TWI632562B - Paste composition and solar cell components - Google Patents

Paste composition and solar cell components Download PDF

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TWI632562B
TWI632562B TW103129037A TW103129037A TWI632562B TW I632562 B TWI632562 B TW I632562B TW 103129037 A TW103129037 A TW 103129037A TW 103129037 A TW103129037 A TW 103129037A TW I632562 B TWI632562 B TW I632562B
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paste composition
aluminum
powder
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boron
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TW201519259A (en
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辻孝輔
馬瓦 達翰林
松原萌子
中原正博
和辻隆
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日商東洋鋁股份有限公司
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • H01L31/0264Inorganic materials
    • H01L31/028Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
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    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract

本發明提供一種用於以在矽半導體基板的背面上形成電極之糊組成物,與設有使用該組成物所形成之背面電極的太陽電池元件,且該糊組成物可增大開路電壓,同時還能抑制電流密度之減少。 The present invention provides a paste composition for forming an electrode on a back surface of a germanium semiconductor substrate, and a solar cell element provided with a back electrode formed using the composition, and the paste composition can increase an open circuit voltage while It also suppresses the reduction in current density.

該糊組成物是用於以在構成結晶系矽太陽電池之矽半導體基板的背面上形成電極者,其含有鋁粉末、Al-B合金粉末、玻璃粉末,以及有機載劑。該糊組成物中的硼濃度是在0.005質量%以上,且在0.05質量%以下。 The paste composition is used for forming an electrode on the back surface of a germanium semiconductor substrate constituting a crystal system solar cell, and contains aluminum powder, Al-B alloy powder, glass powder, and an organic carrier. The boron concentration in the paste composition is 0.005% by mass or more and 0.05% by mass or less.

Description

糊組成物與太陽電池元件 Paste composition and solar cell components 發明領域 Field of invention

本發明是有關於一般所稱的糊組成物與太陽電池元件,特定地,是有關於在構成結晶系矽太陽電池的矽半導體基板的背面上形成電極之時所使用的糊組成物,以及使用其以形成背面電極之太陽電池元件。 The present invention relates to a paste composition and a solar cell element generally referred to, and specifically relates to a paste composition used when an electrode is formed on a back surface of a tantalum semiconductor substrate constituting a crystal system solar cell, and It is a solar cell element that forms a back electrode.

發明背景 Background of the invention

作為在矽半導體基板背面上形成有電極之電子零件,已知有如日本專利特開2003-69056號公報(專利文獻1)、日本專利特表2009-530845號公報(專利文獻2)所公開之太陽電池元件。 The sun disclosed in the Japanese Patent Publication No. 2003-69056 (Patent Document 1), and the Japanese Patent Publication No. 2009-530845 (Patent Document 2) is known as an electronic component in which an electrode is formed on the back surface of a ruthenium semiconductor substrate. Battery component.

圖1為模式地表示太陽電池元件之一般截面構造之圖。 Fig. 1 is a view schematically showing a general sectional structure of a solar cell element.

如圖1所示,太陽電池元件是使用厚度200μm左右之p型矽半導體基板1所構成。在p型矽半導體基板1的受光面側形成有,厚度為0.3~0.6μm之作為n型雜質層的n+層2、位於其上的抗反射膜3與柵極(grid electrode)4。 As shown in Fig. 1, the solar cell element is formed using a p-type germanium semiconductor substrate 1 having a thickness of about 200 μm. On the light-receiving surface side of the p-type germanium semiconductor substrate 1, an n + layer 2 as an n-type impurity layer having a thickness of 0.3 to 0.6 μm , an anti-reflection film 3 and a grid electrode 4 thereon are formed.

又,在p型矽半導體基板1的背面側形成有鋁電極層5。鋁電極層5是將由鋁粉末、玻璃料(glass frit)以及有機 質載劑(organic vehicle)所構成之糊組成物,以網版印刷進行塗佈,並乾燥後,以660℃(鋁的熔點)以上的溫度短時間燒結而形成。藉由在這個燒結之時將鋁擴散到p型矽半導體基板1內部,而在鋁電極層5與p型矽半導體基板1之間形成Al-Si合金層6,同時形成因鋁原子的擴散而形成之作為雜質層的p+層7。藉由這個p+層7的存在,可防止電子再結合,而可獲得使生成載子(carrier)之收集效率提升的BSF(背面電場,Back Surface Field)效果。 Further, an aluminum electrode layer 5 is formed on the back side of the p-type germanium semiconductor substrate 1. The aluminum electrode layer 5 is a paste composition composed of an aluminum powder, a glass frit, and an organic vehicle, which is applied by screen printing and dried, and then dried at 660 ° C (melting point of aluminum). The above temperature is formed by sintering in a short time. By diffusing aluminum into the p-type germanium semiconductor substrate 1 at the time of this sintering, an Al-Si alloy layer 6 is formed between the aluminum electrode layer 5 and the p-type germanium semiconductor substrate 1, and diffusion due to aluminum atoms is formed at the same time. A p + layer 7 is formed as an impurity layer. By the presence of this p + layer 7, it is possible to prevent recombination of electrons, and it is possible to obtain a BSF (Back Surface Field) effect of improving the collection efficiency of a carrier.

針對形成作為p+層7之BSF層的機制,可概略地說明如下。首先,藉由將已塗布糊組成物之p型矽半導體基板1,用狀態圖中的Al-Si合金之固相線溫度(577℃)以上的高溫(一般是700~900℃)作熱處理時,糊中所含之Al與電池單元(cell)原有的Si會熔融,而形成Al-Si合金的熔融物。之後,藉由將形成有Al-Si合金的熔融物之p型矽半導體基板1急速冷卻到接近室溫,使Al-Si熔融物再次固化。此時,因鋁原子往矽的擴散比矽原子往鋁的擴散還要慢,故Al-Si合金的熔融物中的鋁原子的一部分會留在矽中,而在形成Al-Si合金層6的同時,還形成含高濃度之鋁的矽層,p+層7(即BSF層)。 The mechanism for forming the BSF layer as the p + layer 7 can be roughly explained as follows. First, when the p-type germanium semiconductor substrate 1 to which the paste composition has been applied is heat-treated at a high temperature (usually 700 to 900 ° C) of the solidus temperature (577 ° C) or higher of the Al-Si alloy in the state diagram. The Al contained in the paste and the original Si of the cell are melted to form a melt of the Al-Si alloy. Thereafter, the p-type germanium semiconductor substrate 1 on which the molten material of the Al—Si alloy is formed is rapidly cooled to near room temperature, and the Al—Si melt is solidified again. At this time, since the diffusion of the aluminum atom toward the crucible is slower than the diffusion of the hafnium atom to the aluminum, a part of the aluminum atom in the melt of the Al-Si alloy remains in the crucible, and the Al-Si alloy layer 6 is formed. At the same time, a ruthenium layer containing a high concentration of aluminum, p + layer 7 (ie, a BSF layer) is formed.

