TW201500181A - Method for producing flexible copper-clad laminated plate - Google Patents

Method for producing flexible copper-clad laminated plate Download PDF

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TW201500181A
TW201500181A TW103111412A TW103111412A TW201500181A TW 201500181 A TW201500181 A TW 201500181A TW 103111412 A TW103111412 A TW 103111412A TW 103111412 A TW103111412 A TW 103111412A TW 201500181 A TW201500181 A TW 201500181A
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copper foil
layer
copper
polyimine
temperature
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TW103111412A
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TWI635951B (en
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Yuji Matsushita
Masakazu Ii
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Nippon Steel & Sumikin Chem Co
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • C08G73/1082Partially aromatic polyimides wholly aromatic in the tetracarboxylic moiety
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/036Multilayers with layers of different types
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/12Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)

Abstract

This invention provides a flexible copper-clad laminated plate having excellent flexibility by an easy mean of using a pair of heat press rolls. The present invention provides a method for producing the flexible copper-covering laminated plate, which comprises a step of thermal compression bonding for thermally compression-bonding a copper foil (A) and a laminate (B) of polyimide films etc., with heating press rollers; and a step of reheating. The polyimide layers of the laminate (B) are composed of multiple polyimide layers having a thermoplastic polyimide layer (ii) as an adhesive layer. The laminating temperature of the step of thermal compression bonding T1 is the glass transition temperature of the thermoplastic polyimide layer (ii) or higher, and the heating temperature of the step of reheating T2 is set to be T1 or higher, whereby the diffraction intensity (I) of the (200) surface measured by X-ray diffraction along the thickness direction for the copper foil (A) after the step of thermal compression bonding, and the diffraction intensity (I0) of the (200) surface measured by X-ray for micro copper powders satisfy the formula: I/I0 >100.

Description

可撓性覆銅積層板的製造方法 Method for manufacturing flexible copper clad laminate

本發明係有關於用於可撓性線路基板之可撓性覆銅積層板的製造方法,該可撓性線路基板係適合於為了收納於行動電話及智慧型手機、平板PC等之框體的狹窄空間部分,而被彎折成折疊彎曲狀或如硬碟驅動器的讀寫排線般之以小曲率半徑連續地反覆撓曲之用途。另外,折疊彎曲係指為了收納於薄框體,賦予彎折點而彎曲的態樣,以下,於本說明書中,使FPC的上面側為略180℃反轉而成為下面側的方式彎折係稱為「折疊彎曲」。 The present invention relates to a method of manufacturing a flexible copper-clad laminate for use in a flexible circuit board, which is suitable for housing in a mobile phone, a smart phone, a tablet PC, or the like. The narrow space portion is bent into a folded curved shape or continuously reversely deflected with a small radius of curvature like a hard disk drive read/write cable. In addition, in the present invention, the upper side of the FPC is reversed by 180° C. and the lower side is bent to be placed in the thin frame. It is called "folding and bending".

近年來,隨著以行動電話、筆記型電腦、數位相機、遊戲機等為代表之電子裝置之小型化、薄型化、輕量化的急速進展,對於使用於此等裝置之材料,期待一種即便在小空間內亦可收納零件之高密度且高性能材料。即使於可撓性線路基板中,由於隨著智慧型手機及平板PC等之高性能小型電子機器的普及,零件收納的高密度化的進展,必須將可撓性線路基板收納在比目前更加狹窄的框體內。因此,即便從在屬於可撓性線路基板材料之可撓性 覆銅積層板的材料面來看,亦須要提升耐折疊彎折性及耐撓曲特性。 In recent years, with the rapid development of miniaturization, thinning, and light weight of electronic devices represented by mobile phones, notebook computers, digital cameras, game machines, and the like, it is expected that even a material is used for materials using such devices. High-density, high-performance materials that house parts in a small space. In the flexible circuit board, the high-density and small-sized electronic devices such as smart phones and tablet PCs are becoming more and more popular, and the density of components is increasing. Therefore, it is necessary to store the flexible circuit board more narrowly than the current one. Inside the box. Therefore, even from the flexibility of the material belonging to the flexible circuit substrate In view of the material surface of the copper clad laminate, it is also necessary to improve the folding resistance and flexural resistance.

對於該等課題,已提出使用於可撓性覆銅積層板之銅箔中,係藉由添加微量的銀或錫等在加熱處理時以銅箔之退火進行軟化,同時於某些特定的方向(200面)排整結晶方位之立方體集合組織發達之特殊壓延銅箔(參照專利文獻1)。藉此,於銅箔施加撓曲時的應力時,顯現在結晶內產生之轉移以及其移動不會蓄積於結晶粒界,可抑制朝表面方向移動致在結晶粒界的龜裂產生以及進展所致之破壞,並具有優異的撓曲特性。 For these problems, it has been proposed to use a copper foil for a flexible copper-clad laminate in which a small amount of silver or tin is added for softening by annealing of a copper foil during heat treatment, and in some specific directions. (200 faces) A special rolled copper foil in which a cube assembly of a crystal orientation is developed (see Patent Document 1). Therefore, when the copper foil is subjected to the stress at the time of the deflection, the transition occurring in the crystal and the movement thereof are not accumulated in the crystal grain boundary, and the occurrence of cracks in the crystal grain boundary and the progress in the grain boundary can be suppressed. Destruction and excellent flexural properties.

如此之壓延銅箔係於常溫無法顯現前述特性,而為使如此之立方體組織發達,必須以預定的熱處理退火。於該退火所需的熱量,例如,若為低溫,以150℃、60分鐘等之處理,若為高溫,以300℃以上1分鐘左右的時間結束。 Such a rolled copper foil cannot exhibit the aforementioned characteristics at normal temperature, and in order to develop such a cubic structure, it must be annealed by a predetermined heat treatment. The heat required for the annealing is, for example, a treatment at 150 ° C for 60 minutes, or a high temperature, and is completed at a temperature of about 300 ° C for about 1 minute.

一般而言,製造由聚醯亞胺及銅箔所構成之覆銅積層板的方法,已知有:於銅箔上塗布聚醯亞胺前驅體並進行乾燥、高溫熱處理,以得到單面覆銅積層板後,藉由以熱層合法壓接銅箔的步驟來製作的方法;預先準備於最外層含有熱塑性聚醯亞胺的聚醯亞胺薄膜,於其兩側以熱層合法壓接銅箔的方式。該熱層合方式係具有以使用一對對向之熱壓接輥之簡易的方式,其裝置導入亦較為容易之優點。然而,於此種手法,由於熱層合時對於銅箔的入熱量為數秒左右的短時間,故無法得到足以使壓延銅箔 之立方體組織發達的足夠熱量。 In general, a method for producing a copper clad laminate comprising a polyimide and a copper foil is known in which a polyimide film is coated on a copper foil and dried, and subjected to high-temperature heat treatment to obtain a single-sided coating. a method of preparing a copper foil by thermal lamination after a copper laminate; preparing a polyimide film containing a thermoplastic polyimide in the outermost layer, and crimping it on both sides by thermal layering The way of copper foil. This thermal lamination method has an advantage that it is easy to introduce the apparatus by using a pair of opposed hot-pressing rolls. However, in such a method, since the heat input to the copper foil during the thermal lamination is a short time of about several seconds, it is not possible to obtain a rolled copper foil. The cubes are developed with enough heat.

在此,為了提升銅箔的柔軟性,並抑制微龜裂或龜裂等之不良缺陷,已知有在藉由熱層合法壓接銅箔之後,進行退火處理之方法(參照專利文獻2)。然而,在此所示之退火處理的條件,係僅顯示於溫度、時間均廣泛的範圍,是否具體地以如何之退火條件來提升其特性尚不明確。此外,專利文獻2所示之退火處理的時間係設為2分鐘以上,故除了生產性不足外,就退火處理所得之效果而言,僅著眼於銅箔的彈性率,尚未言及於(200)面結晶配向等之立方體組織控制之觀點,對於更嚴苛的撓曲用途之發展,實在難謂可應付。 Here, in order to improve the flexibility of the copper foil and to suppress defects such as microcracks or cracks, a method of annealing the copper foil by thermal lamination is known (refer to Patent Document 2). . However, the conditions of the annealing treatment shown here are only shown in a wide range of temperatures and times, and it is not clear whether or not the characteristics are specifically improved by how to anneal. Further, since the annealing treatment time shown in Patent Document 2 is set to be 2 minutes or longer, in addition to the insufficient productivity, the effect of the annealing treatment is focused on only the elastic modulus of the copper foil, and it has not been mentioned (200). The idea of cubic organization control such as surface crystallization alignment is difficult to cope with for the development of more severe flexing applications.

另一方面,與以熱輥進行熱層合方式相異的可撓性覆銅積層板的製造方法,已揭示使用有複數輥及鋼帶而實施熱層合的方式,亦稱為雙帶(double belt)方式(專利文獻3參照)。該方式由於易增加輥的支數等,故可確保層合時的充足時間,但有在設備費用龐大等的問題。 On the other hand, a method of manufacturing a flexible copper clad laminate which is different from the thermal lamination method by a hot roll has been disclosed as a method of performing thermal lamination using a plurality of rolls and a steel strip, which is also called a double belt ( Double belt) (refer to Patent Document 3). In this method, since the number of rolls and the like are easily increased, sufficient time for lamination can be ensured, but there are problems such as a large equipment cost.

[先行技術文獻] [Advanced technical literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利第4285526號公報 [Patent Document 1] Japanese Patent No. 4285526

[專利文獻2]日本特開2013-21281號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2013-21281

[專利文獻3]日本特開2011-270035號公報 [Patent Document 3] Japanese Laid-Open Patent Publication No. 2011-270035

本發明係有鑑於上述課題而成者。其目的在於以耐熱性及尺寸安定性優異的聚醯亞胺作為絶緣層之可撓性覆銅積層板的製造中,以一對之熱壓輥之簡易的手法,提供撓曲特性亦優異的可撓性覆銅積層板。 The present invention has been made in view of the above problems. The purpose of the invention is to provide a flexible copper-clad laminate having a heat-resistant and dimensionally stable polyimide as an insulating layer, and to provide excellent flexural properties by a pair of hot-pressing rolls. Flexible copper clad laminate.

