TWI633821B - Flexible printed circuit board and method manufacturing same - Google Patents

Flexible printed circuit board and method manufacturing same Download PDF

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Publication number
TWI633821B
TWI633821B TW105112059A TW105112059A TWI633821B TW I633821 B TWI633821 B TW I633821B TW 105112059 A TW105112059 A TW 105112059A TW 105112059 A TW105112059 A TW 105112059A TW I633821 B TWI633821 B TW I633821B
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Taiwan
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photosensitive layer
layer
hole
via hole
photosensitive
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TW105112059A
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Chinese (zh)
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TW201735755A (en
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李艷祿
楊梅
杜明華
盧志高
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鵬鼎科技股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/118Printed elements for providing electric connections to or between printed circuits specially for flexible printed circuits, e.g. using folded portions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0502Patterning and lithography
    • H05K2203/052Magnetographic patterning

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

一種軟性電路板,包括相互貼覆的第一感光層、第二感光層及第三感 光層,第三感光層位於第一感光層及第二感光層之間,第一感光層包括第一線路層及第一導通孔,第一導通孔位於第一線路層內,第二感光層包括第二線路層及第二導通孔,第二導通孔位於第二線路層內,第三感光層包括第三導通孔,第一導通孔、第二導通孔及第三導通孔的位置相對應,第一導通孔、第二導通孔及第三導通孔相互導通連接第一線路層及第二線路層,第一導通孔、第二導通孔的孔徑相同,第三導通孔的孔徑大於第一、第二導通孔的孔徑。 A flexible circuit board includes a first photosensitive layer, a second photosensitive layer, and a third sensor, which are attached to each other. A light layer, a third photosensitive layer is located between the first photosensitive layer and a second photosensitive layer, the first photosensitive layer includes a first wiring layer and a first via hole, the first via hole is located in the first wiring layer, and the second photosensitive layer Including a second circuit layer and a second via hole, the second via hole is located in the second circuit layer, and the third photosensitive layer includes a third via hole, and the positions of the first via hole, the second via hole, and the third via hole correspond to each other. The first via hole, the second via hole, and the third via hole are conductively connected to each other to connect the first circuit layer and the second circuit layer. The diameters of the first via hole and the second via hole are the same. And the diameter of the second via.

Description

軟性電路板及其製作方法 Flexible circuit board and manufacturing method thereof

本發明涉及電路板及其製作領域,尤其涉及一種軟性電路板及其製作方法。 The present invention relates to the field of circuit boards and their manufacturing, in particular to a flexible circuit board and its manufacturing method.

目前,傳統的軟性電路板線路的製作方法主要為減成法和加成法,各線路層之間的導藉由鐳射鑽孔或者機械鑽孔導通。孔壁金屬化時採用電鍍方式完成。惟,傳統方法製作軟性電路板的過程中常出現線路與孔環盤偏位,導致線間微短、孔破等不良;或者孔環斷差造成的孔環斷線不良;由於覆蓋膜(CVL)上膠層填充線間導致軟性電路板(FPC)表層不平整。無論減成法還是加成法制作形成線路後會凸起附著於聚醯亞胺(PI)表面,附著力完全依靠線路四個表面中的下表面與PI之間的結合力,線寬越來越細,在一定外力下線路容易與PI剝離,造成短路,斷路不良;CVL貼合後膠會填充到線路間的縫隙中,造成CVL表面凹凸不平,而高密度表面貼裝技術(SMT)對柔性線路板平整度要求越來越高,因此凹凸不平的CVL表面定會制約SMT朝精細化高密度化發展。 At present, the traditional manufacturing methods of flexible circuit board circuits are mainly the subtractive method and the additive method, and the conduction between the circuit layers is conducted by laser drilling or mechanical drilling. The hole wall is metalized by electroplating. However, in the process of manufacturing flexible circuit boards by traditional methods, deviations between the circuit and the hole ring disk often occur, resulting in shortness between the wires, hole breakage, etc .; or poor ring wire disconnection caused by the hole ring gap; due to the cover film (CVL) The surface layer of the flexible circuit board (FPC) is uneven due to the filling lines between the sizing layers. No matter the subtractive method or the additive method is used to form a line, it will be convexly attached to the surface of polyimide (PI). The adhesion depends entirely on the bonding force between the lower surface of the four surfaces of the line and the PI, and the line width is increasing. The thinner, the circuit is easy to peel off from PI under a certain external force, causing short circuit and poor disconnection. After CVL bonding, the glue will fill the gap between the circuits, causing the CVL surface to be uneven, and high-density surface mount technology (SMT) The flatness requirements of flexible circuit boards are getting higher and higher, so the uneven CVL surface will definitely restrict the development of SMT towards fineness and high density.

有鑒於此,有必要提供一種克服上述問題的軟性電路板的製作方法。 In view of this, it is necessary to provide a method for manufacturing a flexible circuit board that overcomes the above problems.