另一方面,作為使太陽電池的轉換效率更加提升之目的,而形成均勻的BSF層之方法,或,增加BSF層中所含雜質濃度的方法等,迄今已進行過許多檢討。例如,在日本專利特開2003-69056號公報(專利文獻1)中所記載的太陽電池中,是藉由將選自於硼粉末、無機硼化合物以及有 機硼化合物所構成之群組中的至少1種硼含有物添加到糊組成物中,以謀求BSF效果之提升。 On the other hand, many methods have been conducted so far for the purpose of further improving the conversion efficiency of the solar cell, forming a uniform BSF layer, or increasing the concentration of impurities contained in the BSF layer. For example, in the solar cell described in Japanese Laid-Open Patent Publication No. 2003-69056 (Patent Document 1), it is selected from boron powder, inorganic boron compound, and At least one boron-containing substance in the group consisting of organic boron compounds is added to the paste composition to improve the BSF effect.

在日本專利特表2009-530845號公報(專利文獻2)中所記載的太陽電池中,則是為了使BSF層的雜質濃度增加,而使用含Al-B合金之糊組成物。如這些所揭示地,藉由將和鋁相同之帶3價價數的硼含有物添加到糊組成物中,以使BSF層中的雜質濃度增加的方法,迄今仍持續被檢討著。 In the solar cell described in Japanese Laid-Open Patent Publication No. 2009-530845 (Patent Document 2), a paste composition containing an Al-B alloy is used in order to increase the impurity concentration of the BSF layer. As disclosed above, a method of adding a boron-containing material having a trivalent valence of the same amount as aluminum to the paste composition to increase the impurity concentration in the BSF layer has been continuously reviewed.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:日本專利特開2003-69056號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2003-69056

專利文獻2:日本專利特表2009-530845號公報 Patent Document 2: Japanese Patent Special Publication No. 2009-530845

發明概要 Summary of invention

但是,根據日本專利特開2003-69056號公報(專利文獻1)中所記載的方法,已知硼含有物在糊組成物中是以單體分布,所以當將形成BSF層的機制納入考慮時,會有硼原子在BSF層中不均勻地擴散的情形。並且,BSF層中之硼的不均勻擴散會變成開路電壓增大的障礙。 However, it is known that the boron-containing substance is distributed as a monomer in the paste composition according to the method described in Japanese Laid-Open Patent Publication No. 2003-69056 (Patent Document 1), so when the mechanism for forming the BSF layer is taken into consideration There is a case where boron atoms are unevenly diffused in the BSF layer. Also, uneven diffusion of boron in the BSF layer becomes an obstacle to an increase in open circuit voltage.

關於在日本專利特表2009-530845號公報(專利文獻2)中所記載之太陽電池的實施例中所使用的含0.2質量%硼的Al-0.2質量%B合金,由於在狀態圖中此合金之液相線的所示位置是在1000℃附近,故在實際燒結太陽電池元 件之溫度(亦即,一般是700~900℃)下,會在作為金屬間化合物AlB2之原樣保持下讓硼與液態的鋁混合,所以會有無法使硼原子擴散到BSF層中的情形。 The Al-0.2% by mass B alloy containing 0.2% by mass of boron used in the embodiment of the solar cell described in Japanese Patent Publication No. 2009-530845 (Patent Document 2), because of the alloy in the state diagram The position of the liquidus is around 1000 ° C, so in the actual temperature of the sintered solar cell element (that is, generally 700 ~ 900 ° C), the boron will remain as the intermetallic compound AlB 2 It is mixed with liquid aluminum, so there is a case where boron atoms cannot be diffused into the BSF layer.

此外,在將糊組成物塗布於太陽電池元件的背面時,若糊組成物的硼量較多時,則會有因BSF層中所含之雜質濃度過多而導致背面的光反射率降低的疑慮。若背面的光反射率降低,則會導致電流密度的減少。 Further, when the paste composition is applied to the back surface of the solar cell element, when the amount of boron in the paste composition is large, there is a fear that the light reflectance of the back surface is lowered due to an excessive concentration of impurities contained in the BSF layer. . If the light reflectance of the back surface is lowered, the current density is reduced.

於是,本發明之目的即為解決上述之課題,而提供一種用於以在矽半導體基板的背面上形成電極之糊組成物,與設有使用該組成物所形成之背面電極的太陽電池元件,且該糊組成物可增大開路電壓,同時還能抑制電流密度之減少。 Accordingly, an object of the present invention is to solve the above problems, and to provide a paste composition for forming an electrode on a back surface of a germanium semiconductor substrate and a solar cell element provided with a back electrode formed using the composition. Moreover, the paste composition can increase the open circuit voltage while suppressing the decrease in current density.

本發明之發明者們,為了解決以往技術上的問題點而反覆努力研究的結果,發現要在矽半導體基板的背面上形成電極,藉由使用包含鋁粉末與鋁-硼(Al-B)合金粉末的混合粉末,並且,使用含有特定量之硼的糊組成物,就可以達成上述目的。根據此洞見,本發明之糊組成物具有以下的特徵。 The inventors of the present invention have found that an electrode is formed on the back surface of a tantalum semiconductor substrate by using an aluminum-containing powder and an aluminum-boron (Al-B) alloy in order to solve the problems of the prior art. The above object can be attained by mixing powders of powders and using a paste composition containing a specific amount of boron. Based on this insight, the paste composition of the present invention has the following features.

