TWI625215B - Article manufacturing device and manufacturing method - Google Patents

Abstract

A marking (9) is provided in the forming mold (6) of the replaceable unit mounted on the resin sealing device (1), a mark (9) is provided on the information forming surface (9a), and a fine pattern is formed on the information forming surface (9a). This fine pattern is the first information indicating the information containing the specific molding die (6). The information reading tool (10) reads the fine pattern, and the interpretation unit (DE) acquires the first information based on the read fine pattern. The determination unit (J) compares the first information with the second information including the information specific to the molding die (6) and is memorized in advance. The control unit (8) controls the resin sealing device (1) based on the result of the respective discrimination, and operates the resin sealing device (1) when the molding die (6) is suitable for the second information, in the molding die (6). When the second information is unsuitable, the manufacturing apparatus displays the following: The forming mold is not suitable for the second information. Therefore, it is prevented that the molding die (6) used for the resin sealing device (1) is not suitable for the article.

Description

Article manufacturing device and manufacturing method

The present invention relates to an article manufacturing apparatus and a manufacturing method, which prevent the erroneous mounting of an exchangeable component in which a manufactured article is replaced in accordance with the manufactured article, thereby maintaining the quality of the article and preventing adverse effects on the manufacturing device.

When the work of the metal mold to be replaced in accordance with the type of the workpiece to be processed by a press or the like is replaced, the "correct metal mold" is determined for the purpose of preventing the product from being defective. For example, a bar code label corresponding to an identification number attached to a metal mold attached to the press body is attached to a bar code management panel provided in the machine arrangement portion. When the metal mold is arranged, the barcode label corresponding to the identification number of the mounted metal mold is read by the barcode reader. A metal mold management method has been proposed, which memorizes the inherent metal mold information read by the barcode reader and the set metal mold information when setting the metal mold for processing, and is based on setting the metal mold information during processing. The mold setting required for the call is performed, and the metal mold is replaced (refer to paragraphs 0006, 0009, 0027 and FIG. 5 of Patent Document 1).

A resin sealing device for an electronic component of a resin molding apparatus is a sheet-like element such as a semiconductor wafer mounted on a substrate (a lead frame, a printed board, or the like) by a sealing resin. Thereby, the sealed substrate of the molded article is completed. The molding die for resin sealing of the resin sealing device is changed in density When the model (product type) of the substrate is sealed and the molding die is worn, it is replaced. Therefore, the molding die is a replaceable component that is replaced in accordance with the type of the article to be manufactured (the substrate after sealing).

When the molding die newly installed and not newly installed is not a suitable molding die (for example, when a erroneous mounting of a molding die due to an operator's selection error or the like occurs), the quality is guaranteed and the characteristics are different. When the mold of the correct metal mold (suitable product) is matched, the quality of the molded product may be impaired. Further, there are disadvantages such as adverse effects on the body of the resin sealing device.

When replacing a molding die to be used in a resin sealing device mounted on an electronic component, the worker performs the replacement work by hand. Due to this situation, it is not possible to set a bar code label in the mechanical arrangement. Further, in order to identify the forming mold, when the forming mold is provided with a bar code label, there are the following problems. After being attached to the resin molding apparatus, the molding die is heated to a predetermined molding temperature (for example, about 180 ° C), and is used in this state. Therefore, when the barcode label is used as the logo, the barcode label may be damaged due to high temperature, and the display function applied to the logo may be easily damaged. Therefore, even if the barcode label indicates that the subject matter is a suitable product, when the barcode label is damaged, there is a problem that the appropriateness of the mounted mold cannot be accurately determined. Therefore, there has been a problem that misassembly of the replaceable components at the time of manufacture of the article occurs.

As a method of managing a metal mold, a method of attaching a radio frequency identification (RFID) tag to each of the metal mold parts constituting the metal mold has been proposed (refer to paragraph 0013 of Patent Document 2). This method cannot be applied to a metal mold that is used at a high temperature (for example, about 180 ° C). This is because the RFID tag attached to the metal mold part will be Heat damage.

[First technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 07-164073

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-050614

The problem to be solved by the present invention is that the replaceable component used in the manufacture of the article for the manufacture of the article may be unsuitable for the replacement of the replaceable component that should be used.

In order to solve the above problems, an apparatus for manufacturing an article related to the present invention includes: at least one replaceable component included in a manufacturing apparatus of the article, which is replaced according to the kind of the article manufactured from the material; a replacement unit; a pattern formed on the mark; a reading unit that optically reads the pattern; and an interpretation unit that acquires first information including information of the specific replaceable component based on the read pattern; the control unit is based on Memorizing and controlling at least the second information of the information of the specific replaceable component, controlling the action of the manufacturing device; and the determining unit comparing the first information and the second information for discriminating; wherein the control unit is configured to replace the component based on the result of the discriminating When the second information is suitable, the manufacturing device is controlled to operate the manufacturing device; and when the control unit is unsuitable for the second information based on the result of the determination, the control unit controls the manufacturing device to cause the manufacturing device to display the following items: The second information is not suitable; and the determination as to whether the replaceable component is suitable or not, and the need for the replaceable component Discrimination for goods or not at least Either use the second information.

In the apparatus for manufacturing the article, the control unit may control the manufacturing device to prevent the manufacturing device from operating when the replaceable component is unsuitable for the second information based on the result of the determination.

In the apparatus for manufacturing the article, the control unit may control the manufacturing device to prevent the manufacturing device from operating, and then control the manufacturing device in accordance with the received signal to operate the manufacturing device.

In the manufacturing apparatus of the above article, the replaceable component may include a single replaceable component or a plurality of replaceable components; a mark may be provided at each of the respective positions of the single replaceable component or the plurality of replaceable components; and the reading portion has the light receiving a portion, a light guiding portion, and a video capturing unit; and at least the light receiving portions are provided corresponding to the predetermined positions.

In the manufacturing apparatus of the above article, the replaceable component may include a single replaceable component or a plurality of replaceable components; a mark may be provided at each of the respective positions of the single replaceable component or the plurality of replaceable components; and the reading portion has the light receiving The portion, the light guiding portion, and the image capturing portion; and at least the light receiving portion are moved, and the light receiving portion is commonly used for a single replaceable component or a plurality of replaceable components.

In the apparatus for manufacturing the article, at least one of the light receiving portions may be provided in the transport mechanism, and the transport mechanism may have at least one of a function of supplying the material to the exchangeable component and a function of moving the article from the exchangeable component; and The light receiving unit is moved to a predetermined position by the transport mechanism.

In the apparatus for manufacturing the article, the image acquisition unit may be provided at a position away from the single interchangeable unit or the plurality of interchangeable units, and the light receiving unit and the image acquisition unit may be optically connected by the light guide unit.

In the manufacturing apparatus of the above article, the replaceable component may also comprise a single Mold or multiple molds.

In the manufacturing apparatus of the above article, the replaceable component may have at least a first mold and a second mold facing the first mold, and a drive mechanism for moving at least the first mold and the second mold relative to each other.

The manufacturing apparatus of the above article may further include: a replaceable component module provided with at least a replaceable component; and a receiving module for receiving material; wherein the replaceable component module is detachable with respect to the receiving module; The replaceable component module is detachable with respect to other replaceable component modules.

In the manufacturing apparatus of the above article, the pattern formed on the logo may include a pattern formed by electroforming.

The apparatus for manufacturing the above article may further include the above-described logo formed of another component in which the above-described pattern is formed, wherein the other component is fixed to the replaceable component.

In order to solve the above problems, a method of manufacturing an article related to the present invention is a method of manufacturing an article from a material by using a manufacturing apparatus, characterized by comprising the steps of: preparing at least one replaceable component, at least one replaceable component being included in The manufacturing device is replaced according to the type of the article to be manufactured; the step of preparing the marking, the marking is provided in the replaceable component; the step of optically reading the pattern formed in advance on the marking using the reading portion; based on the pattern to be read And the step of obtaining the first information, the first information containing the information of the specific replaceable component; the step of reading the second information that has been pre-memorized and including at least the information of the specific replaceable component; comparing the first information with the second information a step of discriminating; a step of controlling the manufacturing device to operate the manufacturing device when the replaceable component is suitable for the second information based on the result of the discriminating; and the replaceable component is unsuitable for the second information based on the result of the discriminating The step of controlling the manufacturing device to cause the manufacturing device to display the following items: the replaceable component is unsuitable for the second information; and the step of determining, the determination of whether the replaceable component is suitable or not, and the replaceable component The second information is used for at least one of the discrimination of the maintenance product.

The manufacturing method may include a step of controlling the manufacturing apparatus to prevent the manufacturing apparatus from operating when the replaceable component is unsuitable for the second information based on the result of the discrimination.

In the above manufacturing method, the manufacturing apparatus may be controlled to control the manufacturing apparatus to operate the manufacturing apparatus in accordance with the received signal after the manufacturing apparatus is not operated.

The manufacturing method may include: a step of preparing a light receiving unit, a light guiding unit, and an image obtaining unit in the reading unit; wherein the replaceable component includes a single replaceable component or a plurality of replaceable components; in a single replaceable component or plural The respective positions of the replaceable components are provided with an identifier; and the step of optically reading the pattern is to read the first information using light receiving portions respectively provided in a single replaceable component or a plurality of replaceable components.