為了解決上述課題,本發明人等研究的結果,發現對於壓接銅箔及聚醯亞胺之加熱壓接步驟之溫度T1、以及進行後加熱之再加熱步驟之溫度T2,使與銅箔相接之熱塑性聚醯亞胺層之玻璃轉移溫度(Tg)以上設為T1,且設為T1<T2時可顯現足夠的撓曲特性,而完成本發明。 In order to solve the above problems, the inventors of the present invention have found that the temperature T1 of the hot-pressing step of the pressure-bonded copper foil and the polyimide, and the temperature T2 of the reheating step of the post-heating are made to be in contact with the copper foil. The glass transition temperature (Tg) of the thermoplastic polyimide layer is set to T1 or more, and when T1 < T2, sufficient flexural characteristics can be exhibited, and the present invention has been completed.

亦即,本發明之撓性覆銅積層板的製造方法,其係具有:使用一對之熱壓輥,加熱壓接銅箔(A)及具備接著層作為與前述銅箔(A)之積層面的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接步驟;以及,之後,進一步進行加熱處理之再加熱步驟,其中,前述聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層(ii)作為接著層,前述加熱壓接步驟之層合溫度T1係前述熱塑性聚醯亞胺層(ii)之玻璃轉移溫度以上,於前述再加熱步驟中之加熱處理溫度T2係設為前述層合溫度T1以上,藉此使前述加熱壓接步驟後的銅箔(A)在厚度方向之由X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io) 之關係為I/Io>100。 That is, the method for producing a flexible copper-clad laminate according to the present invention comprises: heating a pressure-bonded copper foil (A) using a pair of hot press rolls, and providing an adhesive layer as a laminate with the copper foil (A) a step of heating and crimping the surface of the polyimide film or the metal layer of the polyimide layer (B); and, after that, further performing a heat treatment step, wherein the polyimide film or the The polytheneimide laminate (B) of the metal layer has a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or higher as an adhesive layer, and the lamination temperature T1 of the above-mentioned thermocompression bonding step is the aforementioned thermoplastic polyimide. The glass transition temperature of the layer (ii) is equal to or higher than the heat treatment temperature T2 in the reheating step, and the copper foil (A) after the heating and pressure bonding step is in the thickness direction. The diffraction intensity (I) of the (200) plane obtained by X-ray diffraction, and the (200) plane diffraction intensity (Io) obtained by X-ray diffraction of fine powder copper The relationship is I/Io>100.

於本發明之製造方法中,再加熱步驟之加熱處理較佳係於真空或惰性(非活性)氛圍下實施,加熱處理溫度T2係300℃以上,加熱時間為10秒以上。 In the production method of the present invention, the heat treatment in the reheating step is preferably carried out under a vacuum or an inert (inactive) atmosphere, and the heat treatment temperature T2 is 300 ° C or higher, and the heating time is 10 seconds or longer.

此外,聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)較佳為具有已具備熱膨脹係數未達17ppm/K之低熱膨脹性的聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii)之複數聚醯亞胺層。 Further, the polyimide film or the metal layer-containing polyimine laminate (B) preferably has a polyimine layer (i) and a thermoplastic polymer which have a low thermal expansion coefficient of a thermal expansion coefficient of less than 17 ppm/K. a plurality of polyimine layers of the quinone imine layer (ii).

進一步地,就銅箔(A)而言,使用厚度5至100μm之壓延銅箔者係本發明之較佳態樣。 Further, in the case of the copper foil (A), a rolled copper foil having a thickness of 5 to 100 μm is used in the preferred embodiment of the present invention.

依據本發明之可撓性覆銅積層板的製造方法,可藉由再加熱步驟(退火處理)減低銅箔的彈性率,同時進行(200)面的特定配向,使立方體組織發達,結果,可得到配線基板所要求的高耐彎折性,故特別適合使用於智慧型手機等之小型液晶周圍之彎折部分等之耐彎折性及硬碟的讀寫排線等要求連續撓曲之電子裝置。 According to the method for producing a flexible copper-clad laminate according to the present invention, the elastic modulus of the copper foil can be reduced by the reheating step (annealing treatment), and the specific alignment of the (200) plane can be performed to develop the cubic structure. As a result, Since the high bending resistance required for the wiring board is obtained, it is particularly suitable for bending resistance such as a bent portion around a small liquid crystal such as a smart phone, and an electronic circuit requiring continuous deflection such as a hard disk read/write cable. Device.

以下,詳細說明本發明。 Hereinafter, the present invention will be described in detail.

本發明之可撓性覆銅積層板的製造方法,係加熱壓接銅箔(A)、及具備作為與該銅箔(A)之積層面之接著層的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B),該加熱壓接 中係使用一對之熱壓輥。 The method for producing a flexible copper-clad laminate according to the present invention is a method of heating a pressure-bonded copper foil (A) and a polyimide film or a metal layer provided with an adhesive layer as a layer of the copper foil (A). Polyimide laminate (B), the heating crimp The middle system uses a pair of hot press rolls.

熱壓輥可舉例如金屬輥或其表面被覆樹脂之樹脂被覆金屬輥等,但是,由於銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之積層(層合)較佳係在比較高的溫度進行,故使用於輥表面之材質的耐熱性、及/或將源自輥內部之加熱傳熱至表面,係為必要者,從如此之觀點來看,較佳為金屬輥,其表面的表面粗糙度(Ra)為0.01至5μm,特佳為0.1至3μm之粗面化狀態。 The hot press roll may be, for example, a metal roll or a resin-coated metal roll coated with a resin on the surface thereof, but a laminate of a copper foil (A) and a polyimide film or a metal layer-attached polyimide layer (B). (Lamination) is preferably carried out at a relatively high temperature, so that the heat resistance of the material used for the surface of the roll and/or the heat transfer from the inside of the roll to the surface is necessary, from this point of view. It is preferable that the metal roll has a surface roughness (Ra) of from 0.01 to 5 μm, particularly preferably from 0.1 to 3 μm.

本發明中,於上述一對之熱壓輥間係導入並加熱壓接銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)。在本說明書中,該步驟稱為加熱壓接步驟,而與銅箔(A)加熱壓接的對象物係聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B),且貼合銅箔(A)及聚醯亞胺薄膜之接著層,或貼合銅箔(A)及在附金屬層之聚醯亞胺積層體(B)中之接著層。 In the present invention, the pressure-bonded copper foil (A) and the polyimide film or the metal layer-attached polyimide laminate (B) are introduced and heated between the pair of hot press rolls. In the present specification, this step is referred to as a heating and crimping step, and the object to be heated and pressure-bonded to the copper foil (A) is a polyimide film or a metal layer-containing polyimide layer (B), and is attached. An adhesive layer of a copper foil (A) and a polyimide film, or an adhesive layer of a copper foil (A) and a polyimide layer (B) attached to the metal layer.

其中,聚醯亞胺薄膜(B)係只要於與前述銅箔(A)之積層面具有接著層即可,如此之薄膜,係除了玻璃轉移溫度260℃以上單層之熱塑性聚醯亞胺薄膜外,可舉例如非熱塑性聚醯亞胺層之單面或是雙面具有玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層之複數聚醯亞胺層所構成之聚醯亞胺薄膜。上述聚醯亞胺薄膜(B)除了可以公知之方法製造準備外,亦可使用市售的聚醯亞胺薄膜。市售的聚醯亞胺薄膜可舉例TorayDupont製的Kapton EN等。此外,在市售的低熱膨脹性聚醯亞胺薄膜亦可塗布得到熱塑 性聚醯亞胺層(ii)之聚醯亞胺前驅體的樹脂溶液,並使之硬化。 The polyimine film (B) is only required to have an adhesive layer on the layer of the copper foil (A), and the film is a thermoplastic polyimide film having a glass transition temperature of 260 ° C or more. Further, for example, a polyimide film comprising a single layer of a non-thermoplastic polyimide layer or a plurality of polyimide layers having a thermoplastic polyimide layer having a glass transition temperature of 260 ° C or higher may be used. The polyimine film (B) may be prepared by a known method, and a commercially available polyimide film may also be used. A commercially available polyimide film can be exemplified by Kapton EN manufactured by Toray Dupont et al. In addition, the commercially available low thermal expansion polyimide film can also be coated to obtain thermoplastic A resin solution of the polyimine precursor of the polyimine layer (ii) and hardened.

此外,附金屬層之聚醯亞胺積層體(B)係可舉例如在銅箔等之金屬箔上設有單層或是複數層之聚醯亞胺層者。聚醯亞胺為單層時,該聚醯亞胺層本身即為接著層,故聚醯亞胺須由玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層(ii)所成,聚醯亞胺為複數層時,至少與前述銅箔(A)積層之面為熱塑性聚醯亞胺層(ii)即可。如此之附金屬層之聚醯亞胺積層體(B)之構成可例示金屬層/熱塑性聚醯亞胺層(ii)/低熱膨脹性聚醯亞胺層(i)/熱塑性聚醯亞胺層(ii),或金屬層/低熱膨脹性聚醯亞胺層(i)/熱塑性聚醯亞胺層(ii)之構成。藉由使附金屬層之聚醯亞胺積層體(B)中之聚醯亞胺為複數層之構成,可滿足銅箔與聚醯亞胺之接著強度或尺寸安定性、銲料耐熱性等之作為可撓性覆銅積層板所要求之諸多特性。另外,構成金屬層之金屬箔係除了銅箔以外,可舉例如鋁箔、不銹鋼箔。 Further, the polyimine laminate (B) with a metal layer may be, for example, a single layer or a plurality of layers of a polyimide layer provided on a metal foil such as a copper foil. When the polyimine is a single layer, the polyimide layer itself is an adhesive layer, so the polyimide needs to be formed from a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or higher. When the amine is a plurality of layers, at least the surface of the copper foil (A) may be a thermoplastic polyimide layer (ii). The composition of the metal layer-containing polyimine laminate (B) can be exemplified by a metal layer/thermoplastic polyimide layer (ii)/low thermal expansion polyimine layer (i)/thermoplastic polyimide layer (ii), or a composition of the metal layer/low thermal expansion polyimine layer (i) / thermoplastic polyimide layer (ii). By forming the polyimine in the polyethylenimine laminate (B) with a metal layer as a plurality of layers, it is possible to satisfy the bonding strength, dimensional stability, solder heat resistance, etc. of the copper foil and the polyimide. As a feature required for flexible copper clad laminates. Further, the metal foil constituting the metal layer may be, for example, an aluminum foil or a stainless steel foil in addition to the copper foil.

