降低後續鍍層厚度,提高鍍膜走速。 An object of the present invention is to provide a refractive index matching film to reduce costs while taking into account ink printing, yellow light, and laser processes, and using the high refractive index characteristics of the substrate itself, coating a first low refractive index on the substrate The optical matching layer can reduce the thickness of subsequent coatings and increase the coating speed.

為了實現上述目的,本發明提供了一種折射率匹配膜,包括依次層疊設置的第一低折射光學匹配層、基材、防粘連硬化層,第一低折射光學匹配層的材料包括含氟化合物和金屬氧化物的混合物。 In order to achieve the above object, the present invention provides a refractive index matching film including a first low-refractive optical matching layer, a substrate, and an anti-blocking and hardening layer which are sequentially stacked. The material of the first low-refractive optical matching layer includes a fluorine-containing compound and A mixture of metal oxides.

進一步地,第一低折射光學匹配層的厚度為10~50nm,折射率為1.3~1.55。 Further, the thickness of the first low-refractive optical matching layer is 10-50 nm, and the refractive index is 1.3-1.55.

進一步地,金屬氧化物占混合物重量的20~40%,優選地,金屬氧化物占混合物重量的20~30%。 Further, the metal oxide accounts for 20 to 40% by weight of the mixture, and preferably, the metal oxide accounts for 20 to 30% by weight of the mixture.

進一步地,含氟化合物為六氟丙烯酸酯、十二氟丙烯酸酯、含氟聚氨酯丙烯酸酯其中的一種或多種。 Further, the fluorine-containing compound is one or more of hexafluoroacrylate, dodecafluoroacrylate, and fluorine-containing polyurethane acrylate.

進一步地,金屬氧化物為二氧化鋯、三氧化二鋁、氧化鋅和氧化銻其中的一種或多種。 Further, the metal oxide is one or more of zirconium dioxide, aluminum oxide, zinc oxide, and antimony oxide.

進一步地,防粘連硬化層20的厚度為1~5μm,折射率為1.5~1.52。 Further, the thickness of the anti-blocking hardened layer 20 is 1 to 5 μm, and the refractive index is 1.5 to 1.52.

進一步地,基材10包括聚酯膜層11以及形成於聚酯膜層11兩側側面的預塗層12。 Further, the substrate 10 includes a polyester film layer 11 and precoat layers 12 formed on both sides of the polyester film layer 11.

進一步地,聚酯膜層11的厚度為50~125μm,位於聚酯膜層11的一側側面上預塗層12的厚度為60~120nm。 Further, the thickness of the polyester film layer 11 is 50 to 125 μm, and the thickness of the pre-coat layer 12 on one side of the polyester film layer 11 is 60 to 120 nm.

進一步地,聚酯膜層11的折射率為1.63~1.65,預塗層12的折射率為1.575~1.58。 Further, the refractive index of the polyester film layer 11 is 1.63 to 1.65, and the refractive index of the pre-coat layer 12 is 1.575 to 1.58.

本發明的另一目的在於提供一種厚度較薄,鍍膜速度較快的低成本ITO導電膜。 Another object of the present invention is to provide a low-cost ITO conductive film with a thin thickness and a fast coating speed.

為了實現上述目的,本發明提供了一種ITO導電膜,在上述的折射率匹配膜的第一低折射光學匹配層上依次層疊設置第二低折射光學匹配層和ITO導電層。 In order to achieve the above object, the present invention provides an ITO conductive film, and a second low refractive optical matching layer and an ITO conductive layer are sequentially stacked on the first low refractive optical matching layer of the refractive index matching film.

進一步地,第二低折射光學匹配層的厚度為5~40nm,折射率為1.3~1.6,材料為SiOx。 Further, the thickness of the second low-refractive optical matching layer is 5 to 40 nm, the refractive index is 1.3 to 1.6, and the material is SiOx.

進一步地,ITO導電層的厚度為19~22nm,折射率為2.0。 Further, the thickness of the ITO conductive layer is 19 to 22 nm, and the refractive index is 2.0.

進一步地,ITO導電膜還包括設置於第一低折射光學匹配層3與第二低折射光學匹配層之間的高折射光學匹配層。 Further, the ITO conductive film further includes a high-refractive optical matching layer disposed between the first low-refractive optical matching layer 3 and the second low-refractive optical matching layer.

進一步地,高折射光學匹配層的厚度為2~10nm,折射率為2.0~2.5,材料為SiNx和Nb2O5。 Further, the thickness of the high-refractive optical matching layer is 2 to 10 nm, the refractive index is 2.0 to 2.5, and the materials are SiNx and Nb2O5.

與現有技術相比,本發明具有如下有益效果: Compared with the prior art, the present invention has the following beneficial effects:

1、本發明的折射率匹配膜,在基材上直接塗布一層第一低折射光學匹配層,通過減少第一低折射光學匹配層的厚度以及該層材料的優化,相對原先的HC-PET和IM-PET基材,既維持了產品性能,又顯著降低了折射率匹配膜的成本;同時利用基材本身的高折射率特性,在基材上塗布一層第一低折射光學匹配層可以降低後續鍍層的厚度,提高了鍍膜走速,有效地降低了ITO導電膜的成本。 1. The refractive index matching film of the present invention is directly coated with a first low-refractive optical matching layer on the substrate. By reducing the thickness of the first low-refractive optical matching layer and optimizing the material of the layer, it is compared with the original HC-PET and IM-PET substrate not only maintains product performance, but also significantly reduces the cost of the refractive index matching film. At the same time, using the high refractive index characteristics of the substrate itself, coating a first low refractive optical matching layer on the substrate can reduce subsequent The thickness of the coating layer increases the speed of the coating film and effectively reduces the cost of the ITO conductive film.