The manufacturing method may further include: a step of preparing a light receiving unit, a light guiding unit, and an image capturing unit in the reading unit; wherein the replaceable component is a single replaceable component or a plurality of replaceable components; in a single replaceable component or the above The respective positions of the plurality of replaceable components are provided with an identifier; and the step of optically reading the pattern is to use the light receiving portion common to the single replaceable component or the plurality of replaceable components, the first information.

In the above manufacturing method, the step of preparing the light receiving unit, the light guiding unit, and the image capturing unit may include: preparing the image obtaining unit at a position away from the single exchangeable unit or the plurality of replaceable units; preparing the transport mechanism Step of the light receiving department The transport mechanism has at least one of a function of supplying a material to the replaceable component and a function of moving the article from the replaceable component; and a step of preparing the light guide, the optical guide is optically coupled to the light receiving portion and the image acquisition In the step of optically reading the pattern, the light receiving unit is moved to a predetermined position by moving the transport mechanism.

In the above manufacturing method, the step of preparing the light receiving unit, the light guiding unit, and the image capturing unit may include: preparing a video acquiring unit at a position away from a single interchangeable component or a plurality of interchangeable components; and preparing a light guide In the step of the unit, the light guiding unit optically connects the light receiving unit and the image capturing unit.

In the above manufacturing method, the step of preparing a single mold or a plurality of molds to be included in the exchangeable assembly may also be included.

The manufacturing method may further include: a step of preparing a first mold included in the replaceable component, a second mold included in the replaceable component and facing the first mold; and a step of controlling the drive mechanism, the drive mechanism being at least The first mold and the second mold are moved relative to each other.

In the above manufacturing method, the method further includes: preparing a replaceable component module and a receiving module, wherein the replaceable component module is provided with at least a replaceable component, and the receiving component is the above material; wherein the replaceable component module is opposite to the receiving component The module is detachable; and the replaceable component module is detachable with respect to other replaceable component modules.

In the above manufacturing method, it is also possible to prepare the marking step by preparing a mark including a pattern formed by electroforming.

The manufacturing method of the article according to the present invention is the above manufacturing method, and the step of preparing the marking is to prepare the marking formed by another component fixed to the exchangeable component.

According to the present invention, the setting mark is attached to the manufacturing apparatus of the article. A pattern is formed in the logo that displays the first information containing information specific to the interchangeable component. The reading unit reads the pattern, and the interpretation unit acquires the first information based on the pattern that has been read. The determining unit compares the first information with the second information that is pre-memorized and includes information specific to the replaceable component, and performs discrimination. The control unit controls the manufacturing apparatus to operate the manufacturing apparatus when the changeable component is suitable for the second information based on the result of the determination. The control unit controls the manufacturing device when the replaceable component is unsuitable for the second information based on the result of the determination, and causes the manufacturing device to display the following: the replaceable component is not suitable for the second information. Therefore, the occurrence of a defect due to the replacement of the second information by the replaceable component for the manufacture of the article is suppressed.

1‧‧‧Resin sealing device (manufacturing device)

2‧‧‧ Fixed disk

3‧‧‧ movable plate

4‧‧‧Fixed mold (replaceable components)

4a, 5c‧‧‧ resin pathway

4b, 5b‧‧‧ cavity

4d, 5d‧‧‧ recess

5‧‧‧ movable mold (replaceable components)

5a‧‧‧ pot

5v‧‧‧Ventinel

6‧‧‧Forming mold (replaceable components)

7‧‧‧ drive mechanism

7a‧‧‧Return drive mechanism (mold opening and closing mechanism)

7b‧‧‧Resin pressurizing mechanism

8‧‧‧Control Department

9‧‧‧ logo (another component)

9a‧‧‧Information formation

9b‧‧‧Adhesive

9c‧‧‧ peeling paper

10‧‧‧Information Reading Tool (Information Reading Department)

10a‧‧‧Laser diode

10b‧‧‧Laser light

10c‧‧‧Back and forth vibrating mirror

10d‧‧‧reflected light

10e‧‧‧Optical diode

20‧‧‧Electroforming processing slot

21‧‧‧ Electrolytic bath

22‧‧‧Metal

23‧‧‧Female model

24‧‧‧Electrical castings (logo, another component)

30‧‧‧Ball screw

31‧‧‧Ball nuts

32‧‧‧Main handling mechanism (transportation mechanism)

33‧‧‧X direction guide

34‧‧‧Y direction guide

35‧‧‧Sub-transportation mechanism (transportation agency)

36‧‧‧Receiving Department

37‧‧‧ convex lens

38‧‧‧Mirror

39‧‧‧Lighting

40‧‧‧Image sensor

41‧‧‧Image Acquisition Department

42‧‧‧ cable

43‧‧‧ Camera Controller

44‧‧‧ cavity block (replaceable components)

45, 46‧‧‧Light Guide

50‧‧‧Power supply

51‧‧‧Substrate Materials Receiving Department

52‧‧‧Resin Materials Receiving Department

53‧‧‧Material Transfer Agency

54‧‧‧Installing the rear substrate

55‧‧‧Sealed substrate

56‧‧‧Formed product transfer mechanism

57‧‧‧匣

58‧‧‧Vacuum pump

A‧‧‧ material receiving module

B‧‧‧Without module

CAV‧‧‧ cavity

DE‧‧‧Interpretation Department

J‧‧‧Discrimination Department

La‧‧‧Light Guide (Light Guide)

Lb‧‧‧ convex lens

Lc‧‧‧Light Guide

Ld‧‧‧ image sensor

Le‧‧‧ cable

M‧‧‧ forming module

ME‧‧‧Memory Department

R‧‧‧Resin materials

S1~S11‧‧‧ steps

[Fig. 1A] is a schematic front view of a molding module included in a resin sealing device according to an embodiment of the present invention.

[Fig. 1B] is a developed perspective view of a fixed mold and a movable mold which are included in a molding die.

[Fig. 2A] is a schematic side view of the molding module shown in Fig. 1A.

[Fig. 2B] is a side view showing an enlarged view of a key portion of the molding die.

[Fig. 3] is an explanatory diagram of a reading unit that optically reads a pattern.

[Fig. 4A] is a view showing a step of producing a mark, and is an explanatory view for the electroforming process step.

[Fig. 4B] is a view showing a step of producing a mark, and is an explanatory view for the electroforming process step.

[Fig. 4C] is a diagram showing the steps of making a logo, for the purpose of sticking An illustration of the step of integrating the release paper into the back side of the logo.

[4D] is a view showing a step of producing a mark, and is an explanatory view of a step of integrating the release paper on the back surface of the mark with an adhesive interposed therebetween.

[Fig. 5] is a flowchart showing a procedure for determining whether a molding die is suitable or not.

Fig. 6 is a partial side view showing the configuration of the periphery of the reading unit.

[Fig. 7] is a plan view showing an outline of a manufacturing apparatus according to an embodiment of the present invention.

Hereinafter, the present invention will be described with reference to the drawings. All the drawings in the present application are easy to understand and will be schematically omitted if omitted or exaggerated. The same components are denoted by the same reference numerals, and the description is omitted as appropriate.

[Example 1]

Embodiment 1 of the apparatus and method for manufacturing an article according to the present invention will be described based on Figs. 1A and 1B and Figs. 2A and 2B. A resin sealing device for an electronic component is described as an example of a manufacturing apparatus for an article. The resin sealing device for an electronic component is a step of covering a sheet-like element such as a semiconductor wafer mounted on a substrate (a lead frame, a printed board, or the like) with a sealing resin. The sealing resin is molded by using a molding die on the substrate on which the chip component is mounted (the rear substrate is mounted), and the sealed substrate corresponding to the molded article is completed. In some cases, the sealed substrate is equivalent to the article (finished product). In some cases, each individual piece after cutting (dividing) the sealed substrate is equivalent to an article (finished product), and in this case, the sealed substrate is a semi-finished product. In this document, words such as "products" are semi-finished products.

As shown in FIGS. 1A and 1B, the resin sealing device 1 for an electronic component, Includes one or more forming modules M. When a plurality of forming modules M are included, they may be arranged in the X direction and connected to each other. As will be described later, a plurality of forming modules M can be mounted to each other and can be separated afterwards.

The forming module M has a fixed disc 2 and a movable disc 3, and the fixed disc 2 is fixed to the main body, and the movable disc 3 is disposed opposite to the fixed disc 2, and is provided to be in contact with and away from the fixed disc 2. The resin sealing device 1 includes at least a fixed mold (upper mold) 4 and a movable mold (lower mold) 5, and the fixed mold 4 is mounted to be detachable (replaceable) to the fixed tray 2, and the movable mold 5 is It is installed to be detachable from the movable disk 3. The fixed mold 4 and the movable mold 5 together constitute a forming mold (resin sealing mold) 6. The molding die 6 is a component that is replaced in accordance with the manufactured product (hereinafter referred to as "replaceable component" as appropriate). The resin sealing device 1 includes a control unit 8 for controlling the operation of the drive mechanism 7 in the resin sealing device 1. The drive mechanism 7 includes, for example, a back and forth drive mechanism (mold opening and closing mechanism) 7a and a resin pressurizing mechanism 7b of the movable platen 3.

