TWI634318B - Temperature measuring device - Google Patents

Abstract

The present invention relates to a temperature measuring device capable of measuring temperature more accurately using a thermal image sensor.

Based on the measurement results of the contact temperature sensor (102) arranged within the temperature measurable range (152) of the thermal image sensor (101) that measures the surface temperature distribution of the measurement area (151) in two dimensions, And the measurement result of the thermal image sensor (101) at the location, the correction value is obtained by the correction value calculation section (103), and the correction section (104) uses the obtained correction value to the thermal image sensor (101) ).

Description

Temperature measuring device

The present invention relates to a temperature measurement device using a thermal image sensor for measuring a two-dimensional temperature distribution of a measurement area.

For the temperature measurement of the inaccessible part, a radiation thermometer capable of performing temperature measurement without contact is used. For example, at a food processing site or the like, from a hygiene point of view, a radiation thermometer is used to measure the temperature without contacting the food and to run the processing line. However, radiation thermometers cause measurement errors due to ambient temperature. This occurs because the temperature change of the lens barrel portion of the radiation thermometer does not match the temperature change rate of the internal infrared detection element. If a radiation thermometer is used, there will be a measurement result with huge errors when the ambient temperature changes drastically. In order to solve these problems, a technique is proposed in which a plurality of infrared detection elements are arranged in a radiation thermometer, and a plurality of detection signals from the infrared detection elements are calculated to correct the measurement temperature (see Patent Document 1).

Examples of objects whose temperature cannot be measured by contact include semiconductor wafers and liquid crystal wafers. When these are heated, since the temperature cannot be detected by contact with the member to be processed, a contact-type temperature sensor cannot be used. In addition, when a radiation thermometer is used, since it is a point measurement, it is difficult to perform, for example, temperature measurement of the entire wafer.

In response, a temperature measurement using a thermal imaging sensor that measures a two-dimensional temperature distribution of a measurement area has been developed. For example, the use of infrared thermography (infrared thermography), which can detect infrared rays emitted from a measurement object, convert the detected energy data into observable temperature data, and display it as image data representing a temperature distribution (see Patent Document 2). In this technology, a plurality of pixels are randomly selected from the image data constituting the temperature data, and the average temperature is obtained based on the temperature data recorded by the selected pixels. The average temperature is used as the representative temperature of each indirect heating area to calculate the relative temperature. Set the temperature error and use it for control.

Patent Document 1: Japanese Patent Application Laid-Open No. 2007-248201

Patent Document 2: Japanese Patent Application Laid-Open No. 2009-238773

However, in the temperature measurement using the above-mentioned thermal imaging sensor, although the output of the sensor can be corrected, due to the influence of the surrounding environment, the optical system introducing infrared rays does not operate normally, or occurs in the optical system itself. When abnormal, an error occurs in the measurement result. For example, there is a problem that temperature measurement using infrared thermography in a food processing production line that temporarily generates water vapor or a thin film manufacturing step with many heat treatment steps is a harsh condition for optical systems. The influence of the system causes errors in the temperature measurement value, which makes it impossible to perform accurate temperature measurement.

The present invention has been made in order to solve the above-mentioned problems, and an object thereof is to enable more accurate temperature measurement using a thermal image sensor.

The temperature measuring device according to the present invention includes a thermal image sensor that measures the surface temperature distribution of a measurement area two-dimensionally, and a contact-type temperature sensor that can measure the temperature in the thermal image sensor. Inside the measurement area; a correction value calculation unit, A correction value is obtained, and the correction value is to make the temperature measurement result of the portion where the contact temperature sensor is arranged obtained by the thermal image sensor coincide with the measurement result of the contact temperature sensor; and a correction unit, which The correction value obtained by the correction value calculation unit is used to correct the measurement result of the measurement area obtained by the thermal image sensor.

The temperature measuring device may further include a temperature variable control unit that changes a temperature of a portion where the contact temperature sensor is disposed, and the correction value calculation unit obtains each temperature after the temperature variable control unit changes. The correction value is corrected by the correction unit using a plurality of correction values obtained by the correction value calculation unit.

The temperature measurement device may further include a temperature control unit that controls a temperature of a portion where the contact temperature sensor is disposed to a management temperature set in a measurement area.

The temperature measuring device may further include an alarm output unit that detects a case where the correction value is equal to or greater than a set upper limit value and outputs an alarm.