2、本發明折射率匹配膜既可適用於窄線寬的雷射和黃光工藝,又可以適用寬線寬的黃光和油墨印刷工藝。。 2. The refractive index matching film of the present invention is applicable to both laser and yellow light processes with narrow line widths, and yellow light and ink printing processes with wide line widths. .

1‧‧‧折射率匹配膜 1‧‧‧ refractive index matching film

2‧‧‧第二低折射光學匹配層 2‧‧‧Second Low Refractive Optical Matching Layer

3‧‧‧ITO導電層 3‧‧‧ITO conductive layer

4‧‧‧高折射光學匹配層 4‧‧‧ High refractive optical matching layer

10‧‧‧基材 10‧‧‧ Substrate

11‧‧‧聚酯膜層 11‧‧‧ polyester film layer

12‧‧‧預塗層 12‧‧‧ pre-coated

20‧‧‧防粘連硬化層 20‧‧‧Anti-blocking hardening layer

30‧‧‧第一低折射光學匹配層 30‧‧‧The first low refractive optical matching layer

圖1示出了本發明折射率匹配膜示意圖。 FIG. 1 shows a schematic diagram of a refractive index matching film according to the present invention.

圖2示出了本發明一種實施方式中ITO導電膜結構示意圖。 FIG. 2 is a schematic diagram showing the structure of an ITO conductive film in an embodiment of the present invention.

圖3示出了本發明另一種實施方式中ITO導電膜結構示意圖。 FIG. 3 shows a schematic structural diagram of an ITO conductive film in another embodiment of the present invention.

圖4示出了本發明實施例4的ITO導電膜蝕刻前後的反射光譜圖。 FIG. 4 shows a reflection spectrum diagram of an ITO conductive film before and after etching according to Embodiment 4 of the present invention.

圖5示出了本發明實施例7的ITO導電膜蝕刻前後的反射光譜圖。 FIG. 5 shows a reflection spectrum diagram of the ITO conductive film before and after etching according to Embodiment 7 of the present invention.

為了使本技術領域的人員更好地理解本發明方案,下面將結合本發明實施例中的附圖,對本發明實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例僅僅是本發明一部分的實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都應當屬於本發明保護的範圍。 In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only The embodiments are part of the present invention, but not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts should fall within the protection scope of the present invention.

需要說明的是,本發明的說明書和權利要求書及上述附圖中的術語“第一”、“第二”、“上”、“下”等是用於區別類似的物件,而不必用於描述特定的順序或先後次序。應該理解這樣使用的資料在適當情況下可以互換,以便這裡描述的本發明的實施例。此外,術語“包括”和“具有”以及他們的任何變形,意圖在於覆蓋不排他的包含,例如,包含了一系列步驟或單元的過程、方法、系統、產品或設備不必限於清楚地列出的那些步驟或單元,而是可包括沒有清楚地列出的或對於這些過程、方法、產品或設備固有的其它步驟或單元。 It should be noted that the terms "first", "second", "upper", "lower" and the like in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar items, and do not have to be used for Describe a specific order or sequence. It should be understood that the materials so used are interchangeable under appropriate circumstances in order to facilitate the embodiments of the invention described herein. Furthermore, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product, or device that includes a series of steps or units need not be limited to those explicitly listed Those steps or units may instead include other steps or units not explicitly listed or inherent to these processes, methods, products or equipment.

由背景技術可知,現有技術中HC-PET和IM-PET兩種基材膜的整體厚度較厚,成本較高,並且難以兼顧油墨印刷、黃光和雷射工藝。本發明的發明人針對上述問題進行研究,提出了一種新的折射率匹配膜,如圖1所示,該折射率匹配膜1包括依次層疊設置的第一低折射光學匹配層30、基材10、防粘連硬化層20,第一低折射光學匹配層30的材料為含氟化合物和金屬氧化物的混合物。該折射率匹配膜1能夠兼顧油墨印刷、黃光和雷射工藝,且利用基材10本身的高折射率特性,在基材10上塗布一層第一低折射光學匹配層30可以降低後續鍍層厚度,提高鍍膜走速,有效地降低了ITO導電膜的成本。 It can be known from the background art that in the prior art, the overall thickness of the two substrate films of HC-PET and IM-PET is thick, the cost is high, and it is difficult to take into account the ink printing, yellow light, and laser processes. The inventor of the present invention has studied the above problems and proposed a new refractive index matching film. As shown in FIG. 1, the refractive index matching film 1 includes a first low-refractive optical matching layer 30 and a substrate 10 that are sequentially stacked. The anti-blocking hardening layer 20 and the material of the first low-refractive optical matching layer 30 are a mixture of a fluorine-containing compound and a metal oxide. The refractive index matching film 1 can take into account ink printing, yellow light, and laser processes, and utilizes the high refractive index characteristics of the substrate 10 itself. Coating the substrate 10 with a first low-refractive optical matching layer 30 can reduce subsequent coating thickness. , Increase the coating film speed, effectively reduce the cost of ITO conductive film.