一種軟性電路板的製作方法,包括步驟:提供一第一感光層、一第二感光層及一第三感光層,所述第一感光層、第二感光層及第三感光層均用感光材料製成;分別對所述第一感光層及第二感光層進行曝光處理以獲得第一光致抗蝕層、第一孔區域、第二光致抗蝕層及第二孔區域,對第三感光層進行曝光處理得到第三孔區域;對所述第一感光層、第二感光層及第三感光層進行對位壓合以得到一複合基板,所述第一感光層及所述第二感光層位於所述第三感光層相對兩側;對壓合後的複合基板進行顯影處理,在所述第一感光層上形成第一凹槽及第一通孔,在所述第二感光層上形成第二凹槽及第二通孔,在所述第三感光層上形成第三通孔;對所述複合基板進行線路製作,在所述第一感光層上形成第一線路層及所述第一導通孔,在所述第二感光層上形成第二線路層及第二導通孔,在所述第三感光層上形成第三導通孔,所述第一導通孔、所述第二導通孔及所述第三導通孔相互導通所述第一線路層及所述第二線路層。 A method for manufacturing a flexible circuit board includes the steps of providing a first photosensitive layer, a second photosensitive layer, and a third photosensitive layer. The first photosensitive layer, the second photosensitive layer, and the third photosensitive layer are all made of photosensitive material. Making; respectively performing exposure processing on the first photosensitive layer and the second photosensitive layer to obtain a first photoresist layer, a first hole region, a second photoresist layer, and a second hole region, and the third The photosensitive layer is subjected to exposure processing to obtain a third hole region; the first photosensitive layer, the second photosensitive layer, and the third photosensitive layer are aligned and laminated to obtain a composite substrate, the first photosensitive layer and the second The photosensitive layer is located on opposite sides of the third photosensitive layer; the laminated composite substrate is subjected to development processing, a first groove and a first through hole are formed on the first photosensitive layer, and the second photosensitive layer A second groove and a second through-hole are formed on the third photosensitive layer, and a third through-hole is formed on the third photosensitive layer. Said first via hole, forming a second line on said second photosensitive layer Layer, and a second via hole, a third via hole is formed on the third photosensitive layer, the first via hole, the second via hole, and the third via hole mutually communicate with the first circuit layer and The second circuit layer.

一種軟性電路板,包括相互貼覆的第一感光層、第二感光層及第三感光層,所述第三感光層位於所述第一感光層及所述第二感光層之間,所述第一感光層包括第一線路層及第一導通孔,所述第一導通孔位於所述第一線路層內,所述第二感光層包括第二線路層及第二導通孔,所述第二 導通孔位於所述第二線路層內,所述第三感光層包括第三導通孔,所述第一導通孔、第二導通孔及第三導通孔的位置相對應,所述第一導通孔、第二導通孔及第三導通孔相互導通連接所述第一線路層及所述第二線路層,所述第一導通孔、第二導通孔的孔徑相同,所述第三導通孔的孔徑大於所述第一、第二導通孔的孔徑。 A flexible circuit board includes a first photosensitive layer, a second photosensitive layer, and a third photosensitive layer that are pasted on each other. The third photosensitive layer is located between the first photosensitive layer and the second photosensitive layer. The first photosensitive layer includes a first circuit layer and a first via hole, the first via hole is located in the first circuit layer, the second photosensitive layer includes a second circuit layer and a second via hole, and the first two A via hole is located in the second circuit layer, the third photosensitive layer includes a third via hole, and the first via hole, the second via hole, and the third via hole are corresponding in position, and the first via hole The second via hole and the third via hole are connected to each other to connect the first circuit layer and the second circuit layer. The diameters of the first via hole and the second via hole are the same, and the diameter of the third via hole is the same. Larger than the diameter of the first and second vias.

與先前技術相比,本實施例提供的軟性電路板的製作方法相較于傳統的軟性電路板製作方法具有以下優勢:1.本發明產品中各種孔可由曝光,顯影的方式製作,無需機械鑽孔或鐳射加工,有效提升生產效率;2.第一感光層及第二感光層中的導通孔和線路藉由曝光,顯影同時成型,可做到孔與線無偏位,無需設計小孔搭配大pad(孔環),即實現無孔環設計,層間導通處可布更高密度線路;3.線路層嵌入到基材中,線路板貼覆蓋膜後表面平整;4.線路板表面平整沒有斷差,保護覆蓋膜可以使用更加薄型的材料,降低了產品厚度;5.該製作方法可以克服極細線路間覆蓋層膠填充不充分而造成遷移失效。 Compared with the prior art, the manufacturing method of the flexible circuit board provided in this embodiment has the following advantages compared with the traditional manufacturing method of the flexible circuit board: 1. Various holes in the product of the present invention can be manufactured by exposure and development without the need for a mechanical drill Hole or laser processing, effectively improve production efficiency; 2. The vias and lines in the first photosensitive layer and the second photosensitive layer are formed by exposure and development at the same time, so that the holes and lines are not offset, no need to design small holes Large pad (hole ring), that is, to achieve a non-porous ring design, higher-density wiring can be laid at the interlayer conduction; 3. the circuit layer is embedded in the substrate, the surface of the circuit board is covered with a flat surface; 4. the surface of the circuit board is flat Breakage difference, the protective cover film can use thinner materials, which reduces the product thickness; 5. The manufacturing method can overcome the migration failure caused by insufficient filling of the cover layer between the ultra-fine lines.