As explained above, according to the present invention, when the temperature distribution is measured by the thermal image sensor, the contact with the sensor outside the measurement area is corrected based on the measurement result of the contact temperature sensor that is not affected by the surrounding environment. As a result of the temperature measurement of the temperature sensor, the excellent effect of being able to use the thermal image sensor to measure the temperature more accurately is obtained.

101‧‧‧ thermal image sensor

102‧‧‧contact temperature sensor

103‧‧‧correction value calculation department

104‧‧‧Correction Department

105‧‧‧Alarm output department

111‧‧‧ transport device

112‧‧‧ products

151‧‧‧Measurement area

152‧‧‧Measureable range of temperature

FIG. 1 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 1 of the present invention.

FIG. 2 is a flowchart for explaining an operation example of the temperature measuring device in the first embodiment of the present invention.

FIG. 3 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 2 of the present invention.

FIG. 4 is a flowchart for explaining an operation example of the temperature measuring device in the second embodiment of the present invention.

FIG. 5 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 3 of the present invention.

FIG. 6 is a flowchart for explaining an operation example of the temperature measuring device in the third embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Embodiment 1]

First, a first embodiment of the present invention will be described using FIG. 1. FIG. 1 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 1 of the present invention. The temperature measuring device includes a thermal image sensor 101, a contact temperature sensor 102, a correction value calculation section 103, and a correction section 104.

The thermal image sensor 101 two-dimensionally measures the surface temperature distribution. The thermal image sensor 101 is, for example, a thermopile array sensor composed of a plurality of thermopile arrayed two-dimensionally. A thermopile is a thermoelectric conversion element (infrared sensor) composed of a thermocouple, and one pixel is configured in the thermal image sensor 101. The thermal image sensor 101 capable of measuring a two-dimensional temperature distribution has a temperature measurable range 152 of a predetermined width. The temperature measurable range 152 changes depending on the number of pixels of the thermal image sensor 101 and the configuration of the optical system. The thermal image sensor 101 is used for temperature measurement of a product or the like in a measurement area 151 that is transported to a predetermined range within a temperature measurable range 152.

The contact-type temperature sensor 102 is disposed outside the measurement area 151 within a temperature measurable range 152 of the thermal image sensor 101. The contact temperature sensor 102 measures the temperature (reference temperature) of a reference temperature measurement site outside the measurement area 151 within the temperature measurable range 152. Contact temperature sensor 102, for example, by temperature measuring resistor, thermocouple, fluorescent temperature sensor The measurement device and the like may be sufficient. In general, the contact-type temperature sensor 102 has better temperature measurement accuracy than the thermal image sensor 101. In addition, the reference temperature measurement portion is within the temperature measurable range 152, and the thermal image sensor 101 also performs temperature measurement.

The correction value calculation unit 103 obtains a correction value that is obtained by using the thermal image sensor 101 to obtain a temperature measurement result of the portion (the reference temperature measurement portion) where the contact temperature sensor 102 is disposed and the contact temperature sensor. The measurement result (reference temperature) of the detector 102 is consistent. The correction value calculation unit 103 obtains a correction value using the reference temperature of the reference temperature measurement site measured by the contact temperature sensor 102 and the measurement temperature of the reference temperature measurement site measured at the same time by the thermal image sensor 101.

The correction unit 104 corrects the measurement result of the measurement area 151 obtained by the thermal image sensor 101 based on the correction value obtained by the correction value calculation unit 103. The temperature measurement result (reference temperature) of the contact temperature sensor 102 is not affected by the environment such as the generation of water vapor and the temperature distribution in the space. The reference temperature measured in a state not affected by the environment as described above is used to correct the measurement result of the thermal image sensor 101, thereby obtaining a more accurate method that eliminates the environmental impact on the thermal image sensor 101. The measurement results.

For example, the temperature measurement of the product 112 conveyed by the conveyance device 111 such as a conveyor belt is performed by the thermal image sensor 101 in the measurement area 151 set as a predetermined temperature of the conveyance device 111. The product 112 is, for example, a processed food. Or the article 112 is a film. The product 112 is continuously passed through the measurement area 151 like the conveying device 111 as in the heat treatment steps of the above-mentioned product manufacturing, and the temperature measuring device is also used in the above-mentioned production equipment.

