TWI635032B - Transport device for flat substrates - Google Patents

Transport device for flat substrates Download PDF

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Publication number
TWI635032B
TWI635032B TW103139119A TW103139119A TWI635032B TW I635032 B TWI635032 B TW I635032B TW 103139119 A TW103139119 A TW 103139119A TW 103139119 A TW103139119 A TW 103139119A TW I635032 B TWI635032 B TW I635032B
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TW
Taiwan
Prior art keywords
conveying
journal bearing
substrate
roller
shaft
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TW103139119A
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Chinese (zh)
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TW201532921A (en
Inventor
史蒂芬 瑞普
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德商吉伯史密德公司
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Publication of TW201532921A publication Critical patent/TW201532921A/en
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Publication of TWI635032B publication Critical patent/TWI635032B/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/10Antistatic features
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/005Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes comprising two or more co-operating conveying elements with parallel longitudinal axes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0143Using a roller; Specific shape thereof; Providing locally adhesive portions thereon
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0085Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Elimination Of Static Electricity (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

本發明係關於平坦基材之輸送裝置,如印刷電路板及類似電子基材或電氣工程基材之輸送。該輸送裝置包含在輸送方向上連續配置的一個或較佳地若干輸送輥(1),及/或其中的至少一對彼此層疊配置,且其垂直於輸送方向,並在其間形成基材輸送間隙(5)。每一輸送輥含有軸桿(2)及可旋轉地固定至該軸桿的基材接觸區(4')。該輸送裝置進一步包含具有軸頸軸承(9)的進料搬運器(6),其中每一輸送輥安裝於一側上,或較佳地安裝於兩側上,其隨著各別終端軸銷(10)可旋轉地移動。 The present invention relates to the delivery of flat substrate substrates such as printed circuit boards and similar electronic substrates or electrical engineering substrates. The conveying device comprises one or preferably a plurality of conveying rollers (1) continuously arranged in the conveying direction, and/or at least one of which is disposed in a stacked manner with each other, and which is perpendicular to the conveying direction, and forms a substrate conveying gap therebetween (5). Each of the conveyor rollers includes a shaft (2) and a substrate contact zone (4') rotatably secured to the shaft. The conveyor further comprises a feed carrier (6) having a journal bearing (9), wherein each conveyor roller is mounted on one side, or preferably on both sides, with the respective terminal pin (10) Rotatable movement.

Description

平坦基材之輸送裝置 Flat substrate conveying device

本發明係關於平坦基材之輸送裝置,特定言之,係關於印刷電路板及類似電子基材或電氣工程基材(諸如,用於電子及電氣工程的結構化及非結構化半導體晶圓及薄膜組件)之輸送。輸送裝置包含在輸送方向上連續配置的一個或較佳地若干輸送輥,及/或其中的至少兩者彼此層疊配置的一對,且其垂直於輸送方向,並在其間形成基材輸送間隙。每一輸送輥含有軸桿及可旋轉地固定至該軸桿的基材接觸區。輸送裝置進一步包含具有軸頸軸承的進料搬運器,其中每一輸送輥安裝於一側上,或較佳地安裝於兩側上,其隨著各別終端軸銷可旋轉地移動。 The present invention relates to a flat substrate transport device, and more particularly to printed circuit boards and similar electronic substrates or electrical engineering substrates such as structured and unstructured semiconductor wafers for electronic and electrical engineering and Delivery of film components). The conveying device comprises one or preferably a plurality of conveying rollers continuously arranged in the conveying direction, and/or a pair of at least two of which are disposed one on another, and which is perpendicular to the conveying direction and forms a substrate conveying gap therebetween. Each of the conveyor rollers includes a shaft and a substrate contact zone rotatably secured to the shaft. The conveyor further includes a feed carrier having a journal bearing, wherein each conveyor roller is mounted on one side, or preferably on both sides, that rotatably moves with the respective terminal pin.

此等輸送裝置係各種實施例中慣用的。舉例而言,特許公開說明書DE 101 28 386 A1揭示此類型之輸送裝置,其中用於輸送輥之軸頸軸承專門由可替換地插入至進料搬運器之對應凹口中的插入件形成。輸送輥之軸桿通常由鈦、不鏽鋼或聚四氟乙烯(PTFE)構成。具有軸頸軸承的進料搬運器通常由諸如聚乙烯(PE)、聚丙烯(PP)、聚氯乙烯(PVC)或聚偏二氟乙烯(PVDF)之塑膠材料構成。 These delivery devices are conventional in various embodiments. A conveyor device of this type is disclosed, for example, in the patent publication DE 101 28 386 A1, in which the journal bearings for the conveyor rollers are exclusively formed by inserts which are replaceably inserted into corresponding recesses of the feed carrier. The shaft of the conveyor roller is usually made of titanium, stainless steel or polytetrafluoroethylene (PTFE). Feed carriers with journal bearings are typically constructed of a plastic material such as polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC) or polyvinylidene fluoride (PVDF).