上述折射率匹配膜1中,第一低折射光學匹配層30的厚度優選為10~50nm,折射率為1.3~1.55,相對原先的HC-PET和IM-PET基材膜,產品性能優異,又減少了折射率匹配膜1的厚度,更顯著降低了折射率匹配膜1的成本。 In the refractive index matching film 1, the thickness of the first low-refractive optical matching layer 30 is preferably 10 to 50 nm and the refractive index is 1.3 to 1.55. Compared with the original HC-PET and IM-PET substrate films, the product performance is excellent, and The thickness of the refractive index matching film 1 is reduced, and the cost of the refractive index matching film 1 is significantly reduced.

上述折射率匹配膜1中,金屬氧化物占混合物重量的20~40%,優選地,金屬氧化物占混合物重量的20~30%,金屬氧化物的重量限制在上述範圍內,既可以保證第一低折射光學匹配層30足夠低的折射率,又能維持折射率匹配膜1表面性能。其中,第一低折射光學匹配層30中的含氟化合物,主要提供低折射特性,例如可以為六氟丙烯酸酯、十二氟丙烯酸酯、含氟聚氨酯丙烯酸酯的一種或多種。金屬氧化物可以採用本領域中常見的材料,主要用來調節折射率匹配膜1的表面特性以及增加後續鍍層的接著性。優選地,金屬氧化物選自二氧化鋯、三氧化二鋁、氧化鋅和氧化銻的任一種或多種。當然,金屬氧化物的類型並不限於上述優實施方式。 In the refractive index matching film 1, the metal oxide accounts for 20 to 40% of the weight of the mixture, preferably, the metal oxide accounts for 20 to 30% of the weight of the mixture, and the weight of the metal oxide is limited to the above range, which can ensure that A low-refractive optical matching layer 30 has a sufficiently low refractive index while maintaining the surface properties of the refractive index matching film 1. Wherein, the fluorine-containing compound in the first low-refractive optical matching layer 30 mainly provides low-refractive properties, and may be, for example, one or more of hexafluoroacrylate, dodecylfluoroacrylate, and fluorine-containing polyurethane acrylate. The metal oxide may be a material commonly used in the art, and is mainly used to adjust the surface characteristics of the refractive index matching film 1 and increase the adhesion of subsequent plating layers. Preferably, the metal oxide is selected from any one or more of zirconia, alumina, zinc oxide and antimony oxide. Of course, the type of metal oxide is not limited to the above-mentioned preferred embodiments.

上述折射率匹配膜1中,防粘連硬化層20可以為任何用於防止粘連的硬化塗層,其厚度和折射率可以根據實際需求進行設定。在一種優選的實施方式中,防粘連硬化層20的厚度為1~5μm,折射率為1.5~1.52。 In the refractive index matching film 1 described above, the anti-blocking hardened layer 20 may be any hardened coating for preventing blocking, and its thickness and refractive index may be set according to actual needs. In a preferred embodiment, the thickness of the anti-blocking hardened layer 20 is 1 to 5 μm, and the refractive index is 1.5 to 1.52.

上述折射率匹配膜1中,基材10可以包括聚酯膜層11以及形成於聚酯膜層11的兩側側面的預塗層12。其中,聚酯膜層11為聚酯類樹脂,例如聚對苯二甲酸乙二醇酯(PET)樹脂。預塗層12可以為粘合劑,例如由熱熔膠或有機高分子低溫樹脂組成。本領域的技術人員可以根據實際需求設定上述基材10的厚度和折射率。優選地,聚酯膜層11的厚度為50~125μm,位於聚酯膜層11的一側側面上的預塗層12的厚度為60~120nm,聚酯膜層11的折射率為1.63~1.65,預塗層12的折射率為1.575~1.58。 In the refractive index matching film 1, the substrate 10 may include a polyester film layer 11 and precoat layers 12 formed on both side surfaces of the polyester film layer 11. The polyester film layer 11 is a polyester-based resin, such as a polyethylene terephthalate (PET) resin. The pre-coating layer 12 may be an adhesive, for example, composed of a hot-melt adhesive or an organic polymer low-temperature resin. Those skilled in the art can set the thickness and refractive index of the substrate 10 according to actual needs. Preferably, the thickness of the polyester film layer 11 is 50 to 125 μm, the thickness of the precoat layer 12 on one side of the polyester film layer 11 is 60 to 120 nm, and the refractive index of the polyester film layer 11 is 1.63 to 1.65. The refractive index of the pre-coat layer 12 is 1.575 to 1.58.

同時,本發明還提供了一種基於上述折射率匹配膜的ITO導電膜,該ITO導電膜整體厚度較薄,鍍膜速度較快,成本較低。 At the same time, the present invention also provides an ITO conductive film based on the above-mentioned refractive index matching film. The overall thickness of the ITO conductive film is thin, the coating speed is fast, and the cost is low.

