TWI635951B - Method for producing flexible copper-clad laminated plate - Google Patents

Method for producing flexible copper-clad laminated plate Download PDF

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TWI635951B
TWI635951B TW103111412A TW103111412A TWI635951B TW I635951 B TWI635951 B TW I635951B TW 103111412 A TW103111412 A TW 103111412A TW 103111412 A TW103111412 A TW 103111412A TW I635951 B TWI635951 B TW I635951B
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copper foil
layer
polyimide
copper
temperature
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TW201500181A (en
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松下祐之
井伊正一
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新日鐵住金化學股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • C08G73/1082Partially aromatic polyimides wholly aromatic in the tetracarboxylic moiety
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/036Multilayers with layers of different types
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/12Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)

Abstract

本發明係藉由使用一對之熱壓輥之簡易方法提供撓曲性優異的可撓性覆銅積層體。 The present invention provides a flexible copper-clad laminate having excellent flexibility by a simple method using a pair of hot-pressing rollers.

本發明係提供一種可撓性覆銅積層板的製造方法,其具有:使用熱壓輥,加熱壓接銅箔(A)及聚醯亞胺薄膜等之積層體(B)之加熱壓接步驟;以及再加熱步驟;其中,前述積層體(B)的聚醯亞胺層,係由具有熱塑性聚醯亞胺層(ii)作為接著層之複數層聚醯亞胺層所構成,加熱壓接步驟之層合溫度T1係熱塑性聚醯亞胺層(ii)之玻璃轉移溫度以上,於再加熱步驟中之加熱處理溫度T2設為T1以上,以使藉由加熱壓接步驟後的銅箔(A)在厚度方向之由X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之關係成為I/Io>100。 The invention provides a method for manufacturing a flexible copper-clad laminated board, which comprises the steps of heating and pressing a laminated body (B) of a copper foil (A), a polyimide film, and the like using a hot pressing roller. And a reheating step; wherein the polyimide layer of the aforementioned laminated body (B) is composed of a plurality of polyimide layers having a thermoplastic polyimide layer (ii) as an adhesive layer, and heat-pressed The lamination temperature T1 of the step is equal to or higher than the glass transition temperature of the thermoplastic polyimide layer (ii), and the heat treatment temperature T2 in the reheating step is set to be T1 or higher, so that the copper foil ( A) Diffraction intensity (I) of the (200) plane obtained by X-ray diffraction in the thickness direction, and (200) plane diffraction intensity (X) of X-ray diffraction of fine powder copper ( The relationship of Io) becomes I / Io> 100.

Description

可撓性覆銅積層板的製造方法 Manufacturing method of flexible copper-clad laminated board

本發明係有關於用於可撓性線路基板之可撓性覆銅積層板的製造方法,該可撓性線路基板係適合於為了收納於行動電話及智慧型手機、平板PC等之框體的狹窄空間部分,而被彎折成折疊彎曲狀或如硬碟驅動器的讀寫排線般之以小曲率半徑連續地反覆撓曲之用途。另外,折疊彎曲係指為了收納於薄框體,賦予彎折點而彎曲的態樣,以下,於本說明書中,使FPC的上面側為略180℃反轉而成為下面側的方式彎折係稱為「折疊彎曲」。 The present invention relates to a method for manufacturing a flexible copper-clad laminated board for a flexible circuit board. The flexible circuit board is suitable for housing a mobile phone, a smart phone, a tablet PC, and the like. It is used in a narrow space and is folded into a folded shape or continuously bent with a small radius of curvature like a read / write cable of a hard disk drive. The term “folded and bent” refers to a state of being bent in order to be accommodated in a thin frame and provided with a bending point. Hereinafter, in the present specification, the upper side of the FPC is slightly reversed at 180 ° C to become the lower side. It is called "folding and bending."

近年來,隨著以行動電話、筆記型電腦、數位相機、遊戲機等為代表之電子裝置之小型化、薄型化、輕量化的急速進展,對於使用於此等裝置之材料,期待一種即便在小空間內亦可收納零件之高密度且高性能材料。即使於可撓性線路基板中,由於隨著智慧型手機及平板PC等之高性能小型電子機器的普及,零件收納的高密度化的進展,必須將可撓性線路基板收納在比目前更加狹窄的框體內。因此,即便從在屬於可撓性線路基板材料之可撓性 覆銅積層板的材料面來看,亦須要提升耐折疊彎折性及耐撓曲特性。 In recent years, with the rapid development of miniaturization, thinness, and weight reduction of electronic devices such as mobile phones, notebook computers, digital cameras, and game consoles, materials for such devices are expected to be used even in High-density and high-performance materials that can also store parts in a small space. Even in flexible circuit boards, as high-performance small electronic devices such as smart phones and tablet PCs are spreading, and the density of parts is being increased, it is necessary to store flexible circuit boards in a narrower space than currently. Inside the box. Therefore, even if it is dependent on the flexibility of the flexible circuit board material Looking at the material side of the copper clad laminate, it is also necessary to improve the folding resistance and bending resistance.

對於該等課題,已提出使用於可撓性覆銅積層板之銅箔中,係藉由添加微量的銀或錫等在加熱處理時以銅箔之退火進行軟化,同時於某些特定的方向(200面)排整結晶方位之立方體集合組織發達之特殊壓延銅箔(參照專利文獻1)。藉此,於銅箔施加撓曲時的應力時,顯現在結晶內產生之轉移以及其移動不會蓄積於結晶粒界,可抑制朝表面方向移動致在結晶粒界的龜裂產生以及進展所致之破壞,並具有優異的撓曲特性。 For these issues, it has been proposed to be used in copper foil of flexible copper-clad laminates. It is softened by annealing of copper foil during heat treatment by adding a small amount of silver or tin, etc., and in some specific directions. (200 faces) A special rolled copper foil with a well-developed cubic collection of crystalline orientations (see Patent Document 1). Thereby, when stress is applied to the copper foil during deflection, transitions occurring in the crystal and its movement do not accumulate in the crystal grain boundary, and it is possible to suppress the occurrence and progress of cracks in the crystal grain boundary caused by movement toward the surface. It causes damage and has excellent flexing characteristics.

如此之壓延銅箔係於常溫無法顯現前述特性,而為使如此之立方體組織發達,必須以預定的熱處理退火。於該退火所需的熱量,例如,若為低溫,以150℃、60分鐘等之處理,若為高溫,以300℃以上1分鐘左右的時間結束。 Such a rolled copper foil cannot exhibit the aforementioned characteristics at room temperature, and in order to develop such a cubic structure, it must be annealed by a predetermined heat treatment. The heat required for the annealing is, for example, a treatment at 150 ° C. for 60 minutes if the temperature is low, and a temperature of 300 ° C. or more for 1 minute to end the treatment.

一般而言,製造由聚醯亞胺及銅箔所構成之覆銅積層板的方法,已知有:於銅箔上塗布聚醯亞胺前驅體並進行乾燥、高溫熱處理,以得到單面覆銅積層板後,藉由以熱層合法壓接銅箔的步驟來製作的方法;預先準備於最外層含有熱塑性聚醯亞胺的聚醯亞胺薄膜,於其兩側以熱層合法壓接銅箔的方式。該熱層合方式係具有以使用一對對向之熱壓接輥之簡易的方式,其裝置導入亦較為容易之優點。然而,於此種手法,由於熱層合時對於銅箔的入熱量為數秒左右的短時間,故無法得到足以使壓延銅箔 之立方體組織發達的足夠熱量。 Generally, a method for manufacturing a copper-clad laminated board composed of polyimide and copper foil is known: coating a polyimide precursor on a copper foil and drying and heat-treating at high temperature to obtain a single-sided coating. After the copper laminate is laminated, it is produced by the method of thermally laminating the copper foil; a polyimide film containing thermoplastic polyimide in the outermost layer is prepared in advance, and thermal lamination is performed on both sides of the polyimide film Copper foil way. This thermal lamination method has the advantage of using a simple method of using a pair of opposed thermal pressure bonding rollers, and the introduction of the device is relatively easy. However, in this method, since the amount of heat input to the copper foil during thermal lamination is about a few seconds, a sufficient amount of rolled copper foil cannot be obtained. The cube is well-organized with enough heat.

在此,為了提升銅箔的柔軟性,並抑制微龜裂或龜裂等之不良缺陷,已知有在藉由熱層合法壓接銅箔之後,進行退火處理之方法(參照專利文獻2)。然而,在此所示之退火處理的條件,係僅顯示於溫度、時間均廣泛的範圍,是否具體地以如何之退火條件來提升其特性尚不明確。此外,專利文獻2所示之退火處理的時間係設為2分鐘以上,故除了生產性不足外,就退火處理所得之效果而言,僅著眼於銅箔的彈性率,尚未言及於(200)面結晶配向等之立方體組織控制之觀點,對於更嚴苛的撓曲用途之發展,實在難謂可應付。 Here, in order to improve the flexibility of the copper foil and to suppress defects such as microcracks and cracks, a method is known in which an annealing process is performed after the copper foil is pressure-bonded by a thermal layer (see Patent Document 2). . However, the conditions of the annealing treatment shown here are only shown in a wide range of temperature and time, and it is not clear whether the specific annealing conditions are used to improve the characteristics. In addition, since the annealing time shown in Patent Document 2 is set to 2 minutes or longer, in addition to the lack of productivity, the effect obtained by the annealing treatment is only focused on the elasticity of the copper foil, and it has not been mentioned in (200). The viewpoint of cubic structure control such as surface crystalline alignment can hardly be coped with for the development of more severe flexural applications.