對於印刷電路板及類似基材,常常需要或要求保護其免受靜電電荷影響。在基材經歷使用液體的處理的輸送路徑中,此情形通常防止此等不合需要之靜電電荷。在無液體處理的輸送路徑上,不提供此保護機構。此等「乾」輸送路徑例如為模組基材處理系統之典型進入 模組、控制模組、乾燥模組及離開模組。 For printed circuit boards and similar substrates, it is often necessary or required to protect them from electrostatic charges. In situations where the substrate undergoes a process that uses liquid treatment, this situation typically prevents such undesirable electrostatic charges. This protection mechanism is not provided on a transport path without liquid handling. These "dry" transport paths are, for example, typical entry into the module substrate processing system. Modules, control modules, drying modules and exit modules.

已知在此等乾輸送路徑中藉由使用在基材輸送平面上方及/或下方的離子噴霧桿來抵消靜電電荷。然而,在許多環境條件下(諸如存在以用於例如印刷電路板處理),無法連續地持久使用此等離子噴霧桿,例如在混雜化學品的環境空氣中及在具有高溫(諸如在乾燥模組中佔優勢)的環境中。 It is known to counteract electrostatic charges in such dry transport paths by using ion spray bars above and/or below the substrate transport plane. However, under many environmental conditions, such as for use in, for example, printed circuit board processing, such plasma spray bars cannot be used continuously, such as in ambient air of hybrid chemicals and at elevated temperatures (such as in dry modules). Predominant in the environment.

儘管還可藉由使金屬之輸送輥不僅在其軸桿中並且在其基材接觸區中與基材接觸來保護基材免受靜電電荷影響,但此情形很可能導致對基材之表面的損壞,其可能例如藉由對其精細導電軌道結構造成損壞而導致在印刷電路板的狀況下的功能故障。此外,通常用於輸送輥的金屬材料(諸如,不鏽鋼或鈦)由於其受限制的化學穩定性而僅與印刷電路板生產工廠中的使用有限地相容。 Although it is also possible to protect the substrate from electrostatic charges by causing the metal transfer roller to contact the substrate not only in its shaft but also in its substrate contact area, this situation is likely to result in a surface of the substrate. Damage, which may result in functional failure under conditions of the printed circuit board, for example, by damage to its fine conductive track structure. In addition, metal materials commonly used for conveyor rolls, such as stainless steel or titanium, are only limitedly compatible with use in printed circuit board manufacturing plants due to their limited chemical stability.

本發明係基於提供引言中所提到的類型之輸送裝置之技術問題,其中可在輸送期間以改良方式保護諸如印刷電路板之輸送的平坦基材免受靜電電荷影響。 The present invention is based on the technical problem of providing a conveying device of the type mentioned in the introduction, in which a flat substrate such as a printed circuit board can be protected from electrostatic charges during transport in an improved manner.

本發明藉由提供具有技術方案1之特徵的輸送裝置而達成此目的。在此輸送裝置中,輸送輥基材接觸區及進料搬運器之軸頸軸承區由導電塑膠材料構成。進一步提供放電路徑,輸送輥基材接觸區及/或進料搬運器軸頸軸承區導電地連接至該放電路徑。 The present invention achieves this object by providing a conveying device having the features of claim 1. In this conveying device, the contact area of the conveying roller substrate and the journal bearing area of the feeding carrier are composed of a conductive plastic material. Further providing a discharge path, the conveyor roller substrate contact zone and/or the feed carrier journal bearing zone are electrically connected to the discharge path.

根據本發明的輸送裝置因此確保電荷經由放電路徑自輸送的平坦基材或自輸送輥及進料搬運器之充分耗散,可使得不形成會造成對基材之損壞的不想要之靜電電荷。進料搬運器之軸頸軸承區中的電荷可直接耗散,而不會到達基材。可經由輸送輥及進料搬運器耗散形成於輸送輥之與基材接觸區中的電荷。由輸送輥之基材接觸區(該基材接觸區由導電塑膠材料組成)接觸基材,以使得避免輸送的基材與金屬輸送輥區之接觸。 The conveying device according to the invention thus ensures that the charge is sufficiently dissipated from the flat substrate conveyed by the discharge path or from the conveying roller and the feed carrier, so that an unwanted electrostatic charge which would cause damage to the substrate is not formed. The charge in the journal bearing zone of the feed carrier can be dissipated directly without reaching the substrate. The charge formed in the contact area of the conveying roller with the substrate can be dissipated via the conveying roller and the feed carrier. The substrate contact area of the transport roller (which consists of a conductive plastic material) contacts the substrate such that contact of the transported substrate with the metal transfer roll zone is avoided.