10‧‧‧第一感光層 10‧‧‧The first photosensitive layer

11‧‧‧第一光致抗蝕層 11‧‧‧The first photoresist layer

12‧‧‧第一孔區域 12‧‧‧ first hole area

13‧‧‧第一凹槽 13‧‧‧first groove

14‧‧‧第一通孔 14‧‧‧The first through hole

15‧‧‧第一線路層 15‧‧‧First line layer

16‧‧‧第一導通孔 16‧‧‧first via

20‧‧‧第二感光層 20‧‧‧Second photosensitive layer

21‧‧‧第二光致抗蝕層 21‧‧‧Second photoresist layer

22‧‧‧第二孔區域 22‧‧‧Second hole area

23‧‧‧第二凹槽 23‧‧‧Second groove

24‧‧‧第二通孔 24‧‧‧Second through hole

25‧‧‧第二線路層 25‧‧‧Second line layer

26‧‧‧第二導通孔 26‧‧‧Second via

30‧‧‧第三感光層 30‧‧‧ the third photosensitive layer

32‧‧‧第三孔區域 32‧‧‧ third hole area

34‧‧‧第三通孔 34‧‧‧Third through hole

36‧‧‧第三導通孔 36‧‧‧Third via

40‧‧‧複合基板 40‧‧‧ composite substrate

42‧‧‧第一銅層 42‧‧‧The first copper layer

44‧‧‧第二銅層 44‧‧‧Second copper layer

50‧‧‧第一覆蓋膜 50‧‧‧The first cover film

52‧‧‧第一膜層 52‧‧‧The first film layer

54‧‧‧第一膠層 54‧‧‧The first adhesive layer

60‧‧‧第二覆蓋膜 60‧‧‧Second cover film

62‧‧‧第二膜層 62‧‧‧Second film layer

64‧‧‧第二膠層 64‧‧‧Second glue layer

100‧‧‧軟性電路板 100‧‧‧ flexible circuit board

圖1係本發明實施方式提供的第一感光層、第二感光層及第三感光層的剖面示意圖。 FIG. 1 is a schematic cross-sectional view of a first photosensitive layer, a second photosensitive layer, and a third photosensitive layer according to an embodiment of the present invention.

圖2係圖1中第一感光層、第二感光層及第三感光層的經曝光後形成光致抗蝕層及孔區域的剖面示意圖。 FIG. 2 is a schematic cross-sectional view of the photoresist layer and the hole area formed after the first photosensitive layer, the second photosensitive layer, and the third photosensitive layer are exposed in FIG. 1.

圖3係圖2中第一感光層、第二感光層及第三感光層壓合形成複合基板後的剖面示意圖。 FIG. 3 is a schematic cross-sectional view of the first photosensitive layer, the second photosensitive layer, and the third photosensitive layer in FIG. 2 after being combined to form a composite substrate.

圖4係圖3中複合基板經顯影固處理後的剖面示意圖。 FIG. 4 is a schematic cross-sectional view of the composite substrate in FIG. 3 after being developed and solidified.

圖5係圖4中的複合基板的立體示意圖。 FIG. 5 is a schematic perspective view of the composite substrate in FIG. 4.

圖6係圖4中的複合基板經過化學鍍銅後形成第一銅層後的剖面示意圖。 FIG. 6 is a schematic cross-sectional view of the composite substrate in FIG. 4 after electroless copper plating is performed to form a first copper layer.

圖7係圖6中的複合基板經電鍍處理後形成第二銅層後的剖面示意圖。 FIG. 7 is a schematic cross-sectional view of the composite substrate in FIG. 6 after the second copper layer is formed after the plating process is performed.

圖8係圖7中的複合基板經減銅處理後形成具有第一線路層及第二線路層的軟性電路板後的剖面示意圖。 8 is a schematic cross-sectional view of the composite substrate in FIG. 7 after being subjected to copper reduction treatment to form a flexible circuit board having a first circuit layer and a second circuit layer.

圖9係圖8中的軟性電路板兩側貼覆上覆蓋膜後的剖面示意圖。 9 is a schematic cross-sectional view of the flexible circuit board in FIG. 8 after the two sides are covered with a cover film.