上述附金屬層之聚醯亞胺積層體(B),更具體而言,可準備單面可撓性覆銅積層板。單面可撓性覆銅積層板可在長條狀的銅箔上使前述低熱膨脹性聚醯亞胺層(i)或得到熱塑性聚醯亞胺層(ii)之聚醯亞胺前驅體的樹脂溶液逐次塗布乾燥,並使之硬化(醯亞胺化)而得。本發明之1項特徵係可以一對之熱壓輥之簡易方法連續且有效率地製造可撓性覆銅積層板,由此觀點,形成附金屬層之聚醯亞胺積層體(B)之銅箔係可使用長條狀者。 More specifically, the polyethylenimine laminate (B) with the metal layer described above can be provided with a single-sided flexible copper clad laminate. The single-sided flexible copper-clad laminate can be used to form the low thermal expansion polyimine layer (i) or the polyimide polyimide precursor of the thermoplastic polyimide layer (ii) on the elongated copper foil. The resin solution is successively coated and dried, and is obtained by hardening (醯imination). One feature of the present invention is that a flexible copper-clad laminate can be continuously and efficiently produced by a simple method of a pair of hot-pressing rolls, from the viewpoint of forming a metal-coated polyimine laminate (B). A long strip can be used for the copper foil.

如此形態之銅箔係由銅箔製造商販售已卷取成輥狀者,可以使用該者。此外,依據本發明,由所製造之可撓性覆銅積層板之銅箔以線路加工所形成之線路,可最大限度顯現銅箔具有之撓曲性能,由此觀點,即便最先作為單面可撓性覆銅積層板時所使用之銅箔,較佳為使用其後以一對之熱壓輥加熱壓接之銅箔(A)相同之壓延銅箔。 The copper foil of this form is sold by a copper foil manufacturer and has been wound into a roll, and this can be used. Further, according to the present invention, the copper foil of the flexible copper-clad laminate produced can be formed into a line formed by wire processing, and the deflection property of the copper foil can be maximized, and thus, even if it is first used as a single side The copper foil used in the case of the flexible copper clad laminate is preferably a rolled copper foil which is the same as the copper foil (A) which is heat-pressed by a pair of hot press rolls.

構成聚醯亞胺層之低熱膨脹性聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii),係可使賦予該等特性之其前驅體的聚醯胺酸進行醯亞胺化而得,但該等聚醯胺酸一般而言,可配合公知之二胺與酸二酐所求得之聚醯亞胺的特性而適當選擇,再使該等於有機溶劑中進行合成而得。所聚合之樹脂黏度係例如較佳為500cps以上35,000cps以下的範圍內。 The low thermal expansion polyimine layer (i) and the thermoplastic polyimine layer (ii) constituting the polyimide layer are capable of ruthenium imidization of the polyamine which imparts the precursor of the properties. However, in general, the polyamic acid can be appropriately selected by blending the properties of the polyimine obtained by a known diamine and acid dianhydride, and then synthesizing it in an organic solvent. The resin viscosity to be polymerized is, for example, preferably in the range of 500 cps or more and 35,000 cps or less.

使用來作為聚醯亞胺之原料的二胺係例如可舉例4,6-二甲基-m-苯基二胺、2,5-二甲基-p-苯基二胺、2,4-二胺基均三甲苯、4,4'-亞甲基二-o-甲苯胺、4,4'-亞甲基二-2,6-二甲苯胺、4,4'-亞甲基-2,6-二乙基苯胺、2,4-甲苯二胺、m-苯基二胺、p-苯基二胺、4,4'-二胺基二苯基丙烷、3,3'-二胺基二苯基丙烷、4,4'-二胺基二苯基乙烷、3,3'-二胺基二苯基乙烷、4,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基甲烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、4,4'-二胺基二苯基硫醚、3,3'-二胺基二苯基硫醚、4,4'-二胺基二苯基碸、3,3'-二胺基二苯基碸、4,4'-二胺基二苯基醚、3,3-二胺基二苯基醚、1,3-雙(3-胺基苯氧基)苯、1,3-雙(4-胺基 苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、聯苯胺、3,3'-二胺基聯苯、3,3'-二甲基-4,4'-二胺基聯苯、3,3'-二甲氧基聯苯胺、4,4'-二胺基-p-三聯苯基、3,3'-二胺基-p-三聯苯基、雙(p-胺基環己基)甲烷、雙(p-β-胺基-t-丁基苯基)醚、雙(p-β-甲基-δ-胺基戊基)苯、p-雙(2-甲基-4-胺基戊基)苯、p-雙(1,1-二甲基-5-胺基戊基)苯、1,5-二胺基萘、2,6-二胺基萘、2,4-雙(β-胺基-t-丁基)甲苯、2,4-二胺基甲苯、m-二甲苯-2,5-二胺、p-二甲苯-2,5-二胺、m-伸二甲苯基二胺、p-伸二甲苯基二胺、2,6-二胺基吡啶、2,5-二胺基吡啶、2,5-二胺基-1,3,4-二唑、哌、2,2'-二甲基-4,4'-二胺基聯苯、3,7-二胺基二苯并呋喃、1,5-二胺基茀、二苯并-p-二烷-2,7-二胺、4,4'-二胺基苄等。 The diamine used as a raw material of the polyimide may, for example, be 4,6-dimethyl-m-phenyldiamine, 2,5-dimethyl-p-phenyldiamine, 2,4- Diamine mesitylene, 4,4'-methylenebis-o-toluidine, 4,4'-methylenebis-2,6-dimethylaniline, 4,4'-methylene-2 ,6-diethylaniline, 2,4-toluenediamine, m-phenyldiamine, p-phenyldiamine, 4,4'-diaminodiphenylpropane, 3,3'-diamine Diphenylpropane, 4,4'-diaminodiphenylethane, 3,3'-diaminodiphenylethane, 4,4'-diaminodiphenylmethane, 3,3 '-Diaminodiphenylmethane, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, 4,4'-diaminodiphenyl sulfide, 3,3' -diaminodiphenyl sulfide, 4,4'-diaminodiphenylanthracene, 3,3'-diaminodiphenylanthracene, 4,4'-diaminodiphenyl ether, 3 , 3-diaminodiphenyl ether, 1,3-bis(3-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene, 1,4-bis(4 -aminophenoxy)benzene, benzidine, 3,3'-diaminobiphenyl, 3,3'-dimethyl-4,4'-diaminobiphenyl, 3,3'-dimethyl Oxybenzidine, 4,4'-diamino-p-terphenyl, 3,3'-diamino-p-terphenyl, bis(p-amine Cyclohexyl)methane, bis(p-β-amino-t-butylphenyl)ether, bis(p-β-methyl-δ-aminopentyl)benzene, p-bis(2-methyl- 4-aminopentyl)benzene, p-bis(1,1-dimethyl-5-aminopentyl)benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2, 4-bis(β-amino-t-butyl)toluene, 2,4-diaminotoluene, m-xylene-2,5-diamine, p-xylene-2,5-diamine, m - xylylene diamine, p-extended xylylene diamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1,3,4- Diazole, piperazine , 2,2'-dimethyl-4,4'-diaminobiphenyl, 3,7-diaminodibenzofuran, 1,5-diaminopurine, dibenzo-p-di Alkane-2,7-diamine, 4,4'-diaminobenzyl, and the like.

此外,使用來作為聚醯亞胺之原料的酸酐例如可舉例1,2,4,5-苯四甲酸二酐、3,3',4,4'-二苯基酮四羧酸二酐、2,2',3,3'-二苯基酮四羧酸二酐、2,3,3',4'-二苯基酮四羧酸二酐、萘-1,2,5,6-四羧酸二酐、萘-1,2,4,5-四羧酸二酐、萘-1,4,5,8-四羧酸二酐、萘-1,2,6,7-四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-1,2,5,6-四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-2,3,6,7-四羧酸二酐、2,6-二氯萘-1,4,5,8-四羧酸二酐、2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-四氯萘-1,4,5,8-四羧酸二酐、1,4,5,8-四氯萘-2,3,6,7-四羧酸二酐、3,3',4,4'-聯苯四羧酸二酐、2,2',3,3'-聯苯四羧酸二酐、2,3,3',4'-聯苯四羧酸二酐、3,3",4,4"-p-三聯苯基四羧酸二酐、2,2",3,3"-p-三聯苯基四羧酸二酐、2,3,3",4"-p- 三聯苯基四羧酸二酐、2,2-雙(2,3-二羧苯基)-丙烷二酐、2,2-雙(3,4-二羧苯基)-丙烷二酐、雙(2,3-二羧苯基)醚二酐、雙(2,3-二羧苯基)甲烷二酐、雙(3.4-二羧苯基)甲烷二酐、雙(2,3-二羧苯基)碸二酐、雙(3,4-二羧苯基)碸二酐、1,1-雙(2,3-二羧苯基)乙烷二酐、1,1-雙(3,4-二羧苯基)乙烷二酐、苝-2,3,8,9-四羧酸二酐、苝-3,4,9,10-四羧酸二酐、苝-4,5,10,11-四羧酸二酐、苝-5,6,11,12-四羧酸二酐、菲-1,2,7,8-四羧酸二酐、菲-1,2,6,7-四羧酸二酐、菲-1,2,9,10-四羧酸二酐、環戊烷-1,2,3,4-四羧酸二酐、吡-2,3,5,6-四羧酸二酐、吡咯啶-2,3,4,5-四羧酸二酐、噻吩-,3,4,5-四羧酸二酐、4,4'-氧二酞酸二酐、2,3,6,7-萘四羧酸二酐等。 Further, as the acid anhydride used as a raw material of the polyimine, for example, 1,2,4,5-benzenetetracarboxylic dianhydride, 3,3',4,4'-diphenyl ketone tetracarboxylic dianhydride, 2,2',3,3'-diphenyl ketone tetracarboxylic dianhydride, 2,3,3',4'-diphenyl ketone tetracarboxylic dianhydride, naphthalene-1,2,5,6- Tetracarboxylic dianhydride, naphthalene-1,2,4,5-tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, naphthalene-1,2,6,7-tetracarboxylic acid Acid dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5,6-tetracarboxylic dianhydride, 4,8-dimethyl- 1,2,3,5,6,7-hexahydronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,6-dichloronaphthalene-1,4,5,8-tetracarboxylic acid Anhydride, 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 1,4,5,8-tetrachloronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, 2,2',3 , 3'-biphenyltetracarboxylic dianhydride, 2,3,3',4'-biphenyltetracarboxylic dianhydride, 3,3",4,4"-p-triphenyltetracarboxylic dianhydride , 2,2",3,3"-p-triphenyltetracarboxylic dianhydride, 2,3,3",4"-p-triphenyltetracarboxylic dianhydride, 2,2-dual (2 , 3-dicarboxyphenyl)-propane dianhydride, 2,2-bis(3,4-dicarboxyphenyl)-propane dianhydride, bis(2,3-dicarboxyphenyl)ether dianhydride, double ( 2,3-dicarboxyphenyl) Dihydride, bis(3.4-dicarboxyphenyl)methane dianhydride, bis(2,3-dicarboxyphenyl)ruthenium anhydride, bis(3,4-dicarboxyphenyl)ruthenium anhydride, 1,1- Bis(2,3-dicarboxyphenyl)ethane dianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethane dianhydride, hydrazine-2,3,8,9-tetracarboxylic acid Anhydride, indole-3,4,9,10-tetracarboxylic dianhydride, indole-4,5,10,11-tetracarboxylic dianhydride, indole-5,6,11,12-tetracarboxylic dianhydride, Phenanthrene-1,2,7,8-tetracarboxylic dianhydride, phenanthrene-1,2,6,7-tetracarboxylic dianhydride, phenanthrene-1,2,9,10-tetracarboxylic dianhydride, cyclopentane Alkane-1,2,3,4-tetracarboxylic dianhydride, pyridyl -2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-, 3,4,5-tetracarboxylic dianhydride, 4,4 '-Oxydiphthalic acid dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, and the like.