At a predetermined position of the forming mold 6, it is pasted by the mark 9. In the information forming surface 9a of the mark 9, a fine pattern is formed by unevenness or the like, and the fine pattern displays the first information including at least the information of the specific forming die 6. The fine pattern is constituted by, for example, a barcode, a two-dimensional barcode, or the like.

The information of the specific molding die 6 includes information on the manufacturer, supplier, and service provider of the molding die 6, the mold number and the manufacturing number of the molding die 6, and the molded article formed by the molding die 6 (after sealing) The type of the substrate (product type), and the molding die 6 is shown as suitable product information. The term "suitable product" means that the molding die 6 is a molding die to be used originally. Specifically, it has at least the following two meanings. "Suitable for The term "product" first means that the molding die 6 is a molding die suitable for a product to be manufactured, and is a molding die whose quality is ensured. The term "suitable product", secondly, means that the forming die 6 is a forming die provided by a legitimate manufacturer or supplier.

As shown in FIGS. 2A and 2B, in the resin sealing device 1, an information reading tool (information reading unit) 10 is provided at a corresponding position of a predetermined position in the molding die 6, and the information reading tool 10 is used for reading. A fine pattern formed on the information forming surface 9a of the mark 9 of the forming mold 6 is formed.

As shown in FIG. 1A, the control unit 8 is provided with an interpreting unit DE and a memory unit ME, and the interpreting unit DE acquires the first information based on the fine pattern formed on the information forming surface 9a read by the information reading tool 10, and memorizes The part ME pre-memorizes information (second information) of the specific forming mold 6. The control unit 8 is provided with a determination unit J that compares the obtained first information with the second information that has been memorized in advance, and determines whether the molding tool 6 is suitable for the second information or not. The control unit 8 controls the operation of the resin sealing device 1 including the operation of the drive mechanism 7 based on the result of the determination.

As shown in Fig. 1B, in the movable mold 5 constituting the molding die 6, the cavity 5a on the side of the pot 5a and the movable mold 5 (hereinafter referred to as "movable side") and the cavity 5b connected to the movable side are movable. The resin passage 5c on the side and the vent hole 5v are supplied to the jug 5a. In the fixed mold 4, a resin passage 4a on the side of the fixed mold 4 (hereinafter referred to as "fixed side") and a cavity 4b on the fixed side are provided.

The movable mold 5 and the fixed mold 4 are mold-locked by the mold opening and closing mechanism 7a. The movable mold 5 and the fixed mold 4 are in a state of being clamped, and the mold surface (on the upper surface of FIG. 1A) of the movable mold 5 facing the fixed mold 4 is in close contact with the mold surface (the lower surface of FIG. 1A) of the fixed mold 4 . In this state, the movable mold 5 The pot 5a communicates with the resin passage (eliminating portion) 4a on the fixed side, and the resin passage 4a on the fixed side communicates with the resin passage 5c on the movable side. Further, the pot 5a of the movable mold 5 is sequentially connected to the cavity 4b on the fixed side and the cavity 5b on the movable side via the resin passage 4a and the resin passage 5c.

At the time of resin molding, a fluid resin such as a molten resin is filled inside the cavity 4b on the fixed side and the cavity 5b on the movable side. The gas remaining in the inside of the cavity 4b and the cavity 5b is discharged to the outside through the vent hole 5v with the filling of the fluid resin.

As shown in FIG. 2A, the information reading tool 10 is disposed on the main body of the resin sealing device 1, and corresponds to a position where the marker 9 is attached to each of the fixed mold 4 and the movable mold 5. Therefore, each information reading tool 10 can read the fine pattern from the information forming surface 9a of each of the marks 9 adhered to the fixed mold 4 and the movable mold 5 which are respectively mounted on the fixed disk 2 and the movable disk 3.

As shown in FIG. 2B, the light of the image on which the information forming surface 9a is displayed enters the image sensor Ld via the light guiding portion (light guide) La, the convex lens (light collecting lens) Lb, and the light guiding portion Lc. The image sensor Ld is, for example, a CCD sensor, a CMOS sensor, or the like. The light corresponding to the image of the information forming surface 9a is converted into an electrical signal by the image sensor Ld. The image data composed of the electrical signal of the image on which the information forming surface 9a is displayed is sent to the control unit 8 via the cable Le (please refer to FIG. 1A and FIG. 1B). As the information reading tool 10, a digital camera having an image sensor may be disposed instead of the combination of the convex lens Lb, the light guiding portion Lc, and the image sensor Ld. This digital camera is preferably heat resistant.

The molding die 6 composed of the fixed mold 4 and the movable mold 5 constitutes a group of mold units. Therefore, it is also possible to use the fixed mold 4 and the movable mold 5 Either one of them is attached to the logo 9 and fixed. In this case, the information reading tool 10 may be disposed on the side of the fixed mold 4 and the movable mold 5 of the resin sealing device 1 on the side where the marking 9 is adhered to the molding die 6. The following description is for the case where the marker 9 is adhered to the fixed mold 4.

As shown in Fig. 3, in the surface on which the forming mold 6 (at least one of the fixed mold 4 and the movable mold 5) is to be attached, a recess 4d for marking adhesion is provided so as to be adhered to the surface. The integrated logo 9 is also deep in thickness. Therefore, as described later, by integrating the mark 9 on the inner bottom surface of the recess 4d, it is possible to prevent the information forming surface 9a of the mark 9 from coming into contact with other constituent components and the like, thereby deforming the information forming surface 9a. Defects such as breakage.

Hereinafter, when the first information is suitable product information, the control unit 8 controls the content of the resin sealing device 1. As will be described later, the control unit 8 determines whether or not the molding die 6 to be determined is suitable for the product based on the determination result of the "suitable product or not" obtained by the determination unit J, and the resin sealing device 1 is used. display. Specifically, when the molding die 6 is a suitable product, the purpose of the display is displayed on the display screen. Further, it is preferable that the forming module M including the forming mold 6 is turned into an operable state. When the molding die 6 is not a suitable product, after displaying the purpose of the screen display, a warning is issued to the worker by a method such as lighting, extinguishing, warning sound generation of the warning lamp. The molding module M can also be changed to a state in which the molding module M is inoperable (for example, a state in which the power source is ON but the operation start signal cannot be accepted, and the power source is turned off).

In the case where the fixed mold 4 and the movable mold 5 are each divided into a plurality of so-called divided molds (not shown), the mark 9 is adhered to, for example, the most important portion and the replaceable cavity block. In this case, it can prevent off It is a misplacement of a cavity block which is the most important component of resin molding and is a replaceable component, and installation of an unsuitable product.

Fig. 3 is a view showing a laser type so-called non-contact code reading sensor as the information reading tool 10. The information reading tool 10 reflects the laser light 10b that is emitted from the laser diode 10a by moving the back and forth vibrating mirror (scanning mirror) 10c back and forth. Thereby, the information forming surface 9a formed on the marker 9 is scanned by the laser light 10b reflected by the back and forth vibrating mirror 10c. The reflected light 10d reflected by the laser light 10b on the information forming surface 9a is received by the optical diode 10e. Thereby, the fine pattern which has been formed on the information forming surface 9a is optically read.

As shown in FIGS. 4A to 4D, on the side (front side) of the information forming surface 9a of the mark 9, a highly precise fine pattern is formed by electroforming (electroforming). The release paper 9c is adhered to the back side of the mark 9 via the adhesive 9b. In the state in which the release paper 9c is peeled off, the back side of the mark 9 is adhered via the adhesive 9b and integrated into the inner bottom surface of the recess 4d (5d) for marking adhesion in the marking adhesive surface of the molding die 6 (please Refer to Figure 3).

The mark 9 is formed into a thin sheet shape by electroforming. The logo 9 has the following two purposes. The first purpose is to avoid identifying unsuitable products as suitable products (false positives). The second object is to peel the mark 9 from the marking surface of the forming mold 6 (the fixed mold 4 and the movable mold 5) (the inner bottom surface of the marking recess 4d‧5d), thereby preventing the label 9 which has been peeled off from being pasted. Use it again for other unsuitable items. Therefore, the thickness of the mark 9 is a thickness (in other words, necessary and sufficient thinness) to the extent that the following two conditions are simultaneously satisfied. First, when adhering to a suitable product, it is possible to maintain the firmness of the mark 9 and the high precision when reading the fine pattern (the displayed information) formed on the information forming face 9a. Degree and the thickness of the authenticity. Second, in the case where the mark 9 originally adhered to the marking adhesive surface 4d (5d) is peeled off, at least the thickness of the information forming surface 9a is damaged.

The thickness of the mark 9 (electroformed product) including the above two conditions, for example, in the case of electroforming as a surface transfer, may be a thickness of 0.05 to 0.1 μm. At this thickness, a fine pattern for displaying information can be produced with high precision. In the case of producing the mark 9 having the information forming surface 9a having a three-dimensional shape (three-dimensional shape), it is also possible to produce an electroformed product having a thickness including the above two conditions by a general electroforming process.