另一方面,與以熱輥進行熱層合方式相異的可撓性覆銅積層板的製造方法,已揭示使用有複數輥及鋼帶而實施熱層合的方式,亦稱為雙帶(double belt)方式(專利文獻3參照)。該方式由於易增加輥的支數等,故可確保層合時的充足時間,但有在設備費用龐大等的問題。 On the other hand, a method for manufacturing a flexible copper-clad laminated board different from a thermal lamination method using a heat roller has been disclosed. A method of performing thermal lamination using a plurality of rollers and a steel strip is also referred to as a dual-belt ( double belt) system (refer to Patent Document 3). This method is easy to increase the number of rollers and the like, so that sufficient time can be secured during lamination, but there are problems such as large equipment costs.

[先行技術文獻] [Advanced technical literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利第4285526號公報 [Patent Document 1] Japanese Patent No. 4285526

[專利文獻2]日本特開2013-21281號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2013-21281

[專利文獻3]日本特開2011-270035號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2011-270035

本發明係有鑑於上述課題而成者。其目的在於以耐熱性及尺寸安定性優異的聚醯亞胺作為絶緣層之可撓性覆銅積層板的製造中,以一對之熱壓輥之簡易的手法,提供撓曲特性亦優異的可撓性覆銅積層板。 This invention is made | formed in view of the said subject. The purpose is to provide a flexible copper-clad laminated board with polyimide which is excellent in heat resistance and dimensional stability as an insulating layer. The simple method of a pair of hot-pressed rollers provides excellent flexibility Flexible copper clad laminate.

為了解決上述課題,本發明人等研究的結果,發現對於壓接銅箔及聚醯亞胺之加熱壓接步驟之溫度T1、以及進行後加熱之再加熱步驟之溫度T2,使與銅箔相接之熱塑性聚醯亞胺層之玻璃轉移溫度(Tg)以上設為T1,且設為T1<T2時可顯現足夠的撓曲特性,而完成本發明。 In order to solve the above-mentioned problems, as a result of research by the present inventors, it was found that the temperature T1 of the heating and crimping step for crimping the copper foil and the polyimide, and the temperature T2 of the reheating step for performing post-heating, were compared with the copper foil When the glass transition temperature (Tg) of the attached thermoplastic polyimide layer is set to be T1, and when T1 <T2, sufficient flexural characteristics can be developed, and the present invention has been completed.

亦即,本發明之撓性覆銅積層板的製造方法,其係具有:使用一對之熱壓輥,加熱壓接銅箔(A)及具備接著層作為與前述銅箔(A)之積層面的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接步驟;以及,之後,進一步進行加熱處理之再加熱步驟,其中,前述聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層(ii)作為接著層,前述加熱壓接步驟之層合溫度T1係前述熱塑性聚醯亞胺層(ii)之玻璃轉移溫度以上,於前述再加熱步驟中之加熱處理溫度T2係設為前述層合溫度T1以上,藉此使前述加熱壓接步驟後的銅箔(A)在厚度方向之由X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io) 之關係為I/Io>100。 That is, the method for manufacturing a flexible copper-clad laminated board according to the present invention includes: using a pair of hot-pressing rollers, heat-pressing a copper foil (A) and providing an adhesive layer as a laminate with the copper foil (A). Heating and pressure-bonding step of the polyimide film on the surface or the polyimide laminate (B) with a metal layer; and then, a reheating step of further heat treatment, wherein the polyimide film or the The polyimide laminate (B) of the metal layer has a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C. or higher as a bonding layer, and the lamination temperature T1 of the aforementioned thermal compression bonding step is the aforementioned thermoplastic polyimide The layer (ii) has a glass transition temperature or higher, and the heat treatment temperature T2 in the aforementioned reheating step is set to the aforementioned lamination temperature T1 or higher, thereby bringing the copper foil (A) after the aforementioned thermocompression step in a thickness direction. (200) plane diffraction intensity (I) obtained from X-ray diffraction and (200) plane diffraction intensity (Io) obtained from X-ray diffraction of fine powder copper The relationship is I / Io> 100.

於本發明之製造方法中,再加熱步驟之加熱處理較佳係於真空或惰性(非活性)氛圍下實施,加熱處理溫度T2係300℃以上,加熱時間為10秒以上。 In the manufacturing method of the present invention, the heat treatment in the reheating step is preferably performed in a vacuum or an inert (inactive) atmosphere. The heat treatment temperature T2 is 300 ° C or higher, and the heating time is 10 seconds or longer.

此外,聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)較佳為具有已具備熱膨脹係數未達17ppm/K之低熱膨脹性的聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii)之複數聚醯亞胺層。 In addition, the polyimide film or the polyimide laminate (B) with a metal layer is preferably a polyimide layer (i) having a low thermal expansion property having a thermal expansion coefficient of less than 17 ppm / K and a thermoplastic polymer. The polyimide layer of the amidine layer (ii).

進一步地,就銅箔(A)而言,使用厚度5至100μm之壓延銅箔者係本發明之較佳態樣。 Further, as for the copper foil (A), a rolled copper foil having a thickness of 5 to 100 μm is a preferred aspect of the present invention.

依據本發明之可撓性覆銅積層板的製造方法,可藉由再加熱步驟(退火處理)減低銅箔的彈性率,同時進行(200)面的特定配向,使立方體組織發達,結果,可得到配線基板所要求的高耐彎折性,故特別適合使用於智慧型手機等之小型液晶周圍之彎折部分等之耐彎折性及硬碟的讀寫排線等要求連續撓曲之電子裝置。 According to the method for manufacturing a flexible copper-clad laminated board according to the present invention, the elasticity of the copper foil can be reduced by the reheating step (annealing process), and the specific orientation of the (200) plane can be performed at the same time, so that the cubic structure can be developed. Obtains the high bending resistance required by the wiring board, so it is particularly suitable for use in electronic devices that require continuous bending such as bending resistance around bent parts around small liquid crystals such as smart phones and hard disk read-write cables. Device.

以下,詳細說明本發明。 Hereinafter, the present invention will be described in detail.

本發明之可撓性覆銅積層板的製造方法,係加熱壓接銅箔(A)、及具備作為與該銅箔(A)之積層面之接著層的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B),該加熱壓接 中係使用一對之熱壓輥。 The method for producing a flexible copper-clad laminated board according to the present invention is a heat-pressed copper foil (A) and a polyimide film or a metal-attached layer provided as an adhesive layer with the copper foil (A) Polyimide laminate (B), which is heat-pressed The middle system uses a pair of hot-pressing rollers.

熱壓輥可舉例如金屬輥或其表面被覆樹脂之樹脂被覆金屬輥等,但是,由於銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之積層(層合)較佳係在比較高的溫度進行,故使用於輥表面之材質的耐熱性、及/或將源自輥內部之加熱傳熱至表面,係為必要者,從如此之觀點來看,較佳為金屬輥,其表面的表面粗糙度(Ra)為0.01至5μm,特佳為0.1至3μm之粗面化狀態。 The heat-pressing roller may be, for example, a metal roller or a resin-coated metal roller whose surface is covered with a resin. However, the copper foil (A) and the polyimide film or the polyimide laminate (B) with a metal layer are laminated. (Lamination) is preferably performed at a relatively high temperature, so the heat resistance of the material used on the surface of the roller and / or the heat transfer from the inside of the roller to the surface is necessary, from such a point of view In view of this, a metal roller is preferred, and its surface has a surface roughness (Ra) of 0.01 to 5 μm, and particularly preferably a roughened state of 0.1 to 3 μm.

本發明中,於上述一對之熱壓輥間係導入並加熱壓接銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)。在本說明書中,該步驟稱為加熱壓接步驟,而與銅箔(A)加熱壓接的對象物係聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B),且貼合銅箔(A)及聚醯亞胺薄膜之接著層,或貼合銅箔(A)及在附金屬層之聚醯亞胺積層體(B)中之接著層。 In the present invention, a copper foil (A) and a polyimide film or a polyimide laminate (B) with a metal layer are introduced and heat-bonded between the pair of hot-pressing rollers. In this specification, this step is referred to as a thermocompression bonding step, and the object to be thermocompression-bonded with the copper foil (A) is a polyimide film or a polyimide laminate (B) with a metal layer, and attached Laminating copper foil (A) and polyimide film, or laminating copper foil (A) and polyimide laminate (B) with metal layer.

其中,聚醯亞胺薄膜(B)係只要於與前述銅箔(A)之積層面具有接著層即可,如此之薄膜,係除了玻璃轉移溫度260℃以上單層之熱塑性聚醯亞胺薄膜外,可舉例如非熱塑性聚醯亞胺層之單面或是雙面具有玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層之複數聚醯亞胺層所構成之聚醯亞胺薄膜。上述聚醯亞胺薄膜(B)除了可以公知之方法製造準備外,亦可使用市售的聚醯亞胺薄膜。市售的聚醯亞胺薄膜可舉例TorayDupont製的Kapton EN等。此外,在市售的低熱膨脹性聚醯亞胺薄膜亦可塗布得到熱塑 性聚醯亞胺層(ii)之聚醯亞胺前驅體的樹脂溶液,並使之硬化。 The polyimide film (B) is only required to have an adhesive layer on the layer with the copper foil (A). Such a film is a thermoplastic polyimide film except for a single layer having a glass transition temperature of 260 ° C or higher. In addition, for example, a non-thermoplastic polyimide layer may include a polyimide film composed of a plurality of polyimide layers having a thermoplastic polyimide layer having a glass transition temperature of 260 ° C. or higher on one or both sides. The polyimide film (B) may be prepared by a known method, or a commercially available polyimide film may be used. Examples of commercially available polyimide films include Kapton EN made by Toray Dupont and the like. In addition, a commercially available low thermal expansion polyimide film can also be applied to obtain a thermoplastic. Resin solution of the polyimide precursor of the flexible polyimide layer (ii) and harden it.