本技術方案提供的軟性電路板製作方法包括如下步驟: The method for manufacturing a flexible circuit board provided by this technical solution includes the following steps:

第一步,請參閱圖1,提供一個第一感光層10、一個第二感光層20及一個第三感光層30。 The first step, referring to FIG. 1, provides a first photosensitive layer 10, a second photosensitive layer 20 and a third photosensitive layer 30.

所述第一感光層10、所述第二感光層20及所述第三感光層30均由感光材料製作形成。所述感光材料可以為感光型覆蓋膜(PICL),感光型聚醯亞胺樹脂(PSPI)等其他適合製作軟性電路板的感光材料,其厚度規格無特殊限制。 The first photosensitive layer 10, the second photosensitive layer 20, and the third photosensitive layer 30 are all made of a photosensitive material. The photosensitive material may be other photosensitive materials suitable for making flexible circuit boards, such as a photosensitive cover film (PICL), a photosensitive polyimide resin (PSPI), and the like.

在本實施方式中,所述第一感光層10及所述第二感光層20的厚度相同。所述第三感光層30的厚度稍微大於所述第一感光層10及所述第二感光層20的厚度。 In this embodiment, the thicknesses of the first photosensitive layer 10 and the second photosensitive layer 20 are the same. The thickness of the third photosensitive layer 30 is slightly larger than the thickness of the first photosensitive layer 10 and the second photosensitive layer 20.

第二步,請參閱圖2,對所述第一感光層10、所述第二感光層20及所述第三感光層30分別進行曝光處理。 In the second step, referring to FIG. 2, the first photosensitive layer 10, the second photosensitive layer 20, and the third photosensitive layer 30 are separately exposed.

具體地,所述第一感光層10、所述第二感光層20及所述第三感光層30分別進行曝光,使部分所述第一感光層10、所述第二感光層20及所述第三感光層30固化。 Specifically, the first photosensitive layer 10, the second photosensitive layer 20, and the third photosensitive layer 30 are respectively exposed, so that part of the first photosensitive layer 10, the second photosensitive layer 20, and the The third photosensitive layer 30 is cured.

所述第一感光層10經曝光處理後形成第一光致抗蝕層11及第一孔區域12。所述第一孔區域12形成在所述第一光致抗蝕層11內。所述第二感光層20經顯影處理後形成第二光致抗蝕層21及第二孔區域22。所述第二孔區域22形成在所述第二光致抗蝕層21內。所述第三感光層30經顯影處理後形成第三孔區域32。所述第一孔區域12的形狀與所述第二孔區域22相同。所述第三孔區域32的形狀大於第一孔區域12的形狀。本實施方式中,所述第一感光層10上形成有複數第一孔區域12,所述第二感光層20上形成有複數第二孔區域22,所述第三感光層30上形成有兩個第三孔區域32。其中,所述複數第一孔區域12分別與複數第二孔區域22相對應。所述兩個第三孔區域32分別與所述第一感光層10及所述第二感光層20相對兩側的兩個第一孔區域12及兩個第二孔區域22相對應。 After the first photosensitive layer 10 is exposed, a first photoresist layer 11 and a first hole region 12 are formed. The first hole region 12 is formed in the first photoresist layer 11. After the second photosensitive layer 20 is developed, a second photoresist layer 21 and a second hole region 22 are formed. The second hole region 22 is formed in the second photoresist layer 21. After the third photosensitive layer 30 is developed, a third hole region 32 is formed. The shape of the first hole region 12 is the same as that of the second hole region 22. The shape of the third hole region 32 is larger than the shape of the first hole region 12. In this embodiment, a plurality of first hole regions 12 are formed on the first photosensitive layer 10, a plurality of second hole regions 22 are formed on the second photosensitive layer 20, and two holes are formed on the third photosensitive layer 30.个 third hole area 32. The plurality of first hole regions 12 respectively correspond to the plurality of second hole regions 22. The two third hole regions 32 correspond to the two first hole regions 12 and the two second hole regions 22 on opposite sides of the first photosensitive layer 10 and the second photosensitive layer 20, respectively.

第三步,請參閱圖3,對第一感光層10、第二感光層20及第三感光層30進行壓合處理,使三者壓合成為一個複合基板40。 In the third step, referring to FIG. 3, the first photosensitive layer 10, the second photosensitive layer 20, and the third photosensitive layer 30 are laminated together to form a composite substrate 40.

其中,所述第三感光層30位於所述第一感光層10與所述第二感光層20之間,三者之間相互對準。每個第三孔區域32分別與相應的所述第一孔區域12及相應的所述第二孔區域22對準。具體地,所述第一感光層10、第二感光層20及第三感光層30上均設置有複數定位孔,以方便三者之間進行對位壓合。 The third photosensitive layer 30 is located between the first photosensitive layer 10 and the second photosensitive layer 20, and the three are aligned with each other. Each third hole region 32 is aligned with a corresponding one of the first hole regions 12 and a corresponding one of the second hole regions 22. Specifically, the first photosensitive layer 10, the second photosensitive layer 20, and the third photosensitive layer 30 are each provided with a plurality of positioning holes, so as to facilitate the alignment pressing between the three.