The case of creating the logo 9 will be described based on the 4A to 4D drawings. 4A and 4B are views showing the electroforming process in a simplified manner, and Figs. 4C and 4D are views showing a step of integrally integrating the release paper on the back surface of the mark 9 via an adhesive.

As shown in Fig. 4A, in the electroforming process, a fixed voltage is applied from the outside to the metal (nickel anode) 22 and the master (cathode) 23 in the electrolytic bath 21 in the electroforming processing tank 20. Thereby, ionization of the metal is caused at the anode, and electrodeposition due to reduction of the metal occurs in the master mold 23. The electrodeposition shown in Figures 4A to 4D is made of nickel. The electroformed product 24 composed of the electrodeposited nickel is used as the body of the mark 9. The master mold 23 is preferably produced by precision machining such as elliptical vibration cutting.

Next, as shown in FIG. 4B, the electroformed product 24 which has been electrodeposited on the master mold 23 is peeled off from the master mold 23. In the electroformed product 24, a fine pattern is formed by inverting a high-precision shape or the like which has been formed on the master mold 23. The fine pattern composed of the high-precision shape formed by the electroformed product 24 is used as a fine pattern indicating the information of the specific molding die 6 on the information forming surface 9a of the mark 9.

Next, as shown in Fig. 4C, on the back side of the electroformed product 24 (in Adhesive 9b to which the release paper 9c has adhered is adhered to the surface on the opposite side of the information forming surface 9a. Thereby, the mark 9 with the adhesive 9b is produced.

Next, as shown in Fig. 4D, the release paper 9c is peeled off from the mark 9. The back surface of the mark 9 is adhered to the inner bottom surface of the recess 4d (5d) for marking adhesion in the marking adhesive surface of the molding die 6 via the adhesive 9b. As a result, the inner bottom surface of the recess 4d (5d) of the molding die 6 can be integrated with the mark 9.

The adhesive 9b and the release paper 9c are in a state in which the release paper 9c is peeled off, and the back surface of the mark 9 is adhered to the marking adhesive surface of the molding die 6 via the adhesive 9b. The inner bottom surface of the recess 4d (5d). In the case where the electroformed product 24 (the body of the mark 9) is directly adhered to the inner bottom surface of the recess 4d (5d), the double-sided adhesive tape may be adhered to the inner bottom surface of the recess 4d (5d) in advance instead of the adhesive 9b. And release paper 9c.

The mark 9 formed by the fine pattern showing the suitable product information, firstly, means that the forming die 6 is a forming die suitable for the article to be manufactured, and is a forming die whose quality is secured. A mark 9 formed by a fine pattern showing suitable product information, and secondly, means that the forming die 6 is a regular creator such as a resin sealing device, a regular mold maker or a regular resin sealing device or A molding die supplied by a supplier of a labor service such as a regular mold (hereinafter referred to as "appropriate product supplier"). In the mark 9, the information forming surface 9a on which the fine pattern for displaying the information of the specific mold is formed is formed with high precision, and can be made of an unsuitable product not attached with a mark or a person other than the suitable product provider. Wait for the difference.

In the information forming surface 9a, for example, a barcode, a two-dimensional barcode, or the like is formed. In addition to or in place of these, the information forming surface 9a may also be formed by A fine pattern composed of a character, a character string, a symbol, a shape, a three-dimensional shape, or a combination thereof, a special image that is difficult to imitate, a hologram, and other high-precision marks, which are arbitrarily set by a suitable product provider. The information of the specific forming mold 6 is read based on the fine pattern that has been formed on the information forming surface 9a. The fine pattern which has been formed on the information forming surface 9a is preferably a pattern which is difficult to imitate. A fine pattern that has been formed on the information forming surface 9a, and may include a mark, a trademark (including a registered trademark), or a logo (logotype) that displays a fine pattern suitable for the product provider and has a function for displaying the origin of the labor service. .

Hereinafter, the specific molding die 6 (refer to FIG. 1A, FIG. 1B, FIG. 2A, and FIG. 2B) will be described with reference to FIGS. 1A to 3 and the flowchart shown in FIG. 5, and it is judged that the molding die 6 is The steps that suit the product or not. First, as shown in step S1 in Fig. 5, in a state where the power source of the resin sealing device 1 has been charged, the fixed mold 4 is attached to the fixed disk 2, and the movable mold 5 is attached to the movable plate 3. The mounting of the fixed mold 4 and the movable mold 5 in this step may be temporarily set (temporarily fixed) as long as the fine pattern formed on the information forming surface 9a of the marker 9 can be read.

Next, as shown in step S2, the information reading tool 10 is used to read the fine patterns which have been formed on the information forming faces 9a which are respectively attached to the marks 9 which have been mounted on the fixed mold 4 and the movable mold 5.

Next, as shown in step S3, the control unit 8 acquires the first information from the fine pattern that has been formed on the information forming surface 9a. For example, when the fine pattern is a two-dimensional barcode, the two-dimensional barcode is interpreted.

Next, as shown in step S4, the control unit 8 reads out the second information (information that has been previously memorized) including the information of the specific molding die 6. The second message is The memory unit ME included in the control unit 8 of the resin sealing device 1 is stored in advance.

Next, as shown in step S5, the determination unit J of the control unit 8 compares the first information obtained from the fine pattern formed on the information forming surface 9a of the marker 9 with the second information that has been previously memorized. Information containing the specific forming die 6. Based on the result of the comparison, the determination unit J determines whether the "fixed mold 4 is a "suitable product"" or the "whether the movable mold 5 is a "suitable product"".

Hereinafter, the case where the result of the comparison is "the case where each of the fixed mold 4 and the movable mold 5 is a suitable product" (the first case) will be described. Next, in step S5, as shown in step S6, the determination unit J generates a suitable signal for displaying "the fixed mold 4 is "suitable product"" and a suitable signal for displaying "the movable mold 5 is "suitable product"".

Next, as shown in step S7, the control unit 8 displays "the fixed mold 4 is a suitable product on the display portion (touch panel or the like; not shown) of the control unit 8 of the resin sealing device 1 based on the received suitable signal. The item """ and "The movable mold 5 is a "suitable product"". The control unit 8 may also illuminate the warning lamp in a state in which the resin sealing device 1 is in an operable state (for example, a state in which green light is continuously turned on). The control unit 8 can also display the state in which the resin sealing device 1 is operable by sounds such as "operable".

Next, as shown in step S8, the control unit 8 shifts the resin sealing device 1 into an operable state (operating state) based on the received appropriate signal. When the resin sealing device 1 is already in an operable state, the control unit 8 continues to maintain the resin sealing device 1 in an operable state. The order of step S7 and step S8 may also be interchanged or may be performed simultaneously.

In the following, the case where the result of the comparison is "the case where at least one of the fixed mold 4 and the movable mold 5 is not "suitable"" (the second case) is described. Reason. For example, the case where the fixed mold 4 is "appropriate" and the movable mold 5 is not "suitable" will be described. Next, in step S5, as shown in step S9, the determination unit J generates an unsuitable signal indicating that "the movable mold 5 is not "suitable product"".

Then, as shown in step S10, the control unit 8 displays "the movable mold 5 is not a "suitable product"" on the display unit (not shown) of the control unit 8 of the resin sealing device 1 based on the received unsuitable signal. The control unit 8 may also illuminate the warning lamp in a state in which the resin sealing device 1 is in an inoperable state (for example, a state in which yellow or red light is intermittently turned on). The control unit 8 can also display the state in which the resin sealing device 1 is inoperable by sounds such as "non-operable".

Next, as shown in step S11, the control unit 8 shifts the resin sealing device 1 into an inoperable state (non-operating state) based on the received unsuitable signal. The order of step S10 and step S11 may also be interchanged or may be performed simultaneously. When the fixed mold 4 is not "appropriate" and both the fixed mold 4 and the movable mold 5 are not "suitable", the same processing as in the second case described above is performed.

When at least one of the fixed mold 4 and the movable mold 5 is not a "suitable product" (hereinafter referred to as "not suitable for the mold"), the worker searches for the "suitable product" from the stock of the mold (hereinafter referred to as "suitable mold"). ). The operator will not be suitable for the mold to be replaced with the suitable mold found. The operator operates the control unit 8 of the resin sealing device 1 in a state in which the mold is temporarily placed in the resin sealing device 1 in accordance with the flowchart shown in FIG. In this case, since the suitable mold is temporarily placed in the resin sealing device 1, the resin sealing device 1 is switched to the operating state by performing the processes of steps S1 to S5 to S8.

So far, the information describing the specific forming die 6 has been included in at least The first information item. Further, the information on the specific molding die 6 has been described so far, including information on the manufacturer, supplier, and service provider of the molding die 6, the mold number and the manufacturing number of the molding die 6, and the molding die 6 is formed by the molding die 6. The product type of the molded article (packaged substrate) and the fact that the molding die 6 is suitable product information of the suitable product. The present invention is not limited thereto, and the information on the specific molding die 6 may include a batch number indicating the date of manufacture of the molding die 6, the date of use, the date of use, and the manufactured article (substrate after packaging). History information of the course of the number of uses (number of shots). The history information may also include history information showing the contents of the cleaning, inspection, maintenance (maintenance) and replacement (hereinafter referred to as "inspection, maintenance, etc.") of the molding die 6 and the history. The history information may also include information on the history of the defects, improvements, and the like of the forming mold 6 in the past. Thereby, the user of the resin sealing device 1 or the molding die 6 or a suitable product supplier can perform the database of the above information (information showing defects, improvement, and the like). This information is suitable for the purpose of improving the utilization rate of the resin sealing device 1 or the forming mold 6.