In the measurement area 151, in order to heat-process the product 112 to a predetermined temperature, the processing temperature is controlled to be set using the result of the temperature measurement performed by the thermal image sensor 101. value. If the measurement result of the thermal image sensor 101 corrected by the correction unit 104 is used for the control described above, more reliable control can be achieved. In addition, since the outside of the measurement area 151 in which the contact temperature sensor 102 is disposed is separated from the transport device 111, the contact temperature sensor 102 can be fixed and disposed. In addition, the contact temperature sensor 102 is not in contact with the product 112 on the conveying device 111.

In addition, the temperature measuring device in Embodiment 1 includes an alarm output unit 105 that detects when a correction value calculated by the correction value calculation unit 103 is equal to or greater than a set upper limit value, and issues an alarm. When the temperature measurement result of the reference temperature measurement part obtained by the thermal image sensor 101 and the temperature measurement result of the reference temperature measurement part obtained by the contact temperature sensor 102 are greatly different, for example, it is considered that The thermal image sensor 101 is malfunctioning. In order to detect the situation as described above, an alarm is issued when the correction value becomes a predetermined value or more using the alarm output unit 105. The predetermined value is an allowable temperature range of the product 112 that is being temperature-measured by the thermal image sensor.

Next, an operation example of the temperature measuring device according to the first embodiment of the present invention will be described using a flowchart of FIG. 2.

First, in step S201, the correction value calculation unit 103 acquires a measurement result (reference temperature) measured by the contact temperature sensor 102 disposed at a reference temperature measurement portion. Next, in step S202, the correction value calculation unit 103 acquires a temperature measurement result of a reference temperature measurement site measured by the thermal image sensor 101.

Next, in step S203, the correction value calculation unit 103 compares the two obtained measurement results, and determines whether they match. In the case of inconsistency (No in step S203), in step S204, the correction value calculation unit 103 obtains a correction value, and the correction value makes the image sensed by the thermal image. The temperature measurement result of the portion (reference temperature measurement portion) where the contact temperature sensor 102 is disposed obtained by the sensor 101 is consistent with the measurement result (reference temperature) of the contact temperature sensor 102. If they match (YES in step S203), the operation is terminated without obtaining a correction value.

Next, in step S205, the alarm output unit 105 determines whether the obtained correction value is equal to or greater than the set upper limit value. When the obtained correction value is equal to or higher than the upper limit value (YES in step S205), the alarm output unit 105 outputs an alarm. When the calculated correction value is less than the upper limit (No in step S205), the alarm output unit 105 proceeds to step S206 without outputting an alarm, and the correction unit 104 uses the correction value calculated by the correction value calculation unit 103 to borrow The measurement result of the measurement area 151 obtained by the thermal image sensor 101 is corrected.

[Embodiment 2]

Next, a second embodiment of the present invention will be described using FIG. 3. FIG. 3 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 2 of the present invention. This temperature measuring device includes a thermal image sensor 101, a contact temperature sensor 102, a correction value calculation section 103, and a correction section 104. These configurations are the same as those of the first embodiment described above, and descriptions thereof are omitted.

The second embodiment includes a temperature variable control unit 106 that changes the temperature of a portion where the contact temperature sensor 102 is disposed. The temperature variable control unit 106 controls the heater 107 to change the temperature of a portion where the contact temperature sensor 102 is disposed. The temperature variable control unit 106 changes the temperature of a portion where the contact temperature sensor 102 is arranged to a plurality of temperature conditions that are set.

In the second embodiment, the correction value calculation unit 103 obtains a correction value for each temperature changed by the temperature variable control unit 106, and the correction unit 104 performs correction based on the plurality of correction values obtained by the correction value calculation unit 103.

The temperature measurement result (reference temperature) obtained by the contact temperature sensor 102 is not affected by the environment such as the generation of water vapor and the temperature distribution in the space. The reference temperature measured in a state not affected by the environment as described above is used to correct the measurement result of the thermal image sensor 101, thereby obtaining a more accurate method that eliminates the environmental impact on the thermal image sensor 101. The measurement results. In addition, correction is performed using a plurality of correction values obtained under various conditions of temperature conditions, so that more accurate correction can be performed over a wider temperature range, and more accurate can be obtained over a wider temperature range Determination results.

Next, an operation example of the temperature measuring device in Embodiment 2 of the present invention will be described using a flowchart of FIG. 4.

First, in step S301, the temperature variable control unit 106 controls the heater 107 in accordance with any one of the set temperature conditions. For example, when 30 ° C, 40 ° C, 50 ° C, and 60 ° C are set as the conditions, the temperature variable control unit 106 sets the heater 107 to the temperature condition of 30 ° C.