第四步,請參閱圖4及圖5,對壓合後的複合基板40進行顯影處理。 In the fourth step, referring to FIGS. 4 and 5, a development process is performed on the laminated composite substrate 40.

所述第一光致抗蝕層11經顯影後形成第一凹槽13。所述第一孔區域12顯影後形成第一通孔14。所述第一通孔14形成於所述第一凹槽13中。所述第二光致抗蝕層21顯影後形成第二凹槽23。所述第二孔區域22顯影後形成第二通孔24。所述第二通孔24形成在所述第二凹槽23中。所述第三孔區域32顯影後形成第三通孔34。其中每個所述第三通孔34分別與相應的所述第一通孔14及所述第二通孔24相連通,形成貫穿第一感光層10、第二感光層20及第三感光層30的通孔。 After the first photoresist layer 11 is developed, a first groove 13 is formed. After the first hole region 12 is developed, a first through hole 14 is formed. The first through hole 14 is formed in the first groove 13. A second groove 23 is formed after the second photoresist layer 21 is developed. After the second hole region 22 is developed, a second through hole 24 is formed. The second through hole 24 is formed in the second groove 23. After the third hole region 32 is developed, a third through hole 34 is formed. Each of the third through-holes 34 communicates with the corresponding first through-hole 14 and the second through-hole 24 to form a first photosensitive layer 10, a second photosensitive layer 20, and a third photosensitive layer. 30 through holes.

第五步,請參閱圖6,將顯影後的複合基板40進行化學鍍銅處理,從而在所述複合基板40的裸露部分形成第一銅層42。 Fifth step, referring to FIG. 6, the developed composite substrate 40 is subjected to an electroless copper plating process, so that a first copper layer 42 is formed on an exposed portion of the composite substrate 40.

所述第一銅層42形成於所述第一感光層10表面、第二感光層20表面、第一凹槽13內、第二凹槽23內、第一通孔14、第二通孔24及第三通孔34內。 The first copper layer 42 is formed on the surface of the first photosensitive layer 10, the surface of the second photosensitive layer 20, in the first groove 13, the second groove 23, the first through hole 14, and the second through hole 24. And in the third through hole 34.

所述第一銅層42為一層薄銅層,該步驟為後續的電鍍銅處理做準備,使所述複合基板40在電鍍過程中更容易地電鍍上銅。 The first copper layer 42 is a thin copper layer. This step prepares for the subsequent copper electroplating process, so that the composite substrate 40 is more easily electroplated with copper during the electroplating process.

第六步,請參閱圖7,對形成第一銅層42後的複合基板40進行電鍍銅處理。 In the sixth step, referring to FIG. 7, copper plating is performed on the composite substrate 40 after the first copper layer 42 is formed.

所述第一銅層42表面,包括所述第一通孔14、第二通孔24及第三通孔34均被鍍銅所填滿,形成第二銅層44。 The surface of the first copper layer 42, including the first through-holes 14, the second through-holes 24 and the third through-holes 34, are filled with copper plating to form a second copper layer 44.

其中,所述第二銅層44填滿所述第一凹槽13。所述第二銅層44填滿所述第一通孔14形成所述第一導通孔16。所述第二銅層44填滿所述第二凹槽23。所述第二銅層44填滿所述第二通孔24形成第二導通孔26。所述第二銅層44填滿所述第三通孔34形成第三導通孔36。其中,所述第三導通孔36與所述第一導通孔16及所述第二導通孔26的位置相對應,且相互導通連接所述複合基板40兩側的所述第二銅層44。 The second copper layer 44 fills the first groove 13. The second copper layer 44 fills the first via hole 14 to form the first via hole 16. The second copper layer 44 fills the second groove 23. The second copper layer 44 fills the second through hole 24 to form a second through hole 26. The second copper layer 44 fills the third via hole 34 to form a third via hole 36. Wherein, the third via hole 36 corresponds to the positions of the first via hole 16 and the second via hole 26, and is connected to the second copper layer 44 on both sides of the composite substrate 40.

第七步,請參閱圖8,對電鍍銅後的所述複合基板40進行減銅處理。 In a seventh step, referring to FIG. 8, copper reduction is performed on the composite substrate 40 after copper plating.