The narration determination unit J (refer to FIG. 1A and FIG. 1B ) is a case where, for example, the movable mold 5 is determined to be a period in which inspection or maintenance is to be performed based on the history information. In this case, the determination unit J generates a maintenance-required signal indicating that the movable mold 5 is a "maintenance item to be inspected, maintained, etc.". The control unit 8 displays the item "the movable mold 5 is a maintenance-required item" based on the received maintenance-required signal, and shifts the resin sealing device 1 into an inoperable state (non-operating state). Therefore, the user, the operator, and the like of the resin sealing device 1 can recognize that the period in which the movable mold 5 is to be inspected, maintained, and the like has come. In addition, it can prevent the need for inspection and maintenance in case of inattention. The state in which the molding die 6 including the movable mold 5 is continued is used in the period of protection. The above-mentioned term "maintenance product" means that the molding die is not a molding die to be used from the viewpoint of whether or not inspection or maintenance is required.

The information on the specific forming mold 6 contains at least the information of the suitable product, and may also contain the history information as needed. The information on the specific forming mold 6 may also contain any suitable information and history information as needed.

Further, even in the case where the forming mold 6 is not a suitable product, there is a possibility that there is no problem in the use of the forming mold 6. For example, the information showing the suitable product is included in the case of the molding tool 6 manufactured by a specific factory owned by the manufacturer of the molding die. In the case of the forming mold 6 manufactured by another factory owned by the manufacturer of the forming mold, the forming mold 6 can be used. In the case where the operator confirms that the information of the suitable product is confirmed, it is determined that the molding die 6 can be used, and the signal input from the outside of the resin sealing device 1 by the worker can be changed. The determination by the control unit 8. Specifically, it is only necessary to change the discrimination from the "not suitable product" to the "suitable product" according to the signal that the operator has input.

As shown in FIG. 3, a laser code reading sensor is exemplified as the information reading tool 10. The information reading tool 10 is not limited to such a tool. For example, the image data obtained by the information forming surface 9a of the photographing mark 9 can be sent to the control unit 8 by the use of an image sensor such as a CCD element (Charge Coupled Device) of the image reading sensor. . It is also possible to compare the transmitted image data with the specific image data (reference data) that has been memorized in advance, and determine whether the product is suitable or not. As an image reading sensor, a CMOS sensor can also be used. As long as the information reading tool 10 can read the high precision and correctly The tool formed on the fine pattern of the information forming surface 9a of the marker 9 may be used.

This embodiment achieves useful and significant effects as described below. First, in the determination as to whether or not the forming mold 6 of the replaceable unit is suitable or not, the first information read from the mark 9 that has been fixed to the forming die 6 and the second information that has been previously memorized are used. The first information contains information of a particular forming die 6, and the second information contains at least information of a particular forming die 6. The information on the specific forming mold 6 contains at least one of suitable product information and history information, and it is preferable to include both of them. With the above matters, first, it is possible to determine whether the mold 6 of the replaceable unit is suitable or not. Second, it can be discriminated whether the forming mold 6 of the replaceable component is a maintenance product or not.

Second, since the mark 9 is produced by electroforming, the fine pattern can be formed with high precision on the information forming surface 9a of the mark 9. Further, the mark 9 has heat resistance. By these matters, the mark 9 for the purpose of use of the molding die 6 which is most suitable for being attached to the resin molding apparatus of the resin sealing device including the electronic component can be obtained. Therefore, since the molding die 6 to which the marker 9 has been attached can be used, it is possible to prevent erroneous mounting or the like caused by the worker.

Third, by using the molding die 6 that has been adhered to the mark 9, it is possible to prevent problems such as damage to the quality of the molded article, malfunction of the resin sealing device 1, deterioration in durability, and other adverse effects. The problem.

Fourth, since the mark 9 is formed into a thin sheet shape, the mark 9 is broken when the mark 9 is peeled off from the forming mold. As a result, the mark 9 cannot be peeled off and adhered to another molding die in the original state. Therefore, it is possible to prevent, for example, improper use of the logo 9 by a person other than the product provider, supply of a mold for an unsuitable product, and the like.

[Embodiment 2]

Embodiment 2 of a manufacturing apparatus and a manufacturing method of an article related to the present invention will be described. In the present embodiment, the second information is stored in advance in a memory device provided outside the resin sealing device 1. The following two are mentioned as external memory devices. The first memory device is a memory device provided by a server or the like for managing a semiconductor process by a user of the resin sealing device 1. The second memory device is a memory device for a server or the like that manages its own products, labor, and the like by a suitable product provider for the resin sealing device 1 or the molding die 6.

In the present embodiment, first, the second information is read from a memory device provided by a server or the like for managing the entire semiconductor process by the user of the resin sealing device 1 or the molding die 6. Thereby, the user of the resin sealing device 1 or the molding die 6 and the operator can know whether or not the molding die 6 is a suitable product. In addition, the user and the worker of the resin sealing device 1 or the molding die 6 can know whether or not the period of inspection, maintenance, and the like to be performed on the molding die 6 has come. The "inspection, maintenance, etc." includes cleaning for the molding die 6 (in addition to washing, physical or chemical cleaning using a brush, laser light, plasma, etc.) is included.

Second, the second information is read from a memory device provided by a server or the like for managing its own products, labor, and the like by a suitable product provider for the resin sealing device 1 or the molding die 6. By this, the supplier of the suitable product of the resin sealing device 1 or the molding die 6 can know whether or not the period of inspection, maintenance, and the like to be performed on the molding die 6 has come. Based on this, the product provider will contact and draw attention to the user of the resin sealing device 1 or the molding die 6 in the sense that the period of inspection, maintenance, and the like has come. Appropriate product providers can also convey the appropriate products to the users according to their needs. Preparation of the service engineer of the supplier, preparation of replacement parts for replacement, etc. The server that is suitable for the product provider can also be automatically approached to the time when the inspection, maintenance, etc. should be performed, the preparation of the dispatched service engineer, and the preparation of the replaceable component for replacement. The message is transmitted to the control unit 8 of the resin sealing device 1 or the server of the user of the resin sealing device 1. Thereby, information for surely performing preventive maintenance and regular maintenance is provided for both the product supplier and the user of the resin sealing device 1 or the molding die 6.

[Example 3]

Based on Fig. 6, a third embodiment of the apparatus and method for manufacturing an article according to the present invention will be described. In the resin sealing device 1 of the manufacturing apparatus, a resin sealing device 1 in which a cavity CAV is provided in the lower mold 5 and a compression molding method is used will be described as an example. The forming die 6 shown in Fig. 6 is used at a high temperature (e.g., about 180 ° C). Accordingly, it is necessary to protect the information reading tool 10 from high temperature hazards. This embodiment is a preferred example of the information reading tool 10 in the case where the interchangeable component used for high temperature is targeted.

As shown in Fig. 6, in the resin sealing device 1, a ball screw 30 and a ball nut 31 are provided. In the ball nut 31, the main transport mechanism 32 is mounted. In order to allow the main transport mechanism 32 to move in the X direction, an X-direction guide rail 33 extending in the X direction is provided. In the main conveyance mechanism 32, a Y-direction guide rail 34 extending in the -Y direction is provided.

The sub transport mechanism 35 is provided to be movable along the Y-direction guide rail 34. The sub-transport mechanism 35 is provided on the lower surface of the fixed mold 4 by holding the rear substrate (not shown) on which the semiconductor wafer is mounted on the substrate. On the lower surface of the fixed mold 4, by means of adsorption, clamping, etc. The rear substrate is fixedly mounted. The sub-transport mechanism 35 holds a resin material (not shown) such as a sheet-like or granular solid resin or a liquid resin having fluidity at normal temperature in a container or the like provided on the lower side. The sub-transport mechanism 35 supplies the resin material that has been held to the inside of the cavity CAV provided in the movable mold 5.

The sub-transport mechanism 35 is provided with a light receiving portion 36 included in the information reading tool 10, for example, on the lower surface or the side surface. The light receiving portion 36 is provided with a convex lens 37 and a reflecting mirror 38 each made of heat-resistant glass. In the light receiving portion 36, for example, an annular illumination 39 is provided on the side (light incident side) where the convex lens 37 is provided.

The image acquisition unit 41 having the image sensor 40 such as a CCD sensor or a CMOS sensor is mounted on the main conveyance mechanism 32 located away from the molding die 6. The image data composed of the electrical signals obtained by the image sensor 40 is sent to the camera controller 43 included in the control unit 8 via the cable 42, for example. As the image acquisition unit 41, an electronic camera having the image sensor 40 may be attached to the main transport mechanism 32. In the case where the resin sealing device 1 has a plurality of molding modules M arranged in the X direction, one main conveying mechanism 32 including one sub conveying mechanism 35 is commonly used by a plurality of molding modules M.