上述二胺及酸酐係亦可分別僅使用1種或併用2種以上。此外,於聚合所使用之溶劑可舉例二甲基乙醯胺、N-甲基吡咯啶酮、2-丁酮、二乙二醇二甲醚、二甲苯等,可使用1種或併用2種以上。 The diamine and the acid anhydride may be used alone or in combination of two or more. In addition, examples of the solvent used for the polymerization include dimethylacetamide, N-methylpyrrolidone, 2-butanone, diethylene glycol dimethyl ether, xylene, etc., and one type or two types may be used in combination. the above.

為使聚醯亞胺層為熱膨脹係數未達17×10-6/K之低熱膨脹性的聚醯亞胺層(i),係作為原料之酸酐成分亦可使用1,2,4,5-苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐、二胺成分可使用2,2'-二甲基-4,4'-二胺基聯苯、2-甲氧基-4、4'-二胺基苯并乙醯苯胺,特佳係可以1,2,4,5-苯四甲酸二酐以及2,2'-二甲基-4,4'-二胺基聯苯作為各原料成分之主成分。 In order to make the polyimine layer a low thermal expansion polyimine layer (i) having a thermal expansion coefficient of less than 17 × 10 -6 /K, the anhydride component as a raw material may also be used 1, 2, 4, 5- For the pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, diamine component, 2,2'-dimethyl-4,4'-diaminobiphenyl, 2 -Methoxy-4,4'-diaminobenzoacetanilide, especially good can be 1,2,4,5-benzenetetracarboxylic dianhydride and 2,2'-dimethyl-4,4' - Diaminobiphenyl is a main component of each raw material component.

此外,為使聚醯亞胺層為玻璃轉移溫度為260℃以上之熱塑性聚醯亞胺層(ii),係作為原料的酸酐成 分亦可使用1,2,4,5-苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐、3,3',4,4'-二苯基酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、二胺成分可使用2,2'-雙[4-(4-胺基苯氧基)苯基]丙烷、4,4'-二胺基二苯基醚、1,3-雙(4-胺基苯氧基)苯,特佳係1,2,4,5-苯四甲酸二酐以及2,2'-雙[4-(4-胺基苯氧基)苯基]丙烷作為各原料成分之主成分。 Further, in order to make the polyimide layer of the thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or higher, the anhydride is used as a raw material. 1,2,4,5-benzenetetracarboxylic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-diphenyl ketone can also be used. 2,2'-bis[4-(4-aminophenoxy)benzene can be used as the tetracarboxylic dianhydride, 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride or diamine component. Propane, 4,4'-diaminodiphenyl ether, 1,3-bis(4-aminophenoxy)benzene, especially good 1,2,4,5-benzenetetracarboxylic dianhydride 2,2'-bis[4-(4-aminophenoxy)phenyl]propane is a main component of each raw material component.

本發明中,無論是在使用聚醯亞胺薄膜時,或使用附金屬層之聚醯亞胺積層體時,與銅箔(A)積層之面均必須為接著層。接著層係由熱塑性聚醯亞胺層(ii)所構成,但其玻璃轉移溫度係260℃以上,較佳為280℃至320℃之範圍。熱塑性聚醯亞胺層(ii)之玻璃轉移溫度為此範圍時,成為可將可撓性覆銅積層板加工成可撓性線路基板時所要求的銅箔與聚醯亞胺面之間的接著強度及尺寸安定性、零件封裝時的銲料接合所要求的銲料耐熱性優異者。 In the present invention, when a polyimide film is used or a polyimide layer with a metal layer is used, the surface of the copper foil (A) layer must be an adhesive layer. The layer is then composed of a thermoplastic polyimide layer (ii), but the glass transition temperature is 260 ° C or higher, preferably 280 ° C to 320 ° C. When the glass transition temperature of the thermoplastic polyimide layer (ii) is within this range, it is required between the copper foil and the polyimide surface which can be obtained when the flexible copper-clad laminate is processed into a flexible wiring substrate. The strength and dimensional stability are excellent, and the solder heat resistance required for solder bonding at the time of component packaging is excellent.

另一方面,低熱膨脹性聚醯亞胺層(i)係為使聚醯亞胺層全體的熱膨脹係數成為接近銅箔(A)之熱膨脹係數之12至23ppm/K,較佳係為未達17ppm/K之熱膨脹係數,更佳為5至10ppm/K之範圍。藉此,可使得聚醯亞胺層全體之熱膨脹係數與銅箔(A)之熱膨脹係數吻合,可容易抑制撓性覆銅積層體的翹曲、及蝕刻後加熱後的尺寸變化率。 On the other hand, the low thermal expansion polyimine layer (i) is such that the thermal expansion coefficient of the entire polyimide layer is close to 12 to 23 ppm/K of the thermal expansion coefficient of the copper foil (A), preferably not The coefficient of thermal expansion of 17 ppm/K is more preferably in the range of 5 to 10 ppm/K. Thereby, the thermal expansion coefficient of the entire polyimide layer can be made to match the thermal expansion coefficient of the copper foil (A), and the warpage of the flexible copper-clad laminate and the dimensional change rate after heating after etching can be easily suppressed.

本發明之可撓性覆銅積層板的製造所使用之銅箔(A)較佳為使用壓延銅箔。壓延銅箔可舉例熱壓接以及後步驟之退火時以進行(200)面的結晶配向的方式添加Ag 及Sn作為添加元素之銅合金箔。公知者可舉例JX日鑛金屬製的HA銅箔及日立電線製的HPF箔。銅箔(A)之厚度無特別限定,但一般而言以5至100μm之範圍為有利,較佳為7至50μm之範圍,從緩和撓曲時附加於銅箔的應力的觀點來看,更佳為9至18μm之範圍。 The copper foil (A) used for the production of the flexible copper clad laminate of the present invention is preferably a rolled copper foil. The rolled copper foil can be exemplified by hot press bonding and annealing in the subsequent step to add Ag in a crystal orientation of the (200) plane. And Sn as a copper alloy foil of an additive element. A well-known person can be exemplified by HA copper foil made of JX Nippon Mining Metal and HPF foil made of Hitachi wire. The thickness of the copper foil (A) is not particularly limited, but is generally in the range of 5 to 100 μm, preferably in the range of 7 to 50 μm, from the viewpoint of alleviating the stress attached to the copper foil during flexing. Preferably, it is in the range of 9 to 18 μm.

其次,說明有關於本發明中之銅箔(A)及聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接條件。層合溫度T1,亦即於加熱壓接步驟中之熱壓輥之溫度,由銅箔(A)及接著層之聚醯亞胺之接著性的觀點來看,必須為熱塑性聚醯亞胺層(ii)之聚醯亞胺之玻璃轉移溫度以上,較佳可為300至400℃。此外,期望在加熱輥間之線壓力為50至500Kg/cm且輥通過時間為2至5秒之條件下加熱壓接。層合的氛圍可舉例大氣氛圍、惰性氛圍,但由防止銅箔氧化變色的觀點來看,期望為惰性氛圍。在此所謂惰性氛圍係與非活性氛圍同義,為被氮或氬等之惰性氣體取代且實質上不含氧之狀態。 Next, the heating and crimping conditions of the copper foil (A) and the polyimide film or the metal layer-containing polyimine laminate (B) in the present invention will be described. The lamination temperature T1, that is, the temperature of the hot press roll in the heating and crimping step, must be a thermoplastic polyimide layer from the viewpoint of the adhesion of the copper foil (A) and the polyimine of the adhesive layer. (ii) The glass transition temperature of the polyimine is preferably from 300 to 400 °C. Further, it is desirable to heat the crimping under the condition that the line pressure between the heating rolls is 50 to 500 kg/cm and the roll passing time is 2 to 5 seconds. The laminated atmosphere can be exemplified by an atmospheric atmosphere and an inert atmosphere, but from the viewpoint of preventing oxidative discoloration of the copper foil, an inert atmosphere is desired. The inert atmosphere herein is synonymous with an inert atmosphere and is replaced by an inert gas such as nitrogen or argon and is substantially free of oxygen.