在一種優選地實施方式中,本發明的ITO導電膜,請參閱圖1、圖2所示,在上述折射率匹配膜1的第一低折射光學匹配層30上依次層疊設置第二低折射光學匹配層2和ITO導電層3。通過在第一低折射光學匹配層30上再設置第二低折射光學匹配層2,主要目的是降低第一低折射光學匹配層30的粗糙度以及調節蝕刻色差。由此製備的ITO導電膜可以用於線寬較窄的黃光和雷射蝕刻工藝。 In a preferred embodiment, the ITO conductive film of the present invention is shown in FIG. 1 and FIG. 2. A second low-refractive optical layer is sequentially stacked on the first low-refractive optical matching layer 30 of the refractive index matching film 1. Matching layer 2 and ITO conductive layer 3. By providing a second low-refractive optical matching layer 2 on the first low-refractive optical matching layer 30, the main purpose is to reduce the roughness of the first low-refractive optical matching layer 30 and adjust the etching chromatic aberration. The ITO conductive film thus prepared can be used in yellow light and laser etching processes with narrow line widths.

上述ITO導電膜中,第二低折射光學匹配層2的厚度和折射率可以根據實際需求進行設定。優選地,第二低折射光學匹配層2的厚度為5~40nm,折射率為1.3~1.6,材料為SiOx。 In the above ITO conductive film, the thickness and refractive index of the second low-refractive optical matching layer 2 can be set according to actual needs. Preferably, the thickness of the second low-refractive optical matching layer 2 is 5 to 40 nm, the refractive index is 1.3 to 1.6, and the material is SiOx.

上述ITO導電膜中,ITO導電層3的厚度和折射率可以根據實際需求進行設定。優選地,ITO導電層3的厚度為19~22nm,折射率為2.0。 In the above ITO conductive film, the thickness and refractive index of the ITO conductive layer 3 can be set according to actual needs. Preferably, the thickness of the ITO conductive layer 3 is 19 to 22 nm, and the refractive index is 2.0.

在另一種優選地實施方式中,本發明的ITO導電膜,請參閱圖1、圖3所示,還包括設置於第一低折射光學匹配層30與第二低折射光學匹配層2之間的高折射光學匹配層4。由此構成了兩對高低折射率匹配層,該ITO導電膜蝕刻區和非蝕刻區光譜和顏色差異較小,蝕刻紋幾乎不可見,可以用於線寬較寬的油墨印刷和黃光工藝。 In another preferred embodiment, the ITO conductive film of the present invention, as shown in FIG. 1 and FIG. 3, further includes an ITO conductive film disposed between the first low-refractive optical matching layer 30 and the second low-refractive optical matching layer 2. High refractive optical matching layer 4. As a result, two pairs of high and low refractive index matching layers are formed. The ITO conductive film has a small difference in spectrum and color between the etched and non-etched areas, and the etched pattern is almost invisible. It can be used for ink printing and yellow light with wider line width.

上述ITO導電膜中,高折射光學匹配層4的材料為SiNx和 Nb2O5,第二低折射光學匹配層2的材料為SiOx。高折射光學匹配層4、第二低折射光學匹配層2的厚度和折射率可以根據實際需求進行設定。優選地,高折射光學匹配層4的厚度為2~10nm,折射率為2.0~2.5;第二低折射光學匹配層2的厚度為5~40nm,折射率為1.3~1.6。將厚度限制在上述範圍內,相對原先基於HC-PET基材的ITO導電膜來說,減少了鍍層厚度,鍍膜走速變快,鍍膜成本降低。 In the above ITO conductive film, the material of the high-refractive optical matching layer 4 is SiNx and Nb 2 O 5 , and the material of the second low-refractive optical matching layer 2 is SiOx. The thickness and refractive index of the high-refractive optical matching layer 4 and the second low-refractive optical matching layer 2 can be set according to actual needs. Preferably, the high-refractive optical matching layer 4 has a thickness of 2 to 10 nm and a refractive index of 2.0 to 2.5; the second low-refractive optical matching layer 2 has a thickness of 5 to 40 nm and a refractive index of 1.3 to 1.6. Limiting the thickness to the above range reduces the thickness of the coating compared to the original ITO conductive film based on HC-PET substrate, the speed of the coating becomes faster, and the cost of the coating is reduced.

上述ITO導電膜中,在折射率匹配膜1上設置高折射光學匹配層4、第二低折射光學匹配層2、ITO導電層3的工藝可以為蒸鍍法、濺鍍法、離子電鍍法、電鍍法及化學氣相沉積法,其工藝為本領域現有技術,在此不再贅述。 In the above ITO conductive film, a process of providing the high-refractive optical matching layer 4, the second low-refractive optical matching layer 2, and the ITO conductive layer 3 on the refractive index matching film 1 may be a vapor deposition method, a sputtering method, an ion plating method, The processes of electroplating and chemical vapor deposition are prior art in the art, and will not be repeated here.

以下將結合實施例和對比例,進一步說明本發明的有益效果。顯然,所描述的實施例僅僅是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬於本發明保護的範圍。 The beneficial effects of the present invention will be further described below in combination with the examples and comparative examples. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