本發明之糊組成物,是用於以在構成結晶系矽太陽電池之矽半導體晶板的背面上形成電極者,且其含有鋁粉末、鋁-硼(Al-B)合金粉末、玻璃粉末,以及有機載劑。該糊組成物中的硼濃度是在0.005質量%以上,且在0.05質量%以下。 The paste composition of the present invention is used for forming an electrode on the back surface of a germanium crystal plate constituting a crystal system solar cell, and contains aluminum powder, aluminum-boron (Al-B) alloy powder, and glass powder. And an organic carrier. The boron concentration in the paste composition is 0.005% by mass or more and 0.05% by mass or less.

較理想的是,使Al-B合金粉末含有0.01質量%以上且0.07質量%以下的硼。 It is preferable that the Al—B alloy powder contains 0.01% by mass or more and 0.07% by mass or less of boron.

本發明之太陽電池元件包含一電極,該電極係藉由將具有上述任一種特徵之糊組成物塗布在矽半導體基板的背面上之後,予以燒結而形成者。 The solar cell element of the present invention comprises an electrode formed by applying a paste composition having any of the above characteristics to the back surface of a tantalum semiconductor substrate and then sintering it.

如上所述,根據本發明,可提供一種用於在矽半導體基板的背面上形成電極,而藉由使用含有鋁粉末與Al-B合金粉末之混合粉末,並且,含有特定量之硼的糊組成物,以使開路電壓增大,同時還能抑制電流密度的減少之糊組成物,與設有使用該組成物而形成之背面電極的太陽電池元件。 As described above, according to the present invention, it is possible to provide an electrode for forming an electrode on the back surface of a germanium semiconductor substrate by using a mixed powder containing an aluminum powder and an Al-B alloy powder, and containing a specific amount of boron. A paste composition which increases the open circuit voltage and suppresses a decrease in current density, and a solar cell element provided with a back electrode formed using the composition.

1‧‧‧p型矽半導體基板 1‧‧‧p-type germanium semiconductor substrate

2‧‧‧n型雜質層 2‧‧‧n type impurity layer

3‧‧‧抗反射膜 3‧‧‧Anti-reflective film

4‧‧‧柵極 4‧‧‧Gate

5‧‧‧鋁電極層 5‧‧‧Aluminum electrode layer

6‧‧‧Al-Si合金層 6‧‧‧Al-Si alloy layer

7‧‧‧p+7‧‧‧p + layer

8‧‧‧背面電極 8‧‧‧Back electrode

圖1為作為一個實施形態而將本發明所應用之太陽電池元件的一般截面構造模式地表示之圖。 Fig. 1 is a view schematically showing a general cross-sectional structure of a solar cell element to which the present invention is applied as an embodiment.

用以實施發明之形態 Form for implementing the invention

本發明之發明者們,為了解決以往技術上的問題點,經過反覆努力研究的結果,發現了藉由讓用於在矽半導體的基板背面上形成電極而使用之糊組成物中,含有鋁粉末和Al-B合金粉末之混合粉末,並且,使其含有特定量之硼,就可以達成上述目的。根據此洞見,本發明之糊組成物具備以下之特徵。 The inventors of the present invention have found that a paste composition used for forming an electrode on the back surface of a substrate of a germanium semiconductor contains aluminum powder in order to solve the problems of the prior art. The above object can be attained by mixing a powder with an Al-B alloy powder and containing a specific amount of boron. Based on this insight, the paste composition of the present invention has the following features.

本發明之糊組成物,是用於在構成結晶系矽太陽 電池之矽半導體基板的背面上形成電極而使用的糊組成物,並含有鋁粉末、Al-B合金粉末、玻璃粉末、以及有機載劑。本發明之糊組成物中的硼濃度是在0.005質量%以上,且在0.05質量%以下。 The paste composition of the present invention is used for forming a crystalline system sun A paste composition used for forming an electrode on the back surface of the semiconductor substrate of the battery, and containing aluminum powder, Al-B alloy powder, glass powder, and an organic carrier. The boron concentration in the paste composition of the present invention is 0.005% by mass or more and 0.05% by mass or less.

本發明之糊組成物中所使用的Al-B合金粉末,宜含有0.01質量%以上且0.07質量%以下的硼。 The Al-B alloy powder used in the paste composition of the present invention preferably contains 0.01% by mass or more and 0.07% by mass or less of boron.

作為用於以在矽半導體基板的背面上形成電極之糊組成物,根據含有鋁粉末及Al-B合金粉末,同時還含有特定量之硼的本發明之糊組成物,可以藉由使硼往BSF層之擴散均勻化而謀求開路電壓之增大,同時還能抑制在太陽電池元件的背面的光反射率惡化而造成的電流密度之減少。 As a paste composition for forming an electrode on the back surface of a germanium semiconductor substrate, according to the paste composition of the present invention containing aluminum powder and Al-B alloy powder and containing a specific amount of boron, boron can be made by The diffusion of the BSF layer is uniformized to increase the open circuit voltage, and it is also possible to suppress a decrease in current density caused by deterioration of the light reflectance on the back surface of the solar cell element.

<太陽電池元件> <Solar battery component>

如圖1所示,作為本發明之太陽電池元件的一個實施形態的p型太陽電池元件,可使用例如,厚度為180~250μm之p型矽半導體基板1來構成。在p型矽半導體基板1的受光面側表面上,形成有厚度為0.3~0.6μm之作為n型雜質層的n+層2,其上還形成有由例如,氮化矽膜所構成之抗反射膜(鈍化膜(passivation film))3和柵極(grid electrode)4。作為表面電極之柵極4,是藉由例如,將銀糊膏網版印刷後再進行燒結而形成。 As shown in Fig. 1, a p-type solar cell element which is one embodiment of the solar cell element of the present invention can be formed using, for example, a p-type germanium semiconductor substrate 1 having a thickness of 180 to 250 μm . On the light-receiving surface side surface of the p-type germanium semiconductor substrate 1, an n + layer 2 as an n-type impurity layer having a thickness of 0.3 to 0.6 μm is formed, and a germanium nitride film is formed thereon, for example. An antireflection film (passivation film) 3 and a grid electrode 4. The gate electrode 4 as a surface electrode is formed by, for example, screen printing a silver paste and then sintering it.