Next, in step S302, the correction value calculation unit 103 acquires the measurement temperature (reference temperature) measured by the contact temperature sensor 102, and the contact temperature sensor 102 is arranged to be set to a temperature condition of 30 ° C The heater 107 was heated to a reference measurement site at 30 ° C. Next, in step S303, the correction value calculation unit 103 acquires the temperature measurement result of the reference temperature measurement site measured by the thermal image sensor 101.

Next, in step S304, the correction value calculation section 103 compares the two obtained measurement results, and determines whether or not they agree. In the case of inconsistency (NO in step S304), in step S305, the correction value calculation unit 103 obtains a first correction value, and the first correction value causes the contact-type temperature obtained by the thermal image sensor 101 to be arranged. Location of sensor 102 (reference temperature measurement The temperature measurement result of the (fixed position) is consistent with the measurement result (reference temperature) of the contact temperature sensor 102. If they match (YES in step S304), the process proceeds to step S306 without obtaining a correction value.

Next, in step S306, the temperature variable control unit 106 determines whether all the set temperature conditions have been implemented, and if there are temperature conditions that have not been implemented (No in step S306), in step S307, the temperature is variable The control unit 106 controls the heater 107 to a temperature condition that has not yet been set. For example, when 30 ° C, 40 ° C, 50 ° C, and 60 ° C are set as the conditions, and the conditions of 30 ° C have been implemented, the temperature variable control unit 106 sets the heater 107 to the temperature condition of 40 ° C.

If the temperature variable control unit 106 sets a new temperature condition to the heater 107 in step S307, the above-mentioned steps S302 to S305 are performed. When it is determined in step S306 that all the set temperature conditions are implemented (YES in step S306), it is determined in S308 whether or not there is a correction value obtained by the correction value calculation unit 103.

For example, under all conditions of 30 ° C, 40 ° C, 50 ° C, and 60 ° C, the temperature of the reference temperature measured by the contact temperature sensor 102 and the temperature of the reference temperature measurement portion measured by the thermal image sensor 101 are measured. When the results are different, if the first correction value, the second correction value, the third correction value, and the fourth correction value are obtained, the correction value exists. In addition, under the conditions of 40 ° C, 50 ° C, and 60 ° C, when the reference temperature measured by the contact temperature sensor 102 and the temperature measurement result of the reference temperature measurement portion measured by the thermal image sensor 101 are different, If the first correction value, the second correction value, and the third correction value are obtained, the correction value exists.

In addition, for example, under conditions of 30 ° C, 50 ° C, and 60 ° C, the reference temperature measured by the contact temperature sensor 102 and the temperature measurement result of the reference temperature measurement portion measured by the thermal image sensor 101 may be different. Next, find the first correction value, the second correction value, and the third correction. If the value is positive, the correction value exists. In addition, for example, if the reference temperature measured by the contact temperature sensor 102 and the reference temperature measured by the thermal image sensor 101 are different at 50 ° C and 60 ° C, find When the first correction value and the second correction value are output, the correction value exists.

On the other hand, under all conditions of 30 ° C, 40 ° C, 50 ° C, and 60 ° C, the reference temperature measured by the contact temperature sensor 102 and the reference temperature measured by the thermal image sensor 101 When the temperature measurement results are consistent, the correction value does not exist if the correction value is not obtained.

When at least one correction value is obtained (YES in step S308), in step S309, the correction unit 104 uses the correction value obtained by the correction value calculation unit 103 to measure the value obtained by the thermal image sensor 101. The measurement result of the area 151 is corrected. Here, when the correction unit 104 obtains a plurality of correction values, for example, the correction is performed using the average value of these correction values. In addition, according to the relationship between the reference temperature for which the correction value is obtained and the corresponding correction value, correction is performed for each temperature range measured by the thermal image sensor 101.

[Embodiment 3]

Next, a third embodiment of the present invention will be described using FIG. 5. FIG. 5 is a configuration diagram showing a configuration of a temperature measuring device in Embodiment 3 of the present invention. This temperature measuring device includes a thermal image sensor 101, a contact temperature sensor 102, a correction value calculation section 103, and a correction section 104. These configurations are the same as those of the first and second embodiments described above, and descriptions thereof are omitted.