此外,附金屬層之聚醯亞胺積層體(B)係可舉例如在銅箔等之金屬箔上設有單層或是複數層之聚醯亞胺層者。聚醯亞胺為單層時,該聚醯亞胺層本身即為接著層,故聚醯亞胺須由玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層(ii)所成,聚醯亞胺為複數層時,至少與前述銅箔(A)積層之面為熱塑性聚醯亞胺層(ii)即可。如此之附金屬層之聚醯亞胺積層體(B)之構成可例示金屬層/熱塑性聚醯亞胺層(ii)/低熱膨脹性聚醯亞胺層(i)/熱塑性聚醯亞胺層(ii),或金屬層/低熱膨脹性聚醯亞胺層(i)/熱塑性聚醯亞胺層(ii)之構成。藉由使附金屬層之聚醯亞胺積層體(B)中之聚醯亞胺為複數層之構成,可滿足銅箔與聚醯亞胺之接著強度或尺寸安定性、銲料耐熱性等之作為可撓性覆銅積層板所要求之諸多特性。另外,構成金屬層之金屬箔係除了銅箔以外,可舉例如鋁箔、不銹鋼箔。 In addition, the polyimide laminate (B) with a metal layer may be a polyimide layer having a single layer or a plurality of layers on a metal foil such as a copper foil. When the polyimide is a single layer, the polyimide layer itself is an adhesive layer, so the polyimide must be formed from a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or more. When the amine is a plurality of layers, at least the surface laminated with the copper foil (A) may be a thermoplastic polyimide layer (ii). Examples of the structure of the polyimide laminate (B) with a metal layer include a metal layer / thermoplastic polyimide layer (ii) / low thermal expansion polyimide layer (i) / thermoplastic polyimide layer. (ii), or the structure of a metal layer / low thermal expansion polyfluorene imine layer (i) / thermoplastic polyimide layer (ii). The polyimide in the polyimide laminate (B) with a metal layer is composed of a plurality of layers, which can satisfy the bonding strength or dimensional stability of copper foil and polyimide, heat resistance of solder, etc. Many characteristics required for flexible copper clad laminates. The metal foil constituting the metal layer is, in addition to a copper foil, an aluminum foil or a stainless steel foil.

上述附金屬層之聚醯亞胺積層體(B),更具體而言,可準備單面可撓性覆銅積層板。單面可撓性覆銅積層板可在長條狀的銅箔上使前述低熱膨脹性聚醯亞胺層(i)或得到熱塑性聚醯亞胺層(ii)之聚醯亞胺前驅體的樹脂溶液逐次塗布乾燥,並使之硬化(醯亞胺化)而得。本發明之1項特徵係可以一對之熱壓輥之簡易方法連續且有效率地製造可撓性覆銅積層板,由此觀點,形成附金屬層之聚醯亞胺積層體(B)之銅箔係可使用長條狀者。 The polyfluorene imide laminate (B) with a metal layer can be more specifically a single-sided flexible copper-clad laminate. The single-sided flexible copper-clad laminated board can make the aforementioned low thermal expansion polyimide layer (i) or a polyimide precursor of a thermoplastic polyimide layer (ii) on a long copper foil. The resin solution is sequentially applied and dried, and is hardened (fluorinated). One feature of the present invention is that a flexible copper-clad laminate can be continuously and efficiently manufactured by a simple method of a pair of hot-pressed rolls. From this viewpoint, a metal polyimide laminate (B) with a metal layer is formed. Copper foil can be used in a long shape.

如此形態之銅箔係由銅箔製造商販售已卷取成輥狀者,可以使用該者。此外,依據本發明,由所製造之可撓性覆銅積層板之銅箔以線路加工所形成之線路,可最大限度顯現銅箔具有之撓曲性能,由此觀點,即便最先作為單面可撓性覆銅積層板時所使用之銅箔,較佳為使用其後以一對之熱壓輥加熱壓接之銅箔(A)相同之壓延銅箔。 The copper foil in such a form is sold by a copper foil manufacturer and rolled into a roll shape, and can be used. In addition, according to the present invention, the wiring formed by processing the copper foil of the flexible copper-clad laminated board manufactured by the wiring can maximize the flexural performance of the copper foil. From this viewpoint, even if it is first used as a single surface As the copper foil used in the flexible copper-clad laminated board, it is preferable to use a rolled copper foil that is the same as the copper foil (A) that is subsequently heat-pressed by a pair of hot-pressing rollers.

構成聚醯亞胺層之低熱膨脹性聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii),係可使賦予該等特性之其前驅體的聚醯胺酸進行醯亞胺化而得,但該等聚醯胺酸一般而言,可配合公知之二胺與酸二酐所求得之聚醯亞胺的特性而適當選擇,再使該等於有機溶劑中進行合成而得。所聚合之樹脂黏度係例如較佳為500cps以上35,000cps以下的範圍內。 The low-thermal-expansion polyimide layer (i) and the thermoplastic polyimide layer (ii) constituting the polyimide layer are capable of performing imidization of the polyimide acid of the precursor that imparts these characteristics. However, in general, the polyamidoacids can be appropriately selected according to the characteristics of polyamidoimide obtained from known diamines and acid dianhydrides, and then synthesized in an organic solvent. The viscosity of the polymerized resin is, for example, preferably within a range of 500 cps or more and 35,000 cps or less.

使用來作為聚醯亞胺之原料的二胺係例如可舉例4,6-二甲基-m-苯基二胺、2,5-二甲基-p-苯基二胺、2,4-二胺基均三甲苯、4,4'-亞甲基二-o-甲苯胺、4,4'-亞甲基二-2,6-二甲苯胺、4,4'-亞甲基-2,6-二乙基苯胺、2,4-甲苯二胺、m-苯基二胺、p-苯基二胺、4,4'-二胺基二苯基丙烷、3,3'-二胺基二苯基丙烷、4,4'-二胺基二苯基乙烷、3,3'-二胺基二苯基乙烷、4,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基甲烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、4,4'-二胺基二苯基硫醚、3,3'-二胺基二苯基硫醚、4,4'-二胺基二苯基碸、3,3'-二胺基二苯基碸、4,4'-二胺基二苯基醚、3,3-二胺基二苯基醚、1,3-雙(3-胺基苯氧基)苯、1,3-雙(4-胺基 苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、聯苯胺、3,3'-二胺基聯苯、3,3'-二甲基-4,4'-二胺基聯苯、3,3'-二甲氧基聯苯胺、4,4'-二胺基-p-三聯苯基、3,3'-二胺基-p-三聯苯基、雙(p-胺基環己基)甲烷、雙(p-β-胺基-t-丁基苯基)醚、雙(p-β-甲基-δ-胺基戊基)苯、p-雙(2-甲基-4-胺基戊基)苯、p-雙(1,1-二甲基-5-胺基戊基)苯、1,5-二胺基萘、2,6-二胺基萘、2,4-雙(β-胺基-t-丁基)甲苯、2,4-二胺基甲苯、m-二甲苯-2,5-二胺、p-二甲苯-2,5-二胺、m-伸二甲苯基二胺、p-伸二甲苯基二胺、2,6-二胺基吡啶、2,5-二胺基吡啶、2,5-二胺基-1,3,4-二唑、哌、2,2'-二甲基-4,4'-二胺基聯苯、3,7-二胺基二苯并呋喃、1,5-二胺基茀、二苯并-p-二烷-2,7-二胺、4,4'-二胺基苄等。 Examples of the diamine system used as a raw material of polyfluoreneimide include 4,6-dimethyl-m-phenyldiamine, 2,5-dimethyl-p-phenyldiamine, and 2,4- Diamino mesitylene, 4,4'-methylenebis-o-toluidine, 4,4'-methylenebis-2,6-xylyleneamine, 4,4'-methylene-2 1,6-diethylaniline, 2,4-toluenediamine, m-phenyldiamine, p-phenyldiamine, 4,4'-diaminodiphenylpropane, 3,3'-diamine Diphenylpropane, 4,4'-diaminodiphenylethane, 3,3'-diaminodiphenylethane, 4,4'-diaminodiphenylmethane, 3,3 '-Diaminodiphenylmethane, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 4,4'-diaminodiphenylsulfide, 3,3' -Diaminodiphenylsulfide, 4,4'-diaminodiphenylphosphonium, 3,3'-diaminodiphenylphosphonium, 4,4'-diaminodiphenylether, 3 1,3-bisaminodiphenyl ether, 1,3-bis (3-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4-bis (4 -Aminophenoxy) benzene, benzidine, 3,3'-diaminobiphenyl, 3,3'-dimethyl-4,4'-diaminobiphenyl, 3,3'-dimethyl Oxybenzidine, 4,4'-diamino-p-terphenyl, 3,3'-diamino-p-terphenyl, bis (p-amine Cyclohexyl) methane, bis (p-β-amino-t-butylphenyl) ether, bis (p-β-methyl-δ-aminopentyl) benzene, p-bis (2-methyl- 4-aminopentyl) benzene, p-bis (1,1-dimethyl-5-aminopentyl) benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2, 4-bis (β-amino-t-butyl) toluene, 2,4-diaminotoluene, m-xylene-2,5-diamine, p-xylene-2,5-diamine, m -Xylylenediamine, p-xylylenediamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1,3,4- Diazole, piperazine , 2,2'-dimethyl-4,4'-diaminobiphenyl, 3,7-diaminodibenzofuran, 1,5-diaminofluorene, dibenzo-p-di Alkan-2,7-diamine, 4,4'-diaminobenzyl and the like.