又,在和p型矽半導體基板1之受光面相反側的背面上,形成有鋁電極層5。鋁電極層5是將本發明之糊組成物以網版印刷等進行塗布,並使其乾燥後,以超過660℃(鋁 的熔點)的溫度作短時間的燒結(燒透法(fire through method))而形成。本發明之糊組成物含有鋁粉末、Al-B合金粉末、玻璃粉末,以及有機載劑。藉由在燒結之時使鋁擴散到p型矽半導體基板1的內部,就可以在鋁電極層5和p型矽半導體基板1之間形成Al-Si合金層6,同時還形成因鋁原子的擴散而造成之作為雜質層的p+層(BSF層)7。因為這個p+層7的存在,可以防止電子的再結合,並獲得可提升生成載子的收集效率之BSF(Back Surface Field)效果。如此進行,就可以在p型矽半導體基板1的背面側,形成由鋁電極層5和Al-Si合金層6所構成之背面電極8,此外,在面向鋁電極層5之p型矽半導體基板1的區域則形成有BSF層7。 Further, an aluminum electrode layer 5 is formed on the back surface opposite to the light receiving surface of the p-type germanium semiconductor substrate 1. The aluminum electrode layer 5 is a method in which the paste composition of the present invention is applied by screen printing or the like and dried, and then fired at a temperature exceeding 660 ° C (melting point of aluminum) for a short time (fire through method) )) formed. The paste composition of the present invention contains aluminum powder, Al-B alloy powder, glass powder, and an organic carrier. By diffusing aluminum into the interior of the p-type germanium semiconductor substrate 1 at the time of sintering, an Al-Si alloy layer 6 can be formed between the aluminum electrode layer 5 and the p-type germanium semiconductor substrate 1, and at the same time, aluminum atoms are formed. A p + layer (BSF layer) 7 which is an impurity layer which is diffused. Because of the existence of this p + layer 7, it is possible to prevent recombination of electrons and obtain a BSF (Back Surface Field) effect which can improve the collection efficiency of the generated carriers. By doing so, the back surface electrode 8 composed of the aluminum electrode layer 5 and the Al-Si alloy layer 6 can be formed on the back side of the p-type germanium semiconductor substrate 1, and the p-type germanium semiconductor substrate facing the aluminum electrode layer 5 can be formed. The area of 1 is formed with a BSF layer 7.

<糊組成物> <stick composition>

本發明之糊組成物,是用於形成上述鋁電極層5而被塗布在與p型矽半導體基板1的受光面相反側的背面的糊組成物,其含有鋁粉末和Al-B合金粉末,並含有玻璃粉末與有機載劑作為黏合劑(binder)。宜使糊組成物中的硼濃度在0.005質量%以上,且在0.05質量%以下。此外,較理想的是,使在糊組成物中使用的Al-B合金粉末含有0.01質量%以上且0.07質量%以下的硼。 The paste composition of the present invention is a paste composition for forming the aluminum electrode layer 5 and applied to the back surface opposite to the light-receiving surface of the p-type germanium semiconductor substrate 1, and contains aluminum powder and Al-B alloy powder. It also contains glass powder and an organic carrier as a binder. The boron concentration in the paste composition is preferably 0.005% by mass or more and 0.05% by mass or less. Further, it is preferable that the Al—B alloy powder used in the paste composition contains 0.01% by mass or more and 0.07% by mass or less of boron.

<鋁粉末> <aluminum powder>

糊組成物中所含的鋁粉末,因其導電性而發揮作為電極的效果。又,由於鋁粉末會在燒結糊組成物之時,在其與p型矽半導體基板1之間形成Al-Si合金層6和p+層(BSF層)7,所以能獲得上述的BSF效果或是所期望的p+層。 The aluminum powder contained in the paste composition exerts an effect as an electrode due to its conductivity. Further, since the aluminum powder forms the Al-Si alloy layer 6 and the p + layer (BSF layer) 7 between the paste and the p-type germanium semiconductor substrate 1 when the paste composition is sintered, the above BSF effect or It is the desired p + layer.

鋁粉末的形狀並未特別限制。鋁粉末的形狀,宜為球形。相對於構成鋁粉末之鋁粒子的短徑之長徑的比率宜在1以上且在1.5以下。藉由使用含有這種形狀的鋁粒子之粉末,可以增加鋁電極層5中的鋁粒子的填充性,並使作為電極的電阻有效地降低。又,還可以增加p型矽半導體基板1與鋁粒子之接觸點,而形成良好的Al-Si合金層6。 The shape of the aluminum powder is not particularly limited. The shape of the aluminum powder is preferably spherical. The ratio of the major axis of the short diameter of the aluminum particles constituting the aluminum powder is preferably 1 or more and 1.5 or less. By using a powder containing aluminum particles having such a shape, the filling property of the aluminum particles in the aluminum electrode layer 5 can be increased, and the electric resistance as an electrode can be effectively lowered. Further, it is also possible to increase the contact point of the p-type germanium semiconductor substrate 1 with the aluminum particles to form a good Al-Si alloy layer 6.

構成鋁粉末之鋁粒子的平均粒徑宜在1μm以上,且在10μm以下。當鋁粒子的平均粒徑在1μm以上,且在10μm以下的範圍內時,可以獲得良好的分散性。平均粒子徑未滿1μm時,會有使鋁粒子彼此凝集的疑慮。平均粒子徑超過10μm時,則會有導致鋁粒子的分散性變差的疑慮。 The average particle diameter of the aluminum particles constituting the aluminum powder is preferably 1 μm or more and 10 μm or less. When the average particle diameter of the aluminum particles is 1 μm or more and in the range of 10 μm or less, good dispersibility can be obtained. When the average particle diameter is less than 1 μm , there is a fear that the aluminum particles are aggregated with each other. When the average particle diameter exceeds 10 μm , there is a concern that the dispersibility of the aluminum particles is deteriorated.

鋁粉末中的鋁的純度宜在99.7%以上。即使在鋁粉末中已被混入了雜質,只要讓鋁粉末中Fe和Si加起來不満0.1%,則雜質的混入是可被容許的。 The purity of aluminum in the aluminum powder is preferably 99.7% or more. Even if impurities have been mixed in the aluminum powder, as long as the Fe and Si in the aluminum powder are not more than 0.1%, the incorporation of impurities can be tolerated.