在本發明的一個優化中,用於輸送輥基材接觸區或進料搬運器軸頸軸承區的導電塑膠材料為導電PP材料或PE材料或PVDF材料或聚醚酮(PEEK)材料。已證實這些材料高度適合於本申請案。 In an optimisation of the invention, the electrically conductive plastic material used to convey the roll substrate contact zone or the feed carrier journal bearing zone is a conductive PP material or a PE material or a PVDF material or a polyetherketone (PEEK) material. These materials have proven to be highly suitable for this application.

在本發明的一個優化中,為了提供所要電導率,導電塑膠材料含有較佳地以粒子形式引入的填充劑,該填充劑由碳黑材料或石墨材料或鈀材料組成。 In an optimisation of the invention, in order to provide the desired conductivity, the electrically conductive plastic material contains a filler which is preferably introduced in the form of particles, the filler being composed of a carbon black material or a graphite material or a palladium material.

在本發明的一個優化中,放電路徑經組態以用於在自0.1MΩ至2MΩ的範圍內之放電電阻。放電路徑因此構成經定義的高值電阻,諸如特別適合於可能發生的不合需要之靜電電荷之受控制的耗散。 In an optimization of the invention, the discharge path is configured for discharge resistance in the range from 0.1 MΩ to 2 MΩ. The discharge path thus constitutes a defined high value resistor, such as a controlled dissipation that is particularly suitable for the undesirable electrostatic charge that may occur.

在本發明的一個優化中,每一輸送輥之軸桿係由金屬材料形成,特定言之,該金屬材料可為不鏽鋼材料。 In an optimisation of the invention, the shaft of each conveyor roller is formed from a metallic material, in particular, the metallic material may be a stainless steel material.

在本發明的一個優化中,進料搬運器包含金屬基體及附接至其的軸頸軸承插入件,該軸頸軸承插入件包含進料搬運器之軸頸軸承區,且對應地由為後者提供之導電塑膠材料構成。 In an optimisation of the invention, the feed carrier comprises a metal substrate and a journal bearing insert attached thereto, the journal bearing insert comprising a journal bearing region of the feed carrier, and correspondingly the latter It is made of conductive plastic material.

在本發明的一個優化中,進料搬運器包含金屬軌條,該金屬軌條電連接至每一輸送輥之軸頸軸承區,且放電管線電連接至該金屬軌條。金屬軌條因此可被用作放電路徑之集電軌條,在複數個輸送輥的狀況下,此等輸送輥或其軸頸軸承之靜電電荷可藉由該集電軌條一起被耗散至放電管線。金屬軌條可進一步滿足用於進料搬運器之機械穩定化功能。 In an optimisation of the invention, the feed carrier comprises a metal rail electrically connected to the journal bearing region of each conveyor roller and the discharge line is electrically connected to the metal rail. The metal rails can thus be used as collector rails for the discharge path, in which the electrostatic charge of the conveyor rollers or their journal bearings can be dissipated together by the collector rails in the case of a plurality of conveyor rollers Discharge line. The metal rails further satisfy the mechanical stabilization function for the feed carrier.

圖1至圖3展示輸送裝置,其中諸如特定地用於電子工業及電氣工程工業中之印刷電路板或類似平坦基材可沿著輸送方向T在例如水平輸送路徑上輸送。為此目的,輸送裝置包含複數個輸送輥1,根據要求,該等輸送輥可彼此相同地或不同地配置。在所示實例中,其為彼此不同地配置之狀況。在圖1至圖3之部分視圖中,可以看見輥型之一對輸送輥1a及滾筒型之一對輸送輥1b,兩個輥對在輸送方向T上連續配置,且每對之兩個輸送輥在垂直於輸送方向T之方向上彼此層疊地配置。以相互平行的縱軸配置所有輸送輥1a、1b。 1 to 3 show a transport device in which a printed circuit board or similar flat substrate, such as specifically used in the electronics and electrical engineering industries, can be transported along a transport direction T, for example, on a horizontal transport path. For this purpose, the conveying device comprises a plurality of conveying rollers 1, which can be arranged identically or differently from each other, as required. In the illustrated example, it is a condition that is configured differently from each other. In the partial views of Figs. 1 to 3, one of the roller type pair of the conveying roller 1a and one of the roller type to the conveying roller 1b can be seen, and the two roller pairs are continuously arranged in the conveying direction T, and two of each pair are conveyed. The rollers are arranged to be stacked one on another in a direction perpendicular to the conveying direction T. All of the conveying rollers 1a, 1b are arranged with mutually parallel longitudinal axes.