In the movable mold (lower mold) 5, a cavity block 44 in which the cavity CAV has been formed is mounted. The cavity block 44 is a replaceable component that is replaced in accordance with the manufactured article (in this embodiment, the packaged substrate). In the cavity block 44, the mark 9 having the information forming face 9a is fixed by, for example, pasting, screwing, or the like.

The light that displays the image of the fine pattern formed on the information forming surface 9a enters the convex lens 37 via the light guiding portion 45 formed in the space, and is collected. The collected light is reflected by the mirror 38. The light reflected by the mirror 38 enters the image sensor 40 via the light guiding portion 46 formed in the space, and is converted into an electrical signal structure. Image data. The converted image data is sent to the camera controller 43 included in the control unit 8 (please refer to FIG. 1A and FIG. 1B) via the cable 42. In the present embodiment, at least the light receiving portion 36 having the convex lens 37 and the mirror 38, the light guiding portion 46, and the image capturing portion 41 having the image sensor 40 have information equivalent to those shown in Figs. 2A and 2B. The function of the reading tool 10 is read. At least the light receiving unit 36, the light guiding unit 46, and the image capturing unit 41 are included in the information reading tool 10.

The following effects can be obtained by the present embodiment. First, since it is possible to automatically discriminate whether or not the forming mold 6 of the replaceable unit is suitable or not, erroneous mounting of the forming mold 6 can be prevented. This effect is obtained by automatically reading the information specifying the molding die 6 from the information forming surface 9a which is fixed to the marking 9 of the forming die 6, and automatically discriminating the forming die 6 To suit the product or not.

Secondly, it is possible to prevent deterioration of the product quality, deterioration of the molding die 6, and the like, which are caused by the maintenance inspection time for the molding die 6 of the exchangeable module, and the like. This effect is obtained by automatically determining from the information forming surface 9a of the mark 9 that has been fixed to the forming die 6 that the maintenance inspection to be performed on the forming die 6 has been performed. To or not.

Third, deterioration of the information reading tool 10 including the convex lens 37 and the mirror 38, which is located in a high temperature environment, and deterioration of the image sensor 40 which is usually located in a place not in a high temperature environment are prevented. This effect is obtained by the following constitution. The convex lens 37 and the mirror 38 are optical elements for obtaining image data, and are made of heat-resistant glass. The image sensor 40 is disposed at a position away from the molding die 6 that is at a high temperature, and is sequentially formed from the information forming surface 9a via the convex lens 37 and the mirror 38 to the light guiding portions 45 and 46 of the image sensor 40 by space. . With these configurations, it is prevented to have the convex lens 37 and The light-receiving portion 36 of the mirror 38, the light-guiding portion 46 composed of a space, and the information reading tool 10 including the image acquisition unit 41 of the image sensor 40 are deteriorated.

Fourth, an increase in the original price of the resin sealing device 1 can be suppressed. This effect is obtained by the following constitution. In the information reading tool 10, the sub-transport mechanism 35 is provided with a convex lens 37 and a reflecting mirror 38 each made of heat-resistant glass. In the information reading tool 10, the image capturing unit 41 including the image sensor 40 is attached to the main transport mechanism 32. Therefore, since it is not necessary to newly provide a tool for moving the information reading tool 10, an increase in the original price of the resin sealing device 1 can be suppressed. Further, in the case where the resin sealing device 1 has a plurality of forming modules M, a group of information reading tools 10 can be shared. Thereby, the increase in the original price of the resin sealing device 1 can be further effectively suppressed.

In the sixth drawing, the light guide unit 46 from the light receiving unit 36 to the image acquisition unit 41 is configured by a space. Alternatively, an optical fiber including light that is guided into the convex lens 37 and collected by the convex lens 37 may be used as the light guiding portion 46. It is preferable to arrange the optical fiber inside the protective tube having heat resistance. In this case, the optical fiber corresponds to the light guiding portion. With this configuration, the position where the image acquisition unit 41 is placed can be freely selected by appropriately arranging the optical fibers.

In the sixth drawing, an example in which the image acquisition unit 41 including the image sensor 40 is attached to the main transport mechanism 32 is shown. The present invention is not limited thereto, and a digital camera including an image sensor may be attached to the main transport mechanism 32 as the image acquisition unit 41. In this case, the digital camera can be attached to the main transport mechanism 32 or to the sub transport mechanism 35. In the case where the digital camera is attached to the sub transport mechanism 35, it is preferable to provide a cooling mechanism in the digital camera.

[Example 4]

Based on Fig. 6 and Fig. 7, a fourth embodiment of the apparatus and method for manufacturing an article according to the present invention will be described. As shown in Fig. 7, the resin sealing device 1 has a material receiving module A, four forming modules M (please refer to Figs. 1A and 1B) and a payout module B. Each of the resin sealing devices 1 is provided with a power supply 50 for supplying electric power and a control unit 8 for controlling each component (refer to FIGS. 1A and 1B) and a delivery module B.

The material receiving module A and the forming module M on the leftmost side of the seventh drawing can be installed and separated from each other. The adjacent forming modules M can be mounted to each other and separated from each other. The forming module M and the payout module B on the far right side of Fig. 7 can be mounted and separated from each other. The positioning when the above-described constituent elements are mounted is performed by a conventional tool such as a positioning hole and a positioning pin. The mounting is performed by a conventional tool constructed using bolts, nuts, and the like.

The material receiving module A has a substrate material receiving portion 51, a resin material receiving portion 52, and a material transfer mechanism 53. The substrate material receiving portion 51 receives the rear substrate 54 from the outside of the resin sealing device 1. The resin material receiving portion 52 is a resin material R which is formed of a solid resin which receives powder particles from the outside of the resin sealing device 1.

Referring to Figures 6 and 7, a handling system having a resin sealing device 1 will be described. In the resin sealing device 1, the X-direction guide rail 33 is provided along the X direction from the material receiving module A via the four forming modules M to the payout module B. The main transport mechanism 32 is provided on the X-direction guide rail 33 so as to be movable in the X direction. In the main conveyance mechanism 32, the Y-direction guide rail 34 is provided along the Y direction. The sub-transport mechanism 35 of the main transport mechanism 32 is provided in the Y-direction guide rail 34 so as to be movable in the Y direction. The sub transport mechanism 35 accommodates the rear substrate 54 in the upper portion, and is under The part accommodates the resin material R. The sub transport mechanism 35 is moved back and forth between the standby position of the X-direction guide rail 33 in contact with one of the forming modules M and the upper side of the cavity CAV in the lower mold 5. The sub-transport mechanism 35 is a cavity CAV that supplies the rear substrate 54 to the lower surface of the upper mold 4 and supplies the resin material R to the lower mold 5.

In the present embodiment, the transport mechanism including the main transport mechanism 32 and the sub transport mechanism 35 transports the rear substrate 54 and the semiconductor wafer (not shown) that is mounted on the rear substrate 54 with resin. Both of the formed molded articles are sealed with the substrate 55. According to this configuration, the transport mechanism including the main transport mechanism 32 and the sub transport mechanism 35 also serves as the transport mechanism and the transport mechanism, and the configuration of the resin sealing device 1 is simplified.

The delivery module B has a molded product transfer mechanism 56 that transports the sealed substrate 55, and a cassette 57 that houses the sealed substrate 55. Further, the payment module B has a vacuum pump 58. The vacuum pump 58 is a reduced pressure source for decompressing the space including the cavity CAV. The vacuum pump 58 can be used as a decompression source for adsorbing the sealed substrate 54, the sealed substrate 55, and the like, for the entire resin sealing device 1. The vacuum pump 58 may be disposed in the material receiving module A or may be disposed in each forming module M.

According to the embodiment, the adjacent forming modules M of the four forming modules M can be mounted to each other and separated from each other. Thereby, the forming module M can be increased as the demand increases, and the forming module M can be reduced as the demand is reduced. For example, when the demand for a region-specific product set up in the factory Fa is increased, the molding module for the production of the specific product is separated from the resin sealing device 1 of the factory Fb installed in the region where the demand is not increased. M (remove the forming module M). The separated forming module M is transported to the factory Fa, and the forming module M to be transported is added to the resin sealing device 1 of the factory Fa. By this, In response to the increased demand in the establishment of the factory Fa. Therefore, according to the present embodiment, the resin sealing device 1 which can elastically correspond to the increase or decrease of the demand can be realized.

The following modification can be employed as the resin sealing device 1. In the first modification, the integrated material receiving module A and the payout module B are disposed at one end of the resin sealing device 1 (the left end or the right end in FIG. 7). . In this case, since one molding module M is exposed at the other end of the resin sealing device 1 (right end or left end in FIG. 7), it is easy to mount and separate the forming modules M from each other.

In the second modification, the integrated material receiving module A and a forming module M are disposed at one end of the resin sealing device 1 (the left end or the right end in FIG. 7). In this case, a forming module M is assembled in the receiving/forming die or a plurality of forming modules M are sequentially installed. The delivery module B is attached to the molding module M located at the other end of the resin sealing device 1 (right end or left end in FIG. 7) to constitute the resin sealing device 1.