此外,使用來作為聚醯亞胺之原料的酸酐例如可舉例1,2,4,5-苯四甲酸二酐、3,3',4,4'-二苯基酮四羧酸二酐、2,2',3,3'-二苯基酮四羧酸二酐、2,3,3',4'-二苯基酮四羧酸二酐、萘-1,2,5,6-四羧酸二酐、萘-1,2,4,5-四羧酸二酐、萘-1,4,5,8-四羧酸二酐、萘-1,2,6,7-四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-1,2,5,6-四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-2,3,6,7-四羧酸二酐、2,6-二氯萘-1,4,5,8-四羧酸二酐、2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-四氯萘-1,4,5,8-四羧酸二酐、1,4,5,8-四氯萘-2,3,6,7-四羧酸二酐、3,3',4,4'-聯苯四羧酸二酐、2,2',3,3'-聯苯四羧酸二酐、2,3,3',4'-聯苯四羧酸二酐、3,3",4,4"-p-三聯苯基四羧酸二酐、2,2",3,3"-p-三聯苯基四羧酸二酐、2,3,3",4"-p- 三聯苯基四羧酸二酐、2,2-雙(2,3-二羧苯基)-丙烷二酐、2,2-雙(3,4-二羧苯基)-丙烷二酐、雙(2,3-二羧苯基)醚二酐、雙(2,3-二羧苯基)甲烷二酐、雙(3.4-二羧苯基)甲烷二酐、雙(2,3-二羧苯基)碸二酐、雙(3,4-二羧苯基)碸二酐、1,1-雙(2,3-二羧苯基)乙烷二酐、1,1-雙(3,4-二羧苯基)乙烷二酐、苝-2,3,8,9-四羧酸二酐、苝-3,4,9,10-四羧酸二酐、苝-4,5,10,11-四羧酸二酐、苝-5,6,11,12-四羧酸二酐、菲-1,2,7,8-四羧酸二酐、菲-1,2,6,7-四羧酸二酐、菲-1,2,9,10-四羧酸二酐、環戊烷-1,2,3,4-四羧酸二酐、吡-2,3,5,6-四羧酸二酐、吡咯啶-2,3,4,5-四羧酸二酐、噻吩-,3,4,5-四羧酸二酐、4,4'-氧二酞酸二酐、2,3,6,7-萘四羧酸二酐等。 Examples of the acid anhydride used as the raw material of polyimide include 1,2,4,5-benzenetetracarboxylic dianhydride, 3,3 ', 4,4'-diphenylketone tetracarboxylic dianhydride, and the like. 2,2 ', 3,3'-diphenylketone tetracarboxylic dianhydride, 2,3,3', 4'-diphenylketone tetracarboxylic dianhydride, naphthalene-1,2,5,6- Tetracarboxylic dianhydride, naphthalene-1,2,4,5-tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, naphthalene-1,2,6,7-tetracarboxylic acid Acid dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5,6-tetracarboxylic dianhydride, 4,8-dimethyl- 1,2,3,5,6,7-hexahydronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,6-dichloronaphthalene-1,4,5,8-tetracarboxylic acid di Anhydride, 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 1,4,5,8-Tetrachloronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2', 3 , 3'-biphenyltetracarboxylic dianhydride, 2,3,3 ', 4'-biphenyltetracarboxylic dianhydride, 3,3 ", 4,4" -p-terphenyltetracarboxylic dianhydride , 2,2 ", 3,3" -p-terphenyltetracarboxylic dianhydride, 2,3,3 ", 4" -p-terphenyltetracarboxylic dianhydride, 2,2-bis (2 , 3-dicarboxyphenyl) -propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -propane dianhydride, bis (2,3-dicarboxyphenyl) ether dianhydride, bis ( 2,3-dicarboxyphenyl) methyl Dianhydride, bis (3.4-dicarboxyphenyl) methane dianhydride, bis (2,3-dicarboxyphenyl) fluorene dianhydride, bis (3,4-dicarboxyphenyl) fluorene dianhydride, 1,1- Bis (2,3-dicarboxyphenyl) ethane dianhydride, 1,1-bis (3,4-dicarboxyphenyl) ethane dianhydride, fluorene-2,3,8,9-tetracarboxylic acid di Anhydride, hydrazone-3,4,9,10-tetracarboxylic dianhydride, fluorene-4,5,10,11-tetracarboxylic dianhydride, fluorene-5,6,11,12-tetracarboxylic dianhydride, Phenanthrene-1,2,7,8-tetracarboxylic dianhydride, phenanthrene-1,2,6,7-tetracarboxylic dianhydride, phenanthrene-1,2,9,10-tetracarboxylic dianhydride, cyclopentyl Alkane-1,2,3,4-tetracarboxylic dianhydride, pyridine -2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-, 3,4,5-tetracarboxylic dianhydride, 4,4 '-Oxydiphthalic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride and the like.

上述二胺及酸酐係亦可分別僅使用1種或併用2種以上。此外,於聚合所使用之溶劑可舉例二甲基乙醯胺、N-甲基吡咯啶酮、2-丁酮、二乙二醇二甲醚、二甲苯等,可使用1種或併用2種以上。 These diamines and acid anhydride systems may be used alone or in combination of two or more. Examples of the solvent used in the polymerization include dimethylacetamide, N-methylpyrrolidone, 2-butanone, diethylene glycol dimethyl ether, and xylene. One type or two types can be used in combination. the above.

為使聚醯亞胺層為熱膨脹係數未達17×10-6/K之低熱膨脹性的聚醯亞胺層(i),係作為原料之酸酐成分亦可使用1,2,4,5-苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐、二胺成分可使用2,2'-二甲基-4,4'-二胺基聯苯、2-甲氧基-4、4'-二胺基苯并乙醯苯胺,特佳係可以1,2,4,5-苯四甲酸二酐以及2,2'-二甲基-4,4'-二胺基聯苯作為各原料成分之主成分。 In order to make the polyimide layer a low-thermal-expansion polyimide layer (i) having a thermal expansion coefficient of less than 17 × 10 -6 / K, an acid anhydride component as a raw material can also be used. 1, 2, 4, 5- Pyromellitic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, and diamine components can use 2,2'-dimethyl-4,4'-diaminobiphenyl, 2 -Methoxy-4, 4'-diaminobenzoacetanilide, particularly preferred are 1,2,4,5-benzenetetracarboxylic dianhydride and 2,2'-dimethyl-4,4 ' -Diaminobiphenyl as a main component of each raw material component.

此外,為使聚醯亞胺層為玻璃轉移溫度為260℃以上之熱塑性聚醯亞胺層(ii),係作為原料的酸酐成 分亦可使用1,2,4,5-苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐、3,3',4,4'-二苯基酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、二胺成分可使用2,2'-雙[4-(4-胺基苯氧基)苯基]丙烷、4,4'-二胺基二苯基醚、1,3-雙(4-胺基苯氧基)苯,特佳係1,2,4,5-苯四甲酸二酐以及2,2'-雙[4-(4-胺基苯氧基)苯基]丙烷作為各原料成分之主成分。 In addition, in order to make the polyimide layer a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or higher, an acid anhydride is used as a raw material. 1,2,4,5-benzenetetracarboxylic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 3,3', 4,4'-diphenyl ketone Tetracarboxylic dianhydride, 3,3 ', 4,4'-diphenylphosphonium tetracarboxylic dianhydride, and diamine components can use 2,2'-bis [4- (4-aminophenoxy) benzene Group] propane, 4,4'-diaminodiphenyl ether, 1,3-bis (4-aminophenoxy) benzene, particularly preferably 1,2,4,5-benzenetetracarboxylic dianhydride and 2,2'-bis [4- (4-aminophenoxy) phenyl] propane is a main component of each raw material component.

本發明中,無論是在使用聚醯亞胺薄膜時,或使用附金屬層之聚醯亞胺積層體時,與銅箔(A)積層之面均必須為接著層。接著層係由熱塑性聚醯亞胺層(ii)所構成,但其玻璃轉移溫度係260℃以上,較佳為280℃至320℃之範圍。熱塑性聚醯亞胺層(ii)之玻璃轉移溫度為此範圍時,成為可將可撓性覆銅積層板加工成可撓性線路基板時所要求的銅箔與聚醯亞胺面之間的接著強度及尺寸安定性、零件封裝時的銲料接合所要求的銲料耐熱性優異者。 In the present invention, the surface to be laminated with the copper foil (A) must be an adhesive layer when a polyimide film is used or when a polyimide laminate with a metal layer is used. The next layer is composed of a thermoplastic polyimide layer (ii), but its glass transition temperature is 260 ° C or higher, preferably in the range of 280 ° C to 320 ° C. When the glass transition temperature of the thermoplastic polyimide layer (ii) is in this range, it becomes the temperature between the copper foil and the polyimide surface required when the flexible copper-clad laminated board can be processed into a flexible circuit board. Next, those having excellent strength and dimensional stability and excellent solder heat resistance required for solder bonding at the time of component packaging.

另一方面,低熱膨脹性聚醯亞胺層(i)係為使聚醯亞胺層全體的熱膨脹係數成為接近銅箔(A)之熱膨脹係數之12至23ppm/K,較佳係為未達17ppm/K之熱膨脹係數,更佳為5至10ppm/K之範圍。藉此,可使得聚醯亞胺層全體之熱膨脹係數與銅箔(A)之熱膨脹係數吻合,可容易抑制撓性覆銅積層體的翹曲、及蝕刻後加熱後的尺寸變化率。 On the other hand, the low thermal expansion polyimide layer (i) is such that the thermal expansion coefficient of the entire polyimide layer is close to 12 to 23 ppm / K of the thermal expansion coefficient of the copper foil (A), and it is preferably less than The thermal expansion coefficient of 17 ppm / K is more preferably in the range of 5 to 10 ppm / K. Thereby, the thermal expansion coefficient of the entire polyimide layer can be matched with the thermal expansion coefficient of the copper foil (A), and the warpage of the flexible copper-clad laminate and the dimensional change rate after heating can be easily suppressed.