輥型之輸送輥1a含有軸桿2,在該軸桿上,使大量輥3保持可旋轉地固定在彼此的軸向距離處。在滾筒型之輸送輥1b的狀況下,使輥滾筒3'保持可旋轉地固定在軸桿上,其滾筒之側向表面4形成基材接觸區,此等輸送輥1b藉由基材接觸區接觸基材,且藉由輥之旋轉移動輸送該等基材。在輥型之輸送輥1a的狀況下,基材接觸區係由輥3之圓周面4'形成。如圖2及圖3中可以看出,輥型及滾筒型之分別彼此層疊地成對地配置的輸送輥1a、1b在其之間形成基材輸送間隙5,在輸送方向T上經由該基材輸送間隙輸送基材,在其端部,每對之兩個輸送輥1在相反意義上旋轉,且在輸送方向T上在相同高度處連續配置之輸送輥1在相同意義上旋轉。 The roller-type conveying roller 1a contains a shaft 2 on which a large number of rollers 3 are held rotatably fixed at axial distances from each other. In the state of the roller-type conveying roller 1b, the roller drum 3' is rotatably fixed to the shaft, and the lateral surface 4 of the drum forms a substrate contact area, and the conveying roller 1b is contacted by the substrate. The substrate is contacted and the substrates are transported by rotational movement of the rolls. In the case of the roll type conveying roller 1a, the substrate contact area is formed by the circumferential surface 4' of the roll 3. As can be seen from FIG. 2 and FIG. 3, the conveying rollers 1a, 1b which are arranged in pairs in a roll type and a drum type, respectively, are formed with a substrate conveying gap 5 therebetween, and the substrate is conveyed in the conveying direction T. The material conveying gap transports the substrate, at its end, each pair of the conveying rollers 1 rotates in the opposite sense, and the conveying rollers 1 continuously arranged at the same height in the conveying direction T rotate in the same sense.

為了支撐及驅動輸送輥1,輸送裝置具有進料搬運器,其在所示實例中含有在輸送輥1之側上的兩個側向進料搬運器單元6a、6b。每一進料搬運器單元6a、6b包含平行於輸送方向T在輸送輥1下方縱向延 伸之基體7及垂直於輸送方向及輸送輥縱軸自其向上突出的軸頸軸承區8。每一軸頸軸承區8含有軸頸軸承9,其中使輸送輥1之軸桿2隨著各別軸桿端部或軸銷10保持可旋轉地移動。 In order to support and drive the transport roller 1, the transport device has a feed carrier which, in the example shown, contains two lateral feed carrier units 6a, 6b on the side of the transport roller 1. Each feed carrier unit 6a, 6b comprises a longitudinal extension below the transport roller 1 parallel to the transport direction T The base body 7 and the journal bearing region 8 projecting upward from the longitudinal direction of the conveying roller and the longitudinal axis of the conveying roller. Each journal bearing region 8 contains a journal bearing 9 in which the shaft 2 of the conveyor roller 1 is kept rotatably movable with the respective shaft end or shaft pin 10.

在一側上,此處在圖1至圖3中的右手側(進料搬運器單元6a位於其上),進料搬運器6包含具有在輸送方向上的連續驅動軸之常規設計之輥驅動器11,個別輸送輥1借助於錐齒輪耦合至該輥驅動器。 On one side, here on the right hand side of Figures 1 to 3 (on which the feed carrier unit 6a is located), the feed carrier 6 comprises a conventionally designed roller drive with a continuous drive shaft in the conveying direction 11. The individual conveyor rollers 1 are coupled to the roller drive by means of bevel gears.

輸送裝置進一步含有放電路徑,輸送輥基材接觸區4、4'及進料搬運器軸頸軸承區8導電地連接至該放電路徑。作為替代例,例如僅軸頸軸承區8可電耦接至此放電路徑。放電路徑分別含有放電管線12a、12b,其自每一進料搬運器單元6a、6b開始,且借助於相關聯的螺紋連接電接觸地附接至進料搬運器單元6a、6b。在所示實例中,連續導電及較佳地金屬軌條13a、13b分別以相同螺紋連接附接於進料搬運器單元6a、6b之下部區中,與後者及與放電管線12a、12b電接觸。兩個軌條13a、13b具有用於各別進料搬運器單元6a、6b之機械穩定化功能,且被用作用於將電荷自軸頸軸承區8耗散至相關聯放電管線12a、12b之集電軌條,該等軸頸軸承區經指派至各種輸送輥1。 The conveyor further includes a discharge path to which the conveyor roller substrate contact zones 4, 4' and the feed carrier journal bearing zone 8 are electrically connected. As an alternative, for example only the journal bearing region 8 can be electrically coupled to this discharge path. The discharge paths respectively contain discharge lines 12a, 12b starting from each of the feed carrier units 6a, 6b and being electrically contactably attached to the feed carrier units 6a, 6b by means of associated threaded connections. In the illustrated example, the continuous conductive and preferably metal rails 13a, 13b are respectively attached in the lower region of the feed carrier unit 6a, 6b with the same threaded connection, in electrical contact with the latter and with the discharge lines 12a, 12b. . The two rails 13a, 13b have a mechanical stabilization function for the respective feed carrier units 6a, 6b and are used to dissipate charge from the journal bearing region 8 to the associated discharge lines 12a, 12b. A collector rail is assigned to the various conveyor rollers 1.