實施例1 Example 1

本實施例提供了一種折射率匹配膜1,如圖1所示,包括依次層疊設置的第一低折射光學匹配層30、基材10、防粘連硬化層20,且基材10包括聚酯膜層11以及形成於聚酯膜層11的兩側側面的預塗層12。其中,第一低折射光學匹配層30的材料為十二氟丙烯酸酯和金屬氧化物的混合物,金屬氧化物占所述混合物重量的20%,該第一低折射光學匹配層30的厚度為10nm,折射率為1.3; 聚酯膜層11的厚度為50μm,折射率為1.65;預塗層12由酚醛樹脂組成,其厚度為60nm,折射率為1.575;防粘連硬化層20的厚度為1μm,折射率為1.5。 This embodiment provides a refractive index matching film 1. As shown in FIG. 1, the refractive index matching film 1 includes a first low-refractive optical matching layer 30, a substrate 10, and an anti-blocking hardening layer 20. The substrate 10 includes a polyester film. Layer 11 and precoat layers 12 formed on both side surfaces of the polyester film layer 11. The material of the first low-refractive optical matching layer 30 is a mixture of dodecafluoroacrylate and metal oxide, and the metal oxide accounts for 20% of the weight of the mixture. The thickness of the first low-refractive optical matching layer 30 is 10 nm. , The refractive index is 1.3; the thickness of the polyester film layer 11 is 50 μm, and the refractive index is 1.65; the pre-coat layer 12 is composed of a phenol resin with a thickness of 60 nm and a refractive index of 1.575; the thickness of the anti-blocking hardened layer 20 is 1 μm, The refractive index is 1.5.

實施例2 Example 2

本實施例提供了一種折射率匹配膜1,如圖1所示,包括依次層疊設置的第一低折射光學匹配層30、基材10、防粘連硬化層20,且基材10包括聚酯膜層11以及形成於聚酯膜層11的兩側側面的預塗層12。其中,第一低折射光學匹配層30的材料為六氟丙烯酸酯和金屬氧化物的混合物,金屬氧化物占所述混合物重量的40%,該第一低折射光學匹配層30的厚度為50nm,折射率為1.55;聚酯膜層11的厚度為125μm,折射率為1.63;預塗層12由酚醛樹脂組成,其厚度為120nm,折射率為1.575;防粘連硬化層20的厚度為5μm,折射率為1.52。 This embodiment provides a refractive index matching film 1. As shown in FIG. 1, the refractive index matching film 1 includes a first low-refractive optical matching layer 30, a substrate 10, and an anti-blocking hardening layer 20. The substrate 10 includes a polyester film. Layer 11 and precoat layers 12 formed on both side surfaces of the polyester film layer 11. The material of the first low-refractive optical matching layer 30 is a mixture of hexafluoroacrylate and a metal oxide, and the metal oxide accounts for 40% of the weight of the mixture. The thickness of the first low-refractive optical matching layer 30 is 50 nm. The refractive index is 1.55; the thickness of the polyester film layer 11 is 125 μm and the refractive index is 1.63; the pre-coating layer 12 is composed of a phenol resin with a thickness of 120 nm and a refractive index of 1.575; the thickness of the anti-blocking hardened layer 20 is 5 μm and is refracted The rate is 1.52.

實施例3 Example 3

本實施例提供了一種折射率匹配膜1,如圖1所示,包括依次層疊設置的第一低折射光學匹配層30、基材10、防粘連硬化層20,且基材10包括聚酯膜層11以及形成於聚酯膜層11的兩側側面的預塗層12。其中,第一低折射光學匹配層30的材料為含氟聚氨酯丙烯酸酯和金屬氧化物的混合物,金屬氧化物占所述混合物重量的30%,該層的厚度為30nm,折射率為1.4;聚酯膜層11的厚度為100μm,折射率為1.64;預塗層12由酚醛樹脂組成,其厚度為80nm,折射率為1.58;防粘連硬化層20的厚度為3μm,折射率為1.51。 This embodiment provides a refractive index matching film 1. As shown in FIG. 1, the refractive index matching film 1 includes a first low-refractive optical matching layer 30, a substrate 10, and an anti-blocking hardening layer 20. The substrate 10 includes a polyester film. Layer 11 and precoat layers 12 formed on both side surfaces of the polyester film layer 11. Wherein, the material of the first low-refractive optical matching layer 30 is a mixture of a fluorine-containing urethane acrylate and a metal oxide, and the metal oxide accounts for 30% of the weight of the mixture. The thickness of the layer is 30 nm and the refractive index is 1.4; The thickness of the ester film layer 11 is 100 μm, and the refractive index is 1.64. The pre-coat layer 12 is composed of a phenol resin with a thickness of 80 nm and a refractive index of 1.58. The thickness of the anti-blocking hardened layer 20 is 3 μm and the refractive index is 1.51.

實施例4 Example 4

本實施例提供了一種ITO導電膜,如圖1、圖2所示,在實施例1折射率匹配膜1的第一低折射光學匹配層30上依次鍍上5nm的第二低折射光學匹配層2、19nm的ITO導電層3。其中,第二低折射光學匹配層2的材料為SiOx,折射率為1.3;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 2, a second low-refractive optical matching layer with a thickness of 5 nm is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the first embodiment. 2. 19nm ITO conductive layer 3. The material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.3; the refractive index of the ITO conductive layer 3 is 2.0.

實施例5 Example 5

本實施例提供了一種ITO導電膜,如圖1、圖2所示,在實施例1折射率匹配膜1的第一低折射光學匹配層30上依次鍍上40nm的第二低折射光學匹配層2、22nm的ITO導電層3。其中,第二低折射光學匹配層2的材料為SiOx,折射率為1.5;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 2, a second low-refractive optical matching layer of 40 nm is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the first embodiment. 2. 22nm ITO conductive layer 3. The material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.5; the refractive index of the ITO conductive layer 3 is 2.0.