According to the third modification, in the resin sealing device 1, the main transport mechanism 32 and the sub transport mechanism 35 are combined as a carry-in mechanism, and a carry-out mechanism different from the carry-in mechanism is included. In this case, since the loading mechanism and the unloading mechanism operate independently, the efficiency of the molding operation is increased in the resin sealing device 1.

The present invention is not limited to the above-described modifications, and may be configured such that adjacent molding modules M can be mounted to each other and separated from each other. The present invention can be applied to the resin sealing device 1 configured as described above.

The contents described below apply in common to the embodiments that have been described so far. As the material of the mold, a metal material such as tool steel is used. Not limited to this, such as ceramic materials, glass materials, etc., according to the use of the mold, The most suitable material such as the material of the molded article. Further, as a material of the mold, a composite material obtained by forming a film of a ceramic material on the surface of a metal material, a ceramic material, or a glass material can be used.

The type of the mold is not limited to a molding die for resin sealing, and includes a molding die (resin molding die) for plastic used for molding a general plastic product. Regarding the manner of resin molding, at least the method of using two opposing molds is included. The above-described methods are, for example, injection molding, compression molding, transfer molding, blow molding, and the like. Regarding the manner in which the resin is molded, a method of using one mold is included. The above-described method is, for example, vacuum forming (forming of a softened thermoplastic plastic sheet, a thermoplastic plastic sheet, or the like to the surface of one mold).

In addition to the resin molding die, a stamping die, a casting die, a die-casting die, a forging die, an extrusion die, and the like are included. Regarding a mold other than the resin molding die, for example, the press die includes a pair of opposing molds, in other words, a group of mold builders. Regarding a mold other than the resin molding die, for example, an extrusion die for extrusion processing of aluminum or the like is a mold including one mold. In this case, one mold is equivalent to a set of molds.

In addition to the mold, the jigs and tools used in the manufacturing apparatus are included in the replaceable components. As a first example of these jigs and tools, a table (stage) for cutting a cutting device (dicing machine) used in a semiconductor manufacturing process, which is a fixed object to be cut, is exemplified. Fixed fixture.

As a second example, a table (stage) provided in various processing apparatuses, which is a fixed jig for fixing a workpiece (including a cut object, the same below), is exemplified.

As a third example, a fixed jig (clamp, mounting tool, etc.) which is fixed to a workpiece to be used in a machine tool used for machining can be cited. According to the previous The technique of the bar code label itself deteriorates due to the adhesion of the cutting oil sprayed during the processing of the workpiece, the generated chips, and the like. On the other hand, in the present embodiment, by blowing a high-pressure gas such as compressed air to the information forming surface 9a of the fixed jig, the degree of influence of cutting oil, chips, and the like on the information forming surface 9a can be reduced. Thereby, the information (first information) of the specific fixture can be stably read.

As a fourth example, a tool used for processing a workpiece in various processing apparatuses can be cited. The tool includes a cutter, a rotary knife, an abrasive sheet, and the like.

In the above four examples, the bar code label itself has deteriorated due to the adhesion of the cutting water, the cutting fluid, the generated chips, and the like which are ejected when the workpiece is processed by the prior art. Due to the influence of cutting water and the like, the reliability of the RFID tag is degraded. On the other hand, in the present embodiment, by blowing a high-pressure gas such as compressed air to the information forming surface 9a of the exchangeable unit, the degree of influence of cutting water, chips, and the like on the information forming surface 9a can be reduced. Thereby, the information (first information) of the specific exchangeable component can be stably read.

The article manufactured by the article manufacturing apparatus includes a finished product produced by resin molding processing, press working, machining, or the like. Further, regarding the manufactured article, the semi-finished product of the sealed substrate as in the above embodiment is contained.

As the fine pattern formed on the information forming surface 9a of the marker 9, a fine pattern formed by the following processing can be used in addition to the fine pattern formed by electroforming. The first process is machining. Regarding machining, in addition to cutting (including vibration machining), blast processing, waterjet processing, and the like are included.

The second process is laser processing. The type of laser is not particularly limited. The most suitable laser according to the material being processed (the material constituting the marking 9) is used.

The third process is an etching process. Regarding the etching process, both wet etching and dry etching are included.

The fourth process is the process of attaching the film to the surface of the mark. The processing for attaching the film includes screen printing, inkjet printing, painting, and the like. In this case, as the material constituting the film, a material having characteristics of high hardness, chemical resistance, heat resistance, and the like is preferably used. In the case of using these materials, it is difficult to remove the film from the surface of the mark. Therefore, information can be obtained from the identification 9 of the replaceable component over a long period of time.

The fifth processing is processing using a so-called three-dimensional printer such as a laminate forming method represented by a light forming method, a cutting forming method, or the like. By such a three-dimensional forming method, a fine pattern can be formed on the surface of the mark.

A mark 9 having a sheet shape, a thin plate shape, or the like which is formed by the above-described processing is adhered to the surface of the mold. The marker 9 can also be fixed to the surface of the mold by mechanical means such as screwing. The above-described processing can also be used to form a fine pattern directly on the surface of the replaceable component.

Further, the replaceable component itself having the mark 9 can also be produced using the above-described processing. It is also possible to use the various processes described above to fabricate the constituent elements included in the replaceable component and to be the constituent elements having the mark 9 (for example, a cavity block, a gate piece, or the like in a resin molding die).

As the fine pattern, an existing code such as a bar code or a matrix type two-dimensional bar code can be used. A fine pattern which is appropriately set by a manufacturer, a user, or the like of the manufacturing apparatus can also be used. For example, if the unevenness of the fine pattern corresponds to "0" and "1" (or "1" and "0"), the information of 1 byte (8 bits) can be displayed by 8 consecutive embossments. . Making the unevenness of the fine pattern correspond to The long and short points (or short and long) of the Moss password can be displayed by the Morse code. The Moss code itself can also be formed in a replaceable component. Others, for example, the number of dots constituting one of the bar codes or the number of dots constituting one of the two-dimensional bar codes as an appropriate number of concave or convex The meaning of the number of these concave or convex.

As the fine pattern, in addition to the irregularities processed by the microfabrication, the sample body and the image itself processed by the microfabrication may be used. For example, the information corresponding to a plurality of types of patterns, images, and the like is given first, and the corresponding information can be read by recognizing the patterns, images, and the like.

The sample body and the image itself processed by the microfabrication include a manufacturer, a vendor, and a provider of labor for the exchangeable component, etc. (hereinafter referred to as "replaceable component" The pattern, image, text, etc. of the source. As the patterns, images, characters, and the like of the fine pattern, a logo having a function for displaying the origin of the replaceable component, such as a trade name of a company name or the like (including a registered trademark) may be used. A label having a function of displaying the origin of the replaceable component may also be included in the fine pattern.

Further, according to the present invention, the following embodiments may be employed. According to this embodiment, the information of the specific exchangeable component is obtained from the identification of the replaceable component as the first information. Based on the history information (second information) of the exchangeable component obtained from the first information, in other words, the history information of the exchangeable component obtained based on the first information, the history of the manufactured article can be tracked (for example, manufacturing date, item, item) Batch number, manufacturing equipment used for manufacturing, and replaceable components, etc.). Information on the history of articles that have been manufactured using the replaceable component (item history information; third information) is stored in a user, for example, for management by the resin sealing device 1 or the forming die 6 The memory unit ME (see FIG. 1A and FIG. 1B) included in the memory unit of the servo unit of the resin sealing device 1 (see FIG. 1A and FIG. 1B). According to the embodiment, for example, a user who manufactures the device or the replaceable component can use the history information (replaceable component history information; second information) obtained from the identifier of the replaceable component as the derivation display. The information of the item history information (third information) of the traceability of the article manufactured by the interchangeable component is used.

The present invention is not limited to the contents of the above-described embodiments, and may be arbitrarily and appropriately changed as needed, without departing from the scope of the present invention.