輥滾筒3之充當基材接觸區的圓周面4'由導電塑膠材料(較佳地,PP材料、PVDF材料或PEEK材料)構成,藉由碳黑材料、石墨材料或鈀材料之粒子填充劑以可預定的所要程度使該導電塑膠材料導電。取決於要求及應用,輥3之剩餘部分也可由此導電塑膠材料製成。圓柱形輸送輥1b之充當基材接觸區的側向表面4同樣由此導電及較佳地熱塑性塑膠材料構成,此處還有如下狀況,取決於要求及應用,此等輸送輥1b之滾筒部分同樣由此導電塑膠材料或替代地不同材料構成。輸送輥1之軸桿2較佳地由不鏽鋼或另一金屬材料構成。作為替代例,在此情形似乎有利的情況下,應理解軸桿2可由前述導電塑膠材料中的一者構成。 The circumferential surface 4' of the roll cylinder 3 serving as the substrate contact area is composed of a conductive plastic material (preferably, a PP material, a PVDF material or a PEEK material) by a particle filler of a carbon black material, a graphite material or a palladium material. The conductive plastic material can be made conductive to a desired degree. Depending on the requirements and application, the remainder of the roller 3 can also be made from this electrically conductive plastic material. The lateral surface 4 of the cylindrical conveying roller 1b serving as the substrate contact region is likewise composed of electrically conductive and preferably thermoplastic plastic material, and there are also the following conditions, depending on the requirements and applications, the roller portion of the conveying roller 1b. This is likewise composed of a conductive plastic material or alternatively a different material. The shaft 2 of the conveying roller 1 is preferably made of stainless steel or another metal material. As an alternative, in the event that this situation seems to be advantageous, it will be understood that the shaft 2 may be constructed from one of the aforementioned electrically conductive plastic materials.

進料搬運器6之軸頸軸承區8同樣由導電塑膠材料(特定言之,就此而言上文所提及之材料中的一者)製成。此處較佳地使用導電PE材料或PEEK材料。使用PEEK材料較佳地被限於軸頸軸承區8,而進料搬運器6之剩餘部分(亦即,其基體7)接著較佳地由例如鈦或不鏽鋼材料之金屬材料製成。作為替代例,進料搬運器基體7還可由用於軸頸軸承區8之導電塑膠材料構成,在此狀況下,各別進料搬運器單元6a、6b之單件生產亦為可能的。尤其對於出現相對高環境溫度之應用(諸如,在例如高達90℃的環境溫度佔優勢之乾燥模組中)而言,PEEK材料之使用係有利的。 The journal bearing region 8 of the feed carrier 6 is also made of a conductive plastic material (specifically, one of the materials mentioned above in this regard). Conductive PE materials or PEEK materials are preferably used herein. The use of PEEK material is preferably limited to the journal bearing zone 8, while the remainder of the feed carrier 6 (i.e., its base 7) is then preferably made of a metallic material such as titanium or stainless steel. As an alternative, the feed carrier base 7 can also be constructed of a conductive plastic material for the journal bearing zone 8, in which case a single piece production of the individual feed carrier units 6a, 6b is also possible. The use of PEEK materials is advantageous especially for applications where relatively high ambient temperatures occur, such as in a dry module where ambient temperature is prevalent, for example, up to 90 °C.

在提到的實施例變體中的每一者中,確保存在自輸送輥基材接觸區4、4'至放電管線12a、12b的連續電連接(對於任何靜電電荷之耗散而言係充分的)。在此狀況下,所討論之放電路徑較佳地經配置以用於在自0.1MΩ至2MΩ之範圍內的放電電阻,特定言之,藉由所使用的導電塑膠材料或材料之電導率之對應調整而達成此情形。以此方式,在輸送裝置中,在此等電荷係藉由輥1之與基材接觸區中及進料搬運器單元6a、6b之軸頸軸承區8中的輸送輥1之旋轉操作形成時,可靠地避免了由此輸送之基材或印刷電路板曝露於過度的靜電電荷。根據本發明經由放電路徑及其放電管線12a、12b在輸送裝置中可靠地耗散此等靜電電荷。 In each of the embodiment variants mentioned, it is ensured that there is a continuous electrical connection from the transport roller substrate contact regions 4, 4' to the discharge lines 12a, 12b (for any dissipation of electrostatic charge) of). In this case, the discharge path in question is preferably configured for discharge resistance in the range from 0.1 MΩ to 2 MΩ, in particular, by the conductivity of the conductive plastic material or material used. Adjust to achieve this situation. In this way, in the conveying device, when the electric charges are formed by the rotation operation of the conveying roller 1 in the contact area with the substrate 1 and in the journal bearing region 8 of the feeding carrier units 6a, 6b The substrate or printed circuit board thus transported is reliably prevented from being exposed to excessive electrostatic charges. According to the invention, these electrostatic charges are reliably dissipated in the transport device via the discharge path and its discharge lines 12a, 12b.