實施例6 Example 6

本實施例提供了一種ITO導電膜,如圖1、圖2所示,在實施例1折射率匹配膜1的第一低折射光學匹配層30上依次鍍上20nm的第二低折射光學匹配層2、20nm的ITO導電層3。其中,第二低折射光學匹配層2的材料為SiOx,折射率為1.3;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 2, a second low-refractive optical matching layer of 20 nm is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the first embodiment. 2. 20nm ITO conductive layer 3. The material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.3; the refractive index of the ITO conductive layer 3 is 2.0.

實施例7 Example 7

本實施例提供了一種ITO導電膜,如圖1、圖3所示,在實施例1折射率匹配膜1的第一低折射光學匹配層30上依次鍍上2nm的高折射光學匹配層4、5nm的第二低折射光學匹配層2,19nm的 ITO導電層3。其中,高折射光學匹配層4的材料為SiNx和Nb2O5,折射率為2.0;第二低折射光學匹配層2的材料為SiOx,折射率為1.3;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 3, a high-refractive optical matching layer 4 of 2 nm is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the first embodiment. A 5 nm second low-refractive optical matching layer 2 and a 19 nm ITO conductive layer 3. The material of the high-refractive optical matching layer 4 is SiNx and Nb 2 O 5 with a refractive index of 2.0; the material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.3; the refractive index of the ITO conductive layer 3 is 2.0 .

實施例8 Example 8

本實施例提供了一種ITO導電膜,如圖1、圖3所示,在實施例1的折射率匹配膜1的第一低折射光學匹配層30上依次鍍上10nm的高折射光學匹配層4、40nm的第二低折射光學匹配層2、22nm的ITO導電層3。其中,高折射光學匹配層4的材料為SiNx和Nb2O5,折射率為2.5;第二低折射光學匹配層2的材料為SiOx,折射率為1.6;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 3, a 10-nm high-refractive optical matching layer 4 is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the embodiment 1. 40nm second low-refractive optical matching layer 2 and 22nm ITO conductive layer 3. The material of the high-refractive optical matching layer 4 is SiNx and Nb 2 O 5 with a refractive index of 2.5; the material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.6; the refractive index of the ITO conductive layer 3 is 2.0 .

實施例9 Example 9

本實施例提供了一種ITO導電膜,如圖1、圖3所示,在實施例1的折射率匹配膜1的第一低折射光學匹配層30上依次鍍上5nm的高折射光學匹配層4、10nm的第二低折射光學匹配層2、20nm的ITO導電層3。其中,高折射光學匹配層4的材料為SiNx和Nb2O5,折射率為2.2;第二低折射光學匹配層2的材料為SiOx,折射率為1.6;ITO導電層3的折射率為2.0。 This embodiment provides an ITO conductive film. As shown in FIGS. 1 and 3, a 5 nm high-refractive optical matching layer 4 is sequentially plated on the first low-refractive optical matching layer 30 of the refractive index matching film 1 of the first embodiment. 10nm second low-refractive optical matching layer 2 and 20nm ITO conductive layer 3. The material of the high-refractive optical matching layer 4 is SiNx and Nb 2 O 5 with a refractive index of 2.2; the material of the second low-refractive optical matching layer 2 is SiOx and the refractive index is 1.6; the refractive index of the ITO conductive layer 3 is 2.0 .

對比例1 Comparative Example 1

本對比例提供了一種HC-PET膜,包括依次層疊設置的硬化層、基材、防粘連硬化層,且基材包括聚酯膜層以及形成於聚酯膜層的兩側側面的預塗層。其中,硬化層的厚度為4um,折射率為1.5;聚酯膜層的厚度為125μm,折射率為1.65;預塗層由酚醛樹 脂組成,其厚度為120nm,折射率為1.58;防粘連硬化層的厚度為3μm,折射率為1.5。 This comparative example provides a HC-PET film including a hardened layer, a substrate, and an anti-blocking hardened layer that are sequentially stacked, and the substrate includes a polyester film layer and precoat layers formed on both sides of the polyester film layer. . Among them, the thickness of the hardened layer is 4um and the refractive index is 1.5; the thickness of the polyester film layer is 125μm and the refractive index is 1.65; the precoat layer is composed of a phenolic resin with a thickness of 120nm and the refractive index of 1.58; the anti-blocking hardened layer The thickness is 3 μm and the refractive index is 1.5.

在本對比例的HC-PET膜的硬化層上依次設置10nm的高折射光學匹配層、70nm的低折射光學匹配層、20nm的ITO導電層。其中,高折射光學匹配層的材料為SiNx和Nb2O5,折射率為2.0;低折射光學匹配層的材料為SiOx,折射率為1.3;ITO導電層的折射率為2.0。 On the hardened layer of the HC-PET film of this comparative example, a high-refractive optical matching layer of 10 nm, a low-refractive optical matching layer of 70 nm, and an ITO conductive layer of 20 nm were sequentially arranged. The material of the high-refractive optical matching layer is SiNx and Nb 2 O 5 , and the refractive index is 2.0; the material of the low-refractive optical matching layer is SiOx, the refractive index is 1.3; and the refractive index of the ITO conductive layer is 2.0.