在此詳細說明有關以銅箔(A)之熱處理所進行之(200)面結晶配向。一般而言前述之銅箔係藉由熱處理進行軟化、降低彈性率且變得柔軟的同時,(200)面優先進行配向且使得立方體組織發達。就(200)面的結晶配向而言,可在半軟化溫度以上之溫度以預定的時間處理來進行,但必須至少在300℃以上之溫度10秒至60秒。如本發明般,在藉一對之熱壓輥加熱壓接之方法中,由確保其生產性的觀點來看,藉由輥之壓接可在10秒以內瞬間實施,故 加熱壓接步驟之後必須與再加熱步驟之退火步驟組合。 Here, the (200) plane crystal alignment by the heat treatment of the copper foil (A) will be described in detail. In general, the aforementioned copper foil is softened by heat treatment, and the modulus of elasticity is lowered and softened. The (200) plane is preferentially aligned and the cubic structure is developed. The crystal orientation of the (200) plane can be carried out at a temperature above the semi-softening temperature for a predetermined period of time, but must be at least at a temperature of 300 ° C or higher for 10 seconds to 60 seconds. According to the present invention, in the method of heating and crimping by a pair of hot press rolls, from the viewpoint of ensuring the productivity thereof, the press bonding by the rolls can be carried out instantaneously within 10 seconds, so that The heating and crimping step must be combined with the annealing step of the reheating step.

在此,再加熱步驟(退火處理)必須在層合溫度T1以上之溫度進行熱處理。若為層合溫度T1以下的溫度,一度於加熱壓接步驟中部分地經再結晶化之銅箔的結晶組織無法再度結晶成長,而無法以(200)面結晶配向充分進行立方體組織。也就是說,為了要再進一步進行以加熱壓接步驟之層合進行之部分再結晶,將再加熱步驟之熱處理溫度T2設定為層合溫度T1以上係非常重要。此時,後步驟之再加熱步驟之溫度為300℃以上時以10秒至60秒左右的處理時間即足夠。另一方面,設定超過400℃時會產生聚醯亞胺的耐熱劣化及因加熱所致翹曲等之問題,故較佳係設定為400℃以下。 Here, the reheating step (annealing treatment) must be performed at a temperature higher than the lamination temperature T1. When the temperature is equal to or lower than the lamination temperature T1, the crystal structure of the copper foil which is partially recrystallized in the heating and pressure bonding step cannot be crystallized again, and the cubic structure cannot be sufficiently performed in the (200) plane crystal alignment. That is, in order to further carry out partial recrystallization by lamination in the heating and pressure bonding step, it is important to set the heat treatment temperature T2 of the reheating step to the lamination temperature T1 or more. At this time, the treatment time of about 10 seconds to 60 seconds is sufficient when the temperature of the reheating step of the subsequent step is 300 ° C or more. On the other hand, when the temperature exceeds 400 ° C, problems such as heat deterioration of the polyimide and warpage due to heating are caused, and therefore it is preferably set to 400 ° C or lower.

經過如此之再加熱步驟,可使藉由前述加熱壓接步驟後的銅箔(A)在厚度方向之X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之關係成為I/Io>100。在此,I值以及Io值可藉由X線繞射法而測定,銅箔的厚度方向之X線繞射係用以確認於銅箔的表面(為壓延銅箔時係壓延面)的配向性,(200)面的強度(I)係表示以X線繞射所求得之(200)面的強度積分值。此外,強度(Io)係表示微粉末銅(關東化學社製銅粉末試藥I級,325網目,純度99.99%以上)之(200)面的強度積分值。 Through such a reheating step, the diffraction intensity (I) of the (200) plane obtained by the X-ray diffraction of the copper foil (A) after the heating and pressing step in the thickness direction can be obtained, and The relationship between the diffraction intensity (Io) of the (200) plane obtained by the X-ray diffraction of the fine powder copper becomes I/Io>100. Here, the I value and the Io value can be measured by the X-ray diffraction method, and the X-ray diffraction system in the thickness direction of the copper foil is used to confirm the alignment of the surface of the copper foil (the rolling surface when rolling the copper foil) The intensity (I) of the (200) plane indicates the intensity integral value of the (200) plane obtained by X-ray diffraction. Further, the strength (Io) is an intensity integral value of the (200) plane of the fine powder copper (copper powder of the Kanto Chemical Co., Ltd. grade I, 325 mesh, purity: 99.99% or more).

再加熱步驟之退火方法並無限制,但考量到將連續搬送之聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體 (B)亦或銅箔(A)置於均一的溫度環境下,較佳為使步驟之一區塊設為爐型室(booth),以熱風進行加熱。此外,為防止銅箔表面的變質等之影響,熱風較佳為加熱氮氣。以該氮加熱,要更提高溫度條件,由於仍有上限,故可附加其他的加熱手段。較佳的加熱手段可舉例在搬送路徑旁邊設置加熱器。另外,加熱器可設置複數個,其種類可為相同或相異。 The annealing method in the reheating step is not limited, but it is considered to be a polyimine film or a metal layer-containing polyimine laminate which will be continuously conveyed. (B) Or the copper foil (A) is placed in a uniform temperature environment, preferably one of the steps is set as a furnace, and heated by hot air. Further, in order to prevent the deterioration of the surface of the copper foil or the like, the hot air is preferably heated with nitrogen. Heating with this nitrogen requires more temperature conditions, and since there is an upper limit, other heating means can be added. A preferred heating means can be exemplified by providing a heater beside the transport path. In addition, the heater may be provided in plural, and the types thereof may be the same or different.

[實施例] [Examples]

以下,依據實施例而更詳細說明本發明。另外,在以下之實施例中,各特性評價係依以下之方法進行。 Hereinafter, the present invention will be described in more detail based on examples. Further, in the following examples, each characteristic evaluation was carried out in the following manner.

[以XRD測定結晶方位I/Io] [Measurement of crystal orientation I/Io by XRD]

銅箔的(200)面結晶方位係藉由使用Mo對陰極之XRD法,對於藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)算出試料之(200)面繞射強度(I),定義為I/Io值。 The (200) plane crystal orientation of the copper foil was calculated by using the Mo-to-cathode XRD method for the (200) plane diffraction intensity (Io) obtained by X-ray diffraction of the fine powder copper (200). The surface diffraction intensity (I) is defined as the I/Io value.

[撓曲特性的測定] [Measurement of deflection characteristics]

對於以銅箔/聚醯亞胺/銅箔所構成之雙面可撓性覆銅積層板貼合市售之光阻薄膜,而以預定的圖案形成用遮罩曝光後,以殘留貼合有光阻薄膜側的銅箔之方式,全面蝕去相反面的銅箔之後,使殘餘的銅箔形成L/S=100μm/100μm之圖案的方式硬化形成阻劑層(L:線路線寬,S:線路線間距寬)。其次,顯影硬化阻劑處,蝕刻除去預定之圖案形成中不需要的銅箔,進一步將硬化阻劑層以鹼性液體剝離除去以製作試驗樣品。於試驗圖案張貼覆蓋層後使用IPC試驗裝置,設定撓曲半徑r=1.5mm,沖程25mm,滑 動速度為1500cpm。撓曲壽命的判定係對樣品施加預定的電壓的同時,實施撓曲試驗,電阻值上昇10%之樣品視為配線斷線,作為撓曲次數。下述實施例以及比較例中,各別評價於澆鑄面銅箔形成預定圖案時(除去層合面銅箔(基材2))之撓曲特性、以及於層合面銅箔(基材2)預形成定的圖案時的撓曲特性(除去塗布面銅箔)。 A commercially available photoresist film is bonded to a double-sided flexible copper clad laminate formed of a copper foil/polyimine/copper foil, and is exposed to a predetermined pattern to form a mask. The copper foil on the side of the photoresist film is completely etched away from the copper foil on the opposite side, and then the residual copper foil is formed into a pattern of L/S=100 μm/100 μm to form a resist layer (L: line width, S : Line line spacing is wide). Next, at the development hardening resist, the copper foil which is not required in the predetermined pattern formation is removed by etching, and the hardened resist layer is further removed by an alkaline liquid to prepare a test sample. After applying the cover layer to the test pattern, use the IPC test device to set the deflection radius r=1.5mm, stroke 25mm, slip The moving speed is 1500 cpm. The determination of the flex life was performed by applying a predetermined voltage to the sample and performing a flexural test. The sample having a resistance increase of 10% was regarded as a wire breakage as the number of deflections. In the following examples and comparative examples, the flexural properties of the cast copper foil on the cast surface (the removal of the laminated copper foil (substrate 2)) and the laminated copper foil (substrate 2) were evaluated. ) Flexural characteristics (removing coated copper foil) when a predetermined pattern is formed.

[銲料耐熱性試驗之測定] [Measurement of Solder Heat Resistance Test]

將市售的光阻薄膜貼合於以銅箔/聚醯亞胺/銅箔所構成之雙面可撓性覆銅積層板,以預定的圖案形成用遮罩曝光後,銅箔表背面各別之相同位置硬化形成1mm的圓形圖案的阻劑層。其次,顯影硬化阻劑處,而於預定的圖案形成蝕刻除去不需要的銅箔層,進一步將硬化阻劑層以鹼性液體剝離除去來製作試驗樣品。使樣品乾燥後,於溫度不同的銲料浴槽中浸漬10秒,測定銅箔不會產生膨脹、剝離的現象的溫度,將此溫度作為銲料耐熱溫度。 A commercially available photoresist film is bonded to a double-sided flexible copper-clad laminate formed of a copper foil/polyimine/copper foil, and is exposed in a predetermined pattern by a mask. The same location hardens to form a 1 mm circular patterned resist layer. Next, the hardening resist was developed, and an unnecessary copper foil layer was formed by etching in a predetermined pattern, and the hardened resist layer was further peeled off by an alkaline liquid to prepare a test sample. After the sample was dried, it was immersed in a solder bath having a different temperature for 10 seconds, and the temperature at which the copper foil did not swell or peel off was measured. This temperature was taken as the solder heat-resistant temperature.

[剝離強度的測定] [Measurement of peel strength]

將市售的光阻薄膜層合於以銅箔/聚醯亞胺/銅箔所構成之積層體,以預定的圖案形成用遮罩曝光後,使銅配線寬為1mm之圖案的方式硬化形成阻劑層。其次,顯影硬化阻劑處,於預定的圖案形成蝕刻除去不需要的銅箔層,進一步將硬化阻劑層以鹼性液體剝離除去來製作試驗樣品。使樣品乾燥後,以東洋精機股份有限公司製抗拉試驗器(Strograph M-1)以180°拉剝法測定剝離強度。 A commercially available photoresist film is laminated on a laminate formed of a copper foil/polyimine/copper foil, and is formed in a predetermined pattern by exposure to a mask and then patterned to have a copper wiring width of 1 mm. Resistive layer. Next, at the development hardening resist, an unnecessary copper foil layer was formed by etching in a predetermined pattern, and the hardened resist layer was further peeled off by an alkaline liquid to prepare a test sample. After the sample was dried, the peel strength was measured by a 180° peeling method using a tensile tester (Strograph M-1) manufactured by Toyo Seiki Co., Ltd.