本發明之可撓性覆銅積層板的製造所使用之銅箔(A)較佳為使用壓延銅箔。壓延銅箔可舉例熱壓接以及後步驟之退火時以進行(200)面的結晶配向的方式添加Ag 及Sn作為添加元素之銅合金箔。公知者可舉例JX日鑛金屬製的HA銅箔及日立電線製的HPF箔。銅箔(A)之厚度無特別限定,但一般而言以5至100μm之範圍為有利,較佳為7至50μm之範圍,從緩和撓曲時附加於銅箔的應力的觀點來看,更佳為9至18μm之範圍。 As for the copper foil (A) used for manufacture of the flexible copper-clad laminated board of this invention, it is preferable to use a rolled copper foil. Examples of the rolled copper foil include Ag added during the thermal compression bonding and annealing in the subsequent step so as to perform crystal orientation of the (200) plane. Copper alloy foil with Sn as an additive element. Known examples include HA copper foil manufactured by JX Nippon Metal and HPF foil manufactured by Hitachi Electric Wire. The thickness of the copper foil (A) is not particularly limited, but is generally in the range of 5 to 100 μm, and preferably in the range of 7 to 50 μm. From the viewpoint of reducing the stress added to the copper foil during deflection, it is more The range is preferably 9 to 18 μm.

其次,說明有關於本發明中之銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接條件。層合溫度T1,亦即於加熱壓接步驟中之熱壓輥之溫度,由銅箔(A)及接著層之聚醯亞胺之接著性的觀點來看,必須為熱塑性聚醯亞胺層(ii)之聚醯亞胺之玻璃轉移溫度以上,較佳可為300至400℃。此外,期望在加熱輥間之線壓力為50至500Kg/cm且輥通過時間為2至5秒之條件下加熱壓接。層合的氛圍可舉例大氣氛圍、惰性氛圍,但由防止銅箔氧化變色的觀點來看,期望為惰性氛圍。在此所謂惰性氛圍係與非活性氛圍同義,為被氮或氬等之惰性氣體取代且實質上不含氧之狀態。 Next, the thermal compression bonding conditions of the copper foil (A) and the polyimide film or the polyimide laminate (B) with a metal layer in the present invention will be described. The lamination temperature T1, that is, the temperature of the hot-pressing roller in the heat-pressing step, must be a thermoplastic polyimide layer from the viewpoint of the adhesion of the copper foil (A) and the polyimide of the adhesive layer. (ii) The glass transition temperature of the polyimide is preferably 300 to 400 ° C. In addition, it is desirable to perform heat-pressure bonding under a condition that the linear pressure between the heating rollers is 50 to 500 Kg / cm and the roller passing time is 2 to 5 seconds. Examples of the laminated atmosphere include an atmospheric atmosphere and an inert atmosphere, but from the viewpoint of preventing oxidation and discoloration of copper foil, an inert atmosphere is desirable. Here, the inert atmosphere is synonymous with the inert atmosphere, and is a state in which it is replaced with an inert gas such as nitrogen or argon and is substantially free of oxygen.

在此詳細說明有關以銅箔(A)之熱處理所進行之(200)面結晶配向。一般而言前述之銅箔係藉由熱處理進行軟化、降低彈性率且變得柔軟的同時,(200)面優先進行配向且使得立方體組織發達。就(200)面的結晶配向而言,可在半軟化溫度以上之溫度以預定的時間處理來進行,但必須至少在300℃以上之溫度10秒至60秒。如本發明般,在藉一對之熱壓輥加熱壓接之方法中,由確保其生產性的觀點來看,藉由輥之壓接可在10秒以內瞬間實施,故 加熱壓接步驟之後必須與再加熱步驟之退火步驟組合。 Here, the (200) plane crystal orientation performed by the heat treatment of copper foil (A) will be described in detail. Generally speaking, the aforementioned copper foil is softened by heat treatment, reduces the elastic modulus, and becomes soft, and the (200) plane is preferentially aligned and the cube structure is developed. The crystal orientation of the (200) plane can be performed at a temperature above the semi-softening temperature for a predetermined time, but it must be at least a temperature of 300 ° C or higher for 10 seconds to 60 seconds. As in the present invention, in the method of heating and crimping by a pair of hot-pressing rollers, from the viewpoint of ensuring productivity, the crimping of the rollers can be performed instantaneously within 10 seconds, so that The heating and crimping step must be combined with the annealing step of the reheating step.

在此,再加熱步驟(退火處理)必須在層合溫度T1以上之溫度進行熱處理。若為層合溫度T1以下的溫度,一度於加熱壓接步驟中部分地經再結晶化之銅箔的結晶組織無法再度結晶成長,而無法以(200)面結晶配向充分進行立方體組織。也就是說,為了要再進一步進行以加熱壓接步驟之層合進行之部分再結晶,將再加熱步驟之熱處理溫度T2設定為層合溫度T1以上係非常重要。此時,後步驟之再加熱步驟之溫度為300℃以上時以10秒至60秒左右的處理時間即足夠。另一方面,設定超過400℃時會產生聚醯亞胺的耐熱劣化及因加熱所致翹曲等之問題,故較佳係設定為400℃以下。 Here, the reheating step (annealing treatment) must be heat-treated at a temperature higher than the lamination temperature T1. If it is a temperature lower than the lamination temperature T1, the crystal structure of the copper foil partially recrystallized in the heat and pressure bonding step cannot be crystallized again, and the cubic structure cannot be sufficiently formed with the (200) plane crystal orientation. That is, it is important to set the heat treatment temperature T2 of the reheating step to a lamination temperature T1 or higher in order to further perform the partial recrystallization by the lamination in the heat and pressure bonding step. At this time, when the temperature of the reheating step in the subsequent step is 300 ° C or higher, a processing time of about 10 seconds to 60 seconds is sufficient. On the other hand, when it is set above 400 ° C, problems such as heat resistance degradation of polyimide and warpage due to heating may occur, so it is preferably set to 400 ° C or lower.

經過如此之再加熱步驟,可使藉由前述加熱壓接步驟後的銅箔(A)在厚度方向之X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之關係成為I/Io>100。在此,I值以及Io值可藉由X線繞射法而測定,銅箔的厚度方向之X線繞射係用以確認於銅箔的表面(為壓延銅箔時係壓延面)的配向性,(200)面的強度(I)係表示以X線繞射所求得之(200)面的強度積分值。此外,強度(Io)係表示微粉末銅(關東化學社製銅粉末試藥I級,325網目,純度99.99%以上)之(200)面的強度積分值。 After such a reheating step, the diffraction intensity (I) of the (200) plane obtained by the X-ray diffraction of the copper foil (A) in the thickness direction after the aforementioned heating and crimping step, and The relationship between the (200) plane diffraction intensity (Io) obtained by X-ray diffraction of fine powder copper becomes I / Io> 100. Here, the I value and the Io value can be measured by the X-ray diffraction method. The X-ray diffraction in the thickness direction of the copper foil is used to confirm the alignment on the surface of the copper foil (the rolled surface when rolling the copper foil). The intensity (I) of the (200) plane is the integral value of the intensity of the (200) plane obtained by X-ray diffraction. In addition, the strength (Io) is an integral value of the strength of the (200) plane of finely powdered copper (Class I of copper powder reagent manufactured by Kanto Chemical Co., Ltd., 325 mesh, purity 99.99% or more).

再加熱步驟之退火方法並無限制,但考量到將連續搬送之聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體 (B)亦或銅箔(A)置於均一的溫度環境下,較佳為使步驟之一區塊設為爐型室(booth),以熱風進行加熱。此外,為防止銅箔表面的變質等之影響,熱風較佳為加熱氮氣。以該氮加熱,要更提高溫度條件,由於仍有上限,故可附加其他的加熱手段。較佳的加熱手段可舉例在搬送路徑旁邊設置加熱器。另外,加熱器可設置複數個,其種類可為相同或相異。 The annealing method of the reheating step is not limited, but it is considered that the polyimide film to be continuously conveyed or the polyimide laminate with a metal layer (B) or the copper foil (A) is placed in a uniform temperature environment, and it is preferable to set a block of a step as a furnace-shaped chamber and heat it with hot air. In addition, in order to prevent the influence of the deterioration of the surface of the copper foil, etc., the hot air is preferably heated with nitrogen. Heating with this nitrogen requires higher temperature conditions, and since there is still an upper limit, other heating means can be added. An example of a preferred heating means is to place a heater beside the transport path. In addition, a plurality of heaters may be provided, and the types may be the same or different.

[實施例] [Example]

以下,依據實施例而更詳細說明本發明。另外,在以下之實施例中,各特性評價係依以下之方法進行。 Hereinafter, the present invention will be described in more detail based on examples. In each of the following examples, each characteristic was evaluated by the following method.

[以XRD測定結晶方位I/Io] [Measurement of crystal orientation I / Io by XRD]

銅箔的(200)面結晶方位係藉由使用Mo對陰極之XRD法,對於藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)算出試料之(200)面繞射強度(I),定義為I/Io值。 The crystal orientation of the (200) plane of the copper foil was calculated from the (200) plane diffraction intensity (Io) obtained by X-ray diffraction of fine powder copper using the XRD method of Mo to the cathode. (200) ) Plane diffraction intensity (I), defined as the I / Io value.