所述複合基板40藉由蝕刻等步驟將所述複合基板40兩側表面的銅去掉,僅留下所述第一導通孔16、第二導通孔26及第三導通孔36內的銅,以在所述複合基板40兩側表面形成所述第一線路層15及第二線路層25。此時,所述第一感光層10及所述第二感光層20均為光滑表面。所述第一線路層15表面與所述第一感光層10表面齊平,所述第二線路層25表面與所述第二感光層20表面齊平。 The composite substrate 40 removes copper on both surfaces of the composite substrate 40 through steps such as etching, leaving only the copper in the first via 16, the second via 26, and the third via 36. The first circuit layer 15 and the second circuit layer 25 are formed on both surfaces of the composite substrate 40. At this time, the first photosensitive layer 10 and the second photosensitive layer 20 are both smooth surfaces. The surface of the first circuit layer 15 is flush with the surface of the first photosensitive layer 10, and the surface of the second circuit layer 25 is flush with the surface of the second photosensitive layer 20.

第八步,請參閱圖9,提供一個第一覆蓋膜50及一個第二覆蓋膜60。將所述第一覆蓋膜50及所述第二覆蓋膜60壓合在所述複合基板的兩側表面。形成所述軟性電路板100。 Eighth step, referring to FIG. 9, a first cover film 50 and a second cover film 60 are provided. The first cover film 50 and the second cover film 60 are laminated on both surfaces of the composite substrate. The flexible circuit board 100 is formed.

所述第一覆蓋膜50包括相貼的第一膜層52及第一膠層54。所述第一膠層54貼覆在所述第一感光層10及所述第一線路層15表面。所述第一膜層52遠離所述第一線路層15。 The first cover film 50 includes a first film layer 52 and a first adhesive layer 54. The first adhesive layer 54 is adhered on the surfaces of the first photosensitive layer 10 and the first circuit layer 15. The first film layer 52 is far from the first circuit layer 15.

所述第二覆蓋膜60包括相貼的第二膜層62及第二膠層64。所述第二膠層64貼覆在所述第二感光層20及所述第二線路層25表面。所述第二膜層62遠離所述第二線路層25。 The second cover film 60 includes a second film layer 62 and a second adhesive layer 64. The second adhesive layer 64 is adhered on the surfaces of the second photosensitive layer 20 and the second circuit layer 25. The second film layer 62 is far from the second circuit layer 25.

所述第一覆蓋膜及所述第二覆蓋膜可為CVL,感光型覆蓋膜(PICL),液晶聚合物(LCP)等材料,由於不涉及填充性可選擇薄型化材料製作超薄的產品。 The first cover film and the second cover film may be made of materials such as CVL, photosensitive cover film (PICL), liquid crystal polymer (LCP), etc. Since the filling material is not involved, thin materials can be selected to make ultra-thin products.

圖9為本實施方式中所述之方法製作之軟性電路板100。 FIG. 9 is a flexible circuit board 100 made by the method described in this embodiment.

一種軟性電路板100包括相互貼合的第一感光層10、第二感光層20及第三感光層30。所述第三感光層30位於所述第一感光層10及所述第二感光層20之間。所述第一感光層10包括第一線路層15及第一導通孔16。所述第一導通孔16位於所述第一線路層15內。所述第二感光層20包括第二線路層25及第二導通孔26。所述第二導通孔26位於所述第二線路層25內。所述第三感光層30包括第三導通孔36。所述第三導通孔36與所述第一導通孔16及所述第二導通孔26的位置相對應。每個所述第三導通孔36導通連接一個相應的所述第一導通孔16及所述第二導通孔26。所述第一線路層15與所述第二線路層25藉由所述第一導通孔16、所述第二導通孔26及所述第三導通孔36相導通。所述第一導通孔16與所述第二導通孔26的孔徑相同。所述第三導通孔36的孔徑略大於所述第一導通孔16及所述第二導通孔26的孔徑。 A flexible circuit board 100 includes a first photosensitive layer 10, a second photosensitive layer 20 and a third photosensitive layer 30 which are bonded to each other. The third photosensitive layer 30 is located between the first photosensitive layer 10 and the second photosensitive layer 20. The first photosensitive layer 10 includes a first circuit layer 15 and a first via hole 16. The first via hole 16 is located in the first circuit layer 15. The second photosensitive layer 20 includes a second circuit layer 25 and a second via hole 26. The second via hole 26 is located in the second circuit layer 25. The third photosensitive layer 30 includes a third through hole 36. The third via holes 36 correspond to positions of the first via holes 16 and the second via holes 26. Each of the third via holes 36 is electrically connected to a corresponding one of the first via holes 16 and the second via hole 26. The first circuit layer 15 and the second circuit layer 25 communicate with each other through the first via hole 16, the second via hole 26, and the third via hole 36. A diameter of the first via hole 16 is the same as that of the second via hole 26. A diameter of the third via 36 is slightly larger than a diameter of the first via 16 and the second via 26.