[尺寸變化率的測定] [Measurement of dimensional change rate]

尺寸變化率的測定係以下揭順序進行。 The measurement of the dimensional change rate is carried out in the following order.

首先,使用300mm見方的試料(可撓性覆銅積層板),以200mm間隔曝光乾式薄膜阻劑,藉由顯影而形成位置測定用靶(target)。進一步於溫度23±2℃、相對濕度50±5%的氛圍中測定蝕刻前(通常狀態)之尺寸後,藉由蝕刻試驗片之靶以外的銅(液溫40℃以下,時間10分鐘以內)來除去。於溫度23±2℃、相對濕度50±5%的氛圍中靜置24±4小時後,測定位置靶間的距離。算出相對於縱方向以及橫方向之各3處之通常狀態的尺寸變化率,以各個之平均值而測定蝕刻後的尺寸。其次,將本試驗片以250℃的烤箱加熱處理1小時,測定其後的位置靶間的距離。算出相對於縱方向以及橫方向之各3處之通常狀態的尺寸變化率,以各個之平均值為加熱處理後的尺寸變化率。加熱尺寸變化率係以下述數學式得出。 First, a dry film resist was exposed at intervals of 200 mm using a sample of 300 mm square (flexible copper clad laminate), and a target for position measurement was formed by development. Further, after measuring the size before the etching (normal state) in an atmosphere of a temperature of 23±2° C. and a relative humidity of 50±5%, the copper other than the target of the test piece is etched (the liquid temperature is 40° C. or less, and the time is within 10 minutes). To remove. After standing at an atmosphere of 23 ± 2 ° C and a relative humidity of 50 ± 5% for 24 ± 4 hours, the distance between the target sites was measured. The dimensional change rate in the normal state of each of the three directions in the longitudinal direction and the lateral direction was calculated, and the size after the etching was measured for each of the average values. Next, the test piece was heat-treated in an oven at 250 ° C for 1 hour, and the distance between the target positions after the measurement was measured. The dimensional change rate in the normal state of each of the three directions in the longitudinal direction and the lateral direction is calculated, and the average value of each is the dimensional change rate after the heat treatment. The rate of change in heating dimensionality is obtained by the following mathematical formula.

蝕刻後尺寸變化率(%)=(B-A)/A×100 Dimensional change rate after etching (%) = (B-A) / A × 100

A;阻劑顯影後的靶間距離 A; distance between targets after resist development

B;配線形成後的靶間距離 B; distance between targets after wiring formation

加熱尺寸變化率(%)=(D-C)/C×100 Heating dimensional change rate (%) = (D-C) / C × 100

C;配線形成後的靶間距離 C; distance between targets after wiring formation

D;加熱後的靶間距離 D; distance between targets after heating

[翹曲的測定] [Measurement of warpage]

自可撓性覆銅積層板作成10cm×10cm尺寸之薄片,將此薄片載置於桌上時,使用游標尺測定自桌面浮起最高之部分離桌面的高度。將此高度設為翹曲量,翹曲量未達2mm 時評價為「無翹曲」。 A sheet of 10 cm × 10 cm size was formed from a flexible copper clad laminate, and when the sheet was placed on a table, the height of the table top separated from the highest portion of the table top was measured using a vernier scale. Set this height to the amount of warpage, and the amount of warpage is less than 2 mm. The time is evaluated as "no warping".

[玻璃轉移溫度的測定] [Measurement of glass transition temperature]

銅箔上塗布聚醯胺酸的樹脂溶液,進行熱處理,作為積層體。蝕刻除去該積層體之銅箔所得得之聚醯亞胺薄膜(10mm×22.6mm)以DMA測定自20℃至500℃為止以5℃/分昇溫時的動態黏彈性,求取玻璃轉移溫度Tg(tanδ極大值)。 A resin solution of polyamic acid was coated on the copper foil and heat-treated to form a laminate. The polyimine film (10 mm × 22.6 mm) obtained by etching away the copper foil of the laminate was subjected to DMA measurement of dynamic viscoelasticity at a temperature of 5 ° C / min from 20 ° C to 500 ° C to obtain a glass transition temperature Tg. (tan δ maxima).

[熱膨脹係數的測定] [Measurement of thermal expansion coefficient]

將蝕刻銅箔所得之聚醯亞胺薄膜,使用Seiko Instruments Inc.製之熱機械分析儀,昇溫至250℃,進一步於該溫度保持10分鐘後,以5℃/分之速度冷卻,求取自240℃至100℃為止之平均熱膨脹係數(線熱膨脹係數)。 The polyimide film obtained by etching the copper foil was heated to 250 ° C using a thermomechanical analyzer manufactured by Seiko Instruments Inc., and further kept at this temperature for 10 minutes, and then cooled at a rate of 5 ° C /min. Average coefficient of thermal expansion (linear thermal expansion coefficient) from 240 ° C to 100 ° C.

其次,表示實施例、比較例所使用之聚醯胺酸的合成例。 Next, a synthesis example of the polyamic acid used in the examples and comparative examples will be described.

(合成例1) (Synthesis Example 1)

於具備熱電偶及攪拌機的同時可導入氮的反應容器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)而在容器中一邊攪拌一邊使其溶解。其次,將1,2,4,5-苯四甲酸二酐(PMDA)以使單體之投入總量為12wt%之方式投入。之後,持續攪拌3小時而進行聚合反應,得到聚醯胺酸a之樹脂溶液。該聚醯胺酸a所得之聚醯亞胺之玻璃轉移點溫度為310℃,線熱膨脹係數為45ppm/K。 In a reaction vessel equipped with a thermocouple and a stirrer while introducing nitrogen, N,N-dimethylacetamide was added, and 2,2-bis[4-(4-aminophenoxy) was introduced into the reaction vessel. Phenyl]propane (BAPP) is dissolved in a container while stirring. Next, 1,2,4,5-benzenetetracarboxylic dianhydride (PMDA) was put in such a manner that the total amount of the monomers charged was 12% by weight. Thereafter, the mixture was stirred for 3 hours to carry out a polymerization reaction to obtain a resin solution of polyamic acid a. The polyimine obtained from the polyamic acid a had a glass transition point temperature of 310 ° C and a linear thermal expansion coefficient of 45 ppm / K.

(合成例2) (Synthesis Example 2)

於具備熱電偶以及攪拌機的同時可導入氮的反應容 器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2'-二甲基-4,4'-二胺基聯苯(m-TB)在容器中一邊攪拌一邊使其溶解。其次,將3,3',4,4'-聯苯四羧酸二酐(BPDA)以及1,2,4,5-苯四甲酸二酐(PMDA)以使單體之投入總量為15wt%,各酸酐之莫耳比率(BPDA:PMDA)為20:80之方式投入。之後,持續攪拌3小時進行聚合反應,得到聚醯胺酸b之樹脂溶液。該聚醯胺酸b所得之聚醯亞胺之玻璃轉移點溫度為380℃,線熱膨脹係數為8ppm/K。 The reaction capacity of nitrogen can be introduced while having a thermocouple and a stirrer N,N-dimethylacetamide was added to the reaction vessel, and 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) was added to the vessel while stirring. Let it dissolve. Next, 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,2,4,5-benzenetetracarboxylic dianhydride (PMDA) to make the total amount of monomer input 15wt %, the molar ratio of each anhydride (BPDA: PMDA) was 20:80. Thereafter, the mixture was stirred for 3 hours to carry out a polymerization reaction to obtain a resin solution of polyglycolic acid b. The polyimine obtained from the polyaminic acid b had a glass transition point temperature of 380 ° C and a linear thermal expansion coefficient of 8 ppm / K.

(合成例3) (Synthesis Example 3)

於具備熱電偶以及攪拌機的同時可導入氮的反應容器中,加入N,N-二甲基乙醯胺,於此反應容器中投入2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)在容器中一邊攪拌一邊使其溶解。其次,將3,3',4,4'-二苯基酮四羧酸二酐(BTDA)以使單體之投入總量為12wt%之方式投入。之後,持續攪拌3小時進行聚合反應,得到聚醯胺酸c之樹脂溶液。該聚醯胺酸c所得之聚醯亞胺之玻璃轉移點溫度為240℃,線熱膨脹係數為42ppm/K。 In a reaction vessel equipped with a thermocouple and a stirrer while introducing nitrogen, N,N-dimethylacetamide was added, and 2,2-bis[4-(4-aminophenoxy) was introduced into the reaction vessel. Phenyl]propane (BAPP) is dissolved in a container while stirring. Next, 3,3',4,4'-diphenyl ketone tetracarboxylic dianhydride (BTDA) was put in such a manner that the total amount of the monomers charged was 12% by weight. Thereafter, the mixture was stirred for 3 hours to carry out a polymerization reaction to obtain a resin solution of polylysine c. The polyimine obtained from the polyaminic acid c had a glass transition point temperature of 240 ° C and a linear thermal expansion coefficient of 42 ppm / K.

(實施例1) (Example 1)

於厚度12μm之長條狀之壓延銅箔(JX日鑛日石金屬製HA箔;I/Io=7)之單面以使硬化後的厚度為2.2μm的方式均一塗布於合成例1所調製之聚醯胺酸a之樹脂溶液後(第一層),以130℃加熱乾燥,除去溶劑。其次,於該塗布面側以硬化後的厚度為7.6μm的方式均一塗布合成例2所調製之聚醯胺酸b之樹脂溶液(第二層),以135℃加熱乾 燥,除去溶劑。進一步,於該塗布面側以使硬化後的厚度為2.2μm的方式均一塗布與第一層所塗布者相同之聚醯胺酸a之樹脂溶液(第三層),以130℃加熱乾燥,除去溶劑。該長條狀的積層體自130℃開始至300℃為止以階段性提升溫度的方式設定之連續硬化爐,歷時合計6分鐘左右的時間進行熱處理,得到聚醯亞胺層之厚度為12μm之單面可撓性覆銅積層板(基材1)。 One side of a strip-shaped rolled copper foil (JX Nippon Mining & Metals HA foil; I/Io=7) having a thickness of 12 μm was uniformly coated and coated in Synthesis Example 1 so that the thickness after hardening was 2.2 μm. After the resin solution of polyamic acid a (first layer), it was dried by heating at 130 ° C to remove the solvent. Next, the resin solution (second layer) of the polyamic acid b prepared in Synthesis Example 2 was uniformly coated on the coated surface side so that the thickness after hardening was 7.6 μm, and dried at 135 ° C. Dry and remove the solvent. Further, a resin solution (third layer) of polylysine a which is the same as that of the first layer was uniformly applied to the coated surface side so as to have a thickness of 2.2 μm after curing, and dried by heating at 130 ° C to remove Solvent. In the continuous hardening furnace which is set to increase the temperature in stages from 130 ° C to 300 ° C, the long-length laminated body is heat-treated for about 6 minutes in total, and the thickness of the polyimide layer is 12 μm. Flexible copper-clad laminate (substrate 1).