對比例2 Comparative Example 2

本對比例提供了一種IM-PET膜,包括依次層疊設置的折射率匹配層、基材、防粘連硬化層,且基材包括聚酯膜層以及形成於聚酯膜層的兩側側面的預塗層。其中,折射率匹配層的厚度為1μm,折射率為1.65;聚酯膜層的厚度為125μm,折射率為1.65;預塗層由酚醛樹脂組成,其厚度為120nm,折射率為1.58;防粘連硬化層的厚度為4μm,折射率為1.5。 This comparative example provides an IM-PET film, which includes a refractive index matching layer, a substrate, and an anti-blocking hardened layer that are sequentially stacked, and the substrate includes a polyester film layer and pre-forms formed on both sides of the polyester film layer. coating. Among them, the thickness of the refractive index matching layer is 1 μm and the refractive index is 1.65; the thickness of the polyester film layer is 125 μm and the refractive index is 1.65; the pre-coating layer is composed of a phenol resin with a thickness of 120 nm and a refractive index of 1.58; anti-blocking The thickness of the hardened layer was 4 μm, and the refractive index was 1.5.

在本對比例的IM-PET膜的折射率匹配層上依次設置20nm的低折射光學匹配層、20nm的ITO導電層。其中,低折射光學匹配層的材料為SiOx,折射率為1.3;ITO導電層的折射率為2.0。 A 20 nm low-refractive optical matching layer and a 20 nm ITO conductive layer were sequentially arranged on the refractive index matching layer of the IM-PET film of this comparative example. The material of the low-refractive optical matching layer is SiOx and the refractive index is 1.3; the refractive index of the ITO conductive layer is 2.0.

採用Hunterlab公司的色度儀ColorQuest XE對本發明實施例4和7的ITO導電膜進行反射光譜測試。測試結果如圖4和5所示,其中,實線表示含ITO導電層蝕刻前的反射光譜,虛線表示ITO導電層蝕刻後的反射光譜。由此可看出,圖5的反射光譜相對圖4來說,蝕刻前後的反射率差值更小,蝕刻紋不明顯。因此,本發明 實施例4所示的ITO導電膜結構可以適用於窄線寬的雷射和黃光工藝,而實施例5所示的ITO導電膜結構可以適應於寬線寬的黃光和油墨印刷工藝。 The color spectrum tester ColorQuest XE from Hunterlab was used to perform reflection spectrum test on the ITO conductive films of Examples 4 and 7 of the present invention. The test results are shown in Figures 4 and 5, where the solid line represents the reflection spectrum before the ITO-containing conductive layer is etched, and the dashed line represents the reflection spectrum after the ITO conductive layer is etched. It can be seen that the reflection spectrum of FIG. 5 is smaller than that of FIG. 4 before and after the etching, and the etching pattern is not obvious. Therefore, the ITO conductive film structure shown in Embodiment 4 of the present invention can be applied to laser and yellow light processes with narrow line widths, while the ITO conductive film structure shown in Embodiment 5 can be used with yellow light and inks with wide line widths. printing art.

由以上實施例可以看出本發明的折射率匹配膜利用基材本身的高折射率,塗布了一層第一低折射層,通過第一低折射匹配層的材料的優化,既維持了產品性能,並且能夠兼顧油墨印刷、黃光和雷射工藝。由實施例1~3可以明顯看出本發明折射率匹配膜中第一低折射匹配層的厚度相對於對比例1中HC-PET基材膜硬化層的厚度由4um降到50nm以下,相對於對比例2中IM-PET基材膜的折射率匹配層的厚度由1um降到50nm以下。本發明的折射率匹配膜的成本下降了30%以上。由實施例7~9可以進一步看出,本發明的ITO導電膜相對於對比例1的ITO導電膜,鍍層厚度由100nm降至70nm以下。由上可看出,本發明的折射率匹配膜和ITO導電膜的厚度明顯降低,鍍膜走速能夠從3m/min提高到5.5m/min,ITO導電膜整體成本下降了20~30%。 It can be seen from the above embodiments that the refractive index matching film of the present invention uses the high refractive index of the substrate to coat a first low-refractive layer. By optimizing the material of the first low-refractive matching layer, the product performance is maintained, And can take into account ink printing, yellow light and laser technology. It can be clearly seen from Examples 1 to 3 that the thickness of the first low-refractive matching layer in the refractive index matching film of the present invention is reduced from 4um to less than 50nm with respect to the thickness of the hardened layer of the HC-PET substrate film in Comparative Example 1, relative to The thickness of the refractive index matching layer of the IM-PET substrate film in Comparative Example 2 was reduced from 1 um to 50 nm or less. The cost of the refractive index matching film of the present invention is reduced by more than 30%. It can be further seen from Examples 7 to 9 that, compared with the ITO conductive film of Comparative Example 1, the thickness of the plating layer of the ITO conductive film of the present invention is reduced from 100 nm to 70 nm or less. It can be seen from the above that the thickness of the refractive index matching film and the ITO conductive film of the present invention is significantly reduced, the travel speed of the plating film can be increased from 3 m / min to 5.5 m / min, and the overall cost of the ITO conductive film is reduced by 20-30%.

需要注意的是,具體實施方式僅僅是對本發明技術方案的解釋說明,不應將其理解為對本發明技術方案的限定,任何採用本發明實質發明內容而僅作局部改變的,仍應落入本發明的保護範圍內。。 It should be noted that the specific implementation mode is only an explanation of the technical solution of the present invention, and should not be construed as a limitation on the technical solution of the present invention. Any application that adopts the essential inventive content of the present invention with only partial changes should still fall into the present invention. Within the scope of the invention. .