[撓曲特性的測定] [Measurement of flexural characteristics]

對於以銅箔/聚醯亞胺/銅箔所構成之雙面可撓性覆銅積層板貼合市售之光阻薄膜,而以預定的圖案形成用遮罩曝光後,以殘留貼合有光阻薄膜側的銅箔之方式,全面蝕去相反面的銅箔之後,使殘餘的銅箔形成L/S=100μm/100μm之圖案的方式硬化形成阻劑層(L:線路線寬,S:線路線間距寬)。其次,顯影硬化阻劑處,蝕刻除去預定之圖案形成中不需要的銅箔,進一步將硬化阻劑層以鹼性液體剝離除去以製作試驗樣品。於試驗圖案張貼覆蓋層後使用IPC試驗裝置,設定撓曲半徑r=1.5mm,沖程25mm,滑 動速度為1500cpm。撓曲壽命的判定係對樣品施加預定的電壓的同時,實施撓曲試驗,電阻值上昇10%之樣品視為配線斷線,作為撓曲次數。下述實施例以及比較例中,各別評價於澆鑄面銅箔形成預定圖案時(除去層合面銅箔(基材2))之撓曲特性、以及於層合面銅箔(基材2)預形成定的圖案時的撓曲特性(除去塗布面銅箔)。 A commercially available photoresist film was bonded to a double-sided flexible copper-clad laminated board composed of copper foil / polyimide / copper foil. After exposure to a mask for a predetermined pattern formation, a residual bonding In the method of copper foil on the side of the photoresist film, after the copper foil on the opposite side is completely etched, the remaining copper foil is hardened to form a pattern of L / S = 100μm / 100μm (L: line width, S : Wide line spacing). Next, the hardening resist is developed, and the copper foil unnecessary for the predetermined pattern formation is etched and removed, and the hardening resist layer is further stripped and removed with an alkaline liquid to prepare a test sample. Use the IPC test device after putting the overlay on the test pattern, set the deflection radius r = 1.5mm, stroke 25mm, slip The moving speed is 1500 cpm. The determination of the flex life is to apply a predetermined voltage to the sample and perform a flex test. A sample with a resistance value increase of 10% is regarded as a wire break and used as the number of flex times. In the following examples and comparative examples, the flexural characteristics when the cast surface copper foil was formed into a predetermined pattern (the laminated surface copper foil (base material 2) was removed), and the laminated surface copper foil (the base material 2) were individually evaluated. ) Deflection characteristics when a predetermined pattern is preformed (coated copper foil is removed).

[銲料耐熱性試驗之測定] [Determination of solder heat resistance test]

將市售的光阻薄膜貼合於以銅箔/聚醯亞胺/銅箔所構成之雙面可撓性覆銅積層板,以預定的圖案形成用遮罩曝光後,銅箔表背面各別之相同位置硬化形成1mm的圓形圖案的阻劑層。其次,顯影硬化阻劑處,而於預定的圖案形成蝕刻除去不需要的銅箔層,進一步將硬化阻劑層以鹼性液體剝離除去來製作試驗樣品。使樣品乾燥後,於溫度不同的銲料浴槽中浸漬10秒,測定銅箔不會產生膨脹、剝離的現象的溫度,將此溫度作為銲料耐熱溫度。 A commercially available photoresist film was bonded to a double-sided flexible copper-clad laminated board composed of copper foil, polyimide, and copper foil, and exposed on a mask for a predetermined pattern formation. Otherwise, the same position is hardened to form a 1 mm circular pattern resist layer. Next, the hardening resist is developed, and an unnecessary copper foil layer is removed by etching in a predetermined pattern, and the hardening resist is peeled off with an alkaline liquid to prepare a test sample. After the samples were dried, they were immersed in solder baths having different temperatures for 10 seconds, and the temperature at which the copper foil did not swell and peel was measured. This temperature was used as the solder heat-resistant temperature.

[剝離強度的測定] [Measurement of peel strength]

將市售的光阻薄膜層合於以銅箔/聚醯亞胺/銅箔所構成之積層體,以預定的圖案形成用遮罩曝光後,使銅配線寬為1mm之圖案的方式硬化形成阻劑層。其次,顯影硬化阻劑處,於預定的圖案形成蝕刻除去不需要的銅箔層,進一步將硬化阻劑層以鹼性液體剝離除去來製作試驗樣品。使樣品乾燥後,以東洋精機股份有限公司製抗拉試驗器(Strograph M-1)以180°拉剝法測定剝離強度。 A commercially available photoresist film was laminated on a laminate composed of copper foil, polyimide, and copper foil, and exposed to a predetermined pattern-forming mask, and then cured to form a pattern with a copper wiring width of 1 mm. Resistor layer. Next, the hardening resist is developed, and an unnecessary copper foil layer is formed by etching in a predetermined pattern. The hardening resist layer is further stripped and removed with an alkaline liquid to prepare a test sample. After the sample was dried, the peel strength was measured by a 180 ° pull-peel method using a tensile tester (Strograph M-1) manufactured by Toyo Seiki Co., Ltd.

[尺寸變化率的測定] [Measurement of dimensional change rate]

尺寸變化率的測定係以下揭順序進行。 The measurement of the dimensional change rate is performed in the following order.

首先,使用300mm見方的試料(可撓性覆銅積層板),以200mm間隔曝光乾式薄膜阻劑,藉由顯影而形成位置測定用靶(target)。進一步於溫度23±2℃、相對濕度50±5%的氛圍中測定蝕刻前(通常狀態)之尺寸後,藉由蝕刻試驗片之靶以外的銅(液溫40℃以下,時間10分鐘以內)來除去。於溫度23±2℃、相對濕度50±5%的氛圍中靜置24±4小時後,測定位置靶間的距離。算出相對於縱方向以及橫方向之各3處之通常狀態的尺寸變化率,以各個之平均值而測定蝕刻後的尺寸。其次,將本試驗片以250℃的烤箱加熱處理1小時,測定其後的位置靶間的距離。算出相對於縱方向以及橫方向之各3處之通常狀態的尺寸變化率,以各個之平均值為加熱處理後的尺寸變化率。加熱尺寸變化率係以下述數學式得出。 First, using a 300 mm square sample (flexible copper-clad laminate), a dry film resist was exposed at 200 mm intervals, and a target for position measurement was formed by development. After measuring the dimensions before etching (normal state) in an atmosphere at a temperature of 23 ± 2 ° C and a relative humidity of 50 ± 5%, copper other than the target of the test piece is etched (liquid temperature below 40 ° C, within 10 minutes) To remove. After standing for 24 ± 4 hours in an atmosphere with a temperature of 23 ± 2 ° C and a relative humidity of 50 ± 5%, the distance between the targets was measured. The dimensional change rate with respect to the normal state at each of the three directions in the vertical direction and the horizontal direction was calculated, and the size after etching was measured with each average value. Next, this test piece was heat-treated in an oven at 250 ° C. for 1 hour, and the distance between the targets after that was measured. The dimensional change rates with respect to the normal state at each of the three positions in the vertical direction and the horizontal direction were calculated, and the average value of each was used as the dimensional change rate after the heat treatment. The heating dimensional change rate is obtained by the following mathematical formula.

蝕刻後尺寸變化率(%)=(B-A)/A×100 Dimension change rate after etching (%) = (B-A) / A × 100

A;阻劑顯影後的靶間距離 A; Distance between targets after development by resist

B;配線形成後的靶間距離 B; Distance between targets after wiring formation

加熱尺寸變化率(%)=(D-C)/C×100 Heating dimensional change rate (%) = (D-C) / C × 100

C;配線形成後的靶間距離 C; Distance between targets after wiring formation

D;加熱後的靶間距離 D; distance between targets after heating

[翹曲的測定] [Determination of warpage]

自可撓性覆銅積層板作成10cm×10cm尺寸之薄片,將此薄片載置於桌上時,使用游標尺測定自桌面浮起最高之部分離桌面的高度。將此高度設為翹曲量,翹曲量未達2mm 時評價為「無翹曲」。 A 10 cm × 10 cm size sheet was made from a flexible copper-clad laminate. When this sheet was placed on a table, the height of the table top separated from the table top was measured using a vernier ruler. Set this height as the amount of warp, the amount of warp is less than 2mm At that time, it was evaluated as "no warpage".

[玻璃轉移溫度的測定] [Measurement of glass transition temperature]

銅箔上塗布聚醯胺酸的樹脂溶液,進行熱處理,作為積層體。蝕刻除去該積層體之銅箔所得得之聚醯亞胺薄膜(10mm×22.6mm)以DMA測定自20℃至500℃為止以5℃/分昇溫時的動態黏彈性,求取玻璃轉移溫度Tg(tanδ極大值)。 The copper foil was coated with a polyamic acid resin solution, and heat-treated to obtain a laminate. The polyimide film (10 mm x 22.6 mm) obtained by etching to remove the copper foil of the laminate was measured by DMA for dynamic viscoelasticity at a temperature rise of 5 ° C / min from 20 ° C to 500 ° C, and the glass transition temperature Tg (tan delta maximum).

[熱膨脹係數的測定] [Determination of thermal expansion coefficient]

將蝕刻銅箔所得之聚醯亞胺薄膜,使用Seiko Instruments Inc.製之熱機械分析儀,昇溫至250℃,進一步於該溫度保持10分鐘後,以5℃/分之速度冷卻,求取自240℃至100℃為止之平均熱膨脹係數(線熱膨脹係數)。 The polyimide film obtained by etching the copper foil was heated to 250 ° C using a thermomechanical analyzer manufactured by Seiko Instruments Inc., and further maintained at this temperature for 10 minutes, and then cooled at a rate of 5 ° C / min. Average thermal expansion coefficient (linear thermal expansion coefficient) from 240 ° C to 100 ° C.

其次,表示實施例、比較例所使用之聚醯胺酸的合成例。 Next, synthesis examples of polyamic acid used in Examples and Comparative Examples are shown.

(合成例1) (Synthesis example 1)

於具備熱電偶及攪拌機的同時可導入氮的反應容器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)而在容器中一邊攪拌一邊使其溶解。其次,將1,2,4,5-苯四甲酸二酐(PMDA)以使單體之投入總量為12wt%之方式投入。之後,持續攪拌3小時而進行聚合反應,得到聚醯胺酸a之樹脂溶液。該聚醯胺酸a所得之聚醯亞胺之玻璃轉移點溫度為310℃,線熱膨脹係數為45ppm/K。 Into a reaction vessel capable of introducing nitrogen while having a thermocouple and a stirrer, N, N-dimethylacetamide was added, and 2,2-bis [4- (4-aminophenoxy) was placed in the reaction vessel. ) Phenyl] propane (BAPP) and dissolved in a container while stirring. Next, pyromellitic dianhydride (PMDA) was added so that the total amount of monomers was 12 wt%. Thereafter, stirring was continued for 3 hours to perform a polymerization reaction to obtain a resin solution of polyamino acid a. The glass transition point temperature of the polyimide obtained from the polyamic acid a was 310 ° C, and the linear thermal expansion coefficient was 45 ppm / K.