與先前技術相比,本實施例提供的軟性電路板的製作方法相較于傳統的軟性電路板製作方法具有以下優勢:1.本發明產品中各種孔可由曝光,顯影的方式製作,無需機械鑽孔或鐳射加工,有效提升生產效率;2.第一感光層及第二感光層中的導通孔和線路藉由曝光,顯影同時成型,可做到孔與線無偏位,無需設計小孔搭配大pad(孔環),即實現無孔環設計,層間導通處可布更高密度線路;3.線路層嵌入到基材中,線路板貼覆蓋膜後表面平整;4.線路板表面平整沒有斷差,保護覆蓋膜可以使用更加薄型的材料,降低了產品厚度;5.該製作方法可以克服極細線路間覆蓋層膠填充不充分而造成遷移失效。 Compared with the prior art, the manufacturing method of the flexible circuit board provided in this embodiment has the following advantages compared with the traditional manufacturing method of the flexible circuit board: 1. Various holes in the product of the present invention can be manufactured by exposure and development without the need for a mechanical drill Hole or laser processing, effectively improve production efficiency; 2. The vias and lines in the first photosensitive layer and the second photosensitive layer are formed by exposure and development at the same time, so that the holes and lines are not offset, no need to design small holes Large pad (hole ring), that is, to achieve a non-porous ring design, higher-density wiring can be laid at the interlayer conduction; 3. the circuit layer is embedded in the substrate, the surface of the circuit board is covered with a flat surface; 4. the surface of the circuit board is flat Breakage difference, the protective cover film can use thinner materials, which reduces the product thickness; 5. The manufacturing method can overcome the migration failure caused by insufficient filling of the cover layer between the ultra-fine lines.

可以理解的係,對於本領域具有通常知識者來說,可以根據本發明的技術構思做出其他各種相應的改變與變形,而所有這些改變與變形都應屬於本發明的保護範圍。 Understandably, for those having ordinary knowledge in the art, various other corresponding changes and deformations can be made according to the technical concept of the present invention, and all these changes and deformations should belong to the protection scope of the present invention.

Claims (8)