Claims (14)

一種折射率匹配膜,其特徵在於:該折射率匹配膜包括依次層疊設置的第一低折射光學匹配層、基材、防粘連硬化層,該第一低折射光學匹配層的材料包括含氟化合物和金屬氧化物的混合物,該基材的折射率高於該第一低折射光學匹配層的折射率。A refractive index matching film, characterized in that the refractive index matching film includes a first low-refractive optical matching layer, a substrate, and an anti-blocking and hardening layer which are sequentially stacked, and a material of the first low-refractive optical matching layer includes a fluorine-containing compound. And the metal oxide, the refractive index of the substrate is higher than the refractive index of the first low-refractive optical matching layer. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該第一低折射光學匹配層的厚度為10~50nm,折射率為1.3~1.55。The refractive index matching film according to item 1 of the scope of the patent application, wherein the first low-refractive optical matching layer has a thickness of 10 to 50 nm and a refractive index of 1.3 to 1.55. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該金屬氧化物占該混合物重量的20~40%。The refractive index matching film according to item 1 of the scope of patent application, wherein the metal oxide accounts for 20 to 40% of the weight of the mixture. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該含氟化合物為六氟丙烯酸酯、十二氟丙烯酸酯、含氟聚氨酯丙烯酸酯其中的一種或多種。The refractive index matching film according to item 1 of the scope of patent application, wherein the fluorine-containing compound is one or more of hexafluoroacrylate, dodecylfluoroacrylate, and fluorine-containing polyurethane acrylate. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該金屬氧化物為二氧化鋯、三氧化二鋁、氧化鋅和氧化銻其中的一種或多種。The refractive index matching film according to item 1 of the scope of patent application, wherein the metal oxide is one or more of zirconium dioxide, aluminum oxide, zinc oxide, and antimony oxide. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該防粘連硬化層的厚度為1~5μm,折射率為1.5~1.52。The refractive index matching film according to item 1 of the scope of the patent application, wherein the anti-blocking hardened layer has a thickness of 1 to 5 μm and a refractive index of 1.5 to 1.52. 如申請專利範圍第1項所述之折射率匹配膜,其特徵在於:該基材包括聚酯膜層以及形成於該聚酯膜層兩側側面的預塗層。The refractive index matching film according to item 1 of the patent application scope, wherein the substrate comprises a polyester film layer and pre-coating layers formed on both sides of the polyester film layer. 如申請專利範圍第7項所述之折射率匹配膜,其特徵在於:該聚酯膜層的厚度為50~125μm,位於該聚酯膜層的一側側面上之該預塗層的厚度為60~120nm。The refractive index matching film according to item 7 of the scope of the patent application, wherein the thickness of the polyester film layer is 50-125 μm, and the thickness of the pre-coat layer on one side of the polyester film layer is 60 ~ 120nm. 如申請專利範圍第7項所述之折射率匹配膜,其特徵在於:該聚酯膜層的折射率為1.63~1.65,該預塗層的折射率為1.575~1.58。The refractive index matching film according to item 7 of the scope of the patent application, wherein the refractive index of the polyester film layer is 1.63 to 1.65, and the refractive index of the precoat layer is 1.575 to 1.58. 一種ITO導電膜,其特徵在於:在如申請專利範圍第1項至第9項中任一項之該折射率匹配膜的該第一低折射光學匹配層上依次層疊設置第二低折射光學匹配層和ITO導電層。An ITO conductive film, characterized in that a second low-refractive optical matching layer is sequentially stacked on the first low-refractive optical matching layer of the refractive index matching film according to any one of claims 1 to 9 of the patent application scope. Layer and ITO conductive layer. 如申請專利範圍第10項所述之ITO導電膜,其特徵在於:該第二低折射光學匹配層的厚度為5~40nm,折射率為1.3~1.6,材料為SiOx。The ITO conductive film according to item 10 of the patent application scope, wherein the thickness of the second low-refractive optical matching layer is 5 to 40 nm, the refractive index is 1.3 to 1.6, and the material is SiOx. 如申請專利範圍第10項所述之ITO導電膜,其特徵在於:該ITO導電層的厚度為19~22nm,折射率為2.0。The ITO conductive film according to item 10 of the scope of patent application, characterized in that the thickness of the ITO conductive layer is 19 to 22 nm and the refractive index is 2.0. 如申請專利範圍第10項至第12項中任一項之ITO導電膜,其特徵在於:該ITO導電膜還包括設置於該第一低折射光學匹配層與該第二低折射光學匹配層之間的高折射光學匹配層。For example, the ITO conductive film according to any one of the tenth to twelve patent applications, characterized in that the ITO conductive film further includes a layer disposed between the first low-refractive optical matching layer and the second low-refractive optical matching layer. High refractive optical matching layer. 如申請專利範圍第13項所述之ITO導電膜,其特徵在於:該高折射光學匹配層的厚度為2~10nm,折射率為2.0~2.5,材料為SiNx和Nb2O5The ITO conductive film according to item 13 of the scope of the patent application, wherein the high refractive optical matching layer has a thickness of 2 to 10 nm, a refractive index of 2.0 to 2.5, and a material of SiNx and Nb 2 O 5 .
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