圖4及圖5說明圖1至圖3之輸送裝置的變體,為了更容易理解,相同及功能上等效的元件使用相同參考,且就此而言可參考圖1至圖3之輸送裝置的上文描述。 Figures 4 and 5 illustrate variants of the delivery device of Figures 1 to 3, for the sake of easier understanding, the same and functionally equivalent elements use the same reference, and in this regard, reference may be made to the delivery device of Figures 1 to 3 Described above.

圖4及圖5之輸送裝置與上文圖1至圖3的不同之處全部在於,兩個進料搬運器單元6a、6b之軸頸軸承區8被製成與各別基體7分離的組件,且作為軸頸軸承插入件與進料搬運器單元6a、6b之對應凹口相配合。此情形一方面允許軸頸軸承區8之簡單材料解耦,且另一方面允 許基體7之簡單材料解耦,且必要時允許軸頸軸承區8之簡單的可替換性,該等軸頸軸承區在保持基體7時對磨損更敏感。基體7在此狀況下可例如由不鏽鋼材料製成,而軸頸軸承插入件可在必要時由導電PEEK材料製成。 The conveyors of Figures 4 and 5 differ from those of Figures 1 to 3 above in that the journal bearing regions 8 of the two feed carrier units 6a, 6b are formed as separate components from the respective substrates 7. And as a journal bearing insert mates with a corresponding recess of the feed carrier units 6a, 6b. This situation on the one hand allows a simple material decoupling of the journal bearing region 8, and on the other hand allows The simple material of the base body 7 is decoupled and, if necessary, allows for a simple alternative of the journal bearing regions 8, which are more sensitive to wear when the base body 7 is held. The base body 7 can in this case be made, for example, of a stainless steel material, while the journal bearing insert can be made of a conductive PEEK material if necessary.

藉由用於輸送裝置之各種提到的組件之分別合適的材料之上文解釋之選擇,進一步有可能確保所有裝置組件具有所需要的化學穩定性及此等各種裝置組件所需要的熱穩定性,這取決於應用。 It is further possible to ensure that all device components have the required chemical stability and the thermal stability required for such various device components by the above explained selection of suitable materials for the various mentioned components of the delivery device. , depending on the application.

應理解,在替代實施例中,根據本發明之輸送裝置可含有不同數目及配置以及不同組態的輸送輥,這取決於待輸送之基材的類型及使用地點或環境條件。然而,在每一狀況下,提供放電路徑,藉由該放電路徑,輸送輥基材接觸區及/或進料搬運器軸頸軸承區中的靜電電荷可以可靠地耗散且藉此得以避免,另一方面,在無此情形的狀況下,導致裝置之化學或熱穩定性的降低之問題。 It should be understood that in alternative embodiments, the delivery device according to the present invention may contain different numbers and configurations and different configurations of delivery rollers depending on the type of substrate to be delivered and the location or environmental conditions. However, in each case, a discharge path is provided by which the electrostatic charge in the conveyor roll substrate contact zone and/or the feed carrier journal bearing zone can be reliably dissipated and thereby avoided. On the other hand, in the absence of such a situation, the problem of a decrease in the chemical or thermal stability of the device is caused.

1‧‧‧輸送輥 1‧‧‧Conveying roller

1a‧‧‧輥型之輸送輥 1a‧‧‧Roll type conveyor roller

1b‧‧‧滾筒型之輸送輥 1b‧‧‧Roller type conveyor roller

2‧‧‧軸桿 2‧‧‧ shaft

3‧‧‧輥 3‧‧‧ Roll

3'‧‧‧輥滾筒 3'‧‧‧ Roller

4‧‧‧輸送輥基材接觸區/側向表面 4‧‧‧Feed roller substrate contact area/lateral surface

4'‧‧‧輸送輥基材接觸區/圓周面 4'‧‧‧Conveyor roll substrate contact area/circumferential surface