一種軟性電路板之製作方法,包括步驟:提供一第一感光層、一第二感光層及一第三感光層,所述第一感光層、所述第二感光層及所述第三感光層均由感光材料製成,所述第一感光層及所述第二感光層的厚度相同,所述第三感光層的厚度稍微大於所述第一感光層及所述第二感光層的厚度;分別對所述第一感光層及第二感光層進行曝光處理以獲得第一光致抗蝕層、第一孔區域、第二光致抗蝕層及第二孔區域,對第三感光層進行曝光處理得到第三孔區域;對所述第一感光層、所述第二感光層及所述第三感光層進行對位壓合以得到一複合基板,所述第一感光層及所述第二感光層位於所述第三感光層相對兩側;對壓合後的複合基板進行顯影處理,在所述第一感光層上形成第一凹槽及第一通孔,在所述第二感光層上形成第二凹槽及第二通孔,在所述第三感光層上形成第三通孔;對所述複合基板進行線路製作,在所述第一感光層上形成第一線路層及第一導通孔,在所述第二感光層上形成第二線路層及第二導通孔,在所述第三感光層上形成第三導通孔,所述第一導通孔、所述第二導通孔及所述第三導通孔相互導通所述第一線路層及所述第二線路層;提供兩個覆蓋膜,所述兩個覆蓋膜分別貼附在所述第一感光層和所述第二感光層上。A method for manufacturing a flexible circuit board includes the steps of providing a first photosensitive layer, a second photosensitive layer, and a third photosensitive layer, the first photosensitive layer, the second photosensitive layer, and the third photosensitive layer. Both are made of a photosensitive material, the thickness of the first photosensitive layer and the second photosensitive layer are the same, and the thickness of the third photosensitive layer is slightly larger than the thickness of the first photosensitive layer and the second photosensitive layer; Performing exposure processing on the first photosensitive layer and the second photosensitive layer to obtain a first photoresist layer, a first hole area, a second photoresist layer, and a second hole area, and performing a third photosensitive layer A third hole region is obtained through exposure processing; the first photosensitive layer, the second photosensitive layer, and the third photosensitive layer are aligned and laminated to obtain a composite substrate, the first photosensitive layer, and the first photosensitive layer. Two photosensitive layers are located on opposite sides of the third photosensitive layer; the laminated composite substrate is subjected to development processing, a first groove and a first through hole are formed on the first photosensitive layer, and the second photosensitive layer is formed on the second photosensitive layer. A second groove and a second through hole are formed on the layer, A third through hole is formed thereon; a circuit is made on the composite substrate, a first circuit layer and a first via are formed on the first photosensitive layer, and a second circuit layer and a first via are formed on the second photosensitive layer. Two via holes, a third via hole is formed on the third photosensitive layer, and the first via hole, the second via hole, and the third via hole mutually conduct the first circuit layer and the first via layer. Two circuit layers; two cover films are provided, and the two cover films are respectively attached to the first photosensitive layer and the second photosensitive layer. 如請求項1所述之軟性電路板的製作方法,其中,對所述電路基板進行線路製作時,先對所述複合基板進行化學鍍銅以在所述第一感光層、第二感光層表面及複數通孔內形成第一銅層。The method for manufacturing a flexible circuit board according to claim 1, wherein, when the circuit substrate is fabricated, the composite substrate is first subjected to electroless copper plating on the surfaces of the first photosensitive layer and the second photosensitive layer. A first copper layer is formed in the plurality of through holes. 如請求項2所述之軟性電路板的製作方法,其中,對化學鍍銅後的複合基板進行電鍍,所述第一凹槽被鍍銅填滿形成所述第一線路層,所述第二凹槽被鍍銅填滿形成所述第二線路層。The method for manufacturing a flexible circuit board according to claim 2, wherein the composite substrate after electroless copper plating is electroplated, and the first groove is filled with copper to form the first circuit layer, and the second The groove is filled with copper plating to form the second circuit layer. 如請求項3所述之軟性電路板的製作方法,其中,所述複合基板在進行電鍍處理後還包括以下步驟:對所述複合基板進行減銅處理,暴露出所述第一感光層及所述第二感光層以形成所述第一線路層及所述第二線路層。The method for manufacturing a flexible circuit board according to claim 3, wherein after the composite substrate is electroplated, the method further includes the following steps: performing a copper reduction treatment on the composite substrate to expose the first photosensitive layer and the substrate. The second photosensitive layer forms the first circuit layer and the second circuit layer. 如請求項1所述之軟性電路板的製作方法,其中,所述覆蓋膜包括膠連膜層和膠層,所述膠層貼覆在所述第一感光層及所述第二感光層上。The method for manufacturing a flexible circuit board according to claim 1, wherein the cover film includes an adhesive film layer and an adhesive layer, and the adhesive layer is adhered to the first photosensitive layer and the second photosensitive layer . 如請求項1所述之軟性電路板的製作方法,其中,曝光處理時,所述第三孔區域分別與所述第一、第二孔區域相對應,所述第一孔區域的孔徑等於所述第二孔區域的孔徑,所述第三孔區域的孔徑大於所述第一、第二孔區域的孔徑。The method for manufacturing a flexible circuit board according to claim 1, wherein during the exposure process, the third hole region corresponds to the first and second hole regions, respectively, and the aperture of the first hole region is equal to the The pore diameter of the second hole region is larger than that of the first and second hole regions. 如請求項1所述之軟性電路板的製作方法,其中,所述第一感光層、第二感光層及第三感光層上設置有複數定位孔,該複數定位孔用於第一感光層、第二感光層及第三感光層之間的定位。The method for manufacturing a flexible circuit board according to claim 1, wherein the first photosensitive layer, the second photosensitive layer and the third photosensitive layer are provided with a plurality of positioning holes for the first photosensitive layer, Positioning between the second photosensitive layer and the third photosensitive layer. 一種軟性電路板,包括相互貼覆的第一感光層、第二感光層及第三感光層,所述第三感光層位於所述第一感光層及所述第二感光層之間,所述第一感光層及所述第二感光層的厚度相同,所述第三感光層的厚度稍微大於所述第一感光層及所述第二感光層的厚度,所述第一感光層包括第一線路層及第一導通孔,所述第一導通孔位於所述第一線路層內,所述第二感光層包括第二線路層及第二導通孔,所述第二導通孔位於所述第二線路層內,所述第三感光層包括第三導通孔,所述第一導通孔、第二導通孔及第三導通孔的位置相對應,所述第一導通孔、第二導通孔及第三導通孔相互導通連接所述第一線路層及所述第二線路層,所述第一導通孔、第二導通孔的孔徑相同,所述第三導通孔的孔徑大於所述第一、第二導通孔的孔徑,所述軟性電路板還包括兩個覆蓋膜,所述兩個覆蓋膜分別貼覆在所述第一感光層及所述第二感光層表面。A flexible circuit board includes a first photosensitive layer, a second photosensitive layer, and a third photosensitive layer that are pasted on each other. The third photosensitive layer is located between the first photosensitive layer and the second photosensitive layer. The thickness of the first photosensitive layer and the second photosensitive layer are the same. The thickness of the third photosensitive layer is slightly larger than the thickness of the first photosensitive layer and the second photosensitive layer. The first photosensitive layer includes a first A circuit layer and a first via hole, the first via hole is located in the first circuit layer, the second photosensitive layer includes a second circuit layer and a second via hole, and the second via hole is located in the first Within the two circuit layers, the third photosensitive layer includes a third via hole, and the first via hole, the second via hole, and the third via hole are corresponding in position. The first via hole, the second via hole, and Third vias are connected to each other to connect the first circuit layer and the second circuit layer. The diameters of the first and second vias are the same, and the diameters of the third vias are larger than those of the first and second vias. The aperture of the second via, the flexible circuit board further includes two coverings The two films are attached to cover overlying the first surface of the second photosensitive layer and the photosensitive layer.
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