(合成例2) (Synthesis example 2)

於具備熱電偶以及攪拌機的同時可導入氮的反應容 器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2'-二甲基-4,4'-二胺基聯苯(m-TB)在容器中一邊攪拌一邊使其溶解。其次,將3,3',4,4'-聯苯四羧酸二酐(BPDA)以及1,2,4,5-苯四甲酸二酐(PMDA)以使單體之投入總量為15wt%,各酸酐之莫耳比率(BPDA:PMDA)為20:80之方式投入。之後,持續攪拌3小時進行聚合反應,得到聚醯胺酸b之樹脂溶液。該聚醯胺酸b所得之聚醯亞胺之玻璃轉移點溫度為380℃,線熱膨脹係數為8ppm/K。 With a thermocouple and a stirrer, the reaction capacity of nitrogen can be introduced In the reactor, add N, N-dimethylacetamide, and put 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) in the reaction vessel while stirring in the vessel Let it dissolve. Secondly, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,2,4,5-benzenetetracarboxylic dianhydride (PMDA) were used so that the total monomer input was 15wt %, And the molar ratio (BPDA: PMDA) of each acid anhydride is 20:80. Thereafter, stirring was continued for 3 hours to perform a polymerization reaction to obtain a resin solution of polyamino acid b. The glass transition point temperature of the polyimide obtained from the polyamic acid b was 380 ° C, and the linear thermal expansion coefficient was 8 ppm / K.

(合成例3) (Synthesis example 3)

於具備熱電偶以及攪拌機的同時可導入氮的反應容器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)在容器中一邊攪拌一邊使其溶解。其次,將3,3',4,4'-二苯基酮四羧酸二酐(BTDA)以使單體之投入總量為12wt%之方式投入。之後,持續攪拌3小時進行聚合反應,得到聚醯胺酸c之樹脂溶液。該聚醯胺酸c所得之聚醯亞胺之玻璃轉移點溫度為240℃,線熱膨脹係數為42ppm/K。 In a reaction vessel equipped with a thermocouple and a stirrer and capable of introducing nitrogen, N, N-dimethylacetamide was added, and 2,2-bis [4- (4-aminophenoxy) was placed in the reaction vessel. ) Phenyl] propane (BAPP) was dissolved in the container while stirring. Secondly, 3,3 ', 4,4'-diphenyl ketone tetracarboxylic dianhydride (BTDA) was added so that the total amount of monomers was 12% by weight. Thereafter, stirring was continued for 3 hours to perform a polymerization reaction to obtain a resin solution of polyamidic acid c. The glass transition point temperature of the polyimide obtained from the polyamic acid c was 240 ° C, and the linear thermal expansion coefficient was 42 ppm / K.

(實施例1) (Example 1)

於厚度12μm之長條狀之壓延銅箔(JX日鑛日石金屬製HA箔;I/Io=7)之單面以使硬化後的厚度為2.2μm的方式均一塗布於合成例1所調製之聚醯胺酸a之樹脂溶液後(第一層),以130℃加熱乾燥,除去溶劑。其次,於該塗布面側以硬化後的厚度為7.6μm的方式均一塗布合成例2所調製之聚醯胺酸b之樹脂溶液(第二層),以135℃加熱乾 燥,除去溶劑。進一步,於該塗布面側以使硬化後的厚度為2.2μm的方式均一塗布與第一層所塗布者相同之聚醯胺酸a之樹脂溶液(第三層),以130℃加熱乾燥,除去溶劑。該長條狀的積層體自130℃開始至300℃為止以階段性提升溫度的方式設定之連續硬化爐,歷時合計6分鐘左右的時間進行熱處理,得到聚醯亞胺層之厚度為12μm之單面可撓性覆銅積層板(基材1)。 Uniformly coated on a single side of a 12-m-thick rolled copper foil (JX Nippon Nippon Steel Metal HA foil; I / Io = 7) so that the thickness after hardening was 2.2 μm and prepared in Synthesis Example 1 After the resin solution of polyamic acid a (first layer), it was dried by heating at 130 ° C to remove the solvent. Next, the resin solution (second layer) of the polyamic acid b prepared in Synthesis Example 2 was uniformly coated on the coating surface side so that the thickness after curing was 7.6 μm, and dried by heating at 135 ° C. Dry and remove the solvent. Furthermore, the same resin solution (third layer) of polyamic acid a as that applied to the first layer was uniformly coated on the coating surface side so that the thickness after curing was 2.2 μm, and dried by heating at 130 ° C. to remove Solvent. A continuous hardening furnace that was set up in a stepwise manner from 130 ° C to 300 ° C for this long laminated body was heat-treated for a total of about 6 minutes to obtain a single polyimide layer having a thickness of 12 μm. Surface flexible copper-clad laminated board (base material 1).

其次,對於該單面可撓性覆銅積層板(基材1)之聚醯亞胺層之表面,加熱壓接作為基材2之長條狀之壓延銅箔(JX日鑛日石金屬製HA箔;I/Io=7)。層合裝置係適用:自卷出軸將層合之長條狀的基材經由導輥進行搬送,於惰性氛圍下之爐內以一對之對向之金屬輥(表面粗糙度Ra=0.15μm)加熱壓接之方式。熱壓接條件設為溫度360℃、壓力130Kg/cm、通過時間;2至5秒(層合:加熱壓接步驟)。之後,以380℃的加熱熱風爐進行60秒加熱處理(再加熱步驟),得到雙面可撓性覆銅積層板。於表1中表示各實施例所使用之基材、熱層合溫度及退火條件。 Next, on the surface of the polyimide layer of the single-sided flexible copper-clad laminate (base material 1), a long rolled copper foil as a base material 2 (made by JX Nippon Steel & Nippon Metal) HA foil; I / Io = 7). The laminating device is applicable: the laminated long substrate is transported by the guide roller through the unwinding shaft, and a pair of opposite metal rollers (surface roughness Ra = 0.15 μm) is used in a furnace under an inert atmosphere. ) Heating and crimping. The thermocompression bonding conditions were set to a temperature of 360 ° C., a pressure of 130 Kg / cm, and a passing time; 2 to 5 seconds (layering: a thermocompression bonding step). Then, it heat-processed (reheating process) for 60 second in the heating hot air furnace of 380 degreeC, and obtained the double-sided flexible copper-clad laminated board. Table 1 shows the substrate, thermal lamination temperature, and annealing conditions used in each example.

於上述所得之雙面可撓性覆銅積層板中,就塗布有聚醯胺酸之樹脂溶液之銅箔(稱為「澆鑄面銅箔」)、以及加熱壓接步驟所層合之銅箔(基材2:稱為「層合面銅箔」),於表2各別表示藉由在厚度方向之X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之比I/Io值。此外,將撓曲特性及銲料耐熱性表示於表2。澆鑄面銅箔之(200面)I/Io為 195,以IPC試驗所得到的撓曲次數為1700萬次。另一方面的層合面銅箔,(200面)I/Io為185,以IPC試驗所得到的撓曲次數為1600萬次,具有與澆鑄面銅箔同等之撓曲特性。此外,銲料耐熱溫度為350℃,為實用上充分之水準。 In the double-sided flexible copper-clad laminated board obtained above, a copper foil coated with a resin solution of polyamic acid (referred to as a "casting copper foil"), and a copper foil laminated by a heat-pressing step (Base material 2: referred to as "laminated surface copper foil"), Table 2 shows the diffraction intensity (I) of the (200) plane obtained by X-ray diffraction in the thickness direction, and The ratio (I / Io) of the (200) plane diffraction intensity (Io) obtained from the X-ray diffraction of fine powder copper. Table 2 shows the flexural characteristics and solder heat resistance. The (200 side) I / Io of the cast surface copper foil is In 195, the number of deflections obtained by the IPC test was 17 million. On the other hand, the laminated copper foil (200 faces) had an I / Io of 185, and the number of deflections obtained by the IPC test was 16 million. It had the same flexural characteristics as the cast copper foil. In addition, the solder heat resistance temperature is 350 ° C, which is a practically sufficient level.

(實施例2) (Example 2)

就基材1所使用之銅箔、與作為基材2之銅箔而言,使用各別長條狀之厚度為12μm之壓延銅箔(日立金屬製HPF-ST-X)以外,與實施例1相同地,得到雙面可撓性覆銅積層板。將所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為205,以IPC試驗得到的撓曲次數為1600萬次。另一方面之層合面銅箔之(200面)I/Io為200,以IPC試驗得到的撓曲次數為1700萬次,具有與澆鑄面同等之撓曲特性。此外,銲料耐熱溫度為350℃。 The copper foil used in the base material 1 and the copper foil used as the base material 2 were each rolled copper foil (HPF-ST-X made by Hitachi Metal) having a thickness of 12 μm in each strip shape. 1 Similarly, a double-sided flexible copper-clad laminated board was obtained. Table 2 shows the evaluation results of the obtained double-sided flexible copper-clad laminated board. The I / Io of the (200 sides) of the copper foil on the casting surface was 205, and the number of deflections obtained by the IPC test was 16 million times. On the other hand, the laminated surface copper foil (200 sides) has an I / Io of 200, and the number of deflections obtained by the IPC test is 17 million times, and has the same deflection characteristics as the cast surface. In addition, the solder heat resistance temperature was 350 ° C.