Claims (24)

An apparatus for manufacturing an article, comprising: at least one replaceable component included in a manufacturing apparatus of the article, which is replaced according to the type of the article manufactured from the material; the marker is disposed on the replaceable component; the pattern is formed The reading unit optically reads the pattern; the interpretation unit acquires first information including information specific to the replaceable component based on the read pattern; and the control unit is based on the The second information including the information of the specific changeable component is controlled to control the operation of the manufacturing device; and the determining unit compares the first information and the second information to determine; wherein the control unit is based on the result of the discriminating, When the changeable component is suitable for the second information, the control device is controlled to operate the manufacturing device, and the control unit controls the manufacturing when the replaceable component is unsuitable for the second information based on the result of the determination. The device causes the manufacturing device to display the following: the replaceable component described above is for the second The above-mentioned pattern formed on the above-mentioned mark includes a pattern formed by processing; the above-mentioned processing includes machining, laser processing, etching processing, processing for attaching the film to the surface of the mark, or processing using a three-dimensional printer The above machining includes cutting, blast processing or waterjet processing; And using at least one of the determination as to whether the replaceable component is suitable or not, and the determination as to whether the replaceable component is a maintenance-maintained product, the second information is used. An apparatus for manufacturing an article, comprising: at least one replaceable component included in a manufacturing apparatus of the article, which is replaced according to the type of the article manufactured from the material; the marker is disposed on the replaceable component; the pattern is formed The reading unit optically reads the pattern; the interpretation unit acquires first information including information specific to the replaceable component based on the read pattern; and the control unit is based on the The second information including the information of the specific changeable component is controlled to control the operation of the manufacturing device; and the determining unit compares the first information and the second information to determine; wherein the control unit is based on the result of the discriminating, When the changeable component is suitable for the second information, the control device is controlled to operate the manufacturing device, and the control unit controls the manufacturing when the replaceable component is unsuitable for the second information based on the result of the determination. The device causes the manufacturing device to display the following: the replaceable component described above is for the second News unsuitable; the pattern formed in the identifier, including a pattern formed by machining; The above processing includes machining, laser processing, etching processing, processing of adhering the film to the surface of the mark, or processing using a three-dimensional printer including cutting, blasting or waterjet processing. And tracking information about the course of the articles manufactured using the replaceable components described above based on the second information described above. The apparatus for manufacturing an article according to claim 1 or 2, wherein the control unit controls the manufacturing device to control the manufacturing device when the replaceable component is unsuitable for the second information based on the result of the determination No action. The apparatus for manufacturing an article according to claim 3, wherein the control unit controls the manufacturing device to prevent the manufacturing device from operating, and controls the manufacturing device to operate the manufacturing device in accordance with the received signal. The manufacturing apparatus of the article of claim 1 or 2, wherein the replaceable component comprises a single replaceable component or a plurality of replaceable components; and the respective one of the plurality of replaceable components or the plurality of replaceable components The indicator is provided at the predetermined position, and the reading unit includes a light receiving unit, a light guiding unit, and an image capturing unit, and at least the light receiving unit is provided corresponding to the predetermined position. The manufacturing apparatus of the article of claim 1 or 2, wherein the replaceable component comprises a single replaceable component or a plurality of replaceable components; and the respective one of the plurality of replaceable components or the plurality of replaceable components The above location is provided at the established location; The reading unit includes a light receiving unit, a light guiding unit, and an image capturing unit; and at least the light receiving unit is moved, and the light receiving unit is commonly used for the single interchangeable unit or the plurality of replaceable units. The apparatus for manufacturing an article according to claim 6, wherein at least the light receiving unit is provided in a transport mechanism, and the transport mechanism has a function of supplying the material to the replaceable unit and the article is replaceable from the above At least one of the functions of the component being carried out; and the light receiving unit is moved to the predetermined position by the transport mechanism. The apparatus for manufacturing an article according to claim 5, wherein the image acquisition unit is disposed at a position away from the single interchangeable component or the plurality of replaceable components; and the light receiving unit and the image acquisition unit are It is optically connected by the above-described light guiding portion. The manufacturing apparatus of the article of claim 1 or 2, wherein the replaceable component comprises a single mold or a plurality of molds. The manufacturing apparatus of the article of claim 1 or 2, wherein the replaceable component has at least a first mold and a second mold opposite to the first mold; and a driving mechanism, at least the first The mold moves relative to the second mold described above. The manufacturing apparatus of the article of claim 1 or 2, comprising: a replaceable component module provided with at least the replaceable component; and a receiving module for receiving the material; wherein the replaceable component module , detachable with respect to the receiving module; and The above replaceable component module is detachable with respect to other replaceable component modules. A manufacturing apparatus for an article according to claim 1 or 2, comprising the above-described mark constituted by another component in which the above-described pattern is formed, wherein the other component is fixed to the replaceable component. A method of manufacturing an article by manufacturing a article by using a manufacturing device, comprising: preparing at least one replaceable component, wherein the at least one replaceable component is included in the manufacturing device, according to the manufacturing The type of the article is replaced; the step of preparing the mark, the mark being provided on the replaceable component; the step of optically reading the pattern previously formed on the mark using the reading portion; and based on the read pattern The step of obtaining the first information, wherein the first information includes information of the specific replaceable component; and the step of reading the second information that has been pre-memorized and includes at least information of the specific replaceable component; comparing the first information with the foregoing a step of discriminating based on the second information; and, based on the result of the discriminating, the step of controlling the manufacturing device to operate the manufacturing device when the replaceable component is suitable for the second information; and based on the result of the discriminating, the changeable When the component is unsuitable for the second information, the above-mentioned manufacturing device is controlled to make the above system The device displays the following steps: the replaceable component is unsuitable for the second information; the step of preparing the logo is to prepare the logo including the pattern formed by the processing; the processing includes machining, laser processing, etching Processing, film adhesion For the processing of the surface of the mark or the processing using a three-dimensional printer, the above-mentioned machining includes cutting, spraying or water spraying; and the step of discriminating in the above, determining whether the replaceable component is suitable or not And using the second information described above with respect to at least one of the determination that the replaceable component is a maintenance-maintained product. A method of manufacturing an article by manufacturing a article by using a manufacturing device, comprising: preparing at least one replaceable component, wherein the at least one replaceable component is included in the manufacturing device, according to the manufacturing The type of the article is replaced; the step of preparing the mark, the mark being provided on the replaceable component; the step of optically reading the pattern previously formed on the mark using the reading portion; and based on the read pattern The step of obtaining the first information, wherein the first information includes information of the specific replaceable component; and the step of reading the second information that has been pre-memorized and includes at least information of the specific replaceable component; comparing the first information with the foregoing a step of discriminating based on the second information; and, based on the result of the discriminating, the step of controlling the manufacturing device to operate the manufacturing device when the replaceable component is suitable for the second information; and based on the result of the discriminating, the changeable When the component is unsuitable for the second information, the above-mentioned manufacturing device is controlled to make the above system Device displays the following steps: the above-described assembly to said second transducer may be unsuitable information; in the step of preparing the marker is prepared containing the identification of a pattern formed by machining; The above processing includes machining, laser processing, etching processing, processing of adhering the film to the surface of the mark, or processing using a three-dimensional printer, the machining including cutting, squirting or water jet processing; and based on the second Information that tracks information about the history of the items manufactured using the interchangeable components described above. The method for manufacturing an article according to claim 13 or claim 14, wherein, when the changeable component is unsuitable for the second information based on the result of the discrimination, controlling the manufacturing device to prevent the manufacturing device from operating step. The method for producing an article according to claim 15 includes the step of controlling the manufacturing device to operate the manufacturing device in accordance with the received signal after controlling the manufacturing device to prevent the manufacturing device from operating. The method for manufacturing an article according to claim 13 or claim 14, further comprising: a step of preparing a light receiving unit, a light guiding unit, and an image obtaining unit in the reading unit; wherein the replaceable component comprises a single replaceable component or plural a replaceable component; wherein said identifier is provided at a respective predetermined position of said single replaceable component or said plurality of replaceable components; and said step of optically reading said pattern is provided separately for said single replaceable component Or the light receiving unit of the plurality of replaceable components reads the first information. The method of manufacturing an article according to claim 13 or claim 14, further comprising: a step of preparing a light receiving unit, a light guiding unit, and an image obtaining unit in the reading unit; wherein the replaceable component is a single replaceable component or plural a replaceable component; wherein said identifier is provided at a respective predetermined position of said single replaceable component or said plurality of replaceable components; and said step of optically reading said pattern is performed by using said common replaceable component Or the light receiving unit of the plurality of replaceable components reads the first information. The method of manufacturing an article according to claim 18, wherein the step of preparing the light receiving unit, the light guiding unit, and the image obtaining unit has a position away from the single replaceable component or the plurality of replaceable components. a step of preparing the image acquisition unit; and a step of preparing the light receiving unit by the transport mechanism, wherein the transport mechanism has at least one of a function of supplying a material to the replaceable unit and a function of moving the item from the replaceable unit And a step of preparing the light guiding unit, wherein the light guiding unit optically connects the light receiving unit and the image capturing unit; wherein the step of optically reading the pattern is performed by moving the transport mechanism to cause the light receiving unit The part moves to the above-mentioned predetermined position. The method of manufacturing an article according to claim 17, wherein the step of preparing the light receiving unit, the light guiding unit, and the image obtaining unit has a position away from the single replaceable component or the plurality of replaceable components. a step of preparing the image acquisition unit; and a step of preparing the light guide unit, wherein the light guide unit optically connects the light receiving unit and the image acquisition unit. A method of manufacturing an article according to claim 13 or claim 14, comprising the step of preparing a single mold or a plurality of dies included in the above-mentioned replaceable component. The method of manufacturing an article according to claim 13 or claim 14, comprising: preparing a first mold included in the replaceable component, and a second mold included in the replaceable component and facing the first mold And a step of controlling the driving mechanism, the driving mechanism relatively moving at least the first mold and the second mold. The method for manufacturing an article according to claim 13 or 14, comprising the steps of: preparing a replaceable component module and a receiving module, wherein the replaceable component module is provided with at least the replaceable component, and the receiving module Receiving the above materials; wherein the replaceable component module is detachable with respect to the receiving module; and the replaceable component module is detachable with respect to other replaceable component modules. The method of manufacturing an article according to claim 13 or claim 14, wherein the step of preparing the above-mentioned mark is to prepare the mark formed of another component fixed to the replaceable component.