<Al-B合金粉末> <Al-B alloy powder>

本發明之糊組成物由於含有Al-B合金粉末,而可藉由硼使BSF層中的雜質濃度增加。又,只要糊組成物中的Al-B合金粉末中的硼含量在0.01質量%以上,且在0.07質量%以下,就可以在燒結太陽電池元件時充分地形成液態,所以能夠形成良好的BSF層。 Since the paste composition of the present invention contains an Al-B alloy powder, the concentration of impurities in the BSF layer can be increased by boron. In addition, as long as the boron content in the Al-B alloy powder in the paste composition is 0.01% by mass or more and 0.07% by mass or less, a liquid state can be sufficiently formed when the solar cell element is sintered, so that a good BSF layer can be formed. .

Al-B合金粉末的形狀並未特別的限制。Al-B合金粉末的形狀宜為球形。Al-B合金粉末的形狀,當真球度(sphericity)是在0.5以上時,就可以增大鋁電極層5中的填充 性能,所以可以抑制電阻的降低。 The shape of the Al-B alloy powder is not particularly limited. The shape of the Al-B alloy powder is preferably spherical. The shape of the Al-B alloy powder, when the true sphericity is 0.5 or more, the filling in the aluminum electrode layer 5 can be increased. Performance, so it can suppress the reduction of resistance.

再者,此處所謂的真球度是,藉由例如,以掃描式電子顯微鏡(Scanning Electron Microscopy:SEM)觀察球形的Al-B合金粉末的粒子而得到的。在任意選擇的複數個(例如,20個)粒子中,測量各粒子的最小徑(這個直徑是指,在顯微鏡中的觀察用視野上或拍攝有該視野範圍之照片上,藉由將各粒子以2條平行的線段夾住而得到的2條線段之間的距離中,最短的距離)和最大徑(這個直徑是指,在顯微鏡中的觀察用視野上或拍攝有該視野範圍之照片上,藉由將各粒子以2條平行的線段夾住而得到的2條線段之間的距離中,最長的距離)。計算出每個粒子之最小徑與最大徑的平均值。此外,將任意選出之複數個粒子中的最小徑與最大徑的各別平均的平均值(亦即,將任意選出之複數粒子中的最短徑與最長徑的各個平均值加總後之值,除以所用之粒子個數)算出。 Here, the true sphericity referred to here is obtained by, for example, observing particles of a spherical Al-B alloy powder by a scanning electron microscope (Scanning Electron Microscopy: SEM). In a arbitrarily selected number (for example, 20) of particles, the minimum diameter of each particle is measured (this diameter refers to a photograph on the observation field in the microscope or a photograph on which the field of view is taken, by using each particle The shortest distance between the two line segments obtained by sandwiching two parallel line segments, and the maximum diameter (this diameter refers to the observation field in the microscope or the photograph taken with the field of view) The longest distance among the distance between the two line segments obtained by sandwiching each particle in two parallel line segments. Calculate the average of the minimum and maximum diameters of each particle. Further, the average value of the respective averages of the smallest diameter and the largest diameter among the arbitrarily selected plurality of particles (that is, the sum of the average values of the shortest diameter and the longest diameter among the arbitrarily selected plural particles, It is calculated by dividing the number of particles used.

再者,本發明之糊組成物中的Al-B合金粉末的平均粒子徑,宜大於1μm大且小於10μm。當平均粒子徑在1μm以下時,則糊中的分散性會惡化,若在10μm以上時,則反應性會降低。 Further, the average particle diameter of the Al-B alloy powder in the paste composition of the present invention is preferably larger than 1 μm and smaller than 10 μm . When the average particle diameter is 1 μm or less, the dispersibility in the paste is deteriorated, and when it is 10 μm or more, the reactivity is lowered.

<玻璃粉末> <Glass Powder>

玻璃粉末被視為具有可協助鋁粉末與矽半導體基板的反應,以及鋁粉末本身之燒結的作用。玻璃粉末也可以含有選自於由鉛(Pb)、鉍(Bi)、釩(V)、硼(B)、矽(Si)、錫(Sn)、磷(P)、鋅(Zn)所構成之群中的1種或2種以上的物質。 The glass powder is considered to have a function of assisting the reaction of the aluminum powder with the ruthenium semiconductor substrate, and the sintering of the aluminum powder itself. The glass powder may also be selected from the group consisting of lead (Pb), bismuth (Bi), vanadium (V), boron (B), bismuth (Si), tin (Sn), phosphorus (P), and zinc (Zn). One or two or more substances in the group.

此外,在玻璃粉末中,可以使用含鉛的玻璃粉末,或是,鉍系、釩系、錫-磷系、硼矽酸鋅系、鹼性硼矽酸系等的無鉛玻璃粉末。特別是在有鑒於對人體的影響,或耐環境性能時,最好能使用無鉛的玻璃粉末。 Further, as the glass powder, a lead-containing glass powder or a lead-free glass powder such as a lanthanum, vanadium, tin-phosphorus, zinc borosilicate or alkaline borosilicate may be used. Especially in the case of the impact on the human body, or environmental resistance, it is best to use lead-free glass powder.

又,玻璃粉末的軟化點宜在750℃以下。若為軟化點超過750℃的玻璃粉末時,在使用特定的鈍化膜之時,恐有使鈍化膜的性能明顯受損的疑慮。 Further, the softening point of the glass powder is preferably 750 ° C or lower. In the case of a glass powder having a softening point exceeding 750 ° C, there is a fear that the performance of the passivation film is significantly impaired when a specific passivation film is used.

此外,構成玻璃粉末之玻璃粒子的平均粒徑,宜在1μm以上,且在3μm以下。 Further, the average particle diameter of the glass particles constituting the glass powder is preferably 1 μm or more and 3 μm or less.

再者,本發明之糊組成物中所含的玻璃粉末之含量,雖然未特定限制,但是相對於100重量份的鋁粉末,宜為0.1重量份以上,且15重量份以下。當玻璃粉末的含量少於0.1單位重量份時,則會有與p型矽半導體基板1之密接性降低的疑慮。當玻璃粉末的含量在15重量份以上時,則有導致所形成之鋁電極層5的電阻增加的疑慮。 In addition, the content of the glass powder contained in the paste composition of the present invention is not particularly limited, but is preferably 0.1 part by weight or more and 15 parts by weight or less based on 100 parts by weight of the aluminum powder. When the content of the glass powder is less than 0.1 unit part by weight, there is a concern that the adhesion to the p-type germanium semiconductor substrate 1 is lowered. When the content of the glass powder is 15 parts by weight or more, there is a concern that the electric resistance of the formed aluminum electrode layer 5 is increased.