5‧‧‧基材輸送間隙 5‧‧‧Substrate transport gap

6‧‧‧進料搬運器 6‧‧‧Feeding carrier

6a‧‧‧進料搬運器單元 6a‧‧‧Feeder unit

6b‧‧‧進料搬運器單元 6b‧‧‧Feeder unit

7‧‧‧基體 7‧‧‧ base

8‧‧‧軸頸軸承區/軸頸軸承插入件 8‧‧‧ journal bearing area / journal bearing insert

9‧‧‧軸頸軸承 9‧‧‧ journal bearings

10‧‧‧終端軸銷 10‧‧‧ terminal pin

11‧‧‧輥驅動器 11‧‧‧Roller drive

12a‧‧‧放電管線 12a‧‧‧Discharge line

12b‧‧‧放電管線 12b‧‧‧Discharge line

13a‧‧‧金屬軌條 13a‧‧‧Metal rail

13b‧‧‧金屬軌條 13b‧‧‧Metal rail

本發明的有利實施例表示於圖式中,且將在下文中描述。在圖式中:圖1展示印刷電路板輸送裝置之部分平面圖,該印刷電路板輸送裝置包含在輸送方向上連續配置及在橫向於輸送方向的方向上彼此層疊地成對地配置之複數個輸送輥, 圖2展示沿著圖1之線II-II的剖視圖,圖3展示沿著圖1之線III-III的剖視圖,圖4展示用於圖1至圖3的輸送裝置之變體的對應於圖1之平面圖,及圖5展示沿著圖4之線V-V之剖視圖。 Advantageous embodiments of the invention are shown in the drawings and will be described below. In the drawings: Figure 1 shows a partial plan view of a printed circuit board transport device comprising a plurality of transports arranged in pairs in a transport direction and arranged in pairs in a direction transverse to the transport direction. Roller, Figure 2 shows a cross-sectional view taken along line II-II of Figure 1, Figure 3 shows a cross-sectional view along line III-III of Figure 1, and Figure 4 shows a corresponding view of a variant for the transport device of Figures 1 to 3. 1 is a plan view, and FIG. 5 shows a cross-sectional view taken along line VV of FIG.

Claims (7)