(實施例3) (Example 3)

於市售之聚醯亞胺薄膜(Kapton EN)之雙面以合成例1所合成之聚醯胺酸a之樹脂溶液塗布乾燥後,於大氣氛圍進行硬化,得到含有熱塑性聚醯亞胺之聚醯亞胺醯亞胺薄膜(基材1)。於該聚醯亞胺薄膜之兩側將實施例1所示之銅箔(基材2)以與實施例1相同地做法以360℃的溫度熱層合,之後,以熱風加熱爐於380℃進行1分鐘的加熱處理,得到雙面可撓性覆銅積層體。所得之雙面可撓性覆銅積層板之評價結果表示於表2。層合面側的銅箔之(200面)I/Io為198,以IPC試驗所得到的撓曲次數為1300萬次。銲料 耐熱溫度為320℃。 On both sides of a commercially available polyimide film (Kapton EN), the resin solution of the polyamidic acid a synthesized in Synthesis Example 1 was applied and dried, and then cured in the atmosphere to obtain a polymer containing a thermoplastic polyimide.醯 imine 醯 imine film (substrate 1). On both sides of the polyimide film, the copper foil (substrate 2) shown in Example 1 was thermally laminated at a temperature of 360 ° C in the same manner as in Example 1, and then heated at 380 ° C by a hot-air heating furnace. The heat treatment was performed for 1 minute to obtain a double-sided flexible copper-clad laminate. The evaluation results of the obtained double-sided flexible copper-clad laminated board are shown in Table 2. The copper foil (200 sides) of the laminated surface side had an I / Io of 198, and the number of deflections obtained by the IPC test was 13 million times. solder The heat-resistant temperature is 320 ° C.

(比較例1) (Comparative example 1)

與實施例1相同地做法而製作單面覆銅積層板(基材1)後,使用實施例1所示之銅箔(基材2),以表1所示條件實施層合條件。之後,不進行再加熱步驟之熱處理,而得到比較例1之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為195,以IPC試驗得到的撓曲次數為1700萬次。另一方面之層合面銅箔之(200面)I/Io為87,未達到澆鑄面銅箔或於實施例之層合面銅箔之約一半,以IPC試驗得到的撓曲次數為700萬次,為實施例的50%以下。 After the single-sided copper-clad laminate (base material 1) was produced in the same manner as in Example 1, the copper foil (base material 2) shown in Example 1 was used, and the lamination conditions were implemented under the conditions shown in Table 1. Thereafter, the heat treatment in the reheating step was not performed, and a double-sided flexible copper-clad laminated board of Comparative Example 1 was obtained. The evaluation results of the obtained double-sided flexible copper-clad laminated board are shown in Table 2. The (200 sides) I / Io of the copper foil on the casting surface was 195, and the number of deflections obtained by the IPC test was 17 million. On the other hand, the I / Io of the (200 sides) of the laminated copper foil is 87, which is less than about half of the cast copper or the copper foil of the example. The number of deflections obtained by the IPC test is 700. 10,000 times, less than 50% of the examples.

(比較例2) (Comparative example 2)

除了使加熱壓接步驟之層合溫度T1設為380℃,此外,再加熱步驟於350℃進行60秒以外,與實施例1相同地,得到比較例2之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為195,以IPC試驗得到的撓曲次數為1700萬次。另一方面之層合面銅箔之(200面)I/Io為從層合後無提升而為90,以IPC試驗得到的撓曲次數為760萬次。 A double-sided flexible copper-clad laminated board of Comparative Example 2 was obtained in the same manner as in Example 1 except that the lamination temperature T1 of the heating and crimping step was set to 380 ° C and the reheating step was performed at 350 ° C for 60 seconds. . The evaluation results of the obtained double-sided flexible copper-clad laminated board are shown in Table 2. The (200 sides) I / Io of the copper foil on the casting surface was 195, and the number of deflections obtained by the IPC test was 17 million. On the other hand, the I / Io of the (200 sides) of the laminated copper foil was 90 without improvement after lamination, and the number of deflections obtained by the IPC test was 7.6 million times.

(比較例3) (Comparative example 3)

除了使加熱壓接步驟之層合溫度T1設為380℃,此外,再加熱步驟於350℃進行600秒以外,與實施例1相同地,得到比較例3之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。即便延長再 加熱步驟之時間,層合面銅箔之(200面)I/Io為89,以IPC試驗得到的撓曲次數為720萬次。 A double-sided flexible copper-clad laminated board of Comparative Example 3 was obtained in the same manner as in Example 1 except that the lamination temperature T1 of the heating and crimping step was set to 380 ° C and the reheating step was performed at 350 ° C for 600 seconds. . The evaluation results of the obtained double-sided flexible copper-clad laminated board are shown in Table 2. Even if extended In the time of the heating step, the (200 sides) I / Io of the laminated copper foil was 89, and the number of deflections obtained by the IPC test was 7.2 million times.

(比較例4) (Comparative Example 4)

得到基材1之單面可撓性覆銅積層板時,取代實施例1之第一層及第三層所使用之聚醯胺酸,各別使用合成例3所示之聚醯胺酸c以外,與實施例1相同地,得到比較例4之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。層合面銅箔(200面)I/Io提升至189,以IPC試驗所得到的撓曲次數為1550萬次,顯現出至與澆鑄面銅箔同等,但銲料耐熱性為250℃,為無法承受零件封裝時的銲料回焊等的水準。 When a single-sided flexible copper-clad laminated board of the substrate 1 was obtained, the polyamic acid c shown in Synthesis Example 3 was used instead of the polyamic acid used in the first layer and the third layer of Example 1. Other than that, it carried out similarly to Example 1, and obtained the double-sided flexible copper-clad laminated board of the comparative example 4. The evaluation results of the obtained double-sided flexible copper-clad laminated board are shown in Table 2. The I / Io of the laminated copper foil (200 sides) was increased to 189, and the number of deflections obtained by the IPC test was 15.5 million times, which was equivalent to that of the cast copper. Withstands levels such as solder reflow during component packaging.

另外,評估有關本實施例後的可撓性覆銅積層板之剝離強度、尺寸變化率、翹曲,但任一實施例之剝離強度均為0.8kN/m。蝕刻後的尺寸變化率、加熱尺寸變化率均為0.1%以內,翹曲亦為2mm以下。也就是說,於可撓性覆銅積層板所要求之特性係可保持,且確認出在實用上並無問題。 In addition, the peel strength, dimensional change rate, and warpage of the flexible copper-clad laminate after this example were evaluated, but the peel strength was 0.8 kN / m in any of the examples. The dimensional change rate after heating and the dimensional change rate after heating are both within 0.1%, and the warpage is also 2 mm or less. That is, the characteristics required for the flexible copper-clad laminated board can be maintained, and it has been confirmed that there is no problem in practical use.

Claims (5)

一種可撓性覆銅積層板的製造方法,其係具有:使用一對的熱壓輥,而加熱壓接銅箔(A)及具備接著層作為與前述銅箔(A)之積層面的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接步驟;以及,其後,進一步進行加熱處理之再加熱步驟,其中,前述聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有玻璃轉移溫度260℃以上之熱塑性聚醯亞腔層(ii)作為接著層,前述加熱壓接步驟之層合溫度T1係前述熱塑性聚醯亞胺層(ii)之玻璃轉移溫度以上,於前述再加熱步驟中之加熱處理溫度T2係設為前述層合溫度T1以上,藉此使前述加熱壓接步驟後在銅箔(A)之厚度方向之由X線繞射所求得之(200)面的繞射強度(I)及由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之關係為I/Io>100。A method for manufacturing a flexible copper-clad laminated board, comprising: using a pair of hot-pressing rollers to heat and pressure-bond a copper foil (A); and providing an adhesive layer as a stacking layer with the copper foil (A). A step of heating and crimping the fluorene imine film or the polyfluorene imide laminate (B) with a metal layer; and thereafter, further performing a reheating step of heat treatment, wherein the foregoing fluorene film or the metal-clad layer The polyfluorene imide laminate (B) has a thermoplastic polyfluorene subcavity layer (ii) having a glass transition temperature of 260 ° C. or higher as a bonding layer, and the lamination temperature T1 of the aforementioned thermal compression bonding step is the aforementioned thermoplastic polyimide layer ( ii) above the glass transition temperature, the heat treatment temperature T2 in the aforementioned reheating step is set to be above the aforementioned lamination temperature T1, so that the thickness X of the copper foil (A) after the aforementioned heat and pressure bonding step is changed from X The relationship between the diffraction intensity (I) of the (200) plane obtained by the line diffraction and the diffraction intensity (Io) of the (200) plane obtained by the X-ray diffraction of fine powder copper is I / Io> 100 . 如申請專利範圍第1項所述之可撓性覆銅積層板的製造方法,其中,再加熱步驟之加熱處理係於真空或惰性氛圍下實施,加熱處理溫度T2係300℃以上,加熱時間為10秒以上。The method for manufacturing a flexible copper-clad laminated board according to item 1 of the scope of the patent application, wherein the heat treatment in the reheating step is performed under a vacuum or an inert atmosphere, and the heat treatment temperature T2 is 300 ° C or higher, and the heating time is More than 10 seconds. 如申請專利範圍第1或2項所述之可撓性覆銅積層板的製造方法,其中,聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有:具備熱膨脹係數未達17ppm/K之低熱膨脹性的聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii)之複數聚醯亞胺層。The method for manufacturing a flexible copper-clad laminated board according to item 1 or 2 of the patent application scope, wherein the polyimide film or the polyimide laminate (B) with a metal layer has: Polyimide layer (i) with low thermal expansion of 17 ppm / K and multiple polyimide layers of thermoplastic polyimide layer (ii). 如申請專利範圍第1或2項所述之可撓性覆銅積層板的製造方法,其中,銅箔(A)為厚度5至100μm之壓延銅箔。The method for manufacturing a flexible copper-clad laminated board according to item 1 or 2 of the scope of patent application, wherein the copper foil (A) is a rolled copper foil having a thickness of 5 to 100 μm. 如申請專利範圍第3項所述之可撓性覆銅積層板的製造方法,其中,銅箔(A)為厚度5至100μm之壓延銅箔。The method for manufacturing a flexible copper-clad laminated board according to item 3 of the scope of patent application, wherein the copper foil (A) is a rolled copper foil having a thickness of 5 to 100 μm.
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