<有機載劑> <organic carrier>

有機載劑可使用,因應需要而將各種添加劑以及樹脂溶解到溶劑中而製成者。溶劑方面可使用已知之物,具體來說,可列舉出,二乙二醇一丁基醚(diethylene glycol monobutyl ether)、二乙二醇丁醚醋酸酯(diethylene glycol monobutyl ether acetate)、二丙二醇甲醚(dipropylene glycol monomethyl ether)等。各種添加劑方面,可以使用例如,抗氧化劑、防蝕劑、消泡劑、增稠劑、偶合劑(coupling agent)、靜電賦予劑、阻聚劑、觸變劑(thixotropic agent)、抗沈降劑 等。具體而言,可使用例如,聚乙二醇酯(polyethylene glycol ester)化合物、聚乙二醇醚(polyethylene glycol ether)化合物、聚氧乙烯山梨糖醇酐酯(polyoxyethylene sorbitan ester)化合物、山梨糖醇酐烷基酯(sorbitan alkyl ester)化合物、脂肪族多元羧酸化合物、磷酸酯化合物、聚酯酸之醯胺系胺鹽(amide amine salt)、氧化聚乙烯系化合物、脂肪酸醯胺蠟(amide wax)等。樹脂方面可使用公知之物,且可以組合二種以上的後述物質而使用:乙基纖維素(ethyl cellulose)、硝化纖維素(nitrocellulose)、聚乙烯醇縮丁醛(poly(vinyl butyral))、酚醛樹脂(phenol resin)、三聚氰胺樹脂(Melamine Resin).、脲樹脂(urea resin)、二甲苯樹脂(xylene resin)、醇酸樹脂(alkyd resin)、不飽和聚酯樹脂、丙烯酸酯樹脂(acrylic resin)、聚醯亞胺樹脂(polyimide resin)、呋喃樹脂(furan resin)、胺甲酸乙酯樹脂(urethane resin)、異氰酸酯(isocyanate)化合物、氰酸鹽(cyanate)化合物等之熱硬化樹脂、聚乙烯、聚丙烯、聚苯乙烯、ABS樹脂、聚甲基丙烯酸甲酯(polymethyl methacrylate)、聚氯乙烯、聚偏二氯乙烯(polyvinylidene chloride)、聚乙酸乙酯(polyvinyl acetate)、聚乙烯醇(polyvinyl alcohol)、聚縮醛(polyacetal)、聚碳酸酯(polycarbonate)、聚對苯二甲酸乙二酯(polyethylene terephthalate)、聚對苯二甲酸丁二酯(polybutylene terephthalate)、聚苯醚(polyphenylene oxide)、聚碸(polysulfone)、聚醯亞胺(polyimide)、聚醚碸(polyethersulfone)、聚芳酯(polyarylate)、聚醚醚酮(polyether ether ketone)、聚四氟乙烯(polytetrafluoroethylene)、矽樹脂(silicone)等。本發明之糊組成物中所含有的有機載劑,也可以用不使其溶解在溶劑中的方式而使用樹脂。 An organic carrier can be used, and various additives and resins are dissolved in a solvent as needed. Known substances can be used for the solvent, and specific examples thereof include diethylene glycol monobutyl ether, diethylene glycol monobutyl ether acetate, and dipropylene glycol. Dipropylene glycol monomethyl ether and the like. As the various additives, for example, an antioxidant, an anticorrosive agent, an antifoaming agent, a thickener, a coupling agent, a static electricity imparting agent, a polymerization inhibitor, a thixotropic agent, and an anti-settling agent can be used. Wait. Specifically, for example, a polyethylene glycol ester compound, a polyethylene glycol ether compound, a polyoxyethylene sorbitan ester compound, sorbitol can be used. Sorbitan alkyl ester compound, aliphatic polycarboxylic acid compound, phosphate compound, amide amine salt of polyester acid, oxidized polyethylene compound, fatty acid amide wax )Wait. A known thing can be used for the resin, and two or more kinds of the following substances can be used in combination: ethyl cellulose, nitrocellulose, poly (vinyl butyral), Phenolic resin, melamine resin, urea resin, xylene resin, alkyd resin, unsaturated polyester resin, acrylic resin , thermosetting resin such as polyimide resin, furan resin, urethane resin, isocyanate compound, cyanate compound, polyethylene , polypropylene, polystyrene, ABS resin, polymethyl methacrylate, polyvinyl chloride, polyvinylidene chloride, polyvinyl acetate, polyvinyl alcohol Alcohol), polyacetal, polycarbonate, polyethylene terephthalate, polybutylene tere Phthalate), polyphenylene oxide, polysulfone, polyimide, polyethersulfone, polyarylate, polyether ether ketone Ether ketone), polytetrafluoroethylene, silicone, and the like. The organic vehicle contained in the paste composition of the present invention may be used in such a manner that it is not dissolved in a solvent.

再者,本發明之糊組成物中所含有的有機載劑的含量,雖然未特別限制,但是相對於100重量份的鋁粉末,宜為30重量份以上且100重量份以下。當有機載劑的含量少於30重量份,或超過100重量份時,恐有導致糊組成物的印刷性降低的疑慮。 In addition, the content of the organic vehicle contained in the paste composition of the present invention is not particularly limited, but is preferably 30 parts by weight or more and 100 parts by weight or less based on 100 parts by weight of the aluminum powder. When the content of the organic vehicle is less than 30 parts by weight or more than 100 parts by weight, there is a fear that the printability of the paste composition is lowered.

實施例 Example

以下,說明本發明之實施例與比較例。 Hereinafter, examples and comparative examples of the present invention will be described.

(糊組成物之準備) (Preparation of paste composition)

以如下方式準備實施例1~4與比較例之1~4的糊組成物。 The paste compositions of Examples 1 to 4 and Comparative Examples 1 to 4 were prepared in the following manner.