一種用於平坦基材之輸送裝置,其包括:在輸送方向上連續配置之一或多個輸送輥(1)及/或在橫向於輸送方向的方向上彼此層疊地配置及在其間形成基材輸送間隙的至少一對輸送輥(1),其中每一輸送輥包含軸桿(2)及可旋轉地固定至該軸桿之基材接觸區(4、4'),及具有軸頸軸承(9)之進料搬運器(6),其中每一輸送輥被安裝成隨著終端軸銷(10)可旋轉地移動,其中該輸送輥基材接觸區(4、4')及該進料搬運器(6)之軸頸軸承區(8)由導電塑膠材料構成,提供放電路徑,該輸送輥基材接觸區及/或該進料搬運器軸頸軸承區導電地連接至該放電路徑,及該進料搬運器包含連續金屬軌條(13a、13b),其電連接至每一輸送輥之該軸頸軸承區(8),且放電管線(12a,12b)電連接至該金屬軌條,其中該金屬軌條(13a、13b)及該放電管線(12a,12b)以相同螺紋連接附接於該進料搬運器(6)之下部區中,該金屬軌條(13a、13b)形成用於將電荷自軸頸軸承區(8)耗散至該放電管線(12a,12b)之集電軌條。 A conveying device for a flat substrate, comprising: one or more conveying rollers (1) continuously arranged in a conveying direction and/or stacked in a direction transverse to the conveying direction and forming a substrate therebetween At least one pair of conveying rollers (1) conveying a gap, wherein each conveying roller comprises a shaft (2) and a substrate contact region (4, 4') rotatably fixed to the shaft, and has a journal bearing ( 9) a feed carrier (6), wherein each conveyor roller is mounted for rotatably moving with a terminal pin (10), wherein the conveyor roller substrate contact zone (4, 4') and the feed The journal bearing region (8) of the carrier (6) is formed of a conductive plastic material to provide a discharge path, and the conveyor roller substrate contact region and/or the feed carrier journal bearing region are electrically connected to the discharge path, And the feed carrier comprises continuous metal rails (13a, 13b) electrically connected to the journal bearing zone (8) of each conveyor roller, and the discharge lines (12a, 12b) are electrically connected to the metal rails Where the metal rails (13a, 13b) and the discharge lines (12a, 12b) are attached to the lower region of the feed carrier (6) with the same threaded connection The metal rail (13a, 13b) is formed for dissipating a charge from the journal bearing region (8) to the discharge line (12a, 12b) of the current collector rail. 如請求項1之輸送裝置,其中該導電塑膠材料為導電PP材料或PE材料或PVDF材料或PEEK材料。 The delivery device of claim 1, wherein the electrically conductive plastic material is a conductive PP material or a PE material or a PVDF material or a PEEK material. 如請求項1或2之輸送裝置,其中該導電塑膠材料含有由碳黑材料或石墨材料或鈀材料組成的導電填充劑。 The delivery device of claim 1 or 2, wherein the electrically conductive plastic material comprises a conductive filler composed of a carbon black material or a graphite material or a palladium material. 如請求項1或2之輸送裝置,其中該放電路徑經組態以用於在自0.1MΩ至2MΩ之範圍內的放電電阻。 The delivery device of claim 1 or 2, wherein the discharge path is configured for a discharge resistance in a range from 0.1 MΩ to 2 MΩ. 如請求項1或2之輸送裝置,其中每一輸送輥之該軸桿由特別是不鏽鋼之金屬材料形成。 The conveying device of claim 1 or 2, wherein the shaft of each of the conveying rollers is formed of a metallic material, in particular stainless steel. 如請求項1或2之輸送裝置,其中該進料搬運器包含由特別是不鏽鋼之金屬材料組成的基體(7),及由該導電塑膠材料組成的軸頸軸承插入件(8),該軸頸軸承插入件附接至該基體,且含有該軸頸軸承區。 The conveying device of claim 1 or 2, wherein the feeding carrier comprises a base body (7) composed of a metallic material, in particular stainless steel, and a journal bearing insert (8) composed of the electrically conductive plastic material, the shaft A neck bearing insert is attached to the base and contains the journal bearing region. 如請求項1或2之輸送裝置,其中該輸送裝置經構形用於輸送作為該平坦基材之印刷電路板。 A delivery device according to claim 1 or 2, wherein the delivery device is configured to convey a printed circuit board as the flat substrate.
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020111519A1 (en) 2020-04-28 2021-10-28 Jdm Innovation Gmbh Device for dispensing medicaments arranged in blister bags and operating methods therefor
CN113942793A (en) * 2021-11-02 2022-01-18 环鸿电子(昆山)有限公司 Electronic product conveying equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000006470A2 (en) * 1998-07-31 2000-02-10 Shuttleworth, Inc. Low electrostatic discharge conveyor
US20130092511A1 (en) * 2011-10-18 2013-04-18 Kuo-Chung Liu Substrate transmission apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7112771U (en) * 1971-07-08 Eisenwerk Weserhuette Ag Composite body made from prefabricated components
DE2152543C3 (en) * 1971-10-21 1981-09-24 Reuter Maschinen- und Werkzeugbau GmbH, 2844 Lemförde Antistatic conveyor belt rollers and their method of manufacture
DE2215342A1 (en) * 1972-03-29 1973-10-18 Reuter Maschinen ANTISTATIC CONVEYOR ROLLERS AND THE PROCESS FOR THEIR PRODUCTION
US3897988A (en) * 1974-02-22 1975-08-05 Textron Inc Bearing for a conveyor roll or the like
JPS6010964Y2 (en) * 1977-12-01 1985-04-12 株式会社大洋プラスチツクス工業所 Antistatic belt conveyor device
DE3608626A1 (en) * 1986-02-13 1987-08-20 Interroll Foerdertechnik Gmbh Carrying or conveying rollers for roller tracks or the like
DE4226789A1 (en) * 1992-08-13 1994-02-17 Sigri Great Lakes Carbon Gmbh Fiber-reinforced plastic roller with outer, wear-resistant, filler-containing plastic layer
DE4237273C2 (en) * 1992-11-05 1995-06-14 Gurtec Gummierungstechnik Gmbh Carrier roller, especially for continuous conveyors for conveying general cargo
DE9306972U1 (en) * 1993-05-07 1993-10-21 Interroll Holding Ag, San Antonino Device for discharging an electrostatic charge on a carrying or conveying roller and a carrying or conveying roller provided therewith
JP3627050B2 (en) * 2001-03-22 2005-03-09 矢崎化工株式会社 Conductive resin-coated steel pipe and extrusion method thereof
DE10128386B4 (en) 2001-06-06 2020-08-13 Gebr. Schmid Gmbh Arrangement for the storage of transport rollers
TWI245590B (en) * 2004-05-06 2005-12-11 Toppoly Optoelectronics Corp An electrostatic discharge protection device and an apparatus using the same
DE102006021035B4 (en) * 2006-04-27 2014-03-06 Paul Sauer Gmbh & Co. Walzenfabrik Kg Roller with elastomeric coating
US7207436B1 (en) * 2006-07-25 2007-04-24 Automotion, Inc. Anti-static roller conveyor
DE102006058052A1 (en) * 2006-12-07 2008-06-12 Guske & Rautenberg Gmbh conveyor roller
DE102007054092B4 (en) * 2007-11-13 2009-08-06 Rena Sondermaschinen Gmbh Device and method for transporting sensitive goods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000006470A2 (en) * 1998-07-31 2000-02-10 Shuttleworth, Inc. Low electrostatic discharge conveyor
US20130092511A1 (en) * 2011-10-18 2013-04-18 Kuo-Chung Liu Substrate transmission apparatus

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