其次,對於該單面可撓性覆銅積層板(基材1)之聚醯亞胺層之表面,加熱壓接作為基材2之長條狀之壓延銅箔(JX日鑛日石金屬製HA箔;I/Io=7)。層合裝置係適用:自卷出軸將層合之長條狀的基材經由導輥進行搬送,於惰性氛圍下之爐內以一對之對向之金屬輥(表面粗糙度Ra=0.15μm)加熱壓接之方式。熱壓接條件設為溫度360℃、壓力130Kg/cm、通過時間;2至5秒(層合:加熱壓接步驟)。之後,以380℃的加熱熱風爐進行60秒加熱處理(再加熱步驟),得到雙面可撓性覆銅積層板。於表1中表示各實施例所使用之基材、熱層合溫度及退火條件。 Next, on the surface of the polyimide layer of the single-sided flexible copper-clad laminate (substrate 1), a strip-shaped rolled copper foil as a base material 2 is heated and pressure-bonded (JX Nippon Mining & Metal Co., Ltd. HA foil; I/Io=7). The laminating apparatus is suitable for conveying a long strip-shaped base material which is laminated by a roll by a roll, and a pair of opposite metal rolls in a furnace under an inert atmosphere (surface roughness Ra = 0.15 μm) ) The way of heating and crimping. The thermocompression bonding conditions were set to a temperature of 360 ° C, a pressure of 130 kg/cm, and a passage time; 2 to 5 seconds (lamination: heating and crimping step). Thereafter, the mixture was heated in a hot air oven at 380 ° C for 60 seconds (reheating step) to obtain a double-sided flexible copper clad laminate. Table 1, the substrate used in each example, the thermal lamination temperature, and the annealing conditions are shown in Table 1.

於上述所得之雙面可撓性覆銅積層板中,就塗布有聚醯胺酸之樹脂溶液之銅箔(稱為「澆鑄面銅箔」)、以及加熱壓接步驟所層合之銅箔(基材2:稱為「層合面銅箔」),於表2各別表示藉由在厚度方向之X線繞射所求得之(200)面的繞射強度(I)、及藉由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之比I/Io值。此外,將撓曲特性及銲料耐熱性表示於表2。澆鑄面銅箔之(200面)I/Io為 195,以IPC試驗所得到的撓曲次數為1700萬次。另一方面的層合面銅箔,(200面)I/Io為185,以IPC試驗所得到的撓曲次數為1600萬次,具有與澆鑄面銅箔同等之撓曲特性。此外,銲料耐熱溫度為350℃,為實用上充分之水準。 In the double-sided flexible copper-clad laminate obtained above, a copper foil coated with a resin solution of poly-proline (referred to as "casting surface copper foil") and a copper foil laminated by a thermocompression bonding step (Substrate 2: referred to as "laminated surface copper foil"), and Table 2 shows the diffraction intensity (I) of the (200) plane obtained by X-ray diffraction in the thickness direction, and The I/Io value of the (200) plane diffraction intensity (Io) obtained from the X-ray diffraction of the fine powder copper. Further, the flexural characteristics and the solder heat resistance are shown in Table 2. Casting surface copper foil (200 faces) I/Io is 195. The number of deflections obtained by the IPC test was 17 million. On the other hand, the laminated copper foil (200 surface) I/Io was 185, and the number of deflections obtained by the IPC test was 16 million times, and it had the same flexural characteristics as the copper foil of the casting surface. In addition, the solder heat resistance temperature is 350 ° C, which is a practically sufficient level.

(實施例2) (Example 2)

就基材1所使用之銅箔、與作為基材2之銅箔而言,使用各別長條狀之厚度為12μm之壓延銅箔(日立金屬製HPF-ST-X)以外,與實施例1相同地,得到雙面可撓性覆銅積層板。將所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為205,以IPC試驗得到的撓曲次數為1600萬次。另一方面之層合面銅箔之(200面)I/Io為200,以IPC試驗得到的撓曲次數為1700萬次,具有與澆鑄面同等之撓曲特性。此外,銲料耐熱溫度為350℃。 In the case of the copper foil used for the base material 1 and the copper foil used as the base material 2, a rolled copper foil (HPF-ST-X manufactured by Hitachi Metal Co., Ltd.) having a thickness of 12 μm each having a different strip shape was used. In the same manner, a double-sided flexible copper clad laminate was obtained. The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. The (200 faces) I/Io of the cast copper foil was 205, and the number of deflections obtained by the IPC test was 16 million. On the other hand, the (200 surface) I/Io of the laminated copper foil was 200, and the number of deflections obtained by the IPC test was 17 million times, and the flexural characteristics equivalent to those of the cast surface were obtained. Further, the solder heat resistance temperature was 350 °C.

(實施例3) (Example 3)

於市售之聚醯亞胺薄膜(Kapton EN)之雙面以合成例1所合成之聚醯胺酸a之樹脂溶液塗布乾燥後,於大氣氛圍進行硬化,得到含有熱塑性聚醯亞胺之聚醯亞胺醯亞胺薄膜(基材1)。於該聚醯亞胺薄膜之兩側將實施例1所示之銅箔(基材2)以與實施例1相同地做法以360℃的溫度熱層合,之後,以熱風加熱爐於380℃進行1分鐘的加熱處理,得到雙面可撓性覆銅積層體。所得之雙面可撓性覆銅積層板之評價結果表示於表2。層合面側的銅箔之(200面)I/Io為198,以IPC試驗所得到的撓曲次數為1300萬次。銲料 耐熱溫度為320℃。 On both sides of a commercially available polyimine film (Kapton EN), the resin solution of polyamic acid a synthesized in Synthesis Example 1 was coated and dried, and then hardened in an atmosphere to obtain a polymer containing thermoplastic polyimide. A quinone imine film (substrate 1). The copper foil (substrate 2) shown in Example 1 was thermally laminated on the both sides of the polyimide film at the temperature of 360 ° C in the same manner as in Example 1, and then heated at 380 ° C by a hot air oven. The heat treatment was performed for 1 minute to obtain a double-sided flexible copper-clad laminate. The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. The (200 surface) I/Io of the copper foil on the laminated surface side was 198, and the number of deflections obtained by the IPC test was 13 million times. solder The heat resistant temperature was 320 °C.

(比較例1) (Comparative Example 1)

與實施例1相同地做法而製作單面覆銅積層板(基材1)後,使用實施例1所示之銅箔(基材2),以表1所示條件實施層合條件。之後,不進行再加熱步驟之熱處理,而得到比較例1之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為195,以IPC試驗得到的撓曲次數為1700萬次。另一方面之層合面銅箔之(200面)I/Io為87,未達到澆鑄面銅箔或於實施例之層合面銅箔之約一半,以IPC試驗得到的撓曲次數為700萬次,為實施例的50%以下。 After the single-sided copper-clad laminate (substrate 1) was produced in the same manner as in Example 1, the copper foil (base material 2) shown in Example 1 was used, and the lamination conditions were carried out under the conditions shown in Table 1. Thereafter, the heat treatment in the reheating step was not performed, and the double-sided flexible copper clad laminate of Comparative Example 1 was obtained. The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. The (200 faces) I/Io of the cast copper foil was 195, and the number of deflections obtained by the IPC test was 17 million. On the other hand, the (200 faces) I/Io of the laminated copper foil was 87, which did not reach about half of the cast face copper foil or the laminated copper foil of the example, and the number of deflections obtained by the IPC test was 700. Ten thousand times, it is 50% or less of the embodiment.

(比較例2) (Comparative Example 2)

除了使加熱壓接步驟之層合溫度T1設為380℃,此外,再加熱步驟於350℃進行60秒以外,與實施例1相同地,得到比較例2之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。澆鑄面銅箔之(200面)I/Io為195,以IPC試驗得到的撓曲次數為1700萬次。另一方面之層合面銅箔之(200面)I/Io為從層合後無提升而為90,以IPC試驗得到的撓曲次數為760萬次。 A double-sided flexible copper clad laminate of Comparative Example 2 was obtained in the same manner as in Example 1 except that the laminating temperature T1 of the heating and pressure bonding step was 380 ° C, and the reheating step was carried out at 350 ° C for 60 seconds. . The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. The (200 faces) I/Io of the cast copper foil was 195, and the number of deflections obtained by the IPC test was 17 million. On the other hand, the (200 faces) I/Io of the laminated copper foil was 90 without lifting from lamination, and the number of deflections obtained by the IPC test was 7.6 million.

(比較例3) (Comparative Example 3)

除了使加熱壓接步驟之層合溫度T1設為380℃,此外,再加熱步驟於350℃進行600秒以外,與實施例1相同地,得到比較例3之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。即便延長再 加熱步驟之時間,層合面銅箔之(200面)I/Io為89,以IPC試驗得到的撓曲次數為720萬次。 A double-sided flexible copper clad laminate of Comparative Example 3 was obtained in the same manner as in Example 1 except that the laminating temperature T1 of the heating and pressure bonding step was 380 ° C, and the reheating step was performed at 350 ° C for 600 seconds. . The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. Even if it is extended At the time of the heating step, the (200 faces) I/Io of the laminated surface copper foil was 89, and the number of deflections obtained by the IPC test was 7.2 million times.