(實施例1) (Example 1)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.011質量%B合金粉末。相對於合計為100重量份的鋁粉末以及Al-0.011質量%B合金粉末,以習知的混合機將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.005質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.011% by mass B alloy powder were separately prepared. With respect to a total of 100 parts by weight of aluminum powder and Al-0.011% by mass of B alloy powder, 1.5 parts by weight of glass powder and 40 parts by weight of an organic vehicle were mixed by a conventional mixer to obtain boron in the paste composition. An aluminum paste having a content of 0.005 mass%.

(實施例2) (Example 2)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.032質量%B合金粉末,透過與實施例1相同之方法,相對於合計為100重量份的鋁粉末以及Al-0.032質量%B合金粉末,將1.5重量份的玻璃粉末與40重量份的有機載劑混 入,得到糊組成物中的硼含量為0.02質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.032% by mass B alloy powder were separately prepared, and in the same manner as in Example 1, 100 parts by weight of aluminum powder and Al-0.032 were added in total. The mass % B alloy powder was mixed with 1.5 parts by weight of the glass powder and 40 parts by weight of an organic vehicle to obtain an aluminum paste having a boron content of 0.02% by mass in the paste composition.

(實施例3) (Example 3)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.051質量%B合金粉末,透過與實施例1、2相同之方法,相對於合計為100重量份的鋁粉末以及Al-0.051質量%B合金粉末,將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.034質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.051% by mass B alloy powder were separately prepared, and in the same manner as in Examples 1 and 2, 100 parts by weight of aluminum powder and Al were added in total. - 0.051% by mass of B alloy powder, 1.5 parts by weight of glass powder and 40 parts by weight of an organic vehicle were mixed to obtain an aluminum paste having a boron content of 0.034% by mass in the paste composition.

(實施例4) (Example 4)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.070質量%B合金粉末,透過與實施例1、2、3相同之方法,相對於合計為100重量份的鋁粉末以及Al-0.070質量%B合金粉末,將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.05質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.070 mass% B alloy powder were separately prepared, and 100 parts by weight of aluminum powder was added in the same manner as in Examples 1, 2, and 3, respectively. Further, Al-0.070 mass% B alloy powder was mixed with 1.5 parts by weight of the glass powder and 40 parts by weight of an organic vehicle to obtain an aluminum paste having a boron content of 0.05% by mass in the paste composition.

(比較例1) (Comparative Example 1)

準備具有粒徑為約3~6μm之球形的鋁粉末。藉由相對於100重量份的鋁粉末,以習知的混合機將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm is prepared. 1.5 parts by weight of the glass powder and 40 parts by weight of the organic vehicle were mixed in a conventional mixer with respect to 100 parts by weight of the aluminum powder to obtain an aluminum paste.

(比較例2) (Comparative Example 2)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.006質量%B合金粉末。相對於合計為100重量份的鋁粉末以及Al-0.006質量%B合金粉末,以習知的混合機將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.002質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.006 mass% B alloy powder were separately prepared. With respect to a total of 100 parts by weight of aluminum powder and Al-0.006 mass% B alloy powder, 1.5 parts by weight of glass powder and 40 parts by weight of an organic vehicle were mixed by a conventional mixer to obtain boron in the paste composition. An aluminum paste having a content of 0.002% by mass.

(比較例3) (Comparative Example 3)

分別準備具有粒徑為約3~6μm之球形的鋁粉末和Al-0.083質量%B合金粉末。用與比較例2相同之方法,相對於合計為100重量份的鋁粉末以及Al-0.083質量%B合金粉末,將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.06質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 3 to 6 μm and an Al-0.083 mass% B alloy powder were separately prepared. In the same manner as in Comparative Example 2, 1.5 parts by weight of the glass powder and 40 parts by weight of the organic vehicle were mixed with 100 parts by weight of the aluminum powder and the Al-0.083 mass% B alloy powder to obtain a paste composition. The aluminum paste having a boron content of 0.06 mass%.

(比較例4) (Comparative Example 4)

分別準備具有粒徑為約5~8μm之球形的鋁粉末和Al-0.240質量%B合金粉末。用與比較例2、3相同之方法,相對於合計為100重量份的鋁粉末以及Al-0.240質量%B合金粉末,將1.5重量份的玻璃粉末與40重量份的有機載劑混入,得到糊組成物中的硼含量為0.2質量%的鋁糊。 A spherical aluminum powder having a particle diameter of about 5 to 8 μm and an Al-0.240% by mass B alloy powder were separately prepared. In the same manner as in Comparative Examples 2 and 3, 1.5 parts by weight of the glass powder and 40 parts by weight of the organic vehicle were mixed with 100 parts by weight of the aluminum powder and the Al-0.240% by mass of the alloy powder to obtain a paste. The aluminum paste in the composition having a boron content of 0.2% by mass.

(鋁電極層之形成) (formation of aluminum electrode layer)

在5吋的單晶電池單元(cell)上,在p型矽半導體基板1的表面(受光面)已預先印刷好銀糊膏的p型矽半導體基板1的整個背面上,使用網版印刷機,將上述所得到之實施例1~4與比較例1~4的糊組成物以厚度40μm進行塗布。網布篩目(screen mesh)方面,使用規格為250目篩(250Mesh)者。並且,使各個塗布有糊組成物之電池單元分別在100℃的溫度下乾燥10分鐘後,以紅外線燒結爐在大氣中進行燒結。在燒結上,是將紅外線燒結爐的燒結區的溫度設定在750~800℃。透過此燒結,可在各電池單元之p型矽半導體基板1上,形成如圖1所示之鋁電極層5。如此進行,可獲得分別具有不同的p+層(BSF層)7之8種單晶電池單元。 On a 5 inch single crystal cell, a screen printing machine was used on the entire back surface of the p-type germanium semiconductor substrate 1 on which the silver paste was printed on the surface (light receiving surface) of the p-type germanium semiconductor substrate 1 The paste compositions of Examples 1 to 4 and Comparative Examples 1 to 4 obtained above were applied to a thickness of 40 μm . For screen mesh, use a 250 mesh screen (250 mesh). Further, each of the battery cells coated with the paste composition was dried at a temperature of 100 ° C for 10 minutes, and then sintered in the air in an infrared sintering furnace. In sintering, the temperature of the sintering zone of the infrared sintering furnace is set at 750 to 800 °C. Through this sintering, an aluminum electrode layer 5 as shown in FIG. 1 can be formed on the p-type germanium semiconductor substrate 1 of each battery cell. In this manner, eight kinds of single crystal battery cells each having a different p + layer (BSF layer) 7 can be obtained.