The third embodiment includes a temperature control unit 206 that controls the temperature of a portion where the contact temperature sensor 102 is disposed to a management temperature set in the measurement area 151. The temperature control unit 206 controls the heater 107 to control the temperature of the portion where the contact temperature sensor 102 is disposed. The temperature is controlled to a set management temperature of the measurement area 151. For example, a construction management system (not shown) controls the temperature of the product 112 transferred by the transfer device 111. The temperature control unit 206 acquires the control information from a construction management system (not shown), and controls the temperature of the heater 107 to be a management temperature based on the acquired control information.

In the third embodiment, the correction value calculation unit 103 obtains a correction value for the state of the managed temperature being controlled by the temperature control unit 206, and the correction unit 104 performs the correction using the correction value obtained by the correction value calculation unit 103.

The temperature measurement result (reference temperature) of the contact temperature sensor 102 is not affected by the environment such as the generation of water vapor and the temperature distribution in the space. The reference temperature measured in a state not affected by the environment as described above is used to correct the measurement result of the thermal image sensor 101, thereby obtaining a more accurate method that eliminates the environmental impact on the thermal image sensor 101. The measurement results. In addition, by using a correction value obtained in a state where the management temperature is controlled to be set in the measurement area 151, more accurate correction can be performed, and more accurate measurement results can be obtained.

Next, an operation example of the temperature measuring device in Embodiment 3 of the present invention will be described using a flowchart of FIG. 6.

First, in step S401, the temperature control unit 206 acquires temperature control information (managed temperature) in the measurement area 151 of the product 112 from an engineering management system (not shown). Next, in step S402, the temperature control unit 206 controls the heater 107 using the acquired temperature control information. For example, in the measurement area 151, when the product 112 is heated and controlled to 80 ° C, the temperature control unit 206 sets the heater 107 to a management temperature condition of 80 ° C.

Next, in step S403, the correction value calculation unit 103 acquires the measurement result (reference temperature) measured by the contact temperature sensor 102, which is the contact temperature sensor 102 It is arranged at a reference measurement site heated by a heater 107 set to a management temperature condition of 80 ° C. Next, in step S404, the correction value calculation unit 103 acquires a temperature measurement result of a reference temperature measurement site measured by the thermal image sensor 101.

Next, in step S405, the correction value calculation section 103 compares the two obtained measurement results, and determines whether they match. In the case of inconsistency (No in step S405), in step S406, the correction value calculation unit 103 obtains a correction value, and the correction value is obtained by disposing the contact temperature sensor 102 obtained by the thermal image sensor 101 The temperature measurement result of the portion (reference temperature measurement portion) is consistent with the measurement result (reference temperature) of the contact temperature sensor 102. If they match (YES in step S405), the operation is terminated without obtaining a correction value. If the correction value is obtained, in step S407, the correction unit 104 uses the correction value obtained by the correction value calculation unit 103 to correct the measurement result of the measurement area 151 performed by the thermal image sensor 101.

As described above, according to the present invention, when the temperature distribution is measured by the thermal image sensor, the contact type is arranged outside the measurement area based on the measurement result of the contact type temperature sensor that is not affected by the surrounding environment. As a result of the temperature measurement of the temperature sensor, the temperature can be measured more accurately using the thermal imaging sensor.

In addition, the present invention is not limited to the embodiments described above, and it is apparent that various modifications and combinations can be implemented by a person having common knowledge in the art within the technical idea of the present invention.

Claims (4)

A temperature measuring device comprising: a thermal image sensor that measures a surface temperature distribution of a measurement area two-dimensionally; and a contact-type temperature sensor capable of measuring a temperature of the thermal image sensor It is arranged outside the measurement area within a range; a correction value calculation unit obtains a correction value, and the correction value is a temperature measurement at a portion where the contact temperature sensor is arranged, which is obtained by the thermal image sensor. The result is consistent with the measurement result of the contact temperature sensor; and a correction unit that uses the correction value obtained by the correction value calculation unit to correct the measurement result of the measurement area obtained by the thermal image sensor. For example, the temperature measurement device of the first patent application scope includes a temperature variable control unit that changes a temperature of a portion where the contact temperature sensor is disposed, and the correction value calculation unit is adapted to the temperature variable control unit. The correction value is obtained for each changed temperature; the correction section uses the plurality of correction values obtained by the correction value calculation section to perform correction. For example, the temperature measurement device according to the first patent application scope includes a temperature control unit that controls a temperature of a portion where the contact temperature sensor is disposed to a management temperature set in the measurement area. For example, the temperature measurement device according to any one of claims 1 to 3 includes an alarm output unit that detects when the correction value is equal to or greater than a set upper limit value and outputs an alarm.