(比較例4) (Comparative Example 4)

得到基材1之單面可撓性覆銅積層板時,取代實施例1之第一層及第三層所使用之聚醯胺酸,各別使用合成例3所示之聚醯胺酸c以外,與實施例1相同地,得到比較例4之雙面可撓性覆銅積層板。所得之雙面可撓性覆銅積層板之評價結果表示於表2。層合面銅箔(200面)I/Io提升至189,以IPC試驗所得到的撓曲次數為1550萬次,顯現出至與澆鑄面銅箔同等,但銲料耐熱性為250℃,為無法承受零件封裝時的銲料回焊等的水準。 When the single-sided flexible copper-clad laminate of the substrate 1 is obtained, instead of the poly-lysine used in the first layer and the third layer of the first embodiment, the poly-proline c shown in Synthesis Example 3 is used. A double-sided flexible copper clad laminate of Comparative Example 4 was obtained in the same manner as in Example 1. The evaluation results of the obtained double-sided flexible copper clad laminates are shown in Table 2. The laminated surface copper foil (200 faces) I/Io was raised to 189, and the number of deflections obtained by the IPC test was 15.5 million times, which was equivalent to that of the cast surface copper foil, but the solder heat resistance was 250 ° C. Resist the level of solder reflow, etc. when packaging parts.

另外,評估有關本實施例後的可撓性覆銅積層板之剝離強度、尺寸變化率、翹曲,但任一實施例之剝離強度均為0.8kN/m。蝕刻後的尺寸變化率、加熱尺寸變化率均為0.1%以內,翹曲亦為2mm以下。也就是說,於可撓性覆銅積層板所要求之特性係可保持,且確認出在實用上並無問題。 Further, the peel strength, dimensional change rate, and warpage of the flexible copper clad laminate after the present embodiment were evaluated, but the peel strength of any of the examples was 0.8 kN/m. The dimensional change rate and the heating dimensional change rate after etching are all within 0.1%, and the warpage is also 2 mm or less. That is to say, the characteristics required for the flexible copper clad laminate can be maintained, and it is confirmed that there is no problem in practical use.

Claims (4)

一種可撓性覆銅積層板的製造方法,其係具有:使用一對的熱壓輥,而加熱壓接銅箔(A)及具備接著層作為與前述銅箔(A)之積層面的聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)之加熱壓接步驟;以及,其後,進一步進行加熱處理之再加熱步驟,其中,前述聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有玻璃轉移溫度260℃以上之熱塑性聚醯亞胺層(ii)作為接著層,前述加熱壓接步驟之層合溫度T1係前述熱塑性聚醯亞胺層(ii)之玻璃轉移溫度以上,於前述再加熱步驟中之加熱處理溫度T2係設為前述層合溫度T1以上,藉此使前述加熱壓接步驟後在銅箔(A)之厚度方向之由X線繞射所求得之(200)面的繞射強度(I)及由微粉末銅的X線繞射所求得之(200)面繞射強度(Io)之關係為I/Io>100。 A method for producing a flexible copper-clad laminate, comprising: heating a pressure-bonded copper foil (A) using a pair of hot-pressing rolls, and providing an adhesive layer as a layer of the copper foil (A) a heat-clamping step of the quinone imine film or the metal layer-containing polyimine laminate (B); and, thereafter, a heat treatment further reheating step, wherein the polyimine film or metal layer The polyimine laminate (B) has a thermoplastic polyimide layer (ii) having a glass transition temperature of 260 ° C or higher as an adhesive layer, and the lamination temperature T1 of the above-mentioned heat-bonding step is the aforementioned thermoplastic polyimide layer ( Ii) The glass transition temperature or higher, the heat treatment temperature T2 in the reheating step is set to be equal to or higher than the lamination temperature T1, whereby the thickness of the copper foil (A) after the heating and pressing step is X. The relationship between the diffraction intensity (I) of the (200) plane obtained by the line diffraction and the diffraction intensity (Io) of the (200) plane obtained by the X-ray diffraction of the fine powder copper is I/Io>100. . 如申請專利範圍第1項所述之可撓性覆銅積層板的製造方法,其中,再加熱步驟之加熱處理係於真空或惰性氛圍下實施,加熱處理溫度T2係300℃以上,加熱時間為10秒以上。 The method for producing a flexible copper-clad laminate according to the first aspect of the invention, wherein the heat treatment in the reheating step is carried out under vacuum or an inert atmosphere, and the heat treatment temperature T2 is 300 ° C or higher, and the heating time is More than 10 seconds. 如申請專利範圍第1或2項所述之可撓性覆銅積層板的製造方法,其中,聚醯亞胺薄膜或附金屬層之聚醯亞胺積層體(B)具有:具備熱膨脹係數未達17ppm/K之低熱膨脹性的聚醯亞胺層(i)及熱塑性聚醯亞胺層(ii)之複數 聚醯亞胺層。 The method for producing a flexible copper-clad laminate according to claim 1 or 2, wherein the polyimide film or the metal layer-containing polyimide laminate (B) has a coefficient of thermal expansion a plurality of low thermal expansion polyimine layers (i) and thermoplastic polyimine layers (ii) of 17 ppm/K Polyimine layer. 如申請專利範圍第1至3項中任一項所述之可撓性覆銅積層板的製造方法,其中,銅箔(A)為厚度5至100μm之壓延銅箔。 The method for producing a flexible copper-clad laminate according to any one of claims 1 to 3, wherein the copper foil (A) is a rolled copper foil having a thickness of 5 to 100 μm.
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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6580128B2 (en) * 2015-03-31 2019-09-25 株式会社カネカ Manufacturing method of rigid flexible wiring board
JP2016215651A (en) * 2016-07-19 2016-12-22 新日鉄住金化学株式会社 Flexible copper-clad laminated sheet and flexible circuit board
CN108621513B (en) * 2017-03-22 2019-11-12 昆山雅森电子材料科技有限公司 Nano metal substrate and manufacturing method for ultra fine-line FPC and COF material
CN107696669B (en) * 2017-09-20 2024-02-06 广东拓斯达科技股份有限公司 Automatic foil pasting machine
JP7212480B2 (en) * 2017-09-29 2023-01-25 日鉄ケミカル&マテリアル株式会社 Polyimide films, metal-clad laminates and circuit boards
JP6597983B2 (en) * 2017-10-23 2019-10-30 パナソニックIpマネジメント株式会社 Roll press machine
CN109796761A (en) * 2018-12-25 2019-05-24 努比亚技术有限公司 Display screen component, preparation method and display terminal
CN111635547B (en) * 2020-06-11 2022-06-28 四川铂利明德科技有限公司 Preparation method of high-performance modified polyimide flexible composite film
US11382210B1 (en) 2020-12-17 2022-07-05 International Business Machines Corporation Dielectric material change to optimize electrical and mechanical properties of flex circuit
CN114679837A (en) * 2020-12-24 2022-06-28 广东生益科技股份有限公司 Black glue-free flexible copper-clad plate and preparation method and application thereof
CN112764533A (en) * 2020-12-30 2021-05-07 电子科技大学 Flexible carbon strain sensor array for glove type keyboard
JP2023000498A (en) 2021-06-18 2023-01-04 合肥漢之和新材料科技有限公司 Adhesive, adhesive sheet, and flexible copper-clad laminate
CN115179638B (en) * 2022-06-29 2024-02-27 厦门爱谱生电子科技有限公司 Manufacturing method of flexible copper-clad plate
CN117528897A (en) * 2022-07-27 2024-02-06 宏启胜精密电子(秦皇岛)有限公司 Flexible circuit board and manufacturing method thereof

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285586A (en) 1991-03-13 1992-10-09 Juki Corp Sewing machine adjusting device for locus of cloth feed teeth
JPH0637451A (en) * 1992-07-20 1994-02-10 Hitachi Chem Co Ltd Multilayer printed wiring board and manufacture thereof
TWI298988B (en) * 2002-07-19 2008-07-11 Ube Industries Copper-clad laminate
JP4116869B2 (en) * 2002-11-20 2008-07-09 株式会社巴川製紙所 Heat-resistant adhesive composition, laminate using the same, and flexible printed circuit board
JP2006015681A (en) * 2004-07-05 2006-01-19 Shin Etsu Chem Co Ltd Metallic foil-polyimide laminated flexible plate and its manufacturing process
JP4756194B2 (en) * 2005-02-22 2011-08-24 新日鐵化学株式会社 Method for producing copper clad laminate
KR101137274B1 (en) * 2005-04-04 2012-04-20 우베 고산 가부시키가이샤 Copper clad laminate
WO2006112523A1 (en) * 2005-04-19 2006-10-26 Ube Industries, Ltd. Polyimide film laminate
KR100629360B1 (en) * 2005-05-30 2006-10-02 한국화학연구원 Method of surface modification of polyimide film using ethyleneimines coupling agent, manufacturing method of flexible copper clad laminate and its product thereby
TWI342323B (en) * 2007-01-22 2011-05-21 Chang Chun Plastics Co Ltd Thermoset resin modified polyimide resin composition
JP2009113475A (en) * 2007-10-18 2009-05-28 Shin Etsu Chem Co Ltd Method of producing flexible single-sided polyimide copper-clad laminate
JP2009292090A (en) * 2008-06-06 2009-12-17 Nippon Mining & Metals Co Ltd Two-layer flexible copper-clad laminated sheet excellent in flexibility and method for manufacturing it
TWI487730B (en) * 2009-04-14 2015-06-11 Ube Industries Polyimide film for metallizing, method for producing thereof and metal laminated polyimide film
JP2011148192A (en) * 2010-01-21 2011-08-04 Jx Nippon Mining & Metals Corp Method of manufacturing copper-clad laminated sheet, copper foil used therefor, and laminator of the copper-clad laminated sheet
CN101974155B (en) * 2010-07-10 2013-08-28 横店集团东磁股份有限公司 Method for synthesizing polyimide precursor polymer resin and method for manufacturing single-sided flexible copper-clad plates
CN201774739U (en) * 2010-09-29 2011-03-23 莱芜金鼎电子材料有限公司 Four-layer double-faced flexible copper clad laminate (FCCL) structure and production facility thereof
CN201872386U (en) * 2010-12-13 2011-06-22 莱芜金鼎电子材料有限公司 Flexible copper clad laminate (FCCL) having copper foils of different thicknesses on two surfaces
TW201304633A (en) 2011-07-08 2013-01-16 Azotek Co Ltd Method for forming flexible substrate
CN102794962A (en) * 2012-08-29 2012-11-28 松扬电子材料(昆山)有限公司 Composite double-sided copper foil substrate and manufacturing method thereof

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