(轉換效率之評估) (Evaluation of conversion efficiency)

將如上述進行而獲得之各電池單元的I-V特性,使用株式會社WACOM電創(WACOM ELECTRIC CO.,LTD.)製造的太陽能模擬器(solar simulator)進行測量。將該太陽能模擬器設定在AM1.5的條件下。關於各電池單元的I-V特性,是使用該太陽能模擬器上所顯示者。再者,轉換效率Eff(%)是以下式算出。 The I-V characteristics of each of the battery cells obtained as described above were measured using a solar simulator manufactured by WACOM ELECTRIC CO., LTD. The solar simulator was set under the conditions of AM 1.5. Regarding the I-V characteristics of each battery unit, the one shown on the solar simulator is used. In addition, the conversion efficiency Eff (%) is calculated by the following formula.

轉換效率Eff(%)=(電流密度I×開路電壓V)×填充因子(fill factor)值F.F. Conversion efficiency Eff (%) = (current density I × open circuit voltage V) × fill factor value F.F.

將實施例1~4與比較例1~4之評估結果表示於表1。 The evaluation results of Examples 1 to 4 and Comparative Examples 1 to 4 are shown in Table 1.

由表1可知,在考量轉換效率Eff之提升時,因為 必須著眼於電流密度與開路電壓之積的電力值W(=I.V),故相較於在糊組成物中未含硼的比較例1,藉由如實施例1~4與比較例2、3之糊組成物地使用Al-B合金粉末或鋁粉末以及Al-B粉末的混合物,可以讓抑制電流密度減少與增大開路電壓得以兼顧(亦即,電力值I.V的增大)。 As can be seen from Table 1, when considering the improvement of conversion efficiency Eff, because It is necessary to pay attention to the electric power value W (=I.V) of the product of the current density and the open circuit voltage, so that Comparative Example 1 which does not contain boron in the paste composition is as in Examples 1 to 4 and Comparative Example 2 The mixture of Al-B alloy powder or aluminum powder and Al-B powder can be used to reduce the suppression of current density and increase the open circuit voltage (that is, increase in electric power value I.V). .

此外,從表1可知,根據上述實施例1~4的糊組成物,隨著糊組成物中的硼含量增大,可以使抑制電流密度減少及增大開路電壓變得可能。另一方面可知,當糊組成物中的硼含量未滿0.005質量%時,則開路電壓的增大無法顯著表現(參照比較例2)。又,可以看出,比較例1之轉換效率Eff與比較例2之轉換效率Eff之間幾乎沒有差別。又從另一方面來看,糊組成物中的硼含量比0.05質量%還多時(參照比較例3),隨著硼含量增大,電流密度顯著減少。又,可以確認到,在比較例3之糊組成物中,相較於不含硼之比較例1的糊組成物,會有轉換效率Eff在同等以下之情形。此外,在含有過多的硼之比較例4的糊組成物中,相較於不含硼之比較例1的糊組成物,開路電壓明顯降低,轉換效率Eff也明顯降低。 Further, as is clear from Table 1, according to the paste compositions of the above Examples 1 to 4, as the boron content in the paste composition is increased, it is possible to reduce the current density and increase the open circuit voltage. On the other hand, when the boron content in the paste composition was less than 0.005% by mass, the increase in the open circuit voltage was not remarkably exhibited (refer to Comparative Example 2). Further, it can be seen that there is almost no difference between the conversion efficiency Eff of Comparative Example 1 and the conversion efficiency Eff of Comparative Example 2. On the other hand, when the boron content in the paste composition was more than 0.05% by mass (refer to Comparative Example 3), the current density was remarkably decreased as the boron content was increased. In addition, in the paste composition of Comparative Example 3, the conversion efficiency Eff was equal to or lower than that of the paste composition of Comparative Example 1 containing no boron. Further, in the paste composition of Comparative Example 4 containing too much boron, the open circuit voltage was remarkably lowered and the conversion efficiency Eff was remarkably lowered as compared with the paste composition of Comparative Example 1 containing no boron.

以上,從表1所示之結果可知,藉由使用塗布有本發明之糊組成物(實施例1~4)的p型矽半導體基板1,可以謀求太陽電池元件之轉換效率的進一步提升。 From the results shown in Table 1, it is understood that the conversion efficiency of the solar cell element can be further improved by using the p-type germanium semiconductor substrate 1 coated with the paste compositions of the present invention (Examples 1 to 4).

以上所公開之實施形態與實施例,應視為針對所有方面所作的例示,而非用以限制者。本發明之範圍,並非用以上之實施形態與實施例表示,而是以專利申請之範 圍來表示,並意欲包含與專利申請範圍均等的含意以及範圍內的所有修改與變形。 The embodiments and examples disclosed above are to be considered as illustrative and not restrictive. The scope of the present invention is not represented by the above embodiments and examples, but by the patent application. It is intended to cover all modifications and variations within the scope and scope of the patent application.

Claims (2)

一種糊組成物,是用於以在構成結晶系矽太陽電池之矽半導體基板的背面上形成電極者,且該糊組成物含有:鋁粉末、Al-B合金粉末、玻璃粉末以及有機載劑;其中前述Al-B合金粉末含有0.01質量%以上且0.07質量%以下的硼,並且該糊組成物中的硼濃度在0.005質量%以上且在0.05質量%以下。 A paste composition for forming an electrode on a back surface of a germanium semiconductor substrate constituting a crystal system solar cell, wherein the paste composition contains: aluminum powder, Al-B alloy powder, glass powder, and an organic carrier; The Al—B alloy powder contains 0.01% by mass or more and 0.07% by mass or less of boron, and the boron concentration in the paste composition is 0.005% by mass or more and 0.05% by mass or less. 一種太陽電池元件,包含一電極,該電極係藉由將如請求項1所述的糊組成物塗布在矽半導體基板的背面上之後,予以燒結而形成者。 A solar cell element comprising an electrode formed by applying a paste composition as claimed in claim 1 to a back surface of a tantalum semiconductor substrate and then sintering the composition.
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